Fixed precursor heating device for an induction heater

Abstract

An apparatus for heating a solid precursor for induction heating, comprising:a stainless steel cylinder having a bottom plate, a peripheral wall, a cover, and a steam outlet pipe, the bottom plate and the peripheral wall defining an inner space, the cover being provided on an upper portion of the peripheral wall in a separable manner, the steam outlet pipe being provided on the cover and communicating with the inner space, and the stainless steel cylinder having a magnetic permeability of more than 1 μm; anda plurality of vertically stacked trays provided in the inner space in a separable manner, each tray having a receiving space, a support plate, an annular side, and a circular ring;wherein in each shell the receiving space is defined between the support plate, the annular side and the circular ring, the support plate being connected to a lower portion of the annular side and being configured to carry a solid precursor, the circular ring being connected to an upper portion of the annular side and the annular side being in close contact with the peripheral wall; wherein the lowermost of the shells is defined as the bottom shell and the support plate of the bottom shell has no hollow portion; and wherein the support plate of each shell except the bottom shell rests on the circular ring of an immediately underlying shell.;

Claims

[1] Apparatus for heating a solid precursor for induction heating, comprising: a stainless steel cylinder having a bottom plate, a peripheral wall, a cover, and a steam outlet pipe, wherein the bottom plate and the peripheral wall define an interior space, wherein the cover is provided on an upper portion of the peripheral wall in a detachable manner, wherein the steam outlet pipe is provided on the cover and communicates with the interior space, and wherein the stainless steel cylinder has a magnetic permeability of more than 1 brain; and a plurality of vertically stacked trays provided in the interior in a separable manner, each tray having a receiving space, a support plate, an annular side, and a circular ring; wherein in each tray, the receiving space is defined between the support plate, the annular side, and the circular ring, the support plate being connected to a lower portion of the annular side and being configured to support a fixed precursor, the circular ring being connected to an upper portion of the annular side, and the annular side being in close contact with the peripheral wall; wherein the lowermost of the trays is defined as a bottom tray, and the support plate of the bottom tray has no hollow portion; and wherein the support plate of each tray except the bottom tray rests on the circular ring of an immediately underlying tray. [2] The apparatus for heating solid precursors for induction heating according to claim 1, wherein the uppermost one of the shells is defined as an upper shell and the support plate of the upper shell has a central hollow portion. [3] The apparatus for heating solid precursors for induction heating according to claim 2, wherein at least one tray is located between the lower tray and the upper tray, the at least one tray being defined as the middle tray, the support plate of the middle tray being centrally provided with a vertical cylindrical member and an inner circular ring, the vertical cylindrical member having an open upper end and an open lower end, the inner circular ring extending radially outwardly from the upper end of the vertical cylindrical member, and the vertical cylindrical member of the middle tray having a height less than the height of the annular side of the middle tray.

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