Compact Intelligent Aerosol and Fluid Manifolds

Abstract

A manifold system and method for collecting samples, the manifold system comprising multiple input sample ports and a preferably rotatable flow focusing element. The manifold system can sample aerosols and gases from multiple sample points, such as clean rooms and manufacturing environments, for collection and analysis. The flow focusing element reduces cross-talk and cross-contamination of particles, including nanoparticles, between different samples.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001]

[0001] This application claims the benefit of priority to U.S. Provisional Patent Application No. 63 / 210,776, filed June 15, 2021, which is incorporated by reference in its entirety herein. BACKGROUND OF THEINVENTION

[0002]

[0002] The present invention is generally in the field of aerosol and gas sampling, collection, and analysis, including collecting samples for detecting particles and other contaminants within clean rooms and manufacturing environments.

[0003] Monitoring gas and fluid streams for the presence of particles (especially those having a size range of 0.1 μm to 5 μm) and ultrafine particles (particles smaller than 0.1 μm) is of great importance in various industries such as pharmaceutical and semiconductor manufacturing, as the presence of particles in the environment can adversely affect manufacturing processes and violate regulatory requirements. As a result, clean rooms and clean zones are commonly used in semiconductor and pharmaceutical manufacturing facilities. In the semiconductor industry, increased airborne particulate concentrations can result in reduced manufacturing efficiency, as particles that deposit on semiconductor wafers can affect or interfere with small-scale manufacturing processes. In the pharmaceutical industry, contamination with airborne particulates and biological contaminants can pose a risk that pharmaceutical products will not meet standards established by the U.S. Food and Drug Administration (FDA) and other foreign and international health regulatory authorities.

[0004]

[0004] Standards for classification of cleanroom particle levels, as well as testing and monitoring to ensure compliance, are provided by ISO 14664-1 and 14664 2. Similarly, ISO 14698-1 and 14698-2 provide standards for the evaluation of cleanroom and cleanzone environments for biological contaminants. To meet these and other standards, particle counters are commonly used to determine airborne particle contamination levels in cleanrooms and cleanzones. Often, particle counters with multiple input ports are used to collect samples from multiple areas in the environment, or even from multiple cleanrooms and cleanzones. However, the collection paths from each collection site must be kept sufficiently isolated from each other to prevent crosstalk of collected particles and cross-contamination of samples. Often, such systems cannot prevent cross-contamination of nanoparticles and / or require the sampling system to significantly change the flow rate of the air or gas being sampled. Furthermore, conventional manifold systems cannot rapidly sample multiple different sample points while preventing crosstalk and cross-contamination.

[0005] For example, sampling nanoparticles in a manifold system presents problems in that the movement of particles from one airflow path to another is a function of diffusion, which is often difficult to control. This diffusion can result in cross-contamination between different manifold paths and prevent accurate sampling of intended particles captured in the sample airflow of interest.

[0006]

[0006] Currently, there are no aerosol manifolds in the art that allow for effective transport and sampling of nanoparticles. Conventional aerosol manifolds are designed for transport and sampling of particles 100 nm and larger, and minimize crosstalk between different sampling ports by utilizing fractional flow sipper tubes that minimize crosstalk due to particle momentum, but do little to eliminate the Brownian motion of nanoparticles.

[0007]

[0007] Current market leading aerosol manifolds that are not designed for sampling nanoparticles are commercially available with crosstalk rates of 0.01% for particles over 100 nm. However, internal testing has shown that these current market leading aerosol manifolds are often orders of magnitude worse than their advertised crosstalk rates and may not be able to live up to their touted crosstalk rates. Crosstalk performance for nanoparticles less than 100 nm in such systems is even worse because these systems are not designed for these smaller particles.

[0008]

[0008] Therefore, there is a need for an improved manifold system that can collect aerosol and gas samples from multiple sample points and reduce cross-talk and cross-contamination between different samples. Summary of the Invention

[0009] The present invention provides a multi-point sampling manifold and method for collecting samples. The manifold can sample aerosols, air, and other gases from multiple points within a sampling area and transport the sampled aerosols, air, or gases to a particle counter or other type of analytical device or to a storage container. The sampling manifold of the present invention is particularly useful for sampling air and gases for the detection, collection, and analysis of particles, including biological particles and particles having particle sizes less than 10 nm and larger, and for the detection and analysis of individual component gases within the sampled air and gases.

[0010]

[0010] In one embodiment, the present invention provides a sampling manifold comprising: a) two or more input sampling ports; b) a sealed bulk flow section connected to the two or more input sampling ports, where gas flowing through the two or more input sampling ports enters the sealed bulk flow section; c) a flow focusing element inside the sealed bulk flow section, where the flow focusing element has a plurality of flow ports, the flow ports being in fluid communication with the input sampling ports; and d) a sample line in fluid communication with a selected flow port from the plurality of flow ports and one or more exit ports in fluid communication with one or more flow ports other than the selected flow port.

[0011]

[0011] In this embodiment, the flow focusing element comprises a sample flow path between a selected input sampling port in fluid communication with the selected flow port and the sample line. The sample path may comprise a monolithic structure or a separate assembly. The flow focusing element further comprises one or more bulk flow paths between an input sampling port other than the selected input sampling port and one or more outlets. The flow focusing element is configured to direct gas flowing through the selected input sampling port to flow into the selected flow port and into the sample line, and to direct gas flowing through an input sampling port other than the selected input sampling port to flow into one or more flow ports other than the selected flow port and into one or more outlets. Optionally, each of the flow ports is in fluid communication with one of the input sampling ports.

[0012]

[0012] In one embodiment, the sample line is reversibly aligned to a selected flow port of the flow focusing element and can be repositioned during operation to be aligned to a new selected flow port. Thus, by repositioning the sample line to be aligned to a new flow port, a new input sample port can be sampled. Alternatively, the sample line is aligned to the same flow port of the flow focusing element and the flow focusing element is repositioned during operation such that the selected flow port and the sample line are aligned to a new input sample port. Thus, by repositioning the flow focusing element, such as by rotating the flow focusing element, a new input sample port can be sampled.

[0013]

[0013] The flow focusing elements and sample lines are preferably positioned and moved using rotation, linear translation, or by sweeping the flow focusing elements or sample lines back and forth along an arc. As used herein, rotating an object includes rotating the object completely around an axis (360°) and partially around an axis (0°-270°, 0°-180°, 0°-90°, and 0°-45°, etc.). The object may be rotated continuously in the same direction or in alternating directions. For example, in one embodiment, the flow focusing elements may be rotated continuously in the same direction (e.g., clockwise or counterclockwise) during operation such that each input sample port is sampled multiple times in sequence, or the flow focusing elements may be rotated partially around an axis in one direction and then rotated in the opposite direction.

[0014]

[0014] The flow focusing element can be any shape, including but not limited to rectangular, triangular, polygonal, circular, irregular, and elliptical. In one embodiment, the flow focusing element is generally circular or elliptical and is referred to as a flow focusing disk. The selectable flow ports can be arranged in any configuration within the flow focusing element, including but not limited to lines, grids, or tracks, such as circular, rectangular, or elliptical tracks, within the flow focusing element.

[0015] In one embodiment, the flow focusing element is rotatable and the plurality of selectable ports comprises a sample outlet port and one or more bulk flow distribution ports. The flow focusing element rotates to align the sample outlet port (i.e., the selected flow port) with a desired input sampling port to be sampled. The sample flow path is between the selected input sampling port, the sample outlet port, and the sample line, and the one or more bulk flow paths are between an input sampling port other than the selected input sampling port and the one or more bulk flow distribution ports.

[0016] Alternatively, the flow focusing element is not rotated. Instead, the sample line is movable relative to the flow focusing element and can be aligned with any flow port. Aligning the sample line with a selected flow port allows the corresponding input sampling port to be sampled, and moving the sampling line to a newly selected flow port allows a different input sampling port to be sampled. The sample line can be positioned relative to the flow focusing element using an actuator, as known in the art.

[0017]

[0017] In one embodiment, the present invention provides a sampling manifold comprising: a) two or more input sampling ports; b) a sealed bulk flow section connected to the two or more input sampling ports, where gas flowing through the two or more input sampling ports enters the sealed bulk flow section; c) a rotatable flow focusing disk inside the sealed bulk flow section, where the flow focusing disk comprises a sample outlet port and one or more bulk flow distribution ports, and where the flow focusing disk can be rotated within the sealed bulk flow section so that the sample outlet port is aligned with an input sampling port selected from the two or more input sampling ports; and d) a sample line in fluid communication with the sample outlet port.

[0018] In this embodiment, the flow focusing disk forms a sample flow path between a selected input sampling port and a sample outlet port, and forms one or more bulk flow paths between input sampling ports other than the selected input sampling port and one or more bulk flow distribution ports. The sample path may comprise a monolithic structure or a separate assembly. Gas flowing through the selected input sampling port enters the sample outlet port and the sample line, and gas flowing through input sampling ports other than the selected input sampling port enters one or more bulk flow distribution ports and an outlet. Gas may be pushed or drawn through the manifold using means known in the art, including but not limited to pumps and vacuum lines. The sample line is preferably in fluid communication with a particle counter, a condensation particle counter, a gas analyzer, a particle analyzer, a molecular sampler, a microorganism collection plate, an environmental or gas sensor, or a similar component, and the outlet is optionally a house vacuum line or other vacuum source.

[0019] In the above embodiments, the transport of gas into one or more bulk flow distribution ports, into the aligned sample outlet port, through one or more bulk flow paths, through the sample flow path, or combinations thereof, comprises laminar flow. The resulting laminar flow is believed to reduce the probability of crosstalk between different gas paths, resulting in a more efficient sampling process.

[0020]

[0020] The flow focusing element in the embodiments described herein optionally comprises a plurality of channels forming a sample flow path and one or more bulk flow paths, the dimensions of the plurality of channels being configured to direct gas from non-sampled ports away from the sample flow path. In one embodiment, the plurality of channels includes concentric channels surrounding the flow port, the sample outlet port, and the bulk flow distribution port. Preferably, the plurality of channels generate a laminar flow of gas through the flow focusing element. For example, the diameter of the channel forming the one or more bulk flow paths is large enough to generate a laminar flow of gas between the input sampling port and the one or more bulk flow distribution ports. Similarly, the diameter of another channel forming the sample flow path is large enough to generate a laminar flow of gas between a selected input sampling port and the sample outlet port. In one embodiment, the channel comprises walls or surfaces extending in a longitudinal direction, the longitudinal direction being generally defined as the direction extending from the front end of the manifold (where the input sample port is located) toward the rear end of the manifold. Without wishing to be bound by theory, it is believed that the longitudinal walls and surfaces can increase the amount of laminar flow through the channels.

[0021] In one embodiment, the median diffusion transport path length between the selected input sampling port and the adjacent input sampling port is greater than the mean free travel path of nano-sized particles in the gas, the nano-sized particles having diameters less than 100 nm, less than 50 nm, less than 20 nm, or less than 10 nm. In certain scenarios, the path length difference is believed to reduce the probability of crosstalk between different gas paths. Preferably, the median diffusion transport path length between the selected input sampling port and the adjacent input sampling port is at least 10 times greater than the mean free travel path of any nano-sized particle in the gas.

[0022]

[0022] In the embodiments described herein, preferably the gas flow between the sample flow path and one or more bulk flow paths within the flow focusing element has a crosstalk ratio of less than 0.01%, a crosstalk ratio of less than 0.001%, or a crosstalk ratio of less than 0.0001%.

[0023]

[0023] The gas flow through the sample flow path and one or more bulk flow paths is typically about 0.0035 cubic feet per minute (about 0.1 liters per minute) to 10.59 cubic feet per minute (about 300 liters per minute), preferably about 0.035 cubic feet per minute (about 1.0 liters per minute) to 3.5 cubic feet per minute (about 100 liters per minute), and the bulk flow is typically 1.0 times or more the sample flow, 1.2 times or more the sample flow, 1.5 times or more the sample flow, or 2.0 times or more the sample flow. In one embodiment, the bulk flow is 1.5 to 3.0 times the sample flow. Preferably, the gas flow through the sample flow path is less than about 1.0 cubic feet per minute (about 2.83 liters per minute), or about 0.1 cubic feet per minute to 1.0 cubic feet per minute (about 2.83 liters per minute to 28.3 liters per minute). Gas flow through the one or more bulk flow paths is preferably between about 0.0035 cubic feet / minute and 10.59 cubic feet / minute (about 0.1 liters / minute and 300 liters / minute).

[0024]

[0024] The manifold may have multiple input sampling ports, such as through a front manifold plate, that are selected to be in fluid communication with a sample outlet port (i.e., sample flow path) and unselected input sampling ports are in fluid communication with one or more bulk flow distribution ports (i.e., one or more bulk flow paths). For example, the manifold may have 2 or more, 3 or more, 4 or more, 5 or more, 6 or more, 7 or more, 8 or more, 9 or more, 10 or more, 12 or more, 15 or more, 18 or more, 20 or more, 25 or more, 30 or more, 35 or more, 40 or more, 45 or more, 50 or more, 55 or more, 60 or more, 65 or more, 75 or more, 85 or more, or 100 or more input sampling ports. In one embodiment, the manifold includes up to 64 sample input ports. In one embodiment, there is only one sample outlet port and the remaining input sampling ports are in fluid communication with the bulk flow distribution port, while in alternative embodiments the sampling manifold includes multiple sample outlet ports in fluid communication with selected input sampling ports.

[0025]

[0025] In one embodiment, the manifold has four or more input sampling ports and the flow focusing element has a sample outlet port and three or more bulk flow distribution ports, or the manifold has six or more input sampling ports and the flow focusing element has a sample outlet port and five or more bulk flow distribution ports, or the manifold has ten or more input sampling ports and the flow focusing element has a sample outlet port and nine or more bulk flow distribution ports, or the manifold has twenty or more input sampling ports and the flow focusing element has a sample outlet port and nineteen or more bulk flow distribution ports, or the manifold has forty or more input sampling ports and the flow focusing element has a sample outlet port and thirty-nine or more bulk flow distribution ports, or the manifold has sixty or more input sampling ports and the flow focusing element has a sample outlet port and fifty-nine or more bulk flow distribution ports.

[0026]

[0026] The input sampling ports are preferably positioned evenly through the flow focusing element, such as, but not essentially, along the circumference of the flow focusing element. The sample outlet ports and bulk flow distribution ports can be of any shape that can efficiently transport gas. The sample outlet ports and bulk flow distribution ports can be of any shape that can allow flow through the ports, including, but not limited to, circular, elliptical, and honeycomb shapes.

[0027] In one embodiment, each input sampling port is in fluid communication with a different sample point within the sampled environment. Examples of different sample points include, but are not limited to, different clean rooms, different regions or areas within a room or clean zone, different assembly or processing points within a pharmaceutical or semiconductor manufacturing facility, and different areas within a potentially contaminated environment.

[0028]

[0028] Preferably, the sampling manifold is capable of simultaneously taking in gas through each of the input sampling ports. Gas sampled through a selected input sampling port will be transported to a sample outlet port and then to a sample line connected to a container, particle counter, sampler, or analyzer, while gas sampled through an unselected input sampling port will be transported through one or more bulk flow distribution ports into an outlet. The flow focusing element can be rotated to align the sample outlet port with a newly selected input sampling port in order to select and transport a sample from a different sampling port.

[0029]

[0029] The sampling manifold optionally includes one or more environmental or gas sensors that can sense and / or monitor one or more characteristics of the gas being sampled or transported through the sampling manifold. Such environmental and gas sensors can be positioned at locations including, but not limited to, points in the environment where the gas is being sampled, outside the manifold, the input sample port, the sample flow path, the bulk flow path, the sample line, and components in fluid communication with the sample line. In one embodiment, the sampling manifold can monitor and / or sense the pressure, flow rate, temperature, humidity, or combinations thereof of the gas being sampled and transported through different portions of the manifold. For example, the sampling manifold can sense and monitor the pressure and / or flow rate of the gas being transported through different portions of the sample flow path and the bulk flow path to ensure proper gas flow through the entire system and through the different input sample ports. If gas flow is not detected at one or more locations, or if the measured pressure or gas flow is below a desired level, the manifold can be controlled to draw in a greater amount of gas, such as by increasing the amount of vacuum suction. Sensors for detecting and monitoring gas flow and pressure suitable for use in sampling manifolds and particle counters are known in the art, including but not limited to U.S. Patent No. 8,800,383 (Thomas Bates). Alternatively, or in addition, the sampling manifold may determine and monitor the temperature and humidity of the gas in the environment being sampled, as well as the gas being transported through different portions of the sample and bulk flow paths. Temperature / relative humidity (TRH) sensors suitable for use in sampling manifolds and particle counters are also known in the art.

[0030] A controller may be used to rotate the flow focusing element to align the sample outlet port with one or more selected input sampling ports, or to operate the actuator to align the sample line with one or more selected flow ports according to an operator input or a predetermined sequence. As used herein, a controller includes a hardware device, software program, or combination thereof that can move or operate components of the device. For example, the controller can rotate the flow focusing element to align the sample outlet port with each of the input sampling ports, or if the flow focusing element does not rotate, can align the sample line with the selected flow port at a predetermined period, frequency, or combination thereof. The period and frequency at which each input sample port is sampled may be fixed or variable.

[0031] Each of the input sampling ports may be sampled in sequential order by successive rotations of the flow focusing element or by successive movements of the actuator. Alternatively, the input sampling ports may be sampled in different patterns, in random order, or in a manner that preferentially samples some input sampling ports over others. For example, if a sample from a particular input sample port indicates a higher risk of particulates being present, that input sample port may be sampled more frequently. In one embodiment, the sample outlet port or sample line is aligned with one or more of the input sampling ports with a higher frequency or for a longer period than the other input sampling ports.

[0032]

[0032] The controller can rotate the flow focusing elements or control the actuators to sample the desired input sampling ports according to a predetermined scan pattern stored, such as on a computer processor, flash memory, or computer memory. In certain configurations, the computer processor or computer memory is part of the manifold, preferably a part of the manifold that is not the docking station. In certain configurations, the flash memory used to control or partially operate the manifold and flow focusing elements is located in a removable docking station.

[0033] Optionally, the selected input sampling port is determined by a controller, a user, or a combination thereof in a programmed response to an external event. The controller may rotate the flow focusing elements or operate the actuators to sample the input sampling ports according to a first scan pattern, but upon receiving an event signal from an external source, such as data, an electrical signal, or a computer signal from a particle counter, a sampler, an analyzer, a sensor, a user interface, a mechanical switch, a dry contact switch, or another electrical switch, may change the rotation of the flow focusing elements to align the sample outlet port with the input sampling port according to a new scan pattern.

[0034] One or more electrical or optical indicators may be used to indicate which input sampling port is being sampled, or by indicating the position of the sample outlet port relative to one or more input sampling ports. Suitable electrical or optical indicators include, but are not limited to, lights positioned on the flow focusing element or outside the manifold that can display color, blinking frequency, or a combination of both.

[0035] In one embodiment, the sampling manifold further comprises a hollow shaft motor with a housing, the hollow shaft motor capable of rotating the flow focusing element within the enclosed bulk flow section, the sample line optionally being partially contained within the housing of the hollow shaft motor.

[0036]

[0036] In one embodiment, the present invention provides a method for sampling gas, comprising: a) taking in gas into a manifold, the manifold having two or more input sampling ports, a flow focusing element, and a sample outlet port positioned on the flow focusing element and connected to a sample line; b) rotating the flow focusing element to align the sample outlet port with a selected input sampling port; and c) transporting the gas through the selected input sampling port into the aligned sample outlet port and into the sample line.

[0037]

[0037] In one embodiment, the present invention provides a method for sampling gas comprising: a) taking in gas into a manifold, the manifold comprising two or more input sampling ports, a flow focusing element, a plurality of flow ports positioned on the flow focusing element, and a sample line capable of being aligned with each of the plurality of flow ports; b) controllably moving the sample line to align the sample line with a selected flow port; and c) transporting gas through the selected input sampling port into the aligned flow port and into the sample line.

[0038] The method further includes transporting gas through input sampling ports other than the selected input sampling port into one or more unsampled ports on the flow focusing element and into an exit port. In one embodiment, the method includes simultaneously drawing gas through each of the input sampling ports.

[0039]

[0039] Preferably, gas is transported into the aligned sample outlet port, sample line, and / or unsampled port using laminar flow. Gas flow between the sample flow path (i.e., into the aligned sample outlet port or selected flow port) and one or more bulk flow paths (i.e., to one or more unsampled ports) in the flow focusing element preferably has a crosstalk rate of less than 0.01%, a crosstalk rate of less than 0.001%, or a crosstalk rate of less than 0.0001%.

[0040] In a further embodiment, the method further includes rotating the flow-focusing element to align the sample outlet port with one or more selected input sampling ports according to an operator input or a predetermined sequence. In one embodiment, the method includes aligning the sample outlet port with each of the input sampling ports at a predetermined time period, frequency, or combination thereof, such as sampling each input sampling port at least once per second and / or sampling each of the input sampling ports in sequential order. Optionally, the sample outlet port is aligned with one or more of the input sampling ports more frequently or for a longer time period than the other input sampling ports.

[0041] Alternatively, the method further includes operating the actuator to align the sample line with one or more selected flow ports according to operator input or a predetermined sequence. In one embodiment, the method includes aligning the sample line with each of the selected flow ports at a predetermined time period, frequency, or combination thereof, such as sampling each selected flow port, and thus the corresponding input sampling port, at least once every second, and / or sampling each of the input sampling ports in sequential order. Optionally, the sample line is aligned with one or more of the selected flow ports more frequently or for a longer time period than the other flow ports.

[0042]

[0042] The above method optionally further includes receiving an event signal from an external source and modifying the rotation of the flow focusing elements (or modifying the operation of the actuators) to align the sample outlet port with the input sampling port (or align the sample line with the selected flow port) according to the new scan pattern. The external sources include, but are not limited to, particle counters, samplers, analyzers, sensors, user interfaces, mechanical switches, and dry contact switches or other electrical switches. In one embodiment, the scan pattern is stored on a computer processor, computer memory, or flash memory. In a particular configuration, the computer processor or computer memory is part of the manifold, preferably a part of the manifold that is not the docking station. In a particular configuration, the flash memory used to control or partially operate the manifold and the flow focusing elements is located on the docking station.

[0043] In one embodiment, the manifold further comprises a removable docking station with connections capable of operating the sampling manifold, the connections including one or more of a vacuum connection, a power connection, a data connection, an analog input / output connection, a digital input / output connection, an Ethernet switch connection, a wireless communication connection, or any combination thereof. Optionally, the docking station further comprises an Internet Protocol address and an Internet connection.

[0044]

[0044] The manifolds and methods of using the manifolds described herein are used to sample aerosols, air, and other gases for detection, collection, and analysis of contaminants and other molecules, including particles having particle sizes less than 10 nm and larger, as well as detection and analysis of individual component gases in the sampled aerosol, air, or gas. For example, the collected sample may be sent to a particle counter, such as a condensation particle counter, to detect the level of particles in the collected sample. Alternatively, the collected sample may be sent to an analyzer that can detect the presence of organic molecules or identify the presence of one or more specific gas components. [Brief description of the drawings]

[0045] [Figure 1] 1 illustrates a manifold system with a docking station attached in one embodiment of the present invention. [Diagram 2] FIG. 2 shows a front view of a flow focusing element in one embodiment having a sample outlet port, a bulk flow distribution port, and a flow channel, where the flow focusing element is in the form of a flow focusing disk. [Diagram 3] FIG. 2 shows a side view of a flow focusing element in one embodiment, including a sample outlet port connected to a sample line. [Figure 4] FIG. 1 illustrates a cross-sectional view of one embodiment of the present invention in which flow focusing elements and sampling lines are shown in relation to a hollow shaft motor. [Diagram 5]FIG. 1 illustrates another cross-sectional view of an embodiment of the present invention in which flow focusing elements and sampling lines are shown in relation to a hollow shaft motor. [Figure 6] FIG. 13 illustrates yet another cross-sectional view of an embodiment of the present invention in which flow focusing elements and sampling lines are shown in relation to a hollow shaft motor. [Figure 7] 1 shows a front view and a cross-sectional view of the back plate of the manifold illustrating the connection between the sample lines and the inlets leading to a particle counter, sampler, or analyzer. [Figure 8] 1 illustrates an alternative configuration of a flow focusing element in an embodiment of the present invention in which the flow focusing element is not rotated. Selectable ports in the flow focusing element are in fluid communication with an inlet sampling port. Gas is simultaneously drawn into each of the selectable ports through the inlet sampling port, and a sample line is aligned with the desired port to be sampled using an actuator. [Figure 9] Shown is a block diagram (top) of a controller in one embodiment of the invention that receives signals from an external source, such as a particle counter or other type of sampler or analyzer, and modifies the rotation of the flow focusing elements in response to those signals, and a flow diagram (bottom) illustrating the steps of the controller switching to a new sampling mode in response to the received signals. Detailed Description of the Invention

[0046]

[0052] definition

[0047]

[0053] Generally, the terms and phrases used herein have their art-recognized meanings, which can be found by reference to standard texts, journals, and contexts known to those of skill in the art. The following definitions are provided to clarify their specific use in the context of the present invention.

[0048]

[0054] As used herein, "laminar flow" refers to a flow of a fluid (gas or liquid) in which the fluid travels in a smooth or regular path, as opposed to a turbulent flow in which the fluid is subject to random fluctuations and mixing. In laminar flow, the velocity, pressure, and other flow characteristics at each point in the fluid remain substantially constant.

[0049]

[0055] "Fluid communication" refers to a connection or pathway through which a fluid (gas or liquid) can pass from one component to another.

[0050]

[0056] The term "constituent gas" refers to one or more gases in a gas or aerosol mixture.

[0051]

[0057] The term "particle" or "particles" refers to small objects that are often considered contaminants. A particle can be, but need not be, any material that is generated by the action of friction, for example, when two surfaces are in mechanical contact and there is mechanical movement. A particle can be a single component or can be composed of an aggregate of materials such as dust, dirt, smoke, ash, water, soot, metals, oxides, ceramics, minerals, or any combination of these or other materials or contaminants. "Particle" or "particles" can also refer to biological particles, such as viruses, spores, or microorganisms, including bacteria, fungi, archaea, protists, or other single-celled microorganisms. In some embodiments, for example, biological particles are characterized by a size dimension (e.g., effective diameter) of 1 nm or more, preferably less than 100 nm, less than 50 nm, less than 20 nm, less than 10 nm, less than 7 nm, less than 5 nm, or less than 3 nm. A particle may refer to a small object that absorbs, emits, or scatters light and is therefore detectable by a particle counter or optical particle counter. As used herein, "particle" or "particles" is intended to exclude individual atoms or molecules of a carrier fluid or sample medium, such as water, air, process liquid chemicals, process gases, nitrogen, oxygen, carbon dioxide, etc. In some embodiments, the particles may be initially present on a surface, such as a tool surface in a microfabrication facility or a product surface in a pharmaceutical manufacturing facility, liberated from the surface, and then analyzed in the fluid.

[0052]

[0058] When numerical values, such as 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, are disclosed herein, any of the aforementioned numbers may be used alone to describe a single point or an open-ended range, or may be used in combination to describe multiple single points or closed-ended ranges. This statement means that each of the aforementioned numbers may be used alone (e.g., 4), may be prefaced with the word "about" (e.g., about 8), may be prefaced with the phrase "at least about" (e.g., at least about 2), may be prefaced with the phrase "at least" (e.g., at least 10), may be prefaced with the phrase "less than" (e.g., less than 1), may be prefaced with the phrase "about to less than" (e.g., less than about 7), or may be used in any combination or combination with any prepositional word or phrase to define a range (e.g., 2 to 9, about 1 to 4, at least 3, 8 to about 9, 8 to less than 10, and about 1 to about 10, etc.). Furthermore, when a range is described as "about X or less", this phrase is the same as the range that is the combination of "about X" and "less than about X" in the alternative form. For example, "about 10 or less" is the same as "about 10 or less than about 10". Such interchangeable range descriptions are contemplated herein. Although other range formats may be disclosed herein, the difference in format should not be interpreted as implying that there is a substantial difference.

[0053]

[0059] As used herein, the terms "approximately" and "about" mean that slight variations from the stated value may be used to achieve substantially the same results as the stated value. In situations where this definition cannot be applied or is very difficult to apply, the term "about" means a 10% deviation (plus or minus) from the stated value.

[0054]

[0060] overview

[0055]

[0061] In the following description, numerous details of devices, device components, and methods in specific embodiments of the invention are set forth in order to provide a thorough explanation of the precise nature of the invention. However, it will be apparent to one skilled in the art that the invention may be practiced without these specific details.

[0056]

[0062] Aspects of the invention described in the following examples provide a compact intelligent manifold that combines elements of a sample stream flow, bulk flow, flow focusing elements, and sampling intelligence. In these examples, the sample flow is air or gas taken from a single sample point and transported through a flow focusing element to ultimately a container, particle counter, sampler, or analyzer. The bulk flow is air or gas taken simultaneously with the sample flow but from other sample points, i.e., sample points not intended to be counted or analyzed at that particular time, and is transported through the flow focusing element without mixing with the sample flow. The flow focusing element can be controlled to select different sample points, allowing for continuous or near continuous sampling of multiple points within a desired sampling area while limiting crosstalk or cross contamination between samples from different sample points. Programmed sampling intelligence is optionally used to control the position of the flow focusing element or sample line relative to the flow focusing element to sample air or gas from sample points of interest according to a desired pattern or sequence.

[0057]

[0063] Sampling at low flow rates in manifold systems is difficult due to the less laminar nature of the flow streams in the manifold to prevent crosstalk between different ports. The flow focusing elements utilized in the present invention minimize diffusive transport between multiple ports and focus the bulk flow of the system to prevent crosstalk of large particles.

[0058]

[0064] The flow focusing features enhance separation of the flow paths, thereby reducing potential crosstalk between ports that can cause data integrity issues due to false positives or false negatives. Tests performed with the flow focusing element design have demonstrated crosstalk performance of less than 0.01%, less than 0.001%, less than 0.0001%, and even less than 0.00001% for sampling nanoparticle sizes and larger, including particles over 100 nm in size. example

[0059]

[0065] Aspects of the present invention can be further understood by the following non-limiting examples and figures.

[0060]

[0066] Example 1 - Manifold System Components and Flow Paths

[0061]

[0067] As shown in Figure 1, the manifold 1 comprises a front manifold plate 2 having a number of input sampling ports 3, and a back plate 18 having a number of bulk flow outlets 15. The number of input sampling ports 3 may vary depending on the design and intended application of the particular device. The front manifold plate 2 is connected to an enclosed bulk flow section 4 that houses a flow focusing element 5. Sample lines 8 exit the flow focusing element 5 and may be integrated into the housing 13 of the hollow shaft motor 12 (see also Figure 3).

[0062]

[0068] A removable docking station 16 may be attached that houses electrical, mechanical, and data connections 17 that can provide easier installation and operation of the manifold system.

[0063]

[0069] In one embodiment of the present invention, the flow focusing element 5 (see Figures 2 and 3) is rotatable and includes a sample outlet port 6 connected to a sample line 8, and also includes a number of bulk flow distribution ports 7. A series of channels 9 in the flow focusing element 5 form sample and bulk flow paths between the input sampling port 3 and the sample outlet port 6 and bulk flow distribution ports 7. The channels 9 may also be utilized to reduce the pressure drop of the gas as it travels through the flow focusing element 5. Although shown as a circular disk in Figures 2 and 3, the flow focusing element of this embodiment may be any shape that is rotatable, including but not limited to rectangular, triangular, polygonal, circular, and elliptical.

[0064]

[0070] In an alternative embodiment, as shown in FIG. 8, the flow focusing element 5 is not rotated and accommodates multiple selectable flow ports 14. The flow focusing element 5 similarly forms a series of flow paths between the selectable flow ports 14 and the inlet sampling port 3. Gas is drawn through each of the selectable flow ports 14 simultaneously, and actuators are used to align the sample line 8 to the desired selectable flow port 14 to be sampled. The flow focusing element 5 may be any shape, including but not limited to rectangular, triangular, polygonal, circular, and elliptical, and the selectable flow ports 14 may be arranged in any configuration within the flow focusing element 5. For example, the selectable flow ports 14 may be arranged along a strip where a linear actuator is used to align the sample line 8 to the desired flow port. In other examples, the selectable flow ports 14 may be arranged along a track or in a grid system (see FIG. 8). The sample line 8 may be aligned to the selectable flow ports 14 in a sequential or non-sequential order.

[0065]

[0071] In both of the above embodiments, the sample flow gas travels through a sample tube into a connected input sampled port 3 on the front manifold plate 2. The sample gas enters an enclosed bulk flow section 4 and is focused by flow focusing element 5 into sample line 8 through sample outlet port 6 or a desired selectable port 14 while non-sample gas is forced out of sample line 8. Sample line 8 carries the sample to a particle counter (not shown).

[0066]

[0072] The bulk flow gas proceeds through the sample tubes of the other input sampled ports 3 on the front plate 2 of the manifold. The bulk flow gas enters the enclosed bulk flow section 4 and is forced out the sample exit port 6 or the desired selectable port 14 and sample line 8 by laminarization of the bulk flow through flow focusing element 5. Upon passing through the flow focusing element 5, the bulk flow gas is split between the bulk flow exit ports on the rear plate 18 and then to the house vacuum line.

[0067]

[0073] Manifold system 1 may also house a status indication system having a series of electrical or optical indicators 11, such as on the flow focusing elements 5 or front plate of manifold 2. Electrical or optical indicators 11 may be used to indicate the position of the flow focusing elements 5, the position of the input sample port 3 being sampled, the sample outlet port 6 and the bulk flow distribution port 7, or a combination thereof.

[0068]

[0074] In one embodiment, the flow focusing element 5 is attached to a hollow shaft motor 12 which passes through a back plate 18 into a mounting section 19. Figures 4-6 show cross-sectional views of the flow focusing element 5 and sampling lines 8 relative to the hollow shaft motor 12.

[0069]

[0075] 7 shows a front view and a cross-sectional view of the outlet 15 of the manifold back plate 18. The sample line 8 from the flow focusing element 5 is connected to an inlet 25 that leads to a particle counter, sampler, or analyzer.

[0070]

[0076] The range of dimensions of the back plate 18 in one embodiment of the manifold is also shown in FIG. 7, where X1 is 50-80 mm (preferably 60-70 mm), X2 is 30-50 mm (preferably 38-45 mm), X3 is 10-20 mm (preferably 12-16 mm), X4 is 50-80 mm (preferably 62-72 mm), and X5 is 14-24 mm (preferably 16-22 mm). ), X6 is 0.5-1.50 mm (preferably 1.0-1.5 mm), X7 is 14-24 mm (preferably 16-22 mm), X8 is 0.5-1.5 mm (preferably 0.8-1.3 mm), X9 is 2-6 mm (preferably 3-5 mm), X10 is 55-90 mm (preferably 65-80 mm), and Y1 is 24-90° (preferably 30-40°). Y1 depends on the number of exit ports 15, which are preferably further apart from each other.

[0071]

[0077] The controller 10 can control the rotation of the flow focusing element 5 to align the sample outlet port 6 and the sample line 8 with the sample input port 3 according to a desired sampling mode (see FIG. 9). Alternatively, in an embodiment in which the flow focusing element is not rotated, the controller can control the actuator to position the sample line 8 at the selectable port 14 in fluid communication with the desired sample input port 3 according to a desired sampling mode. Parameters of the initial sampling mode are stored on a computer processor or computer memory 23 and transmitted to the controller 10. Alternatively, the controller 10 and the computer processor or computer memory 23 are integrated with each other. The controller 10 can receive an event signal or an electrical signal from an external source, such as a particle counter, sampler, or analyzer 20, a dry contact switch 21, or a user input 21, and switch to a new sampling mode. For example, upon receiving a signal that a threshold level of particles has been detected by the particle counter, the controller 10 can cause the flow focusing element 5 to sample the corresponding input sampling port more frequently or for a longer period of time.

[0072]

[0078] Example 2 - Specific features of manifold systems

[0073]

[0079] Flow-focusing element.The primary function of the flow-focusing element is to minimize crosstalk for nano-sized particles whose primary mode of aerosol transport is diffusion, and for larger particles whose primary mode of aerosol transport is inertia-based mechanical mobility. In one example, the flow-focusing element is a circular flow-focusing disk that fills up to the cross-sectional diameter of the enclosed bulk flow section and houses the sample flow passages and the bulk flow path. The flow passages within the flow-focusing element are patterned to match the location of the input sample port location. The dimensions of the flow-focusing element must be sufficient to create a laminar flow path for the bulk gas flow.

[0074]

[0080] The laminar flow path must be sufficient for transport of large (>100 nm) particles away from the sample stream. The combination of the gap between the front manifold plate and the flow focusing element and the depth of the flow focusing element must be sufficient such that the median diffusive transport path length between the active sample port and the adjacent port is greater than the mean free path of nano-sized (<20 nm) particles. Flow passages between ports can be utilized to reduce the pressure drop over the sample port while moving between ports. The gas flow from each sample input port that is not currently being sampled (i.e., bulk flow) is greater than or equal to one time (1×) the sample flow rate.

[0075]

[0081] Hollow Shaft Motor. A flow focusing element focuses the desired sample gas into a sample line, a portion of which may be positioned within the housing of the hollow shaft motor. The use of a hollow shaft motor provides the dual function of rotating the flow focusing element while simultaneously transporting sample gas from the enclosed bulk flow section to the sample outlet and particle counter. The hollow shaft motor allows for a more compact design by minimizing particle transport length. A shorter sample path also results in lower particle transport losses.

[0076]

[0082] Status Indications. Data such as sample status and particle counter (or other analyzer or sampler) status is sent from the particle counter to the manifold via Ethernet or serial communications. Visual status indications including current sampling position can also be displayed simultaneously for each individual port. Different combinations of color and blink frequency can be used to indicate different sensor status. Alternatively, an alphanumeric display may be used.

[0077]

[0083] Docking Station. The manifold may be equipped with a docking station that slides into the manifold and can be used as a common component between the manifold and the particle counter (or other associated analyzer, sampler, controller, or device). The docking station contains the device's IP address, as well as electrical, mechanical, and user connections necessary or useful to operate the manifold (e.g., connections for data, analog, and digital input / output, Ethernet switches, wireless communication, vacuum, and power). The docking station allows for fast service interval swapping of different units with the minimum possible user interaction.

[0078]

[0084] Example 3 - Intelligent Sample Mode

[0079]

[0085] The flow focusing elements can be rotated (or actuators controlled) to align the sample outlet port and / or sample line with the desired sample input port. Programmed sampling intelligence is used to control the position of the flow focusing elements or actuators to sample air or gas from different sample input ports according to the desired sampling mode. A non-exhaustive list of useful sampling modes is provided below.

[0080]

[0086] Ensemble Sampling Mode. In this mode, gas is simultaneously drawn by all sample input ports while the flow focusing element and sample line are continuously rotated or while the actuator continuously moves the sample line across the selectable ports. By continuously drawing gas through the input ports while the flow focusing element and sample line are rotating (or while the actuator continuously positions the sample line across the selectable ports), an average concentration is produced across all sample input ports. In low concentration environments, the rotation speed or actuator positioning speed is sufficient to produce a high probability of detecting a single particle event from any port with each port being sampled 1-20 times per second.

[0081]

[0087] Selective Ensemble Mode. This mode is a modification of the Ensemble Sampling Mode, which controls the flow focusing elements or actuators to spend more time on sample input ports of interest defined by the user. For example, the flow focusing elements may sample selected input ports for a longer period of time than other input ports. This allows for the same sample frequency across the full range of ports while providing more detailed information of higher risk ports.

[0082]

[0088] Sequential Sampling Mode. In this mode, the flow focusing element is rotated or the actuator is positioned to sample each sample input port in sequential order with a fixed sample duration and a fixed sample tare time.

[0083]

[0089] Patterned Sampling Mode. In this mode, the flow-focusing element is rotated or the actuator is positioned to sample the input ports according to a programmed pattern with variable sampling duration and variable sampling tare time.

[0084]

[0090] Scanning Sampling Mode. This mode begins in either the ensemble or sequential sampling mode until an event signal is received from a connected aerosol particle counter or another external source. Upon receiving the event signal, the controller will alter the rotation of the flow focusing element or change the positioning of the actuator to follow a predefined patterned sampling mode designed to identify the location of the contamination source.

[0085]

[0091] Sample Mode Triggering. Using a combination of dry contact switches that respond to external events, the controller will switch between different sampling modes or specific sampling positions.

[0086]

[0092] Although the present invention has been described in considerable detail and fully by way of illustration and example for purposes of clarity of understanding, it will be apparent to one skilled in the art that the same may be practiced by modifying or altering the present invention within a broad and equivalent range of conditions, formulations and other parameters without affecting the scope of the invention or its specific embodiments, and that such modifications or alterations are intended to be encompassed within the scope of the appended claims.

[0087]

[0093] The terms and expressions employed herein are used as terms of description and not of limitation, and in the use of such terms and expressions, it is not intended to exclude any equivalents of the features shown and described or parts thereof, but it is recognized that various modifications are possible within the scope of the invention as claimed. Thus, although the present invention has been specifically disclosed by preferred embodiments, it should be understood that modifications and variations of the exemplary embodiments and optional features and concepts disclosed herein may be exercised by those skilled in the art, and such modifications and variations are considered to be within the scope of the invention as defined by the appended claims. The specific embodiments provided herein are examples of useful embodiments of the invention, and it will be apparent to those skilled in the art that the invention can be implemented using numerous variations of the devices, device components, and method steps described herein. As will be apparent to those skilled in the art, the methods and devices useful for the present methods may include numerous optional compositions and processing elements and steps.

[0088]

[0094] When a group of materials, compositions, ingredients, or compounds is disclosed herein, it is understood that all individual members of the group and all subgroups thereof are separately disclosed. All combinations or combinations of ingredients described or exemplified herein can be used to practice the present invention unless otherwise specified. Whenever a range is given herein, such as a temperature range, a time range, or a composition range, all intermediate ranges and subranges, as well as all individual values ​​included in the given range, are intended to be included in the disclosure. In addition, the endpoints of a given range should be included within the range. In the present disclosure and claims, "and / or" means additionally or alternatively. Furthermore, any use of a singular term also includes the plural.

[0089]

[0095] As used herein, "comprising" is synonymous with "including," "containing," or "characterized by," is inclusive or open-ended, and does not exclude additional, unrecited elements or method steps. As used herein, "consisting of" excludes elements, steps, or ingredients not specified in the claim element. As used herein, "consisting essentially of" does not exclude materials or steps that do not materially affect the basic and novel characteristics of the claim. Any recitation herein of the term "comprising," particularly in the description of a component of a composition or in the description of an element of a device, is understood to encompass compositions and methods that consist essentially of, and consist of, the recited components or elements.

[0090]

[0096] As used herein and in the appended claims, the singular forms "a," "an," and "the" include plural references unless the context clearly dictates otherwise. Thus, for example, a reference to a "cell" includes a plurality of such cells and equivalents thereof known to those skilled in the art. Similarly, the terms "a" (or "an"), "one or more," and "at least one" may be used interchangeably herein. It should also be noted that the terms "comprising," "including," and "having" may be used interchangeably. The phrase "as claimed in any one of claims XX-YY" (XX and YY refer to claim numbers) is intended to provide multiple dependent claims in an alternative form, and some embodiments are interchangeable with the phrase "as claimed in any one of claims XX-YY."

[0091]

[0097] Those skilled in the art will understand that starting materials, device elements, analytical methods, mixtures and combinations of components other than those specifically exemplified can be employed in the practice of the present invention without resorting to undue experimentation. All art-known functional equivalents of any such materials and methods are intended to be included in the present invention. The terms and expressions employed are used as terms of description rather than limitation, and in the use of such terms and expressions, it is not intended to exclude any equivalents of the features shown and described or portions thereof, but it is recognized that various modifications are possible within the scope of the invention claimed. The invention illustratively described herein can be suitably practiced in the absence of any element or elements, limitation or limitations not specifically disclosed herein. Headings are used herein for convenience only.

[0092]

[0098] All references referred to in this specification are incorporated herein to the extent that they are not inconsistent with the specification. Some references provided in this specification are incorporated by reference to provide additional details of the use of the present invention. All patents and publications mentioned in this specification are indicative of the level of skill of those skilled in the art to which the present invention pertains. It is intended that the references cited in this specification are incorporated herein by reference in their entirety to indicate the state of the art as of the filing date thereof, and that this information may be adopted herein, if necessary, to exclude certain embodiments of the prior art.

Claims

1. a) two or more input sampling ports; b) a sealed bulk flow section connected to the two or more input sampling ports, wherein gas flowing through the two or more input sampling ports enters the sealed bulk flow section; c) a flow focusing element inside the sealed bulk flow section, the flow focusing element comprising a plurality of flow ports, the flow ports being in fluid communication with the input sampling ports; d) a sample line in fluid communication with a flow port selected from the plurality of flow ports, and one or more outlets in fluid communication with one or more flow ports other than the selected flow port; comprising; the flow focusing element comprises a sample flow path between the selected input sampling port in fluid communication with the selected flow port and the sample line, and one or more bulk flow paths between the input sampling ports other than the selected input sampling port and the one or more outlets; the flow focusing element is configured to direct gas flowing through the selected input sampling port to flow into the selected flow port and into the sample line, and to direct gas flowing through the input sampling ports other than the selected input sampling port to flow into the one or more flow ports other than the selected flow port and into the one or more outlets; a sampling manifold.

2. The sampling manifold according to claim 1, wherein the flow focusing element comprises a plurality of channels forming the sample flow path and the one or more bulk flow paths, and the plurality of channels are configured to direct gas from non-sampled ports away from the sample flow path.

3. The sampling manifold according to claim 1 or 2, wherein the transport of gas through the one or more bulk flow paths, the sample flow path, or a combination thereof includes laminar flow.

4. The sampling manifold according to claim 1 or 2, wherein the gas flow between the sample flow path and the one or more bulk flow paths has a crosstalk rate of less than 0.01%.

5. The sampling manifold according to claim 1 or 2, comprising six or more input sampling ports, wherein the flow focusing element comprises a sample outlet port and five or more bulk flow distribution ports.

6. The sampling manifold according to claim 1 or 2, wherein the sampling manifold can simultaneously take in gas through each of the input sampling ports.

7. The sampling manifold according to claim 1 or 2, further comprising a particle counter, a condensation particle counter, a gas analyzer, a particle analyzer, a molecular sampler, a microbial collection plate, an environmental or gas sensor, or a combination thereof, in fluid communication with the sampling line.

8. A plurality of selectable ports comprise a sample outlet port and one or more bulk flow distribution ports, the sample outlet port is the selected flow port, and the flow focusing element can be rotated within the sealed bulk flow section, so that the sample outlet port is aligned with an input sampling port selected from the two or more input sampling ports, the sample flow path is between the selected input sampling port, the sample outlet port, and the sample line, and the one or more bulk flow paths are between input sampling ports other than the selected input sampling port and the one or more bulk flow distribution ports. The sampling manifold according to claim 1 or 2.

9. The sampling manifold according to claim 8, wherein the flow focusing element can be controllably rotated to align the sample outlet port with a newly selected input sampling port.

10. The sampling manifold according to claim 8, further comprising one or more electrical or optical indicators, wherein the electrical or optical indicators can display the position of the sample line with respect to the plurality of flow ports or the position of the sample outlet port with respect to one or more of the input sampling ports.

11. a) a controller operably connected to the flow focusing element and capable of rotating the flow focusing element to align a sample outlet port with one or more selected input sampling ports according to an operator input or a predetermined sequence, or b) a controller operably connected to an actuator and capable of aligning the sample line with one or more selected flow ports according to an operator input or a predetermined sequence The sampling manifold according to claim 1 or 2, further comprising.

12. The sampling manifold according to claim 11, wherein the sample outlet port is aligned with each of the input sampling ports in a sequential order by continuous rotation of the flow focusing element, or the sample line is aligned with each of a plurality of lower ports in a sequential order by continuous operation of the actuator.

13. The sampling manifold according to claim 11, wherein the controller can rotate the flow focusing element to align the sample outlet port with each of the input sampling ports for a predetermined period, frequency, or combination thereof, or the controller can control the actuator to align the sample line with each of the plurality of flow ports for a predetermined period, frequency, or combination thereof.

14. The sampling manifold according to claim 11, wherein the controller can rotate the flow focusing element to align the sample outlet port with each of the input sampling ports, and the sample outlet port is aligned with one or more of the input sampling ports at a higher frequency than other input sampling ports, or the controller can control the actuator to align each of the sample line with the plurality of flow ports, and the sample line is aligned with one or more of the flow ports at a higher frequency than other flow ports.

15. Can the controller rotate the flow focusing element according to a predetermined scanning pattern to align the sample outlet port with the input sampling port, or can the controller control the actuator according to a predetermined scanning pattern to align the sample line with the flow port? The sampling manifold according to claim 11.

16. Can the controller receive an event signal from an external source and change the rotation of the flow focusing element to align the sample outlet port with the input sampling port according to a new scanning pattern, or can the controller change the movement of the sample line to align the sample line with the flow port according to a new scanning pattern? The sampling manifold according to claim 15.

17. Can the controller receive an event signal from a particle counter and, upon receiving the event signal, rotate the flow focusing element or move the sample line according to a new predetermined event pattern? The sampling manifold according to claim 15.

18. Further comprising a removable docking station, the docking station comprising a connection capable of operating the sampling manifold, the connection comprising one or more of a vacuum connection, a power connection, a data connection, an analog input / output connection, a digital input / output connection, an Ethernet switch connection, a wireless communication connection, or any combination thereof. The sampling manifold according to claim 1 or 2.

19. The flow focusing element is a flow focusing disk. The sampling manifold according to claim 1 or 2.

20. a) A step of taking in gas into the manifold, the manifold comprising two or more input sampling ports, a flow focusing element, and i) a sample outlet port positioned on the flow focusing element and connected to the sample line, or ii) a plurality of flow ports positioned on the flow focusing element and a sample line capable of being aligned with each of the plurality of flow ports. The step of taking in. b) rotating the flow focusing element to align the sample outlet port with a selected input sampling port, or controllably moving the sample line to align the sample line with a selected flow port; c) transporting gas through the selected input sampling port into the aligned sample outlet port or flow port and into the sample line; A method for sampling a gas, comprising: **Claim 21** The method of claim 20, wherein the gas flow into the aligned sample outlet port or selected flow port and the gas flow into one or more non-sampled ports have a cross-talk rate of less than 0.01%. **Claim 22** The method of claim 20 or 21, wherein the transporting of gas into the one or more non-sampled ports includes laminar flow, and the aligned sample outlet port and / or the selected flow port includes laminar flow. **Claim 23** The method of claim 20 or 21, comprising rotating the flow focusing element to align the sample outlet port with one or more selected input sampling ports for a predetermined period, frequency, or combination thereof. **Claim 24** The method of claim 20 or 21, comprising rotating the flow focusing element to align the sample outlet port with one or more selected input sampling ports according to a predetermined pattern. **Claim 25** The method of claim 20 or 21, comprising receiving an event signal from a particle counter connected to the manifold and rotating the flow focusing element according to a predetermined event pattern immediately after receiving the event signal. **Claim 26** The method of claim 20 or 21, comprising receiving an event signal from an external source and changing the rotation of the flow focusing element to align the sample outlet port with the input sampling port according to a new scan pattern. **Claim 27** The method of claim 20 or 21, wherein the flow focusing element is rotated according to an input stored on a computer processor, flash memory, or computer memory to align with the sample outlet port. **Claim 28** The method according to claim 20 or 21, wherein the sampling line is in fluid communication with a particle counter, a gas analyzer, a particle analyzer, a molecular sampler, a microbial collection plate, an environmental or gas sensor, or a combination thereof.

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