Foreline for semiconductor processing equipment

JP1817474SActive Publication Date: 2026-01-21LAM RES CORP
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Patent Information

Application Number
JP2025011377D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-12-13
Filing Date
2025-06-10
Publication Date
2026-01-21
Estimated Expiration
2050-06-10

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Abstract

The article according to the present application (hereinafter referred to as "the article") is a foreline used in semiconductor processing equipment and configured to channel fluid from a processing chamber to an exhaust system.
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