Rotary coating apparatus

Abstract

To provide a rotary coating apparatus that is capable of coating a coating material with an even thickness on a surface of a coated body, by synchronizing rotation of a lid and a rotary table.SOLUTION: In a rotary coating apparatus, a rotary table 1 surrounds a chamber 12 which places and positions a coated body 7, and a lid 2 is laid on the rotary table so as to cover the chamber. Further, in the rotary coating apparatus, a magnetic mechanism includes a first magnetic member 31 and a second magnetic member 32. One of the first magnetic member and the second magnetic member is provided on the rotary table, whereas the other one is provided on the lid. When the lid is laid on the rotary table, a magnetic action occurs between the first magnetic member and the second magnetic member so that the lid is fixed to the rotary table, whereby a same rotational relationship is formed.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to coating technology, and more particularly to a spin coating device. [Background technology]

[0002] A spin coater is a specialized machine for coating and film processing. Its applications are widely used in, but not limited to, electronic products, optical products, automotive products, medical equipment, glass products, etc. The principle of a spin coater is to spread the paint on the surface of the object to be coated by the rotating force, so that the paint forms a uniform layer of coating on the surface of the object to be coated.

[0003] There are various factors that affect the quality of the paint layer, for example, common factors such as rotation speed, paint flow rate, rotation time, etc. will affect the thickness and uniformity of the coating. However, in addition to the above three factors, there are other interfering factors, so it is necessary to provide a new and innovative spin coating device to solve the above problems. Summary of the Invention [Problem to be solved by the invention]

[0004] The main object of the present invention is to provide a spin coating device in which a cover body covers a chamber, and the gas in the chamber is covered and rotates synchronously with the cover body, thereby eliminating the effects of gas turbulence, and converting kinetic energy using the principle of magnetic interaction, so that the cover body rotates simultaneously with the turntable, thereby improving the quality of the finished product. [Means for solving the problem]

[0005] In order to achieve the above object, the present invention provides a spin coating device including a turntable, a cover, and a magnetic mechanism. The turntable surrounds a chamber for placing and positioning an object to be coated, the cover is provided so as to be able to be placed on the turntable so as to cover the chamber, and the magnetic mechanism has a first magnetic member and a second magnetic member, one of the first magnetic member and the second magnetic member is provided on the turntable and the other is provided on the cover, and when the cover is provided on the turntable, a magnetic force is generated between the first magnetic member and the second magnetic member, making the cover rotatable together with the turntable. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a perspective view of a first embodiment of the present invention. [Diagram 2] FIG. 2 is an exploded view of FIG. [Diagram 3] FIG. 2 is a perspective view of a collection bowl according to a first embodiment of the present invention. [Figure 4] FIG. 1 is a cross-sectional view of a first embodiment of the present invention. [Diagram 5] FIG. 5 is a partially enlarged view of FIG. [Figure 6] FIG. 11 is an exploded view of a second embodiment of the present invention. [Figure 7] FIG. 5 is an enlarged partial cross-sectional view of a second embodiment of the present invention. [Figure 8] FIG. 11 is an enlarged partial cross-sectional view of a third embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] The following examples are for illustrating possible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. As explained at the beginning, "one" or "at least one" before a noun mentioned in the specification does not limit the number, and can be "plural" if necessary, and this number change belongs to the scope of protection.

[0008] 1 to 5 show a first embodiment of the present invention, and the spin coating apparatus of the present invention includes a turntable 1, a cover 2, and a magnetic mechanism 3. As shown in FIG.

[0009] The turntable 1 encloses a chamber 12 for placing and positioning a workpiece 7 (e.g., a wafer, a glass disk, etc.), and in use, a coating material (e.g., a photoresist liquid) is placed on the surface of the workpiece 7. The cover 2 is placed on the turntable 1 so as to cover the chamber 12. The magnetic mechanism 3 has a first magnetic member 31 and a second magnetic member 32, one of which is provided on the turntable 1 and the other is provided on the cover 2. When the cover 2 is placed on the turntable 1, a magnetic force is generated between the first magnetic member 31 and the second magnetic member 32, making the cover 2 rotatable together with the turntable 1.

[0010] The turntable 1, the cover 2, the first magnetic member 31 and the second magnetic member 32 are arranged coaxially to locate the center of gravity and make it easy to grasp the overall balance. For example, when a magnetic attraction force is generated between the first magnetic member 31 and the second magnetic member 32 and rotates, the cover 2 is smoothly attracted to the turntable 1 and resists the action of centrifugal force, achieving the purpose of synchronous rotation without arbitrary shaking, and allowing the paint to be applied uniformly (with a uniform thickness) to the surface of the workpiece 7.

[0011] In this embodiment, the first magnetic member 31 is a magnet, and the second magnetic member 32 is also a magnet. The selection of magnets has the advantages of easy availability of materials, easy assembly, and simple structural components. Of course, various magnetic materials such as electromagnets, magnetic adhesives, magnetic paints, etc. can be selected according to the application. In detail, the first magnetic member 31 and the second magnetic member 32 are respectively provided on opposing sides of the turntable 1 and the cover body 2, a first groove 11 is recessed into the outer peripheral edge of the turntable 1 on the side facing the cover body 2, and a second groove 21 is recessed into the outer peripheral edge of the cover body 2 on the side facing the turntable 1, and one of the first magnetic member 31 and the second magnetic member 32 is fitted into the first groove 11 and the other is fitted into the second groove 21.

[0012] More specifically, the first groove 11 and the second groove 21 are each ring-shaped, and the first magnetic member 31 and the second magnetic member 32 are each ring-shaped strip-shaped, and when the cover 2 is placed on the rotary table 1, the first magnetic member 31 and the second magnetic member 32 abut against each other, so that the first magnetic member 31 and the second magnetic member 32 can have excellent magnetic attraction strength with a small magnetic attraction area or a small total volume.

[0013] Of course, the present invention is not limited to the above configuration. Please refer to the second embodiment shown in Fig. 6 and Fig. 7. The first magnetic member 31A and the second magnetic member 32A are provided on the opposite sides of the turntable 1A and the cover 2A, respectively, and the first magnetic member 31A and the second magnetic member 32A are arranged at a distance from each other when the cover 2A is placed on the turntable 1A. The first magnetic member 31A and the second magnetic member 32A are attached in a plate shape on the opposite sides of the turntable 1A and the cover 2A, respectively, thereby providing a large-area, uniform, and strong magnetic attraction effect, and the cover 2A can be stably coupled to the turntable 1A.

[0014] 1 to 5, the spin coating apparatus further includes a moving device 5, which is connected to the cover 2 and drives the cover 2 to be movable between a first position and a second position, and when the cover 2 is in the first position, the cover 2 does not cover the chamber 12, and when the cover 2 is in the second position, the cover 2 covers the chamber 12. The moving device 5 can effectively plan the moving stroke, reduce the error caused by manual placement, improve the placement accuracy of alignment, and achieve a semi-automated or fully automated manufacturing process.

[0015] Preferably, the spin coating device further includes a reduction gear 6 connected between the moving device 5 and the lid body 2, and when the moving device 5 drives the lid body 2 to move from the second position to the first position, the reduction gear 6 operates to stop the inertial rotation of the lid body 2 after it has been separated from the rotary table 1. In this embodiment, the reduction gear 6 is an electromagnetic brake for avoiding shaking due to contact friction.

[0016] The rotary coating apparatus further includes a collection bowl 4, which encloses an internal space 41, and the turntable 1 is accommodated in the internal space 41 so as to be rotatable relative to the collection bowl 4. The turntable 1 is perforated with a plurality of discharge holes 13 communicating between the chamber 12 and the internal space 41, and when the turntable 1 rotates, excess paint can flow into the internal space 41 through the plurality of discharge holes 13.

[0017] Furthermore, the internal space 41 has a placement area 412 and a liquid collection area 413 that are connected to each other, the turntable 1 is located in the placement area 412, and the plurality of drain holes 13 are connected to the liquid collection area 413, which is used to receive the coating liquid (paint) discharged from the chamber 12. The collection bowl 4 further has at least one drain passage 42, which connects the liquid collection area 413 to the outside, facilitating collection, recovery, reuse, or unified storage by the outside.

[0018] Furthermore, the collection bowl 4 further has at least one intake passage 43, and the internal space 41 further has an intake area 414, which connects the liquid collection area 413 to the at least one intake passage 43, and the at least one intake passage 43 connects the intake area 414 to the outside. This allows the evaporated paint vapor to be collected and treated in a unified manner, preventing direct diffusion to the outside, and protecting personal safety and the environment. Furthermore, the force of the intake air can guide a unified air flow, so that the air flow can flow stably and uniformly to the outside by surrounding the workpiece 7 with the multiple exhaust holes 13, thereby ensuring the stability of the movement and diffusion of the paint.

[0019] In this embodiment, the at least one drain passage 42 is one, the at least one intake passage 43 is four, and the four intake passages 43 can generate a uniform and stable intake force. The liquid collection area 413 is ring-shaped, the intake area 414 is ring-shaped, the liquid collection area 413 and the intake area 414 are arranged in a concentric ring shape, and the liquid collection area 413 is located on the outer ring side of the intake area 414.

[0020] Please refer to the third embodiment in Fig. 8. The difference from the first embodiment is that a magnetic repulsive force is generated between the first magnetic member 31B and the second magnetic member 32B, and there is a gap 8 between the cover 2B and the turntable 1B. When the turntable 1B rotates, the cover 2B is driven to rotate by the magnetic repulsion method, and after the cover 2B rotates, it is driven to exhaust the gas from the gap 8 to the outside, guiding the air flow in the chamber 12B to be stable and not to cause turbulence, and making the flow of the paint uniform.

[0021] Another difference between the first and second embodiments is that a cover 9 is disposed on the outermost layer. The cover 9 covers the lid 2B and the gap 8 to form a sealed space, and the cover 9 can block external interference and improve the stability and quality of coating. [Explanation of symbols]

[0022] 1, 1A, 1B Rotary Table 11 First groove 12, 12B Chamber 13 Discharge hole 2, 2A, 2B lid body 21 2nd groove 3 Magnetic Mechanism 31, 31A, 31B First magnetic member 32, 32A, 32B Second magnetic member 4. Collection Bowl 41 Interior Space 412 Placement area 413 Liquid collection area 414 Intake area 42 Drainage passage 43 Intake passage 5. Mobile Devices 6 Reducer 7 Object to be coated 8. Gap 9 Cover

Claims

1. A rotary coating device comprising: a rotary table surrounding a chamber for placing and positioning an object to be coated; a cover provided on the rotary table so as to cover the chamber; a magnetic mechanism having a first magnetic member and a second magnetic member, one of the first magnetic member and the second magnetic member being provided on the rotary table and the other being provided on the lid, and when the lid is placed on the rotary table, a magnetic force is generated between the first magnetic member and the second magnetic member, thereby allowing the lid to rotate together with the rotary table; A mobile device; a reduction gear connected between the moving device and the lid body, the moving device is connected to the lid and drives the lid to be movable between a first position and a second position, when the lid is in the first position, the lid does not cover the chamber, and when the lid is in the second position, the lid covers the chamber; When the moving device drives the lid body to move from the second position to the first position, the reduction gear device is activated to stop the inertial rotation of the lid body after it has been separated from the rotary table. Rotary coating device.

2. 2. The spin coating apparatus according to claim 1, wherein the first magnetic member and the second magnetic member are provided on opposing sides of the rotary table and the lid, respectively.

3. 3. The spin coating apparatus according to claim 2, wherein the first magnetic member and the second magnetic member abut against each other and come into contact with each other when the cover is placed over the rotary table.

4. The rotary coating device of claim 2, wherein a first groove is recessed into the outer peripheral edge of the rotary table on the side facing the lid body, and a second groove is recessed into the outer peripheral edge of the lid body on the side facing the rotary table, and one of the first magnetic member and the second magnetic member is fitted into the first groove and the other is fitted into the second groove.

5. 5. The spin coating device according to claim 4, wherein the first groove and the second groove are each ring-shaped, and the first magnetic member and the second magnetic member are each ring-shaped strip-shaped.

6. The rotary coating device according to claim 1, wherein the first magnetic member and the second magnetic member are respectively provided on opposite sides of the rotating table and the cover body, and when the cover body is placed over the rotating table, the first magnetic member and the second magnetic member are positioned at a distance from each other.

7. 7. The spin coating apparatus according to claim 6, wherein the first magnetic member and the second magnetic member are attached in the form of a plate to opposite sides of the turntable and the lid, respectively.

8. 2. The spin coating device of claim 1, further comprising a collection bowl, the collection bowl enclosing an internal space, the rotating table being accommodated in the internal space so as to be rotatable relative to the collection bowl, and the rotating table having a plurality of discharge holes extending therethrough that communicate the chamber with the internal space.

9. The spin coating device of claim 8, wherein the internal space has a communicating placement area and a liquid collection area, the spin table is located in the placement area, the plurality of discharge holes are connected to the liquid collection area, and the liquid collection area is used to receive the coating liquid discharged from the chamber.

10. 10. The spin coating apparatus of claim 9, wherein the collection bowl further comprises at least one drain passage, the at least one drain passage communicating the liquid collection area with the outside.

11. 10. The spin coating apparatus of claim 9, wherein the collection bowl further comprises at least one intake passage, the interior space further comprises an intake area, the intake area communicating with the liquid collection area and the at least one intake passage, and the at least one intake passage communicating with the intake area and the outside.

12. 2. The spin coating apparatus according to claim 1, wherein the deceleration device is an electromagnetic brake.

13. The apparatus further includes a collection bowl, the collection bowl enclosing an internal space, the rotating table being accommodated in the internal space and rotatable relative to the collection bowl, and the rotating table having a plurality of drain holes extending therethrough that communicate the chamber with the internal space; the internal space has a placement area and a liquid collecting area that are in communication with each other, the turntable is located in the placement area, the plurality of discharge holes are in communication with the liquid collecting area, and the liquid collecting area is used to receive the coating liquid discharged from the chamber; the collection bowl further comprises at least one drain passage, the at least one drain passage communicating the liquid collection area with the exterior; the collection bowl further comprises at least one intake passage, the interior space further comprises an intake region, the intake region communicating with the liquid collection region and the at least one intake passage, the at least one intake passage communicating with the intake region and the outside; the rotary coating apparatus further includes a moving device and a deceleration device, the moving device is connected to the lid body and drives the lid body so as to be movable between a first position and a second position, when the lid body is at the first position, the lid body does not cover the chamber, and when the lid body is at the second position, the lid body covers the chamber, the deceleration device is connected between the moving device and the lid body, and when the moving device drives the lid body to move from the second position to the first position, the deceleration device is activated to stop the inertial rotation of the lid body after it has been separated from the rotary table, The reduction gear is an electromagnetic brake, the first magnetic member is a magnet; the second magnetic member is a magnet; the rotary table, the cover, the first magnetic member, and the second magnetic member are coaxially arranged, 6. The spin coating device of claim 5, wherein the at least one drain passage is one, the at least one intake passage is four, the liquid collection area is ring-shaped, the intake area is ring-shaped, the liquid collection area and the intake area are arranged in a concentric ring shape, and the liquid collection area is located on the outer ring side of the intake area.

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