X-ray tube with liquid-cooled anode, and x-ray source

Abstract

The present invention relates to the technical field of X-ray tubes. Provided are an X-ray tube with a liquid-cooled anode, and an X-ray source. The X-ray tube with liquid-cooled anode comprises: a tube housing; a cathode assembly, which is arranged in a tube cavity; an anode assembly, which comprises an anode end cap, an anode head, and an anode target; and a liquid cooling system, which comprises a liquid cooling cover, a cooling liquid intake flow channel, a cooling liquid output flow channel, a temperature measuring device, and a window sealing flange, wherein the cooling liquid intake flow channel and the cooling liquid output flow channel are both in communication with a cover cavity of the liquid cooling cover; a liquid output end of the cooling liquid intake flow channel is suspended in a liquid cooling blind hole; and the inner surface of the liquid cooling cover, the outer surface of the window sealing flange and the outer surface of an end cap body jointly define a liquid cooling cavity for containing a cooling medium. The present invention enables X-ray optics to collect and focus X-rays generated by the anode target to the greatest extent, and can dissipate heat from the anode assembly in a more comprehensive manner, thereby effectively preventing the spatial position of a focal spot on the anode target from drifting.

Description

Anode liquid-cooled X-ray tube and X-ray source Technical Field

[0001] This invention relates to the field of X-ray tube technology, and in particular to an anode liquid-cooled X-ray tube and an X-ray source. Background Technology

[0002] Currently, X-ray tubes and X-ray sources with micro-focusing optical devices have been applied to high-end X-ray scientific instruments such as micro-area X-ray fluorescence analyzers (MicroXRF), high-performance X-ray diffractometers (XRD), and X-ray absorption spectrometers (XAFS). They are used in scientific fields such as materials, biology, chemistry, environment, geology, and archaeology, as well as in emerging technology fields such as semiconductors, new energy, electronic equipment, micro-area trace analysis of materials (especially thin films and forensic identification), qualitative and quantitative analysis of phases, stress and texture analysis, and strain and microcrystal size analysis.

[0003] These high-end X-ray scientific instruments have stringent requirements for high brightness, microfocal size, high throughput, and stability of the X-ray tube and X-ray source. Therefore, optical devices are needed to focus the X-rays generated by the X-ray tube and X-ray source and improve their brightness. Unlike traditional industrial and medical X-ray tubes and X-ray sources, these X-ray tubes and X-ray sources have very high requirements for the stability of the focal spot's spatial position, with fluctuations typically required to be within ±1 μm.

[0004] However, during operation, over 99% of the input energy is converted into heat, causing the anode temperature of the X-ray tube to rise. Furthermore, due to thermal expansion and contraction, the focal point position fluctuates, resulting in unstable light flux and changes in the focal spot size after the X-rays are focused by the optical components. Currently, most X-ray tubes do not meet the requirement for anode temperature fluctuation range (within ±0.2 degrees Celsius).

[0005] Existing patent documents (application numbers CN202210167293.7, CN201780063975.0, CN201920164824.0, CN202222416302.X, CN202011184705.5, and CN202010552652.1) disclose various heat dissipation methods for X-ray tube anodes. However, these heat dissipation methods can only reduce the temperature of the anode assembly's target head, but cannot dissipate heat from the anode cap. Furthermore, these heat dissipation methods have relatively poor heat dissipation effects, thus failing to control anode temperature fluctuations within a small range, and therefore cannot meet the requirements of high-performance X-ray scientific instruments.

[0006] In addition, existing X-ray tubes require a long insulation distance between the anode and the cathode because the anode is under high voltage. As a result, the distance between the focal point on the anode target and the tail end of the anode is relatively long, which leads to an increase in thermal expansion length and thermal equilibrium time, resulting in a longer standby preparation time for existing X-ray tubes during operation. Summary of the Invention

[0007] In view of the shortcomings of the prior art described above, the technical problem to be solved by the present invention is to provide an anode liquid-cooled X-ray tube and an X-ray source that can emit X-rays from the anode end cap side of the anode assembly, enable the X-ray optical device to collect and focus the X-rays generated by the anode target to the greatest extent, and provide more comprehensive heat dissipation for the anode assembly, effectively avoid the spatial position of the anode target's focal point drift, and improve the stability of the X-ray micro-spot.

[0008] To solve the above-mentioned technical problems, the present invention provides an anode liquid-cooled X-ray tube, comprising:

[0009] The tube shell, and the cavity of the tube shell, form a vacuum environment;

[0010] The cathode assembly is located in the cavity and is used to emit an electron beam;

[0011] The anode assembly includes an anode end cap, an anode head, and an anode target. The anode end cap includes an end cap body, which is sealed to one end of the tube shell by an anode ring. The end cap body has an axially penetrating through hole and an X-ray emission hole radially connected to the through hole. An X-ray window is provided in the X-ray emission hole. The anode head is sealed in the through hole and is located outside the tube shell. The anode head has a liquid-cooled blind hole with its opening facing away from the tube shell. The anode target is provided on the end face of the anode head facing the tube shell.

[0012] The liquid cooling system includes a liquid cooling cover, a cooling inlet channel, a cooling outlet channel, a temperature measuring device, and a window sealing flange. The liquid cooling cover includes a cover body that covers the end cap body. The cover body has a clearance hole that is aligned with the X-ray emission hole. The cooling inlet channel and the cooling outlet channel are both connected to the cover cavity of the liquid cooling cover. The outlet end of the cooling inlet channel is suspended in the liquid cooling blind hole. The detection head of the temperature measuring device is located on the end cap body or the anode head. One end of the window sealing flange is sealed on the end cap body and the other end is sealed on the liquid cooling cover. The flange center hole of the window sealing flange is aligned with the clearance hole and the X-ray emission hole, respectively. The inner surface of the liquid cooling cover, the outer surface of the window sealing flange, and the outer surface of the end cap body together define a liquid cooling cavity for containing the cooling medium.

[0013] X-ray optical device, after passing through the clearance hole, extends into the center hole of the flange. The X-ray optical device is used to confine the diffused X-rays generated by the anode target being bombarded by the electron beam into X-ray micro-spots.

[0014] When the anolyte liquid-cooled X-ray tube is in operation, the anode assembly is grounded and the cathode assembly is connected to a negative high voltage.

[0015] Furthermore, the anode head includes a cavity and a flange. The liquid-cooled blind hole is formed in the cavity. The cavity is located at a position away from the tube shell from the through hole. The flange is sealed at the end of the end cap body. The cooling liquid inlet channel extends in a straight line and is sealed through the liquid cooling cover. There is a preset gap between the liquid outlet end of the cooling liquid inlet channel and the bottom of the liquid-cooled blind hole.

[0016] Furthermore, the cooling liquid outlet channel is sealed through the liquid cooling cover, and the cooling liquid outlet channel is located on the side of the liquid cooling cover near the tube shell.

[0017] Furthermore, the X-ray optical device is in the shape of a long tube, and the X-ray injection end of the X-ray optical device is located inside the center hole of the window sealing flange.

[0018] Furthermore, the end cap body includes a middle flange portion, an end cap main body portion disposed on one side of the middle flange portion, and an annular portion disposed on the other side of the middle flange portion. A first annular sealing area is provided on the side of the middle flange portion that is in close contact with the liquid cooling cover.

[0019] Furthermore, the window sealing flange includes a small-diameter flange portion and a large-diameter flange portion integrally formed on the small-diameter flange portion. The small-diameter flange portion is sealed and snapped into the X-ray emission hole on the end cap body, and the large-diameter flange portion and the liquid cooling cover are sealed and abutted together.

[0020] Furthermore, a second annular sealing area is provided on the side of the large-diameter flange that is in close contact with the liquid cooling cover.

[0021] Furthermore, the anolyte liquid-cooled X-ray tube also includes a cooling control system, which includes a controller and a liquid inlet valve. The controller is communicatively connected to the temperature measuring device and the liquid inlet valve, respectively, and the liquid inlet valve is located in the cooling liquid inlet channel.

[0022] Furthermore, the liquid cooling cover or window sealing flange is made of shielding material.

[0023] The present invention also provides an X-ray source, comprising:

[0024] The anode liquid-cooled X-ray tube;

[0025] The enclosure has an opening on one side. The volume of the enclosure is larger than that of the tube shell. The enclosure completely covers the tube shell and the opening is indirectly sealed to the end cap body. The enclosure, tube shell, and end cap body together define a receiving cavity. The receiving cavity is used to contain the insulating medium, the heat dissipation medium, and the high voltage generating circuit. The high voltage generating circuit is used to drive the anode liquid-cooled X-ray tube to work.

[0026] Furthermore, the X-ray source also includes a transition flange, which is sealed to the end cap body and the housing respectively.

[0027] As described above, the anolyte liquid-cooled X-ray tube and X-ray source of the present invention have the following beneficial effects:

[0028] Firstly, the liquid cooling cover includes a cover body that encloses the end cap body. This design allows the inner surface of the liquid cooling cover, the outer surface of the window sealing flange, and the outer surface of the end cap body to collectively define a liquid cooling cavity for containing the cooling medium. Since both the cooling inlet and outlet channels are connected to the cavity of the liquid cooling cover, the cooling medium can flow freely and fill the entire liquid cooling cavity. The cooling medium can completely envelop the main structures of the anode end cap and the anode head, thereby rapidly removing heat from the anode assembly. Simultaneously, the temperature sensing head is located on the end cap body or the anode head. This sensing head can be a high-precision temperature sensor with an ultra-fast response time to detect the temperature of the end cap body near the anode target in real time. This allows for timely adjustment of the flow rates in the cooling inlet and outlet channels, preventing the spatial position of the anode target's focal point from drifting due to temperature fluctuations and avoiding target melting. It also solves the heat dissipation problem of the anode end cap and the anode head, thereby controlling the temperature fluctuations of the entire anode assembly and improving the stability of the X-ray micro-spot after focusing by the X-ray optical device.

[0029] Secondly, in existing X-ray tubes, because the X-ray window is located on the tube shell, the X-rays generated by the anode target must exit from the tube shell area. In contrast, this application presents an anode liquid-cooled X-ray tube that uses a side-emission method from the anode assembly. Specifically, the end cap body has an axially penetrating through-hole and an X-ray emission hole radially connected to the through-hole. An X-ray window is located within the X-ray emission hole. One end of the window sealing flange is sealed to the end cap body, and the other end is sealed to the liquid-cooling cover. The center hole of the window sealing flange is aligned with both the clearance hole and the X-ray emission hole. The X-ray optics device extends into the center hole of the flange after passing through the clearance hole. The X-ray optics device is used to confine the diffused X-rays generated by the electron beam bombardment of the anode target into a micro-spot of X-ray light. With this configuration, the X-ray optics device can approach the focal space of the anode target to the maximum extent, thereby maximizing the collection and focusing of the X-rays generated by the anode target, thus increasing the X-ray luminous flux, or brightness, to the level of "synchrotron radiation." The diameter of the X-ray micro-spot is usually no more than 10 micrometers.

[0030] Thirdly, the liquid cooling system provides more efficient heat dissipation for the anode head and anode target. Specifically, the anode head has a liquid-cooling blind hole with its opening facing away from the tube shell, and the anode target is located on the end face of the anode head facing the tube shell; simultaneously, the outlet end of the cooling inlet channel is suspended within the liquid-cooling blind hole. This arrangement allows the cooling medium to dissipate heat more deeply to the anode target and anode, flowing out through the gap defined by the inner wall of the anode head and the outer wall of the cooling inlet channel, and finally exiting from the cooling outlet channel. Therefore, this invention effectively prevents the anode head and anode target from heating up, thereby preventing the spatial position of the focal point on the anode target from drifting.

[0031] Fourthly, the anode head is sealed within the through-hole and located outside the tube shell. The anode head has a liquid-cooled blind hole with its opening facing away from the tube shell, and the anode target is disposed on the end face of the anode head facing the tube shell. This configuration ensures that the distance between the focal point of the anode target and the top of the anode end cap is relatively short, thus reducing the thermal expansion length and consequently shortening the thermal equilibrium time of the anode assembly. During testing, the stability of the anode assembly can be achieved without waiting for an excessively long time.

[0032] Therefore, the anode liquid-cooled X-ray tube of the present invention can emit X-rays from the anode end cap side of the anode assembly, enabling the X-ray optics to collect and focus the X-rays generated by the anode target to the maximum extent, thereby increasing the light flux of the X-rays to the level of "synchrotron radiation", and can dissipate heat from the anode assembly more comprehensively, effectively avoiding the spatial position drift of the anode target's focal spot, and improving the stability of the X-ray micro-spot. Attached Figure Description

[0033] Figure 1 shows a perspective view of the X-ray source of the present invention.

[0034] Figure 2 shows a front view of the X-ray source of the present invention.

[0035] Figure 3 shows a cross-sectional view along line A-A in Figure 2.

[0036] Figure 4 shows a cross-sectional view of the anolyte-cooled X-ray tube of the present invention.

[0037] Figure 5 is an enlarged view of part B in Figure 4.

[0038] Figure 6 shows a three-dimensional sectional view of the anode assembly.

[0039] Component designation: Shell 1, Cavity 11, Anode Assembly 2, Anode End Cap 21, End Cap Body 211, Intermediate Flange 211a, End Cap Body 211b, Ring Body 211c, First Annular Sealing Area 211d, Through Hole 212, X-ray Ejection Hole 213, X-ray Window 214, Anode Head 22, Liquid Cooling Blind Hole 221, Cavity 222, Flanged Section 223, Anode Target 23, Anode Ring 24, Liquid Cooling System 3, Liquid Cooling cover 31, cover body 311, clearance hole 312, cooling liquid inlet channel 32, cooling liquid outlet channel 33, temperature measuring device 34, detection head 341, window sealing flange 35, flange center hole 351, small diameter flange part 352, large diameter flange part 353, second annular sealing area 354, liquid cooling cavity 36, X-ray optical device 4, cooling control system 5, controller 51, liquid inlet valve 52, box body 6, box opening 61, accommodating cavity 62, transition flange 7. Detailed Implementation

[0040] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0041] It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings of this specification are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of the invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in this invention. Furthermore, the terms such as "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and are not intended to limit the scope of the invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.

[0042] As shown in Figures 1, 2, and 3, the present invention provides an X-ray source, comprising:

[0043] An anode liquid-cooled X-ray tube includes a tube shell 1, a cathode assembly (not shown) is provided inside the tube shell 1, and an anode assembly 2 is provided at one end of the tube shell 1. The anode liquid-cooled X-ray tube is the main component of the X-ray source.

[0044] Box 6 has an opening 61 on one side. The volume of box 6 is greater than the volume of shell 1. Box 6 completely covers shell 1.

[0045] Referring to Figures 4 and 5, the curved arrows indicate the flow direction of the cooling medium, and the straight arrows indicate the bombardment direction of the electron beam. To enable the anolyte liquid-cooled X-ray tube to achieve efficient anolyte heat dissipation, the anolyte liquid-cooled X-ray tube includes:

[0046] The tube shell 1 and the cavity 11 of the tube shell 1 form a vacuum environment;

[0047] The cathode assembly is located in the cavity 11 and is used to emit and focus the electron beam.

[0048] Anode assembly 2 includes an anode end cap 21, an anode head 22, and an anode target 23. The anode end cap 21 includes an end cap body 211, which is sealed to one end of the tube shell 1 by an anode ring 24 to ensure the vacuum tightness of the sealed connection. The sealing method between the anode ring 24 and the end cap body 211 can be various methods such as brazing, argon arc welding, and laser welding. The end cap body 211 is provided with an axially penetrating through hole 212 and an X-ray emission hole 213 radially connected to the through hole 212. An X-ray window 214 is provided in the X-ray emission hole 213. The anode head 22 is sealed in the through hole 212 and is located outside the tube shell 1. The anode head 22 has a liquid-cooled blind hole 221 with its opening facing away from the tube shell 1. The anode target 23 is provided on the end face of the anode head 22 facing the tube shell 1.

[0049] The liquid cooling system 3 includes a liquid cooling cover 31, a cooling liquid inlet channel 32, a cooling liquid outlet channel 33, a temperature measuring device 34, and a window sealing flange 35. The liquid cooling cover 31 includes a cover body 311 covering the end cap body 211. The cover body 311 is provided with a clearance hole 312 aligned with the X-ray emission hole 213. The cooling liquid inlet channel 32 and the cooling liquid outlet channel 33 are both connected to the cover cavity of the liquid cooling cover 31. The outlet end of the cooling liquid inlet channel 32 is suspended in the liquid cooling blind hole 221. The detection head 341 of the temperature measuring device 34 is located on the end cap body 211 or the anode head 22, and the detection head 341 must be liquid-tightly inserted into the cover body 311 to prevent leakage of the cooling medium. One end of the window sealing flange 35 is sealed to the end cap body 211, and the other end is sealed to the liquid cooling cover 31. The window sealing flange 35 and the end cap body 211 can be sealed by various methods such as brazing, laser welding, and adhesive sealing to prevent the cooling medium from leaking into the X-ray beam path and causing attenuation of the X-ray intensity. The window sealing flange 35 and the liquid cooling cover 31 can be sealed by O-rings or sealant to prevent the cooling medium from leaking. The flange center hole 351 of the window sealing flange 35 is aligned with the clearance hole 312 and the X-ray exit hole 213, respectively. The inner surface of the liquid cooling cover 31, the outer surface of the window sealing flange 35, and the outer surface of the end cap body 211 together define a liquid cooling cavity 36 for containing the cooling medium.

[0050] X-ray optical device 4 extends into the flange center hole 351 after passing through the clearance hole 312. X-ray optical device 4 is used to confine the diffused X-rays generated by the anode target 23 due to the bombardment of the electron beam into X-ray micro-spots and improve the brightness of the X-ray spot.

[0051] More importantly, the anolyte liquid-cooled X-ray tube operates by grounding the anode assembly and connecting the cathode assembly to a negative high voltage.

[0052] In the anolyte-cooled X-ray tube of the present invention, the tube shell 1 is made of an insulating material, such as glass or ceramic. The tube shell 1 supports the cathode assembly and anode assembly 2 of the X-ray tube and insulates them. The spatial position of the X-ray focal point in this anolyte-cooled X-ray tube is stable, and there is no high-voltage insulation problem between the X-ray optical device 4 and the anode assembly 2. Specifically, when the anolyte-cooled X-ray tube is in operation, the anode assembly is grounded and the cathode assembly is connected to a negative high voltage. With this configuration, the liquid cooling system 3 and the X-ray optical device 4 are also at ground potential, rather than high voltage. This is beneficial for the structural design of the liquid cooling system 3 and the X-ray optical device 4, preventing high-voltage discharge and sparking when the liquid cooling system 3 and the X-ray optical device 4 are under high voltage. This allows the X-ray optical device 4 to be closer to the focal point on the anode target 23, thereby maximizing the collection of X-rays generated by the electron beam on the anode target 23 and improving the brightness of the X-ray micro-spot formed by the confinement of the X-ray optical device 4. The specific principle of the anolyte-cooled X-ray tube is as follows:

[0053] Firstly, the liquid cooling cover 31 includes a cover body 311 that covers the end cap body 211, so that the inner surface of the liquid cooling cover 31, the outer surface of the window sealing flange 35, and the outer surface of the end cap body 211 together define a liquid cooling cavity 36 for containing the cooling medium. Furthermore, since the cooling inlet channel 32 and the cooling outlet channel 33 are both connected to the cavity of the liquid cooling cover 31, the cooling medium can flowably fill the entire liquid cooling cavity 36, completely enveloping the main structure of the anode end cap 21 and the main structure of the anode head 22, thereby quickly removing heat from the anode assembly 2. Meanwhile, the detection head 341 of the temperature measuring device 34 is located on the end cap body 211 or the anode head 22. The detection head 341 can be a high-precision temperature sensor with an ultra-fast response time to detect the temperature of the end cap body 211 near the anode target in real time, thereby adjusting the flow rate of the cooling liquid inlet channel 32 and the cooling liquid outlet channel 33 in a timely manner. This avoids the spatial position of the anode target's focal point from drifting due to temperature fluctuations and also avoids the anode target from melting. At the same time, it solves the heat dissipation problem of the anode end cap 21 and the anode head 22, thereby controlling the temperature fluctuation of the entire anode assembly 2 and improving the stability of the X-ray micro-spot after being focused by the X-ray optical device 4.

[0054] Secondly, in existing X-ray tubes, the X-ray window is located on the tube shell, and the X-rays generated by the anode target must exit from the tube shell area. In contrast, this application uses a side-emission method for the anode assembly in the liquid-cooled X-ray tube. Specifically, the end cap body 211 has an axially penetrating through hole 212 and an X-ray emission hole 213 radially connected to the through hole 212. An X-ray window 214 is provided inside the X-ray emission hole 213. One end of the window sealing flange 35 is sealed to the end cap body 211, and the other end is sealed to the liquid cooling cover 31. The flange center hole 351 of the window sealing flange 35 is aligned with the clearance hole 312 and the X-ray emission hole 213, respectively. The X-ray optics 4 extends into the flange center hole 351 after passing through the clearance hole 312. The X-ray optics 4 is used to confine the diffused X-rays generated by the anode target 23 due to electron beam bombardment into X-ray micro-spots. The anode assembly is at ground potential relative to the cathode assembly. With this configuration, the X-ray optical device 4 can approach the focal space of the anode target 23 to the maximum extent, thereby maximizing the collection and focusing of X-rays generated by the anode target 23, thus increasing the X-ray luminous flux, or brightness, to the level of "synchrotron radiation". The diameter of the X-ray micro-spot is typically no greater than 10 micrometers. The X-ray optical device 4 can be any existing optical device such as a Montel mirror, capillary mirror, double parabolic mirror, or KB mirror.

[0055] Thirdly, the liquid cooling system 3 provides more efficient heat dissipation for the anode head 22 and anode target 23. Specifically, the anode head 22 has a liquid cooling blind hole 221 with its opening facing away from the shell 1, and the anode target 23 is located on the end face of the anode head 22 facing the shell 1; simultaneously, the outlet end of the cooling liquid inlet channel 32 is suspended within the liquid cooling blind hole 221. This arrangement allows the cooling medium to dissipate heat more deeply onto the anode target 23 and anode head 22, flowing out from the gap defined by the inner wall of the anode head 22 and the outer wall of the cooling liquid inlet channel 32, and finally exiting from the cooling liquid outlet channel 33. Therefore, this invention effectively prevents the anode head 22, anode target 23, and anode end cap 21 from heating up, thereby preventing the spatial position of the focal spot on the anode target from drifting.

[0056] Fourthly, the anode head 22 is sealed within the through hole 212 and located outside the tube shell 1. The anode head 22 has a liquid-cooled blind hole 221 with its opening facing away from the tube shell 1. The anode target 23 is disposed on the end face of the anode head 22 facing the tube shell 1. With this configuration, the distance between the focal spatial position of the anode target 23 and the top of the anode end cap 21 (the top of the anode end cap 21 is also called the tail end of the anode assembly 2) is relatively short. This reduces the thermal expansion length, thereby shortening the thermal equilibrium time of the anode assembly 2. During testing, the stability of the anode assembly 2 can be achieved without waiting for an excessively long time.

[0057] Therefore, the anode liquid-cooled X-ray tube of the present invention can emit X-rays from the anode end cap side of the anode assembly, enabling the X-ray optical device 4 to collect and focus the X-rays generated by the anode target 23 to the maximum extent, thereby increasing the light flux of the X-rays to the level of "synchrotron radiation", and can dissipate heat from the anode assembly more comprehensively, effectively avoiding the spatial position of the focal point of the anode target 23 from drifting, and improving the stability of the X-ray micro-spot.

[0058] The cooling medium can be one of deionized water, transformer oil, or air, and is preferably a liquid medium.

[0059] Furthermore, as shown in Figure 6, in order to position and install the anode head 22 and to improve the sealing performance (including airtightness and liquid tightness) between the anode head 22 and the anode end cap 21, the anode head 22 includes a cavity portion 222 and a flange portion 223. The liquid cooling blind hole 221 is formed in the cavity portion 222. The cavity portion 222 is located at the part of the through hole 212 away from the tube shell 1. The flange portion 223 is sealed at the end of the end cap body 211. In order to facilitate the assembly of the cooling liquid inlet channel 32 and to improve the heat dissipation effect on the anode target 23, the cooling liquid inlet channel 32 extends in a straight line and is sealed through the liquid cooling cover 31. There is a preset gap between the liquid outlet end of the cooling liquid inlet channel 32 and the bottom of the liquid cooling blind hole 221.

[0060] Furthermore, the cooling liquid outlet channel 33 is sealed and passes through the liquid cooling cover 31, and the cooling liquid outlet channel 33 is located on the side of the liquid cooling cover 31 closer to the tube shell 1. This arrangement allows the cooling medium to flow fully over the outside of the anode end cap 21, achieving better heat dissipation and more effectively preventing the anode assembly 2 from overheating.

[0061] Furthermore, in order to simplify the structure of the X-ray optical device 4, the X-ray optical device 4 is in the shape of a long tube, and the X-ray injection end of the X-ray optical device 4 is located in the flange center hole 351 of the window sealing flange 35.

[0062] Furthermore, as shown in Figure 6, to facilitate the assembly of the end cap body 211 with other components, the end cap body 211 includes a middle flange portion 211a, an end cap main body portion 211b located on one side of the middle flange portion 211a, and an annular portion 211c located on the other side of the middle flange portion 211a. A first annular sealing area 211d is provided on the side of the middle flange portion 211a that is in close contact with the liquid cooling cover 31. An annular groove can be provided on the first annular sealing area 211d, which can be sealed by means of O-rings or sealant to prevent leakage of the cooling medium in the liquid cooling cavity 36.

[0063] Furthermore, as shown in Figure 5, the window sealing flange 35 includes a small-diameter flange portion 352 and a large-diameter flange portion 353 integrally formed on the small-diameter flange portion 352. The small-diameter flange portion 352 is sealed and snapped into the X-ray emission hole 213 on the end cap body 211, and the large-diameter flange portion 353 is sealed and abutted against the liquid cooling cover 31. Specifically, the X-ray emission hole 213 has a multi-stage stepped hole structure, such as a three-stage stepped hole structure. The small-diameter flange portion 352 is inserted and closely connected to the maximum diameter portion of the three-stage stepped hole structure to prevent the cooling medium in the liquid cooling cavity 36 from leaking into the through hole 212 and causing attenuation of the X-ray intensity. The sealing method can be selected from various methods such as brazing, argon arc welding, laser welding, and sealant sealing.

[0064] Furthermore, a second annular sealing area 354 is provided on the side of the large-diameter flange portion 353 that is in close contact with the liquid cooling cover 31. An annular groove can be provided on the second annular sealing area 354, which can be sealed by O-rings or sealant to prevent leakage of the cooling medium in the liquid cooling cavity 36. Preferably, the cover body 311 includes a flat wall and an arcuate wall, with the flat wall sealingly abutting against the large-diameter flange portion 353. Of course, the cover body 311 can also be of other shapes, as long as the cavity it forms can accommodate the end cap body 211b of the anode end cap 21, the anode head 22, and the anode target 23.

[0065] Furthermore, to automatically maintain a constant temperature for the anode assembly 2, the anode liquid-cooled X-ray tube also includes a cooling control system 5. The cooling control system 5 includes a controller 51 and a liquid inlet valve 52. The controller 51 is communicatively connected to both the temperature measuring device 34 and the liquid inlet valve 52. The liquid inlet valve 52 is located within the cooling liquid inlet channel 32. Preferably, the detection head 341 of the temperature measuring device 34 is positioned on the anode end cap 21 near the anode target. The temperature measuring device 34 collects the temperature on the anode end cap 21 and sends it to the controller 51. The controller 51 compares the measured temperature with the target temperature and adjusts the valve opening of the liquid inlet valve 52 according to the allowable deviation, thereby controlling the flow rate in the cooling liquid inlet channel 32 and precisely controlling the temperature on the anode end cap 21. This achieves a constant temperature for the anode assembly 2 of the anode liquid-cooled X-ray tube, thus preventing the spatial position of the anode target's focal point from drifting.

[0066] The liquid cooling cover 31 or window sealing flange 35 can be made of metal, non-metal, or composite materials, such as stainless steel, brass, and engineering plastics. Furthermore, to prevent leakage of X-rays generated by the anode target that do not pass through the X-ray window 214, the liquid cooling cover 31 or window sealing flange 35 is made of a shielding material. Specifically, the shielding material can be a material that attenuates X-rays, such as lead, tungsten, or bismuth, or a composite material containing lead, tungsten, or bismuth. In addition, the surface or interior of the liquid cooling cover 31 or window sealing flange 35 has a shielding layer, the material of which can be lead, tungsten, or bismuth, or a composite material containing lead, tungsten, or bismuth.

[0067] Finally, the specific structure of the X-ray source is described, the X-ray source comprising:

[0068] The anode liquid-cooled X-ray tube;

[0069] The housing 6 has an opening 61 on one side. The volume of the housing 6 is larger than that of the tube shell 1. The housing 6 completely covers the tube shell 1, and the opening 61 is indirectly sealed to the end cap body 211. The housing 6, the tube shell 1, and the end cap body 211 together define a receiving cavity 62. The receiving cavity 62 is used to accommodate the insulating medium, the heat dissipation medium, and the high-voltage generating circuit. The high-voltage generating circuit is used to drive the anode liquid-cooled X-ray tube to work. The receiving cavity 62 can also accommodate the controller 51.

[0070] With this configuration, the high-voltage generating circuit and the anode liquid-cooled X-ray tube are integrated into a single package, resulting in a more compact overall structure and avoiding the need for a long high-voltage cable to connect the high-voltage generating circuit and the anode liquid-cooled X-ray tube.

[0071] In an alternative embodiment, to accommodate the use of certain scientific instruments, the accommodating cavity 62 is used to contain the insulating medium, and a high-voltage socket is provided on the side wall of the housing 6. The wire of the high-voltage socket is exposed in the insulating medium and connected to the high-voltage generating circuit through a high-voltage cable. With this configuration, the high-voltage generating circuit is independently set up from the control circuit corresponding to the anode liquid-cooled X-ray tube.

[0072] Furthermore, the X-ray source also includes a transition flange 7, which is sealed to both the end cap body 211 and the housing 6. This makes it easier to connect the end cap body 211 and the housing 6.

[0073] Unlike existing X-ray tubes that emit X-rays from their own casing area, the X-ray source of this invention adopts a beam emission method from the tail of the anode assembly. The heat dissipation structure of the anode assembly is isolated from the insulating medium of the X-ray source, which can reduce the thermal equilibrium time when the anode assembly temperature reaches stability, thereby reducing the waiting time for testing applications.

[0074] Therefore, the anolyte liquid-cooled X-ray tube and X-ray source of the present invention can be applied to high-end X-ray scientific instruments such as micro-area X-ray fluorescence spectrometers, high-performance X-ray diffractometers and X-ray absorption spectrometers, and the focal drift range on the anode target can be controlled within ±1μm.

[0075] In summary, this invention enables X-rays to be emitted from the anode end cap side of the anode assembly, allowing the X-ray optics to collect and focus the X-rays generated by the anode target to the greatest extent possible. Furthermore, it provides more comprehensive heat dissipation for the anode assembly, effectively preventing the spatial position of the anode target's focal point from drifting and improving the stability of the X-ray micro-spot. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and has high industrial applicability.

[0076] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. An anolyte-cooled X-ray tube, characterized in that, include: The tube shell (1) and the cavity (11) of the tube shell (1) form a vacuum environment; The cathode assembly is located in the cavity (11) and is used to emit an electron beam; Anode assembly (2), the anode assembly (2) includes an anode end cap (21), an anode head (22) and an anode target (23). The anode end cap (21) includes an end cap body (211). The end cap body (211) is sealed at one end of the tube shell (1) by an anode ring (24). The end cap body (211) is provided with an axially penetrating through hole (212) and an X-ray emission hole (213) radially connected to the through hole (212). An X-ray window (214) is provided in the X-ray emission hole (213). The anode head (22) is sealed in the through hole (212) and the anode head (22) is located outside the tube shell (1). The anode head (22) has a liquid-cooled blind hole (221) with its opening facing away from the tube shell (1). The anode target (23) is provided on the end face of the anode head (22) facing the tube shell (1). The liquid cooling system (3) includes a liquid cooling cover (31), a cooling liquid inlet channel (32), a cooling liquid outlet channel (33), a temperature measuring device (34), and a window sealing flange (35). The liquid cooling cover (31) includes a cover body (311) covering the end cap body (211). The cover body (311) is provided with a clearance hole (312) aligned with the X-ray emission hole (213). The cooling liquid inlet channel (32) and the cooling liquid outlet channel (33) are both connected to the cover cavity of the liquid cooling cover (31). The liquid outlet end of the cooling liquid inlet channel (32) is suspended in the liquid cooling blind hole (221). Inside, the detection head (341) of the temperature measuring device (34) is located on the end cap body (211) or the anode head (22). One end of the window sealing flange (35) is sealed on the end cap body (211) and the other end is sealed on the liquid cooling cover (31). The flange center hole (351) of the window sealing flange (35) is aligned with the clearance hole (312) and the X-ray emission hole (213) respectively. The inner surface of the liquid cooling cover (31), the outer surface of the window sealing flange (35), and the outer surface of the end cap body (211) together define a liquid cooling cavity (36) for containing the cooling medium. X-ray optical device (4) extends into the flange center hole (351) after passing through the clearance hole (312). X-ray optical device (4) is used to constrain the diffused X-rays generated by the anode target (23) due to being bombarded by the electron beam into X-ray micro-spots. When the anode liquid-cooled X-ray tube is in operation, the anode assembly (2) is grounded and the cathode assembly is connected to a negative high voltage.

2. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The anode head (22) includes a cavity (222) and a flange (223). The liquid cooling blind hole (221) is formed in the cavity (222). The cavity (222) is located at the part of the through hole (212) away from the tube shell (1). The flange (223) is sealed at the end of the end cap body (211). The cooling liquid inlet channel (32) extends in a straight line and is sealed through the liquid cooling cover (31). There is a preset gap between the liquid outlet end of the cooling liquid inlet channel (32) and the bottom of the liquid cooling blind hole (221).

3. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The cooling liquid outlet channel (33) is sealed through the liquid cooling cover (31), and the cooling liquid outlet channel (33) is located on the side of the liquid cooling cover (31) near the tube shell (1).

4. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The X-ray optical device (4) is in the shape of a long tube, and the X-ray injection end of the X-ray optical device (4) is located in the flange center hole (351) of the window sealing flange (35).

5. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The end cap body (211) includes a middle flange portion (211a), an end cap body portion (211b) disposed on one side of the middle flange portion (211a), and an annular portion (211c) disposed on the other side of the middle flange portion (211a). A first annular sealing area (211d) is provided on the side of the middle flange portion (211a) that is in close contact with the liquid cooling cover (31).

6. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The window sealing flange (35) includes a small diameter flange portion (352) and a large diameter flange portion (353) integrally formed on the small diameter flange portion (352). The small diameter flange portion (352) is sealed and snapped into the X-ray emission hole (213) on the end cap body (211), and the large diameter flange portion (353) and the liquid cooling cover (31) are sealed and abutted together.

7. The anolyte-cooled X-ray tube according to claim 6, characterized in that: The large-diameter flange (353) is provided with a second annular sealing area (354) on one side of the liquid cooling cover (31).

8. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The anolyte liquid-cooled X-ray tube also includes a cooling control system (5), which includes a controller (51) and an inlet valve (52). The controller (51) is connected in communication with the temperature measuring device (34) and the inlet valve (52), respectively. The inlet valve (52) is located in the cooling inlet channel (32).

9. The anolyte-cooled X-ray tube according to claim 1, characterized in that: The liquid cooling cover (31) or window sealing flange (35) is made of shielding material.

10. An X-ray source, characterized in that, include: The anolyte liquid-cooled X-ray tube as described in any one of claims 1 to 9; The box (6) has an opening (61) on one side. The volume of the box (6) is greater than that of the tube shell (1). The box (6) completely covers the tube shell (1) and the opening (61) is indirectly sealed to the end cap body (211). The box (6), the tube shell (1) and the end cap body (211) together define a receiving cavity (62). The receiving cavity (62) is used to accommodate the insulating medium, the heat dissipation medium and the high voltage generating circuit. The high voltage generating circuit is used to drive the anode liquid-cooled X-ray tube to work.

11. The X-ray source according to claim 10, characterized in that: The X-ray source also includes a transition flange (7), which is sealed to the end cap body (211) and the housing (6) respectively.

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