End Effector
JP1815650SActive Publication Date: 2025-12-25ASM IP HLDG BV
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Patent Information
- Application Number
- JP2025016026D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2025-03-06
- Filing Date
- 2025-08-13
- Publication Date
- 2025-12-25
- Estimated Expiration
- 2050-08-13
Smart Images
Figure 0001815650000001 
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Abstract
The product is an end effector attached to the end of an industrial robot arm, and more specifically, works in conjunction with a robot arm that transports substrates such as wafers within a substrate processing system. It is designed to reduce vibration during substrate processing, increase wafer stability, and reduce differential thermal expansion between components.
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