Compact multi-pass gas cell for multi-gas spectral sensors

Abstract

To solve the problem in which, since gases may vary in concentration (or in absorption cross section), different path lengths may be needed for each range of concentration.SOLUTION: Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The technology described below relates generally to multi-pass optical gas cells, and more particularly to the use of a multi-pass optical gas cell with a spectrometer, such as a micro-electromechanical systems (MEMS) spectrometer, in a gas analyzer.

[0002] Priority claim This application claims priority to and the benefit of Provisional Application No. 62 / 813,714, filed in the United States Patent and Trademark Office on March 4, 2019, the entire contents of which are incorporated herein by reference as if fully set forth below in their entirety, and for all applicable purposes. [Background technology]

[0003] Various mechanisms are used for gas analysis, including gas chromatography, mass spectrometers, spectrometers, tunable diode laser spectrometers (TDLS), and photoacoustic-based TDLS. Among spectroscopic techniques, Fourier transform infrared spectroscopy (FTIR) offers a wide spectral range and is capable of analyzing multiple gases simultaneously. Also, small and inexpensive gas analyzers can be realized by using MEMS spectrometers. Such MEMS-based FTIR spectrometers have been successfully used to measure CH2H2 with detection limits of 350 ppm and CO2 with detection limits of 1800 ppm when connected to a 10 cm long gas cell. Also, FTIR spectrometers utilizing a translating MEMS mirror along with other discrete optical components have been used to measure propane and butane with a path length of 6 cm. Other gas analyzer configurations include MEMS lamellar grating FTIR spectrometers and MEMS-based tunable filters with swept laser sources.

[0004] The gas in the gas cell can be detected by sending light through the gas cell. Some of the light is absorbed by the gas, but the remaining light can be detected, for example, by a MEMS spectrometer. Some gas cells use a set of mirrors to reflect the light through multiple passes until it exits the gas cell. The mirrors come in a variety of designs, including spherical mirrors, elliptical mirrors, and cylindrical mirrors with circular cross-sections. Also, the reflective surfaces of the gas cell can take the form of opposing parabolic pairs, parallel pairs, or have combinations of planar, cylindrical, circular, helical, or right cylindrical arrangements of multiple reflective surfaces. Examples of gas cells include, but are not limited to, the White gas cell and the Hunst gas cell. The White gas cell reimages the light source after each double pass of light traveling up and down the cell, trapping the energy within the cell until the light exits. This trapping causes losses only due to the non-ideal reflectivity of the mirrors.

[0005] Increasing the number of paths increases the absorption of light by the gas. Increased light absorption makes it easier to detect low concentrations of gas. However, the throughput of the gas analysis system decreases due to reflection losses. This tradeoff usually results in an optimum point for the total path length that the light travels through the gas cell. However, gas concentrations (or absorption cross sections) may vary, so different path lengths may be required for different concentration ranges. For example, if the optical path length is too long, gases may saturate at relatively high concentrations, causing lines to disappear in the absorption spectrum. Therefore, multiple gases may be monitored using multiple gas cells, or using gas cells with manually adjustable path lengths. Adding additional gas cells increases costs, and manual adjustments increase the time it takes to measure different gases.

[0006] In addition, gas analyzers with MEMS spectrometers have enabled the miniaturization of devices, but further miniaturization of the gas cell itself may increase compatibility with MEMS technology and enable mass production. Summary of the Invention

[0007] The following provides a simplified summary of one or more aspects of the present disclosure in order to provide a basic understanding of such aspects. This summary is not an extensive overview of all possible features of the disclosure, and is not intended to identify key or critical elements of all aspects of the disclosure or to delineate the scope of any or all aspects of the disclosure. Its sole purpose is to present some concepts of one or more aspects of the disclosure as a prelude to the more detailed description that is presented later.

[0008] Various aspects of the present disclosure provide a multi-pass gas cell including a set of two or more reflectors, an input collimating optic, and an output focusing optic, where the input and output optics are integrated with at least one of the two or more reflectors. In some examples, the input and output optics can include a curved mirror or a lens. In some examples, the set of two or more reflectors can include a spherical mirror, a concave mirror, a flat mirror, or a cylindrical mirror.

[0009] In one example, the set of two or more reflectors includes three spherical mirrors, each including the same radius of curvature equal to the distance between a first spherical mirror on one side of the multipass gas cell and each of the second and third spherical mirrors on the other side of the multipass gas cell. Also, the first spherical mirror has a length greater than the length of each of the second or third spherical mirrors. In some examples, the input and output optics are integrated at both ends of the first spherical mirror. In other examples, the input and output optics are integrated at the same end of the first spherical mirror. In this example, the larger spherical mirror includes an asymmetric portion at an end opposite the end including the input and output optics, allowing it to reflect collimated light back into the multipass cell at the point where the light would normally exit the multipass cell.

[0010] In yet another example, the input and output optics are integrated at both ends of the first spherical mirror, and additional input optics are integrated at the same end of the first spherical mirror as the other input optics. In this example, each of the input optics is optically coupled to receive a respective input beam (e.g., input light) and configured to direct the respective collimated light along a different multi-pass optical path length. The different multi-pass optical path lengths may be achieved by a discontinuity in one of the smaller spherical mirrors, which may provide a tilt between the respective portions of the smaller spherical mirror formed by the discontinuity. The different multi-pass optical path lengths may result in different number of reflections of the respective collimated light. In some examples, the multi-pass gas cell may further include a switch configured to switch between two different light sources, each of which may provide a respective input light to one of the two input optics.

[0011] In another example, the set of two or more reflectors can include a set of two concave mirrors, where a first concave mirror has a first radius of curvature and a second concave mirror has a second radius of curvature that is twice the first radius of curvature. The distance between the concave mirrors is equal to the second radius of curvature. In this example, an absorber can be inserted into the multi-pass gas cell to prevent stray light from reaching the optical output of the multi-pass gas cell.

[0012] In another example, the set of two or more reflectors can include at least four mirrors. The input optics can be integrated with the first mirror and the second optics can be integrated with the second mirror. The first and second mirrors can have a first length that is shorter than the length of the remaining mirrors. The input optics can be integrated with an upper portion of the first mirror and direct collimated light toward the second mirror at an angle selected to generate a helical multi-pass light path between the mirrors. The output optics can be integrated with a lower portion of the second mirror to receive the output light reflected from the first mirror and focus the output light toward the optical output of the multi-pass gas cell.

[0013] In another example, the set of two or more reflectors can include two flat mirrors. The input optical component is integrated with the first flat mirror, and the output optical component is integrated with the second flat mirror. The multi-pass gas cell further includes a first optical Bessel component optically coupled to receive the collimated input light from the input optical component and configured to generate an input Bessel beam for propagating inside the multi-pass gas cell to generate multiple reflections between the two flat mirrors. The multi-pass gas cell further includes a second optical Bessel component optically coupled to receive the output Bessel beam resulting from the multiple reflections and configured to generate an output collimated light toward the output optical component. In some examples, the first and second optical Bessel components can include an axicon lens, an annular aperture, or a conical reflector.

[0014] In some examples, the multi-pass gas cell can include an enclosure configured to receive the gas, the enclosure including a set of reflectors and input and output optical components. For example, the enclosure, the set of reflectors, and the input and output optical components can be fabricated in the same substrate using injection molded optical components. In some examples, the spectrometer and the light source can be further assembled inside the enclosure. Furthermore, the enclosure can include a circulation unit configured to circulate the gas from the outside of the enclosure to the inside of the enclosure. Also, the enclosure can further include an element configured to absorb or block moisture in the gas.

[0015] These and other aspects of the invention will be more fully understood upon consideration of the detailed description that follows. Other aspects, features and embodiments of the invention will become apparent to those skilled in the art upon consideration of the following description of certain exemplary embodiments of the invention in conjunction with the accompanying drawings. Features of the invention are described in conjunction with the following specific embodiments and drawings, however, all embodiments of the invention may include one or more of the advantageous features described herein. In other words, one or more embodiments are described as having certain advantageous features, however, one or more of such features may be used in accordance with various embodiments of the invention described herein. Similarly, although exemplary embodiments are described below as device, system or method embodiments, it should be understood that such exemplary embodiments may be implemented in various devices, systems and methods. [Brief description of the drawings]

[0016] [Figure 1] FIG. 1 is a diagram illustrating an example of a gas analyzer including a multi-pass gas cell. [Diagram 2] FIG. 2 illustrates an example of a multi-pass gas cell that includes integrated collimating and focusing optics. [Diagram 3] FIG. 3 is a front view of the multi-pass gas cell of FIG. [Figure 4] FIG. 4 illustrates another example of a multi-pass gas cell that includes integrated collimating and focusing optics. [Diagram 5] FIG. 5 is a front view of the multi-pass gas cell of FIG. [Figure 6] FIG. 6 illustrates another example of a multi-pass gas cell that includes multiple multi-pass optical path lengths. [Figure 7] FIG. 7 is a front view of the multi-pass gas cell of FIG. [Figure 8] FIG. 8 illustrates another example of a multi-pass gas cell that includes integrated collimating and focusing optics. [Figure 9]FIG. 9 illustrates another example of a multi-pass gas cell that includes integrated collimating and focusing optics. [Figure 10] FIG. 10 is an exploded view of the multi-pass gas cell. [Figure 11] 11A-11D are various views of the multi-pass gas cell of FIG. [Figure 12] FIG. 12 illustrates another example of a multi-pass gas cell that includes integrated collimating and focusing optics. [Figure 13] FIG. 13 illustrates another example of a multi-pass gas cell that includes integrated collimating and focusing optics. [Figure 14] FIG. 14 is a diagram illustrating an exemplary configuration of a reflector in the multi-pass gas cell of FIG. [Figure 15] FIG. 15 illustrates an exemplary optical molded article including a multi-pass gas cell. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] The detailed description set forth below in conjunction with the accompanying drawings is intended as a description of various configurations and is not intended to represent the only configurations in which the concepts described herein may be practiced. The detailed description includes specific details to provide a thorough understanding of various concepts. However, it will be apparent to those skilled in the art that these concepts may be practiced without those specific details. In some instances, well-known structures and components are shown in block diagram form in order to avoid obscuring such concepts.

[0018] FIG. 1 illustrates an example of a gas analyzer 100 including a light source 102, an optical system 104, a multi-pass gas cell 106, and an optical core module 108. The optical system 104 may include one or more optical components to enhance the illumination of the light source 102. Gas may enter the multi-pass gas cell 106 via a gas inlet 110 and may exit the multi-pass gas cell 106 via a gas outlet 112. The gas in the multi-pass gas cell may be detected by directing light from the light source 102 into the multi-pass gas cell 106 via the optical system 104. A portion of the light may be absorbed by the gas while the remaining portion of the light may be detected by the optical core module 108.

[0019] The optical core module 108 can include, for example, a spectrometer and a detector. For example, the spectrometer can include an FTIR spectrometer configured to generate an interferogram that is detected by the detector. The output of the detector can be processed to obtain a spectrum of the detected light, which can then be utilized to identify the gas or obtain other parameters related to the gas, such as the concentration of the gas, the energy content in the gas, the total volatile organic compounds, the amount of particulate matter in the gas, or other suitable parameters.

[0020] In some examples, the spectrometer and detector may be implemented on a microelectromechanical system (MEMS) chip. In this specification, the term MEMS refers to the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate by microfabrication techniques. For example, microelectronics are typically fabricated using integrated circuit (IC) processes, while micromechanical parts are fabricated using compatible microfabrication processes that selectively etch parts of a silicon wafer or add new structural layers to form mechanical and electromechanical parts. One example of a MEMS element is a micro-optical component with a dielectric or metallized surface that operates in a reflective or refractive mode. Other examples of MEMS elements include actuators, detector grooves and fiber grooves.

[0021] The MEMS spectrometer of the optical core module 108 can include one or more micro-optical components (e.g., one or more reflectors or mirrors) that can be movably controlled by a MEMS actuator. In some examples, the MEMS spectrometer can be fabricated using a deep reactive ion etching (DRIE) process on a silicon-on-insulator (SOI) wafer to fabricate micro-optical components and other MEMS elements that can process a free-space light beam propagating parallel to the SOI substrate.

[0022] The multi-pass gas cell 106 can include a set of two or more reflectors configured to reflect light through multiple passes within the gas cell 106 until the light exits the gas cell 106. In various aspects of the present disclosure, the multi-pass gas cell 106 can be designed to be compatible with MEMS technology and mass production. In some examples, the multi-pass gas cell 106 can include optical components that facilitate compatibility with MEMS spectrometers. Additionally, the multi-pass gas cell 106 can provide two or more multi-pass optical path lengths to enable measurement of multiple gases, each having a different absorption rate.

[0023] FIG. 2 illustrates an example of a multi-path gas cell 200 according to an embodiment of the present disclosure. The multi-path gas cell 200 includes a set of three reflectors 202, 204, 206. In the example illustrated in FIG. 2, each of the reflectors 202, 204, 206 is a spherical mirror. Each of the spherical mirrors 202, 204, 206 has the same radius of curvature that is equal to the distance between the larger spherical mirror 202 on one side of the gas cell 200 and the two smaller spherical mirrors 204, 206 on the other side of the gas cell 200. As illustrated in FIG. 2, the spherical mirror 202 has a length that is longer than the respective length of either of the spherical mirrors 204, 206. For example, the longer spherical mirror 202 can have a length that is slightly less than twice the length of either of the shorter mirrors 204, 206. In one example, the longer mirror may have a length of 180 mm and each of the shorter mirrors 204, 206 may have a length of 100 mm. Thus, the ratio of the length of the larger mirror 202 to the length of the shorter mirror 204 or 206 is 1.8. Additionally, the spherical mirrors 204, 206 are tilted relative to one another to provide a small angle between the mirrors 204, 206 selected to keep the light within the multi-pass gas cell 200. In some examples, the angle between the mirrors 204, 206 ranges from 1 degree to 5 degrees.

[0024] The multi-pass gas cell 200 further includes a first optical component 208 integrated with the spherical mirror 202 at a first end 216 thereof, and a second optical component 210 integrated with the spherical mirror 202 at a second end 218 opposite the first end 216. As used herein, the term "integrated" means that the components are collectively formed to result in a solid piece of material (e.g., metal, glass, plastic, dielectric, semiconductor substrate, ceramic, etc.). In some examples, the first optical component 208 and the second optical component 210 each include a curved mirror or a lens. For example, the first optical component 208 and the second optical component 210 can include an off-axis parabolic mirror.

[0025] The reflectivity of the mirrors 202, 204, 206, 208, 210 is determined primarily by the manufacturing technique and materials used in the manufacture of the mirrors. In some examples, the mirrors 202, 204, 206, 208, 210 include a metal coating, which provides high reflectivity and broadband response. In other examples, the mirrors 202, 204, 206, 208, 210 may be dielectric mirrors (e.g., Bragg mirrors) that are composed of multiple thin layers of dielectrics. The number of dielectric layers and their thicknesses are designed to achieve a specified reflectivity at various wavelengths. Dielectric mirrors may have a higher reflectivity than metallic mirrors. However, dielectric mirrors may not provide ultra-high reflectivity over a wide wavelength range.

[0026] In one aspect of the present disclosure, each of the spherical mirrors 202, 204, 206 has a constant thickness (e.g., about 5 mm to about 10 mm) to facilitate mass production of the multi-pass gas cell 200, for example, by injection molding optical techniques. Injection molding allows each of the mirrors 202, 204, 206, 208, 210 of the multi-pass gas cell 200 to be manufactured in a self-aligned manner in a mass production environment. Additionally, the two off-axis parabolic mirrors 208, 210 can provide compatibility with MEMS spectrometers for miniature gas analyzer applications.

[0027] As shown in FIG. 2 and the front view of the multi-pass gas cell 200 shown in FIG. 3, an off-axis parabolic mirror 208 disposed at the optical input of the multi-pass gas cell 200 is optically coupled to receive an input beam (e.g., input light) 212. In some examples, the input light 212 can be generated, for example, by a small light source (e.g., a light emitting diode (LED) or a filament light source). The off-axis parabolic mirror 208 is configured to collimate the input light 212. In some examples, the parabolic surface has the shape of an ideal collimator, so the collimation does not involve any spherical aberration. Furthermore, the off-axis parabolic mirror 208 can be a metallic mirror with a very broad band reflectance over the infrared (IR) range. Thus, the collimation may not involve any chromatic aberration.

[0028] The off-axis parabolic mirror 208 is further configured (or directed within the gas cell 200) to direct the resulting collimated light (e.g., parallel light beams) towards the spherical mirror 206, where the collimated light is reflected towards the spherical mirror 202. The collimated light may then undergo multiple reflections between the longer spherical mirror 202 and each of the shorter spherical mirrors 204, 206, resulting in at least two passes up and down the multi-pass gas cell 200. The off-axis parabolic mirror 210 is optically coupled to receive the output beam (e.g., output light) resulting from the multiple reflections (e.g., after completion of the multiple reflections) and is configured (or directed within the gas cell 200) to focus the output light towards an optical output of the gas cell. For example, the optical output may be optically coupled to a spectrometer, such as a MEMS spectrometer.

[0029] FIG. 4 illustrates another example of a multi-pass gas cell 400 according to an embodiment of the present disclosure. In the example illustrated in FIG. 4, the multi-pass gas cell 400 includes a set of three spherical mirrors 402, 404, 406, configured as shown in FIG. 2. The multi-pass gas cell 400 further includes a first (or input) optical component 408 optically coupled to receive an input beam (input light) 412 at an optical input of the gas cell 400, the first optical component configured to collimate the input light 412 and direct the collimated input light 412 toward the gas cell 400 to generate multiple reflections thereof through multiple passes through the spherical mirrors 402, 404, 406. Additionally, the multi-pass gas cell 400 includes a second (or output) optical component 410 optically coupled to receive an output light 414 resulting from multiple reflections of the collimated light (e.g., after multiple passes) and configured to focus the output light 414 toward an optical output of the gas cell 400. The first and second optical components 408, 410 may include curved mirrors or lenses. For example, the first and second optical components 408, 410 may include off-axis parabolic mirrors.

[0030] 4, an optical component 410 is also integrated with the spherical mirror 402 at the first end 416 of the same spherical mirror 402 as the input optical component 408. The integration of both optical components (input and output) 408, 410 at the same end 416 of the spherical mirror 402 simplifies the assembly of the multi-pass gas cell 400 with a MEMS module (e.g., a MEMS spectrometer) and a light source.

[0031] In some examples, as shown in the front view of Figure 5, the spherical mirror 402 can include an asymmetric portion 422 from a line of symmetry 420 of the spherical mirror 402. The asymmetric portion 422 is at a second end 418 of the spherical mirror 402, opposite the first end 416 where the off-axis parabolic mirrors 408, 410 are integrated. The asymmetric portion 422 allows the collimated light to be reflected back into the multipass gas cell 400 at exactly the time that the collimated light would normally exit the multipass gas cell 400, as shown in the example of Figure 2. This reflection causes the collimated light to exit the multipass gas cell 400 from the same side that the light entered. Thus, the light input and the light output are on the same side of the multipass gas cell 400.

[0032] 6 illustrates another example of a multi-pass gas cell 600 that includes multiple multi-pass optical path lengths. Different multi-pass optical path lengths can support measurements of different types of gases, each having different absorption. In the example shown in FIG. 6, the multi-pass gas cell 600 provides two different multi-pass optical path lengths. However, it should be understood that additional multi-pass optical path lengths can be configured using the concepts described herein.

[0033] The multi-pass gas cell 600 includes a set of three spherical mirrors 402, 404, 406 configured as shown in Figure 2 and / or Figure 4. The multi-pass gas cell 600 further includes a first input optic 608a optically coupled to receive a first input beam (first input light) from a first light source 612a at an optical input of the gas cell 600, the first input optic configured to collimate the first input light and direct the first collimated input light into the gas cell 600 for multiple reflections thereof through multiple passes over a first multi-pass optical path length via the spherical mirrors 602, 604, 606. The multi-path gas cell 600 also includes a second input optical component 608a optically coupled to receive a second input beam (second input light) from a second light source 612b at an optical input of the gas cell 600, the second input optical component configured to collimate the second input light and direct the second collimated input light into the gas cell 600 for multiple reflections thereof through multiple paths over a second multi-path optical path length via spherical mirrors 602, 604, 606.

[0034] Additionally, the multi-pass gas cell 600 includes an output optical component 610 optically coupled to receive output light resulting from multiple reflections of each of the first and second collimated light (e.g., output light after multiple passes) and configured to focus the output light toward a spectrometer 614 (e.g., a MEMS spectrometer) at an optical output of the gas cell 600. Each of the first and second input optical components 608a, 608b is integrated with the spherical mirror 602 at a first end 618, while the output optical component 610 is integrated with the spherical mirror 602 at a second end 620 of the spherical mirror 602 opposite the first end 618. In some examples, the optical components 608a, 608b, 610 can include curved mirrors or lenses. For example, the optical components 608a, 608b, 610 can include off-axis parabolic mirrors.

[0035] In some examples, the output optics 610 has a size larger than the size of each of the input off optics 608a, 608b to enable the output optics 610 to collect the output light coming from each of the two different multi-pass optical path lengths. For example, the size of the larger output optics 610 may be twice the size of the smaller input optics 608a, 608b. In one example, the size of the output optics is 28 mm and the size of each input optics 608a, 608b is 14 mm. In some examples, the total optical power combined in the two multi-pass optical path lengths may be equal to the total optical power combined in a single multi-pass optical path length shown in the examples of FIG. 2 and / or FIG. 4. That is, each multi-pass optical path length may combine half the optical power of a single multi-pass optical path length shown in the examples of FIG. 2 and / or FIG. 4.

[0036] In the example shown in FIG. 6, the third spherical mirror 606 includes a discontinuity 616 that results in a first portion 622a of the third spherical mirror 606 and a second portion 622b of the third spherical mirror 606. The first portion 622a and the second portion 622b each have a different respective tilt to form different multi-pass optical path lengths within the multi-pass gas cell 600. For example, as shown in the front views of FIGS. 6 and 7, the first portion 622a of the third spherical mirror 606 creates a first multi-pass optical path length that includes a first number of reflections of the first collimated light, and the second portion 622b of the third spherical mirror 606 creates a second multi-pass optical path length that includes a second number of reflections of the second collimated light, where the first number of reflections is different from the second number of reflections to create the different multi-pass optical path lengths.

[0037] 8 illustrates another example of a multi-pass gas cell 800 according to an embodiment of the disclosure. The multi-pass gas cell 800 includes a first substrate 816 and a second substrate 812. The first substrate 816 can be constructed of any suitable material, such as plastic, glass, metal, dielectric or semiconductor materials. The second substrate 812 can be, for example, a printed circuit board to which an optical core module 810 is attached. The optical core module 810 can include a spectrometer, a processor, memory, and other suitable components for analyzing gases.

[0038] In the example shown in FIG. 8, a first substrate 816 includes a set of reflectors 802, 804 and optical components 806, 808. In some examples, the set of reflectors 802, 804 includes two concave mirrors. The first concave mirror 802 has a first radius of curvature, while the second concave mirror 804 has a second radius of curvature that is twice the first radius of curvature. Furthermore, the distance 818 between the first concave mirror 802 and the second concave mirror 804 is equal to the second radius of curvature. Unlike conventional White gas cells, there is no tilt on either mirror 802, 804, resulting in a perfectly symmetric gas cell 800. This symmetry results in the same angles for the light source and the detector (with respect to the line of symmetry of the mirrors 802, 804). Because the total distance traveled by light within cell 800 is small compared to a conventional White gas cell, the different radii of curvature of mirrors 802, 804 allow the light to reflect back and forth within cell 800 without affecting the beam collimation.

[0039] In some examples, the first optical component (e.g., input optical component) 806 includes a curved mirror or lens, such as an off-axis parabolic mirror, to collimate the input light and direct it toward the second concave mirror 804 for multiple reflections between the concave mirrors 802, 804. The second optical component (e.g., output optical component) 808 may be a right-angle mirror optically coupled (e.g., disposed within the gas cell 800) to receive the output light from the second concave mirror 804 and configured to focus the output light into the optical core module 810. The output optical component 808 may be further curved to not only collimate the output light but also to change the optical axis by 90 degrees. The first and second optical components 806, 808 may be integrated with the first concave mirror 802 at their respective ends.

[0040] 8, first and second concave mirrors 802 are fabricated in a first substrate 816 along with first and second optical components 806, 808. For example, the concave mirrors 802, 804 and the collimating / focusing optics 806, 808 may be fabricated monolithically and self-aligned in the substrate 816 using injection molding optics, etching (e.g., of a semiconductor substrate), or other suitable fabrication techniques.

[0041] The gas cell structure shown in FIG. 8 may suffer from stray light traveling from the input optics 806 to the output optics via a single reflection from the second concave mirror 804. To remove stray light from the output, in one example, an absorber 814 can be inserted into the gas cell 800 and positioned between the concave mirrors 802, 804. In some examples, the absorber 814 may be integrated with the second concave mirror 804 and fabricated in the first substrate 816. In other examples, as shown in FIG. 9, the second concave mirror 804 may include an absorbing region 820 configured to block stray light from reaching the output. For example, the second concave mirror 804 may be fabricated to include a non-metallized portion that forms the absorbing region 820.

[0042] FIG. 10 is an exploded view of a multi-pass gas cell 1000 that provides compatibility with a MEMS spectrometer for a miniature gas analyzer. The multi-pass gas cell 1000 of FIG. 10 is further described with reference to various views of the multi-pass gas cell 1000 shown in FIGS. 11A-11D. The multi-pass gas cell 1000 includes an enclosure formed from an enclosure top 1002 and an enclosure bottom 1004. Additionally, the multi-pass gas cell 1000 includes a light source 1006, a MEMS spectrometer 1008, mirrors 1012a-1012e, and a fan 1014. The light source 1006 and the MEMS spectrometer 1008 may be mounted on a printed circuit board 1010 or other suitable substrate that can be inserted into the multi-pass gas cell 1000.

[0043] The mirror structure may be similar to that shown in FIG. 4 and FIG. 5. For example, as shown in FIG. 10, FIG. 11A, and FIG. 11B, the mirror 1012 may include a set of three spherical mirrors 1012a, 1012b, and 1012c, a collimating input mirror 1012d, and a focusing output mirror 1012e. As shown in FIG. 11A-FIG. 11D, the input mirror 1012d is optically coupled to receive input light from the light source 1006, collimating the input light, directing the collimated input light to the spherical mirror 1012c, and multiple-reflecting the collimated light between the spherical mirror 1012a and the spherical mirrors 1012b and 1012c. The output mirror 1012e is optically coupled to receive output light from the spherical mirror 1012b and focusing the output light toward the MEMS spectrometer 1008.

[0044] 4 and 5, input mirror 1012d and output mirror 1012e are located on the same side of larger spherical mirror 1012a for ease of alignment and assembly with light source 1006 and MEMS spectrometer 1008. Also, mirrors 1012d, 1012e are integrated with spherical mirror 1012a. For example, mirrors 1012a, 1012e, 1012e can be fabricated in the same substrate using any suitable fabrication technique.

[0045] In the examples shown in FIGS. 10, 11A, and 11B, a fan 1014 can provide a mechanism for circulating gas from outside the enclosure 1002 / 1004 to inside the enclosure 1002 / 1004. This circulation can create a high pressure inside the enclosure, which may aid in detecting low concentrations of trace gases. In other examples, a heating element or a mechanical pump can be used instead of the fan 1014 to provide the gas circulation. In still other examples, gas can be directed in and out of the multi-path gas cell 1000 via tubes (not shown). In some examples, various components of the multi-path gas cell 1000 (e.g., the enclosure 1002 / 1004 and other suitable components) can be nickel plated to prevent corrosion that may result from exposure to some gases. In some examples, anti-adsorption coatings may be applied to various components of the multi-path gas cell 1000 (e.g., the enclosure 1002 / 1004 and other suitable components) to prevent gas adsorption to the surfaces, which may lead to accurate prediction of current or future gas concentrations.

[0046] FIG. 12 illustrates another example of a multi-pass gas cell 1200 according to an embodiment of the present disclosure. The multi-pass gas cell 1200 includes a set of two reflectors 1202, 1204. In the example illustrated in FIG. 12, each reflector 1202, 1204 is a flat mirror. The multi-pass gas cell 1200 further includes a first (or input) optical component 1206 and a second (or output) optical component 1208. The first and second optical components 1206, 1208 can include curved mirrors or lenses. For example, the first and second optical components 1206, 1208 can include off-axis parabolic mirrors.

[0047] The input optics 1206 are integrated with the flat mirror 1202, and the output optics 1208 are integrated with the flat mirror 1204. For example, the input optics 1206 may be fabricated in the same substrate 1210a as the flat mirror 1202, while the output optics 1208 may be fabricated in the same substrate 1210b as the flat mirror 1204. In some examples, the substrates 1210a, 1210b may be separate halves of an optical molded article that includes the multi-pass gas cell 1000, which may be fabricated by injection molding. In other examples, the substrates 1210a, 1210b may be etched into a semiconductor substrate using 3D micromachining techniques.

[0048] Additionally, the multi-pass gas cell 1200 includes a first optical vessel component 1216 and a second optical vessel component 1218. The first and second optical vessel components 1216, 1218 can be utilized to reduce losses due to diffraction without the use of a spherical mirror. In some examples, the first and second optical vessel components can include an axicon lens, an annular aperture, or a conical reflector.

[0049] In one example, the input optical component 1206 is optically coupled to receive an input beam (input light) from the light source 1212 and is configured to collimate the input light and direct the collimated input light to the first optical bessel component 1216. The first optical bessel component 1216 is optically coupled to receive the collimated input light and is configured to generate an input Bessel beam for propagation inside the multi-pass gas cell including multiple reflections between the planar mirrors 1202, 1204. The second optical bessel component 1218 is optically coupled to receive an output Bessel beam resulting from the multiple reflections and is configured to generate an output collimated light as the output light. The output optical component 1208 is optically coupled to receive the output light from the second optical bessel component 1218 and is configured to focus the output light towards the spectrometer 1214 (e.g., a MEMS spectrometer).

[0050] FIG. 13 illustrates another example of a multi-pass gas cell 1300 according to an embodiment of the present disclosure. In the example illustrated in FIG. 13, the multi-pass gas cell 1300 includes a set of four reflectors 1302a, 1302b, 1302c, 1302d. In the example illustrated in FIG. 13, each of the reflectors 1302a, 1302b, 1302c, 1302c is a flat mirror. In other examples, the reflectors 1302a, 1302b, 1302c, 1302d may be cylindrical mirrors. For example, in a larger gas cell 1300, a cylindrical mirror may reduce beam divergence. Also, two of the four reflectors (e.g., reflectors 1302a, 1302b) may be shorter than the other two reflectors (e.g., reflectors 1302c, 1302d) to allow light to enter and exit the gas cell 1300. For example, reflectors 1302a, 1302b can have a first length 1312a, and reflectors 1302c, 1302d can have a second length 1312b that is longer than the first length.

[0051] The multi-pass gas cell 1300 further includes a first (or input) optical component 1304 and a second (or output) optical component 1306. The first and second optical components 1304, 1306 can include curved mirrors or lenses. For example, the first and second optical components 1304, 1306 can include off-axis parabolic mirrors.

[0052] The input optics 1304 may be integrated with the planar mirror 1302a, and the output optics 1306 may be integrated with the planar mirror 1302c. For example, the input optics 1304 may be fabricated in the same substrate (not shown for simplicity) as the planar mirrors 1302a, 1302b, while the output optics 1306 may be fabricated in the same substrate (not shown for simplicity) as the planar mirrors 1302c, 1302d. In some examples, the substrate may be a separate half of an optical molded article that includes the multi-pass gas cell 1300, which may be fabricated by injection molding.

[0053] In one example, the input optics 1304 are integrated into an upper portion 1308 of the first (e.g., shorter) flat mirror 1302a. The input optics 1304 are further optically coupled (e.g., disposed on the first flat mirror 1302a) to receive the input light 1314, collimate the input light, and direct the collimated light toward the second flat mirror 1302b at an angle selected to generate a spiral multi-path optical path of the collimated light between the second flat mirror 1302b, the third flat mirror 1302c, the fourth flat mirror 1302d, and the first flat mirror 1302a. The output optics 1306 are integrated into a lower portion 1310 of the second (e.g., shorter) flat mirror 1302c. The output optical component 1306 is optically coupled to receive the output light 1316 from the fourth flat mirror 1302d and focus the output light 1316 towards the optical output of the gas cell 1300 (e.g., disposed at the lower portion of the second flat mirror 1302c).

[0054] In some examples, the multi-pass gas cell 1300 can include four or more reflectors 1302a-1302d. For example, as shown in FIG. 14, the multi-pass gas cell may be designed with four reflectors 1302a-1302d, five reflectors 1302a-1302e, or six reflectors 1302a-1302f. In each example, an input beam is received by a first reflector 1302a (e.g., via input collimating optics) at the optical input of the multi-pass gas cell, and an output beam is directed by a second reflector 1302b (e.g., via output focusing optics) toward an optical output of the multi-pass gas cell. Thus, as in the example shown in FIG. 13, each of the first and second reflectors 1302a, 1302b has a shorter length than the other reflectors 1302c-1302f to direct light into and out of the gas cell.

[0055] FIG. 15 illustrates another example of a multi-pass gas cell 1500 according to an embodiment of the disclosure. FIG. 15 includes side and perspective views of a multi-pass gas cell 1500 having an optical molding 1502 (e.g., an enclosure) that includes a light source 1504, an optical core module 1506, and various optical devices (e.g., input / output optics and reflectors for providing multiple reflections, as shown in any of FIGS. 2-14 above). It is noted that the optical devices are internal to the optical molding 1502 and are therefore not shown in FIG. 15 for simplicity. The optical molding 1502 can be fabricated using, for example, injection molding optical techniques to enable mass production of the multi-pass gas cell 1500 resulting in a self-aligned optical device. In injection molding, the optical molding 1502 can be fabricated as two parts that are approximately symmetrical about one or more axes of symmetry.

[0056] The optical core module 1506 can include, for example, a MEMS spectrometer. Additionally, the light source 1504 can include, for example, a light emitting diode (LED) or a filament light source. In the example shown in FIG. 15, the multi-pass gas cell 1500 can further include an element 1508 configured to absorb or block moisture in the gas. In some examples, the element 1508 can include a filter or other suitable structure for absorbing or blocking humidity or moisture in the gas.

[0057] Within this disclosure, the word "exemplary" is used to mean "serving as an example, instance, or illustration." Any embodiment or aspect described herein as "exemplary" should not necessarily be construed as preferred or advantageous over other aspects of the disclosure. Likewise, the term "aspect" does not require that all aspects of the disclosure include the described feature, advantage, or mode of operation. The term "coupled" is used herein to refer to a direct or indirect coupling between two objects. For example, if object A is in physical contact with object B, and object B is in contact with object C, objects A and C may still be considered to be coupled to each other even if they are not in direct physical contact with each other. For example, a first object may be coupled to a second object even if the first object is not in direct physical contact with the second object. The terms "circuitry" and "circuitry" are used broadly and are intended to include both hardware implementations of electrical devices and conductors that, when connected and configured, enable the performance of the functions described in this disclosure, without limitation as to the type of electronic circuitry, as well as software implementations of information and instructions that, when executed by a processor, enable the performance of the functions described in this disclosure.

[0058] One or more of the components, steps, features and / or functions shown in Figures 1-15 may be rearranged and / or combined into a single component, step, feature or function, or embodied in several components, steps or functions. Additional elements, components, steps and / or functions may also be added without departing from the novel features disclosed herein. The apparatus, devices and / or components shown in Figures 1-15 may be configured to perform one or more of the methods, features or steps described herein. The novel algorithms described herein may also be efficiently implemented in software and / or embedded in hardware.

[0059] It is understood that the specific order or hierarchy of steps in the method disclosed is an example of an example process. Based on design preferences, it is understood that the specific order or hierarchy of steps in the method may be rearranged. The accompanying method claims present elements of the various steps in a sample order, and are not intended to be limited to the specific order or hierarchy presented unless specifically recited in the claims.

[0060] The foregoing description is provided to enable those skilled in the art to practice the various embodiments described herein. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments. Thus, the claims are not intended to be limited to the embodiments set forth herein, but are to be accorded full scope consistent with the language of the claims, and references to elements in the singular are not intended to mean "only one," but rather "one or more," unless specifically stated in the singular. Unless specifically stated otherwise, the term "some" refers to one or more. The term "at least one of" a list of terms refers to any combination of those terms, including single members. As an example, "at least one of a, b, or c" is intended to cover a, b, c, a and b, a and c, b and c, and a, b, and c. All structural and functional equivalents to the elements of the various embodiments described throughout this disclosure that are known or later become known to those skilled in the art are expressly incorporated herein by reference and are intended to be encompassed by the claims. Moreover, nothing disclosed herein is intended to be dedicated to the public, regardless of whether such disclosure is expressly recited in a claim. No claim element is to be construed under the provisions of 35 U.S.C. 112(f) unless the element is expressly recited using the phrase "means for," or, in the case of a method claim, the element is recited using the phrase "step for."

Claims

1. 1. A multi-pass gas cell, comprising: a first optical component optically coupled to receive input light at an optical input of the multi-pass gas cell and configured to collimate the input light to produce collimated light; a set of two or more reflectors optically coupled to receive the collimated light and configured to reflect the collimated light within the multi-pass gas cell to generate multiple reflections of the collimated light; a second optical component optically coupled to receive output light resulting from multiple reflections of the collimated light and configured to focus the output light toward an optical output of the multi-pass gas cell; the first optical component and the second optical component are integrated with at least one reflector of the set of two or more reflectors; The multi-pass gas cell further comprises an enclosure configured to receive a gas, and the set of two or more reflectors, the first optical component, and the second optical component are contained within the enclosure. A multi-pass gas cell comprising:

2. The multi-path gas cell according to claim 1, A multi-pass gas cell, wherein the enclosure, the set of two or more reflectors, the first optical component and the second optical component are fabricated within a same substrate using injection molded optical components.

3. The multi-path gas cell according to claim 1, A spectrometer; and a light source, wherein the spectrometer and the light source are assembled within the enclosure.

4. In the multi-path gas cell according to claim 1, 13. A multi-pass gas cell, further comprising a circulation unit configured to circulate gas from an exterior of the enclosure to an interior of the enclosure.

5. The multi-path gas cell of claim 1, 11. A multi-pass gas cell, further comprising an element configured to absorb or block moisture in the gas.

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