Corrosion-resistant film

Abstract

To provide a corrosion-resistant film that is suppressed in detachment due to thermal expansion and shrinkage even when being applied to a member having a large thermal expansion coefficient.SOLUTION: A corrosion-resistant film includes: a silicon oxide film 11 (SiO2) having resistance to thermal expansion and shrinkage and formed between a member 5 and a heat-resistant film 12 including an aluminum oxide as the principal component; and a titanium oxide film 13 (TiO2) formed at a surface of the heat-resistant film 12 and suppressed in penetration of components of the heat-resistant film 12, thereby having corrosion resistance while being prevented from generation of a crack due to internal stress that is caused by thermal expansion and shrinkage of the member 5.SELECTED DRAWING: Figure 2

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