Transport system

Abstract

To provide a transport system that reduces the work to be performed by an operator and enables the measurement positions to be flexibly changed when measuring, using a particle counter, particles inside a room in which workpiece machining devices are installed or inside a cassette of each of one or more transport vehicles traveling within the room.SOLUTION: In a transport system 1: each of one or more transport vehicles 10 includes a cassette, a lifting unit, and a particle counter 15; and a control unit 40 includes a measurement unit 41 that causes the particle counter 15 to measure the number of particles in air at any position on a travel path 20, a first recording unit 42 that records measurement information including a date and time, a position, and a result of measurement by the particle counter 15, a second recording unit 43 that records machining information including a position and an operation history of a workpiece machining device 100, and a data association unit 44 that associates the measurement date and time of the particle counter 15 with the operation history indicating what each workpiece machining device 100 performed at the measurement date and time.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a transport system in which an article is transported by a transport vehicle that travels on a travel path installed above a work processing device. [Background technology]

[0002] 2. Description of the Related Art There is known a transport system in which a transport vehicle (automated transport vehicle) transports items such as workpieces, processing tools, and consumables used in processing to a plurality of processing devices (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-163920 Summary of the Invention [Problem to be solved by the invention]

[0004] It is required to manage the size and number of particles suspended in the air in the room where the work processing equipment is installed so that they are below a desired value. Conventionally, the size and number of particles suspended in the air are monitored by fixing a particle counter in the room or by having an operator carry a handy particle counter in a desired location to measure. However, there are problems in that the particle counter can only measure at a fixed position, and that work by the operator is required.

[0005] In addition, the size and number of particles suspended in the cassette in which the transport vehicle stores articles change depending on the room in which the transport vehicle travels and its position within the room, so it is necessary to manage the size and number of these particles so that they are below a desired value. Conventionally, the size and number of particles suspended in the air are monitored by an operator measuring the inside of a cassette in a transport vehicle positioned at any position in the room with a handy particle counter, or by installing a particle counter in a specific location and measuring the inside of a cassette in a transport vehicle positioned there. However, there are problems in that work by an operator is required and that measurements can only be made when the particle counter is placed in a fixed position.

[0006] The present invention has been made in consideration of these problems, and its purpose is to provide a transport system that reduces the work required by an operator and enables the measurement position to be flexibly changed when using a particle counter to measure the inside of a room in which a work processing device is installed or the inside of a cassette on a transport vehicle traveling within the room. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the conveying system of the present invention is a conveying system comprising a work processing device, a conveying vehicle for transporting items to and from the work processing device, a running path installed above the work processing device and along which the conveying vehicle runs, and a control unit, wherein the conveying vehicle has a cassette for storing the items, a lifting unit for raising and lowering the cassette relative to the cassette mounting table of the work processing device, and a particle counter, and the control unit has a measurement unit that causes the particle counter to measure the number of particles in the air at any position on the running path, a first recording unit that records measurement information including the date and time, position, and result of measurement by the particle counter, a second recording unit that records processing information including the position and operation history of the work processing device, and a data linking unit that links the measurement date and time of the particle counter with the operation history indicating what each work processing device was performing at the measurement date and time.

[0008] The control unit may link the travel path, the measurement position of the particle counter, and the position of the work processing device and display them on the same map.

[0009] The particle counter may measure the number of particles in a room in which the work processing device is installed.

[0010] The particle counter may measure the number of particles in the cassette. Effect of the Invention

[0011] The present invention uses a particle counter installed on a transport vehicle to automatically measure the number of particles in the air at any location on the travel path without operator intervention, thereby reducing the work required by the operator and allowing the measurement position to be flexibly changed when the particle counter is used to measure inside a room where a work processing device is installed or inside a cassette of a transport vehicle traveling within the room. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a schematic diagram showing a configuration example of a transfer system according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a part of the transport system of FIG. [Diagram 3] FIG. 3 is a side cross-sectional view showing a portion of the transport system of FIG. [Figure 4] FIG. 4 is a diagram showing an example of particle management information handled by the control unit of the transfer system of FIG. [Diagram 5] FIG. 5 is a diagram showing an example of a display screen displayed by the display unit of the transport system of FIG. [Figure 6] FIG. 6 is a side cross-sectional view showing an example of the configuration of a transfer system according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0014] [Embodiment 1] A conveying system 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a configuration example of the conveying system 1 according to the first embodiment. FIG. 2 and FIG. 3 are a perspective view and a side cross-sectional view showing a part of the conveying system 1 of FIG. 1, respectively. As shown in FIG. 1, the conveying system 1 includes a plurality of work processing devices 100 for processing a work 201 (see FIG. 2, etc.), a conveying vehicle 10 for carrying an article 200 (see FIG. 2, etc.) to and from each of the plurality of work processing devices 100, a running path 20 on which the conveying vehicle 10 runs that is installed between the work processing devices 100 above the work processing devices 100, a display unit 30, and a control unit 40. In the first embodiment, the conveying system 1 includes a plurality of conveying vehicles 10 (three vehicles in the example shown in FIG. 1), but the present invention is not limited to this, and may include one or two vehicles, or may include four or more vehicles. Note that the drawings omit some components as appropriate, or simply show some components by outlines, etc.

[0015] In the first embodiment, the multiple work processing devices 100 constituting the transport system 1 are all installed in one room 1000, as shown in Fig. 1. Note that the multiple work processing devices 100 constituting the transport system 1 are not limited to this in the present invention, and may be installed separately in multiple rooms 1000, or may be installed in one room 1000 each.

[0016] A workpiece 201, which is an example of an object 200 to be processed by the workpiece processing device 100 and to be transported by the transport system 1 according to the first embodiment, will be described. As shown in FIG. 2, the workpiece 201 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like. The workpiece 201 has a flat surface, and chip-shaped devices are formed in each of the areas partitioned by a plurality of intersecting (orthogonal in the first embodiment) planned division lines. Note that the present invention is not limited to this, and the workpiece 201 may not have devices formed thereon. In the first embodiment, the workpiece 201 has an adhesive tape attached to its back surface and an annular frame attached to the outer edge of the adhesive tape, but the present invention is not limited to this, and the annular frame may not be attached and the adhesive tape may not be attached.

[0017] The item 200 to be transported by the transport system 1 is not limited to the workpiece 201, and is not limited in material, shape, structure, size, etc., and may be, for example, a substrate made of other materials such as semiconductors, ceramics, resins, metals, etc., a processing tool for processing the workpiece 201, consumables used for processing the workpiece 201, cleaning tools for cleaning the workpiece processing device 100, and maintenance parts for maintaining the workpiece processing device 100. The processing tool for processing the workpiece 201 is, for example, a cutting blade, a grinding wheel, etc. Other consumables used for processing the workpiece 201 are, for example, a dressing board, a precut board, a dummy workpiece, a dummy workpiece, adhesive tape, a carbon piece, etc. The cleaning tool is a cleaning product such as a cleaning grindstone for cleaning a support surface on which a processing tool is attached. The maintenance parts are, for example, maintenance tools for maintaining any mechanism provided in the other workpiece processing device 100. Regarding the item 200 other than the workpiece 201, in embodiment 1, as shown in FIG. 2, an adhesive tape is attached to the back surface and a ring-shaped frame is attached to the outer edge of the adhesive tape, but the present invention is not limited to this, and the ring-shaped frame may not be attached and the adhesive tape may not be attached.

[0018] The article 200 to be transported by the transport system 1 is provided with a barcode, ID (IDentification), RFID (Radio Frequency IDentification) tag, or the like (all not shown) indicating the type of the article 200. Here, the type of the article 200 (workpiece 201) refers to the type of the article 200, the specifications of the article 200, and information for distinguishing each article 200. The type of the article 200 is, for example, the workpiece 201, a substrate, a cutting blade, a grinding wheel, a dressing board, a precut board, a dummy work, a dummy workpiece, an adhesive tape, a carbon piece, a cleaning tool, a maintenance tool, and the like. For example, when the article 200 is the workpiece 201, the specifications of the article 200 are the diameter, thickness, composition and configuration of the base material, the type and specifications of the device, the interval (index width), width, and number of the planned division lines, the material, configuration, type, and specifications of the attached adhesive tape, the material, configuration, type, and specifications of the annular frame, and the like. Even if the item 200 is something other than the workpiece 201, the specification items of the item 200 are determined appropriately according to the type of the item 200. The information for distinguishing each item 200 is, for example, an identification number provided for each item 200. Furthermore, when the item 200 is a workpiece 201, the information for distinguishing each item 200 may include the lot number of the workpiece 201.

[0019] 2, the work processing device 100 of the transport system 1 includes a housing 110, a cassette mounting table 120, a transport unit 130, a processing unit 140, a receiver 160, a transmitter 170, and a control unit 180. The housing 110 houses each of the components of the work processing device 100 except for the housing 110. An opening 112 of a size and shape that allows the cassette 13 of the transport vehicle 10 that stores the article 200 (work 201) to pass through is formed in a ceiling 111 above the housing 110.

[0020] 2, the cassette mounting table 120 has a mounting area 121 and a guide 122. The mounting area 121 is an area where the cassette 13 descended by the lifting unit 14 from the transport vehicle 10 lands and is placed, and is provided on the upper surface of the cassette mounting table 120 with the same shape and size as the cassette 13 in a plan view. The cassette mounting table 120 supports the cassette 13 that has landed and been placed in the mounting area 121, facing upward.

[0021] The guides 122 are installed on the cassette mounting table 120. A plurality of guides 122 (eight in the example shown in FIG. 2) are erected from the upper surface of the cassette mounting table 120 on the outer circumferential side of the mounting area 121. The guides 122 are arranged on the inner circumferential side at positions where the outer circumferential side of the cassette 13 can be fitted. The inner circumferential surface of the guide 122 is formed with an inclined surface that inclines in a direction protruding toward the inner circumferential side as it goes downward. Furthermore, the inclined surface is formed to be curved, so that the cassette 13 smoothly slides along the guide 122 and is positioned. Therefore, even if the horizontal position of the cassette 13 is misaligned with respect to the loading area 121 when the cassette 13 is lowered from the transport vehicle 10 stopped in the transfer area 22, the guide 122 contacts the cassette 13 with its inclined surface, corrects the horizontal position of the cassette 13 (direction parallel to the XY plane in Figure 2, etc.), positions the cassette 13 horizontally, and allows the cassette 13 to land and be loaded accurately on the loading area 121.

[0022] The transport unit 130 is installed adjacent to the cassette mounting table 120 as shown in Fig. 2. The transport unit 130 carries out the article 200 (workpiece 201) contained in the cassette 13 placed on the mounting area 121 of the cassette mounting table 120 and places it at a predetermined position relative to the processing unit 140, and also carries the article 200 (workpiece 201) placed at a predetermined position around the processing unit 140 into the cassette 13 placed on the mounting area 121 of the cassette mounting table 120. Here, the predetermined position relative to the processing unit 140 is on a holding table (chuck table) around the processing unit 140-1 (cutting unit) and the processing unit 140-3 (imaging unit, inspection unit), or on a spinner table of the processing unit 140-2 (cleaning unit) in the example of the first embodiment shown in Fig. 2.

[0023] In the first embodiment, the transport unit 130 includes, for example, a first transport arm 131, a second transport arm 132, and a pair of rails 133. The first transport arm 131 transports the article 200 (workpiece 201) between inside the cassette 13 that has landed on the placement area 121 of the cassette placement table 120 and on the pair of rails 133. The second transport arm 132 transports the article 200 (workpiece 201) between on the pair of rails 133 and a predetermined position around the processing unit 140. The pair of rails 133 can approach or move away from each other while maintaining a parallel state, and the article 200 (workpiece 201) can be held between the pair of rails 133 via an annular frame. In addition, the transport unit 130 is equipped with a reader that reads the barcode or ID of the item 200 (work 201) when the item 200 (work 201) is transported out of the cassette 13 and into the cassette 13, thereby obtaining information on the type of the item 200 (work 201) and outputting the information to the control unit 180.

[0024] The processing unit 140 processes the workpiece 201. In the first embodiment, the processing unit 140 is, for example, a storage unit that stores and processes the workpiece 201 in an arbitrary storage cassette, such as by switching the workpiece 201 between the cassette 13 and a different cassette, a processing unit that processes the workpiece 201, a cleaning unit that cleans the workpiece 201, an inspection unit that inspects the workpiece 201, an imaging unit that images the workpiece 201, a mounter unit that attaches or peels off a support member such as an adhesive tape to the workpiece 201, a film forming unit that forms a film on the workpiece 201, a running path cleaning and refilling unit that replenishes a cleaning liquid for cleaning the running path 20 and replaces a drying unit 29 (see FIG. 3) that removes the cleaning liquid that has cleaned the running path 20 from the running path 20, and the like. That is, the workpiece processing device 100 that includes the processing unit 140 other than the storage unit and the running path cleaning and refilling unit can perform at least one of processing, cleaning, inspection, imaging, attaching a support member, peeling off a support member, and forming a film on the workpiece 201.

[0025] When the processing unit 140 is a storage unit, it stores various items 200 to be transported by the transport system 1, that is, the workpiece 201, substrates made of other materials such as semiconductors, ceramics, resins, and metals, processing tools for processing the workpiece 201 such as cutting blades and grinding wheels, consumables used for processing the workpiece 201 such as dressing boards, precut boards, dummy workpieces, adhesive tapes, and carbon pieces, cleaning tools for cleaning the workpiece processing device 100, and maintenance parts for maintaining the workpiece processing device 100. When the processing unit 140 is a storage unit, the workpiece processing device 100 stores various items 200 to be transported by the transport system 1 in any cassette within the processing unit 140, and carries them out and in from any cassette to the transport vehicle 10 through an opening 112 in a ceiling 111 above the housing 110. In the example of embodiment 1 shown in FIG. 1, the workpiece processing device 100-2 is a stocker.

[0026] When the processing unit 140 is a processing unit, it may be, for example, a cutting processing unit having a spindle on which a cutting blade is rotatably mounted and cutting the workpiece 201 with the cutting blade, a grinding processing unit having a spindle on which a grinding wheel with a grinding wheel disposed thereon is rotatably mounted and grinding the workpiece 201 with the grinding wheel, a laser processing unit having a laser beam irradiator that irradiates the workpiece 201 with a laser beam and laser processing the workpiece 201 with the laser beam, a plasma processing unit that supplies plasma gas to the workpiece 201 to perform etching, an adhesion processing unit that adheres a protective member such as an adhesive tape to the workpiece 201 and performs protective member installation processing, an ultraviolet processing unit having an ultraviolet irradiator that irradiates the workpiece 201 with ultraviolet rays and performs ultraviolet irradiation processing of the workpiece 201, etc. When the processing unit 140 is a processing unit, the workpiece processing device 100 is a processing device that processes the workpiece 201. In the workpiece processing apparatus 100 shown in FIG. 2, the processing unit 140-1 is a cutting unit, and can perform cutting processing on the workpiece 201.

[0027] When the processing unit 140 is a cleaning unit, it is equipped with a nozzle for supplying a cleaning liquid, a cleaning gas, or the like to the workpiece 201, and performs a cleaning process on the workpiece 201. When the processing unit 140 is a cleaning unit, the workpiece processing apparatus 100 is a cleaning apparatus that performs a cleaning process on the workpiece 201. In the workpiece processing apparatus 100 shown in FIG. 2, the processing unit 140-2 is a cleaning unit, and can perform a cleaning process on the workpiece 201.

[0028] When the processing unit 140 is an inspection unit, it includes a laser beam irradiator that irradiates the workpiece 201 with an inspection laser beam, an electromagnetic wave irradiator that irradiates the workpiece 201 with electromagnetic waves, an ultraviolet irradiator that irradiates the workpiece 201 with ultraviolet rays for inspection, an imager that captures an inspection image of the workpiece 201, and an inspection and determination section that inspects and determines the workpiece 201 based on the results of the irradiation and imaging, and inspects and processes the workpiece 201. When the processing unit 140 is an inspection unit, the workpiece processing device 100 is an inspection device that inspects and processes the workpiece 201. The workpiece processing device 100 shown in FIG. 2 is substantially equipped with an inspection unit, since the processing unit 140-3 has a function as an imager, and the control unit 180 has a function as an inspection and determination section, and can perform inspection processing such as a so-called kerf check that automatically checks whether or not the cutting processing has been performed on the workpiece 201 within a normal range.

[0029] When the processing unit 140 is an imaging unit, it includes an imaging device that images the workpiece 201, and a work mover that moves the workpiece 201 to change and adjust the position and orientation of the workpiece 201 relative to the imaging device, and performs imaging processing of the workpiece 201. When the processing unit 140 is an imaging unit, the work processing device 100 is an imaging device that performs imaging processing on the workpiece 201. In the work processing device 100 shown in FIG. 2, the processing unit 140-3 is the imaging unit, and can perform imaging processing on the workpiece 201.

[0030] When the processing unit 140 is a mounter unit, it includes a support member supplying section that supplies a support member such as an adhesive tape to the workpiece 201, an attachment section that attaches the supplied support member to the workpiece 201, and a peeling section that peels off the support member attached to the workpiece 201, and performs a support member attachment process or a support member peeling process on the workpiece 201. When the processing unit 140 is a mounter unit, the workpiece processing device 100 is a mounter device that performs a support member attachment process or a support member peeling process on the workpiece 201.

[0031] When the processing unit 140 is a film forming unit, it has a film forming section that forms a film on the workpiece 201 and performs a film formation process on the workpiece 201. When the processing unit 140 is a film forming unit, the workpiece processing device 100 is a film forming device that performs a film formation process on the workpiece 201.

[0032] The processing unit 140 performs an exchange process for exchanging items 200 other than the workpiece 201, such as a processing tool for processing the workpiece 201 and consumables used for processing the workpiece 201. When the processing unit 140 of the workpiece processing device 100 performs an exchange process, new processing tools, consumables, etc. are carried in through the opening 112, the used processing tools, consumables, etc. of the processing unit 140 are replaced with the new processing tools, consumables, etc., and the processing tools, consumables, etc. removed from the processing unit 140 are carried out through the opening 112.

[0033] The receiver 160 is connected to the control unit 40 of the transport system 1 so as to be able to communicate with the control unit 40, receives information transmitted from the control unit 40, and outputs the received information to the control unit 180. In the first embodiment, the receiver 160 is connected to the control unit 40 so as to be able to communicate with the control unit 40 wirelessly, but the present invention is not limited to this, and the receiver 160 may be connected to the control unit 40 so as to be able to communicate with the control unit 40 by wire. In the first embodiment, the information received by the receiver 160 from the control unit 40 is, for example, command information for an operation related to the processing of the workpiece processing device 100, and request information for prompting the transmission of information such as the transport status and transport history of the workpiece 201 in the workpiece processing device 100, the processing status and processing history, etc.

[0034] The transmitter 170 is connected to the control unit 40 so as to be able to communicate with the control unit 40, and transmits information output from the control unit 180 to the control unit 40. In the first embodiment, the transmitter 170 is connected to the control unit 40 so as to be able to communicate with the control unit 40 wirelessly, but the present invention is not limited to this, and the transmitter 170 may be connected to the control unit 40 so as to be able to communicate with the control unit 40 via a wire. In the first embodiment, the information transmitted by the transmitter 170 to the control unit 40 is, for example, information such as the transport status and transport history, processing status and processing history, etc. of the workpiece 201 in the workpiece processing device 100.

[0035] The control unit 180 controls the operation of each component of the work processing device 100, and causes the work processing device 100 to perform various processing operations on the item 200 (work 201). The control unit 180 controls the transport unit 130 to control the transport of the item 200 (work 201) between the cassette 13 placed on the cassette placement table 120 and a predetermined position of the processing unit 140, and acquires the transport status and transport history of the item 200 (work 201), information on the position of the item 200 (work 201), and the like from the transport unit 130. The control unit 180 controls the processing unit 140 to control the processing of the item 200 (work 201) by the processing unit 140, and acquires the processing status and processing history of the item 200 (work 201), information on the position of the item 200 (work 201), information on check conditions and check results, and the like from the processing unit 140.

[0036] In this way, the control unit 180 acquires from the transport unit 130 and the processing unit 140 an operation history 322 (see FIG. 4) of the work processing device 100, which includes at least any of the transport status and transport history of the item 200 (work 201), information on the position of the item 200 (work 201), the processing status and processing history of the item 200 (work 201), information on the position of the item 200 (work 201), information on the check conditions and check results, etc. The control unit 180 may further link the operation history 322 of the work processing device 100 with a previously registered position 321 (see FIG. 4) of the work processing device 100, to generate processing information 320 (see FIG. 4) of the work processing device 100, which includes the position 321 of the work processing device 100 and the operation history 322 of the work processing device 100. In addition, in Figure 4, for ease of understanding, the position 321 of the work processing device 100 is represented by "A", "B", "C", "D", "E", "F", etc. (see Figure 1) indicating the type of work processing device 100, but within the control unit 180, it is processed using coordinates based on, for example, a room coordinate system (XYZ coordinates, which are an orthogonal coordinate system, or RθZ coordinates, which are a cylindrical coordinate system, etc.) installed in the room 1000 in which the work processing device 100 is installed, and is used for display in Figure 5.

[0037] The control unit 180 acquires information received by the receiver 160 from the control unit 40, and outputs information to be transmitted to the control unit 40 to the transmitter 170. The control unit 180 causes the work processing device 100 to perform an operation corresponding to the command information received by the receiver 160 from the control unit 40. The control unit 180 causes the transmitter 170 to transmit the operation history 322 of the work processing device 100 to the control unit 40 in response to the request information received by the receiver 160 from the control unit 40. The control unit 180 can also spontaneously transmit the operation history 322 of the work processing device 100 from the transmitter 170 to the control unit 40 even when the request information from the control unit 40 is not received.

[0038] Here, the information on the transport status and transport history of the item 200 (work 201) and the position of the item 200 (work 201) acquired from the transport unit 130 is information that links the type of the item 200 (work 201) and the type of work processing device 100 into which the item 200 (work 201) of that type was carried in and out with the date and time (time) at which the item was carried in and out of the work processing device 100. The type of work processing device 100 refers to information that distinguishes each work processing device 100, such as the type of processing performed by the work processing device 100 or an identification number provided for each work processing device 100.

[0039] In addition, the processing status of the work processing device 100 includes, for example, the type of work processing device 100 being processed, the item 200 (work 201) brought into the housing 110 of the work processing device 100, the transport status including position information of the work 201 within the housing 110 of the work processing device 100, the processing status of the work 201 by the processing unit 140, the error status related to errors that have occurred in the processing unit 140 during processing or in the work 201 during and after processing, the transport status including position information of the machining tools that process the work 201 within the housing 110 of the work processing device 100 and consumables used to process the work 201, and the replacement processing status in the processing unit 140.

[0040] In addition, the processing history of the work processing device 100 refers to, for each item 200 (work 201) processed by the work processing device 100, the type of work processing device 100 processed, the transport history, processing history, error history, and replacement processing history of the item 200 (work 201) performed within the housing 110 of the work processing device 100. Specifically, for each item 200 (work 201), information on the transport processing within the housing 110 of the work processing device 100 and the history of the positional information when the transport processing was performed, information on the processing, the processing conditions at the time of processing, and the history of the processing data obtained during the processing, error history regarding errors that occurred in the processing unit 140 during processing or in the work 201 during and after processing, information on the replacement processing, the replacement processing conditions at the time of the replacement processing, and the history of the replacement processing data obtained during the replacement processing, all of which are linked to the date and time (time) when these processes were performed and the type of the item 200 (work 201).

[0041] In the first embodiment, the control unit 180 includes a computer system. The computer system included in the control unit 180 is a computer having an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 180 performs arithmetic processing according to a computer program stored in the storage device of the control unit 180, and outputs control signals for controlling the work processing device 100 to each component of the work processing device 100 via the input / output interface device of the control unit 180.

[0042] The transport vehicle 10 is an automated guided vehicle (AGV) and, as shown in FIG. 3, has a frame 11, wheels 12, a cassette 13, a lifting unit 14, a particle counter 15, an imaging unit 16, a receiver 17, a transmitter 18, a control unit 19, a nozzle 27, a tank 28, and a drying unit 29.

[0043] The frame 11 is formed in a rectangular shape, and is formed with a recess 11-1 that can accommodate the cassette 13 and is open downward. A plurality of wheels 12 (two in the example shown in Figs. 2 and 3) are provided on each of a pair of parallel side surfaces of the frame 11, and are rotatable independently of each other around an axis perpendicular to the pair of side surfaces. The outer circumferential surface of the wheels 12 contacts the passage area 21 or the transfer area 22 of the running path 20. The wheels 12 are each connected to a motor or the like (not shown), and are rotated around the axis by the motor or the like to run on the passage area 21 or the transfer area 22 of the running path 20. In the first embodiment, the wheels 12 are, for example, mecanum wheels having a plurality of inclined barrel-shaped (cylindrical) rotating bodies attached to the outer circumferential surface.

[0044] The cassette 13 is formed in a rectangular shape and stores the article 200 (workpiece 201) therein. The cassette 13 has an opening formed on a pair of parallel side surfaces, the opening being of a size and shape that allows the article 200 (workpiece 201) to pass through. The cassette 13 has the article 200 (workpiece 201) taken out from the opening and the article 200 (workpiece 201) stored in the opening.

[0045] The lifting unit 14 is provided above the recess 11-1 in the frame 11. As shown in Fig. 3, the lifting unit 14 lifts and lowers the cassette 13 and the article 200 (work 201) stored in the cassette 13 relative to the cassette mounting table 120 of the work processing device 100. The lifting unit 14 lifts and lowers the cassette 13 and the article 200 (work 201) stored in the cassette 13 between an internal position in the vehicle where the cassette 13 and the article 200 (work 201) are stored in the recess 11-1 of the frame 11 of the transport vehicle 10 and a landing position where the cassette 13 and the article 200 land on the mounting area 121 of the cassette mounting table 120 inside the housing 110 of the work processing device 100 through the opening 24 of the travel path 20 and the opening 112 of the work processing device 100.

[0046] 3, the particle counter 15 is provided on the upper surface of the frame 11, and counts and measures the number (concentration) of fine particles (particles) contained in the air around the particle counter 15, and outputs the measurement result to the control unit 19. In the first embodiment, the particle counter 15 measures the number of fine particles in the air at a position in the room 1000 where the transport vehicle 10 is traveling. In the first embodiment, for example, a light scattering type particle counter is used for the particle counter 15, which takes in the surrounding air from an inlet nozzle, irradiates the taken-in air with a laser beam, detects scattered light generated when the laser beam hits fine particles contained in the air with a photodiode and converts it into an electrical signal, measures the size of the fine particles contained in the air based on the size of the electrical signal (electrical pulse), and counts the number of fine particles contained in the air based on the number of the electrical signals, and acquires the size and number of the fine particles contained in the air as the measurement result of the particle counter 15.

[0047] 3, the imaging unit 16 is mounted on the frame 11 so as to face the running path 20 along the vertical direction on which the transport vehicle 10 runs, and images an area below the transport vehicle 10. The imaging unit 16 detects the position of the transport vehicle 10 on the running path 20 by capturing and detecting marks (not shown) of multiple types provided on the running path 20 below the transport vehicle 10, and outputs the detected position of the transport vehicle 10 on the running path 20 to the control unit 19.

[0048] When the transport vehicle 10 stops in the delivery area 22, the imaging unit 16 images the cassette mounting table 120 from above, obtains an image that serves as a reference for determining a stopping position, and outputs the image to the control unit 19. The imaging unit 16 also images the cassette 13 moving up and down relative to the cassette mounting table 120 from above through the opening 24 of the travel path 20 and the opening 112 of the work processing device 100, thereby obtaining images before and after the cassette 13 is positioned in the mounting area 121 by the guide 122 of the cassette mounting table 120, and outputs the images to the control unit 19. It is preferable that the imaging unit 16 has a wide viewing angle so that the entire cassette 13 can be captured within the imaging field of view from above.

[0049] The imaging unit 16 also captures an image of a portion of the running path 20 below the transport vehicle 10, obtains an image of that portion of the running path 20, and outputs the image to the control unit 19. By capturing an image of such a portion of the running path 20, the imaging unit 16 also functions as a sensor that detects foreign matter attached to that portion of the running path 20.

[0050] In the first embodiment, the transport vehicle 10 detects the position of the transport vehicle 10 on the running path 20 and any foreign objects attached to the running path 20 using the imaging unit 16; however, the present invention is not limited to this. For example, the transport vehicle 10 may further include a photoelectric sensor that irradiates a mark on the running path 20 with light from the light-projecting unit and detects reflected light from the mark on the running path 20, and detects the mark on the running path 20 by detecting the reflected light using the photoelectric sensor, thereby detecting the position of the transport vehicle 10 on the running path 20, and detects any foreign objects attached to the running path 20 based on changes in the amount of light reflected from the mark.

[0051] The imaging unit 16 includes an imaging element such as a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 16 is, for example, an infrared camera or a visible light camera. The imaging unit 16 of the present invention is not limited to a single imaging unit as in the first embodiment, and may include a plurality of imaging units.

[0052] When the transport vehicle 10 is set on the travel path 20 of the transport system 1 for the first time, the location where the transport vehicle 10 is set and the type of the transport vehicle 10 are registered in the control unit 19 or the control unit 40. The types of the transport vehicle 10 are represented, for example, as shown in Figs. 4 and 5, as "a", "b", "c", "d", "e", etc. In the first embodiment, after the transport vehicle 10 is set, as described above, the image capturing unit 16 or the photoelectric sensor detects the position of the transport vehicle 10 on the travel path 20. Note that the transport vehicle 10 is not limited to this configuration in the present invention, and may be configured to detect a mark (not shown) by a line sensor, or to detect the position of the transport vehicle 10 by a plurality of sensors installed on the travel path 20, or may be configured to wirelessly connect the transport vehicle 10 to a GPS (Global Positioning System) so as to be able to communicate information, and to acquire the position of the transport vehicle 10 using the GPS. In any manner, the position of the transport vehicle 10 may be acquired.

[0053] The receiver 17 is connected to the control unit 40 so as to be able to communicate with the control unit 40, receives information transmitted from the control unit 40, and outputs the received information to the control unit 19. In the first embodiment, the receiver 17 is connected to the control unit 40 so as to be able to communicate with the control unit 40 wirelessly, but the present invention is not limited to this, and the receiver 17 may be connected to the control unit 40 so as to be able to communicate with the control unit 40 by wire. In the first embodiment, the information received by the receiver 17 from the control unit 40 is, for example, command information on the operation related to the travel of the transport vehicle 10 and the lifting and lowering of the cassette 13, the transport status and transport history of the transport vehicle 10 including the position of the transport vehicle 10 and the position of the cassette 13, the measurement result 314 of the particle counter 15, request information for prompting transmission of an image captured by the imaging unit 16, and the like.

[0054] The transmitter 18 is connected to the control unit 40 so as to be able to communicate with the control unit 40, and transmits information output from the control unit 19 to the control unit 40. In the first embodiment, the transmitter 18 is connected to the control unit 40 so as to be able to communicate with the control unit 40 wirelessly, but the present invention is not limited to this, and the transmitter 18 may be connected to the control unit 40 so as to be able to communicate with the control unit 40 via a wire. In the first embodiment, the information transmitted by the transmitter 18 to the control unit 40 is, for example, information on the transportation status and transportation history of the transportation vehicle 10, measurement information 310 of the particle counter 15, and an image captured by the imaging unit 16.

[0055] The control unit 19 controls the operation of each component of the transport vehicle 10, and causes the transport vehicle 10 to perform operations related to the travel of the transport vehicle 10 and the lifting and lowering of the cassette 13. The control unit 19 controls the travel of the transport vehicle 10 by controlling a motor (not shown) connected to the wheels 12 and the angle of the wheels 12, etc. The control unit 19 controls the lifting and lowering movement of the cassette 13 by controlling a motor (not shown) of the lifting unit 14.

[0056] The control unit 19 controls the particle counter 15 to measure the number of particles in the air with the particle counter 15, acquires the measurement result of the particle counter 15, and generates and records the measurement result 314 (see FIG. 4) of the particle counter 15 indicating that the number of particles is sufficiently small and good if the measurement result satisfies the condition related to particles preregistered in the control unit 19 based on the measurement result, and generates and records the measurement result 314 of the particle counter 15 indicating that the number of particles is not sufficiently small and good if the measurement result does not satisfy the condition related to particles preregistered in the control unit 19. Here, the condition related to particles preregistered in the control unit 19 is, for example, whether or not the number of particles within a predetermined range is equal to or less than a predetermined number.

[0057] The control unit 19 controls the imaging unit 16 to capture and acquire an image of the running path 20, and acquires the position of the transport vehicle 10 on the running path 20 based on the image of the running path 20. The control unit 19 generates information on the transport status and transport history of the transport vehicle 10 based on information on the position of the transport vehicle 10 on the running path 20 and information on the type of item 200 (workpiece 201) transported by the transport vehicle 10.

[0058] The control unit 19 also captures an image of the running path 20 using the imaging unit 16 of the transport vehicle 10 on which the particle counter 15 is installed, at the same time that the particle counter 15 measures the number of particles in the air, and calculates, based on the image of the running path 20, the position of the transport vehicle 10 on the running path 20 when the particle counter 15 measured the number of particles in the air, and obtains this calculated position as the measurement position 312 (see Figure 4) within the room 1000 where the number of particles in the air was measured by the particle counter 15. The control unit 19 associates together the measurement date and time 311 (see FIG. 4), which is the date and time when the number of particles in the air was measured by the particle counter 15, the measurement position 312 measured by the particle counter 15 at the measurement date and time 311 acquired as described above, the type 313 (see FIG. 4) of the transport vehicle 10 in which the particle counter 15 that performed the measurement at the measurement date and time 311 is installed, and the measurement result 314 of the particle counter 15 obtained by the measurement at the measurement date and time 311, to acquire measurement information 310 (see FIG. 4) of the particle counter 15. The measurement information 310 of the particle counter 15 thus includes the measurement date and time 311 when the number of particles in the air was measured by the particle counter 15, the measurement position 312, the type 313 of the transport vehicle 10, and the measurement result 314.

[0059] The control unit 19 acquires information received by the receiver 17 from the control unit 40, and outputs information to be transmitted to the control unit 40 to the transmitter 18. The control unit 19 causes the transport vehicle 10 to perform an operation according to the command information received by the receiver 17 from the control unit 40. In response to the request information received by the receiver 17 from the control unit 40, the control unit 19 causes the transmitter 18 to transmit information on the transport status and transport history of the transport vehicle 10, the measurement information 310 of the particle counter 15, and an image captured by the imaging unit 16 to the control unit 40. Even if the control unit 19 does not receive the request information from the control unit 40, it can also cause the transmitter 18 to transmit information on the transport status and transport history of the transport vehicle 10, the measurement information 310 of the particle counter 15, and an image captured by the imaging unit 16 to the control unit 40 on its own initiative.

[0060] Here, the transportation status of the transport vehicle 10 includes, for example, the item 200 (workpiece 201) being transported, the type of the transport vehicle 10 being transported, the type of the running path 20 on which the transport vehicle 10 is transporting and the position on the running path 20, the transport speed, and error status related to errors that occurred in the transport vehicle 10 during transport and the workpiece 201 during and after transport. In addition, the transportation history of the transport vehicle 10 includes, for each transported item 200 (workpiece 201), the type of the transport vehicle 10 that transported the item, the history of the type of the running path 20 on which the transport vehicle 10 transported the item, the passing history of the position on the running path 20, the transport speed history, and the error history related to errors that occurred in the transport vehicle 10 during transport and the workpiece 201 during and after transport, all of which are associated with the time when the transport was performed and the type of the item 200 (workpiece 201).

[0061] In the first embodiment, the control unit 19 includes a computer system similar to the above-described control unit 180. The arithmetic processing device of the control unit 19 performs arithmetic processing in accordance with a computer program stored in a storage device of the control unit 19, and outputs control signals for controlling the transport vehicle 10 to each component of the transport vehicle 10 via an input / output interface device of the control unit 19.

[0062] 3, the nozzle 27 is attached to the frame 11 facing the track 20 along which the transport vehicle 10 travels, and supplies a cleaning liquid consisting of pure water or pure water containing a surfactant to the track 20. The nozzle 27 is connected and communicates with a tank 28, and the cleaning liquid stored in the tank 28 is supplied from the tank 28 to the nozzle 27. The nozzle 27 is controlled by the control unit 19, and when the imaging unit 16 detects a foreign object attached to the track 20, for example, the nozzle 27 supplies the cleaning liquid supplied from the tank 28 to a predetermined area of ​​the track 20 including the position where the foreign object was detected, in accordance with a command from the control unit 19.

[0063] 3, the tank 28 is attached to the frame 11, stores the cleaning liquid, and supplies the stored cleaning liquid to the nozzle 27. The tank 28 is replenished with cleaning liquid from the travel path cleaning replenishment unit of the work processing device 100 when the remaining amount of cleaning liquid is low, etc.

[0064] As shown in FIG. 3, the drying unit 29 is mounted on the frame 11 facing the track 20 on which the transport vehicle 10 travels. The drying unit 29 is controlled by the control unit 19, and when, for example, the imaging unit 16 detects a foreign object attached to the track 20, the drying unit 29 removes the cleaning liquid supplied from the nozzle 27 toward the track 20 from the track 20 in accordance with a command from the control unit 19 after the cleaning liquid is supplied from the nozzle 27. The drying unit 29 is, for example, a nonwoven fabric or a sponge, and wipes off the cleaning liquid supplied from the nozzle 27 toward the track 20. The drying unit 29 is replaced by a track cleaning and refilling unit of the work processing device 100 when the cleaning liquid has been sufficiently removed or when the drying unit 29 is soiled.

[0065] When the control unit 19 detects a foreign object attached to the runway 20 using the imaging unit 16 functioning as a sensor, it supplies cleaning liquid from the nozzle 27 to a predetermined area of ​​the runway 20 including the position where the foreign object was detected, and removes the cleaning liquid supplied from the nozzle 27 toward the runway 20 from the runway 20 using the drying unit 29.

[0066] In addition, when the control unit 19 detects a foreign object attached to the running path 20 by the imaging unit 16 functioning as a sensor, instead of removing the foreign object using the nozzle 27 and drying unit 29 described above, the control unit 19 may issue an alert urging the user to remove the foreign object by running a foreign object removal (cleaning) robot having a similar foreign object removal (cleaning) function through a predetermined range of an area including the position on the running path 20 where the foreign object was detected.

[0067] In addition to the nozzle 27, the tank 28, and the drying unit 29, or instead of the nozzle 27, the tank 28, and the drying unit 29, the transport vehicle 10 may be provided with a fan that generates a suction force toward the travel path 20, a filter that collects foreign objects sucked from the travel path 20, and an exhaust port that exhausts the sucked air after the foreign objects are collected, and when the control unit 19 detects a foreign object attached to the travel path 20 by the imaging unit 16 functioning as a sensor, the control unit 19 may remove the foreign object by generating a suction force in a predetermined range of an area including the position on the travel path 20 where the foreign object was detected by the fan and collecting the foreign object by the filter. The transport vehicle 10 may be provided with both a washing mechanism including the nozzle 27, the tank 28, and the drying unit 29 and a cleaning mechanism including a fan, a filter, and an exhaust port.

[0068] 2, the travel path 20 of the transport system 1 includes a passage area 21, a transfer area 22, and a guide section 23. The passage area 21 is disposed above the housings 110 of the multiple work processing devices 100, straddling the two. The transfer area 22 is disposed adjacent to the passage area 21 above the housing 110 for each work processing device 100. In the transfer area 22, an opening 24 is formed directly above the opening 112 of the housing 110, the opening 24 being of a size and shape that allows the frame 11 of the transport vehicle 10 to pass through but allows the cassette 13 to pass through.

[0069] The guide parts 23 are disposed on both widthwise ends of the passage area 21 and the transfer area 22. The guide parts 23 are formed higher than the wheels 12 of the transport vehicle 10, thereby preventing the transport vehicle 10 from climbing over the guide parts 23 and falling off the passage area 21 and the transfer area 22.

[0070] The display unit 30 is connected to the control unit 40 so as to be able to communicate information, and based on instructions from the control unit 40, displays to the operator various information such as a screen showing historical information relating to the item 200 (work 201) to be transported by the transport system 1, for example, a screen showing the processing status and processing history of the work processing device 100 relating to the item 200 (work 201), the transport status and transport history of the transport vehicle 10, a screen showing processing information 320 of the work processing device 100 including the position 321 of the work processing device 100 and the operation history 322 of the work processing device 100, and a screen showing measurement information 310 of the particle counter 15, etc., in a manner that is visible to the operator.

[0071] The display unit 30 is configured with a liquid crystal display device or the like. The display unit 30 is provided with an input unit that is used when an operator inputs information related to the display of the above-mentioned screen of the conveying system 1. The input unit provided in the display unit 30 is configured with at least one of a touch panel provided in the display unit 30 and a keyboard or the like. Note that the display unit 30 is not limited to being fixed near the installation area of ​​the travel path 20, but may be provided in any communication device, and the any communication device may be connected to the control unit 40 wirelessly or by wire.

[0072] The control unit 40 is connected to the receiver 160 and the transmitter 170 of each work processing device 100 so as to be able to communicate with each other, and is connected to the receiver 17 and the transmitter 18 of the transport vehicle 10 so as to be able to communicate with each other. The control unit 40 can remotely control and operate each work processing device 100 and the transport vehicle 10 via the control units 180 and 19 by transmitting command information to the receivers 160 and 17. In addition, the control unit 40 can receive and grasp information on the processing status and processing history of each work processing device 100 from the transmitter 170, and information on the transport status and transport history of each transport vehicle 10, and measurement information 310 of the particle counter 15 from the transmitter 18. In this way, the control unit 40 can comprehensively control and operate each work processing device 100 and the transport vehicle 10, which are components of the transport system 1. The control unit 40 also functions as a server that collectively manages various pieces of information (data) received from each transport vehicle 10 and various pieces of information (data) received from each work processing device 100.

[0073] 4 is a diagram showing an example of particle management information 300 handled by the control unit 40 of the transport system 1 of FIG. 1. As shown in FIG. 1, the control unit 40 has a measurement unit 41, a first recording unit 42, a second recording unit 43, a data linking unit 44, and a display control unit 45. The measurement unit 41 causes the particle counter 15 of each transport vehicle 10 traveling on the travel path 20 to measure the number of particles in the air at any position on the travel path 20 via the control unit 19 of each transport vehicle 10, and acquires measurement information 310 of each particle counter 15 as shown in FIG. 4. The first recording unit 42 records the measurement information 310 of each particle counter 15 acquired by the measurement unit 41.

[0074] In addition, instead of the control unit 19 of each transport vehicle 10, the measurement unit 41 and the first recording unit 42 may perform a process of acquiring measurement information 310 of the particle counter 15 by linking together a measurement date and time 311, which is the date and time (time) when each particle counter 15 measured the number of particles in the air, a measurement position 312 in the room 1000 measured by the particle counter 15 at the measurement date and time 311, a type 313 of the transport vehicle 10 in which the particle counter 15 that performed the measurement at the measurement date and time 311 is installed, and a measurement result 314 of the particle counter 15 obtained by measurement at the measurement date and time 311.

[0075] The second recording unit 43 acquires and records processing information 320 of each work processing device 100 as shown in Fig. 4 via the control unit 180 of each work processing device 100. Note that the second recording unit 43 may execute a process of linking a preregistered position 321 of each work processing device 100 with an operation history 322 of each work processing device 100, instead of the control unit 180 of each work processing device 100, to generate processing information 320 of each work processing device 100.

[0076] As shown in FIG. 4, the data linking unit 44 performs a data linking process to link the measurement date and time 311 of the particle counter 15 with an operation history 322 indicating what each work processing device 100 was performing at the measurement date and time 311, and generates particle management information 300 including measurement information 310 of the particle counter 15 and processing information 320 of the work processing device 100, as shown in FIG. 4, and records the particle management information 300.

[0077] The display control unit 45 can display the particle management information 300 recorded by the data linking unit 44 in a table as shown in FIG. 4 on the display unit 30. The display control unit 45 can display a condition input unit for receiving input of conditions for items to be displayed in the table of the particle management information 300, next to the table of the particle management information 300. Here, the conditions for items to be displayed in the table of the particle management information 300, which are received by the condition input unit, include, for example, limiting the range of the measurement date and time 311, limiting the range of the measurement position 312 in the room 1000, limiting the type 313 of the transport vehicle 10, limiting the type (OK or NG) of the measurement result 314, and the like, and are generated by the display control unit 45 based on the measurement information 310 of the particle counter 15 and the portion of the measurement information 310 of the particle counter 15 in the particle management information 300.

[0078] Fig. 5 is a diagram showing an example of a display screen 401 displayed by the display unit 30 of the transport system 1 in Fig. 1. The display control unit 45 generates the display screen 401 as shown in Fig. 5, which links the travel path 20, the measurement position 312 of the particle counter 15 in the room 1000, and the position 321 of the work processing device 100 and displays them on the same map, and causes the display unit 30 to display the display screen 401.

[0079] Specifically, the display control unit 45 first places the image simply representing each work processing device 100 at a predetermined position within the image corresponding to the position 321 of each work processing device 100, and places the image simply representing the running path 20 at a predetermined position within the image corresponding to the position where the running path 20 is installed, based on the information of an image simply representing each work processing device 100 stored in advance, an image simply representing the running path 20, and the position where the running path 20 is installed, thereby generating a basic map image 411 (see Figure 5) of the conveying system 1.

[0080] The display control unit 45 then displays a condition input unit 412 (see FIG. 5) for receiving input of conditions for the measurement results 314 to be displayed superimposed on the basic map image 411 of the transport system 1, next to the basic map image 411 of the transport system 1 (on the left side in the example shown in FIG. 5). Here, the conditions for the measurement results 314 to be displayed superimposed on the basic map image 411 of the transport system 1, which are received by the condition input unit 412, are similar to the conditions for the items to be displayed in the table of the particle management information 300 described above, and are, for example, a limit on the range of the measurement date and time 311, a limit on the range of the measurement position 312 in the room 1000, a limit on the type 313 of the transport vehicle 10, a limit on the type (OK or NG) of the measurement result 314, and the like, and are generated by the display control unit 45 based on the measurement information 310 of the particle counter 15 and the portion of the measurement information 310 of the particle counter 15 in the particle management information 300.

[0081] The display control unit 45 displays a screen including a basic map image 411 of the transport system 1 and a condition input section 412 on the display unit 30, and then when it receives input from the operator of conditions for the measurement results 314 to be displayed superimposed on the basic map image 411 of the transport system 1 from the condition input section 412 of this screen, generates a display screen 401 and displays it on the display unit 30 by superimposing the display of the measurement results 314 performed at each measurement position 312 of the particle counter 15 according to the conditions input by the operator onto each measurement position 312.

[0082] In the display control unit 45, for example, the measurement result 314 that is "OK" indicating a good result and the measurement result 314 that is "NG" indicating a bad result are displayed in different colors so that they can be clearly distinguished and viewed by the operator, but the present invention is not limited to this, and any display form may be used as long as the two can be clearly distinguished and viewed. In the example of embodiment 1 shown in Figure 5, the display control unit 45 displays the measurement result 314 that is "NG" indicating a bad result in a brighter color that stands out more than the measurement result 314 that is "OK" indicating a good result.

[0083] When the display control unit 45 displays a large or biased number of "NG" measurement results 314 indicating a defect near device F of the work processing device 100 on the display screen 401, for example as shown in FIG. 5, this display allows the operator to easily recognize that there is a high possibility that a cause for the generation of fine particles has occurred near device F of the work processing device 100.

[0084] The control unit 40 may also control the control unit 19 of each transport vehicle 10, and instead of the control unit 19, detect foreign matter attached to the running path 20 using the imaging unit 16 functioning as a sensor, and upon detection, supply cleaning liquid from the nozzle 27 to an area of ​​a predetermined range including the position on the running path 20 where the foreign matter was detected, and perform a process of removing the cleaning liquid supplied from the nozzle 27 toward the running path 20 from the drying unit 29.

[0085] The control unit 40 may also control the control unit 19 of each transport vehicle 10, so that when a foreign object attached to the running path 20 is detected by the imaging unit 16 functioning as a sensor instead of the control unit 19, instead of removing the foreign object using the nozzle 27 and drying unit 29 described above, the control unit 40 may issue an alert urging the user to remove the foreign object by running a foreign object removal (cleaning) robot having a similar foreign object removal (cleaning) function through a predetermined range of area including the position on the running path 20 where the foreign object was detected.

[0086] The control unit 40 may also control the control unit 19 of each transport vehicle 10, and when a foreign object attached to the running path 20 is detected by the imaging unit 16 functioning as a sensor instead of the control unit 19, the control unit 40 may remove the foreign object by generating a suction force using a fan in a predetermined range of an area of ​​the running path 20 including the position where the foreign object was detected, and collecting the foreign object using a filter.

[0087] In the first embodiment, the control unit 40 includes a computer system similar to the control units 180 and 19. The arithmetic processing device of the control unit 40 performs arithmetic processing in accordance with a computer program stored in a storage device of the control unit 40, and outputs control signals for controlling the transport system 1 to each component of the transport system 1 via an input / output interface device of the control unit 40.

[0088] In the first embodiment, the functions of the measurement unit 41 and the display control unit 45 are realized by the arithmetic processing device of the control unit 40 executing a computer program stored in a storage device. In the first embodiment, the functions of the first recording unit 42, the second recording unit 43, and the data linking unit 44 are realized by the storage device of the control unit 40.

[0089] The transport system 1 according to the first embodiment having the above configuration can automatically measure the number of particles in the air at a position in the room 1000 where the transport vehicle 10, on which the particle counter 15 is provided, travels, without operator intervention, at any location on the travel path 20 on which the transport vehicle 10 travels, by using the particle counter 15 provided on the transport vehicle 10 while the transport vehicle 10 travels on the travel path 20. Therefore, the transport system 1 according to the first embodiment has the effect of reducing the work by the operator when the particle counter 15 is used to measure the inside of the room 1000 in which the work processing device 100 is installed, and of being able to flexibly change the measurement position 312.

[0090] Furthermore, in the conveying system 1 of embodiment 1, the data linking section 44 of the control unit 40 links and records the operation history 322 of the work processing device 100 with the measurement position 312 of the particle counter 15 within the room 1000, making it easier to identify the work processing device 100 or the processing content that is causing the generation of fine particles.

[0091] In the transport system 1 according to the first embodiment, the control unit 40 can further calculate the so-called cleanliness level defined in the US Federal Standard FED-STD-209 and the international standard ISO14644-1 based on the particle measurement result 314 by the particle counter 15. Therefore, in the transport system 1 according to the first embodiment, the control unit 40, which functions as a server, calculates the cleanliness level in the room 1000 in which the work processing device 100 is installed by automatically measuring the particles using the particle counter 15 provided in the transport vehicle 10, and displays the result in a manner that is easily recognizable by not only the operator but also the manager, thereby making it possible to quickly share the result, that is, making it visible, thereby making it possible to easily and clearly manage the cleanliness level, and thus meeting the demand for high quality control of the cleanliness level by the user of the transport system 1.

[0092] Furthermore, in the conveying system 1 of embodiment 1, the display control unit 45 of the control unit 40 links the running path 20, the measurement position 312 of the particle counter 15 in the room 1000, and the position 321 of the work processing device 100 and displays them on the same map, making it easier for the operator to visually understand and identifying the work processing device 100 or the processing content that is causing the generation of fine particles.

[0093] Furthermore, in the transport system 1 according to the first embodiment, a particle counter 15 is provided on the upper surface of the frame 11 of each transport vehicle 10, and measures the number of fine particles in the air in the room 1000 in which the work processing device 100 is installed. More specifically, the transport system 1 according to the first embodiment can reduce the work by the operator when measuring the inside of the room 1000 in which the work processing device 100 is installed with the particle counter 15, and can also flexibly change the measurement position 312.

[0094] [Embodiment 2] A conveying system 1-2 according to embodiment 2 of the present invention will be described with reference to the drawings. Fig. 6 is a side cross-sectional view showing a configuration example of the conveying system 1-2 according to embodiment 2. In Fig. 6, the same parts as those in embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

[0095] As shown in FIG. 6, the conveying system 1-2 of the embodiment 2 is modified such that each conveying vehicle 10 of the conveying system 1 of the embodiment 1 is equipped with a particle counter 15-2 instead of the particle counter 15, but the other configurations are the same as those of the embodiment 1.

[0096] Particle counter 15-2 is provided in cassette 13 of each transport vehicle 10. Particle counter 15-2 of embodiment 2 is provided in a different location than particle counter 15 of embodiment 1, and other configurations are similar to particle counter 15 of embodiment 1. Particle counter 15 of embodiment 1 measures the number of particles in the air at a position in room 1000 where transport vehicle 10 travels, whereas particle counter 15-2 of embodiment 2 measures the number of particles in the air in cassette 13 of transport vehicle 10 where it is provided.

[0097] In the second embodiment, the control unit 19 captures an image of the travel path 20 by the imaging unit 16 of the transport vehicle 10 provided with the particle counter 15-2 at the timing when the particle counter 15-2 measures the number of particles in the air, calculates the position of the transport vehicle 10 on the travel path 20 when the particle counter 15-2 measures the number of particles in the air based on the image of the travel path 20, and acquires the calculated position as the measurement position 312 where the particle counter 15-2 measures the number of particles in the air in the cassette 13 of the transport vehicle 10 provided with the particle counter 15-2. In the first embodiment, the measurement position 312 is the position in the room 1000 where the particle counter 15 measures the number of particles in the air, whereas in the second embodiment, the measurement position 312 is changed to the position where the particle counter 15-2 measures the number of particles in the air in the cassette 13 of the transport vehicle 10 provided with the particle counter 15-2.

[0098] The measurement position 312 in the second embodiment is processed in the same manner as in the first embodiment, and is used to make the particle management information 300 recorded by the data linking unit 44 into a table as shown in Fig. 4 by the display control unit 45 and display it on the display unit 30 as in the first embodiment. The measurement position 312 in the second embodiment is processed in the same manner as in the first embodiment, and is used to generate a display screen 401 as shown in Fig. 5 in which the travel path 20 and the position 321 of the work processing device 100 are linked and displayed on the same map, and to display the display screen 401 on the display unit 30.

[0099] The transport system 1-2 according to the second embodiment having the above-mentioned configuration can automatically measure the number of particles in the air in the cassette 13 of the transport vehicle 10 in which the particle counter 15-2 is provided, without the intervention of an operator, at any location on the travel path 20 on which the transport vehicle 10 is traveling, by using the particle counter 15-2 provided on the transport vehicle 10 while the transport vehicle 10 is traveling on the travel path 20. Therefore, the transport system 1-2 according to the second embodiment has the effect of reducing the work by the operator and flexibly changing the measurement position 312 when the particle counter 15-2 measures the inside of the cassette 13 of the transport vehicle 10 traveling in the room 1000 in which the work processing device 100 is installed.

[0100] Moreover, in the transport system 1-2 according to the second embodiment, a particle counter 15-2 is provided in the cassette 13 of each transport vehicle 10, and measures the number of particles in the air in the cassette 13 of the transport vehicle 10 traveling in the room 1000 in which the work processing device 100 is installed. As a result, more specifically, the transport system 1-2 according to the second embodiment can reduce the work by the operator and can flexibly change the measurement position 312 when measuring the inside of the cassette 13 of the transport vehicle 10 traveling in the room 1000 in which the work processing device 100 is installed using the particle counter 15-2.

[0101] The conveying system according to the present invention is not limited to the conveying systems 1 and 1-2 according to the above-mentioned embodiments 1 and 2. In each of the conveying systems 1 and 1-2 according to the embodiments 1 and 2, the multiple conveying vehicles 10 may be modified to include a conveying vehicle 10 equipped with the particle counter 15 of embodiment 1 and a conveying vehicle 10 equipped with the particle counter 15-2 of embodiment 2, and the conveying vehicle 10 equipped with the particle counter 15 of embodiment 1 may measure the number of particles in the air in the room 1000 in which the work processing device 100 is installed, and the conveying vehicle 10 equipped with the particle counter 15-2 of embodiment 2 may measure the number of particles in the air in the cassette 13 of the conveying vehicle 10 traveling within the room 1000 in which the work processing device 100 is installed.

[0102] According to the work processing apparatus according to the embodiment described above, the following work processing apparatus can be obtained. (Appendix 1) A work processing device; A transport vehicle that transports articles to and from the work processing device; A travel path along which the transport vehicle travels, the travel path being installed above the work processing device; A control unit; A transport system comprising: The transport vehicle is A cassette for containing the article; a lifting unit for lifting and lowering the cassette relative to a cassette placement table of the work processing device; a particle counter; The control unit a measurement unit that causes the particle counter to measure the number of particles in the air at any position on the travel path; a first recording unit for recording measurement information including the date and time, the position, and the result of the measurement by the particle counter; A second recording unit that records processing information including the position and operation history of the work processing device; a data linking unit that links the measurement date and time of the particle counter with the operation history indicating what each of the work processing devices was performing at the measurement date and time; having The transport vehicle is A sensor for detecting a foreign object attached to the travel path; A nozzle for supplying a cleaning liquid to the travel path; a drying unit for removing the cleaning liquid from the travel path; The control unit supplies the cleaning liquid from the nozzle to the travel path when the sensor detects a foreign object.

[0103] The above-mentioned conveying system has the same effect as that of the conveying systems 1 and 1-2 according to the above-mentioned embodiments, and further, by using a sensor (imaging unit 16 or photoelectric sensor) provided on the conveying vehicle 10, it is possible to automatically detect foreign matter adhering to the runway 20 at any location on the runway 20 along which the conveying vehicle 10 is traveling, without the intervention of an operator, while the conveying vehicle 10 is traveling along the runway 20. If a foreign matter is detected, a cleaning liquid can be supplied to the runway 20 by the nozzle 27, and the cleaning liquid can be removed from the runway 20 by the drying unit 29, thereby achieving the effect of maintaining the runway 20 in a clean state.

[0104] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0105] 1,1-2 Transport system 10 Transport vehicle 13 Cassette 14 Lifting unit 15,15-2 Particle counter 20 Running Track 30 Display Unit 40 Control Unit 41 Measuring part 42 First Recording Section 43 Second Recording Section 44 Data Linking Department 100,100-2 Work processing device 120 Cassette Stand 200 Goods 201 Work 310 Measurement Information 311 Measurement Date 312 Measurement position 314 Measurement results 320 Processing Information 321 position 322 Operation History 1000 Rooms

Claims

1. A work processing device; A transport vehicle that transports articles to and from the work processing device; A travel path along which the transport vehicle travels, the travel path being installed above the work processing device; A control unit; A transport system comprising: The transport vehicle is A cassette for containing the article; a lifting unit for lifting and lowering the cassette relative to a cassette placement table of the work processing device; a particle counter; The control unit a measurement unit that causes the particle counter to measure the number of particles in the air at any position on the travel path; a first recording unit for recording measurement information including the date and time, the position, and the result of the measurement by the particle counter; A second recording unit that records processing information including the position and operation history of the work processing device; a data linking unit that links the measurement date and time of the particle counter with the operation history indicating what each of the work processing devices was performing at the measurement date and time; A conveying system having the above structure.

2. 2. The transport system according to claim 1, wherein the control unit links the travel path, the measurement position of the particle counter, and the position of the workpiece processing device, and displays them on the same map.

3. 2. The transport system according to claim 1, wherein the particle counter measures the number of particles in a room in which the work processing device is installed.

4. 2. The transfer system of claim 1, wherein the particle counter measures the number of particles in the cassette.

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