X-ray generator and x-ray inspection device equipped with the same

Abstract

To provide an x-ray generator and an x-ray inspection device equipped with the same that can be made smaller and lighter.SOLUTION: An x-ray generator includes an x-ray tube 22 that generates x-rays, a high-voltage circuit board 23 that applies a high tube voltage to the x-ray tube 22, and a housing 20 that is filled with insulating oil and houses the x-ray tube 22 and the high-voltage circuit board 23. A shielding cover 21 made of a shielding material that blocks x-rays is provided within the housing 20, the x-ray tube 22 is disposed within the shielding cover 21, and the high-voltage circuit board 23 is attached to the outer bottom surface 21e of the shielding cover 21.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an X-ray generator and an X-ray inspection apparatus equipped with the same. [Background technology]

[0002] Patent Document 1 discloses an X-ray generator that includes an X-ray tube that generates X-rays, a high-voltage circuit board that applies a high voltage to the X-ray tube to heat a filament, and a tube container in which the X-ray tube and the high-voltage circuit board are sealed in insulating oil, with the inside of the tube container lined with lead plates to prevent leakage of X-rays. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2002-25792 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the X-ray generating device described in Patent Document 1, the X-ray tube and the high-voltage circuit board, which are different sizes, are housed in the same tube container, so there is extra space in the tube container, which makes the X-ray generating device itself larger.

[0005] In addition, a heavy lead plate is required to line the inside front surface of the tube vessel to block X-rays, which makes the X-ray generator itself heavy.

[0006] The present invention has been made in view of the above-mentioned circumstances, and has an object to provide an X-ray generator that can be made smaller and lighter, and an X-ray inspection apparatus including the same. [Means for solving the problem]

[0007] The X-ray generator according to the present invention comprises an X-ray tube that generates X-rays, a high-voltage circuit board that applies a high voltage to the X-ray tube, and a housing filled with insulating oil and containing the X-ray tube and the high-voltage circuit board, wherein a shielding cover made of a shielding material that blocks the X-rays is provided within the housing, the X-ray tube is disposed within the shielding cover, and the high-voltage circuit board is attached to the outside of the shielding cover.

[0008] With this configuration, the X-ray generator according to the present invention has a shielding cover made of a shielding material that blocks X-rays provided inside the housing, an X-ray tube disposed inside the shielding cover, and a high-voltage circuit board attached to the outside of the shielding cover, so that the high-voltage circuit board can be efficiently arranged inside the housing. Also, by shielding the periphery of the X-ray tube with the shielding cover, the weight of the shielding material on the inner surface of the housing can be reduced. This allows the X-ray generator to be made smaller and lighter.

[0009] Furthermore, in the X-ray generator according to the present invention, the high-voltage circuit board is provided outside the shielding cover, so that the high-voltage circuit board is not constantly exposed to X-rays generated by the X-ray tube, and deterioration of the high-voltage circuit board due to X-rays can be prevented.

[0010] In the X-ray generator according to the present invention, it is preferable that the high-voltage circuit board is attached to the shielding cover via insulating leg members and is held at a position spaced a predetermined distance from the shielding cover by the leg members.

[0011] With this configuration, in the X-ray generator according to the present invention, the high-voltage circuit board is attached to the shielding cover via insulating leg members and is held at a position a predetermined distance away from the shielding cover by the leg members, so that an insulation distance can be secured between the high-voltage circuit board and the shielding cover, thereby preventing discharge from occurring between the high-voltage circuit board and the shielding cover.

[0012] In the X-ray generator according to the present invention, it is preferable that the housing has an opening on one side and a lid that closes the opening on the one side, an X-ray window portion through which X-rays generated by the X-ray tube pass is formed in the lid, and the shielding cover and the X-ray tube are attached to the lid.

[0013] With this configuration, the X-ray generator according to the present invention has the shielding cover and the X-ray tube attached to the lid that closes one side of the housing, and the high-voltage circuit board attached to the outside of the shielding cover, so that no space is required for arranging the high-voltage circuit board on the lid, and further the X-ray tube, the shielding cover, and the high-voltage circuit board can be simultaneously removed from and stored inside the housing when the lid of the housing is attached or detached, thereby improving the maintainability of the X-ray generator.

[0014] In the X-ray generator according to the present invention, the high voltage circuit board is preferably attached to an outer surface of the shielding cover on the side opposite to the lid body side.

[0015] With this configuration, in the X-ray generator according to the present invention, the high-voltage circuit board is attached to the outer surface of the shielding cover opposite the lid side, so no space is required inside the housing to place the high-voltage circuit board on the outer peripheral surface of the shielding cover extending in a direction intersecting the lid so as to sandwich the X-ray tube, which makes it possible to reduce the dimensions of the housing in the direction perpendicular to the direction in which X-rays are emitted from the X-ray tube.

[0016] In the X-ray generator according to the present invention, the high voltage circuit board is preferably attached to an outer circumferential surface of the shielding cover extending in a direction intersecting with the lid.

[0017] With this configuration, in the X-ray generator according to the present invention, the high-voltage circuit board is attached to the outer peripheral surface of the shielding cover extending in a direction intersecting with the lid, so no space is required inside the housing to place the high-voltage circuit board on the outer surface of the shielding cover opposite the lid side, which makes it possible to reduce the dimension (height) of the housing in the direction in which X-rays are emitted from the X-ray tube.

[0018] In the X-ray generator according to the present invention, it is preferable that an insulating plate-like member is disposed between the high-voltage circuit board and the shielding cover, and the high-voltage circuit board is attached to the shielding cover via the plate-like member.

[0019] With this configuration, in the X-ray generator according to the present invention, the high-voltage circuit board is attached to the shielding cover via an insulating plate member arranged between the high-voltage circuit board and the shielding cover, thereby further improving the insulation between the high-voltage circuit board and the shielding cover.

[0020] An X-ray inspection apparatus according to the present invention includes the X-ray generator according to claim 1 or 2, and an X-ray detector that detects the X-rays.

[0021] With this configuration, the X-ray inspection apparatus according to the present invention can achieve a reduction in size and weight of the X-ray generator, and therefore a reduction in size and weight of the X-ray inspection apparatus. Effect of the Invention

[0022] According to the present invention, it is possible to provide an X-ray generator that can be made smaller and lighter, and an X-ray inspection apparatus including the same. [Brief description of the drawings]

[0023] [Figure 1] FIG. 1 is a schematic block diagram of an X-ray inspection apparatus including an X-ray generator according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a transparent perspective view of the X-ray generator according to the first embodiment of the present invention. [Diagram 3] FIG. 3 is a transparent front view of the X-ray generator according to the first embodiment of the present invention. [Figure 4] FIG. 4 is a transparent side view of the X-ray generator according to the first embodiment of the present invention. [Diagram 5] FIG. 5 is a see-through perspective view showing a modified example of the X-ray generator according to the first embodiment of the present invention. [Figure 6] FIG. 6 is a transparent perspective view of an X-ray generator according to a second embodiment of the present invention. [Figure 7] FIG. 7 is a transparent front view of an X-ray generator according to the second embodiment of the present invention. [Figure 8] FIG. 8 is a transparent side view of an X-ray generator according to a second embodiment of the present invention. [Figure 9] FIG. 9 is a see-through perspective view showing a modified example of the X-ray generator according to the second embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] Hereinafter, an X-ray generator and an X-ray inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.

[0025] [First embodiment] An X-ray inspection apparatus including an X-ray generator according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 4.

[0026] (X-ray inspection equipment configuration) As shown in FIG. 1, the X-ray inspection apparatus 1 of this embodiment is an X-ray inspection apparatus that irradiates an inspection object W being transported with X-rays, detects the transmitted X-rays, and uses the obtained transmitted image to inspect the inspection object W for foreign matter contamination, shape, etc.

[0027] The X-ray inspection apparatus 1 of this embodiment includes a housing (not shown), an X-ray generator 2 that generates X-rays, an X-ray detector 3 that detects X-rays that have passed through an inspection object W, and a control device 4. The X-ray generator 2, the X-ray detector 3, and the control device 4 are housed in a housing (not shown).

[0028] The housing is incorporated, for example, in a conveyor 5 that transports the object to be inspected W. The conveyor 5 is part of the production equipment for the object to be inspected W, and is configured separately from the X-ray inspection device 1. In this embodiment, an embedded type X-ray inspection device 1 that is incorporated in a separate conveyor 5 will be described as an example. The X-ray inspection device 1 of this embodiment is incorporated in an existing conveyor 5 that transports the object to be inspected W in a horizontal direction, such as a top chain conveyor or a belt conveyor.

[0029] The X-ray generator 2 and the X-ray detector 3 are disposed so as to face each other in the vertical direction of the conveyor 5, sandwiching a transport path through which the inspection object W on the conveyor 5 passes.

[0030] The X-ray generator 2 generates X-rays by irradiating an electron beam from the cathode of an X-ray tube 22 provided inside the X-ray generator 2 onto an anode target, and irradiates the X-rays radially in a direction perpendicular to the conveying direction of the inspection object W as shown by the dashed line in Fig. 1. In this way, the X-ray generator 2 irradiates the X-rays onto the inspection object W on the conveyor 5 which is conveyed in sequence.

[0031] The X-ray tube 22 is housed in a shielding cover 21, which will be described later, in order to prevent leakage of X-rays. Furthermore, the shielding cover 21 is housed in a housing 20, which will be described later. The detailed housing structure of the X-ray generator 2 will be described later.

[0032] The X-ray detector 3 includes a photodiode (not shown) and a plurality of X-ray detection elements (not shown) each made of a scintillator provided on the photodiode. As the X-ray detector 3, for example, an area sensor in which X-ray detection elements are arranged in a plane in the conveying direction and in a direction perpendicular to the conveying direction, or a line sensor in which X-ray detection elements are arranged in a line in a direction perpendicular to the conveying direction can be used.

[0033] The X-ray detector 3 captures a transmission image of the X-rays that are irradiated from the X-ray generator 2 to the inspection object W and transmitted through the inspection object W. Specifically, the X-rays are converted into optical signals by the scintillator of the X-ray detection element, and the optical signals are converted into electrical signals by the photodiodes. Further processing such as noise removal is performed, and a transmission image with a gray-scale distribution is generated based on the amount of transmitted X-rays.

[0034] A display unit 6 and a setting operation unit 7 are connected to the control device 4.

[0035] The display unit 6 is configured with a flat display or the like, and is configured to perform display output to a user. The display unit 6 is configured to display images of the inspection results and the like by the control device 4.

[0036] The display unit 6 is adapted to display the pass / fail judgment result of the inspection object W with characters or symbols such as "OK" or "NG." The display unit 6 is also adapted to display statistics such as the total number of inspections, the number of pass / fail items, the total number of NG items, etc.

[0037] The display content and display mode of the display unit 6 are determined based on a preset setting or a request made by a predetermined key operation on the setting operation unit 7.

[0038] The setting operation unit 7 is used to input settings of various parameters and the like to the control device 4. The setting operation unit 7 is composed of a plurality of keys, switches, and the like that are operated by the user, and is used to input settings of various parameters and the like to the control device 4 and to select an operation mode.

[0039] In this embodiment, the display unit 6 and the setting operation unit 7 are integrated as a touch panel display device, and are disposed at the upper front surface of a housing (not shown).

[0040] The control device 4 includes an X-ray image storage unit 41, an image processing unit 42, a determination unit 43, and a control unit 44.

[0041] The X-ray image storage unit 41 is configured to store the X-ray image received from the X-ray detector 3 .

[0042] The image processing unit 42 applies various image processing algorithms and the like to the X-ray image read out from the X-ray image storage unit 41 to perform image processing. Here, the image processing algorithm is a combination of a plurality of image processing filters.

[0043] The judgment unit 43 distinguishes between the object to be inspected W and foreign matter in the X-ray image processed by the image processing unit 42 to determine whether or not foreign matter is present, and also judges whether the shape of the object to be inspected W is acceptable.

[0044] The control unit 44 has a CPU, a memory as a storage area or a working area for a control program, and the like, and is configured to control the entire X-ray inspection apparatus 1. The control contents of the control unit 44 include control of the display contents and display form of the display unit 6.

[0045] (X-ray generator housing structure) As shown in FIG. 2, the X-ray generator 2 includes a housing 20, a shielding cover 21, an X-ray tube 22, a high-voltage circuit board 23, and a lid 24.

[0046] The housing 20 is made of, for example, stainless steel or iron, and is configured in a box shape with the top surface being an open side. The inside of the housing 20 is filled with insulating oil (not shown). It is preferable that the insulating oil is filled at least to a height at which a cathode and an anode of the X-ray tube 22, which will be described later, are immersed.

[0047] The insulating oil, for example, maintains insulation between the X-ray tube 22 and the shielding cover 21 and the housing 20, and also functions as a medium for cooling the heat generated by the X-ray tube 22 when the X-ray tube 22 is driven.

[0048] As shown in FIGS. 3 and 4, the shielding cover 21 is formed to be smaller in length, width, and height than the housing 20, and is housed inside the housing 20.

[0049] The shielding cover 21 is formed in a U-shape with openings on the top surface and on both axial sides of the X-ray tube 22, and has two outer sides 21c, 21d that extend in a direction intersecting the lid body 24 (in this embodiment, the vertical direction) and form the outer peripheral surface of the shielding cover 21, and an outer bottom surface 21e that forms the outer surface of the shielding cover 21 on the side opposite the lid body 24.

[0050] The upper surface of the shielding cover 21 is joined to the rear surface of the lid body 24 by welding or a fastening member (not shown). As a result, the shielding cover 21 is held by the lid body 24 within the housing 20 with the outer bottom surface 21e spaced upward from the inner bottom surface 20a of the housing 20.

[0051] The shielding cover 21 is made of a shielding material that blocks X-rays, and is adapted to house the X-ray tube 22 therein. For example, lead is used as the shielding material. The shielding cover 21 may be made of, for example, tungsten, or stainless steel or iron in the case of low energy, or may be made of a wall member made of stainless steel, iron, or a material other than the shielding material, with a shielding member such as lead lined inside.

[0052] Here, a high voltage, i.e., a high tube voltage, is applied to the X-ray tube 22. For this reason, in this embodiment, in order to prevent discharge from occurring between the X-ray tube 22 and the shielding cover 21, it is necessary to set the distance (including the creepage distance) between the X-ray tube 22 housed in the shielding cover 21 and the inner surface of the shielding cover 21 to a sufficiently large dimension according to the tube voltage.

[0053] Therefore, in this embodiment, the size of the shielding cover 21, i.e., the length, width and height dimensions, are set to dimensions that ensure a distance (including creepage distance) between the X-ray tube 22 and the inner surface of the shielding cover 21 such that no discharge occurs.

[0054] The X-ray tube 22 is formed in a cylindrical shape, and has a cathode at one end (hereinafter referred to as the "cathode end") 22b in the axial direction of the cylinder, an anode at the other end (hereinafter referred to as the "anode end") 22a, and a target made of tungsten or the like is provided on the anode. The X-ray tube 22 extracts an electron beam from the cathode by applying a high tube voltage between the anode and cathode, and generates X-rays by causing the electrons to impinge on the target.

[0055] An anode side lead wire 10 is drawn out from the anode side end 22a. The lead wire 10 is connected to a high voltage circuit board 23. A cathode side lead wire 11 is drawn out from the cathode side end 22b. The lead wire 11 is connected to the high voltage circuit board 23.

[0056] An upper cylindrical portion 22c is provided on the upper portion of the X-ray tube 22. The lower end of the upper cylindrical portion 22c surrounds the X-ray emission port and is connected to the X-ray tube 22. The upper end of the upper cylindrical portion 22c is fastened to the cover 24 by a fastening member (not shown) so as to surround an X-ray window portion 24a (described later) of the cover 24. As a result, the X-ray tube 22 is held at approximately the center of the shielding cover 21 with the axis of the cylinder horizontal.

[0057] When the X-ray tube 22 is driven, X-rays are emitted from the target through an emission port provided on the circumferential surface of the X-ray tube 22 into the inside of the upper cylindrical portion 22c, and are emitted to the outside through the X-ray window portion 24a of the lid 24.

[0058] The high-voltage circuit board 23 is a circuit board that applies a high tube voltage to the X-ray tube 22. The high-voltage circuit board 23 is attached to the outside of the shielding cover 21. Specifically, the high-voltage circuit board 23 is attached to the outer bottom surface 21e of the shielding cover 21 via four leg members 13.

[0059] As a result, the high-voltage circuit board 23 is held by the four leg members 13 at a position spaced a predetermined distance downward from the outer bottom surface 21e of the shielding cover 21. The leg members 13 are made of an insulating material such as resin.

[0060] The predetermined distance between the high-voltage circuit board 23 and the outer bottom surface 21e of the shielding cover 21 is desirably a distance (including creepage distance) that can maintain insulation between the high-voltage circuit board 23 and the shielding cover 21. Therefore, the axial length of the leg member 13 in this embodiment is desirably set to a dimension corresponding to the distance that can maintain the above-mentioned insulation.

[0061] The number of leg members 13 is not limited to 4. Also, as long as the high-voltage circuit board 23 can be held at a position spaced a predetermined distance downward from the outer bottom surface 21e of the shielding cover 21, the mounting structure is not limited to the one using the leg members 13, and other mounting structures may be used.

[0062] Moreover, it is desirable that the high-voltage circuit board 23 is held in a position within the housing 20 where insulation can be maintained with respect to the housing 20. Therefore, in this embodiment, it is desirable that the dimensions of the housing 20 are set so that the distance between the housing 20 and the high-voltage circuit board 23 is a distance where insulation can be maintained.

[0063] The lid 24 is a lid that closes the opening on the top surface of the housing 20, and is provided so as to be freely attached and detached to the top surface of the housing 20. When the opening of the housing 20 is closed, the lid 24 is fastened to the top surface of the housing 20 by a fastening member (not shown).

[0064] The cover 24 has an X-ray window 24a formed therein through which X-rays generated by the X-ray tube 22 pass. The X-ray window 24a is disposed approximately in the center of the cover 24.

[0065] As described above, the shielding cover 21 and the X-ray tube 22 are attached to the lid 24. Therefore, when the lid 24 is removed from the housing 20, the shielding cover 21 and the X-ray tube 22 are also taken out from inside the housing 20 together with the lid 24.

[0066] (Action and effect) As described above, in the X-ray generator according to this embodiment, the shielding cover 21 made of a shielding material that blocks X-rays is provided inside the housing 20, the X-ray tube 22 is disposed inside the shielding cover 21, and the high-voltage circuit board 23 is attached to the outside of the shielding cover 21, so that the high-voltage circuit board 23 can be efficiently disposed inside the housing 20. Also, by shielding the periphery of the X-ray tube 22 with the shielding cover 21, the weight of the shielding material on the inner surface of the housing can be reduced. This allows the X-ray generator 2 to be made smaller and lighter.

[0067] Furthermore, in the X-ray generator according to this embodiment, the high-voltage circuit board 23 is provided outside the shielding cover 21, so that the high-voltage circuit board 23 is not constantly exposed to the X-rays generated by the X-ray tube 22, and deterioration of the high-voltage circuit board 23 due to the X-rays can be prevented.

[0068] In the X-ray generator according to this embodiment, the high-voltage circuit board 23 is attached to the shielding cover 21 via the insulating leg members 13 and is held at a position a predetermined distance away from the shielding cover 21 by the leg members 13, so that an insulation distance can be secured between the high-voltage circuit board 23 and the shielding cover 21. This makes it possible to prevent discharge from occurring between the high-voltage circuit board 23 and the shielding cover 21.

[0069] In the X-ray generator according to this embodiment, the shielding cover 21 and the X-ray tube 22 are attached to the lid 24 that closes the top surface of the housing 20, and the high-voltage circuit board 23 is attached to the outside of the shielding cover 21, so that no space is required in the lid 20 to place the high-voltage circuit board 23, and further, the X-ray tube 22, the shielding cover 21, and the high-voltage circuit board 23 can be simultaneously removed from and stored in the housing 20 when the lid 24 of the housing 20 is attached or detached. This improves the maintainability of the X-ray generator 2.

[0070] For example, after wiring the X-ray tube 22 and the high-voltage circuit board 23 outside the housing 20, the lid 24 can be attached to the housing 20 to accommodate the wired X-ray tube 22 and the high-voltage circuit board 23 together with the shielding cover 21 inside the housing 20. In this case, since the wiring can be performed outside the housing 20, the wiring work is easy.

[0071] In the X-ray generator according to this embodiment, the high-voltage circuit board 23 is attached to the outer bottom surface 21e of the shielding cover 21 opposite the lid 24 side, so that no space is required inside the housing 20 for arranging the high-voltage circuit board 23 on the outer surfaces 21c, 21d of the shielding cover 21 extending in a direction intersecting the lid 24 so as to sandwich the X-ray tube 22. This makes it possible to reduce the dimension (width) of the housing 20 in the direction perpendicular to the direction in which X-rays are emitted from the X-ray tube 22.

[0072] As described above, in the X-ray inspection apparatus according to this embodiment, the X-ray generator 2 can be made smaller and lighter, and therefore the X-ray inspection apparatus 1 can be made smaller and lighter.

[0073] (Modification) In this embodiment, an example has been described in which the high-voltage circuit board 23 and the shielding cover 21 are attached via the leg members 13, but this is not limited thereto. For example, as shown in FIG. 5, a configuration may be used in which an insulating plate-like member 15 is disposed between the high-voltage circuit board 23 and the shielding cover 21, and the high-voltage circuit board 23 is attached to the shielding cover 21 via the plate-like member 15.

[0074] The plate-like member 15 is made of, for example, resin, and is attached to the high-voltage circuit board 23 via four first leg members 16, and is attached to the outer bottom surface 21e of the shielding cover 21 via four second leg members 17. The first leg members 16 and the second leg members 17 are made of an insulating material such as, for example, resin.

[0075] In the modified example shown in Figure 5, the high-voltage circuit board 23 is attached to the shielding cover 21 via an insulating plate-like member 15 arranged between the high-voltage circuit board 23 and the shielding cover 21, thereby further improving the insulation between the high-voltage circuit board 23 and the shielding cover 21.

[0076] Furthermore, since the first leg member 16 and the second leg member 17 are arranged at positions offset horizontally, i.e., at positions where they do not overlap vertically, a large creepage distance can be secured between the high-voltage circuit board 23 and the shielding cover 21, thereby further improving insulation.

[0077] Further, in the present embodiment, an example has been described in which the X-ray generator according to the present invention is applied to the X-ray generator 2 arranged to irradiate X-rays upward, but the present invention is not limited to this, and may be applied to, for example, an X-ray generator arranged to irradiate X-rays downward.

[0078] In addition, in this embodiment, an example has been described in which the X-ray generator according to the present invention is applied to an X-ray generator used in an X-ray inspection device of a type in which the X-ray generator 2 and the X-ray detector 3 are arranged to face each other in the vertical direction across the transport path of the object to be inspected W. However, the present invention is not limited to this, and may be applied to, for example, an X-ray generator used in a horizontal irradiation type X-ray inspection device in which the X-ray generator 2 and the X-ray detector 3 are arranged to face each other in the horizontal direction perpendicular to the transport direction of the object to be inspected W across the transport path of the object to be inspected W.

[0079] [Second embodiment] Next, an X-ray generator according to a second embodiment of the present invention will be described with reference to FIGS.

[0080] This embodiment is different from the first embodiment in the mounting position of the high-voltage circuit board 23 in the X-ray generator included in the X-ray inspection apparatus 1 and the shape of the housing 20, but other configurations are similar to those of the first embodiment. In the following, the same reference numerals are used for the same configurations as those of the first embodiment, and the description thereof will be omitted.

[0081] As shown in FIG. 6, the X-ray generator 102 according to this embodiment includes a housing 120, a shielding cover 21, an X-ray tube 22, a high-voltage circuit board 23, and a lid 124.

[0082] The housing 120 of this embodiment has a different shape from the housing 20 of the first embodiment, but the other configurations are the same. The housing 120 is smaller in height (vertical) dimension than the housing 20 of the first embodiment, and is formed to have larger dimensions in the vertical direction and in the direction perpendicular to the axial direction of the X-ray tube 22 (front-rear direction, which is the left-right direction in FIG. 8).

[0083] Accordingly, the cover 124 of this embodiment is formed to have larger dimensions in the up-down direction and in the direction perpendicular to the axial direction of the X-ray tube 22 (front-rear direction, which is the left-right direction in FIG. 8) than the cover 24 of the first embodiment. Also, the X-ray window portion 124a formed in the cover 124 is disposed at a position biased toward the front side of the housing 120 (left side in FIG. 8) with respect to the center of the cover 124. This is because, in the housing 120 of this embodiment, the shielding cover 21 is disposed biased toward the front side of the housing 120 (left side in FIG. 8) to ensure a space for arranging the high-voltage circuit board 23.

[0084] In this embodiment, the upper surface of the shielding cover 21 is joined to the rear surface of the lid body 124 by welding or a fastening member (not shown). As a result, the shielding cover 21 is held by the lid body 124 in the housing 120 with the outer bottom surface 21e spaced upward from the inner bottom surface 120a of the housing 120.

[0085] 7 and 8, in this embodiment, the high-voltage circuit board 23 is attached via four leg members 13 to the outer surface 21c that constitutes one side of the outer circumferential surface of the shielding cover 21. The high-voltage circuit board 23 may also be attached to the outer surface 21d.

[0086] The high-voltage circuit board 23 is held by the four leg members 13 at a position spaced a predetermined distance laterally from the outer surface 21c of the shielding cover 21.

[0087] The predetermined distance between the high-voltage circuit board 23 and the outer surface 21c of the shielding cover 21 is desirably a distance (including creepage distance) that can maintain insulation between the high-voltage circuit board 23 and the shielding cover 21. Therefore, the axial length of the leg member 13 in this embodiment is desirably set to a dimension corresponding to the distance that can maintain the above-mentioned insulation.

[0088] Moreover, it is desirable that the high-voltage circuit board 23 is held in a position within the housing 120 where insulation can be maintained with respect to the housing 120. Therefore, in this embodiment, it is desirable that the dimensions of the housing 120 are set so that the distance between the housing 120 and the high-voltage circuit board 23 is a distance where insulation can be maintained.

[0089] (Action and effect) As described above, in the X-ray generator according to this embodiment, the shielding cover 21 made of a shielding material that blocks X-rays is provided inside the housing 120, the X-ray tube 22 is disposed inside the shielding cover 21, and the high-voltage circuit board 23 is attached to the outside of the shielding cover 21, so that the high-voltage circuit board 23 can be efficiently disposed inside the housing 120. Also, by shielding the periphery of the X-ray tube 22 with the shielding cover 21, the weight of the shielding material on the inner surface of the housing can be reduced. This allows the X-ray generator 102 to be made smaller and lighter.

[0090] Furthermore, in the X-ray generator according to this embodiment, the high-voltage circuit board 23 is provided outside the shielding cover 21, so that the high-voltage circuit board 23 is not constantly exposed to the X-rays generated by the X-ray tube 22, and deterioration of the high-voltage circuit board 23 due to the X-rays can be prevented.

[0091] In the X-ray generator according to this embodiment, the high-voltage circuit board 23 is attached to the shielding cover 21 via the insulating leg members 13 and is held at a position a predetermined distance away from the shielding cover 21 by the leg members 13, so that an insulation distance can be secured between the high-voltage circuit board 23 and the shielding cover 21. This makes it possible to prevent discharge from occurring between the high-voltage circuit board 23 and the shielding cover 21.

[0092] In the X-ray generator according to this embodiment, the shielding cover 21 and the X-ray tube 22 are attached to the lid 124 that closes the top surface of the housing 120, and the high-voltage circuit board 23 is attached to the outside of the shielding cover 21, so that no space is required in the lid 124 to place the high-voltage circuit board 23, and further, the X-ray tube 22, the shielding cover 21, and the high-voltage circuit board 23 can be simultaneously removed from or stored in the housing 120 when the lid 124 of the housing 120 is attached or detached. This improves the maintainability of the X-ray generator 102.

[0093] For example, after wiring the X-ray tube 22 and the high-voltage circuit board 23 outside the housing 120, the lid 124 can be attached to the housing 120 to accommodate the wired X-ray tube 22 and the high-voltage circuit board 23 together with the shielding cover 21 inside the housing 120. In this case, since the wiring can be performed outside the housing 120, the wiring work is easy.

[0094] In the X-ray generator according to this embodiment, the high-voltage circuit board 23 is attached to the outer surface 21c of the shielding cover 21, so that no space is required for arranging the high-voltage circuit board 23 on the outer bottom surface 21e of the shielding cover 21 opposite the lid 124 side within the housing 120. Therefore, the dimension (height) of the housing 120 in the direction in which X-rays are emitted from the X-ray tube 22 can be reduced.

[0095] In the present embodiment as well, the X-ray generator 102 can be made smaller and lighter, and therefore the X-ray inspection apparatus 1 including the X-ray generator 102 can be made smaller and lighter.

[0096] (Modification) In this embodiment as well, for example, as shown in FIG. 9, an insulating plate-like member 15 may be disposed between the high-voltage circuit board 23 and the shielding cover 21, and the high-voltage circuit board 23 may be attached to the shielding cover 21 via the plate-like member 15.

[0097] The plate-like member 15 is made of, for example, resin, and is attached to the high-voltage circuit board 23 via four first leg members 16, and is attached to the outer surface 21c of the shielding cover 21 via four second leg members 17. The first leg members 16 and the second leg members 17 are made of an insulating material such as, for example, resin.

[0098] In the modified example shown in Figure 9, the high-voltage circuit board 23 is attached to the shielding cover 21 via an insulating plate-like member 15 arranged between the high-voltage circuit board 23 and the shielding cover 21, thereby further improving the insulation between the high-voltage circuit board 23 and the shielding cover 21.

[0099] Furthermore, since the first leg member 16 and the second leg member 17 are positioned at positions offset in the vertical plane, i.e., at positions where they do not overlap in the front-to-rear direction, a large creepage distance can be secured between the high-voltage circuit board 23 and the shielding cover 21, thereby further improving insulation.

[0100] Although an embodiment of the present invention has been disclosed, it will be apparent to one of ordinary skill in the art that modifications may be made thereto without departing from the scope of the present invention, and all such modifications and equivalents are intended to be encompassed by the following claims. [Explanation of symbols]

[0101] 1 X-ray inspection equipment 2. 102 X-ray generator 3. X-ray detector 13 Leg members 15 Plate-shaped members 16 First leg member 17 Second leg member 20, 120 case 20a, 120a Inner bottom 21 Shielding cover 21c Outer surface (outer surface) 21e Outer bottom surface (outer surface) 22 X-ray tube 23 High voltage circuit board 24, 124 Lid 24a, 124a X-ray window W Inspection item

Claims

1. An X-ray tube (22) for generating X-rays; A high-voltage circuit board (23) that applies a high voltage to the X-ray tube; a housing (20) filled with insulating oil and accommodating the X-ray tube and the high-voltage circuit board; A shielding cover (21) made of a shielding material that blocks the X-rays is provided in the housing, The X-ray tube is disposed within the shielding cover; An X-ray generator, wherein the high voltage circuit board is attached to the outside of the shielding cover.

2. 2. The X-ray generator according to claim 1, wherein the high-voltage circuit board is attached to the shielding cover via insulating leg members (13) and is held at a position spaced a predetermined distance from the shielding cover by the leg members.

3. The housing has an opening on one side and a lid (24) that closes the opening on the one side, The cover has an X-ray window (24a) through which X-rays generated by the X-ray tube pass, 3. The X-ray generator according to claim 1, wherein the shielding cover and the X-ray tube are attached to the lid.

4. 4. The X-ray generator according to claim 3, wherein the high voltage circuit board is attached to an outer surface (21e) of the shielding cover opposite to the lid body side.

5. 4. The X-ray generator according to claim 3, wherein the high voltage circuit board is attached to an outer peripheral surface (21c) of the shielding cover extending in a direction intersecting with the lid body.

6. An insulating plate-like member (15) is disposed between the high-voltage circuit board and the shielding cover, 3. The X-ray generator according to claim 1, wherein the high voltage circuit board is attached to the shielding cover via the plate member.

7. An insulating plate-like member (15) is disposed between the high-voltage circuit board and the shielding cover, 4. The X-ray generator according to claim 3, wherein the high voltage circuit board is attached to the shielding cover via the plate-like member.

8. An X-ray generator (2) according to claim 1 or 2, and an X-ray detector (3) for detecting the X-rays.

9. An X-ray generator (2) according to claim 3, and an X-ray detector (3) for detecting the X-rays.

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