LIGHT SOURCE, OPTICAL MEMS SWITCH, SENSOR AND METHOD FOR MANUFACTURING SAME
Patent Information
- Application Number
- DE602022021942
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-03-15
- Publication Date
- 2025-09-24
- Estimated Expiration
- 2042-03-15
AI Technical Summary
Existing light sources using silicon nitride waveguides on silicon oxide cladding struggle to generate optical frequency combs at wavelengths beyond 800 nm due to high absorption and optical losses, and methods to achieve thicker waveguides result in cracking or interfaces that diminish performance.
Using a mono-crystalline aluminum oxide substrate, silicon nitride waveguides are deposited in a single-step low-pressure chemical vapor deposition process to achieve thicknesses of 500 nm or more, minimizing residual stress and enabling reliable fabrication without cracking, thus supporting optical frequency comb generation across a broader wavelength range.
The solution allows for the generation of optical frequency combs in the visible, near-infrared, and fundamental infrared spectra with improved optical performance by leveraging the lower absorption of aluminum oxide and reduced stress in silicon nitride waveguides, facilitating the realization of MEMS devices and sensors.