System, machine device, machine tool, equipment and manufacturing method of article

Abstract

To reduce a flow rate of a gas to be consumed.SOLUTION: A system 100 for introducing a compressed gas supplied from a gas supply source 10 to a pressure chamber 40 comprises: a first pressure adjustment device 11 which can adjust the pressure of the pressure chamber; a second pressure adjustment device 12 which can adjust the pressure of the pressure chamber; and a control device 30 which makes at least either of the first pressure adjustment device and the second pressure adjustment device adjust the pressure of the pressure chamber. A flow rate of a gas which is supplied from the gas supply source when the second pressure adjustment device adjusts the pressure of the pressure chamber is lower than a flow rate of the gas supplied from the gas supply source when the first pressure adjustment device adjusts the pressure of the pressure chamber.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to systems, machines, machine tools, equipment, and methods for manufacturing articles. [Background technology]

[0002] Patent Document 1 discloses a machine tool. The machine tool disclosed in Patent Document 1 has a spindle head, an electric drive mechanism for raising and lowering the spindle head, and a balance cylinder for compensating for the weight of the spindle head. Patent Document 1 discloses that a pneumatic servo valve is used to control the pressure in the pressure chamber of the balance cylinder. The pneumatic servo valve disclosed in Patent Document 1 is a nozzle flapper type pneumatic servo valve. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-30120 A Summary of the Invention [Problem to be solved by the invention]

[0004] In a pressure adjusting device for adjusting the pressure in a pressure chamber, such as a pneumatic servo valve, the pressure in the pressure chamber can be adjusted with high precision, but the flow rate of gas consumed is large.

[0005] The present disclosure is directed to reducing the flow rate of consumed gas. [Means for solving the problem]

[0006] One aspect of the present disclosure is a system that guides compressed gas supplied from a gas supply source to a pressure chamber, the system comprising: a first pressure regulating device capable of adjusting the pressure of the pressure chamber; a second pressure regulating device capable of adjusting the pressure of the pressure chamber; and a control device that causes at least one of the first pressure regulating device and the second pressure regulating device to adjust the pressure of the pressure chamber, wherein a flow rate of gas supplied from the gas supply source when the second pressure regulating device adjusts the pressure of the pressure chamber is smaller than a flow rate of gas supplied from the gas supply source when the first pressure regulating device adjusts the pressure of the pressure chamber. Effect of the Invention

[0007] According to the present disclosure, the flow rate of consumed gas can be reduced. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram of equipment according to a first embodiment. [Diagram 2] FIG. 11 is a block diagram of equipment according to a second embodiment. [Diagram 3] 10(a) is a cross-sectional view of the pneumatic servo valve according to the second embodiment, and (b) is a pressure characteristic diagram of the pneumatic servo valve according to the second embodiment. [Figure 4] FIG. 6 is a cross-sectional view of a pressure reducing valve according to a second embodiment. [Diagram 5] FIG. 11 is a block diagram of equipment according to a third embodiment. [Figure 6] FIG. 13 is a block diagram of equipment according to a fourth embodiment. [Figure 7] FIG. 13 is a block diagram of equipment according to a fifth embodiment. [Figure 8] FIG. 13 is a schematic configuration diagram of a machine tool according to a sixth embodiment. [Figure 9] FIG. 13 is a schematic configuration diagram of a machine tool according to a sixth embodiment. [Figure 10] FIG. 13 is an enlarged view of a balance cylinder and its vicinity according to a sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the drawings. The following embodiments are illustrative of preferred configurations of the present disclosure, and for example, those skilled in the art can appropriately modify the detailed configurations without departing from the spirit of the present disclosure. In addition, in the drawings referred to in the following description of the embodiments, elements denoted by the same reference numbers have the same functions unless otherwise noted.

[0010] [First embodiment] 1 is a block diagram of equipment 200 according to a first embodiment. The equipment 200 is installed in a factory or the like. The equipment 200 includes a system 100 and a gas supply source 10. The gas supply source 10 supplies compressed gas to the system 100. The gas is, for example, nitrogen gas, oxygen gas, or air.

[0011] The system 100 is a system that introduces compressed gas supplied from a gas supply source 10 to a pressure chamber 40. The gas supply source 10 may be an electric compressor or a gas cylinder. The electric compressor generates compressed gas at a flow rate according to power consumption. The gas supply source 10 may also supply gas to a system other than the system 100 in a factory. That is, the gas supply source 10 may be shared by a plurality of systems.

[0012] The system 100 includes a pressure regulating device 11 capable of adjusting the pressure of a pressure chamber 40, a pressure regulating device 12 capable of adjusting the pressure of the pressure chamber 40, and a control device 30 that causes at least one of the pressure regulating device 11 and the pressure regulating device 12 to adjust the pressure of the pressure chamber 40. The pressure regulating device 11 is an example of a first pressure regulating device, and the pressure regulating device 12 is an example of a second pressure regulating device. Compressed gas is supplied from a gas supply source 10 to both the pressure regulating device 11 and the pressure regulating device 12.

[0013] The pressure adjustment device 12 consumes a smaller flow rate of gas when adjusting the pressure of the pressure chamber 40 than the pressure adjustment device 11. More specifically, the pressure adjustment device 12 consumes a smaller flow rate of gas when adjusting the pressure of the pressure chamber 40 to a target pressure (predetermined pressure) than the pressure adjustment device 11. Furthermore, the pressure adjustment device 11 has a smaller variation in the pressure of the pressure chamber 40 with respect to the target pressure when adjusting the pressure of the pressure chamber 40 to the target pressure (predetermined pressure) than the pressure adjustment device 12. That is, the pressure adjustment device 11 can adjust the pressure of the pressure chamber 40 with higher accuracy than the pressure adjustment device 12. Here, the pressure adjustment device 11 consuming gas includes the pressure adjustment device 11 supplying gas to the pressure chamber 40 and the pressure adjustment device 11 discharging gas from itself. Furthermore, the pressure adjustment device 12 consuming gas includes the pressure adjustment device 12 supplying gas to the pressure chamber 40 and the pressure adjustment device 12 discharging gas from itself. In other words, the flow rate of gas consumed by pressure regulator 11 is the same as the flow rate of gas supplied from gas supply source 10 to pressure regulator 11. Also, the flow rate of gas consumed by pressure regulator 12 is the same as the flow rate of gas supplied from gas supply source 10 to pressure regulator 12.

[0014] In this way, the pressure adjustment device 11 adjusts the pressure of the pressure chamber 40 with higher accuracy than the pressure adjustment device 12, but consumes a larger flow rate of gas than the pressure adjustment device 12. On the other hand, the pressure adjustment device 12 consumes a smaller flow rate of gas than the pressure adjustment device 11, but adjusts the pressure of the pressure chamber 40 with lower accuracy than the pressure adjustment device 12.

[0015] The pressure regulator 11 is preferably a pneumatic servo valve. Pneumatic servo valves are classified into proportional control valves and nozzle flapper type pneumatic servo valves. A proportional control valve outputs a flow rate (pressure) according to the magnitude of an input signal. The pressure regulator 12 is, for example, a pressure reducing valve. The pressure reducing valve is a pressure reducing valve other than a pneumatic servo valve.

[0016] In an operating state (first state) in which the device having the pressure chamber 40 is operating, it is preferable that the pressure of the pressure chamber 40 be adjusted to a target pressure with high accuracy. Therefore, when the device having the pressure chamber 40 is in an operating state, the control device 30 causes the pressure adjustment device 11 to adjust the pressure of the pressure chamber 40.

[0017] On the other hand, in a standby state (second state) in which the device having the pressure chamber 40 is on standby, the pressure of the pressure chamber 40 needs to be adjusted to a target pressure, but the accuracy of the pressure of the pressure chamber 40 does not need to be as high as in the operating state. Therefore, in the standby state, the control device 30 causes the pressure adjustment device 12, which consumes a smaller flow rate of gas than the pressure adjustment device 11, to adjust the pressure of the pressure chamber 40.

[0018] The control device 30 is a device that can switch between adjusting the pressure of the pressure chamber 40 by the pressure adjusting device 11 and adjusting the pressure of the pressure chamber 40 by the pressure adjusting device 12. The control device 30 may have a switching valve such as a solenoid valve or an air operated valve. The switching valve can switch between a path from the pressure adjusting device 11 to the pressure chamber 40 and a path from the pressure adjusting device 12 to the pressure chamber 40. Note that the control device 30 is not limited to a configuration that has a switching valve as long as it can switch the pressure adjustment of the pressure chamber 40.

[0019] According to the first embodiment, when it is not necessary to adjust the pressure of the pressure chamber 40 by the pressure adjustment device 11, the pressure adjustment of the pressure chamber 40 can be switched to the pressure adjustment device 12, which consumes a smaller flow rate of gas than the pressure adjustment device 11. This makes it possible to reduce the flow rate of gas consumed in the system 100 compared to when the pressure adjustment of the pressure chamber 40 is always performed by the pressure adjustment device 11. Note that the flow rate of gas consumed in the system 100 is also the flow rate of gas supplied to the system 100 from the gas supply source 10.

[0020] Since the flow rate of gas consumed in the system 100 is reduced, the flow rate of gas supplied from the gas supply source 10 to the system 100 is reduced. When the gas supply source 10 is an electric compressor, the power consumption of the gas supply source 10 can be reduced. Since the power consumption and the amount of carbon dioxide emissions are proportional to each other, reducing the power consumption can reduce the amount of carbon dioxide emissions, i.e., the amount of greenhouse gas emissions on earth.

[0021] In FIG. 1, the objects to be switched by the control device 30 are two pressure adjustment devices 11 and 12, but this is not limited thereto, and the objects to be switched by the control device 30 may be three or more pressure adjustment devices.

[0022] [Second embodiment] A second embodiment of the present disclosure will be described. In the following, elements with the same reference symbols as those in the first embodiment will have substantially the same configurations and functions as those described in the first embodiment unless otherwise specified, and differences from the first embodiment will be mainly described.

[0023] 2 is a block diagram of an equipment 200A according to a second embodiment. The equipment 200A is installed in a factory or the like. The equipment 200A includes a system 100A and an air supply source 10A, which is an example of a gas supply source. The air supply source 10A supplies compressed air, which is an example of a compressed gas, to the system 100A.

[0024] The system 100A is a pneumatic system. The system 100A is a system that guides compressed air supplied from an air supply source 10A to a pressure chamber 40. The air supply source 10A is, for example, an electric compressor. The electric compressor generates compressed air at a flow rate according to power consumption. The air supply source 10A may also supply air to a system other than the system 100A in a factory. That is, the air supply source 10A may be shared by a plurality of systems.

[0025] The system 100A includes a pneumatic servo valve 11A capable of adjusting the pressure of a pressure chamber 40, a pressure reducing valve 12A capable of adjusting the pressure of the pressure chamber 40, and a control device 30A that causes either the pneumatic servo valve 11A or the pressure reducing valve 12A to adjust the pressure of the pressure chamber 40. The control device 30A causes either the pneumatic servo valve 11A or the pressure reducing valve 12A to adjust the pressure of the pressure chamber 40. The control device 30A includes a switching valve 31A and a control module 32A.

[0026] The pneumatic servo valve 11A is an example of a first pressure adjustment device, and the pressure reducing valve 12A is an example of a second pressure adjustment device. Compressed air is supplied to both the pneumatic servo valve 11A and the pressure reducing valve 12A from an air supply source 10A. The control module 32A is formed of, for example, a control board, and controls the pneumatic servo valve 11A, the pressure reducing valve 12A, and the switching valve 31A.

[0027] The pneumatic servo valve 11A is a valve arranged in a gas flow path A1 from the air supply source 10A to the pressure chamber 40. The pressure reducing valve 12A is a valve arranged in parallel with the pneumatic servo valve 11A in the gas flow path A1. The pneumatic servo valve 11A is an example of a first valve, and the pressure reducing valve 12A is an example of a second valve. The switching valve 31A is arranged downstream of the pneumatic servo valve 11A and the pressure reducing valve 12A in the gas flow path A1, and is a switching valve that selectively connects the gas output side of the pneumatic servo valve 11A and the gas output side of the pressure reducing valve 12A to the pressure chamber 40.

[0028] The pressure reducing valve 12A consumes a smaller flow rate of air when adjusting the pressure of the pressure chamber 40 than the pneumatic servo valve 11A. More specifically, the pressure reducing valve 12A consumes a smaller flow rate of air when adjusting the pressure of the pressure chamber 40 to a target pressure (predetermined pressure) than the pneumatic servo valve 11A. Also, the pneumatic servo valve 11A has a smaller variation in the pressure of the pressure chamber 40 with respect to the target pressure when adjusting the pressure of the pressure chamber 40 to the target pressure (predetermined pressure) than the pneumatic servo valve 12A. That is, the pneumatic servo valve 11A can adjust the pressure of the pressure chamber 40 with higher accuracy than the pressure reducing valve 12A. Here, the consumption of air by the pneumatic servo valve 11A includes the pneumatic servo valve 11A supplying air to the pressure chamber 40 and the pneumatic servo valve 11A discharging air from itself. In addition, the pressure reducing valve 12A consuming air includes the pressure reducing valve 12A supplying air to the pressure chamber 40 and the pressure reducing valve 12A discharging air from itself. In other words, the flow rate of air consumed by the pneumatic servo valve 11A is the same as the flow rate of air supplied from the air supply source 10A to the pneumatic servo valve 11A. In addition, the flow rate of air consumed by the pressure reducing valve 12A is the same as the flow rate of air supplied from the air supply source 10A to the pressure reducing valve 12A.

[0029] Thus, the pneumatic servo valve 11A adjusts the pressure in the pressure chamber 40 with higher accuracy than the pressure reducing valve 12A, but consumes a larger air flow rate than the pressure reducing valve 12A. On the other hand, the pressure reducing valve 12A consumes a smaller air flow rate than the pneumatic servo valve 11A, but adjusts the pressure in the pressure chamber 40 with lower accuracy than the pressure reducing valve 12A.

[0030] The pneumatic servo valve 11A is a proportional control valve or a nozzle flapper type pneumatic servo valve. In the second embodiment, the pneumatic servo valve 11A is a nozzle flapper type pneumatic servo valve. The nozzle flapper type pneumatic servo valve is suitable for controlling air pressure with high accuracy.

[0031] Fig. 3(a) is a cross-sectional view of a pneumatic servo valve 11A according to a second embodiment. The pneumatic servo valve 11A is a nozzle flapper type pneumatic servo valve having three ports 111, 112, and 113. The supply port 111 is a port to which compressed air is supplied. The control port 112 is a port to which compressed air with adjusted pressure is output. The exhaust port 113 is a port to which air is exhausted to the outside. The supply port 111 is connected to an air supply source 10A, and the control port 112 is connected to a switching valve 31A.

[0032] The pneumatic servo valve 11A has an armature flapper 51, a nozzle 52 on the supply port 111 side, a nozzle 53 on the exhaust port 113 side, and a coil 54 that drives the armature flapper 51. The armature flapper 51 is tilted according to a current commanded to the coil 54, and compressed air with adjusted pressure is output from a control port 112 between the two nozzles 52, 53 by adjusting the gap between the nozzle 52 on the supply port 111 side and the nozzle 53 on the exhaust port 113 side.

[0033] 3(b) is a pressure characteristic diagram of the pneumatic servo valve 11A according to the second embodiment. The horizontal axis is the ratio (i / i_max) of the command current i to the coil 54 to the maximum current i_max that can be commanded to the coil 54. The vertical axis is the ratio (Pc / Ps) of the control pressure Pc of the control port 112 to the supply pressure Ps of the supply port 111.

[0034] As shown in Fig. 3(b), by changing the command current i, the control pressure Pc of the control port 112 can be changed continuously. When the command current i is zero, the armature flapper 51 is inclined to a state in which it almost blocks the nozzle 52 on the supply port 111 side, and the control pressure Pc of the control port 112 becomes almost the same pressure as the exhaust port 113, for example, atmospheric pressure. When the command current i is the maximum current i_max, that is, when i / i_max=1, the armature flapper 51 is inclined to a state in which it almost blocks the nozzle 53 on the exhaust port 113 side, and the control pressure Pc of the control port 112 becomes almost the same pressure as the supply pressure Ps of the supply port 111. Note that in normal use, it is rarely controlled to i / i_max=1.

[0035] 4 is a cross-sectional view of a pressure reducing valve 12A according to the second embodiment. The pressure reducing valve 12A has an input port 121, an output port 122, and a diaphragm 123, and is configured not to exhaust air when adjusting the pressure of the pressure chamber 40. Compressed air is supplied to the input port 121. Compressed air with adjusted pressure is output from the output port 122. The input port 121 is connected to an air supply source 10A, and the output port 122 is connected to a switching valve 31A. The pressure reducing valve 12A may be of a direct-acting type or a pilot-operated type.

[0036] Due to the structure of the pneumatic servo valve 11A, a portion of the air supplied from the supply port 111 is exhausted from the exhaust port 113, and therefore the flow rate of air consumed in the pneumatic servo valve 11A is greater than that of the pressure reducing valve 12A due to the amount of exhaust. For example, when the pressure chamber 40 is to be maintained at a target pressure (predetermined pressure) using the pneumatic servo valve 11A, the accuracy of the pressure in the pressure chamber 40 is improved, but the flow rate of air consumed is approximately 10 times that when the pressure reducing valve 12A is used to maintain the pressure chamber 40 at a target pressure (predetermined pressure).

[0037] In an operating state (first state) in which the device having the pressure chamber 40 is operating, it is preferable that the pressure of the pressure chamber 40 be adjusted to a target pressure with high accuracy. Therefore, in an operating state in which the device having the pressure chamber 40 is operating, the switching valve 31A is switched to the control module 32A so that the control port 112 of the pneumatic servo valve 11A is communicated with the pressure chamber 40, and as a result, the pressure of the pressure chamber 40 is adjusted by the pneumatic servo valve 11A.

[0038] On the other hand, in a standby state (second state) in which the device having the pressure chamber 40 is on standby, the pressure of the pressure chamber 40 needs to be adjusted to a target pressure, but the accuracy of the pressure of the pressure chamber 40 does not need to be as high as in an operating state. Therefore, in the standby state, the switching valve 31A is switched to the control module 32A so that the output port 122 of the pressure reducing valve 12A is communicated with the pressure chamber 40, and as a result, the pressure of the pressure chamber 40 is adjusted by the pressure reducing valve 12A. At this time, it is preferable that the command current i of the pneumatic servo valve 11A is zero, that is, the nozzle 52 on the supply port 111 side is blocked by the armature flapper 51. As a result, the exhaust port 113 of the pneumatic servo valve 11A is closed, and the flow rate of air exhausted from the exhaust port 113 becomes almost zero.

[0039] The switching valve 31A may be, for example, a switching valve such as an electromagnetic valve or an air operated valve. The switching valve 31A can switch between a path from the pneumatic servo valve 11A to the pressure chamber 40 and a path from the pressure reducing valve 12A to the pressure chamber 40. Although the control device 30A has the switching valve 31A and the control module 32A, the present invention is not limited to this. The control device 30A may have any configuration as long as the control device 30A can adjust the pressure of the pressure chamber 40 by at least one of the pneumatic servo valve 11A and the pressure reducing valve 12A.

[0040] According to the second embodiment, when it is not necessary to adjust the pressure of the pressure chamber 40 by the pneumatic servo valve 11A, the pressure adjustment of the pressure chamber 40 can be switched to the pressure reducing valve 12A, which consumes a smaller flow rate of air than the pneumatic servo valve 11A. This makes it possible to reduce the flow rate of air consumed in the system 100A compared to the case where the pressure of the pressure chamber 40 is always adjusted by the pneumatic servo valve 11A. Note that the flow rate of air consumed in the system 100A is also the flow rate of air supplied to the system 100A from the air supply source 10A.

[0041] Since the flow rate of air consumed in the system 100A is reduced, the flow rate of air supplied to the system 100A by the air supply source 10A is reduced. If the air supply source 10A is an electric compressor, the power consumption of the air supply source 10A can be reduced. Since the power consumption and the amount of carbon dioxide emissions are proportional to each other, reducing the power consumption can reduce the amount of carbon dioxide emissions, i.e., the amount of greenhouse gas emissions on earth.

[0042] In FIG. 2, the objects to be switched by the switching valve 31A are the pneumatic servo valve 11A and the pressure reducing valve 12A, but this is not limited thereto, and the objects to be switched by the switching valve 31A may be three or more pressure adjustment devices.

[0043] 3(a) shows an example of the pneumatic servo valve 11A, but the configuration of the pneumatic servo valve 11A is not limited to this. The pneumatic servo valve 11A may be any valve that can continuously control the output pressure or flow rate in response to an input signal of voltage or current.

[0044] Further, while an example of the pressure reducing valve 12A is shown in Fig. 4, the configuration of the pressure reducing valve 12A is not limited to this. The pressure reducing valve 12A is not limited to the configuration shown in Fig. 4 as long as it consumes less air flow rate than the pneumatic servo valve 11A. For example, the pressure reducing valve 12A may be a pressure reducing valve with a relief valve so as to easily follow pressure fluctuations in the pressure chamber 40. In this case, the pressure reducing valve 12A has a smaller exhaust volume when adjusting the pressure of the pressure chamber 40 than the pneumatic servo valve 11A.

[0045] [Third embodiment] A third embodiment of the present disclosure will be described below. In the following, elements having the same reference symbols as those in the first or second embodiment will have substantially the same configurations and functions as those described in the first or second embodiment unless otherwise specified, and differences from the first or second embodiment will be mainly described.

[0046] 5 is a block diagram of an equipment 200B according to a third embodiment. The equipment 200B is installed in a factory or the like. The equipment 200B includes a system 100B and an air supply source 10A, which is an example of a gas supply source. The air supply source 10A supplies compressed air, which is an example of a compressed gas, to the system 100B.

[0047] The system 100B is a pneumatic system. The system 100B is a system that guides compressed air supplied from an air supply source 10A to a pressure chamber 40. The system 100B includes a pneumatic servo valve 11A, a pressure reducing valve 12A, a control device 30A, and a pressure reducing valve 50B. The control device 30A includes a switching valve 31A and a control module 32A.

[0048] The pressure reducing valve 50B is disposed upstream of the pneumatic servo valve 11A and the pressure reducing valve 12A in the gas flow path B1 of the system 100B. With this configuration, the supply pressure Ps of the pneumatic servo valve 11A is determined by the pressure reducing valve 50B. It is possible to make the set pressure of the pressure reducing valve 12A substantially equal to the control pressure Pc of the pneumatic servo valve 11A. In other words, by disposing the pressure reducing valve 50B in the gas flow path B1, it is possible to reduce pressure fluctuations in the pressure chamber 40 when switching between connection to the pressure chamber 40 between the pneumatic servo valve 11A and the pressure reducing valve 12A.

[0049] [Fourth embodiment] A fourth embodiment of the present disclosure will be described below. In the following, elements having the same reference symbols as those in the first to third embodiments will have substantially the same configurations and functions as those described in the first to third embodiments unless otherwise specified, and differences from the first to third embodiments will be mainly described.

[0050] 6 is a block diagram of an equipment 200C according to a fourth embodiment. The equipment 200C is installed in a factory or the like. The equipment 200C includes a system 100C and an air supply source 10A, which is an example of a gas supply source. The air supply source 10A supplies compressed air, which is an example of a compressed gas, to the system 100C.

[0051] The system 100C is a pneumatic system. The system 100C is a system that guides compressed air supplied from an air supply source 10A to a pressure chamber 40. The system 100C has a pneumatic servo valve 11A, a pressure reducing valve 12A, and a control device 30A. The control device 30A includes a switching valve 31A and a control module 32A. Compressed air is supplied from the air supply source 10A to the pressure reducing valve 12A, and compressed air is supplied to the pneumatic servo valve 11A via the pressure reducing valve 12A.

[0052] The pneumatic servo valve 11A is a valve arranged in a gas flow path C1 from the air supply source 10A to the pressure chamber 40. The pressure reducing valve 12A is a valve arranged upstream of the pneumatic servo valve 11A in the gas flow path C1. The pneumatic servo valve 11A is an example of a first valve, and the pressure reducing valve 12A is an example of a second valve. The switching valve 31A is arranged downstream of the pneumatic servo valve 11A and the pressure reducing valve 12A, and is a switching valve that selectively connects a control port 112, which is the gas output side of the pneumatic servo valve 11A, and an output port 122, which is the gas output side of the pressure reducing valve 12A, to the pressure chamber 40.

[0053] That is, the supply port 111 of the pneumatic servo valve 11A is connected to the output port 122 of the pressure reducing valve 12A, and the control port 112 of the pneumatic servo valve 11A is connected to the switching valve 31A. Also, the output port 122 of the pressure reducing valve 12A is connected to the switching valve 31A.

[0054] The pressure reducing valve 12A can also set the supply pressure Ps of the supply port 111 of the pneumatic servo valve 11A. When pressure regulation of the pressure chamber 40 by the pneumatic servo valve 11A is not required, the connection to the pressure chamber 40 is switched from the pneumatic servo valve 11A to the pressure reducing valve 12A at the switching valve 31A. In other words, the compressed air output from the pressure reducing valve 12A reaches the pressure chamber 40 via the switching valve 31A without passing through the pneumatic servo valve 11A.

[0055] At this time, it is preferable that the command current i is set to zero in the pneumatic servo valve 11A, that is, the nozzle 52 on the supply port 111 side is blocked by the armature flapper 51. This makes the flow rate of air discharged from the exhaust port 113 of the pneumatic servo valve 11A almost zero. This makes it possible to reduce the flow rate of air consumed in the system 100C compared to the case where the pressure of the pressure chamber 40 is constantly adjusted by the pneumatic servo valve 11A.

[0056] [Fifth embodiment] A fifth embodiment of the present disclosure will be described. In the following, elements having the same reference symbols as those in the first to fourth embodiments will have substantially the same configurations and functions as those described in the first to fourth embodiments unless otherwise specified, and differences from the first to fourth embodiments will be mainly described.

[0057] 7 is a block diagram of an equipment 200D according to a fifth embodiment. The equipment 200D is installed in a factory or the like. The equipment 200D includes a system 100D and an air supply source 10A, which is an example of a gas supply source. The air supply source 10A supplies compressed air, which is an example of a compressed gas, to the system 100D.

[0058] The system 100D is a pneumatic system. The system 100D is a system that guides compressed air supplied from an air supply source 10A to a pressure chamber 40. The system 100D has a pneumatic servo valve 11A, a pressure reducing valve 12A, and a control device 30D. The control device 30D causes either the pneumatic servo valve 11A or the pressure reducing valve 12A to adjust the pressure of the pressure chamber 40. The control device 30D includes a control module 32D. Compressed air is supplied from the air supply source 10A to the pressure reducing valve 12A, and compressed air is supplied to the pneumatic servo valve 11A via the pressure reducing valve 12A.

[0059] The pneumatic servo valve 11A is a valve disposed in a gas flow path D1 from the air supply source 10A to the pressure chamber 40. The pressure reducing valve 12A is a valve disposed upstream of the pneumatic servo valve 11A in the gas flow path D1. The pneumatic servo valve 11A is an example of a first valve, and the pressure reducing valve 12A is an example of a second valve. The control module 32D is formed of, for example, a control board, and controls the pneumatic servo valve 11A and the pressure reducing valve 12A.

[0060] The pneumatic servo valve 11A and the pressure reducing valve 12A are arranged in series in the gas flow path D1. In the fifth embodiment, the supply port 111 of the pneumatic servo valve 11A is connected to the output port 122 of the pressure reducing valve 12A, and the control port 112 of the pneumatic servo valve 11A is connected to the pressure chamber 40.

[0061] When the pneumatic servo valve 11A is to adjust the pressure in the pressure chamber 40, the control module 32D sets the command current i to a current between zero and the maximum current i_max, for example, i / i_max=0.5. When the pressure reducing valve 12A is to adjust the pressure in the pressure chamber 40, the control module 32D sets the pneumatic servo valve 11A to a fully open state, that is, sets the command current to i / i_max=1. In this way, in the pneumatic servo valve 11A, the supply port 111 and the control port 112 are communicated with each other, and the exhaust port 113 is closed.

[0062] In this way, even if the pneumatic servo valve 11A and the pressure reducing valve 12A are connected in series, the pressure in the pressure chamber 40 is adjusted to either the pneumatic servo valve 11A or the pressure reducing valve 12A, so that the flow rate of air consumed in the system 100D can be reduced.

[0063] [Sixth embodiment] A sixth embodiment of the present disclosure will be described. In the following, elements with the same reference symbols as those in the first to fifth embodiments have substantially the same configurations and functions as those described in the first to fifth embodiments unless otherwise specified, and differences from the first to fifth embodiments will be mainly described.

[0064] Figures 8 and 9 are schematic configuration diagrams of a machine tool 600 according to a sixth embodiment. Figure 8 shows a perspective view of the machine tool 600, and Figure 9 shows a front view of the machine tool 600 as viewed in the +Y-axis direction.

[0065] The machine tool 600 is used in a manufacturing method for manufacturing an article by machining a workpiece 72. The machine tool 600 is a five-axis machine tool having three linear axes and two rotational axes. The machine tool 600 is equipped with a bed 60. As the three linear axes, the machine tool 600 is equipped with an X-axis stage 61 capable of reciprocating in an X-axis direction that is a linear direction relative to the bed 60, a Y-axis stage 62 capable of reciprocating in a Y-axis direction that is a linear direction perpendicular to the X-axis direction relative to the bed 60, and a Z-axis stage 63 capable of reciprocating in a Z-axis direction that is a linear direction perpendicular to the X-axis and Y-axis directions relative to the bed 60. The X-axis and Y-axis directions are parallel to the horizontal direction. The Z-axis direction is a vertical direction (up and down direction) parallel to the direction of gravity.

[0066] A pair of Z-axis columns 66 are arranged on the bed 60, and a Z-axis column connecting bar 67 is connected to the pair of Z-axis columns 66. The Z-axis stage 63 is driven in the Z-axis direction relative to the pair of Z-axis columns 66 and the Z-axis column connecting bar 67.

[0067] The machine tool 600 also has two rotation axes, a C-axis stage 65 that can rotate back and forth around the Z-axis, and a B-axis stage 64 that can rotate at high speed around the Y-axis. The B-axis stage 64 can rotate in one direction or back and forth. The X-axis stage 61 and the Y-axis stage 62 form a planar stage. The C-axis stage 65 is mounted on the Y-axis stage 62. The B-axis stage 64 is mounted on the Z-axis stage 63.

[0068] A workpiece 72 is mounted on the B-axis stage 64, and a tool bite 71, which is an example of a tool, is mounted on the C-axis stage 65. While rotating the B-axis stage 64 at high speed, the tool bite 71 is moved relative to the workpiece 72 by the X-axis stage 61, the Y-axis stage 62, and the C-axis stage 65, whereby turning can be performed on the workpiece 72.

[0069] It should be noted that machine tool 600 is a five-axis machine tool with three linear axes and two rotational axes, but is not limited to this. The machine tool to which the pneumatic system is applied only needs to have a Z-axis stage that is movable in the Z-axis direction, which is the direction of gravity, and the processing mode is not limited to turning.

[0070] As shown in FIG. 9, the machine tool 600 includes a machine device 300. The machine device 300 can be used for the positioning mechanism of the machine tool 600. The machine device 300 includes the system 100B of the third embodiment and a balance cylinder 400 arranged on the Z-axis stage 63. The balance cylinder 400 is a type of air balancer, which is an example of a device having a pressure chamber 40. The balance cylinder 400 in this embodiment is for compensating for the weight of the Z-axis stage 63. That is, the balance cylinder 400 is for supporting the Z-axis stage 63. The balance cylinder 400 can generate a biasing force corresponding to the weight of the Z-axis stage 63, and allows a Z-axis driving device (not shown) to drive the Z-axis stage 63 without bearing the weight support portion in the Z-axis direction. The Z-axis driving device is, for example, a linear motor or a ball screw.

[0071] 10 is an enlarged view of a balance cylinder 400 according to the sixth embodiment and its vicinity. The balance cylinder 400 has a balance cylinder rod 45 connected to a Z-axis column connecting bar 67. A pressure chamber 40 of the balance cylinder 400 is formed between the balance cylinder rod 45 and the Z-axis stage 63. A space 44 provided at a position facing the pressure chamber 40 across the balance cylinder rod 45 is open to the atmosphere. In addition, the balance cylinder rod 45 and the Z-axis stage 63 are sealed by two seal portions 46. The Z-axis stage 63 can move in the Z-axis direction while trapping the compressed air in the pressure chamber 40.

[0072] The pressure chamber 40 is connected to the system 100B of the third embodiment. For example, the balance cylinder 400 is operated by adjusting the pressure chamber 40 of the balance cylinder 400 by the pneumatic servo valve 11A (pressure adjusting device 11 in the first embodiment) and the pneumatic servo valve 11A (second pressure adjusting device 12). In an operating state in which the machine tool 600 performs machining, the pressure of the pressure chamber 40 of the balance cylinder 400 is adjusted with high precision by the pneumatic servo valve 11A. This suppresses pressure fluctuations in the pressure chamber 40 of the balance cylinder 400, making it possible to position the Z-axis stage 63 with high precision. Therefore, the machine tool 600 can machine the workpiece 72 with, for example, nanometer-order precision.

[0073] When pressure regulation of pressure chamber 40 by pneumatic servo valve 11A is not required, for example when machine tool 600 is in a standby state, pneumatic servo valve 11A is switched to pressure reducing valve 12A by switching valve 31A.

[0074] The standby state of machine tool 600 refers to a state in which machine tool 600 is not performing machining. In order to maintain the machining accuracy of machine tool 600, machine tool 600 is in a standby state in which it does not perform machining during setup, at night, etc. In such cases, machine tool 600 is often left powered on. For example, the ratio of standby time to the total start-up time of machine tool 600 may reach 80%.

[0075] When machine tool 600 is in a standby state, the pressure in pressure chamber 40 only needs to reach the target pressure (predetermined pressure) to some extent, and does not need to be adjusted with high accuracy to the target pressure. That is, when machine tool 600 is in a standby state, Z-axis stage 63 does not require as high positioning accuracy as when machine tool 600 is in an operating state where machining is performed. If the pressure adjustment of pressure chamber 40 of balance cylinder 400 is performed by pneumatic servo valve 11A even when machine tool 600 is in a standby state, a lot of air will be consumed in system 100B.

[0076] On the other hand, according to the sixth embodiment, when the machine tool 600 is on standby, the pneumatic servo valve 11A is switched to the pressure reducing valve 12A, and the pressure in the pressure chamber 40 of the balance cylinder 400 is adjusted by the pressure reducing valve 12A, so that the flow rate of air consumed can be significantly reduced.

[0077] Moreover, the pressure adjusting device for adjusting the pressure of the pressure chamber 40 may be switched according to a control program including the machining program of the machine tool 600. That is, the control device 30A shown in FIG. 5 adjusts the pressure of the pressure chamber 40 by at least one of the pneumatic servo valve 11A and the pressure reducing valve 12A according to the control program. For example, when the machine tool 600 is on standby, the pressure of the pressure chamber 40 of the balance cylinder 400 is adjusted by the pressure reducing valve 12A, and immediately before machining is started, the pressure reducing valve 12A is automatically switched to the pneumatic servo valve 11A. After machining is completed, the pneumatic servo valve 11A is automatically switched to the pressure reducing valve 12A. By switching in this manner, the flow rate of air consumed can be further efficiently reduced.

[0078] The pressure regulator for adjusting the pressure of the pressure chamber 40 may be switched by an operator (user) via an operation panel of the machine tool. That is, the control device 30A shown in Fig. 5 adjusts the pressure of the pressure chamber 40 using at least one of the pneumatic servo valve 11A and the pressure reducing valve 12A in accordance with an instruction from the user via the operation panel. The pressure regulator for adjusting the pressure chamber 40 may be automatically switched when a certain time has elapsed since no operation instruction was given to the machine tool.

[0079] In the sixth embodiment, the case where the system 100B of the third embodiment is applied to the machine tool 600 has been described; however, this is not limited to this, and the system 100 of the first embodiment, the system 100A of the second embodiment, the system 100C of the fourth embodiment, or the system 100D of the fifth embodiment may also be applied to the machine tool 600.

[0080] In addition, although the case where the mechanical device 300 having the balance cylinder 400 is applied to the machine tool 600 has been described, the application of the mechanical device 300 is not limited to machine tools. The systems 100 to 100D can also be applied to a press machine using air pressure, a robot driven by air pressure, and the like.

[0081] The present disclosure is not limited to the above-described embodiments, and many modifications of the embodiments are possible within the technical concept of the present disclosure. Furthermore, the effects described in the present embodiment are merely a list of the most preferable effects resulting from the embodiments of the present disclosure, and the effects of the embodiments of the present disclosure are not limited to those described in the present embodiment.

[0082] Furthermore, the disclosure of this specification includes not only what is explicitly described in this specification, but also all matters that can be understood from this specification and the drawings attached to this specification. The disclosure of this specification also includes the complement of each individual concept described in this specification. In other words, if this specification contains a statement that "A is B," for example, this specification can be said to disclose that "A is not B" even if the statement that "A is not B" is omitted. This is because when "A is B," it is assumed that the case where "A is not B" is taken into consideration.

[0083] The disclosure of the above embodiments includes the following sections.

[0084] (Section 1) A system for directing compressed gas supplied from a gas source to a pressure chamber, comprising: a first pressure adjusting device capable of adjusting the pressure of the pressure chamber; a second pressure adjusting device capable of adjusting the pressure of the pressure chamber; a control device that causes at least one of the first pressure adjusting device and the second pressure adjusting device to adjust the pressure of the pressure chamber, a flow rate of the gas supplied from the gas supply source when the second pressure adjustment device adjusts the pressure of the pressure chamber is smaller than a flow rate of the gas supplied from the gas supply source when the first pressure adjustment device adjusts the pressure of the pressure chamber; A system characterized by:

[0085] (Section 2) the first pressure adjustment device has a smaller variation in pressure of the pressure chamber with respect to a target pressure when adjusting the pressure of the pressure chamber to the target pressure than the second pressure adjustment device; Item 1. The system according to item 1, characterized in that

[0086] (Section 3) The first pressure adjusting device accompanies exhaust when adjusting the pressure of the pressure chamber. 3. The system according to item 1 or 2, characterized in that

[0087] (Section 4) the second pressure adjustment device does not exhaust when adjusting the pressure of the pressure chamber, or exhausts a smaller amount of air than the first pressure adjustment device when adjusting the pressure of the pressure chamber. Item 4. The system according to item 3, characterized in that:

[0088] (Section 5) the first pressure regulator includes a pneumatic servo valve; 5. The system according to any one of claims 1 to 4.

[0089] (Section 6) The pneumatic servo valve is a nozzle flapper type pneumatic servo valve. Item 6. The system according to item 5, characterized in that

[0090] (Section 7) The second pressure regulating device includes a pressure reducing valve. 7. The system according to any one of claims 1 to 6,

[0091] (Section 8) the first pressure regulator includes a first valve disposed in a gas flow path from the gas supply source to the pressure chamber; the second pressure regulator includes a second valve disposed in parallel with the first valve in the gas flow path; the control device includes a switching valve disposed downstream of the first valve and the second valve in the gas flow path, and selectively connecting a gas output side of the first valve and a gas output side of the second valve to the pressure chamber. Item 1. The system according to item 1, characterized in that

[0092] (Section 9) the first pressure regulator includes a first valve disposed in a gas flow path from the gas supply source to the pressure chamber; the second pressure regulator includes a second valve disposed upstream of the first valve in the gas flow path; the control device includes a switching valve disposed downstream of the first valve and the second valve, and selectively connecting a gas output side of the first valve and a gas output side of the second valve to the pressure chamber; Item 1. The system according to item 1, characterized in that

[0093] (Section 10) the first pressure regulator includes a first valve disposed in a gas flow path from the gas supply source to the pressure chamber; the second pressure regulator includes a second valve disposed in series with the first valve in the gas flow path; The control device controls the first valve and the second valve. Item 1. The system according to item 1, characterized in that

[0094] (Section 11) The first valve is a pneumatic servo valve. 11. The system according to any one of items 8 to 10,

[0095] (Section 12) The second valve is a pressure reducing valve. 12. The system according to any one of claims 8 to 11,

[0096] (Section 13) the first valve is a pneumatic servo valve; the second valve is a pressure reducing valve, the pneumatic servo valve includes a supply port connected to the pressure reducing valve, a control port connected to the pressure chamber, and an exhaust port; the control device closes the exhaust port and communicates between the supply port and the control port when causing the pressure reducing valve of the second pressure adjusting device to adjust the pressure of the pressure chamber. Item 11. The system according to item 10, characterized in that

[0097] (Section 14) The control device controls the second pressure adjusting device to adjust the pressure of the pressure chamber when the device having the pressure chamber is in a standby state. 14. The system according to any one of claims 1 to 13,

[0098] (Section 15) A system according to any one of claims 1 to 14, a balance cylinder having the pressure chamber; A mechanical device comprising:

[0099] (Section 16) Item 15: A mechanical device according to item 15; a stage supported by the balance cylinder of the mechanical device; A machine tool characterized by:

[0100] (Section 17) The stage is driven in a vertical direction. Item 17. The machine tool according to item 16, characterized in that

[0101] (Section 18) The control device controls at least one of the first pressure adjusting device and the second pressure adjusting device to adjust the pressure of the pressure chamber in accordance with a control program including a processing program. 18. The machine tool according to item 16 or 17,

[0102] (Section 19) The control device causes at least one of the first pressure adjusting device and the second pressure adjusting device to adjust the pressure of the pressure chamber in accordance with an instruction from a user. 18. The machine tool according to item 16 or 17,

[0103] (Section 20) A system according to any one of claims 1 to 14, a gas source supplying compressed gas to the system; The facility is characterized by:

[0104] (Section 21) The gas supply source includes an electrically powered compressor. 21. The equipment according to item 20, characterized in that

[0105] (Section 22) 20. A method for manufacturing an article, comprising the steps of: manufacturing an article by using the machine tool according to any one of items 16 to 19. [Explanation of symbols]

[0106] 10...gas supply source, 11...pressure regulator (first pressure regulator), 12...pressure regulator (second pressure regulator), 30...control device, 40...pressure chamber, 100...system

Claims

1. A system for directing compressed gas supplied from a gas source to a pressure chamber, comprising: a first pressure adjusting device capable of adjusting the pressure of the pressure chamber; a second pressure adjusting device capable of adjusting the pressure of the pressure chamber; a control device that causes at least one of the first pressure adjusting device and the second pressure adjusting device to adjust the pressure of the pressure chamber, a flow rate of the gas supplied from the gas supply source when the second pressure adjusting device adjusts the pressure of the pressure chamber is smaller than a flow rate of the gas supplied from the gas supply source when the first pressure adjusting device adjusts the pressure of the pressure chamber; A system characterized by:

2. the first pressure adjustment device has a smaller variation in pressure of the pressure chamber with respect to a target pressure when adjusting the pressure of the pressure chamber to the target pressure than the second pressure adjustment device; 2. The system of claim 1 .

3. The first pressure adjusting device accompanies exhaust when adjusting the pressure of the pressure chamber.

2. The system of claim 1 .

4. the second pressure adjustment device does not exhaust air when adjusting the pressure of the pressure chamber, or exhausts an amount of air smaller than that of the first pressure adjustment device when adjusting the pressure of the pressure chamber.

4. The system of claim 3.

5. the first pressure regulator includes a pneumatic servo valve; 2. The system of claim 1 .

6. The pneumatic servo valve is a nozzle flapper type pneumatic servo valve.

6. The system of claim 5.

7. The second pressure regulator includes a pressure reducing valve.

2. The system of claim 1 .

8. the first pressure regulator includes a first valve disposed in a gas flow path from the gas supply source to the pressure chamber; the second pressure regulator includes a second valve disposed in parallel with the first valve in the gas flow path; the control device includes a switching valve disposed downstream of the first valve and the second valve in the gas flow path, and selectively connecting a gas output side of the first valve and a gas output side of the second valve to the pressure chamber.

2. The system of claim 1 .

9. the first pressure regulator includes a first valve disposed in a gas flow path from the gas supply source to the pressure chamber; the second pressure regulator includes a second valve disposed upstream of the first valve in the gas flow path; the control device includes a switching valve disposed downstream of the first valve and the second valve, and selectively connecting a gas output side of the first valve and a gas output side of the second valve to the pressure chamber.

2. The system of claim 1 .

10. the first pressure regulator includes a first valve disposed in a gas flow path from the gas supply source to the pressure chamber; the second pressure regulator includes a second valve disposed in series with the first valve in the gas flow path; The control device controls the first valve and the second valve.

2. The system of claim 1 .

11. The first valve is a pneumatic servo valve.

9. The system of claim 8.

12. The second valve is a pressure reducing valve.

9. The system of claim 8.

13. the first valve is a pneumatic servo valve; the second valve is a pressure reducing valve, the pneumatic servo valve includes a supply port connected to the pressure reducing valve, a control port connected to the pressure chamber, and an exhaust port; the control device closes the exhaust port and communicates between the supply port and the control port when causing the pressure reducing valve of the second pressure adjusting device to adjust the pressure of the pressure chamber. The system of claim 10.

14. the control device causes the second pressure adjusting device to adjust the pressure of the pressure chamber when the device having the pressure chamber is in a standby state; 2. The system of claim 1 .

15. A system according to claim 1; a balance cylinder having the pressure chamber; A mechanical device comprising:

16. A machine according to claim 15; a stage supported by the balance cylinder of the mechanical device; A machine tool characterized by:

17. The stage is driven in a vertical direction.

17. The machine tool according to claim 16.

18. the control device causes at least one of the first pressure adjusting device and the second pressure adjusting device to adjust the pressure of the pressure chamber in accordance with a control program including a processing program; 17. The machine tool according to claim 16.

19. the control device causes at least one of the first pressure adjusting device and the second pressure adjusting device to adjust the pressure of the pressure chamber in accordance with an instruction from a user; 17. The machine tool according to claim 16.

20. A system according to any one of claims 1 to 14; a gas source supplying compressed gas to the system; The facility is characterized by:

21. The gas supply source includes an electrically powered compressor.

21. The installation according to claim 20.

22. A method for manufacturing an article, comprising manufacturing the article by using the machine tool according to any one of claims 16 to 19.

Images