Container for storing and transporting substrates

JP1790275SActive Publication Date: 2025-01-31SHIN ETSU POLYMER CO LTD
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Patent Information

Application Number
JP2023007569D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2023-04-12
Publication Date
2025-01-31
Estimated Expiration
2048-04-12

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Abstract

This item is a container (a so-called FOSB) that contains precision substrates such as semiconductor wafers and is used for transporting and storing between factories.
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Citation Information

Cited By

  • Part of a substrate carrier

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