Wavefront manipulator, arrangement for light sheet microscopy and method for compensating for an imaging error in the detection beam path of an arrangement for light sheet microscopy
Patent Information
- Application Number
- DE102023126948
- Authority / Receiving Office
- DE · DE
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-10-04
- Publication Date
- 2025-04-10
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Abstract
Description
The present disclosure relates to a wavefront manipulator having at least two wavefront manipulator elements and an actuator system acting on at least one of the wavefront manipulator elements. In addition, the disclosure relates to an arrangement for light sheet microscopy and to a method for compensating an imaging error in the detection beam path of an arrangement for light sheet microscopyThe function and the basic arrangement for selective plane illumination microscopy (abbreviated to SPIM) on three-dimensionally extended sample volumes are described for a fixed sample refractive index (e.g. water or aqueous salt solution having a refractive index of approximately n=1.33) and for a solid immersion medium (e.g. pure water having n=1.33), for example in WO 2015 / 155027 A1 and in DE 10 2013 107 297 A1.An arrangement for light sheet microscopy with applicability to samples in surrounding immersion media of different refractive indices, and varying thickness of a separating layer (e.g. a cover glass), is described in DE 10 2020 211 148 A1. The arrangement for light sheet microscopy described in DE 10 2020 211 148 A1 contains at least two wavefront manipulators, each of which consists of at least two wavefront manipulator elements that are displaceable relative to one another substantially perpendicular to the primary optical axis of the detection objective, wherein each of the wavefront manipulator elements has at least one free-form surface. By means of the two wavefront manipulators, a) aberrations caused by the respective refractive index of the sample or of the surrounding immersion medium can be compensated for and b) aberrations caused by the respective thickness of a separating layer (in particular of a cover glass) can be compensated for. In order to compensate for imaging errors in the case of observations of samples at different refractive indices and at different thicknesses of the separating layer, DE 10 2020 211 148 A1 thus requires two wavefront manipulators having a total of four wavefront manipulator elements.Proceeding from this prior art, it is a first object of the present invention to provide a wavefront manipulator for correcting aberrations, in which only two mutually displaceable wavefront manipulator elements are sufficient to bring about a simultaneous adaptation of the correction to different combinations of two parameter values causing aberrations, for example to different combinations of refractive indices of immersion media and thicknesses of a separating layer (for example of a cover glass).A second object of the present invention is to provide an arrangement for light sheet microscopy in which an adaptation of the correction of imaging errors to immersion media having different refractive indices and to different thickness of a separating layer (e.g. a cover glass) is possible with only a single wavefront manipulator.Finally, it is a third object of the present invention to provide a method for compensating an imaging error in the detection beam path of an arrangement for light sheet microscopy, which makes it possible to adapt the correction of imaging errors to immersion media having different refractive indices and to different thickness of a separating layer (e.g. a cover glass) using a single wavefront manipulator.The first object is achieved by a wavefront manipulator according to claim 1, the second object by an arrangement for light sheet microscopy according to claim 9 and the third object by a method according to claim 15.According to a first aspect of the invention, a wavefront manipulator is provided which comprises a first wavefront manipulator element having at least one first free-form surface and a second wavefront manipulator element having at least one second free-form surface. In addition, the wavefront manipulator includes an actuator system acting on at least one of the wavefront manipulator elements and having at least one actuator. The actuator system is configured such that it enables a relative displacement between the first and the second wavefront manipulator element to be brought about both along a first direction and along a second direction which is not parallel to the first direction. A straight line along which a back and forth movement takes place is to be considered as a direction in this case.The free-form surfaces can each be represented by a z coordinate, which is described by a polynomial development of the form as a function of an x coordinate perpendicular to the z coordinate and a y coordinate perpendicular to the z coordinate, wherein the polynomial development of the free-form surfaces has coefficients Cm,nwhich differ from zero both for x m y n- terms with an even power m and for x m y n- terms with an odd power m and both for x m y n- terms with an even power n and for x m y n- terms with an odd power n. This also applies in particular to terms in which both m and n are each greater than zero. In other words, the free-form surfaces of the two wavefront manipulator elements have different curvature profiles in the two non-parallel directions, with the result that there is no longer any mirror symmetry with respect to any plane.A wavefront manipulator according to the invention makes it possible to bring about a simultaneous adaptation of the correction to different combinations of two parameter values causing imaging errors using only one wavefront manipulator, for example to different combinations of refractive indices of immersion media and thicknesses of a separating layer (for example a cover glass) in an arrangement for light sheet microscopy. In contrast, in the prior art, two wavefront manipulators are used, each of which has two wavefront manipulator elements with free-form surfaces. The reduction according to the invention to only a single wavefront manipulator is possible in that, in contrast to the prior art in which the free-form surfaces have mirror symmetry with respect to the meridional plane, any symmetry is dispensed with in the free-form surfaces used in the context of the present invention.It has been found that when using wavefront manipulator elements with general free-form surfaces without any residual symmetry, a sufficient correction of imaging errors is possible with only one wavefront manipulator, which are due to different combinations of two parameter values causing imaging errors, if there is the possibility of a relative displacement between the wavefront manipulator elements in two mutually independent, non-parallel (preferably orthogonal) directions which are each substantially perpendicular to the primary axis of the wavefront manipulator. Due to the reduction in the number of free-form surfaces, fewer production tools and testing means for surface forms, such as computer-generated holograms (CGHs), are required together with fizeau interferometers, which reduces the production costs compared to the prior art. In addition, the imaging errors caused by manufacturing tolerances of free-form surfaces add up, which is why the reduction of the number of free-form surfaces enables smaller residual errors while maintaining the previous manufacturing tolerances or permits less severe manufacturing tolerances while maintaining the previous residual errors and thus enables a reduction of the manufacturing costs. In addition, in an arrangement for light sheet microscopy, the overall length of the objective in the detection system can be reduced because of the omission of the second wavefront manipulator.The actuator system can comprise at least one first actuator arrangement which acts on the first wavefront manipulator element and / or at least one second actuator arrangement which acts on the second wavefront manipulator element. If the actuator system comprises at least one first actuator arrangement which acts on the first wavefront manipulator element and at least one second actuator arrangement which acts on the second wavefront manipulator element, the relative displacement between the first and the second wavefront manipulator element can be divided into two displacements, namely a displacement of the first wavefront manipulator element and a displacement of the second wavefront manipulator element. This division makes it possible, for example, to shift the first wavefront manipulator element and the second wavefront manipulator element in opposite directions along a straight line, as a result of which the distribution of the residual aberrations remains symmetrical about the optical axis of the imaging system. In addition, the displacement paths of the individual wavefront manipulator elements can be kept smaller than if the entire displacement had to be realized by a single wavefront manipulator element. Alternatively to the movement in opposite directions along a straight line, it is also possible to shift the one wavefront manipulator element along a first straight line and the second wavefront manipulator element along a second straight line which does not run parallel to the first straight line and can in particular run perpendicular to the first straight line. In addition, it is possible to arrange only one of the wavefront manipulator elements displaceably and arrange the other wavefront manipulator element in a fixed position. Dispensing with the opposite displacement means dispensing with the symmetry of the distribution of the residual aberrations about the optical axis, but for this purpose makes possible a structurally simpler configuration of the actuator system. In particular, when only small shift distances are required for correcting the aberrations, the asymmetry of the distribution of the residual aberrations remains small and hardly affects the image quality.If the first actuator arrangement comprises at least one first actuator which enables displacement of the first wavefront manipulator element in the first direction and at least one second actuator which enables displacement of the first wavefront manipulator element in the second direction, it is thereby possible to displace the first wavefront manipulator element in two mutually non-parallel directions. As a result, the relative displacement between the first and the second wavefront manipulator element both along a first direction and along a second direction which is not parallel to the first direction can be brought about solely by the first wavefront manipulator element. If, instead of the first actuator arrangement, the second actuator arrangement comprises at least one first actuator which enables displacement of the second wavefront manipulator element in the first direction and at least one second actuator which enables displacement of the second wavefront manipulator element in the second direction, the relative displacement between the first and the second wavefront manipulator element both along a first direction and along a second direction which is not parallel to the first direction can be brought about solely by the second wavefront manipulator element. It is particularly advantageous if both the first actuator arrangement and the second actuator arrangement each comprise at least one first actuator which enables displacement of the respective wavefront manipulator element in the first direction and at least one second actuator which enables displacement of the respective wavefront manipulator element in the second direction. This is because the relative displacement between the first and the second wavefront manipulator element can then be divided between the two wavefront manipulator elements both along a first direction and along a second direction which is not parallel to the first direction, as a result of which, as mentioned above, it is possible to keep the distribution of the residual aberrations symmetrical about the optical axis of the imaging system. In particular, if only small travel distances are necessary in one direction, it may however be sufficient to shift only one of the wavefront manipulator elements in the corresponding direction in this direction and to keep the other wavefront manipulator element stationary. In this way, although the symmetry of the distribution of the residual imaging errors about the optical axis is lost, the actuator arrangements of the actuator system manage with a smaller number of actuators. Since only small travels are necessary, there is also only a slight asymmetry in the distribution of the residual imaging errors about the optical axis, which hardly impairs the imaging quality and can therefore be accepted in favor of the lower complexity of the system.It is also possible to provide only one displacement of one of the two wavefront manipulator elements in one direction, wherein the other wavefront manipulator element remains stationary along this direction and to provide opposite displacements of the wavefront manipulator elements in the other, non-parallel direction. Typically, only one of the two wavefront manipulator elements is displaced in the direction in which the shorter adjustment path is required. For this purpose, for example, the first actuator arrangement can enable displacement of the first wavefront manipulator element both in the first direction and in the second direction, and the second actuator arrangement can enable displacement of the second wavefront manipulator element only in a single one of the first direction and the second direction. Alternatively, the first actuator arrangement can only enable displacement of the first wavefront manipulator element in a single one of the first direction and the second direction, and the second actuator arrangement can enable displacement of the second wavefront manipulator element both in the first direction and in the second direction. Of course, it is also possible to provide no opposite displacement of the wavefront manipulator elements in either direction. In other words, the current system can be configured such that the first actuator arrangement enables displacement of the first wavefront manipulator element only in the first direction and the second actuator arrangement enables displacement of the first wavefront manipulator element only in the second direction. In this embodiment as well, the relative displacement can be brought about with a small number of actuators.The free-form surfaces of the wavefront manipulator elements can have identical surface formers and can be arranged with respect to one another in such a way that a relative displacement can be realized in which the wavefront manipulator has a zero effect. However, it is also possible for the free-form surfaces of the wavefront manipulator elements to have different surface formers, with the result that it is not possible to realize a relative displacement in which the wavefront manipulator has a zero effect. In particular, the configuration such that the free-form surfaces of the wavefront manipulator elements have different surface formers makes it possible to individually optimize the free-form surfaces of the wavefront manipulator elements in each case such that correction of the imaging errors can take place solely by displacing one of the two wavefront elements, while the other wavefront manipulator element remains stationary.According to a second aspect of the invention, an arrangement for selective plane illumination microscopy (SPIM) is provided. The arrangement for light sheet microscopy includes an illumination system, a detection system and a separation layer system.The separating layer system comprises at least one separating layer extending along a separating layer plane and made of a specific material and having a specific thickness. The separation layer has a sample side and an environment side, and separates a sample located on the sample side in a sample medium from an environment medium located on the environment side. On the surrounding side of the separating layer there is an immersion medium. It is advantageous if the immersion medium has a refractive index which deviates from the refractive index of the sample medium by not more than a value of 0.05, typically by not more than a value of 0.01 and preferably by not more than a value of 0.002. It is particularly advantageous if the immersion medium and the sample medium are identical.The illumination system has an illumination direction running at a first non-zero angle to the normal of the separating layer plane and a beam shaping system for generating a light sheet in the sample (selective plane illumination), wherein the light sheet extends along a light sheet plane in which the illumination direction also lies.The detection system has an observation direction running at a second non-zero angle to the normal of the separating layer plane for observing fluorescent light emanating from the light sheet in the sample. Ideally, the second angle is selected such that the observation direction is perpendicular to the light sheet plane. The detection system preferably has a numerical aperture of at least 0.7, in particular a numerical aperture of at least 0.8 or a numerical aperture of at least 0.9 and ideally a numerical aperture of at least 0.95.Aberrations occur in the detection system, which depend on the thickness of the separating layer and the jump in refractive index between the separating layer and the sample medium for a given first angle and a given second angle. The detection system has a wavefront manipulator according to the invention, which can be brought into different configurations by different relative displacements between the first and the second wavefront manipulator element. The free-form surfaces of the wavefront manipulator elements are optimized in this case to the effect that different configurations of the wavefront manipulator compensate for imaging errors for different combinations of thickness of the separating layer and jump in refractive index between the separating layer and the sample medium.In the arrangement for light sheet microscopy according to the invention, the detection system can be adapted to a plurality of different combinations of thickness of the separating layer and jump in refractive index between the separating layer and the sample medium with the aid of a single wavefront manipulator, such that imaging errors which are attributable to the respective combination of thickness of the separating layer and jump in refractive index between the separating layer and the sample medium can be compensated. Because this can be achieved with only a single wavefront manipulator, the manufacturing effort of the detection system and the overall length of the detection system can be reduced. Since the imaging errors attributable to the thickness of the separating layer and the jump in refractive index between the separating layer and the sample medium are particularly large, in particular in detection systems with high numerical apparatuses, and must therefore necessarily be compensated for, the advantages of the arrangement according to the invention for light sheet microscopy are evident in particular when the detection system has a high to very high numerical apparatus, that is to say, for example, a numerical aperture greater than 0.7 or greater than 0.8 or greater than 0.9 or in particular greater than 0.95.The separating layer can be, for example, a cover glass, which usually has a refractive index of approximately 1.50. As sample media, and optionally as immersion media, media with refractive indices between 1.33 (pure water) and 1.54 (typical immersion oils) are typically used. As a result, refractive index jumps of between approximately 0.17 and -0.04 are produced at the transition between the separating layer and the sample medium or the immersion medium. Changes in the refractive index over a range of 0.21 must therefore be compensated in comparison with a mean value for which the objective is designed. If changes in the refractive index are to be compensated over a range of more than approximately 0.1 in comparison with a mean value for which the objective is designed, it is advantageous if the detection system also comprises at least one rotationally symmetrical lens which is displaceable along its optical axis. Thereby, the correction of the field coma and the field astigmatism can be improved. It is particularly advantageous if the at least one rotationally symmetrical lens that is displaceable along its optical axis is arranged in a region of the detection system in which beams (field beams) emanating from different object points of the sample do not overlap, or overlap only slightly.According to a third aspect of the invention, a method for compensating an imaging error in the detection beam path is provided for an arrangement according to the invention for light sheet microscopy. The aberration is due to a specific thickness of the separating layer and a specific jump in refractive index between the separating layer and the sample medium. The compensation of the imaging error is effected by bringing the wavefront manipulator into a configuration associated with the specific thickness of the separating layer and the specific jump in refractive index between the separating layer and the sample medium by adjusting the relative displacement between the first and the second wavefront manipulator element.In a first embodiment of the method, the wavefront manipulator is brought into the configuration associated with the specific thickness of the separating layer and the specific jump in refractive index between the separating layer and the sample medium on the basis of an optimization process in which the configuration of the wavefront manipulator is changed by changing the relative displacement between the first and the second wavefront manipulator element, wherein a measure for the imaging error is determined during the changing of the configuration. The changing of the configuration and the determination of the measure are continued until an abort condition of the optimization process is fulfilled. In this embodiment of the method, which can be carried out in a fully automated manner, an optimized setting of a suitable configuration of the wavefront manipulator can be carried out without knowledge of the thickness of the separating layer and / or without knowledge of the jump in refractive index.If the specific thickness of the separating layer and the specific jump in refractive index are known, in an alternative embodiment of the method, the wavefront manipulator can be brought into the configuration assigned to the specific thickness of the separating layer and the specific jump in refractive index between the separating layer and the sample medium by taking the configuration from an assignment in which configurations of the wavefront manipulator are assigned to different combinations of thicknesses of the separating layer and jumps in refractive index, and the configuration taken from the assignment for the specific thickness of the separating layer and the specific jump in refractive index is set on the wavefront manipulator. The assignment can be given, for example, as a look-up table or as a functional relationship and can be stored in a data processing system, so that the setting of the configuration of the wavefront manipulator can be carried out fully automatically after input of the (known) determined thickness of the separating layer and of the (known) determined jump in refractive index.The two described embodiments of the method can also be combined with one another. The wavefront manipulator is brought into the configuration assigned to the specific thickness of the separating layer and the specific jump in refractive index between the separating layer and the sample medium by taking an approximate starting configuration of the assignment, i.e. for example a look-up table or a functional relationship, and setting the configuration taken from the assignment for the specific thickness of the separating layer and the specific jump in refractive index on the wavefront manipulator as the starting configuration. The wavefront manipulator is then brought into the configuration associated with the specific thickness of the separating layer and the specific jump in refractive index between the separating layer and the sample medium on the basis of an optimization process in which the configuration of the wavefront manipulator is changed starting from the initial configuration by changing the relative displacement between the first and the second wavefront manipulator element, wherein a measure for the aberration is determined during the changing of the configuration and the changing of the configuration is continued until an abort condition of the optimization process is reached. By selecting an appropriate output configuration from the look-up table, the time required for optimization can be reduced.The termination condition of the optimization process can include, for example, that at least one of the following conditions applies: (a) the measure for the aberration falls below a predefined limit; (b) the change of the measure for the aberration when the configuration is changed falls below a predefined limit.Further features, properties and advantages of the present invention are evident from the following description of exemplary embodiments with reference to the attached figures. FIG. 1 shows an arrangement for light sheet microscopy in a schematic illustration. FIG. 2 shows a wavefront manipulator element with an actuator system which enables displacement of the wavefront manipulator element in two directions. FIG. 3 is a side view of a wavefront manipulator in which the wavefront manipulator is in a configuration in which the wavefront manipulator elements are not relatively displaced from one another. FIG. 4 shows the wavefront manipulator of FIG. 3 in a configuration in which the wavefront manipulator elements are displaced relative to one another. FIG. 5 shows a modified wavefront manipulator in a configuration in which the wavefront manipulator elements are displaced relative to one another. FIG. 6 shows the wavefront manipulator elements of a wavefront manipulator in a configuration in which the wavefront manipulator elements are displaced with respect to one another in two directions. FIG. 7 shows an example of setting a configuration of the wavefront manipulator for compensating an imaging error in the detection beam path of an arrangement for light sheet microscopy. FIG. 8 shows an exemplary embodiment of an objective of an arrangement for light sheet microscopy with a first wavefront manipulator. FIGS. 9 to 14 show, by way of example, for three different refractive indices and two different thicknesses of a cover glass, the residual optical path length differences which can be achieved with the first wavefront manipulator in an arrangement for light sheet microscopy. FIG. 15 shows an exemplary embodiment of an objective of an arrangement for light sheet microscopy with a second wavefront manipulator. FIGS. 16 to 19 show, by way of example, for two different refractive indices and two different thicknesses of a cover glass, the residual optical path length differences which can be achieved with the second wavefront manipulator in an arrangement for light sheet microscopy. FIG. 20 shows an exemplary embodiment of an objective of an arrangement for light sheet microscopy with a third wavefront manipulator. FIGS. 21 to 24 show, by way of example, for two different refractive indices and two different thicknesses of a cover glass, the residual optical path length differences which can be achieved with the third wavefront manipulator in an arrangement for light sheet microscopy. FIG. 25 shows an exemplary embodiment of an objective of an arrangement for light sheet microscopy with a fourth wavefront manipulator. FIGS. 26 to 29 show, by way of example, for two different refractive indices and two different thicknesses of a cover glass, the residual optical path length differences which can be achieved with the fourth wavefront manipulator in an arrangement for light sheet microscopy.FIG. 1 shows an exemplary embodiment of an arrangement according to the invention for light sheet microscopy 1 in a schematic illustration. This arrangement includes an illumination system 3, a detection system 5 and a separation layer system 7.The separating layer system 7 comprises a separating layer extending along a separating layer plane 9 and made of a specific material and having a specific thickness. In the present exemplary embodiment, the separating layer is formed by a cover glass 11. The cover glass 11, i.e. the separating layer, has a sample side 13 and a surrounding side 15 and separates a sample medium 17 located on the sample side 13, in which a sample 19 is located, from a surrounding medium 21 located on the surrounding side 15. The immersion medium 21 is a liquid and can be, in particular, water or an immersion oil. In order to restrict the immersion medium 21 to a specific region, an immersion terminating lens 23 is arranged on the cover glass 11. The immersion terminating lens 23 has a hemispherical inner surface 25 and a hemispherical outer surface 27. Between the hemispherical inner surface 25 and the surrounding side 15 of the cover glass 11 there is a space in which the immersion medium 21 is located. The refractive index of the immersion medium 21 is matched as well as possible to the refractive index of the sample medium 17 in order not to generate a so-called "chromatic wedge". Since the light sheet 37 during light sheet microscopy extends obliquely to the separating layer plane 9, the medium traversed by the beam path in the interior of the sample 19 as far as the cover glass 11 has a wedge-shaped (or prism-shaped) shape, which is however just compensated by an opposite wedge-shaped portion in the beam path between the cover glass 11 and the immersion terminating lens 23. The compensation is exact if the sample medium 17 and the immersion medium 21 are identical, so that only the interference influence of the cover glass 11 itself remains (which would disappear exactly if the cover glass 11 also had the same refractive index as the sample medium 17 and the immersion medium 21). As a side effect, the higher refractive index of the immersion medium 21 compared to air makes it possible to increase the numerical aperture of the detection system 5.In the present exemplary embodiment, the immersion medium 21 is identical to the sample medium 17. The immersion medium 21 does not necessarily have to be identical to the sample medium 17. If it is not identical to the sample medium 17, it is advantageous, however, if the refractive index of the immersion medium 21 deviates from the refractive index of the sample medium by no more than a value of 0.05, typically by no more than a value of 0.01 and preferably by no more than a value of 0.002, since the two refractive indices can then be considered to be approximately the same.The illumination system 3 has a light source 41 which normally emits short-wave light, an illumination objective 4 having optical elements 33, 35 and an illumination beam path 31 which originates from the light source 41 and of which only the optical axis is drawn in FIG. 1. The light source 41 used can be, for example, the exit surface of a single-mode fiber. The optical axis of the illumination beam path 31 extends at a first angle β not equal to zero with respect to the normal of a plane 29 extending through the sample 19 parallel to the separating layer plane 9 and thus also at the same angle with respect to the normal N of the separating layer plane 9. For producing the light sheet 37 (SPI: Selective Plane Illumination) in the sample 19, which extends along a light sheet plane 39 in which the illumination direction also lies, an optical beam shaping system 42 is provided in addition to the light source 41 and the illumination objective 4, which can comprise cylindrical lenses. Typically, the light sheet 37 present in an intermediate image plane is then imaged in the sample 19 only in a reduced form by the illumination objective 4. With the aid of the light sheet 39, it is possible to selectively excite a fluorescence in a sample plane corresponding to the light sheet plane 39 in the sample 19 by means of short-wave illumination light, such that a selective fluorescence of a section defined by the sample plane, that is to say by the light sheet plane 38, can be observed through the sample 19. Two advantages are achieved by illuminating with a light sheet 37: On the one hand, the exposure of the (living) sample to the fluorescence-exciting short-wave illumination light is reduced, as a result of which it is possible at all to observe living cells, microorganisms or organoids. On the other hand, the contrast of the image increases since this is less disturbed by scattered light from other sample regions onto which the detection system 5 is not currently sharply focused during the scanning process eh.The detection system 5 comprises a detection objective 6 and a tube lens system 8 for generating an observation image and a camera 44 for recording the observation image. It has a detection beam path 43, the optical axis of which runs at a second angle α not equal to zero with respect to the normal of the plane 29 extending through the sample 19 parallel to the separating layer plane 9 and thus also with respect to the normal N of the separating layer plane 9. Of the detection beam path 43, only the optical axis is also drawn in FIG. 1. Ideally, the second angle α is selected such that the optical axis of the detection beam path 43 is perpendicular to the light sheet plane 39 and extends in the direction of the normal of the light sheet. The optical axis of the illumination beam path 31 and the optical axis of the detection beam path 43 thus enclose a right angle. The maximum permissible deviation of the optical axis of the detection beam path 43 from the normal direction of the light sheet 37 depends on the set thickness of the light sheet 37, and may usually only be a maximum of a few minutes of arc.The detection system 5 preferably has a numerical aperture of at least 0.7, in particular a numerical aperture of at least 0.8 or a numerical aperture of at least 0.9 and ideally a numerical aperture of at least 0.95. The numerical aperture may also be 1.0 or greater. Thus, for example, with an immersion oil having a refractive index of n=1.54, a numerical aperture of up to 1.10 can be achieved.Owing to the oblique passage of the detection beam path 43 through the cover glass 11, aberrations occur in the detection system 5. The size of the aberrations depends on the one hand on the thickness d of the cover glass 11 and on the other hand on the jump in refractive index on the cover glass 11. The refractive index n D of the cover glass 11 is generally well known, but the thickness d of the cover glass 11 has tolerances. The thicknesses of cover glasses are typically in the range between 0.15 and 0.19 mm. The refractive index of a cover glass 11 is typically n D= 1,52559 for a standard cover glass. The refractive index of an immersion medium is typically between n I= 1,33 for pure water and n I= 1,54 for certain immersion oils. As a result, refractive index jumps Δn between -0.04 and 0.17 or between 0.04 and -0.17 occur at the boundary between the sample medium 17 and the cover glass 11 and at the boundary between the cover glass 11 and the immersion medium 21.In particular with numerical apertures of approximately 0.7 or higher, an adjustable correction element must be present, with which the detection system 5 can be adjusted to the respective thickness of the separating layer and the respective refractive index in order to sufficiently compensate imaging errors, so that imaging with good imaging quality is achieved. In order to compensate for the aberrations based on the thickness of the cover glass 11 and the jump in refractive index, the detection system 5 therefore has, in addition to rotationally symmetrical lenses 10, 12, a wavefront manipulator 100, which is described below with reference to FIGS. 2 to 6.The wavefront manipulator 100 contains a first wavefront manipulator element 101 and a second wavefront manipulator element 103, wherein each of the two wavefront manipulator elements 101, 103 has at least one free-form surface. The free-form surfaces can each be represented by a z-coordinate which depends on x- and y-coordinates and is perpendicular to the plane spanned by the x- and y-axes, wherein the z-coordinate-dependent on the x-coordinate and the y-coordinate is described by a polynomial development of the form I. Here, x, y and z denote the three cartesian coordinates of a point lying on the surface in the local surface-related coordinate system. The coordinates x and y are to be inserted into the equation as dimensionless measures in so-called lens units. Lens units here means that all lengths are initially specified as dimensionless numbers and are later interpreted in such a way that they are continuously multiplied by the same measurement unit (nm, μm, mm, m). The background is that the geometric optics is scale invariant and, unlike wave optics, does not have a natural unit of length.In the present invention, the polynomial expansion of the free-form surfaces 105, 107 has coefficients C m,n which differ from at least zero(a) for both x m y n- terms of even power m and for x m y n- terms of odd power m, and(b) for both x m y n- terms of even power n and for x m y n- terms of odd power n.This means that the free-form surfaces 105, 107 of the two wavefront manipulator elements 101, 103 have different curvature profiles in the two non-parallel directions, such that there is no longer any mirror symmetry with respect to any plane, in particular if the conditions (a) and (b) are also fulfilled for terms in which both m and n are each greater than zero.It should be pointed out at this point that, within the scope of the present invention, a specific representation of the free-form surfaces 105, 107 is selected in a Cartesian coordinate system for describing the free-form surfaces 105. This representation of the free-form surface is not obligatory, however. The same free-form surface can also be described in other coordinate systems or other polynomial developments. For example, instead of a development according to polynomials with the terms x m y n a development according to legend polynomials can also be carried out. In addition, instead of being represented in Cartesian coordinates, the free-form surfaces 105, 107 can also be represented in other coordinates, for example in cylinder coordinates. It is always possible to transform the free-form surfaces 105, 107 indicated in a specific development and a specific coordinate system into a representation which is given by a development according to polynomial with the terms x m y n in a Cartesian coordinate system. It is important in the context of the present invention that the free-form surfaces 105, 107, after the transformation into the development according to polynomials with the terms x m y n have coefficients C m,n which differ from zero in a Cartesian coordinate system, both for x m y n- terms with an even power m and for x m y n- terms with an odd power m and / or both for x m y n- terms with an even power n and for x m yn terms with an odd power n.Within the scope of the present invention, the wavefront manipulator elements 101, 103 can be displaced relative to one another both in the x direction and in the y direction, as is indicated in FIG. 6. By different relative displacements Δx, Δy of the wavefront manipulator elements 101, 103 along the x-direction and / or along the y-direction, in conjunction with suitable free-form surfaces 105, 107, different configurations can be produced on the wavefront manipulator 100, which correct imaging errors which are based on different combinations of thickness d of the cover glass 11 and refractive index n I of the immersion medium 17, 21. In this case, the refractive index n I of the immersion medium 17, 21 determines the refractive index jump at the interfaces between the respective immersion medium 17, 21 and the cover glass 11. Since in the present exemplary embodiment the sample medium 17 and the immersion medium 21 are identical-or at least approximately the same-only the variation of a refractive index needs to be taken into account in addition to the variation of the thickness d of the cover glass 11 (the refractive index of the cover glass is constant).The procedure for determining suitable free-form surfaces 105, 107 is explained below.Due to the thickness d of the cover glass 11 and the refractive index n I of the immersion medium 17, 21, wavefront errors occur which are based on optical path length differences between different optical paths running from the object field through the optical system to the exit pupil of the optical system. The smaller the optical path length differences, the better the imaging achieved with the optical system. The wavefront errors can be characterized by polynomials, the so-called Zernike polynomials. These Zernike polynomials can be numbered as Z1, Z2, Z3... in the fringe numbering, for example. In this case, the Zernike polynomial Z 1 represents the mean value of the wavefront, the Zernike polynomials Z 2 and Z 3 represent the tilt of the wavefront, the Zernike polynomial Z 4 represents the defocus, the Zernike polynomials Z 5 and Z 6 represent the astigmatism, which is occasionally also referred to as 1st-order astigmatism. The Zernike polynomials Z 7 and Z 8 represent the coma, the Zernike polynomial Z 9 represents the spherical aberration and the Zernike polynomials Z 10 and Z 11 represent the trefoil, etc. The Zernike polynomials starting from Z 12 represent further wavefront errors such as, for example. Astigmatism and coma of higher orders, tetrafoil, etc., i.e. aberrations with higher power of the radial and / or azimuthal aperture coordinate.For a sufficient characterization of the wavefront errors occurring due to the thickness d of the cover glass 11 and the refractive index n I of the immersion medium 17, 21, typically 25, 36, 49, 64, 81, or 100 Zernike polynomials are taken into account. The wavefront manipulator 100 is intended to be used to correct wavefront errors which are characterized by the Zernike polynomials. For compensating the least-order astigmatism (Z5and Z6) and the least-order coma (Z7and Z8), an analytical approximation for the surface shapes of the free-form surfaces 105, 107, i.e. an analytical approximation for the coefficients C m,n from equation 1, can be found with relatively little effort.In the iterative optimization, the image generated by the detection system 5 with the respectively current coefficients C m,n of the free-form surfaces is simulated in each iteration step for a number of combinations of thicknesses d of the cover glass 11 and refractive indices n I of the immersion medium 17, 21 and allowed configurations of the wavefront manipulator 100. Within the framework of the simulation, field points are specified in the object field. For a number of beams emanating from the respective field point, in each iteration step, for each thickness d of the cover glass 11, each refractive index n I of the immersion medium 17, 21 and each allowed configuration of the wavefront manipulator 100, the optical path length of the beam path from the respective field point through the aperture of the detection system 5 to the exit pupil of the detection system 5 is calculated. At the beginning of the first iteration, each combination of thickness d of the cover glass and refractive index n I of the immersion medium 17, 21 can be assigned a provisional configuration of the wavefront manipulator 10, which can then still be changed within the scope of predefined limits in the course of the iterations. In each iteration step, the optical path length differences (OPD) from a reference beam are determined for the calculated path lengths of the beam paths.In order to calculate the measure of the deviation of the imaging quality from the target quality, in the present exemplary embodiment, in a first step, for each simulated combination of thickness d of the cover glass 11, refractive index n I of the immersion medium 17, 21 and allowed configurations of the wavefront manipulator 100, the root mean square (RMS) of the optical path length differences of the beams running from the field points in the object field to the exit pupil of the detection system 5 is calculated in each case. For each combination, a root mean square value associated with the respective combination is thus obtained. In a second step, a square mean value is then in turn calculated from the square mean values assigned to the individual combinations, which square mean value then serves as a measure of the deviation of the imaging quality obtained with the free-form surface present in the iteration step from the target quality.At the end of each iteration, a check is made as to whether an abort condition is met. In the present exemplary embodiment, three different abort conditions are specified. The first termination condition is that the measure for the deviation of the imaging quality from the target quality falls below a predefined value. The second termination condition is that the deviation of the measure for the deviation of the imaging quality from the target quality no longer changes significantly. The deviation of the measure is considered not to change significantly if the change of the measure remains below a predefined limit over a predefined number of iterations. The third abort condition is the achievement of a predefined number of iterations. The optimization process is ended when at least one of these abort conditions is fulfilled. The last termination condition serves to prevent the optimization process from being carried out continuously, because none of the two first-mentioned termination conditions have been fulfilled until then. If the optimization process has been ended on the basis of one of the two first-mentioned termination conditions, the coefficients C m,n then present represent the optimized surface shapes of the free-form surfaces 105, 107. If the optimization process has ended on the basis of the third abort condition, the optimization can be repeated with other starting surfaces and / or more severe boundary conditions. If none of the abort conditions are fulfilled, the method proceeds to the next iteration, in which the described steps are repeated with changed coefficients C m,n.Although three abort conditions have been described in the present exemplary embodiment, this is not a mandatory requirement. Thus, the iterative optimization method can also be carried out, for example, using the second and the third termination conditions alone.In order to be able to shift each wavefront manipulator element in each case both in the x direction and in the y direction, each wavefront manipulator element 101, 103 is arranged in a frame 109 which is guided by a first parallel guide 111 and a second parallel guide 113 arranged perpendicularly to the first parallel guide 111, as is shown schematically in FIG. 2 using the example of one of the two wavefront manipulator elements 101, 103. In this case, the frame 109 is mounted displaceably along the first parallel guide 111. The first parallel guide 111 is in turn mounted displaceably along the second parallel guide 113. As a result, the frame 109 can be displaced along a first direction predefined by the first parallel guide 111 and, together with the first parallel guide 111, along a second direction predefined by the second parallel guide 113. In the present exemplary embodiment, the first parallel guide 111 serves for displacing the wavefront manipulator element 101 in the y direction, and the second parallel guide 113 serves for displacing the wavefront manipulator element 101 in the x direction. Although the directions specified by the parallel guides 111, 113 are perpendicular to each other in the present exemplary embodiment, this is not an obligatory prerequisite for the present invention. It is only important that the directions specified by the parallel guides 111, 113 do not run parallel to one another.In order to bring about the displacement of the frame 109 along the first parallel guide 111 and the displacement of the frame 109 and the first parallel guide 111 along the second parallel guide 113, actuators are provided in the present exemplary embodiment. In the present exemplary embodiment, these actuators comprise DC motors 115, 117 and spindle drives 119, 121, which convert the rotational movements of the DC motors 115, 117 into linear movements of the frame 109 (DC motors 115 and spindle drives 119) or of the first parallel guide 111 and of the frame 109 arranged thereon (DC motors 117 and spindle drives 121). Instead of the direct current motors 115, 117 and the spindle drives, piezoelectric drives such as, for example, piezoelectric drives can be used. Inchworm drives, piezo-falling drives, piezo actuators with lever transmission, etc. are used.The parallel guides 111, 113 form, together with the motors 115, 117 and the spindle drives 119, 121 (or alternatively with the piezoelectric drives), an actuator system 120 with which the wavefront manipulator 100 can be brought into different configurations by means of different relative displacements between the first and the second wavefront manipulator element 101, 103, which usually take place both along the first direction (for example x direction) and along the second direction (for example y direction), wherein the free-form surfaces 105, 107 are optimized, as described, in such a way that they compensate for the wavefront errors of a different combination of thickness d of the cover glass 11 and refractive index n I of the immersion medium in each configuration. The arrangement for light sheet microscopy described with reference to FIG. 1 can thus be adapted to a multiplicity of combinations of thickness d of the cover glass 11 and refractive indices n I of the immersion medium by adjusting the corresponding configuration of the wavefront manipulator 100.Typically, the relative displacements of the wavefront manipulator elements 101, 103 both along the first direction and along the second direction are each effected by displacement in opposite directions by the same amount, as is illustrated in FIG. 4, in order to keep the distribution of the residual aberrations symmetrical about the optical axis of the imaging system. However, if only small relative displacements are required in order to be able to adjust the configurations of the wavefront manipulator 100, it is also possible to equip only one wavefront manipulator element 101 of the wavefront manipulator 100 with an actuator system 120, as has been described with reference to FIG. 2, and to arrange the other wavefront manipulator element 103 in a fixed manner. This presupposes that the travels for the first wavefront manipulator element 101 are so small that the impairment of the imaging quality due to the asymmetry of the distribution of the residual imaging errors about the optical axis which arises can be accepted. However, often only small relative displacements are needed along one of the two directions to adjust the configurations of the wavefront manipulator 100, whereas larger relative displacements are needed in the other direction. In this case, it is possible to equip one of the wavefront manipulator elements 101 of the wavefront manipulator 100 with an actuator system 120 as has been described with reference to FIG. 2 and to equip the other wavefront manipulator element 103 with a reduced actuator system which only allows displacement of the wavefront manipulator element 103 along the direction in which greater relative displacements are required. A wavefront manipulator 100 in which a wavefront manipulator element 103 is mounted such that it can be displaced only in one direction is illustrated in FIG. 5. Only the parallel guide 113 is present in this wavefront manipulator.Setting a configuration of the wavefront manipulator 100 to compensate for a wavefront error for a specific thickness d of the cover glass and a specific refractive index m I of the immersion medium will be described below with reference to FIG. 7.A control device 123 for controlling the wavefront manipulator 100 is assigned to the wavefront manipulator 100 (see FIG. 1 ). This control device 123 typically includes at least a memory and a processor, the memory storing a control program, and the processor being capable of executing the control program stored in the memory. The control device 123 may be, in particular, a commercially available computer or dedicated hardware.The control device 123 stores an assignment which contains a configuration of the wavefront manipulator 100 for a number of combinations of thicknesses d of the cover glass 11 and refractive indices n I of the immersion medium. The assignment is stored in the present exemplary embodiment in the form of a table. In principle, however, it is also possible to store the assignment in the form of a functional relationship which reproduces the displacement paths along the two directions as a function of the thickness d of the cover glass and the refractive index n I of the immersion medium.In the present exemplary embodiment, a configuration is selected on the basis of the stored table for a specific thickness d of the cover glass 11 and a specific refractive index n I of the immersion medium 17, 21 (step S 1). Since the refractive index n I of the immersion medium 17, 21 is generally well known, but the thickness d of the cover glass fluctuates between different cover glasses and is therefore generally only roughly known, the selected configuration serves only as an initial configuration for an iterative optimization process (step S 2), which leads to an optimized configuration.In each iteration step of the optimization process S 2, the configuration of the wavefront manipulator is changed (step S 21). After the configuration has been changed, a measurement of the aberration is then determined (step S 22). In the present exemplary embodiment, the contrast achieved with the imaging is used as a measure of the imaging error. This can be determined, for example, by determining the maximum luminance Lmaxand the minimum luminance Lminin a region transverse to the edge for an edge-shaped structure of the image and forming the ratio Lmax-Lminto Lmax+Lmin(Michelson contrast). Alternatively, the ratio Lmax-Lmin to Lmin can be formed (Weber contrast).In step S 23, it is then checked whether an abort condition is fulfilled. If the check reveals that the abort condition is satisfied, the optimization process is ended and the current configuration is retained as the optimized configuration (step S 24). If the abort condition is not fulfilled, the method returns to step S 21, in which the configuration of the wavefront manipulator 100 is changed again. In the present exemplary embodiment, two different abort conditions are present. The first termination condition is that the measure of the image sharpness reaches a predetermined value. The second termination condition is that the measure of the image sharpness no longer changes significantly. The measure of the image sharpness is considered not to change significantly if the change remains below a predefined limit over a predefined number of iterations.In the exemplary embodiment for setting a configuration of the wavefront manipulator 100, an initial configuration is selected on the basis of an assignment, which is then optimized within the scope of an optimization process. In other exemplary embodiments, the optimization process can be omitted if both the thickness d of the cover glass 11 and the refractive index nl of the immersion medium 17, 21 are sufficiently accurately known. On the other hand, it is not absolutely necessary for the described optimization process to select an initial configuration on the basis of a stored assignment which contains a configuration of the wavefront manipulator 100 in each case for a number of combinations of thicknesses d of the cover glass 11 and refractive indices n I of the immersion medium. In principle, the optimization process can be carried out with an arbitrarily selected initial configuration. Selecting on the basis of the stored assignment can, however, reduce the number of interactions required.Four exemplary embodiments with specific example objectives of the detection system 5 of the arrangement for light sheet microscopy are described below.First Example LensFIG. 8 shows a first example objective, which can be part of the detection system 5 of an arrangement for light sheet microscopy. The first example objective comprises a wavefront manipulator 100 with which the detection system 5 can be adapted to the thickness d of the cover glass 11 and the refractive index n I of the immersion medium 17, 21. It is designed for refractive indices of the immersion medium 17, 21 which can be freely selected continuously in the range from n I= 1.33 to n I= 1.54 and for thicknesses d of the cover glass which vary in a range from 0.15 mm to 0.19 mm.The numerical aperture of the first example objective varies between 0.95 (at n I= 1.33) and 1.10 (at n I= 1.54). The magnification in connection with the tube lens system indicated likewise varies continuously depending on the refractive index of the immersion medium 17, 21 from about 27 x at n I= 1.33 to 31.2 x at n I= 1.54. The angle α between the objective axis and the normal of the cover glass 11 is 30°. Accordingly, the angle β between the axis of the illumination system 3 and the normal of the cover glass is 60°.The object field of the first example objective used for scanning imaging of the observation object 19 is 360 μm×240 μm.The first example objective is corrected for a wavelength range of at least 436 nm to 656 nm, but the imaging power also decreases only slightly in the remaining range between 400 nm and 750 nm. In principle, the focusing is effected primarily by adjusting the sample stage which is adjustable by motor along all three axes. Since the sample is scanned, i.e. captured in a much larger imaging range than would be possible at once with the object field to be imaged with the objective, the necessary adjustment actuator system is already present. The air space behind the surface 4 (thickness indicated at surface number 4) normally remains constant during scanning of a given sample. However, it can also be changed in principle for refocusing.The actuation of the actuator systems of all the actuators of the wavefront manipulator elements 101, 103 and the actuation of the actuator systems of the actuators for setting the air spaces are effected via a control unit which, depending on the present combination of refractive index n I of the immersion medium 17, 21 and thickness d of the cover glass, determines the necessary actuating movements from an assignment stored in a look-up table and determines the required actuating signals electrically to the drive units provided for the adjustment (for example. Piezoelectric drives or stepping motors) are transmitted. In practice, the optimum combination of the adjusting paths can also be effected by an automatic calibration in conjunction with an image processing unit which evaluates the respectively resulting image sharpness and derives therefrom a required adjusting movement. For the entire parameter range indicated, the example objective performs a substantially diffraction-limited imaging, i.e. the polychromatic Strehl values are >90% for each combination of object refractive index and cover glass thickness, and almost consistently even >99%.The parameters of the optical components of the first example objective are summarized in Tables 1 and 2, wherein Table 2 specifies the coefficients C m,n of the polynomial development representing the free-form surfaces. The term "simple decentration" denotes the standard decentration type referred to in the optical design program code V in English as "basic decentre", in which the coordinate origin of the local coordinate system of the surface is displaced with respect to the local coordinate system of the preceding surface by three lateral displacements XDE, YDE and ZDE and in which the coordinate axes are rotated by three angles ADE, BDE, CDE (Euler angle) with respect to the axes of the preceding coordinate system. All subsequent coordinate systems remain correspondingly shifted / rotated after a "basic decenter" until they are optionally retrieved again using a further "basic decenter". Table 1 Table 1ObjectSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.370000Sample medium (refractive index variable according to Table 3) Abbe number 54.50001Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Sample medium (refractive index variable according to Table 3) Abbe number 54.5000Simple Decentration2Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinityCover glass thickness (variable according to Table 3)D263M3Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Immersion medium (refractive index variable according to Table 3) Abbe number 54.50004Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinityThickness variableImmersion medium (refractive indexSimple DecentrationAccording to Table 5,Variable according to Table 3) Abbe number 54.50005Sphere-6.4785240.000000Immersion medium (refractive index variable according to Table 3) Abbe number 54.5000Simple Decentration6Sphere-6.4785242.148075NSSK8_SBLOFF7Sphere-8.6265990.4000008Sphere-10.9062702.375425SLAH93_OHARA9Sphere-9.1783870.01000010Sphere-39.6897233.246813SFPL53_OHARA11Sphere-15.4446060.01000012Sphere34.9169283.523837SFPL53_OHARA13Sphere-113.8525650.25000014Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000STIH53_OHARA17XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.00000018Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple DecentrationAperture Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.08000020Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration21XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000STIH53_OHARA22Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.01000023Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration24Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.10000025Sphere166.7727104.984353SFPL51_OHARA26Sphere-32.4893530.01000027Sphere85.4047076.110300SFPL53_OHARA28Sphere-19.3697751.205716MBALF4_SBLOFF29Sphere17.8302307.352243SFPL53_OHARA30Sphere-32.2944000.01000031Sphere50.9424523.489354SFPL53_OHARA32Sphere-46.137558Thickness variable according to Table 533Sphere21.3792485.961268SFPL53_OHARA34Sphere-17.9660671.200095NKZFS11_SBLOFF35Sphere7.6954015.926791NFK51A_SCHOTT36Sphere-150.5056920.01000037Sphere15.7315314.861499SLAM55_OHARA38Sphere-9.7794132.784382NKZFS11_SBLOFF39Sphere5.845030Thickness variable according to Table 540Sphere-6.8785391.200000SNBH55_OHARA41Sphere-362.102847Thickness variable according to Table 542Sphere-5.6192103.515539SLAM66_OHARA43Sphere-7.812942Thickness variable according to Table 544Sphere-26.1318471.865359NLASF41_SALTER45Sphere-15.4281350.88256146Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity126.50000047Sphere189.41700010.900000MBALF4_SBLOFF48Sphere-189.41700060.00000049Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity80.000000NBK7_SOTT50Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity48.200000Image ImageSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000In Table 1, the surface numbers can be assigned to the optical components of the first example lens as follows: <row><cell>Area Numbers 6 and 7:< / cell><cell>lens L1 (immersion termination lens 23),< / cell>< / row><row><cell>Area numbers 8 and 9:< / cell><cell>Lens L2,< / cell>< / row><row><cell>Area Numbers 10 and 11:< / cell><cell>Lens L3,< / cell>< / row><row><cell>Area Numbers 12 and 13:< / cell><cell>Lens L4,< / cell>< / row><row><cell>Area Numbers 16 and 17:< / cell><cell>Wavefront manipulator element 101,< / cell>< / row><row><cell>Area Nos. 21 and 22:< / cell><cell>Wavefront manipulator element 103,< / cell>< / row><row><cell>Area Numbers 25 and 26:< / cell><cell>Lens L5,< / cell>< / row><row><cell>Area Nos. 26 and 27:< / cell><cell>Lens L6,< / cell>< / row><row><cell>Area Numbers 27 and 28:< / cell><cell>Lens L7,< / cell>< / row><row><cell>Area Numbers 29 and 30:< / cell><cell>Lens L8,< / cell>< / row><row><cell>Area Numbers 31 and 32:< / cell><cell>Lens L9,< / cell>< / row><row><cell>Area Nos. 33 and 34:< / cell><cell>lens L10,< / cell>< / row><row><cell>Area Numbers 34 and 35:< / cell><cell>lens L11,< / cell>< / row><row><cell>Area Numbers 35 and 36:< / cell><cell>lens L12,< / cell>< / row><row><cell>Area Numbers 37 and 38:< / cell><cell>lens L13,< / cell>< / row><row><cell>Area Nos. 38 and 39:< / cell><cell>lens L14,< / cell>< / row><row><cell>Area Numbers 40 and 41:< / cell><cell>lens L15,< / cell>< / row><row><cell>Area Numbers 42 and 43:< / cell><cell>lens L16,< / cell>< / row><row><cell>Area Numbers 44 and 45:< / cell><cell>Lens L17.< / cell>< / row><p xml:id="_b897830600" n="0068">The surface numbers 2 and 3 relate to the cover glass and the surface numbers 46 to 50 relate to a tube lens system which is generally known to a person skilled in the art and is not part of the detection objective 6 and is not shown in FIG. 8, because otherwise it would be difficult to identify details on the actual objective to the required scale. The lens L 1 is the immersion terminating lens 23, which is likewise not part of the detection objective 6. The detection objective 6 of the first example objective thus begins with the lens L 2 and ends with the lens L 17. The remaining surface numbers relate to so-called dummy surfaces, which are required, for example, to take account of a diaphragm or decentration.<p xml:id="_b897830601" n="0069">Table 2 shows the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development which represents the free-form surfaces 105, 107 used in the wavefront manipulator 100 of the first example objective. Both free-form surfaces 105, 107 are identical and are arranged with respect to one another in such a way that the wavefront manipulator 100 acts like a neutral optical element in a neutral position (Δx=0 and Δy=0) of the wavefront manipulator elements 101, 103 which is not displaced with respect to one another. Table 2<title desc="title">Table 2X2:4.6035E-07XY:-2.7745E-05Y2:1.1065E-04X3:-5.1673E-07X2Y:-1.9181E-08XY2:6.6047E-07Y3:-6.6854E-06X4:7.8123E-10X3Y:-3.6954E-08X2Y2:3.2925E-08XY3:-4,8307E-07Y4:1.5099E-06X5:-2.4546E-09X4Y:3.2812E-11X3Y2:-2.3408E-09X2Y3:-2.2787E-10XY4:-2.1801E-09Y5:5.1927E-08X6:3.6921E-12X5Y:-3.1769E-10X4Y2:-1.7312E-12X3Y3:-1.2780E-09X2Y4:-2.3287E-10XY5:2.4074E-09Y6:-1.6638E-08X7:6.7509E-12X6Y:-2.5300E-13X5Y2:2.3145E-11X4Y3:-4.9592E-12X3Y4:7.6809E-11X2Y5:-3.0273E-12XY6:1.5250E-10Y7:-4.7208E-10X8:-9.7668E-15X7Y:5.4916E-13X6Y2:-1.9385E-13X5Y3:4.8857E-12X4Y4:3.5526E-13X3Y5:1.9329E-12X2Y6:9.3474E-13XY7:-1.6654E-11Y8:6.4293E-11X9:-5.7035E-15X8Y:-2.2236E-16X7Y2:-2.1222E-14X6Y3:1.3899E-14X5Y4:-1.4915E-13X4Y5:-9.5268E-15X3Y6:-2.1455E-13X2Y7:1.8709E-13XY8:-1.8436E-12Y9:6.4562E-12X10:6.0858E-18X9Y:-2.8939E-16X8Y2:4.0235E-16X7Y3:-5.8252E-15X6Y4:-7.2437E-16X5Y5:-4.2385E-15X4Y6:1.0607E-15X3Y7:7.3845E-15X2Y8:-1.6297E-14XY9:1.4221E-13Y10:-4.5239E-13The wavefront manipulator elements 101, 103 are deflected from the neutral position by a maximum Δx of 10 mm or by a maximum Δy of 0.28 mm depending on the refractive index nl of the immersion medium 17, 21 and depending on the thickness d of the cover glass. At the same time, a total of four air spaces are changed in the first example objective, wherein the total overall overall length of the first example objective always remains constant. The variation of these air spaces corresponds to a variation of the thicknesses indicated at the area numbers 32, 39, 41 and 43, which correspond to the distances between the lenses L9 and L10 (area number 32), between the lenses L14 and L15 (area number 39), between the lenses L15 and L16 (area number 41) and between the lenses L16 and L17 (area number 43). It serves to compensate field-dependent image errors such as, for example, the field-dependent coma, which is caused by a great change in the refractive index when immersion media with refractive indices between 1.33 and 1.54 are used.The first example objective can be adjusted by these example configurations, which are specified more precisely in Tables 4 and 5, both to the respective refractive index n I of the immersion medium 17, 21 and to the present thickness d of the cover glass (in a range from 0.15 mm to 0.19 mm). Table 3 shows an assignment of configurations K 1 to K 18 of the wavefront manipulator 100 to selected thicknesses d of the cover glass 11 and different refractive indices n I of the immersion medium 17, 21, and table 4 shows the associated displacements Δx and Δy of the wavefront manipulator elements 101 and 103 for each of the configurations K 1 to K 18. It should be noted at this point that only configurations with two different values for the thicknesses of the cover glass are specified in order to keep the table clear here. The thicknesses given correspond to the minimum thickness of 0.15 mm and the maximum thickness 0.19 mm of the cover glass. In practice, on the other hand, configurations for a plurality of intermediate values will also be present. The configurations of the wavefront manipulator for the intermediate values, i.e. the displacements for the intermediate values, can either be determined directly in the iterative optimization of the surface shapes, or they can be determined from displacements determined in the iterative optimization by linear interpolation. Table 3 Table 3K10.151.33K20.151.36K30.151.38K40.151.415K50.151.44K60.151.465K70.151.49K80.151.515K90.151.54K100.191.33K110.191.36K120.191.38K130.191.415K140.191.44K150.191.465K160.191.49K170.191.515K180.191.54Table 4Table 4K18.059470.22856-8.05947-0.22856K27.658880.22593-7.65888-0.22593K37.078670.21846-7.07867-0.21846K46.417770.20697-6.41777-0.20697K55.548830.18837-5.54883-0.18837K64.402450.15897-4.40245-0.15897K72.871690.11252-2.87169-0.11252K80.810060.03785-0.81006-0.03785K9-1.91228-0.087091.912280.08709K1010.000000.28345-10.00000-0.28345K119.508410.27978-9.50841-0.27978K128.779770.27067-8.77977-0.27067K137.959550.25666-7.95955-0.25666K146.892290.23396-6.89229-0.23396K155.492270.19799-5.49227-0.19799K163.611470.14066-3.61147-0.14066K171.029700.04694-1.02970-0.04694K18-2.40806-0.111242.408060.11124Table 5 shows the thickness of the area with the area number 4 assigned to the configurations K1 to K18 for focusing in each case and the thicknesses of the areas with the area numbers 32, 39, 41 and 43 assigned in each case for reducing field-dependent image aberrations such as, for example, the field-dependent coma Table 5K15.971910.392422.915852.095846.57038K25.969150.374942.955952.272896.37071K35.966310.353832.996432.443946.18028K45.963900.332523.030422.579306.03224K55.961570.305703.064182.701355.90326K65.959590.269373.097532.804325.80326K75.958400.217273.130722.880545.74596K85.958520.141223.163482.914385.75541K95.960380.029293.209672.938815.79673K105.942830.436822.896182.110206.53128K115.939630.413892.938832.300996.32076K125.936060.388732.983112.491206.11144K135.932830.364823.020482.637865.95132K145.929470.335793.058432.766815.81345K155.926300.297303.095152.864125.71791K165.924060.240163.128622.917175.68853K175.923830.148943.162752.924945.73785K185.925990.010003.214642.926865.82298The residual optical path length differences occurring with the configurations K 1, K 5, K 9, K 10, K 14 and K 18 are shown below in FIGS. 9 to 14 for five different wavelengths and five selected field points of the object field measuring a total of 0.36 mm. The smaller the residual optical path length differences, the better the mapping achieved with the optical system. The configurations K 1, K 9, K 10 and K 18 compensate extreme values for the refractive index n I of the immersion medium 17, 21 and the configurations K 5 and K 14 each compensate for an average value for the refractive index n I of the immersion medium 17, 21. The selected field points are, in each case from bottom to top in FIGS. 9 to 14, the following field points <row><cell>F1:< / cell><cell>x = 0.00 mm, y = 0.00 mm< / cell>< / row><row><cell>F2:< / cell><cell>x = 0.00 mm, y = -0.18 mm< / cell>< / row><row><cell>F3:< / cell><cell>x = 0.00 mm, y = +0.18 mm< / cell>< / row><row><cell>F4:< / cell><cell>x = -0.18 mm, y = 0.00 mm< / cell>< / row><row><cell>F5:< / cell><cell>x = + 0.18 mm, y = 0.00 mm< / cell>< / row><p xml:id="_b897831126" n="0074">The five selected field points are representative of the correction of the remaining intermediate field points as well. It should be noted here that in the first example lens the field points F 2 and F 3 are even already outside the image field range imaged by the image sensor of the camera and thus represent a "worst case". Within the region imaged by the image sensor of the camera, the correction is therefore consistently equally good or better than at the field points shown.<p xml:id="_b897831127" n="0075">The illustration of FIGS. 9 to 14 shows, for each of the five field points, the residual optical path length differences of rays which emerge from the respective field point and reach the exit pupil of the first example objective at different positions between its center and its edge. The positions are specified in a coordinate system perpendicular to the optical axis, wherein the optical axis defines the Z direction and the exit pupil extends in the XY plane. The center of the exit pupil corresponds to the intersection point of the axes shown in the figures. The beam fan in the Y-Z plane of the exit pupil (engl. Y-fan) shows the residual optical path length differences occurring at different Y positions between the center of the exit pupil and the edge of the exit pupil. Accordingly, the beam fan points in the X-Z plane of the exit pupil (engl. X-fan) the residual optical path length differences that occur at different X positions between the center of the exit pupil and the edge of the exit pupil.<p xml:id="_b897831128" n="0076">On the basis of the residual optical path length differences shown in FIGS. 9 to 14, the correction state of the first example objective can be shown for the different combinations of refractive indices n <hi rend="subscript">I< / hi> of the immersion medium 17, 21 and thicknesses d cover glass 11. The residual optical path length differences are shown in units of the reference wavelength 546.07 nm. This means that the y values of the representations must be multiplied by 546.07 nm in order to obtain the value of the respective residual path length difference. A value of 0.5 thus means that the residual optical path length difference corresponds to half the reference wavelength. A diffraction-limited imaging can already be referred to in the broader sense if the residual optical path length difference corresponds to no more than one quarter of the reference wavelength, i.e. the residual optical path length difference in the representations shown in FIGS. 9 to 11 has a y value of 0.25 or less. As can be seen from FIGS. 9 to 14, residual optical path length differences are present in a large region of the exit pupil for all the field points and wavelengths shown, which differences do not exceed the value of 0.25 and are often significantly below this value. Only at the edge of the exit pupil is the value of 0.25 occasionally exceeded for some field points. Thus, FIGS. 9 to 14 show that the wavefront manipulator almost completely compensates the imaging errors even for the extreme values of the refractive index n <hi rend="subscript">I< / hi> of the immersion medium 17, 21 and the thickness d of the cover glass 11 and enables a practically diffraction-limited imaging in all positions.<head xml:id="_b897831131">Second Example Lens< / head><p xml:id="_b897831132" n="0077"> FIG. 15 shows a second example objective, which can be part of the detection system 5 of an arrangement for light sheet microscopy.<p xml:id="_b897831133" n="0078">The second example objective is designed for refractive indices of the immersion medium 17, 21 in the range from approximately 1.33 to 1.39 and for thicknesses d of the cover glass in the range from 0.15 mm to 0.19 mm and has a significantly smaller number of degrees of freedom for setting the objective in comparison with the first example objective described above. The restricted range of refractive indices is, for example, completely sufficient for the refractive indices typically occurring in the live cell imaging field.<p xml:id="_b897831134" n="0079">The angle α between the objective axis and the normal of the cover glass 11 is 30°. Accordingly, the angle β between the axis of the illumination system 3 and the normal of the cover glass is 60°. The object field of the second example objective is 330 μm×150 μm, and its numerical aperture varies from 0.99 (at n <hi rend="subscript">I< / hi>= 1.33) to 1.03 (at n <hi rend="subscript">I< / hi>= 1.39). Its imaging scale (including tube lens system) is 28.8x to 30.1x. The usable wavelength range of the second example objective corresponds to that of the first example objective described above.<p xml:id="_b897831137" n="0080">Due to the reduced range of refractive indices to be compensated in comparison with the first example objective, the second example objective makes do without variable air spaces entirely. Only different options of the wavefront manipulator elements 101, 103 are available as adjustment degrees of freedom by up to approximately 2.6 mm in the x direction and by up to approximately 0.27 mm in the y direction. Thus, the second example objective also performs a diffraction-limited imaging power over the entire parameter range with distances of >90% and even of >99% for most field points and refractive indices.<p xml:id="_b897831138" n="0081">The parameters of the optical components of the second example objective are summarized in Tables 6 and 7, wherein Table 7 specifies the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development representing the free-form surfaces. Table 6<title desc="title">Table 6ObjectSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.250000Sample medium (refractive index variable according to Table 8) Abbe number 54.50001Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Sample medium (refractive index variable according to Table 8) Abbe number 54.5000Simple Decentration2Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinityCover glass thickness (variable according to Table 8)D263M3Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Immersion medium (refractive index variable according to Table 8) Abbe number 54.50004Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity4.642376Immersion medium (refractive indexSimple decentrationVariable according to Table 8) Abbe number 54.50005Sphere-5.0404090.000000Immersion medium (refractive index variable according to Table 8) Abbe number 54.5000Simple 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.01000015Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration16Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000SNBH56_OHARA17XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.00000018Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.08000020Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration21XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity0.01000023Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration24Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity1.02420425Sphere-3668.2869304.409176SFPL51_OHARA26Sphere-29.9223200.01000027Sphere66.6878966.649571SFPL53_OHARA28Sphere-26.9994441.250000NKZFS4_SBLOFF29Sphere31.0107477.627670SFPL53_OHARA30Sphere-35.2599100.01000031Sphere36.3229904.830861SFPL53_OHARA32Sphere-74.9792200.01000033Sphere19.6870146.217758SFPL53_OHARA34Sphere-64.0326961.250000NKZFS11_SBLOFF35Sphere13.7724881.71733636Sphere16.0477555.430444SFPL53_OHARA37Sphere-24.1127752.918806NKZFS4_SBLOFF38Sphere-175.0835970.01445539Sphere23.2050164.228577STIH4_OHARA40Sphere-65.8775634.418086NKZFS11_SBLOFF41Sphere6.6708805.38137242Sphere-8.0720171.200000SNBH53_OHARA43Sphere43.7683912.16803244Sphere-7.7623564.055701SNBH55_OHARA45Sphere-9.9674690.01000046Sphere51.2899022.146056SYGH51_OHARA47Sphere-33.8044570.01000048Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity126.50000049Sphere189.41700010.900000MBALF4_SBLOFF50Sphere-189.41700060.00000051Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity80.000000NBK7_SOTT52Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity48.200000Image ImageSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000In Table 6, the surface numbers can be assigned to the optical components of the second example lens as follows: <row><cell>Area Numbers 6 and 7:< / cell><cell>lens L1 (immersion termination lens 23),< / cell>< / row><row><cell>Area numbers 8 and 9:< / cell><cell>Lens L2,< / cell>< / row><row><cell>Area Numbers 10 and 11:< / cell><cell>Lens L3,< / cell>< / row><row><cell>Area Numbers 12 and 13:< / cell><cell>Lens L4,< / cell>< / row><row><cell>Area Numbers 16 and 17:< / cell><cell>Wavefront manipulator element 101,< / cell>< / row><row><cell>Area Nos. 21 and 22:< / cell><cell>Wavefront manipulator element 103,< / cell>< / row><row><cell>Area Numbers 25 and 26:< / cell><cell>Lens L5,< / cell>< / row><row><cell>Area Nos. 26 and 27:< / cell><cell>Lens L6,< / cell>< / row><row><cell>Area Numbers 27 and 28:< / cell><cell>Lens L7,< / cell>< / row><row><cell>Area Numbers 29 and 30:< / cell><cell>Lens L8,< / cell>< / row><row><cell>Area Numbers 31 and 32:< / cell><cell>Lens L9,< / cell>< / row><row><cell>Area Nos. 33 and 34:< / cell><cell>lens L10,< / cell>< / row><row><cell>Area Numbers 34 and 35:< / cell><cell>lens L11,< / cell>< / row><row><cell>Area Numbers 35 and 36:< / cell><cell>lens L12,< / cell>< / row><row><cell>Area Numbers 37 and 38:< / cell><cell>lens L13,< / cell>< / row><row><cell>Area Nos. 38 and 39:< / cell><cell>lens L14,< / cell>< / row><row><cell>Area Numbers 40 and 41:< / cell><cell>lens L15,< / cell>< / row><row><cell>Area Numbers 42 and 43:< / cell><cell>lens L16,< / cell>< / row><row><cell>Area Numbers 44 and 45:< / cell><cell>Lens L17.< / cell>< / row><row><cell>Area Numbers 46 and 47:< / cell><cell>Lens L18.< / cell>< / row><p xml:id="_b897831604" n="0083">The area numbers 2 and 3 refer to the cover glass, and the area numbers 48 to 52 refer to a tube lens system which is not shown in FIG. 15 as in FIG. 8. The remaining surface numbers relate to so-called dummy surfaces, which are required, for example, to take account of a diaphragm or decentration. The lens L 1 is again the immersion terminating lens 23, which, like the tube lens system, is not part of the detection objective 6. The detection objective 6 of the second example objective thus begins with the lens L 2 and ends with the lens L 18.<p xml:id="_b897831605" n="0084">Table 7 shows the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development which represents the free-form surfaces 105, 107 used in the wavefront manipulator 100 of the second example objective. Both free-form surfaces 105, 107 are identical and arranged with respect to one another such that the wavefront manipulator 100 acts like a neutral optical element in a neutral position (Δx=0 and Δy=0) of the wavefront manipulator elements 101, 103 which is not displaced with respect to one another. Table 7<title desc="title">Table 7X2:7.1400E-06XY:-1.3101E-04Y2:1.1963E-04X3:-4.8735E-06X2Y:-6.7060E-07XY2:6.2497E-06Y3:-3.6955E-05X4:9.6305E-09X3Y:-3,2861E-07X2Y2:3.5371E-07XY3:-2.2347E-06Y4:2.5794E-06X5:1.1151E-08X4Y:-2.3160E-09X3Y2:4.6459E-08X2Y3:-4.0033E-09XY4:2.7499E-08Y5:1.1102E-07X6:3.1175E-12X5Y:-1.5827E-10X4Y2:1.9049E-11X3Y3:-3.6529E-10X2Y4:-3.3015E-09XY5:1.2162E-08Y6:-2.2216E-08X7:-8.4578E-12X6Y:1.2337E-12X5Y2:-3.3888E-11X4Y3:8.0457E-12X3Y4:-7.2116E-11X2Y5:1.3698E-10XY6:-4.6883E-10Y7:6.4629E-10X8:-6.4180E-15X7Y:4.6885E-14X6Y2:-8.4390E-14X5Y3:3.6527E-13X4Y4:-2.4133E-14X3Y5:7.5169E-14X2Y6:3.4255E-12XY7:-7.0062E-12Y8:6.9527E-12The wavefront manipulator elements 101, 103 are deflected from the neutral position by a maximum Δx of 2.6 mm or by a maximum Δy of 0.27 mm depending on the refractive index n I of the immersion medium 17, 21 and depending on the thickness d of the cover glass.The second example objective can be adjusted by these example configurations, which are specified in more detail in Tables 8 and 9, to both the respective refractive index n I of the immersion medium 17, 21 and the present thickness d of the cover glass (in a range from 0.15 mm to 0.19 mm). Table 8 shows an assignment of configurations K 1 to K 8 of the wavefront manipulator 100 to selected thicknesses d of the cover glass 11 and different refractive indices nl of the immersion medium 17, 21, and table 9 shows the associated displacements Δx and Δy of the wavefront manipulator elements 101 and 103 for each of the configurations K 1 to K 8. It should be pointed out at this point that only configurations with two different values for the thicknesses of the cover glass are specified, namely for the extreme values of 0.15 mm and 0.19 mm, but in practice there are also configurations for a plurality of intermediate values for which the correction is just as good or even better than for the extreme values. The configurations of the wavefront manipulator for the intermediate values, i.e. the travels for the intermediate values, can either be determined directly in the iterative optimization of the surface shapes, or they can be determined from travels determined in the iterative optimization by linear interpolation. Table 8 Table 8K10.151.33K20.151.35K30.151.37K40.151.39K50.191.33K60.191.35K70.191.37K80.191.39Table 9Table 9K12.056510.21301-2.05651-0.21301K21.996400.21109-1.99640-0.21109K31.916560.20739-1.91656-0.20739K41.813370.20143-1.81337-0.20143K52.614470.26808-2.61447-0.26808K62.537600.26562-2.53760-0.26562K72.435580.26091-2.43558-0.26091K82.303840.25332-2.30384-0.25332The residual optical path length differences occurring with the configurations K 1, K 4, K 5 and K 8 are shown below in FIGS. 16 to 19 for five different wavelengths and five selected field points of the object field of 0.330 mm×0.150 mm size. The configurations K 1 and K 5 compensate for the minimum value for the refractive index n I of the immersion medium 17, 21, and the configurations K 4 and K 8 compensate for the maximum value for the refractive index n I of the immersion medium 17, 21, The configurations K 1 and K 4 compensate for the minimum thickness of the cover glass, the configurations K 5 and K 8 compensate for the maximum thickness d of the cover glass 11, the residual optical path length differences are illustrated in units of the reference wavelength 546.07 nm, and the selected field points are the following field points-in each case from bottom to top in FIGS. 16 to 19: <row><cell>F1:< / cell><cell>x = 0.000 mm, y = 0.000 mm< / cell>< / row><row><cell>F2:< / cell><cell>x = 0.000 mm, y = -0.075 mm< / cell>< / row><row><cell>F3:< / cell><cell>x = 0.000 mm, y = + 0.075 mm< / cell>< / row><row><cell>F4:< / cell><cell>x = -0.165 mm, y = 0.000 mm< / cell>< / row><row><cell>F5:< / cell><cell>x = + 0.165 mm, y = 0.000 mm< / cell>< / row><p xml:id="_b897831843" n="0088">As can be seen from FIGS. 16 to 19, residual optical path length differences are present in a large region of the exit pupil for all the field points and wavelengths shown, which differences do not exceed the value of 0.25 and are often significantly below this value. Only at the edge of the exit pupil is the value of 0.25 occasionally exceeded for some field points. Thus, FIGS. 16 to 19 show that the wavefront manipulator almost completely compensates the imaging errors even for the extreme values of the refractive index n <hi rend="subscript">I< / hi> of the immersion medium 17, 21 and the thickness d of the cover glass 11 and enables a practically diffraction-limited imaging in all positions.<head xml:id="_b897831845">Third Example Lens< / head><p xml:id="_b897831846" n="0089"> FIG. 20 shows a third example objective, which can be part of the detection system 5 of an arrangement for light sheet microscopy.<p xml:id="_b897831847" n="0090">The 3 third example objective differs from the second example objective primarily in that an even further actuating movement is provided less, which has an advantageous effect on the complexity and the production outlay of the mechanics and actuators required for the actuating movement.<p xml:id="_b897831848" n="0091">The two wavefront manipulator elements 101, 103 are displaced in opposite directions by identical amounts relative to one another only in the x direction. In contrast to the first example objective and the second example objective, in the third example objective, only one of the two wavefront manipulator elements 101, 103 is displaced along the y-direction, while the opposite displacement of the second wavefront manipulator element along the y-direction is dispensed with.<p xml:id="_b897831849" n="0092">The deflection of the first wavefront manipulator element along the y direction is therefore approximately twice as great as in the case of a counter-movement of the second wavefront manipulator element. This is possible because a displacement of the two wavefront manipulator elements 101, 103 in opposite directions with respect to one another by a respective amount Δy is fundamentally equivalent to one of the wavefront manipulator elements being displaced by 2Δy with respect to the other wavefront manipulator element and subsequently the two wavefront manipulator elements 101, 103 are displaced jointly as a unit by -Δy in the opposite direction. However, this joint displacement as a unit of -Δy has only a slight effect in a wavefront manipulator 100 designed for only a small range of wavefront changes, which can frequently be neglected. On the other hand, the saving of additional mechanical guides and actuators is of great importance. In the present exemplary embodiment, the opposite displacement of the image-side wavefront manipulator element along the y direction is dispensed with. However, it would also be possible instead to dispense with the opposite displacement of the object-side wavefront manipulator element and to displace only the image-side wavefront manipulator element along the y direction.<p xml:id="_b897831850" n="0093">The refractive indices n <hi rend="subscript">I< / hi> of the immersion medium 17, 21 are in turn restricted to refractive indices from the range of 1.33 to 1.39 relevant for live cell imaging. The angle α between the objective axis and the normal of the cover glass 11 is 30°. Accordingly, the angle β between the axis of the illumination system 3 and the normal of the cover glass is 60°. The object field is 330×150 μm, as in the second example objective. The wavelength range is the same as in the first example objective and in the second example objective. The numerical aperture of the third example objective varies from 0.99 (at n <hi rend="subscript">I< / hi>= 1.33) to 1.03 (at n <hi rend="subscript">I< / hi>= 1.39), and the imaging scale (including the tube lens system) varies here between 31.5x (at n <hi rend="subscript">I< / hi>= 1.33) and 32.9x (at n <hi rend="subscript">I< / hi>= 1.39).<p xml:id="_b897831856" n="0094">Despite the saved counter-movement of the second wavefront manipulator element in the y-direction, the third example objective performs an approximately comparable imaging performance as the second example objective and still enables diffraction-limited imaging over the entire parameter range with beam values of >90%.<p xml:id="_b897831857" n="0095">The parameters of the optical components of the third example objective are summarized in tables 10 and 11, wherein table 11 specifies the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development representing the free-form surfaces. Table 10<title desc="title">Table 10ObjectSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.250000Sample medium (refractive index variable according to Table 12) Abbe number 54.50001Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Sample medium (refractive index variable according to Table 12) Abbe number 54.5000Simple Decentration2Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinityCover glass thickness (variable according to Table 12)D263M3Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Immersion medium (refractive index variable according to Table 12) Abbe number 54.50004Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity4.892148Immersion medium (refractive index variable according to Table 12)Simple DecentrationAbbe number 54.50005Sphere-5.2902040.000000Immersion medium (refractive index variable according to Table 12) Abbe number 54.5000Simple Decentration6Sphere-5.2902042.168830NSSK8_SBLOFF7Sphere-7.4590330.6002298Sphere-12.9752032.620984SNBH55_OHARA9Sphere-10.1089900.01000010Sphere-16.6929543.194128SFPL53_OHARA11Sphere-12.0919840.01000012Sphere-201.7971513.933749SFPL53_OHARA13Sphere-23.7538991.00000014Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.01000015Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration16Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000STIH53_OHARA17XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.00000018Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple DecentrationAperture Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm DiaphragmSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.08000020Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration21XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000STIH53_OHARA22Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.01000023Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration24Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity1.00000025Sphere125.6850134.989598SFPL53_OHARA26Sphere-30.9780440.01000027Sphere51.0680976.764539SFPL53_OHARA28Sphere-27.9003991.917052NKZFS4_SBLOFF29Sphere26.6489657.326090SFPL53_OHARA30Sphere-38.2867901.31200131Sphere33.8894424.339984SFPL53_OHARA32Sphere-95.3467130.08053433Sphere19.2121075.729225SFPL53_OHARA34Sphere-64.0175031.250000NKZFS11_SBLOFF35Sphere13.0184321.85862436Sphere16.2888104.974037SFPL53_OHARA37Sphere-21.8262692.432281NKZFS11_SBLOFF38Sphere-91.3562141.03881939Sphere20.0954464.083125SLAM7_OHARA40Sphere-106.9587763.557192NKZFS11_SBLOFF41Sphere6.3765264.95772642Sphere-7.3748221.292905NBASF64_SOTT43Sphere48.3437481.95394744Sphere-7.9513404.358018SLAH60_OHARA45Sphere-9.7965680.01000046Sphere35.3218211.824235SLAH51_OHARA47Sphere-87.7486570.01000048Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity126.50000049Sphere189.41700010.900000MBALF4_SBLOFF50Sphere-189.41700060.00000051Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity80.000000NBK7_SOTT52Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity48.200000Image ImageSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000In Table 10, the surface numbers can be assigned to the optical components of the third example lens as follows: <row><cell>Area Numbers 6 and 7:< / cell><cell>lens L1 (immersion termination lens 23),< / cell>< / row><row><cell>Area numbers 8 and 9:< / cell><cell>Lens L2,< / cell>< / row><row><cell>Area Numbers 10 and 11:< / cell><cell>Lens L3,< / cell>< / row><row><cell>Area Numbers 12 and 13:< / cell><cell>Lens L4,< / cell>< / row><row><cell>Area Numbers 16 and 17:< / cell><cell>Wavefront manipulator element 101,< / cell>< / row><row><cell>Area Nos. 21 and 22:< / cell><cell>Wavefront manipulator element 103,< / cell>< / row><row><cell>Area Numbers 25 and 26:< / cell><cell>Lens L5,< / cell>< / row><row><cell>Area Nos. 26 and 27:< / cell><cell>Lens L6,< / cell>< / row><row><cell>Area Numbers 27 and 28:< / cell><cell>Lens L7,< / cell>< / row><row><cell>Area Numbers 29 and 30:< / cell><cell>Lens L8,< / cell>< / row><row><cell>Area Numbers 31 and 32:< / cell><cell>Lens L9,< / cell>< / row><row><cell>Area Nos. 33 and 34:< / cell><cell>lens L10,< / cell>< / row><row><cell>Area Numbers 34 and 35:< / cell><cell>lens L11,< / cell>< / row><row><cell>Area Numbers 35 and 36:< / cell><cell>lens L12,< / cell>< / row><row><cell>Area Numbers 37 and 38:< / cell><cell>lens L13,< / cell>< / row><row><cell>Area Nos. 38 and 39:< / cell><cell>lens L14,< / cell>< / row><row><cell>Area Numbers 40 and 41:< / cell><cell>lens L15,< / cell>< / row><row><cell>Area Numbers 42 and 43:< / cell><cell>lens L16,< / cell>< / row><row><cell>Area Numbers 44 and 45:< / cell><cell>Lens L17.< / cell>< / row><row><cell>Area Numbers 46 and 47:< / cell><cell>Lens L18.< / cell>< / row><p xml:id="_b897832323" n="0097">The area numbers 2 and 3 refer to the cover glass, and the area numbers 48 to 52 refer to a tube lens system as not shown in FIG. 8 in FIG. 20. The remaining surface numbers relate to so-called dummy surfaces, which are required, for example, to take account of a diaphragm or decentration. The lens L 1 is again the immersion terminating lens 23, which, like the tube lens system, is not part of the detection objective 6. The detection objective 6 of the third example objective thus begins with the lens L 2 and ends with the lens L 18.<p xml:id="_b897832324" n="0098">Table 11 shows the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development which represents the free-form surfaces 105, 107 used in the wavefront manipulator 100 of the third example objective. Both free-form surfaces 105, 107 are identical and arranged with respect to one another such that the wavefront manipulator 100 acts like a neutral optical element in a neutral position (Δx=0 and Δy=0) of the wavefront manipulator elements 101, 103 which is not displaced with respect to one another. Table 11<title desc="title">Table 11X2:7.7015E-06XY:-1.3977E-04Y2:1.5209E-04X3:-4.9371E-06X2Y:-6.1898E-07XY2:5.5003E-06Y3:-3.6278E-05X4:9.3050E-09X3Y:-3.0626E-07X2Y2:3.7034E-07XY3:-2.2661E-06Y4:2.7907E-06X5:1.2097E-08X4Y:-2.5526E-09X3Y2:4.9704E-08X2Y3:-8.0443E-09XY4:4.5217E-08Y5:8.0926E-08X6:3.8700E-12X5Y:-1.9761E-10X4Y2:2.8689E-11X3Y3:-5,0602E-10X2Y4:-3.3865E-09XY5:1.2064E-08Y6:-2.1798E-08X7:-1.0128E-11X6Y:1.5021E-12X5Y2:-4.0485E-11X4Y3:1.0033E-11X3Y4:-8.9401E-11X2Y5:1.7962E-10XY6:-5.8699E-10Y7:7.7234E-10X8:-6.0184E-15X7Y:3.1682E-14X6Y2:-8.3475E-14X5Y3:3.9909E-13X4Y4:-3,0673E-14X3Y5:4.7082E-13X2Y6:2.1718E-12XY7:-3.1554E-12Y8:2.4633E-12The third example objective can be adjusted by these example configurations, which are specified more precisely in Tables 12 and 13, to both the respective refractive index n I of the immersion medium 17, 21 and the present thickness d of the cover glass (in a range from 0.15 mm to 0.19 mm). Table 12 shows an assignment of configurations K 1 to K 8 of the wavefront manipulator 100 to selected thicknesses d of the cover glass 11 and different refractive indices n I of the immersion medium 17, 21, and table 13 shows the associated displacements Δx and Δy of the wavefront manipulator elements 101 and 103 for each of the configurations K 1 to K 8. In contrast to the wavefront manipulators 100 of the first example objective and of the second example objective, in the third example objective the displacement path of the second wavefront manipulator element 103 along the y-direction is always zero, i.e. the second wavefront manipulator element is arranged in a fixed manner along the y-direction. It should be noted here that only configurations with two different values for the thicknesses of the cover glass are specified, namely for the extreme values of 0.15 mm and 0.19 mm, but in practice configurations for a plurality of intermediate values are also present. The configurations of the wavefront manipulator for the intermediate values, i.e. the travels for the intermediate values, can either be determined directly in the iterative optimization of the surface shapes, or they can be determined from travels determined in the iterative optimization by linear interpolation. Table 12 Table 12K10.151.33K20.151.35K30.151.37K40.151.39K50.191.33K60.191.35K70.191.37K80.191.39Table 13Table 13K12.161530.46019-2.161530.0K22.099870.45555-2.099870.0K32.018280.44719-2.018280.0K41.913080.43413-1.913080.0K52.713540.57333-2.713540.0K62.635380.56729-2.635380.0K72.532350.55662-2.532350.0K82.399920.54014-2.399920.0As can be seen from Table 13, the displacements Δy of the first wavefront manipulator element 101 in the wavefront manipulator of the third example objective along the y direction are approximately twice as large as in the wavefront manipulator of the second example objective. The reason for this is that the relative displacement between the first wavefront manipulator element 101 and the second wavefront manipulator element 103 along the y direction must be brought about solely by means of the first wavefront manipulator element 101 and, for this, an adjustment path which is approximately twice as large as in the case of the first wavefront manipulator element 101 of the wavefront manipulator of the second example objective is necessary.Although the opposite displacement of the second wavefront manipulator element 103 along the y direction is omitted, diffraction-limited imaging can still be achieved, as shown in FIGS. 21 to 24. In FIGS. 21 to 24, the residual optical path length differences occurring with the configurations K 1, K 4, K 5 and K 8 are respectively determined for five different wavelengths and five selected field points of the object field of 0.330 mm x 0.150 mm size. The configurations K 1 and K 5 compensate for the minimum value for the refractive index n I of the immersion medium 17, 21, and the configurations K 4 and K 8 compensate for the maximum value for the refractive index n I of the immersion medium 17, 21, The configurations K 1 and K 4 compensate for the minimum thickness of the cover glass, the configurations K 5 and K 8 compensate for the maximum thickness d of the cover glass 11, the residual optical path length differences are illustrated in units of the reference wavelength 546.07 nm, and the selected field points are the following field points-in each case from bottom to top in FIGS. 21 to 24: <row><cell>F1:< / cell><cell>x = 0.000 mm, y = 0.000 mm< / cell>< / row><row><cell>F2:< / cell><cell>x = 0.000 mm, y = -0.075 mm< / cell>< / row><row><cell>F3:< / cell><cell>x = 0.000 mm, y = + 0.075 mm< / cell>< / row><row><cell>F4:< / cell><cell>x = -0.165 mm, y = 0.000 mm< / cell>< / row><row><cell>F5:< / cell><cell>x = + 0.165 mm, y = 0.000 mm< / cell>< / row><p xml:id="_b897832562" n="0102">As can be seen from FIGS. 21 to 24, residual optical path length differences are present in a large region of the exit pupil for all the field points and wavelengths shown, which do not exceed the value of 0.25. Only at the edge of the exit pupil is the value of 0.25 occasionally exceeded for some field points. In the central region of the exit pupil, on the other hand, the residual optical path length differences remain well below the value of 0.25 for all field points. FIGS. 21 to 24 thus show that the wavefront manipulator compensates the imaging errors almost completely and enables a practically diffraction-limited imaging in all positions.<head xml:id="_b897832563">Fourth example objective< / head><p xml:id="_b897832564" n="0103"> FIG. 25 shows a fourth example objective, which can be part of the detection system 5 of an arrangement for light sheet microscopy.<p xml:id="_b897832565" n="0104">The fourth example objective differs from the preceding example objectives in that only one of the two wavefront manipulator elements 101, 103 is moved at all, while the other wavefront manipulator element is arranged in a fixed position. In contrast to all the preceding example objectives, however, the two wavefront manipulator elements 101, 103 now have different surface shapes for this purpose, i.e. there is no longer any imaginary displacement of the wavefront manipulator elements 101, 103 with respect to one another, in which the two wavefront manipulator elements 101, 103 would complement one another in a complementary manner to a plane-parallel plate and thus to form a neutral optical element. Instead, the free-form surface 15, 107 of each wavefront manipulator element 101, 103 has an individual surface shape.<p xml:id="_b897832566" n="0105">The restriction that only one of the two wavefront manipulator elements 101, 103 is moved initially does in fact entail considerable restrictions with regard to the imaging quality which can be achieved with the wavefront manipulator 100. However, this has the advantage that the construction of the wavefront manipulator of the fourth example objective can once again be greatly simplified with regard to the mechanical and the actuator components in comparison with the wavefront manipulator of the third example objective, which enables a reduction in complexity, construction volume and production outlay.<p xml:id="_b897832567" n="0106">It has been found according to the invention that a part of the deteriorations occurring during the wavefront correction due to the omission of the movement of the second wavefront manipulator element in the opposite direction can be absorbed again by optimizing the surface shape of the free-form surface of the second wavefront manipulator element independently of the surface shape of the free-form surface of the first wavefront manipulator element.<p xml:id="_b897832568" n="0107">It has been found that in this way, despite the saving of all the adjustment movements of the second wavefront manipulator element, an imaging which is still virtually diffraction-limited is possible for a reasonable parameter range from refractive indices of the immersion medium 17, 21 and thicknesses d of the cover glass 11. In practice, although it means an additional outlay if wavefront manipulator elements with two different surface shapes of the free-form surfaces are to be produced (for example the test outlay doubles), this additional outlay can be less than the additional outlay for producing and testing the mechanics and actuators required for the precision movement of the second wavefront manipulator element.<p xml:id="_b897832569" n="0108">In addition, it may also be an advantage that the overall size (volume, weight) of the wavefront manipulator 100 can be reduced, since the space conditions in the space in front of the sample are generally to be regarded as very critical. From the customer or user of an arrangement for light sheet microscopy, it may be desirable in any case for the objective together with associated mechanical and actuator components to take up as little installation space as possible in front of the sample, so that the accessibility to the sample space (for example for the targeted manipulation of the sample itself) is restricted as little as possible.<p xml:id="_b897832570" n="0109">As in the second example objective and in the third example objective, the range of refractive indices n <hi rend="subscript">I< / hi> of the immersion medium 17, 21 is designed for live cell imaging and extends from 1.33 to 1.39. The object field is also the same as in the second example lens and the third example lens, and is 330 x 150 μm. The numerical aperture is minimally smaller than in the second example objective and the third example objective and varies from 0.98 (in the case of n <hi rend="subscript">I< / hi>= 1.33) to 1.02 (in the case of n <hi rend="subscript">I< / hi>= 1.39), and the imaging scale (including tube lens system) varies between 28.1x (in the case of n <hi rend="subscript">I< / hi>= 1.33) and 29.3x (in the case of n <hi rend="subscript">I< / hi>= 1.39).<p xml:id="_b897832576" n="0110">The wavelength range is the same as in the other example objectives.<p xml:id="_b897832577" n="0111">The parameters of the optical components of the fourth example lens are summarized in tables 14 to 16, wherein tables 15 and 16 indicate the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development representing the respective free-form surfaces. Table 14<title desc="title">Table 14ObjectSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.250000Sample medium (refractive index variable according to Table 17) Abbe number 54.50001Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Sample medium (refractive index variable according to Table 17) Abbe number 54.5000Simple Decentration2Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinityCover glass thickness (variable according to Table 17)D263M3Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Immersion medium (refractive index variable according to Table 17) Abbe number 54.50004Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity4.384583Immersion medium (refractive index variable according to Table 17) Abbe number 54.5000Simple Decentration5Sphere-4.7825320.000000Immersion medium (refractive index variable according to Table 17) Abbe number 54.5000Simple Decentration6Sphere-4.7825323.360605NSSK8_SBLOFF7Sphere-8.1431370.6064988Sphere-14.5734983.555271SBAH28_OHARA9Sphere-9.8497240.01000010Sphere-135.3617763.130307NFK51A_SCHOTT11Sphere-25.5729370.01000012Sphere42.1691274.527716SFPL53_OHARA13Sphere-48.1338731.200000Aperture Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm Diaphragm DiaphragmSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.01000015Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration16Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000SNPH5_OHARA17XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.00000018Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000Simple Decentration19Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.08000020Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.00000021XY polynomialinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity2.000000SNPH5_OHARA22Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.01000023Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.00000024Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity1.47893925Sphere-272.6534622.816894SFPL53_OHARA26Sphere-41.8477531.16859027Sphere69.6382465.334404SFPL53_OHARA28Sphere-27.8712651.250000NKZFS4_SBLOFF29Sphere20.8212787.546631SFPL53_OHARA30Sphere-33.8913080.01000031Sphere50.3139743.103981SFPL53_OHARA32Sphere-99.0366520.01000033Sphere19.9606615.708958SFPL53_OHARA34Sphere-41.6488181.250000NKZFS11_SBLOFF35Sphere15.7561311.41268636Sphere17.4694005.067040SFPL53_OHARA37Sphere-22.5771961.200000NKZFS11_SBLOFF38Sphere475.7655330.01000039Sphere18.1875933.134158SLAM52_OHARA40Sphere-53.0900587.506768NKZFS11_SBLOFF41Sphere6.5301776.59189742Sphere-7.3981031.200000NKZFS8_SOTT43Sphere227.9527881.89154544Sphere-9.6965345.098092SLAH88_OHARA45Sphere-10.8283670.01000046Sphere31.5670741.904438SYGH51_OHARA47Sphere-350.3185730.01000048Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity 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infinity infinity infinity infinity infinity126.50000049Sphere189.41700010.900000MBALF4_SBLOFF50Sphere-189.41700060.00000051Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity80.000000NBK7_SOTT52Sphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity48.200000Image ImageSphereinfinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity infinity0.000000In Table 14, the surface numbers can be assigned to the optical components of the third example lens as follows: <row><cell>Area Numbers 6 and 7:< / cell><cell>lens L1 (immersion termination lens 23),< / cell>< / row><row><cell>Area numbers 8 and 9:< / cell><cell>Lens L2,< / cell>< / row><row><cell>Area Numbers 10 and 11:< / cell><cell>Lens L3,< / cell>< / row><row><cell>Area Numbers 12 and 13:< / cell><cell>Lens L4,< / cell>< / row><row><cell>Area Numbers 16 and 17:< / cell><cell>Wavefront manipulator element 101,< / cell>< / row><row><cell>Area Nos. 21 and 22:< / cell><cell>Wavefront manipulator element 103,< / cell>< / row><row><cell>Area Numbers 25 and 26:< / cell><cell>Lens L5,< / cell>< / row><row><cell>Area Nos. 26 and 27:< / cell><cell>Lens L6,< / cell>< / row><row><cell>Area Numbers 27 and 28:< / cell><cell>Lens L7,< / cell>< / row><row><cell>Area Numbers 29 and 30:< / cell><cell>Lens L8,< / cell>< / row><row><cell>Area Numbers 31 and 32:< / cell><cell>Lens L9,< / cell>< / row><row><cell>Area Nos. 33 and 34:< / cell><cell>lens L10,< / cell>< / row><row><cell>Area Numbers 34 and 35:< / cell><cell>lens L11,< / cell>< / row><row><cell>Area Numbers 35 and 36:< / cell><cell>lens L12,< / cell>< / row><row><cell>Area Numbers 37 and 38:< / cell><cell>lens L13,< / cell>< / row><row><cell>Area Nos. 38 and 39:< / cell><cell>lens L14,< / cell>< / row><row><cell>Area Numbers 40 and 41:< / cell><cell>lens L15,< / cell>< / row><row><cell>Area Numbers 42 and 43:< / cell><cell>lens L16,< / cell>< / row><row><cell>Area Numbers 44 and 45:< / cell><cell>Lens L17.< / cell>< / row><row><cell>Area Numbers 46 and 47:< / cell><cell>Lens L18.< / cell>< / row><p xml:id="_b897833036" n="0113">The area numbers 2 and 3 refer to the cover glass, and the area numbers 48 to 52 refer to a tube lens system which is not shown in FIG. 25 as in FIG. 8. The remaining surface numbers relate to so-called dummy surfaces, which are required, for example, to take account of a diaphragm or decentration. The lens L 1 is again the immersion terminating lens 23, which, like the tube lens system, is not part of the detection objective 6. The detection objective 6 of the fourth example objective thus begins with the lens L 2 and ends with the lens L 18.<p xml:id="_b897833037" n="0114">Table 14 shows, for the fourth example objective, the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development which represents the free-form surface 105 used in the first wavefront manipulator element 101 of the wavefront manipulator 100. In contrast, table 15 shows the coefficients C <hi rend="subscript">m,n< / hi> of the polynomial development which represents the free-form surface 100 used in the second wavefront manipulator element 103 of the wavefront manipulator 107. Table 14<title desc="title">Table 14X2:-3.5298E-06XY:-1. 6530E-05Y2:-1.7923E-0...
Claims
Wavefront manipulator (100) having - a first wavefront manipulator element (101) having at least one first free-form surface (105) and a second wavefront manipulator element (103) having at least one second free-form surface (107), and - an actuator system (120), which acts on at least one of the wavefront manipulator elements (101, 103) and has at least one actuator (115, 117, 119, 121), wherein the actuator system (120) makes it possible to bring about a relative displacement between the first wavefront manipulator element (101) and the second wavefront manipulator element (103) both along a first direction and along a second direction which is not parallel to the first direction, - wherein the free-form surfaces (105, 107) can each be represented by a z coordinate, which is described as a function of an x-coordinate perpendicular to the z-coordinate and a y-coordinate perpendicular to the z-coordinate by a polynomial development of the form z = ∑ m, n = 0 ∞ C m, n x m y n characterized in that the polynomial development of the free-form surfaces (105, 107) coefficients C m,n different from zero, for x m y n- terms with an even power m as well as for x m y n- terms with an odd power m and for x m y n- terms with an even power n as well as for x m y n- terms with an odd power n.Wavefront manipulator (100) according to Claim 1, characterized in that the actuator system (120) comprises at least one first actuator arrangement (115, 119) which acts on the first wavefront manipulator element (101) and / or at least one second actuator arrangement (117, 121) which acts on the second wavefront manipulator element (103).Wavefront manipulator (100) according to Claim 2, characterized in that the first actuator arrangement (115, 117, 119, 121) enables displacement of the first wavefront manipulator element (101) both in the first direction and in the second direction and / or the second actuator arrangement (115, 117, 119, 121) enables displacement of the second wavefront manipulator element (103) both in the first direction and in the second direction.Wavefront manipulator (100) according to Claim 3, characterized in that - the first actuator arrangement (115, 117, 119, 121) enables displacement of the first wavefront manipulator element (101) both in the first direction and in the second direction and the second actuator arrangement (115, 117, 119, 121) enables displacement of the second wavefront manipulator element (103) only in a single one of the first direction and the second direction, or - the first actuator arrangement (115, 117, 119, 121) enables displacement of the first wavefront manipulator element (101) only in a single one of the first direction and the second direction and the second actuator arrangement (115, 117, 119, 121) enables displacement of the second wavefront manipulator element (103) both in the first direction and in the second direction.Wavefront manipulator (100) according to Claim 4, characterized in that the relative displacement in the first direction and the relative displacement in the second direction require displacement ranges of different sizes of the actuator arrangement (115, 117, 119, 121), and the actuator arrangement (115, 117, 119, 121) for bringing about the relative displacement between the first and the second wavefront manipulator element (101, 103) for the relative displacement in that direction in which the smaller displacement range is required is configured merely to displace only one of the wavefront manipulator elements (101, 103) and to leave the other wavefront manipulator element fixed.Wavefront manipulator (100) according to Claim 2, characterized in that one of the wavefront manipulator elements (101, 103) is arranged in a fixed position.Wavefront manipulator (100) according to one of Claims 1 to 6, characterized in that the free-form surfaces (105, 107) of the wavefront manipulator elements (101, 103) have identical surface shapes and are arranged with respect to one another in such a way that a relative displacement can be realized in which the wavefront manipulator (100) has a zero effect.Wavefront manipulator (100) according to one of Claims 1 to 6, characterized in that the free-form surfaces (105, 107) of the wavefront manipulator elements (101, 103) have different surface shapes, such that it is not possible to realize a relative displacement in which the wavefront manipulator (100) has a zero effect.Arrangement for light sheet microscopy (1) having an illumination system (3), a detection system (5) and a separating layer system (7), wherein - the separating layer system (7) has a separating layer (11) running along a separating layer plane (9) and having a sample side (13) and an environmental side (15), the separating layer (11) consists of a specific material having a specific thickness (d) and separates a sample (19) located on the sample side (13) in a sample medium (17) from the environmental medium (21) present on the environmental side (15); the illumination system (3) has an illumination direction (31) running at a first angle (β) not equal to zero with respect to the normal (N) of the separating layer plane (9) and a beam shaping system (42) for generating a light sheet (37) in the sample (19); the detection system (5) has an observation direction running at a second angle (α) not equal to zero with respect to the normal (N) of the separating layer plane (9) for observing fluorescent light emanating from the light sheet (37) in the sample (19), wherein aberrations occur in the detection system (5) which depend for a given second angle (α) on the thickness (d) of the separating layer (11) and the refractive index jump between the separating layer (11) and the sample medium (17); characterized in that the detection system (5) comprises a wavefront manipulator (100) according to one of claims 1 to 8, in which the wavefront manipulator (100) can be brought into different configurations by different relative displacements between the first and the second wavefront manipulator element (101, 103), and in which the free-form surfaces (105, 107) of the wavefront manipulator elements (101, 103) are optimized such that different configurations of the wavefront manipulator (120) compensate imaging errors for different combinations of thickness d of the separating layer (11) and refractive index jump between the separating layer and the sample medium (17).Arrangement for light sheet microscopy according to claim 9, characterised in that the detection system (5) has a numerical aperture of at least 0.7.Arrangement for light sheet microscopy according to claim 9 or claim 10, characterised in that the ambient medium present on the surrounding side (15) of the separating layer (11) is an immersion medium (21).Arrangement for light sheet microscopy according to claim 11, characterised in that the immersion medium (21) has a refractive index which does not deviate from the refractive index of the sample medium (17) by more than a value of 0.05.Arrangement for light sheet microscopy according to one of Claims 9 to 12, characterized in that the detection system (5) additionally comprises at least one rotationally symmetrical lens which can be displaced along its optical axis.Arrangement for light sheet microscopy according to Claim 13, characterized in that the at least one rotationally symmetrical lens which can be displaced along its optical axis is arranged in a region of the detection system (59) in which field beams emanating from different object points of the sample (19) do not overlap, or overlap only slightly.Method for compensating an aberration in the detection beam path of an arrangement for light sheet microscopy according to one of Claims 9 to 14, wherein the aberration is attributable to a specific thickness (d) of the separating layer (11) and a specific jump in refractive index between the separating layer (11) and the sample medium (17), characterized in that the compensation of the aberration is effected by bringing the wavefront manipulator (100) into a configuration assigned to the specific thickness d of the separating layer and to the specific jump in refractive index between the separating layer and the sample medium by adjusting the relative displacement between the first wavefront manipulator element (101) and the second wavefront manipulator element (103).Method according to claim 16, characterised in that the bringing of the wavefront manipulator (100) into the configuration associated with the specific thickness (d) of the separating layer (11) and the specific jump in refractive index between the separating layer (11) and the sample medium (17) takes place on the basis of an optimisation process in which the configuration of the wavefront manipulator (100) is changed by changing the relative displacement between the first wavefront manipulator element (100) and the second wavefront manipulator element (103), a measure for the current aberration is determined after the changing of the configuration, and the changing of the configuration and the determination of the measure are continued until an abort condition of the optimisation process is fulfilled.Method according to claim 15, characterised in that the wavefront manipulator (100) is brought into the configuration assigned to the specific thickness of the separating layer and the specific jump in refractive index between the separating layer (11) and the sample medium (17) by taking the suitable configuration from an assignment in which combinations of thicknesses (d) and jumps in refractive index are assigned to configurations of the wavefront manipulator (100), and the configuration taken from the assignment for the specific thickness (d) of the separating layer and the specific jump in refractive index is adjusted on the wavefront manipulator (100).Method according to Claim 16 and Claim 17, characterized in that the wavefront manipulator (100) is brought into the configuration associated with the specific thickness of the separating layer and the specific jump in refractive index between the separating layer and the sample medium by - setting an approximate starting thickness for the specific thickness of the separating layer and an approximate starting jump in refractive index for the specific jump in refractive index, - associating different combinations of thicknesses (d) and jumps in refractive index for the approximate starting thickness and the approximate starting jump in refractive index on the basis of an association, in the configuration of the wavefront manipulator (100), a starting configuration is determined and set at the wavefront manipulator (100), and - the bringing of the wavefront manipulator (100) into the configuration assigned to the determined thickness (d) of the separating layer (11) and the determined jump in refractive index between the separating layer (11) and the sample medium (17) is subsequently carried out on the basis of an optimization process in which the configuration of the wavefront manipulator (100) is changed starting from the starting configuration by changing the relative displacement between the first wavefront manipulator element (100) and the second wavefront manipulator element (103), wherein after the changing of the configuration a measure for the aberration is determined, and the changing of the configuration and the determination of the measure are continued until an abort condition of the optimization process is fulfilled.Method according to Claim 16 or Claim 18, characterized in that the termination condition of the optimization process contains at least one of the following conditions: (a) the measure for the aberration falls below a predefined limit; (b) the change in the measure for the aberration when the configuration is changed falls below a predefined limit.
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