Method and apparatus for calibrating a connecting element

Abstract

The invention relates to a method for calibrating a connecting element (1) for connecting a first, in particular a static, component (2) with a second, in particular a dynamic, component (3). The objective of providing a method for calibrating the connecting element for connecting a first component with a second component, with which the influence of static forces and moments at an operating point can be minimized and thus the decoupling of the connecting element can be optimized, is achieved by the method comprising: simulating an installation state of the connecting element (1), determining a position vector v → between the first component (2) and the second component (3), for which the second component (3) experiences a predetermined force and / or moment input, depending on the simulated installation state of the connecting element (1), and positioning of the connecting element (1) between the first component (2) and the second component (3) depending on the determined position vector v → . The invention further relates to a device for calibrating a connecting element (1) for connecting a first component (2) with a second component (3) and a projection exposure system (100) for microlithography comprising at least one first component (2), at least one second component (3) and at least one connecting element (1) which connects the first component (2) with the second component (3).

Description

Technical area

[0001] The invention relates to a method and a device for calibrating a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component. Furthermore, the invention relates to a projection exposure system for microlithography comprising at least one first, in particular a static, component, at least one second, in particular a dynamic, component, and at least one connecting element that connects the first component to the second component. background

[0002] Many applications require components to be connected to one another, for example, to transport energy, signals, fluids, and more. To at least partially mechanically decouple the components from one another and, if necessary, ensure a certain degree of manipulation, connecting elements with defined static and dynamic properties are used. Energy, signals, and fluids are exchanged between the components via these connecting elements. One of the two components can be designed as an optical element, such as a mirror, of a projection exposure system, which can be positioned in at least three degrees of freedom to optimize image quality.

[0003] The connecting elements represent a mechanical connection between the components, which can also transmit unwanted mechanical vibrations. Therefore, the connecting elements are typically designed to transmit only minimal static and dynamic forces from one component to another connected to it, thus ensuring maximum decoupled components. However, the connecting elements cannot prevent static parasitic forces and moments, such as the weight of the connecting element itself and any medium contained therein, as well as forces from static pressure, from being transmitted to the connected components.

[0004] The present invention is therefore based on the objective of providing a method for calibrating a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component, with which method the influence of static forces and moments at an operating point can be minimized and the decoupling of the connecting element can thus be optimized. Furthermore, it is an object of the present invention to provide an advantageous device for calibrating a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component, as well as an advantageous projection exposure system comprising at least one first, in particular a static, component, at least one second, in particular a dynamic, component, and at least one connecting element.

[0005] According to a first teaching of the present invention, the object is achieved by a method for calibrating a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component, the method comprising: simulating the installation position of the connecting element between the first component and the second component, determining a relative position between the first component and the second component, for which the second component at least substantially experiences a predetermined force and / or moment input, based on the simulated installation position of the connecting element, and positioning the connecting element between the first component and the second component based on the determined relative position between the first component and the second component.

[0006] The method is used to calibrate a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component. Calibration can be understood, for example, as position determination. In particular, calibration can be understood as optimized positioning and / or alignment of the connecting element. The method is used, in particular, to determine a relative position of the connection of the connecting element to the first component to the connection of the connecting element to the second component, for which the second component experiences a defined force and / or moment input. With the aid of the method, for example, the decoupling of the connecting element can be optimized, particularly with regard to stiffness and damping.The method is particularly suitable for calibrating a connecting element for connecting a first, in particular a static, component and a second, in particular a dynamic, component of a projection exposure system.

[0007] A connecting element is understood, in particular, to be an element by which a mechanical connection is established between the first component and the second component. In particular, the connecting element is suitable for transporting energy, signals, and / or fluids. For example, the connecting element can be a tubular protector for electrical or optical lines, but also a line for a fluid, in particular a temperature-control fluid. The connecting element can be, for example, a connecting element known from DE 10 2021 208 843 A1.

[0008] The first component can be a static or a dynamic component. Preferably, the first component is a static component. The static component can be a static component of a projection exposure system. For example, the static component can be a structural component of a projection exposure system, in particular a part of the supporting structure of the projection exposure system, the so-called force frame.

[0009] The second component can also be a static or dynamic component. Preferably, the second component is a dynamic component. The dynamic component can be a dynamic component of a projection exposure system. In particular, the dynamic component can be an optical element. The optical element can be positioned in at least three degrees of freedom to optimize imaging quality. For example, it is conceivable that the dynamic component could be a mirror.

[0010] The method comprises simulating the installation position of the connecting element between the first component and the second component. In particular, the method comprises simulating the installation position of the connecting element for which the connecting element is to be calibrated. To simulate the installation position of the connecting element between the first component and the second component, the connecting element can be connected to a first connection point and a second connection point. For example, the connecting element is connected with a first end to the first connection point and with a second end to the second connection point. The connection to the first connection point is, for example, representative of the connection to a static component; in this case, the first connection point can also be referred to as a static connection point.The connection to the second connection point is representative, for example, of the connection to a dynamic component; in this case, the second connection point can also be referred to as a dynamic connection point. The simulation can include replicating the installation position of the connecting element between the first component and the second component, for example, in a projection exposure system. The connecting element can be positioned between the first connection and the second connection according to the intended installation position.

[0011] The method comprises determining a relative position between the first component and the second component, for which the second component at least substantially experiences a predetermined force and / or moment input. In particular, the method comprises determining the relative position between the connection point of the connecting element to the first component and the connection point of the connecting element to the second component, for which the second component, in particular the connection point of the second component, experiences a predetermined force and / or moment input. The relative position is determined based on the simulated installation position of the connecting element.

[0012] Determining the relative position can in particular involve determining a position vector v→ The position vector v→ can be determined depending on the simulated installation position of the connecting element. For example, the method includes determining a position vector v→ between the first component, in particular the connection point of the connecting element on the first component, and the second component, in particular the connection point of the connecting element on the second component, for which the second component, in particular the connection point of the second component, experiences a predetermined force and / or moment input. For example, the relative position for which the second component, in particular the connection point on the second component, experiences a predetermined force and / or moment input in at least one effective direction can be determined. The method can comprise determining the force and / or moment input on the second component in at least one effective direction.

[0013] The method comprises positioning the connecting element between the first component and the second component based on the determined relative position between the first component and the second component. In particular, the method comprises positioning the connecting element between the connection point of the connecting element to the first component and the connection point of the connecting element to the second component based on the determined relative position between the first component and the second component. The positioning of the connecting element between the first component and the second component can, for example, be dependent on the determined position vector v→ In particular, the method comprises positioning, in particular installing, the connecting element for connecting a first component to a second component in a projection exposure system depending on the determined relative position. The positioning of the connecting element between the first component and the second component takes place in particular according to the determined relative position, so that the second component at least substantially experiences the predetermined force and / or moment input, preferably in at least one effective direction.

[0014] It has been shown that with the aid of the method for calibrating the connecting element, the position of the connecting element between the first, in particular a static, component and the second, in particular a dynamic, component can be determined, for which the second, in particular the dynamic, component at least substantially experiences a predetermined force and / or moment input. In particular, it has been shown that with the aid of the method, static parasitic forces and moments such as the dead weight of the connecting element, the weight of a medium located in the connecting element and forces from a static pressurization in the connected components can be reduced or at least used in a targeted manner. It is conceivable that a defined force or moment input into the second component is desired, for example in order to apply a supporting force in at least one effective direction.For example, it may be desired to apply a supporting force to the connection point between the connecting element and the second component, for example to a closing axis of a flange of the connecting element. The relative position at which a defined load case acts on the second connection point can also be referred to as the “defined load position”. For example, a force and / or moment input in at least one effective direction on the second connection point can be specified and achieved with the aid of the method. In particular, the installation position and, for example, associated influences on the connecting element can be taken into account. In particular, the method can be used to connect the connecting element to the first component and the second component with as little force as possible.The procedure can be repeated for each new fastener to specifically adjust the respective fastener.

[0015] According to a first advantageous embodiment of the method, determining the relative position comprises determining the relative position between the first component and the second component for which the second component experiences at least substantially no force and / or moment input. In this way, the influence of static forces and / or moments by the connecting element can advantageously be minimized. Preferably, determining the relative position comprises determining the relative position for which the second component experiences a force and / or moment input of zero. It is conceivable that the relative position is determined for which the second component experiences at least substantially no force and / or moment input in at least one, preferably in all, effective directions.The relative position for which the second component, in particular the connection point of the connecting element to the second component, experiences no forces from the connecting element, can also be referred to as the "zero load position." The method can be used to determine this zero load position.

[0016] According to a further advantageous embodiment of the method, determining the relative position can include determining the stiffness of the connecting element depending on the simulated installation position of the connecting element. Stiffness can be understood as the resistance to elastic deformation due to applied forces and / or moments. By determining the stiffness of the connecting element, for example, the resistance that the connecting element can offer to deformation due to an external influence, for example a force and / or torque, can be determined.The stiffness of the connecting element can be determined by displacing the connecting element unilaterally, for example at the connection point of the first component, in defined spatial directions, for example in six degrees of freedom, and determining the resulting forces and / or torques, for example at the connection point of the second component. To determine the stiffness, trajectories around a pivot point can be followed, for example with the aid of a manipulator, while the force curves are measured using a measuring device, in particular a force sensor. It is conceivable, for example, that a manipulator is arranged at a first end of the connecting element, in particular at the end connected to the first connection point, and is moved successively in different degrees of freedom.The manipulator preferably allows movements in six degrees of freedom, in particular around three linear axes and three axes of rotation. The manipulator is, for example, a hexapod. The manipulator allows, for example, tilting and / or rotating the first, in particular static, connection around the pivot point. At a second end of the connecting element, preferably at the end connected to the second, in particular dynamic, connection point, a measuring device can be arranged, by means of which the forces and / or torques, for example the trajectories, in particular the force curves, can be determined. The stiffness can be determined as the gradient of the respective trajectory. Depending on the number of degrees of freedom, a stiffness matrix, in particular a linear stiffness matrix, for example a 6x6 stiffness matrix, can be created based on this.

[0017] Alternatively or additionally, determining the relative position can include determining, in particular measuring, parasitic forces and / or moments acting on the connecting element depending on the simulated installation position of the connecting element. For example, determining a force vector in the installation position is conceivable. In particular, a force vector can be determined by measuring the forces in the defined installation position or position and under specific operating conditions. The force vector is determined in particular at operating pressure, for example, 0.3 bar.

[0018] Furthermore, the method can comprise determining the relative position for which the second component, in particular the connection point of the connecting element to the second component, experiences a predetermined force and / or moment input, based on the determined stiffness of the connecting element and / or the determined parasitic forces and / or moments acting on the connecting element. This, in turn, makes it possible to determine the relative position for which the second component experiences the predetermined force and / or moment input. The method can, in particular, comprise calculating the defined load position or the zero load position. The calculation is carried out, for example, based on the determined stiffness matrix and the determined force vector. It can be advantageous to determine a local minimum when determining the relative position. Calculating a global minimum, on the other hand, can lead to a solution outside the permissible range.A deviation can, for example, arise due to an inaccuracy in a measuring device. It is conceivable, for example, that the relative position can be finely adjusted using a manipulator, in particular the manipulator located at the first connection point.

[0019] According to a further advantageous embodiment of the method, determining the relative position comprises determining the force and / or moment input to the second component, and adjusting the actual position of the first component until the target position is reached, at which the second component experiences the predetermined force and / or moment input. In particular, determining the relative position comprises determining the force and / or moment input to the connection point of the connecting element to the second component and adjusting the actual position of the connection point of the connecting element to the first component until the target position is reached, at which the second component, in particular the connection point of the connecting element to the second component, experiences the predetermined force and / or moment input.

[0020] The target position is characterized in that the second component, in particular the connection point of the connecting element to the second component, experiences the specified force and / or moment input in this position. The actual position of the first component, in particular the connection point of the connecting element to the first component, can be adjusted, for example, using a manipulator. The manipulator allows, for example, tilting and / or rotating the first component, in particular the connection point of the connecting element to the first component, about a pivot point. Preferably, the manipulator allows movements in six degrees of freedom, in particular about three linear axes and three rotational axes. The manipulator can preferably be a hexapod. With the help of the manipulator, the position of the first connection point can be adjusted; in particular, different trajectories can be followed.Meanwhile, the force and / or moment input to the second component, in particular to a measuring device arranged at the second connection point, can be determined.

[0021] According to a further advantageous embodiment of the method, the actual position of the first component is adjusted iteratively until the target position is reached. For example, it is conceivable that the force and / or moment input to the second component is determined and the actual position of the first component is adjusted iteratively until the target position is reached, at which the second component experiences the specified force and / or moment input. The actual position of the first component can be monitored and adjusted, in particular, until the target position is reached. For example, the manipulator can be moved until the "defined load position" or the "zero load position" is reached.

[0022] It may be advantageous to combine the determination of the relative position based on the determined stiffness of the connecting element and / or the determined parasitic forces and / or moments acting on the connecting element with the iterative adjustment of the actual position of the first component until the target position is reached. While, for example, the calculation may lead to a solution outside the permissible range, it may be advantageous to search for a local minimum using a method of the manipulator. It is conceivable, for example, that the relative position can be finely adjusted using the manipulator, in particular the manipulator arranged at the first connection point.

[0023] According to a further advantageous embodiment of the method, simulating the installation position comprises connecting a media connection to the connecting element. The media connection can, for example, be connected to the first end of the connecting element. In particular, the media connection can be encompassed by the first component.

[0024] According to a further advantageous embodiment of the method, the method further comprises: simulating an operating point for which the connecting element is to be calibrated. It is conceivable that, in addition to the installation position, the environmental influences acting on the connecting element are also taken into account when determining the relative position, in particular the position vector. v→, The relative position between the first component and the second component, for which the second component experiences the specified force and / or moment input, can be determined depending on the simulated operating point of the connecting element. Preferably, the position vector v→ depending on the simulated installation position and the simulated operating point of the connecting element.

[0025] Preferably, simulating the operating point of the connecting element comprises: filling the connecting element with a medium having a predetermined mass m M and / or temperature T M , setting pressure and / or flow forces, and / or setting an ambient temperature T UThe connecting element can be filled with a medium, such as a cooling fluid, via a connected media connection, which is taken into account when determining the relative position. The medium can have a specified mass m M and / or temperature T M It is also conceivable that pressure and / or flow forces acting on the connecting element, such as hydrostatic pressure, are simulated and taken into account when determining the relative position. This also applies to the ambient temperature T U, which can be considered alternatively or additionally when determining the relative position. By simulating the operating point, operating loads, thermal expansion effects, water weights, and / or drift effects can be taken into account when determining the relative position. This allows influences that also act in the intended installation state of the connecting element, for example, to be taken into account when determining the relative position.

[0026] According to a second teaching of the present invention, the above-mentioned object is achieved by a device for calibrating a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component, the device comprising: a structure for simulating the installation position of the connecting element between the first component and the second component, the structure comprising a first, in particular a static, connection point and a second, in particular a dynamic, connection point, and a measuring device for determining a force and / or moment input to the second connection point.

[0027] The device comprises a structure for simulating the installation position of the connecting element between the first component and the second component. The structure can be, for example, a substantially rigid structure. The structure comprises a first, in particular a static, connection point and a second, in particular a dynamic, connection point. To simulate the installation position of the connecting element between the first component and the second component, the connecting element can be connected to a first connection point and a second connection point. For example, the connecting element is connected with a first end to the first connection point and with a second end to the second connection point.The connection to the first connection point is, for example, representative of the connection to a static component; in this case, the first connection point can also be referred to as a static connection point. The connection to the second connection point is, for example, representative of the connection to a dynamic component; in this case, the second connection point can also be referred to as a dynamic connection point. The simulation can comprise replicating the installation position of the connecting element between the first component and the second component, for example, in a projection exposure system. The connecting element can be positioned between the first connection point and the second connection point according to the intended installation position.

[0028] The device further comprises a measuring device for determining a force and / or torque input to the second connection point. The measuring device can be, for example, a force sensor, in particular a 6-DOF force transducer. The measuring device can be used to determine, in particular, the forces and / or torques, in particular the force curves, acting on the second connection point.

[0029] The device is used to calibrate a connecting element for connecting a first, in particular a static, component to a second, in particular a dynamic, component. For example, the device is suitable for carrying out a method according to the first teaching. In particular, the device is suitable for calibrating a connecting element for connecting a first, in particular a static, component of a projection exposure system to a second, in particular a dynamic, component of a projection exposure system. It has been shown that with the aid of the device, static parasitic forces and moments such as the dead weight of the connecting element, the weight of a medium located in the connecting element and forces from a static pressure application in the connected components can be reduced or at least used in a targeted manner.

[0030] According to a first advantageous embodiment of the device, the device further comprises a manipulator for adjusting the actual position of the first connection point. The manipulator allows, for example, tilting and / or rotating the connection point of the connecting element to the first component about a pivot point. The manipulator preferably allows movements in six degrees of freedom, in particular about three linear axes and three rotational axes. The manipulator can preferably be a hexapod. With the aid of the manipulator, the position of the first connection point can be adjusted; in particular, different trajectories can be followed.

[0031] According to a further advantageous embodiment of the device, the device further comprises: at least one media connection for connection to the connecting element. The media connection is arranged in particular at the first connection point. In particular, the media connection can be comprised by the first component. The media connection can be connected to one end of the connecting element in order to introduce a medium into the connecting element. It is also conceivable for the device to comprise further means for setting an operating point for which the connecting element is to be calibrated. For example, the device can comprise a cooling and / or heating device. With the aid of the cooling and / or heating device, for example, the ambient temperature T U of the connecting element. The device can also include a temperature sensor to control the ambient temperature T U include.

[0032] According to a third teaching of the present invention, the above-mentioned object is achieved by a projection exposure system for microlithography comprising: at least one first, in particular a static, component, at least one second, in particular a dynamic, component, and at least one connecting element which connects the first component to the second component, wherein the connecting element has been calibrated using a method according to the first teaching and / or using a device according to the second teaching.

[0033] The exemplary embodiments of the present invention described above in this specification are also to be understood as disclosed in all combinations with one another. The individual features of each teaching can be combined with any or all features of the other teachings. Further embodiments and advantages of the invention are explained in the following detailed description of some exemplary embodiments of the present invention in conjunction with the drawings. Short description of the drawing

[0034] In the following, exemplary embodiments and variants of the invention are explained in more detail with reference to the drawings. The aspects of the disclosure can best be understood from the following detailed description in conjunction with the accompanying figures. The figures are schematic and simplified, showing only details to improve the understanding of the claims, while other details are omitted. The same reference numerals are used throughout for identical or corresponding parts. The individual features of each aspect can each be combined with any or all features of the other aspects. These and other aspects, features and / or technical effects are apparent from and are clarified by the figures described below. It shows Fig. 1 schematically shows in meridional section a projection exposure system for EUV projection lithography, Fig. 2 schematically shows a projection exposure system for DUV projection lithography, Fig. 3a, Fig. 3b schematic views of an embodiment of a device for calibrating a connecting element for connecting a first component to a second component according to the second aspect, and Fig. 4a - 4e are schematic representations of an embodiment of a method for calibrating a connecting element for connecting a first component to a second component according to the first aspect.

[0035] In the following, with reference to Fig. 1 describes, by way of example, the essential components of a projection exposure system 100 for microlithography. The description of the basic structure of the projection exposure system 100 and its components is not intended to be limiting.

[0036] One embodiment of an illumination system 102 of the projection exposure system 100 has, in addition to a light or radiation source 103, an illumination optics 104 for illuminating an object field 111 in an object plane 112. In an alternative embodiment, the radiation source 103 can also be provided as a separate module from the rest of the illumination system. In this case, the illumination system does not include the radiation source 103.

[0037] The radiation source 103 is an EUV radiation source. The radiation source 103 emits, in particular, EUV radiation 101, which is also referred to below as useful radiation, illumination radiation, or illumination light. The useful radiation has, in particular, a wavelength in the range between 5 nm and 30 nm.

[0038] The illumination radiation 101 emanating from the radiation source 103 is focused by a collector 105. After the collector 105, the illumination radiation 101 propagates through an intermediate focus in an intermediate focal plane 106. The intermediate focal plane 106 can represent a separation between a radiation source module, comprising the radiation source 103 and the collector 105, and the illumination optics 104.

[0039] The illumination optics 104 comprises a deflection mirror 107 and, downstream of this in the beam path, a first facet mirror 108. The first facet mirror 108 comprises a plurality of individual first facets 109, which are also referred to as field facets. Of these facets 109, Fig. 1 shows only a few examples. With the help of the second facet mirror 110, the individual first facets 109 are imaged into the object field 111. The second facet mirror 110 is the last bundle-forming or actually the last mirror for the illumination radiation 101 in the beam path before the object field 111. In a further embodiment of the illumination optics 104, the deflection mirror 107 can also be omitted, so that the illumination optics 104 can then have exactly two mirrors after the collector 105, namely the first facet mirror 108 and the second facet mirror 110.

[0040] A reticle 113 arranged in the object field 111 is exposed. A structure on the reticle 113 is imaged onto a light-sensitive layer of a wafer 116 arranged in the region of the image field 114 in the image plane 115. For this purpose, the projection exposure apparatus 100 comprises a projection optics 117. The projection optics 117 serves to image the object field 111 into an image field 114 in an image plane 115. The projection optics 110 comprises a plurality of mirrors Mi, which are numbered according to their arrangement in the beam path of the projection exposure apparatus 100. In the Fig. In the example shown in Figure 1, the projection optics 117 comprises six mirrors M1 to M6. Alternatives with four, eight, ten, twelve, or a different number of mirrors M1 are also possible. The projection optics 117 is a doubly obscured optics. The penultimate mirror M5 and the last mirror M6 each have a passage opening for the illumination radiation 101. The projection optics 117 has an image-side numerical aperture that is greater than 0.5 and can also be greater than 0.6, for example, 0.7 or 0.75.

[0041] A connecting element (not shown) can, for example, be one of the Fig. 1 to a frame (not shown) of the projection exposure system 100. The connecting element can surround lines for signal transmission as mechanical protection or be designed as a line for a fluid for tempering a mirror.

[0042] In Fig. 2 shows an exemplary DUV projection exposure system 200. The projection exposure system 200 comprises an illumination system 203, a device called a reticle stage 204 for receiving and precisely positioning a reticle 205, by means of which the subsequent structures on a wafer 202 are determined, a wafer holder 206 for holding, moving, and precisely positioning the wafer 202, and an imaging device, namely a projection lens 207, with a plurality of optical elements 208, which are held via mounts 209 in a lens housing 240 of the projection lens 207.

[0043] The optical elements 208 may be formed as individual refractive, diffractive and / or reflective optical elements 208, such as lenses, mirrors, prisms, end plates and the like.

[0044] The basic functional principle of the projection exposure system 200 provides that the structures introduced into the reticle 205 are imaged onto the wafer 202.

[0045] The illumination system 203 provides a projection beam 211 in the form of electromagnetic radiation required for imaging the reticle 205 onto the wafer 202. A laser, a plasma source, or the like can be used as the source for this radiation. The radiation is shaped in the illumination system 203 via optical elements such that the projection beam 211 has the desired properties regarding diameter, polarization, wavefront shape, and the like when it strikes the reticle 205.

[0046] In Fig. Figure 3a shows a device 10 for calibrating a connecting element 1 for connecting a first component 2 to a second component 3. The first component 2 is designed as a static component. The second component 3 is designed as a dynamic component. The connecting element 1 is tubular and comprises, for example, metal or plastic, such as polytetrafluoroethylene (PTFE) or tetrafluoroethylene-hexafluoropropylene-vinylidene fluoride terpolymer (THV). Furthermore, the connecting element 1 comprises at least one decoupling element, which can be designed, for example, as a solid-state joint or as a bellows.

[0047] The device 10 in Fig. 3a comprises a structure 11 for simulating the installation position of the connecting element 1 between the static component 2 and the dynamic component 3. The structure 11 is rigid and comprises a first connection point 12, which is designed as a static connection point, and a second connection point 13, which is designed as a dynamic connection point. The connecting element 1 is attached in the installation position between the static connection point 12 and the dynamic connection point 13. At the end 1a of the connecting element 1, which faces the static connection point 12, the connecting element 1 is connected to a static component 2. The static component 2 here comprises a media connection 4. The device 10 also comprises a manipulator 15 with six degrees of freedom.

[0048] In Fig. Figure 3b shows a side view of the device 10. The dynamic connection point 13 to the dynamic component 3 includes an adapter for connecting the connecting element 1. Furthermore, the device 10 includes a measuring device 14 for determining a force and / or moment input to the dynamic connection point 13. The measuring device 14 is designed as a force sensor, in particular as a 6-DOF force sensor.

[0049] In Fig. 4a to 4e show method steps of a method for calibrating a connecting element 1 for connecting a first component 2, which is designed as a static component, to a second component 3, which is designed as a dynamic component. The method steps are carried out with the aid of a device 10 for calibrating the connecting element 1 for connecting a static component 2 to a dynamic component 3. A manipulator 15 for adjusting the actual position of the static connection point 12 is provided at the static connection point 12. The dynamic connection point 13 comprises a measuring device 14 for determining a force and / or moment input to the dynamic connection point 13. Before a connecting element 1 is introduced into the device 10 for calibration, in the method step in Fig. 4a the mass of the adapter for connecting the connecting element 1 to the dynamic connection point 13 is calibrated.

[0050] In the process step in Fig. 4b, the connecting element 1 is inserted into the device 10 according to the planned installation position. A first end 1a of the connecting element 1 is connected to the static connection point 12, and a second end 1b is connected to the dynamic connection point 13. In addition, a media connection 4 is connected to the first end 1a of the connecting element 1. With the aid of the device 10, the installation position of the connecting element 1 between the static component 2 and the dynamic component 3 can be simulated.

[0051] In the process step in Fig. 4c, the operating point is simulated for which the defined force and / or moment input to the dynamic component 3 is to be determined. For this purpose, the connecting element 1 is connected, for example, via the media connection 4, to a medium, for example cooling water, with a defined mass m M and temperature T M It is also conceivable that pressure and / or flow forces are adjusted to the connecting element 1. In addition, for example, the ambient temperature T U adjusted so that it also corresponds to the operating state. The connecting element 1 experiences different forces and moments, for example, due to the static medium pressure, the flow, the medium temperature, the ambient temperature, and / or the weight of the medium, and is thus exposed to the variety of parasitic influences that can be minimized at the selected operating point using the calibration procedure.

[0052] In the process step in Fig. 4d, depending on the simulated installation state of the connecting element 1, the relative position between the static component 2 and the dynamic component 3, in particular the position vector v→, determined for which the dynamic component 3 experiences a defined force and / or moment input. For example, the relative position can be determined for which the dynamic component 3 experiences at least substantially no force and / or moment input.

[0053] The relative position is determined based on the stiffness of the connecting element and the parasitic forces and / or moments acting on the connecting element 1. Using the manipulator 15, which is designed here as a hexapod, travel paths in the six degrees of freedom around a pivot point can be traversed. The forces and / or torques can be determined in the form of force trajectories using the measuring device 14. The stiffness can be determined as the gradient of the respective trajectory. Depending on the number of degrees of freedom, a stiffness matrix, in particular a linear stiffness matrix, for example a 6x6 stiffness matrix, can be created based on this. Furthermore, a force vector in the installed position at an operating pressure of 0.3 bar can be determined. Based on the stiffness and the force vector, the relative position for a defined force and / or moment input can be calculated.From this, the position vector can be determined. v→ be determined for which the dynamic component 3 experiences a defined force and / or moment input.

[0054] Alternatively, it is conceivable that the relative position is determined by iteratively adjusting the actual position of the static component 2 until the target position is reached, at which the dynamic component 3 experiences the specified force and / or moment input. The actual position of the static component 3, in particular of the connection point 13 of the connecting element 1 to the static component 3, can be adjusted using the manipulator 15. With the aid of the manipulator 15, the position of the static connection point 12 can be adjusted in six degrees of freedom, while the force and / or moment input to the measuring device 14 arranged at the dynamic connection point 13 is determined. For example, the manipulator 15 can be moved until the "defined load position" or the "zero load position" is reached.

[0055] Finally, in the process step in Fig. 4e the connecting element 1 depending on the specific position vector v→ positioned between the static component 2 of a projection exposure system 100, for example a mirror, and the dynamic component 3 of the projection exposure system 100, for example a support structure.

[0056] For example, a connecting element (not shown) may be one of the Fig. 1 to a frame (not shown) of the projection exposure system 100. The connecting element connecting the frame to the mirror can, for example, have been calibrated using the method and / or device described above. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] DE 10 2021 208 843 A1

[0007]

Claims

[1] Method for calibrating a connecting element (1) for connecting a first, in particular a static, component (2) to a second, in particular a dynamic, component (3), the method comprising: - Simulating the installation position of the connecting element (1) between the first component (2) and the second component (3), - determining a relative position between the first component (2) and the second component (3), for which the second component (3) experiences at least substantially a predetermined force and / or moment input, based on the simulated installation position of the connecting element (1), and - Positioning the connecting element (1) between the first component (2) and the second component (3) based on the determined relative position between the first component (2) and the second component (3). [2] The method of claim 1, wherein determining the relative position comprises: - Determining the relative position between the first component (2) and the second component (3) for which the second component (3) experiences at least substantially no force and / or moment input. [3] The method of claim 1 or 2, wherein determining the relative position comprises: - determining the stiffness of the connecting element (1) and / or parasitic forces and / or moments acting on the connecting element (1) depending on the simulated installation position of the connecting element (1), and - Determining the relative position for which the second component (3) experiences a predetermined force and / or moment input based on the determined stiffness of the connecting element (1) and / or the determined parasitic forces and / or moments acting on the connecting element (1). [4] Method according to one of claims 1 to 3, wherein determining the relative position comprises: - Determining the force and / or moment input to the second component (3), and - Adjusting the actual position of the first component (2) until the target position is reached, at which the second component (3) experiences the specified force and / or moment input. [5] Method according to claim 4, wherein the adjustment of the actual position of the first component (2) is carried out iteratively until the target position is reached. [6] Method according to one of claims 1 to 5, wherein simulating the installation position comprises connecting a media connection (4) to the connecting element (1). [7] A method according to any one of claims 1 to 6, wherein the method further comprises: - Simulating the operating point for which the connecting element (1) is to be calibrated, wherein the relative position between the first component (2) and the second component (3), for which the second component (3) experiences the predetermined force and / or moment input, is determined depending on the simulated operating point of the connecting element (1). [8] The method of claim 7, wherein simulating the operating point comprises: - filling the connecting element (1) with a medium having a predetermined mass m M and / or temperature T M , - Adjusting pressure and / or flow forces, and / or - Setting an ambient temperature Tu. [9] Device (10) for calibrating a connecting element (1) for connecting a first, in particular a static, component (2) to a second, in particular a dynamic, component (3), in particular for carrying out a method according to one of claims 1 to 8, the device (10) comprising: - a structure (11) for simulating the installation position of the connecting element (1) between the first component (2) and the second component (3), the structure (11) comprising a first, in particular a static, connection point (12) and a second, in particular a dynamic, connection point (13), and - a measuring device (14) for determining a force and / or moment input to the second connection point (13). [10] Device (10) according to claim 9, wherein the device (10) further comprises: - a manipulator (15) for adjusting the actual position of the first connection point (12). [11] Device (10) according to claim 9 or 10, wherein the device (10) further comprises: - at least one media connection (4) for connection to the connecting element (1). [12] Projection exposure system (100) for microlithography comprising: - at least one first, in particular a static, component (2), - at least one second, in particular a dynamic, component (3), and - at least one connecting element (1) which connects the first component (2) to the second component (3), wherein the connecting element (1) has been calibrated using a method according to one of claims 1 to 8 and / or using a device according to one of claims 9 to 11.

Images