Method for operating a Pirani pressure sensor and arrangement for operating the Pirani pressure sensor

Abstract

Method for operating a Pirani pressure sensor (1) with a measuring resistor (2) and a measuring volume (3) surrounding the measuring resistor, wherein the measuring resistor is subjected to an electrical power (P) and an equilibrium temperature of the measuring resistor (2) is established in the medium of the measuring volume, where a control unit (4) switches between a first measuring mode (M1) and a second measuring mode (M2) during the pressure measurement, wherein in the first measuring mode (M1) the measuring resistor is subjected to a defined maximum power (Pmax), wherein the temperature (T) of the measuring resistor is determined as a measured variable of the pressure to be determined, and in the second measuring mode (M2) the temperature (T) of the measuring resistor is fixed at a maximum temperature (Tmax), wherein the power (P) required to maintain the maximum temperature (Tmax) is determined as a measured variable of the pressure to be determined.

Description

[0001] The invention relates to a method for operating a Pirani pressure sensor according to claim 1 and an arrangement for operating a Pirani pressure sensor according to claim 7.

[0002] Measuring pressure in a given vacuum is an essential component of many applications in industry and science. The vacuum sensors used vary in their suitability for different pressure ranges. Typically, the use of a particular type of vacuum sensor is limited by restrictions regarding accuracy, sensitivity, and the optimal measuring range for the pressure to be measured. If a particularly wide measuring range, for example, ranging from rough vacuum, fine vacuum, high vacuum, to extra-high vacuum, is to be measured, this can practically only be achieved through the combined use of different sensor technologies. Wide-range sensors are typically used to measure pressure across many orders of magnitude. These sensors combine different measuring principles.This means that the pressure can ultimately be read as a continuous value on a device that must combine different sensor technologies or be compatible with them.

[0003] Pirani-type pressure sensors are well-known and widely used for measuring vacuum pressure. A Pirani pressure sensor exploits the property that the thermal conductivity of gases in certain pressure ranges depends on the gas pressure. The higher the ambient gas pressure, the greater the thermal conductivity of the medium; the lower the gas pressure, the less effective heat is at dissipating from a hot surface.

[0004] On a given hot surface, an equilibrium temperature is established at a given electrical power input, i.e., at a given heat input, and through the pressure-dependent heat transfer to the surrounding medium. This forms the basis for pressure measurement using a Pirani pressure sensor.

[0005] In a Pirani pressure sensor, the hot surface is typically realized by a filament or an electrical resistor integrated into a so-called MEMS chip. The equilibrium temperature of the filament or the integrated resistor arranged on a MEMS chip, which occurs under a fixed electrical power load, depends under these conditions on the thermal conductivity of the surrounding medium. The pressure of the surrounding medium can thus be determined from the temperature of the filament or resistor. The temperature of the filament or resistor is determined via its electrical resistance. The filament or resistor thus functions as a resistance thermometer.

[0006] The electrical resistance is thus a measure of the temperature of the filament or resistance component, and the temperature, in turn, is a measure of the pressure of the medium. Thus, the pressure of the surrounding medium can be determined from the resistance for a fixed electrical power supply.

[0007] Examples of Pirani pressure sensors are disclosed in GB 2105472 A, US 6,945,119 B2, DE 4 324 119 C2 and EP 1 552 265 B1.

[0008] The measuring principle of a Pirani pressure sensor is therefore easy to understand; the technology used in the basic design is low-complexity and requires no mechanically moving parts. Furthermore, Pirani pressure sensors offer a wide measuring range from high vacuum to atmospheric pressure. However, due to their operating principle, Pirani pressure sensors are more suitable for low pressures. At higher pressures, the proportion of heat exchange with the surrounding medium via convective processes increases compared to pure heat conduction.

[0009] Pirani sensors based on MEMS pressure sensor technology generally do not exhibit convective effects due to their small dimensions. This limits the measuring range of MEMS Pirani sensors compared to traditional wire Pirani sensors.

[0010] In contrast to heat conduction, convection generally depends on the specific geometry and installation situation of the Pirani pressure sensor. This makes the pressure-temperature characteristic curve of the specific Pirani pressure sensor dependent on the respective installation position, which makes precise pressure measurement across the entire measuring range difficult. Pressure measurement is therefore less reliable and more prone to errors at higher pressures.

[0011] The pressure measurement range of known Pirani sensors is therefore relatively limited, and the accuracy of the Pirani sensors and the reproducibility of the measurement results are in some need of improvement. Pirani sensors are also relatively sensitive to changing environmental influences.

[0012] To implement Pirani sensors, so-called MEMS chips are used in particular. MEMS stands for "micro electrical mechanical systems". Such chips are usually installed in so-called TO packages, i.e. glued, glazed and bonded. TO stands for a package shape borrowed from transistor technology. MEMS chips for Pirani sensors usually contain a measuring resistor whose temperature is determined according to the Pirani measuring principle. This is surrounded on the chip by a cavity that is connected to the vacuum medium to be measured. The heat conduction between the measuring resistor and the chip body via the medium in the cavity, i.e. the gas, is then a measure of the measured pressure. A reference resistor can also be present on the MEMS chip. Such MEMS chips are primarily suitable for use in medium vacuums.

[0013] The stability of the measurement in Pirani pressure sensors depends particularly on ambient temperature fluctuations. Various state-of-the-art solutions are known to compensate for these influences.

[0014] In GB 2105472 A, US 5,608,168 A1 and also WO 2000 / 054018 A1 it is proposed to operate the Pirani sensor system at a constant temperature, i.e. to regulate it to a constant temperature. To do this, the power applied to the sensor system is actively adjusted so that the temperature in the filament remains constant. In this mode of operation, the power supplied during this control is a measure of the heat dissipated into the medium, and thus of the thermal conductivity of the medium and ultimately the pressure prevailing in the medium. Ultimately, this type of approach also determines the temperature of the filament, although the applied power is an indirect measure of how much a fixed temperature difference between the filament and the ambient medium needs to be adjusted.

[0015] DE 11 2005 002 501 B4 discloses a Pirani vacuum measuring device. The document teaches two operating modes of the Pirani sensor: a constant current or a constant voltage, on the one hand, or a constant temperature of the Pirani sensor, on the other. In this case, either a constant current or a constant voltage is supplied to the bridge circuit. In the constant-temperature measuring mode, according to the document, when an unbalanced voltage is detected, a current is fed back to the bridge circuit in such a way that the resistance or the temperature of the Pirani sensor's filament is kept constant, thus maintaining the equilibrium of the bridge circuit.

[0016] Another known measurement method involves measuring the change in electrical resistance in a filament when power is applied to it in pulses. The decay curve over time, i.e., the relaxation of the filament to a specific temperature, then provides information about the thermal conductivity of the surrounding medium and thus about the pressure to be measured.

[0017] The objective is to provide a Pirani pressure measurement setup and a method for pressure measurement using a Pirani sensor that extends the measuring range of the Pirani pressure sensor, compensates for ambient temperature fluctuations more reliably, and allows existing measurement sensors to be used across a pressure range that significantly expands the original pressure range. The goal is to ensure that the absence of convection effects, which normally limits the pressure range, is no longer a hindrance for Pirani pressure sensors based on the MEMS principle, thus expanding the available pressure range for MEMS sensors as well.

[0018] The object is achieved by a method for operating a Pirani pressure sensor having the features of claim 1 and an arrangement for operating a Pirani pressure sensor having the features of claim 7. The respective subclaims contain expedient and / or advantageous embodiments of the method and arrangement.

[0019] The method for operating a Pirani pressure sensor with a measuring resistor and a measuring volume surrounding the measuring resistor, wherein the measuring resistor is supplied with electrical power and an equilibrium temperature of the measuring resistor is established in the medium of the measuring volume, is carried out according to the invention in such a way that a control unit switches between a first measuring mode and a second measuring mode during pressure measurement. In the first measuring mode, the measuring resistor is supplied with a defined maximum power Pmax, which results from the material limit values, wherein the temperature of the measuring resistor is determined as the measured variable of the pressure to be determined. In the second measuring mode, the temperature of the measuring resistor is fixed at a maximum temperature, wherein the power required to maintain the maximum temperature is determined as the measured variable of the pressure to be determined.

[0020] The basic idea of ​​the method according to the invention is to operate a given Pirani pressure sensor in such a way that its technical design is utilized to its maximum potential. This is achieved, on the one hand, by heating the measuring resistor of the Pirani pressure sensor in the first measuring mode to a maximum temperature which results from the material limit values. This maximum temperature results in particular from the material limit values ​​of the given Pirani pressure sensor. This maximum temperature occurs primarily when the pressure in the measuring volume decreases at a certain minimum pressure. As soon as this maximum temperature is reached, the temperature at the measuring resistor is fixed and the measuring resistor is operated in a second measuring mode. The temperature of the measuring resistor is then kept constant and the power supply to the measuring resistor is regulated so that the temperature remains stable even as the pressure continues to decrease.In the first measurement mode, the temperature of the measuring resistor serves as the measured variable for determining the pressure; in the second measurement mode, the power supplied to maintain the temperature of the measuring resistor is evaluated as the measured variable for the pressure. Switching between the first and second measurement modes makes it possible to use a given Pirani pressure sensor for pressure measurement even below the specified pressure ranges, and to obtain a stable and usable measurement signal with sufficient signal strength even at particularly low pressures.

[0021] The method thus aims to generate a maximum possible pressure signal and make it available for metrological processing by exploiting a maximum permissible device threshold for a given Pirani pressure sensor.

[0022] In a suitable embodiment, the method is carried out with the following steps: When the pressure in the chamber, i.e., within the measuring volume, changes, the electrical power supply is increased and the temperature in the measuring resistor is measured. This results in a sufficiently strong measurement signal in the first measurement mode.

[0023] The measuring resistor is now controlled by a control unit until a threshold state with a defined maximum temperature and / or a defined maximum supplied power is reached with the first measuring mode or the second measuring mode.

[0024] In the first measuring mode, in a first pressure range, when the maximum power is reached, the power supply is fixed to the maximum value and the pressure in the measuring volume is determined by measuring the temperature in the measuring resistor.

[0025] If a maximum temperature is reached in the measuring resistor, the device switches to the second measuring mode. In the second measuring mode, the temperature is fixed at the maximum temperature, and the power supplied to the measuring resistor at this maximum temperature is determined.

[0026] The maximum temperature can be reached in two ways, depending on the measurement conditions. Firstly, the maximum temperature is reached when the pressure in the measurement volume decreases due to the decrease in the thermal conductivity of the medium. By switching to the second measurement mode, pressure measurements can now be taken at even lower pressures. Secondly, the maximum temperature can also be reached by changes in the ambient temperature of the Pirani pressure sensor. In such a case, switching to the second measurement mode compensates for the fluctuating ambient temperature.

[0027] In one embodiment, the first measuring mode is carried out at a higher first pressure range and the second measuring mode is carried out at a lower second pressure range, wherein the control unit automatically switches between the first measuring mode and the second measuring mode, wherein the pressure ranges can be traversed in both directions.

[0028] Due to circuitry, it may also happen that the two pressure ranges overlap, or that a switching hysteresis occurs depending on the direction of the pressure ranges being traversed. In one embodiment, the control unit executes the first measuring mode or the second measuring mode in this transitional range when passing through the pressure ranges. This can be used for a pressure-dependent switching hysteresis between the first measuring mode and the second measuring mode.

[0029] In one embodiment, a Pirani pressure sensor is used in an arrangement consisting of a MEMS chip with a cavity arranged on the MEMS chip as the measuring volume and a first conductor structure as the measuring resistor. A MEMS chip proves to be particularly advantageous for implementing the method, especially because a reference resistor arranged on the chip allows for independent temperature measurement.

[0030] An arrangement for operating a Pirani pressure sensor comprises a measuring resistor, a measuring volume at least partially surrounding the area of ​​the measuring resistor, and a control unit for controlling the operation of the measuring resistor. The control unit contains a controller for applying electrical power to the measuring resistor, a measuring unit for detecting the resistance value of the measuring resistor, and a first calibration memory for a stored temperature calibration function for converting the resistance value into a temperature value and the temperature value into a value for a measuring pressure at a predetermined power application.This arrangement is designed such that the control unit contains a power measuring unit for the electrical power applied to the measuring resistor and a second calibration memory with a stored power calibration function for converting an electrical power supplied at a fixed temperature into a measuring pressure. Furthermore, the control unit has a switching means between a pressure measurement via the temperature calibration function and a pressure measurement via the power calibration function.

[0031] The control unit is designed to enable two measurement modes: first, determining the temperature of the measuring resistor by determining the resistance value at a fixed electrical power; second, determining a variable electrical power load while ensuring a constant temperature. The control unit has a switching mechanism for this purpose.

[0032] The switching means and the calibration functions can be implemented in circuitry or in the form of program code. In one embodiment, the control unit has program code for implementing the temperature calibration function, the power calibration function, and / or the switching means.

[0033] In one embodiment, the Pirani pressure sensor is designed as a MEMS chip in which the measuring resistor is provided as a first conductive track, a cavity adjacent to the first conductive track as a measuring volume, and a second conductive track as a reference thermometer.

[0034] The method according to the invention and the arrangement for carrying out the method will be explained in more detail below using exemplary embodiments. The attached figures serve to illustrate this. Fig. 1 to 8. The same reference symbols are used for identical and / or equivalent components.

[0035] It shows: Fig. 1 a schematic sequence of the method according to the invention, Fig. 2 a sequence of the individual measuring modes depending on the ambient vacuum pressure, Fig. 3 a running through the measuring modes of the measuring method with decreasing pressure and passing through a transition area, Fig. 4 a pass through the measuring modes of the measuring method with increasing pressure with the passage through the transition range, Fig. 5 exemplary curves of the measuring resistance and the associated electrical power as a function of pressure in the first and second measuring mode, Fig. 6 exemplary curves of the measuring resistance and the associated electrical power as a function of pressure in the first and second measuring mode with a transition range, Fig. 7 an exemplary control unit coupled with a Pirani pressure sensor, Fig. 8 shows an exemplary MEMS chip for use as a Pirani pressure sensor.

[0036] The method pursues various goals and approaches in the embodiments described below. A first goal is to empirically compensate for a temperature fluctuation occurring in the area of ​​the Pirani pressure sensor without additional physical measurement and control loops. Classic, state-of-the-art Pirani pressure sensors in the form of a filament cannot measure ambient temperatures. Therefore, one embodiment uses a Pirani pressure sensor in the form of a MEMS chip, which has a second meandering structure of a conductor track. This can be used to determine ambient temperatures.

[0037] A second goal is to configure the entire measuring system to achieve a maximum measurement signal for each pressure range, particularly when using a MEMS chip as a Pirani pressure sensor. The method explained here allows measurement at a temperature difference of, for example, up to 250 K (application example for a specific MEMS Pirani sensor) at very low pressures. The temperature value stated here is merely an example and depends on the specific MEMS pressure sensor in question. It is a feedback system in which the pressure range is approximately determined during start-up, whereby the result can be measured with a maximum permissible voltage on the Pirani sensor. This increases the signal strength in the respective pressure range compared to conventional measurement methods.

[0038] Fig. 1 shows a schematic flow chart of the method according to the invention. The method steps and processes described below aim, on the one hand, to expand the measuring range of a Pirani pressure sensor so that, in particular, lower pressures can be measured than with the Pirani sensors commonly used in the prior art. On the other hand, the method is intended to ensure that changing ambient conditions, in particular changing temperatures in the vacuum of the medium or of a nearby container wall, can be compensated for. The method therefore also aims to stabilize the measuring process. This means, in particular, that a change between the first measuring mode and the second measuring mode can be triggered both as a function of the pressure of the ambient vacuum and independently of the pressure.

[0039] When presented in Fig. 1, a given initial pressure is initially assumed, at which a given Pirani pressure sensor is designed for pressure measurement. The Pirani pressure sensor can be operated by applying a variable electrical power P. In parallel, the actual measurement process using the Pirani sensor runs. This involves, for example, determining the temperature T of the measuring resistor of the Pirani sensor at a specific power application, and using this to determine the pressure in the surrounding vacuum. As previously explained, the temperature is determined by determining the current electrical resistance value R of the measuring resistor and converting this into the temperature value.

[0040] During the measurement process of the Pirani pressure sensor, two borderline cases can occur in connection with the specific measurement sequence in which the Pirani pressure sensor is subjected to maximum load. In the first borderline case, a maximum temperature Tmax of the sensor's measuring resistor is reached. This maximum temperature is defined in advance and specified as a value in a control unit for operating the Pirani sensor. In such a case, the Pirani sensor continues to operate in a measuring mode M2. This is done in such a way that the maximum temperature Tmax in the Pirani sensor's measuring resistor is kept constant. As the measurement progresses, the power required by the Pirani sensor to maintain this maximum temperature Tmax is determined as a measured variable for the pressure prevailing in the vacuum and converted into the corresponding pressure value.

[0041] However, a second limiting case is also possible, in which the measuring resistor of the Pirani sensor is subjected to a maximum power Pmax. This maximum power Pmax is simply determined from the voltage drop across the measuring resistor and the current flowing through the measuring resistor. It is also specified in the control unit for operating the Pirani sensor and results, for example, from the particular Pirani sensor model used. In such a case, the Pirani sensor is operated in a measuring mode M1. The applied power is fixed to the maximum value Pmax by the control unit, and the temperature T of the measuring resistor is determined and evaluated as a measured variable for determining the pressure in the surrounding vacuum.

[0042] It is an essential idea to operate a given Pirani pressure sensor either at a maximum temperature or at a maximum power load using the method explained here in order to maximize the obtained measurement signal and to extend the measuring range of the Pirani pressure sensor.

[0043] It should be emphasized that the designations "first measurement mode M1" and "second measurement mode M2" do not indicate any hierarchy between the two modes. The Pirani sensor is used under specific conditions, with an initial process in which the power applied to the sensor's measuring resistor is gradually increased. The Pirani sensor is operated in measurement mode M1 or measurement mode M2 ​​depending on whether either the maximum power Pmax or the maximum temperature Tmax at the measuring resistor has been reached.

[0044] The change between the first measuring mode M1 and the second measuring mode M2 ​​can occur especially when the pressure is reduced in a vacuum. Fig. Figure 2 shows a corresponding example. In the illustration in Fig. 2, we initially assume a volume in which a sufficiently high pressure prevails, such as in the atmospheric pressure range or in a rough vacuum. In this range, the Pirani sensor is first subjected to a specific electrical power P. The electrical power is fixed at a maximum power Pmax, which is based on the upper load limit of the Pirani sensor.

[0045] The measuring resistance of the Pirani sensor assumes an equilibrium temperature, which is established through heat conduction with the surrounding medium. This equilibrium temperature is measured. It is a measure of the pressure of the medium. This is the measuring principle of measuring mode M1.

[0046] As the pressure continues to decrease, i.e., as the vacuum increases, the thermal conductivity of the surrounding medium also decreases. With a fixed maximum power Pmax applied, the temperature in the measuring resistor increases accordingly with decreasing pressure of the surrounding medium. The measuring range of the Pirani sensor is therefore limited by a maximum temperature at low pressures.

[0047] In the method according to the invention, the measuring range is extended to lower pressures. As soon as the control unit registers a maximum temperature Tmax at the measuring resistor, it switches to measuring mode M2. This mode consists of fixing the maximum possible temperature Tmax reached by the Pirani sensor. Measuring mode M2 ​​now operates in such a way that, as the vacuum pressure continues to decrease, the Pirani sensor is controlled so that the existing maximum temperature Tmax at the measuring resistor is maintained. The power P supplied to the Pirani sensor and required to maintain the maximum temperature now acts as the pressure measurement. This power is determined and used as the basis for determining the pressure in the vacuum according to an existing calibration.

[0048] Because the thermal conductivity of the medium surrounding the measuring resistor decreases further with further pressure reduction, making it more difficult for the measuring resistor to dissipate heat into the surrounding medium, a lower electrical power supply is required to maintain a constant temperature (Tmax) of the measuring resistor. This allows the sensor to operate at a maximum temperature of the measuring resistor when the pressure in the area of ​​the Pirani sensor is further reduced, while simultaneously extending the measuring range of the Pirani sensor to lower pressures. This ensures that the available signal strength for evaluation of the measurement signal remains sufficiently high across all pressure ranges.

[0049] The Pirani sensor's control unit automatically selects between measurement mode M2 ​​and measurement mode M1. The criterion for deciding between measurement mode M1 and measurement mode M2 ​​is which of the two maximum values, Pmax or Tmax, is reached first at a specific pressure with increasing power input. If the maximum power Pmax is reached first, the Pirani sensor operates in measurement mode M1. If the temperature at the Pirani sensor reaches temperature Tmax first, measurement mode M2 ​​is activated.

[0050] The control of the Pirani sensor therefore aims to operate a given Pirani sensor as close as possible to the limits of the respective permissible operating parameters Pmax and Tmax on the device side.

[0051] This mode of operation is particularly useful when the Pirani pressure sensor is operated in a vacuum environment with a variable pressure, where the pressure varies over several orders of magnitude. For example, the method is suitable for a pressure range of 10 -6 mbar to 10 3 mbar, i.e., between the pressure range of high vacuum and normal atmospheric pressure. The method is particularly suitable for monitoring the pressure in a volume that is alternately evacuated and repressurized.

[0052] An example of this can be found in the Fig. 3 and Fig. 4. In addition, the pressure and temperature curves in the Fig. 5 and Fig. 6 shown.

[0053] In the example in Fig. 3, an initial pressure in the atmospheric range is assumed, with the pressure continuously decreasing. Fig. Figure 4 shows the opposite pressure curve, where a low pressure, for example a high vacuum, is assumed and the pressure in the measuring volume increases until atmospheric pressure is reached.

[0054] In Fig. 3, the initial pressure is initially high, for example, atmospheric pressure, which is subsequently reduced. As described, the Pirani pressure sensor is initially operated in measurement mode M1. If the pressure continues to decrease, especially when a high vacuum is reached, the control unit switches to measurement mode M2.

[0055] In the presentation in Fig. 3, there is a transition area U between the pressure range in which the measuring mode M1 is executed and the pressure range in which the measuring mode M2 ​​is operated. In this transition area, it is possible to operate the Pirani pressure sensor in both the measuring mode M1 and the measuring mode M2. Which of the two measuring modes is actually executed in the transition area depends in particular on the direction in which the pressure ranges in the measuring volume are traversed. In the example in Fig. 3, measurement operation is initially assumed to be in measuring mode M1, and this measuring mode is then maintained in the transition range U. Only at the lower end, the lowest pressure of the transition range U, does the control unit switch the operation of the Pirani pressure sensor to measuring mode M2.

[0056] In the presentation in Fig. 4, the pressure range is traversed in the reverse direction. This means that the process begins at a low pressure, for example, in the high vacuum range, and then slowly increases until the pressure finally reaches atmospheric pressure. In this case, the Pirani pressure sensor is initially operated in measuring mode M2. As the pressure increases, the control unit initially controls the Pirani pressure sensor in M2 mode and maintains the M2 measuring mode even within the transition range U. Only at the upper limit, i.e. the highest pressure in the transition range U, does the control unit switch to measuring mode M1.

[0057] The Fig. 5 and Fig. 6 each show a diagram illustrating the electrical resistance R at the measuring resistor of the Pirani pressure sensor and the power P applied to the measuring resistor. The resistance R is a direct measure of the temperature of the measuring resistor. The above-mentioned measuring modes M1 and M2 can be seen, as well as the maximum temperature Tmax fixed in the measuring mode M2 ​​and the maximum power Pmax fixed in the measuring mode M1. The function m1 present in the measuring mode M1 represents a first calibration function m1, and the function m2 present in the measuring mode M2 ​​forms the calibration function m2 applicable to the measuring mode M2. The diagrams in the Fig. 5 and Fig. 6 illustrate that the pressure measuring ranges are determined via the calibration functions m1 and m2 and the associated resistance and power values ​​R and P.

[0058] The two measuring modes M1 and M2 depend on the pressure in the measuring volume. At a certain switching pressure pU, the control unit switches from measuring mode M1 to measuring mode M2 ​​or vice versa from measuring mode M2 ​​to measuring mode M1. The switching pressure pU is in the diagram Fig. 5 out of 10 0 mbar. This is merely an example value, intended for illustrative purposes only.

[0059] Fig. 6 also shows the transition range U. One of the two available measuring modes can be used, and it is also possible, for example, to activate one measuring mode when increasing the pressure and the other when decreasing the pressure. This enables a comparison of the measured pressure in the transition range between the two measuring modes M1 and M2 for different pressure curves. In this example, there is no clearly defined transition pressure pU. In this range, it is possible, for example, that neither the maximum temperature Tmax nor the maximum power Pmax are clearly recorded, or that they fluctuate due to changes in the ambient conditions. There is no clear switching pressure pU here, but rather the transition range U.

[0060] The transition range, in particular, causes a switching hysteresis in the combined resistance and power-pressure diagram when passing through different pressure ranges. For example, the pressure in the measuring volume can initially be increased from a low pressure to a higher pressure. In the low pressure range, the Pirani pressure sensor initially operates in measuring mode M2. At a certain switching pressure p1, the measuring mode switches to measuring mode M1 as described.

[0061] Conversely, a pressure reduction from the higher pressure range to the lower pressure range is also possible. In this case, the Pirani pressure sensor is initially operated in measuring mode M1, and the measuring mode switches to measuring mode M2 ​​at a switching pressure p2. The switching pressures p1 and p2 are generally different from each other. This constitutes the switching hysteresis of the control method according to the invention, which occurs primarily when passing through the pressure in the measuring volume.

[0062] The transition range U between the two switching pressures p1 and p2 thus results from a switching hysteresis within the control sequence of the Pirani pressure sensor executed by the control unit. The width of the transition range U depends on several conditions, in particular the thermal conductivity of the specific gas present in the receiver.

[0063] The width of the transition range also depends on the speed at which the pressure within the measurement volume changes, as well as the time required for switching, adjusting, and stabilizing the respective measurement mode. A comparatively rapid pressure change results in a correspondingly large switching hysteresis and thus a correspondingly wide transition range. However, if the pressure in the measurement volume is changed only slowly and cycled through a series of states in which a quasi-equilibrium is established between the inertia of the Pirani pressure sensor control and the pressure of the medium, the width of the transition range can be significantly reduced.

[0064] Fig. 7 shows an exemplary block diagram for a connection of a control unit with a Pirani pressure sensor. Fig. 7 shows an exemplary Pirani pressure sensor 1 with a measuring resistor 2 arranged in the area of ​​the pressure sensor. The Pirani pressure sensor 1 is located in a surrounding measuring volume 3.

[0065] The measuring resistor 2 is supplied with an electrical power P. The electrical power P is, as is known, the product of a voltage drop across the measuring resistor and a current flowing through this measuring resistor.

[0066] A control unit 4 is provided for wiring the Pirani pressure sensor 1. The components contained in the control unit 4, which are explained below as examples, can be implemented either as hardware with corresponding circuits or as software.

[0067] The control unit 4 contains a temperature calibration memory 5 with a temperature calibration function m1 and a power calibration memory 6 with a power calibration function m2. The temperature calibration function m1 and the power calibration function m2 essentially correspond to the curves m1 and m2 in the Fig. 5 and Fig. 6. Furthermore, a switching means 7 is provided, in which the control unit 4 can be operated in the measuring mode M1 or in the measuring mode M2 ​​and has an optimal range for electronic control and evaluation.

[0068] The control unit 4 also contains a measuring unit 8 for the temperature of the measuring resistor 2. This is usually designed as a resistance measuring unit, wherein the value of the electrical resistance R of the measuring resistor 2 determined with this resistance measuring unit is converted into a temperature.

[0069] The control unit 4 further contains a power control unit 9, which regulates the power supply to the measuring resistor 2. Furthermore, a measuring unit 10 is provided, in which the measurement sequence of the measuring mode M1 is stored and which controls the measuring mode M1, as well as a measuring unit 11, which contains the sequence of the measuring mode M2 ​​and which controls the sequence of the measuring mode M2. The measuring units 10 and 11, the switching unit 7, and the calibration memories 5 and 6 can be implemented either individually or as a single program code.

[0070] Fig.Figure 8 shows an exemplary MEMS chip 12 as an embodiment for a Pirani pressure sensor. The MEMS chip contains a first conductor track 13 for the measuring resistor and a cavity 14 surrounding the conductor track, which has a direct connection to the surrounding vacuum. The cavity 14 forms the surrounding measuring volume for the conductor track 13. The conductor track 13 is typically applied to a membrane and suspended "freely" in the cavity 14. The conductor track 13 of the measuring resistor is separated from the cavity 14 by a thin wall 15 of the membrane.

[0071] The MEMS chip also features a reference resistor 16, which allows the chip temperature to be determined independently and on-chip. This also serves to determine the ambient temperature of the medium in the vicinity of the measuring resistor. If necessary, the ambient temperature measured by the reference resistor, the fixed maximum temperature Tmax, serves as the basis for the aforementioned control sequences. This allows the control of the Pirani pressure sensor's measuring setup to react directly to changing temperatures in the vacuum medium. The MEMS chip is located, for example, on a silicon substrate and housed in a TO package.

[0072] The method and the arrangement for carrying out the method have been explained using exemplary embodiments. Further configurations are possible within the scope of expert practice. Further embodiments are also apparent from the subclaims. List of reference symbols M1 first measuring mode m1 Temperature calibration function M2 second measuring mode m2 power calibration function P electrical power Pmax maximum power R electrical resistance T Temperature Tmax maximum temperature U transition area 1 Pirani pressure sensor 2 measuring resistor 3 measuring volumes 4 Control unit 5 temperature calibration memories 6 power calibration memories 7 Switching means 8 measuring unit 9 Power control unit 10 Measuring unit for measuring mode M1 11 Measuring unit for measuring mode M2 12 MEMS chips 13 Conductor track for measuring resistor 14 Cavity 15 Wall 16 Reference resistor

Claims

[1] Method for operating a Pirani pressure sensor (1) with a measuring resistor (2) and a measuring volume (3) surrounding the measuring resistor, wherein the measuring resistor is subjected to an electrical power (P) and an equilibrium temperature of the measuring resistor (2) is established in the medium of the measuring volume, where a control unit (4) switches between a first measuring mode (M1) and a second measuring mode (M2) during the pressure measurement, wherein in the first measuring mode (M1) the measuring resistor is subjected to a defined maximum power (Pmax), wherein the temperature (T) of the measuring resistor is determined as a measured variable of the pressure to be determined, and in the second measuring mode (M2) the temperature (T) of the measuring resistor is fixed at a maximum temperature (Tmax), wherein the power (P) required to maintain the maximum temperature (Tmax) is determined as a measured variable of the pressure to be determined. [2] Method according to claim 1 characterized bythat during operation of the Pirani pressure sensor, the pressure-dependent measuring signal is maximized by operating the Pirani pressure sensor in the first measuring mode (M1) and / or in the second measuring mode (M2) at a respective device-defined destruction limit, wherein the destruction limit in the first measuring mode (M1) corresponds to the fixed maximum power (Pmax) at the measuring resistor (2) and the destruction limit in the second measuring mode (M2) corresponds to the fixed maximum temperature (Tmax) at the measuring resistor (2). [3] Method according to claim 1 or 2, characterized by following adjusting procedural steps - Changing the pressure within the measuring volume (3) with simultaneous increase of the electrical power supply to the measuring resistor (2) and a measurement of the temperature (T) in the measuring resistor, - Operational control of the measuring resistor by means of a control unit (4) until reaching a threshold state with a defined maximum temperature (Tmax) and / or a defined maximum supplied power (Pmax) with the first measuring mode (M1) or the second measuring mode (M2), wherein - In the first measuring mode (M1) in a first pressure range, when the maximum power (Pmax) is reached, the power supply is fixed to the maximum value (Pmax) and the pressure in the measuring volume is determined by measuring the temperature (T) in the measuring resistor as a pressure-dependent measured variable (G) and - Switching to the second measuring mode (M2) occurs when the temperature (T) in the measuring resistor reaches the maximum temperature (Tmax), wherein in the second measuring mode the temperature (T) is fixed to the maximum temperature (Tmax) and the power (P) supplied to the measuring resistor at this maximum temperature (Tmax) is determined as a pressure-dependent measured variable. [4] Method according to one of claims 1 to 3, characterized by that the first measuring mode (M1) is carried out at a higher first pressure range and the second measuring mode (M2) is carried out at a lower second pressure range, wherein the control unit automatically switches between the first measuring mode (M1) and the second measuring mode (M2), wherein the pressure ranges and the switching can be traversed in both directions. [5] Method according to one of the preceding claims, characterized by that the first measuring mode (M1) or the second measuring mode (M2) is executed by the control unit (4) when passing through the pressure ranges in a transition range U, wherein a switching hysteresis is realized depending on the direction passed through within the transition range U. [6] Method according to one of the preceding claims, characterized bythat an arrangement comprising a MEMS chip (12) with a cavity (14) arranged on the MEMS chip (12) as a measuring volume and a first conductor structure (13) as a measuring resistor is used as the Pirani pressure sensor (1). [7] Arrangement for operating a Pirani pressure sensor (1), with a measuring resistor (2), a measuring volume at least partially surrounding the area of ​​the measuring resistor (2), a control unit (4) for controlling the operation of the measuring resistor, containing a controller for applying electrical power to the measuring resistor, a measuring unit for detecting the resistance value of the measuring resistor (2) with a first temperature calibration memory (5) for a stored temperature calibration function (m1) for converting the resistance value into a temperature value and the temperature value into a value for a measuring pressure at a predetermined power application, where the control unit (4) contains a power measuring unit for an electrical power applied to the measuring resistor (2), a power calibration memory (6) with a stored power calibration function (m2) for converting an electrical power supplied at a fixed temperature into a measuring pressure, wherein the control unit has a switching means (7) between a pressure measurement via the temperature calibration function (m1) and a pressure measurement via the power calibration function (m2). [8] Arrangement according to claim 7, characterized by that the control unit (4) has a program code for implementing the temperature calibration function (m1), the power calibration function (m2), pressure calculation and / or the switching means (7). [9] Arrangement according to one of claims 6 to 8, characterized bythat the Pirani pressure sensor (1) is designed as a MEMS chip (12), in which the measuring resistor is provided as a first conductor track (13), a cavity (14) adjacent to the first conductor track as a measuring volume and a second conductor track as a reference thermometer (16).

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