Cold plate and method for manufacturing the same

Abstract

To provide a cold plate which can be suppressed in increase of the size in thickness direction and furthermore can be improved in cooling efficiency.SOLUTION: A heat transfer medium circulation space 2 is formed between a heat dissipation surface 13 of a base plate 10 and a cover plate 20. The base plate 10 has a plurality of heat transfer portions 14 which are provided in such a way that they protrude from heat dissipation surfaces 13 toward the cover plate 20 and which transfer heat emitted from the heat dissipation surface 13 to a heat transfer medium circulating in the heat transfer medium circulation space 2. Between at least distal ends of the heat transfer portions 14 and the heat transfer medium circulation space 2 in the cover plate 20, a heat transfer joining portion 32 is formed which joins the distal ends of the heat transfer portions 14 and the cover plate 20.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to a cold plate used for cooling an object to be cooled, such as an electronic component, and a method for manufacturing the cold plate. [Background technology]

[0002] A known conventional cold plate, as shown in Patent Document 1, for example, has a heat medium flow space formed therein through which a heat medium flows, and dissipates heat released from an object to be cooled to the heat medium flowing through the heat medium flow space. The cold plate comprises a base plate having a heat absorption surface on one side for absorbing heat released from the object to be cooled and a heat dissipation surface on the other side for dissipating the heat absorbed on the heat absorption surface to the heat medium flowing through the heat medium flow space, and a cover plate which covers the heat dissipation surface of the base plate, the base plate being arranged to protrude from the heat dissipation surface toward the cover plate, and having a plurality of heat transfer sections which transfer the heat released from the heat dissipation surface to the heat medium flowing through the heat medium flow space.

[0003] In the cold plate described in Patent Document 1, when gaps are formed between the tips of the heat transfer parts and the surface of the cover plate facing the heat transfer space, the heat transfer medium flowing through the heat transfer space is more likely to flow through the gaps between the tips of the heat transfer parts and the cover plate than through the gaps between the heat transfer parts. Therefore, in the cold plate described in Patent Document 1, the heat transfer medium flowing through the heat transfer space flows out of the heat transfer space without absorbing enough heat from the heat transfer parts, and the cooling efficiency cannot be improved.

[0004] Therefore, the cold plate described in Patent Document 2 has a joining member disposed between the tips of the multiple heat transfer parts and the surface of the cover plate facing the heat transfer space, thereby regulating the flow of heat transfer medium in the gap between the tips of the multiple heat transfer parts and the surface of the cover plate facing the heat transfer space, thereby improving cooling efficiency. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Special Publication No. 2013-506996 [Patent Document 2] JP 2019-186297 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, in the cold plate described in Patent Document 2, a joining member is disposed between the tips of the heat transfer parts and the surface of the cover plate facing the heat medium flow space, so that the height dimension of the heat transfer parts is small and the contact area between the heat transfer parts and the heat medium flowing through the heat medium flow space is small, which may result in a decrease in cooling capacity. Also, in the cold plate described in Patent Document 2, when the height dimension of the heat transfer parts is set to be capable of exerting the required cooling capacity, the dimension in the thickness direction of the entire cold plate becomes large.

[0007] An object of the present invention is to provide a cold plate and a method for manufacturing the cold plate, which can suppress an increase in size in the thickness direction and at the same time improve cooling efficiency. [Means for solving the problem]

[0008] The cold plate according to the present invention has a heat medium flow space formed therein through which a heat medium flows, and releases heat absorbed from an object to be cooled to the heat medium flowing through the heat medium flow space, the cold plate comprising: a base plate having a heat absorption surface on one side which absorbs heat released from the object to be cooled and a heat dissipation surface on the other side which releases the heat absorbed on the heat absorption surface to the heat medium flowing through the heat medium flow space; and a cover plate which covers the heat dissipation surface of the base plate, the heat medium flow space being formed between the heat dissipation surface of the base plate and the cover plate, the base plate being provided so as to protrude from the heat dissipation surface towards the cover plate, and having a plurality of heat transfer parts which transfer the heat released from the heat dissipation surface to the heat medium flowing through the heat medium flow space, and a heat transfer joint which joins the tip ends of the heat transfer parts to the cover plate is formed between tips of at least some of the heat transfer parts and a surface of the cover plate facing the heat medium flow space.

[0009] In the cold plate according to the present invention, it is preferable that each of the heat transfer portions is a fin extending along a flow direction of the heat medium flowing through the heat medium flow space.

[0010] In addition, it is preferable that the cold plate according to the present invention is configured such that the base plate has a base side joint extending circumferentially around the outer periphery, the cover plate has a cover side joint extending circumferentially around the outer periphery, and a sealing joint that seals the heat medium flow space is formed between the base side joint and the cover side joint.

[0011] In the cold plate according to the present invention, the base plate and the cover plate are preferably made of copper, a copper alloy, aluminum, an aluminum alloy, stainless steel, or a stainless steel alloy, respectively.

[0012] Furthermore, a manufacturing method of a cold plate according to the present invention is a manufacturing method of a cold plate in which a heat medium flow space is formed inside, and in which heat absorbed from an object to be cooled is released to the heat medium flowing through the heat medium flow space, the manufacturing method including a plate laminating step of laminating a cover plate covering the heat release surface on a base plate having a heat absorption surface on one side thereof and a heat release surface on the other side thereof for releasing the heat absorbed at the heat absorption surface to the heat medium flowing through the heat medium flow space, the cover plate having a plurality of heat transfer parts protruding from the heat release surface for transferring the heat released from the heat release surface to the heat medium flowing through the heat medium flow space, and a heat transfer joining step of joining at least some of the tips of the plurality of heat transfer parts to a surface of the cover plate facing the heat medium flow space by welding, with the cover plate laminated on the base plate in the plate laminating step.

[0013] Preferably, the method for manufacturing a cold plate according to the present invention further includes a heat transfer portion forming step of forming the heat transfer portion into a fin shape extending in a flow direction of the heat medium flowing through the heat medium flow space.

[0014] In addition, it is preferable that the manufacturing method of the cold plate according to the present invention includes a base side joint forming process of forming a base side joint extending circumferentially around the outer periphery of the base plate, a cover side joint forming process of forming a cover side joint extending circumferentially around the outer periphery of the cover plate, and a sealing joining process of sealing the heat medium flow space by joining the base side joint formed by the base side joint forming process and the cover side joint formed by the cover side joint forming process to each other.

[0015] In the method for manufacturing a cold plate according to the present invention, it is preferable that in the sealing and joining step, the base side joining portion and the cover side joining portion are joined by brazing, diffusion bonding, friction stir welding or pressure welding. Effect of the Invention

[0016] According to the present invention, it is possible to eliminate the gap between the tip of the heat transfer part and the surface of the cover plate on the heat transfer medium flow space side, so that it is possible to reduce the flow rate of the heat transfer medium on the cover plate side in the heat transfer medium flow space and increase the flow rate of the heat transfer medium between adjacent heat transfer parts, thereby improving the cooling efficiency. In addition, it is possible to prevent the thickness from increasing, so that it is possible to save the installation space, reduce the material used, and reduce the weight. [Brief description of the drawings]

[0017] [Figure 1] FIG. 1 is an overall perspective view of a cold plate according to an embodiment of the present invention. [Diagram 2] FIG. 2 is an exploded perspective view of a cold plate viewed from a cover plate side according to an embodiment of the present invention. [Diagram 3] FIG. 3 is an exploded perspective view of a cold plate as viewed from the base plate side according to an embodiment of the present invention. [Figure 4] FIG. 4 is a side view of a main part of a base plate according to one embodiment of the present invention. [Diagram 5] FIG. 5 is a plan view of a cold plate according to one embodiment of the present invention. [Figure 6] FIG. 6 is a bottom view of a cold plate according to one embodiment of the present invention. [Figure 7] FIG. 7 is a side cross-sectional view illustrating a method for manufacturing a cold plate according to an embodiment of the present invention. [Figure 8] FIG. 8 is a side cross-sectional view of a cold plate illustrating a method for manufacturing a cold plate according to an embodiment of the present invention. [Figure 9] FIG. 9 is a front cross-sectional view of a cold plate illustrating a method for manufacturing a cold plate according to an embodiment of the present invention. [Figure 10] FIG. 10 is a side cross-sectional view of a cold plate illustrating a method for manufacturing a cold plate according to an embodiment of the present invention. [Figure 11] 11(a) to 11(c) are plan views of cold plates showing other examples of the arrangement of the heat transfer joints. [Figure 12] FIG. 12 is a side cross-sectional view of a cold plate showing another example of a heat transfer portion. [Figure 13] 13(a) and 13(b) are plan views of a cold plate illustrating other examples of flow paths of the heat medium formed in the heat medium flow space. [Figure 14] 14(a) to 14(e) are side cross-sectional views of cold plates showing other examples of the shape of the heat transfer joint. [Figure 15] 15(a) and 15(b) are side views of a base plate showing other examples of the shape of the tip end side of the heat transfer portion. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] Figures 1 to 10 show an embodiment of the present invention. Figure 1 is an overall perspective view of a cold plate, Figure 2 is an exploded perspective view of the cold plate seen from the cover plate side, Figure 3 is an exploded perspective view of the cold plate seen from the base plate side, Figure 4 is a side view of a main part of the base plate, Figure 5 is a plan view of the cold plate, Figure 6 is a bottom view of the cold plate, Figure 7 is a side cross-sectional view explaining the manufacturing method of the cold plate, Figure 8 is a side cross-sectional view of the cold plate explaining the manufacturing method of the cold plate, Figure 9 is a front cross-sectional view of the cold plate explaining the manufacturing method of the cold plate, and Figure 10 is a side cross-sectional view of the cold plate explaining the manufacturing method of the cold plate.

[0019] The cold plate 1 of this embodiment is used to cool an object to be cooled, such as an electronic component that generates heat. As shown in Figs. 1 and 9, the cold plate 1 is provided with a heat medium inlet 2a for introducing a heat medium into a heat medium flow space 2 formed inside the cold plate 1, and a heat medium outlet 2b for discharging the heat medium that has flowed through the heat medium flow space 2. The cold plate 1 is used in a state in which a heat medium supply pipe (not shown) is connected to the heat medium inlet 2a, and a heat medium discharge pipe (not shown) is connected to the heat medium outlet 2b. The cold plate 1 causes the cooled heat medium to flow into the heat medium flow space 2 through the heat medium inlet 2a, causes the heat medium to absorb heat released from the object to be cooled in the heat medium flow space 2, and causes the heat medium that has absorbed the heat in the heat medium flow space 2 to flow out of the heat medium flow space 2 through the heat medium outlet 2b. Here, for example, water is used as the heat medium.

[0020] As shown in FIGS. 2 and 3, the cold plate 1 includes a base plate 10 and a cover plate 20. As shown in FIG.

[0021] The base plate 10 is a substantially rectangular plate-like member made of a metal with high thermal conductivity, such as copper, a copper alloy, aluminum, an aluminum alloy, stainless steel, or a stainless steel alloy. As shown in Fig. 2 and Fig. 3, the base plate 10 has a base-side joint portion 11 to which the cover plate 20 is joined, a heat absorbing surface 12 that absorbs heat emitted from an object to be cooled, a heat dissipating surface 13 that dissipates the heat absorbed by the heat absorbing surface 12 to the heat medium flowing through the heat medium flow space 2, and a plurality of heat transfer portions 14 that are provided to protrude from the heat dissipating surface 13 and transfer the heat emitted from the heat dissipating surface 13 to the heat medium flowing through the heat medium flow space 2.

[0022] The base side joint portion 11 is formed in the circumferential direction along the outer periphery of the surface of the base plate 10 on the cover plate 20 side.

[0023] The heat absorbing surface 12 is a surface on which an object to be cooled is placed, and is provided on the outer side of the base plate 10 in the stacking direction.

[0024] The heat dissipation surface 13 is a flat surface located on the inner periphery side of the base side joint portion 11, and protrudes toward the cover plate 20 side beyond the base side joint portion 11 over its entirety.

[0025] The heat transfer portions 14 are formed together with the heat dissipation surface 13 by, for example, skiving the surface of the base plate 10 facing the cover plate 20. Each of the heat transfer portions 14 is a fin that protrudes from the heat dissipation surface 13 and extends in the flow direction of the heat medium flowing through the heat medium flow space 2. As shown in Fig. 4, each of the heat transfer portions 14 has, for example, a height dimension H of 3 mm, a thickness dimension T of 0.1 mm, and a distance G between adjacent heat transfer portions 14 of 0.1 mm.

[0026] The cover plate 20 is a plate-shaped member made of a metal with high thermal conductivity, such as copper, copper alloy, aluminum, aluminum alloy, stainless steel, or stainless steel alloy. The cover plate 20 is provided so as to extend in the circumferential direction along the outer periphery, and has a cover-side joint 21 that is joined to the base plate 10 in a state where the cover plate 20 is superimposed on the base plate 10, and the inside of the cover-side joint 21 is formed in a concave shape. When the base-side joint 11 and the cover-side joint 21 are joined to each other, a heat medium flow space 2 is formed between the heat dissipation surface 13 of the base plate 10 and the cover plate 20. In addition, the cover plate 20 has a heat medium inlet 2a formed on one side in the longitudinal direction and a heat medium outlet 2b formed on the other side in the longitudinal direction.

[0027] Here, a sealing joint 31 that seals the heat medium flow space 2 is formed between the base side joint 11 of the base plate 10 and the cover side joint 21 of the cover plate 20. The sealing joint 31 is formed by performing laser welding along the base side joint 11 from the base plate 10 side in a state in which the base plate 10 and the cover plate 20 are stacked on top of each other, as shown in Figs.

[0028] Further, between the tips of at least some of the heat transfer parts 14 and the surface of the cover plate 20 on the heat medium flow space 2 side, heat transfer joints 32 are formed to join the tips of the heat transfer parts 14 to the cover plate 20. The heat transfer joints 32 are formed by performing laser welding from the cover plate 20 side in a state in which the base plate 10 and the cover plate 20 are stacked on each other, as shown in Figs. 5, 9 and 10. In this embodiment, as shown in Fig. 5, the heat transfer joints 32 are formed at five locations spaced apart in the heat medium flow direction, linearly extending across the width of the heat medium flow space 2 in a direction perpendicular to the flow direction of the heat medium flowing through the heat medium flow space 2. In addition, even when the heat transfer joint 32 is formed to extend in a straight line, for example as shown in FIG. 5 , not all of the tip of the heat transfer section 14 located on the heat medium flow space 2 side is joined to the base plate 20, but a state in which only a part of the tip of the heat transfer section 14 corresponding to the straight line part is joined to the base plate 20 and the other part is in contact with the base plate 20 is also included.

[0029] In the cold plate 1 configured as described above, with an object to be cooled placed on the heat absorption surface 12 of the base plate 10, the heat medium flows into the heat medium flow space 2 through the heat medium inlet 2a, and the heat medium that has flowed through the heat medium flow space 2 flows out from the heat medium flow space 2 through the heat medium outlet 2b.

[0030] At this time, the heat released from the object to be cooled is absorbed by the heat absorption surface 12 of the base plate 10, transferred from the heat absorption surface 12 to the heat dissipation surface 13 and the plurality of heat transfer sections 14, and released to the heat medium flowing through the heat medium flow space 2. This enables the object to be cooled to release heat to the heat medium flowing through the heat medium flow space 2, and the object to be cooled is continuously cooled.

[0031] The heat medium that has flowed into the heat medium flow space 2 flows sequentially between the heat transfer joints 32 that extend linearly across the width in a direction perpendicular to the flow direction of the heat medium and the heat dissipation surface 13, and then flows out of the heat medium flow space 2. The heat medium that has flowed into the heat medium flow space 2 flows between the heat transfer parts 14 without flowing through the gaps between the tips of the heat transfer parts 14 and the cover plate 20, and efficiently absorbs the heat released from the heat transfer parts 14.

[0032] The method for manufacturing the above-mentioned cold plate 1 includes the steps described below.

[0033] In the base side joint forming step, the base side joint 11 is formed by cutting or the like so as to extend in the circumferential direction along the outer periphery of the base plate 10 and to protrude less than the heat dissipation surface 13 .

[0034] In the cover side joint forming step, the cover side joint 21 extending in the circumferential direction along the outer periphery of the cover plate 20 is formed by cutting or the like.

[0035] In the heat transfer portion forming process, a plurality of heat transfer portions 14 are formed together with the heat dissipation surface 13 of the base plate by skiving. In the heat transfer portion forming process, each of the plurality of heat transfer portions 14 is formed into a fin shape extending along the flow direction of the heat medium flowing through the heat medium flow space.

[0036] In the plate stacking step, the base side joint 11 is formed in the base side joint forming step, and the cover plate 20 is stacked on the base plate 10 on which the heat transfer portions 14 together with the heat dissipation surface 13 are formed in the heat transfer portion forming step.

[0037] In the plate pressing process, as shown in FIG. 7, the base plate 10 and the cover plate 20 stacked in the plate stacking process are pressed against each other in the stacking direction, so that the tips of the multiple heat transfer sections 14 are abutted against the surface of the cover plate 20 that faces the heat dissipation surface 13.

[0038] As a sealing joining process, as shown in FIG. 8, the base plate 10 and the cover plate 20 are stacked on top of each other, and laser welding is performed from the base side joint 11 side to form a sealing joint 31 in the circumferential direction between the base side joint 11 of the base plate 10 and the cover side joint 21 of the cover plate 20.

[0039] As a heat transfer joining process, as shown in Figures 9 and 10, in a state in which the base plate 10 and the cover plate 20 are joined to each other by the sealing joining process, laser welding is performed from the cover plate 20 side to form heat transfer joints 32 between the tips of portions of the multiple heat transfer sections 14 and the surface of the cover plate 20 facing the heat medium flow space 2.

[0040] Thus, according to the cold plate of this embodiment, a heat medium flow space 2 is formed inside through which a heat medium flows, and the cold plate 1 dissipates heat absorbed from an object to be cooled to the heat medium flowing through the heat medium flow space 2. The cold plate 1 comprises a base plate 10 having a heat absorbing surface 12 on one side thereof for absorbing heat dissipated from the object to be cooled and a heat dissipating surface 13 on the other side thereof for dissipating the heat absorbed on the heat absorbing surface 12 to the heat medium flowing through the heat medium flow space 2, and a cover plate 20 for covering the heat dissipating surface 13 of the base plate 10. The heat medium flow space 2 is formed between the heat dissipation surface 13 of the base plate 10 and the cover plate 20. The base plate 10 is arranged to protrude from the heat dissipation surface 13 toward the cover plate 20 and has a plurality of heat transfer sections 14 that transfer the heat released from the heat dissipation surface 13 to the heat medium flowing through the heat medium flow space 2. Between the tips of at least some of the plurality of heat transfer sections 14 and the surface of the cover plate 20 facing the heat medium flow space 2, a heat transfer joint 32 is formed that joins the tips of the heat transfer sections 14 to the cover plate 20.

[0041] According to the manufacturing method of the cold plate of the present embodiment, a heat medium flow space 2 is formed inside the cold plate 1, and heat absorbed from an object to be cooled is released to the heat medium flowing through the heat medium flow space 2. The manufacturing method of the cold plate 1 includes a plate lamination step of laminating a cover plate 20 covering the heat release surface 13 on a base plate 10 having a heat absorption surface 12 on one side thereof for absorbing heat released from the object to be cooled and a heat release surface 13 on the other side thereof for releasing the heat absorbed on the heat absorption surface 12 to the heat medium flowing through the heat medium flow space 2, and a plurality of heat transfer portions 14 for transferring the heat released from the heat release surface 13 to the heat medium flowing through the heat medium flow space 2, the plurality of heat transfer portions 14 being provided so as to protrude from the heat release surface 13; and a heat transfer joining step of joining at least some of the tips of the plurality of heat transfer portions 14 to the surface of the cover plate 20 facing the heat medium flow space 2 by laser welding in a state in which the cover plate 20 is laminated on the base plate 10 by the plate lamination step.

[0042] This makes it possible to eliminate the gap between the tip of the heat transfer portion 14 and the surface of the cover plate 20 on the heat transfer medium flow space 2 side, so that it is possible to reduce the flow rate of the heat transfer medium on the cover plate 20 side in the heat transfer medium flow space 2 and increase the flow rate of the heat transfer medium between the adjacent heat transfer portions 14, thereby improving the cooling efficiency. In addition, it is possible to suppress the increase in size in the thickness direction, so that it is possible to save the installation space, reduce the amount of material used, and reduce the weight. In addition, when the heat transfer joint portion 32 is formed by laser welding, softening due to annealing does not occur, so it is possible to reduce the plate thickness of the cover plate 20, which improves the cooling performance by reducing the thermal resistance, and reduces the manufacturing cost and weight by reducing the amount of material used. In addition, when the heat transfer joint portion 32 is formed by laser welding, brazing material is not required, so it is possible to further reduce the manufacturing cost. Furthermore, when the heat transfer joint 32 is formed by laser welding, only the materials of the base plate 10 and the cover plate 20 melt. Therefore, compared to the case where a soldering material is used, it is possible to suppress the occurrence of clogging caused by the penetration of molten material into the gap between the heat transfer portions 14, and it is also possible to prevent corrosion caused by the inclusion of dissimilar materials.

[0043] Moreover, according to the cold plate of the present embodiment, each of the heat transfer portions 14 is preferably a fin extending along the flow direction of the heat medium flowing through the heat medium flow space 2.

[0044] Furthermore, the method for manufacturing the cold plate of this embodiment preferably includes a heat transfer portion forming step of forming the heat transfer portion 14 into a fin shape extending along the flow direction of the heat transfer medium flowing through the heat transfer medium flow space 2.

[0045] This makes it possible to arrange the heat transfer portion 14 throughout the entire heat medium flow direction in the heat medium flow space 2, making it possible to more efficiently transfer heat from the heat transfer portion 14 to the heat medium.

[0046] Furthermore, according to the cold plate of this embodiment, it is preferable that the base plate 10 has a base side joint 11 arranged to extend circumferentially on the outer periphery, the cover plate 20 has a cover side joint 21 arranged to extend circumferentially on the outer periphery, and a sealing joint 31 that seals the heat transfer medium flow space 2 is formed between the base side joint 11 and the cover side joint 21.

[0047] Furthermore, according to the manufacturing method of the cold plate of this embodiment, it is preferable that the method includes a base side joint formation process of forming a base side joint 11 extending circumferentially around the outer periphery of the base plate 10, a cover side joint formation process of forming a cover side joint 21 extending circumferentially around the outer periphery of the cover plate 20, and a sealing and joining process of sealing the heat medium flow space 2 by joining the base side joint 11 formed in the base side joint formation process and the cover side joint 21 formed in the cover side joint formation process to each other.

[0048] As a result, by joining the base side joint portion 11 and the cover side joint portion 21 to each other, the heat transfer medium flow space 2 can be reliably sealed.

[0049] Furthermore, according to the cold plate of this embodiment, it is preferable that the base plate 10 and the cover plate 20 are each made of copper, a copper alloy, aluminum, an aluminum alloy, stainless steel, or a stainless steel alloy.

[0050] Furthermore, according to the manufacturing method of the cold plate of this embodiment, in the sealing and bonding step, it is preferable that the base side bonding portion 11 and the cover side bonding portion 21 are bonded by brazing, diffusion bonding, friction stir welding, or pressure welding.

[0051] In the above embodiment, as an example, a fin in which each of the plurality of heat transfer portions 14 has a height dimension of 3 mm, a thickness dimension of 0.1 mm, and a distance between adjacent heat transfer portions 14 of 0.1 mm has been shown, but the present invention is not limited to this. The height dimension, thickness dimension, and distance between adjacent heat transfer portions of each of the plurality of heat transfer portions can be set arbitrarily.

[0052] In the above embodiment, the heat transfer joints 32 are formed so as to extend linearly across the width of the heat transfer medium space 2 in a direction perpendicular to the flow direction of the heat transfer medium flowing through the heat transfer medium space 2, and are formed at five locations at intervals in the flow direction of the heat transfer medium, but the present invention is not limited to this. For example, as shown in FIG. 11(a), the heat transfer joints 32 may be arranged so as to extend in a direction perpendicular to the flow direction of the heat transfer medium on the upstream side and downstream side of the flow direction of the heat transfer medium, and the heat transfer joints 32 extending in the flow direction of the heat transfer medium may be formed on the center side and both sides of the width of the heat transfer medium space 2 on the midstream side of the flow direction of the heat transfer medium. Also, for example, as shown in FIG. 11(b), the heat transfer joints 32 may be arranged so as to extend in a direction perpendicular to the flow direction of the heat transfer medium on the upstream side, midstream side, and downstream side of the flow direction of the heat transfer medium. 11(c), heat transfer joints 32 formed to bend at the center in the width direction of the heat medium flow space 2 and extend obliquely from the center to both sides toward the downstream side in the heat medium flow direction may be arranged at multiple locations in the heat medium flow direction. The heat transfer joints 32 can be arranged in the heat medium flow space 2 to set the flow path of the heat medium and adjust the flow rate of the heat medium by adjusting the arrangement, extension direction, extension length, and number of the heat transfer joints 32. Even if only one heat transfer joint 32 is arranged in the heat medium flow space 2, it is possible to improve the cooling capacity as long as it extends in a direction perpendicular to the heat medium flow direction.

[0053] In the above embodiment, the heat transfer portion 14 extends perpendicularly to the heat dissipation surface 13, but the present invention is not limited to this. As long as the heat transfer portion 14 extends from the heat dissipation surface toward the cover plate 20, it may extend obliquely from the heat dissipation surface 13 toward the cover plate 20 as shown in FIG.

[0054] In the above embodiment, the heat medium flows into the heat medium flow space 2 from the heat medium inlet 2a provided at one end of the cover plate 20 in the longitudinal direction, and the heat medium that has flowed through the heat medium flow space 2 flows out from the heat medium outlet 2b provided at the other end, but the present invention is not limited to this. For example, as shown in Fig. 13(a), the heat medium inlet 2a may be provided at the longitudinal center of the cover plate 20, and heat medium outlets 2b may be provided at both longitudinal ends, so that the flow of the heat medium that has flowed into the longitudinal center of the heat medium flow space 2 is branched and flows out from both longitudinal sides. Furthermore, for example, as shown in FIG. 13(b), by arranging the heat medium inlet 2a and the heat medium outlet 2b side by side in the short direction at one end side of the longitudinal direction of the cover plate 20 and arranging the heat transfer joint 32 so as to extend in the longitudinal direction in the central part in the short direction excluding the other end side in the longitudinal direction, the heat medium flowing in from one end side of the longitudinal direction of the heat medium flowing space 2 can be circulated to the other end side in the longitudinal direction, and the heat medium flowing to the other end side in the longitudinal direction can be circulated from the other end side in the longitudinal direction to the one end side.

[0055] The heat transfer joint 32 may be formed to have a semicircular cross section that protrudes toward the heat medium flow space 2 as shown in Fig. 14(a), or may be formed to have a rectangular cross section that protrudes toward the heat medium flow space 2 as shown in Fig. 14(b). The heat transfer joint 32 may be formed to have a triangular cross section that protrudes toward the heat medium flow space 2 as shown in Fig. 14(c) and Fig. 14(d). Furthermore, the heat transfer joint 32 may be formed to protrude toward the heat medium flow space 2 over the entire flow direction of the heat medium as shown in Fig. 14(e).

[0056] In the above embodiment, the heat transfer section 14 is formed to have the same width from the base end to the tip end, and has a flat surface at the tip end facing the heat medium flow space 2 side of the cover plate 20, but the present invention is not limited to this. For example, the heat transfer section 14 may be formed to have a shape tapered toward the tip end as shown in Fig. 15(a), or may be formed to have a curved shape with the tip end projecting toward the center in the thickness direction as shown in Fig. 15(b).

[0057] In the above embodiment, water is used as an example of the heat medium, but the present invention is not limited to this. For example, antifreeze containing ethylene glycol, refrigerant gas such as hydrofluorocarbon (HFC), etc. may be used as the heat medium.

[0058] In the above embodiment, each of the heat transfer parts 14 is a fin extending in the flow direction of the heat medium flowing through the heat medium flow space 2, but the present invention is not limited to this. The heat transfer part may have a shape that protrudes from the heat dissipation surface to the cover plate side in the heat medium flow space, and may be, for example, a cone-shaped protrusion that protrudes from the heat dissipation surface to the cover plate side.

[0059] In the above embodiment, the cover plate 20 is joined to the base plate 10 by laser welding, but the present invention is not limited to this. The cover plate 20 may be joined to the base plate 10 by brazing, diffusion welding, friction stir welding (FSW), or pressure welding.

[0060] In the above embodiment, the heat transfer joint 32 is formed by laser welding, but the present invention is not limited to this. The heat transfer joint 32 may be formed by diffusion welding, friction stir welding (FSW), or pressure welding. [Explanation of symbols]

[0061] 1 Cold Plate 2 Heat medium circulation space 10 Base plate 11 Base side joint 12 Heat absorbing surface 13 Heat radiation surface 14 Heat transfer section 20 Cover Plate 31 Sealing joint 32 Heat transfer joint

Claims

1. A cold plate having a heat medium flow space formed therein through which a heat medium flows, and emitting heat absorbed from an object to be cooled to the heat medium flowing through the heat medium flow space, a base plate having a heat absorbing surface on one side thereof for absorbing heat radiated from an object to be cooled, and a heat radiating surface on the other side thereof for radiating the heat absorbed on the heat absorbing surface to a heat medium flowing through the heat medium flow space; a cover plate for covering the heat dissipation surface of the base plate, The heat medium flow space is formed between the heat dissipation surface of the base plate and the cover plate, the base plate has a plurality of heat transfer portions provided to protrude from the heat dissipation surface toward the cover plate and configured to transfer heat radiated from the heat dissipation surface to a heat medium flowing through the heat medium flow space; A heat transfer joint portion that joins the tip portions of at least some of the heat transfer portions to the cover plate is formed between the tip portions of the heat transfer portions and a surface of the cover plate on the heat medium flow space side. Cold plate.

2. Each of the heat transfer portions is a fin extending along a flow direction of the heat medium flowing through the heat medium flow space. The cold plate of claim 1 .

3. The base plate has a base-side joint portion provided so as to extend in a circumferential direction on an outer periphery side, The cover plate has a cover-side joint portion provided so as to extend in a circumferential direction on an outer circumferential side, A sealing joint that seals the heat medium flow space is formed between the base side joint and the cover side joint. The cold plate of claim 1 .

4. The base plate and the cover plate are each made of copper, a copper alloy, aluminum, an aluminum alloy, stainless steel, or a stainless steel alloy. The cold plate of claim 1 .

5. A method for manufacturing a cold plate in which a heat medium flow space is formed inside and a heat medium flow space is formed to radiate heat absorbed from an object to be cooled to a heat medium flowing through the heat medium flow space, the method comprising the steps of: a plate stacking process for stacking a cover plate covering the heat dissipation surface on a base plate having a heat absorption surface on one side thereof for absorbing heat dissipated from an object to be cooled, a heat dissipation surface on the other side thereof for dissipating the heat absorbed on the heat absorption surface to the heat medium flowing through the heat medium flow space, and a plurality of heat transfer parts for transferring the heat dissipated from the heat dissipation surface to the heat medium flowing through the heat medium flow space, the heat transfer parts being provided so as to protrude from the heat dissipation surface; and a heat transfer joining process in which, in a state in which the cover plate is stacked on the base plate by the plate stacking process, a tip portion of at least a part of the plurality of heat transfer portions is joined to a surface of the cover plate on the heat medium flow space side by welding. A method for manufacturing a cold plate.

6. The heat transfer portion includes a heat transfer portion forming step of forming the heat transfer portion into a fin shape extending along a flow direction of the heat medium flowing through the heat medium flow space. The method for manufacturing the cold plate according to claim 5.

7. a base-side joint forming step of forming a base-side joint extending in a circumferential direction on an outer circumferential side of the base plate; a cover-side joint forming step of forming a cover-side joint provided so as to extend in a circumferential direction on an outer circumferential side of the cover plate; a sealing and joining process of sealing the heat medium flow space by joining the base side joint portion formed in the base side joint forming process and the cover side joint portion formed in the cover side joint forming process to each other. The method for manufacturing the cold plate according to claim 5.

8. In the sealing and joining step, the base side joining portion and the cover side joining portion are joined by brazing, diffusion joining, friction stir joining or pressure welding. The method for manufacturing the cold plate according to claim 5.

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