Electrostatic chuck and method for manufacturing the same

Abstract

To provide an electrostatic chuck in which the width of a seal ring is uniform for the whole circumference, and a method for manufacturing the electrostatic chuck.SOLUTION: An electrostatic chuck 10 includes: a dielectric substrate 100 having a surface 110 on which a substrate W is placed; and a seal ring 160 as a ring-shaped protrusion formed in the dielectric substrate 100, the top end surface of the seal ring being a part of the surface 110. The dielectric substrate 100 includes: an inner surface 151 extending in a direction perpendicular to the surface 110; and a planer surface 171 extending in the shape of a ring along the seal ring 160 between the seal ring 160 and the inner surface 151, the planer surface being located in a position which is not in contact with the substrate W.SELECTED DRAWING: Figure 4

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