SYSTEM AND METHOD FOR ACCESSING PROTECTIVE X-RAY ENCLOSURE - Patent application

Abstract

Some embodiments include an X-ray device including an access port configured to receive a cathode within an interior volume of an enclosure of the X-ray device, a first vacuum seal configured to seal a cover over the access port, and a second seal configured to seal the cover over the access port, the second seal being maintained between the first vacuum seal and the interior volume of the enclosure while removing the first vacuum seal.

Description

[Background technology]

[0001] Unless otherwise indicated herein, the approaches described in this section are not prior art to the claims of this disclosure and are not admitted to be prior art by their inclusion in this section.

[0002] Components of an x-ray source may be vacuum sealed within an enclosure. For example, the vacuum chamber of an x-ray tube may be permanently welded during manufacture. The vacuum seal allows the x-ray tube to withstand and dissipate heat generated during operation, but a welded seal may interfere with post-manufacture testing, verification, and repair. Breaking the vacuum-sealed enclosure of an x-ray tube is difficult, time-consuming, and may introduce contaminants that render the tube unrecoverable. [Brief description of the drawings]

[0003] [Figure 1] 1 illustrates an example of an X-ray device with an overlapping access port cover, according to some embodiments. [Diagram 2] 1 illustrates an example of an X-ray device with an overlapping access port cover, according to some embodiments. [Diagram 3] 1 illustrates an example of an X-ray device with an overlapping access port cover, according to some embodiments. [Figure 4A] 1 illustrates an example of an X-ray device with an overlapping recessed access port cover, according to some embodiments. [Figure 4B] 1 illustrates an example of an X-ray device with an overlapping recessed access port cover, according to some embodiments. [Figure 5A] 1 illustrates an example of an X-ray device for covering an overlapping lip of an access port, according to some embodiments. [Figure 5B] 1 illustrates an example of an X-ray device for covering an overlapping lip of an access port, according to some embodiments. [Figure 6A]1 illustrates an example of an X-ray device with overlapping lip cover for a recessed access port, according to some embodiments. [Figure 6B] 1 illustrates an example of an X-ray device with overlapping lip cover for a recessed access port, according to some embodiments. [Figure 7A] 1 illustrates an example of an X-ray device with an overlapping cover for an access port with a secondary seal, according to some embodiments. [Figure 7B] 1 illustrates an example of an X-ray device with an overlapping cover for an access port with a secondary seal, according to some embodiments. [Figure 8A] 1 illustrates an example of an X-ray device with an overlapping cover for an access port with a secondary seal, according to some embodiments. [Figure 8B] 1 illustrates an example of an X-ray device with an overlapping cover for an access port with a secondary seal, according to some embodiments. [Figure 9A] 1 illustrates an example of an X-ray device having an overlapping grooved cover for an access port with a protrusion, according to some embodiments. [Figure 9B] 1 illustrates an example of an X-ray device having an overlapping grooved cover for an access port with a protrusion, according to some embodiments. [Figure 10A] 1 illustrates an example of an X-ray device having an overlapping grooved cover for an access port with a protrusion, according to some embodiments. [Figure 10B] 1 illustrates an example of an X-ray device having an overlapping grooved cover for an access port with a protrusion, according to some embodiments. [Figure 11A] 1 illustrates an example of a resealable protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 11B] 1 illustrates an example of a resealable protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 12A]1 illustrates an example of a resealable protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 12B] 1 illustrates an example of a resealable protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 13A] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 13B] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 13C] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 13D] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 14A] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 14B] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 15A] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 15B] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 15C] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 16A] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 16B] 1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 16C]1 shows an example of a temporary protective vacuum seal system for an X-ray machine enclosure with an access port. [Figure 17A] 1 shows an example of a protective vacuum seal system for a multi-emitter X-ray device inside an enclosure. [Figure 17B] 1 shows an example of a protective vacuum seal system for a multi-emitter X-ray device inside an enclosure. [Figure 18] 1 shows an example of a protective vacuum seal system for a multi-emitter X-ray device inside an enclosure with multiple access ports. [Figure 19A] 1 illustrates an example of a cathode module having multiple fasteners, according to some embodiments. [Figure 19B] 1 illustrates an example of a cathode module having multiple fasteners, according to some embodiments. [Figure 20A] 1 illustrates an example of a cathode module having at least one compression plate, according to some embodiments. [Figure 20B] 1 illustrates an example of a cathode module having at least one compression plate, according to some embodiments. [Figure 21A] 1 illustrates an example of a cathode module having at least one compression plate, according to some embodiments. [Figure 21B] 1 illustrates an example of a cathode module having at least one compression plate, according to some embodiments. [Figure 22A] 1 illustrates an example of a cathode module having at least one compression plate, according to some embodiments. [Figure 22B] 1 illustrates an example of a cathode module having at least one compression plate, according to some embodiments. [Diagram 23] 1 illustrates an example of an X-ray device including an anode assembly according to some embodiments. [Figure 24A] 1 illustrates an example of an X-ray device having a segmented anode assembly according to some embodiments. [Figure 24B]1 illustrates an example of an X-ray device having a segmented anode assembly according to some embodiments. [Figure 25A] 1 illustrates an example of a segmented anode assembly according to some embodiments. [Figure 25B] 1 illustrates an example of a segmented anode assembly according to some embodiments. [Figure 25C] 1 illustrates an example of a segmented anode assembly according to some embodiments. [Figure 26A] 1 illustrates an example of a segmented anode assembly according to some embodiments. [Figure 26B] 1 illustrates an example of a segmented anode assembly according to some embodiments. [Figure 26C] 1 illustrates an example of a segmented anode assembly according to some embodiments. [Figure 27] 4 is a flow chart of an example of a method for sealing a vacuum enclosure of an X-ray device. [Figure 28] 4 is a flow chart of an example of a method for sealing a vacuum enclosure of an X-ray device. [Figure 29] 4 is a flow diagram of an exemplary method for manufacturing a cathode for an x-ray device, according to some embodiments. [Diagram 30] 4 is a flow diagram of an exemplary method for manufacturing an anode for an x-ray device, according to some embodiments. [Diagram 31] 4 is a flow diagram of an example method for manufacturing a cathode and sealing a vacuum enclosure of an x-ray device, according to some embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0004] Components of the x-ray source, such as the cathode and anode, may be permanently vacuum sealed to the interior of the enclosure, for example, by welding, brazing, permanent bonding, etc. However, while traditional vacuum sealing approaches may be sufficient for single cathode (with one to three emitters) and single anode assemblies, they can complicate manufacturing and prevent post-manufacturing testing, validation, and repair of x-ray sources with multiple cathode modules, and a single failure mechanism may render the x-ray source unusable. Once an x-ray device enclosure is vacuum sealed, access to the interior volume may be impossible, preventing replacement or repair of failed components during initial validation testing or subsequent use. For example, opening many types of permanent vacuum seals may require stripping, milling, cutting, and / or other debris-generating processes. The debris generated when opening these types of vacuum seals can cause problems, such as contaminating the enclosure (potentially resulting in arcing), damaging internal components, and disrupting electrical connections. Repairing this damage may be impractical or impossible. These problems can be exacerbated in implementations that include multiple x-ray emitter or cathode modules inside the vacuum enclosure. A multi-emitter x-ray source may include many cathode modules (e.g., 6 or more, such as 96). Thus, failure of a single component inside the vacuum-sealed enclosure of the x-ray device can render the entire x-ray device inoperable and / or unsuitable for repair.

[0005] Some embodiments relate to a protective vacuum seal system for an x-ray device enclosure, such as an x-ray source, an x-ray tube, an x-ray tube body, etc. The body of the enclosure may include an access port configured to provide access to components inside the enclosure. For example, the access port may allow a cathode to be inserted or removed from the enclosure. The protective vacuum seal system may be configured to vacuum seal the access port. The protective vacuum seal system may be further configured to protect the interior from damage during removal of the vacuum seal. As disclosed in further detail herein, the protective vacuum seal system may include a primary seal mechanism configured to form a primary evacuable seal over the access port, and a secondary seal mechanism configured to maintain a secondary seal or barrier over the access port during removal of the primary vacuum seal. The secondary seal may be configured to prevent contamination of the enclosure from debris generated, for example, when the primary vacuum seal is broken.

[0006] In some embodiments, the protective vacuum seal system can allow components of the x-ray device to be evaluated, inspected, repaired, and / or replaced after the enclosure of the x-ray device has been vacuum sealed. The protective vacuum seal system can be used to salvage x-ray devices that have failed initial validation testing and / or have failed during use. In response to a validation failure, such as a poorly performing emitter, the protective vacuum seal system can be used to safely open the access port so that the failed component(s) can be repaired and / or replaced. The protective vacuum seal system can then be used to reseal the access port, allowing the x-ray device to be used again without having to be discarded.

[0007] 1-3 show examples of an X-ray device with overlapping access port covers according to some embodiments. FIG. 1 shows an example of a system 100 including an X-ray device 101 according to some embodiments. The system 100 can include an imaging system, an illumination system, etc. FIG. 1 shows a side cross-sectional view of an example of an enclosure 102 of the X-ray device 101. FIG. 2 shows a top view of the enclosure 102 shown in FIG. 1. With reference to FIGS. 1 and 2, the enclosure 102 can be part of an X-ray source, an X-ray tube, an X-ray tube body, a vacuum tube, a vacuum chamber, etc. The enclosure 102 can include a body 104 that at least partially defines an interior volume 106 of the enclosure 102.

[0008] The enclosure 102 may comprise components of an X-ray source 110 or multiple X-ray sources 110 (shown as X-ray sources 110 through 110-S), each of which comprises a cathode 120 and an anode 130 (shown in FIG. 3) having an emitter 122. The emitter 122 may comprise any suitable electron emission means, including, but not limited to, a thermionic emitter, a filament emitter, a field emitter, an electron gun, and the like. The field emitter may comprise various types of emitters. For example, the field emitter may comprise a nanotube emitter, a nanowire emitter, a spindled array, and the like. Conventionally, a nanotube has at least a portion of its structure with a hollow center, while a nanowire or nanorod has a substantially solid core. For ease of use of the terminology, as used herein, nanotubes also refer to nanowires and nanorods. Nanotubes exhibit nanometer-scale (nm-scale) tubular structures with an aspect ratio of at least 100:1 (length:width or diameter). Spindt arrays can include individual field emitters with small sharp cones using electron generating materials such as molybdenum (Mo) or tungsten (W). In some embodiments, the field emitters are formed from conductive or semiconducting materials with high tensile strength and high thermal conductivity such as carbon, metal oxides (e.g., Al2O3, titanium oxide (TiO2), zinc oxide (ZnO), or manganese oxide (MnxOy, where x and y are integers), metals, sulfides, nitrides, and carbides, such as in pure or doped form. The cathode 120 may include a single emitter 122, although in other embodiments, the cathode 120 may include multiple emitters 122. The cathode 120 is configured to generate a focal spot of the electron beam at a corresponding anode 130. X-ray source 110 may include and / or be operatively coupled to a corresponding anode 130 (not shown in FIG. 1 to avoid obscuring details of the illustrated example), as disclosed in further detail herein. Although an X-ray source 110 including a single cathode 120 and emitter 122 is used as an example, in other embodiments, cathode 120 may include multiple cathodes 120, multiple emitters 122, etc.

[0009] An access port 108 may be formed in the body 104. The access port 108 may comprise any suitable means for providing access to the interior volume 106 of the enclosure 102, including, but not limited to, an opening, hole, gap, and / or the like in the enclosure 102. The access port 108 may be configured to allow the cathode and / or other components of the x-ray source 110 to be visually inspected, inserted into, removed from, physically manipulated, and / or otherwise accessed.

[0010] As previously mentioned, some approaches to vacuum sealing can complicate manufacturing and hinder post-manufacturing testing, validation, and repair. These and other issues can be addressed by embodiments of the techniques for accessing protective sealed enclosures disclosed herein. In the example shown in FIGS. 1 and 2, a seal system 150 is configured to vacuum seal an enclosure 102 of an X-ray device 101. The seal system 150 can safely remove the vacuum seal without contaminating or damaging the X-ray source 110 (or other components inside the enclosure 102). Thus, the seal system 150 can enable repair and / or replacement of internal components of the X-ray device 101, such as the cathode, without damaging the enclosure 102.

[0011] The seal system 150 comprises a primary seal 151 configured to form a vacuum seal in the enclosure 102 over the access port 108. As used herein, a vacuum seal refers to a seal configured to maintain a low pressure, near vacuum, or a vacuum pressure differential between the interior volume 106 of the enclosure 102 and the external environment.

[0012] The primary seal 151 may be configured to vacuum seal the cover 154 to the access port 108. The cover 154 may comprise any suitable means for vacuum sealing the access port 108, including, but not limited to, a plate, a lid, a cover, a window, a porthole, a gasket, and the like. The cover 154 may seal the access port 108 by compressing a gasket. The cover 154 may be formed of a vacuum compatible material, such as an airtight material, a non-porous material, a metal, bronze, brass, steel, iron, aluminum, lead, plastic, rubber, silicone, or the like, capable of maintaining a low pressure or vacuum within the interior volume 106.

[0013] The primary seal 151 of the seal system 150 may be configured to form a permanent or long-term vacuum seal between the cover 154 and the body 104. As used herein, a permanent or long-term seal refers to a seal configured to last for the usable life of the x-ray source 110. The permanent or long-term seal may be formed by one or more of fusing, welding, fusion welding, solid state welding, brazing, soldering, bonding, chemical bonding, permanent adhesion, and / or the like.

[0014] The seal system 150 further comprises a secondary seal 152 configured to protect the interior volume 106 from contamination or damage during removal of the primary seal 151. As disclosed in further detail herein, the secondary seal 152 may be configured to form and / or maintain a protective barrier between the primary seal 151 and the interior volume 106 of the enclosure 102. The secondary seal 152 may be disposed between the primary seal 151 and the interior volume 106 of the enclosure 102.

[0015] The secondary seal 152 may be configured to protect the interior volume 106 of the enclosure 102 from contamination and / or other damage during removal of the primary seal 151. The secondary seal 152 may or may not be a vacuum seal. The secondary seal 152 may be configured to be removed or released without contaminating and / or damaging the x-ray source 110 or other internal components. The secondary seal 152 may include one or more mechanical seals, including, but not limited to, a pressure seal, a hydrostatic seal, a contact seal, a compression seal, a clamp, a bolt, a friction seal, a physical engagement, a physical engagement seal, a surface engagement seal, a gasket, a rubber gasket, a silicone gasket, an adhesive gasket, a sheet gasket, a solid material gasket, a braze gasket, a spiral wound gasket, a double jacket gasket, a Kammprofile gasket, a Fishbone gasket, a ring type gasket, an O-ring, an adhesive seal, a peelable adhesive seal, an adhesive material, a peelable adhesive material, a sealant, a sealant material, a removable sealant, and / or the like.

[0016] The seal system 150 can be used to vacuum seal the enclosure 102 so that the enclosure 102 can be accessed later without contaminating the interior volume 106. The secondary seal 152 can be disposed inside the primary seal 151 relative to the access port 108. As a result, the secondary seal 152 is configured to a) protect the interior volume 106 from contamination during removal of the primary seal 151, and b) allow the cover 154 to be removed or released from the body 104 without contaminating or damaging the interior volume 106. The secondary seal 152 can be configured to form and / or maintain a protective barrier by contact between two surfaces for a sufficient length of time, such as the cover 154 and the body 104, various gaskets or seals described above. This secondary seal 152 can remain completely or sufficiently sealed during removal of the primary seal 151. As a result, contamination can be substantially prevented by the secondary seal 152. Contamination can be removed from the exterior of the enclosure 102 before the secondary seal 152 is broken.

[0017] In some embodiments, the primary seal 151 can be configured to surround the perimeter 109 of the access port 108. Thus, the primary seal 151 can vacuum seal the access port 108. The secondary seal 152 and / or the corresponding secondary seal 152 can also be configured to surround the perimeter 109 of the access port 108. In some embodiments, the secondary seal 152 can be disposed interior to the primary seal 151 relative to the access port 108. In other words, the primary seal 151 can be formed along a first path around the perimeter of the access port 108, and the secondary seal 152 can be formed along a second path around the perimeter of the access port 108, with the second path being interior to the first path between the first path and the access port 108. Thus, the secondary seal 152 and / or the corresponding secondary seal 152 can prevent debris generated during removal of the primary seal 151 from contaminating the interior volume 106.

[0018] In some embodiments, the periphery of the cover 154 may be configured to overlap the body 104 of the enclosure 102 when placed over the access port 108. The primary seal 151 may include a weld or other permanent bond at and / or within a first overlap region 251, such as along an outer edge of the cover 154. The secondary seal 152 may include, at least in part, a second overlap region 252. The second overlap region 252 may be disposed between the cover 154 and the body 104 of the enclosure 102, and between the access port 108 and the primary seal 151. In some embodiments, the second overlap region 252 may be configured to have a threshold size or range (e.g., a range measured from the primary seal 151 to the periphery 109 of the access port 108 at each point along the periphery 109 of the access port 108). The threshold size may be of a size sufficient to ensure that the secondary seal 152 can adequately protect the enclosure 102 from contamination during removal of the primary seal 151. The threshold size may be determined by testing, experience, simulation, type of seal, seal material, enclosure material, and / or the like. In some embodiments, the threshold size is at least 5 millimeters (mm), e.g., the extent of engagement and / or overlap of the surfaces that make up the secondary seal 152 may be at least 5 mm at each point along the perimeter 109 of the access port 108. In other embodiments, the threshold width may be 10 mm or more (when used with materials and / or primary seal 151 that generate more debris, greater velocity debris, etc.).

[0019] The seal system 150 can facilitate validation testing and repair of the x-ray device 101. The seal system 150 can be used to vacuum seal the enclosure 102 for initial validation testing by using a primary seal 151. Components identified as defective during validation testing can be replaced by removing the primary seal 151. During removal of the primary seal 151, the interior volume 106 of the enclosure 102 is protected from contamination by the secondary seal 152.

[0020] 3 shows additional examples of system 100A and x-ray device 101A according to some embodiments. System 100A may be similar to system 100 described above. X-ray source 110 may include a cathode 120 and an anode 130. In operation, cathode 120 directs electron beam 124 at target 132 of anode 130 to convert at least a portion of the energy into x-ray radiation 134. Although a single target 132 and single electron beam 124 are used as examples, in other embodiments, each anode 130 may include multiple targets 132, a single target with multiple focal points from multiple electron beams 124, etc.

[0021] 4A-4B show an example of an X-ray device with an overlapping recessed access port cover, according to some embodiments. Referring to FIG. 4A, a system 100B including an X-ray device 101B may be similar to systems 100 and 100A described above, including similar components. In some embodiments, a cover 154B of the seal system 150B is configured to physically engage with a body 104. The body 104 includes an engagement structure, such as a notch 404. The notch 404 may be formed around a perimeter 109 of the access port 108. The notch 404 may be configured to engage with the cover 154B. A dimension and / or configuration of the notch 404 may correspond to a dimension and / or configuration of the cover 154B such that the cover 154B can fit within the notch 404.

[0022] The primary seal 151B may include the cover 154B and a portion of the body 104. The primary seal 151B may include a vertical section 405 of the notch 404. Similarly, the secondary seal 152B may include the cover 154B and another portion of the body 104. The secondary seal 152B may include a horizontal section 406 of the notch 404.

[0023] 4B, the enclosure 102 is in a closed, vacuum sealed state. In this example, the primary seal 151B includes a weld that seals the outer edge of the cover 154B to the body 104 at a vertical section 405 of a notch 404 formed in the body 104. The secondary seal 152B can be configured to maintain the secondary seal 152B between the primary seal 151B and the interior volume 106 during removal of the primary seal 151B, as disclosed herein.

[0024] 5A-5B show examples of an X-ray device covering an overlapping lip of an access port, according to some embodiments. With reference to FIGS. 5A-5B, a system 100C including an X-ray device 101C may be similar to systems 100 and 100A described above, including similar components. A cover 154C of sealing system 150C may include a lip 504 and a central section 506 configured to physically engage or partially enter the access port 108. The central section 506 of cover 154C may be configured to fit within and / or extend into the access port 108.

[0025] The primary seal 151C includes the outer edge of the cover 154C and a portion of the body 104. The secondary seal 152C includes a portion of the lip (or flange) 504, a central section 506 of the cover 154C, and a portion around the perimeter 109 of the access port 108.

[0026] 5B, the enclosure 102 is in a closed, vacuum sealed state. The primary seal 151C of the seal system 150C is formed by welding the outer edge of the cover 154C to the body 104. The secondary seal 152C may include a mechanical seal maintained by engagement between the body 104 and the lip 504 and / or engagement between the central section 506 and the perimeter 109 of the access port 108.

[0027] 6A-6B show an example of an X-ray device with a recessed access port overlapping lip cover, according to some embodiments. Referring to FIG. 6A-6B, a system 100D including an X-ray device 101D may be similar to the systems 100, 100A, 100B, and 100C described above, including similar components. The cover 154D is configured to physically engage the access port 108 of the enclosure 102. The cover 154D may include a lip 504 and a central section 506. The body 104 may also be configured to physically engage the cover 154D, with a notch 404D and an outer edge of the cover 154D engaging as a primary seal 151D. The secondary seal 152D may include an engagement between the lip 504 of the cover 154D and the notch 404 formed in the body 104, and a) the central section 506 and periphery 109 of the access port 108.

[0028] 6B, the enclosure 102 is in a closed, vacuum sealed state. The primary seal 151D may be formed by welding the outer edge of the cover 154 to the body 104 to form the primary seal 151D). The secondary seal 152D may comprise a mechanical seal maintained by engagement between the lip 504 and the notch 404 and / or between the perimeter of the access port 108 and the central section 506.

[0029] 7A-8B show an example of an X-ray device with an overlapping cover of an access port with a secondary seal, according to some embodiments. With reference to FIGS. 7A-7B, a system 100E including an X-ray device 101E may be similar to the system 100 described above including similar components. The secondary seal 152E includes a secondary seal member 702. The secondary seal member 702 may be configured to surround the access port 108. The secondary seal member 702 may include a component(s) of a temporary, non-debris generating seal as disclosed herein, such as a mechanical seal, a gasket, an O-ring, etc. The secondary seal 152E may further include overlapping surfaces 704 of the cover 154E and the body 104, the overlapping surfaces 704 configured to engage, e.g., contact or compress, the secondary seal member 702.

[0030] 7B, the enclosure 102 is in a closed, vacuum sealed state. The enclosure 102 may be sealed by a seal system 150E similar to the seal system 150 described above, with a primary seal 151E of the seal system 150E formed by welding an outer edge of the cover 154E to the body 104. The secondary seal 152E may be configured to form and / or maintain the secondary seal 152E, which includes a mechanical seal maintained by engagement between the overlapping surface 704 of the cover 154E and the body 104, and engagement between the overlapping surface 704 and the secondary seal member 702.

[0031] 8A-8B, the system 100F including the X-ray device 101F may be similar to the systems 100 and 100E described above, including similar components. The secondary seal 152F of the seal system 150F includes a mechanical gasket member, such as an O-ring 802. The O-ring 802 may be configured to surround the access port 108 of the enclosure 102, as disclosed herein. The secondary seal 152F may further include a channel 804 formed within the cover 154F (e.g., on an inner surface of the cover 154F), the channel 804 configured to mate and / or physically engage with the O-ring 802 when the cover 154F is sealed over the access port 108. Alternatively, the channel 804 may be formed in the body 104 (e.g., an outer surface of the body 104), both the body 104 and the cover 154F, etc.

[0032] 8B, the enclosure 102 is in a closed, vacuum sealed state. The primary seal 151F may be formed by welding the outer edge of the cover 154F to the body 104. The secondary seal 152F may be maintained during removal of the primary seal 151F to protect the interior volume 106 from contamination by engagement between the overlapping surfaces of the cover 154F and the body 104 and / or engagement between the O-ring 802 and the channel 804 and the body 104.

[0033] 9A-10B show an example of an X-ray device having an overlapping grooved cover of an access port with a protrusion, according to some embodiments. With reference to FIGS. 9A-9B, a system 100G including an X-ray device 101G may be similar to systems 100 and 100A-F described above, including similar components. A secondary seal 152G of the seal system 150G includes a protrusion 902. The protrusion 902 may extend around the access port 108 of the enclosure 102 and may be formed on an outer surface of the body 104. The secondary seal 152G may further include a channel 904 formed in the interior of the cover 154G (e.g., on an inner surface of the cover 154G), the channel 904 configured to mate and / or physically engage with the protrusion 902 when the cover 154G is sealed over the access port 108.

[0034] 9B, the enclosure 102 is in a closed, vacuum sealed state. The primary seal 151G may be formed by welding the outer edge of the cover 154G to the body 104. The secondary seal 152G may be maintained during removal of the primary seal 151G by engagement between overlapping surfaces of the cover 154G and the body 104 and / or engagement between the protrusions 902 and the channels 904 to protect the interior volume 106 from contamination.

[0035] 10A-10B, a system 100H including an x-ray device 101H may be similar to the systems 100 and 100A-G described above, including similar components. A secondary seal 152H of the seal system 150H includes corresponding protrusions 1002 and channels 1004 formed in the body 104 and the cover 154H, respectively. The protrusions 1002 may be configured to mate and / or physically engage with the corresponding channels 1004 when the cover 154H is placed over the access port 108 of the enclosure 102, as shown in FIG. 10B. The primary seal 151H may be formed by welding an outer edge of the cover 154H to the body 104. The secondary seal 152H may protect the interior volume 106 from contamination during removal of the primary seal 151H through physical engagement between overlapping surfaces of the cover 154H and the body 104, and / or engagement between the protrusions 1002 and the corresponding channels 1004. In some embodiments, the secondary seal 152H may include additional temporary or short-term sealing mechanisms such as a sealant or adhesive disposed on the overlapping surfaces, protrusions 1002, and / or channels, a gasket, an O-ring, and / or the like.

[0036] 11A-12B show an example of a resealable protective vacuum seal system for an X-ray device enclosure with an access port. Referring to FIG. 11A-11B, a system 100I including an X-ray device 101I may be similar to systems 100 and 100A-H described above, including similar components. The seal system 150I includes a releasable vacuum seal 1152 configured to vacuum seal the access port 108 of the enclosure 102. The releasable vacuum seal 1152 may include one or more releasable, temporary, short-term, removable, non-debris-generating, or safely removable sealing mechanisms, such as mechanical sealing mechanisms, gaskets, brazed gaskets, O-rings, sealant materials, releasable adhesives, etc. The releasable vacuum seal 1152 may be configured to vacuum seal the enclosure 102 independently of other seals and / or sealing mechanisms of the enclosure 102 and / or seal system 150I (e.g., independently of the primary vacuum seal 151).

[0037] In some embodiments, the releasable vacuum seal 1152 can be configured to vacuum seal a temporary cover 1154 over the access port 108. The primary cover 1154 can be adapted for validation testing operations as disclosed in further detail herein. Thus, validation testing of the X-ray device 101I and / or the X-ray source 110 can proceed without the need for prior and / or fabrication of a permanent or long-term vacuum seal, such as the primary seal 151I shown in FIG. 11B. The releasable vacuum seal 1152 can be removed without contaminating or damaging components within the interior volume 106 of the enclosure 102, such as the X-ray source 110. Thus, the seal system 150I can enable the X-ray device 101I and / or the X-ray source 110 to recover from a validation failure. In response to detection of a component failure, the releasable vacuum seal 1152 may be released, the temporary cover 1154 may be removed to expose the access port 108, the failed component may be repaired or replaced, and the releasable vacuum seal 1152 may be reapplied without contaminating or damaging the X-ray source 110 within the interior volume 106 of the enclosure 102.

[0038] The releasable vacu-seal 1152 comprises a channel 1155 formed in the body 104 (e.g., around the perimeter 109 of the access port 108) and an O-ring 1157 configured to physically engage and / or mate with the channel 1155. The releasable vacu-seal 1152 may further comprise a physical engagement seal between an overlapping surface of the temporary cover 1154 and the body 104 of the enclosure 102. In some embodiments, the overlapping surface may be adapted to facilitate and / or strengthen the releasable vacu-seal 1152, for example, may be roughened, include a sealant or adhesive, include additional physical engagement members, and / or the like. In some embodiments, the releasable vacu-seal 1152 may comprise one or more fasteners, such as clamps, bands, bolts, etc. (not shown in FIG. 11A to avoid obscuring details of the illustrated example). The fasteners can be configured to secure the temporary cover 1154 over the access port 108 while a vacuum can be drawn within the interior volume 106 of the enclosure 102 and then released or removed. Alternatively, the fasteners can be used to secure the temporary cover 1154 during validation testing.

[0039] As shown in FIG. 11B, the seal system 150I may further comprise a primary seal 151I and a secondary seal 152I. The primary seal 151I may be configured to replace the releasable vacuum seal 1152 with a permanent, long-term vacuum seal. More specifically, the releasable vacuum seal 1152 (and temporary cover 1154) may be configured to be removed and replaced with the primary seal 151I and a cover 1156, such as a product cover 1156. The releasable vacuum seal 1152 may be replaced with the primary seal 151I after successful validation testing of the X-ray device 101I or components of the composition. The primary seal 151I may comprise any suitable permanent or long-term sealing mechanism as disclosed herein. The secondary seal 152I may be similar to the various secondary seals 152A-152H described herein.

[0040] In some embodiments, the temporary cover 1154 may be configured to facilitate validation testing of the X-ray source 110. For example, the temporary cover 1154 may include one or more test and diagnostic components or features, such as temperature sensors, viewports, etc. The primary cover 1154 may be used during validation testing of many different X-ray devices 101I (and / or enclosures 102). Thus, the releasable vacuum seal 1152 and / or the temporary cover 1154 may be adapted to withstand numerous vacuum-seal cycles. For example, the releasable vacuum seal 1152 may include highly durable and robust vacuum-seal components, the temporary cover 1154 may be formed from a thick, high-strength material, etc. (e.g., may be thicker, heavier, and / or more durable than the product cover 1156).

[0041] 12A-12B, a system 100J including an X-ray device 101J may be similar to systems 100 and 100A-I described above, including similar components. The system 100J includes a seal system 150J including a releasable vacuum seal 1152J, a primary vacuum seal 151J, and a secondary seal 152J. The releasable vacuum seal 1152J may further include one or more fasteners configured to secure and / or clamp a temporary cover 1154J over the access port 108. The fasteners may include clamps, bolts, screws, clasps, clips, pins, ties, etc. that interact with a flange 153J of the body 104J. The releasable vacuum seal 1152J may be used to vacuum seal the enclosure 102 during validation testing of the X-ray device 101J (and / or the X-ray source 110), as disclosed herein.

[0042] The releasable vacu-seal 1152J may be substituted for the primary seal 151J, as shown in FIG. 12B. The secondary seal 152J may be formed similarly to the various methods of forming the secondary seals 152 and 152A-I described above, and may be similar to or different from the releasable vacu-seal 1152J. In some embodiments, the fasteners of the releasable vacu-seal 1152J are disposed outside of the primary seal 151J relative to the access port 108 (rather than between the primary seal 151J and the access port 108), such that the fasteners may be omitted from the secondary seal 152J.

[0043] 13A, 13B, 13C, 13D, 14A, 14B, 15A, 15B, 15C, 16A, 16B, 16C show examples of temporary protective vacuum seal systems for an x-ray machine enclosure with an access port. Systems 100K-N may be similar to systems 100 and 100A-J described above, having similar components. For example, temporary covers 1154K-N and releasable vacuum seals 1152K-N may be similar to releasable vacuum seals 1152 and 1152J, etc. Covers 1156K-N may be similar to covers 154, 154A-H, 1156 and 1156J, etc. However, in some embodiments, secondary seals similar to secondary seals 152 and 152A-J may be omitted.

[0044] 15A to 16C, in some embodiments, the system 100M or 100N can include different types of access ports 108M-1 to 108M-2 and covers 1156M-1 and 1156M-2 (shown in FIGS. 15B and 15C) or access ports 108N-1 and 108N-2 (shown in FIGS. 16A and 16B). Multiple temporary covers 1154M or 1154N and multiple covers 1156M or 1156N can be used with their multiple access ports 108. Although two covers 1156M or 1156N are used as an example, in other embodiments, the number of access ports 108 and the corresponding covers 1156M or 1156N can be more than two.

[0045] 17A-17B show an example of a protective vacuum seal system for a multi-emitter x-ray device inside an enclosure. With reference to FIGs. 17A and 17B, a system 100O including an x-ray device 101O may be similar to systems 100 and 100A-N, etc., including similar components. In some embodiments, the x-ray device 101O may include multiple x-ray sources 110-1 through 110-S, each including a respective cathode 120 and anode 130, where there are S x-ray sources 110, where S is an integer greater than 1.

[0046] Each cathode 120 can include a cathode stack 1722, with each cathode stack 1722 including a number of plates 1724. Each cathode 120 can include P plates 1724-1 through 1724-P in an aligned vertical stack configuration. However, the plates 1724 can have any suitable physical arrangement, configuration, or arrangement. The plates 1724 can include electrodes, grids, meshes, spacers, emitters, dielectrics, insulators, and the like.

[0047] Due to space constraints and other factors, it may be difficult to accurately arrange the plates 1724 of the cathodes 120 within the enclosure 102. The X-ray device 101O may include one or more cathode modules 1720, each with one or more cathodes 120. Although one cathode module 1720 is used as an example, in other embodiments, the X-ray device 101O may include any number of cathode modules 1720, each with one or more cathodes 120, including different numbers of cathodes 120 for different cathode modules 1720.

[0048] The cathode module 1720 can be assembled prior to installation within the enclosure 102. More specifically, the cathodes 120-1 to 120-S can be pre-assembled within the cathode module 1720 prior to installation of the cathode module 1720 within the interior volume 106. As used herein, a pre-assembled cathode 120 refers to a cathode having a plurality of plates 1724 and / or other components secured in a particular arrangement, such as plates 1724-1 to 1724-P secured in an arrangement stack, etc. In some embodiments, the plates 1724-1 to 1720-P of each cathode 120-1 to 120-S can be secured in a particular arrangement within the cathode module 1720 by fasteners 1726, such as screws, bolts, rivets, pins, etc. The present disclosure is not limited in this respect.

[0049] In some embodiments, the cathodes 120 may be implemented on respective portions or sections of the plates 1724. For example, the cathode stacks 1722-1 through 17220S may share plates 1724-1 through 1724-P. The cathodes 120 are implemented in respective stacks 1722 of the plates 1724. For example, the stack 1722-1 of the cathode 120-1 may include sections 1725-1-1 through 1725-1-P of the plates 1724-1 through 1724-P, the stack 1722-2 of the cathode 120-2 may include sections 1725-1-1 through 1725-1-P, the stack 1722-S of the cathode 120-S may include sections 1725-S-1 through 1725-SP, etc. The stack 1722 of cathode plates 1724-1 through 1724-P and corresponding cathodes 120-1 through 120-S may be secured in a particular arrangement by fasteners 1726. Although cathodes 120 sharing all of the plates 1724 has been used as an example, in other embodiments, less than all of the plates 1724 may be shared between the cathodes 120, including only one of the plates 1724.

[0050] During operation, a selected cathode 120 can be configured to generate an electron beam 124 that can be directed to a target 132 on a corresponding anode 130. Precise targeting of the electron beam 124 can be based on precise alignment between the cathode 120 and the corresponding anode 130 (as well as precise alignment of the cathode stack 1722 itself). However, precise alignment of the cathodes 120 within the enclosure 102 can be difficult due to space constraints and other issues. To address these and other issues, the cathode module 1720 and / or the enclosure 102 can include a cathode mount 1729. The cathode mount 1729 can be configured to set the location, orientation, and / or alignment of the cathode module 1720 and corresponding pre-assembled cathodes 120-1 to 120-S within the enclosure 102. The cathode mounts 1729 may be configured to precisely align the location and / or orientation of the electron beam 124 generated by each cathode 120 with the corresponding target 132. In some embodiments, the cathode mounts 1729 are configured to securely fix the location, orientation, and / or alignment of the cathode modules 1720 (and / or corresponding cathodes 120-1 through 120-S). Alternatively or additionally, the cathode mounts 1729 may be configured to precisely adjust the location, orientation, and / or alignment within the cathode modules 1720 while they are positioned and / or sealed within the enclosure 102. The cathode mounts 1729 may include fasteners similar to the fasteners 1726 used to secure the cathode stacks 1722 to the support structure 1920, flanges, portions of the body 104 or enclosure 102, insulating standoffs, etc.

[0051] The enclosure 102 can include an access port 108 that can be selectively vacuum sealed using a seal system 150O. The seal system 150O can include one or more of the protective vacuum seal systems 150 disclosed herein, such as the protective vacuum seal systems 150A to 150H shown in FIGS. 1 to 10B, the protective vacuum seal systems 150I to 150N shown in FIGS. 11A to 16C, or the like including various releasable vacuum seals 1152.

[0052] 18 shows an example of a protective vacuum seal system for a multi-emitter x-ray device inside an enclosure with multiple access ports. In some embodiments, system 100P including x-ray device 101P may be similar to systems 100 and 100A-O, etc., and include similar components. X-ray device 110P may include multiple cathode modules 1720P-1 to 1720P-M, including cathodes 120 corresponding to anodes 130, where M is any integer greater than 1. Thus, x-ray source 110 may include M×S x-ray sources capable of generating M×S beams of x-ray radiation.

[0053] The enclosure 102 may include M access ports 108-1 to 108-M, where each access port 108 is configured to provide access to the interior volume 106. In some embodiments, the access ports 108 may be configured to correspond to and provide access to a respective cathode module 1720P and anode 130. In some embodiments, the system 100P further includes cathode mounts 1729P-1 to 1729P-M, which may be configured to fix the position, orientation, and / or arrangement of each cathode module 1720P-1 to 1720P-M within the enclosure 102, as disclosed herein.

[0054] The seal system 150P can be configured to vacuum seal each access port 108-1 to 108-M. The protective vacuum seal systems 150P-1 to 150P-M can comprise one or more of the protective vacuum seal systems 150, 150A to 150N, etc., as disclosed herein.

[0055] The cathode modules 1720P-1 to 1720P-M may each include a respective electrical feedthrough 1825-1 to 1825-M. The electrical feedthrough 1825 of the cathode module 1720P may be configured to provide power, signals, control voltages, etc., such as emitter voltages, grid voltages, etc. from a control system, voltage generators, etc. of the system 100P to the respective cathodes 120-1 to 120-S.

[0056] The system 100P may further include an internal electrical connection 1805 that may be coupled to each of the cathode modules 1720P-1 to 1720P-M. The internal electrical connection 1805 may be coupled to each of the cathodes 120 of each of the cathode modules 1720P (e.g., in a daisy chain configuration, a series connection, etc.). In some embodiments, the internal electrical connection 1805 includes a common internal ground that may be coupled to a ground connection of each of the cathodes 120 (e.g., coupled to a ground plate, etc.). The internal electrical connection 1805 may be coupled to a common electrical feedthrough 1815 of the X-ray device 101P. Because the common electrical feedthrough 1815 is coupled to each of the cathodes 120 by the internal electrical connection 1805 between the cathode modules 1720, the common electrical feedthrough 1815 may be used to apply a common voltage to the cathodes 120-1 to 120-S of each of the cathode modules 1720P-1 to 1720P-M. A common voltage can be applied even if one or more of the individual electrical feedthroughs 1825-1 through 1825-M fail. The redundancy provided by the internal electrical connections 1805 and the common electrical feedthrough 1815 can be used to extend the usable life of the x-ray source 110.

[0057] 19A-19B show examples of cathode modules having multiple fasteners, according to some embodiments. FIGS. 19A and 19B show a top-to-front view and a top view of a cathode module 1720Q comprising cathode stacks 1722-1 through 1722-5. Five cathodes 120, each with six emitters 1927, are used as an example, but in other embodiments, the number of cathodes 120 and / or the number of emitters 1927 may vary. The cathodes 120 may be arranged in a substantially linear configuration. The internal electrical connections 1805Q-1 and 1805Q-2 may be coupled to the respective cathodes 120, to a common electrical feedthrough 1815, and / or to one or more other cathode modules 1720, as described above.

[0058] The cathode stack 1722 may be secured to a support structure 1920 of the cathode module 1720Q. The support structure 1920 may comprise any suitable mechanism for securing the cathode stack 1722 in a particular arrangement, such as a substrate, layer, plate, panel, sheet, base, etc. In some embodiments, the support structure 1920 may include a focusing electrode 1922 of the cathode stack 1722. The focusing electrode 1922 may be configured to focus and / or direct the electron beam 124 generated by each cathode 120 onto the corresponding anode 130. The cathode mount 1925 may be configured to secure the cathode module 1720Q to an interior of the enclosure 102 (e.g., securing the cathode module 1720Q to a cathode mount 1729 inside the enclosure 102, as disclosed herein). As described in more detail below, the cathode mount 1925 may be configured to align the cathode module 1720Q with other components, such as the anode 130.

[0059] To distribute clamping and / or other forces, a side of each cathode stack 1722 may be secured by a group or set of fasteners 1726 (fastener set 1926). Each fastener set 1926 may be disposed between adjacent cathodes 120 of the cathode module 1720Q. The fasteners 1726 may be secured to the support structure 1920 through openings formed through plates of the cathode stack 1722. However, the disclosure is not limited in this respect and a fastener set 1926 including any suitable number of fasteners 1726 and / or any suitable type of fasteners 1726 may be utilized. An appropriate number of fasteners 1726 in a fastener set 1926 may be determined to ensure consistent contact and / or load distribution along a side of each cathode stack 1722, for example, by testing, experience, simulation, design constraints, etc.

[0060] The use of multiple fasteners 1726 can complicate manufacturing and lead to defects. Drilling and tapping precisely aligned openings (e.g., screw holes) for each fastener 1726 in each fastener set 1926-1 through 1926-6 can be difficult. Furthermore, installing and tightening each of the fasteners 1726 to the proper torque while maintaining cathode alignment and avoiding damage can be tedious and time consuming.

[0061] 20A-22B show examples of cathode modules having at least one compression plate, according to some embodiments. The compression plate(s) 2026 can be configured to provide consistent contact along the sides of each cathode stack 1722 and distribute clamping and other forces while reducing the amount of fasteners 1726 used to secure each cathode stack 1722 to the support structure 1920 with a desired precision.

[0062] 20A and 20B, the cathode module 1720R may be similar to the cathode module 1720 described above. The cathode stacks 1722 of the cathode module 1720R may be secured and / or clamped to the support structure 1920R by a compression plate 2026. The compression plate 2026 may include a plate, a rigid plate, a compression plate, a sheet, a clamp, a panel, or the like. The compression plate 2026 may be configured to evenly distribute or increase the uniformity of the distribution of clamping load and / or force across each side of each cathode stack 1722. The compression plate 2026 may be configured to secure the cathode plates 1724-1 to 1724-P and / or the cathode stacks 1722-1 to 1722-M in alignment with the focusing electrode 1922R. The compression plate 2026 may be secured using a single opening and corresponding fastener 1726 disposed between adjacent cathodes 120 of the cathode module 1720R. For example, a single opening in the cathode stack 1722 and corresponding fastener 1726 may be disposed between each pair of adjacent cathodes 120 of the cathode module 1720R. Additionally, a single opening and corresponding fastener 1726 may be disposed at each end of the cathode stack 1722. Thus, the fasteners 1726 are disposed adjacent both sides of each cathode stack 1722.

[0063] 21A and 21B, the cathode module 1720S includes a plurality of compression plates 2026S-1 to 2026S-6, each positioned along the side and / or between a respective cathode stack 1722 or cathodes 120, such that a compression plate 2026S is positioned adjacent either side of each cathode stack 1722. Each compression plate 2026S-1 to 2026S-6 can be secured and / or clamped to the support structure 1920S by one of the fasteners 1726-1 to 1726-6.

[0064] The compression plate(s) 2026 can reduce the amount of fastener openings formed through the cathode stack 1722. The compression plate(s) 2026 can reduce the number of fastener openings required to secure the cathode stack 1722 of the cathode module 1720 by (F-1) x (S+1), where F is the number of fasteners 1726 required to secure the cathode stack 1722 without the benefit of the compression plate(s) 2026, and S is the number of cathode stacks 1722 implemented by the cathode module 1720 (e.g., 6 fastener openings compared to 18 fastener openings for F=3 and S=5 as in Figures 19A-21B). In various embodiments described herein, a single fastener 1726 can be placed between the cathodes 120 through the use of the compression plate(s) 2026, or the like. Therefore, fewer openings and fasteners can be used in the cathode module 1720.

[0065] Although a substantially straight or flat cathode module 1720 has been used as an example, in other embodiments, the cathode module 1720 may have a different configuration. With reference to Figures 22A-22B, in some embodiments, the cathode module 1720T may be configured to arrange the cathodes 120-1 to 120-8 in a curved or arcuate shape. The cathode plates 1724-1 to 1724-P and corresponding focusing electrodes 1922T may be formed in a curved or arcuate shape, resulting in a corresponding stiffening or arcuate arrangement of the respective cathodes 120 and cathode stacks 1722.

[0066] 22B illustrates an example of an x-ray source 110 comprising multiple cathode modules 1720T-1 and 1720T-2, each comprising a respective cathode 120-1-1 through 120-1-8 and 120-2-1 through 120-2-8. The cathode modules 1720T-1 and 1720T-2 may be coupled to internal electrical connections 1805T-2. The cathode modules 1720T-1 and 1720T-2 may be coupled to other cathode modules 1720 and / or to a common electrical feedthrough 1815 by internal electrical connections 1805T-1 and / or 1805T-3.

[0067] 23 illustrates an example of an X-ray device including an anode assembly according to some embodiments. System 100U may be similar to systems 100, 100A-P, etc., described above, including similar components. X-ray device 101U may include a cathode 2320U including various cathodes 120, cathode modules 1720, etc., as described above. X-ray device 101U includes an anode assembly 2330 with a corresponding anode 130. X-cathode 120 and anode 130 may be part of X-ray device 101U, where X is an integer greater than 1.

[0068] During operation, electrons emitted by a selected cathode 120 of the X-ray source 110 are directed toward the target 132 of the corresponding anode 130. The electrons may be accelerated into an electron beam 124 by a voltage difference created between the cathode 120 and the anode 130. To maintain this voltage difference, the anode 130 may be electrically isolated from the cathode 120 and / or other components of the X-ray source 110, such as the body 104 of the enclosure 102. In some embodiments, the anode assembly 2330 may be secured within the enclosure 102 by supports 2335. The supports 2335 may be further configured to electrically insulate the anode assembly 2330 from other components of the enclosure 102 and / or the X-ray source 110, and may include, for example, a non-conductive, electrically insulating material, such as ceramic, ceramic-ceramic composite, porcelain, etc. In some embodiments, the support 2335 may be configured to cool the anode assembly 2330, such as in U.S. Patent Application Publication No. 17 / 173,036, filed February 10, 2021, the contents of which are incorporated herein in their entirety.

[0069] The anode assembly 2330U is secured within the enclosure 102 by L supports 2335U-1 to 2335U-L to maintain the anodes 130 in alignment with one another and / or with other components of the X-ray source 110. In some embodiments, the anode assembly 2330U may include 96 anodes 130 and may be secured within the enclosure 102 by 8 supports 2335U (e.g., X=96 and L=8). The supports 2335U-1 to 2335U-L may be arranged in any suitable manner. In some embodiments, the supports 2335U may be separated by an offset distance 2304, e.g., each support 2335U may be separated from an adjacent support 2335U by an offset distance 2304.

[0070] The use of multiple supports 2335U and / or other physical contacts with the enclosure 102 may have significant drawbacks. Thermal expansion of the anode assembly 2330U may cause distortions in structural elements of the x-ray device 101U, potentially resulting in damage or even structural failure. For example, when the anode 130 is targeted by the electron beam 124, a significant portion of the corresponding energy may be converted into heat (e.g., 90% or more). For example, the electron beam 124-4 may heat the anode 130-4, causing the anode assembly 2330U to thermally expand in the directions 2316 and 2318. This thermal expansion increases the effective length of the anode assembly 2330U, thereby forcing the supports 2335U-1 and 2335U-2 to move further apart. Thus, thermal expansion of the anode assembly 2330U during operation may distort or even destroy structural elements such as one or more anode supports 2335U, the body 104 of the enclosure 102, and the anode assembly 2330U itself. Furthermore, it may not be practical to use flexible mounting mechanisms to mitigate the adverse effects of thermal expansion. For example, flexible support mechanisms may not be suitable to properly stabilize and / or secure the anode 130 in alignment with the corresponding cathode 120. These and other issues may be addressed by segmenting the anode assembly 2330.

[0071] 24A-24B show an example of an x-ray device having a segmented anode assembly according to some embodiments. The system 100V may be similar to the system 100U described above. However, the anode assembly 2330V includes multiple structurally independent anode modules 2430. The anode assembly 2330V shown in FIG. 24A includes X anodes 130 distributed across M structurally independent anode modules 2430-1 through 2430-M. Each of the M anode modules 2430 of the anode assembly 2330 may include a respective subset of the X anodes 130. In some embodiments, the number of anodes 130 may be the same for each anode module 2430, while in other embodiments, the number may be different.

[0072] The anode modules 2430 of the anode assembly 2330V can be configured to be structurally independent. In other words, each of the anode modules 2430 of the anode assembly 2330 can be secured and / or stabilized within the enclosure 102 independent of any of the other anode modules 2430 of the anode assembly 2330. In some embodiments, each anode module 2430 can be supported in the enclosure 102 by a single support 2335. Each of the supports 2335 can be structurally independent from any other one(s) of the supports 2335. Although a single support 2335 is shown, in some embodiments, one to all of the anode modules 2430 can be supported by multiple supports 2335, respectively.

[0073] In some embodiments, the anode modules 2430 may be physically separated from one another by gaps 2402. The gaps 2402 may structurally separate each anode module 2430 from adjacent anode modules 2430. The gaps 2402 may be configured such that thermal expansion of one or more of the anode modules 2430 does not contact or otherwise impose structural forces or strains on the other anode modules 2430 and thus the support 2335 and the enclosure 102. The size of the gaps 2402 may accommodate the maximum range of thermal expansion of the anode modules 2430, which may be determined by testing, experience, simulation, design considerations, etc. For example, an operating temperature range may include from about 25 degrees Celsius (°C) to about 1100°C. The gaps 2402 over such a temperature range may include from about 0.1 millimeters (mm) to about 10 mm.

[0074] In some embodiments, the support 2335 can include a feedthrough 2435. During operation, the feedthrough 2435 can be configured to maintain a voltage difference between the anode module 2430 and other components, such as the cathode 120.

[0075] In some embodiments, the anode modules 2430 may be coupled to a common anode feedthrough 2415 by flexible internal electrical connection(s) 2405, as shown in FIG. 24A or 24B. The flexible internal electrical connections 2405 may be configured to maintain the structural independence of the anode modules 2430. The flexible internal electrical connections 2405 may include flexible and / or non-structural components, such as, for example, cables, ribbons, ribbon cables, flexible wiring, flexible conduits, etc. In some embodiments, the support 2335 may not include a feedthrough 2435.

[0076] Although a single access port 108 is used as an example in Figures 23 to 24B, in some embodiments there may be multiple access ports 108, such as multiple access ports 108-1 to 108-M, 108-1 to 108-N, etc.

[0077] Although the anode assembly 2330 is shown as being substantially straight or flat, in other embodiments, the anode assembly 2330 may be of a different configuration or orientation. Figures 25A-26C show examples of segmented anode assemblies according to some embodiments. Figures 25A, 25B, and 25C are perspective, top, and front views of an embodiment of an anode module 2430W configured to arrange the anodes 130-1 to 130-6 in a curved or arcuate configuration. The body 2504 of the anode module 2430W can include guide openings 2508 that form collimators 2509 configured to direct the emitted x-ray radiation 134 in a particular direction to the respective targets 132-1 to 132-6.

[0078] The support 2335W may be similar to the support 2335 described above. The collar 2532 of the support 2335W may be attached (e.g., by welding, brazing, etc.) to the body 2504 of the anode module 2430W. The body 2535 of the support 2335W may include a non-conductive, electrically insulating material, such as a ceramic support member, such as a ceramic cylinder, cylinder, or other suitable structure, as disclosed herein. The mounting member 2534 of the support 2335W may be configured to be mounted inside the enclosure 102 and may include, for example, screws, bolts, welded attachments, etc. In some embodiments, the anode module 2430W further comprises an anode feedthrough 2435W, which may be formed inside or through the support 2335W. Alternatively or additionally, the anode modules 2430W may be electrically coupled to a common anode feedthrough 2415 by one or more flexible internal electrical connections 2405W-1 and / or 2405W-2, which may be configured to maintain the structural independence of the anode modules 2430W as disclosed herein.

[0079] 26A, 26B, and 26C show examples of anode assemblies 2330X including two or more anode modules 2430X, including 2430X-1 and 2430X-2, where each anode module 2430X is similar to anode module 2430 or 2430W. In some embodiments, each anode module 2430X includes a respective anode feedthrough 2435X. Alternatively, or in addition, the anode modules 2430X may be electrically interconnected by one or more flexible internal electrical connections 2405X-1 to 2405X-3 as disclosed herein.

[0080] 27 is a flow diagram of an example method 2700 for operating the X-ray source 110 of the X-ray device 101. The method 2700, and other methods disclosed herein, may be performed by one or more of the systems 100 and / or 100A-X, the X-ray devices 101 and / or 101A-X, and / or the seal systems 150 and / or 150A-V (and / or variations thereof) disclosed herein. At 2710, the X-ray source 110 may be configured to generate X-ray radiation 134 as disclosed herein. During operation of 2710, components of the X-ray source 110 may be vacuum-sealed to the interior of the enclosure 102 by the seal system 150. The seal system 150 may be configured to vacuum-seal the access port 108 of the enclosure 102. In some embodiments, the X-ray source 110 can include one or more cathode modules 1720, each including one or more cathodes 120 (e.g., cathodes 120-1 through 120-S). The X-ray source 110 can further include an anode assembly 2330 that includes a plurality of structurally independent anode modules 2430, as disclosed herein.

[0081] At 2720, a fault may be detected associated with a component of the X-ray source 110. The fault may relate to a component of the cathode 120 of the X-ray source 110, such as the emitter 122.

[0082] At 2730, the sealing system 150 can be used to remove the primary vacuum seal 151 from the access port 108 while protecting the interior volume 106 of the enclosure 102 from contamination. In some embodiments, the sealing system 150 includes a secondary seal 152 disposed between the primary seal 151 and the access port 108, the secondary seal 152 configured to protect the interior volume 106 from contamination during removal of the primary seal 151. Alternatively, the enclosure 102 may be vacuum sealed by a releasable vacuum seal 1152 of the sealing system 150. The releasable vacuum seal 1152 may be removed at 2730 without contaminating the enclosure 102, as disclosed herein.

[0083] At 2740, the component associated with the fault detected at 2720 may be repaired and / or replaced via the access port 108, and the enclosure 102 may be resealed as disclosed herein.

[0084] 28 is a flow diagram illustrating an example of a method 2800 for a protective vacuum seal. At 2810, an access port 108 of an enclosure 102 comprising an x-ray source 110 may be vacuum sealed by a first vacuum seal 151 and a corresponding secondary seal 152. At 2810, a first cover 154 may be sealed over the access port 108 by the primary vacuum seal 151, and the secondary seal 152 may be disposed between the primary vacuum seal 151 and the interior volume 106 of the enclosure 102. The primary seal 151 may include a permanent long-term seal, such as a weld, a permanent bond, or the like. Alternatively, the first vacuum seal may comprise a releasable vacuum seal 1152, which is configured to seal a temporary cover 1154 over the access port 108 as disclosed herein.

[0085] At 2820, the first vacuum seal may be removed from the access port 108 of the enclosure 102. Removing the first vacuum seal 151 may further include protecting the interior volume 106 of the enclosure 102 from contamination while removing the secondary seal 152, as described above. In some embodiments, the interior volume 106 may be protected from contamination by the secondary seal 152 maintained between the primary vacuum seal 151 and the access port 108. The primary vacuum seal 151 may be removed by milling or other debris generating process(es), and the secondary seal 152 may be configured to block the resulting debris from contaminating the enclosure 102. Alternatively, the first vacuum seal may comprise a releasable seal 1152 configured to be removed without the use of any debris generating process. The releasable seal 1152 may comprise one or more mechanical seals, as disclosed herein.

[0086] In some embodiments, the first vacuum seal may be removed at 2820 in response to a failure of a component of the X-ray source 110. The failed component may be identified during initial validation testing of the X-ray device 101, during use of the X-ray device 101 in a production environment, etc.

[0087] At 2830, the access port 108 of the enclosure 102 may be resealed with a second vacuum seal. The access port 108 may be resealed in response to repairing and / or replacing one or more failed components of the x-ray source 110 through the access port 108 (e.g., in response to removing the first vacuum seal at 2820). The second vacuum seal may be configured to permanently seal the second cover 154 over the access port 108 (e.g., production cover 1156). In some embodiments, the second vacuum seal includes a primary vacuum seal 151 and a secondary seal (e.g., secondary seal 152) as disclosed herein.

[0088] 29 is a flow diagram of an example of a method 2900 for manufacturing an x-ray device 101. At 2910 to 2920, a cathode module 1720 including a plurality of cathodes 120 can be assembled. At 2910, a plurality of openings can be formed through a cathode stack 1722 of the cathode module 1720. The openings can be formed through a plurality of plates 1724 including the cathode stack 1722 as disclosed herein. At 2920, the plurality of plates 1724 of the cathode stack 1722 can be secured in a specific arrangement between a compression plate 2026 of the cathode module 1720 and a support structure 1920 by a plurality of fasteners 1726. The fasteners 1726 can be secured to the support structure 1920 through respective openings of the plurality of openings as shown in FIG. 20A to FIG. 22B.

[0089] In some embodiments, an opening is formed through the cathode stack 1722 at 2910 such that a single opening is disposed between each adjacent pair of cathodes 120 of the plurality of cathodes 120 of the cathode module 1720. Assembling the cathode module 1720 may further include clamping the cathode stack between a compression plate 2026 and a support structure 1920 by a plurality of fasteners 1726. Alternatively, or in addition, the cathode stack 1722 may be clamped between the support structure 1920 and the plurality of compression plates 2026. In these embodiments, assembling the cathode module 1720 may further include clamping a respective compression plate 2026 between each pair of adjacent cathodes 120 by a single fastener 1726 secured to the support structure 1920 through a single opening disposed between the adjacent pair of cathodes 120. The assembled cathode module 1720 may be configured to be installed in the internal volume 106 of the enclosure 102 of the X-ray source 110 via the access port 108 as disclosed herein (e.g., the access port may be configured to receive the pre-assembled cathode module 1720 in the internal volume 106).

[0090] 30 is a flow diagram of another example of a method 2902 for manufacturing the x-ray device 101. The method 2902 can include forming an anode assembly 2330 including a plurality of anodes 130, the plurality of anodes 130 being distributed across a plurality of structurally independent anode modules 2430. At 2912, a plurality of anode modules 2430 of the anode assembly 2330 can be formed, each anode module 2430 including one or more anodes 130 (e.g., each anode module 2430 includes a respective subset of the anodes 130 of the anode assembly 2330). At 2922, each anode module 2430 of the anode assembly 2330 can be secured within the enclosure 102 of the x-ray source 110 by a respective single support 2335 of the multiple supports 2335, for example, each anode module 2430 of the anode assembly 2330 formed at 2912 can be secured within the enclosure 102 by a separate structurally independent support 2335 as disclosed herein. In some embodiments, each anode module 2430 of the anode assembly 2330 can be separated from other adjacent anode modules 2430 by one or more gaps 2402 as disclosed herein.

[0091] In some embodiments, the feedthroughs 2435 of the anode modules 2430 may be formed through the supports 2335. Alternatively, or in addition, the anode modules 2430 may be coupled to a common anode feedthrough 2515 by flexible internal electrical connections 2405 as disclosed herein.

[0092] 31 is a flow diagram of another example of a method 2904 for manufacturing an X-ray device 101. The method 2904 may include manufacturing the X-ray source 110 inside the vacuum-sealed enclosure 102. The method 2904 may further include validation testing and / or recovery from validation failure of the X-ray source as disclosed herein. At 2914, the cathode module 1720 of the X-ray source 110 may be assembled prior to installation in the enclosure 102. 2914 may include pre-assembling the cathode module 1720 separately and / or independently from other components of the X-ray source 110. The cathode module 1720 may be assembled according to the method 2900 of FIG.

[0093] At 2924, the assembled cathode module 1720 may be installed in the enclosure 102 of the X-ray source 110. The cathode module 1720 may be installed through the access port 108 of the enclosure 102. The assembled cathode module 1720 may be secured by the cathode mount 1729 and / or one or more cathode mounts 1925 as disclosed herein. The assembled cathode module 1720 may be installed in a final stage of the manufacturing process of the X-ray source 110. As used herein, final stage refers to a stage of the manufacturing process following the completion of one or more other stages or steps. For example, the pre-assembled cathode module 1720 may be installed following the anode assembly 2330 of the X-ray source 110, e.g., following the completion of the anode assembly method 2902 of FIG.

[0094] At 2934, the access port 108 of the enclosure 102 may be vacuum sealed by a seal system 150, as disclosed herein. The seal system 150 may comprise a primary vacuum seal 151 and a secondary seal 152, as disclosed herein, configured to protect the interior volume 106 from contamination during removal of the primary vacuum seal 151. Alternatively, the seal system 150 may comprise a releasable vacuum seal 1152, as disclosed herein.

[0095] At 2944, the functionality of the X-ray source 110 within the vacuum sealed enclosure 102 may be tested and / or verified. If the X-ray source 110 passes the verification test, flow continues at 2964. However, if at 2944 one or more components of the X-ray source 110 fail the verification test, flow may continue at 2954. At 2954, the seal system 150 may be used to repair or replace one or more components of the X-ray source 110. In some embodiments, the vacuum seal on the access port 108 may be removed by breaking the primary seal 151 (e.g., by removing the cover 154 from the access port 108 in a debris generation process). In these embodiments, the interior volume 106 of the enclosure 102 may be protected from contamination by the secondary seal 152. Alternatively, the access port 108 may be exposed by removing the releasable vacuum seal 1152 as disclosed herein. At 2954, the seal system 150 may be further configured to reseal the enclosure 102 to allow testing and validation to resume at 2944. Resealing the access port 108 may include reforming the primary seal 151 (e.g., by welding a new cover 154 over the access port 108). Alternatively, the access port 108 may be vacuum sealed with a releasable vacuum seal 1152 as disclosed herein (e.g., by resealing a temporary cover 1154 over the access port 108).

[0096] At 2964, testing and validation of the X-ray source 110 may be successfully completed. Manufacturing of the X-ray device 101 may be completed. In some embodiments, the primary seal 151 and corresponding secondary seal 152 formed by the sealing system 150 may be retained when the X-ray source 110 is put into service. In other embodiments, the releasable vacuum seal 1152 may be removed and replaced with the primary vacuum seal 151. The primary vacuum seal 151 may be configured to vacuum seal a product cover 1156 over the access port 108 (replacing the temporary cover 1154 utilized during testing and validation).

[0097] In an embodiment, the number of fasteners 1726 used to secure the cathode stacks 1722 to the support structure 1920 of the assembled cathode modules 1720 is greater than the number of cathode mounts 1729, 1925 for mounting, securing, or arranging the assembled cathode modules 1720 in or to the body 104 of the enclosure 102. The number of fasteners 1726 used to secure the cathode stacks 1722 to the support structure 1920 of the assembled cathode modules 1720 may be two, four, or eight times greater than the number of cathode mounts 1729, 1925 for mounting, securing, or arranging the assembled cathode modules 1720 in or to the body 104 of the enclosure 102.

[0098] The X-ray device 101 includes access ports 108, 108M, 108N configured to receive the cathode 120 inside an internal volume of an enclosure 102 of the X-ray device 101, first vacuum seals 151, 151A-N configured to seal covers over the access ports 108, 108M, 108N, and second seals 152, 152A-J configured to seal covers over the access ports 108, 108M, 108N, the second seals 152, 152A-J being maintained between the first vacuum seals 151, 151A-N and the internal volume of the enclosure 102 while the first vacuum seals 151, 151A-N are removed.

[0099] In some embodiments, a first vacuum seal 151, 151A-N is formed in a first path around the access port 108, 108M, 108N, and a second seal 152, 152A-J comprises a physical overlap between the cover and the enclosure 102 in a second path around the access port 108, 108M, 108N, the second path being disposed between the first path and the periphery of the access port.

[0100] In some embodiments, the access port 108 , 108M, 108N is one of multiple access ports, each configured to receive a cathode 120 within the interior volume 106 of the enclosure 102 of the x-ray device 101 .

[0101] In some embodiments, the secondary seal 152, 152A-J includes a protrusion 1004 configured to mate with a channel 1002 formed within the outer surface of the enclosure 102 and one or more of the inner surfaces of the covers 154, 154A-H, 1154, 1154J-N.

[0102] In some embodiments, the X-ray device 101 further comprises a releasable mechanism 1152, 1152J to N configured to seal a temporary cover 1156, 1156J to N over the access port 108, 108M, 108N, and the first vacuum seal 151, 151A to N is configured to replace the releasable vacuum seal 1152, 1152J to N with a permanent vacuum seal.

[0103] In some embodiments, the cathode 120 is one of multiple cathodes 120 of the x-ray device 101. The access ports 108, 108M, 108N are configured to receive pre-assembled cathode modules 1720, 1720O-T that include multiple cathodes 120, the pre-assembled cathodes including a cathode stack 1722 that includes multiple plates 1724 fixed in a specific arrangement.

[0104] In some embodiments, each of the cathodes 120 includes multiple emitters 1927.

[0105] In some embodiments, the x-ray device 101 comprises a plurality of openings formed through the plates of the cathode stack 1722, a plurality of fasteners 1926, each fastener secured to the support structure 1920 of the cathode modules 1720, 1720O-T through a respective opening of the plurality of openings formed through the cathode stack 1722, and compression plates 2026, 2026S-T, where a single opening of the plurality of openings formed through the cathode stack 1722 is disposed between adjacent pre-assembled cathodes of the cathode modules 1720, 1720O-T, and the fastener 1926 configured to secure the cathode stack 1722 between the compression plates 2026, 2026S-T and the support structure 1920.

[0106] In some embodiments, the x-ray device 101 further includes a plurality of cathode modules 1720, 1720O-T, each cathode module 1720, 1720O-T comprising one or more cathodes and a compression plate 2026, 2026S-T configured to secure a cathode stack 1722 of one or more cathodes to a focusing electrode, and at least one internal electrical connection coupled between the cathode modules 1720, 1720O-T and the plurality of cathode modules 1720, 1720O-T.

[0107] In some embodiments, the x-ray device 101 further comprises an anode assembly including a plurality of anode modules 2430, 2430W to X, each anode module 2430, 2430W to X including one or more anodes, and a plurality of supports, each support configured to secure a respective one of the plurality of anode modules of the anode assembly within the interior volume of the enclosure 102, and each anode module of the anode assembly being secured by a single support of the plurality of supports.

[0108] Some embodiments include a method, the method comprising sealing an access port 108, 108M, 108N of an enclosure 102 with a first vacuum seal 151, 151A-N and a secondary seal 152, 152A-J, 1152, 1152J-N, the enclosure 102 having an interior volume that contains an x-ray source; sealing the access port 108, 108M, 108N of the enclosure with the first vacuum seal 151, 151A-N. removing the first vacuum seals 151, 151A to N, including protecting the interior volume of the enclosure 102 from contamination with secondary seals 152, 152A to J, 1152, 1152J to N while removing the first vacuum seals 151, 151A to N, and resealing the access ports 108, 108M, 108N of the enclosure 102 with the first vacuum seals 151, 151A to N after removing the first vacuum seals 151, 151A to N.

[0109] In some embodiments, sealing the access ports 108, 108M, 108N includes forming a secondary seal 152, 152A-J, 1152, 1152J-N between a first vacuum seal 151, 151A-N and the interior volume of the enclosure, and sealing a first cover over the access ports 108, 108M, 108N with the first vacuum seal 151, 151A-N.

[0110] In some embodiments, resealing the access ports 108, 108M, 108N further includes reforming the secondary seals 152, 152A-J, 1152, 1152J-N.

[0111] In some embodiments, the first vacu-seal 151, 151A-N includes a weld that joins the cover to the enclosure, and removing the first vacu-seal 151, 151A-N includes milling the weld.

[0112] In some embodiments, the method further includes forming releasable vacuum seals 1152, 1152J-N configured to seal a temporary cover over the access ports 108, 108M, 108N of the enclosure 102 before sealing the access ports 108, 108M, 108N with first vacuum seals 151, 151A-N and secondary seals 152, 152A-J, 1152, 1152J-N, testing the X-ray source 110, removing the releasable vacuum seals 1152, 1152J-N, and sealing the access ports 108, 108M, 108N with the first vacuum seals 151, 151A-N after removing the releasable vacuum seals.

[0113] In some embodiments, the method further includes assembling a cathode module 1720, 1720O-T comprising a plurality of cathodes 120, the cathodes 120 comprising a cathode stack 1722 comprising a plurality of plates 1724 fixed in a specific arrangement, and installing the assembled cathode modules 1720, 1720O-T into an interior volume of the enclosure 102 via access ports 108, 108M, 108N.

[0114] In some embodiments, assembling the cathode modules 1720, 1720O-T includes forming a plurality of openings through the cathode stack 1722 such that a single opening through the cathode stack 1722 is formed between each pair of adjacent cathodes of the cathode modules 1720, 1720O-T, and clamping one or more compression plates 2026, 2026S-T onto the cathode stack 1722 with a plurality of fasteners 1926, each fastener 1926 being placed through a respective opening of the plurality of openings. In some embodiments, a minimum of fasteners can be used to attach the cathode modules 1720, 1720O-T to the body 104 or enclosure 102.

[0115] In some embodiments, the method further includes forming an anode assembly 2330U to X including a plurality of anode modules 2430, 2430W to X, each anode module 2430 including one or more anodes 130, and mounting each anode module 2430, 2430W to X of the anode assembly 2330U to X inside the enclosure 102 by a single support of the plurality of structurally independent supports.

[0116] Some embodiments include an X-ray device 101 comprising a means for generating X-rays, a means for maintaining a vacuum around the means for generating X-rays, the means for maintaining a vacuum including a means for accessing an inner volume of the means for maintaining a vacuum around the means for generating X-rays, a means for vacuum sealing the means for accessing the inner volume, and a means for protecting the inner volume from contamination during removal of the means for vacuum sealing the means for accessing the inner volume.

[0117] Examples of the means for generating x-rays include x-ray source 110, cathode 120, anode 130, etc. Examples of the means for maintaining a vacuum around the means for generating x-rays include enclosure 102, body 104, cover 154, etc. Examples of the means for accessing the inner volume of the means for maintaining a vacuum around the means for generating x-rays include access ports 108, 108M, 108N, etc. Examples of the means for vacuum sealing the means for accessing the inner volume include first vacuum seals 151, 151A-N, etc. Examples of the means for protecting the inner volume from contamination during removal of the means for vacuum sealing the means for accessing the inner volume include secondary seals 152, 152A-J, 1152, 1152J-N, etc.

[0118] In some embodiments, the X-ray device 101 further comprises means for temporarily vacuum sealing the means for accessing the inner volume prior to attaching the means for vacuum sealing the means for accessing the inner volume. Examples include releasable vacuum seals 1152, 1152J-N, temporary covers 1154, etc.

[0119] Some embodiments include an X-ray device 101, the X-ray device 101 including an enclosure 102, an anode assembly 2330U to X including a plurality of anode modules 2430, 2430W to X, each anode module 2430, 2430W to X including one or more anodes 130, and a plurality of supports 2335, 2335W to X, each support 2335, 2335W to X are configured to fix each anode module anode 1302430, 2430W to X of the anode assemblies 2330U to X within the interior volume of the enclosure 102, and each anode module 1302430, 2430W to X of the anode assemblies 2330U to X is fixed by a single support 2335, 2335W to X of the multiple supports 2335, 2335W to X.

[0120] In some embodiments, each anode module anode 1302430, 2430W to X of the anode assemblies 2330U to X is structurally separated from an adjacent anode module 2430, 2430W to X of the anode assemblies 2330U to X by one or more gaps.

[0121] In some embodiments, the gap is configured to structurally isolate each anode module anode 2430, 2430W to X of the anode assemblies 2330U to X from thermal expansion of any of the other anode modules 2430, 2430W to X of the anode assemblies 2330U to X during operation.

[0122] In some embodiments, the x-ray device 101 further comprises flexible electrical connections for each adjacent pair of anode modules 2430, 2430W-X of the anode modules 2430, 2430W-X that electrically connect the pairs of anode modules 2430, 2430W-X to each other.

[0123] In some embodiments, the x-ray device 101 further comprises a common electrical feedthrough that passes through the enclosure 102 and is electrically connected to one of the anode modules 2430, 2430W through X.

[0124] In some embodiments, the support is further configured to electrically insulate the anode modules 2430, 2430W to X of the anode assemblies 2330U to X from at least one of the enclosure 102 and the cathode.

[0125] In some embodiments, the support comprises a ceramic support.

[0126] In some embodiments, each anode module 2430, 2430W-X of an anode assembly 2330U-X includes a respective feedthrough that extends through a single support of the anode module 2430, 2430W-X.

[0127] In some embodiments, each anode module anode 2430 , 2430 W through X includes multiple targets 132 .

[0128] Some embodiments include a method that includes mounting a plurality of anode modules 2430, 2430W-X inside an enclosure of an x-ray device using a single support for each anode module 2430, 2430W-X, where gaps are formed between adjacent anode modules 2430, 2430W-X and 2430, 2430W-X, and where each anode module 2430, 2430W-X includes at least one anode 130, and electrically connecting each of the anode modules 2430, 2430W-X through the enclosure 102 of the x-ray device 101.

[0129] In some embodiments, the method further includes electrically connecting adjacent anode modules 2430, 2430W through X together across associated gaps.

[0130] In some embodiments, the method further includes, for each anode module 2430, 2430W through X, electrically connecting the anode module 2430, 2430W through X through an associated single support.

[0131] In some embodiments, the method further includes electrically connecting each of the anode modules 2430, 2430W to X via a single electrical feedthrough through the enclosure 102 of the x-ray device 101.

[0132] Some embodiments include an X-ray apparatus 101 that includes a means for containing a vacuum, a means for generating an electron beam, a plurality of separate means for generating X-rays within the vacuum, and a means for separately supporting the means for generating X-rays within the vacuum for each of the separate means for generating X-rays within the vacuum.

[0133] Examples of means for containing a vacuum include enclosure 102, body 104, covers 154, 154A-H, 1154, etc. Examples of means for generating an electron beam include cathode 120, etc. Examples of separate means for generating x-rays within a vacuum include anode modules 2430, 2430W-X, etc. Examples of means for individually supporting means for generating x-rays within a vacuum include supports 2335, 2335W-X, etc.

[0134] In some embodiments, the x-ray device 101 further comprises means for electrically connecting to the plurality of separate means for generating x-rays within a vacuum via the means for individually supporting the plurality of separate means for generating x-rays within a vacuum for each of the means for individually supporting the plurality of separate means for generating x-rays within a vacuum, such as a feedthrough 2435.

[0135] In some embodiments, the x-ray device 101 further comprises a single means for electrically connecting through the means for containing the vacuum to the multiple separate means for generating x-rays within the vacuum. An example of a single means for electrically connecting through the means for containing the vacuum includes a feedthrough 2415.

[0136] In some embodiments, the x-ray device 101 further comprises at least one means for flexibly electrically connecting a pair of adjacent separate means for generating x-rays inside a vacuum. Examples of means for flexibly electrically connecting include flexible internal electrical connections 2405, etc.

[0137] Some embodiments include an X-ray device 101 comprising a vacuum enclosure 102 and cathode modules 1720, 1720O-T disposed inside the vacuum enclosure 102, the cathode stack 1722 comprising a support structure, a compression plate 2026, 2026S-T, and a cathode stack 1722 clamped between the support structure and the compression plate 2026, 2026S-T, the cathode stack 1722 including a plurality of plates 1724 fixed in a specific arrangement.

[0138] In some embodiments, the cathode modules 1720, 1720O-T include multiple cathodes, with each cathode 120 including at least one emitter 1927.

[0139] In some embodiments, the x-ray device 101 further includes a plurality of openings formed through the cathode stack 1722, and a plurality of fasteners 1926, each fastener 1926 secured to a support structure of the cathode modules 1720, 1720O-T through a respective opening of the plurality of openings.

[0140] In some embodiments, a single opening of the plurality of openings formed through the cathode stack 1722 and a corresponding single fastener 1926 of the plurality of fasteners 1926 are disposed between adjacent cathodes of the cathode modules 1720, 1720O-T.

[0141] In some embodiments, the compression plate 2026, 2026S-T is one of a plurality of compression plates 2026, 2026S-T, the cathode stack 1722 is clamped between the support structure and the compression plate 2026, 2026S-T, and each fastener 1926 of the plurality of fasteners 1926 is configured to secure the cathode stack 1722 in a particular arrangement between the support structure and a respective one of the compression plates 2026, 2026S-T.

[0142] In some embodiments, the cathode module 1720, 1720O-T is one of a plurality of cathode modules 1720, 1720O-T arranged in the vacuum enclosure 102, and one or more internal electrical connections are configured to couple each cathode stack 1722 of the plurality of cathode modules 1720, 1720O-T to a common electrical feedthrough 1815.

[0143] In some embodiments, the cathode stack 1722 comprises a ground plate, which is electrically coupled to a common ground connection by internal electrical connections of the cathode modules 1720, 1720O-T.

[0144] In some embodiments, the X-ray device 101 further comprises one or more internal electrical connections configured to couple the ground plate of the cathode stack 1722 to the ground plate of the cathode stack 1722 of adjacent cathode modules 1720, 1720O to T inside the enclosure 102.

[0145] In some embodiments, the support structure includes a focusing electrode.

[0146] In some embodiments, the cathodes 120 of the cathode modules 1720, 1720O-T include nanotube emitters.

[0147] Some embodiments include a method, including stacking a plurality of plates on a support structure, the plurality of plates forming a plurality of cathodes for a plurality of x-ray sources, stacking at least one compression plate 2026, 2026S-T on the stacked plurality of plates on the support structure, and securing the compression plate 2026, 2026S-T to the support structure to form a cathode module 1720, 1720O-T.

[0148] In some embodiments, the method further includes installing the cathode modules 1720, 1720O-T within an interior volume of the vacuum enclosure 102 after securing the compression plates 2026, 2026S-T to a support structure to form the cathode modules 1720, 1720O-T.

[0149] In some embodiments, the support structure includes a focusing electrode, and stacking the multiple plates on the support structure further includes aligning and fixing the multiple plates to the focusing electrode.

[0150] In some embodiments, stacking at least one compression plate 2026, 2026S-T into the stacked plates of the support structure comprises stacking a plurality of compression plates 2026, 2026S-T into the stacked plates of the support structure.

[0151] In some embodiments, the method further includes fastening each of the plurality of compression plates 2026, 2026S-T to the support structure with a single fastener.

[0152] Some embodiments include an x-ray device 101 that includes a means for containing a vacuum, a plurality of means for emitting electrons within the vacuum, a means for supporting, and a means for clamping the plurality of means for emitting electrons within the vacuum to the means for supporting. Examples of the means for containing a vacuum include the enclosure 102, the body 104, the covers 154, 154A-H, 1154, etc. The means for emitting electrons within the vacuum include the cathode 120, etc. Examples of the supporting means include the support structure 1920, etc. Examples of the clamping means include the compression plate 2026, etc.

[0153] In some embodiments, the X-ray device 101 further comprises a plurality of means for fastening the means for clamping to the means for supporting. Examples of fastening means include fasteners 1726 and the like.

[0154] In some embodiments, a single means for immobilizing is disposed between each pair of the multiple means for emitting electrons within the vacuum.

[0155] In some embodiments, the x-ray device 101 further comprises a means for attaching the means for support to the means for maintaining a vacuum. Examples of the means for attaching the means for support include fasteners 1726, or the like.

[0156] Although the structures, devices, methods, and systems have been described in accordance with specific embodiments, one skilled in the art will readily recognize that many variations to the specific embodiments are possible, and therefore any variations should be considered within the spirit and scope of the disclosure herein. Accordingly, many modifications may be made by one skilled in the art without departing from the spirit and scope of the appended claims.

[0157] The claims following this written disclosure are hereby expressly incorporated into the disclosure herein, with each claim standing on its own as a separate embodiment. The disclosure includes all variations of the independent claims and their dependent claims. Furthermore, additional embodiments that may be derived from the following independent and dependent claims are also expressly incorporated into the description herein. These additional embodiments are determined by replacing the dependency of a given dependent claim with the phrase "any of the claims beginning with claim [x] and ending with the claim immediately preceding this claim," where the bracketed term "[x]" is replaced with the number of the most recently listed independent claim. For example, for the first set of claims beginning with independent claim 1, claim 4 depends on any of claims 1 and 3, and these separate dependencies can result in two different embodiments; claim 5 depends on any one of claims 1, 3, or 4, and these separate dependencies can result in three different embodiments; claim 6 depends on any one of claims 1, 3, 4, or 5, and these separate dependencies can result in four different embodiments, and so on.

[0158] The recitation in a claim of the term "first" with respect to a feature or element does not necessarily imply the presence of a second or additional such feature or element. When present, elements specifically recited in means-plus-function form are intended to be construed to cover the corresponding structure, material, or acts described herein, and their equivalents, pursuant to 35 U.S.C. §112(f). The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:

Claims

1. An X-ray apparatus, comprising: an access port configured to receive a cathode inside an inner volume of an enclosure of the X-ray apparatus; a first vacuum seal configured to seal a cover on the access port; and a second seal configured to seal the cover on the access port, the second seal being maintained between the first vacuum seal and the inner volume of the enclosure while the first vacuum seal is removed. The X-ray apparatus including the above.

2. The X-ray apparatus according to claim 1, wherein the access port is one of a plurality of access ports, each configured to receive a cathode inside an inner volume of an enclosure of the X-ray apparatus.

3. The X-ray apparatus according to claim 1, wherein the secondary seal includes a protrusion configured to fit into a channel formed in one or more of an outer surface of the enclosure and an inner surface of the cover.

4. The X-ray apparatus according to claim 1, further comprising a releasable mechanism configured to seal a temporary cover on the access port, wherein the first vacuum seal is configured to replace the releasable vacuum seal with a permanent vacuum seal.

5. The cathode is one of a plurality of cathodes of the X-ray apparatus, and the access port is configured to receive a pre-assembled cathode module including a plurality of cathodes, the pre-assembled cathode including a cathode stack including a plurality of plates fixed in a specific arrangement. The X-ray apparatus according to claim 1.

6. The X-ray apparatus according to claim 5, wherein each of the cathodes includes a plurality of emitters.

7. a plurality of openings formed through a plurality of plates of the cathode stack; a plurality of fasteners, each fastener being fixed to a support structure of the cathode module through each of the plurality of openings formed through the cathode stack; and a compression plate, wherein a single one of the plurality of openings formed through the cathode stack is disposed between adjacent pre-assembled cathodes of the cathode module, and the fastener is configured to fix the cathode stack between the compression plate and the support structure. The compression plate as described above. The X-ray apparatus according to claim 5, comprising

8. A plurality of cathode modules, each cathode module comprising one or more cathodes and a compression plate configured to fix the cathode stack of the one or more cathodes to a focusing electrode, the plurality of cathode modules, and At least one internal electrical connection coupled between the plurality of cathode modules The X-ray apparatus according to any one of claims 1 to 7, further comprising

9. An anode assembly including a plurality of anode modules, each anode module including one or more anodes, the anode assembly, and A plurality of supports, each support configured to fix each of the plurality of anode modules of the anode assembly inside an inner volume of the enclosure, and each anode module of the anode assembly being fixed by a single support of the plurality of supports, the plurality of supports The X-ray apparatus according to any one of claims 1 to 7, further comprising

10. The first vacuum seal is formed in a first path around the access port, The second seal includes a physical overlap between the cover and the enclosure in a second path around the access port, the second path being disposed between the first path and the perimeter of the access port. The X-ray apparatus according to any one of claims 1 to 7.

11. A method comprising: Sealing an access port of an enclosure with a first vacuum seal and a secondary seal, the enclosure having an inner volume containing an X-ray source, the sealing; Removing the first vacuum seal from the access port of the enclosure, including protecting the inner volume of the enclosure from contamination while removing the first vacuum seal together with the secondary seal, the removing; and After removing the first vacuum seal, resealing the access port of the enclosure with the first vacuum seal A method comprising

12. The first vacuum seal includes a weld joining a cover to the enclosure, Removing the first vacuum seal includes milling the weld. The method according to claim 11.

13. Before sealing the access port of the enclosure with the first vacuum seal and the secondary seal, forming a releasable vacuum seal configured to temporarily seal a cover on the access port, testing the X-ray source, removing the releasable vacuum seal, after removing the releasable vacuum seal, sealing the access port with the first vacuum seal, The method according to claim 11, further comprising.

14. Forming an anode assembly including a plurality of segments, each anode module including one or more anodes, said forming, and attaching each anode module of the anode assembly inside the enclosure by a single support of a plurality of structurally independent supports, The method according to claim 11, further comprising.

15. assembling a cathode module including a plurality of cathodes, said plurality of cathodes including a cathode stack including a plurality of plates fixed in a specific arrangement, said assembling, and installing the assembled cathode module into the inner volume of the enclosure through the access port, The method according to any one of claims 11 to 14, further comprising.

16. said assembling the cathode module being forming a plurality of openings through the cathode stack such that a single opening through the cathode stack is formed between each pair of adjacent cathodes of the cathode module, and clamping one or more compression plates onto the cathode stack with a plurality of fasteners, each fastener being installed through a respective one of the plurality of openings, said clamping, The method according to claim 15, comprising.

17. Sealing the access port is forming the secondary seal between the first vacuum seal and the inner volume of the enclosure, and sealing a first cover over the access port with the first vacuum seal, The method according to any one of claims 11 to 14, comprising.

18. Re-sealing the access port further comprises reforming the secondary seal, The method according to claim 17, comprising.

19. An X-ray device, means for generating X-rays, Means for maintaining a vacuum around the means for generating the X-rays, means for accessing an inner volume of the means for maintaining the vacuum around the means for generating the X-rays, means for vacuum-sealing the means for accessing the inner volume, and means for protecting the inner volume from contamination while removing the means for vacuum-sealing the means for accessing the inner volume The means for maintaining the vacuum, including An X-ray apparatus comprising.

20. The X-ray apparatus according to claim 19, further comprising means for temporarily vacuum-sealing the means for accessing the inner volume before attaching the means for vacuum-sealing the means for accessing the inner volume.

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