Electrostatic chuck

Abstract

To provide an electrostatic chuck capable of achieving both protection of insulation breakdown in a base plate and security of cooling performance of a dielectric substrate.SOLUTION: An electrostatic chuck 10 includes: a dielectric substrate 100; a base plate 200 formed by metal; a joint layer 300 joining a dielectric substrate 100 and the base plate 200; and an insulation film 230 formed on the surface of the base plate 200. The insulation film 230 includes: a first part 231 covering a part facing the joint layer 300 of the surface of the base plate 200; and a second part 232 connected to the first part 231 from outside. Thickness T1 of the first part 231 is thinner than thickness T2 of the second part 232.SELECTED DRAWING: Figure 2

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