Fast foup swapping with foup handler

Abstract

To provide a vertical batch furnace assembly (10) for processing wafers having a cassette handling space (12), a wafer handling space (14), and a first wall (16) separating the cassette handling space (12) from the wafer handling space (14).SOLUTION: A first wall (16) has at least one wafer transfer opening (20) in front thereof, and a wafer transfer position (22) for a wafer cassette (60) is provided at a side of the first wall (16) directed to a cassette handling space (12). The cassette handling space (12) comprises a cassette storage having a plurality of cassette storage positions (24), and a cassette handler (26, 28, 30) configured to transfer wafer cassettes (60) between the cassette storage positions (24) and the wafer transfer position (22). The cassette handler (26, 28, 30) has a first cassette handler arm (28) and a second cassette handler arm (30).SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] This disclosure generally relates to a vertical batch furnace assembly including a cassette handler.

Background Art

[0002] A vertical batch furnace assembly for processing wafers includes a cassette handling space, a wafer handling space, and a wall separating these two spaces. The wall has a wafer transfer opening provided together with a cassette door opener device, and in front of it, a wafer transfer position of the wafer cassette is provided. The cassette handling space includes a cassette handler capable of transporting the wafer cassette between the wafer transfer position and a cassette storage box in which the wafer cassette can be stored. The wafer handling space of the vertical batch furnace assembly may also include a wafer handler that removes wafers from the wafer cassette at the wafer transfer position and moves those wafers through the wafer transfer opening to a wafer boat in order to apply processing in a process chamber. After the aforementioned wafer processing, the wafer handler may also return the wafers to the wafer cassette at the wafer transfer position. Subsequently, the cassette handler can move the wafer cassette to the cassette storage box and exchange it with another wafer cassette from the cassette storage box.

Summary of the Invention

Problems to be Solved by the Invention

[0003] This "Summary of the Invention" is provided to introduce selected concepts in a simplified form. These concepts are further described in more detail in the "Modes for Carrying Out the Invention" of the exemplary embodiments of the present disclosure below. This Summary of the Invention is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0004] It can be understood that, typically, multiple wafer cassettes must be unloaded to fill an entire wafer boat, and while the wafer cassettes are being moved to and from the wafer movement position, the wafer handler may be unable to move the wafers and remain idle. Furthermore, while the wafer handler is moving the wafers to and from the cassettes at the wafer movement position, the cassette handler may be unable to move the wafer cassettes to or from the wafer movement position and remain idle. These idle times can negatively impact the efficiency of vertical batch furnace assemblies.

[0005] Therefore, the objective may be to provide a vertical batch furnace assembly with improved capabilities. [Means for solving the problem]

[0006] To that end, a vertical batch furnace assembly as described in claim 1 may be provided. More specifically, a vertical batch furnace assembly for processing wafers may be provided. The vertical batch furnace assembly may include a cassette handling space, a wafer handling space, and a first wall separating the cassette handling space from the wafer handling space. The first wall may have at least one wafer moving opening in front of it, and wafer moving positions for wafer cassettes are provided on the side of the first wall facing the cassette handling space. The cassette handling space may comprise a cassette storage box and a cassette handler. The cassette storage box may have a plurality of cassette storage positions, each configured to store a wafer cassette comprising a plurality of wafers. The cassette handler may be configured to move a wafer cassette between the cassette storage positions and the wafer moving positions. The cassette handler may comprise a first cassette handler arm and a second cassette handler arm.

[0007] For the purpose of summarizing the advantages achieved beyond the present invention and the prior art, specific purposes and advantages of the present invention are described above herein. Naturally, it should be understood that not all of these purposes or advantages are necessarily achieved by any particular embodiment of the present invention. Therefore, those skilled in the art will recognize that the present invention may be embodied or practiced in a manner that achieves or optimizes one or a group of advantages, for example, as taught or suggested herein, without necessarily achieving other purposes or advantages as may be taught or suggested herein.

[0008] Various embodiments are claimed in the dependent claims, which will be further illustrated with reference to the examples shown in the figures. The embodiments may be applied in combination or separately from each other.

[0009] All of these embodiments are intended to be within the scope of the invention disclosed herein. These and other embodiments will be readily apparent to those skilled in the art from the following “Modes for Carrying Out the Invention” of specific embodiments with reference to the accompanying drawings, and the invention is not limited to any specific embodiment disclosed.

[0010] While this specification specifically points out embodiments of the present invention and concludes with the explicitly claimed claims, the advantages of the embodiments of this disclosure may be more readily apparent from the description of certain embodiments of the embodiments of this disclosure, when read in conjunction with the accompanying drawings. [Brief explanation of the drawing]

[0011] [Figure 1] An example of related parts for a vertical batch furnace assembly is shown in the description. [Figure 2] An example of a cassette handler arm is shown in the description. [Figure 3] Figure 1 shows an example where the cassette handler arm moves the cassette. [Figure 4] Another example of a vertical batch furnace assembly is schematically shown below. [Modes for carrying out the invention]

[0012] In this application, similar or corresponding forms are indicated by similar or corresponding reference numerals. The description of various embodiments is not limited to the examples shown in the figures, and the reference numerals used in the embodiments and claims for carrying out the invention are not intended to limit the description of embodiments but are included for the clear understanding of the embodiments.

[0013] Certain embodiments and examples are disclosed below, but it will be understood by those skilled in the art that they extend beyond the embodiments and / or uses of the present invention specifically disclosed herein, as well as their obvious modifications and equivalents. Therefore, the scope of the disclosed invention is not intended to be limited by the specific embodiments described below. The figures shown herein are not meant to be actual diagrams of any particular material, structure, or apparatus, but are merely idealized representations used to illustrate embodiments of this disclosure.

[0014] As used herein, the term “wafer” may refer to any or more underlying materials on which devices, circuits, or films may be formed.

[0015] Most commonly, the present disclosure may provide a vertical batch furnace assembly 10 for processing wafers. Examples of relevant components of the vertical batch furnace assembly 10 are shown in Figures 1, 3, and 4, which are referenced below, but these are non-limiting examples. The vertical batch furnace assembly 10 may comprise a cassette handling space 12, a wafer handling space 14, and a first wall 16 separating the cassette handling space 12 from the wafer handling space 14. The first wall 16 may have at least one wafer moving opening 20 in front of it, and wafer moving positions 22 for wafer cassettes 60 are provided on the side of the first wall 16 facing the cassette handling space 12. The cassette handling space 12 may comprise a cassette storage box and cassette handlers 26, 28, 30. The cassette storage box may have a plurality of cassette storage positions 24, each configured to store a wafer cassette 60, each containing a plurality of wafers. Cassette handlers 26, 28, and 30 may be configured to move a wafer cassette 60 between a cassette storage position 24 and a wafer moving position 22. Cassette handlers 26, 28, and 30 may comprise a first cassette handler arm 28 and a second cassette handler arm 30. In one embodiment, cassette handlers 26, 28, and 30 may further comprise an elevator mechanism configured to reach wafer cassettes placed on cassette storage positions at different vertical heights within the cassette handling space.

[0016] When the first wafer cassette 60 is at the wafer moving position 22, a wafer handler (not shown) may load wafers into or remove wafers from the first wafer cassette 60, for example, by transferring wafers to a wafer boat, where wafers may be mounted during processing in the process chamber of the vertical batch furnace. In the vertical batch furnace assembly 10 described herein, which includes cassette handlers 26, 28, 30 having first and second cassette handler arms 28, 30, the cassette handlers 26, 28, 30 may obtain the second wafer cassette 60 already from the cassette storage box and move it to a position near the wafer moving position 22 while the wafer handler is loading or removing wafers from the first wafer cassette 60. The cassette handlers 26, 28, 30 may hold the second wafer cassette 60 using one of the first and second cassette handler arms 28, 30, while the other cassette handler arm 28, 30 is not in use. As soon as the wafer handler is ready to load / unload the first wafer cassette 60, the cassette handlers 26, 28, and 30 may remove the first wafer cassette 60 from the wafer moving position 22 with the unused cassette handler arms 28 and 30, and then immediately place the second wafer cassette 60 at the wafer moving position 22 with the other cassette handler arms 28 and 30. The cassette handlers 26, 28, and 30 do not need to move the first wafer cassette 60 to the cassette storage position 24 and the second wafer cassette 60 from another cassette storage position 24 to the wafer moving position 22, thus reducing the travel path and saving time that the wafer handler would otherwise have to remain idle.

[0017] In one embodiment, the cassette handlers 26, 28, and 30 may further comprise a movable carriage 26 that is movable in a first direction 32. Both the first cassette handler arm 28 and the second cassette handler arm 30 may be connected to the movable carriage 26 at their respective first ends.

[0018] Due to the fact that a single carriage 26 can carry both cassette handler arms 28, 30, only one drive may be required to move both arms along the first direction.

[0019] In one embodiment, the first cassette handler arm 28 and the second cassette handler arm 30 may each have a second end, and each arm 28, 30 may be configured to move its second end away from its first end and toward its first end.

[0020] These embodiments allow the cassette handler arms 28 and 30 to extend and retract.

[0021] Further details may be provided, wherefore, both the first and second cassette handler arms 28, 30 may be pivotably connected at or near their first end to the movable carriage 26 of the cassette handlers 26, 28, 30. Each cassette handler arm 28, 30 may include a cassette gripper 34 configured to grasp a wafer cassette 60 at or near its second end. The cassette gripper 34 of the first cassette handler arm 28 may be pivotably connected to the first cassette handler arm 28. The cassette gripper 34 of the second cassette handler arm 30 may be pivotably connected to the second cassette handler arm 30.

[0022] The movable carriage 26 provides a base for the simultaneous movement of two cassette handler arms 28 and 30. When mounted on the movable carriage 26, both arms 28 and 30 can move together with the movable carriage 26. In this way, both arms may be near the wafer moving position 22, or both may be near the cassette storage position 24.

[0023] In one embodiment, the first direction may be substantially vertical, and the cassette handlers 26, 28, 30 may further include an elevator mechanism configured to move the movable carriage 26 up and down so that the first and second cassette handler arms 28, 30 can reach wafer cassettes disposed at different vertical levels in the cassette handling space.

[0024] In this embodiment, movement in a plane perpendicular to the first direction 32 can be performed by the cassette handler arms 28, 30 themselves, such as being pivotally connected to the movable carriage 26. Alternatively, the guide 36, to which the movable carriage 26 can be mounted for movement along the first direction, can be rotatable about an axis extending in the first direction. Also, the movable carriage 26 can be rotatable about the guide 36 along an axis extending in the first direction. The same guide 36 can also function as a guide 36 for the movement of the movable carriage 26 along the first direction.

[0025] In one embodiment, the elevator mechanism 36, 38, 40 may include at least one first direction guide 36, 38 extending in the first direction 32. The movable carriage 26 can be movably mounted on the at least one first direction guide 36, 38 and can be movable along the first direction 32. Thus, the at least one first direction guide 36, 38 provides the movement of the movable carriage 26 in the first direction 32.

[0026] In one embodiment, an example of which is shown in FIGS. 1 and 3, the movable carriage 26 is further movable in a second direction 42 perpendicular to the first direction 32. For that purpose, the elevator mechanisms 36, 38, 40 may comprise at least one first direction guide 36, 38 extending in the first direction 32 and a lateral guide 40 extending in the second direction 42. The movable carriage 26 may be movably mounted on the lateral guide 40 and may be movable along the second direction 42. The lateral guide 40 may be movably mounted on at least one first direction guide 36, 38 and may be movable along the first direction 32. The at least one first direction guide 36, 38 may comprise a first guide 36 and a second guide 38. The lateral guide 40 may be mounted between the aforementioned first guide 36 and the aforementioned second guide 38. The at least one first direction guide 36, 38 and the lateral guide 40 thus together provide movement along the first direction 32 and the second direction 42. Such a configuration is extremely stable and the carriage 26 may move relatively fast in a plane of movement parallel to the first and second directions.

[0027] In one embodiment where the carriage 26 is movable only along the first direction, an example of which is shown in FIG. 4, the cassette storage position 24 may be located at an equal distance from the movement line 62 along which the movable carriage 26 is movable in the first direction. The wafer transfer position 22 may be positioned at substantially the same distance from the cassette storage position 24 and the movement line 62. In such a configuration, the cassette storage position 24 may be positioned at a different vertical level on a circle or circular segment around the movement line 62.

[0028] In one embodiment, as shown in Figures 1 and 3, the carriage 26 is movable along a first and second direction perpendicular to each other, and the cassette storage position 24 may be located at an equal distance from the moving plane 44 of the movable carriage 26. The plane 44 may be parallel to the first and second directions. The cassette storage position 24 may be on the first side of the plane 44 and / or on the second side of the plane 44 opposite the first side. The wafer moving position 22 may be located on either the first or second side of the plane 44, at substantially the same distance from the cassette storage position 24.

[0029] In this embodiment, the fact that the cassette storage position 24 and the wafer movement position 22 can be at equal distances from the plane 44 means that the cassette handler arms 28 and 30 only need to have a single range of motion so that they can reach all of the cassette storage position 24 and the wafer movement position 22. This means that a simpler design may suffice for these arms. For example, a design with three pivot points may suffice for the cassette handler arms 28 and 30. Therefore, the cassette handler arms 28 and 30 and their control may be relatively simple.

[0030] In one embodiment, an example of which is shown in Figure 2, both the first cassette handler arm 28 and the second cassette handler arm 30 may comprise first and second arm portions 46, 48 and a pivot joint 50 that pivotally connects the aforementioned first and second arm portions 46, 48. The first arm portion 46 may be pivotably connected to a movable carriage 26 along a pivot joint 64. The second arm portion 48 may be pivotably connected to a cassette gripper 34 along a pivot joint 66. In this way, both the cassette handler arms 28, 30 can pivot around their joints 64, 50, and 66, thereby reducing or increasing the distance between the ends of each cassette handler arm 28, 30. Thus, the grasped wafer cassette 60 can be moved toward or away from the movable carriage 26. The wafer cassette 60 is moved away from the movable carriage 26, and the aforementioned wafer cassette 60 can be placed in or removed from the wafer moving position 22, or placed on or removed from the cassette storage position 24. The gripper 34, which contains the wafer cassette 60, can be moved toward the movable carriage 26 when movement of the movable carriage 26 is desired in a first direction and optionally in second directions 32, 42.

[0031] In one embodiment, the wafer cassette 60 may be embodied as a FOUP. The FOUP is a standard wafer cassette 60 for wafers in the industry. The use of the FOUP is advantageous for the interchangeability of wafer cassettes 60 between the vertical batch furnace assembly 10 and other wafer processing machines.

[0032] In one embodiment, which is shown in Figures 1 and 3, the first cassette handler arm 28 and the second cassette handler arm 30 may be arranged horizontally next to each other.

[0033] In one embodiment, shown in Figure 4, the first cassette handler arm 28 and the second cassette handler arm 30 may be positioned perpendicular to each other. Alternatively, the first cassette handler arm 28 and the second cassette handler arm 30 may be positioned horizontally adjacent to each other, or perpendicular to each other, but in other orientations, such as diagonally opposite each other. The optimal configuration for a particular vertical bath assembly may depend on the configuration of the cassette handling space 12.

[0034] In one embodiment, the vertical batch furnace assembly 10 may further include at least one cassette inlet / outlet port 52 provided in walls 16, 18 that mark the boundary of the cassette handling space 12. Cassette handlers 26, 28, 30 may be configured to further move wafer cassettes 60 to or from at least one cassette inlet / outlet port 52. At least one cassette inlet / outlet port 52 may be provided in a second wall 18 that partitions the cassette handling space 12, opposite the first wall 16.

[0035] At least one cassette inlet / outlet port 52 may provide an inlet to and an outlet from the vertical batch furnace assembly 10 for the exchange of wafer cassettes 60 between the vertical batch furnace assembly 10 and the outside world, particularly the cleanroom environment.

[0036] In one embodiment, the vertical batch furnace assembly 10 may include a cassette door opener device 54 for each wafer moving opening 20. The cassette door opener device 54 may be configured to open the cassette door of a wafer cassette 60 that was placed in a wafer moving position 22.

[0037] In one embodiment, the vertical batch furnace assembly 10 may further comprise a wafer handler, a process chamber, and a wafer boat handling device. The wafer handler may be located within the wafer handling space 14 and may be configured to move wafers between a wafer cassette 60 at a wafer moving position 22 and a wafer boat. The process chamber may be configured to process wafers housed in the wafer boat. The wafer boat handling device may be located below the process chamber and adjacent to the wafer handling space 14. The wafer boat handling device may comprise a wafer boat at a wafer boat moving position and may be configured to move wafers between the wafer boat moving position and the process chamber.

[0038] While exemplary embodiments of the present invention have been described above with partial reference to the accompanying drawings, it should be understood that the present invention is not limited to these embodiments. Variations of the embodiments of this disclosure can be understood and achieved by those skilled in the art who practice the claimed invention from a review of the drawings, disclosure, and the accompanying claims.

[0039] Throughout this specification, any reference to “one embodiment” or “an embodiment” means that a particular feature, structure, or characteristic described in relation to an embodiment is included in at least one embodiment of the present invention. Therefore, the use of the phrase “in one embodiment” or “in an embodiment” in various places throughout this description does not necessarily refer to the same embodiment.

[0040] Furthermore, it should be noted that one or more specific features, structures, or characteristics of the various embodiments described above may be used and practiced independently of each other, and may be combined in any suitable manner to form new embodiments not expressly described. The reference numbers used in the embodiments for carrying out the invention and in the claims do not limit the description of the embodiments or the claims. The reference numbers are used for clarity only. [Explanation of Symbols]

[0041] 10-Vertical batch furnace assemblies 12-Cassette Handling Space 14. Wafer Handling Space 16 - The First Wall 18 - The Second Wall 20-Wafer moving aperture 22-Wafer movement position 24-Cassette Storage Location 26-Movable Carriage 28 - First Cassette Handler Arm 30 - Second Cassette Handler Arm 32-First Direction 34-Cassette Gripper 36 - The First Guide 38 - The Second Guide 40 - Horizontal Guide 42-Second Direction 44-plane 46 - First arm section 48 - Second arm section 50 joints 52-Cassette Input / Output Ports 54-Cassette Door Opener Device 60-wafer cassette 62-Movement Line 64. Pivot Joints 66 - Pivot joints

Claims

1. A vertical batch furnace assembly (10) for processing wafers, comprising: a cassette handling space (12); a wafer handling space (14); a first wall separating the cassette handling space (12) from the wafer handling space (14) and having at least one wafer transfer opening (20), and a wafer transfer position (22) for a wafer cassette (60) being provided on a side of the first wall facing the cassette handling space (12) in front of the at least one wafer transfer opening (20); wherein the cassette handling space (12) comprises: a cassette storage box having a plurality of cassette storage positions (24) configured to store a wafer cassette (60) containing a plurality of wafers; a cassette handler (26, 28, 30) configured to move the wafer cassette (60) between the cassette storage position (24) and the wafer transfer position (22); wherein the cassette handler (26, 28, 30) comprises: a first cassette handler arm (28); a second cassette handler arm (30); the cassette handler (26, 28, 30) further comprising a movable carriage (26) movable in a first direction (32), both the first cassette handler arm (28) and the second cassette handler arm (30) being connected to the movable carriage (26) at a first end; the first direction being substantially vertical, and the cassette handler (26, 28, 30) further comprising an elevator mechanism (36, 38, 40) configured to move the movable carriage (26) up and down so that the first cassette handler arm (28) and the second cassette handler arm (30) can reach wafer cassettes placed at different vertical levels in the cassette handling space at cassette storage positions; the movable carriage (26) being further movable in a second direction (42) perpendicular to the first direction (32); The elevator mechanism (36, 38, 40) includes at least one first-direction guide (36, 38) extending in the first direction (32) and a lateral guide (40) extending in the second direction (42). The movable carriage (26) is movably mounted on the lateral guide (40) and is movable along the second direction (42). The lateral guide (40) is movably mounted on the at least one first-direction guide (36, 38) and is movable along the first direction (32). A vertical batch furnace assembly.

2. The first cassette handler arm (28) and the second cassette handler arm (30) each have a second end, and each cassette handler arm (28, 30) is configured to move the second end away from the first end and towards the first end. The vertical batch furnace assembly according to claim 1.

3. Both the first cassette handler arm (28) and the second cassette handler arm (30) are pivotally connected to the movable carriage (26) of the cassette handler (26, 28, 30) at or near the first end. Each cassette handler arm (28, 30) is provided with a cassette gripper (34) configured to grip a wafer cassette (60) at or near the second end. The vertical batch furnace assembly according to claim 2.

4. The cassette gripper (34) of the first cassette handler arm (28) is pivotally connected to the first cassette handler arm (28), and the cassette gripper (34) of the second cassette handler arm (30) is pivotally connected to the second cassette handler arm (30). The vertical batch furnace assembly according to claim 3.

5. The at least one first-direction guide (36, 38) includes a first guide (36) and a second guide (38), and the lateral guide (40) is mounted between the first guide (36) and the second guide (38). The vertical batch furnace assembly according to any one of claims 1 to 4.

6. The cassette storage position (24) is located at an equal distance from the moving line (62), the movable carriage (26) is movable in the first direction along the moving line (62), and the wafer transfer position (22) is located at a substantially equal distance from the cassette storage position (24) and the moving line (62). The vertical batch furnace assembly according to any one of claims 1 to 5.

7. The cassette storage position (24) is located at an equal distance from the moving plane (44) of the movable carriage (26) whose plane (44) is parallel to the first and second directions, and the cassette storage position (24) is located on the first side of the plane (44) and / or the second side of the plane (44) on the opposite side of the first side, and the wafer transfer position (22) is located on either the first side or the second side of the plane (44) at a distance from the cassette storage position (24) on substantially the same plane (44). The vertical batch furnace assembly according to any one of claims 1 to 6.

8. Both the first cassette handler arm (28) and the second cassette handler arm (30) include a first arm portion (46) and a second arm portion (48), and a pivot joint (50) that pivotally connects the first arm portion (46) and the second arm portion (48). The first arm portion (46) is pivotally connected to the movable carriage (26) along a pivot joint (64), and the second arm portion (48) is pivotally connected to the cassette gripper (34) along a pivot joint (66). The vertical batch furnace assembly according to any one of claims 1 to 7.

9. The wafer cassette (60) is embodied as a front opening unified pod (FOUP). The vertical batch furnace assembly according to any one of claims 1 to 8.

10. The first cassette handler arm (28) and the second cassette handler arm (30) are horizontally arranged adjacent to each other. The vertical batch furnace assembly according to any one of claims 1 to 9.

11. The first cassette handler arm (28) and the second cassette handler arm (30) are vertically arranged with respect to each other. The vertical batch furnace assembly according to any one of claims 1 to 10.

12. It further includes at least one cassette access port (52) provided in a wall (18) partitioning the cassette handling space (12), and the cassette handlers (26, 28, 30) are configured to move a wafer cassette (60) to and from the at least one cassette access port (52). The vertical batch furnace assembly according to any one of claims 1 to 11.

13. The vertical batch furnace assembly according to claim 12, wherein the at least one cassette access port (52) is provided in a second wall (18) partitioning the cassette handling space (12) on the opposite side of the first wall.

14. The vertical batch furnace assembly according to any one of claims 1 to 13, wherein the vertical batch furnace assembly (10) includes a cassette door opener device (54) configured to open a cassette door of a wafer cassette (60) placed at the wafer transfer position (22) at each wafer transfer opening (20).

15. The vertical batch furnace assembly (10) is provided in the wafer handling space (14) and is configured to move wafers between a wafer cassette (60) located at the wafer transfer position (22) and a wafer boat, and a wafer handler; a process chamber configured to process wafers housed in the wafer boat; and further includes a wafer boat handling device positioned under the process chamber and adjacent to the wafer handling space (14), The vertical batch furnace assembly according to any one of claims 1 to 14, wherein the wafer boat handling device includes the wafer boat at a wafer boat transfer position and is configured to move the wafer boat between the wafer boat transfer position and the process chamber.

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