Method and assembly device for mounting an optical element for microlithography with a mounting element and optical module for microlithography

Abstract

A method for mounting, preferably bonding, an optical element (14) for microlithography to a mounting element (2) is presented and described, as is a mounting device (1) for mounting, preferably bonding, an optical element (14) for microlithography to a mounting element (2). The described method and mounting device are proposed to enable fast and precise mounting of an optical element (14) for microlithography to a mounting element (2), regardless of the diameter of the receiving opening (11) of the mounting element (2). An optical module for microlithography is also described.

Description

[0001] The present invention relates to a method for mounting, preferably bonding, an optical element for microlithography with a mounting element, comprising the following steps: a) providing an optical element for microlithography and a mounting element, b) providing a mounting device comprising at least one alignment device for aligning the position and / or orientation of the optical element and / or the mounting element, and at least one movement device for moving the mounting element relative to the alignment device, c) arranging the mounting element at least section by section in the mounting device, d) moving the mounting element along a direction of movement, preferably extending vertically at least section by section, relative to the alignment device by means of the movement device.e) Arranging the optical element at least section by section in the mounting device and aligning the position and / or orientation of the optical element by means of the alignment device; f) Moving the mounting element, preferably along the direction of movement and / or relative to the alignment device, in order to arrange the mounting element such that the mounting element surrounds the optical element at least section by section, preferably in order to place the mounting element at least section by section over the optical element.

[0002] The present invention further relates to a mounting device for mounting, preferably bonding, an optical element for microlithography with a mounting element, comprising: at least one alignment device for aligning the position and / or orientation of an optical element and / or a mounting element, and at least one movement device for moving the mounting element relative to the alignment device, preferably along a direction of movement, preferably extending at least partially vertically. The present invention also relates to an optical module for microlithography, comprising: an optical element for microlithography, and a mounting element, wherein the mounting element has a receiving opening, preferably in the form of a through-hole, for receiving the optical element.

[0003] Microlithography is used to manufacture microstructured components, such as integrated circuits. The microlithography process is carried out using a projection exposure system, which includes illumination optics and / or projection optics. The structure of a mask (reticule) illuminated by the illumination optics is projected by the projection optics onto a substrate, such as a wafer (especially a silicon wafer), coated with a photosensitive layer (photoresist) and positioned in the image plane of the projection optics. This transfers the mask structure onto the photosensitive coating of the substrate.

[0004] One of the goals in the development of projection exposure systems is to lithographically produce structures with increasingly smaller dimensions on the substrate, for example, to achieve higher integration densities in semiconductor devices. One approach is to work with shorter wavelengths of electromagnetic radiation. For example, optical systems have been developed that use electromagnetic radiation from the so-called "deep ultraviolet" (DUV) range, preferably with operating wavelengths in the range between 150 nm and 400 nm, in particular 365 nm, 248 nm, or 193 nm, or from the extreme ultraviolet (EUV) range, preferably with operating wavelengths in the range between 5 nm and 30 nm, in particular 13.5 nm.

[0005] The components of a projection exposure system, such as optical modules comprising an optical element and a mounting element, are designed for the desired properties of the projection exposure system and manufactured and assembled with the highest possible precision. This allows the structures to be created on the substrate with the required high accuracy, which in turn maximizes the yield in the microlithography process.

[0006] However, during the design of certain optical modules, it became apparent that, for the desired properties of the projection exposure system, the mounting element must have a receiving opening for the corresponding optical element, where the diameter of the receiving opening is partially smaller than the diameter of the corresponding optical element. This may be necessary, for example, to achieve a specific rigidity of the optical module. Due to the appropriate design of the optical module, the optical element cannot simply be inserted into the receiving opening of the mounting element from any arbitrary side during assembly. Therefore, the previously common methods and mounting devices cannot be used for assembling the optical element and the mounting element.

[0007] Against this background, the present invention aims to provide a method and a mounting device which enable fast and precise mounting of an optical element for microlithography with a mounting element, regardless of the diameter of the receiving opening of the mounting element.

[0008] Furthermore, the present invention is based on the objective of providing an optical module that simplifies stable mounting of the optical element and at the same time extensive manipulation of the optical element.

[0009] The following describes various embodiments of the method and the assembly device, whereby the individual embodiments can be combined with each other as desired, regardless of whether they are described for the method or the assembly device.

[0010] The aforementioned problem is solved according to the invention by the claimed method for mounting, preferably bonding, an optical element for microlithography with a mounting element.

[0011] The method for mounting, preferably bonding, an optical element for microlithography to a mounting element comprises the following step: a) Providing an optical element for microlithography and a mounting element. The optical element may comprise at least one lens and / or at least one mirror. The mounting element preferably comprises a receiving opening for receiving the optical element. The receiving opening may be designed as a through-hole passing through the mounting element. The receiving opening of the mounting element may have, at least in sections, a diameter that is smaller than the, preferably maximum, diameter of the optical element.The diameter of the optical element is preferably determined at the area of ​​the optical element intended for connection with the mounting element and / or at the area of ​​the optical element that forms the connection with the mounting element in the assembled state. Alternatively or additionally, the receiving opening can taper and / or widen at least partially. With such a design, the optical element cannot simply be inserted into the mounting element from any side, so that conventional assembly methods may not be applicable or may only be applicable to a limited extent. The mounting element can have at least one adhesive element, preferably a plurality of adhesive elements, wherein the adhesive elements are provided with adhesive to create the adhesive bond between the optical element and the mounting element.The at least one adhesive element, preferably the plurality of adhesive elements, can be arranged at least sectionally along the circumference of the receiving opening. Alternatively or additionally, the at least one adhesive element, preferably the plurality of adhesive elements, can be arranged in at least one adhesive opening, preferably a plurality of adhesive openings, in the mounting element, wherein, preferably, the at least one adhesive opening, preferably the plurality of adhesive openings, are arranged along the circumference of the receiving opening. The at least one adhesive opening, preferably the plurality of adhesive openings, can each be configured as a through-opening.

[0012] The method further comprises the following step: b) Providing an assembly device comprising at least one alignment device for aligning the position and / or orientation of the optical element and / or the mounting element, and at least one movement device for moving the mounting element relative to the alignment device. The alignment device ensures that the optical element and / or the mounting element are aligned as precisely as possible during assembly. This simplifies highly accurate assembly. The movement device, in turn, makes it possible, in particular, to move the mounting element away from and back towards the alignment device during assembly. This allows the mounting element and the optical element to be aligned sequentially on the assembly device without the risk of collision between them.Secondly, the mounting element can be placed over the optical element, preferably from above, by means of the movement device. This simplifies the arrangement of an optical element in a mounting element that has a receiving opening with a diameter that is at least partially smaller than the diameter of the optical element. The movement device can have at least one, preferably at least three, linear guides for guiding and / or generating the movement of the movement device. Alternatively or additionally, the movement device can have at least one crane. The movement device can also include a holding device, preferably for holding and / or receiving the mounting element. The movement device is also advantageously configured to move the holding device along a direction of movement that is preferably at least partially vertical, and preferably to move it back and forth.

[0013] In the context of this disclosure, the “orientation” of an object, such as the mounting element, the optical element and / or the support element, is understood to mean the angular position of the object with respect to one or more independent axes of rotation, while the “position” is understood to mean the arrangement of the object along independent spatial directions of a coordinate system.

[0014] The method further comprises the following step: c) Arranging the mounting element, at least section by section, in the assembly device. This places the mounting element into the assembly device, where it can then be aligned, for example. The arrangement can be carried out using the movement device. The mounting element can also be arranged such that the receiving opening of the mounting element has a larger diameter on the side facing the alignment device, preferably the second alignment device described below, than in another area of ​​the receiving opening, a region of the receiving opening further away from the alignment device, preferably the second alignment device, than on the opposite side of the mounting element and / or than on the side facing away from the alignment device, preferably the second alignment device.

[0015] The method further comprises the following step: d) Moving the mounting element along a direction of movement, preferably extending at least partially vertically, relative to the alignment device by means of the movement device. This creates space in the area of ​​the alignment device for the optical element, which is subsequently aligned. The direction of movement can extend at least partially, preferably exclusively, obliquely to the horizontal. Advantageously, the direction of movement is provided to extend exclusively vertically. This simplifies maintaining the alignment and / or orientation of the mounting element, with the exception of its vertical position, during movement by means of the movement device, since the risk of the mounting element slipping is relatively low during vertical movement.In step d), moving the mounting element relative to the alignment device preferably involves moving it upwards and / or increasing the distance between the mounting element and the alignment device, preferably the second alignment device. Advantageously, step d) is also performed after step c). The method further comprises the following step: e) arranging the optical element, at least partially, in the mounting device and aligning the position and / or orientation of the optical element using the alignment device. Aligning the position and / or orientation simplifies the precise mounting of the optical element with the mounting element. In step e), the optical element can be arranged on the alignment device, preferably the first alignment device described below.Alternatively or additionally, the optical element can be arranged with its optically effective surface facing downwards and / or towards the ground. Aligning the position and / or orientation preferably comprises changing the position and / or orientation of the optical element. The alignment preferably involves aligning the optical element relative to the mounting device. In particular, aligning the optical element includes aligning its vertical position and / or orientation relative to the vertical axis, i.e., the vertical. After aligning the optical element, it can be fixed in its position and / or orientation. During step e), the mounting element can be held, at least temporarily, preferably substantially continuously, by the movement device, preferably the holding device. Advantageously, step e) is performed after step c) and / or after step d).

[0016] The method further comprises the following step: f) Moving the mounting element, preferably along the direction of movement and / or relative to the alignment device, to arrange the mounting element such that the mounting element surrounds the optical element at least partially, preferably to slip the mounting element over the optical element at least partially. This threads the mounting element over the optical element, allowing the optical element and the mounting element to be arranged relative to each other in a simple and precise manner, even if the receiving opening of the mounting element has a smaller diameter than the diameter of the optical element, at least partially. While it would be conceivable to insert the optical element into the mounting element from above, with the upward-facing side of the receiving opening having a sufficiently large diameter, this method is not applicable here.However, it must be taken into account that the optically effective surface of optical elements for microlithography is often intended to point downwards, i.e., towards the ground, during assembly. This is intended, among other things, to prevent, for example, suspended particles from settling on the optically effective surface of the optical element. The procedure described here can therefore prevent the deposition of suspended particles during assembly, even if the receiving opening of the mounting element is smaller than the diameter of the optical element. Advantageously, it is provided that in step f), the movement is carried out at least partially, preferably substantially completely, in the opposite direction to, and preferably along, the direction of movement compared to, the movement in step d).Alternatively or additionally, it may be provided that the movement of the mounting element relative to the alignment device in step f) is a downward movement and / or a reduction of the distance between the mounting element and the alignment device. Advantageously, step f) is performed after step c), after step d), and / or after step e).

[0017] The method further comprises the following step: g) Bonding the optical element and the mounting element together. This creates a stable connection, in particular an adhesive bond, between the optical element and the mounting element. The bonding may include applying adhesive to the optical element and / or mounting element, preferably to the at least one adhesive element, and in particular to the plurality of adhesive elements. The bonding may also include curing the adhesive, preferably for at least 12 hours, more preferably for at least 18 hours, and more preferably for at least 24 hours. Advantageously, step f) is carried out after step c), after step d), after step e), and / or after step f).

[0018] During steps c), d), e), f), and / or g), the mounting element can be arranged in the assembly device at least temporarily, preferably substantially continuously, at least partially, and preferably substantially completely, and / or during steps e), f), and / or g), the optical element can be arranged in the assembly device at least temporarily, preferably substantially continuously, at least partially, and preferably substantially completely. This simplifies precise alignment and assembly.

[0019] In one embodiment, the method comprises the following step: b1) providing a support element for supporting the mounting element, arranging the support element at least sectionally in the assembly device, and / or aligning the position and / or orientation of the support element using the alignment device. This simplifies the precise arranging and alignment of the mounting element. The support element can also be designed similarly to a support element in a projection exposure system, so that comparable boundary conditions exist during the assembly of the mounting element and the optical element as will later exist in the projection exposure system. In particular, the same stress states are present during bonding as will later exist in the projection exposure system.The support element can be arranged on the alignment device, preferably the second alignment device described below, preferably after it has been positioned in the assembly device. Alternatively or additionally, the support element can be fixed to the alignment device, preferably the second alignment device, preferably after its position and / or orientation has been aligned. The alignment device, preferably the second alignment device, can therefore include a fixing device for securing the support element. The support element itself can form part of the assembly device or be provided as a separate component from the assembly device. Furthermore, the alignment device can be provided as an alternative or additional means of aligning the position and / or orientation of the support element.Aligning the position and / or orientation preferably comprises changing the position and / or orientation of the support element. The alignment preferably involves aligning the support element relative to the mounting device. In particular, aligning the support element's vertical position and / or orientation relative to the vertical axis, i.e., the vertical, is also included. It is also advantageous to provide that, in step c), the mounting element is arranged on the support element. Advantageously, step b1) is performed before step c).

[0020] In one embodiment, the method comprises the following step: c1) Aligning the position and / or orientation of the mounting element, wherein, preferably, the alignment comprises attaching, removing, and / or exchanging at least one alignment element on the mounting element and / or the support element. Aligning the mounting element simplifies the precise assembly of the mounting element and the optical element. Preferably, no or only minimal alignment of the mounting element is then required after step f) to achieve the best possible position and / or orientation for bonding. Alignment using alignment elements also simplifies precise alignment, since, compared to an alignment device, deviations in position and / or orientation due to drift, for example in hydraulically or pneumatically actuated alignment devices, are less pronounced.Aligning the position and / or orientation preferably comprises changing the position and / or orientation of the mounting element. The alignment preferably involves aligning the mounting element relative to the mounting device. In particular, aligning the mounting element's vertical position and / or orientation relative to the vertical axis, i.e., the vertical, is included. The alignment, especially using the at least one alignment element, can be performed at least temporarily outside the mounting device. For example, at least one measurement on the mounting element and / or the at least one alignment element can be performed outside the mounting device. Alternatively or additionally, attaching, removing, and / or replacing at least one alignment element on the mounting element and / or the support element can be performed outside the mounting device.This allows the design complexity of the assembly device to be kept low. The alignment process can be designed as an iterative process, preferably involving the alternating attachment, removal, and / or replacement of at least one alignment element and the determination of the position and / or orientation of the mounting element, preferably using the measuring device described below. Based on the determination of the position and / or orientation of the mounting element, it can be determined whether at least one alignment element should be attached, removed, and / or replaced, and / or what geometry the at least one alignment element to be attached, removed, and / or replaced should have. This increases the precision of the alignment. The at least one alignment element can be designed as a solid, particularly one-piece, body. Such alignment elements are also referred to as spacers.Preferably, it is also provided that step c1) is performed after step b1), after step c) and / or before step d).

[0021] In one embodiment of the method, the alignment device comprises at least a first alignment device for aligning the position and / or orientation of the optical element and / or at least a second alignment device for aligning the position and / or orientation of the support element, the mounting element, and / or the optical element. Preferably, in step b1), alignment is performed using the second alignment device, and / or in step e), alignment is performed using the first alignment device. This provides dedicated alignment devices for specific alignment operations. This simplifies ensuring optimal alignment for each alignment step. The second alignment device may include at least one air bearing, preferably being movably mounted by means of the air bearing.Alternatively or additionally, the second alignment device is rotatably mounted, preferably by means of an air bearing. The second alignment device may include an axis of rotation, preferably parallel to the vertical. Due to the use of at least one dedicated alignment device, it may be advantageous for the movement device to be configured relative to the first alignment device and / or relative to the second alignment device. Furthermore, the movement by means of the movement device relative to the alignment device in step d) and / or step f) may include movement relative to the first alignment device and / or the second alignment device. The alignment in step b1), step c1), and / or step e) may also include aligning the mounting element, the optical element, and / or the support element coaxially with the axis of rotation of the second alignment device and / or the vertical.

[0022] In one embodiment of the method, the first alignment device is provided for aligning the optical element along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom, and / or the second alignment device is provided for aligning the support element, the mounting element, and / or the optical element along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom. The more degrees of freedom considered during alignment, the more precise the alignment can be.

[0023] In one embodiment, the method comprises the following step: (b2) providing at least one measuring device for determining the position and / or orientation of the optical element, the mounting element, and / or the support element, and wherein, preferably, the alignment device is configured to align the optical element, the mounting element, and / or the support element, taking into account, preferably based on, a determination of the position and / or orientation of the optical element, the mounting element, and / or the support element by means of the measuring device. The measuring device allows the precise determination of the position and / or orientation of the elements used for assembly. Since the alignment device, in turn, performs the alignment taking into account the determination made by the measuring device, precise and rapid alignment is simplified.The measuring device can itself form part of the assembly device or be provided as a separate component from the assembly device. The measuring device can comprise at least one measuring sensor, preferably a plurality of measuring sensors. At least one measuring sensor can be designed as a probe for detecting at least one measuring reference, preferably at least one measuring collar, on the mounting element, the optical element, and / or the support element. This simplifies the determination of deviations in the position and / or orientation of the corresponding elements.

[0024] In one embodiment of the method, the position and / or orientation of the optical element, the mounting element, and / or the support element is determined by the measuring device before, during, and / or after step b1), step c1), step d), step e), step f), and / or step g), and / or in step b1), step c1), step d), step e), step f), and / or step g), and / or in step e), alignment is performed taking into account, preferably based on, a determination of the position and / or orientation of the respective element to be aligned by the measuring device. By making corresponding determinations with the measuring device before, during, and / or after the steps, information for use in the various alignment steps can be obtained. Alternatively or additionally, it can be verified whether the various alignment steps have achieved the desired result.The determination using the measuring device preferably includes measuring with the measuring device and / or evaluating measurement results with the measuring device. The element to be aligned can, in particular, be the optical element, the mounting element, and / or the support element.

[0025] In one embodiment of the method, the support element comprises at least one connecting element for joining, preferably clamping, the support element and the socket element together, and preferably, at least temporarily during step c), step c1), and / or step g), the support element and the socket element are connected, preferably clamped, to each other by means of the connecting element. This prevents, in particular, unintentional adjustment of the position and / or orientation of the socket element during the respective steps. This, in turn, increases the precision during alignment and / or bonding. The support element preferably comprises a plurality of corresponding connecting elements, wherein, preferably, the plurality of connecting elements are arranged uniformly distributed and / or concentrically, preferably with respect to the axis of rotation of the second alignment device.This makes it easier to connect the mounting element firmly and precisely to the support element.

[0026] In one embodiment of the method, it is provided that before and / or during step d), a connection between the mounting element and the support element is broken by means of the connecting element, that in step d) and / or step f), the mounting element is moved relative to the support element, and / or that during and / or after step f), the connection between the mounting element and the support element is established by means of the connecting element. This allows space to be created for arranging the optical element in the assembly device, particularly in the area of ​​the alignment device, or for fixing the mounting element in the desired position and / or orientation for bonding to the optical element.

[0027] In one embodiment of the method, the moving device is configured to allow, in a first state, movement of the mounting element held by the moving device in a compensating direction, preferably at least partially oblique to the direction of movement, and / or to block, in a second state, movement of the mounting element held by the moving device in the compensating direction, preferably at least partially oblique to the direction of movement. The first state makes it particularly easy to position the mounting element on the support element free from transverse forces using the moving device. The second state, in turn, makes it easier to ensure, as precisely as possible, that the position and / or orientation set during alignment is maintained during bonding, despite the movement by the moving device.The compensating direction can alternatively or additionally extend at least partially obliquely to the vertical. To block movement in the compensating direction, the moving device can include at least one blocking device, which preferably can block and / or release movement of the retaining element in the compensating direction.

[0028] In one embodiment of the method, the assembly device comprises at least one adhesive device for applying adhesive to the optical element and / or the mounting element, and preferably, the adhesive device and the alignment device are movable relative to each other, preferably rotatable, and / or in step g), the bonding process comprises applying adhesive to the optical element and / or the mounting element by means of the adhesive device. An adhesive device simplifies the precise and metered application of adhesive. This, in turn, facilitates optimal bonding. The adhesive device can also include an adhesive metering device for dispensing the adhesive to be applied.The assembly device, preferably the adhesive device and / or the alignment device, can also include a positioning device for fixing the relative positions of the adhesive device and the alignment device, preferably the second alignment device. This, in turn, improves the precise application of adhesive by means of the adhesive device. In step g), adhesive can also be applied to the at least one adhesive element, preferably the plurality of adhesive elements, by means of the adhesive device. Furthermore, in step g), the mounting element, the optical element, and / or the support element can be moved, in particular rotated, relative to the adhesive device, preferably by means of the alignment device, in particular by means of the second alignment device. This simplifies the application of the adhesive along the entire circumference of the mounting element and the optical element.

[0029] In one embodiment of the method, the mounting device comprises at least one cable holding device for holding at least one cable connected to the optical element, and preferably, the cable holding device is spaced apart from the alignment device, preferably along the direction of movement, and / or in step e), in step f), and / or in step g), at least one cable connected to the optical element, preferably extending through the mounting element, is held by means of the cable holding device. This simplifies surrounding the optical element with the mounting element, in particular placing the mounting element over the optical element, since the corresponding cables are thus arranged in a defined manner. The cable holding device can be arranged section by section above the alignment device, preferably above the first alignment device and / or the second alignment device.The conductor element can preferably extend through the receiving opening of the socket element in step e), in step f) and / or in step g).

[0030] In one embodiment of the method, the assembly device comprises at least one base body and preferably the alignment device, the movement device, the measuring device, the adhesive device, and / or the cable holding device are arranged on the base body, and / or the first alignment device is preferably rotatably mounted by means of the second alignment device. This arrangement on the base body allows for a compact assembly device. Furthermore, it simplifies precise assembly, since the individual components of the assembly device are arranged on the same reference element, namely the base body, and are preferably also aligned with the base body. Advantageously, alternatively or additionally, the first alignment device and / or the second alignment device are arranged on the base body.Mounting the first alignment device using the second alignment device also results in a compact assembly fixture. Furthermore, this simplifies complex alignment processes of the optical element, as the optical element can be aligned using either the first or the second alignment device.

[0031] The aforementioned problem is further solved according to the invention by the claimed mounting device for mounting, preferably for bonding, an optical element for microlithography with a mounting element.

[0032] The mounting device for assembling, preferably bonding, an optical element for microlithography with a mounting element comprises: at least one alignment device for aligning the position and / or orientation of an optical element and / or a mounting element, and at least one movement device for moving a mounting element relative to the alignment device, preferably along a direction of movement that preferably extends at least partially vertically. The alignment device ensures that the optical element and / or the mounting element are aligned as precisely as possible during assembly. This simplifies highly accurate assembly. The movement device, in turn, makes it possible, in particular, to move the mounting element away from and back towards the alignment device during assembly.Firstly, this allows the mounting element and the optical element to be aligned sequentially on the assembly device without the risk of collision. Secondly, the movement device allows a mounting element to be placed over an optical element, preferably from above. This simplifies the arrangement of an optical element within a mounting element that has a receiving opening with a diameter at least partially smaller than the diameter of the optical element. The movement device can include at least one, preferably at least three, linear guides for guiding and / or generating the movement of the movement device. Alternatively or additionally, the movement device can include at least one crane. The movement device can also include a holding device, preferably for holding and / or receiving a mounting element.The movement device is advantageously configured to move the holding device along a direction of movement, preferably extending at least partially vertically, preferably back and forth. Alternatively or additionally, the direction of movement can extend completely vertically. The assembly device of the previously described method can also correspond to the assembly device described here, and vice versa.

[0033] In one embodiment of the assembly device, the assembly device is configured to carry out the method according to any one of claims 1 to 13. Carrying out the method with the assembly device simplifies the fastest and most precise assembly possible using the assembly device.

[0034] In one embodiment of the mounting device, the movement device is configured to move and position a mounting element, preferably along the direction of movement and / or relative to the alignment device, such that the mounting element surrounds an optical element at least partially, and preferably that the mounting element is at least partially slipped over an optical element. This allows the mounting element to be threaded over the optical element, enabling the optical element and the mounting element to be arranged relative to each other in a simple and precise manner, even if the receiving opening of the mounting element has a smaller diameter than the diameter of the optical element, at least partially.

[0035] In one embodiment of the mounting device, the device includes a support element for supporting a socket element and preferably at least one connecting element for joining, preferably clamping, the support element and the socket element. The support element simplifies the precise arrangement and alignment of the socket element. Furthermore, the support element can be designed similarly to a support element in a projection exposure system, so that comparable boundary conditions exist during the assembly of the socket element and the optical element as will later exist in the projection exposure system. In particular, the same stress states are present during bonding as will later exist in the projection exposure system. The support element can be arranged on the alignment device, preferably the second alignment device.Alternatively or additionally, the support element can be fixed to the alignment device, preferably the second alignment device, and preferably be fixed in place. The alignment device, preferably the second alignment device, can therefore include a fixing device for securing the support element. Furthermore, the alignment device can be provided, alternatively or additionally, for aligning the position and / or orientation of the support element. The connecting element prevents, in particular, unintentional adjustment of the position and / or orientation of the mounting element during the respective steps. This, in turn, increases the precision during alignment and / or bonding. The support element preferably comprises a plurality of corresponding connecting elements, wherein, preferably, the plurality of connecting elements are evenly distributed and / or concentrically arranged, preferably with respect to the axis of rotation of the second alignment device.This makes it easier to connect the mounting element firmly and precisely to the support element.

[0036] In one embodiment of the mounting device, the alignment device comprises at least a first alignment device for aligning the position and / or orientation of an optical element and / or at least a second alignment device for aligning the position and / or orientation of the support element, a mounting element, and / or an optical element. This simplifies ensuring optimal alignment for different alignment steps. The second alignment device can include at least one air bearing, preferably being movably mounted by means of the air bearing. Alternatively or additionally, the second alignment device is rotatably mounted, preferably by means of the air bearing. The second alignment device can include an axis of rotation, preferably running parallel to the vertical.Due to the use of at least one dedicated alignment device, it may be advantageous for the movement device to be designed relative to the first alignment device and / or relative to the second alignment device.

[0037] In one embodiment of the mounting device, the first alignment device is provided for aligning an optical element along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom, and / or the second alignment device is provided for aligning the support element, a mounting element, and / or an optical element along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom. The more degrees of freedom considered during alignment, the more precise the alignment can be.

[0038] In one embodiment of the mounting device, the mounting device comprises at least one measuring device for determining the position and / or orientation of an optical element, a mounting element, and / or the support element. Preferably, the alignment device is configured to align the optical element, the mounting element, and / or the support element based on the position and / or orientation determined by the measuring device. The measuring device precisely determines the position and / or orientation of the elements used for assembly. Since the alignment device then performs the alignment based on the determination made by the measuring device, precise and rapid alignment is simplified.The measuring device can comprise at least one measuring sensor, preferably a plurality of measuring sensors. At least one measuring sensor can be designed as a probe for detecting at least one measuring reference, preferably at least one measuring collar, on the mounting element, the optical element, and / or the support element. This simplifies the determination of deviations in the position and / or orientation of the corresponding elements.

[0039] In one embodiment of the assembly device, the movement device is configured to allow, in a first state, movement of a mounting element held by the movement device in a compensating direction, preferably at least partially oblique to the direction of movement, and / or to block, in a second state, movement of a mounting element held by the movement device in the compensating direction, preferably at least partially oblique to the direction of movement. The first state makes it particularly easy to position the mounting element on the support element free from transverse forces using the movement device. The second state, in turn, makes it easier to ensure, as precisely as possible, that the position and / or orientation set during alignment of the mounting element is maintained during bonding, despite the movement by the movement device.The compensating direction can alternatively or additionally extend at least partially obliquely to the vertical. To block movement in the compensating direction, the moving device can comprise at least one blocking device, which preferably can block and / or release movement of a retaining element in the compensating direction.

[0040] In one embodiment of the mounting device, the device comprises at least one adhesive device for applying adhesive to an optical element and / or a mounting element, and preferably, the adhesive device and the alignment device are movable relative to each other, preferably rotatable. An adhesive device simplifies the precise and metered application of adhesive. This, in turn, facilitates optimal bonding. The adhesive device may also include an adhesive metering device for dispensing the adhesive to be applied. The mounting device, preferably the adhesive device and / or the alignment device, may also include a positioning device for fixing the relative positions of the adhesive device and the alignment device, preferably the second alignment device. This further improves the precise application of adhesive by means of the adhesive device.

[0041] In one embodiment of the mounting device, the mounting device comprises at least one cable holding device for holding at least one cable connected to an optical element, and preferably, the cable holding device is spaced apart from the alignment device, preferably along the direction of movement. This simplifies surrounding the optical element with the mounting element, in particular placing the mounting element over the optical element, since the corresponding cables are thus arranged in a defined manner. The cable holding device can be arranged section by section above the alignment device, preferably above the first alignment device and / or the second alignment device.

[0042] In one embodiment of the assembly device, the assembly device comprises at least one base body and preferably the alignment device, the movement device, the measuring device, the adhesive device, and / or the cable holding device are arranged on the base body, and / or the first alignment device is preferably rotatably mounted by means of the second alignment device. This arrangement on the base body allows for a compact assembly device. Furthermore, it simplifies precise assembly, since the individual components of the assembly device are arranged on the same reference element, namely the base body, and are preferably also aligned with the base body. Advantageously, alternatively or additionally, the first alignment device and / or the second alignment device are arranged on the base body.Mounting the first alignment device using the second alignment device also results in a compact assembly fixture. Furthermore, this simplifies complex alignment processes of the optical element, as the optical element can be aligned using either the first or the second alignment device.

[0043] Further features and advantages of the method and the assembly device will become apparent from the following description of exemplary embodiments, with reference to the accompanying drawing.

[0044] The aforementioned problem is solved in the optical module according to the invention by the fact that the, preferably maximum, diameter of the receiving aperture is at least partially smaller than the, preferably maximum, diameter of the optical element.

[0045] The optical module for microlithography comprises an optical element for microlithography. The optical element can include at least one lens and / or at least one mirror. Furthermore, the optical element can have at least one optically active surface and / or at least one optically inactive surface. Radiation can be guided by means of the optical element, preferably the optically active surface of the optical element, preferably in a microlithography system.

[0046] Furthermore, the optical module for microlithography comprises a mounting element, wherein the mounting element has a receiving opening, preferably in the form of a through-hole, for receiving the optical element. The mounting improves the rigidity of the optical module, in particular of the optical element. Moreover, the mounting simplifies the installation of the optical module in a microlithography system. The optical element is arranged at least partially on the mounting element and / or at least partially received in the receiving opening. The receiving opening, in the form of a through-hole, preferably extends through the mounting element, preferably from one side of the mounting element to the opposite side of the mounting element.The mounting element can surround the optical element at least partially, preferably circumferentially, and / or the mounting element can be fitted over the optical element at least partially. At least one measuring collar, preferably circumferential and / or circumferential, can be arranged on the mounting element and / or optical element. The measuring collar simplifies the determination of deviations in the position and / or orientation of the respective elements.

[0047] The optical module may include at least one manipulator and / or it may be provided that the optical element and / or the mounting element is connected to at least one manipulator. The at least one manipulator may, for example, change the position and / or orientation of the optical element and / or deform the optical element. Alternatively or additionally, the optical module may include at least one conductor connected to the optical element and / or the mounting.

[0048] The optical module, preferably the optical element and / or the mounting element, can preferably be the optical element and / or the mounting element according to any one of claims 1 to 24.

[0049] Furthermore, the optical module for microlithography is designed such that the diameter of the receiving aperture, preferably its maximum diameter, is at least partially smaller than the diameter of the optical element, preferably its maximum diameter. This allows the mounting element to partially cover the optical element, preferably on at least one side, while simultaneously leaving a portion of the optical element, preferably on the same side, uncovered by the mounting. This design provides sufficient rigidity to the optical element and also provides a sufficiently free area of ​​the optical element, which is preferably optically inactive. This free area can then be used, for example, for interaction with at least one manipulator and / or for the attachment of at least one manipulator.The diameter of the optical element is preferably determined at the area of ​​the optical element intended for connection with the mounting element and / or at the area of ​​the optical element that forms the connection with the mounting element in the assembled state. Alternatively or additionally, the receiving opening can taper and / or widen at least partially. With such a design, the optical element cannot simply be inserted into the mounting element from any side, so that conventional assembly methods may not be applicable or may only be applicable to a limited extent. The mounting element can have at least one adhesive element, preferably a plurality of adhesive elements, wherein the adhesive elements are provided with adhesive to create the adhesive bond between the optical element and the mounting element.The at least one adhesive element, preferably the plurality of adhesive elements, can be arranged at least sectionally along the circumference of the receiving opening. Alternatively or additionally, the at least one adhesive element, preferably the plurality of adhesive elements, can be arranged in at least one adhesive opening, preferably a plurality of adhesive openings, in the mounting element, wherein, preferably, the at least one adhesive opening, preferably the plurality of adhesive openings, are arranged along the circumference of the receiving opening. The at least one adhesive opening, preferably the plurality of adhesive openings, can each be configured as a through-opening.Advantageously, the optical element and the mounting element are connected, in particular bonded, wherein the connection, preferably bonding, is effected using the at least one adhesive element, preferably the plurality of adhesive elements, and / or the at least one adhesive opening, preferably the plurality of adhesive openings. Advantageously, adhesive can be applied to the optical element and / or the mounting element, preferably to the at least one adhesive element, in particular the plurality of adhesive elements. Bonding simplifies a stable and low-stress connection between the optical element and the mounting element.The mounting element can be designed such that the receiving opening of the mounting element has a larger diameter on the side adjacent to the optically effective surface than on the opposite side of the mounting element, on the side of the mounting element facing away from the optically effective surface, and / or on a side of the mounting element adjacent to an optically ineffective surface of the optical element, and / or than the maximum diameter of the optical element. This simplifies the process of ensuring that the optically effective surface has sufficient space and can be positioned within the mounting.

[0050] The drawing shows Fig. 1. A mounting device with a mounting element arranged therein in a front view, Fig. 2 the mounting device Fig. 1 with an optical element arranged therein in a front view, wherein the mounting element was moved by means of the movement device, Fig. 3 the mounting device Fig. 1 in a front view, with the mounting element surrounding the optical element.

[0051] Fig. Figure 1 shows a mounting device 1 with a mounting element 2 arranged therein in a front view.

[0052] The assembly device 1 comprises at least one alignment device 3, wherein, in the illustrated embodiment, the alignment device 3 comprises a first alignment element 3a and a second alignment element 3b. Furthermore, the assembly device 1 comprises a movement device 4 for moving the mounting element 2 relative to the alignment device 3. The movement device 4 can be moved along the direction of movement B, which in this case extends vertically and thus parallel to, or corresponding to, the vertical V.

[0053] In the illustrated embodiment, the socket element 2 is supported by a support element 5. The support element 5 comprises several connecting elements 6 with which the support element 5 and the socket element 2 can be connected, in particular clamped, to one another. This is advantageous, for example, when the position and / or orientation of the socket element 2 needs to be determined during its alignment. To align the socket element 2, alignment elements 7 can be attached to, removed from, and / or exchanged on the support element 5 and / or the socket element 2 until the desired position and / or orientation of the socket element 2 is achieved. Alternatively or additionally, alignment can be carried out using the alignment device 3, in particular the second alignment device 3b.Before aligning the mounting element 2, the support element 5 should first be aligned, for example by means of the alignment device 3, in particular the second alignment device 3b.

[0054] In the illustrated embodiment, the first alignment device 3a is configured to align an optical element along three rotational degrees of freedom and along three translational degrees of freedom. This is shown in the Fig. The second alignment device 3b is indicated by arrows. It is designed to align the support element 5, the mounting element 2, and / or the optical element along one rotational degree of freedom, namely a rotation about the vertical V. The rotational capability of the second alignment device 3b is enabled by an air bearing 10 and is indicated by an arrow.

[0055] To simplify the alignment of the mounting element 2, the support element 5, and the optical element described below, the mounting device 1 also includes a measuring device 8 for determining the position and / or orientation of the optical element, the mounting element 2, and / or the support element 5. Based on the determinations, in particular measurements, of the measuring device 8, the respective elements can then be precisely aligned. In the embodiment shown, the measuring device 8 comprises a plurality of measuring sensors 9, 9', 9'', 9''', wherein one of the measuring sensors 9''' is designed as a probe for detecting at least one measuring collar on the mounting element 2.

[0056] The mounting element 2 shown has a receiving opening 11 for receiving the optical element. In the illustrated embodiment, the receiving opening 11 is conical; however, other geometries are possible alternatively or additionally. A plurality of adhesive elements 12 are arranged in adhesive openings 13 of the mounting element 2, particularly along the receiving opening 11. These adhesive elements 12 serve as an adhesive surface for an adhesive bond between the mounting element 2 and the optical element to be received in the mounting element 2.

[0057] Since the receiving opening 11 of the mounting element 2 is partially smaller than the maximum diameter of the optical element to be received in the mounting element 2, the optical element cannot simply be inserted into the mounting element 2 from above. Therefore, after aligning the mounting element 2, it is necessary to move the mounting element 2 away from the alignment device 3 and the support element 5, thus creating space on the alignment device 3 for the optical element.

[0058] Fig. 2 shows the mounting device Fig. Figure 1 shows a front view of the optical element 14 arranged therein, wherein the mounting element 2 was moved by means of the movement device 4. For this purpose, the mounting element 2 was received in a holding device 15 of the movement device 4 and moved along the direction of movement B, and the connection between the support element 5 and the mounting element 2 was released by means of the connecting element 6. Alternatively or additionally to the holding device 15, however, other possibilities are conceivable for holding and moving the mounting element 2 by means of the movement device 4. In order to block movement of the mounting element 2 in a compensating direction A during the movement and holding of the mounting element 2 by means of the movement device 4, the movement device 4 also includes a blocking device 16.This ensures that, after alignment of the mounting element 2, the position and / or orientation of the mounting element 2 is at least partially maintained despite movement by means of the movement device 4. In some situations, for example, when the mounting element 2 is positioned in the assembly device 1 for the first time using the movement device 4, it can be advantageous if the movement device 4 allows movement of the mounting element 2 in the compensating direction A. This prevents lateral forces during positioning, for example, on the support element 5 and / or the alignment elements 7. In the illustrated embodiment, the compensating direction A runs obliquely to the direction of movement B and / or the vertical V.

[0059] By moving the mounting element 2 as described above, space was created on the alignment device 3 for the optical element 14. The optical element 14 was then positioned on the alignment device 3, in particular the first alignment device 3a. The optical element 14 can then be aligned in its position and / or orientation using the alignment device 3, in particular the first alignment device 3a, especially with the aid of the measuring device 8.

[0060] While the optical element 14 is arranged in the mounting device, a cable 20 connected to the optical element 14 is held by means of a cable holding device 17. This prevents, among other things, the cables 20 from being in the way and potentially being damaged when the socket element 2 is subsequently placed over the optical element 14.

[0061] Fig. Figure 3 shows the mounting device 1. Fig. Figure 1 shows a front view, with the mounting element 2 surrounding the optical element 14. For this purpose, after the optical element 14 was aligned, the mounting element was moved back towards the alignment device 3 along the direction of movement B by means of the movement device 4 and placed over the optical element 14. In this way, the optical element 14 can be arranged in the receiving opening 11 of the mounting element 12 in the desired position and / or orientation, even though the receiving opening 11 has a smaller diameter in some sections than the maximum diameter of the optical element 14. In the embodiment shown, the optical element 14 is also conical, but alternatively or additionally, other geometries are possible.

[0062] After being lowered by the movement device 4, the mounting element 2 was reconnected to the support element 5 by means of the connecting element 6, in particular by clamping. The mounting element 2 and the optical element 14 are now in the position and / or orientation intended for bonding.

[0063] To create the adhesive bond, adhesive is applied to the area of ​​the adhesive elements 12 using the adhesive device 18. During the bonding process, the mounting element 2 and the optical element 14 can be moved, in particular rotated, relative to the adhesive device 18 by means of the alignment device 3, in particular the second alignment device. This simplifies the application of the adhesive along the entire circumference of the mounting element 2 and the optical element 14.

[0064] In the illustrated embodiment, the cable holding device 17, the measuring device 8, the alignment device 3, and the adhesive device 18 are also arranged together on a base body 19. This results in a compact assembly device 1. Furthermore, this simplifies precise assembly, since the individual components of the assembly device 1 are arranged and aligned on the same reference element, namely the base body 19. Reference symbol list 1 Mounting device 2 mounting element 3b Alignment device 3 Alignment device 3a first alignment device 3b second alignment device 4 Motion device 5 support element 6 Connecting element 7 Alignment element 8 Measuring device 9, 9', 9'' 9''' measuring sensor 10 air bearings 11. Intake opening 12 adhesive elements 13 Adhesive opening 14 optical element 15 Holding device 16 Locking device 17 Cable holding device 18 Adhesive device 19 basic shapes 20 Management A. Compensation direction B Direction of movement V Vertical

Claims

[1] A method for mounting, preferably bonding, an optical element (14) for microlithography with a mounting element (2) comprising the following steps: a) Providing an optical element (14) for microlithography and a mounting element (2), b) Providing an assembly device (1) comprising - at least one alignment device (3) for aligning the position and / or orientation of the optical element (14) and / or the mounting element (2), and - at least one movement device (4) for moving the mounting element (2) relative to the alignment device (3), c) Arranging the mounting element (2) at least section by section in the mounting device (1), d) Moving the mounting element (2) along a direction of movement (B), preferably extending at least partially vertically, relative to the alignment device (3) by means of the movement device (4), e) Arranging the optical element (14) at least sectionally in the mounting device (1) and aligning the position and / or orientation of the optical element (14) using the alignment device (3), f) Moving the mounting element (2), preferably along the direction of movement (B) and / or relative to the alignment device (3), in order to arrange the mounting element (2) such that the mounting element (2) surrounds the optical element (14) at least section by section, preferably in order to place the mounting element (2) at least section by section over the optical element (14), g) Bonding the optical element (14) and the mounting element (2) together. [2] Method according to claim 1, characterized bythe following step: b1) Providing a support element (5) to support the mounting element (2), arranging the support element (5) at least sectionally in the assembly device (1) and / or aligning the position and / or orientation of the support element (5) using the alignment device (3). [3] Method according to claim 1 or claim 2, characterized by the following step: c1) Aligning the position and / or orientation of the mounting element (2), - wherein, preferably, the alignment comprises attaching, removing and / or replacing at least one alignment element (7) on the mounting element (2) and / or the support element (5). [4] Method according to any one of claims 1 to 3, characterized by, that the alignment device (3) comprises at least a first alignment device (3a) for aligning the position and / or orientation of the optical element (14) and / or at least a second alignment device (3b) for aligning the position and / or orientation of the support element (5), the mounting element (2) and / or the optical element (14) and that, preferably, in step b1) the alignment is carried out using the second alignment device (3b) and / or in step e) the alignment is carried out using the first alignment device (3a). [5] Method according to any one of claims 1 to 4, characterized by, that the first alignment device (3a) is provided for aligning the optical element (14) along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom, and / or that the second alignment device (3b) is provided for aligning the support element (5), the mounting element (2) and / or the optical element (14) along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom. [6] Method according to any one of claims 1 to 5, characterized bythe following step: b2) Providing at least one measuring device (8) for determining the position and / or orientation of the optical element (14), the mounting element (2) and / or the support element (5) and wherein, preferably, the alignment device (3) is set up taking into account, preferably based on, a determination of the position and / or orientation of the optical element (14), the mounting element (2) and / or the support element (5) by means of the measuring device (8) to carry out an alignment of the optical element (14), the mounting element (2) and / or the support element (5). [7] Method according to claim 6, characterized by, that before, during and / or after step b1), step c), step c1), step d), step e), step f) and / or step g) the position and / or orientation of the optical element (14), the mounting element (2) and / or the support element (5) is determined by means of the measuring device (8) and / or that in step b1), in step c1) and / or in step e) the alignment is carried out taking into account, preferably based on, a determination of the position and / or orientation of the respective element (2, 5, 14) to be aligned by means of the measuring device. [8] Method according to any one of claims 2 to 7, characterized by, that the support element (5) comprises at least one connecting element (6) for connecting, preferably for clamping, the support element (5) and the socket element (2) together, and that, preferably, at least temporarily during step c), step c1) and / or step g), the support element (5) and the socket element (2) are connected, preferably clamped, together by means of the connecting element (6). [9] Method according to claim 8, characterized by , that before and / or during step d) a connection is broken by means of the connecting element (6) between the socket element (2) and the support element (5), that in step d) and / or step f) the socket element (2) is moved relative to the support element (5) and / or that during and / or after step f) the connection is made by means of the connecting element (6) between the socket element (2) and the support element (5). [10] Method according to any one of claims 1 to 9, characterized by , that the movement device (4) is configured to allow, in a first state, a movement of the retaining element (2) held by the movement device (4) in a compensating direction (A), preferably at least partially oblique to the direction of movement (B), and / or to block, in a second state, a movement of the retaining element (2) held by the movement device (4) in the compensating direction (A), preferably at least partially oblique to the direction of movement (B). [11] Method according to any one of claims 1 to 10, characterized by, that the mounting device (1) comprises at least one adhesive device (18) for applying adhesive to the optical element (14) and / or the mounting element (2) and that, preferably, the adhesive device (18) and the alignment device (3) are movable relative to each other, preferably rotatable, and / or in step g) the bonding comprises applying adhesive to the optical element (14) and / or the mounting element (2) by means of the adhesive device. [12] Method according to any one of claims 1 to 11, characterized by, that the mounting device (1) comprises at least one cable holding device (17) for holding at least one cable (20) connected to the optical element (14) and that, preferably, the cable holding device (17) is spaced apart from the alignment device (3), preferably along the direction of movement (B) and / or in step e), in step f) and / or in step g) at least one cable connected to the optical element (14), preferably extending through the mounting element (2), is held by means of the cable holding device (17). [13] Method according to any one of claims 1 to 12, characterized by, that the assembly device (1) comprises at least one base body (19) and, preferably, the alignment device (3), the movement device (4), the measuring device (8), the adhesive device (18) and / or the cable holding device (17) is arranged on the base body (19) and / or that the first alignment device (3a) is mounted by means of the second alignment device (3b), preferably rotatably. [14] Mounting device (1) for mounting, preferably for bonding, an optical element (14) for microlithography with a mounting element (2) comprising: - at least one alignment device (3) for aligning the position and / or orientation of an optical element (14) and / or a mounting element (2), and - at least one movement device (4) for moving a mounting element (2) relative to the alignment device (3), preferably along a direction of movement (B) which preferably extends at least sectionally vertically. [15] Mounting device (1) according to claim 14, characterized by , that the assembly device (1) is set up to carry out the method according to one of claims 1 to 13. [16] Mounting device (1) according to claim 14 or claim 15, characterized by , that the movement device (4) is configured to move and arrange a mounting element (2), preferably along the direction of movement (B) and / or relative to the alignment device (3), such that the mounting element (2) surrounds an optical element (14) at least section by section, preferably that the mounting element (2) is placed over an optical element (14) at least section by section. [17] Mounting device (1) according to any one of claims 14 to 16, characterized by a support element (5) for supporting a socket element (2) and that, preferably, the support element (5) comprises at least one connecting element (6) for connecting, preferably for clamping, the support element (5) and a socket element (2) together. [18] Mounting device (1) according to any one of claims 14 to 17, characterized by , that the alignment device (3) comprises at least a first alignment device (3a) for aligning the position and / or orientation of an optical element (14) and / or at least a second alignment device (3b) for aligning the position and / or orientation of the support element (5), a mounting element (2) and / or an optical element (14). [19] Mounting device (1) according to any one of claims 14 to 18, characterized by, that the first alignment device (3a) is provided for aligning an optical element (14) along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom, and / or that the second alignment device (3b) is provided for aligning the support element (5), a mounting element (2) and / or an optical element (14) along at least one rotational degree of freedom, preferably at least three rotational degrees of freedom, and / or at least one translational degree of freedom, preferably at least three translational degrees of freedom. [20] Mounting device (1) according to any one of claims 14 to 19, characterized byat least one measuring device (8) for determining the position and / or orientation of an optical element (14), a mounting element (2) and / or the support element (5) and that, preferably, the alignment device (3) is set up taking into account, preferably based on, a determination of the position and / or orientation of an optical element (14), a mounting element (2) and / or the support element (5) by means of the measuring device (8) to carry out an alignment of the optical element (14), the mounting element (2) and / or the support element (5). [21] Mounting device (1) according to any one of claims 14 to 20, characterized by, that the movement device (4) is configured to allow, in a first state, a movement of a retaining element (2) held by the movement device (4) in a compensating direction (A), preferably at least partially oblique to the direction of movement (B), and / or to block, in a second state, a movement of a retaining element (2) held by the movement device (4) in the compensating direction (A), preferably at least partially oblique to the direction of movement (B). [22] Mounting device (1) according to any one of claims 14 to 21, characterized by , that the mounting device (1) comprises at least one adhesive device (18) for applying adhesive to an optical element (14) and / or a mounting element (2) and that, preferably, the adhesive device (18) and the alignment device (3) are movable relative to each other, preferably rotatable. [23] Mounting device (1) according to any one of claims 14 to 22, characterized by , that the mounting device (1) comprises at least one cable holding device (17) for holding at least one cable (20) connected to an optical element (14) and that, preferably, the cable holding device (17) is spaced apart from the alignment device (3), preferably along the direction of movement (B). [24] Mounting device (1) according to any one of claims 14 to 23, characterized by , that the assembly device (1) comprises at least one base body (19) and, preferably, the alignment device (3), the movement device (4), the measuring device (8), the adhesive device (18) and / or the cable holding device (17) is arranged on the base body (19) and / or that the first alignment device (3a) is mounted by means of the second alignment device (3b), preferably rotatably. [25] Optical module for microlithography comprising: - an optical element (14) for microlithography, and - a mounting element (2), - wherein the mounting element (2) has a receiving opening (11), preferably in the form of a through-opening, for receiving the optical element (14), characterized by , that the, preferably maximum, diameter of the receiving aperture (11) is at least partially smaller than the, preferably maximum, diameter of the optical element (14).

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