X-ray tube shell, manufacturing method and X-ray tube

Abstract

The invention relates to the technical field of X-ray tube manufacturing, in particular to an X-ray tube shell, a manufacturing method and an X-ray tube, the X-ray tube shell comprises a shell used for containing an anode target disc, a heat dissipation layer is attached to the inner wall of the shell, and the heat dissipation layer at least surrounds the periphery of the anode target disc; the heat dissipation layer is of an interpenetrating network structure formed by compounding functional metal and diamond, and the material of the functional metal at least comprises one of molybdenum and tungsten. Based on the device, the shell can absorb thermal radiation energy by using the high absorption characteristic of molybdenum or tungsten in an infrared band, and can quickly conduct heat out by means of the high thermal conductivity of diamond, so that the heat dissipation efficiency of the shell is improved, and heat accumulation is effectively prevented.

Description

Technical Field

[0001] This invention relates to the field of X-ray tube manufacturing technology, specifically to an X-ray tube housing, manufacturing method, and X-ray tube. Background Technology

[0002] The X-ray tube in a computed tomography (CT) scanner is the core component that generates X-rays. During the scan, the electron beam inside the tube strikes the anode target at high speed. Only about 1% of the electrical energy is converted into X-rays, while the majority is converted into heat, causing a rapid increase in the internal temperature of the tube. The X-ray tube is usually in a vacuum environment, and the coating on its stainless steel shell plays a crucial role in absorbing and dissipating heat.

[0003] Currently, existing coatings on the inner wall of X-ray tube vacuum shells have certain limitations in terms of heat absorption capacity. Some traditional coating materials have poor thermal conductivity, failing to quickly conduct absorbed heat away, leading to heat accumulation inside the tube and affecting its performance and lifespan. Furthermore, some coatings lack sufficient adhesion to the stainless steel substrate, making them prone to peeling during use. This not only reduces heat absorption but may also pose safety hazards to the normal operation of the tube. Therefore, developing a method to improve the heat absorption capacity of coatings on the inner wall of X-ray tube vacuum shells is of significant practical importance. Summary of the Invention

[0004] To overcome the shortcomings of the prior art, the present invention provides an X-ray tube housing, a manufacturing method, and an X-ray tube, which improves the heat dissipation efficiency of the housing and effectively prevents heat accumulation.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solution: An X-ray tube housing includes a housing for receiving an anode target disk: A heat dissipation layer is attached to the inner wall of the housing, and the heat dissipation layer at least surrounds the outer periphery of the anode target disk; The heat dissipation layer is composed of an interpenetrating network structure formed by a functional metal and diamond, wherein the functional metal is made of at least one of molybdenum and tungsten. Based on the above device, the housing can absorb thermal radiation energy by utilizing the high absorption characteristics of molybdenum or tungsten in the infrared band, and can quickly conduct heat away by utilizing the high thermal conductivity of diamond (thermal conductivity greater than 1000 W / m·K).

[0006] Furthermore, in this application, an X-ray tube housing is provided, wherein the housing is made of stainless steel, and a substrate bonding layer is provided between the housing and the heat dissipation layer, wherein the substrate bonding layer is made of at least one of titanium and chromium, and the thickness of the substrate bonding layer is between 10 nm and 1000 nm.

[0007] Furthermore, in one X-ray tube housing of this application, the volume fraction of diamond in the heat dissipation layer is 35%-60%, and the thickness of the heat dissipation layer is between 100nm and 10μm.

[0008] Furthermore, in this application, an X-ray tube housing is provided, the housing comprising a tube shell and a top plate welded to one end of the tube shell, wherein the heat dissipation layer is located at least on the inner wall of the tube shell.

[0009] Furthermore, one X-ray tube housing in this application includes a window opening with a window assembly fixed to it. The window assembly includes a baffle and a beryllium plate. The baffle is fixed to the inner wall of the housing, and the beryllium plate is entirely located within the outer edge of the baffle. A predetermined opening of a predetermined shape is located at a predetermined position on the baffle, within the outer edge of the beryllium plate. As a preferred embodiment of this application, the opening corresponds to the range of X-ray transmission, facilitating standardized manufacturing of the housing. The window assembly can then be welded to the window opening to accommodate different opening requirements.

[0010] Furthermore, in one X-ray tube housing of this application, the beryllium plate is disposed within a window opening, and a connecting ring is welded radially between the beryllium plate and the window opening. The connecting ring is made of a nickel-based alloy, copper, or a copper alloy. As a preferred embodiment of this application, the coefficient of thermal expansion of the connecting ring is similar to that of the tube housing, thereby improving the welding reliability between the beryllium plate and the outer edge of the window opening.

[0011] A manufacturing method for manufacturing an X-ray tube housing, comprising the following steps: S1: Perform pretreatment operations such as cleaning and polishing on the inner wall of the shell to remove surface oil, oxides and other impurities, so as to improve the adhesion between the coating and the shell. S2: A substrate bonding layer is deposited on the inner wall of the pretreated shell using physical vapor deposition or chemical vapor deposition methods. Its function is to enhance the bonding strength between the coating and the stainless steel substrate and prevent the coating from peeling off during use. S3. A heat dissipation layer is prepared on the substrate bonding layer using magnetron sputtering or pulsed laser deposition techniques. Furthermore, the manufacturing method in this application utilizes magnetron co-sputtering technology to simultaneously sputter a metal target and a diamond target to fabricate a heat dissipation layer on the substrate bonding layer. The metal target power is 1-3 kW, the voltage is 300-400 V, and the diamond target power is 5-8 kW. A 13.56 MHz radio frequency power supply is used, and the diamond volume fraction is controlled at 35%-60% to form an interpenetrating network structure. This structure can both absorb thermal radiation energy by utilizing the high absorption characteristics of functional metals in the infrared band and rapidly conduct heat away by leveraging the high thermal conductivity of diamond (thermal conductivity greater than 1000 W / m·K).

[0012] An X-ray tube includes a housing, a cathode assembly is mounted on a top plate, the cathode assembly includes a filament, and an anode target is rotatably mounted on the end of the housing away from the top plate, with the filament facing the anode target.

[0013] As can be seen from the above technical solution, the present invention has the following beneficial effects: This invention provides an X-ray tube housing and an X-ray tube. By incorporating an interpenetrating network structure heat dissipation layer formed by molybdenum or tungsten and diamond composite on the inner wall of the housing, a synergistic breakthrough in heat absorption and heat conduction performance is achieved. This structure fully utilizes the high absorption characteristics of molybdenum and tungsten in the infrared band, enabling efficient capture of internal thermal radiation within the X-ray tube; simultaneously, the ultra-high thermal conductivity of diamond provides a rapid heat dissipation pathway. This integrated design not only significantly improves heat dissipation efficiency and effectively prevents heat accumulation, but also enhances the adhesion between the coating and the substrate through the interpenetrating network, thereby greatly improving the operational stability, power load capacity, and service life of the X-ray tube, possessing significant practical value.

[0014] This invention provides a method for manufacturing an X-ray tube housing. By controlling the parameters of the precipitation process during the preparation of the heat dissipation layer, it is possible to ensure that the functional metal and diamond are combined to form an interpenetrating network structure. Attached Figure Description

[0015] Figure 1 This is a structural schematic diagram of the shell sidewall cross-section in an embodiment of this application; Figure 2 This is a schematic diagram of the shell structure in an embodiment of this application (viewpoint 1); Figure 3 This is a schematic diagram of the shell structure in an embodiment of this application (viewpoint 2); Figure 4 This is a cross-sectional view of the location of the window component corresponding to the shell in the embodiments of this application; Figure 5 This is an exploded view of the window assembly on the housing in an embodiment of this application; Figure 6 This is a schematic diagram of the heat sink in an embodiment of this application (viewpoint 1); Figure 7 This is a schematic diagram of the heat sink in an embodiment of this application (viewpoint two). Figure 8 This is a schematic diagram of the structure of an X-ray tube according to an embodiment of this application; Figure 9 This is a plan view of the filament in the embodiment of this application; Figure 10 This is a front plan view of the filament in an embodiment of this application; Figure 11This is a schematic diagram of the cathode assembly in an embodiment of this application; Figure 12 This is a cross-sectional view of the cathode assembly in an embodiment of this application. Detailed Implementation

[0016] Example 1 Combination Figure 1 and Figure 8 The X-ray tube housing shown includes a housing 1 for housing an anode target disk 4. A heat dissipation layer 3 is attached to the inner wall of the housing 1, and the heat dissipation layer 3 surrounds at least the outer periphery of the anode target disk 4; The heat dissipation layer 3 is an interpenetrating network structure formed by a composite of functional metal and diamond. The functional metal is made of at least one of molybdenum and tungsten. Based on the above device, the housing 1 can absorb thermal radiation energy by utilizing the high absorption characteristics of molybdenum or tungsten in the infrared band, and can quickly conduct heat away by utilizing the high thermal conductivity of diamond (thermal conductivity greater than 1000 W / m·K).

[0017] In this embodiment, the shell 1 is made of stainless steel, and a base bonding layer 2 is provided between the shell 1 and the heat dissipation layer 3. The base bonding layer 2 is made of at least one of titanium and chromium, and the thickness of the base bonding layer 2 is between 10nm and 1000nm.

[0018] In this embodiment, the volume fraction of diamond in the heat dissipation layer 3 is 35%-60%, and the thickness of the heat dissipation layer 3 is between 100nm and 10μm.

[0019] Combination Figure 2 As shown, in this embodiment, the housing 1 includes a tube shell 11 and a top plate 12 welded to one end of the tube shell 11, and the heat dissipation layer 3 is located at least on the inner wall of the tube shell 11.

[0020] Due to variations in detector arrangement and shape, medical imaging equipment requires different window shapes on the casing. If a corresponding opening were created on the casing for each window shape, it would prevent mass production of the casing itself, impacting manufacturing costs. Therefore, further consideration is needed... Figures 2 to 5As shown, in this embodiment, the tube shell 11 is provided with a window opening 110, and a window assembly 5 is fixed on the window opening 110. The window assembly 5 includes a baffle 51 and a beryllium plate 52. The baffle 51 is fixed to the inner sidewall of the tube shell 11, and the beryllium plate 52 is located entirely within the outer edge range of the baffle 51. The baffle 51 has a preset opening 510 of a preset shape at a preset position, and the opening 510 is within the outer edge range of the beryllium plate 52. The opening 510 corresponds to the range of X-ray transmission, facilitating standardized manufacturing of the tube shell 11. Subsequently, the window assembly 5 is welded to the window opening 110 to meet the requirements of different openings. This effectively avoids the increased manufacturing cost and reduced production efficiency of dedicated tube shells due to differences in window shapes of different equipment. Simultaneously, through a modular welding assembly method, production flexibility and cost-effectiveness are significantly improved while maintaining the accuracy of radiation control. The baffle 51 is welded and fixed to the tube shell 11. The area near the window opening 110 is a region where scattered electrons accumulate. In some embodiments, the baffle can be made of at least one material selected from molybdenum, TZM alloy, and lead. This provides a more significant ejection and blocking effect on scattered electrons, protecting the brazing joint between the connecting ring 53 and the shell 11 and preventing excessive heat concentration that could lead to brazing failure and vacuum leakage.

[0021] In this embodiment, a beryllium plate 52 is disposed within the window opening 110, and a connecting ring 53 is welded radially between the beryllium plate 52 and the window opening 110. The connecting ring 53 is made of a nickel-based alloy, copper, or a copper alloy. The coefficient of thermal expansion of the connecting ring 53 is similar to that of the tube shell 11, which is used to improve the welding reliability between the beryllium plate 52 and the outer edge of the window opening 110.

[0022] Furthermore, in combination Figure 4 As shown, in this embodiment, the connecting ring 53 includes an inner ring body 531 and an outer ring body 532. The inner ring body 531 and the outer ring body 532 are integrally connected at one end, making the overall cross-section of the connecting ring 53 U-shaped. The inner ring body 531 is connected to the outer edge of the beryllium plate 52, and the outer ring body 532 is connected to the inner wall of the window opening 110. Because the connecting ring 53 has a U-shaped cross-section, it is elastic in the radial direction, ensuring the tightness of the connection between the connecting ring 53 and the window opening 110 and the beryllium plate 52. It also buffers deformation caused by thermal stress, improving the structural stability of the window assembly 5 under high-temperature operating conditions. In this embodiment, the connection end between the inner ring body 531 and the outer ring body 532 is located inside the connecting ring 53 in the radial direction of the shell 11.

[0023] Example 2 A manufacturing method for manufacturing an X-ray tube housing according to Example 1 includes the following steps: S1: Pre-treatment of the substrate of housing 1: The inner wall of housing 1 is pre-treated by cleaning and polishing to remove surface oil, oxides and other impurities, thereby improving the adhesion between the coating and housing 1. Specifically, housing 1 is placed in a cleaning tank and ultrasonically cleaned sequentially with organic solvent, alkaline solution and deionized water to remove surface oil and impurities. Then, the inner wall of housing 1 is polished with sandpaper to achieve a surface roughness of Ra3.2, thereby enhancing the adhesion between the coating and the substrate. S2: Substrate bonding layer 2 deposition. A substrate bonding layer 2 is deposited on the inner wall of the pretreated shell 1 using physical vapor deposition (PVD) or chemical vapor deposition (CVD) methods. Its function is to enhance the bonding strength between the coating and the stainless steel substrate and prevent the coating from peeling off during use. Specifically, a titanium substrate bonding layer with a thickness of 100 nanometers is deposited on the inner wall of the stainless steel shell using a magnetron sputtering device in a vacuum environment of 5×10⁻³Pa with a titanium target as the sputtering target. S3, heat dissipation layer 3 is prepared by using magnetron sputtering or pulsed laser deposition technology to prepare heat dissipation layer 3 on substrate bonding layer 2. Heat dissipation layer 3 is composed of functional metal and diamond. The metal can be a high melting point metal such as molybdenum or tungsten. The diamond is uniformly distributed in the metal matrix in the form of nano or micro particles.

[0024] Furthermore, specifically, in this embodiment, a heat dissipation layer 3 is fabricated on the substrate bonding layer 2 by simultaneously sputtering a metal target and a diamond target using magnetron co-sputtering technology. The metal target power is 1-3 kW, the voltage is 300-400 V, and the diamond target power is 5-8 kW. A 13.56 MHz radio frequency power supply is used, and the diamond volume fraction is controlled at 35%-60% to form an interpenetrating network structure. This structure can both absorb thermal radiation energy by utilizing the high absorption characteristics of functional metals in the infrared band and quickly conduct heat away by leveraging the high thermal conductivity of diamond (thermal conductivity greater than 1000 W / m·K). Specifically, the molybdenum target has a power of 2 kW and a voltage of 300 V; the diamond target has a power of 8 kW, and the radio frequency power supply is 13.56 MHz, so that molybdenum and diamond form an interpenetrating network structure in the thin film. The deposition time is 30 minutes, resulting in a heat dissipation layer 3 with a thickness of 1 micrometer.

[0025] Furthermore, during the welding process of the shell 11 and the top plate 12, in order to prevent the window assembly 5 on the shell 11 from debonding, cracking, or deteriorating due to thermal stress caused by high temperature, it is necessary to install, for example, [the following measures are required] during the welding process. Figure 6 and Figure 7The heat dissipation sleeve shown includes: a sleeve body 8, a sleeve cavity 80 adapted to the tube shell 11, the sleeve cavity 80 being tightly fitted onto the tube shell 11, and a plurality of heat dissipation fins 811 integrally provided on the sleeve body 8 and arranged around the outer periphery of the sleeve cavity 80; the sleeve body 8 includes a set of circumferentially arranged sleeve segments 81, adjacent sleeve segments 81 being connected by connectors 82, the heat dissipation fins 811 being disposed on the sleeve segments 81, and the sleeve cavity 80 being disposed inside the set of sleeve segments 81. The connector 82 includes a connecting plate 821 and a latch 822 that are respectively connected to different pairs of sleeve segments 81. The connecting plate 821 is pivotally connected to a pair of sleeve segments 81, and the latch 822 is used to switch the separation and locking of a pair of sleeve segments 81.

[0026] Before welding, the sleeve 8 is fitted onto one end of the tube shell 11 near the top plate 12. During welding, the sleeve 8 dissipates heat from the tube shell 11, preventing the window assembly 5 pre-welded to the tube shell 11 from separating due to high temperature. After the top plate 12 is welded to the end of the tube shell 11, the sleeve 8 is removed from the tube shell 11. Since the cavity 80 is tightly fitted to the tube shell, direct axial fitting is quite laborious. In this embodiment, a latch 822 is provided. Before installation, the latch 822 opens a pair of sleeve segments 81, at which point the cavity 80 is in the open state. Because the connecting plate 821 is pivotally connected to the sleeve segments 81, the sleeve 8 can be chain-likely wrapped around the tube shell during installation. Finally, the latch locks the pair of sleeve segments 81 to close the cavity 80, and the sleeve 8 is tightly fitted onto the tube shell. Specifically, there are 3 sleeve segments 81, 2 connecting plates 821, and a pair of latches 822.

[0027] In this embodiment, the sleeve 8 is annular, and the sleeve cavity 80 corresponds to the inner ring of the annular shape. The annular sleeve 8 can improve the uniformity of heat dissipation.

[0028] In this embodiment, a radially extending arc-shaped plate 812 is provided on the upper end of the heat sink 811 on the sleeve 81, and the upper ends of all the heat sinks 811 on the sleeve 81 are integrally connected to the arc-shaped plate 812. This can further increase the heat dissipation area and ensure the heat dissipation effect. When the sleeve 8 is connected to the shell 11, the arc-shaped plate 812 is located at one end of the sleeve 8 near the top plate 12, and a group of arc-shaped plates 812 are in a ring shape to improve the heat dissipation effect.

[0029] In this embodiment, the sidewall of cavity 80 is a cylindrical curved surface to maximize the contact area with the cylindrical shell.

[0030] In this embodiment, an isolation groove 801 is provided on the side wall of the sleeve 80. The isolation groove 801 is used to isolate the window assembly 5 welded to the tube shell. The isolation groove 801 is used to accommodate the window assembly welded to the tube shell, so that the window assembly does not contact the sleeve 8 and avoids the sleeve 8 directly transferring heat to the window assembly.

[0031] Example 3 Combination Figure 8 The X-ray tube shown includes an X-ray tube housing as described in Example 1. A cathode assembly is mounted on a top plate 12, and the cathode assembly includes a filament. An anode target disk 4 is rotatably mounted on the end of the tube housing 11 away from the top plate 12, with the filament facing the anode target disk 4.

[0032] The X-ray tube used in this embodiment was compared with a tube using a conventional coating (chromium oxide). Under the same experimental conditions, the same high-load heat source (tube voltage 100kV, tube current 50mA) was applied to both tubes, and the temperature change inside the tubes was continuously monitored. The test results are compared in the table below: Therefore, the internal temperature rise of the X-ray tube using this embodiment is significantly lower than that of the X-ray tube using a traditional coating, and it can work continuously for a longer period of time, verifying the effectiveness and superiority of the method of the present invention.

[0033] Furthermore, in combination Figures 9 to 11 As shown, the filament is a flat filament, and the cathode assembly also includes a cathode head 92. The emitting end of the cathode head 92 is provided with a focusing groove 921, and the filament plate 91 is disposed in the focusing groove 921. The filament plate 91 has filament pins 912 at both ends along its length, and the cathode head 92 has a first through hole 922 corresponding to the filament pins 912, with the filament pins 912 passing through the first through hole 922. It also includes an insulating component 93, which is fixed to the end of the first through hole 922 away from the focusing groove 921. The insulating component 93 has a second through hole 931 extending in the same direction as the first through hole 922. The filament lead 912 passes through the second through hole 931 and is fixedly connected to the insulating component 93. The filament lead 912 is fixed to the cathode head 92 by the insulating component 93, thereby achieving stable support for the filament lead 912.

[0034] Furthermore, in this embodiment, the flat filament includes a filament plate 91, which includes an emitting end face 911. A first metal layer (not shown) and / or a second metal layer (not shown) are attached to the filament plate 91. The first metal layer is attached to the emitting end face 911, and the work function of the first metal layer is lower than that of the material of the filament plate 91. The second metal layer is attached to the end face of the filament plate 91 away from the emitting end face 911, and the work function of the second metal layer is higher than that of the material of the filament plate 91.

[0035] Based on the above structure, after the filament plate 91 is energized, electrons are emitted from one side of the emitting end face 911 toward the anode target disk. Using the filament plate 91, compared to the traditional spiral coil filament, provides a more stable structure, improves the lifespan of the filament and X-ray tube, and effectively increases the area for thermionic emission, thereby improving electron emission efficiency and increasing exposure power. By setting a first metal layer with a low work function on the emitting end face 911, the number of thermionic electrons emitted is increased, which is beneficial for electron escape. Meanwhile, a second metal layer with a high work function is set on the end of the filament plate 91 away from the emitting end face 911. This second metal layer, facing away from the anode target disk, suppresses electron escape from that side, making the electron emission direction more concentrated. This improves the quality of electrons emitted by the flat filament, further optimizing the stability of X-ray output and imaging accuracy.

[0036] In this embodiment, the first metal layer and the second metal layer can be formed by physical vapor deposition or chemical vapor deposition.

[0037] In this embodiment, the thickness of the first metal layer and / or the second metal layer is less than or equal to 0.01 mm.

[0038] In this embodiment, the filament plate 91 is made of tungsten, and the work function of tungsten is typically 4.55 eV. The material composition of the first metal layer includes at least one of tantalum (Ta) and niobium (Nb), and the material composition of the second metal layer includes at least one of molybdenum (Mo) and rhenium (Re).

[0039] In this embodiment, the filament plate 91 has several slots 910 arranged at intervals along the length direction on both edges of the filament plate 91 along the length direction. The slots 910 penetrate the filament plate 91 along the thickness direction. The slots 910 on both sides are staggered in the length direction, so that the filament plate 91 extends in an N-shape in the length direction.

[0040] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of the invention and should not be construed as limiting the scope of protection of the invention in any way. Based on this explanation, those skilled in the art can conceive of other specific embodiments of the invention without creative effort, and these embodiments will all fall within the scope of protection of the present invention.

Claims

1. An X-ray tube housing, comprising a housing (1) for housing an anode target disk (4), characterized in that: A heat dissipation layer (3) is attached to the inner wall of the housing (1), and the heat dissipation layer (3) surrounds at least the outer periphery of the anode target disk (4); The heat dissipation layer (3) is formed by a composite of functional metal and diamond to form an interpenetrating network structure, wherein the material of the functional metal includes at least one of molybdenum and tungsten.

2. The X-ray tube housing according to claim 1, characterized in that: The shell (1) is made of stainless steel. A base bonding layer (2) is provided between the shell (1) and the heat dissipation layer (3). The base bonding layer (2) is made of at least one of titanium and chromium. The thickness of the base bonding layer (2) is between 10 nm and 1000 nm.

3. The X-ray tube housing according to claim 1, characterized in that: The volume fraction of diamond in the heat dissipation layer (3) is 35%-60%, and the thickness of the heat dissipation layer (3) is between 100nm and 10μm.

4. An X-ray tube housing according to claim 1, characterized in that: The housing (1) includes a tube shell (11) and a top plate (12) welded to one end of the tube shell (11), and the heat dissipation layer (3) is located at least on the inner wall of the tube shell (11).

5. An X-ray tube housing according to claim 4, characterized in that: The shell (11) is provided with a window opening (110), and a window assembly (5) is fixed on the window opening (110). The window assembly (5) includes a baffle (51) and a beryllium plate (52). The baffle (51) is fixed on the inner side wall of the shell (11), and the beryllium plate (52) is located within the outer edge range of the baffle (51). The baffle (51) has a preset opening (510) of a preset shape at a preset position, and the opening (510) is within the outer edge range of the beryllium plate (52).

6. An X-ray tube housing according to claim 5, characterized in that: The beryllium plate (52) is disposed inside the window opening (110), and a connecting ring (53) is welded between the beryllium plate (52) and the window opening (110) in the radial direction. The material of the connecting ring (53) includes one of nickel-based alloy, copper and copper alloy.

7. A manufacturing method for manufacturing an X-ray tube housing as described in claim 2, characterized in that, Includes the following steps: S1: Perform pretreatment operations such as cleaning and polishing on the inner wall of the shell (1); S2: A substrate bonding layer (2) is deposited on the inner wall of the pretreated shell (1) using physical vapor deposition or chemical vapor deposition. S3. Using magnetron sputtering or pulsed laser deposition technology, a heat dissipation layer (3) is prepared on the substrate bonding layer (2).

8. The manufacturing method according to claim 7, characterized in that: A heat dissipation layer (3) is prepared on the substrate bonding layer (2) by simultaneously sputtering a metal target and a diamond target using magnetron co-sputtering technology. The metal target power is 1-3 kW and the voltage is 300-400V. The diamond target power is 5-8 kW. A 13.56 MHz radio frequency power supply is used. The diamond volume fraction is controlled at 35%-60% to form an interpenetrating network structure.

9. An X-ray tube, characterized in that, The X-ray tube housing according to claim 4 is provided, wherein a cathode assembly is mounted on the top plate (12), the cathode assembly includes a filament, and an anode target disk (4) is rotatably mounted on the end of the tube housing (11) away from the top plate (12), and the filament is directly opposite the anode target disk (4).

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