Fluid supply device and method for supplying a fluid to at least one removal front

Abstract

The invention relates to a fluid supply device (20) for supplying a fluid (18) to at least one machining front during the material removal process of a workpiece, preferably a substrate (1) for an EUV mirror, comprising: at least one flexible fluid line, preferably a plurality of flexible fluid lines (16a, 16b, ...), for supplying the fluid (18) to the at least one machining front. The fluid supply device (20) has at least one guide element (12) for guiding the at least one flexible fluid line (16a, 16b, ...) through a hollow structure (2) formed during the material removal process, wherein the guide element (12) comprises a flexible base body (13). The invention also relates to a method for supplying a fluid (18) to at least one machining front during the material removal process of a workpiece, preferably a substrate (2) for an EUV mirror, by means of such a fluid supply device (20).

Description

BACKGROUND OF THE INVENTIONThe invention relates to a fluid supply device for supplying a fluid to at least one removal front during the material-removing processing of a workpiece, preferably a substrate for an EUV mirror, comprising: at least one flexible fluid line, preferably a plurality of flexible fluid lines, for supplying the fluid to the at least one removal front. The invention also relates to a method for supplying a fluid to at least one removal front during the material-removing processing of a workpiece, preferably of a substrate for an EUV mirror, by means of a fluid supply device which is designed as described further above.WO 2023 / 0110816A2 describes a method for producing a hollow structure in a workpiece in the form of a substrate for a mirror by material-removing machining by means of pulsed laser radiation. In the method, a removal front is formed, which is moved within the workpiece and brought into contact with a fluid during the production of the hollow structure. During the movement of the removal front, the fluid can be tracked to the removal front by means of a fluid supply which is at least partially introduced into the hollow structure. If a flexible tube is used for the tracking of the fluid, this can be tracked only with difficulty, in particular in the case of hollow structures of complex shape of the removal front.WO 2023 / 0110816A2 also describes a fluid supply device which serves for supplying a fluid to at least one removal front during removal of material by laser ablation. The fluid supply device comprises at least one flexible fluid line for supplying the fluid to the at least one ablation front, and at least one insertion component for insertion into a cavity of the workpiece, wherein the insertion component has at least one guide channel in which the at least one flexible fluid line is guided in order to supply the fluid to the at least one ablation front.The insertion component of WO 2023 / 0110816A2 is rod-shaped, typically cylindrical, and is generally used for insertion into a linearly extending cavity from which channel sections extend or branch off, into which the at least one fluid line is introduced.Object of the InventionThe object of the invention is to improve the efficiency of a fluid supply device and a method for supplying a fluid to at least one removal front by means of such a fluid supply device.The Invention Subject MatterThis object is achieved by a fluid supply device of the type mentioned at the beginning, which comprises at least one guide component for guiding the at least one flexible fluid line through a hollow structure formed during the material-removing machining, wherein the guide component has a flexible base body.A guide component which has a flexible base body can also be inserted into a hollow structure which is not rectilinear. In this way, in the case of a hollow structure which has one or optionally a plurality of bends in the form of curved or rounded sections, the guide component can also reach sections of the hollow structure which are located behind a respective curved section. In the case of the rod-shaped insert component described in WO 2023 / 0110816A2, this is not possible on account of its rigidity. This is in particular the case when the insert component has been produced by additive manufacturing.A guide component, which has a flexible base body, can be inserted into hollow structures, which have a fundamentally arbitrary geometry. Hollow structures of this type can be, in particular, a fluid distributor which runs non-rectilinearly and from which distributor channels emerge, and / or a fluid collector which runs non-rectilinearly and into which collector channels open. The at least one flexible fluid line is introduced, starting from the guide component, into the distributor channels or into the collector channels and is tracked to the removal front for supplying the fluid. The use of the flexible base body makes it possible to reduce the process times of the ablation process. The use of such a guide component also enables or simplifies the production of substrates with complex hollow structures.In one embodiment, at least one guide channel for guiding the at least one flexible fluid line is formed in the flexible base body of the guide component. In this embodiment, the at least one flexible fluid line runs in the flexible base body. In order to guide the flexible fluid line in the flexible main body, it is necessary for the main body to have sufficient rigidity in order to prevent the flexible fluid line guided in the guide channel from bending off. The flexible base body should also have sufficient rigidity to fix the flexible base body in the hollow structure or to position it appropriately in the hollow structure. Nevertheless, the base body must have a certain flexibility so that the guide component can be guided around bends of the hollow structure-provided that these have a sufficiently large radius of curvature.In a development of this embodiment, the at least one guide channel is formed in a core of the flexible base body, which core is surrounded by a jacket of the flexible base body. The core of the flexible base body is surrounded by the jacket of the flexible base body. The core and the jacket of the flexible base body are typically formed from different materials and generally differ in their stiffness or hardness (see below). As a rule, the guide component or its flexible base body is not guided centrally within the hollow structure, but rather is "pressed" in the appropriate direction by the outer wall of the curve of the hollow structure.In an advantageous development of this embodiment, the jacket of the flexible base body is formed from a softer material than the core of the flexible base body and / or the core of the flexible base body has a varying cross section. This is favorable in order to meet the requirements described above both for the rigidity and for the flexibility of the base body. The softness of a material is defined in the present application by the modulus of elasticity of the material. Both the softer material of the sheath and the harder material of the core typically have an elastic modulus of less than about 5000 N / mm 2 wherein the difference between the elastic modulus of the softer material of the sheath and the elastic modulus of the harder material of the core depends on the specific application.Conceptually, the technical and material requirements described above for the flexible base body resemble the requirements for a key: on the one hand, the key must be stiff enough to be able to actuate the lock cylinder, and on the other hand, the key must be able to withstand torsional forces, since otherwise it would break off when rotating in the lock cylinder.Aluminum is too soft and would bend when rotated, hardened stainless steel would break when rotated. This problem is solved by a combination of different material states: hardened steel is located in the interior of the key, which produces the necessary rigidity, the outer layer is softer and thus protects the hardened steel in the interior when the key is rotated. Another example of solving this problem is a filter cigarette which is wrapped in the inner paper of a cigarette packet: the cigarette can be wrapped around a finger without the cigarette paper tearing or the cigarette detaching from the filter.In the case of the flexible base body described here, these requirements are fulfilled in that a hard inner core with the hollow guide channel or channels for the flexible fluid line(s) is surrounded by a softer material or is wound around it with a softer material, so that the guide component can be guided around a bend or curve of the hollow structure without squeezing the inner core. Both the material of the core and the material of the jacket can be a plastic. For example, PTFE (polytetrafluoroethylene) can be used as the material for the core; for example, LDPE (low-density polyethylene) can be used as the material for the jacket. The rigidity of the base body also depends on the size of the cross section of the core or the diameter of the core. The diameter of the core is generally less than about 10 mm and is determined depending on the application. The rigidity of the base body can also be manipulated in that the core has a cross section varying in the longitudinal direction of the base body. In the case of a radially symmetrical core, the variation of the cross section is realized by a varying diameter.The materials of the core and of the cladding can be matched to the material of the workpiece or of the substrate of the mirror. As a rule, the material of the mirror is glass, typically quartz glass, more precisely titanium-doped quartz glass, or a glass ceramic. However, it can also be another substrate material, for example silicon or the like, as is used, for example, in mirrors which are operated under grazing incidence.In a further embodiment, the at least one guide channel extends from an end face of the flexible base body to a lateral surface of the flexible base body. The end face of the base body is in this case typically accessible from the outside through an opening in the workpiece, so that the flexible fluid line(s) on the end face of the base body can be guided away from the workpiece. The guide channel or channels in the base body can have one or more rounded sections in order to guide a respective flexible fluid line from the end side to the lateral surface of the guide component. The guide channel or channels can open into openings of the flexible base body on the jacket side. In this case, the guide channels can extend a short distance inside the jacket or the core can optionally extend in the region of the openings as far as the jacket surface of the flexible base body.In an alternative embodiment, at least one guide element for guiding the at least one flexible fluid line is attached to a lateral surface of the flexible base body of the guide component. In this case, the flexible fluid line is not guided within the flexible main body, but rather along the outer side or along the lateral surface of the flexible main body. The at least one guide element can be, for example, a guide rail or a plurality of guide rings spaced apart from one another in the longitudinal direction of the main body, by means of which guide rings the flexible fluid line can be guided and optionally conveyed.In a development of this embodiment, a rigid end piece is attached to the flexible base body of the guide component, which can be aligned by means of an operative connection which extends into a region outside the workpiece, wherein the rigid end piece preferably has a camera. In this endoscope-like embodiment of the guide component, an operative connection can be used which can transmit a tension and / or a pressure to the rigid end piece. The operative connection can have chords or cable pulls which are guided along or within the base body on the base body. In the region outside the hollow structure, movable parts of the operative connection, for example the chords or cable pulls, can be acted upon automatically or by an operator in order to produce a desired orientation of the rigid end piece. The rigid end piece can have a camera or be designed as a camera in order to monitor the positioning of the flexible fluid line in-line and to perform a readjustment if necessary via a movement of the endoscope.In a further development of this embodiment, the flexible fluid line is guided on the at least one guide element in at least one guide channel of a flexible base body of a further guide component. Not only a flexible fluid line can be guided on the at least one guide element of the endoscope-like guide component, but a further guide component which is designed as in connection with the alternative embodiment described further above. The further guide component can in particular have a core and a jacket which surrounds the core. The jacket may be formed from a softer material than the core.In a further aspect of the invention, the fluid supply device has at least two guide components, each of which has a preferably flexible or curved main body with exactly one guide channel for guiding exactly one flexible fluid line through a hollow structure formed during the material-removing machining, and a plug for closing an opening of the hollow structure formed in the workpiece, wherein the at least two guide components are guided in the plug.In this aspect of the invention, the fluid supply device comprises a plug which closes the opening. In the plug, the at least two guide components are guided into the hollow structure. In this case, the guide components are "guide cannulas", the main bodies of which have only one guide channel for guiding exactly one flexible fluid line. In this aspect of the invention, the guide components can have a bent or flexible base body, but this is not absolutely necessary, i.e. the guide components or individual guide components can optionally have a rectilinear, non-bent base body.During the assembly of the plug, the guide components are usually first pushed through the plug from behind and then the plug with the guide components mounted thereon is sealingly connected to the opening of the workpiece. The plug can have a larger diameter than the opening and be sealingly attached to the outer side of the workpiece, but it is also possible for the plug to be introduced or inserted into the opening and to sealingly close or sealingly abut the wall of the hollow structure.Guide components, each having a base body with exactly one guide channel, can be produced in a conventional manner, i.e. it is not necessary to produce these by additive manufacturing, for example by 3D printing. This is favorable since guide components produced by 3D printing, in particular if they have a comparatively large length, are susceptible to inherent production precisions or tolerances and have a comparatively large roughness on their inner side.The guide channel of a conventionally produced guide component, on the other hand, typically has a lower roughness, which reduces the friction of the flexible fluid line on the guide channel. In the present aspect of the invention, standard components from the medical field can be used as guide components, which reduces the (re)quisition costs and the service lives. Such guide components can optionally be freely bent in the manner of tubes in order to enable optimum guidance of the respective flexible fluid line. A flexible base body is understood to mean that the shape of the base body can be changed, a bent base body is understood to mean that it is bent in the manner of a rigid tube, i.e. the bent shape of the base body can no longer be changed.By the individual positioning of the flexible fluid lines by means of the at least two guide components, manufacturing tolerances between the hollow structure and the guide components can be compensated. When forming a respective channel in the hollow structure starting from the guide component, the cone shape is reduced, i.e. less volume to be ablated is produced and the process times are reduced. Due to the fact that the individual guide components have a smaller wall thickness than the insert component described above, there is more free volume in the hollow structure for the return of fluid from the respective removal fronts.In a further development, the plug has an outlet for fluid which is returned by the at least one removal front. Since the guide components have a comparatively small proportion on the surface of the plug, the outlet for the fluid can have a comparatively large diameter, i.e. the fluid returned from the respective removal fronts can be effectively removed.All embodiments described further above can be used with a fundamentally arbitrary cross-sectional geometry of the hollow structure, for example with a circular, elliptical, rectangular, square, rounded rectangular or rounded square cross-sectional geometry of the hollow structure.A further aspect of the invention relates to a method of the type mentioned at the beginning, comprising: introducing the at least one guide component into the hollow structure of the workpiece, and supplying the fluid to the at least one removal front through the at least one flexible fluid line. The guide component is typically held in a predetermined position in the cavity or fixed there after the insertion. The flexible fluid line, on the other hand, follows the at least one removal front, as is described, for example, in WO 2023 / 0110816A2 cited at the beginning.In a variant of the method, the guide component is introduced into a cavity of the hollow structure, which cavity has a first section and a second section which are aligned at an angle to one another, wherein the guide component is guided from the first section into the second section during introduction into the cavity. As described above, the cavity can be, for example, a fluid distributor or a fluid collector which extend into the substrate starting from a respective opening.By using a guide component with a flexible base body, it can be guided from the first section into the second section of the cavity, which can each run in a straight line, but do not necessarily have to run in a straight line. When inserted into the cavity, the guide component initially moves linearly in the first section until it abuts against the wall of the second section on the outside of the curve. From this point in time, the guide component scrapings along the wall of the second section. It has therefore proven advantageous if the cross section or the diameter of the guide component corresponds almost to the inner diameter of the cavity, so that the guide or the wear of the guide component runs as symmetrically as possible. The curve profile or the radius of curvature at the transition from the first section to the second section should be as homogeneous as possible. Preferably, the transition between the first and the second section is a rounded section with a comparatively large radius of curvature of, for example, more than 7 mm. The angle between the first section and the second section should also not be selected to be too small and generally not less than about 130°.As described in WO 2023 / 0110816A2, the process of material-removing machining of the workpiece by means of pulsed laser radiation can be carried out statically for a certain period of time without flushing with a fluid which is supplied to the removal front. In this case, the workpiece and also the cavity or hollow structure is filled with a fluid, typically with water, i.e. the hollow structure is located in a water bath. Among other things, due to the particles released during the material-removing machining, the process comes to a stop, however, if no permanent rinsing is guaranteed. As an alternative to flushing the removal front with the aid of the flexible fluid line described above, the entire volume of the fluid which is located within the hollow structure can be exchanged in regular cycles: for this purpose, the fluid can be suctioned out of the hollow structure at regular time intervals and the hollow structure can subsequently be flooded again with the fluid. In this way, the process is carried out in a quasi-static water bath "particle-undersaturated". In this case, it is possible to dispense with the supply of a fluid by means of a flexible fluid line to the removal front and a corresponding guide component for guiding the flexible fluid line to the removal front.Further features and advantages of the invention are evident from the following description of exemplary embodiments of the invention, on the basis of the figures of the drawing, which show details essential to the invention, and from the claims. The individual features can each be realized individually or severally in any combination in a variant of the invention.DRAWINGExemplary embodiments are illustrated in the schematic drawing and are explained in the following description. It shows FIG. 1 shows a schematic illustration of a substrate for an EUV mirror which has a hollow structure which has been produced by material-removing processing, FIG. 2 ashows a schematic representation of a cavity of the hollow structure, which has two sections oriented at an angle, as well as a guide component with a flexible base body, FIG. 2 bshows a schematic illustration of the cross section of the guide component from FIG. 2 awith a core and a jacket, FIG. 3 shows a schematic illustration of an endoscope-like guide component, FIG. 4 ashows a schematic representation of a fluid supply device, which has two guide components for guiding a flexible fluid line as well as a plug, FIG. 4 bshows a schematic illustration of the cross section of the plug from FIG. 4 a, and FIG. 5 shows a schematic illustration analogous to FIG. 4 a, with a plug partially inserted into the cavity.In the following description of the drawings, identical reference numerals are used for identical or functionally identical components.FIG. 1 shows a substrate 1 for an EUV mirror, which in the example shown is formed from titanium-doped quartz glass. The EUV mirror is used in a projection objective of an EUV lithography apparatus, which is not illustrated in a pictorial manner. A hollow structure 2 is formed in the substrate 1, which has a fluid distributor 3 and a fluid collector 4 and a plurality of temperature control channels 5. During the production of the mirror, a reflective coating is applied to a surface of the substrate 1, which reflective coating has an optically used partial region 6 of the mirror, which is illustrated by dashed lines in FIG. 1. The reflective coating serves for reflecting radiation in the EUV wavelength range.A temperature control fluid, which may be water, may flow through the hollow structure 2 of the substrate 1. The temperature control fluid indicated by an arrow in FIG. 1 enters the fluid distributor 3 of the substrate 1 via a first opening 8 on a side surface of the substrate 1 in order to flow through the plurality of temperature control channels 5 in parallel and in this way in particular to temperature control, more precisely to cool, the optically used partial region 6 of the surface of the substrate 1. The fluid enters the fluid collector 4 from the temperature control channels 5 and exits the substrate 1 again via a second opening 9 at the end side thereof.As can also be seen in FIG. 1, two add-on parts 10 a, bare attached to the substrate 1, the position of which add-on parts is fixedly predefined on the side face of the substrate 1. Due to the add-on parts 10 a, b, the fluid distributor 3 and the fluid collector 4 are not formed as rectilinear cavities, but rather each have two sections which are oriented at an angle to one another.FIG. 2 ashows the fluid distributor 3 with a first section 11 aand a second section 11 b, which are aligned with each other at an angle α, which in FIG. 2 ais about 160°, but which can also be larger or smaller and for example be about 140°, as is shown in FIG. 1. The two sections 11 a, bhave a circular cross section. During the production of the hollow structure 2 shown in FIG. 1, more precisely the temperature control channels 5, by material-removing processing by means of a pulsed laser beam, removal fronts, not shown in the figures, are formed in the material of the substrate 1, in order to remove material from the substrate 1 simultaneously in the region of all four temperature control channels 5.For cooling and for discharging ablated material, it is favorable or necessary to supply a rinsing fluid, generally in the form of water, to the respective ablation front. For this purpose, a guide component 12 illustrated in FIG. 2 ais used, which is inserted into the hollow structure 2 starting from the first opening 3. The guide component 12 has a flexible base body 13 which has a cylindrical core 14 in the example shown and a jacket 15 surrounding it, as can be seen in FIG. 2 b. The core 14 is formed from a hardened material, the jacket 15 is formed from a soft material. This makes it possible to insert the guide component 12 into the fluid distributor 3 in a conveying direction parallel to the longitudinal direction of the first section 11 a, wherein the guide component 12 or its base body moves straight until it abuts with its end side against the wall of the second section 11 b. From this point in time, the guide component 12 or its base body 13 scrapings along the wall of the second section 11 b. As a rule, the guide component 12 is inserted into the cavity which forms the fluid distributor 3 until it rests with its end face against the end of the fluid distributor 3 which forms a blind bore. Unlike that shown in FIG. 2 b, the core 14 can also have a variable diameter.The guide component 12 serves for guiding flexible fluid lines 16 a, 16 b,..., two of which are pictorially illustrated in FIG. 2 b. The flexible fluid lines 16 a, 16 b,... are guided in a respective associated guide channel 17 a, 17 b,... which is formed in the core 14 of the base body 13. After positioning the guide component 12 in the cavity of the fluid distributor 3, the fluid lines 16 a, 16 b,... are tracked to the respective removal front by the flexible fluid lines 16 a, 16 b,... being displaced within the respective guide channels 17 a, 17 b,... and being introduced into the temperature control channels 5 in the process. The return of the fluid 18 supplied in the flexible fluid lines 16 a, 16 b,... of the respective removal front can likewise take place within the guide channels 17 a, 17 b,..., for example in an intermediate space between the respective fluid line 16 a, 16 b,... and the inner wall of the respective guide channel 17 a, 17 b,....The guide component 12 illustrated in FIGS. 2 a, bis part of a fluid supply device 20 illustrated symbolically by a square in FIG. 2 a, which, for supplying the (flushing) fluid 18, in addition to the guide component 12, has a further guide component which is introduced into the fluid collector 4 in the manner described further above. The fluid supply device 20 also has a tracking device which makes it possible to track the respective flexible fluid lines 16 a, 16 b,... automatically to the respective removal front. The flexible fluid lines 16 a, 16 b,... are introduced at the end face 19 aof the guide component 12 into the guide channels 17 a, 17 b,... which run from the end face 19 ato a lateral surface 19 bof the guide component 12 at which the flexible fluid lines 16 a, 16 b,... emerge and are introduced into the temperature control channels 5.FIG. 3 shows a guide component 12 which differs from the guide component 12 described in FIGS. 2 a, bin that the flexible fluid line, which is not shown in the drawing, is not guided within the flexible main body 13, but along the outside of the flexible main body 13. For this purpose, a holder is attached to the lateral surface 19 bof the flexible base body 13, which holder has a plurality of guide elements 21 in the form of rings, through which a respective flexible fluid line 16 a, 16 b,... can be guided and, together with the guide component 12, can be tracked to the removal front.The guide component 12 shown in FIG. 3 is designed in the manner of an endoscope and, in addition to the flexible, substantially cylindrical base body 13, has a rigid end piece 22, which can be aligned by means of an operative connection which extends into a region outside the substrate 1. In the example shown in FIG. 3, the rigid end piece 22 has a camera 23 in order to monitor the positioning of the flexible fluid line 16 a, 16 b,... in the hollow structure 2 in-line and, if appropriate, to readjust it by a movement of the endoscope-like guide component 12.The guide component 12 shown in FIG. 3 can also be used in particular to guide or hold the guide component 12 shown in FIGS. 2 a, bon the holder in the form of the rings 21, on a holder in the form of a guide rail, etc. along the outer side of the flexible base body 13. In this way, the positioning of the guide component 12 shown in FIGS. 2 a, bin the hollow structure 2 can be monitored in line and optionally readjusted.FIGS. 4 a, b show a fluid supply device 20 which differs from the fluid supply devices 20 described above in that it has two guide components 12 a, 12 b, which each have a base body 13 a, 13 bwith exactly one guide channel 17 a, 17 bfor guiding exactly one flexible fluid line 16 a, 16 bthrough the hollow structure 2. The fluid supply device 20 also has a plug 24 for sealingly closing the opening 8 of the hollow structure 2 formed in the substrate 1, more precisely the fluid distributor 3. The two guide components 12 a, 12 b, more precisely their base body 13 a, 13 b, are guided in the plug 24.The base bodies 13 a, 13 bof the two guide components 12 a, 12 bare of rigid design. The main body 13 aof the first guide component 12 ahas a straight course, the main body 13 bof the second guide component 12 bhas a curved course which is optimized for the guidance of the second flexible fluid line 16 bwhich exits at the end face of the main body 13 bof the second guide component 12 bto facilitate the introduction into one of the temperature control channels 5.By using a plurality of guide components 12 a, 12 b,... which each serve for guiding exactly one flexible fluid line 16 a, 16 b,... the volume available for the return of fluid 18 from the hollow structure 2 is increased. The plug 24 has an outlet 25 for the fluid 18 which is returned from the at least one removal front within the fluid distributor 3 to the opening 8. As can be seen in FIG. 4 b, the outlet 25 has a comparatively large cross section.FIG. 5 shows a fluid supply device 20 which differs from the fluid supply device 20 shown in FIGS. 4 a, bin essence in that the stopper 24 or the sealing interface is partly inserted into the cavity of the fluid distributor 3 and sealingly abuts the lateral surface of the cavity of the fluid distributor 3. In the example shown in FIG. 5, the two guide components 12 a, 12 b, more precisely their base bodies 13 a, 13 b, are formed in a straight line in the manner of lances and, as in FIGS. 4 a, b, are guided together by the plug 24 into the fluid distributor 3.References included in the specificationThis list of documents cited by the applicant has been produced in an automated manner and is only included for the better information of the reader. The list is not part of the German patent application or utility model application. The DPMA does not take any adhesion for any faults or omissions.Patent Literature citedWO 2023 / 0110816A2 [0002, 0003, 0004, 0007, 0028, 0031]

Claims

Fluid supply device (20) for supplying a fluid (18) to at least one removal front during the material-removing machining of a workpiece, preferably of a substrate (1) for an EUV mirror, comprising: at least one flexible fluid line, preferably a plurality of flexible fluid lines (16a, 16b,... ), for supplying the fluid (18) to the at least one removal front, characterized by at least one guide component (12) for guiding the at least one flexible fluid line (16a, 16b,... ) through a hollow structure (2) formed during the material-removing machining, wherein the guide component (12) has a flexible main body (13).Fluid supply device according to Claim 1, in which at least one guide channel (17a, 17b,...) for guiding the at least one flexible fluid line (16a, 16b,...) is formed in the flexible base body (13) of the guide component (12).Fluid supply device according to claim 2, wherein the at least one guide channel (17a, 17b,...) is formed in a core (14) of the flexible base body (13), which is surrounded by a jacket (15) of the flexible base body (13).Fluid supply device according to claim 3, wherein the jacket (15) of the flexible base body (13) is formed from a softer material than the core (14) of the flexible base body (13) and / or wherein the core (14) of the flexible base body (13) has a varying cross section.Fluid supply device according to one of Claims 2 to 4, in which the at least one guide channel (17a, 17b,...) extends from an end face (19a) of the flexible basic body (13) to a lateral surface (19b) of the flexible basic body (13).Fluid supply device according to claim 1, in which at least one guide element (21) for guiding the at least one flexible fluid line (16a, 16b,...) is attached to a lateral surface (19b) of the flexible base body (13) of the guide component (12).Fluid supply device according to claim 6, wherein a rigid end piece (22) is attached to the flexible base body (12) of the guide component (13), which rigid end piece can be aligned by means of an operative connection which extends into a region outside the workpiece, wherein the rigid end piece (22) preferably has a camera (23).Fluid supply device according to claim 6 or 7, wherein the flexible fluid line (16a, 16b,...) is guided on the at least one guide element (21) in at least one guide channel of a flexible base body of a further guide component.Fluid supply device according to the preamble of claim 1, in particular according to one of the preceding claims, comprising: at least two guide components (12a, 12b) each having a preferably flexible or curved base body (13a, 13b) with exactly one guide channel (17a, 17b) for guiding exactly one flexible fluid line (16a, 16b) through a hollow structure (2) formed during the material-removing machining, and a plug (24) for closing an opening (8) of the hollow structure (2) formed in the workpiece, wherein the at least two guide components (12a, 12b) are guided in the plug (24).A fluid delivery device according to claim 9, wherein the plug (24) has an outlet (25) for fluid (18) returned from the at least one ablation front.Method for supplying a fluid (18) to at least one removal front during the material-removing processing of a workpiece, preferably of a substrate (2) for an EUV mirror, by means of a fluid supply device (20) which is designed according to one of the preceding claims, comprising: introducing the at least one guide component (12; 12a, b) into the hollow structure (2) of the workpiece, and supplying the fluid (18) to the at least one removal front through the at least one flexible fluid line (16a, 16b,... ).Method according to claim 11, wherein the guide component (12) is inserted into a cavity (3) of the hollow structure (2) which has a first section (11a) and a second section (11b) which are aligned with one another at an angle (α), wherein the guide component (12) is guided from the first section (11a) into the second section (11b) when being inserted into the cavity (3).

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