Spectroscopic module

Abstract

To provide a spectroscopic module with which it is possible to improve a S / N ratio.SOLUTION: A spectroscopic module comprises: M beam splitters (M=natural number 2 or greater); M band-pass filters; a photodetector having M light reception regions; and a support body that supports the M beam splitters. Each of N beam splitters (N=natural number in a range 2 to M inclusive) among the M beam splitters exhibits a planar shape having a pair of principal surfaces and has a thickness of 1 mm or less. The support body has a support part in which N grooves are formed. In each of N combinations consisting of a groove and a splitter, the groove has a pair of side surfaces. In each of N combinations, one of the pair of principal surfaces faces one of the pair of side surfaces. In each of N combinations, the beam splitter is fixed to the groove so that at least one principal surface is in contact with one side surface.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a spectroscopic module. [Background technology]

[0002] As a spectroscopic module that splits measurement light into light of multiple wavelength bands and detects the light of each wavelength band, a module in which multiple beam splitters and multiple bandpass filters are arranged within a housing is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2013-532293 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned spectroscopic module, if each beam splitter has a plate shape, refraction occurs in each beam splitter, and the optical axis of the transmitted light shifts away from the bandpass filter with respect to the optical axis of the incident light. Therefore, the more the beam splitter is arranged in the rear stage, the more the optical axis of the incident light shifts away from the bandpass filter. The amount of shift of the optical axis of the incident light is accumulated according to the number of beam splitters, not only on the side away from the bandpass filter, but also on the rear side in the direction in which the multiple beam splitters are arranged. For this reason, in the multiple light receiving regions for detecting light of multiple wavelength bands, in the light receiving regions other than the light receiving region arranged in the frontmost stage, the optical path length to the light receiving region becomes longer depending on the thickness of the beam splitter arranged in the front stage of the beam splitter corresponding to the light receiving region. If the optical path length to the light receiving region becomes longer, it leads to a decrease in the amount of light received in the light receiving region and the generation of stray light in the light path, and the S / N ratio is easily reduced. This phenomenon becomes more noticeable in the light receiving regions arranged in the rear stage. An object of the present invention is to provide a spectroscopic module capable of improving the S / N ratio. [Means for solving the problem]

[0005] The spectroscopic module of the present invention comprises M beam splitters (M is a natural number greater than or equal to 2) arranged along a first direction, M bandpass filters arranged on one side of the M beam splitters in a second direction intersecting the first direction, each facing each of the M beam splitters, a photodetector arranged on one side of the M bandpass filters in the second direction, each having M light receiving areas facing each of the M bandpass filters, and a support body supporting the M beam splitters and the M bandpass filters, wherein each of N beam splitters (N is a natural number greater than or equal to 2 and less than M) among the M beam splitters is plate-shaped and has a thickness of 1 mm or less.

[0006] In this spectroscopic module, each of the N beam splitters among the M beam splitters has a plate shape and a thickness of 1 mm or less. As a result, in each of the N beam splitters, the amount by which the optical axis of the transmitted light shifts away from the bandpass filter relative to the optical axis of the incident light (amount of light refraction) is reduced. Therefore, in the entire N beam splitters, the sum of the accumulated amounts of light refraction is sufficiently reduced on the side away from the bandpass filter and on the rear side in the direction in which the N beam splitters are arranged. The reduction in the sum of the accumulated amounts of light refraction means that the optical path length to the light receiving region other than the light receiving region arranged at the frontmost stage among the multiple light receiving regions is suppressed from becoming longer. This makes it possible to suppress the reduction in the amount of light received in the light receiving region and the occurrence of stray light in the optical path. Therefore, this spectroscopic module can improve the S / N ratio.

[0007] In the spectroscopic module of the present invention, each of the N beam splitters may have a thickness of 0.5 mm or less, which further prevents the optical path length from increasing to the light receiving regions other than the light receiving region arranged at the forefront among the multiple light receiving regions, thereby further improving the S / N ratio of the entire module.

[0008] In the spectroscopic module of the present invention, the support has a support part in which N grooves are formed, and N beam splitters are disposed in each of the N grooves in the support part, thereby providing N combinations each consisting of a groove and a beam splitter, and in each of the N combinations, the groove may have a width that is at least twice the thickness of the beam splitter. According to this, when manufacturing the spectroscopic module, the grooves in which the beam splitters are disposed can be easily and accurately formed, thereby ensuring the positional accuracy of each of the N beam splitters.

[0009] In the spectroscopic module of the present invention, in each of the N combinations, the groove may have a pair of side surfaces each having a light passing opening formed therein, and a bottom surface, and in each of the N combinations, the beam splitter may be disposed in the groove so as to contact the side surface located on one side in the second direction of the pair of side surfaces, and the bottom surface. This ensures the positional accuracy of each of the N beam splitters, and also makes it possible to stably support each of the N beam splitters.

[0010] The spectroscopic module of the present invention further includes a light entrance portion that defines light entering the M beam splitters along the first direction, and the N beam splitters are supported by a support such that the centers of the N beam splitters are located on a line parallel to the first direction, and the optical axis of the light entrance portion may be located on one side of the line in the second direction. According to this, for example, when the N beam splitters have the same shape, it is possible to effectively utilize the clear aperture of each of the N beam splitters while miniaturizing each of the N beam splitters.

[0011] In the spectroscopic module of the present invention, each of the N beam splitters may have the same thickness and be arranged so that light is incident at an incident angle of 45° along the first direction, and the arrangement pitch of the N beam splitters may be a value obtained by adding the amount of refraction of light in each of the N beam splitters to the arrangement pitch of the N light receiving regions corresponding to the N beam splitters among the M light receiving regions. This allows the light reflected by each of the N beam splitters to be accurately incident on each of the N light receiving regions.

[0012] In the spectroscopic module of the present invention, each of the N beam splitters has an elongated shape when viewed in the thickness direction of each of the N beam splitters, and the direction perpendicular to the longitudinal direction of each of the N beam splitters may be a direction perpendicular to both the first direction and the second direction. This makes it possible to effectively utilize the clear aperture of each of the N beam splitters while miniaturizing each of the N beam splitters in the directions perpendicular to both the first direction and the second direction.

[0013] In the spectroscopic module of the present invention, each of the N beam splitters may have the same shape, which allows the N beam splitters to use common components. Effect of the Invention

[0014] According to the present invention, it is possible to provide a spectroscopic module capable of improving the S / N ratio. [Brief description of the drawings]

[0015] [Figure 1] FIG. 2 is a cross-sectional view of a spectroscopic module according to an embodiment. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II shown in FIG. [Diagram 3] 2 is a plan view of a portion of the first support shown in FIG. 1. [Figure 4] 2 is a cross-sectional view of a portion of the second support shown in FIG. 1. [Diagram 5] 5 is a cross-sectional view taken along line VV shown in FIG. 4. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI shown in FIG. [Figure 7] 4 is a diagram showing the arrangement of a plurality of beam splitters relative to the optical axis of a light entrance portion; FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are denoted by the same reference numerals, and duplicated explanations will be omitted. [Spectroscopic module configuration]

[0017] As shown in Fig. 1 and Fig. 2, the spectroscopic module 1 includes a housing 2, a plurality of beam splitters 3, a plurality of bandpass filters 4, a first support (support, supporting portion) 5, a second support (support) 6, a photodetector 7, and a light blocking member 8. The plurality of beam splitters 3 are arranged along the X direction (first direction). The plurality of bandpass filters 4 are disposed on one side of the plurality of beam splitters 3 in the Z direction (second direction intersecting with the first direction) perpendicular to the X direction. The photodetector 7 is disposed on one side of the plurality of bandpass filters 4 in the Z direction. The photodetector 7 has a plurality of light receiving regions 7a.

[0018] Each beam splitter 3 is, for example, a half mirror, which reflects a part of the light incident along the X direction to one side in the Z direction and transmits the rest of the light to one side in the X direction. Each bandpass filter 4 faces each beam splitter 3 in the Z direction and transmits light of a predetermined wavelength band from the light incident along the Z direction from each beam splitter 3 to one side in the Z direction. Each bandpass filter 4 transmits light of a different wavelength band. Each light receiving area 7a faces each bandpass filter 4 in the Z direction and detects light incident along the Z direction from each bandpass filter 4. Each light receiving area 7a constitutes a different light detection channel. In the spectroscopic module 1, the measurement light L is split into light of a plurality of wavelength bands by the plurality of beam splitters 3 and the plurality of bandpass filters 4, and the light of each wavelength band is detected by the photodetector 7. [Housing configuration]

[0019] As shown in FIG. 1 and FIG. 2, the housing 2 accommodates a plurality of beam splitters 3, a plurality of bandpass filters 4, a first support 5, a second support 6, a photodetector 7, and a light blocking member 8. The housing 2 has a main body 20. The main body 20 is composed of a first wall 21, a second wall 22, a third wall 23, and a fourth wall 24. The first wall 21 and the second wall 22 face each other in the X direction. The second wall 22 is located on one side in the X direction relative to the first wall 21. The third wall 23 is located on one side in the Y direction perpendicular to both the X direction and the Z direction relative to the first wall 21 and the second wall 22. The fourth wall 24 is located on the other side in the Z direction (opposite side from the one side) relative to the first wall 21, the second wall 22, and the third wall 23.

[0020] The first wall 21 is formed with a first light entrance hole 2a that allows the measurement light L to enter the housing 2 along the X direction. The third wall 23 is formed with an inner surface 2b that is parallel to both the X direction and the Z direction. The inner surface 2b is opened with each of the positioning holes 2c formed in the third wall 23. The third wall 23 is formed integrally with the second support 6. The main body 20 and the second support 6 form a recess 9 with the inner surface 2b of the third wall 23 as the bottom surface 91. That is, the housing 2 defines the recess 9 with the inner surface 2b of the third wall 23 as the bottom surface 91. The main body 20 and the second support 6 are formed integrally with each other, for example, from a metal.

[0021] The housing 2 further has a lid portion 25 and a shield cover 26. The lid portion 25 is attached to the main body portion 20 and the second support body 6 so as to close the opening of the recessed portion 9. The shield cover 26 is attached to the main body portion 20 and the lid portion 25 so as to cover the photodetector 7 from one side in the Z direction. [Configuration of beam splitter and first support]

[0022] As shown in Figs. 1 and 2, the first support 5 supports a plurality of beam splitters 3. Each beam splitter 3 is plate-shaped and has a thickness of 1 mm or less. Each beam splitter 3 is elongated when viewed in the thickness direction of each beam splitter 3, and the direction perpendicular to the longitudinal direction of each beam splitter 3 is parallel to the Y direction. Each beam splitter 3 has the same shape. Each beam splitter 3 has, for example, a rectangular plate shape.

[0023] The beam splitter 3 is configured, for example, by forming a dielectric multilayer film of the order of several nm, in which a plurality of dielectric films having a thickness of several angstroms are stacked on the surface of a glass layer of about 0.5 to 1 mm. Although light refraction occurs within the dielectric multilayer film, when the difference in thickness between the glass layer and the dielectric multilayer film is taken into consideration, most of the refraction occurring in the beam splitter 3 occurs in the glass layer. In this embodiment, the total thickness of the glass layer and the dielectric multilayer film is defined as the thickness of the beam splitter 3. The material of the beam splitter 3 is, for example, a light-transmitting material such as optical glass or plastic.

[0024] The first support 5 is composed of a first wall portion 51, a second wall portion 52, a third wall portion 53, a fourth wall portion 54, and a fifth wall portion 55. The first wall portion 51 and the second wall portion 52 face each other in the X direction. The second wall portion 52 is located on one side in the X direction with respect to the first wall portion 51. The third wall portion 53 and the fourth wall portion 54 face each other in the Y direction. The third wall portion 53 is located on one side in the Y direction with respect to the first wall portion 51 and the second wall portion 52. The fourth wall portion 54 is located on the other side in the Y direction with respect to the first wall portion 51 and the second wall portion 52. The fifth wall portion 55 is located on the other side in the Z direction with respect to the first wall portion 51, the second wall portion 52, the third wall portion 53, and the fourth wall portion 54. The first support 5 is integrally formed, for example, from a metal.

[0025] The first wall 51 is formed with second light entrance holes 5a that allow the measurement light L to be incident on the beam splitters 3 along the X direction. The third wall 53 is formed with an outer surface 5b that is parallel to both the X and Z directions. The outer surface 5b is provided with a plurality of positioning pins 5c. The first support 5 is attached to the third wall 23 such that the outer surface 5b is in contact with the inner surface 2b of the housing 2, with the position of the first support 5 being determined within (along) a plane parallel to both the X and Z directions by fitting each positioning pin 5c into each positioning hole 2c of the housing 2.

[0026] The first support 5 is disposed in the recess 9 with the outer surface 5b in contact with the inner surface 2b of the housing 2 (i.e., the bottom surface 91 of the recess 9). The side surface 92 of the recess 9 includes a plurality of spaced apart areas 92a. Each spaced apart area 92a is spaced apart from the first support 5. In this embodiment, the side surface 92 is formed by the inner surfaces of the first wall 21, the second wall 22 and the fourth wall 24 of the main body 20, and the surface of the second support 6 facing the fourth wall 24. It is sufficient that the side surface 92 includes at least one spaced apart area 92a. The spaced apart area 92a may be the entire side surface 92.

[0027] A plurality of grooves 56 are formed in the first support 5. Each beam splitter 3 is disposed in each groove 56. As a result, the first support 5 is provided with a plurality of combinations, each of which is made up of a groove 56 and a beam splitter 3. Hereinafter, each of the plurality of combinations will be referred to as a "corresponding groove 56 and beam splitter 3."

[0028] As shown in FIG. 1 and FIG. 3, each groove 56 opens on the outer surface of the fifth wall portion 55. The extension direction of each groove 56 is a direction parallel to the Y direction. The depth direction of each groove 56 is a direction perpendicular to the Y direction, inclined at 45° so that the deeper position is located on one side in the X direction. Each groove 56 has a pair of side surfaces 56a, 56b and a bottom surface 56c. The pair of side surfaces 56a, 56b face each other in the width direction of each groove 56 (direction perpendicular to both the extension direction and the depth direction). A light passing opening 57a is formed in the side surface 56a, and a light passing opening 57b is formed in the side surface 56b.

[0029] In this embodiment, each groove 56 is formed such that both ends of each groove 56 in the extension direction are located at the third wall portion 53 and the fourth wall portion 54, respectively. The light passing opening 57a is formed in the side surface 56a by cutting out the side surface 56a by a space between the third wall portion 53 and the fourth wall portion 54 facing each other in the Y direction, and the light passing opening 57b is formed in the side surface 56b by cutting out the side surface 56b by the space. In addition, the bottom surface 56c is separated into two regions in the Y direction.

[0030] In the corresponding groove 56 and beam splitter 3, the groove 56 has a width (i.e., the distance between a pair of side surfaces 56a, 56b) that is twice or more the thickness of the beam splitter 3. As an example, the thickness of the beam splitter 3 is 0.5 mm, and the width of the groove 56 is 2.5 mm to 3.0 mm. In the corresponding groove 56 and beam splitter 3, the beam splitter 3 is disposed in the groove 56 so as to contact the side surface 56a located on one side in the Z direction of the pair of side surfaces 56a, 56b, and the bottom surface 56c. In this state, the beam splitter 3 is fixed to the side surface 56a and the bottom surface 56c by, for example, an adhesive.

[0031] As shown in FIG. 1, in the spectroscopic module 1, the light entrance section 10 is configured by the first light entrance hole 2a and the second light entrance hole 5a. The light entrance section 10 defines the light that enters the multiple beam splitters 3 along the X direction. The second light entrance hole 5a includes the first light entrance hole 2a when viewed from the X direction. In this case, the center line of the first light entrance hole 2a becomes the optical axis A of the light entrance section 10. As an example, when viewed from the X direction, the first light entrance hole 2a has a circular shape, and the second light entrance hole 5a has an elliptical shape with the Z direction as the longitudinal direction. As an example, when viewed from the X direction, the first light entrance hole 2a overlaps with a portion of the second light entrance hole 5a on one side in the Z direction. According to this, when the beam splitter 3 is arranged on the first support 5, the center of the beam splitter 3 can be confirmed through the second light entrance hole 5a. [Configuration of bandpass filter and second support]

[0032] As shown in FIG. 4 and FIG. 5, the second support 6 supports a plurality of bandpass filters 4. Each bandpass filter 4 has a light-transmitting substrate 41, an interference film 42, and a light-shielding film 43. The light-transmitting substrate 41 has, for example, a rectangular plate shape. The interference film 42 is provided on a light-incident surface 41a of the light-transmitting substrate 41. The interference film 42 is, for example, a dielectric multilayer film. The light-shielding film 43 is provided on a side surface 41b of the light-transmitting substrate 41. The light-shielding film 43 is, for example, a black painted film. In each bandpass filter 4, the surface of the interference film 42 opposite to the light-transmitting substrate 41 is the light-incident surface 4a of the bandpass filter 4, the surface of the light-transmitting substrate 41 opposite to the interference film 42 is the light-emitting surface 4b of the bandpass filter 4, and the outer surface of the light-shielding film 43 is the side surface 4c of the bandpass filter 4. Note that in FIG. 1 and FIG. 2, each bandpass filter 4 is illustrated in a simplified configuration.

[0033] The second support 6 has a support portion 61. A support surface 61a is formed on the support portion 61 so as to be open on one side in the Z direction. The support surface 61a being open on one side in the Z direction means that the support surface 61a is exposed when the support portion 61 is viewed from one side in the Z direction with only the second support 6 present (i.e., the support surface 61a is visible). The bandpass filters 4 are arranged on the support surface 61a so as to be arranged along the X direction. The support surface 61a is a surface perpendicular to the Z direction, and is formed on the support portion 61 so that the area outside the clear aperture 40 of the light incident surface 4a of each bandpass filter 4 contacts the support surface 61a. The clear aperture 40 is an effective aperture area in which the function of the bandpass filter 4 is guaranteed. The support portion 61 has one light passing opening 61b formed therein through which a plurality of optical paths (dashed lines shown in FIG. 1) from the plurality of beam splitters 3 to the plurality of bandpass filters 4 pass. As a result, the support surface 61a is divided into two regions in the Y direction.

[0034] The second support 6 further includes a restricting portion 62. The restricting portion 62 is provided on the second support 6 so as to be located on one side in the Z direction with respect to the support portion 61. The restricting portion 62 restricts each bandpass filter 4 from moving in a direction perpendicular to the Z direction. The restricting portion 62 is composed of a plurality of contact portions 62a provided so as to be in contact with the side surface 4c of each bandpass filter 4, and a plurality of spaced portions 62b provided so as to be spaced from the side surface 4c of each bandpass filter 4. The restricting portion 62 does not completely separate the plurality of bandpass filters 4. In other words, the plurality of bandpass filters 4 are spaced apart from each other through a space, with the movement of the plurality of bandpass filters 4 in a direction perpendicular to the Z direction restricted by the restricting portion 62.

[0035] As shown in FIG. 1 and FIG. 2, the second support 6 is formed with a recess 63 that opens to one side in the Z direction. A bottom surface 63a of the recess 63 is a surface of the restricting portion 62 opposite to the support portion 61. The distance between the support surface 61a and the bottom surface 63a in the Z direction is smaller than the thickness of each bandpass filter 4 (i.e., the distance between the light entrance surface 4a and the light exit surface 4b in the Z direction). As a result, a part of each bandpass filter 4 opposite to the support portion 61 protrudes from the bottom surface 63a, and the light exit surface 4b of each bandpass filter 4 is located on one side in the Z direction from the bottom surface 63a (see FIG. 4). A plurality of positioning pins 6a are provided on the bottom surface 63a. [Configuration of the light detector and the light blocking member]

[0036] As shown in FIG. 1 and FIG. 2, the photodetector 7 has a wiring board 71, a plurality of photodetection elements 72, and a connector 73. The plurality of photodetection elements 72 are mounted on a surface 71a of the wiring board 71 on the side of the plurality of bandpass filters 4 so as to be arranged along the X direction. Each of the photodetection elements 72 is a discrete semiconductor element such as a PD chip, and has a light receiving region 7a. The connector 73 is attached to a surface 71b opposite to the surface 71a of the wiring board 71. The connector 73 is a port for inputting and outputting electrical signals to and from each of the photodetection elements 72. The connector 73 extends to the outside of the housing 2 through an opening 26a formed in the shield cover 26. The photodetector 7 is attached to the second support 6 so as to close the opening of the recess 63. In this embodiment, the wiring board 71 is attached to the second support 6 so as to close the opening of the recess 63, and the plurality of photodetection elements 72 are located in the recess 63.

[0037] The light shielding member 8 is disposed between the bandpass filters 4 and the photodetector 7. The light shielding member 8 is formed of an elastic material and disposed in a compressed state in the recess 63 of the second support 6. In this state, the bandpass filters 4 are sandwiched between the support portion 61 of the second support 6 and the light shielding member 8. The light shielding member 8 has a plurality of light passing openings 8a formed therein. Each of the plurality of optical paths from the plurality of bandpass filters 4 to the plurality of light receiving regions 7a passes through each of the plurality of light passing openings 8a. That is, the plurality of optical paths from the plurality of bandpass filters 4 to the plurality of light receiving regions 7a are separated from each other by the light shielding member 8. In this embodiment, each light detecting element 72 of the photodetector 7 is located in each light passing opening 8a of the light shielding member 8. In each light passing opening 8a, the terminal of the light detecting element 72 and the terminal of the wiring board 71 are electrically connected by a wire 74, and the wire 74 is covered by a resin member 75.

[0038] 6, each light passing opening 8a is formed in the light blocking member 8 such that an area of ​​the light exit surface 4b of each bandpass filter 4 outside the clear aperture 40 contacts the light blocking member 8. In other words, the light blocking member 8 is configured such that an area of ​​the light exit surface 4b of each bandpass filter 4 outside the clear aperture 40 contacts the light blocking member 8. In addition, in FIG. 6, the bandpass filter 4 is illustrated by a two-dot chain line.

[0039] As shown in FIG. 2, a plurality of positioning holes 8b are formed in the light shielding member 8. A plurality of positioning holes 7b are formed in the wiring board 71. When viewed from the Z direction, each of the positioning holes 7b overlaps with each of the positioning holes 8b. The light shielding member 8 is disposed in the recess 63 in a state in which the position of each of the light passing openings 8a in a direction perpendicular to the Z direction is determined by fitting each of the positioning pins 6a of the second support 6 into each of the positioning holes 8b. The photodetector 7 is attached to the second support 6 in a state in which the position of each of the light receiving regions 7a in a direction perpendicular to the Z direction is determined by fitting each of the positioning pins 6a that pass through each of the positioning holes 8b of the light shielding member 8 into each of the positioning holes 7b. [Arrangement of multiple beam splitters]

[0040] As shown in FIG. 7, the beam splitters 3 are arranged such that the center 3a of each beam splitter 3 is located on a line α parallel to the X direction. The center 3a of the beam splitter 3 is the center (center of gravity) of the beam splitter 3 when viewed from the thickness direction of the beam splitter 3. Each beam splitter 3 has the same thickness of 1 mm or less, and is arranged such that light is incident at an incident angle of 45° along the X direction. The optical axis A of the light entrance section 10 is located on one side in the Z direction with respect to the line α passing through the center 3a of each beam splitter 3. Note that the light entrance section 10 is illustrated diagrammatically in FIG. 7.

[0041] Since refraction occurs in each beam splitter 3, the optical axis of the transmitted light is shifted away from the optical axis A of the light entrance unit 10 relative to the optical axis of the incident light. In the spectroscopic module 1, each beam splitter 3 has the same thickness and is arranged so that light is incident at an incident angle of 45° along the X direction, so that the amount of light refraction is equal in each beam splitter 3. The amount of light refraction refers to the amount by which the optical axis of the transmitted light is shifted away from the optical axis A of the light entrance unit 10 relative to the optical axis of the incident light in the beam splitter 3.

[0042] If the amount of refraction of light in each beam splitter 3 is ΔZ and the number of beam splitters 3 is M, then the distance in the Z direction between the "optical axis of the incident light in the foremost beam splitter 3" and the "optical axis of the incident light in the last beam splitter 3" is ΔZ(M-1). The foremost beam splitter 3 refers to the beam splitter 3 arranged at the forefront (upstream in the direction of light travel), and the last beam splitter 3 refers to the beam splitter 3 arranged at the rearmost (downstream in the direction of light travel).

[0043] In the spectroscopic module 1, multiple beam splitters 3 are arranged with respect to the optical axis A of the light entrance section 10 so that the distance between the optical axis A and the line α in the Z direction is ΔZ(M-1) / 2. As a result, in the beam splitter 3 arranged in the middle stage (midstream side in the traveling direction of the light), the optical axis of the incident light passes through the center 3a of the beam splitter 3 or near the center 3a.

[0044] As an example, if the thickness of each beam splitter 3 is 0.5 mm, the refractive index is 1.5, the angle of incidence on the beam splitter 3 is 45°, and the number of beam splitters 3 is 10, the value of the amount of light refraction ΔZ is 0.165 mm. Therefore, the distance between the optical axis A and the line α in the Z direction is ΔZ(M-1) / 2=0.165×(10-1) / 2=approximately 0.74 mm. In this case, the optical axis of the incident light passes near the center 3a of each beam splitter 3 at the fifth and sixth beam splitters 3 from the front. If the diameter of the measurement light L defined by the light incidence section 10 (i.e., the diameter of the incident light at the front beam splitter 3) is 4 mm, if the length of each beam splitter 3 in the longitudinal direction is 10 mm, the incident light will fit within the clear aperture at all beam splitters 3.

[0045] In the spectroscopic module 1, the arrangement pitch of the multiple beam splitters 3 is the sum of the arrangement pitch of the multiple light receiving areas 7a and the amount of light refraction in each beam splitter 3. The arrangement pitch of the multiple beam splitters 3 means the "distance between the centers 3a of adjacent beam splitters 3" when the multiple beam splitters 3 are arranged at equal intervals along the X direction. The arrangement pitch of the multiple light receiving areas 7a means the "distance between the centers of adjacent light receiving areas 7a" when the multiple light receiving areas 7a are arranged at equal intervals along the X direction. If the arrangement pitch of the multiple beam splitters 3 is P1 and the arrangement pitch of the multiple light receiving areas 7a is P2, then P1=P2+ΔZ. Therefore, if the number of beam splitters 3 is M, the distance in the X direction between the "front beam splitter 3" and the "last beam splitter 3" is P1(M-1)=(P2+ΔZ)(M-1)=P2(M-1)+ΔZ(M-1). In this way, the arrangement pitch of the multiple beam splitters 3 is cumulatively affected not only by the arrangement pitch of the multiple light-receiving areas 7a, but also by the amount of light refraction at each beam splitter 3.

[0046] From the above, in order to "make the total amount of accumulated light refraction sufficiently small across the multiple beam splitters 3, both on the side away from the bandpass filter 4 and on the rear side in the direction in which the multiple beam splitters 3 are lined up, thereby miniaturizing the entire module," it is preferable that each beam splitter 3 has a thickness of 1 mm or less, and more preferably a thickness of 0.5 mm or less. However, in order to ensure the strength of the beam splitter 3, it is preferable that each beam splitter 3 has a thickness of 0.1 mm or more. [Action and Effects]

[0047] In the spectroscopic module 1, each beam splitter 3 is plate-shaped and has a thickness of 1 mm or less. This reduces the amount by which the optical axis of the transmitted light is shifted away from the bandpass filter 4 relative to the optical axis of the incident light in each beam splitter 3 (amount of light refraction). Therefore, the total sum of the accumulated light refraction amounts is sufficiently reduced for the entirety of the multiple beam splitters 3, both on the side away from the bandpass filter 4 and on the rear side in the direction in which the multiple beam splitters 3 are arranged (X direction). The reduction in the total sum of the accumulated light refraction amounts means that the optical path length to the light receiving area 7a other than the light receiving area 7a arranged at the frontmost stage among the multiple light receiving areas 7a is suppressed from becoming long. This makes it possible to suppress the reduction in the amount of light received in the light receiving area 7a and the generation of stray light in the optical path. Therefore, this spectroscopic module 1 can improve the S / N ratio. Specifically, by reducing the optical path length of the optical path and reducing the amount of light received in the downstream light receiving region 7a, the amplification factor of the electrical signal can be reduced in the circuit of the wiring board 71. Furthermore, by reducing the optical path length of the optical path, diffuse reflection, scattering, etc. of light in the optical path can be reduced, and thus the generation of stray light in the optical path can be reduced. Furthermore, according to the spectroscopic module 1, the total sum of the accumulated amount of refraction of light is sufficiently small across the multiple beam splitters 3, both on the side away from the bandpass filter 4 and on the downstream side in the direction in which the multiple beam splitters 3 are arranged (X direction), so that the entire module can be made compact.

[0048] Furthermore, when each beam splitter 3 has a thickness of 0.5 mm or less, the optical path length leading to the downstream light receiving area 7a is further prevented from becoming long, which further improves the S / N ratio of the entire spectroscopic module 1. Furthermore, the entire spectroscopic module 1 can be made even more compact.

[0049] Furthermore, in the spectroscopic module 1, each plate-like beam splitter 3 is disposed in each groove 56 formed in the first support 5, and in the corresponding groove 56 and beam splitter 3, the groove 56 has a width that is at least twice the thickness of the beam splitter 3. This makes it possible to easily and accurately form the groove 56 in which the beam splitter 3 is disposed during manufacturing of the spectroscopic module 1, thereby ensuring the positional accuracy of each beam splitter 3. For example, when the groove 56 is formed in the first support 5 using an end mill, shaking of the tip of the end mill during processing is suppressed, so that the groove 56 can be easily and accurately formed in the first support 5.

[0050] Furthermore, in the spectroscopic module 1, the beam splitter 3 is arranged in the groove 56 so as to contact the side surface 56a located on one side in the Z direction of the pair of side surfaces 56a, 56b, and the bottom surface 56c, in the corresponding groove 56 and beam splitter 3. This ensures the positional accuracy of each beam splitter 3, and also makes it possible to stably support each of the multiple beam splitters 3.

[0051] Furthermore, in the spectroscopic module 1, the multiple beam splitters 3 are arranged so that the center 3a of each beam splitter 3 is located on a line α parallel to the X direction, and the optical axis A of the light entrance section 10 that defines the light incident on the multiple beam splitters 3 along the X direction is located on one side in the Z direction with respect to the line α. This makes it possible to effectively utilize the clear aperture of each beam splitter 3 while miniaturizing the beam splitters 3 that have the same shape.

[0052] Moreover, in the spectroscopic module 1, each beam splitter 3 has the same thickness and is arranged so that light is incident at an incident angle of 45° along the X direction, and the arrangement pitch of the multiple beam splitters 3 is a value obtained by adding the amount of light refraction in each beam splitter 3 to the arrangement pitch of the multiple light receiving regions 7a. This allows the light reflected by each beam splitter 3 to be incident on each light receiving region 7a with high precision. Furthermore, in the spectroscopic module 1, the arrangement pitch P1 of the multiple beam splitters 3 is constant (P1=P2+ΔZ). This allows the arrangement pitch between the multiple adjacent light receiving regions 7a in the X direction to be constant, which facilitates manufacturing.

[0053] Furthermore, in the spectroscopic module 1, each beam splitter 3 has an elongated shape when viewed in the thickness direction of each beam splitter 3, and the direction perpendicular to the longitudinal direction of each beam splitter 3 is the Y direction (the direction perpendicular to both the X direction and the Z direction). This makes it possible to effectively utilize the clear aperture of each beam splitter 3 while miniaturizing each beam splitter 3 in the Y direction. Furthermore, by miniaturizing each beam splitter 3 in the Y direction, the housing 2 can also be made more compact.

[0054] Furthermore, in the spectroscopic module 1, each beam splitter 3 has the same shape. This allows the multiple beam splitters 3 to use the same components. [Variations]

[0055] The present invention is not limited to the above embodiment. For example, in the above embodiment, a plurality of beam splitters 3 are arranged along the first direction (X direction), and a plurality of band pass filters 4 and the like are arranged on one side of the plurality of beam splitters 3 in the second direction (Z direction). That is, in the above embodiment, the second direction (Z direction) is perpendicular to the first direction (X direction), but the second direction may be any direction intersecting with the first direction. In addition, the meaning of "so as to be in contact" in the above embodiment is not limited to a certain member being in contact with another member, but also includes a case where a film such as an adhesive is arranged between a certain member and another member.

[0056] Furthermore, the housing 2 may be one that accommodates at least a plurality of beam splitters 3 and a plurality of bandpass filters 4. A portion of the housing 2 may be formed by at least a portion of the first support 5, the second support 6, and the photodetector 7. The first support 5 and the second support 6 may be integrally formed. Although the light incident surface 4a of each bandpass filter 4 is located on one side in the Z direction of the bottom surface 63a of the recess 63 in which the light blocking member 8 is disposed, it may be located at the same position as the bottom surface 63a.

[0057] Moreover, each beam splitter 3 may be a dichroic mirror that reflects light of different wavelength bands and transmits light other than the reflected wavelength band. Moreover, each beam splitter 3 may have a polygonal shape, an elliptical shape, or the like, as a specific shape, as long as it has an elongated shape when viewed from the thickness direction of each beam splitter 3. Moreover, the plurality of bandpass filters 4 may be configured by forming at least two dielectric multilayer films on one substrate, for example. In other words, it is sufficient that there are a plurality of parts each functioning as a bandpass filter 4, and the substrate on which each of the plurality of parts is arranged does not need to be divided from each other. Moreover, the photodetector 7 may be a PD array or the like in which a plurality of light receiving regions 7a are formed on one semiconductor substrate. Moreover, the photodetector 7 may be a photomultiplier tube.

[0058] In the above embodiment, the housing 2 has a plurality of positioning holes 2c as the defining portion, but at least one of the second support 6 and the housing 2 may have a defining portion that defines the position of the first support 5 in a plane parallel to both the X direction and the Z direction. The defining portion of the second support 6 and the housing 2 may be, for example, a contact area provided on the side surface 92 of the recess 9 so as to contact the first support 5 arranged in the recess 9. The first support 5 may have a first engaging portion, and the housing 2 may have a second engaging portion engaged with the first engaging portion as the defining portion. In that case, one of the first engaging portion and the second engaging portion may be a plurality of positioning holes, and the other of the first engaging portion and the second engaging portion may be a positioning pin fitted into each of the plurality of positioning holes.

[0059] In addition, in the above embodiment, the second support 6 has the positioning pin 6a and the light blocking member 8 has the positioning hole 8b, but the second support 6 may have a first engagement portion and the light blocking member 8 may have a second engagement portion engaged with the first engagement portion. In that case, one of the first engagement portion and the second engagement portion may be a plurality of positioning holes, and the other of the first engagement portion and the second engagement portion may be a positioning pin fitted into each of the plurality of positioning holes 8b.

[0060] Furthermore, when the beam splitter 3 is plate-shaped and has a thickness of 1 mm or less (more preferably 0.5 mm or less), if the total number of beam splitters 3 is M (M is a natural number of 2 or more), then it is sufficient that N (N is a natural number of 2 or more and M or less) beam splitters 3 out of the M beam splitters 3 have a plate shape and a thickness of 1 mm or less (more preferably 0.5 mm or less). Note that all beam splitters 3 may have a plate shape and a thickness of 1 mm or less (more preferably 0.5 mm or less) (when M=N). [Explanation of symbols]

[0061] 1...spectroscopy module, 3...beam splitter, 3a...center, 4...bandpass filter, 5...first support (support, supporting portion), 6...second support (support), 7...photodetector, 7a...light receiving area, 10...light entrance portion, 56...groove, 56a, 56b...side surface, 56c...bottom surface, 57a, 57b...light passing aperture, A...optical axis, α...line.

Claims

1. M beam splitters (M is a natural number equal to or greater than 2) arranged along a first direction; M bandpass filters are arranged on one side of the M beam splitters in a second direction intersecting the first direction, each bandpass filter facing each of the M beam splitters; a photodetector disposed on the one side in the second direction with respect to the M bandpass filters, the photodetector having M light receiving areas each facing one of the M bandpass filters; A support for supporting the M beam splitters, Each of N beam splitters (N being a natural number of 2 or more and M or less) among the M beam splitters has a plate shape having a pair of main surfaces and a thickness of 1 mm or less, The support body has a support portion having N grooves formed therein, the support portion is provided with N combinations of grooves and beam splitters, each combination being formed by disposing the N beam splitters in each of the N grooves; In each of the N combinations, the groove has a pair of side surfaces, In each of the N combinations, one of the pair of main surfaces faces one of the pair of side surfaces, and the other of the pair of main surfaces faces the other of the pair of side surfaces, A spectroscopic module, wherein in each of the N combinations, the beam splitter is fixed in the groove so that at least the one of the principal surfaces is in contact with the one of the side surfaces.

2. In each of the N combinations, a light passing region is formed on each of the pair of side surfaces, In each of the N combinations, the one side surface includes a first region and a second region located on both sides of the light passing region in a third direction intersecting both the first direction and the second direction, The spectroscopic module according to claim 1 , wherein in each of the N combinations, the beam splitter is fixed to the groove such that at least the one of the main surfaces is in contact with the first region and the second region.

3. 3. The spectroscopic module according to claim 1, wherein in each of the N combinations, the beam splitter is fixed to the groove by bonding at least the one of the principal surfaces to the one of the side surfaces.

4. 4. The spectroscopic module according to claim 1, wherein the support portion is made of a metal.

5. the support portion includes a wall portion located on one side of the N grooves in a third direction intersecting both the first direction and the second direction, The spectroscopic module according to any one of claims 1 to 4, wherein, when viewed from the first direction, the thickness of the wall portion in the third direction is smaller than the thickness of each of the M bandpass filters in the second direction.

6. 6. The spectroscopic module according to claim 1, wherein, when viewed from the first direction, a width of the N beam splitters in the second direction is greater than a thickness of each of the M bandpass filters in the second direction.

7. the one side surface includes a third region located between the first region and the second region in the third direction, The spectroscopic module according to claim 2 , wherein in each of the N combinations, the beam splitter is fixed to the groove such that at least the one of the main surfaces contacts the first region, the second region, and the third region.

8. In each of the N combinations, the groove further has a bottom surface; The spectroscopic module according to any one of claims 1 to 7, wherein in each of the N combinations, the beam splitter is fixed to the groove so as to contact the one side surface and the bottom surface.

9. 9. The spectroscopic module according to claim 8, wherein a light passing region is formed on the bottom surface such that the bottom surface is separated into two regions in a third direction intersecting both the first direction and the second direction.

10. a light-shielding portion disposed between the M band-pass filters and the M light-receiving regions in the second direction, 10. The spectroscopic module according to claim 1, wherein the light-shielding portion is formed with a plurality of light-passing openings through which a plurality of optical paths from the M bandpass filters to the M light-receiving regions pass.

11. The spectroscopic module according to claim 10 , wherein a width of each of the plurality of light passing openings in the first direction is greater than a width of each of the plurality of light passing openings in the second direction.

12. 12. The spectroscopic module according to claim 10, wherein a width between adjacent light passing apertures among the plurality of light passing apertures in the first direction is smaller than a width of each of the M band pass filters in the first direction.

13. The spectroscopic module according to any one of claims 1 to 12, wherein a distance between a light exit surface of each of the M bandpass filters and each of the M light receiving areas in the second direction is smaller than a width of each of the M bandpass filters in the first direction.

14. The photodetector includes a photodetection element, The spectroscopic module according to any one of claims 1 to 13, wherein the light detection element includes a semiconductor substrate on which a plurality of light receiving regions included in the M light receiving regions are formed.

15. The photodetector has a plurality of photodetection elements, The spectroscopic module according to any one of claims 1 to 13, wherein each of the plurality of photodetecting elements includes a semiconductor substrate on which a single light receiving region included in the M light receiving regions is formed.

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