Liquid discharge head and liquid discharge device

Abstract

To improve structural reliability of a liquid discharge head.SOLUTION: A liquid discharge head 1K includes: a first substrate 220; and a second substrate 230. The first substrate 220 has a discharge port 3, a liquid chamber, and an energy generating element. The second substrate 230 is joined to a second surface 202a on an opposite side of a first surface 201a of the first substrate. The first substrate 220 has a projection region 210 projecting in a plane direction orthogonal to a first axis direction (z-axis direction) from an end of the second substrate 230. A terminal 10 to be electrically connected to the energy generating element is provided on the second surface 202a of the projection region 210. A support member 401 is joined to the first surface 201a of the first substrate 220. The support member 401 has an opening 402 at a position opposed to a formation region of the discharge port 3. The support member 401 is fixed to a frame 403.SELECTED DRAWING: Figure 6

Description

Technical Field

[0005]

[0001] The present disclosure relates to a liquid ejection head that ejects liquid from ejection ports, and a liquid ejection device.

Background Art

[0002] In a liquid ejection device that ejects liquid to form an image, in order to achieve a higher resolution of the image to be formed, a plurality of ejection ports provided in the liquid ejection head and energy generating elements that eject liquid from the ejection ports are arranged at high density on a substrate. When power is supplied to each energy generating element arranged at such high density via electrical wiring formed at high density on the substrate, ion migration may occur in the electrical wiring portion, and there is a risk that the electrical reliability of the liquid ejection device will decrease.

[0003] <00′00012>In order to avoid such problems, in the liquid ejection head shown in Patent Document 1, a configuration is disclosed in which a plurality of terminals for electrical connection are arranged at both ends of the chip, and power is supplied via wires bonded to each terminal. In the liquid ejection head disclosed in Patent Document 1, the portion where the terminals are arranged is configured in a eaves shape in order to expose the terminals for electrical connection on the substrate.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] It is known that the liquid discharge performance of a liquid discharge head can be improved by making the discharge port and the flow path (liquid chamber) near the discharge port thinner. However, thinning the flow path leads to thinning of the substrate on which the terminals are located. For this reason, in a configuration such as Patent Document 1, where the terminals are placed on a canopy-like portion formed by a substrate protruding from both ends of the liquid discharge tip, the thinning of the substrate makes the canopy-like portion prone to damage, resulting in a problem of reduced structural reliability of the liquid discharge head.

[0006] This disclosure aims to provide a technology that can improve the structural reliability of a liquid dispensing head. [Means for solving the problem]

[0007] This disclosure provides a liquid discharge head comprising: a first substrate having a discharge port that enables the discharge of liquid along a first axis, a liquid chamber communicating with the discharge port, and an energy generating element that generates energy to discharge the liquid in the liquid chamber from the discharge port; and a second substrate joined to a second surface of the first substrate opposite to the first surface on which the discharge port is formed, wherein the first substrate includes a protruding region that protrudes from the end of the second substrate in a planar direction perpendicular to the first axis, and a terminal electrically connected to the energy generating element is provided on the second surface of the protruding region, and the liquid discharge head comprises a support member joined to the first surface of the first substrate and having an opening at a position opposite to the discharge port formation region, and a frame to which the support member is fixed. [Effects of the Invention]

[0008] This disclosure makes it possible to improve the structural reliability of the liquid dispensing head. [Brief explanation of the drawing]

[0009] [Figure 1] A schematic perspective view showing an example of an inkjet recording device. [Figure 2] External perspective view showing the configuration of the head module. [Figure 3]A diagram showing the double-sided structure of a liquid dispensing tip. [Figure 4] A diagram showing the internal structure of a liquid dispensing tip. [Figure 5] This is a perspective view of a portion of the liquid discharge tip, seen from the opening side of the connecting channel. [Figure 6] A cross-sectional view showing the peripheral configuration of the liquid dispensing tip in the first embodiment. [Figure 7] Plan and bottom views showing a portion of the head module. [Figure 8] A cross-sectional view showing another example of the peripheral configuration of the liquid dispensing tip in the first embodiment. [Figure 9] A cross-sectional view showing the peripheral configuration of the liquid dispensing tip in the second embodiment. [Figure 10] A cross-sectional view showing the peripheral configuration of the liquid dispensing tip in the third embodiment. [Modes for carrying out the invention]

[0010] Hereinafter, the liquid ejection head and liquid ejection device according to this disclosure will be described in detail based on embodiments with reference to the drawings. In each of the following embodiments, an inkjet recording head and inkjet recording device that eject ink will be used as examples of the liquid ejection head and liquid ejection device, but this disclosure is not limited thereto. The liquid ejection head and liquid ejection device according to this disclosure can be applied to devices such as printers, copiers, facsimile machines with communication systems, word processors with printer units, and industrial recording devices that are combined with various processing devices. For example, they can be used for applications such as the production of biochips and the printing of electronic circuits.

[0011] Furthermore, the embodiments described below illustrate specific examples of the present disclosure and include various technically preferred characteristic elements. However, these embodiments do not limit the scope of the claims of the present disclosure, and not all combinations of characteristic elements shown in these embodiments are necessarily essential to the solutions of the present disclosure.

[0012] [First Embodiment] (Liquid discharge device) Figure 1 is a schematic perspective view showing an example of an inkjet recording apparatus (hereinafter simply referred to as "recording apparatus") 101 as a liquid ejection device according to this disclosure. The recording apparatus 101 shown in Figure 1 is a so-called full-line type recording apparatus that records an image by continuously transporting a recording medium 111 in the y-axis direction by a transport means 110 and ejecting ink (liquid) from a recording unit (liquid ejection unit) 1 located at a fixed position. The y, x, and z axes shown in each drawing referred to in the following description represent the coordinate axes in the liquid ejection apparatus, with the z axis representing the first axis, the y axis representing the second axis, and z representing the third axis. Each axis is orthogonal to the others. The z axis direction (first axis direction) indicates the direction of ink ejection by the liquid ejection unit 1, the y axis direction (second axis direction) indicates the transport direction of the recording medium, and the x axis direction (third axis direction) indicates the arrangement direction of the ejection ports in the liquid.

[0013] The liquid ejection unit 1 has a configuration in which liquid ejection heads (recording heads), each having ejection ports (also called nozzles) capable of ejecting ink, are arranged across the entire width of the recording medium 111, and these heads are positioned along the transport direction (y-axis direction) of the recording medium for each of the multiple ink colors. The recording device 101 in this embodiment is capable of forming a full-color image by ejecting four inks: black (K), yellow (Y), magenta (M), and cyan (C). Accordingly, the liquid ejection unit 1 includes a liquid ejection head 1K for ejecting black ink, a liquid ejection head 1Y for ejecting yellow ink, a liquid ejection head 1M for ejecting magenta ink, and a liquid ejection head 1C for ejecting cyan ink.

[0014] The liquid dispensing heads corresponding to the dispensing of each ink color shown in Figure 1 each have a configuration that combines two head modules. For example, the head module 1K for dispensing black ink has a configuration in which head module 1Ka and head module 1Kb are arranged along the x-axis direction (third axis direction) perpendicular to the transport direction (y-axis direction). Head module 1Ka and head module 1Kb have the same configuration. The same applies to the dispensing modules corresponding to the dispensing of other ink colors.

[0015] (Configuration of the head module) FIG. 2 is an external perspective view showing the configuration of a head module used in the liquid ejection head in the present embodiment. The head module shown in FIG. 2 shows one of the two head modules provided for each of the recording heads 1K, 1Y, 1M, and 1C shown in FIG. 1. Here, as an example, the head module 1Ka used for the recording head (liquid ejection head) 1K is shown, but the head modules provided for the other recording heads 1Y, 1M, and 1C have the same configuration.

[0016] In the head module 1Ka, a plurality of liquid ejection chips 2 are arranged on one surface (the upper surface in FIG. 2) of the head body 4. In this example, four liquid ejection chips 2 are arranged in a staggered pattern along the x-axis direction. Each liquid ejection chip 2 has a discharge port surface (first surface) 201a on which a plurality of discharge ports 3 for discharging ink are formed. The ink discharged from the discharge ports 3 is supplied to the liquid ejection chip 2 from an ink tank (not shown) through a common supply port (not shown) of the head body 4. The liquid ejection chip 2 is supported by a frame 403 provided on one surface of the head body 4 and a support member 401. The support structure of the liquid ejection chip 2 by the frame 403 and the support member 401 will be described in detail later.

[0017] (Double-sided structure of the liquid ejection chip) FIG. 3 is a view showing the double-sided structure of the liquid ejection chip 2 shown in FIG. 2. FIG. 3(a) is a plan view seen from the first surface side (discharge port surface 201a side) of the liquid ejection chip 2, and FIG. 3(b) is a view seen from the surface 204a side opposite to the discharge port surface 201a of the liquid ejection chip 2.

[0018] In FIG. 3(a), the discharge port surface 201a of the liquid ejection chip 2 is formed on a nozzle substrate 201. A plurality of discharge ports 3 for discharging ink are arranged on the nozzle substrate 201 along the longitudinal direction (x-axis direction) of the nozzle substrate 201, constituting a discharge port row. In this example, a plurality of discharge port rows are arranged side by side in the y-axis direction.

[0019] Multiple substrates, described later, are stacked on the nozzle substrate 201 of the liquid ejection tip 2. The surface 204a (Figure 3(b)) opposite to the ejection port surface 201a of the liquid ejection tip 2 is formed by a channel-forming substrate 204, described later. A connecting channel 15 for supplying and recovering ink to and from the liquid ejection tip 2 is formed on the channel-forming substrate 204. The connecting channel 15 communicates with a common supply port (not shown) formed in the head body 4, and the common supply port is connected to an ink tank (not shown). As a result, ink supplied from the ink tank is supplied into the liquid ejection tip 2 via the connecting channel 15.

[0020] Furthermore, as shown in Figure 3(b), the liquid ejection tip 2 has multiple terminals 10. These terminals 10 are located at both ends of the liquid ejection tip 2 to reduce the density of wiring (not shown) inside the liquid ejection tip 2. The aforementioned print head body 4 has an electrical circuit board that supplies the power and signals necessary to eject ink from the ejection port 3, and this electrical circuit board and the terminals 10 are electrically connected.

[0021] (Internal structure of the liquid dispensing tip) Figure 4 shows the internal structure of the liquid discharge tip 2. Figure 4(a) is a cross-sectional perspective view showing a cross-section cut along line BB in Figure 3, and Figure 4(b) is a partially enlarged view of Figure 4(a). As shown in Figure 4(a), the liquid discharge tip 2 has a structure in which a nozzle substrate 201, a liquid chamber substrate 202, a liquid supply substrate 203, a damper substrate 302, and a flow path forming substrate 204 are sequentially stacked. In this embodiment, the first substrate 220 is composed of a stacked substrate including the nozzle substrate 201 and the liquid chamber substrate 202, and the second substrate 230 is composed of a stacked substrate including the liquid supply substrate 203 and the flow path forming substrate 204.

[0022] Figure 4(b) is an enlarged perspective view showing a portion of Figure 4(a). Between the nozzle substrate 201, which has multiple discharge ports 3 formed thereon, and the liquid chamber substrate 202 joined to the nozzle substrate 201, multiple liquid chambers 5 are formed, each communicating with one of the multiple discharge ports 3. Each of the multiple liquid chambers 5 is provided with a deformable wall portion of a diaphragm 212, which is part of the liquid chamber substrate 202. The liquid chambers 5 form a flow path that communicates with the discharge ports 3. In order to exhibit high discharge and circulation performance, it is preferable that this flow path is a thinned flow path with a dimension (hereinafter referred to as thickness) of 200 μm or less in the ink discharge direction (z-axis direction). The diaphragm 212 is equipped with multiple energy generating elements 6 corresponding to each of the multiple liquid chambers. The energy generating elements 6 pressurize the ink in the liquid chamber 5 by deforming the diaphragm 212, and can discharge the ink from the discharge ports 3.

[0023] On the liquid chamber substrate 202, a liquid supply substrate 203 is bonded to the side (second surface) 202a located opposite to the side bonded to the nozzle substrate 201. The liquid supply substrate 203 has multiple individual supply channels 7 and multiple individual recovery channels 8 that communicate with each of the multiple liquid chambers 5. A portion of the liquid supplied to the liquid chamber 5 from the individual supply channels 7 is discharged from the discharge port 3 by the drive of the energy generating element 6, and the remaining liquid flows to the individual recovery channels 8. If the energy generating element 6 is not driven, all of the liquid supplied to the liquid chamber 5 flows to the individual recovery channels 8.

[0024] Each of the multiple individual supply channels 7 communicates with a common supply passage 17 formed by a damper substrate 302. One side of the damper member 300 provided on the damper substrate 302 (the upper surface in Figure 4(a)) faces the individual supply channel 7. Furthermore, the other side of the damper member 300 (the lower surface in Figure 4(a)) faces a damper region 301 formed by a recess in the channel forming substrate 204. The common supply passage 17 communicates with a common supply channel 27 formed in the channel forming substrate 204. The common supply channel 27 communicates with a connecting channel 15 (see Figure 3) formed in the channel forming substrate 204, and ink supplied from an externally located ink tank (not shown) is supplied to the common supply channel 27 via this connecting channel 15.

[0025] Furthermore, each of the multiple individual recovery channels 8 communicates with a common recovery communication channel 18 formed by a damper substrate 302. One side of the damper member 300 provided on the damper substrate 302 (the upper side in Figure 4(b)) faces the individual recovery channel 8. In addition, the other side of the damper member 300 (the lower side in Figure 4(b)) faces the damper region 301 formed by a recess in the channel forming substrate 204. The common recovery channel 28 communicates with a connecting channel 15 formed in the channel forming substrate 204, and ink flowing into the common recovery channel 28 is recovered to an externally provided ink tank via the connecting channel 15.

[0026] The nozzle substrate 201, liquid chamber substrate 202, liquid supply substrate 203, and flow path forming substrate 204 described above can each be formed from a silicon substrate or the like. While these substrates are formed from individual substrates in this embodiment, the invention is not limited to this, and it is also possible to form each substrate as a single unit. Furthermore, the damper member 300 is formed from an elastic material. As the elastic material, for example, a resin material such as polyimide or polyamide can be used.

[0027] The arrows in Figure 4(b) indicate the flow of ink in the liquid ejection tip 2 configured as described above. Specifically, ink flowing from an external ink tank into the common supply channel 27 via the connecting channel 15 flows into the individual supply channel 7 via the common supply linkage 17 and is supplied to the liquid chamber 5. A portion of the ink supplied to the liquid chamber 5 is ejected from the ejection port 3 by the drive of the energy generating element 6, and the remaining liquid flows into the individual recovery channel 8. If the energy generating element 6 is not driven, all of the liquid supplied to the liquid chamber 5 flows into the individual recovery channel 8. The ink that flows into the individual recovery channel 8 flows into the common recovery channel 28 via the common recovery linkage 18, and is then recovered to the external ink tank via the connecting channel 15.

[0028] (Structure of the electrical connection part of the liquid dispensing tip) Next, the structure of the electrical connection part of the liquid discharge tip in this embodiment will be described with reference to Figures 5 to 8.

[0029] Figure 5 is a perspective view of a portion of the liquid discharge tip 2, seen from the opening side of the connecting channel 15 formed in the channel forming substrate 204.

[0030] The nozzle substrate (discharge port substrate) 201 and the liquid chamber substrate 202, which form part of the liquid discharge tip 2, have the same shape in a planar direction perpendicular to the ink discharge direction (z-axis direction), and their respective ends are joined so that they coincide in the planar direction. The nozzle substrate 201 and the liquid chamber substrate 202 constitute the first substrate 220, which includes the discharge port 3, liquid chamber 5, diaphragm 212, and energy generating element 6, as shown in Figure 4.

[0031] The first substrate 220 is bonded to one side of the liquid supply substrate 203 (the lower side in Figure 5). In this embodiment, the liquid supply substrate 203 is formed in such a dimensional shape that at least a portion of the area around the edge of the first substrate 220 is exposed. That is, in the planar direction, the dimensions of the liquid supply substrate 203 in at least one direction are smaller than those of the first substrate 220. For example, in the liquid discharge tip 2 shown in Figure 5(a), both the liquid supply substrate 203 and the first substrate 220 are rectangular in shape, and the dimensions of the liquid supply substrate 203 in the y-axis direction parallel to the planar direction are smaller than the dimensions of the first substrate in the y-axis direction. Therefore, the area around the edge of the first substrate 220 in the y-axis direction becomes a protruding region 210 that protrudes in an overhang shape from two opposing sides of the liquid supply substrate 203 and is exposed to the outside. Hereinafter, this protruding region 210 will also be referred to as the overhang portion 210.

[0032] Furthermore, as shown in Figure 5(b), it is also possible to configure the peripheral regions of the ends of the first substrate 220 in the y-axis and x-axis directions to form protruding regions (overhang portions) 210 that protrude in an overhang shape from three or more sides of the liquid supply substrate 203. Multiple terminals 10 that constitute the electrical connection between the energy generating element 6 provided on the liquid chamber substrate 202 and the outside are arranged in the overhang portion 210. The total thickness of the nozzle substrate 201 and the liquid chamber substrate 202 that constitute the first substrate 220 is preferably 200 μm or less, considering the ink ejection and circulation efficiency. For this reason, there are concerns regarding the structural reliability of the overhang portion 210 itself, which constitutes a part of the first substrate 220. Therefore, each head module constituting the liquid ejection head in this embodiment has the following configuration around the liquid ejection chip 2.

[0033] (Peripheral configuration of the liquid dispensing tip) The peripheral configuration of the liquid ejection tip 2 will be described in detail with reference to Figures 6 and 7. Here, the peripheral configuration of the liquid ejection tip 2 provided in the head module 1Ka used in the liquid ejection head 1K that ejects black ink will be used as an example, but other head modules have a similar configuration.

[0034] Figure 6 is a cross-sectional view showing the peripheral configuration of the liquid discharge tip 2 provided in each head module of the liquid discharge head 1K in this embodiment, and shows a part of the cross-section along line AA in Figure 2. As shown in Figure 6, the area around the liquid discharge tip 2 in the head module 1K is mainly provided with a flexible substrate 404, a support member 401, and a frame 403. The flexible substrate 404 is positioned adjacent to the eaves portion 210 of the liquid discharge tip 2 in the planar direction. The flexible substrate 404 is electrically connected to a terminal 10 provided on one surface (the lower surface in Figure 6) of the eaves portion 210, and the connection portion is covered with a sealing material 406. Figure 6 shows an example in which the electrical connection between the flexible substrate 404 and the terminal 10 is made using a bonding wire 405, but is not limited to this. This disclosure is also applicable to liquid discharge heads in which the electrical connection between the flexible substrate 404 and the terminal 10 is made by other connection methods.

[0035] Furthermore, the ejection port surface 201a of the liquid ejection tip 2 and one surface (the top surface in Figure 6) of the flexible substrate 404 are fixed to the support member 401 via an adhesive (not shown). The support member 401 is fixed to the frame 403, which is fixed to the head body 4 (Figure 2(a)), via a surrounding sealing material 407. Thus, the liquid ejection tip 2 and the flexible substrate 404 are supported and fixed to the frame 403 via the support member 401. Note that the support member 401 has an opening 402 formed at a position opposite to the area where the ejection port 3 is formed, in order to enable ink ejection from the ejection port 3.

[0036] Figure 7(a) is a plan view of a portion of the head module 1Ka viewed from the discharge port surface 201a side, and Figure 7(b) is a bottom view of the same portion of the head module 1Ka viewed from the flow path forming substrate 204 side. As shown in Figure 7(a), the support member 401 is formed to overlap the discharge port surface 201a and the overhang portion 210 of the first substrate 220 in the planar direction. Therefore, the overhang portion 210 of the first substrate 220 is supported and reinforced by the support member 401. Consequently, even if the overhang portion 210 is formed at the end of the thinned first substrate 220, the support member 401 functions as a reinforcing member for the overhang portion 210, so the possibility of the overhang portion 210 being damaged by external force is greatly reduced. For example, damage to the overhang portion due to impact when wiping the discharge port surface 201a is suppressed, and high structural reliability can be ensured for the head module 1Ka.

[0037] The end of the support member 401 is bonded to the frame 403 via a surrounding sealing material 407. The frame 403 has a frame structure that supports the end of the support member 401. In this embodiment, the frame 403 is made of a single member. It is preferable to support multiple support members with a frame 403 made of a single member in order to ensure the flatness of the multiple discharge port surfaces 201a. However, it is also possible to form the frame 403 by dividing it for each support member 401. In addition, the surface of the discharge port surface 201a is treated with a water-repellent coating to prevent ink from sticking, but it is preferable to remove the water-repellent coating from the bonding portion with the support member 401 in order to improve the adhesive strength of the adhesive.

[0038] Furthermore, the material of the sealing material 406 that seals the electrical connection parts such as the terminal 10, bonding wire 405, and flexible substrate 404 is not particularly limited. However, in many cases, the sealing material 406 is thermosetting and has a higher coefficient of linear expansion than the liquid ejection tip 2. For this reason, after the sealing material 406 hardens, the eaves portion 210 may be pulled in the opposite direction to the ink ejection direction due to the thermal shrinkage of the sealing material 406. Therefore, the support member 401 needs to function as a reinforcing member that can suppress deformation of the eaves portion 210 due to the thermal shrinkage of the sealing material 406 and deformation of the eaves portion 210 due to the external force as described above. In addition, the support member 401 needs to be made of a material that does not deform itself due to the heat when it is bonded to the liquid ejection tip 2. To satisfy these conditions, it is preferable to use a material that has high elasticity and a low coefficient of linear expansion, such as alumina or titanium, for the support member 401. Specifically, it is preferable to construct the support member 401 from a material with a coefficient of linear expansion of 20 ppm / ℃ or less.

[0039] Furthermore, the support member 401 is preferably 100 μm or thicker in order to provide sufficient reinforcement to the eaves portion 210. On the other hand, in order to suppress the ink droplet placement error on the recording medium 111, it is preferable to narrow the distance between the discharge port surface 201a and the recording medium 111 (Figure 1) (hereinafter referred to as the paper-to-paper distance). For this reason, the thickness of the support member 401 adjacent to the discharge port surface 201a is preferably 300 μm or less. That is, the thickness of the support member 401 is preferably 100 μm or more and 300 μm or less.

[0040] In Figure 6, an example is shown in which the sealing material 406 is placed only around electrical connection parts such as the terminal 10, bonding wire, and flexible substrate 404. However, as shown in Figure 8, the sealing material 406 may be placed over the entire region from the liquid discharge tip 2 to the frame 403.

[0041] As described above, in this embodiment, the overhang portion 210 of the first substrate 220 is reinforced by the support member 401. Therefore, even when the first substrate 220 is made thinner, damage to the overhang portion 210 can be suppressed, and good structural reliability can be ensured for the liquid discharge head.

[0042] (Second Embodiment) Next, a second embodiment of the present disclosure will be described. Figure 9 is a cross-sectional view showing the peripheral configuration of the liquid discharge tip 2 provided in the head module of the liquid discharge head in the second embodiment, and, similar to Figure 6, shows a part of the cross-section along line AA in Figure 2. In Figure 9, components similar to those in the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0043] In this embodiment, the head module 1Ka differs from the first embodiment in the cross-sectional shape of the support member 401A that supports the liquid discharge tip 2. In this embodiment, one surface of the support member 401A (the lower surface in Figure 9) has a stepped portion 421 formed on the outer circumference of the opening 402, with the area inside the stepped portion 421 (first region) being a thin-walled portion 411 and the area outside the stepped portion 421 (second region) being a thick-walled portion 412. Also, similar to the first embodiment, the support member 401A is bonded to the end of the frame 403 via a surrounding sealing material 407. The surface of the support member 401A (the upper surface in Figure 9) is formed as a flat surface.

[0044] The liquid discharge tip 2 is bonded to the thin portion 411 of the support member 401, and the flexible substrate 404 and frame 403 are bonded to the thick portion 412. The thickness of the thin portion 411 is preferably 100 μm or more and 300 μm or less, similar to the thickness of the support member 401 in the first embodiment. The thickness of the thick portion 412 may exceed 300 μm if it allows for electrical connection between the flexible substrate 404 and the terminal 10.

[0045] As described above, in this embodiment, by forming a thickened portion 412 on the support member 401A, the strength of the support member 401 can be increased, making it possible to more firmly support the overhang portion 210 of the first substrate 220. Therefore, the structural reliability of the liquid discharge head can be further improved. In addition, the thinned portion 411 to which the liquid discharge tip 2 is bonded in the support member 401 has the same thickness as in the first embodiment. Therefore, the distance in the z-axis direction between the surface of the thinned portion 411 (top surface in Figure 9) and the discharge port surface 201a of the liquid discharge tip is the same as in the first embodiment. Therefore, the structural reliability of the liquid discharge head can be improved without increasing the distance between the recording medium and the discharge port surface 201a (paper-to-paper distance).

[0046] Furthermore, the support member 401A having the thin-walled portion 411 and the thick-walled portion 412 described above can be constructed from multiple or a single plate material. For example, it is possible to form a support member 401A having a stepped portion 421 by joining two plate materials with different opening sizes. It is also possible to form a support member 401A having a stepped portion 421 by performing cutting or etching on a single plate material.

[0047] (Third embodiment) Next, a third embodiment of the present disclosure will be described. Figure 10 is a cross-sectional view showing the peripheral configuration of the liquid discharge tip 2 provided in the head module of the liquid discharge head in the third embodiment, and, similar to Figure 6, shows a part of the cross-section along line AA in Figure 2. In Figure 10, the same reference numerals are used for components similar to those in the second embodiment, and their descriptions are omitted.

[0048] Similar to the second embodiment described above, the support member 401B in this embodiment has a thin-walled portion 411 and a thick-walled portion 412. However, in this embodiment, the support member 401B has a stepped portion 422 at the end of the surface (upper surface in Figure 10) of the thick-walled portion 412, and the portion outside the stepped portion 422 is the thin-walled portion 413. One surface of this thin-walled portion 413 (upper surface in Figure 10) is bonded to the frame 403 via a surrounding sealing material 407.

[0049] In the liquid ejection head of this embodiment, the surface located furthest forward in the ink ejection direction (z-axis direction) (outer surface) is formed solely by the z-axis end face of the frame 403. Therefore, compared to a configuration where multiple support members 401 form the outermost surface, the dimensional accuracy and flatness of the outermost surface of the liquid ejection head are improved. As a result, it becomes possible to make contact with the outermost surface of the liquid ejection head without any uneven contact of the cap (not shown) for protecting the ejection port surface 201a of the liquid ejection head when recording is stopped, etc., thereby improving the adhesion of the cap to the liquid ejection head. By improving the adhesion of the cap, it becomes possible to more reliably suppress the thickening of the ink inside the liquid ejection head.

[0050] Furthermore, in this embodiment, a stepped portion 422 is formed at the end of the support member 401 to provide a thin-walled portion 413, and the frame 403 is fixed to this thin-walled portion 413. This makes it possible to suppress the amount of protrusion of the frame 403, which is the outermost surface of the liquid ejection head, in the ink ejection direction. As a result, it is possible to suppress an increase in the distance between the liquid ejection head and the recording medium (paper-to-paper distance).

[0051] (Other embodiments) In the embodiments described above, examples were shown in which one liquid ejection head is configured with two head modules, but it is also possible to configure one liquid ejection head with a single head module or with three or more head modules. Furthermore, in the embodiments described above, a liquid ejection device (recording device) with four liquid ejection heads corresponding to each of the four ink colors was shown, but the number of liquid ejection heads mounted on the recording device is not particularly limited. Moreover, this disclosure is also applicable to a single recording head having rows of ejection ports corresponding to each of the multiple ink colors. [Explanation of symbols]

[0052] 1K, 1Y, 1M, 1C liquid dispensing head 3 outlet 5 Liquid chamber 6. Energy generating elements 10 terminals 201 Nozzle substrate 201a Discharge port surface (first surface) 202 Liquid chamber substrate 203 Liquid supply substrate 204 Channel Forming Substrate 202a 2nd page 210 Eaves (protruding area) 220 First substrate 402 Aperture 401 Support Member 403 Frame

Claims

1. a first substrate having an ejection port for ejecting liquid, a liquid chamber communicating with the ejection port, and an energy generating element for generating energy for ejecting the liquid in the liquid chamber from the ejection port in a first axial direction; a second substrate that is laminated on a second surface of the first substrate opposite to a first surface on which the ejection ports are formed, the second substrate having individual flow paths in liquid communication with the liquid chambers and a common flow path in communication with the individual flow paths, the first substrate has a protruding region protruding from an end of the second substrate in a planar direction perpendicular to the first axis direction, and a terminal electrically connected to the energy generating element is provided on the second surface of the protruding region, a support member that has an opening at a position facing a region of the first substrate in which the ejection ports are formed, that is joined to the first surface of the first substrate, and that supports the first substrate in an area beyond the protruding region of the first substrate; a frame that fixes and supports the support member by a portion that overlaps with an outer edge of the support member in the first axial direction; A liquid ejection head comprising:

2. the support member has a dimension larger than the first substrate in at least one of a second axis direction parallel to the planar direction and a third axis direction parallel to the planar direction and perpendicular to the second axis direction; 2. The liquid ejection head according to claim 1, wherein the opening of the support member has a smaller dimension in the second axis direction and the third axis direction than the first substrate.

3. A liquid ejection head as described in claim 1 or 2, characterized in that the support member has a first region joined to the first surface of the first substrate and a second region located outside the first region, and the thickness of the second region in the first axial direction is greater than the thickness of the first region in the first axial direction.

4. A liquid ejection head as described in any one of claims 1 to 3, characterized in that the frame is joined to a thin portion formed at the end of the support member in the planar direction, and the end face of the frame in the first axial direction forms the outermost surface of the liquid ejection head.

5. 2. The liquid ejection head according to claim 1, wherein a water-repellent treatment is applied only to an area of ​​the first surface of the first substrate that faces the opening of the support member.

6. 4. The liquid ejection head according to claim 1, wherein the support member has a linear expansion coefficient of 20 ppm / [deg.] C. or less.

7. 7. The liquid ejection head according to claim 1, wherein the support member has a thickness in the first axial direction of 100 [mu]m or more and 300 [mu]m or less.

8. A liquid ejection head as described in claim 3, characterized in that the thickness of the first region in the first axial direction is 100 μm or more and 300 μm or less, and the thickness of the second region in the first axial direction is greater than 300 μm.

9. the first substrate includes an ejection port substrate in which a plurality of the ejection ports are formed, and a liquid chamber substrate which is joined to the ejection port substrate and forms liquid chambers corresponding to the plurality of ejection ports between the ejection port substrate and the liquid chamber substrate, 9. The liquid ejection head according to claim 1, wherein the first surface is formed by the ejection port substrate, and the second surface is formed by the liquid chamber substrate.

10. 10. The liquid ejection head according to claim 9, wherein a sum of a thickness of the liquid chamber substrate in the first axial direction and a thickness of the ejection port substrate in the first axial direction is 200 [mu]m or less.

11. A liquid ejection head according to any one of claims 9 or 10, characterized in that the second substrate includes a liquid supply substrate bonded to the second surface of the liquid chamber substrate and having a plurality of individual supply flow paths formed therein that supply liquid to each of the plurality of liquid chambers.

12. 12. The liquid ejection head according to claim 11, wherein the liquid supply substrate includes a plurality of individual recovery flow paths that recover the liquid supplied to each of the plurality of liquid chambers.

13. The liquid ejection head according to claim 12 , wherein the second substrate is joined to the liquid supply substrate and includes a common supply flow passage that supplies liquid to the individual supply flow passages.

14. The liquid ejection head according to claim 13 , wherein the liquid supply substrate includes a common recovery flow passage that recovers liquid from a plurality of the individual recovery flow passages.

15. A liquid ejection head according to any one of claims 1 to 14, a conveying means for conveying a recording medium to the liquid ejection head; A liquid ejection device comprising:

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