Fluorescence x-ray analyzer, water leakage management method for fluorescence x-ray analyzer, information storage medium and program

Abstract

To reduce the extent of damage to the fluorescence x-ray analyzer in the event of a water leakage by detecting water leakage inside the spectral chamber quickly and accurately.SOLUTION: A fluorescence X-ray analyzer has a high voltage power supply that applies voltage to an electron beam source, an X-ray tube that irradiates a sample placed in a spectral chamber with primary X-ray generated by irradiating a target with the generated electron beam, a water supply pump that supplies cooling water to cool the target, a vacuum pump that exhausts the air in the spectral chamber, a vacuum gage that measures the pressure in the spectral chamber, and a control part that determines that the cooling water has leaked inside the spectral chamber based on both the pressure measured by the vacuum gage and the voltage applied by the high voltage power supply to the electron beam source, and stops the operation of the water supply pump.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an X-ray fluorescence analyzer, a water leakage management method for an X-ray fluorescence analyzer, an information storage medium, and a program. [Background technology]

[0002] X-ray fluorescence analyzers are known as instruments for analyzing elements contained in samples. X-ray fluorescence analyzers irradiate a sample with primary X-rays and perform analysis based on the intensity and energy of the fluorescent X-rays emitted from the sample. When analyzing light elements, the spectroscopy chamber is evacuated to avoid absorption of X-rays by the atmosphere. X-ray fluorescence analyzers have an X-ray tube that generates primary X-rays. The target and anode of the X-ray tube generate heat when generating X-rays, so they are cooled with cooling water.

[0003] Wear and vibration can damage the flow path near the anode, where cooling water is constantly applied, and the cooling water can leak into the X-ray tube. Cooling water that leaks into the X-ray tube can break the thin X-ray window of the X-ray tube and be drawn into the vacuum-state of the spectroscopic chamber. If this happens, further damage may occur if the X-ray fluorescence analyzer continues to operate. Therefore, when a cooling water leak is detected, it is necessary to immediately stop the operation of the device in order to reduce the severity of the malfunction.

[0004] For example, the following Patent Document 1 discloses a rotating cathode X-ray generator that receives leakage of cooling water in a tray, detects it with a water detection sensor when the water level reaches a certain level, stops the electron beam for target irradiation, and issues a warning. The following Patent Document 2 discloses a method for determining the presence or absence of cooling water leakage in a liquid-cooled electron tube based on a change in water pressure. The following Patent Document 3 discloses a method for detecting water leakage in an electromagnetic wave generator by using a float-type switch device. The following Patent Document 4 discloses a manufacturing method for an X-ray tube in which a cooling water leakage is detected with a flow sensor and the water supply is stopped. The following Patent Document 5 discloses an X-ray diffraction device having a safety device that stops a test when it detects leakage of cooling water in the X-ray tube. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2-197098 [Patent Document 2] Japanese Patent Application Publication No. 7-235266 [Patent Document 3] JP 2001-327855 A [Patent Document 4] Japanese Patent Application Publication No. 9-167563 [Patent Document 5] Japanese Patent Application Publication No. 8-189907 Summary of the Invention [Problem to be solved by the invention]

[0006] If a sensor for detecting water leakage is placed in the spectroscopic chamber, the size and position of other components placed inside the spectroscopic chamber are restricted. In addition, depending on the size of the spectroscopic chamber, it may not be possible to place the sensor. In addition, depending on the type of sensor, water leakage may not be detected accurately. Furthermore, depending on the position of the sensor, it may not be possible to detect water leakage in the early stages, and a certain amount of cooling water may leak into the spectroscopic chamber.

[0007] The present disclosure has been made in consideration of the above-mentioned problems, and has an object to provide an X-ray fluorescence analysis device that can detect water leakage inside the spectroscopic chamber with high accuracy and speed, thereby reducing the extent of failure when water leakage occurs. [Means for solving the problem]

[0008] (1) A fluorescent X-ray analysis apparatus according to one aspect of the present disclosure is characterized in having a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with an electron beam generated by the electron beam source, a water pump that supplies cooling water to cool the target, a vacuum pump that exhausts the atmosphere in the spectroscopic chamber, a vacuum gauge that measures the pressure in the spectroscopic chamber, and a control unit that determines that the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source and stops operation of the water pump.

[0009] (2) In the above-mentioned X-ray fluorescence analysis apparatus, the control unit determines that the cooling water has leaked when the pressure measured by the vacuum gauge is higher than a predetermined value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a predetermined value.

[0010] (3) In the above fluorescent X-ray analysis apparatus, the control unit stops application of voltage to the electron beam source when it is determined that the cooling water has leaked.

[0011] (4) In the above fluorescent X-ray spectrometer, the control unit stops operation of the vacuum pump when it is determined that the cooling water has leaked.

[0012] (5) In the above fluorescent X-ray spectrometer, the control unit is characterized in that, when it is determined that the cooling water has leaked, the control unit introduces air into the spectroscopic chamber.

[0013] (6) The above-mentioned fluorescent X-ray analysis apparatus further includes an information processing unit including a reception unit that receives instructions from a user and a display unit, wherein the display unit displays a message indicating that the cooling water may have leaked into the spectroscopic chamber when the control unit or the information processing unit determines that cooling water has leaked, and the control unit stops operation of the water pump when the reception unit receives an instruction from a user to stop operation of the water pump.

[0014] (7) A method for managing leakage of a fluorescent X-ray analyzer according to one aspect of the present disclosure is a method for managing leakage of a fluorescent X-ray analyzer having a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with an electron beam generated by the electron beam source, a water pump that supplies cooling water to cool the target, a vacuum pump that exhausts the atmosphere of the spectroscopic chamber, and a vacuum gauge that measures the pressure of the spectroscopic chamber, the method comprising the steps of: determining whether the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; and stopping operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

[0015] (8) An information storage medium according to one aspect of the present disclosure is a non-transitory computer-readable information storage medium storing a program executed by a computer used in an X-ray fluorescence analysis apparatus, the X-ray fluorescence analysis apparatus having a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with an electron beam generated by the electron beam source, a water pump that supplies cooling water to cool the target, a vacuum pump that exhausts the atmosphere of the spectroscopic chamber, and a vacuum gauge that measures the pressure of the spectroscopic chamber, the program causing the computer to execute the steps of determining whether the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stopping operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber.

[0016] (9) A program according to one aspect of the present disclosure is a program executed by a computer used in an X-ray fluorescence analyzer, the X-ray fluorescence analyzer having a high-voltage power supply that applies a voltage to an electron beam source, an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with an electron beam generated by the electron beam source, a water pump that supplies cooling water to cool the target, a vacuum pump that exhausts the air in the spectroscopic chamber, and a vacuum gauge that measures the pressure in the spectroscopic chamber, and is characterized in that the program causes the computer to execute the steps of determining whether the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stopping operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber. Effect of the Invention

[0017] According to the present disclosure, by detecting water leakage inside the spectroscopic chamber with high accuracy and quickly, it is possible to reduce the extent of breakdown of the X-ray fluorescence analyzer when water leakage occurs. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a diagram illustrating an overall configuration of an X-ray fluorescence analyzer. [Diagram 2] FIG. 2 is a diagram illustrating the inside of a spectroscopic chamber. [Diagram 3] FIG. 1 is a schematic diagram of an X-ray tube. [Figure 4] FIG. 2 is a diagram illustrating an overall configuration of an information processing unit. [Diagram 5] 1 is a flowchart illustrating a water leakage management method. [Figure 6] 13 is a flowchart for determining the presence or absence of water leakage. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] 1, the apparatus includes a measurement unit 102, a water pump 104, a vacuum pump 106, an information processing unit 108, and a high-voltage power supply 110. The measurement unit 102 includes a preparation chamber 112, a vacuum shutter 114, leak valves 116A and 116B, a spectroscopic chamber 118, an X-ray tube 120, a vacuum gauge 122, and a control unit 124.

[0020] The preparation chamber 112 is a chamber for loading and unloading the sample 202, and is also called a load lock. The preparation chamber 112 is disposed adjacent to the spectroscopic chamber 118, and a vacuum shutter 114 is disposed between the preparation chamber 112 and the spectroscopic chamber 118. The vacuum shutter 114 is normally closed, and is opened when the sample 202 is transferred between the preparation chamber 112 and the spectroscopic chamber 118. The leak valve 116A is a valve that introduces air into the preparation chamber 112. The leak valve 116A is opened manually or under the control of the control unit 124.

[0021] The spectroscopy chamber 118 is a chamber in which the analysis of the sample 202 is performed. Specifically, as shown in FIG. 2(a), the spectroscopy chamber 118 has a sample stage 204, an X-ray tube 120, a spectroscopic element 206, a detector 208, and a vacuum gauge 122 arranged therein. Note that, in this embodiment, a part of the X-ray tube 120 (around a window portion from which the primary X-rays are emitted) and a part of the vacuum gauge 122 are located inside the spectroscopy chamber 118, and other parts of the X-ray tube 120 and the vacuum gauge 122 are located outside the spectroscopy chamber 118. The leak valve 116B is a valve that introduces air into the spectroscopy chamber 118. The leak valve 116B is opened manually or under the control of the control unit 124.

[0022] The sample stage 204 is an xy stage, on which the sample 202 to be measured is placed. Primary X-rays generated by the X-ray tube 120 are irradiated onto the surface of the sample 202 to be measured. The spectroscopic element 206 disperses fluorescent X-rays of a predetermined wavelength emitted from the sample 202. The detector 208 is placed at a position where the fluorescent X-rays dispersed by the spectroscopic element 206 are incident. The detector 208 is, for example, a proportional counter. The detector 208 measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) counts the pulse signal output from the detector 208 to obtain the intensity of the fluorescent X-rays. The spectroscopic element 206 and the detector 208 may be provided for each element to be analyzed, or a pair of the spectroscopic element 206 and the detector 208 may be rotated and moved for measurement. When one pair of the spectroscopic element 206 and the detector 208 is to be rotationally moved, a mechanism (goniometer) for rotating the spectroscopic element 206 and the detector 208 is disposed in the spectroscopic chamber.

[0023] The X-ray tube 120 shown in FIG. 2(a) irradiates the lower surface of the sample 202 with X-rays from below the sample 202. That is, FIG. 2(a) illustrates the spectroscopic chamber 118 in the case where the X-ray fluorescence analyzer 100 is a bottom-illumination type. As shown in FIG. 2(b), the X-ray tube 120 may irradiate the upper surface of the sample 202 with X-rays from above the sample 202, that is, the X-ray fluorescence analyzer 100 may be a top-illumination type. In addition, the present disclosure is particularly suitable for a large wavelength-dispersive X-ray fluorescence analyzer that frequently uses a high-output water-cooled X-ray tube. However, the present disclosure may of course be used in an energy-dispersive X-ray fluorescence analyzer.

[0024] The X-ray tube 120 applies a voltage to an electron beam source 302, and irradiates a target 304 with the generated electron beam to generate primary X-rays, which are then irradiated onto a sample 202 placed in a spectroscopic chamber 118. Fig. 3 is a diagram showing an outline of the X-ray tube 120. The X-ray tube 120 has an electron beam source 302, a target 304, an anode 306, and a pipe 310.

[0025] For example, when the X-ray tube 120 is a hot cathode type, the electron beam source 302 is a filament, and generates an electron beam when a negative voltage is applied by the high-voltage power supply 110. The target 304 is disposed in contact with the anode 306, and a pipe 310 through which cooling water flows is connected to the back of the anode 306. The anode 306 is formed of a material with high thermal conductivity. When a positive voltage is applied to the anode 306 by the high-voltage power supply 110, the target 304 is irradiated with the electron beam generated from the electron beam source 302, and primary X-rays are generated. As the material of the target 304, a material that generates primary X-rays with high excitation efficiency is appropriately selected according to the energy of the absorption edge of the measurement element. The electron beam source 302 and the target 304 are disposed inside a vacuum-evacuated housing (e.g., a glass tube). The housing has an opening for extracting the primary X-rays, and an X-ray window 308 is provided on the opening, the window being covered with a film formed of a material that transmits the primary X-rays. The film is formed of, for example, beryllium. Since most of the energy of the electron beam irradiated to the target 304 is converted into heat, the target 304 and the anode 306 become hot during measurement. The target 304 and the anode 306 are cooled by flowing cooling water inside the pipe 310.

[0026] Furthermore, the electron beam source 302 may break due to wear or the like. In this case, the high-voltage power supply 110 cannot pass a predetermined current (electron beam) even if it applies a high voltage between the electron beam source 302 and the anode 306. Furthermore, if the degree of vacuum is reduced due to the intrusion of air into the X-ray tube 120 or leakage of cooling water, a discharge may occur inside the X-ray tube 120, making it impossible to apply the predetermined high voltage. When a normal voltage is not applied between the electron beam source 302 and the anode 306, the high-voltage power supply 110 transmits a voltage abnormality signal to the control unit 124. The voltage abnormality signal is transmitted from the high-voltage power supply 110 to the information processing unit 108, and the information processing unit 108 may issue an instruction to the control unit 124, which will be described later.

[0027] The vacuum gauge 122 measures the pressure in the spectroscopy chamber 118. Specifically, for example, the vacuum gauge 122 is a thermal conduction vacuum gauge such as a Pirani gauge. The vacuum gauge 122 measures the pressure in the spectroscopy chamber 118 and transmits it to the control unit 124. The measured pressure may be transmitted from the vacuum gauge 122 to the information processing unit 108, and the information processing unit 108 may give instructions to the control unit 124 (such as stopping the application of voltage to the electron beam source 302 described later, and instructing the water pump 104 and the vacuum pump 106). The vacuum gauge 122 may be a vacuum gauge other than a thermal conduction vacuum gauge as long as it can measure the pressure inside the spectroscopy chamber 118 (particularly the pressure caused by water vapor). For example, the vacuum gauge 122 may be a U-shaped vacuum gauge, an elastic vacuum gauge, a McLeod vacuum gauge, a hot cathode ionization vacuum gauge, or the like.

[0028] The control unit 124 controls the operation of each component included in the measurement unit 102, the vacuum pump 106, and the water pump 104 based on instructions from the information processing unit 108. Furthermore, the control unit 124 controls the operation of the vacuum pump 106, the water pump 104, and the leak valves 116A and 116B when a water leak occurs based on signals from the high-voltage power supply 110 and the vacuum gauge 122. Specifically, the control unit 124 stops the operation of the vacuum pump 106 when the sample 202 is put in or taken out of the preparation chamber 112, and operates the vacuum pump 106 before and during measurement. Furthermore, the control unit 124 operates the water pump 104 during measurement, and stops the operation of the water pump 104 when it is determined that cooling water has leaked. Furthermore, the control unit 124 obtains the intensity of the fluorescent X-rays from a counter (not shown) and transmits the intensity of the fluorescent X-rays to the information processing unit 108.

[0029] The water pump 104 sends cooling water to cool the target 304. Specifically, the water pump 104 has a cooling mechanism and has a function of cooling the water inside the water pump 104. The water pump 104 is connected to the pipe 310 of the X-ray tube 120 via a connecting pipe, and sends cooled water to the X-ray tube 120. The cooling water sent from the water pump 104 returns to the water pump 104 via another connecting pipe. In this way, the water pump 104 cools the anode 306 by circulating the water between the X-ray tube 120 and the water pump 104 while cooling the water serving as a refrigerant. Note that the water pump 104 does not have a cooling mechanism, and a separate cooling mechanism may be provided outside the water pump 104, or water may be taken in from the outside without circulating.

[0030] The vacuum pump 106 exhausts the atmosphere from the preparation chamber 112 and the spectroscopic chamber 118. Specifically, the vacuum pump 106 is a pump such as a dry pump or a molecular pump that creates a vacuum inside a chamber, and operates under instructions from the control unit 124. Note that, although one vacuum pump 106 is connected to the preparation chamber 112 and the spectroscopic chamber 118 in FIG. 1, a configuration in which separate vacuum pumps 106 are provided is preferable.

[0031] The information processing unit 108 communicates with the control unit 124, and controls the transmission and reception of measurement data and the operation of each component connected to the control unit 124. Specifically, for example, as shown in FIG. 4, the information processing unit 108 is a computer connected to the control unit 124, and includes a calculation unit 402, a storage unit 404, a display unit 406, an input / output unit 408, and an internal bus 410.

[0032] The calculation unit 402 is a processor, a CPU (Central Processing Unit), and performs various calculations. For example, the calculation unit 402 executes various calculations and measurement programs related to the analysis of the sample 202, based on the intensity of the fluorescent X-rays obtained from the control unit 124.

[0033] The storage unit 404 is a non-transitory computer-readable information storage medium that stores a program executed by a computer used in the fluorescent X-ray analysis device 100. Specifically, for example, the storage unit 404 is a device that can statically record information, such as a random access memory (RAM) that is a memory, and a hard disk drive (HDD) or a solid state drive (SSD). The storage unit 404 stores a program for managing water leakage. The program causes the computer to execute a step of determining whether or not cooling water has leaked into the spectroscopic chamber 118 based on both the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, and a step of stopping the operation of the water pump 104 when it is determined that cooling water has leaked into the spectroscopic chamber 118. Details of the steps will be described later.

[0034] The display unit 406 is a so-called flat panel display such as a liquid crystal monitor, and displays an image. When the control unit 124 determines that the cooling water has leaked, the display unit 406 displays that the cooling water may have leaked into the spectroscopic chamber 118.

[0035] The input / output unit 408 is one or more interfaces for the computer to exchange information with external devices, and is, for example, one or more devices for the user to input information, such as a keyboard, a mouse, or a touch panel. The input / output unit 408 may also include various ports for wired connection and a controller for wireless connection. The input / output unit 408 acquires the intensity of the fluorescent X-rays incident on the detector 208 from the control unit 124. The input / output unit 408 also functions as a reception unit that receives an instruction to stop the operation of the water pump 104 from the user.

[0036] The internal bus 410 interconnects the calculation unit 402, the storage unit 404, the display unit 406, and the input / output unit 408.

[0037] The control unit 124 determines that cooling water has leaked into the spectroscopic chamber 118 based on both the pressure measured by the vacuum gauge 122 and the voltage applied to the electron beam source 302, and stops the operation of the water pump 104. Specifically, for example, the control unit 124 determines that cooling water has leaked when the pressure measured by the vacuum gauge 122 is higher than a predetermined value and the voltage applied to the electron beam source 302 is lower than a predetermined value. Then, when the control unit 124 determines that cooling water has leaked, it stops the application of voltage to the electron beam source 302. Furthermore, when the control unit 124 determines that cooling water has leaked, it stops the operation of the vacuum pump 106. Furthermore, when the control unit 124 determines that cooling water has leaked, it introduces air into the spectroscopic chamber 118. In addition, in FIG. 1, the high-voltage power supply 110 stops the operation of the water pump 104 and the vacuum pump 106 via the control unit 124, but the high-voltage power supply 110 may directly instruct the water pump 104 and the vacuum pump 106 without going through the control unit 124.

[0038] Detailed functions of the control unit 124 will be described with reference to the flow of the leakage management method shown in Figures 5 and 6. First, the sample 202 is placed on the sample stage 204 (S502). Specifically, with the vacuum shutter 114 closed, the user places the sample 202 in the preparation chamber 112 and hermetically seals the preparation chamber 112.

[0039] Next, measurement is started (S504). Specifically, for example, it is assumed that the information processing unit 108 is executing a program for measurement, and the program is displaying given information related to the measurement on the display unit 406. The user inputs measurement conditions such as measurement time and starts measurement through the input / output unit 408 such as a mouse and keyboard. The information processing unit 108 instructs the control unit 124 to perform measurement based on the measurement conditions.

[0040] When the control unit 124 receives an instruction to start measurement, it controls the vacuum pump 106 to exhaust the atmosphere inside the preparation chamber 112. When the pressure in the preparation chamber 112 becomes equal to or lower than a predetermined value, the control unit 124 opens the vacuum shutter 114 and causes the transport device (not shown) to transport the sample 202 from the preparation chamber 112 to above the sample stage 204 in the spectroscopy chamber 118. The control unit 124 notifies the high-voltage power supply 110 of the start of measurement, and the high-voltage power supply 110 applies a voltage to the electron beam source 302 of the X-ray tube 120. The electron beam generated from the electron beam source 302 is irradiated onto the target 304, and primary X-rays are generated from the target 304. The generated primary X-rays are irradiated onto the sample 202 arranged in the spectroscopy chamber 118. The control unit 124 also instructs the X-ray tube 120 to irradiate primary X-rays, and instructs the water pump 104 to send cooling water to the X-ray tube 120. The water pump 104 that has received this instruction circulates water between the water pump 104 and the X-ray tube 120 .

[0041] When the measurement is started, the flow for determining the presence or absence of water leakage shown in Fig. 6 is executed until the measurement is completed (S508). Note that the flow shown in Fig. 6 may be executed repeatedly at regular time intervals independently of the flow shown in Fig. 5, or may be executed when the control unit 124 acquires a voltage abnormality signal.

[0042] When the control unit 124 acquires a voltage abnormality signal (S602), it is determined whether the pressure in the spectroscopy chamber 118 is higher than a predetermined value (S604). Then, if the pressure in the spectroscopy chamber 118 is higher than the predetermined value, it is determined that a water leak has occurred in the spectroscopy chamber 118 (S606). Specifically, it is determined that a water leak has occurred when the pressure in the spectroscopy chamber 118 is greater than a predetermined absolute value (e.g., 1 Pa). Alternatively, it may be determined that a water leak has occurred when the pressure in the spectroscopy chamber 118 exceeds a predetermined multiple (e.g., 1000 times) of the pressure when normal measurement is performed.

[0043] The control unit 124 acquires the voltage abnormality signal from the high-voltage power supply 110 when a normal voltage is not applied between the electron beam source 302 and the anode 306. The control unit 124 acquires the pressure measured by the vacuum gauge 122 at regular time intervals. Since the information processing unit 108 and the control unit 124 can communicate with each other, the determination as to whether a water leak has occurred may be made by either the information processing unit 108 or the control unit 124.

[0044] If it is not determined in S508 that there is a water leak and a predetermined time has elapsed in S506, the measurement ends. When the measurement ends, the analysis result is displayed on the display unit 406. On the other hand, if it is determined in S508 that there is a water leak, the display unit 406 displays a warning indicating that there is a possibility that cooling water has leaked into the spectroscopic chamber 118.

[0045] In response to the warning displayed on the display unit 406, the user inputs whether to stop or continue the measurement into the information processing unit 108. When the reception unit receives an instruction to stop the measurement from the user, the control unit 124 stops the operation of the water pump 104 (S514).

[0046] Moreover, the control unit 124 stops the application of voltage to the electron beam source 302 (S516).

[0047] Furthermore, the control unit 124 stops the operation of the vacuum pump 106. Furthermore, the control unit 124 opens the leak valve 116B to introduce air into the spectroscopic chamber 118 (S518). At this time, the control unit 124 may also open the leak valve 116A to introduce air into the preparation chamber 112.

[0048] As described above, according to the present disclosure, whether or not a water leak has occurred is determined using both the measurement value of the vacuum gauge 122 and the voltage applied by the high-voltage power supply 110. When liquid water leaks into the vacuum spectroscopic chamber 118, the water evaporates and the pressure in the spectroscopic chamber 118 increases. If the normal voltage is simply not applied to the electron beam source 302, various causes other than water leakage are assumed as the abnormality occurring in the fluorescent X-ray analyzer 100. However, in most cases, a state in which the normal voltage is not applied to the electron beam source 302 and the degree of vacuum in the spectroscopic chamber 118 has deteriorated is caused by water leakage into the spectroscopic chamber 118. Therefore, according to the present disclosure, whether or not a water leak has occurred can be determined quickly and accurately without adding a sensor to detect water leakage.

[0049] The present invention is not limited to the above-mentioned embodiment, and various modifications are possible. The configuration of the fluorescent X-ray analysis device 100 is an example, and the present invention is not limited to this. The configuration shown in the above-mentioned embodiment may be replaced with a configuration that is substantially the same as the configuration shown in the above-mentioned embodiment, a configuration that provides the same action and effect, or a configuration that achieves the same purpose.

[0050] For example, in Fig. 1, the function of the control unit 124 may be included in the function of the information processing unit 108. In Fig. 5, steps S510 and S512 may be omitted, and if a water leak is detected, the water pump 104 may be stopped immediately without human intervention. Also, steps S514, S516, and S518 may be performed in any order and may be interchanged. [Explanation of symbols]

[0051] 100 X-ray fluorescence analyzer, 102 measurement unit, 104 water pump, 106 vacuum pump, 108 information processing unit, 110 high voltage power supply, 112 preparation room, 114 vacuum shutter, 116 leak valve, 118 spectroscopy room, 120 X-ray tube, 122 vacuum gauge, 124 control unit, 202 sample, 204 sample stage, 206 collimator, 208 detector, 302 electron beam source, 304 target, 306 anode, 308 X-ray window, 310 piping, 402 calculation unit, 404 memory unit, 406 display unit, 408 input / output unit, 410 internal bus.

Claims

1. a high voltage power supply that applies a voltage to the electron beam source; an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a water pump for supplying cooling water for cooling the target; a vacuum pump for discharging the atmosphere from the spectroscopic chamber; a vacuum gauge for measuring the pressure in the spectroscopic chamber; a control unit that determines that the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source, and stops the operation of the water pump; 1. An X-ray fluorescence analysis apparatus comprising:

2. 2. The X-ray fluorescence analysis apparatus according to claim 1, wherein the control unit determines that the cooling water has leaked when the pressure measured by the vacuum gauge is higher than a predetermined value and the voltage of the high-voltage power supply applied to the electron beam source is lower than a predetermined value.

3. 3. The X-ray fluorescence analysis apparatus according to claim 1, wherein the control unit stops application of a voltage to the electron beam source when it is determined that the cooling water has leaked.

4. 3. The X-ray fluorescence analysis apparatus according to claim 1, wherein the control unit stops the operation of the vacuum pump when it is determined that the cooling water has leaked.

5. 3. The X-ray fluorescence spectrometer according to claim 1, wherein the control unit introduces air into the spectroscopic chamber when it is determined that the cooling water has leaked.

6. The information processing unit further includes a reception unit that receives an instruction from a user and a display unit, the display unit displays, when the control unit or the information processing unit determines that the cooling water has leaked, that the cooling water may have leaked into the spectroscopic chamber; and When the reception unit receives an instruction to stop the operation of the water pump from a user, the control unit stops the operation of the water pump.

3. The X-ray fluorescence analysis apparatus according to claim 1, wherein the X-ray fluorescence analysis apparatus is a cascade type.

7. a high voltage power supply that applies a voltage to the electron beam source; an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a water pump for supplying cooling water for cooling the target; a vacuum pump for discharging the atmosphere from the spectroscopic chamber; a vacuum gauge for measuring the pressure in the spectroscopic chamber; A method for managing water leakage in an X-ray fluorescence analyzer comprising: determining whether or not the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; stopping an operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber; 1. A method for managing water leakage in an X-ray fluorescence analyzer, comprising:

8. A non-transitory computer-readable information storage medium for storing a program executed by a computer used in an X-ray fluorescence analysis apparatus, The X-ray fluorescence analyzer is a high voltage power supply that applies a voltage to the electron beam source; an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a water pump for supplying cooling water for cooling the target; a vacuum pump for discharging the atmosphere from the spectroscopic chamber; a vacuum gauge for measuring the pressure in the spectroscopic chamber; having The program is determining whether or not the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; stopping an operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber; An information storage medium that causes the computer to execute the above.

9. A program executed by a computer for use in an X-ray fluorescence analyzer, The X-ray fluorescence analyzer is a high voltage power supply that applies a voltage to the electron beam source; an X-ray tube that irradiates a sample placed in a spectroscopic chamber with primary X-rays generated by irradiating a target with the electron beam generated by the electron beam source; a water pump for supplying cooling water for cooling the target; a vacuum pump for discharging the atmosphere from the spectroscopic chamber; a vacuum gauge for measuring the pressure in the spectroscopic chamber; having The computer includes: determining whether or not the cooling water has leaked into the spectroscopic chamber based on both the pressure measured by the vacuum gauge and the voltage of the high-voltage power supply applied to the electron beam source; stopping an operation of the water pump when it is determined that the cooling water has leaked into the spectroscopic chamber; A program characterized by executing the above.

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