Capacitive tilt sensor

Abstract

The capacitive inclination sensor according to the invention comprises a measuring electrode surface and a reference electrode surface arranged in a cavity. The measuring electrode surface comprises a first fine-gauge surface and a second fine-gauge surface, both of which are arranged concentrically and coplanar with a first center point of the measuring electrode surface. The first fine-gauge surface and the second fine-gauge surface each comprise a plurality of equally distributed electrode sub-element groups, each comprising a first electrode sub-element and a second electrode sub-element. All first electrode sub-elements of the first fine-gauge surface are conductively connected, and all second electrode sub-elements of the first fine-gauge surface are conductively connected. Likewise, all first electrode sub-elements of the second fine-gauge surface are conductively connected, and all second electrode sub-elements of the second fine-gauge surface are conductively connected.The cavity is partially filled with a dielectric fluid, whereby the position of the dielectric fluid in the cavity of the capacitive inclinometer relative to the measuring electrode surface and the reference electrode surface is dependent on the inclination. The dielectric fluid has a different dielectric constant than a medium surrounding the dielectric fluid in the cavity.

Description

FIELD OF TECHNOLOGYThe present invention relates to a capacitive inclination sensor according to claim 1.PRIOR ARTFrom the utility model DE 92 06 111 U1 a liquid inclination sensor is known which consists of a liquid chamber partially filled with a liquid. An odd number of segment electrodes and a reference electrode are applied to an electrically insulating carrier. The reference electrode may be composed of a number of differential electrodes corresponding to the number of segment electrodes. The disclosed liquid inclination sensor is usable over a 360 degree measurement range.Patent application DE 35 12 983 A1 discloses a capacitive inclination and flatness measuring device which has a hermetically sealed housing which is preferably filled by up to half with a non-conductive dielectric liquid. Four circular-segment-shaped electrodes which form a capacitor arrangement are inserted into this liquid. If the inclination and flatness measuring device is inclined from its reference position, the depth of immersion of the electrodes in the dielectric liquid and thus the capacitance of the capacitor arrangement change depending on the inclination of the measuring device.The disadvantage of the prior art known is the complicated and complicated interconnection of the individual electrodes. At the same time, in the case of the measurement devices mentioned, the measurement range is extended to 360 degrees, with the compromise of the associated loss of resolution that the disclosed measurement devices would have in a smaller measurement range.SUMMARY OF THE INVENTIONThe object of the invention is to provide a capacitive inclination sensor which has a comparatively high measurement accuracy and is cost-effective to produce.This object is achieved according to the invention by a device having the features of claim 1. Advantageous embodiments and developments of the device according to the invention are specified in the respective dependent claims.The capacitive inclination sensor according to the invention comprises a measuring electrode surface arranged in a cavity and a reference electrode surface. The measuring electrode surface in turn comprises a first fine track surface and a second fine track surface, both of which are arranged concentrically and coplanar with a first center point of the measuring electrode surface. With respect to the first center point, the first fine track surface has a first outer radius and the second fine track surface has a second outer radius. The first fine track surface and the second fine track surface each comprise a plurality of uniformly distributed electrode sub-element groups, which each comprise a first electrode sub-element and a second electrode sub-element. All first electrode sub-elements of the first fine track area are conductively connected and all second electrode sub-elements of the first fine track area are conductively connected. Likewise, all first electrode sub-elements of the second fine track surface are conductively connected and all second electrode sub-elements of the second fine track surface are conductively connected. The cavity is partially filled by a dielectric liquid, wherein the position of the dielectric liquid in the cavity of the capacitive inclination sensor with respect to the measurement electrode surface and the reference electrode surface is inclination-dependent. The dielectric liquid has a different dielectric constant than a medium surrounding the dielectric liquid in the cavity.According to an advantageous development of the invention, the measuring electrode surface additionally comprises a first coarse track surface and a second coarse track surface. The first coarse track surface has a third outer radius and the second coarse track surface has a fourth outer radius, wherein both coarse track surfaces are arranged concentrically and coplanar with the first center point. The two coarse track surfaces are each formed in two parts.In a further embodiment, the first fine track surface and the second fine track surface comprise an identical number of electrode sub-element groups.Advantageously, the number of electrode sub-element groups per fine track area is odd. In this case, all first and second electrode sub-elements are arranged periodically alternately in such a way that within a fine track surface a first electrode sub-element lies diametrically opposite a second electrode sub-element with respect to the first center point.The capacitive inclination sensor advantageously comprises a processing device for generating and processing measurement signals using the measurement electrode surface and the reference electrode surface.According to an advantageous development, the fine track surfaces and additionally or alternatively the coarse track surfaces are arranged and additionally or alternatively constructed in such a way that their measurement signals have a predefined phase shift.The fine track surfaces and additionally or alternatively the coarse track surfaces are advantageously designed structurally such that for each inclination position of the capacitive inclination sensor at least one of the measurement signals is monotonically increasing or monotonically decreasing.In a further embodiment, at least one fine track surface and additionally or alternatively at least one coarse track surface are designed structurally such that a sinusoidal measurement signal results.According to a further aspect, the reference electrode surface has at least one corresponding reference sub-surface per fine track surface and additionally or alternatively per coarse track surface. The corresponding reference sub-surfaces are arranged concentrically and coplanar with a second center point of the reference electrode surface.In a further embodiment, the measuring electrode surface and the reference electrode surface lie in an identical plane and form a combined reference measuring electrode surface. The measuring electrode surface and the reference electrode surface are arranged concentrically with respect to a common third center point.Advantageously, with respect to the first, second, third and fourth outer radii, there is the following relationship:R1: first outer radius,R2: second outer radius,R3: third outer radius,R4: fourth outer radius;In a further embodiment, the capacitive inclination sensor comprises two measuring electrode surfaces and two reference electrode surfaces, the centers of which lie on a common axis of rotation, wherein the measuring electrode surfaces point in opposite directions and either• the measuring electrode surfaces are arranged between the first reference electrode surface and the second reference electrode surface, or• the reference electrode surfaces are arranged between the first measurement electrode surface and the second measurement electrode surface,so that at least two subspaces are formed.According to an advantageous development, the measuring electrode surface and the reference electrode surface lie in two different planes arranged parallel to one another, wherein their center points lie on a common rotational axis.The capacitive inclination sensor advantageously comprises at least one carrier substrate and a first and a two electrode surface. The carrier substrate has two opposite side surfaces, wherein the first electrode surface is arranged on the first side surface and additionally or alternatively the second electrode surface is arranged on the second side surface of the carrier substrate. The first and additionally or alternatively the second electrode surface is designed as a reference measuring electrode surface or as a reference electrode surface or as a measuring electrode surface.According to an advantageous development, the capacitive inclination sensor can also determine a pitch inclination in addition to a roll inclination about the axis of rotation.In a further embodiment, the capacitive inclination sensor is configured such that the measuring electrode surface comprises a combined fine track surface consisting of the first and the second fine track surface. In this case, each electrode sub-element group of the combined fine track surface additionally comprises a third electrode sub-element in addition to a first and a second electrode sub-element, wherein all third electrode sub-elements are conductively connected. There are an identical number of periodically distributed first, second and third electrode sub-elements. The first, second and third electrode sub-elements are arranged offset with respect to one another in such a way that the resulting measurement signals have a predefined phase shift for at least two of the electrode sub-elements.The invention is also explained in more detail below with regard to further features and advantages on the basis of the description of exemplary embodiments and with reference to the appended schematic drawings.BRIEF DESCRIPTION OF THE DRAWINGSThe following are shown: FIG. 1 shows a schematic view of a capacitive inclination sensor and a processing device with a memory module; FIG. 2 shows a schematic view of a capacitive inclination sensor modified from FIG. 1 and of a processing device having a memory module; FIG. 3 shows a schematic view of a measuring electrode surface of a capacitive inclination sensor according to a first exemplary embodiment; FIG. 4 is a schematic view of a reference electrode surface of a capacitive inclination sensor according to the first embodiment; FIG. 5 is a schematic illustration of the arrangement of the first and second fine track surfaces according to the first exemplary embodiment; FIG. 6 shows an electrode arrangement according to the first exemplary embodiment; FIG. 7 shows an illustration of the measurement signal curves of the first and second fine track surfaces as a function of the angle of inclination of the capacitive inclination sensor according to the first exemplary embodiment; FIG. 8 shows an illustration of the measurement signal curves of the first and second coarse track surfaces as a function of the angle of rotation of the capacitive inclination sensor according to the first exemplary embodiment; FIG. 9 shows a schematic view of a measuring electrode surface of a capacitive inclination sensor according to a second exemplary embodiment; FIG. 10 is an enlarged view of the first and second coarse track surfaces of FIG. 9; FIG. 11 shows an alternative geometry of the first and second coarse track surfaces of the second exemplary embodiment; FIG. 12 is a schematic view of a reference electrode surface of a capacitive inclination sensor according to the second embodiment; FIG. 13 shows an electrode arrangement according to the second exemplary embodiment; FIG. 14 shows an illustration of the measurement signal curves of the first and second rough track surfaces as a function of the angle of rotation of a capacitive inclination sensor according to the second exemplary embodiment; FIG. 15 shows an illustration of the measurement signal curves of the first and second fine track surfaces as a function of the angle of rotation of a capacitive inclination sensor according to the second exemplary embodiment; FIG. 16 shows an electrode arrangement according to a third exemplary embodiment; FIG. 17 shows the electrode arrangement according to the third exemplary embodiment from FIG. 14 in the case of transverse inclination; FIG. 18 shows a schematic view of a combined reference measuring electrode surface of a capacitive inclination sensor according to a fourth exemplary embodiment; FIG. 19 shows a schematic exploded illustration of the layer structure of an electrode arrangement of a capacitive inclination sensor; FIG. 20 is a schematic view of a measurement electrode surface of a capacitive inclination sensor according to a fifth embodiment of the present invention; FIG. 21 is a schematic view of a reference electrode surface of a capacitive inclination sensor according to the fifth embodiment; FIG. 22 shows a schematic view of a measurement electrode surface of a capacitive inclination sensor according to a sixth exemplary embodiment.DESCRIPTION OF THE EMBODIMENTSSome specific embodiments of the present invention will be described in more detail below with reference to the drawings.The capacitive inclination sensor 1 according to the invention comprises a first electrode 2 and advantageously a second electrode 3 arranged parallel to the first electrode 2, which are both arranged in a cavity 6, see FIG. 1 in this regard. The first electrode 2 and the second electrode 3 are rigidly coupled to a housing of the capacitive inclination sensor 1. The first electrode 2 comprises a measuring electrode surface 2 on at least one of its end faces and the second electrode 3 comprises a reference electrode surface on at least one of its end faces. Advantageously, the measuring electrode surface and the reference electrode surface are arranged on those end faces of the first and second electrodes 2, 3 which are opposite each other. Half of the cavity 6 is filled with a dielectric liquid 7. If the capacitive inclination sensor 1 is rotated about the axis of rotation A, i.e. a roll inclination RN about the indicated x-axis is carried out, the dielectric liquid 7 always remains in a horizontal position due to the gravity field of the earth. The areas of the first and second electrodes 2, 3 which are in contact with the dielectric liquid 7 are changed in proportion to a defined rest position of the capacitive inclination sensor during such a rotation. By means of a processing device 12 comprising a memory module 11, measurement signals can be recorded, the current direction of rotation of the capacitive inclination sensor 1 detected and at least one inclination angle value determined.As can be seen from FIG. 2, the capacitive inclination sensor 1 can have a plurality of first electrodes 2, 2' and a plurality of second electrodes 3, 3'. As shown in FIG. 2, these can be arranged in a common cavity 6, wherein the common cavity 6 is always half filled with a dielectric liquid 7. If a plurality of first electrodes 2, 2' and a plurality of second electrodes 3, 3' are provided, the measurement signals are also recorded via the processing device 12, which allow conclusions about the current orientation of the capacitive inclination sensor 1.The processing device 12 comprises, for example, at least one memory module 11. The processing device 12 can alternatively also comprise at least one processor system with a volatile memory or a field programmable gate array (FPGA), wherein then no memory module 11 is provided.In particular, in this type of capacitive inclination sensor 1, in addition to a roll inclination RN about the indicated x-axis, a pitch inclination NN about the indicated y-axis can also be detected and quantified.Instead of a measurement electrode surface and a reference electrode surface, alternatively a combined measurement reference electrode surface can also be formed on an electrode. To determine the roll inclination RN about the x-axis, only a first electrode 2 with a combined measurement reference electrode surface on one of its end faces is sufficient. If, in addition to a roll inclination RN about the x-axis, a pitch inclination NN about the y-axis is additionally also to be determined, a second combined measurement reference electrode surface is required. This can either be arranged on the second end face of the first electrode 2 or alternatively on the end face of a second electrode 3.FIG. 3 shows an embodiment of the measuring electrode surface 202 according to a first exemplary embodiment. The measuring electrode surface 202 comprises a first and a second coarse track surface 208, 209 and a first and a second fine track surface 204, 205 which are arranged concentrically and coplanarly around the center M 1 of the measuring electrode surface 202.The second coarse track surface 209 is formed as a two-part circular surface-having a first partial surface 209.1 and a second partial surface 209.2-having a radius R4, also referred to below as fourth outer radius R4.The first coarse track surface 208 is formed as a two-part circular ring surface-having a first partial surface 208.1 and a second partial surface 208.2-having a third outer radius R3. The inner radius of the first coarse track surface 208 designed as a circular ring surface corresponds to the outer radius R 4. The ring width of the first coarse track surface 208 is thus R 3-R 4.The first fine track surface 204 is a circular ring surface having a first outer radius R 1. The inner radius of the circular ring surface of the first fine track surface 204 corresponds to the second outer radius R 2. The ring width of the first fine track surface 204 is thus R 1-R 2.The second fine track surface 205 is likewise designed as a circular ring surface and has a second outer radius R 2. The inner radius of the second fine track surface 205 corresponds to the third outer radius R 3. The ring width of the second fine track surface 205 is thus R 2-R 3.The total area of the measuring electrode area 202 is thus composed of the sum of the areas of the first and second coarse track areas 208, 209 and the first and second fine track areas 204, 205. The total surface of the measuring electrode surface 202 has a radius which corresponds to the first outer radius R 1.The second coarse track surface 209 is divided into two sub-surfaces 209.1, 209.2 of equal size in terms of area in the form of semicircular surfaces. The first coarse track surface 208 is divided into two sub-surfaces 208.1, 208.2 of equal size in terms of area in the form of semicircular rings. The sub-surfaces 208.1, 208.2 of the first coarse track surface 8 are arranged with a rotational offset with respect to the center M1 with respect to the sub-surfaces 209.1, 209.2 of the second coarse track surface 209. In the present first exemplary embodiment, this rotational offset is 90 degrees. However, the exemplary embodiment is not limited to a rotational offset of 90 degrees, since a rotational offset with respect to first and second coarse track surfaces 208, 209 of less than or greater than 90 degrees is also conceivable.According to the first exemplary embodiment, the first and second fine track surfaces 204, 205 each have at least one, preferably a plurality of, electrode sub-element groups 214, 215. The electrode sub-element groups 214, 215 are uniformly distributed over the entire 360 degrees of the measuring electrode surface 202 per fine track surface 204, 205. It is advantageous if the number of electrode sub-element groups 214, 215 per fine track surface 204, 205 is odd.Each individual electrode sub-element group 214 of the first fine track surface 204 comprises a first electrode sub-element 204.1, characterized with the symbol "+", and a second electrode sub-element 204.2, characterized with the symbol "-". The individual first and second electrode sub-elements 204.1, 204.2 of the first fine track surface 204 each have an identically large electrode surface. The first electrode sub-elements 204.1 of the first fine track surface 204 are conductively connected to one another and the second electrode sub-elements 204.2 of the first fine track surface 204 are conductively connected to one another.Each individual electrode sub-element group 215 of the second fine track surface 205 comprises a first electrode sub-element 205.1, denoted by the symbol "+", and a second electrode sub-element 205.2, denoted by the symbol "-". The individual first and second electrode sub-elements 205.1, 205.2 of the second fine track surface 205 likewise each have an identically large electrode surface. The first electrode sub-elements 205.1 of the second fine track surface 205 are conductively connected to one another and the second electrode sub-elements 205.2 of the second fine track surface 205 are conductively connected to one another.A conductive connection can be formed, for example, via line guides on or within a carrier substrate. Alternatively, the electrode surfaces of the individual first and second electrode sub-elements 204.1, 204.2, 205.1, 205.2 per fine track surface 204, 205 can be formed as a surface connected by means of webs, comparable to the second exemplary embodiment shown in FIG. 9.The electrode sub-element groups 214, 215 are periodically arranged on a circular line around the center M 1 in such a way that the first and second electrode sub-elements 204.1, 204.2; 205.1, 205.2 always alternate per fine track surface 204, 205. Furthermore, a first and a second electrode sub-element 204.1, 204.2; 205.1, 205.2 are always situated diametrically opposite each other for each fine track surface 204, 205 with respect to the center point M1.According to the first exemplary embodiment, the reference electrode surface 203 comprises a first reference electrode partial surface 203.1 with the first outer radius R1, a second reference electrode partial surface 203.2 with the second outer radius R2, a third reference electrode partial surface 203.3 with the third outer radius R3 and a fourth reference electrode partial surface 203.4 with the fourth radius R4, also referred to below as fourth outer radius R4, illustrated in FIG. 4. all four reference electrode partial surfaces 203.1, 203.2, 203.3, 203.4 are arranged concentrically and coplanarly around the second center point M2 of the reference electrode surface 203.FIG. 5 shows a schematic arrangement of the first and second fine track surfaces 204, 205 with a rotational offset. All first and second electrode sub-elements 204.1, 204.2 of the first fine track surface 204 each assume an identical surface which corresponds to a circular ring sector with a central angle β1. The central angle β1 is dependent on the number of first and second electrode sub-elements 204.1, 204.2 with respect to the full 360 degrees of the circular ring surface of the first fine track surface 204. The same applies analogously to the first and second electrode sub-elements 205.1, 205.2 of the second fine track surface 205, which are defined as sectors of a circular ring by the central angle β2. In the present first embodiment, the number of the first and second electrode sub-elements of the first and second fine track surfaces is identical, and therefore β1=β2.The second fine track surface 205 can have a rotational offset by the angle Δβ with respect to the first fine track surface 204, wherein in particular the following applies: Δβ<β1 ∧ Δβ<β2. In the first exemplary embodiment shown, the following relationship applies to Δβ: Δβ=β1 / 2=β2 / 2As shown in FIG. 6, the measuring electrode surface 202 and the reference electrode surface 203 are arranged in the cavity 206 of the capacitive inclination sensor spaced along the axis of rotation A, so that the first center point M 1 and the second center point M 2 are located on the axis of rotation A.The capacitive inclination sensor can have, for example, a housing which consists of a first and a second housing wall which together form the cavity 206 in the form of a cylindrical cavity. The measuring electrode surface 202 and the reference electrode surface 203 can then be applied directly to the inner base surfaces of the cavity. Alternatively, two carrier substrate disks with opposite measuring or reference electrode surfaces 202, 203 can also be arranged in the cavity and rigidly coupled to the housing.The cavity 206 is filled with a dielectric liquid 207, for example an alcohol such as ethanol. In this case, the fill quantity of the cavity 206 with the dielectric liquid 207 is selected such that, in the state of rest of the capacitive inclination sensor, half of the measurement and reference electrode surface 202, 203 is covered with the dielectric liquid 207 under predefined environmental conditions. Due to the gravitational field, the dielectric liquid 207 is always aligned such that its liquid level is aligned horizontally.If the capacitive inclination sensor is inclined about the axis of rotation A, which corresponds to a rolling inclination of the measurement and reference electrode surface 202, 203 with respect to the dielectric liquid 207 about the axis of rotation A, the dielectric liquid 207 remains at a horizontally oriented liquid level. The area proportions of the measuring electrode area 202 and the reference electrode area 203 covered by the dielectric liquid thus change, as a result of which the measured capacitance and thus the measurement signals S 4, S 5, S 8, S 9 change.In the case of a relative rotation of electrodes 202, 203 and dielectric liquid 207 in reference direction R, i.e. clockwise according to FIG. 6, the partial surface of the second electrode partial element 204.2d of the first fine track surface 204 which is partially wetted by the dielectric liquid 207 decreases. The sub-area of the first electrode sub-element 204.1b of the first fine track area 204, which sub-area is diametrically opposite with respect to the center M1, and is likewise partially wetted by the dielectric liquid 207, increases, on the other hand. Thus, for the first fine track surface 204, the capacitance value for the parallel-connected first electrode sub-elements 204.1 increases and the capacitance value for the parallel-connected second electrode sub-elements 204.2 decreases. The first fine track area measurement signal S4 composed of the capacitance values of the first and second electrode sub-elements 204.1, 204.2 consequently increases.In the case of a relative rotation of electrodes 202, 203 and dielectric liquid 207 counter to the reference direction R, i.e. according to FIG. 6 a rotation counter to the clockwise direction, the capacitance value of the parallel-connected first electrode sub-elements 204.1 decreases for the first fine track surface 204, whereas the capacitance value of the parallel-connected second electrode sub-elements 204.2 increases. Consequently, the direction of rotation of the capacitive inclination sensor can be determined.A signal generation analogous to this is also carried out for the second fine track surface 205 in order to generate the second fine track surface measurement signal S 5, and for the first and second coarse track surfaces 208, 209 in order to generate the first coarse track surface measurement signal S 8 and second coarse track surface measurement signal S 9.The capacitive inclination sensor thus determines an inclination relative to a gravitational field via a change in the capacitance of the first and second fine track surfaces 204, 205 or of the first and second coarse track surfaces 208, 209, which is caused by a change in the arrangement with respect to the horizontally oriented surface of the liquid play gel of the dielectric liquid 207. By tilting the capacitive inclination sensor, which corresponds to a roll inclination with respect to the axis of rotation A, the wetting of the liquid-covered surfaces of the measuring and reference electrode surfaces 202, 203 and thus the capacitive measured values changes characteristically, wherein this change is used for signal generation.The remaining volume of the cavity 206 may be filled with a medium surrounding the dielectric liquid 207 which differs in its dielectric constant from that of the dielectric liquid 207. The surrounding medium can be, for example, a gas or a gas mixture. Alternatively, the medium can also be a second dielectric liquid, which can hardly be mixed with the first dielectric liquid 207 or can not be mixed with it at all. Advantageously, the density of the second dielectric liquid is lower than the density of the first dielectric liquid 207. A silicone oil, for example, is suitable as the second dielectric liquid.FIG. 7 shows the dependence of the first fine track surface measurement signal S 4 and the second fine track surface measurement signal S 5 on the angle of inclination of the capacitive inclination sensor. Along the x-axis of the coordinate system shown in FIG. 7, the values of the inclination angle θ for a roll inclination of the capacitive inclination sensor about the axis of rotation A are plotted for a value range from 0 degrees to 360 degrees. Along the y-axis, the differential capacitance values C dif of the electrode sub-elements 204.1, 204.2; 205.1, 205.2 are indicated as fine track surface measurement signals S 4, S 5-for example in pF (picofarad). A phase shift Δφ1is present between the first fine track area measurement signal S 4 and the second fine track area measurement signal S 5. The phase shift Δφ1is proportional to the rotational offset Δβ between the first fine track surface 204 and the second fine track surface 205 shown in FIG. 5.The signal evaluation of the first and second fine track area measurement signals S 4, S 5 shown in FIG. 7 and of the first and second coarse track area measurement signals S 8, S 9 shown in FIG. 8 will be explained in more detail below with reference to the second exemplary embodiment with reference to FIGS. 14 and 15. The signal evaluation of the sinusoidal or cosinusoidal measurement signals occurring in the second exemplary embodiment can likewise be applied analogously to the triangular measurement signals of the first exemplary embodiment. This applies to the fine track area measurement signals S 4, S 5 as well as to the coarse track area measurement signals S 8, S 9.FIG. 9 shows a second exemplary embodiment of the measuring electrode surface 302. Analogously to the first exemplary embodiment in FIG. 3, the measuring electrode surface 302 comprises a first and a second fine track surface 304, 305 and a first and a second coarse track surface 308, 309. The fine track surfaces 304, 305 and the coarse track surfaces 308, 309 are arranged concentrically and coplanar with the first center point M 1 of the measuring electrode surface 302. The geometries of the first and second fine track surfaces 304, 305 and those of the first and second coarse track surfaces 308, 309 are modified in the second exemplary embodiment in such a way that the resulting fine track surface measurement signals S 4, S 5 or the resulting coarse track surface measurement signals S 8, S 9 already directly assume a sinusoidal or cosinusoidal profile.This is achieved in the second exemplary embodiment, in which the increase in area or decrease in area of the electrode sub-elements 304.1, 304.2, 305.1, 305.2 or of the first and second sub-areas 308.1, 308.2, 309.1, 309.2 in the circumferential direction are designed constructively such that the desired sinusoidal or cosine-shaped measurement signals S4, S5, S8, S9 result without a complicated signal processing or signal correction as a result of a relative movement of the two electrodes 302, 303 with respect to the dielectric liquid 307 of the capacitive inclination sensor.For this purpose, the first fine track surface 304 comprises a plurality of electrode sub-element groups 314, each consisting of a first electrode sub-element 304.1 and a second electrode sub-element 304.2. The surfaces of the first and second electrode sub-elements 304.1, 304.2 are designed structurally in the form of a sinusoidal half wave. All first electrode sub-elements 304.1 and all second electrode sub-elements 304.2 engage in one another multiple times over the entire circumference of the first fine track surface 304, wherein these are furthermore arranged concentrically around the center point M 1. More precisely, all first electrode sub-elements 304.1, which are designed as sinusoidal half-waves, engage between two second electrode sub-elements 304.2, which are designed as sinusoidal half-waves, and vice versa, so that a space-optimized circular ring surface with a constant circular ring width R 1-R 2 is formed in combination. In other words, in FIG. 9, a periodic and sinusoidal separating line divides the first fine track surface 304 into a continuous surface of first electrode sub-elements 304.1 and into a continuous surface of second electrode sub-elements 304.2, wherein the zero crossing of this separating line is always arranged along a circular line with the radius R*=(R1-R2) / 2+R2.On the first fine track surface 304, an amplitude section of a first electrode sub-element 304.1 always lies diametrically opposite an amplitude section of a second electrode sub-element 304.2 with respect to the center point M1. It is advantageous if the number of first electrode sub-elements 304.1 and the number of second electrode sub-elements 304.2 are selected to be odd. In the second exemplary embodiment shown in FIG. 9, the first fine track surface 304 is composed of eleven first electrode sub-elements 304.1 and of eleven second electrode sub-elements 304.2.The surfaces of the first electrode sub-elements 304.1, which are designed structurally as sinusoidal half-waves, are conductively connected to one another by webs S, and the surfaces of the second electrode sub-elements 304.2, which are designed structurally as sinusoidal half-waves, are conductively connected to one another by webs S.Alternatively, the first and second electrode sub-elements 304.1, 304.2, analogously to the first exemplary embodiment in FIG. 3, can be formed without webs S. In this case, the amplitude sections of the sinusoidal half-waves then extend as far as the outer contour of the circular line of the first fine track surface 304 with the outer radius R 1 or as far as the outer contour of the circular line with the outer radius R 2. An electrically conductive connection between the first electrode sub-elements 204.1 of the first fine track area 304 which are then formed individually and the second electrode sub-elements 304.2 of the first fine track area 304 which are formed individually can be effected in this case, for example, via external conductive connections.The second fine track surface 305 likewise comprises a plurality of electrode sub-element groups 315, each consisting of a first electrode sub-element 305.1 and a second electrode sub-element 305.2. The first and second electrode sub-elements 305.1, 305.2 are formed analogously to those of the first fine track surface 304, wherein these in combination form a circular ring surface with a ring width of R2-R3. The second fine track surface 305, like the first fine track surface 304, is formed concentrically and coplanar with the center M 1 of the measuring electrode surface 302. As shown in FIG. 9, it likewise has eleven first electrode sub-elements 305.1 and eleven second electrode sub-elements 305.2, which are designed structurally as sinusoidal half-wave surfaces. The second fine track surface 305 also has a rotational offset with respect to the first fine track surface 304, which results in a phase shift of the resulting measurement signals S 4, S 5 with respect to one another.As can be seen from FIG. 10, the first coarse track surface 308 is a two-part circular ring surface with the outer radius R 3. The circular ring surface is divided into a first partial surface 308.1 and a second partial surface 308.2. The circular ring width of the first coarse track surface 308 is R 3-R 4.The second coarse track surface 309 is a circular surface formed in two parts with the outer radius R4and is divided into a first sub-surface 308.1 and a second sub-surface 308.2.According to the second exemplary embodiment, the subareas 308.1, 308.2 of the first coarse track area and the subareas 309.1, 309.2 of the second coarse track area can be designed as Pascal-type limonenes arranged offset with respect to one another, i.e. as algebraic curves of the 4th order. The offset of the subareas 308.1, 308.2 and the subareas 309.1, 309.2 with respect to one another is explained in more detail below with reference to FIG. 11 and applies analogously.Polar coordinates can be used to describe a Pascal-type limbacone according to the following equation:The subareas 308.1, 308.2, 309.1 are designed as convex limonenes, i.e. a / b≥2.The partial surface 309.2 is designed as a cardioid, i.e. a / b=1 applies to the partial surface 309.2; it would also be conceivable to design the partial surface 309.2 as a knob-lime withAlternatively, the first and second coarse track surfaces 308, 309 can also be approximated in the form of circular surfaces or circular ring surfaces arranged offset with respect to one another, see FIG. 11. the first sub-surface 308.1 of the first coarse track surface 308 has the center M308.1 and the second sub-surface 308.2 of the first coarse track surface 308 has the center M308.2. The center point M308.2 is arranged at a distance from the center point M308.1 in the z-direction by the offset d1. The first sub-area 309.1 of the second coarse track area 309 has the center point M309.1 and the second sub-area 309.2 of the second coarse track area 309 has the center point M309.2. The center point M309.2 is arranged in the y-direction at the offset d2 from the center point M309.1. Advantageously, the center point M308.1 and the center point M309.1 are additionally located on the center point M1, i.e. M1=M308.1=M309.1.According to the second exemplary embodiment, the reference electrode surface 303 comprises a first reference electrode partial surface 303.1 with the first outer radius R1, a second reference electrode partial surface 303.2 with the second outer radius R2, a third reference electrode partial surface 303.3 with the third outer radius R3 and a fourth reference electrode partial surface 303.4 with the fourth radius R4, which is designated as the fourth outer radius R4, shown in FIG. 12.As shown in FIG. 13, the measuring electrode surface 302 and the reference electrode surface 303 are arranged in the cavity 306 of the capacitive inclination sensor at a distance along the rotation axis A, so that the first center point M 1 and the second center point M 2 lie on the rotation axis A.The cavity 306 is filled with a dielectric liquid 307, so that half of the measurement or reference electrode surface 302, 303 are covered by the dielectric liquid 307.If the capacitive inclination sensor is inclined or deflected about the axis of rotation A, which corresponds to a rolling inclination of the measurement and reference electrode surfaces 302, 303 with respect to the axis of rotation A, the dielectric liquid 307 remains unchanged with a horizontal liquid level. The characteristic surface portions of the measuring electrode surface 302 and of the reference electrode surface 303 covered by the dielectric liquid thus change, as a result of which the measured capacitance and thus the measurement signals S 4, S 5, S 8, S 9 change as a function of the inclination.In FIG. 14, the dependence of the first rough track area measurement signal S 8 and the second rough track area measurement signal S 9 on the inclination angle θ is shown by way of example. Along the x-axis of the coordinate system shown in FIG. 14, the values of the inclination angle θ are plotted in a range from 0 degrees to 360 degrees when the capacitive inclination sensor is rotated in the reference direction R about the rotation axis A. The reference direction R describes here the clockwise direction of movement present in the case of a roll inclination of the capacitive inclination sensor. In the reference position of the capacitive inclination sensor shown in FIG. 13, the inclination angle is 0 degrees. Along the y-axis, the differential capacitance values C dif of the subareas 308.1, 3.08.2; 309.1, 309.2 are indicated as coarse track area measurement signals S8, S9-for example in pF (picofarad).In the following, it is explained by way of example how an inclination angle of 130.07 degrees can be determined with the electrode arrangement according to the second exemplary embodiment shown in FIG. 13. Here, it is assumed that the inclination angle does not change during measurement of the first rough track area measurement signal S 8 and the second rough track area measurement signal S 9.As can be seen from FIG. 14, when the capacitive inclination sensor is inclined by an inclination angle of 130.07 degrees, a differential capacitance value of -0.3 pF results for the first coarse track surface measurement signal S8. For this differential capacitance value, the processing device, not shown, then determines two corresponding inclination angle values 3.102 aand 3.102 b. In this case, the first angle of inclination value 3.102a is 130 degrees and the second angle of inclination value 3.102b is 230 degrees. These corresponding inclination angle values 3.102a, 3.102b are then stored in the memory module of the processing device for later use.The processing device then determines the differential capacitance value for the second coarse track area measurement signal S 9. At an inclination angle of 130.07 degrees, the second rough track area measurement signal S9 assumes a differential capacitance value of 0.4 pF. For this differential capacitance value, the processing device determines the corresponding inclination angle values 3.101 aof 50 degrees and 3.101 bof 130 degrees. These corresponding inclination angle values 3.101a, 3.101b are also stored in the memory module of the processing device.The processing device then reads out the four inclination angle values 3.101a, 3.101b, 3.102a, 3.102b from the memory module and compares these. The inclination angle value 3.101b with a value of 130 degrees and the inclination angle value 3.102a with a value of 130 degrees occur twice here among the read-out inclination angle values 3.102a, 3.102b, 3.101a, 3.101b. The processing device recognizes this and derives from this that the actual inclination angle of the capacitive inclination sensor is 130 degrees in a first approximation. The processing device then stores the ascertained value of 130 degrees in the memory module of the processing device.The phase shift Δφ3of the coarse track measurement signals S 8, S 9 in FIG. 14 is proportional to the positional relationship between the offset d1of the first sub-surface 308.1to the second sub-surface 308.2of the first coarse track surface and the offset d2of the first sub-surface 309.1to the second sub-surface 309.2of the second coarse track surface 309. Advantageously, the offset d1 and the offset d2 are orthogonal to each other, which results in a phase shift of the coarse track measurement signals S8, S9 of 90 degrees.In FIG. 15, the dependence of the first fine track surface measurement signal S 4 and of the second fine track surface measurement signal S 5 on the inclination angle θ is shown. The processing device can determine the actual inclination angle even more accurately if necessary via the fine track surface measurement signals S 4, S 5. Along the axes of the coordinate system in FIG. 15, the angle of inclination θ and the differential capacitance values C dif are plotted analogously to FIG. 14.If the capacitive inclination sensor is further inclined by 130.07 degrees in the reference direction, a differential capacitance value of 0.4 pF results for the first fine track area measurement signal S4 and a differential capacitance value of -0.3 pF results for the second fine track area measurement signal S5. Depending on the number of electrode sub-elements 304.1, 304.2; 305.1, 305.2 per fine track surface 304, 305, a plurality of corresponding inclination angle values are obtained, which are possible. In FIG. 15, this applies to all points which lie both on the horizontal straight lines (dashed lines) drawn in and on the fine track surface measurement signals S 4, S 5. These values are then stored by the processing device in the memory module.For the limitation, the processing device then retrieves the previously determined inclination angle value of 130 degrees from the memory module and compares it with the possible inclination values of the fine track surface measurement signals S 4, S 5. In the present example, only the corresponding inclination angle values 3.201 band 3.202 aat 130.07 degrees are possible for this purpose. From this, the processing device derives that the actual inclination angle of the capacitive inclination sensor is 130.07 degrees. Finally, the processing device applies the actual inclination angle of 130.07 degrees either to the storage module, not shown, and outputs this additionally or alternatively to an output unit, not shown, in the form of an inclination-dependent output signal.The phase shift Δφ3of the fine track surface measurement signals S 4, S 5 is proportional to the rotational offset between the first fine track surface 304 and the second fine track surface 305. In this case, the phase shift Δφ3is also dependent in particular on the number of electrode sub-elements 304.1, 304.2; 305.1, 305.2 per fine track surface 304, 305.The capacitive inclination sensor can have two measurement electrode surfaces 402 a, 402 band two reference electrode surfaces 403 a, 403 bin accordance with a third exemplary embodiment shown in FIGS. 16 and 17.The center points M1a, M1b of the measuring electrode surfaces 402a, 402b and the center points M2a, M2b of the reference electrode surfaces 403a, 403b are located on the axis of rotation A, A'. The measuring electrode surfaces 402 a, 402 bare arranged such that their end sides are oriented in opposite directions and each face a corresponding reference electrode 403 a, 403 b. A first subspace 406' of the cavity 406 is formed between the first measurement electrode surface 402a and the first reference electrode surface 403a, and a second subspace 406" of the cavity 406 is formed between the first measurement electrode surface 402b and the second reference electrode surface 403b. The subspaces 406', 406" are of identical design, i.e. the distance between first measurement and reference electrode 402a, 403a and the distance between second measurement and reference electrode 402b, 403b is of equal size.A capacitive inclination sensor according to the third exemplary embodiment is able to measure, in addition to a roll inclination of the electrodes 402 a, 402 b, 403 a, 403 bwith respect to the dielectric liquid 407 about the axis of rotation A, also a pitch inclination of the electrodes 402 a, 402 b, 403 a, 403 bwith respect to the dielectric liquid about the indicated y-axis and additionally or alternatively compensate for it.By tilting about the y-axis-illustrated by the deflected rotational axis A' and the angle α-the first and second measuring electrode surfaces 402a, 402b penetrate to different extents into the dielectric liquid 407. As a result, the pitch inclination or transverse inclination can be compensated by a processing device, not shown, either with the aid of a summing circuit or can be detected by means of a differential circuit.According to FIGS. 16 and 17, the third exemplary embodiment is designed in such a way that the measurement electrode surfaces 402 a, 402 bare arranged between the reference electrode surfaces 403 a, 403 b. Of course, however, it is equally possible to arrange the reference electrode areas 403 a, 403 bbetween the first measurement electrode area and the second measurement electrode area.In order to determine the pitch inclination, it would also be conceivable to arrange two capacitive inclination sensors according to the second exemplary embodiment in FIG. 6 along the axis of rotation A one behind the other and in a common cavity 407. The end faces of the measuring electrode surface 402 a, 402 bmay point in an identical direction, for example.According to a fourth exemplary embodiment of the capacitive inclination sensor according to the invention, the measurement electrode surface 502 and the reference electrode surface 503 can lie in one plane and be designed as a combined reference measurement electrode surface 523. In this exemplary embodiment, the measuring electrode surface 502 and the reference electrode surface 503 are coplanar and arranged concentrically with respect to a common third center point M 3. FIG. 18 shows a possible configuration of the first and second fine track surfaces 504, 505 of such a reference measuring electrode surface 523.The individual reference electrode subareas 503.1, 503.2, 503.3, 503.4 are designed as circular ring areas, between which the first fine track area 504 and the second fine track area 505 are arranged.More specifically, the first fine track area 504 is arranged between the first reference electrode sub-area 503.1 and the second reference electrode sub-area 503.2. The second fine track surface 505 is arranged between the third reference electrode sub-surface 503.3 and the fourth reference electrode sub-surface 503.4. The second reference electrode sub-area 503.2 directly adjoins the third reference electrode sub-area 503.3.The first and second fine track surfaces 504, 505 each have a plurality of electrode sub-element groups 514, 515. The individual electrode sub-elements 504.1, 504.2, 505.1, 505.2 are designed structurally as sinusoidal half-wave surfaces, wherein, in contrast to the second exemplary embodiment in FIG. 9, no webs S are provided between the sinusoidal half-wave surfaces of identical electrode sub-elements 504.1, 504.2, 505.1, 505.2.The coarse track surfaces of the reference measuring electrode surface 523, which are not illustrated in FIG. 18, could be formed in an equivalent manner to those in the second exemplary embodiment, see FIG. 9. The corresponding reference electrode subareas would then not necessarily be designed in the form of circular rings, however, but would advantageously be oriented to the outer contours of the subareas of the first and second coarse track areas.A capacitive inclination sensor according to the fourth exemplary embodiment can either comprise exactly one reference measuring electrode surface 523 in order to detect a roll inclination of the sensor or alternatively comprise two reference measuring electrodes 523 a, 523 barranged on a common rotational axis in order to detect a roll inclination and a pitch inclination of the sensor.The electrode surfaces, i.e. the measuring electrode surface 502 a, 502 b, reference electrode surface 503 a, 503 bor reference measuring electrode surface 523 a, 523 bof the capacitive inclination sensor according to the invention, can be realized on a carrier substrate 511 via an additive and additionally or alternatively subtractive manufacturing method, which is explained below with reference to FIG. 19.The carrier substrate 511 may be a printed circuit board material, a substrate or a carrier with integrated circuit components, for example made of silicon. The support substrate 511 has a first side surface 511 aand a second side surface 511 bwhich are opposed to each other. The electrode surfaces can be realized on or in the first and second side surfaces 511 a, 511 b, wherein their sensitive regions are formed on the sides facing away from the carrier substrate. The side facing the carrier substrate 511 may comprise electronic interfaces for electrically conductive connections. The electrically conductive connections can be formed between the individual electrode sub-elements or sub-surfaces and additionally or alternatively connected to a possibly integrated processing device.The invention has been described above with reference to some presently preferred embodiments. It is to be understood, however, that other variations and embodiments may be practiced without departing from the appended claims.Thus, the embodiments shown can also be combined to form further embodiments, for example the first and second coarse track surfaces of the first exemplary embodiment in FIG. 3 with the first and second fine track surfaces of the second exemplary embodiment in FIG. 9 and so on. For the initial determination of the approximate orientation of the capacitive inclination sensor, a different means can also be used instead of a capacitive coarse track surface, for example in the form of a MEMS sensor (microelectromechanical system), etc.In addition, further structural embodiments are conceivable with respect to the geometries of the first and second electrode sub-elements of the fine track surfaces or of the sub-surfaces of the coarse track surfaces. Thus, these can be geometrically modified in such a way that they assume, for example, a rectangular, triangular, sawtooth or trapezoidal signal profile instead of a sinusoidal or cosine signal profile.According to a fifth exemplary embodiment, it is possible for the measuring electrode surface 102 of the capacitive inclination sensor to be formed without coarse track surfaces.In this case, the measuring electrode surface 102 comprises only a first fine track surface 104 and a second fine track surface 105, which are arranged concentrically and coplanar with respect to the first center point M 1 of the measuring electrode surface 102. See FIG. 20.The first fine track surface 104 is a circular ring surface with a first outer radius R 1. The second fine track surface 105 is designed as a circular surface and has a radius R 2, which is also referred to below as the second outer radius R 2.The inner radius of the circular ring surface of the first fine track surface 104 corresponds to the second outer radius R 2. The ring width of the first fine track surface 104 is thus R 1-R 2.The total area of the measuring electrode area 102 is thus composed of the sum of the areas of the first and second fine track areas 104, 105. The measuring electrode formed by the total surface of the measuring electrode surface 102 thus has a radius which corresponds to the first outer radius R 1.According to the fifth exemplary embodiment, the first and second fine track surfaces 104, 105 each have at least one, preferably a plurality of, electrode sub-element groups 114, 115. The electrode sub-element groups 114, 115 are uniformly distributed over the entire 360 degrees of the measuring electrode surface 102 per fine track surface 104, 105. It is advantageous if the number of electrode sub-element groups 114, 115 per fine track surface 204, 205 is odd. In FIG. 20, the number of electrode sub-element groups 114, 115 is five electrode sub-element groups 114 for the first fine track area 104 and five electrode sub-element groups 115 for the second fine track area 105. It is advantageous if the number of electrode sub-element groups 114, 115 is identical with respect to the first fine track surface 104 and the second fine track surface 105.An individual electrode sub-element group 114 of the first fine track surface 104 comprises a first electrode sub-element 104.1, characterized with the symbol "+", and a second electrode sub-element 104.1, characterized with the symbol "-". The individual first and second electrode sub-elements 104.1, 104.2 of the first fine track surface 104 each have an identically large electrode surface and are arranged next to one another in the circumferential direction within a circle sector. The first electrode sub-elements 104.1 of the first fine track surface 104 are conductively connected to one another and the second electrode sub-elements 104.2 of the first fine track surface 204 are conductively connected to one another.A single electrode sub-element group 115 of the second fine track surface 105 comprises a first electrode sub-element 105.1, denoted by the symbol "+", and a second electrode sub-element 105.2, denoted by the symbol "-". The individual first and second electrode sub-elements 105.1, 105.2 of the second fine track surface 105 likewise each have an identically large electrode surface and are arranged next to one another in the circumferential direction within a circular sector. The first electrode sub-elements 105.1 of the second fine track surface 105 are conductively connected to one another and the second electrode sub-elements 105.2 of the second fine track surface 105 are conductively connected to one another.A conductive connection can be formed between identical electrode sub-elements 104.1, 104.2, 105.1, 105.2 of a fine track surface 104, 105 by external and electrically conductive connection means, so that all identical electrode sub-elements are connected in parallel. Alternatively, the electrode surfaces of the individual first and second electrode sub-elements 104.1, 104.2, 105.1, 105.2 per fine track surface 104, 105 can be formed as a surface connected by means of webs, not shown in FIG. 20, analogously to the second exemplary embodiment shown in FIG. 9.The parallel-connected electrode sub-elements 104.1, 104.2; 105.1, 105.2 can be connected to a processing device which derives inclination-dependent measurement signals per fine track surface 104, 105.The electrode sub-element groups 114, 115 are periodically arranged on a circular line around the center M1 in such a way that a first and a second electrode sub-element 104.1, 104.2; 105.1, 105.2 always alternate per fine track surface 104, 105. Furthermore, a first and a second electrode sub-element 104.1, 104.2; 105.1, 105.2 always lie opposite each other diametrically and centered with respect to the center M1 per fine track surface 104, 105.The second fine track surface 105 has a rotational offset with respect to the first fine track surface 104. The rotational offset is advantageously selected such that a phase shift of the corresponding measurement signals of the first and second fine track surfaces 104, 105 results that is sufficient for an inclination determination. In FIG. 20, the rotational offset is formed in such a way that within a fictitious circle sector which contains exactly one electrode sub-element 104.1, 104.2 of the first fine track surface 104, exactly one half of a first electrode sub-element 105.1 and exactly one half of a second electrode sub-element 105.2 of the second fine track surface 105 is contained.According to the fifth exemplary embodiment, the reference electrode surface 103 comprises a first reference electrode sub-surface 103.1 in the form of a circular ring surface having the first outer radius R1and a second reference electrode sub-surface 103.2 in the form of a circular surface having the second radius R2, which will also be referred to below as the second outer radius R2, illustrated in FIG. 21. The two reference electrode subareas 103.1, 103.2 are arranged concentrically and coplanarly around the second center point M2 of the reference electrode area 103. The total area of the reference electrode area 103 is thus composed of the sum of the areas of the first and second reference electrode subareas 103.1, 103.2. The total area of the reference electrode surface 103 has a radius corresponding to the first outer radius R 1.The measuring electrode surface 102 and the reference electrode surface 103 can be arranged spaced apart along a common axis of rotation A in a cavity of a capacitive inclination sensor, so that the first center point M 1 and the second center point M 2 lie on the axis of rotation A. Half of the cavity can be filled with a dielectric liquid, wherein only the measurement and reference electrode surfaces are deflected when the capacitive inclination sensor inclines.According to a sixth exemplary embodiment, as shown in FIG. 22, instead of two fine track areas, a combined fine track area 645 can also be provided. The measuring electrode surface 602 with a combined fine track surface 645 is then composed of a plurality of uniformly distributed electrode sub-element groups 6145. An electrode sub-element group 6145 comprises a sinusoidal first electrode sub-element 645.1, characterized with the symbol "+", and a sinusoidal second electrode sub-element 645.2, characterized with the symbol "-", wherein these have an offset with respect to one another, so that a third electrode sub-element 645.3, characterized with the symbol "·", is formed between the first electrode sub-element 645.1 and the second electrode sub-element 645.2. Specifically, this means that the amplitude sections of the sinusoidal half-waves of all first electrode sub-elements 645.1 are no longer arranged in a space-optimized manner, i.e. exactly between two sinusoidal half-waves of the second electrode sub-element 645.2. The individual first, second and third electrode sub-elements 645.1, 645.2, 645.3 are then each connected in parallel, so that a corresponding measurement signal S 1, S 2, S 3 results for the individual electrode sub-elements 645.1, 645.2, 645.3. These three measurement signals S 1, S 2, S 3 can then be reduced to two measurement signals S' 4; S' 5 for example, by a processing device which is not shown in FIG. 22, and the inclination determination described above can be carried out for two measurement signals.The transformation of the measurement signals takes place according to the formulaS 1:= measurement signal of the parallel-connected first electrode sub-elements,S 2:= measurement signal of the parallel-connected second electrode sub-elements,S 3:= measurement signal of the parallel-connected third electrode sub-elements,S' 4:= Transformed first measurement signal,S' 5:= Transformed second measurement signal.References included in the specificationThis list of documents cited by the applicant has been produced in an automated manner and is only included for the better information of the reader. The list is not part of the German patent application or utility model application. The DPMA does not take any adhesion for any faults or omissions.Patent Literature citedDE 92 06 111 U1

[0002] DE 35 12 983 A1

[0003]

Claims

Capacitive inclination sensor, comprising a measuring electrode surface (102, 202, 302, 402a, 402b, 502) arranged in a cavity (206, 306, 406, 506) and a reference electrode surface (103, 203, 303, 403a, 403b, 503); • wherein the measurement electrode surface (102, 202, 302, 402a, 402b, 502) comprises a first fine track surface (104, 204, 304, 504) and a second fine track surface (105, 205, 305, 505), both of which are arranged concentrically and coplanarly with a first center point (M1, M1a, M1b) of the measurement electrode surface (102, 202, 302, 402a, 402b, 502), wherein the first fine track surface (104, 204, 304, 504) has a first outer radius (R1) and the second fine track surface (105, 205, 305, 505) has a second outer radius (R2) with respect to the first center point (M1, M1a, M1b); and • wherein the first fine track surface (104, 204, 304, 504) and the second fine track surface (105, 205, 305, 505) each comprise a plurality of evenly distributed electrode sub-element groups (114, 214, 314, 514; 115, 215, 315, 515), which each comprise a first electrode sub-element (104.1, 204.1, 304.1, 504.1; 105.1, 205.1, 305.1, 505.1) and a second electrode sub-element (104.2, 204.2, 304.2, 504.2; 105.2, 205.2, 305.2, 505.2); • wherein the first electrode sub-elements (104.1, 204.1, 304.1, 504.1) of the first fine track surface (104, 204, 304, 504) are conductively connected and the second electrode sub-elements (104.2, 204.2, 304.2, 504.2) of the first fine track surface (104, 204, 304, 504) are conductively connected; and • wherein the first electrode sub-elements (105.1, 205.1, 305.1, 505.1) of the second fine track surface (105, 205, 305, 505) are conductively connected and the second electrode sub-elements (105.2, 205.2, 305.2, 505.2) of the second fine track surface (105, 205, 305, 505) are conductively connected; • wherein the cavity (206, 306, 406, 506) is partially filled by a dielectric liquid (107, 207, 307, 407, 507), the position of which with respect to the measuring electrode surface (102, 202, 302, 402a, 402b, 502) and the reference electrode surface (103, 203, 303, 403a, 403b, 503) is inclination-dependent and which has a different dielectric constant than a medium surrounding the dielectric liquid (107, 207, 307, 407, 507) in the cavity (206, 306, 406, 506).Capacitive inclination sensor according to Claim 1, wherein the measuring electrode surface (202, 302, 402a, 402b, 502) additionally comprises a first coarse track surface (208, 308, 508) and a second coarse track surface (209, 309, 509), wherein the first coarse track surface (208, 308, 508) is arranged with a third outer radius (R3) and the second coarse track surface (209, 309, 509) is arranged with a fourth outer radius (R4) concentrically and coplanar with the first center point (M1, M1a, M1b), wherein the coarse track surfaces (208, 308, 508; 209, 309, 509) are each formed in two parts.Capacitive tilt sensor according to claim 1 or 2, wherein the first fine track surface (104, 204, 304, 504) and the second fine track surface (105, 205, 305, 505) comprise an identical number of electrode sub-element groups (104.3, 204.3, 304.3, 504.3; 105.3, 205.3, 305.3, 505.3).Capacitive inclination sensor according to at least one of the preceding claims, wherein the number of electrode sub-element groups (114, 214, 314, 514; 115, 215, 315, 515) per fine track surface (104, 204, 304, 504; 105, 205, 305, 505) is odd and all first and second electrode sub-elements (104.1, 204.1, 304.1, 504.1; 105.1, 205.1, 305.1, 505.1; 104.2, 204.2, 304.2, 504.2; 105.2, 205.2, 305.2, 505.2) are arranged periodically alternately in such a way that within a fine track surface (104, 204, 304, 504; 105, 205, 305, 505) a first electrode sub-element (104.1, 204.1, 304.1, 504.1; 105.1, 205.1, 305.1, 505.1) a second electrode sub-element (104.2, 204.2, 304.2, 504.2; 105.2, 205.2, 305.2, 505.2) are diametrically opposed with respect to the first center point (M1, M1a, M1b).Capacitive inclination sensor according to at least one of the preceding claims, having a processing device (12) for generating and processing measurement signals (S4, S5, S8, S9) using the measurement electrode surface (102, 202, 302, 402a, 402b, 502) and the reference electrode surface (103, 203, 303, 403a, 403b, 503).Capacitive inclination sensor according to Claim 5, wherein the fine track surfaces (104, 204, 304, 504; 105, 205, 305, 505) and / or the coarse track surfaces (208, 308, 508; 209, 309, 509) are arranged and / or designed structurally such that the measurement signals (S4, S5, S8, S9) have a predefined phase shift (Δφ1, Δφ2, Δφ3, Δφ4).Capacitive inclination sensor according to Claim 5, wherein the fine track surfaces (104, 204, 304, 504; 105, 205, 305, 505) and / or the coarse track surfaces (208, 308, 508; 209, 309, 509) are designed constructively in such a way that for each inclination position of the capacitive inclination sensor at least one of the measurement signals (S4, S5, S8, S9) increases or decreases monotonically.Capacitive inclination sensor according to Claim 5, wherein at least one fine track surface (104, 204, 304, 504; 105, 205, 305, 505) and / or at least one coarse track surface (208, 307, 508; 209, 309, 509) is designed structurally in such a way that a sinusoidal measurement signal (S4, S5, S8, S9) results.Capacitive inclination sensor according to at least one of the preceding claims, wherein the reference electrode surface (103, 203, 303, 403a, 403b, 503) has at least one corresponding reference sub-surface (103.1, 103.2; 203.1, 203.2, 203.3, 203.4; 303.1, 303.2, 303.4; 503.1, 503.2, 503.3, 504.3) per fine track surface (104, 204, 304, 504; 105, 205, 305, 505) and / or per coarse track surface (208, 308, 508; 209, 309, 509), which are arranged concentrically and coplanar with a second center point (M2, M2a, M2b) of the reference electrode surface (103, 203, 303, 403a, 403b, 503).Capacitive inclination sensor according to at least one of the preceding claims, wherein the measuring electrode surface (102, 202, 302, 402a, 402b) and the reference electrode surface (103, 203, 303, 403a, 403b) lie in two different planes arranged parallel to one another, and wherein their center points (M1, M1a, M1b; M2, M2a, M2b) lie on a common axis of rotation (A, A').Capacitive inclination sensor according to Claim 2, wherein the following relationship exists with respect to the first, second, third and fourth outer radius (R1, R2, R3, R4): R 1 > R 2 > R 3 > R 4 where R1: first outer radius, R2: second outer radius, R3: third outer radius, R4: fourth outer radius;Capacitive inclination sensor according to at least one of the preceding claims, having two measurement electrode surfaces (402a, 402b) and two reference electrode surfaces (403a, 403b), the centers (M1a, M1b; M2a, M2b) of which lie on an axis of rotation (A, A'), wherein the measurement electrode surfaces (402a, 402b) point in opposite directions and either • the measurement electrode surfaces (402a, 402b) are arranged between the first reference electrode surface (403a) and the second reference electrode surface (403b), or • the reference electrode surfaces (403a, 403b) are arranged between the first measurement electrode surface (402a) and the second measurement electrode surface (402b), such that at least two subspaces (406', 406") are formed.Capacitive inclination sensor according to at least one of claims 1 to 9, wherein the measurement electrode surface (502) and the reference electrode surface (503) lie in an identical plane, and wherein the measurement electrode surface (502) and the reference electrode surface (503) are arranged concentrically with respect to a common third center point (M3, M3a, M3b) and thereby form a combined reference measurement electrode surface (523; 523a, 523b).Capacitive inclination sensor according to at least one of the preceding claims, comprising at least one carrier substrate (511) and a first and a two electrode surface, • wherein the carrier substrate (11) has two opposite side surfaces (511a, 511b), • wherein the first electrode surface is arranged on the first side surface (511a) and / or the second electrode surface is arranged on the second side surface (511b) of the carrier substrate (511), • wherein the first and / or second electrode surface is formed as a reference measurement electrode surface (523a, 523b) or as a reference electrode surface (503a, 503b) or as a measurement electrode surface (502a, 502b).Capacitive inclination sensor according to Claim 5 and 12 or 13, wherein, in addition to a roll inclination about the axis of rotation (A, A'), a pitch inclination can be determined.Capacitive inclination sensor according to Claim 5, • wherein the measuring electrode surface (602) comprises a combined fine track surface (645) consisting of the first and the second fine track surface (604, 605); and • wherein each electrode sub-element group (6145) of the combined fine track surface (645) comprises, in addition to a first and a second electrode sub-element (645.1, 645.2), a third electrode sub-element (645.3); and • wherein all third electrode sub-elements (610.1, 610.2) are conductively connected; and • wherein there is an identical number of periodically distributed first, second and third electrode sub-elements (604.1, 604.2; 605.1, 605.2; 610.1, 610.2); and • wherein the first, second and third electrode sub-elements (604.1, 604.2; 605.1, 605.2; 610.1, 610.2) are arranged offset with respect to one another in such a way that the resulting measurement signals have a predefined phase shift for at least two of the electrode sub-elements (604.1, 604.2; 605.1, 605.2; 610.1, 610.2).

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