Electric motor, stage device, lithography device, and article manufacturing method

Abstract

To provide an advantageous technique for shortening a time required to stop or decelerate a mover while preventing damage to a coil.SOLUTION: An electric motor includes a magnet assembly, a coil assembly including a plurality of coils, a first dynamic braking circuit and a second dynamic braking circuit which generate braking forces by short-circuiting those of the plurality of coils which face the magnet assembly, and a control circuit which controls the operation of the first dynamic braking circuit and the second dynamic braking circuit, the control circuit activates the first dynamic braking circuit and the second dynamic braking circuit at mutually different times.SELECTED DRAWING: Figure 1A

Description

[Technical field]

[0001] The present invention relates to an electric motor, a stage apparatus, a lithography apparatus, and a method for manufacturing an article. [Background technology]

[0002] Patent Document 1 describes a stage device that moves a moving body by a linear motor. This linear motor has multiple coils as a stator and a magnet as a mover, and generates a thrust by Lorentz force by switching which of the multiple coils to energize. In this stage device, of a pair of coils arranged at positions apart from each other, the coil facing the magnet is used as a dynamic brake coil, and the other coil is used as a current limiting resistor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-237069 A Summary of the Invention [Problem to be solved by the invention]

[0004] Although damage to the dynamic braking coil can be prevented by limiting the current flowing through the dynamic braking coil during dynamic braking operation, this has the problem of lengthening the time required to stop or decelerate the mover.

[0005] An object of the present invention is to provide an advantageous technique for shortening the time required to stop or decelerate a mover while preventing damage to a coil. [Means for solving the problem]

[0006] One aspect of the present invention relates to an electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, the electric motor comprising a first dynamic braking circuit and a second dynamic braking circuit that generate braking forces by short-circuiting those of the plurality of coils that face the magnet assembly, and a control circuit that controls operation of the first dynamic braking circuit and the second dynamic braking circuit, the control circuit activating the first dynamic braking circuit and the second dynamic braking circuit at mutually different times. Effect of the Invention

[0007] The present invention provides an advantageous technique for reducing the time required to stop or decelerate a mover while preventing damage to the coil. [Brief description of the drawings]

[0008] [Figure 1A] FIG. 4 is a diagram showing the circuit configuration of an A-phase of the electric motor according to the first embodiment during normal operation. [Figure 1B] FIG. 4 is a diagram showing a circuit configuration of a B-phase of the electric motor according to the first embodiment during normal operation. [Figure 2A] FIG. 4 is a diagram showing the circuit configuration of the A-phase of the electric motor of the first embodiment in a first stage during an emergency stop. [Figure 2B] FIG. 4 is a diagram showing the circuit configuration of the A-phase of the electric motor of the first embodiment in a first stage during an emergency stop. [Figure 3A] FIG. 4 is a diagram showing the circuit configuration of the A-phase of the electric motor of the first embodiment in a second stage during an emergency stop. [Figure 3B] FIG. 4 is a diagram showing the circuit configuration of the A-phase of the electric motor of the first embodiment in a second stage during an emergency stop. [Figure 4] FIG. 13 is a perspective view showing the configuration of a stage device and an electric motor according to a second embodiment. [Diagram 5] FIG. 13 is a perspective view showing the configuration of a stage device and an electric motor according to a second embodiment. [Figure 6] FIG. 13 is a top view showing the configuration of a stage device and an electric motor according to a second embodiment. [Figure 7] FIG. 13 is a diagram showing the configuration of a magnet assembly and a coil assembly of an electric motor according to a second embodiment. [Figure 8A] FIG. 11 is a diagram showing a circuit configuration of an A-phase motor according to a second embodiment during normal operation. [Figure 8B] FIG. 11 is a diagram showing a circuit configuration of a B-phase of the electric motor according to the second embodiment during normal operation. [Figure 9A] FIG. 13 is a diagram showing a circuit configuration of an A-phase motor of a second embodiment in a first stage during an emergency stop. [Figure 9B] FIG. 13 is a diagram showing a circuit configuration of an A-phase motor of a second embodiment in a first stage during an emergency stop. [Figure 10A] FIG. 13 is a diagram showing a circuit configuration of an A-phase motor of a second embodiment in a second stage during an emergency stop. [Figure 10B] FIG. 13 is a diagram showing a circuit configuration of an A-phase motor of a second embodiment in a second stage during an emergency stop. [Figure 11] FIG. 13 is a perspective view showing the configuration of a stage device and an electric motor according to a third embodiment. [Figure 12] FIG. 13 is a perspective view showing the configuration of a stage device and an electric motor according to a third embodiment. [Figure 13] FIG. 13 is a diagram showing the configuration of a magnet assembly and a coil assembly of an electric motor according to a third embodiment. [Figure 14] FIG. 13 is a perspective view showing the configuration of a stage device and an electric motor according to a fourth embodiment. [Figure 15] FIG. 13 is a top view showing the configuration of a stage device and an electric motor according to a fourth embodiment. [Figure 16] FIG. 13 is a perspective view showing the configuration of a stage device and an electric motor according to a fifth embodiment. [Figure 17] FIG. 2 is a perspective view showing the configuration of a stage device and an electric motor according to an embodiment. [Figure 18] FIG. 2 is a perspective view showing the configuration of a stage device and an electric motor according to an embodiment. [Figure 19] An enlarged view of a portion of Figure 18. [Figure 20] FIG. 2 is a cross-sectional view showing the configuration of a magnet assembly and a coil assembly of an electric motor according to an embodiment. [Figure 21]FIG. 2 is a top view showing the configuration of a stage device and an electric motor according to the embodiment. [Figure 22] FIG. 2 is a top view showing the configuration of a magnet assembly and a coil assembly of an electric motor according to an embodiment. [Figure 23A] FIG. 4 is a diagram showing a circuit configuration of an A-phase motor of a comparative example during normal operation. [Figure 23B] FIG. 4 is a diagram showing a circuit configuration of a B-phase of an electric motor of a comparative example during normal operation. [Figure 24A] FIG. 13 is a diagram showing the circuit configuration of phase A of the electric motor of the comparative example during an emergency stop. [Figure 24B] FIG. 13 is a diagram showing a circuit configuration of a B-phase electric motor of the comparative example during an emergency stop. [Diagram 25] FIG. 1 is a diagram illustrating the configuration of a lithography apparatus according to an embodiment. [Figure 26A] FIG. 13 is a diagram showing the circuit configuration of the A-phase of the electric motor according to the third embodiment during an emergency stop. [Figure 26B] FIG. 13 is a diagram showing a circuit configuration of a B-phase of the electric motor according to the third embodiment during an emergency stop. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] First, a configuration example of a stage device ST of an embodiment will be described with reference to Figs. 17, 18, 19, 20, 21, and 22. Fig. 17 is a perspective view of the stage device ST. Fig. 18 is a perspective view of the stage device ST of Fig. 17 with some components removed. Fig. 19 is a perspective view of an enlarged portion of Fig. 18. Fig. 20 is a cross-sectional view showing a configuration example of a coil assembly (stator) 505 and a magnet assembly (moveable element) 504. Fig. 21 is a top view of the stage device ST. Fig. 22 is a top view showing a configuration example of a coil assembly (stator) 505 and a magnet assembly (moveable element) 504. The coil assembly (stator) 505 and the magnet assembly (moveable element) 504 constitute an electric motor, in this example, a linear motor.

[0011] A yaw guide 501 may be fixed to each of both sides of the base 500. A stage 502 may be slidably supported by the upper surface of the base 500 and the side surfaces of the two yaw guides 501 via an air slide (not shown). An arm 503 may be fixed onto the stage 502, and a magnet assembly 504 serving as a mover may be fixed to the tip of the arm 503. The magnet assembly 504 faces the coil assembly 505 serving as a stator in a non-contact manner so as to surround the coil assembly 505. The coil assembly 505 may be fixed to a coil support structure 506. The coil support structure 506 may include a support 506-1 and a base 506-2.

[0012] The magnet assembly 504 may include an upper yoke 504-1U, two spacers 504-2, an upper magnet row 504-3U, a lower magnet row 504-3L, and a lower yoke 504-1L. The upper magnet row 504-3U may include two upwardly magnetized magnets 504-3VU, two downwardly magnetized magnets 504-3VL, two Y+ direction magnetized magnets 504-3YP, and three Y- direction magnetized magnets 504-3YM. The upper magnet row 504-3U may be fixed to the upper yoke 504-1U to form a magnet row in a Halbach array that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 504-3L may be fixed to the lower yoke 504-1L to form a magnet row in a Halbach array similar to the upper magnet row 504-3U. The coil assembly 505 may include eleven flattened oval coils 505-C and a coil support member 505-S that supports the flattened oval coils 505-C. The flattened oval coils 505-C may be fixed to the coil support member 505-S by a method such as adhesion.

[0013] If the period of the magnetic flux density distribution of the approximately sinusoidal wave is T, the distance between adjacent coils is 3 / 4T in terms of center distance and 3 / 2π in terms of electrical angle. The distance between every other coil is 3π in terms of electrical angle, and the phases are opposite to each other. Therefore, by reversing the connections to the windings of every other coil, these can be treated as coils of the same phase. Here, a set of every other coil 505A in a certain set constitutes an A-phase coil set, and a set of every other coil 505B in the remaining set constitutes a B-phase coil set 505B. Then, a current of Ia=I·sin(2π / T·y) flows through the A-phase coil set and Ib=I·sin(2π / T·y+3 / 2π) flows through the B-phase coil set at position y of the stage 502 (the driving direction, i.e., the direction in which the multiple coils are arranged). This allows a thrust proportional to the current amplitude I to be generated at position y. Currents Ia, Ib are supplied only to the coils facing the magnet, not to all coils.

[0014] 22 shows the magnet assembly 504 and the coil assembly 505 with upper yoke 504-1U removed. The coils shown in white are coils 505A of the A-phase coil set, and the coils shown in gray are coils 505B of the B-phase coil set.

[0015] Here, a comparative example will be described with reference to Figures 23A, 23B, 24A, and 24B. Figure 23A shows coil 505A of the A-phase coil set together with driver 600A, coil selector 601A, short circuit 604A, and stop command circuit 605A. Figure 23B shows coil 505B of the B-phase coil set together with driver 600B, coil selector 601B, short circuit 604B, and stop command circuit 605B. Figures 23A and 23B also show the operation during normal operation.

[0016] In the A phase, the driver 600A is connected to each coil 505A of the A phase coil set via the coil selector 601A. In the B phase, the driver 600B is connected to each coil 505B of the B phase coil set via the coil selector 601B. Then, the coil selectors 601A and 601B control the coils so that only the coils facing the magnet assembly 504 are connected to the drivers 600A and 600B, and the remaining coils are not connected to the drivers 600A and 600B. In addition, one end of a switch 602G for connecting to a common ground and one end of a switch 602S for shorting each coil are connected to the terminal opposite to the coil selector among the two terminals of each coil. The common ground is indicated by an inverted triangle. The other end of the switch 602S is connected to the coil selector side via an external resistor 603.

[0017] The A-phase stop command circuit 605A controls activation and deactivation of a stop command signal that puts each switch 602S of the A-phase short circuit 604A into a conductive state, i.e., each coil 505A of the A-phase coil set into a short-circuit state. The B-phase stop command circuit 605B controls activation and deactivation of a stop command signal that puts each switch 602S of the B-phase short circuit 604B into a conductive state, i.e., each coil 505B of the B-phase coil set into a short-circuit state. Activation of the stop command signal means that the switch 602S is transitioned to a conductive state, and deactivation of the stop command signal means that the switch 602S is transitioned to a non-conductive state. An active state of the stop command signal means that the switch 602S is in a conductive state, and an inactive state of the stop command signal means that the switch 602S is in a non-conductive state.

[0018] During normal operation, the coil selectors 601A, 601B connect the drivers 600A, 600B to only the coils facing the magnet assembly 504, and the stop command circuits 605A, 605B maintain the stop command signals in an inactive state. During normal operation, all the switches 602G in the short circuits 604A, 604B are made conductive, and all the switches 602S are made non-conductive.

[0019] 24A and 24B show the operation during an emergency stop. During an emergency stop, the stop command circuits 605A and 605B activate a stop command signal. This state is represented by showing the stop command circuits 605A and 605B in gray. During an emergency stop, all coil selectors 601A and 601B are made non-conductive, and all switches 602G in the short circuits 604A and 604B are made non-conductive.

[0020] Here, the back electromotive force of each coil 505A of the A-phase coil set is Ea, the back electromotive force of each coil 505B of the B-phase coil set is Eb, the resistance of coils 505A and 505B is R, and the resistance of external resistor 603 is Ro. A current of Iea=Ea / (R+Ro) flows through A-phase coil 505A facing magnet assembly 504, and dynamic braking functions. A current of Ieb=Eb / (R+Ro) flows through B-phase coil 505B facing magnet assembly 504, and dynamic braking functions. If a large acceleration acts on stage 502 due to dynamic braking, stage 502 will be damaged, so to prevent this, Ro is set to an appropriate value and Iea and Ieb are limited to appropriate values.

[0021] Hereinafter, the electric motor of the first embodiment will be described with reference to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B, FIG. 3A, and FIG. 3B. The matters not mentioned as the first embodiment may follow the above description. The electric motor of the first embodiment may be used, for example, as an electric motor of a stage device. In FIG. 1A, the coil 505A of the A-phase coil set is shown together with the driver 600A, the coil selector 601A, the short circuit 704A, and the control circuit 710A. In FIG. 1B, the coil 505B of the B-phase coil set is shown together with the driver 600B, the coil selector 601B, the short circuit 604B, and the control circuit 710B.

[0022] In the A phase, the driver 600A is connected to each coil 505A of the A phase coil set via the coil selector 601A. In the B phase, the driver 600B is connected to each coil 505B of the B phase coil set via the coil selector 601B. Then, the coil selectors 601A and 601B control the coils so that only the coils facing the magnet assembly 504 are connected to the drivers 600A and 600B, and the remaining coils are not connected to the drivers 600A and 600B. In addition, one end of each of the switches 702G for connecting to a common ground and one end of each of the switches 702S-1 and 702S-2 for shorting each of the coils are connected to the terminal opposite to the coil selector among the two terminals of each coil. The other end of each of the switches 702S-1 and 702S-2 is connected to the coil selector side via external resistors 703-1 and 703-2.

[0023] That is, the A-phase short circuit 704A includes, as a first dynamic braking circuit, an external resistance (first resistor) 703-1 and a switch (first switch) 702S-1 arranged in a path connecting the two terminals of the coil 505A to each other, and also includes, as a second dynamic braking circuit, an external resistance (second resistor) 703-2 and a switch (second switch) 702S-2 arranged in a path connecting the two terminals of the coil 505A to each other.

[0024] Similarly, the B-phase short circuit 704B includes, as a first dynamic braking circuit, an external resistance (first resistor) 703-1 and a switch (first switch) 702S-1 arranged in a path connecting two terminals of the coil 505B. Also, the B-phase short circuit 704B includes, as a second dynamic braking circuit, an external resistance (second resistor) 703-2 and a switch (second switch) 702S-2 arranged in a path connecting two terminals of the coil 505B. These dynamic braking circuits generate a braking force that brakes the stage 502 (from another perspective, the magnet assembly 504 as the mover).

[0025] The A-phase control circuit 710A controls the operation of the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2). The control circuit 710A activates the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2) at different timings. The control circuit 710A may include a first generating circuit 705A that generates a first braking signal BA1 that activates the first dynamic braking circuit, and a second generating circuit 706A that generates a second braking signal BA2 that activates the second dynamic braking circuit. The second generating circuit 706A may include a delay device that generates the second braking signal BA2 by delaying the first braking signal BA1. The delay device may be formed, for example, by an analog circuit including a CR integrator, or may be formed by a counter formed by an FPGA or the like. The delay time by the delay device can be set to, for example, several milliseconds.

[0026] Alternatively, the control circuit 710A may be configured to include a generating circuit that generates a first signal, and a delay device that generates a second signal by delaying the first signal. In this case, the control circuit 710A may activate a first braking signal BA1 that activates the first dynamic braking circuit in response to activation of the first signal, and activate a second braking signal BA2 that activates the second dynamic braking circuit in response to activation of the second signal.

[0027] Similarly, the B-phase control circuit 710B controls the operation of the first B-phase dynamic braking circuit (703-1, 702S-1) and the second B-phase dynamic braking circuit (703-2, 702S-2). The control circuit 710B activates the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2) at different timings. The control circuit 710B may include a first generating circuit 705B that generates a first braking signal BB1 that activates the first dynamic braking circuit, and a second generating circuit 706B that generates a second braking signal BB2 that activates the second dynamic braking circuit. The second generating circuit 706B may include a delay device that generates the second braking signal BB2 by delaying the first braking signal BB1.

[0028] Alternatively, the control circuit 710B may be configured to include a generating circuit that generates a first signal, and a delay device that generates a second signal by delaying the first signal. In this case, the control circuit 710B may activate a first braking signal BB1 that activates the first dynamic braking circuit in response to activation of the first signal, and activate a second braking signal BB2 that activates the second dynamic braking circuit in response to activation of the second signal.

[0029] Activation of the braking signals BA1 (BB1) and BA2 (BB2) means that the switch 702S-1 is set to -1 and the switch 702S-2 is set to a conductive state. Deactivation of the braking signals BA1 (BB1) and BA2 (BB2) means that the switch 702S-1 is set to -1 and the switch 702S-2 is set to a non-conductive state. The braking signals BA1 (BB1) and BA2 (BB2) being in an active state means that the switch 702S-1 is set to -1 and the switch 702S-2 is set to a conductive state. The braking signals BA1 (BB1) and BA2 (BB2) being in an inactive state means that the switch 702S-1 is set to -1 and the switch 702S-2 is set to a non-conductive state.

[0030] The electric motor of this embodiment may include a power supply source, such as an emergency power supply or a capacitor, for supplying power to the circuits (control circuit 710A, control circuit 710B, short circuit 704A, short circuit 704B, etc.) to activate the dynamic brake when the power source is lost. When the power source is lost, the circuits can operate to activate the dynamic brake by the power supply from such a power supply source.

[0031] 1A and 1B show schematic diagrams of the state of an electric motor (linear motor) during normal operation, in other words, during operation in which the stage 502 (magnet assembly 504) is driven by the electric motor. During normal operation, the coil selectors 601A and 601B connect the drivers 600A and 600B to only the coils facing the magnet assembly 504, and the control circuits 710A and 710B maintain the braking signals BA1, BA2, BB1, and BB2 in an inactive state. During normal operation, in the short circuits 704A and 704B, all the switches 702G are in a conductive state, and all the switches 702S-1 and 702S-2 are in a non-conductive state.

[0032] 2A and 2B are schematic diagrams showing a first stage state of an electric motor in an emergency stop, in other words, an operation for emergency stopping the stage 502 (magnet assembly 504) driven by the electric motor (linear motor). In the first stage, all coil selectors 601A and 601B are made non-conductive, and all switches 702G in short circuits 704A and 704B are made non-conductive.

[0033] In the first stage, the first braking signals BA1 and BB1 are activated by the control circuits 710A and 710B, while the second braking signals BA2 and BB2 are maintained in an inactive state, so that in the short circuits 704A and 704B, the switch 702G is maintained in a non-conductive state, the switch 702S-1 transitions to and is maintained in a conductive state, and the switch 702S-2 is maintained in a non-conductive state.

[0034] Here, the back electromotive force of each coil 505A of the A-phase coil set is Ea, the back electromotive force of each coil 505B of the B-phase coil set is Eb, the resistance of coils 505A and 505B is R, and the resistance of external resistor 703-1 is Ro1. In the first stage, the current Iea flowing through the A-phase coil 505A facing the magnet assembly 504, and the current Ieb flowing through the B-phase coil 505B facing the magnet assembly 504 are given by equations (1) and (2). A dynamic brake in accordance with the currents Iea and Ieb acts on the stage 502, and a braking force acts on the stage 502.

[0035] Iea = Ea / (R + Ro1) (1) Ieb = Eb / (R + Ro1) (2) 3A and 3B show schematic diagrams of the second stage state of the motor during an emergency stop. The transition from the first stage to the second stage occurs when the second braking signals BB1 and BB2 are activated after a predetermined delay time from the timing of activation of the first braking signals BA1 and BA2. In the second stage, all the coil selectors 601A and 601B are maintained in a non-conducting state, and all the switches 702G in the short circuits 704A and 704B are maintained in a non-conducting state.

[0036] In the second stage, the first braking signals BA1 and BB1 are maintained in an active state by the control circuits 710A and 710B, and the second braking signals BA2 and BB2 are activated, so that in the short circuits 704A and 704B, the switch 702G is maintained in a non-conductive state, the switch 702S-1 is maintained in a conductive state, and the switch 702S-2 transitions to and is maintained in a conductive state.

[0037] Here, the resistance of external resistor 703-2 is Ro2. In the second stage, current Iea' flowing through A-phase coil 505A facing magnet assembly 504, and current Ieb' flowing through B-phase coil 505B facing magnet assembly 504 are given by equations (1') and (2'). A dynamic brake according to currents Iea' and Ieb' acts on stage 502, and a braking force acts on stage 502.

[0038] Iea'=Ea / (R+1 / (1 / Ro2+1 / Ro1)) ···(1') Ieb'=Eb / (R+1 / (1 / Ro2+1 / Ro1)) ···(2') Since 1 / (1 / Ro2+1 / Ro1) in equations (1') and (2') is smaller than Ro1 in equations (1) and (2), the current value becomes large and a large braking force acts on stage 502. That is, in the first stage, the dynamic brake is applied to stage 502 with a weak braking force to avoid damage to stage 502. Thereafter, in the second stage after a predetermined delay time, the dynamic brake is applied to stage 502 with a strong braking force to shorten the braking distance of stage 502. However, depending on the application or purpose, it may be possible to apply the dynamic brake to stage 502 with a strong braking force and then with a weak braking force after a predetermined delay time.

[0039] The stage device and the electric motor of the second embodiment will be described with reference to Figures 4, 5, 6, 7, 8A, 8B, 9A, 9B, 10A, and 10B. Matters not mentioned as the second embodiment may follow the above description. Figure 4 is a perspective view of the stage device ST. Figure 5 is a perspective view of the stage device ST of Figure 4 with some components removed. Figure 6 is a top view of the stage device ST. The coil assembly (stator) 805 and the magnet assembly (mover) 804 constitute an electric motor, in this example, a linear motor.

[0040] In the second embodiment, the magnet assembly 804 is divided into two magnet assemblies 8041 and 8042. The magnet assemblies 8041 and 8042 may have a configuration similar to that of the magnet assembly 504 shown in FIGS. 17 to 22. The magnet assemblies 5041 and 5042 may be coupled to the stage 502 via an arm 503. In the second embodiment, a braking force acts on the magnet assembly 8041 in response to activation of a first braking signal, and a braking force acts on the magnet assembly 8042 in response to a second braking signal that is activated after a predetermined delay time from the activation of the first braking signal.

[0041] A yaw guide 501 may be fixed to each of both sides of the base 500. A stage 502 may be slidably supported by the upper surface of the base 500 and the side surfaces of the two yaw guides 501 via air slides (not shown). Two arms 503 may be fixed to the stage 502, and magnet assemblies 8041 and 8042 constituting movers may be fixed to the ends of the two arms 503. The magnet assemblies 8041 and 8042 face the coil assembly 805 as a stator in a non-contact manner so as to surround the coil assembly 805. The coil assembly 805 may be fixed to a coil support structure 506. The coil support structure 506 may include a support column 506-1 and a base 506-2.

[0042] The magnet assembly 8041 may include an upper yoke 8041-1U, two spacers 8041-2, an upper magnet row 8041-3U, a lower magnet row 8041-3L (not shown), and a lower yoke 8041-1L. The upper magnet row 8041-3U may include two upwardly magnetized magnets 504-3VU, two downwardly magnetized magnets 504-3VL, two Y+ direction magnetized magnets 504-3YP, and three Y- direction magnetized magnets 504-3YM, similar to the configuration of FIG. 20. The upper magnet row 8041-3U may be fixed to the upper yoke 8041-1U to form a magnet row in a Halbach array that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 8041-3L may be fixed to the lower yoke 8041-1L to form a magnet row in a Halbach array similar to the upper magnet row 8041-3U. The upper magnet row 8041-3U may be understood as a first magnet row that generates a thrust by a magnetic field generated by a first coil selected from the plurality of first coils 505A-1. The lower magnet row 8041-3L may be understood as a third magnet row that generates a thrust by a magnetic field generated by a first coil selected from the plurality of first coils 505A-1.

[0043] The magnet assembly 8042 may have a similar configuration to the magnet assembly 8041. The magnet assembly 8042 may include an upper yoke 8042-1U, two spacers 8042-2, an upper magnet row 8042-3U, a lower magnet row 8042-3L (not shown), and a lower yoke 8042-1L. The upper magnet row 8042-3U may be understood as a second magnet row that generates a thrust by a magnetic field generated by a second coil selected from the plurality of second coils 505A-2. The lower magnet row 8042-3L may be understood as a fourth magnet row that generates a thrust by a magnetic field generated by a second coil selected from the plurality of second coils 505A-2.

[0044] The coil assembly 505 may include eleven flattened oval coils 505-C and a coil support member 505-S that supports the flattened oval coils 505-C. The flattened oval coils 505-C may be fixed to the coil support member 505-S by a method such as adhesion. In the A layer, the first coils 505A-1 may be arranged between the first end (end in the -Y direction) and the second end (end in the +Y direction) of the coil assembly, and the second coils 505A-2 may be arranged between the first coils and the second end. Similarly, in the B layer, the first coils 505B-1 may be arranged between the first end (end in the -Y direction) and the second end (end in the +Y direction) of the coil assembly, and the second coils 505B-2 may be arranged between the first coils and the second end. The upper magnet row 8041-3U (first magnet row) and the lower magnet row 8041-3L (third magnet row) are arranged to face each other via the coil assembly 505. The upper magnet row 8042-3U (second magnet row) and the lower magnet row 8042-3L (fourth magnet row) can also be arranged to face each other via the coil assembly 505.

[0045] 7 shows the magnet assemblies 8041, 8042 and coil assembly 505 with upper yokes 8041-1U, 8042-1U removed. The coils shown in white are coils 505A of the A-phase coil set, and the coils shown in gray are coils 505B of the B-phase coil set.

[0046] 8A shows the coil 505A of the A-phase coil set together with the drivers 800A-1, 800A-2, the coil selectors 801A-1, 801A-2, the short circuits 804A-1, 804A-2, and the control circuits 810A-1, 805A-2. Here, the coils 505A constituting the A-phase coil set include a plurality of first coils 505A-1 and a plurality of second coils 505A-2. The driver 800A-1, the coil selector 801A-1, the short circuit 804A-1, and the control circuit 810A-1 constitute the first system of the A-phase related to the plurality of first coils 505A-1. The driver 800A-2, the coil selector 801A-2, the short circuit 804A-2, and the control circuit 810A-2 constitute the second system of the A-phase related to the plurality of first coils 505A-2.

[0047] 8B shows the coil 505B of the B-phase coil set together with the drivers 800B-1, 800B-2, the coil selectors 801B-1, 801B-2, the short circuits 804B-1, 804B-2, and the control circuits 605B-1, 605B-2. Here, the multiple coils 505B constituting the B-phase coil set include multiple second coils 505B-1 and multiple second coils 505B-2. The driver 800B-1, the coil selector 801B-1, the short circuit 804B-1, and the control circuit 810B-1 constitute a first system of the B-phase related to the multiple first coils 505B-1. The driver 800B-2, the coil selector 801B-2, the short circuit 804B-2, and the control circuit 810B-2 constitute a second system of the B-phase related to the multiple first coils 505B-2.

[0048] In the first system of A phase, the driver 800A-1 is connected to each coil 505A-1 of the coil set of the first system of A phase via the coil selector 801A-1. In the second system of A phase, the driver 800A-2 is connected to each coil 505A-2 of the coil set of the second system of A phase via the coil selector 801A-2. The coil selectors 801A-1 and 801A-2 control the coils so that only those facing the magnet assemblies 8041 and 8042 are connected to the drivers 800A-1 and 800A-2, and the others are not connected to the drivers 800A-1 and 800A-2. The terminal of each coil 505A-1 of the first system opposite to the coil selector 801A-1 is connected to a switch 802G-1 for connecting to a common ground and one end of a switch 802S-1 for shorting each coil 505A-1. The other end of the switch 802S-1 is connected to the coil selector 801A-1 side via an external resistor 803-1. Similarly, a switch 802G-2 for connecting to a common ground and one end of a switch 802S-2 for shorting each coil 505A-2 are connected to the terminal opposite to the coil selector 801A-2 out of the two terminals of each coil 505A-2 of the second system. The other end of the switch 802S-2 is connected to the coil selector 801A-2 side via an external resistor 803-2.

[0049] That is, the A-phase first short circuit 804A-1 includes, as a first dynamic braking circuit, an external resistance (first resistor) 803-1 and a switch (first switch) 802S-1 arranged in a path connecting two terminals of the coil 505A-1. Moreover, the A-phase second short circuit 804A includes, as a second dynamic braking circuit, an external resistance (second resistor) 803-2 and a switch (second switch) 802S-2 arranged in a path connecting two terminals of the coil 505A-2. These dynamic braking circuits generate a braking force that brakes the stage 502 (from another perspective, the magnet assembly 504 as the mover).

[0050] The configuration of the B phase is similar. In the first system of the B phase, the driver 800B-1 is connected to each coil 505B-1 of the coil set of the first system of the B phase via the coil selector 801B-1. In the second system of the B phase, the driver 800B-2 is connected to each coil 505B-2 of the coil set of the second system of the B phase via the coil selector 801B-2. The coil selectors 801B-1 and 801B-2 control the coils so that only those coils facing the magnet assemblies 8041 and 8042 are connected to the drivers 800B-1 and 800B-2, and the others are not connected to the drivers 800B-1 and 800B-2. The terminal of each coil 505B-1 of the first system opposite to the coil selector 801B-1 is connected to a switch 802G-1 for connecting to a common ground and one end of a switch 802S-1 for shorting each coil 505B-1. The other end of the switch 802S-1 is connected to the coil selector 801B-1 side via an external resistor 803-1. Similarly, a switch 802G-2 for connecting to a common ground and one end of a switch 802S-2 for shorting each coil 505B-2 are connected to the terminal opposite to the coil selector 801B-2 of the two terminals of each coil 505B-2 of the second system. The other end of the switch 802S-2 is connected to the coil selector 801B-2 side via an external resistor 803-2.

[0051] That is, the B-phase first short circuit 804B-1 includes, as a first dynamic braking circuit, an external resistance (first resistor) 803-1 and a switch (first switch) 802S-1 arranged in a path connecting two terminals of the coil 505B-1. Moreover, the B-phase second short circuit 804B includes, as a second dynamic braking circuit, an external resistance (second resistor) 803-2 and a switch (second switch) 802S-2 arranged in a path connecting two terminals of the coil 505B-2. These dynamic braking circuits generate a braking force that brakes the stage 502 (from another perspective, the magnet assembly 504 as the mover).

[0052] The A-phase control circuit 810A controls the operation of the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2). The control circuit 810A activates the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2) at different timings. The control circuit 810A may include a first generating circuit 805A that generates a first braking signal BA1 that activates the first dynamic braking circuit, and a second generating circuit 806A that generates a second braking signal BA2 that activates the second dynamic braking circuit. The second generating circuit 806A may include a delay device that generates the second braking signal BA2 by delaying the first braking signal BA1. The delay device may be formed, for example, by an analog circuit including a CR integrator, or may be formed by a counter formed by an FPGA or the like. The delay time by the delay device can be set to, for example, several milliseconds.

[0053] Alternatively, the control circuit 810A may be configured to include a generating circuit that generates a first signal, and a delay device that generates a second signal by delaying the first signal. In this case, the control circuit 810A may activate a first braking signal BA1 that activates the first dynamic braking circuit in response to activation of the first signal, and activate a second braking signal BA2 that activates the second dynamic braking circuit in response to activation of the second signal.

[0054] The B-phase control circuit 810B controls the operation of the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2). The control circuit 810B activates the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2) at different timings. The control circuit 810B may include a first generating circuit 805B that generates a first braking signal BB1 that activates the first dynamic braking circuit, and a second generating circuit 806B that generates a second braking signal BB2 that activates the second dynamic braking circuit. The second generating circuit 806B may include a delay device that generates the second braking signal BB2 by delaying the first braking signal BB1. The delay device may be formed, for example, by an analog circuit including a CR integrator, or may be formed by a counter formed by an FPGA or the like. The delay time by the delay device can be set to, for example, several milliseconds.

[0055] Alternatively, the control circuit 810B may be configured to include a generating circuit that generates a first signal, and a delay device that generates a second signal by delaying the first signal. In this case, the control circuit 810B may activate a first braking signal BB1 that activates the first dynamic braking circuit in response to activation of the first signal, and activate a second braking signal BB2 that activates the second dynamic braking circuit in response to activation of the second signal.

[0056] 8A and 8B show schematic diagrams of the state of an electric motor during normal operation, in other words, during operation in which the stage 502 (magnet assemblies 8041 and 8042) is driven by the electric motor (linear motor). During normal operation, the coil selectors 801A-1, 801A-2, 801B-1 and 801B-2 connect the drivers 800A-1, 800A-2, 800B-1 and 800B-2 only to the coils facing the magnet assemblies 8041 and 8042. The control circuits 810A and 810B also maintain the braking signals BA1, BA2, BB1 and BB2 in an inactive state. During normal operation, in the short circuits 804A-1, 804A-2, 804B-1, and 804B-2, all of the switches 802G-1 and 802G-2 are made conductive, and all of the switches 802S-1 and 802S-2 are made non-conductive.

[0057] 9A and 9B are schematic diagrams showing the first stage state of an electric motor in an emergency stop, in other words, an operation for emergency stopping stage 502 (magnet assemblies 8041, 8042) driven by the electric motor (linear motor). In the first stage, all coil selectors 801A-1, 801A-2, 801B-1, 801B-2 are made non-conductive. Also, in the first stage, all switches 802G-1, 802G-2 are made non-conductive in short circuits 804A-1, 804A-2, 804B-1, 804B-2.

[0058] In the first stage, the first braking signals BA1 and BB1 are activated by the control circuits 810A and 810B, while the second braking signals BA2 and BB2 are maintained in an inactive state. As a result, in the short circuits 804A-1 and 804B-1, the switch 802G-1 is maintained in a non-conductive state, the switch 802S-1 transitions to and is maintained in a conductive state, and the switch 802S-2 is maintained in a non-conductive state. As a result, a braking force is applied to the stage 502 by the dynamic brake using the coil 505A-1 of the first system of the A phase and the coil 505B-1 of the first system of the B phase.

[0059] 10A and 10B show schematic diagrams of the second stage state of the motor during an emergency stop. The transition from the first stage to the second stage occurs when the second braking signals BB1 and BB2 are activated after a predetermined delay time from the timing of activation of the first braking signals BA1 and BA2. In the second stage, all the coil selectors 801A-1, 801A-2, 801B-1, and 801B-2 are maintained in a non-conducting state. Also, in the second stage, all the switches 802G-1 and 802G-2 are maintained in a non-conducting state in the short circuits 804A-1, 804A-2, 804B-1, and 804B-2.

[0060] In the second stage, the first braking signals BA1 and BB1 are maintained in an active state by the control circuits 810A and 810B, and the first braking signals BA2 and BB2 are activated. As a result, in the short circuits 804A-1, 804A-2, 804B-1 and 804B-2, the switches 802G-1 and 802G-2 are maintained in a non-conductive state, the switch 802S-1 is maintained in a conductive state, and the switch 802S-2 transitions to and is maintained in a conductive state.

[0061] In the second embodiment, a dynamic brake with a weaker braking force is applied to the stage 502 by the first system to avoid damage to the stage 502. After that, after a predetermined delay time, a dynamic brake with a stronger braking force is applied to the stage 502 by the first system and the second system to shorten the braking distance of the stage 502.

[0062] The stage device and the electric motor of the third embodiment will be described with reference to Figs. 11, 12, 13, 26A, and 26B. Matters not mentioned as the third embodiment may follow the above description. Fig. 11 is a perspective view of the stage device ST. Fig. 12 is a perspective view of the stage device ST of Fig. 11 with some components removed. Fig. 13 is a cross-sectional view showing a configuration example of the coil assembly (stator) 905 and the magnet assembly (moveable element) 904. The coil assembly (stator) 905 and the magnet assembly (moveable element) 904 constitute an electric motor, in this example, a linear motor.

[0063] In the third embodiment, two magnet assemblies 8041 and 8042 in the electric motor of the second embodiment are combined into one magnet assembly 904. Therefore, the electric motor of the third embodiment is advantageous in reducing the size and mass of the mover and improving the stroke.

[0064] The magnet assembly 904 includes an upper magnet row 904-3U and a lower magnet row 904-3L. The upper magnet row 904-3U may include four downwardly magnetized magnets 904-3VL, four Y+ direction magnetized magnets 904-3YP, and four Y- direction magnetized magnets 904-3YM. The upper magnet row 904-3U may be fixed to the upper yoke 904-1U to form a Halbach array magnet row that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 904-3L may be fixed to the lower yoke 904-1L to form a Halbach array magnet row similar to the upper magnet row 904-3U.

[0065] The A-phase coil set includes a first system coil set (plurality of coils 801A-1) and a second system coil set (plurality of coils 801A-2), which may be arranged to overlap each other. The B-phase coil set includes a first system coil set (plurality of coils 801B-1) and a second system coil set (plurality of coils 801B-2), which may be arranged to overlap each other. When the coils 801A-1, 801B-1, 801A-2, 801B-2, . . . are repeatedly arranged in this order, the distance between every third coil is 6π in electrical angle and the phases are the same. Therefore, the connections to the windings of every third coil can be made the same. First, the dynamic braking circuits (first dynamic braking circuits) corresponding to the first system of A-phase (plurality of coils 801A-1) and the first system of B-phase (plurality of coils 801B-1) are activated. Thereafter, with a shift in timing, the dynamic braking circuits (second dynamic braking circuits) corresponding to the second system of phase A (plurality of coils 801A-2) and the second system of phase B (plurality of coils 801B-2) are activated. In other words, the control circuit activates the first dynamic braking circuit and the second dynamic braking circuit at mutually different timings.

[0066] The electric motor of the third embodiment has a driver 800A, coil selectors 801A-1 and 801A-2, short circuits 804A-1 and 804A-2, and control circuits 810A-1 and 810A-2 for phase A. The electric motor of the third embodiment also has a driver 800B, coil selectors 801B-1 and 801B-2, short circuits 804B-1 and 804B-2, and control circuits 810B-1 and 810B-2 for phase B.

[0067] The fourth embodiment will be described with reference to Figures 14 and 15. Matters not mentioned in the fourth embodiment may follow the second embodiment. Figure 14 is a perspective view of stage apparatus ST. Figure 15 is a top view of stage apparatus ST.

[0068] In the fourth embodiment, two sets of electric motors (linear motors) are provided. The first set of electric motors includes a first movable assembly 1004-1 and a first coil assembly 1005-1. The second set of electric motors includes a second movable assembly 1004-2 and a second coil assembly 1005-2. The first coil assembly 1005-1 may include a first series of coils for phase A and a first series of coils for phase B, and the second coil assembly 1005-2 may include a second series of coils for phase A and a second series of coils for phase B.

[0069] Although not shown, the motor of the fourth embodiment has drivers 800A-1, 800A-2, coil selectors 801A-1, 801A-2, short circuits 804A-1, 804A-2, and control circuits 810A-1, 805A-2 for phase A, similar to the second embodiment. Also, the motor of the third embodiment has drivers 800B-1, 800B-2, coil selectors 801B-1, 801B-2, short circuits 804B-1, 804B-2, and control circuits 810B-1, 805B-2 for phase B, similar to the second embodiment.

[0070] The fifth embodiment will be described with reference to FIG. 16. Matters not mentioned as the fifth embodiment may follow the second embodiment. In the fifth embodiment, the coil assembly is composed of an upper coil assembly 1105-CU and a lower coil assembly 1105-CL, and has a two-layer structure. One of the upper coil assembly 1105-CU and the lower coil assembly 1105-CL may include a first series of multiple coils in phase A and a first series of multiple coils in phase B, and the other may include a second series of multiple coils in phase A and a second series of multiple coils in phase B.

[0071] Although not shown, the motor of the fourth embodiment has drivers 800A-1, 800A-2, coil selectors 801A-1, 801A-2, short circuits 804A-1, 804A-2, and control circuits 810A-1, 805A-2 for phase A, similar to the second embodiment. Also, the motor of the third embodiment has drivers 800B-1, 800B-2, coil selectors 801B-1, 801B-2, short circuits 804B-1, 804B-2, and control circuits 810B-1, 805B-2 for phase B, similar to the second embodiment.

[0072] The above-mentioned embodiments may be implemented by combining two or more of them. In the above-mentioned example, the linear motor has a flat oval coil, but the linear motor may be configured as a cylindrical linear motor with an annular coil arranged on the same axis. The motor is not limited to two phases, and may be three or more phases. In the case of three phases, the distance between every five coils is 9π electrical angle, and the phases are opposite to each other. Therefore, by reversing the connections to the windings of every five coils, these can be treated as coils of the same phase. The first and second braking signals may be changed to three or more braking signals having different activation timings. The motor may be a rotary type.

[0073] An embodiment of a lithography apparatus as an application example of the above-mentioned motor or stage device will be described below. Fig. 25 shows the configuration of an exposure apparatus EXP as one embodiment of a lithography apparatus that transfers a pattern of an original R to a substrate S. The exposure apparatus EXP may include a stage that holds the substrate S or the original, and the above-mentioned motor configured to drive the stage. Alternatively, the exposure apparatus EXP may include the above-mentioned stage device configured to hold and drive the substrate S or the original.

[0074] The exposure apparatus EXP may include, for example, an illumination optical system IO that illuminates the original R, and a projection optical system PO that projects the pattern of the original R onto the substrate S. The exposure apparatus EXP may also include an original stage RS that holds the original R, an electric motor MR configured to drive the original stage RS, a substrate stage SS that holds the substrate S, and an electric motor MS configured to drive the substrate stage SS. The original stage RS and the electric motor MR may form an original stage device that drives the original RS. The substrate stage SS and the electric motor MS may form a substrate stage device that drives the substrate S.

[0075] An article manufacturing method according to one embodiment may include a transfer step of transferring a pattern of the original R to a substrate S by the above-described lithography apparatus, and a processing step of obtaining an article by processing the substrate S to which the pattern has been transferred. Processing the substrate S may include, for example, etching the substrate S.

[0076] The present disclosure includes the following. (Item 1) An electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, a first dynamic braking circuit and a second dynamic braking circuit which generate a braking force by short-circuiting coils among the plurality of coils which face the magnet assembly; a control circuit for controlling operation of the first dynamic braking circuit and the second dynamic braking circuit, the control circuit activates the first dynamic braking circuit and the second dynamic braking circuit at different timings. An electric motor characterized by: (Item 2) the control circuit activates the second dynamic braking circuit with a timing delayed from activation of the first dynamic braking circuit, 2. The electric motor according to item 1, (Item 3) the first dynamic braking circuit includes a first resistor and a first switch disposed in a path connecting two terminals of one of the plurality of coils to each other, the second dynamic braking circuit includes a second resistor and a second switch disposed in a path connecting the two terminals to each other, 3. The electric motor according to item 1 or 2, (Item 4) the plurality of coils includes a first coil and a second coil; the first dynamic braking circuit includes a first resistor and a first switch disposed in a path connecting two terminals of the first coil to each other, the second dynamic braking circuit includes a second resistor and a second switch disposed in a path connecting two terminals of the second coil to each other, 3. The electric motor according to item 1 or 2, (Item 5) the control circuit includes a first generating circuit that generates a first braking signal to activate the first dynamic braking circuit, and a second generating circuit that generates a second braking signal to activate the second dynamic braking circuit; The second generating circuit includes a delay circuit that generates the second braking signal by delaying the first braking signal. 5. The electric motor according to any one of items 1 to 4, (Item 6) The control circuit includes a generating circuit that generates a first signal, and a delay circuit that generates a second signal by delaying the first signal; the control circuit activates a first braking signal that activates the first dynamic braking circuit in response to activation of the first signal, and activates a second braking signal that activates the second dynamic braking circuit in response to activation of the second signal. 5. The electric motor according to any one of items 1 to 4, (Item 7) the plurality of coils includes a plurality of first coils and a plurality of second coils; the first dynamic braking circuit includes, for each of the plurality of first coils, a first resistor and a first switch arranged in a path connecting two terminals of the first coil to each other, the second dynamic braking circuit includes, for each of the plurality of second coils, a second resistor and a second switch arranged in a path connecting two terminals of the second coil to each other; 7. The electric motor according to any one of items 1 to 6, (Item 8) The magnet assembly includes a first magnet row that generates a thrust by a magnetic field generated by a first coil selected from the plurality of first coils, and a second magnet row that generates a thrust by a magnetic field generated by a second coil selected from the plurality of second coils. 8. The electric motor according to item 7, (Item 9) the plurality of first coils are arranged between a first end and a second end of the coil assembly, and the plurality of second coils are arranged between the plurality of first coils and the second end; 9. The electric motor according to item 8, characterized in that (Item 10) The first coils and the second coils are arranged to overlap each other. 9. The electric motor according to item 8, characterized in that (Item 11) the first magnet row and the second magnet row form a Halbach array; 11. The electric motor according to item 10, (Item 12) the magnet assembly includes a third magnet row that generates a thrust by a magnetic field generated by a first coil selected from the plurality of first coils, and a fourth magnet row that generates a thrust by a magnetic field generated by a second coil selected from the plurality of second coils, the first magnet row and the third magnet row are arranged to face each other across the coil assembly, and the second magnet row and the fourth magnet row are arranged to face each other across the coil assembly. Item 12. The electric motor according to item 11, (Item 13) Stage and 13. An electric motor according to any one of claims 1 to 12 configured to drive the stage; A stage device comprising: (Item 14) A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: a stage for holding the substrate or the original; 13. An electric motor according to any one of claims 1 to 12 configured to drive the stage; 1. A lithography apparatus comprising: (Item 15) A transfer step of transferring a pattern of an original onto a substrate by the lithography apparatus according to item 14; a processing step of obtaining an article by processing the substrate to which the pattern has been transferred; A method for manufacturing an article, comprising:

[0077] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0078] 804: magnet assembly, 505: coil assembly, 710A, 710B: control circuit, ST: stage device

Claims

1. An electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, a first dynamic braking circuit and a second dynamic braking circuit which generate a braking force by short-circuiting coils among the plurality of coils which face the magnet assembly; a control circuit for controlling operation of the first dynamic braking circuit and the second dynamic braking circuit, the control circuit activates the first dynamic braking circuit and the second dynamic braking circuit at different timings. An electric motor characterized by:

2. the control circuit activates the second dynamic braking circuit with a timing delayed from activation of the first dynamic braking circuit, 2. The electric motor according to claim 1 .

3. the first dynamic braking circuit includes a first resistor and a first switch disposed in a path connecting two terminals of one of the plurality of coils to each other, the second dynamic braking circuit includes a second resistor and a second switch disposed in a path connecting the two terminals to each other.

2. The electric motor according to claim 1 .

4. the plurality of coils includes a first coil and a second coil; the first dynamic braking circuit includes a first resistor and a first switch disposed in a path connecting two terminals of the first coil to each other, the second dynamic braking circuit includes a second resistor and a second switch disposed in a path connecting two terminals of the second coil to each other.

2. The electric motor according to claim 1 .

5. the control circuit includes a first generating circuit that generates a first braking signal to activate the first dynamic braking circuit, and a second generating circuit that generates a second braking signal to activate the second dynamic braking circuit, the second generating circuit includes a delay circuit that generates the second braking signal by delaying the first braking signal.

2. The electric motor according to claim 1 .

6. the control circuit includes a generating circuit that generates a first signal, and a delay circuit that generates a second signal by delaying the first signal; the control circuit activates a first braking signal that activates the first dynamic braking circuit in response to activation of the first signal, and activates a second braking signal that activates the second dynamic braking circuit in response to activation of the second signal.

2. The electric motor according to claim 1 .

7. the plurality of coils includes a plurality of first coils and a plurality of second coils; the first dynamic braking circuit includes, for each of the plurality of first coils, a first resistor and a first switch disposed in a path connecting two terminals of the first coil to each other; the second dynamic braking circuit includes, for each of the plurality of second coils, a second resistor and a second switch disposed in a path connecting two terminals of the second coil to each other.

2. The electric motor according to claim 1 .

8. The magnet assembly includes a first magnet row that generates a thrust by a magnetic field generated by a first coil selected from the plurality of first coils, and a second magnet row that generates a thrust by a magnetic field generated by a second coil selected from the plurality of second coils.

8. The electric motor according to claim 7.

9. the plurality of first coils are arranged between a first end and a second end of the coil assembly, and the plurality of second coils are arranged between the plurality of first coils and the second end; 9. The electric motor according to claim 8.

10. The first coils and the second coils are arranged to overlap each other.

9. The electric motor according to claim 8.

11. the first magnet array and the second magnet array form a Halbach array; 11. The electric motor according to claim 10.

12. the magnet assembly includes a third magnet row that generates a thrust by a magnetic field generated by a first coil selected from the plurality of first coils, and a fourth magnet row that generates a thrust by a magnetic field generated by a second coil selected from the plurality of second coils, the first magnet row and the third magnet row are arranged to face each other across the coil assembly, and the second magnet row and the fourth magnet row are arranged to face each other across the coil assembly.

12. The electric motor according to claim 11.

13. Stage and A motor according to any one of claims 1 to 12 configured to drive the stage; A stage device comprising:

14. A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: a stage for holding the substrate or the original; A motor according to any one of claims 1 to 12 configured to drive the stage; 1. A lithography apparatus comprising:

15. a transfer step of transferring a pattern of an original onto a substrate by the lithography apparatus according to claim 14; a processing step of processing the substrate to which the pattern has been transferred to obtain an article; A method for manufacturing an article, comprising:

Images