Vibration isolation table

Abstract

To provide a vibration isolation table having a compact air spring for holding a load at a constant height irrespective of the weight of the load.SOLUTION: A vibration isolation table comprises a plate having a plate penetration hole and an air injection port, a piston inserted into the plate penetration hole, an annular valve arranged between the plate penetration hole and the piston, an elastic member arranged between an upper end part of the piston and the valve, a piping part arranged at an upper face of the plate, and a lift part arranged at a lower face of the plate, and moving the plate in a vertical direction along a center axial line of the piston. An air passage being a clearance between the valve and the plate penetration hole is opened by an elastic deformation of the piping part caused by air injection, air flows into a clearance between the lift part and the lower face of the plate, and the air space is closed by an elastic force of the elastic member.SELECTED DRAWING: Figure 1A

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