Apparatus for providing liquefied material, delivery system and method for delivering liquefied material - Patents.com

Abstract

A deposition apparatus is provided. The deposition apparatus includes a tank for providing liquefied material and a first unit having a variable first volume, the first unit having a first actuator and a first line in fluid communication with the tank. The deposition apparatus further includes a second unit having a variable second volume, the second unit having a second actuator and a second line in fluid communication with the tank. The deposition apparatus includes an evaporation arrangement in fluid communication with the first unit and the second unit. The first actuator and the second actuator are configured to alternately apply forces to the variable first volume and the variable second volume to provide liquefied material to the evaporation arrangement.

Description

[Technical field]

[0001]

[0001] Embodiments of the present disclosure relate to deposition and vapor deposition of alkali or alkaline earth metals, such as lithium. In particular, embodiments of the present disclosure relate to deposition apparatus and methods for delivering the provided materials, particularly vapor deposition apparatus, delivery systems for providing liquefied material to an evaporation arrangement, and methods for delivering the liquefied material. [Background technology]

[0002]

[0002] Various techniques are known for depositing on a substrate, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD). To deposit at high deposition rates, thermal evaporation can be used as a PVD process. In thermal evaporation, source materials are heated to produce vapors that can be deposited, for example, on a substrate. Increasing the temperature of the heated source materials increases the vapor concentration and can promote high deposition rates. The temperature to achieve high deposition rates depends on the physical properties of the source materials (e.g. vapor pressure) as a function of temperature and the physical limitations of the substrate (e.g. melting point).

[0003] For example, the source material to be deposited on the substrate may be heated in a tank to generate a vapor at high vapor pressure. The vapor may be transported from the tank to a coating volume in a heated manifold. From the heated manifold, the source material vapor may be distributed into the coating volume, for example onto the substrate in a vacuum chamber.

[0004]

[0004] Modern thin-film lithium batteries may include a lithium layer, which is formed, for example, by depositing lithium in the vapor state on a substrate. Because lithium is highly reactive, several measures must be taken to operate and maintain such a deposition system.

[0005]

[0005] In the case of alkali and / or alkaline earth metals, some configurations are not well suited for large volume, low-cost production, as the method has significant problems in managing the high reactivity of the materials while scaling to large volume production. This presents a challenge in producing uniformly deposited pure lithium. Highly reactive materials, especially lithium, can easily be oxidized by reacting with the surrounding environment (e.g., gas), materials, etc. Lithium is of particular interest because it is suitable for the production of batteries and accumulators with higher energy density, i.e., primary and secondary batteries.

[0006]

[0006] Typical deposition systems for lithium and other alkali or alkaline earth metals can utilize sputtering sources or conventional evaporation sources and their operating methods, respectively. Sputtering methods for lithium are challenging, especially in terms of cost and manufacturability, due to the reactivity of lithium. The high reactivity affects, firstly, the manufacture of the target (the component required for sputtering) and, secondly, the handling of the resulting target. Since the melting point of lithium is relatively low at 183°C, the deposition rate can also be limited, since the melting point imposes limitations on the high power density sputtering regime and on the more flexible regime for high volume and low cost manufacturing. In other words, the low melting point of lithium limits the maximum power that can be applied and therefore the maximum deposition rate that can be achieved.

[0007] In view of the above, it would be advantageous to have a novel deposition apparatus, particularly a vapor deposition apparatus and method for controlling the delivery of evaporative material. Summary of the Invention

[0008]

[0008] In view of the above, there is provided a deposition apparatus, a supply system for providing liquefied material to an evaporation arrangement, and a method for supplying liquefied material as set forth in the independent claims. Further aspects, advantages and features of the present disclosure will be apparent from the description and the accompanying drawings.

[0009]

[0009] According to one embodiment, a deposition apparatus is provided. The deposition apparatus includes a tank for providing liquefied material and a first unit having a variable first volume, the first unit including a first actuator and a first line in fluid communication with the tank. The deposition apparatus further includes a second unit having a variable second volume, the second unit including a second actuator and a second line in fluid communication with the tank. The deposition apparatus further includes an evaporation arrangement, the evaporation arrangement in fluid communication with the first unit and the second unit. The first actuator and the second actuator are configured to alternately apply forces to the variable first volume and the variable second volume to provide liquefied material to the evaporation arrangement.

[0010] According to one embodiment, there is provided a delivery system for providing liquefied material to an evaporation arrangement, the delivery system including a first unit having a changeable first volume and comprising a first actuator, and a second unit having a changeable second volume and comprising a second actuator, the first actuator and the second actuator configured to provide alternating forces to the first unit and the second unit for alternatingly varying the first volume and the second volume for providing liquefied material to the evaporation arrangement.

[0011] According to one embodiment, a method for supplying liquefied material is provided, the method including liquefying material in a tank; providing the liquefied material from the tank to a first unit having a variable first volume and to a second unit having a variable second volume; acting on the variable first volume with a first actuator providing a first force to transport the liquefied material from the first unit toward an evaporation arrangement; acting on the variable second volume with a second actuator providing a third force to transport the liquefied material from the second unit toward an evaporation arrangement, acting on the variable first volume with a first actuator providing a second force less than the first force; and acting on the variable second volume with a second actuator providing a fourth force less than the third force.

[0012]

[0012] Various embodiments are also directed to apparatus for carrying out the disclosed methods, including apparatus parts for carrying out each method aspect described. These method aspects may be performed by hardware components, by a computer programmed with appropriate software, by any combination of the two, or in any other manner. Additionally, embodiments according to the present disclosure are also directed to methods for operating the described apparatus, including method aspects for performing any function of the apparatus.

[0013]

[0013] For a more particular description of the present disclosure, briefly summarized above, in order that the above-mentioned features of the present disclosure may be understood in detail, reference may be made to the following embodiments. The accompanying drawings relate to the embodiments of the present disclosure and are as follows: [Brief description of the drawings]

[0014] [Figure 1] 1 illustrates a deposition apparatus according to embodiments described herein. [Diagram 2] 1 illustrates a deposition apparatus according to embodiments described herein. [Diagram 3]1 illustrates a deposition apparatus according to embodiments described herein. [Figure 4] 1 shows a flow diagram of a method according to an embodiment described herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015]

[0014] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the figures. In the following description of the drawings, like reference numerals refer to like components. Generally, only the differences with respect to individual embodiments will be described. Each example is provided to illustrate the disclosure and is not intended as a limitation of the disclosure. Furthermore, features illustrated or described as part of one embodiment may be used on or in combination with other embodiments to yield still further embodiments. It is intended that the present specification include such modifications and variations.

[0016]

[0015] In the following description of the drawings, the same reference numbers refer to the same or similar components. Generally, only the differences with respect to individual embodiments are described. Unless otherwise specified, the description of a part or aspect also applies to the corresponding part or aspect in another embodiment.

[0017]

[0016] In the following, one or more evaporation concepts are described for lithium as the material to be evaporated. According to some embodiments (which can be combined with other embodiments described herein), the evaporation concept can also be applied to other materials. In particular, the evaporation concept can also be applied to highly reactive materials, such as alkali metals or alkaline earth metals. Furthermore, the evaporation concept can be advantageously used due to the very high deposition rates resulting in layer thicknesses of several microns or more in a roll-to-roll coater.

[0018]

[0017] For the evaporation of alkali or alkaline earth metals, such as lithium, the material to be evaporated and deposited on the substrate is advantageously liquefied before evaporation. Directing the liquefied material to the evaporation arrangement may include the use of pressurized inert gas to apply force to the liquefied material to push it through a conduit to the evaporator. Typically, a valve including a flow meter is used to control the flow rate of the liquefied material and thus the resulting evaporation rate. However, regulating the supply of the material to be evaporated by gas pressure can be inaccurate and can lead to interruptions in the supply of material, which can lead to an inefficient evaporation process.

[0019] In view of the above, improved material delivery would be advantageous with respect to evaporation efficiency, system maintenance, and yield of processed substrates.

[0020] According to some embodiments, a method for evaporating a material, in particular an alkali metal or an alkaline earth metal, or an apparatus for evaporating said material is provided. A tank configured to provide the material is provided. The tank may be provided in a first compartment. A heating arrangement is provided, configured to heat the material to provide a liquefied material. The tank may further be configured to heat the material to obtain the liquefied material. The tank may include a heating assembly for heating the material.

[0021]

[0020] The tank may include a gas inlet configured for the inlet of a gas in the tank, where in particular pressure control of the gas may be provided. The gas may be, for example, an inert gas such as argon. An evaporation zone configured for flash evaporation of the liquefied material may be provided in the second compartment. A line or conduit may be provided providing fluid communication between the tank and the evaporation zone. The flow rate of the liquid material in the line or conduit defines the deposition rate. The flow rate is adjustable according to embodiments of the present disclosure. According to some embodiments (which may be combined with other embodiments described herein), the evaporation zone may be provided in a crucible. The crucible may be included in an evaporation arrangement, in particular an evaporation arrangement having a plurality of nozzles (e.g. a one-dimensional array of nozzles or a two-dimensional array of nozzles).

[0022]

[0021] Figure 1 shows a vapor deposition apparatus 100. The vapor deposition apparatus may include a first compartment, indicated by dashed line 101. The first compartment may be configured to maintain a temperature equal to or higher than the melting temperature of the material to be evaporated. For example, for lithium, the first temperature of the first compartment may be equal to or higher than 190°C, such as equal to or higher than 220°C, as a further example, equal to or higher than 250°C. Atmospheric conditions may be provided in the first compartment. According to some embodiments (which may be combined with other embodiments described herein), atmospheric conditions may be provided with a relative humidity of 2% or less, such as equal to or lower than 1%, or even equal to or lower than 0.5%. The first compartment may thus include a dehumidifier, in particular a dehumidifier configured to provide the above-mentioned relative humidity. Reducing the humidity in the first compartment may be particularly advantageous for evaporating highly reactive materials, such as alkali metals or alkaline earth metals, such as lithium.

[0023] According to an embodiment, which may be combined with any other embodiment described herein, a tank 102 for providing a material to be evaporated is provided. A gas inlet 104 may be arranged in the tank. The gas inlet 104 may provide a gas conduit in fluid communication with the tank 102. A gas, for example an inert gas such as argon, may be arranged in the tank 102. A pressure control may be provided to the gas inlet 104 to generate an overpressure in the tank. In the tank, the material to be evaporated may be liquefied. The liquid material to be deposited in the evaporation arrangement may be led by a number of lines through the apparatus. The overpressure in the tank 102 may move the liquid material through a number of lines. In particular, the overpressure in the tank may provide the liquid material to the supply system 110. According to some embodiments, which may be combined with other embodiments described herein, the pressure in the tank 102 may be controlled to be constant during evaporation. The pressure in the tank 102 may not be utilized to adjust the deposition rate.

[0024] According to some embodiments, which may be combined with other embodiments described herein, the deposition apparatus includes a heating arrangement for providing heat to the material to obtain a liquefied or liquid material. The heating arrangement may be configured to provide heat, for example a temperature above the melting temperature of the material, in the first compartment 101. Additionally or alternatively, a heating arrangement may be provided in the tank 102 for providing heat, for example a temperature above the melting temperature of the material, to the material in the tank.

[0025] According to an embodiment that may be combined with any other embodiment described herein, the deposition apparatus may include a supply system 110. The supply system 110 may include a first unit and a second unit. The first unit and the second unit may be configured to provide a volume of liquid material to the evaporation arrangement. In particular, the first unit and the second unit may be configured to alternately provide liquid material to the evaporation arrangement.

[0026] According to an embodiment that can be combined with any other embodiment described herein, the deposition apparatus includes a first unit having a variable first volume and a first actuator. The first unit includes a first line L1 in fluid communication with a tank. The deposition apparatus further includes a second unit having a variable second volume and a second actuator. The second unit includes a second line L2 in fluid communication with the tank. The first line L1 and the second line L2 can be a line of a plurality of lines that direct the liquefied material through the apparatus. The first unit and the second unit can include a conduit L for fluid communication with the evaporation arrangement. The plurality of lines can include a conduit L. The first unit and the second unit can be included in a supply system 110. The first actuator and the second actuator are configured to alternately provide a force to the variable first volume and the variable second volume to provide the liquefied material to the evaporation arrangement. In other words, the alterable first volume and the alterable second volume may be altered alternately to provide liquid material to the evaporation arrangement.

[0027] According to some embodiments (which can be combined with other embodiments described herein), the first compartment 101 may be provided with insulation at least partially at the interface to the first compartment or around the first compartment. Thus, the temperature in the first compartment may be above the melting temperature of the material to be evaporated, in particular may always be above the melting temperature. One or more components in the compartment, in particular those in contact with the material to be evaporated, may be provided above the melting temperature. Blocking of materials such as lithium may be avoided. For example, the lines, such as the first line L1 and / or the second line L2, may be provided with a material that is a poor thermal conductor, for example stainless steel. For example, the conduit L may have an insulator at the interface to the first compartment 101.

[0028]

[0027] According to an embodiment, which can be combined with any other embodiment described herein, the first unit and the second unit can be in fluid communication with an evaporation arrangement 140, for example via a conduit L. The evaporation arrangement can be arranged in a second compartment 141. The evaporation arrangement can include a crucible 130 and an enclosure 142 in fluid communication with the crucible. The enclosure, i.e. the distribution enclosure, can be a steam distribution pipe or a steam distribution showerhead. The steam can leave the enclosure 142 through a number of nozzles in or on the wall of the enclosure. In particular, the pressure in the enclosure is at least one magnitude greater than the pressure in a second compartment, for example a vacuum chamber, in which the evaporation arrangement can be at least partially arranged. The second compartment 141 can be a processing chamber.

[0029] According to an embodiment that may be combined with any other embodiment described herein, the second chamber may include a pump 136. The pump 136 may be a vacuum pump utilized to at least partially evacuate the vacuum chamber for the processing region. According to some embodiments, the deposition apparatus may include a controller. The controller may be configured to control the first actuator, the second actuator, the first operable flow restriction device, the second operable flow restriction device, the third operable flow restriction device, and the fourth operable flow restriction device, as well as pressure control of the gas at the gas inlet of the tank. Additionally, the controller may be configured to control refilling of the tank.

[0030] According to an embodiment that can be combined with any other embodiment described herein, as exemplarily shown in FIG. 2, a deposition apparatus can include a supply system 110. The supply system 110 can include a first unit 112 and a second unit 114. The supply system 110 can further include a tank 102. The first unit 112 includes a variable first volume 116, and the second unit includes a variable second volume 118. The first volume and the second volume can be provided with a liquefied material from the tank 102. The material can be provided to the first unit, i.e., the first volume, and to the second unit, i.e., the second volume, via a first line L1 and a second line L2, respectively. The first and second units, in particular the variable first volume, the variable second volume, as well as the first and second lines, the third and fourth lines, and the conduit L, may be made of a corrosion-resistant material, such as, for example, stainless steel, a stainless steel alloy, and / or molybdenum.

[0031] According to an embodiment, which may be combined with any other embodiment described herein, the tank 102 may include a fill inlet for providing material to the tank. The fill inlet may include a flow restrictor 105, e.g., a valve, for regulating the fill volume of the tank. In particular, the fill inlet may be configured to provide material to be melted, i.e., liquefied, in the tank 102. Thus, liquefied material may be continuously provided to and from the tank towards the feed system and the evaporation arrangement.

[0032]

[0031] According to an embodiment that can be combined with any other embodiment described herein, the first line may include a first operable flow restrictor 106 for regulating a first flow of the liquefied material towards the first unit. The second line may include a second operable flow restrictor 107 for regulating a second flow of the liquefied material towards the second unit. The liquefied material in the tank may be provided to the first and second units by exerting a force on the liquefied material, i.e. by placing an inert gas in the tank to push the liquefied material towards the first and second lines L1 and L2. By controlling the first and second operable flow restrictors 106 and 107, the liquefied material may be placed in the first and second units, respectively.

[0033]

[0032] According to an embodiment that can be combined with any other embodiment described herein, the first unit may include a third line L3 providing a fluid communication of the first unit with the evaporation arrangement, for example via a conduit L. The third line L3 may be connected to the conduit L. The third line L3 may include a third operable flow restrictor 108 for controlling the flow of material from the first unit 112, i.e. from the variable first volume 116, towards the evaporation arrangement. The second unit may include a fourth line L4 providing a fluid communication of the second unit with the evaporation arrangement, for example via a conduit L. The fourth line L4 may be connected to the conduit L. The fourth line L4 may include a fourth operable flow restrictor 109 for controlling the flow of material from the second unit 114, i.e. from the variable second volume 118, towards the evaporation arrangement. The supply system and the evaporation arrangement are exemplarily shown in FIG. 3.

[0034]

[0033] According to an embodiment, which can be combined with any other embodiment described herein, the first volume 116 and the second volume 118 can be changed in order to provide liquefied material towards the evaporation arrangement. In particular, the first volume and the second volume can be compressed in order to provide material towards the evaporation arrangement. Additionally or alternatively, the first volume and the second volume can be expanded, respectively, for example to stop providing material towards the evaporation arrangement. Compressing a volume can be understood as compressing the volume of the device or as compressing the volume of material provided inside the first unit and / or the second unit.

[0035]

[0034] According to an embodiment that can be combined with any other embodiment described herein, the first unit 112 and the second unit 114 include a first actuator 120 and a second actuator 121, respectively. The first actuator and the second actuator can provide a defined motion so that a defined volume of liquefied material can be provided to the evaporation arrangement. The first actuator and the second actuator can each include a motor 122. The motor 122 can be connected to each of the first unit and / or the second unit. The first actuator and the second actuator can be a linear motor, in particular a motor-driven spindle gear, a crankshaft and / or a rack and pinion drive. For example, each turn of the motor-driven spindle gear can correspond to a predefined volume of liquefied material provided to the evaporation arrangement when the motor-driven spindle gear is operated. The first actuator and the second actuator can be configured to provide an alternating force to the alternating first volume and the alternating second volume to alternatingly change the first volume and the second volume to provide liquefied material to the evaporation arrangement. The flow of material from the first unit and / or the second unit towards the evaporation arrangement can be regulated via the force provided by the first actuator and / or the second actuator, respectively: the greater the force, the more material can be provided towards the evaporation arrangement.

[0036]

[0035] Advantageously, by controlling the actuators, i.e. by controlling the forces exerted by the actuators on each unit, the flow of material can be regulated more precisely. Thus, the regulation of the supply of material provided to the evaporation arrangement, i.e. the amount of material provided to the evaporation arrangement, can be made easier and improved. Also advantageously, the supply of material towards the evaporation arrangement can be stopped instantly by exerting an opposite force on each of the actuators.

[0037]

[0036] For example, liquefied material may be provided from the tank 102 to the first unit, i.e. the first operable flow restrictor 106 may be opened, and liquefied material may be provided from the tank to the first unit and disposed in the first volume. The first actuator may then provide a force to the first unit, i.e. to the first volume, such that the first volume is altered, e.g. reduced or compressed. Thus, liquefied material may be disposed in the third line L3 and provided towards the evaporation arrangement by opening the third operable flow restrictor 108. The flow rate of material may be controlled by controlling the force provided by the first actuator to the first unit or the first volume, i.e. by the speed of the first actuator. While providing material via the first unit to the evaporation arrangement, the second operable flow restrictor 107 may be opened, and liquefied material may be provided from the tank 102 to the second unit or the second volume. When the first volume is almost completely reduced or compressed, the force exerted by the first actuator on the first unit or the first volume is reduced, i.e., the speed of the first actuator can be slowed down, and the fourth operable flow restrictor 109 can be opened. The second actuator can then exert a force on the second unit, i.e., on the second volume, such that the second volume is changed, i.e., reduced or compressed. Thus, the liquefied material can be placed in the fourth line L4 and provided towards the evaporation arrangement. The third operable flow restrictor 108 can be closed. The first operable flow restrictor 106 can be opened, and the first unit or the first volume can be provided with material from the tank 102, while material can be provided by the second unit to the evaporation arrangement.

[0038]

[0037] According to an embodiment that can be combined with any other embodiment described herein, the procedure as described above may be repeated, i.e., when the second unit or second volume is almost completely contracted or compressed, the force exerted by the second actuator on the second unit or second volume is reduced, i.e., the speed of the second actuator may be slowed down and the third operable flow restrictor 108 may be opened. The first actuator may then exert a force on the first unit or first volume and the procedure may be repeated as described above. Refilling of the tank 102, i.e., providing material to the tank, may occur when no material is provided from the tank to the first unit and / or the second unit.

[0039]

[0038] It should be understood that both the first unit and the second unit, i.e. both the first volume and the second volume, may be provided with material from a tank prior to providing material from one of the first and second units towards the evaporation arrangement.

[0040] According to an embodiment, which may be combined with any other embodiment described herein, the first operable flow restriction device 106, the second operable flow restriction device 107, the third operable flow restriction device 108 and the fourth operable flow restriction device 109 may be valves, in particular ball valves or freeze valves. The operable flow restriction devices may be controlled by a controller for opening and / or closing the operable flow restriction devices, respectively.

[0041]

[0040] According to an embodiment, which may be combined with any other embodiment described herein, providing a force to the first unit, i.e., the first volume, or providing a force to the second unit, i.e., the second volume, respectively, may occur simultaneously with providing a smaller force by the second actuator to the second unit or the second volume, and simultaneously with providing a smaller force by the first actuator to the first unit or the first volume, respectively. Thus, when the second unit or the second volume is nearly depleted of material, or when the first unit or the first volume is nearly depleted of material, respectively, liquefied material may be provided instantaneously by the first unit or the first volume, or by the second unit or the second volume, such that the provision of material is not interrupted or material may be provided continuously.

[0042] According to an embodiment, which may be combined with any other embodiment described herein, the first unit may include a first compression device and the second unit may include a second compression device. The first compression device and the second compression device may include a first volume 116 and a second volume 118, respectively. In particular, the first compression device and the second compression device may be membrane bellows.

[0043] According to an embodiment, which can be combined with any other embodiment described herein, the first unit can include a first pressing device and the second unit can include a second pressing device, in particular a compressor and / or a forcer for reducing or compressing the first volume of the first unit and the second volume of the second unit, respectively. The pressing devices can be configured to push the material from the first volume and / or the second volume towards the evaporation arrangement. The first actuator and the second actuator can be connected to the first pressing device and the second pressing device, respectively, for controlling the speed or force of the first pressing device and the second pressing device.

[0044]

[0043] According to an embodiment, which can be combined with any other embodiment described herein, the first actuator and / or the second actuator can apply a counter force to the first unit, i.e. the first volume, and / or the second unit, i.e. the second volume, respectively. By providing a counter force, the first volume and / or the second volume can be expanded. In this way, (re)filling of the first unit and / or the second unit, or the first volume and / or the second volume, can be enabled. Also, by providing a counter force to the first unit and / or the second unit, i.e. the first volume and / or the second volume, the supply of material from the first unit and / or the second unit towards the evaporation arrangement can be stopped. Capillary forces in the lines, in particular in the conduit L, can move the liquefied material backward inside the conduit, i.e. towards the supply system, whereby the supply of material can be stopped instantly.

[0045] According to some embodiments (which may be combined with other embodiments described herein), a deposition apparatus is provided, as exemplarily shown in FIG. 3. The deposition apparatus 100 may include a supply system and an evaporation arrangement. The supply system may be provided in the first compartment 101. The supply system may be a supply system as described with respect to FIG. 2. For example, the deposition apparatus may include a tank 102 for providing a liquefied material, a first unit 112 having a variable first volume 116, and a second unit 114 having a variable second volume 118. The tank may be provided with the material to be liquefied via a filling inlet. The provision of the material to be liquefied may be regulated by a flow restrictor 105. The tank may also include a gas inlet 104 for creating an overpressure in the tank. The tank may be in fluid communication with the first unit via a first line. The first line may include a first operable flow restrictor 106. The tank may also be in fluid communication with the second unit via a second line. The second line may include a second operable flow restrictor 107. The liquefied material may be provided to the first unit and / or the second unit by establishing an overpressure in the tank 102 to force the liquid material to the first line and / or the second line. The first unit may include a first actuator 120 for varying the first volume 116. The first actuator 120 may include a motor 122. The second unit may include a second actuator 121 for varying the second volume 118. The second actuator 121 may include a motor 122. The first actuator 120 and / or the second actuator 121 may be configured to vary the first volume and / or the second volume, respectively. By varying the first volume and / or the second volume, the liquid material may be provided from the first unit and / or the second unit towards the evaporation arrangement 140. The deposition apparatus may include a conduit L for providing the liquid material to the evaporation arrangement. The first unit may be in fluid communication with the conduit L via a third line. The third line may include a third operable flow restrictor 108. The second unit may also be in fluid communication with the conduit L via a fourth line.The fourth line may include a fourth operable flow restrictor 109 .

[0046] According to an embodiment, which can be combined with any other embodiment described herein, the evaporation arrangement 140 may include a crucible 130 and an enclosure 142 in fluid communication with the crucible. The evaporation arrangement may be provided in a second compartment 141. The evaporation arrangement may be configured for flash evaporation. The enclosure, i.e. the distribution enclosure, may be a steam distribution pipe or a steam distribution showerhead. Steam may leave the enclosure through a number of nozzles 142 provided in or on the wall of the enclosure. In particular, the pressure in the enclosure is at least an order of magnitude greater than the pressure in a second chamber, e.g. a vacuum chamber, in which the evaporator is at least partially located.

[0047]

[0046] According to an embodiment that can be combined with any other embodiment described herein, liquefied or liquid material can be provided from a supply system, i.e. from the first unit and the second unit, towards the evaporation arrangement. The liquid material can be provided to a crucible 130 for evaporation. The crucible can be heated to a temperature that evaporates the liquid material. The crucible can be heated with an electric heater. For example, the crucible can be connected to a graphite heater. In this specification, the "evaporation temperature" can be understood as the temperature in the crucible upstream of the multiple nozzles where the raw material is evaporated. For example, when evaporating lithium, the evaporation temperature in the crucible can be set to a temperature above 600°C, for example from 750°C to 850°C.

[0048]

[0047] According to an embodiment, which can be combined with any other embodiment described herein, the evaporated material can be conducted from the crucible to a distribution enclosure, for example enclosure 142. From the distribution enclosure, the evaporated material can be conducted through a number of nozzles 144 onto or towards the substrate 10. For example, the substrate 10 can be a thin web or foil, in particular a thin web or foil of a roll-to-roll vacuum deposition apparatus. The substrate can be coated with the evaporated material. It should be understood that the evaporation arrangement can be any evaporation arrangement suitable for depositing a material on a substrate, in particular any evaporation arrangement suitable for depositing a metal, in particular an alkaline earth metal, on a substrate. It should further be understood that the evaporation arrangement can include a further heating arrangement for heating the evaporation arrangement during deposition, for example to avoid condensation of the material on the enclosure. Moreover, the supply system can be combined with any evaporation system or material deposition system.

[0049]

[0048] According to an embodiment that can be combined with any other embodiment described herein, the material provided to the substrate, i.e. the material liquefied and provided by the supply system, can be a metal, in particular lithium, a metal alloy, and other vaporizable materials, etc. According to yet another embodiment, in addition or alternatively, the material can include magnesium (Mg), ytterbium (YB) and lithium fluoride (LiF). According to an embodiment that can be combined with other embodiments described herein, the temperature of the evaporation arrangement, the crucible and / or the nozzle can be at least 600°C, or in particular between 600°C and 1000°C, or in particular between 600°C and 800°C. According to an embodiment that can be combined with other embodiments described herein, the temperature can have a deviation of ±10°C or less.

[0050]

[0049] According to an embodiment, which can be combined with any other embodiment described herein, for example, lithium can be deposited on a thin copper foil to produce an anode for a battery. Also, a layer comprising graphite and at least one of silicon and silicon oxide can be provided on a thin web or foil. The web or foil can further comprise or consist of a conductive layer that serves as a contact surface for the anode. The lithium deposited on the layer on the web can result in prelithiation of the layer comprising graphite and at least one of silicon and silicon oxide.

[0051]

[0050] Advantageously, by providing a supply system for providing liquid or liquefied material to the evaporation arrangement, a continuous supply of material for coating the substrate can be ensured and improved. The material supply, i.e. the flow of material provided to the evaporation arrangement, can be more precisely regulated so that a continuous evaporation of the material in the evaporation arrangement can be established. Furthermore, the resulting evaporation rate can be indirectly regulated in a precise manner. Furthermore advantageously, the evaporation process can be immediately stopped, for example for maintenance of the second compartment, for example for maintenance of the treatment chamber, by immediately stopping the supply of liquid material via the supply system. Thus, by mechanical compression, the evaporation rate can be precisely regulated.

[0052]

[0051] Furthermore, advantageously, by providing a liquid material, for example lithium, in the supply system, reactions of the material with other molecules (for example oxygen) in the evaporation arrangement can be avoided or prevented, especially when the material enters the evaporation arrangement. Thus, venting of the deposition apparatus, especially the venting of the second compartment, for example the venting of the processing chamber, can be facilitated and provided without the risk of negative side effects.

[0053] According to an embodiment that may be combined with any other embodiment described herein, there is provided a method 400 for providing a liquefied material, as exemplarily shown in Figure 4. The method includes liquefying a material in a tank (represented by box 450 in Figure 4). The material may be heated in the tank above a melting temperature to provide the liquefied material.

[0054] According to an embodiment that can be combined with any other embodiment described herein, the method further includes providing the liquefied material from the tank to a first unit having a variable first volume and to a second unit having a variable second volume (shown as box 460 in FIG. 4). The material can be provided through multiple lines. In particular, the material can be provided to the first unit through a first line and to the second unit through a second line. The material can be provided to the first variable volume and the second variable volume, respectively. The material can be provided to the first unit and the second unit simultaneously or sequentially. To provide the material to the first unit and the second unit, an overpressure can be created in the tank by placing an inert gas in the tank. For example, argon can be provided in the tank through a gas inlet. The overpressure can be controlled to control the amount of material provided from the tank to the first unit and the second unit. According to some embodiments, the tank can be continuously refilled with the material to be liquefied.

[0055] According to an embodiment that may be combined with any other embodiment described herein, the method further includes acting on the alterable first volume with a first actuator that provides a first force to transport the liquefied material from the first unit toward the evaporation arrangement (shown as box 470 in FIG. 4 ). The first force may be modified to control the flow rate of material from the first unit to the evaporation arrangement. For example, the first force may be larger to bring more material to the evaporation arrangement or smaller to bring less material to the evaporation arrangement.

[0056]

[0055] According to an embodiment that can be combined with any other embodiment described herein, the method further includes acting on the variable second volume with a second actuator (shown in box 480 in FIG. 4) that provides a third force that transports the liquefied material from the second unit toward the evaporation arrangement. The third force can be modified to control the flow rate of material from the first unit to the evaporation arrangement. The method further includes acting on the variable first volume with the first actuator that provides a second force that is smaller than the first force. For example, when providing the third force to the variable second volume, a second force that is smaller than the first force can be provided to the variable first volume. Thus, when starting to provide material from the second unit to the evaporation arrangement, the flow of material from the first unit toward the evaporation arrangement can be reduced, i.e., less material is provided from the first unit toward the evaporation arrangement, and then stopped.

[0057]

[0056] According to an embodiment that can be combined with any other embodiment described herein, the method further includes acting on the alterable second volume by a second actuator that provides a fourth force that is smaller than the third force (shown in box 490 in FIG. 4). Also, when providing the fourth force on the alterable second volume, a first force that is larger than the fourth force can be applied to the alterable first volume. Thus, when relatively less material is provided by the second unit, material can be provided from the first unit to the evaporation arrangement. The flow of material from the second unit towards the evaporation arrangement can be reduced, i.e., less material is provided from the second unit towards the evaporation arrangement and then stopped.

[0058]

[0057] According to an embodiment that can be combined with any other embodiment described herein, the first force and the second force can be adjusted by adjusting the first actuator. For example, the first force and the second force can be increased by increasing the speed of the first actuator, and the first force and the second force can be decreased by decreasing the speed of the first actuator. Similarly, the third force and the fourth force can be adjusted by adjusting the second actuator. For example, the third force and the fourth force can be increased by increasing the speed of the second actuator, and the third force and the fourth force can be decreased by decreasing the speed of the second actuator. Thus, the flow of material towards the evaporation arrangement can be precisely adjusted by controlling the first actuator and the second actuator, respectively.

[0059]

[0058] According to an embodiment that can be combined with any other embodiment described herein, the method may further comprise acting on the liquefied material in the tank with a gas, in particular an inert gas. Thus, the first unit and the second unit, i.e. the variable first volume and the variable second volume, may be refilled with the liquefied material in the tank. When material is provided by the second unit towards the evaporation arrangement, the first unit, i.e. the variable first volume, may be replenished, i.e. an overpressure in the tank may be provided and the material may be directed towards the first unit. Directing the material may comprise opening a first operable flow restricting device (e.g. a valve) for directing the liquefied material and allowing it to be placed in the first unit, i.e. the variable first volume. Similarly, when material is provided by the first unit towards the evaporation arrangement, the second unit, i.e. the variable second volume, may be replenished. An overpressure in the tank may be provided and the material may be directed towards the second unit. Directing the material may include opening a second operable flow restrictor (e.g., a valve) to allow the liquefied material to be directed and disposed within the second unit, i.e., the second volume.

[0060]

[0059] According to an embodiment that can be combined with any other embodiment described herein, the method can further include acting with a first negative force on the alterable first volume to transport the liquefied material from the tank to the first unit. Thus, the first alterable volume can be expanded and the liquefied material can be provided to the first unit, i.e., to the expanded alterable first volume. The first operable flow restrictor can be in an open state. Furthermore, the method can include acting with a second negative force on the alterable second volume to transport the liquefied material from the tank to the second unit. Thus, the second alterable volume can be expanded and the liquefied material can be provided to the second unit, i.e., to the expanded alterable second volume. The second operable flow restrictor can be in an open state.

[0061]

[0060] According to an embodiment that can be combined with any other embodiment described herein, the method may further comprise, when acting with a negative force on the variable first volume and / or the variable second volume, stopping the transport of the liquefied material from the first unit or the second unit towards the evaporation arrangement. In other words, the method may comprise acting with a first negative force on the variable first volume to stop the transport of material from the first unit towards the evaporation arrangement. The flow of material provided from the first unit towards the evaporation arrangement may be stopped. Furthermore, the method may comprise acting with a second negative force on the variable second volume to stop the transport of material from the second unit towards the evaporation arrangement. The flow of material provided by the second unit may be stopped. In this way, the material provision from the first unit and / or the second unit may be precisely regulated.

[0062]

[0061] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, the scope of which is determined by the following claims.

Claims

1. A vapor deposition apparatus, comprising: a tank for providing the liquefied material; a first unit having a variable first volume, the first unit including a first actuator and a first line in fluid communication with the tank; a second unit having a variable second volume, the second unit including a second actuator and a second line in fluid communication with the tank; and an evaporation arrangement in fluid communication with the first unit and the second unit; Equipped with the first actuator and the second actuator are configured to alternately apply forces to the alterable first volume and the alterable second volume to provide the liquefied material to the evaporation arrangement.

2. The deposition apparatus of claim 1 , further comprising a heating arrangement for providing heat to the material to obtain the liquefied material.

3. 3. The deposition apparatus of claim 1, wherein the first line comprises a first operable flow restriction device for regulating a first flow of the liquefied material toward the first unit, and the second line comprises a second operable flow restriction device for regulating a second flow of the liquefied material toward the second unit.

4. 4. The deposition apparatus of claim 1, wherein the tank comprises a gas inlet for providing a gas to the tank for providing the liquefied material to the first unit and the second unit.

5. 5. The deposition apparatus of claim 1, wherein the tank comprises a fill inlet for providing the material to the tank.

6. 6. The deposition apparatus according to claim 1 , wherein the first unit comprises a first compression device and the second unit comprises a second compression device, in particular the first compression device and the second compression device are membrane bellows.

7. 6. The deposition apparatus according to claim 1, wherein the first unit comprises a first pressing device and the second unit comprises a second pressing device, in particular a compressor and / or a forcer.

8. The deposition apparatus of claim 1 , wherein the first unit and the second unit are made of a corrosion-resistant material.

9. 9. The deposition apparatus according to any one of claims 3 to 8, wherein the first and second operable flow restriction devices can be valves, in particular ball valves or freeze valves.

10. 10. The deposition apparatus of claim 1, wherein the material is a metal selected from the group consisting of alkali metals or alkaline earth metals.

11. 1. A supply system for providing a liquefied material to an evaporation arrangement, the supply system comprising: a first unit having a variable first volume and including a first actuator; a second unit having a variable second volume and including a second actuator; Equipped with a supply system, the first actuator and the second actuator configured to alternately apply forces to the first unit and the second unit to alternately vary the first volume and the second volume to provide the liquefied material to the evaporation arrangement.

12. 12. The feed system according to claim 11, wherein the first actuator and the second actuator are linear motors, in particular motors driving spindle gears, crankshafts and / or rack and pinion drives.

13. 1. A method for delivering a liquefied material, the method comprising: Liquefying the material in the tank; providing liquefied material from said tank to a first unit having a variable first volume and to a second unit having a variable second volume; acting on the alterable first volume with a first actuator providing a first force that transports the liquefied material from the first unit towards an evaporation arrangement; acting on the alterable second volume with a second actuator providing a third force that transports the liquefied material from the second unit towards the evaporation arrangement, and acting on the alterable first volume with the first actuator providing a second force that is less than the first force; and acting on the alterable second volume with the second actuator providing a fourth force less than the third force; A method comprising:

14. 14. The method of claim 13, further comprising exerting a first negative force on the alterable first volume to stop transport of material from the first unit towards the evaporation arrangement.

15. 15. The method of claim 13 or 14, further comprising acting with a second negative force on the alterable second volume to stop transport of material from the second unit towards the evaporation arrangement.

16. 16. The method according to any one of claims 13 to 15, wherein providing the liquefied material to the first unit and the second unit comprises acting on the liquefied material in the tank with a gas, in particular an inert gas.

17. 17. A method according to any one of claims 13 to 16, wherein the tank is continuously refilled with the material to be liquefied.

18. A method for providing a liquefied material to an evaporation arrangement, the method comprising: providing the liquefied material in a tank, the tank in fluid communication with a first unit and a second unit, the first unit including a variable first volume and a first actuator, and the second unit including a variable second volume and a second actuator; providing an alternating force to the alterable first volume and the alterable second volume by the first actuator and the second actuator, wherein the liquefied material is provided alternately from the first unit to the evaporation arrangement and from the second unit to the evaporation arrangement. The method includes:

19. A method for providing a liquefied material to an evaporation arrangement, the method comprising: providing a force alternately to a first unit of a supply system and a second unit of the supply system and alternating a first volume of the first unit and a second volume of the second unit, wherein the liquefied material is provided alternately from the first unit to the evaporation arrangement and from the second unit to the evaporation arrangement. A method comprising:

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