Oscillation conveyance device and multi-row oscillation conveyance system including the same

Abstract

To suppress lateral oscillation of a trough having a linear conveyance surface when a lateral force act on the trough.SOLUTION: An oscillation conveyance device 1 that conveys an object to be conveyed on a linear conveyance surface by oscillation comprises: a first mass body having the linear conveyance surface; a second mass body that oscillates in an opposite phase to the first mass body; a driving elastic body 10 that connects the first mass body and the second mass body; a base 2 having a support surface 2c provided above a center part of an oscillation body in a height direction on an upstream side and a downstream side to the oscillation body including the first mass body, the second mass body, and the driving elastic body 10 in a conveyance direction; and an oscillation-proof elastic body 50 that connects the oscillation body to the support surface 2c.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a vibrating conveying device capable of conveying an object to be conveyed in a predetermined direction, and a multi-row vibrating conveying system including the same. [Background technology]

[0002] Conventionally, a vibrating conveying device capable of conveying a conveying object such as a workpiece along a conveying surface to a predetermined conveying destination by vibration has been known. As a vibrating conveying device, there is one having an inertial mass body fixed to the upper surface of a vibrating body arranged in a horizontal direction, a vibrating body mounting member fixed to the lower surface of the vibrating body, and a conveying body connected to the vibrating body mounting member via a first connecting member arranged at an incline (see, for example, Patent Document 1). In this vibrating conveying device, a bending vibration is induced in the first connecting member by the displacement vibration induced by the vibrating body, and this bending vibration is transmitted to the conveying body, so that the workpiece is conveyed in a predetermined direction along the conveying surface. Here, the bending vibration includes vibration components in both the horizontal and vertical directions. In addition, in this vibrating conveying device, a connecting member support piece is fixed to a longitudinal intermediate portion of the first connecting member, and the connecting member support piece and the base are connected via a second connecting member. In this way, by fixing the connecting member support piece to a portion that is the longitudinal intermediate portion (a node of vibration amplitude) of the first connecting member, the vibration transmitted from the base to the installation surface is significantly reduced.

[0003] Furthermore, as described in Patent Document 1, in order to further reduce the vibration transmitted from the base to the installation surface, it is possible to use a vibration absorbing material such as an Al-based alloy based on Al and Zn, a Ni-based alloy based on Ni and Co, or an Fe-based alloy based on Fe and Cr as the second connecting member. Such a configuration as described in Patent Document 1 provides a vibration-proofing effect that significantly reduces the horizontal vibration transmitted from the base to the installation surface. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 11-91928 Summary of the Invention [Problem to be solved by the invention]

[0005] As described above, the vibration in such a vibrating conveying device has both horizontal and vertical vibration components, so in order to further improve the vibration isolation effect, it is desirable to reduce the vertical component in addition to reducing the horizontal component. For example, in Patent Document 1, it is considered to reduce the vertical component by making the connecting member support piece out of an elastic body and reducing the thickness of this connecting member support piece.

[0006] However, by reducing the thickness of the connecting member support piece, the rigidity is weakened in the direction of rotation about the connection point between the base and the second connecting member. Normally, the conveying body that conveys the object to be conveyed is in a state where the worker can contact it at the upper end of the device, so if the thickness of the connecting member support piece is reduced as described above and, for example, the worker presses the side portion of the conveying body from the side while working, there is a problem that the conveying body will swing laterally around the connection point between the base and the second connecting member as the axis of rotation.

[0007] Such a problem occurs particularly conspicuously in a multi-row vibrating conveying system in which a plurality of the above-mentioned vibrating conveying devices are arranged in parallel in the width direction and a plurality of linear conveying surfaces are arranged approximately parallel. Here, a case where a plurality of vibrating bodies, each of which is composed of an inertial mass body, a vibrator mounting member, a conveying body, and a first connecting member, are arranged in parallel (multi-row vibrating conveying system) as described in Patent Document 1, is taken as an example. In this multi-row vibrating conveying system, there are cases where only a portion of the vibrating bodies are driven, not limited to cases where all the vibrating bodies are driven at the same time. Generally, the vibrating body used in the vibrating conveying device is vibrated at or near a resonance frequency in order to obtain a large amplitude. As described above, the vibration in such a vibrating conveying device has a horizontal component and a vertical component, and unless both of these are attenuated, the vibration isolation effect transmitted from the base to the installation surface cannot be fully exhibited. In particular, in a multi-row vibrating conveying system, there is a problem that the resonance frequencies of the vibrating bodies match, and the vibration component of the vibrating body is transmitted to other vibrating bodies that are stopped or need to be stopped, and is amplified by resonance, causing an unexpected conveying to start.

[0008] The object of the present invention is to provide a vibrating conveying device that exhibits a vibration-damping effect in the vertical component and can suppress lateral oscillation of the conveying member conveying the object to be conveyed even when a lateral force acts on the conveying member, and a multi-row vibrating conveying system equipped with the same. [Means for solving the problem]

[0009] That is, the vibration conveying device according to the present invention is A vibration conveying device comprising a structure including an elastically supported mass body and a vibration unit that vibrates the mass body, wherein the vibration unit is configured to vibrate the mass body to convey an object to be conveyed, characterized in that at least a portion of the connection wiring that connects a connection target component provided inside the structure to a connected component provided outside the structure is formed using a flexible substrate, and at least a portion of the flexible substrate is arranged along the surface of the mass body.

[0010] This configuration eliminates the need for deep grooves on the surface of the mass body so that the vibrations are not damped by the connecting wires, and therefore the weight of the mass body is not compromised, thus resolving the above dilemma and avoiding the situation where the transport performance is impaired by the connecting wires.

[0011] Preferably, in the vibration conveying device, the flexible substrate has a spanning portion that is provided between members that move relative to one another due to vibration, and the spanning portion is provided with slack that allows relative movement between the members.

[0012] According to this configuration, when vibration causes relative movement between the members, the flexible substrate does not act as a damper to attenuate the vibration.

[0013] Preferably, in the vibration conveying device, the structure includes a plurality of the mass bodies, and the spanning portion is provided between the plurality of mass bodies.

[0014] According to this configuration, when the multiple mass bodies move relative to one another due to vibration, the flexible substrate does not act as a damper that weakens the vibration.

[0015] Preferably, in the vibration conveying device, the bridge portion is provided between the mass body and the component to be connected.

[0016] According to this configuration, when vibration causes relative movement between the mass body and the connection target component, the flexible substrate does not act as a damper that weakens the vibration.

[0017] Preferably, in the vibrating conveying device, the structure comprises an elastic body provided on the mass body, the vibration unit comprises a piezoelectric element for vibration provided on the elastic body and a vibration control unit for applying a drive voltage to the piezoelectric element, the part to be connected is the piezoelectric element for vibration, and the part to be connected is the vibration control unit.

[0018] According to this configuration, the piezoelectric element for vibration can be connected to the vibration control unit without impairing the transport performance. Preferably, in the vibrating conveying device, the structure comprises an elastic body provided on the mass body, the vibration excitation unit comprises a detection piezoelectric element provided on the elastic body and a vibration excitation control unit which acquires a detection voltage from the elastic body, the part to be connected is the detection piezoelectric element, and the part to be connected is the vibration excitation control unit. According to this configuration, the piezoelectric element for detection can be connected to the vibration control unit without impairing the transport performance. Effect of the Invention

[0019] According to the present invention, It is possible to realize a wiring structure that is less likely to impair the transport performance of the vibrating transport device. [Brief description of the drawings]

[0020] [Figure 1] 1 is a plan view of a multi-row vibrating conveying system having a vibrating conveying device according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a side view of the vibrating conveying device of FIG. [Diagram 3] 2 with the connecting plate on the front side of the page removed. [Figure 4] 3 is a diagram showing a mounting portion between a trough and a trough support base of the vibrating conveying device of FIG. 2. FIG. [Diagram 5] FIG. 11 is a side view of a vibrating conveying device according to a second embodiment of the present invention. [Figure 6] FIG. 11 is a side view of a vibrating conveying device according to a third embodiment of the present invention. [Figure 7] FIG. 11 is a side view showing a modified example of the vibrating conveying device according to the first embodiment of the present invention. [Figure 8] 1 is a perspective view showing a configuration of a vibration conveying device according to an embodiment of the present invention. [Figure 9] FIG. [Figure 10] FIG. [Figure 11] FIG. 2 is a perspective view of the vibrating conveying device with a cover member removed. [Figure 12] FIG. 2 is a side view of the vibrating conveying device with a cover member removed. [Figure 13] FIG. 2 is a diagram showing a flexible substrate before being folded three-dimensionally. [Figure 14] FIG. 13 is a diagram showing a flexible substrate that is bent three-dimensionally. [Figure 15] FIG. 2 is a diagram showing a first spanning portion. [Figure 16] FIG. 11 is a diagram showing a second spanning portion. [Figure 17] FIG. 13 is a diagram showing a third spanning portion. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0022] (First Reference example ) Books Reference exampleThe multi-row vibrating conveying system according to the present invention has a plurality of vibrating conveying devices 1, as shown in Fig. 1. The plurality of vibrating conveying devices 1 are arranged in parallel, and a plurality of troughs 8 (linear conveying surfaces 8t) are arranged substantially parallel. The vibrating conveying device 1 is a linear feeder that conveys workpieces, such as electronic components, to a predetermined destination while moving them on the linear conveying surface 8t by vibration.

[0023] In addition, the rear upper surface of the linear transport surface 8t is always in a state where the workpieces are accumulated by a funnel or the like (not shown). Therefore, when the vibration transport device 1 starts transporting, the workpieces can be transported to the end of the linear transport surface 8t and supplied to a predetermined destination.

[0024] In the following, one vibrating conveying device 1 will be described, but the multiple vibrating conveying devices 1 all have approximately the same configuration. Fig. 2 is a side view of the vibrating conveying device, and Fig. 3 is a view of the vibrating conveying device in Fig. 2 with the connecting plate on the front side of the page removed.

[0025] As shown in Figures 2 and 3, the vibrating conveying device 1 comprises a base 2 fixed to a floor surface, a movable part 5 arranged above the base 2, a fixed part 6 arranged above the movable part 5, and a trough 8 having a linear conveying surface 8t above the fixed part 6 for conveying the workpiece.

[0026] The base 2 has a horizontal base section 2a extending along the linear transport surface 8t, and two vertical base sections 2b attached to the upstream end and downstream end of the horizontal base section 2a in the transport direction, respectively. The horizontal base section 2a is a member extending in the horizontal direction, while the two vertical base sections 2b are both members extending in the vertical direction.

[0027] The two base vertical parts 2b have their lower ends connected to the upstream end and downstream end of the base horizontal part 2a in the conveying direction, and their upper ends are located near the bottom surface of the trough 8. The two base vertical parts 2b each have a flat support surface 2c located at their upper ends. The support surface 2c is a portion to which an anti-vibration spring 50 is attached, and is inclined so that the upstream end in the conveying direction is located lower than the downstream end in the conveying direction.

[0028] The movable part 5 and the fixed part 6 are connected at two points in the front-rear direction by a pair of drive springs 10 using leaf springs. The pair of drive springs 10 are fixed at their lower ends to the front-rear end faces of the movable part 5 by fastening bolts 10a, and at their upper ends to the front-rear end faces of the fixed part 6 by fastening bolts 10b.

[0029] The drive spring 10 is a flat spring (leaf spring). A piezoelectric element 11 that functions as a vibration source is attached to the drive spring 10. By applying an electric charge to the piezoelectric element 11, the drive spring 10 is elastically deformed to generate vibration, and the movable part 5 and the fixed part 6 vibrate in opposite phases.

[0030] Books Reference example In the actuator, the drive spring 10 is attached so that its normal posture when not elastically deformed is inclined with respect to the vertical direction. The pair of drive springs 10 are fixed to the movable part 5 and the fixed part 6 so as to be approximately parallel to each other. The spring constant of the drive spring 10 and the piezoelectric element 11 is appropriately selected according to the conditions of an arbitrary resonance frequency determined by the weight and size of the parts to be transported, the weight of the trough 8, etc.

[0031] Further, a drive unit (not shown) that vibrates the pair of drive springs 10 is provided inside the fixed part 6. The drive unit includes a drive source such as a piezoelectric element 11, and is capable of vibrating the movable part 5 and the fixed part 6 relative to each other.

[0032] The trough 8 is connected to a trough support base 12 arranged above the fixed part 6. The trough support base 12 is connected to the movable part 5 by a connecting plate 16 and vibrates in synchronization with the movable part 5. The connecting plate 16 is connected to the trough support base 12 by a fastening bolt 16a, and is also connected to the movable part 5 by a connecting bolt 16b.

[0033] 4, a locking portion 30 (hook portion) is formed on the underside of the front end portion of the trough 8. The locking portion 30 has a protruding portion 31 that protrudes downward from the underside of the trough 8, and a tip protrusion 32 that extends from the tip of the protruding portion 31 toward the upstream side in the conveying direction.

[0034] A locking recess 12a for locking the tip projection 32 of the locking portion 30 of the trough 8 is formed at the front end of the trough support base 12. Therefore, by locking the tip projection 32 of the locking portion 30 with the locking recess 12a of the trough support base 12, the front end portion of the trough 8 is fixed to the front end of the trough support base 12. With the locking portion 30 locked to the front end of the trough support base 12, the rear end of the trough 8 is fixed to the rear end of the trough support base 12 by the bolt 8a.

[0035] A support portion 33 that protrudes downward is formed at the rear end of the lower surface of the trough 8, and a support portion 34 that protrudes downward is formed upstream in the conveying direction from the locking portion 30. When the trough 8 is attached to the trough support base 12, the lower surfaces of the support portions 33 and 34 contact the upper surface of the trough support base 12.

[0036] The hard rubber 35 is disposed between the lower surface of the trough 8 and the upper surface of the trough support base 12. The hard rubber 35 is disposed in an approximately central portion between the support portions 33 and 34. The hard rubber 35 is a generally rectangular plate-like member having approximately the same width as the trough 8. The predetermined thickness of the hard rubber 35 is approximately the same as the protruding amount of the support portions 33 and 34.

[0037] When the trough 8 is attached to the trough support base 12, gaps are formed between the support portion 33 and the hard rubber 35, and between the support portion 34 and the hard rubber 35. Therefore, the lower surface of the trough 8 is supported by the upper surface of the trough support base 12 at three points, namely, the support portion 33, the hard rubber 35, and the support portion 34.

[0038] Books Reference example In the figure, the movable part 5, the connecting plate 16, the trough support 12, and the trough 8 are the first mass of the present invention, the fixed part 6 is the second mass of the present invention, the drive spring 10 is the drive elastic body of the present invention, and the vibration-proof spring 50 is the vibration-proof elastic body of the present invention. Therefore, the vibrating body T is composed of the movable part 5, the connecting plate 16, the trough support 12, the trough 8, the fixed part 6, and the drive spring 10.

[0039] The vibrating body T is supported on the support surfaces 2c of the two base vertical parts 2b by a pair of vibration-proof springs 50, which are leaf springs. The vibration-proof spring 50 has a first arm portion 51 attached to the support surface 2c and damping the vertical component of vibration, and a second arm portion 52 disposed perpendicular to the first arm portion 51. The first arm portion 51 and the second arm portion 52 are formed integrally, and the vibration-proof spring 50 is a flat L-shaped elastic member (L-shaped spring).

[0040] The anti-vibration spring 50 is fixed at its first arm portion 51 to the support surface 2c by a fastening bolt 51a, and at its second arm portion 52 to the drive spring 10 by a fastening bolt 52a. Here, the pair of anti-vibration springs 50 are attached to the support surface 2c so that the first arm portions 51 are arranged in parallel, and are attached to the pair of drive springs 10 so that the second arm portions 52 are arranged in parallel.

[0041] Furthermore, the first arm portion 51 of the anti-vibration spring 50 is disposed perpendicular to the drive spring 10, and the second arm portion 52 is disposed parallel to the drive spring 10. Therefore, the first arm portion 51 of the anti-vibration spring 50 is parallel to the main elastic axis of the drive spring 10, and the second arm portion 52 is disposed perpendicular to the main elastic axis of the drive spring 10. Reference exampleIn this case, the direction of the principal elastic axis of the drive spring 10 is determined by the mounting angle of the drive spring 10, and "the first arm portion 51 of the anti-vibration spring 50 is arranged parallel to the principal elastic axis of the drive spring 10" means that the first arm portion 51 of the anti-vibration spring 50 is arranged along a direction that is parallel or approximately parallel to the principal elastic axis of the drive spring 10, and "the second arm portion 52 of the anti-vibration spring 50 is arranged perpendicular to the principal elastic axis of the drive spring 10" means that the second arm portion 52 of the anti-vibration spring 50 is arranged along a direction that is perpendicular or approximately perpendicular to the principal elastic axis of the drive spring 10 (the normal direction to the principal elastic axis).

[0042] Books Reference example In the pair of drive springs 10, a protrusion 53 is provided at a node portion that does not displace in the horizontal or vertical directions, and the tip portion of the second arm portion 52 of the vibration-proof spring 50 is fixed to the protrusion 53. Note that the drive spring 10 has both ends (upper end, lower end) fixed to the fixed portion 6 and the movable portion 5, respectively (fixed at both ends), so the node is the central portion of the drive spring 10 in the longitudinal direction.

[0043] The node of the drive spring 10 can be regarded as a point, but the region where the protrusion 53 is provided in the drive spring 10 is a predetermined region (the node and the region adjacent to the node) that includes the node of the drive spring 10. The protrusion 53 is provided with a female screw hole (not shown).

[0044] A bolt insertion hole (not shown) communicating with the female threaded hole of the protrusion 53 is formed in the second arm portion 52 of the vibration-damping spring 50, and the second arm portion 52 of the vibration-damping spring 50 is fixed to the protrusion 53 of the drive spring 10 by screwing a bolt 52a inserted into the bolt insertion hole into the female threaded hole of the protrusion 53.

[0045] The support surfaces 2c arranged at the upper ends of the two base vertical sections 2b are arranged above the center in the height direction of the vibrating body T. Therefore, when a force acts laterally on the side portion of the trough 8, it will try to oscillate around the straight line passing through the two support surfaces 2c in FIG. 2 as the axis of rotation, but compared to when the support surfaces 2c are arranged below the center in the height direction of the vibrating body T, the distance between the point of application of the force and the axis of rotation is smaller, and the torque acting laterally on the trough 8 is smaller. Reference example In the above, the height of the vibrating body T is the distance between the upper end of the trough 8 and the lower end of the movable part 5 in the vertical direction.

[0046] In a state in which the vibrating body T is supported on the support surfaces 2c of the two base vertical parts 2b by a pair of vibration-proof springs 50, the second arm part 52 of the vibration-proof spring 50 extends downward from the end of the first arm part 51. The first fixing part A1 between the vibrating body T and the second arm part 52 is disposed below the second fixing part A2 between the support surface 2c and the first arm part 51.

[0047] Therefore, the two support surfaces 2c are disposed on the upstream side and downstream side in the conveying direction with respect to the vibrating body T, respectively, and the vibrating body T is supported so as to be suspended from the support surfaces 2c of the two base vertical parts 2b by a pair of vibration-proof springs 50. Note that in order to prevent a lateral force from acting on the side surface portion of the vibrating body T below the trough 8, a cover member may be attached to the side surface of the base 2 so as to cover the side surface portion of the vibrating body T below the trough 8 with the cover member.

[0048] The main action of the vibrating conveying device 1 will be explained. With the vibrating conveying device 1 fixed to the floor surface, a workpiece is placed on the upper surface of the trough 8 set to be approximately horizontal. In this state, the driving spring 10 is excited to vibrate, so that the movable part 5 and the fixed part 6 vibrate. Here, since the driving spring 10 connecting the movable part 5 and the fixed part 6 is inclined to the conveying direction, the movable part 5 and the fixed part 6 vibrate with a component in the conveying direction as well as a vertical component perpendicular to the conveying direction according to the inclination angle. Then, this vibration is transmitted to the trough 8 via the connecting plate 16, and transmitted from the trough 8 to the workpiece, so that the workpiece is conveyed on the upper surface of the trough 8.

[0049] At this time, the center of gravity of the fixed part 6 is located approximately near the center of the fixed part 6. In addition, the combined center of gravity of the movable part 5, the center of gravity of the connecting plate 16 that vibrates integrally with the movable part 5, and the center of gravity of the trough 8 is located near the center of gravity of the fixed part 6, since the movable part 5 and the trough 8 are integrated so as to straddle the fixed part 6. Therefore, the vibrations of both are cancelled out, and together with the action of the vibration-proof spring 10, the vibrations transmitted to the base 2 and the floor surface can be effectively attenuated.

[0050] Books Reference example In the multi-row vibrating conveying system, the troughs 8 of the multiple vibrating conveying devices 1 are arranged in parallel, so the width of the trough 8 is very small, making it difficult to fix the multiple points between the front end portion and the rear end portion of the trough 8 to the trough support base 12 from above with bolts. Therefore, the front end portion of the trough 8 is fixed to the trough support base 12 by the locking portion 30.

[0051] For example, if the front end portion of the trough 8 is fixed with a bolt from below the front end of the trough support 12, it is necessary to form a screw portion in the trough 8, which increases the thickness of the trough 8 and increases the weight of the trough 8, resulting in a problem of reduced transport capacity. Reference example In this embodiment, since the front end portion of the trough 8 is fixed to the trough support base 12 by the locking portion 30, there is no need to form a screw portion in the trough 8.

[0052] Furthermore, if the trough 8 is fixed to the trough support 12 at two points, the front end portion and the rear end portion, the distance between the fixing points becomes long, and the portion of the trough 8 between the fixing points is no longer supported by the trough support 12, so that the resonance frequency of the trough 8 between the fixing points decreases, resulting in a problem of uneven vibration distribution. Reference example In this embodiment, the trough 8 is fixed to the trough support 12 at its front end and rear end, and the portion between the front end and rear end of the trough 8 is fixed to the trough support 12 by hard rubber 35. Therefore, there is no problem of a decrease in conveying capacity or uneven vibration distribution. Reference exampleSo, when one hard rubber 35 is placed between the front end portion and the rear end portion of the trough 8, the underside of the trough 8 is supported at three points by the trough support base 12, but when two hard rubbers 35 are placed between the front end portion and the rear end portion of the trough 8, the underside of the trough 8 is supported at four points by the trough support base 12. In either case, there is no problem of uneven vibration distribution.

[0053] As mentioned above, Reference example The vibrating conveying device 1 is a vibrating conveying device that conveys an object to be conveyed on a linear conveying surface 8t by vibration, and is equipped with a first mass (movable part 5, connecting plate 16, trough support base 12, and trough 8) having the linear conveying surface 8t, a second mass (fixed part 6) that vibrates in the opposite phase to the first mass, a driving elastic body (a pair of driving springs 10) that connects the first mass and the second mass, a base 2 having a support surface 2c that is positioned above the center of the height direction of the vibrating body T, on the upstream side in the conveying direction and the downstream side in the conveying direction of the vibrating body T including the first mass, the second mass, and the driving elastic body, and a vibration-proof elastic body (a pair of vibration-proof springs 50) that connects the vibrating body T to the support surface 2c.

[0054] This will Reference example In the vibrating conveying device 1, the support surface 2c (second fixed point A2 between the vibrating body T and the base 2) that supports the vibrating body T is disposed above the center of the vibrating body T in the height direction, so that even when the vibration-proof spring 50 for the vertical component is made soft and the damping rate is maximized, the distance between the point of application of the force and the fixed point (rotation axis) between the vibrating body T and the base 2 becomes relatively small even if a force acts laterally on the side portion of the trough 8. This reduces the torque acting laterally on the trough 8, and suppresses the trough 8 from swinging laterally. Therefore, in a multi-row vibrating conveying system having a plurality of vibrating conveying devices 1, it is possible to reduce collisions between the troughs 8 and surrounding parts, and when the troughs 8 are arranged in parallel, it is possible to reduce the gap dimension between the troughs 8.

[0055] Books Reference exampleIn the vibrating conveying device 1, the vibration-proof spring 50 has a first arm portion 51 attached to the support surface 2c and damping the vertical component of vibration, and a second arm portion 52 arranged perpendicular to the first arm portion 51 and attached to the vibrating body T.

[0056] This will Reference example In the vibrating conveying device 1, the elastic modulus of the vibration-proof springs 50 in the parallel direction and the elastic modulus in the perpendicular direction can be adjusted independently in order to further reduce the vibration transmitted from the base 2 to the installation surface.

[0057] Books Reference example In the vibrating conveying device 1, the first fixing portion A1 between the vibrating body T and the vibration-proof spring 50 is disposed below the second fixing portion A2 between the support surface 2c and the vibration-proof spring 50.

[0058] This will Reference example In the vibrating conveying device 1, the vibrating body T is supported so as to be suspended from the base vertical part 2b of the base 2, so that the vibration of the vibrating body T is stable even if the vibrating body T is large.

[0059] Books Reference example The multi-row vibrating conveying system includes a plurality of vibrating conveying devices 1, and a plurality of linear conveying surfaces 8t are arranged substantially in parallel.

[0060] This will Reference example In the multi-row vibrating conveying system, even if a lateral force acts on the trough 8 of the vibrating conveying device 1, the trough 8 is prevented from swinging laterally, thereby preventing collision with an adjacent trough 8 and damage to parts.

[0061] (Second Reference example ) Books Reference example The vibration conveying device 101 and the first Reference example The difference between the vibration conveying device 1 and the first vibration conveying device 2 is that Reference example In the present embodiment, the first fixing portion A1 between the vibrator T and the second arm portion 52 of the vibration-proof spring 50 is disposed below the second fixing portion A2 between the support surface 2c and the first arm portion 51 of the vibration-proof spring 50. Reference exampleIn this embodiment, the first fixing portion A1 between the vibrator T and the second arm portion 152 of the vibration-proof spring 150 is disposed above the second fixing portion A2 between the support surface 2c and the first arm portion 151 of the vibration-proof spring 150. Reference example In the vibration conveying device 101, Reference example The description of the configuration which is the same as that of the vibration conveying device 1 will be omitted.

[0062] As shown in Figure 5, the vibrating conveying device 101 comprises a base 2 fixed on a floor surface, a movable part 5 arranged above the base 2, a fixed part 6 arranged above the movable part 5, and a trough 8 having a linear conveying surface 8t above the fixed part 6 for conveying the workpiece.

[0063] Books Reference example In the figure, the movable part 5, the connecting plate 16, the trough support 12, and the trough 8 are the first mass of the present invention, the fixed part 6 is the second mass of the present invention, the drive spring 10 is the drive elastic body of the present invention, and the vibration-proof spring 150 is the vibration-proof elastic body of the present invention. Therefore, the vibrating body T is composed of the movable part 5, the connecting plate 16, the trough support 12, the trough 8, the fixed part 6, and the drive spring 10.

[0064] The vibrating body T is supported on the support surfaces 2c of the two base vertical portions 2b by a pair of vibration-proof springs 150, which are leaf springs. The vibration-proof spring 150 has a first arm portion 151 and a second arm portion 152 disposed perpendicular to the first arm portion 151. The first arm portion 151 and the second arm portion 152 are integrally formed, and the vibration-proof spring 150 is a flat L-shaped elastic member (L-shaped spring).

[0065] The anti-vibration spring 150 is fixed at its first arm portion 151 to the support surface 2c by a fastening bolt 51a, and at its second arm portion 152 to the fixed portion 6 by a fastening bolt 10b. The pair of anti-vibration springs 150 are attached to the support surface 2c such that the first arm portions 151 are arranged in parallel, and are attached to the fixed portion 6 such that the second arm portions 152 are arranged in parallel.

[0066] In a state in which the vibrating body T is supported on the support surfaces 2c of the two base vertical parts 2b by a pair of vibration-proof springs 150, the second arm part 152 of the vibration-proof spring 150 extends upward from the end of the first arm part 151. Therefore, the first fixing part A1 between the vibrating body T and the second arm part 152 of the vibration-proof spring 150 is disposed above the second fixing part A2 between the support surface 2c and the first arm part 151 of the vibration-proof spring 150.

[0067] The support surfaces 2c arranged on the upper ends of the two base vertical portions 2b are arranged above the center of the vibrator T in the height direction on the upstream side and downstream side in the conveying direction with respect to the vibrator T.

[0068] As mentioned above, Reference example In the vibration conveying device 101, First reference example The same effects as those of the vibration conveying device 1 can be obtained.

[0069] (Third Reference example ) Books Reference example The vibration conveying device 201 and the first Reference example The difference between the vibration conveying device 1 and the first vibration conveying device 2 is that Reference example In the present embodiment, the vibrating body T has a first mass, a second mass, and a driving elastic body. Reference example In the present embodiment, the vibrating body T has a first mass, a second mass, and a driving elastic body, and also has a third mass connected to the second mass by the driving elastic body. Reference example In the vibration conveying device 201, Reference example The description of the configuration which is the same as that of the vibration conveying device 1 will be omitted.

[0070] As shown in FIG. 6, the vibrating conveying device 201 comprises a base 2 fixed on a floor surface, a main block 213a and a sub-block 213b arranged above the base 2, a main block 212a and a sub-block 212b arranged above the main block 213a and the sub-block 212b, and a trough 8 above the main block 213a and the sub-block 212b having a linear conveying surface 8t for conveying the workpiece.

[0071] The main block 212a and the sub-block 212b are fixed together, and the main block 213a and the sub-block 213b are fixed together.

[0072] The trough support base 12 connected to the trough 8 and the main block 212a are connected at two points in the front-rear direction by a pair of drive springs 10 using leaf springs. The pair of drive springs 10 are fixed at their lower ends to the front-rear end faces of the main block 212a by fastening bolts 10a, and are fixed at their upper ends to the front-rear end faces of the trough support base 12 by fastening bolts 10b.

[0073] Sub-blocks 212b and 213b are connected at two locations in the front-rear direction by a pair of drive springs 210 using leaf springs. The pair of drive springs 210 are fixed at their lower ends to the front-rear end surface of sub-block 213b by fastening bolts 210a, and are fixed at their upper ends to the front-rear end surface of sub-block 212b by fastening bolts 210b.

[0074] The drive spring 10 and the drive spring 210 are flat springs (leaf springs). A piezoelectric element (not shown) that functions as a vibration source is attached to the drive spring 10 and the drive spring 210, and by applying an electric charge to the piezoelectric element, the drive spring 10 and the drive spring 210 are elastically deformed and vibration is generated.

[0075] Books Reference example In the figure, the trough 8 and the trough support 12 are the first mass of the present invention, the main block 212a and the sub-block 212b are the second mass of the present invention, the drive spring 10 is the drive elastic body of the present invention, and the vibration-proof spring 50 is the vibration-proof elastic body of the present invention.

[0076] Books Reference exampleThe vibrating conveying device 201 has a main block 213a and a sub-block 213b (third mass) connected to the second mass of the present invention by a pair of drive springs 210. Therefore, the vibrating body T is configured to include the trough 8, the trough support base 12, the main block 212a, the sub-block 212b, the main block 213a, the sub-block 213b, the drive spring 10, and the drive spring 210.

[0077] The vibrating body T is the first Reference example Similarly, the support surface 2c of the two base vertical portions 2b is supported by a pair of vibration-proof springs 50, which are leaf springs.

[0078] The support surfaces 2c arranged on the upper ends of the two base vertical portions 2b are arranged above the center of the vibrator T in the height direction on the upstream side and downstream side in the conveying direction with respect to the vibrator T.

[0079] When the vibrating body T is supported on the support surfaces 2c of the two base vertical portions 2b by a pair of vibration-proof springs 50, the first fixed portion A1 between the vibrating body T and the second arm portion 52 of the vibration-proof spring 50 is positioned lower than the second fixed portion A2 between the support surface 2c and the first arm portion 51 of the vibration-proof spring 50.

[0080] Therefore, the two support surfaces 2c are respectively arranged on the upstream side and downstream side of the vibrating body T in the conveying direction, and the vibrating body T is supported so as to be suspended from the support surfaces 2c of the two base vertical portions 2b by a pair of vibration-proof springs 50.

[0081] As mentioned above, Reference example In the vibration conveying device 201, First reference example The same effects as those of the vibration conveying device 1 can be obtained.

[0082] Books Reference example The vibration conveying device 201 in accordance with the present invention is configured such that the resonant frequencies of the drive springs 10 and 210 are made different from each other, and the device can be switched between a vibration state in which the drive spring 10 is vibrated by a drive unit (not shown) and a vibration state in which the drive spring 210 is vibrated.

[0083] Books Reference example In this vibration conveying device 201, the inclination posture (direction, angle) of the drive spring 10 is different from the inclination posture of the drive spring 210. Reference example In this embodiment, the inclination direction of the drive spring 210 is set in the opposite direction to the inclination direction of the drive spring 10 (the direction in which the upper end of the drive spring 10 faces). Reference example In the vibrating conveying device 201, the vibration angles of the drive spring 10 and the drive spring 210 are made different from each other, so that the conveying direction of the transported object on the linear conveying surface when the drive spring 10 is vibrated and the conveying direction of the workpiece on the linear conveying surface when the drive spring 210 is vibrated are opposite (forward and backward directions).

[0084] The specific configuration is as described above. Reference example However, the present invention is not limited to the above.

[0085] For example, the above items 1 to 3 Reference example In the above, the anti-vibration springs 50, 150 are flat L-shaped elastic members (L-shaped springs), but the shape (length, area, thickness, etc.) of the anti-vibration springs 50, 150 is arbitrary. The anti-vibration springs 50, 150 are not limited to those in which the first arm portion 51, 151 and the second arm portion 52, 152 are integrally formed.

[0086] For example, the first arm portion 51, 151 and the second arm portion 52, 152 may be connected via another elastic member. The anti-vibration springs 50, 150 are not limited to those having the first arm portion 51, 151 arranged parallel to the main elastic axis of the drive spring 10 and the second arm portion 52, 152 arranged perpendicular to the main elastic axis of the drive spring 10. The anti-vibration springs 50, 150 may be springs other than L-shaped springs (for example, a spring in which the base ends of I-shaped springs are connected together, a T-shaped spring, etc.) or elastic bodies other than springs (rubber, etc.).

[0087] For example, as shown in FIG. 7, vibration-proof spring 350 may have a first arm portion 351 attached to support surface 2c and damping vertical component vibration, a second arm portion 352 arranged perpendicular to first arm portion 351 and attached to vibrating body T, and a curved portion 353 connecting first arm portion 351 and second arm portion 352 and curved in a convex shape.

[0088] As a result, in the vibrating conveying device of this modification, the elastic modulus in the parallel direction and the elastic modulus in the perpendicular direction can be independently adjusted in the vibration-proof spring 350 in order to further reduce the vibration transmitted from the base 2 to the installation surface. Also, when a force is applied laterally to the side portion of the trough 8, the trough 8 is effectively prevented from swinging in the lateral direction.

[0089] Above 1 to 3 Reference example Although an example of a vibrating body has been shown above, the configuration of the vibrating body is not limited thereto. Therefore, the vibrating body of the present invention may include the first mass body, the second mass body, and the driving elastic body, and may also include other members.

[0090] Above 1 to 3 Reference example In the embodiment, the support surfaces 2c of the two base vertical portions 2b are positioned above the height center of the vibrating body T, but the effects of the present invention can be obtained even if the support surfaces 2c of the two base vertical portions 2b are positioned above the center of gravity of the vibrating body T.

[0091] Above 1 to 3 Reference example In the above, the vibration source of the drive spring 10 is a piezoelectric element, but the vibration source may be something other than a piezoelectric element. Also, the objects to be transported by the vibration transport device may be various LEDs such as LEDs, electronic components other than LEDs, or foods and other items other than electronic components.

[0092] Above No. 1 Reference exampleIn the above, instead of disposing one or two pieces of hard rubber 35 between the front end portion and the rear end portion of trough 8, one or two protrusions protruding downward from the bottom surface of trough 8 may be formed between the front end portion and the rear end portion of trough 8. One or two protrusions protruding upward from the top surface of trough support base 12 may be formed between the front end portion and the rear end portion of trough 8.

[0093] Above No. 1 Reference example In the above, instead of fixing the front end portion of the trough 8 to the trough support base 12 by the locking portion 30, it may be fixed to the trough support base 12 by a bolt, similar to the rear end portion of the trough 8.

[0094] In addition, the specific configuration of each part is as above Reference example The present invention is not limited to the above, and various modifications are possible without departing from the spirit of the present invention.

[0095] The present invention will be described below. Embodiment The invention relating to the above will be described.

[0096] Various types of vibration conveying devices are known. For example, the device disclosed in Document 1 (JP Patent Publication 2016-160099) is configured to convey an object to be conveyed on a conveying surface by vibrating a mass body (movable body) elastically supported on a base. Also, for example, the device disclosed in Document 2 (JP Patent Publication 2007-168936) has a pair of mass bodies (movable part and weight part) connected via an elastic member, and is configured to convey an object to be conveyed on a conveying surface by vibrating these in opposite phases.

[0097] In these vibration conveying devices, the vibration section for vibrating the mass body is composed of a piezoelectric element and an electromagnet, and a predetermined drive voltage is applied to the piezoelectric element or electromagnet from a drive circuit that controls it, thereby exciting a predetermined vibration in the mass body and achieving a predetermined conveying pattern.

[0098] In the above-mentioned vibrating conveying device, it is naturally necessary to form a wiring structure for electrically connecting the drive circuit that performs control with the piezoelectric element and the electromagnet, but the drive circuit that performs control is often provided in a position separate from the structure (main body of the device) such as the mass body and the base. Therefore, this wiring structure is connected at one end to the piezoelectric element and electromagnet provided inside the structure, laid along the surface of the mass body, or inserted into an insertion hole provided in the mass body as necessary, and then drawn out to the outside of the structure and connected at the other end to the drive circuit.

[0099] In conventional vibrating conveying devices, such a wiring structure is formed using a round cable. In order to facilitate the installation of the round cable and to protect the installed round cable from damage or breakage, a wiring groove is formed on the surface of the mass body, and the round cable is installed along the groove. In addition, since it is dangerous to leave the round cable exposed when installed along the surface of the mass body, a cover is sometimes provided from above.

[0100] In this type of configuration, when the mass is vibrated, the round cable rubs against the groove and cover, causing tension and acting as a damper to reduce the vibration. To avoid this, the depth and width of the wiring groove must be made sufficiently large relative to the outer diameter of the round cable to be laid.

[0101] On the other hand, in order to ensure a sufficient amplitude in a vibrating conveying device and realize stable conveying, it is essential to ensure a sufficient weight of the mass body, especially the mass body that functions as a weight. However, as the depth and width of the wiring groove formed on the surface of the mass body become larger, the weight of the mass body lost by this groove (missing mass) becomes larger, making it difficult to ensure the weight of the mass body.

[0102] In this way, if the grooves formed on the surface of the mass body are made larger in order to prevent the vibration from being weakened by the round cable, the weight of the mass body cannot be secured, which ultimately leads to a decrease in amplitude. Manufacturers of vibrating conveying devices have always been troubled by this dilemma. In particular, in recent years, as vibrating conveying devices have become more sophisticated, there has been a trend toward an increase in the number of piezoelectric elements and other components installed. In other words, there has been a trend toward an increase in the number of wiring lines. This dilemma has therefore become even more serious.

[0103] The present invention The object of the present invention is to realize a wiring structure in a vibration conveying device that is less likely to impair the conveying performance.

[0104] The present invention In order to achieve the above objectives, the following measures have been taken:

[0105] That is, The present invention is a vibration conveying device comprising a structure including an elastically supported mass body and a vibration unit that vibrates the mass body, wherein the vibration unit vibrates the mass body to convey an object to be conveyed, characterized in that at least a portion of the connection wiring that connects a connection target component provided inside the structure to a connected component provided outside the structure is formed using a flexible substrate, and at least a portion of the flexible substrate is arranged along the surface of the mass body.

[0106] This configuration eliminates the need for deep grooves on the surface of the mass body so that the vibrations are not damped by the connecting wires, and therefore the weight of the mass body is not compromised, thus resolving the above dilemma and avoiding the situation where the transport performance is impaired by the connecting wires.

[0107] Preferably, in the vibration conveying device, the flexible substrate has a spanning portion that is provided between members that move relative to one another due to vibration, and the spanning portion is provided with slack that allows relative movement between the members.

[0108] According to this configuration, when vibration causes relative movement between the members, the flexible substrate does not act as a damper to attenuate the vibration.

[0109] Preferably, in the vibration conveying device, the structure includes a plurality of the mass bodies, and the spanning portion is provided between the plurality of mass bodies.

[0110] According to this configuration, when the multiple mass bodies move relative to one another due to vibration, the flexible substrate does not act as a damper that weakens the vibration.

[0111] Preferably, in the vibration conveying device, the bridge portion is provided between the mass body and the component to be connected.

[0112] According to this configuration, when vibration causes relative movement between the mass body and the connection target component, the flexible substrate does not act as a damper that weakens the vibration.

[0113] Preferably, in the vibrating conveying device, the structure comprises an elastic body provided on the mass body, the vibration unit comprises a piezoelectric element for vibration provided on the elastic body and a vibration control unit for applying a drive voltage to the piezoelectric element, the part to be connected is the piezoelectric element for vibration, and the part to be connected is the vibration control unit.

[0114] According to this configuration, the piezoelectric element for vibration can be connected to the vibration control unit without impairing the transport performance.

[0115] Preferably, in the vibrating conveying device, the structure comprises an elastic body provided on the mass body, the vibration excitation unit comprises a detection piezoelectric element provided on the elastic body and a vibration excitation control unit which acquires a detection voltage from the elastic body, the part to be connected is the detection piezoelectric element, and the part to be connected is the vibration excitation control unit.

[0116] According to this configuration, the piezoelectric element for detection can be connected to the vibration control unit without impairing the transport performance.

[0117] The present invention According to this, it is possible to realize a wiring structure in which the conveying performance of the vibration conveying device is not easily impaired.

[0118] below, EMBODIMENTS OF THE PRESENT DISCLOSURE The following description will be given with reference to the drawings.

[0119] <1. Configuration of the vibration conveying device> Books Embodiment The configuration of the vibration conveying device according to the present invention will be described with reference to Figs. 8 to 10. Fig. 8 shows the configuration of the vibration conveying device according to the present invention. Embodiment Fig. 9 is a perspective view showing the configuration of the vibrating conveying device 1100 according to the present invention. Fig. 9 is a side view of the vibrating conveying device 1100. Fig. 10 is an exploded view of the vibrating conveying device 1100.

[0120] The vibration conveying device 1100 is a device that conveys an object to be conveyed (specifically, for example, various works such as IC chips and minute coils) by vibration.

[0121] The vibration conveying device 1100 includes a structure X including mass bodies 1001a, 1001b, and 1001c, elastic bodies 1002a and 1002b, a base 1003, a cover member 1004, etc., and a vibration unit Y including piezoelectric elements 1005p and 1005q, a vibration control unit 1006, a connection wiring 1007, etc. The vibration unit Y vibrates the mass bodies 1001a, 1001b, and 1001c of the structure X, thereby conveying an object to be conveyed.

[0122] 10, the first mass body 1001a includes an upper block portion 1011a and a lower block portion 1012a. The upper block portion 1011a is a long block-shaped member. On the other hand, the lower block portion 1012a is a block-shaped member that is shorter than the upper block portion 1011a, and the upper surface of the lower block portion 1012a is fixed to the lower surface of the upper block portion 1011a. The lower block portion 1012a may be fixed to the upper block portion 1011a by bolting or the like, or may be formed integrally with the upper block portion 1011a.

[0123] The upper surface of the first mass body 1001a (i.e., the upper surface of the upper block portion 1011a) forms a linear conveying surface (linear conveying surface) L, and the vibrating conveying device 1100 is installed so that this linear conveying surface L is a horizontal plane. Hereinafter, the extension direction (longitudinal direction) of the linear conveying surface L will be referred to as the "front-rear direction", and the direction perpendicular to the front-rear direction within the horizontal plane (i.e., the width direction (short length direction) of the linear conveying surface L) will be referred to as the "left-right direction".

[0124] The second mass body 1001b includes a gate-shaped main block formed by connecting a block-shaped portion (front block portion) 1011b arranged at the front and a block-shaped portion (rear block portion) 1012b arranged at the rear at their upper ends with a long connecting portion 1013b extending in the front-rear direction. The second mass body 1001b also includes a sub-block portion 1014b fixed by bolts to the underside of the connecting portion 1013b.

[0125] The third mass body 1001c includes a main block having an inverted gate shape as a whole, which is formed by connecting a block-shaped part (front block part) 1011c arranged at the front and a block-shaped part (rear block part) 1012c arranged at the rear by a long connecting part 1013c extending in the front-rear direction at the lower end of each part. The third mass body 1001c also includes a sub-block part 1014c fixed by bolts to the upper surface of the connecting part 1013c.

[0126] As shown in Fig. 9, the first mass body 1001a is connected to the second mass body 1001b via a pair of first elastic bodies 1002a, 1002a provided at the front and rear and extending parallel to each other, and is elastically supported by the second mass body 1001b. The second mass body 1002b is connected to the third mass body 1001c via a pair of second elastic bodies 1002b, 1002b provided at the front and rear and extending parallel to each other, and is elastically supported by the third mass body 1001c. The third mass body 1002c is connected to the base 1003 via a pair of vibration-proof springs 1030, 1030 provided at the front and rear and extending parallel to each other, and is elastically supported by the base 1003. However, the first elastic body 1002a, the second elastic body, and the vibration-proof spring 1030 are all flat elastic members, and are composed of leaf springs, etc. Also, the base 1003 is a block-shaped member that is long in the front-rear direction, and is placed on the floor surface or the like of the site where the vibrating conveying device 1100 is installed.

[0127] The connection mode of the first elastic body 1002a will be described in more detail. As shown in Fig. 10, upper bolt holes H1001a are provided on the front and rear end faces of the lower block portion 1012a of the first mass body 1001a. Lower bolt holes H1002a are provided near the lower end of the front face of the front block portion 1011b of the second mass body 1001b and near the lower end of the rear face of the rear block portion 1012b. One of the first elastic bodies 1002a is bolted at its upper end to the front face of the lower block portion 1012a of the first mass body 1001a and at its lower end to the front face of the front block portion 1011b of the second mass body 1001b. The other first elastic body 1002a is fixed at its upper end to the rear surface of the lower block portion 1012a of the first mass body 1001a with a bolt, and at its lower end to the rear surface of the rear block portion 1012b of the second mass body 1001b with a bolt, so that the first mass body 1001a is connected to the second mass body 1001b via the pair of first elastic bodies 1002a, 1002a.

[0128] The connection manner of the second elastic body 1002b will be described in more detail. As shown in Fig. 10, upper bolt holes H1001b are provided near the upper end of the rear surface of the front block part 1011b of the second mass body 1001b and near the upper end of the front surface of the rear block part 1012b. Lower bolt holes H1002b are provided near the lower end of the rear surface of the front block part 1011c of the third mass body 1001c and near the lower end of the front surface of the rear block part 1012c. One of the second elastic bodies 1002b is bolted at its upper end to the rear surface of the front block part 1011b of the second mass body 1001b and at its lower end to the rear surface of the front block part 1011c of the third mass body 1001c. The other second elastic body 1002b has its upper end bolted to the front surface of the rear block portion 1012b of the second mass body 1001b, and its lower end bolted to the front surface of the rear block portion 1012c of the third mass body 1001c, thereby connecting the second mass body 1001b to the third mass body 1001c via the pair of second elastic bodies 1002b, 1002b.

[0129] The connection mode of the vibration-proof springs 1030 will be described in more detail. As shown in FIG. 10, upper bolt holes H1301 are provided on the front surface of the front block portion 1011c of the third mass body 1001c and the rear surface of the rear block portion 1012c. Lower bolt holes H1302 are provided on the front and rear end surfaces of the base 1003. One of the vibration-proof springs 1030 is bolted at the upper end to the front surface of the third mass body 1001c and at the lower end to the front surface of the base 1003. The other vibration-proof spring 1030 is bolted at the upper end to the rear surface of the third mass body 1001c and at the lower end to the rear surface of the base 1003. In this way, the third mass body 1001c is connected to the base 1003 via the pair of vibration-proof springs 1030, 1030.

[0130] In this way, in the vibrating conveying device 1100, the second mass body 1001b elastically supported via the second elastic body 1002b is placed on the third mass body 1001c installed on the base 3 via the vibration isolation spring 1030, and the first mass body 1001a elastically supported via the first elastic body 1002a is placed on top of the second mass body 1001b. If we compare this to a building, the second mass body 1001a forming the first floor is placed on the third mass body 1001c forming the foundation, and the first mass body 1001a forming the second floor is placed on top of that, resulting in a two-story structure.

[0131] However, the first elastic body 1002a and the second elastic body 1002b are inclined in opposite directions to each other. That is, as shown in Fig. 9, the first elastic body 1002a provided between the first mass body 1001a and the second mass body 1001b is inclined forward as it goes downward, and the second elastic body 1002b provided between the second mass body 1001b and the third mass body 1001c is inclined backward as it goes downward.

[0132] The first elastic body 1002a and the second elastic body 1002b are set to have different resonance frequencies. For example, the resonance frequency of the first elastic body 1002a is set to 500 Hz, and the resonance frequency of the second elastic body 1002b is set to 200 Hz.

[0133] The first elastic body 1002a and the second elastic body 1002b act as vibration springs for vibrating the mass bodies 1001a, 1001b, and 1001c, and each of the elastic bodies 1002a and 1002b is provided with a piezoelectric element (vibration piezoelectric element) 1005p for elastically deforming the elastic bodies 1002a and 1002b to vibrate them. In addition, each of the elastic bodies 1002a and 1002b is provided with a piezoelectric element (detection piezoelectric element) 1005q for detecting the degree of elastic deformation. The vibration piezoelectric element 1005p is provided on both sides of the two first elastic bodies 1002a and 1002a and the two second elastic bodies 1002b and 1002b. In other words, a total of eight vibration piezoelectric elements 1005p are provided. On the other hand, the detection piezoelectric element 1005q is provided on one surface of the first elastic body 1002a provided at the rear and the second elastic body 1002b provided at the front. That is, a total of two detection piezoelectric elements 1005q are provided.

[0134] As shown in FIG. 17, a wiring component 1050 is attached to each of the vibration piezoelectric elements 1005p and each of the detection piezoelectric elements 1005q. The wiring component 1050 has a part that integrally winds the elastic bodies 1002a and 1002b and the two vibration piezoelectric elements 1005p (or one detection piezoelectric element 1005q) provided on both sides of the elastic bodies 1002a and 1002b, and a part that extends from the part and is bent in a U-shape. Lead wires extending from the piezoelectric elements 1005p and 1005q are laid in the U-shape bent part of the wiring component 1050, and one end of the connection wiring 1007 is connected to the lead wires. The other end of the connection wiring 1007 is connected to the vibration control unit 1006, so that the piezoelectric elements 1005p and 1005q are electrically connected to the vibration control unit 1006.

[0135] The vibration control unit 1006 is a functional unit that performs vibration control to vibrate the mass bodies 1001a, 1001b, and 1001c so that the object to be transported on the linear transport surface L is transported in a predetermined transport manner, and is realized by a drive circuit or the like.

[0136] <2. Operation of the vibration conveyor> Next, the conveying mode achieved by the vibrating conveying device 1100 will be described with continued reference to FIGS.

[0137] The vibrating conveying device 1100 can switch between a conveying mode in which the workpiece on the linear conveying surface L is conveyed forward (forward conveying) and a conveying mode in which the workpiece is conveyed backward (return conveying).

[0138] When feeding and conveying, the vibration control unit 1006 applies a drive voltage to each vibration piezoelectric element 1005p provided on each first elastic body 1002a to vibrate each first elastic body 1002a at its resonance frequency. Then, the first mass body 1001a and the second mass body 1001b vibrate in opposite phases to each other. However, since the first elastic body 1002a is inclined so as to face forward as it goes downward, at this time, the linear conveying surface L vibrates in a diagonal direction facing forward and upward and in the opposite direction. As a result, the work on the linear conveying surface L is conveyed forward.

[0139] On the other hand, when performing return transport, the vibration control unit 1006 applies a drive voltage to each vibration piezoelectric element 1005p provided on each second elastic body 1002b to vibrate each second elastic body 1002b at its resonance frequency. Then, the second mass body 1001b and the third mass body 1001c vibrate in opposite phases to each other. However, since the second elastic body 1002b is inclined so as to move backward as it goes downward, at this time, the linear transport surface L vibrates in a diagonal direction toward the rear and upward, and in the opposite direction. As a result, the workpiece on the linear transport surface L is transported backward.

[0140] In this manner, in the vibration conveying device 1100, the vibration control unit 1006 switches between a state in which the first elastic body 1002a vibrates and a state in which the second elastic body 1002b vibrates by switching the vibration piezoelectric element 1005p to which the drive voltage is applied. This switches the vibration mode of the mass bodies 1001a, 1001b, and 1001c, and switches between forward conveyance and return conveyance.

[0141] The excitation control unit 1006 applies a drive voltage to the excitation piezoelectric element 1005p through the connection wiring 1007, while acquiring a detection voltage from the detection piezoelectric element 1005q through the connection wiring 1007. That is, the detection piezoelectric element 1005q outputs a voltage generated in response to the deformation of each of the elastic bodies 1002a and 1002b as a detection voltage, which is acquired by the excitation control unit 1006. The excitation control unit 1006 performs correction of the drive voltage applied to the excitation piezoelectric element 1005p based on the acquired detection voltage.

[0142] As described above, the resonant frequencies of the first elastic body 1002a and the second elastic body 1002b are set to different values ​​from each other. Therefore, when one of the first elastic body 1002a and the second elastic body 1002b vibrates at its resonant frequency to be transported in a predetermined direction, the other elastic body does not interfere with the transport.

[0143] That is, when the first elastic body 1002a is vibrating at its resonant frequency, the second elastic body 1002b does not deform as much as the first elastic body 1002a, and does not impede the forward transport of the workpiece. Since the second elastic body 1002b does not deform as much, the second mass body 1001b and the third mass body 1001c connected via the second elastic body 1002b vibrate as if they were one rigid body. At this time, the second mass body 1001b functions as a weight, and the second elastic body 1002b functions as an auxiliary vibration-proof spring.

[0144] In addition, when the second elastic body 1002b is vibrating at its resonant frequency, the first elastic body 1002a does not deform elastically as much as the second elastic body 1002b, and does not impede the backward transport of the workpiece. Since the first elastic body 1002a does not deform elastically, the first mass body 1001a and the second mass body 1001b connected via the first elastic body 1002a vibrate as if they were one rigid body. At this time, the third mass body 1001c functions as a weight, and the first mass body 1001a and the second mass body 1001b vibrate as if they were one body to transport the workpiece backward.

[0145] As a specific application example of the vibrating conveying device 1100, a configuration in which a bowl feeder is connected to the rear end portion of the linear conveying surface L can be assumed. In this case, the work supplied from the bowl feeder can be conveyed forward by the feed conveyance. On the other hand, for example, the lower block portion 1012a of the first mass body 1001a can function as a chute platform, and the work dropped on this chute platform can be returned to the bowl feeder by the return conveyance.

[0146] In a conventional vibrating conveying device, in order to be able to switch between forward conveying and return conveying, for example, two device units each consisting of a structure including a mass body with a linear conveying surface and a vibration unit for vibrating the structure are arranged side by side. Then, forward conveying is performed by vibrating the linear conveying surface on one structure side with one vibration unit, and return conveying is performed by vibrating the linear conveying surface on the other structure side with the other vibration unit. In contrast to such conventional vibrating conveying devices, this Embodiment The vibrating conveying device 1100 according to the present invention is configured to be able to realize both forward conveying and return conveying, even though it has only one structure X and one vibration unit Y. Therefore, the size of the device (particularly the width size) can be reduced to about half compared to conventional vibrating conveying devices. This allows easy introduction to sites with limited space. Furthermore, when multiple vibrating conveying devices 1100 are used in a multi-row arrangement, twice as many vibrating conveying devices 1100 can be arranged compared to conventional vibrating conveying devices, thereby doubling the conveying efficiency.

[0147] <3. Connection wiring> Next, the connection wiring 1007 provided in the vibrating conveying device 1100 will be described with reference to Figs. 11 and 12. Fig. 11 is a perspective view of the vibrating conveying device 1100 with the cover member 1004 removed. Fig. 12 is a side view of the vibrating conveying device 1100 with the cover member 1004 removed. In the following description, when there is no need to distinguish between the excitation piezoelectric element 1005p and the detection piezoelectric element 1005q, they will simply be referred to as "piezoelectric element 1005".

[0148] The connection wiring 1007 is a wiring that connects each piezoelectric element 1005 as a connection target component and the vibration control unit 1006 as a connected component, and connects both 1005 and 1006. As described above, in the vibration conveying device 1100, the structure X is configured including the mass bodies 1001a, 1001b, and 1001c, the elastic bodies 1002a and 1002b, the base 1003, the cover member 1004, and the like, and the vibration control unit 1006 is provided outside this structure X. On the other hand, each piezoelectric element 1005 is attached to the elastic bodies 1002a and 1002b as described above. That is, it is provided inside the structure X. That is, the connection wiring 1007 is connected at one end to the piezoelectric element 1005 provided inside the structure X, drawn out to the outside of the structure X, and connected at the other end to the vibration control unit 1006.

[0149] A part of the connection wiring 1007 is configured using a flexible substrate F. That is, a terminal 1060 of a cable extending from the vibration control unit 1006 is drawn out to the upper surface side of the base 1003 through an insertion part 1031 formed in the base 1003 (FIG. 10), and a part of the connection wiring 1007 that connects this terminal 1060 and each piezoelectric element 1005 is configured using the flexible substrate F.

[0150] The flexible substrate F constituting a part of the connection wiring 1007 will be described with reference to Figs. 13 and 14 in addition to Figs. 11 and 12. Fig. 13 is a diagram showing the flexible substrate F before being folded three-dimensionally. Fig. 14 is a diagram showing the flexible substrate F folded three-dimensionally.

[0151] Flexible board F differs from so-called rigid boards in that a wiring pattern is formed on a thin flexible substrate (base film), and is also called flexible printed wiring board, FPC (Flexible Printed Circuits), etc. In this example, a part of the connection wiring 1007 is formed by a flexible board F in which wiring patterns are formed using copper foil or the like on both sides of a base film made of an insulating material such as polyimide. A flexible board that forms wiring (cable) is also called a flex cable.

[0152] The flexible substrate F has a shape that branches out from a pair of base ends F1 toward six tip ends F2. A terminal portion 1070 is provided at each of the ends F1 and F2, and a wiring pattern is formed on the front and back surfaces of the substrate so as to connect the terminal portion 1070 on the base end F1 side to the terminal portion 1070 on the tip end F2 side.

[0153] The flexible substrate F has flexibility, and is folded at predetermined positions from the planar form shown in Fig. 13, and is bent at predetermined positions to form a three-dimensional shape corresponding to the shape of the structure X (Fig. 14), and is attached to the structure X (Figs. 11 and 12). At this time, the terminal portion 1070 provided on each base end portion F1 is connected to the terminal 1060 of the vibration control portion 1006, and the terminal portion 1070 provided on each tip portion F2 is connected to the piezoelectric element 1005. After the flexible substrate F is attached, a cover member 1004 is disposed so as to cover the flexible substrate F (Fig. 11).

[0154] When attached to the structure X, portions 1711, 1712, and 1713 of the flexible substrate F are disposed along the side surfaces of the mass bodies 1001b and 1001c (such portions are also referred to as "extending portions" below). Other portions 1721, 1722, and 1723 are provided spanning between members that move relatively due to vibration (such portions are also referred to as "spanning portions" below). The extending portions and spanning portions will be described below.

[0155] (side part) The flexible substrate F is provided with an extension portion (lower extension portion) 1711 arranged along the side of the third mass body 1001c, an extension portion (front extension portion) 1712 arranged along the side of the front block portion 1011b of the second mass body 1001b, and an extension portion (rear extension portion) 1713 arranged along the side of the rear block portion 1012b of the second mass body 1001b.

[0156] The extensions 1711, 1712, and 1713 are shaped to fit within the plane of the side surfaces of the mass bodies 1001c and 1001b, are disposed along the side surfaces, and are fixed to the side surfaces using double-sided tape or the like.

[0157] (First section) The flexible substrate F has two spanning portions (first spanning portions) 1721 disposed across the second mass body 1001b and the third mass body 1001c. One of the first spanning portions 1721 is provided between the lower extension portion 1711 and the front extension portion 1712 of the flexible substrate F (FIGS. 13 and 14), and is disposed between the third mass body 1001c and the front block portion 11b of the second mass body 1001b when attached to the structure X (FIG. 12). The other first spanning portion 1721 is provided between the lower extension portion 1711 and the rear extension portion 1713 of the flexible substrate F (FIGS. 13 and 14), and is disposed between the third mass body 1001c and the rear block portion 1012b of the second mass body 1001b when attached to the structure X (FIG. 12).

[0158] The first spanning portion 1721 will be described with reference to Fig. 15. Fig. 15 shows the first spanning portion 1721 provided on the rear side, but the first spanning portion 1721 provided on the front side has the same configuration.

[0159] Before being folded three-dimensionally, the first spanning portion 1721 is a strip-like portion extending linearly (FIG. 13), and in the three-dimensional shape, a boundary 1730 with the extension portions 1711, 1713 (1712) is folded at approximately 90°, and an approximately central portion of the first spanning portion 1721 is folded into a U-shape (FIG. 14). Then, the first spanning portion 1721 folded into a U-shape is inserted between a pair of opposing surfaces S1, S2, that is, between the lower surface S1 of the second mass body 1001b and the upper surface S2 of the third mass body 1001c (FIG. 15).

[0160] Therefore, the first spanning portion 1721 is provided such that the portion from one end side to the bent portion runs along the bottom surface S1 of the second mass body 1001b, and the portion from the other end side to the bent portion runs along the top surface S2 of the third mass body 1001c. However, the first spanning portion 1721 is not lifted up from the surfaces S1, S2 by being sandwiched at both ends between the protruding pieces 1041 provided on the cover member 1004 and the surfaces S1, S2, but the portions other than these are not fixed to the surfaces S1, S2 and are provided so as to be able to move away from the surfaces S1, S2.

[0161] In this way, the first spanning portion 1721 is not provided linearly between the two mass bodies 1001b, 1001c, but is provided with slack (i.e., play). Therefore, when the two mass bodies 1001b, 1001c move relatively to each other due to vibration, the slack absorbs the displacement of the two mass bodies 1001b, 1001c, allowing the relative movement of the two mass bodies 1001b, 1001c. In other words, the flexible substrate F does not hinder the relative movement of the two mass bodies 1001b, 1001c, and the flexible substrate F does not act like a damper that weakens vibrations in this spanning portion.

[0162] In particular, the direction in which the two mass bodies 1001b and 1001c move relative to each other during vibration basically includes only components in the front-rear and up-down directions, and the first spanning portion 1721 is designed to be flexibly deformed in each of these directions, which allows the two mass bodies 1001b and 1001c to move relatively in each of these directions. That is, the first spanning portion 1721 is bent into a U-shape and arranged along the front-rear direction, with both ends arranged to overlap vertically. Therefore, the first spanning portion 1721 can widely follow the relative movement in the front-rear direction of the two mass bodies 1001b and 1001c by deforming so that the position of the bent portion changes, and can widely follow the relative movement in the up-down direction of the two mass bodies 1001b and 1001c by deforming so that the bending angle changes.

[0163] (Second section) The flexible substrate F has two spanning portions (second spanning portions) 1722, 1722 disposed across the third mass body 1001c and the terminal 1060 of the vibration control unit 1006. Each second spanning portion 1722 is provided between each base end portion F1 and the lower extension portion 1711 of the flexible substrate F (FIGS. 13 and 14), and is disposed in the front-rear direction between the third mass body 1001c and the base 1003 when attached to the structure X (FIG. 12).

[0164] The second spanning portion 1722 will be described with reference to Fig. 16. Although the rear second spanning portion 1722 is shown in Fig. 16, the front second spanning portion 1722 has the same configuration.

[0165] The second spanning portion 1722 is a strip-like portion extending linearly before being folded three-dimensionally (FIG. 13), and in the three-dimensional shape, the boundary 1730 with the lower extension portion 1711 is folded at approximately 90°, and the approximately central portion of the second spanning portion 1722 is folded into a U-shape (FIG. 14). Then, the second spanning portion 1722 folded into a U-shape is inserted between the pair of opposing surfaces S1 and S2, that is, between the lower surface S1 of the third mass body 1001c and the upper surface S2 of the base 3 (FIG. 16). Then, the terminal portion 1070 provided at the base end F1 is connected to the terminal 1060 of the vibration control portion 1006 drawn out to the upper surface of the base 1003.

[0166] Therefore, the second spanning portion 1722 is provided such that the portion from one end side to the bent portion runs along the lower surface S1 of the third mass body 1001c, and the portion from the other end side to the bent portion runs along the upper surface S2 of the base 1003. However, the second spanning portion 1722 is fixed to the upper surface S2 of the base 1003 at the end on the side connected to the terminal 1060, but the other portions are not fixed to the surfaces S1, S2 and are provided so as to be spaced apart from the surfaces S1, S2.

[0167] In this way, the second spanning portion 1722 is provided with slack, rather than being provided linearly between the third mass body 1001c and the base 1003. Therefore, when the third mass body 1001c moves relative to the base 1003 due to vibration, the slack absorbs the displacement of the third mass body 1001c relative to the base 1003, allowing the relative movement of the third mass body 1001c. In other words, the flexible substrate F does not hinder the relative movement of the third mass body 1001c, and the flexible substrate F does not act like a damper that weakens vibrations in this spanning portion.

[0168] In particular, while the direction in which the third mass body 1001c moves relative to the base 1003 during vibration basically includes only front-rear and up-down components, the second spanning portion 1722, like the first spanning portion 1721, is bent into a U shape and arranged along the front-rear direction with both ends arranged overlapping vertically, so that it can flexibly deform in each of these directions. Therefore, the second spanning portion 1722 can fully tolerate the relative movement of the third mass body 1001c with respect to the base 1003 in each of these directions.

[0169] (Third section) The flexible substrate F has six spanning portions (third spanning portions) 1723 disposed between the second mass body 1001b or the third mass body 1001c and each piezoelectric element 1005. Each third spanning portion 1723 is provided between each tip portion F2 and each extension portion 1711, 1712, 1713 in the flexible substrate F (FIGS. 13 and 14), and is disposed between the mass bodies 1001b, 1001c and each piezoelectric element 1005 when attached to the structure X (FIG. 12).

[0170] The third spanning portion 1723 will be described with reference to Fig. 17. Fig. 17 shows the third spanning portion 1723 disposed between the front block portion 1011c of the third mass body 1001c and the piezoelectric element 1005 (vibration piezoelectric element 1005p) provided on the front second elastic body 1002b, but the other third spanning portions 1723 have approximately the same configuration.

[0171] The third spanning portion 1723 is a strip-like portion extending linearly in the unfolded state (FIG. 13), and in the three-dimensional shape, the boundaries 1730 between the respective extension portions 1711, 1712, and 1713 are bent at approximately 90°, and the approximately central portion of the third spanning portion 1723 is bent into a U-shape (FIG. 14). The third spanning portion 1723 bent into a U-shape is inserted between a pair of opposing surfaces S1 and S2, that is, in the case of the third spanning portion 1723 shown in FIG. 17, between the rear surface S1 of the front block portion 1011c of the third mass body 1001c and the front surface S2 of the wiring component 1050 provided on the piezoelectric element 1005 (FIG. 17). Then, the terminal portion 1070 provided on the tip portion F2 is connected to the wiring portion 1050 (and thus the piezoelectric element 1005).

[0172] Therefore, third spanning portion 1723 is provided such that a portion from one end side to the bent portion runs along rear surface S1 of third mass body 1001c, and a portion from the other end side to the bent portion runs along front surface S2 of wiring component 1050. However, third spanning portion 1723 is fixed to front surface S2 of wiring component 1050 at an end portion connected to wiring component 1050, but other portions are not fixed to surfaces S1, S2 and are provided so as to be spaced apart from surfaces S1, S2.

[0173] In this way, the third spanning portion 1723 is provided with slack, rather than being provided linearly between the second mass body 1001b or the third mass body 1001c and the piezoelectric element 1005. Therefore, when the elastic bodies 1002a, 1002b are deformed by vibration and the piezoelectric element 1005 moves relatively to the mass bodies 1001b, 1001c, the slack absorbs the displacement of the piezoelectric element 1005 relative to the mass bodies 1001b, 1001c, allowing the relative movement of the piezoelectric element 1005. In other words, the flexible substrate F does not prevent the deformation of the elastic bodies 1002a, 1002b, and the flexible substrate F does not act like a damper that weakens vibrations in this spanning portion.

[0174] In particular, the direction in which the piezoelectric element 1005 moves relative to the mass bodies 1001b and 1001c during vibration basically includes only components in the front-rear and up-down directions, and the second spanning portion 1722 is designed to be flexibly deformed in each of these directions, which allows the piezoelectric element 1005 to move relatively to the mass bodies 1001b and 1001c in each of these directions. That is, the third spanning portion 1723 is bent into a U-shape and arranged so as to be approximately aligned vertically, with both ends arranged so as to overlap horizontally. Therefore, the third spanning portion 1723 can widely follow the vertical relative movement of the piezoelectric element 1005 by deforming so as to change the position of the bent portion, and can widely follow the horizontal relative movement of the piezoelectric element 1005 by deforming so as to change the bending angle.

[0175] <4. Effects> The above Embodiment The vibration conveying device 1100 according to the present invention includes a structure X including elastically supported mass bodies 1001a, 1001b, and 1001c, and a vibration unit Y that vibrates the mass bodies 1001a, 1001b, and 1001c, and is configured so that the conveying object is conveyed by the vibration unit Y vibrating the mass bodies 1001a, 1001b, and 1001c. Here, at least a part of the connection wiring 1007 that connects the piezoelectric element 1005, which is a connection target component provided inside the structure X, and the vibration control unit 11006, which is a connected component provided outside the structure X, is formed using a flexible substrate F, and at least a part 1711, 1712, and 1713 of the flexible substrate F are arranged along the surface of the mass bodies 1001b and 1001c. With this configuration, it is not necessary to provide deep grooves on the surface of the mass bodies 1001b and 1001c so that the vibration is not weakened by the connection wiring 1007. Therefore, the weight of the mass bodies 1001b and 1001c is not compromised, and the transport performance is prevented from being impaired by the connection wiring 1007.

[0176] In particular, here, each portion of the connection wiring 1007 that is disposed along the surface of the second mass body 1001b and the third mass body 1001c is configured from the flexible substrate F. The second mass body 1001b functions as a weight during forward transport, and the third mass body 1001c functions as a weight during return transport, and by ensuring sufficient mass for both mass bodies 1001b and 1001c, transport performance for both forward transport and return transport can be sufficiently guaranteed.

[0177] In addition, Embodiment In the vibration conveying device 1100 according to the present invention, the flexible substrate F includes spanning portions 1721, 1722, and 1723 that are provided across members that move relatively due to vibration, and the spanning portions 1721, 1722, and 1723 are provided with slack that allows the relative movement between the members. Therefore, when the relative movement between the members occurs due to vibration, the flexible substrate F does not act like a damper that weakens the vibration.

[0178] In addition, Embodiment In the vibration conveying device 1100 according to the present invention, the structure X includes a plurality of mass bodies 1001b and 1001c, and a bridge portion (first bridge portion) 1721 is provided between the plurality of mass bodies 1001b and 1001c. Therefore, when the plurality of mass bodies 1001b and 1001c move relatively to each other due to vibration, the flexible substrate F does not act as a damper that weakens the vibration.

[0179] In addition, Embodiment In the vibration conveying device 1100 according to the present invention, a bridge portion (third bridge portion) 1723 is provided between the mass bodies 1001b, 1001c and the piezoelectric element 1005, which is a connection target component. Therefore, when the mass bodies 1001b, 1001c and the piezoelectric element 1005 move relatively due to vibration, the flexible substrate F does not act as a damper that weakens the vibration.

[0180] In addition, EmbodimentIn the vibration conveying device 1100 according to the present invention, the structure X includes elastic bodies 1002a and 1002b provided on the mass bodies 1001a, 1001b and 1001c, and the vibration unit Y includes a vibration piezoelectric element 1005p provided on the elastic bodies 1002a and 1002b, and a vibration control unit 1006 that applies a drive voltage thereto. The connection target component in the connection wiring 1007 is the vibration piezoelectric element 1005p, and the connected component is the vibration control unit 1006. Therefore, the vibration piezoelectric element 1005p can be connected to the vibration control unit 1006 without impairing the conveying performance.

[0181] In addition, Embodiment In the vibration conveying device 1100 according to the present invention, the structure X includes elastic bodies 1002a and 1002b provided on the mass bodies 1001a, 1001b and 1001c, and the vibration unit Y includes a detection piezoelectric element 1005q provided on the elastic bodies 1002a and 1002b, and a vibration control unit 1006 that acquires a detection voltage from the elastic bodies 1002a and 1002b. The connection target component in the connection wiring 1007 is the detection piezoelectric element 1005q, and the connected component is the vibration control unit 1006. Therefore, the detection piezoelectric element 1005q can be connected to the vibration control unit 1006 without impairing the conveying performance.

[0182] Moreover, the installation work of the flexible substrate F is completed simply by folding and bending it at predetermined positions to form a three-dimensional shape and attaching it to the structure X. Therefore, compared to the installation work of a round cable, for example, the workload involved in installation is significantly reduced.

[0183] In addition, EmbodimentIn the example shown in FIG. 1, the portions 1711, 1712, and 1713 of the connection wiring 1007 arranged along the surfaces of the mass bodies 1001b and 1001c are made of a flexible substrate F that is significantly thinner than a round cable or the like. For example, if the base film is made of polyimide, which has excellent voltage resistance, the thickness of the base film can be reduced to about 25 μm. Also, if the wiring pattern is made of copper foil, the film thickness can be reduced to about 18 μm. For example, if the flexible substrate F is formed with this combination, the thickness can be reduced to about 127 μm. By forming the portions 1711, 1712, and 1713 of the connection wiring 1007 arranged along the surfaces of the mass bodies 1001b and 1001c using such a thin flexible substrate F, the increase in the width dimension of the device due to the installation of the connection wiring 1007 can be significantly reduced compared to the case of using a round cable.

[0184] In particular, the above Embodiment The vibrating conveying device 1100 according to the present invention is configured to be able to switch between forward conveying and return conveying without increasing the size of the device (particularly the width size), which enables it to be introduced into sites where space is limited and achieves high conveying efficiency through a multi-row arrangement. By adopting a connection wiring 1007 including a flexible substrate F, the advantage of the thin vibrating conveying device 1100 with a compact width size can be utilized to the maximum extent without compromising this advantage.

[0185] In addition, Embodiment In order to switch between forward transport and return transport without increasing the size of the device, the vibration conveying device 1100 according to the present invention is provided with a relatively large number of elastic bodies 1002a, 1002b, and further with a relatively large number of piezoelectric elements 1005 in the structure X. In other words, the number of components to be connected is large. However, if at least a part of the connection wiring 1007 is formed using a flexible substrate F, a large number of components to be connected can be easily connected without impairing the transport performance of the vibration conveying device 1100.

[0186] <5. Modifications> The above Embodiment In the vibration conveying device 1100 according to the present invention, grooves corresponding to the shapes of the extension parts 1711, 1712, 1713 arranged along the surfaces of the mass bodies 1001c, 1001b may be formed, and the extension parts 1711, 1712, 1713 may be arranged along the surfaces so as to be accommodated inside the corresponding grooves. In this case, however, it is sufficient that the depth of the grooves is equivalent to the thickness of the flexible substrate F, and the depth may be very shallow, about several millimeters. By forming such grooves, the installation work of the flexible substrate F can be further simplified.

[0187] In addition, Embodiment In the embodiment, a portion of the connection wiring 1007 connecting the piezoelectric element 1005, which is the component to be connected, and the vibration control unit 1006, which is the component to be connected, is made of a flexible substrate F, but the entire connection wiring 7 may be made of a flexible substrate F.

[0188] In addition, Embodiment In the embodiment, the portion of the connection wiring 1007 that connects the terminal 1060 of the cable extending from the vibration control unit 1006 to each of the piezoelectric elements 1005 is configured by one flexible substrate F, but the portion may be configured to include, for example, a plurality of flexible substrates. For example, the portions corresponding to the extension portions 1711, 1712, and 1713 may be configured by separate flexible substrates, and the portions corresponding to the spanning portions 1721, 1722, and 1723 may be configured by round cables provided with slack.

[0189] The above Embodiment The connection wiring 1007 according to the above can be applied to various types of vibration conveying devices. For example, some vibration conveying devices are configured to convey an object to be conveyed on a conveying surface formed on the upper surface of a mass body elastically supported on a base or the like by vibrating the mass body with an electromagnet. EmbodimentIn this case, for example, at least a part of the connection wiring that connects the electromagnet and the vibration control unit may be made of a flexible substrate, and at least a part of the flexible substrate may be disposed along the surface of the mass body.

[0190] For example, some vibrating conveying devices have two mass bodies (a movable part and a weight part) connected via an elastic body and a conveying table connected to one of the mass bodies, and are configured to convey an object to be conveyed on a conveying surface formed on the conveying table by applying a drive voltage to a piezoelectric element attached to the elastic body to vibrate both mass bodies in opposite phases. Embodiment In this case, for example, at least a part of the connection wiring that connects the piezoelectric element and the vibration control unit may be configured with a flexible substrate, and at least a part of the flexible substrate may be disposed along the surface of one or both of the mass bodies.

[0191] The above Embodiment In the above, the component to be connected in the connection wiring 1007 is described as a piezoelectric element 1005, but the component to be connected is not limited to the piezoelectric element 1005 and may be, for example, an electromagnet, as in the above modified example, or various sensor components, etc.

[0192] The above Embodiment In the above, the connected part of the connection wiring 1007 is the vibration control unit 1006, but the connected part is not limited to this.

[0193] In addition, the base material and wiring of the flexible substrate F are formed from the above-mentioned Embodiment The present invention is not limited to the examples given above.

[0194] Furthermore, the objects to be transported by the vibration transport device are not limited to workpieces such as IC chips and minute coils.

[0195] Other configurations are also EmbodimentVarious modifications are possible without departing from the spirit of the invention. [Industrial Applicability]

[0196] The present invention can be applied to a vibrating conveying device capable of conveying an object to be conveyed in a predetermined direction, and a multi-row vibrating conveying system including the same. [Explanation of symbols]

[0197] 1. Vibration conveying device 2 Base 2c Support surface 5 Movable part (first mass body) 6 Fixed part (second mass body) 8 Trough (first mass) 8t linear transport surface 10 Drive spring (drive elastic body) 12 Trough support base (first mass) 50 Anti-vibration spring (anti-vibration elastic body) 51 First arm 52 Second arm section 201 Vibration conveying device 210 Drive spring 212a Main block (second mass) 212b Sub-block (second mass) 213a Main Block 213b Subblock 350 Anti-vibration spring (anti-vibration elastic body) 351 First Arm 352 Second Arm 353 Curved section A1 1st fixed part A2 2nd fixed part T vibrator X structure 1001a First mass body 1001b Second mass body 1001c third mass body 1002a First elastic body 1002b Second elastic body 1003 Foundation 1004 Cover member Y vibrating part 1005 Piezoelectric element (connection target part) 1005p Piezoelectric element for excitation 1005q Piezoelectric element for detection 1006 Vibration control unit (connected part) 1007 Connection wiring F Flexible board 1711 Lower extension part 1712 Front extension part 1713 Rear extension part 1721 First section 1722 Second Crossing Section 1723 Third section 1100 Vibrating conveyor

Claims

1. A vibration conveying device that conveys an object on a linear conveying surface by vibration, a first mass having the linear transport surface; A second mass that vibrates in an antiphase with the first mass; a driving elastic body connecting the first mass body and the second mass body; a base having a support surface disposed on the upstream side and downstream side in the conveying direction with respect to a vibrator including the first mass body, the second mass body, and the driving elastic body, the support surface being disposed above a center portion in a height direction of the vibrator or a center of gravity position of the vibrator; a vibration-isolating elastic body connecting said vibrating body to said support surface,

2. The vibration-isolating elastic body is A first arm portion that is attached to the support surface and that damps vertical vibrations; 2. The vibrating conveying device according to claim 1, further comprising a second arm portion disposed perpendicular to the first arm portion and attached to the vibrating body.

3. The vibration-isolating elastic body is A first arm portion that is attached to the support surface and that damps vertical vibrations; a second arm portion disposed perpendicular to the first arm portion and attached to the vibrating body; 2. The vibrating conveying device according to claim 1, further comprising a curved portion that connects the first arm portion and the second arm portion and is curved in a convex shape.

4. A vibrating conveying device as described in any one of claims 1 to 3, characterized in that a first fixed portion between the vibrating body and the vibration-proof elastic body is positioned below a second fixed portion between the support surface and the vibration-proof elastic body.

5. A plurality of vibration conveying devices according to any one of claims 1 to 4 are provided, A multi-row vibratory conveying system, wherein the plurality of linear conveying surfaces are arranged substantially in parallel.

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