Grinding stone and manufacturing method therefor

Abstract

To provide a grinding stone capable of increasing strength, and a manufacturing method therefor.SOLUTION: A grinding stone 10 having a processing surface 10a processing an object to process includes: a mesh base part 31; a mesh material 30 which is integrally formed with the mesh base part 31 and has a mesh standing part 35 extending in the direction crossing the mesh base part 31; and a processing part 11 which is connected to the mesh standing part 35 and a part of which is located on the processing surface 10a to process the object to process. In the mesh base part 31, an opening hole 31a located in the periphery of a root part Rt of the mesh standing part 35 is formed.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a grinding wheel and a method for manufacturing the same. [Background technology]

[0002] For example, the grindstone described in Patent Document 1 has a structure in which a plurality of cylindrical parts are arranged on the processing surface. The cylindrical parts contain a plurality of abrasive grains for processing a workpiece, which is a processed object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-49574 A Summary of the Invention [Problem to be solved by the invention]

[0004] The grindstone described in Patent Document 1 leaves room for improvement in terms of strength.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and has an object to provide a grinding wheel capable of increasing its strength and a method for manufacturing the same. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, a grinding wheel according to a first aspect of the present invention is a grinding wheel having a processing surface for processing a workpiece, and comprises a base portion, a substrate having an upright portion formed integrally with the base portion and extending in a direction intersecting the base portion, and a processing portion connected to the upright portion, at least a portion of which is located on the processing surface and processes the workpiece, and an opening hole is formed in the base portion and located around the root portion of the upright portion.

[0007] The base material may be a mesh material.

[0008] The grindstone may further include a filler in which the base material is embedded, while the processed portion is partially exposed on the processed surface.

[0009] The grinding wheel may also be provided with a filler in which the substrate is embedded while partially exposing the processed portion on the processed surface, the processed surface having a circular or annular flat surface, the base portion having a circular or annular sheet shape, and the erected portion extending away from the base portion in a direction intersecting the processed surface as it approaches the tip portion furthest from the root portion.

[0010] The grinding wheel may also be provided with a filler in which the base material is embedded while partially exposing the processed portion on the processing surface, the processing surface being formed on the outer circumferential surface of the cylindrical grinding wheel, the base portion being cylindrical, and the erected portion extending radially outward of the grinding wheel as it approaches the tip portion, which is far from the root portion.

[0011] In addition, the grinding wheel may be provided with a filler in which the base material is embedded while partially exposing the processed portion on the processing surface, the flat surface of the grinding wheel being the processing surface, and the erected portion may extend toward the processing surface as it approaches the tip portion, which is far from the base portion.

[0012] In order to achieve the above-mentioned object, a method for manufacturing a grinding wheel according to a second aspect of the present invention includes the steps of making an approximately U-shaped cut in a portion of a mesh sheet material, and folding the cut area of ​​the mesh sheet material so as to stand up, thereby forming the standing portion and the opening hole in the mesh sheet material, thereby manufacturing a mesh material as the base material. Effect of the Invention

[0013] According to the present invention, the strength of the grindstone can be increased. [Brief description of the drawings]

[0014] [Figure 1]1A and 1B are plan views of a grindstone according to a first embodiment of the present invention. [Diagram 2] 2 is a cross-sectional view taken along line II-II of FIG. 1. [Diagram 3] 1(A) and 1(B) are diagrams illustrating a method for manufacturing a mesh material according to a first embodiment of the present invention. [Figure 4] 2 is a cross-sectional view of a processing portion according to the first embodiment of the present invention. FIG. [Diagram 5] 2 is a cross-sectional view taken along line II-II of FIG. 1 according to a modified example of the present invention. [Figure 6] FIG. 5 is a perspective view of a grindstone according to a second embodiment of the present invention. [Figure 7] FIG. 6 is a planar development of a processing surface of a grindstone according to a second embodiment of the present invention. [Figure 8] 8 is a cross-sectional view taken along line VIII-VIII in FIG. 6. [Figure 9] 13(A) and (B) are plan views of a mesh material in which a processed portion is arranged according to a second embodiment of the present invention. [Figure 10] FIG. 11 is a plan view of a grindstone according to a third embodiment of the present invention. [Figure 11] 11 is a cross-sectional view taken along line XI-XI of FIG. 10. [Figure 12] FIG. 11 is a partial perspective view of a mesh material before being folded according to a modified example of the present invention. [Figure 13] FIG. 11 is a side view of a mesh material after folding according to a modified example of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] (First embodiment) A grindstone according to a first embodiment of the present invention will be described with reference to the drawings. The grindstone of this embodiment is a rotary grindstone that processes a workpiece with its bottom surface.

[0016] As shown in FIG. 1(A), the grinding wheel 10 has a cylindrical or annular shape. The grinding wheel 10 has a processing surface 10a on the bottom surface of the grinding wheel 10. The processing surface 10a is formed in a circular flat shape extending in a direction perpendicular to the rotation axis O of the grinding wheel 10. The grinding wheel 10 processes, i.e., polishes or grinds, a workpiece by rotating around the rotation axis O that is coaxial with the central axis of the grinding wheel 10. The workpiece is, for example, ceramics, silicon wafers, semiconductor substrates, LED (Light Emitting Diode) substrates, heat dissipation substrates, silicon carbide, alumina, sapphire, metal, or the like.

[0017] As shown in FIG. 1(B) and FIG. 2, the grindstone 10 includes a plurality of processing portions 11, a mesh material 30, and a filler material 19. In this example, the mesh material 30 is a sheet made of metal, for example, stainless steel. The mesh material 30 is a porous body through which a fluid can pass. The mesh number of the mesh material 30 is preferably set to #10 to #500. The mesh material 30 is flexible. The mesh material 30 may be made of metals other than stainless steel, such as copper (for example, brass), nickel, aluminum, etc., or may be made of non-metallic materials such as glass, paper, non-woven fabric, woven fabric, or carbon fiber.

[0018] The mesh material 30 includes a mesh base portion 31 embedded in the filling material 19, and a plurality of mesh standing portions 35 to which the processed portion 11 is fixed. The mesh base portion 31 and the mesh standing portions 35 are integrally formed. That is, the mesh base portion 31 and the mesh standing portions 35 are formed by making cuts in a single mesh sheet material and bending it. The manufacturing method will be described later.

[0019] The mesh base portion 31 is in the form of a circular sheet. A plurality of openings 31a are formed in the mesh base portion 31. The openings 31a have the same shape as the mesh standing portion 35, which is rectangular in this example. The openings 31a and the mesh standing portion 35 are provided in a one-to-one relationship.

[0020] Each of the plurality of mesh standing portions 35 extends in a direction intersecting with the mesh base portion 31, and each is connected to a processed portion 11. The base portion Rt of the mesh standing portion 35 is connected to the edge portion of the opening hole 31a. In this example, the angle θ that the mesh standing portion 35 makes with the mesh base portion 31 on the opening hole 31a side is set to 90°. The angle θ is not limited to 90° and may be set to any value within a range of 1° to 179°. For example, the angle θ may be set to 10° to 90°. For example, the angle θ may be set to 45° as shown in FIG. 5.

[0021] 2, the mesh standing portion 35 passes through the center of the thickness direction of the multiple processed portions 11, thereby becoming a core material of the processed portions 11. The processed portions 11 (more precisely, the bonding material 16 described later) enter into the holes of the mesh standing portion 35, thereby being connected to the mesh standing portion 35 by an anchor effect.

[0022] The multiple processing parts 11 are erected in a direction intersecting the processing surface 10a, in this example, in a direction perpendicular to the processing surface 10a. The multiple processing parts 11 are formed in a dashed line extending in the radial direction R of the circular processing surface 10a, and are arranged in the circumferential direction C of the processing surface 10a. The multiple processing parts 11 are arranged in a staggered manner in the radial direction R and the circumferential direction C. Each processing part 11 polishes or grinds the workpiece W while being cut. Each processing part 11 is in the form of a flat plate extending in the radial direction R of the processing surface 10a and in a direction along the rotation axis O. Each processing part 11 is formed to have the same shape and size.

[0023] As shown in FIG. 4, the processing part 11 includes a plurality of abrasive grains 15 and a binder 16. The plurality of abrasive grains 15 are distributed in the binder 16. The abrasive grains 15 are, for example, diamond. The abrasive grains 15 are not limited to diamond, and may be cubic boron nitride (CBN) abrasive grains, or may be a mixture of CBN abrasive grains and diamond. Furthermore, the plurality of abrasive grains 15 may be silicon carbide (SiC), fused alumina (Al2O3), or a mixture of these. The binder 16 holds the plurality of abrasive grains 15 therein. The binder 16 is formed of a metal such as nickel, iron, aluminum, or copper, an alloy such as an aluminum alloy or bronze, a resin such as a phenolic resin or an epoxy resin, or a ceramic.

[0024] 1, the filler 19 fills the entire area of ​​the grinding wheel 10 and holds inside the mesh material 30 to which a plurality of processing portions 11 are fixed. Each mesh material 30 having each processing portion 11 is embedded in the filler 19 with the tip of each processing portion 11 exposed to the processing surface 10a. The filler 19 is made of a material that is more easily deformed by an external force than the processed portion 11 and is more easily worn during processing than the processed portion 11. The filler 19 is made of a superelastic material such as resin, ceramic, or rubber, or a sponge. The filler 19 may be formed so that the fluid cannot pass through it, or may be formed of a porous material through which the fluid can pass.

[0025] Next, a method for manufacturing the grindstone 10 will be described. First, as shown in Fig. 3(A), a mesh sheet material 30A is prepared. Then, a plurality of processed portions 11 are joined to the mesh sheet material 30A. Next, incisions are made along the cut lines L1 to L3 in the mesh sheet material 30A, leaving a portion of the periphery of the processed portions 11. The cut lines L1 to L3 are formed along three sides of a rectangle surrounding the processed portions 11. The cut lines L1 to L3 are formed to form a U-shape.

[0026] Next, as shown in Fig. 3(B), the mesh sheet material 30A is folded so as to raise the area surrounded by the cut lines L1 to L3 together with the processed portion 11. Specifically, the mesh standing portion 35 is formed by folding the openings (the remaining side of the rectangle) of the cut lines L1 to L3 along the fold line Lf. The angle θ formed by the mesh standing portion 35 is determined by the angle at which the mesh standing portion 35 is folded. Also, an opening hole 31a is formed in the area surrounded by the cut lines L1 to L3. The mesh material 30 is then completed by making an incision at each processed portion 11 and folding the material. The mesh material 30 is then covered with the filler 19, completing the grindstone 10. In the above-described manufacturing method, the order of the step of joining the processed portion 11 to the mesh sheet material 30A and the step of making cuts in the mesh sheet material 30A may be reversed.

[0027] (effect) According to the first embodiment described above, the following effects are achieved. (1) A grindstone 10 having a processing surface 10a for processing a workpiece W includes a mesh base portion 31, a mesh material 30 which is an example of a substrate having a mesh standing portion 35 which is formed integrally with the mesh base portion 31 and extends in a direction intersecting with the mesh base portion 31, and a processing portion 11 which is connected to the mesh standing portion 35 and has a part located on the processing surface 10a for processing the workpiece W. The mesh base portion 31 has an opening hole 31a formed therein which is the same shape as the mesh standing portion 35 and which is located around the base portion Rt of the mesh standing portion 35. According to this configuration, the mesh material 30 can increase the strength (destruction resistance) of the grindstone 10. In addition, the thickness of the grindstone 10 can be easily adjusted by adjusting the angle θ between the mesh base portion 31 and the mesh erection portion 35. For example, the life of the processing portion 11 can be maximized by setting the angle θ to 90°.

[0028] (2) The base material is a mesh material 30. According to this configuration, the processed portion 11 is firmly fixed to the mesh standing portion 35 by the anchor effect.

[0029] (3) The grinding wheel 10 has the filler 19 in which the mesh material 30 is embedded, while the processing portion 11 is partially exposed on the processing surface 10a. According to this configuration, the mesh base portion 31 serves as a core material for the filler 19, and the strength of the grinding wheel 10 can be increased. In particular, the portions of the filler 19 that pass through the openings 31a connect the portions of the filler 19 on both sides of the front and back of the mesh base portion 31. Thus, the grinding wheel 10 is integrally formed by the openings 31a.

[0030] (4) The processing surface 10a is a circular or annular flat surface. The mesh base portion 31 is a circular or annular sheet. The mesh standing portion 35 extends away from the mesh base portion 31 in a direction intersecting with the processing surface 10a as it approaches the tip portion far from the base portion Rt. According to this configuration, the strength of the grindstone 10 can be increased.

[0031] (5) The method for manufacturing the grinding wheel 10 includes the steps of making an approximately U-shaped cut in a portion of the mesh sheet material 30A, and bending the cut area of ​​the mesh sheet material 30A so as to stand up, thereby forming the mesh standing portion 35 and the opening hole 31a in the mesh sheet material 30A, thereby manufacturing the mesh material 30. According to this configuration, a grinding wheel 10 with high strength can be easily manufactured.

[0032] Second embodiment A grinding wheel according to a second embodiment of the present invention will be described with reference to the drawings. The grinding wheel according to this embodiment is a rotary grinding wheel that processes a workpiece with its outer circumferential surface. The following description will focus on the differences from the first embodiment.

[0033] As shown in Fig. 6, Fig. 7 and Fig. 8, the grindstone 210 includes a plurality of processing portions 211, a filler 219 and a mesh material 230. The processing portions 211, the filler 219 and the mesh material 230 are formed of the same materials as the processing portions 11, the filler 19 and the mesh material 30 of the first embodiment. The grindstone 210 has a substantially cylindrical shape. The processing surface 210a of the grindstone 210 is formed on the outer circumferential surface of the grindstone 210. Fig. 7 is a view in which the processing surface 210a is developed into a plane. The portion of each processed portion 211 exposed on the processed surface 210a has a substantially rectangular shape that is long in the circumferential direction C and short in the direction of the rotation axis O. This reduces the processing resistance.

[0034] The plurality of processing portions 211 are arranged on a plurality of spirals La (see FIG. 8) virtually drawn on the processing surface 210a. The plurality of spirals La are aligned in the direction of the rotation axis O.

[0035] As shown in FIG. 8, the mesh material 230 includes a mesh base portion 231 in which an opening hole 231a is formed, and a plurality of mesh standing portions 235. The mesh base portion 231 is cylindrical. The mesh standing portion 235 extends outward in the radial direction R from the base portion Rt toward the tip portion. The mesh standing portion 235 is formed so as to be inclined in the direction of the rotation axis O and the radial direction R. The angle θ formed by the mesh standing portion 235 is set to 45°. Note that the angle θ formed by the mesh standing portion 235 is not limited to 45°, and may be, for example, 10° to 90°. The mesh standing portion 235, the opening 231a and the processed portion 211 each have a rhombus shape.

[0036] Next, a method for manufacturing the grindstone 210 will be described. First, as shown in Fig. 9(A), a mesh sheet material 23A is prepared. Then, a plurality of processed portions 211 are joined to the mesh sheet material 23A. The plurality of processed portions 211 each have a diamond-shaped plate shape and are arranged in a staggered pattern on the mesh sheet material 23A. Next, as shown in Fig. 9(B), cuts are made along the cut lines L4 to L6 in the mesh sheet material 23A, leaving a portion of the periphery of the processed portion 211. The cut lines L4 to L6 are formed along three sides of the diamond shape. The cut lines L4 to L6 are formed to form a roughly U-shape.

[0037] Next, the mesh sheet material 23A is folded so that the area surrounded by the cut lines L4 to L6 is raised together with the processed portion 211. Specifically, the opening of the cut lines L4 to L6 (the remaining side of the diamond) is folded along the folding line Lf. This completes the mesh material 230. Then, the mesh material 230 is covered with the filler 219, thereby completing the grindstone 210.

[0038] (effect) According to the second embodiment described above, the following effects are achieved. The processing surface 210a is formed on the outer circumferential surface of the cylindrical grindstone 210. The mesh base portion 231 has a cylindrical shape. The mesh standing portion 235 extends outward in the radial direction R of the grindstone 210 from the base portion Rt toward the distal end portion farther away. According to this configuration, the strength of the grindstone 10 can be increased.

[0039] Third embodiment A grindstone according to a third embodiment of the present invention will be described with reference to the drawings. The grindstone according to this embodiment is formed in a plate shape. The following description will focus on the differences from the first embodiment.

[0040] As shown in Fig. 10 and Fig. 11, the grindstone 310 includes a plurality of processing portions 311, a filler 319, and a mesh material 330. The processing portions 311, the filler 319, and the mesh material 330 are formed of the same materials as the processing portions 11, the filler 19, and the mesh material 30 of the first embodiment. The grindstone 310 is plate-shaped, and in this example, is rectangular plate-shaped. The processing surface 310a of the grindstone 310 is formed on the surface of the grindstone 310. Hereinafter, the longitudinal direction of the grindstone 310 is defined as the X direction, and the lateral direction of the grindstone 310 is defined as the Y direction.

[0041] The multiple processing parts 311 extend in a direction inclined toward the X and Y directions, and are arranged at intervals in the X direction. In this manner, by inclining each processing part 311, it is possible to reduce the difference in the amount of processing between when the grindstone 310 moves in the X direction and when it moves in the Y direction relative to the workpiece during processing. It should be noted that the processed portions 311 are not limited to this example, and may extend in either the X or Y direction and be aligned in the other direction. Moreover, the processed portion 311 may be formed in a dashed line shape.

[0042] 11, the mesh material 330 includes a mesh base portion 331 in which openings 331a are formed, and a plurality of mesh standing portions 335 to which the processing portions 311 are fixed. The manufacturing method of the grindstone 310 is the same as the manufacturing method of the grindstones 10 and 210 described above.

[0043] (effect) According to the third embodiment described above, the following effects are achieved. The grindstone 310 is flat. The surface of the grindstone 310 is a processing surface 310a. The mesh standing portion 335 extends from the base portion Rt toward the processing surface 310a as it approaches the distal end portion. According to this configuration, the strength of the grindstone 10 can be increased.

[0044] The present invention is not limited to the above-described embodiment and drawings. Modifications (including the deletion of components) can be made as appropriate within the scope of the present invention. An example of a modification will be described below.

[0045] (Modification) The way in which the mesh erection parts 35, 235, 335 are erected relative to the mesh base parts 31, 231, 331 is not limited to the above-mentioned embodiments. For example, as shown in FIG. 12, a rectangular wave-shaped cut line L7 is made in the mesh sheet material 43A. A processed part 411 is fixed to an area 432 surrounded by the cut line L7 from three directions. Then, the area 432 surrounded by the cut line L7 of the mesh sheet material 43A is folded and raised together with the processed part 411. Here, the amplitude direction of the cut line L7 is defined as the H direction, and the direction perpendicular to this amplitude direction is defined as the L direction. At this time, as shown by the arrows Ar1 and Ar2 in FIG. 12, the two areas 432 adjacent to each other in the L direction are raised to opposite sides in the H direction. As a result, the mesh material 430 is completed as shown in FIG. 13. The mesh material 430 includes a mesh base part 431 and a mesh erection part 435 corresponding to the area 432. The upper ends of the mesh standing portions 435 are positioned so as to overlap each other when viewed from the direction L. In other words, the mesh standing portions 435 cross each other so as to form a substantially upside-down V shape when viewed from the direction L. Finally, the processing portion 411 and the mesh material 430 are covered with the filling material to complete the grindstone.

[0046] In each of the above embodiments, the shape of the mesh standing portion 35, 235, 335, 435 can be changed as appropriate, and may be a polygon such as a triangle, a pentagon, or a hexagon, or may be a circle or an ellipse. The mesh standing portion 35, 235, 335, 435 may be bent into a V shape. In this case, the processed portion 11, 211, 311, 411 also has a V shape. In particular, in the first embodiment, the mesh standing portion 35 may be in the form of a rectangular sheet extending over the entire area in the radial direction R of the processing surface 10a. In the second embodiment, the mesh standing portion 235 may be in the form of a rectangular sheet extending over the entire area in the direction of the rotation axis O of the processing surface 210a. Furthermore, the processed portion 11, 211, 311, 411 may be joined to a part of the mesh standing portion 35, 235, 335, 435. Furthermore, a plurality of processed portions 11, 211, 311, 411 may be fixed to one mesh standing portion 35, 235, 335, 435.

[0047] In each of the above embodiments, the grinding wheel 10, 210, 310 may be configured as a grinder disc. The grindstone 210 may be a cutting grindstone having a plurality of processing portions 211 arranged in a line in the circumferential direction. Furthermore, the mesh standing portions 35, 235, 335, 435 may be inclined with respect to the mesh base portion 31, 231, 331, 431 so as to partially overlap each other.

[0048] The processing portion 11, 211, 311, 411 does not have to contain a plurality of abrasive grains 15. In this case, the processing portion 11, 211, 311, 411 may be made of a metal such as a cemented carbide alloy. The filler 19, 219, 319 may be omitted. Folds or wrinkles may be formed in the mesh standing portions 35, 235, 335, 435. This allows the processed portions 11, 211, 311, 411 to be fixed to the mesh standing portions 35, 235, 335, 435 more firmly.

[0049] In the above-described embodiments, the mesh material 30, 230, 330, 430 is used as the substrate, but the substrate may be made of a material other than a mesh material, for example, a base material without holes, such as a resin plate or a metal plate.

[0050] The filler 19, 219, 319 may be made of a superelastic material such as rubber, or sponge. In this case, the angle θ is set to less than 90° (for example, 20° to 80°), so that the processed portion 11, 211, 311, 411 is easily elastically deformed by being pressed by the workpiece. Therefore, the processed surface can be deformed to match the unevenness of the workpiece. The first and second embodiments may be combined to form a grinding wheel that is capable of processing both its outer circumferential surface and its bottom surface. [Explanation of symbols]

[0051] 10,210,310 Grindstone 10a,210a,310a Machining surface 11,211,311,411 Processing department 15 Abrasives 16 Binding material 19,219,319 Filling material 30,230,330,430 Mesh material 30A, 23A, 43A Mesh sheet material 31,231,331,431 Mesh base part 31a,231a,331a Opening hole 35,235,335,435 Mesh erection section 432 areas C circumferential direction O Rotation axis R Radial direction L1~L7 Cutting lines W Workpiece La spiral Rt Base

Claims

1. A grindstone having a processing surface for processing a workpiece, A substrate having a base portion and a standing portion integrally formed with the base portion and extending in a direction intersecting the base portion; a processing section coupled to the standing section and having at least a portion located on the processing surface for processing a workpiece; The base portion has an opening formed therein, the opening being positioned around the base of the standing portion. Grindstone.

2. The substrate is a mesh material. The grindstone according to claim 1.

3. The grindstone includes a filler in which the base material is embedded while the processing portion is partially exposed on the processing surface. The grindstone according to claim 1 or 2.

4. The grindstone includes a filler in which the base material is embedded while the processing portion is partially exposed on the processing surface, The machining surface is a circular or annular plane, The base portion has a circular or annular sheet shape, The erected portion extends in a direction intersecting the processing surface so as to move away from the base portion as it approaches the tip portion farther from the root portion. The grindstone according to claim 1 or 2.

5. The grindstone includes a filler in which the base material is embedded while the processing portion is partially exposed on the processing surface, The processing surface is formed on an outer peripheral surface of the cylindrical grinding wheel, The base portion is cylindrical. The erected portion extends radially outward of the grinding wheel as it approaches the tip portion farther from the base portion. The grindstone according to claim 1 or 2.

6. The grindstone includes a filler in which the base material is embedded while the processing portion is partially exposed on the processing surface, The surface of the grindstone having a flat plate shape is the processing surface, The erected portion extends toward the processing surface as it approaches the tip portion far from the base portion. The grindstone according to claim 1 or 2.

7. A method for manufacturing the grindstone according to claim 1 or 2, making a generally U-shaped cut in a portion of the mesh sheet material; and a step of forming the upright portions and the openings in the mesh sheet material by folding the cut regions of the mesh sheet material upright to manufacture the mesh material as the base material. Manufacturing method.

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