Pneumatic valve with an SMA actuator

Abstract

Pneumatic valve with a fluid supply port (P), a fluid outlet port (A) and a fluid drain port (R), with a valve chamber (14) having a fluid supply port (FZ) connected to the fluid supply port (P), a fluid outlet port (VH) connected to the fluid outlet port (A) and a trigger port (VT) connected to an actuator chamber (15) of the valve which has the fluid outlet port (R), with an actuator (16) formed with an SMA wire (SMA), an actuating element (B), an elastic element (F) and a printed circuit board (17) arranged in the actuator space (15), wherein a sealing element (E) is arranged on the actuating element (B), which is pressed against the trigger opening (VT) by the return element in the unactuated state of the actuator (16) and releases the trigger opening (VT) in the actuated state of the actuator (16), with a diaphragm (M) that divides the valve chamber (14) into two areas, a first area (1) being connected to the trigger opening (VT) and a second area (2) being connected to the fluid supply opening (FZ), wherein the diaphragm (M) is connected to a plunger (S) which, due to a spring force, is pressed against the fluid outlet opening (VH) in the unactuated state of the actuator (16) and closes it, and in the actuated state of the actuator (16) is pushed away from the fluid outlet opening (VH) by a fluid flowing through the fluid supply opening (FZ) and releases the fluid outlet opening (VH), wherein the diaphragm (M) is clamped with its edge between a cup-shaped element (18) forming the valve chamber (14) and a lid element (K) inserted therein, and wherein at least one through-opening (D) is formed in the area of ​​the clamping between the first area (1) and the second area (2), through which fluid can flow from the first area (1) to the second area (2).

Description

[0001] The invention relates to a pneumatic valve with a fluid supply port, a fluid outlet port, and a fluid drain port, comprising a valve chamber with a fluid supply port connected to the fluid supply port, a fluid outlet port connected to the fluid outlet port, and a trigger port connected to an actuator chamber of the valve, which includes the fluid drain port. The valve is formed with an actuator comprising an SMA wire, an actuating element, an elastic element, and a printed circuit board arranged in the actuator chamber.The valve also has a diaphragm that divides the valve chamber into two areas, a first area being connected to the trigger opening and a second area being connected to the fluid supply opening, the diaphragm being connected to a plunger which, due to a spring force, is pressed against the fluid outlet opening in the unactuated state of the actuator and closes it, and, in the actuated state of the actuator, is pushed away from the fluid outlet opening by a fluid flowing through the fluid supply opening and releases the fluid outlet opening.

[0002] Such a pneumatic valve is known from DE 10 2019 208 051 B4. In this patent, the diaphragm closes the fluid supply port of the valve chamber, while the fluid outlet port remains permanently open. A plunger, actuated by a leaf spring and connected to the diaphragm, protrudes through the trigger port to press the diaphragm against the fluid supply port when not actuated. The trigger port is closed by the diaphragm when the actuator is actuated, but remains open when not actuated. This allows fluid from a consumer connected to the fluid outlet port, such as a bladder to be filled with fluid (e.g., air), to be discharged via the fluid outlet port, holes in the diaphragm, and the trigger port into the actuator chamber and from there through the fluid outlet port into the environment. It is therefore a 3 / 2 NC valve.

[0003] In a similarly constructed valve according to DE 10 2018 216 874 A1, the air must also flow serially through two nozzle openings during the filling process, so that the flow rate is reduced compared to a single nozzle passage due to the additional flow resistance.

[0004] These pneumatic valves are used to control fluid flow for filling elastic cushions in vehicles to shape seat contours. The elastic cushions are typically filled with air as the fluid.

[0005] Shape memory alloy wire (SMA) is increasingly used as an actuator for such valves; it shortens in length when current flows and the resulting heating occurs.

[0006] The high flow rates required for some functions, such as cushion adjustment depending on driving dynamics, necessitate large valve cross-sections and therefore high actuation and sealing forces. An SMA actuator capable of providing these forces requires a correspondingly large size, which increases costs and installation space requirements.

[0007] For high-flow valves, the following options are known according to the state of the art: The flow rate can be scaled by connecting several individual valves in parallel. However, this also increases costs and installation space accordingly.

[0008] DE 43 31 568 C2 and DE 43 31 515 A1 demonstrate, as examples of a wide variety of industrial valves, servo or pilot solenoid valves operated by auxiliary flow, which control a larger pressure or flow rate with minimal actuation effort.

[0009] US Patent 9,080,682 B2 shows a valve in which SMA wires, via a deflection mechanism, actuate two pilot valves to control a main valve. The deflection mechanism is guided by a sealing element, which reduces the available actuation force of the SMA wire.

[0010] EP 3 078 890 B1 also shows a pilot valve actuated by means of an SMA wire. The SMA wire is located in the pressure zone of the working port of the main valve; therefore, the associated electrical contacts must be airtight, which increases the complexity and thus the cost.

[0011] A pneumatic valve of this type is also described in the unpublished German patent application DE 10 2023 208 359 A1. There, the diaphragm has at least one through-opening through which fluid can flow from the first area to the second area, the through-opening having a smaller cross-section than the trigger opening.

[0012] DE 10 2018 131 802 A1 relates to a valve for a cleaning system, comprising a valve housing with connections for a pump and a consumer, as well as a main valve and a control valve. The control valve contains an actuator, a movable valve element with a sealing element, and enables the control of the main valve by its position. Opening or closing the control valve opens or closes the main valve accordingly; the invention also includes a valve assembly and a cleaning system.

[0013] DE 102017 125 283 A1 relates to a valve system for a fuel tank that enables the controlled introduction and discharge of fluids such as gas or hydrocarbon-enriched air. It comprises a housing with connections for the tank, activated carbon filter, and filler pipe, with main and secondary vent channels containing corresponding valves controlling the fluid connections. The main vent valve and the valve assembly in the secondary vent channel regulate the opening or closing of the respective channels for targeted control of the tank pressure and gas flow. DE 10 2019 209 703 A1 discloses a pneumatic valve for the fluid bubbles of an adjustment device in a vehicle seat, comprising four separate valve chambers, each connected to a fluid source, the environment, or the fluid bubbles. These chambers are interconnected via three fluid passages, with a shut-off element in the fourth chamber that can be moved between two positions.In the first position, the passages to the fluid source and the fluid bubble are open; in the second position, the passage to the environment is open instead, in order to control pressure conditions in a targeted manner.

[0014] DE 10 2022 207 882 B3 relates to a pneumatic valve with a housing containing an air chamber with inlet, connection, and outlet openings, as well as an actuator with a movable closing element. The closing element seals the outlet opening via a sealing element and is pressed against the opening by an elastic element when activated. Additionally, a shape memory element controls the release of the inlet opening, while a check valve in the form of a third sealing element safeguards the airflow.

[0015] The object of the invention is therefore to provide a compact pneumatic valve with a large nozzle cross-section. The SMA actuator used for actuation should be subjected to the lowest possible load in terms of force and displacement. Furthermore, no sealing effort should be required for the connections of the SMA actuator.

[0016] The problem is solved by a pneumatic valve according to claim 1. Advantageous embodiments of the pneumatic valve are specified in the dependent claims.

[0017] According to the invention, in the pneumatic valve, a sealing element is arranged on the actuating element, starting from a generic valve. This sealing element is pressed against the trigger opening by the elastic element when the actuator is not actuated, and releases the trigger opening when the actuator is actuated. Furthermore, the diaphragm is clamped at its edge between a cup-shaped element forming the valve chamber and a cover element inserted therein. In the clamping area, at least one through-opening is formed between the first and second regions, through which fluid can flow from the first region to the second region.

[0018] In its unactuated state, the valve chamber of the pneumatic valve is connected to the air supply via the fluid supply port. Due to the through-hole in the diaphragm, the pressure is the same in both the first and second sections of the valve chamber, thus relieving the diaphragm of any stress. When actuated, the actuator opens the trigger orifice, allowing air from the first section to escape into the actuator chamber and from there into the surrounding environment. The higher pressure in the second section, due to the effective area of ​​the diaphragm, lifts the plunger connected to it from the outlet opening against the spring force, allowing air to flow through the valve into a connected device – for example, a cushion. Therefore, only minimal force is required to actuate the SMA actuator, as the pressure of the incoming air is used to open the valve.Since the through-hole has a smaller cross-section than the trigger opening, the compressed air flowing into the second area cannot reach the first area quickly enough, resulting in a higher pressure in the second area as long as the trigger opening is open.

[0019] The actuating element can be designed as a leaf spring, which simultaneously acts as an elastic element. A non-moving end of the actuating element (bent section) can be connected to the circuit board, and the moving end (actuating section) to the SMA wire.

[0020] It is also possible to implement the elastic element with a spiral spring, as shown, for example, in DE 10 2018 216 874 A1.

[0021] In a first embodiment, the pneumatic valve has at least one diaphragm forming the through-opening, with its edge circumferencing the area of ​​the cup-shaped element and the lid element.

[0022] The membrane may have a circumferential rim around its edge. A groove or recess is radially arranged along the outer side of this rim or, if applicable, the rim. The groove abuts both the lid element and the cup-shaped element, allowing pressure equalization between the two sections.

[0023] Such a recess can be easily created, for example as a rectangular, triangular groove (“V-groove”) or semicircular groove, using appropriate contours in an injection mold for the membrane.

[0024] A second design variant provides that the membrane has at least one bead that creates the through-opening in the clamped state and encircles its edge in the area of ​​the cup-shaped element and the lid element.

[0025] Instead of a radially extending depression, a raised area is formed here, which, when the membrane is clamped, also creates a passage opening between the first and second areas, thus enabling pressure equalization.

[0026] In a third embodiment, the cup-shaped element and the lid element have at least one groove forming the through-opening in their areas surrounding the edge of the membrane.

[0027] The opening here consists of a recess (groove) in the cup-shaped element and another recess in the lid element. These recesses can be easily created, for example, as rectangular, triangular grooves ("V-groove") or semicircular grooves using appropriate contours in injection molds or simply using subtractive manufacturing processes (e.g., milling).

[0028] The elastic membrane can also partially penetrate the depressions, thus reducing the free cross-section along the depression. This effect allows for the smallest possible cross-section of the depressions without having to make their dimensions unnecessarily small.

[0029] The recesses in the cup-shaped element and the recesses in the lid element can also be offset along the circumference of the diaphragm (e.g., by 90° or 180°). A circumferential slot between the lid element, cup-shaped element, and diaphragm maintains a fluid connection between the two recesses. Such an offset can create additional flow resistance, thereby reducing the required working air. This also minimizes acoustic emissions from the flowing working air. Finally, this simplifies valve installation, as the alignment of the two recesses is no longer required.

[0030] In a fourth embodiment, the cup-shaped element and the lid element have at least one bead in their areas surrounding the edge of the membrane, creating the through-opening in the membrane in the clamped state.

[0031] This ridge or protrusion presses into the originally smooth edge of the membrane, possibly with a formed circumferential ridge. Due to the membrane's elasticity, it is compressed there to such an extent that a channel forms next to the protrusion. Such a channel forms particularly when there is a concave ("sharp") edge at the transition to the protrusion, to which the elastic membrane cannot conform in a form-fitting manner even with slight compression.

[0032] Such a raised section can be easily created, for example as a rectangular, triangular or semicircular ridge, using appropriate contours in an injection mold for the lid element and the cup-shaped element.

[0033] In a fifth variant, channels forming the through-opening are formed in the cup-shaped element and the lid element.

[0034] The channels can be bores or recesses provided during the manufacture of the lid element and the cup-shaped element.

[0035] The aforementioned contours of the aforementioned designs can also be used in different combinations, so that, for example, a channel in one section of the cup-shaped element is combined with a groove in the membrane edge. Similarly, a groove in one section can be combined with a raised section in another.

[0036] The invention is explained in more detail below using exemplary embodiments and the accompanying figures. Fig. 1 a first embodiment of a pneumatic valve according to the invention in a cross-sectional view, Fig. 2 the valve chamber of the first version variant of the Fig. 1 in a detailed view, Fig. 3 the valve chamber of a second design variant in a detailed view, Fig. 4 A detailed view of the through-hole in the valve chamber wall from the side, Fig. 5. Detailed representation of the through-opening in the valve chamber wall in a longitudinal section, Fig. 6 A detailed side view of the passage opening in the diaphragm due to a bulge in the valve chamber wall, Fig. 7 A detailed view of the passage opening in the membrane due to a bulge in the valve chamber wall from above, Fig. 8 A detailed view of the opening in the membrane due to a groove in the membrane from the side, Fig. 9 a detailed view of the opening in the membrane due to a groove in the membrane from above, Fig. 10 A detailed view of the opening in the membrane due to a bulge on the membrane from the side, Fig. 11 A detailed view of the opening in the membrane due to a bulge on the membrane from above, Fig. 12 a detailed cross-sectional view of the bulge at the membrane edge, Fig. 13 the bulge on the membrane of the Fig. 12 in the depressed state with formation of the through-opening, Fig. 14 a 3 / 3-NC valve with an embodiment of the pneumatic valve according to the invention in a first state and Fig. 15 the 3 / 3-NC valve in a second state. Fig. 16 the 3 / 3-NC valve in a third state. Fig. 17 a 3 / 3-NO valve in a first state.

[0037] The Fig. Figure 1 shows a pneumatic valve in a cross-sectional view in a first embodiment. The valve is formed by a housing 10, which has a first housing part 11 that, in the illustrated embodiment, is designed as a base plate. The housing 10 also has a second housing part 12, which is designed as a cover, and finally a third cup-shaped housing part 13, which is designed as an insert between the first and second housing parts 11 and 12 and to which a fluid supply port P and a fluid outlet port A are integrally formed. A fluid drain opening R is formed in the second housing part 12, which connects an actuator chamber 15, formed between the second housing part 12 and the third housing part 13 and in which an actuator 16 is arranged, to the environment, so that openings for electrical connections of the actuator 16 do not need to be sealed.

[0038] A valve chamber 14 is formed on the third housing part 13 by having a pot- or cup-shaped element 18 into which a cover element K is inserted as the cover of the valve chamber 14. The valve chamber 14 has a fluid supply opening FZ, a fluid outlet opening VH functioning as the main valve, and a trigger opening VT. In the illustrated embodiment, the fluid supply opening FZ and the fluid outlet opening VH are formed in the third housing part 13, and the trigger opening VT is formed in the cover element K that closes off the valve chamber 14.

[0039] Compressed air can therefore be supplied via the fluid supply opening FZ from a compressor into the housing 10, whereby the compressed air can enter the valve chamber 14 via the fluid supply opening FZ and from there via the fluid outlet opening VH and the fluid outlet connection A into a consumer that can be connected to it, for example an air cushion.

[0040] As detailed in the Fig. As can be seen in Figure 2, an elastic membrane M divides the valve chamber 14 into a lower, first region 1 and an upper, second region 2. The valve chamber 14 is essentially divided by a cup-shaped element G, which is separated by the cup-shaped element 18 ( Fig. 1) is formed, and the cover element K is formed. The first area 1 is connected to the fluid supply opening FZ and thus to the fluid supply connection P. The second area 2 is closed off by a cover element K against the actuator chamber 15 and thus against the environment.

[0041] The diaphragm M is connected to a plunger S. The plunger S has a sealing surface on its underside to close the nozzle seat of the fluid outlet opening VH in its lower end position. The plunger S can be manufactured integrally with the diaphragm M from an elastic material or it can be a component assembled with the plunger S. An elastic element F, e.g., a spring, located between the cover element K and the plunger S, generates a restoring force to close the fluid outlet opening VH by means of the plunger S. The elastic element F can optionally also be formed with the diaphragm M, which, through its own tension, pulls the plunger S into the lower end position that closes the fluid outlet opening VH.

[0042] An associated SMA actuator 16 consists of a leaf spring B and an SMA wire SMA, wherein the leaf spring B has a bending section and an actuating section, which are each arranged on opposite sides of an electrical circuit board 17 and at ambient pressure in the actuator chamber 15. The cover element K has the trigger opening VT, which functions as a trigger valve. A sealing element E is attached to the underside of an actuating section of the leaf spring B, which can seal the trigger opening VT.

[0043] In the version of a pneumatic valve, the Fig. 1 and Fig. 2 In both the cup-shaped element G and the cover element K, a channel is formed as a through-opening D, which allows a limited airflow (working air) from the first area 1 to the second area 2 of the valve chamber 14. The channel can be realized either by means of bores or by means of recesses, which, for example, can already be provided in the tools for manufacturing the cup-shaped element G and the cover element K as corresponding pins.

[0044] In a "Hold" state (i.e., the SMA actuator of valve V1 in Fig. (14, right, is not activated), the trigger opening VT is closed. The lower 1 and upper 2 sections of valve chamber 14 are connected via the through-opening D, thus ensuring pressure equalization. Therefore, no pneumatic force acts on the diaphragm M, even under high or variable pressure from the pressure supply P. The spring element F presses the plunger S, connected to the diaphragm M, against the nozzle seat of the fluid outlet opening VH, sealing it. The force of the spring element F is designed to exert pressure and sealing forces even in the worst-case scenario (e.g., maximum consumer pressure and minimum supply pressure).

[0045] At the beginning of the "Filling" state (i.e., the SMA actuator of valve V1 is activated, see Fig. (15, right) the trigger opening VT is open. Preferably, the cross-section of the trigger opening VT is as small as possible, but still significantly larger than the cross-section of the through-hole D. This causes the pressure in the upper region 2 of the valve chamber 14 to drop and approach ambient pressure. The pressure difference to the supply pressure in the lower region 1 of the valve chamber 14 now exerts an upward force on the diaphragm M, causing the plunger S to open the fluid outlet opening VH. Due to the small cross-section of the trigger opening VT compared to the cross-section of the fluid outlet opening VH, the associated SMA actuator requires only a short travel distance and a limited force for actuation. This benefits the service life (especially the number of actuation cycles) of the SMA wire SMA.

[0046] Preferably, the effective area of ​​the diaphragm M is significantly larger than the cross-section of the fluid outlet opening VH. This allows the fluid outlet opening VH to be opened even when the consumer is unpressurized, against a high inlet pressure and against the force of the spring element F. The pressure supply at P provides the additional energy for opening (a "servo valve"). The inlet pressure can vary over a wide range; it simply needs to be at least high enough that the pressure force on the diaphragm M is greater than the restoring force of the spring element F.

[0047] Advantageously, the entire air supply area has a larger cross-section than the fluid outlet opening VH, so that the pressure in the second area 2 of the valve chamber 14 largely corresponds to the pressure of the pressure supply even when the fluid outlet opening VH is open.

[0048] During the "filling" state, a limited flow of working air flows through the through-hole D and the open trigger opening VT from the pressure supply into the environment.

[0049] At the end of the filling process (i.e., the SMA actuator is deactivated), the trigger opening VT closes again. Pressure equalization between the lower 1 and upper 2 sections of the valve chamber 14 then occurs again via the through-opening D. Consequently, the fluid outlet opening VH also closes again due to the force of the spring element F. When the valve is not actuated, the assembly does not consume any working air.

[0050] In the Fig. Figures 3 to 5 show another embodiment of a pneumatic valve. Here, the through-opening D is formed as recesses or grooves RG, RK in the cup-shaped element G or the cover element K. The grooves RG, RK are oriented relative to each other in such a way that they form a continuous through-opening.

[0051] The recesses RG, RK can be created, for example, as rectangular, triangular grooves (“V-groove”) or semicircular grooves, using appropriate contours in injection molds or also using subtractive manufacturing processes (e.g. milling).

[0052] The elastic membrane M can also partially penetrate the recesses RG and RK, thereby reducing the free cross-section along the recess. This effect allows for the smallest possible cross-section of the recesses without having to unnecessarily reduce their dimensions.

[0053] The recess RG in the cup-shaped element G and the recess RK in the lid element K can also be arranged offset along the circumference of the membrane M (e.g., offset by 90° or 180°). Via a Fig. Despite the three visible circumferential slots between the cover element K, the cup-shaped element G, and the diaphragm M, both recesses remain fluidly connected. Such an offset can create additional flow resistance, thereby reducing the required working air. This also minimizes acoustic emissions from the flowing working air. Finally, this simplifies valve assembly, as the alignment of the two recesses is no longer necessary.

[0054] In the Fig. 6 and Fig. Figure 7 shows another embodiment of a pneumatic valve. Here, the cup-shaped element G and the cover element K each have a protrusion or bead EG, EK, which press into the edge of the diaphragm M or a bead formed on it, thereby forming the through-opening D in the assembled state. This is particularly well illustrated in the detailed representation of the Fig. 6 can be seen.

[0055] Due to the elasticity of the membrane M, it is compressed so much in its installed state that a channel forms next to the elevation (see Fig. 6 below, detailed illustration) Such a channel is created in particular if there is a concave (“sharp”) edge at the transition to the elevation, to which the elastic membrane M cannot conform in a form-fitting manner even with slight compression.

[0056] Such a raised section EG can be easily incorporated, for example, as a rectangular, triangular or semicircular ridge using appropriate contours in an injection mold for the cup-shaped element G (or the entire valve housing) and the cover element K.

[0057] In the Fig. 8 and Fig. Figure 9 shows yet another embodiment of a pneumatic valve. Here, a recess or groove RM is provided at the edge of the diaphragm M or on a bead formed thereon. This recess can be formed during the manufacture of the diaphragm M or afterwards by removing material. This recess RM forms the through-hole D.

[0058] In the further version of the Fig. 10 and Fig. 11. A raised area or ridge EM is formed at the edge of the membrane M or at a bead formed thereon. In the assembled state, this raised area is pressed into the membrane M and forms the through-opening D at its edges. This is described in detail in the Fig. 12 and Fig. 13 shown.

[0059] Such a channel is created in particular when there is a concave edge at the transition to the raised area, which cannot fit snugly against the smooth wall of the housing or cap even with slight compression.

[0060] Such a raised area EM can, for example, be easily incorporated into an injection mold for the membrane M as a rectangular, triangular or semicircular bridge using appropriate contours.

[0061] As in the Fig. As shown in Figure 16, the described servo valve, designated V1, can easily be combined with another valve, V2, for venting a consumer connected to the fluid outlet port A. The behavior of the valve arrangement thus corresponds to a 3 / 3 NC (normally closed) valve.

[0062] In the "venting" state, the additional valve V2 is actuated via the associated SMA actuator using an SMA wire and a bender. A sealing element, also attached to the bender, then opens the corresponding nozzle seat (left). This allows air to flow from the fluid outlet port A through the fluid drain opening R into the environment.

[0063] The proposed servo valve can also be combined with a pot valve V2, as shown in the Fig.Figure 17 shows the additional pot valve V2, also equipped with a state-of-the-art SMA actuator, connects the fluid outlet port A to the fluid drain opening R and thus to the environment in its resting state (not activated). When the SMA actuator is activated, a plunger with its upper sealing element closes the nozzle seat of the vent valve. The behavior of the valve arrangement shown thus corresponds to 3 / 3 NO (normally open).

[0064] In the described pneumatic valve, the through-hole can be implemented cost-effectively via a recess or raised area in the cover element and the cup-shaped element in the valve housing or in the diaphragm. Due to the elasticity of the diaphragm, the effective cross-section of the resulting channel is smaller than the geometry to be manufactured. This reduces the accuracy requirements of the manufacturing process.

[0065] A single, lightly loaded SMA actuator can operate a large valve cross-section for filling thanks to its servo function. This increases the actuator's service life. Furthermore, parallel-connected valves are not required, thus reducing installation space and costs.

[0066] In its resting position, the servo valve consumes no working air.

[0067] The servo actuation works across a wide pressure range of the pre-pressure.

[0068] The servo valve can easily be extended to a 3 / 3 valve NC and NO by adding another SMA actuator.

[0069] The SMA actuator and the associated circuit board with electronics are not located in the pressure area and therefore do not need to be sealed.

Claims

[1] Pneumatic valve with a fluid supply port (P), a fluid outlet port (A) and a fluid drain port (R), with a valve chamber (14) having a fluid supply port (FZ) connected to the fluid supply port (P), a fluid outlet port (VH) connected to the fluid outlet port (A) and a trigger port (VT) connected to an actuator chamber (15) of the valve which has the fluid outlet port (R), with an actuator (16) formed with an SMA wire (SMA), an actuating element (B), an elastic element (F) and a printed circuit board (17) arranged in the actuator space (15), wherein a sealing element (E) is arranged on the actuating element (B), which is pressed against the trigger opening (VT) by the return element in the unactuated state of the actuator (16) and releases the trigger opening (VT) in the actuated state of the actuator (16), with a diaphragm (M) that divides the valve chamber (14) into two areas, a first area (1) being connected to the trigger opening (VT) and a second area (2) being connected to the fluid supply opening (FZ), wherein the diaphragm (M) is connected to a plunger (S) which, due to a spring force, is pressed against the fluid outlet opening (VH) in the unactuated state of the actuator (16) and closes it, and in the actuated state of the actuator (16) is pushed away from the fluid outlet opening (VH) by a fluid flowing through the fluid supply opening (FZ) and releases the fluid outlet opening (VH), wherein the diaphragm (M) is clamped with its edge between a cup-shaped element (18) forming the valve chamber (14) and a lid element (K) inserted therein, and wherein at least one through-opening (D) is formed in the area of ​​the clamping between the first area (1) and the second area (2), through which fluid can flow from the first area (1) to the second area (2). [2] Pneumatic valve according to claim 1, wherein the diaphragm (M) has at least one groove (RM) forming the through-opening (D) and circumferencing its edge in the area of ​​the cup-shaped element (18) and the cover element (K). [3] Pneumatic valve according to claim 1, wherein the diaphragm (M) has at least one bead (EM) which creates the through-opening (D) in the clamped state and surrounds its edge in the area of ​​the cup-shaped element (18) and the lid element (K). [4] Pneumatic valve according to claim 1, wherein the cup-shaped element (18) and the lid element (K) have at least one groove (RG, RK) forming the through-opening (D) in their areas surrounding the edge of the diaphragm (M). [5] Pneumatic valve according to claim 1, wherein the cup-shaped element (18) and the lid element (K) have at least one bead (EG, EK) in their areas surrounding the edge of the diaphragm (M) which creates the through-opening (D) in the diaphragm (M) in the clamped state. [6] Pneumatic valve according to claim 1, in which channels forming the through-opening (D) are formed in the cup-shaped element (18) and the cover element (K).

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