Coating system and method for producing a coating of an optical element and covering device therefor

Abstract

A covering device (1) for at least partially shielding a second surface (22) of an optical element (2) during the production of a coating (24) on a first surface (21) of the element opposite the second surface comprises a detector arrangement with at least one detector (14, 14', 14") for detecting electromagnetic radiation (15; 16) dependent on the coating. The invention also relates to a coating system and a method for producing a coating (24) on a first surface (21) of at least one optical element (2).

Description

[0001] The present invention relates to a coating system and method for producing a coating of at least one optical element and a covering device therefor.

[0002] Optical elements, especially lenses, particularly spectacle lenses, are frequently coated, with individual layers of such coatings sometimes having thicknesses of only a few nanometers and / or being produced in vacuum chambers. Accordingly, controlling coatings, especially during their production, can be difficult and / or costly.

[0003] EP 4 431 632 A1 relates to a device comprising a light source for irradiating a substrate arranged on a rotating body with light, a light receiving unit that receives light transmitted through or reflected from a layer of thin film formed on the substrate, a position information acquisition unit that detects a position in the circumferential direction of the rotating body, a control unit that controls a film formation state, a timing control unit that specifies a target position of the substrate based on the position information acquired by the position information acquisition unit and controls the time of reception of the transmitted or reflected light, and a film thickness determination unit.which calculates the film thickness of each layer of the multi-layered thin film based on the light received by the light receiving unit and determines a film thickness difference between the film thickness of each layer and a target film thickness of each layer, forming the thin film with a desired spectral characteristic, and has a film formation condition setting unit which, if the film thickness of each layer has a film thickness difference of a predetermined value or more with respect to the target film thickness, corrects the film formation condition for the layer with the film thickness difference so that the film thickness of the layer becomes the target film thickness, and then sets the film formation condition.

[0004] The object of the present invention is to improve the control of coatings of optical elements.

[0005] This problem is solved by a covering device with the features of claim 1. Claims 4 and 7 protect a coating system with at least one covering device described herein, or a method for producing a coating of at least one optical element using a covering device or a coating system described herein. The dependent claims relate to advantageous embodiments.

[0006] According to one embodiment of the present invention, a covering device which, during the production of a coating of a first surface of an optical element, completely or partially or fully shields a second surface of the element, preferably against coating with coating material for producing the coating of the first surface, or is provided or equipped or used for this purpose, comprises a detector arrangement with one or more detectors, wherein the detector arrangement or its(s)

[0007] Detector(s) detect(s) electromagnetic radiation, which is dependent on the current coating, preferably a portion of the coating produced up to the (respective) measurement or detection time, and preferably varies with the (current) coating or the portion of the coating produced up to the (respective) measurement or detection time, in one embodiment light, in a further development visible and / or UV light, or is / are equipped or used for this purpose.

[0008] One embodiment of the present invention is based on the idea of ​​integrating a detector arrangement into a covering device for shielding during the coating of an optical element. This detector arrangement detects, is configured for, or is used to detect electromagnetic radiation dependent on the coating, so that the coating can be monitored based on the detected electromagnetic radiation (due to its dependence on the coating). In one embodiment, this monitoring can occur during and / or after the coating has been applied. In this way, the monitoring of coatings on optical elements can be improved and, in one embodiment, implemented more simply, cost-effectively, and / or reliably.

[0009] As already mentioned, electromagnetic radiation dependent on the coating can be detected during the coating process. The detected radiation then preferably depends on the proportion of the coating produced up to the respective measurement or detection time, or, in one embodiment, on the layer thickness and / or homogeneity or freedom from interference produced up to the respective measurement or detection time. This can, in particular, enable monitoring of the coating production process, which can advantageously allow intervention in the production process, for example, modification or premature termination of the production.

[0010] Additionally or alternatively, the detection of coating-dependent electromagnetic radiation can be carried out after the coating has been applied, wherein the detected radiation preferably depends on the coating applied, or in one embodiment, on the final layer thickness and / or final homogeneity or freedom from interference. This can, in particular, enable the inspection of the optical element enhanced by the coating, which can advantageously facilitate quality control and / or the modification of the coating application process for further elements.

[0011] In a further development, after the coating of the first surface of the element has been applied, the optical element and the covering device are rotated relative to each other, preferably using a rotating device for the covering device or the coating system, such that the covering device and the first surface now face each other. Before and / or after this rotation, electromagnetic radiation dependent on the coating is detected by the detector device. In this way, electromagnetic radiation at least partially reflected by the coating can be advantageously detected directly (after rotation and by the detector device), rather than only after passing through the optical element, thus improving the quality of the inspection.

[0012] The optical element(s) to be coated or coated can, in particular, be (optical) lenses, or, in a particularly preferred embodiment, spectacle lens lenses or lenses for spectacle lenses. The coating(s) to be produced or produced can (each) comprise one or more layers and / or at least one mirrored layer and / or at least one anti-reflective layer and / or at least one antistatic layer and / or at least one anti-fog layer and / or at least one tinted or colored layer, in a further embodiment a photochromic or self-tinting layer, and / or at least one hard layer and / or at least one protective layer and / or at least one top coat layer, in a further embodiment an anti-scratch layer. The first and second surfaces of an optical element according to the present invention are, in one embodiment, opposite each other.The present invention comprises optically effective and / or main surfaces arranged on opposite sides, preferably end faces and / or a front and a back face, of the element. The invention is particularly advantageous for such optical elements, coatings, or surfaces, especially due to the production constraints.

[0013] In one embodiment, electromagnetic radiation enters the optical element through the second surface and is at least partially reflected by the coating on the first surface. In this embodiment, the electromagnetic radiation, dependent on the coating and detectable by the detector arrangement, exhibits this reflected radiation that re-enters the second surface. Accordingly, in one embodiment, the detector arrangement detects electromagnetic radiation dependent on the (internal) reflectivity of the coating or its reflectivity towards electromagnetic radiation incident from within. This allows, particularly advantageously, transmitters to be used on the cover device or on the side of the second surface to emit this electromagnetic radiation, and / or enables particularly good, precise, and / or reliable monitoring of certain coatings.

[0014] Additionally or alternatively, in one embodiment, electromagnetic radiation enters the optical element through the first surface and at least partially passes through the coating on the first surface, wherein the electromagnetic radiation, dependent on the coating and detectable by the detector arrangement, exhibits this transmission radiation. Accordingly, in one embodiment, the detector arrangement detects electromagnetic radiation dependent on the transmittance of the coating. This allows, particularly advantageously, transmitters to be used on the side of the first surface to emit this electromagnetic radiation and / or certain other coatings to be monitored particularly well, especially precisely and / or reliably.

[0015] Additionally or alternatively, in one embodiment, electromagnetic radiation from the side of the first surface facing away from the second surface strikes the coating on the first surface and is at least partially reflected by this coating (directly, i.e., without first passing through the second surface). In one embodiment, the electromagnetic radiation, dependent on the coating and detectable by the detector arrangement, exhibits this (directly) reflected radiation that does not exit through the second surface. Similarly, in one embodiment, the detector arrangement detects electromagnetic radiation dependent on the (external) reflectivity of the coating or the reflectivity of the coating towards externally arriving electromagnetic radiation. This allows, particularly advantageously in conjunction with a rotation of the cover device and the optical element relative to each other, or...A reversing device used for this purpose uses a transmitter on the covering device or on the side of the second surface to emit this electromagnetic radiation and / or certain other coatings are controlled particularly well, especially precisely and / or reliably.

[0016] In one embodiment, the electromagnetic radiation, which depends on the coating and can be detected by the detector arrangement, includes visible light, in particular light in a wavelength range between 400 nanometers (nm) and 780 nm, and / or UV light, in particular light in a wavelength range between 200 nm and 400 nm, and can consist of these. This electromagnetic radiation allows for particularly good control of coatings on optical elements designed to influence such electromagnetic radiation.

[0017] In one embodiment, the detector arrangement is mounted on a base body of the covering device for at least partial shielding of the second surface and / or comprises two or more detectors, preferably spaced apart from one another, for detecting electromagnetic radiation dependent on the coating. Additionally or alternatively, one or more of the detectors in the detector arrangement each include at least one photodetector. This, particularly in combination, improves the quality of the inspection. A detector arrangement with two or more spaced-apart detectors can detect electromagnetic radiation at different angles, allowing different properties of the coating to be inspected, and / or the measurement data from the two or more detectors can be compared, for example, averaged or cross-checked, thereby improving the quality.

[0018] In one embodiment, the cover device comprises a transmitter arrangement, which in a further development is arranged on the base body of the cover device for at least partial shielding of the second surface. This transmitter arrangement comprises one or more transmitters, preferably spaced apart from one another, that emit or are configured to emit electromagnetic radiation dependent on the coating and detectable by the detector arrangement. This allows the electromagnetic radiation to be generated advantageously, particularly as needed and / or in close proximity to the optical element. In a further development, the transmitter(s) of the transmitter arrangement each include at least one LED. The quality of the inspection can be improved by using LEDs and / or multiple transmitters, particularly in combination.

[0019] In one embodiment, the cover device includes a control unit, arranged in a further development on one or the base body of the cover device for at least partial shielding of the second surface, which controls the detector arrangement and / or the transmitter arrangement, or is configured or used for this purpose. Such an (integrated) control unit simplifies the control of the detector and / or transmitter arrangement, in particular the transmission of commands, and / or allows the cover device to be controlled at least partially autonomously or decentrally.

[0020] In one embodiment, the covering device includes a storage device, arranged in a further development on one or the base body of the covering device for at least partial shielding of the second surface, which may be one or more parts distributed. This storage device stores, or is configured for, or is used for, evaluation data that depends on measurement data from the detector arrangement, in particular such measurement data, possibly processed, and / or data derived therefrom. Such an (integrated) storage device simplifies the transfer of evaluation data, for example, allowing it to occur only after the coating has been applied without affecting or being affected by the application process, and / or enabling the covering device to be operated at least partially autonomously or decentrally.

[0021] In one embodiment, the covering device comprises a one- or multi-part transmitting and / or receiving device, arranged in a further development on or on the base body of the covering device for at least partial shielding of the second surface. This transmitting and / or receiving device transmits evaluation data dependent on measurement data from the detector arrangement, wirelessly in one embodiment, or via infrared or light in another, and / or receives and transmits command data for the control device, also wirelessly in one embodiment, or via infrared or light, or is configured or used for this purpose. An (integrated) transmitting device allows evaluation data transmission to advantageously occur during the coating process, thus improving control of the coating process based on measurement data from the detector arrangement of the covering device.An integrated receiver allows the control unit to be advantageously instructed externally, thus making the control unit more compact and / or changing its functionality.

[0022] In one embodiment, the cover device includes an energy storage arrangement, in a further development, on one or more of the cover device's base bodies for at least partially shielding the second surface. This energy storage arrangement comprises one or more energy storage devices that supply the detector arrangement, transmitter arrangement, control unit, storage unit, and / or transmitting and / or receiving unit with energy, preferably electrical energy, or are configured or used for this purpose. Such an (integrated) energy storage arrangement or energy supply allows the cover device to operate at least partially autonomously or more flexibly.

[0023] In one embodiment, the covering device has a turning device, or in a further development, a turning device arranged on the base body of the covering device for at least partially shielding the second surface, which rotates the optical element relative to the covering device, preferably after the coating of the first surface of the element has been produced, such that the covering device and the first surface are now facing each other, or which is set up or used for this purpose.

[0024] In one embodiment, the covering device, or in a further embodiment, its base body, has an inner wall that completely or partially shields the second surface, preferably from being coated with coating material to create the coating of the first surface, or is designed or used for this purpose. This inner wall, or in one embodiment, the covering device or its base body, has a dome-like shape and / or is, preferably electrically and / or thermally, insulated, and / or absorbs electromagnetic radiation that depends on the coating and can be detected by the detector arrangement, or is designed or used for this purpose. In a further embodiment, the inner wall is dark, preferably black, and / or frosted. This advantageously reduces back reflections and thus improves the quality of the inspection.

[0025] In one embodiment, the covering device includes a reference, arranged and / or adjustable in a further development on one or the base body of the covering device for at least partial shielding of the second surface, with which the detector arrangement and / or transmitter arrangement is calibrated, or which is configured or used for this purpose. For this purpose, the reference in one embodiment has a known reflection and / or transmission characteristic for the electromagnetic radiation that depends on the coating and can be detected by the detector arrangement. Such an (integrated) reference or calibration advantageously improves the quality of the inspection, or allows the calibration to be performed flexibly and / or in situ.

[0026] According to one embodiment of the present invention, a coating system for producing a coating of a first surface of at least one optical element, in a further development for, preferably jointly, producing a coating of a first surface of a (first) optical element and a coating of a first surface of at least one further optical element, or for, preferably jointly, producing coatings of first surfaces of two or more optical elements: - a coating device that produces, or is equipped or used for, the coating(s) of the first surface(s) of the optical element or of the two or more optical elements; and - a covering device described herein for at least partially shielding a second surface of the at least one optical element opposite the first surface during the coating of the first surface of the at least one optical element, in a further development for two or more of the optical elements to be coated, preferably together, a covering device described herein for at least partially shielding a second surface of the respective optical element opposite the first surface of the respective optical element during the coating of the first surface of the respective optical element, respectively.a (first) covering device described herein for at least partially shielding a second surface of the first optical element opposite the first surface of the first optical element during the production of the coating of the first surface of the first optical element and (each) a (further) covering device described herein for at least partially shielding a second surface of this further optical element opposite the first surface of the or at least one further optical element during the production of the coating of the first surface of this further optical element.

[0027] The coating(s) is / are preferably produced by means of a directed coating process or a corresponding coating device, in one embodiment by means of physical vapor deposition, sputtering, or the like. In such directed coating processes, it is particularly advantageous to shield a second surface of an optical element during the production of a coating on a first surface of the element opposite the second surface by means of a covering device according to the invention.

[0028] In one embodiment, the coating system includes the aforementioned rotating device for twisting the optical element(s) and the cover device(s) relative to each other after the coating of the first surface of the respective element has been applied. Twisting an optical element and a cover device relative to each other can include twisting the optical element with the cover device fixed, twisting the cover device with the optical element fixed, or twisting both the optical element and the cover device. In one embodiment, the rotating device can be arranged on the cover device, or the cover device can incorporate the rotating device, which can offer the advantage of more precise twisting and / or the use of the same rotating device successively for several optical elements.Similarly, the turning device can be designed separately from the covering device in one embodiment and / or the coating system can have the turning device, which in a further development is designed separately from the covering device, which can have the advantage of simpler actuation of the turning device and / or its use for several covering devices in one process.

[0029] In one embodiment, the coating system includes a vacuum chamber that accommodates, is configured for, or is used for the optical element(s) during the coating process. A vacuum chamber improves the coating process, and the invention is particularly advantageous when coating is performed in a vacuum chamber, since the detector arrangement(s) integrated into the covering device(s) do not affect the configuration and / or operation of the vacuum chamber, or affect it less than conventional inline measurement methods.

[0030] In one embodiment, the coating system has a base station, by means of, preferably on or from, the: - evaluation data dependent on measurement data from the detector arrangement, preferably temporarily arranged at the base station, in a further development on the cover device, evaluation data transmitted by the transmitting and / or receiving device of the cover device, are received in one embodiment and / or evaluation data stored by the storage device of the cover device are read out in another embodiment; and / or - an energy storage arrangement for supplying energy to the cover device, which is preferably temporarily arranged at the base station in a further development; and / or - the detector arrangement of the covering device, preferably temporarily located at or, in a further development, attached to the base station, is calibrated; or which is set up or used for this purpose. This allows the operation of the covering device(s) or the coating system to be improved, in particular made more flexible and / or simpler.

[0031] In one embodiment, the coating system has one or more transmitters separate from the covering device(s), which emit, or are configured or used for, electromagnetic radiation dependent on the coating and detectable by the detector arrangement of the covering device, either in addition to or as an alternative to a transmitter arrangement of the (respective) covering device. This allows for the advantageous use of additional and / or external radiation for monitoring the coating(s), thereby improving the quality of the monitoring and / or simplifying the design and / or operation of the covering device(s).

[0032] In one embodiment, the coating system includes a control system that controls, or is configured for, or is used for, the coating or production of the coating(s). A control system within the meaning of the present invention can, in particular, comprise regulation or control based on traceable measured variables and comparison with target values.

[0033] In one embodiment, the coating system carries out a process described here or is equipped for this purpose, in particular in terms of hardware and / or software, especially programming.

[0034] According to one embodiment of the present invention, a method for producing a coating (each) of a first surface of one or more optical elements using a coating system described herein, in a further development, comprises the step: - Creating the coating(s);

[0035] According to one embodiment of the present invention, the method comprises the steps: - Detecting (each) electromagnetic radiation dependent on the (respective) coating of one or more of the optical elements using the detector arrangement of the (respective) covering device, which is arranged or is arranged on the (respective) optical element to at least partially shield a second surface during the production of the (respective) coating, before, during and / or after the production of the (respective) coating; and - Checking the coating of one or more of the optical element(s) based on the detected electromagnetic radiation during and / or after the creation of the (respective) coating.

[0036] In one embodiment, evaluation data dependent on measurement data from the (respective) detector arrangement are sent and / or stored, preferably using the storage or transmitting and / or receiving device of the (respective) covering device and / or the base station of the coating system.

[0037] Controlling within the meaning of the present invention can, in particular, include (over)checking the coating and / or modifying and / or controlling the coating production process, wherein, for the sake of clarity, a control is also referred to as a control, or, in a further embodiment, a control referred to herein can be a control. In one embodiment, the control referred to herein is carried out using data processing or AI that is at least partially based on machine learning, in particular to detect and / or compensate for variations between different boundary conditions.

[0038] In one embodiment, a covering device as described here is arranged on two or more, and in a further development, on all, jointly coated optical elements.

[0039] Then, in one embodiment, a comparison of the measurement data of the detector arrangements is carried out, for example averaging, determining a maximum and / or minimum or the like, whereby the coatings of the optical elements are checked on the basis of this comparison.

[0040] Additionally or alternatively, this allows for individual control of the coatings on the optical elements to which a covering device described herein is attached. In particular, these coatings can be individually inspected and / or their production individually controlled or regulated.

[0041] Additionally or alternatively, in one embodiment, no cover device as described herein is arranged on one or more of the jointly coated optical elements, whereby these optical element(s) can then be inspected based on the optical element(s) coated with it / them jointly with the cover device(s). For example, it is possible to infer the coating of one or more adjacent optical elements from the coating of one or more optical elements, or the like.

[0042] In one embodiment, the generation of the coating of the first surface of at least one (first) optical element, on which a (first) covering device described herein is arranged during this generation, is controlled on the basis of measurement data of the detector arrangement of this covering device; in a further development, this is regulated.

[0043] In a further development, the simultaneous production of the coating of the first surface of at least one further optical element, on which a further covering device described herein is arranged during this production process, is controlled based on measurement data from the detector arrangement of this further covering device. This control of the production of the coating of the first and at least one further optical element can, in particular, include a comparison of the measurement data of the detector arrangements, for example, averaging, determining a maximum and / or minimum, or the like, and controlling the production of the coatings based on this comparison and / or individual monitoring of the coatings of the first and at least one further optical element.

[0044] Additionally or alternatively, in one embodiment, the coating of the first surface of at least one further optical element is generated after the coating of the first optical element, preferably after the first optical element has been removed from the first covering device, based on measurement data from the detector arrangement of the first covering device for the coating of the first optical element. In a further development, process parameters for a subsequent batch of optical elements to be coated are modified based on the measurement data from the detector arrangement of the first covering device for the coating of the first optical element.

[0045] This can improve the coating of optical elements, in particular increasing the quality of the coatings produced.

[0046] Additionally or alternatively, in a further development, the production of the coating of the first surface of at least one further optical element, on which no cover device described here is arranged during this production, is controlled on the basis of measurement data of the detector arrangement of the first cover device, in a further development.

[0047] This reduces the equipment required while still increasing the quality of the coatings produced.

[0048] In one embodiment, a covering device described here for at least partially shielding a second surface of an optical element during the production of a coating on a first surface of the element opposite the second surface is temporarily arranged on this optical element; in a further development, it is attached to this element or arranged on the optical element by means of a holding device for holding the optical element or a separate or independent holding device.

[0049] In one embodiment, one or more, in particular all, steps of the procedure are fully or partially computer-implemented, or one or more, in particular all, steps of the procedure are fully or partially automated, in particular by the system or its components.

[0050] Further advantages and features will become apparent from the dependent claims and the exemplary embodiments. These are shown, in part schematically: Fig. 1: a part of a coating system with a covering device according to an embodiment of the present invention; Fig. 2: a part of a coating system with a covering device according to a further embodiment of the present invention; Fig. 3: a coating system according to an embodiment of the present invention; and Fig. 4: a method for coating at least one optical element according to an embodiment of the present invention.

[0051] Fig. Figure 1 shows a part of a coating system with a covering device 1 having a dome-shaped, electrically insulated base body 1.1 with a dome-shaped, black matte inner wall 1.2 for shielding a second (main) surface 22 of an optical element 2 during the production of a coating 24 on a first (main) surface 21 of the element 2 opposite the second surface 22. The covering device 1 and the base body 1.1 are preferably made of plastic, alternatively of ceramic, alternatively of V2A steel or stainless steel, in which case the base body 1.1 can be electrically insulated not by its material, but for example by an insulating element (not shown).

[0052] The covering device 1 has a detector arrangement with a detector 14 for detecting electromagnetic radiation reflected by the coating 24 and therefore dependent on it in the form of a reflected light beam 15.

[0053] The covering device 1 has a transmitter arrangement with a transmitter for emitting electromagnetic radiation dependent on the coating and detectable by the detector arrangement in the form of a light source 12, which emits the light beam to be reflected by the coating 24.

[0054] The cover device 1 further includes a control unit 10 for controlling the detector 14 of the detector arrangement and the light source 12 of the transmitter arrangement.

[0055] The cover device 1 further comprises a storage device 13 for storing evaluation data dependent on measurement data of the detector arrangement and / or a transmitting and / or receiving device 13' for transmitting evaluation data dependent on measurement data of the detector arrangement and / or receiving command data for the control device.

[0056] The cover device 1 further comprises an energy storage arrangement with an energy storage device 11 for supplying energy to the detector arrangement, transmitter arrangement, control device, storage device and / or transmitting and / or receiving device.

[0057] The cover device 1 is held on a holding device 4 of the coating system by means of a holding element 3.

[0058] Fig. Figure 2 shows a part of a coating system with a covering device 1 according to a further embodiment of the present invention. Corresponding features are identified by identical reference numerals, so that reference is made to the preceding description and differences are discussed below.

[0059] In the execution of the Fig. 2 The detector arrangement comprises several spaced-apart detectors 14, 14', 14" for detecting electromagnetic radiation reflected from the coating 24 and therefore dependent on it in the form of reflected light rays 15, and the transmitter arrangement comprises several spaced-apart transmitters in the form of light sources 12, 12' which emit light to be reflected from the coating 24.

[0060] The light sources 12, 12' are installed at an angle in order to be able to record a reflection spectrum at a predetermined angle in addition to a perpendicular reflection spectrum.

[0061] The coating system of the design Fig. 1 and / or the Fig. 2 can be a transmitter in the form of a light source 52 on a distribution panel 53, separate from the cover device (see Fig. 3) exhibiting electromagnetic radiation in the form of transmitted light 16, which is dependent on the coating and detectable by the detector arrangement 14-14" of the cover device 1. Light from the light source 52 can be used for the purpose of measuring transmission through a glass. For this purpose, the detector arrangement can trigger the detection when it detects maximum irradiance, i.e., when the optical element is located centrally above the light source 52 during its continuous rotational movement during coating.

[0062] Fig. Figure 3 shows a coating system according to an embodiment of the present invention, which in particular includes the coating system described in Figure 3. Fig. 1 or Fig. 2. The coating system shown in part may be.

[0063] It has a vacuum chamber 5 for receiving several optical elements 2, wherein one or more of these optical elements 2 are coated during the joint coating process with reference to Fig. 1 and Fig. 2 described or another cover device according to the invention may be arranged.

[0064] In the vacuum chamber 5, in addition to the optical elements 2 held on a holding device 50 and the cover devices 1 arranged on one or more of these optical elements 2, as well as the separate light source 52, which is preferably arranged on the distributor aperture 53, a coating device 51 for producing the coatings is also arranged.

[0065] Furthermore, the coating system can include a base station 54 for receiving and / or reading out evaluation data dependent on measurement data of the detector arrangement(s) of the cover device(s) and / or charging the energy storage arrangement(s) for power supply of the cover device(s) and / or calibrating the detector arrangement(s) of the cover device(s).

[0066] At base station 54, software updates and / or measurement programs for the control unit(s) can be transferred in one version.

[0067] In one version of the base station 54, the detector arrangement of an optical element can be calibrated before a cover device is placed on it, for example, by referencing with a reflection standard such as BK7.

[0068] Additionally or alternatively, a cover device (each) can have a reference 18 for calibrating its detector arrangement, which in a further development can be adjusted, for example by being extendable or swiveling, for example with a measuring plate as a reflection standard and a beam splitter similar to a 2-beam spectrometer for continuous monitoring of the light source intensity.

[0069] Furthermore, the coating system can have a rotating device 17 for rotating the optical element and the cover device arranged thereon, so that a reflection measurement with light rays emitted from light sources of the cover device can be measured directly on the coated side and not through the optical element. In a modification, one or more cover devices can each have a corresponding rotating device 17', which in Fig. 1 is indicated by way of example.

[0070] Fig.Figure 4 shows a method for producing a coating 24 of a first surface 21 of an optical element 2 using a coating system according to an embodiment of the present invention.

[0071] In step S10, the cover devices are charged and prepared via the base station before being arranged on the optical elements of a new coating batch; in one version, they are calibrated.

[0072] In step S20, the cover devices are positioned on the optical elements.

[0073] In step S30, a coating process is started.

[0074] In particular, to reduce the problem of light pollution from the coating equipment, the detector array of the (respective) cover devices can continuously monitor the light intensity from the moment they are removed from the base station during the coating process (step S40). This determines what constitutes "darkness" in the coating system. The detection can then be triggered so that a reflection spectrum is only recorded when the coating of a single layer is complete and the coating equipment is switched off or at least covered by a shutter. This allows for a simple and / or reliable measurement after the deposition of each individual coating layer. Continuous measurement is also possible.

[0075] In step S50, electromagnetic radiation dependent on the coating is detected during and / or after the coating(s) is produced, and the coating is controlled by a controller 55 of the coating system based on this.

[0076] After coating, the cover devices are removed from the optical elements in step S60 and placed back on the base station to read out the determined reflection values ​​or to recharge the battery.

[0077] By detecting electromagnetic radiation dependent on the current coating or the portion of the coating already generated at the (respective) measurement or detection time, and by transmitting evaluation data dependent on measurement data from the detector arrangement during the coating process, it is advantageous to control, in particular regulate, the ongoing coating process (see step S50).

[0078] If evaluation data dependent on measurement data from the detector arrangement is stored, this data can be read out after coating and used, for example, in step S70 to modify a coating process for a further batch. Accordingly, the generation of a coating on the first surface of at least one (further) optical element of the next batch is then controlled based on measurement data from the detector arrangement acquired in step S50.

[0079] In the present disclosure, "has an X" does not generally imply an exhaustive list, but is a shorthand for "has at least one X" and also includes "has two or more X" as well as "has Y in addition to X". Although exemplary examples were explained in the preceding description, it should be noted that a multitude of variations are possible. Reference symbol list 1 Cover device 1.1 Basic body 1.2 Inner wall 10 Control unit 11 Energy storage 12, 12' Light source (transmitter) 13 Storage device 13' Transmitting and / or receiving equipment 14, 14', 14" detector 15 light beam 16 transmitting light 17, 17' Turning device 18 Reference for calibrating the detector arrangement 2 optical element 21 First main surface of the optical element 22 second main surface of the optical element 24 coating 3 retaining element 4 Holding device 5 vacuum chamber 50 Holding device 51 Coating equipment 52 Light source 53 Distributor cover 54 Base station 55 Control

Claims

[1] Covering device (1) for at least partially shielding a second surface (22) of an optical element (2) during the production of a coating (24) of a first surface (21) of the element opposite the second surface, wherein the covering device has a detector arrangement with at least one detector (14, 14', 14") for detecting electromagnetic radiation (15; 16) dependent on the coating. [2] Covering device according to claim 1, characterized by : - a transmitter arrangement with at least one transmitter (12, 12') for emitting electromagnetic radiation (15) that depends on the coating and can be detected by the detector arrangement; and / or - a control device (10) for controlling the detector arrangement and / or the transmitter arrangement; and / or - a storage device (13) for storing evaluation data dependent on measurement data of the detector arrangement; and / or - a transmitting and / or receiving device (13') for transmitting evaluation data dependent on measurement data from the detector arrangement and / or receiving command data for the control device; and / or - a rotating device (17') for rotating the optical element relative to the cover device; and / or - an energy storage arrangement with at least one energy storage device (11) for supplying energy to the detector arrangement and / or transmitter arrangement and / or control device and / or storage device and / or transmitting and / or receiving device. [3] Covering device according to one of the preceding claims, characterized by that they - a dome-shaped and / or insulated and / or coating-dependent and detector-arranged electromagnetic radiation-absorbing inner wall (1.2) for shielding the second surface; and / or - includes a reference (18) for calibrating the detector arrangement and / or transmitter arrangement. [4] Coating system for producing a coating on a first surface of at least one optical element (2), wherein the coating system comprises a coating device (51) for producing the coating (24) of the first surface (21) and a covering device (1) according to one of the preceding claims for at least partially shielding a second surface (22) of the at least one optical element opposite the first surface during the production of the coating. [5] Coating system according to claim 4, characterized by : - a vacuum chamber (5) for receiving the at least one optical element during the production of the coating; and / or - a base station (54) for receiving and / or reading evaluation data dependent on measurement data of the detector arrangement of the cover device and / or charging an energy storage arrangement for powering the cover device and / or calibrating the detector arrangement of the cover device; and / or - at least one transmitter (52) separate from the covering device for emitting electromagnetic radiation that depends on the coating and can be detected by the detector arrangement of the covering device; and / or - a turning device (17) for rotating the at least one optical element and the cover device relative to each other; and / or - a control (55) for controlling the coating process. [6] Coating system according to one of claims 4-5, characterized by that it is equipped to carry out a procedure according to one of the following claims. [7] Method for producing a coating of a first surface of at least one optical element using a coating system according to one of claims 4-6, wherein, using the detector arrangement (14, 14', 14") of the covering device (1), a coating-dependent electromagnetic radiation (15, 16) is detected before, during and / or after the production of the coating (24) and the coating is controlled on the basis thereof (S50, S70). [8] Method according to claim 7, characterized by , that - Evaluation data dependent on measurement data from the detector arrangement are sent and / or stored (S50); and / or - that at least one optical element and the covering device are rotated relative to each other after the coating has been applied; and / or - the generation of the coating of the first surface of at least one optical element is controlled. [9] Method according to one of claims 7-8, characterized by, that a coating of a first surface of at least one further optical element is produced using the coating system, wherein this production is controlled on the basis of measurement data of the detector arrangement of the covering device. [10] Method according to any one of claims 7-9, characterized by , that a coating of a first surface of at least one further optical element is produced using the coating system, the coating system has a further covering device according to one of claims 1-3 for at least partially shielding a second surface opposite this first surface of this at least one further optical element during this production of this coating, and this production is controlled on the basis of measurement data of the detector arrangement of the further covering device.

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