Imaging element and imaging device

Abstract

To provide a solid-state imaging device with a same-color pixel group arrangement, which makes it possible to suppress a difference in light receiving sensitivity between pixels.SOLUTION: A CMOS image sensor includes a pixel array portion configured by arranging same-color pixel groups, each of which has a plurality of pixels having the same color filter adjacent to each other in the horizontal and vertical directions, in a predetermined array in the horizontal and vertical directions. The transmittance of the color filter of at least some of the pixels is set on the basis of the number of same-color pixels, which are adjacent pixels to the pixel and have the same color filter. The present technology can be applied to, for example, a CMOS image sensor that is a same-color pixel group array solid-state imaging element.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present technology relates to an imaging element and an imaging apparatus, and more particularly to an imaging element and an imaging apparatus that are capable of suppressing a difference in light receiving sensitivity between pixels in a same-color pixel group array solid-state imaging element. [Background technology]

[0002] There is a solid-state imaging device that is configured by arranging same-color pixel groups, each of which has a plurality of pixels having color filters of the same color adjacent to each other in a first direction and a second direction, in a predetermined array in the first direction and the second direction. Note that in this specification, such a solid-state imaging device is referred to as a same-color pixel group array solid-state imaging device.

[0003] In a solid-state imaging device with a same-color pixel group array, all pixels adjacent to a central pixel in a same-color pixel group are pixels within that same-color pixel group. Therefore, only color mixing between same colors occurs in the central pixels. On the other hand, at least some of the pixels adjacent to edge pixels in a same-color pixel group are pixels in another same-color pixel group adjacent to that same-color pixel group. Therefore, color mixing between different colors also occurs in the edge pixels. As a result, a difference in light receiving sensitivity occurs between the central pixel and edge pixels in the same-color pixel group.

[0004] Note that this sensitivity difference occurs whether the pixel has a color filter that is misaligned in the horizontal or vertical direction with respect to the photoelectric conversion unit due to the pupil correction function, or whether the pixel has a color filter that is not misaligned.

[0005] Incidentally, one method for making the light receiving sensitivity of two pixels having color filters of the same color different is to provide a gray filter on one of the two pixels (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2022-97519 A Summary of the Invention [Problem to be solved by the invention]

[0007] As described above, in a solid-state imaging device with a same-color pixel group arrangement, a difference in light sensitivity occurs between the central pixels and the edge pixels of the same-color pixel group. Therefore, there is a demand for a method to suppress this difference in light sensitivity, but such a demand has not yet been fully met.

[0008] The present technology has been made in view of such circumstances, and makes it possible to suppress the difference in light receiving sensitivity between pixels in a solid-state imaging device having a same-color pixel group arrangement. [Means for solving the problem]

[0009] The imaging element of a first aspect of the present technology includes a pixel array portion configured by arranging a plurality of pixels having color filters of the same color adjacent to each other in a first direction and a second direction in a predetermined array in the first direction and the second direction, and the transmittance of the color filter of at least some of the pixels is configured to be set based on the number of same-color pixels adjacent to the pixel, which are pixels having the color filter of the same color.

[0010] In a first aspect of the present technology, a pixel array section is provided in which a group of same-color pixels, in which a plurality of pixels having color filters of the same color are arranged adjacent to each other in a first direction and a second direction, are arranged in a predetermined array in the first direction and the second direction, and the transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, which are pixels having the color filter of the same color.

[0011] An imaging device according to a second aspect of the present technology is an imaging device that includes a pixel array section in which same-color pixel groups, in which a plurality of pixels having color filters of the same color are arranged adjacent to each other in a first direction and a second direction, are arranged in a predetermined array in the first direction and the second direction, and includes an imaging element configured such that the transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, the pixels having the color filter of the same color, and an optical system that forms an image of light from a subject on the imaging element.

[0012] In a second aspect of the present technology, there is provided an image sensor including a pixel array section including a same-color pixel group in which a plurality of pixels having color filters of the same color are arranged adjacent to each other in a first direction and a second direction, the same-color pixel group being arranged in a predetermined array in the first direction and the second direction, and the transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, the same color as the color filter, and an optical system that forms an image of light from a subject on the image sensor. [Brief description of the drawings]

[0013] [Figure 1] FIG. 2 is a top view showing an example of the configuration of a same-color pixel group array solid-state imaging element. [Diagram 2] 2 is a cross-sectional view taken along line AA in FIG. 1. [Diagram 3] 2 is a diagram illustrating an example of the light receiving sensitivity of the pixel in FIG. 1. [Figure 4] 1 is a diagram showing an example of the configuration of a CMOS image sensor that is a first embodiment of an imaging element to which the present technology is applied. [Diagram 5] 5 is a top view showing a first configuration example of the pixel array unit in FIG. 4. [Figure 6] 6 is a cross-sectional view taken along line AA in FIG. 5. [Figure 7] 6 is a cross-sectional view of FIG. 5 taken along line B-B. [Figure 8] 6A to 6C are diagrams illustrating a first example of a method for manufacturing the color filter of FIG. 5. [Figure 9] 7A to 7C are diagrams illustrating a second example of the method for manufacturing the color filter of FIG. 5. [Figure 10] 5 is a top view showing a second configuration example of the pixel array unit in FIG. 4. [Figure 11] 5 is a top view showing a third configuration example of the pixel array unit in FIG. 4. [Figure 12] 5 is a top view showing a fourth configuration example of the pixel array unit in FIG. [Figure 13] 5 is a top view showing a fifth configuration example of the pixel array unit in FIG. [Figure 14] 4. FIG. 9 is a top view showing a sixth configuration example of the pixel array unit in FIG. [Figure 15] 4. FIG. 9 is a top view showing a seventh configuration example of the pixel array unit in FIG. [Figure 16] 5 is a top view showing an eighth configuration example of the pixel array unit in FIG. [Figure 17] 9 is a top view showing a ninth configuration example of the pixel array unit in FIG. [Figure 18] FIG. 13 is a top view of a pixel array section in the second embodiment. [Figure 19] FIG. 13 is a cross-sectional view of a pixel array portion according to a third embodiment. [Figure 20] FIG. 13 is a diagram illustrating an effect of the third embodiment. [Figure 21] FIG. 13 is a top view of a pixel array section in a fourth embodiment. [Figure 22] 1 is a block diagram showing an example of the configuration of an imaging device to which the present technology is applied. [Figure 23] FIG. 1 is a diagram illustrating an example of use of a CMOS image sensor. [Figure 24] 1 is a diagram illustrating an example of a schematic configuration of an endoscopic surgery system. [Diagram 25] 2 is a block diagram showing an example of a functional configuration of a camera head and a CCU. FIG. [Figure 26] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Figure 27] FIG. 4 is an explanatory diagram showing an example of an installation position of an imaging unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, modes for carrying out the present technology (hereinafter, referred to as embodiments) will be described in the following order. 0. Example of a solid-state image sensor with a same-color pixel group arrangement 1. First embodiment (imaging device that controls transmittance based on color filter height) 2. Second embodiment (imaging device that controls transmittance based on density of color filter) 3. Third embodiment (imaging device that sets color filter height based on image height) 4. Fourth embodiment (imaging device having low refractive index wall) 5. Application examples to imaging devices 6. Examples of semiconductor chip usage 7. Application example to endoscopic surgery system 8. Mobile Applications

[0015] In the drawings referred to in the following description, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic, and the relationship between thickness and planar dimensions, the thickness ratio of each layer, etc. may differ from the actual ones. Furthermore, there may be cases where the dimensional relationships and ratios differ between the drawings.

[0016] In addition, the definitions of directions such as up and down in the following description are merely for the convenience of explanation and do not limit the technical ideas of the present disclosure. For example, if an object is rotated 90 degrees and observed, up and down are converted to left and right and read, and if it is rotated 180 degrees and observed, up and down are read inverted.

[0017] <0. An example of a solid-state image sensor with a same-color pixel group arrangement> <Example of configuration of same-color pixel group and on-chip lens> FIG. 1 is a top view of a same-color pixel group array solid-state imaging element showing an example of the configuration of same-color pixel groups and on-chip lenses in an example of a same-color pixel group array solid-state imaging element.

[0018] In addition, in Figure 1, of the same-color pixel groups arranged adjacent to each other in the horizontal and vertical directions in the same-color pixel group array solid-state imaging element 10, only 2 x 2 same-color pixel groups arranged in pairs in the horizontal and vertical directions corresponding to low image heights around the optical axis are shown.

[0019] The 2×2 same-color pixel groups 11-1 to 11-4 in the same-color pixel group array solid-state imaging device 10 of FIG. 1 have a Bayer array.

[0020] Specifically, the upper left same-color pixel group 11-1 is configured by 16 pixels 21, pixels R1 to R16, each having a red color filter 31, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0021] The same-color pixel group 11-2 on the upper right is configured by pixels GR1 to GR16, which are 16 pixels 21 each having a green color filter 31, arranged in groups of four adjacent to each other in the horizontal and vertical directions. The same-color pixel group 11-3 on the lower left is configured by pixels GB1 to GB16, which are 16 pixels 21 each having a green color filter 31, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0022] The lower right same-color pixel group 11-4 is made up of 16 pixels 21, pixels B1 to B16, each having a blue color filter 31, arranged adjacently in groups of four in the horizontal and vertical directions.

[0023] In the following description, the same-color pixel groups 11-1 to 11-4 will be collectively referred to as the same-color pixel group 11 unless there is a need to particularly distinguish one from the other.

[0024] A light-shielding film 32 for suppressing color mixing is formed between the color filters 31 of the horizontally and vertically adjacent pixels 21. On the upper side (subject side) of the color filters 31, an on-chip lens 22 is formed for each of the 2×2 pixels 21 arranged two by two in the horizontal and vertical directions.

[0025] <Example of pixel structure> FIG. 2 is a cross-sectional view taken along line AA of FIG.

[0026] As shown in FIG. 2, pixels R1, R2, R5, and R6 each include a semiconductor substrate layer 51, an oxide film layer 52, and a color filter layer 53.

[0027] A photoelectric conversion unit 61 is formed in the semiconductor substrate layer 51 of each of the pixels R1, R2, R5, and R6. Trenches 62 for suppressing color mixing are formed between the photoelectric conversion units 61 of the pixels R1 and R2, between the photoelectric conversion units 61 of the pixels R2 and R5, and between the photoelectric conversion units 61 of the pixels R5 and R6.

[0028] A red color filter 31 is formed in the color filter layer 53 of each of the pixels R1, R2, R5, and R6. A light-shielding film 32 is formed between the color filters 31 of the horizontally adjacent pixels R1 and R2, between the color filters 31 of the pixels R2 and R5, and between the color filters 31 of the pixels R5 and R6.

[0029] Although not shown in the drawings, the pixels 21 other than the pixels R1, R2, R5, and R6 are configured similarly to the pixels R1, R2, R5, and R6. The trenches 62 and the light-shielding films 32 are formed not only between the pixels 21 adjacent in the horizontal direction, but also between the pixels 21 adjacent in the vertical direction.

[0030] However, the same-color pixel group array solid-state imaging device 10 has a pupil correction function. Therefore, the positions of the on-chip lens 22 and the color filter 31 are shifted in at least one of the horizontal and vertical directions from the position of the photoelectric conversion unit 61 according to the corresponding image height. Therefore, for example, the horizontal and vertical positions of the light-shielding film 32 between the pixels 21 corresponding to a low image height are the same as the horizontal and vertical positions of the trench 62 as shown in FIG. 2. In contrast, the position of the light-shielding film 32 between the pixels 21 corresponding to a high image height is shifted in at least one of the horizontal and vertical directions from the position of the trench 62. As described above, the same-color pixel group array solid-state imaging device 10 has a pupil correction function, and thus can suppress a decrease in the amount of received light in the peripheral part of the screen.

[0031] <Example of light sensitivity of each pixel in the same color pixel group> FIG. 3 is a diagram showing an example of the light receiving sensitivity of each pixel 21 in the same-color pixel group 11-4.

[0032] 3, the pixels 21 adjacent in the horizontal and vertical directions to the upper left pixel B1 of the same-color pixel group 11-4 are pixels R16, GB6, GB8, B3, B4, B2, GR12, and GR11. Therefore, in pixel B1, color mixture occurs from three pixels B2 to B4 having color filters 31 of the same color as pixel B1 itself, and color mixture occurs from five pixels R16, GB6, GB8, GR11, and GR12 having color filters 31 of different colors. Therefore, the light sensitivity of pixel B1 is high. The light sensitivity of the lower left pixel B11, the upper right pixel B6, and the lower right pixel B16 are also high.

[0033] In contrast, the pixels 21 adjacent to the pixel B3 at the left center end in the horizontal and vertical directions are pixels GB6, GB8, GB14, B9, B10, B4, B2, and B1. Therefore, in the pixel B3, color mixing occurs from five pixels B1, B2, B4, B9, and B10 having the same color filter 31 as the pixel B3, and color mixing occurs from three pixels GB6, GB8, and GB14 having a different color filter 31. Therefore, the light receiving sensitivity of the pixel B3 is lower than the light receiving sensitivity of the pixels B1, B6, B11, and B16. The light receiving sensitivity of the other pixel B9 at the left center end, the pixels B8 and B14 at the right center end, the pixels B2 and B5 at the upper center end, and the pixels B12 and B15 at the lower center end are also lower than the light receiving sensitivity of the pixels B1, B6, B11, and B16.

[0034] The pixels 21 adjacent to the pixel B4 in the upper left of the center in the horizontal and vertical directions are pixels B1, B3, B9, B10, B13, B7, B5, and B2. Therefore, in pixel B3, only color mixing occurs from the eight pixels B1 to B3, B5, B7, B9, B10, and B13 having the same color color filter 31 as itself. Therefore, the light receiving sensitivity of pixel B4 is lower than the light receiving sensitivity of pixels B2, B3, B5, B8, B9, B12, B14, and B15. Similarly, the light receiving sensitivity of pixel B10 in the lower left of the center, pixel B7 in the upper right of the center, and pixel B13 in the lower right of the center are lower than the light receiving sensitivity of pixels B2, B3, B5, B8, B9, B12, B14, and B15.

[0035] Although not shown, a difference in light receiving sensitivity occurs between the pixels 21 in the same-color pixel groups 11 other than the same-color pixel group 11-4 in the same manner.

[0036] As described above, in the same-color pixel group array solid-state imaging element 10, a difference in light receiving sensitivity occurs between the pixels 21 that make up the same-color pixel group 11, depending on the number of pixels 21 that have color filters 31 of the same color and are adjacent to that pixel 21 in the horizontal and vertical directions.

[0037] Therefore, in the solid-state imaging device with an array of same-color pixels to which the present technology is applied, the transmittance of the color filter of each pixel is set based on the number of same-color pixels, which are pixels adjacent to that pixel in the horizontal and vertical directions and have the same color as the color filter of that pixel. Thereby, the difference in light-receiving sensitivity between each pixel can be suppressed.

[0038] <1. First Embodiment> <Configuration Example of CMOS Image Sensor> FIG. 4 is a diagram showing a configuration example of a CMOS (Complementary Metal Oxide Semiconductor) image sensor which is a first embodiment of an imaging device to which the present technology is applied.

[0039] The CMOS image sensor 111 is a solid-state imaging device with an array of same-color pixels. The CMOS image sensor 111 includes a pixel array unit 121, a vertical driving unit 122, a column processing unit 123, a horizontal driving unit 124, a system control unit 125, pixel driving lines 126, vertical signal lines 127, a signal processing unit 128, and a data storage unit 129.

[0040] The pixel array unit 121 is configured by arranging groups of same-color pixels, in which a plurality of pixels having color filters of a predetermined color are arranged adjacent to each other in the horizontal direction (first direction) and the vertical direction (second direction), in a predetermined arrangement in the horizontal direction and the vertical direction. Each pixel has a photoelectric conversion unit that generates and accumulates charges according to the amount of received light.

[0041] In the pixel array unit 121, pixel driving lines 126 are wired along the horizontal direction for each row of pixels arranged in the horizontal direction, that is, for each row of pixels, and vertical signal lines 127 are wired along the vertical direction for each column of pixels arranged in the vertical direction, that is, for each column of pixels.

[0042] One end of the pixel drive line 126 is connected to an output terminal corresponding to each row of the vertical drive unit 122, and the pixel drive line 126 supplies a drive signal for driving the pixels to each pixel on a row-by-row basis. One end of the vertical signal line 127 is connected to a signal processing circuit corresponding to each column of the column processing unit 123, and the vertical signal line 127 supplies a signal of the charge accumulated in the photoelectric conversion unit of the pixel driven based on the drive signal to the signal processing circuit on a column-by-column basis.

[0043] The vertical drive unit 122 is composed of, for example, a shift register, an address decoder, etc. The vertical drive unit 122 generates a drive signal for driving each pixel of the pixel array unit 121 on a row-by-row basis, and outputs the drive signal to a pixel drive line 126.

[0044] The column processing unit 123 has a signal processing circuit for each column of pixels. Each signal processing circuit performs a predetermined signal processing on signals supplied from the pixels of the column corresponding to the signal processing circuit via the vertical signal line 127, and temporarily holds the processed signals as pixel signals. Examples of this signal processing include noise removal processing, CDS (Correlated Double Sampling) processing, and AD (Analog to Digital) conversion processing.

[0045] The horizontal driving unit 124 is composed of a shift register, an address decoder, etc., and sequentially selects each signal processing circuit of the column processing unit 123. The signal processing circuit selected by the horizontal driving unit 124 outputs a pixel signal to the signal processing unit 128. As a result, the pixel signal of each pixel is sequentially output to the signal processing unit 128.

[0046] The system control unit 125 includes a timing generator that generates various timing signals, and controls the operations of the vertical drive unit 122, the column processing unit 123, and the horizontal drive unit 124 based on the timing signals.

[0047] The signal processing unit 128 has at least an arithmetic processing function, and performs various signal processing such as arithmetic processing on the pixel signals output from the column processing unit 123. The data storage unit 129 temporarily stores data necessary for the signal processing when the signal processing is performed in the signal processing unit 128. The signal processing unit 128 outputs the pixel signals after the signal processing as a captured image.

[0048] <First Configuration Example of Same-Color Pixel Group and On-Chip Lens> FIG. 5 is a top view of the pixel array section 121 showing a first configuration example of the same-color pixel groups and on-chip lenses of the pixel array section 121 of FIG.

[0049] In addition, in order to simplify the drawing, Fig. 5 shows only 2 × 2 same-color pixel groups arranged in pairs in the horizontal and vertical directions corresponding to low image heights around the optical axis, among the same-color pixel groups constituting the pixel array unit 121. This also applies to Figs. 10 to 17 described later.

[0050] In Fig. 5, the same reference numerals are used to denote parts corresponding to those in Fig. 1. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from Fig. 1.

[0051] 5, the 2×2 same-color pixel groups 131-1 to 131-4 have a Bayer array. Specifically, the upper left same-color pixel group 131-1 is configured by pixels R101 to R116, which are 16 pixels 141 each having a red color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0052] The same-color pixel group 131-2 on the upper right is configured by pixels GR101 to GR116, which are 16 pixels 141 each having a green color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions. The same-color pixel group 131-3 on the lower left is configured by pixels GB101 to GB116, which are 16 pixels 141 each having a green color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0053] The lower right same-color pixel group 131-4 is configured by 16 pixels 141, pixels B101 to B116, each having a blue color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0054] In the following description, the same-color pixel groups 131-1 to 131-4 will be collectively referred to as the same-color pixel group 131 unless there is a need to particularly distinguish one from the other.

[0055] The transmittance of the color filter 151 of each pixel 141 is set based on the number of pixels of the same color in that pixel 141, so that the transmittance is higher as the number increases. Here, the higher the height of the color filter 151, the more incident light is absorbed by the color filter 151, that is, the lower the transmittance of the color filter 151. Therefore, the transmittance of the color filter 151 is controlled to a set value depending on the height (thickness) of the color filter 151.

[0056] 3, the number of same-color pixels in the upper left, lower left, upper right, and lower right pixels 141 in each same-color pixel group 131 is the smallest, being three. Therefore, when the color filters 151 of all the pixels 141 have the same transmittance, the upper left, lower left, upper right, and lower right pixels 141 have the highest light receiving sensitivity. Therefore, the color filters 151 of the upper left, lower left, upper right, and lower right pixels 141 are set to have higher light receiving sensitivity than the color filters 151 of the other pixels 141 in the same-color pixel group 131 that includes that pixel 141.

[0057] For example, the color filters 151 of the pixels R101, R111, R106, and R116 are set to be higher than the color filters 151 of the pixels R102 to R105, R107 to R110, and R112 to 115. Note that, hereinafter, the pixels having the highest color filters 151 in the same-color pixel group 131 are collectively referred to as high color filter pixels.

[0058] 3, the number of same-color pixels in the four central pixels 141 in each same-color pixel group 131 is eight, which is the maximum. Therefore, when the color filters 151 of all the pixels 141 have the same transmittance, the light receiving sensitivity of the four central pixels 141 is the lowest. Therefore, the color filters 151 of each of the four central pixels 141 are set to be lower than the color filters 151 of the other pixels 141 in the same-color pixel group 131 that includes that pixel 141.

[0059] For example, the color filters 151 of the pixels R104, R107, R110, and R113 are set to be lower than the color filters 151 of the pixels R101 to R103, R105, R106, R108, R109, R111, R112, and R114 to R116. Note that, hereinafter, the pixels having the lowest color filters 151 in the same-color pixel group 131 are collectively referred to as low color filter pixels.

[0060] As described in FIG. 3, the number of same-color pixels in each pair of pixels 141 at the left center end, right center end, upper center end, and lower center end in each same-color pixel group 131 is five. Therefore, when the transmittance of the color filters 151 of all the pixels 141 is the same, the light receiving sensitivity of each pair of pixels 141 at the left center end, right center end, upper center end, and lower center end is lower than that of the high color filter pixels and higher than that of the low color filter pixels. Therefore, the color filters 151 of each pair of pixels 141 at the left center end, right center end, upper center end, and lower center end are set to be lower than that of the high color filter pixels and higher than that of the low color filter pixels.

[0061] For example, the color filters 151 of pixels R103, R109, R108, R114, R102, R105, R112, and R115 are set to be lower than the color filters 151 of pixel R101 etc., and higher than the color filters 151 of pixel R104 etc. In the following, pixels having color filters 151 that are lower than the color filters 151 of the high color filter pixels and higher than the color filters 151 of the low color filter pixels in the same color pixel group 131 are also collectively referred to as medium color filter pixels.

[0062] As described above, in the pixel array section 121, when the transmittance of the color filters 151 of all the pixels 141 is the same, the transmittance is controlled based on the height of the color filters 151 of each pixel 141, and the transmittance of the pixels 141 with higher light sensitivity is lower. Therefore, it is possible to suppress the difference in light sensitivity between the pixels 141. In other words, it is possible to make the light sensitivity of all the pixels 141 uniform.

[0063] <Example of pixel structure> 6 is a cross-sectional view taken along line AA in FIG. 5, and FIG. 7 is a cross-sectional view taken along line BB in FIG.

[0064] 6 and 7, parts corresponding to those in Fig. 2 are denoted by the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from Fig. 2. Each of the pixels R101 to R108 differs from the pixel R1 in Fig. 2 in that a color filter layer 163 is provided instead of the color filter layer 53, but otherwise has the same configuration as the pixel R1.

[0065] The color filter layer 163 of each of the pixels R101 to R108 differs from that of the pixel R1 in that a color filter 151 is formed instead of the color filter 31, and otherwise has the same configuration as the pixel R1.

[0066] The height H1 of the color filters 151 of the pixels R101 and R106 is greater than the height H2 of the color filters 151 of the pixels R102, R103, R105, and R107. The height H3 of the color filters 151 of the pixels R104 and R108 is less than the height H2.

[0067] Although not shown in the drawing, a pixel 141 other than the pixels R101 to R108 is also configured in the same manner as the pixels R101 to R108.

[0068] However, the pixel array unit 121 has a pupil correction function. Therefore, the positions of the on-chip lens 22 and the color filter 151 are shifted in at least one of the horizontal and vertical directions from the position of the photoelectric conversion unit 61 according to the corresponding image height. Therefore, for example, the horizontal and vertical positions of the light-shielding film 32 between the pixels 141 corresponding to a low image height are the same as the horizontal and vertical positions of the trench 62 as shown in FIG. 5 and FIG. 6. In contrast, the position of the light-shielding film 32 between the pixels 141 corresponding to a high image height is shifted in at least one of the horizontal and vertical directions from the position of the trench 62. As described above, the pixel array unit 121 has a pupil correction function, and thus can suppress a decrease in the amount of received light in the peripheral part of the screen.

[0069] <First Example of Manufacturing Method> FIG. 8 is a diagram showing a first example of a method for manufacturing the color filter 151. In FIG.

[0070] In addition, in order to simplify the drawing, Fig. 8 shows only pixels R101 and R102 out of all pixels 141. This also applies to Fig. 9, which will be described later.

[0071] 8A, when manufacturing (forming) the color filter 151, the color filter 151 having a height H1 is formed on the oxide film layer 52 in which the light-shielding film 32 is formed between the pixels 141. This forms high-color filter pixels such as pixel R101.

[0072] Next, as shown in B of Fig. 8, resist 181 is applied by lithography onto high color filter pixels such as pixel R101. Then, as shown in C of Fig. 8, the height of the color filters 151 of the middle and low color filter pixels to which the resist 181 is not applied is reduced to H2 by etching, and the resist 181 is peeled off. As a result, middle color filter pixels such as pixel R102 are formed.

[0073] Although not shown in the figure, after this, a resist is applied again on the high color filter pixels and the middle color filter pixels by lithography, and the height of the low color filter pixels, to which the resist is not applied, is reduced to H3, which is lower than H2, by etching. Then, the resist is peeled off. This forms the low color filter pixels.

[0074] In this manner, the color filters 151 having three different heights H1 to H3 are manufactured on the oxide film layer 52.

[0075] <Second Example of Manufacturing Method> FIG. 9 is a diagram showing a second example of a method for manufacturing the color filter 151. In FIG.

[0076] When manufacturing (forming) the color filter 151, first, as shown in A of Fig. 9, a color resist having a height H3 is applied on the oxide film layer 52 on which the light-shielding film 32 is formed between each pixel 141. Then, this color resist is exposed to light. As a result, a low color filter pixel having a color filter 151 having a height H3 is formed.

[0077] Next, a color resist having a height (H3-H2) is applied onto the color filter 151 having a height H3, and is exposed through a photomask 201 having holes 201a in areas corresponding to the high color filter pixels and the middle color filter pixels, as shown in B of Fig. 9. This forms middle color filter pixels such as pixel R102 having a color filter 151 having a height H2.

[0078] Finally, a color resist having a height (H2-H1) is applied onto the color filter 151 having a height H2, and is exposed through a photomask 202 having a hole 202a in an area corresponding to the high color filter pixel, as shown in Fig. 9C. This forms high color filter pixels such as pixel R101 having a color filter 151 having a height H1.

[0079] In this manner, the color filters 151 having three different heights H1 to H3 are manufactured on the oxide film layer 52.

[0080] The color types of the color filter 151 are not limited to three colors, red, green, and blue. For example, the color types of the color filter 151 can be three colors, red, yellow, and blue, three colors, magenta, yellow, and cyan, four colors, cyan, magenta, yellow, and white, etc.

[0081] <Second Configuration Example of Same-Color Pixel Group> FIG. 10 is a top view of the pixel array section 121 showing an example of the configuration of same-color pixel groups when the color filters 151 have three colors: red, yellow, and blue.

[0082] In the pixel array section 121 in Fig. 10, parts corresponding to those in the pixel array section 121 in Fig. 5 are given the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array section 121 in Fig. 5. The pixel array section 121 in Fig. 10 differs from the pixel array section 121 in Fig. 5 in that same-color pixel groups 131-2 and 131-3 are replaced by same-color pixel groups 231-2 and 231-3, respectively, and is otherwise configured in the same way as the pixel array section 121 in Fig. 5.

[0083] The same-color pixel group 231-2 on the upper right is configured by pixels YR101 to YR116, which are 16 pixels 141 each having a yellow color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions. The same-color pixel group 231-3 on the lower left is configured by pixels YB101 to YB116, which are 16 pixels 141 each having a yellow color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0084] <Third configuration example of same-color pixel group> FIG. 11 is a top view of the pixel array section 121 showing an example of the configuration of same-color pixel groups when the color types of the color filters 151 are three colors, magenta, yellow, and cyan.

[0085] In the pixel array section 121 in Fig. 11, parts corresponding to those in the pixel array section 121 in Fig. 5 are given the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array section 121 in Fig. 5. The pixel array section 121 in Fig. 11 differs from the pixel array section 121 in Fig. 5 in that the same-color pixel groups 131-1 to 131-4 are replaced by same-color pixel groups 251-1 to 251-4, and is otherwise configured in the same way as the pixel array section 121 in Fig. 5.

[0086] The upper left same-color pixel group 251-1 is configured by 16 pixels 141, pixels M101 to M106, each having a magenta color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0087] The same-color pixel group 251-2 on the upper right is configured by pixels YM101 to YM116, which are 16 pixels 141 each having a yellow color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions. The same-color pixel group 251-3 on the lower left is configured by pixels YC1 to YC16, which are 16 pixels 141 each having a yellow color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0088] The lower right same-color pixel group 251-4 is configured by 16 pixels 141, pixels C101 to C116, each having a cyan color filter 151, arranged in groups of four adjacent to each other in the horizontal and vertical directions.

[0089] <Fourth Configuration Example of Same-Color Pixel Group> FIG. 12 is a top view of the pixel array section 121 showing an example of the configuration of the same-color pixel group when only the height of the color filter 151 of the green same-color pixel group 131 is set based on the number of same-color pixels.

[0090] In the pixel array section 121 in Fig. 12, parts corresponding to those in the pixel array section 121 in Fig. 5 are given the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array section 121 in Fig. 5. The pixel array section 121 in Fig. 12 differs from the pixel array section 121 in Fig. 5 in that the same-color pixel groups 131-1 and 131-4 are replaced by same-color pixel groups 271-1 and 271-4, respectively, and is otherwise configured in the same way as the pixel array section 121 in Fig. 5.

[0091] The red same-color pixel group 271-1 at the top left differs from the same-color pixel group 131-1 in that pixels R101 to R106 are all medium color filter pixels, and are otherwise configured similarly to the same-color pixel group 131-1. The blue same-color pixel group 271-4 at the bottom right differs from the same-color pixel group 131-4 in that pixels B101 to B106 are all medium color filter pixels, and are otherwise configured similarly to the same-color pixel group 131-4.

[0092] It should be noted that the pixels R101 to R106 and B101 to B106 may be high color filter pixels or low color filter pixels as long as the height of the color filters 151 is the same.

[0093] The same-color pixel groups in which the height of the color filters 151 of all the pixels 141 is the same may be the green same-color pixel groups 131-2 and 131-3, or either the red same-color pixel group 271-1 or the blue same-color pixel group 271-4.

[0094] The effect on a captured image of the light receiving sensitivity of the pixels 141 having the green color filters 151 is greater than that of the pixels 141 having the red or blue color filters 151. Therefore, it is preferable to set the height of the color filters 151 of the green same-color pixel group 131 based on the number of same-color pixels.

[0095] It should be noted that the on-chip lens 22 does not have to be formed for every 2×2 pixels 141 as long as it is formed for every one or more pixels 141.

[0096] <Second configuration example of on-chip lens> FIG. 13 is a top view of the pixel array unit 121 showing a configuration row of on-chip lenses when an on-chip lens is formed for each pixel 141. As shown in FIG.

[0097] In the pixel array unit 121 in Fig. 13, parts corresponding to those in the pixel array unit 121 in Fig. 5 are denoted by the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array unit 121 in Fig. 5. The pixel array unit 121 in Fig. 13 differs from the pixel array unit 121 in Fig. 5 in that the on-chip lens 22 is replaced by an on-chip lens 292, and is otherwise configured in the same manner as the pixel array unit 121 in Fig. 5. The on-chip lens 292 is formed for each pixel 141.

[0098] <Third configuration example of on-chip lens> FIG. 14 is a top view of the pixel array unit 121 showing a configuration row of on-chip lenses when an on-chip lens is formed for each 2×1 pixel 141 in which two on-chip lenses are aligned in the horizontal direction and one is aligned in the vertical direction.

[0099] In the pixel array unit 121 in Fig. 14, parts corresponding to those in the pixel array unit 121 in Fig. 5 are denoted by the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array unit 121 in Fig. 5. The pixel array unit 121 in Fig. 14 differs from the pixel array unit 121 in Fig. 5 in that the on-chip lens 22 is replaced by an on-chip lens 312, and is otherwise configured in the same way as the pixel array unit 121 in Fig. 5. The on-chip lens 312 is formed for every 2 × 1 pixels 141.

[0100] <Fourth configuration example of on-chip lens> FIG. 15 is a top view of the pixel array unit 121 showing a first configuration row of on-chip lenses in the case where the number of pixels 141 corresponding to the on-chip lenses varies depending on the position of the pixels 141 in the same-color pixel group 131.

[0101] In the pixel array unit 121 in Fig. 15, the same reference numerals are used for the parts corresponding to those in the pixel array unit 121 in Fig. 5. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array unit 121 in Fig. 5. The pixel array unit 121 in Fig. 15 differs from the pixel array unit 121 in Fig. 5 in that the on-chip lens 22 is replaced by on-chip lens 332a or 332b, and is otherwise configured in the same manner as the pixel array unit 121 in Fig. 5.

[0102] For the 12 surrounding pixels 141 in the same-color pixel group 131, an on-chip lens 332a is formed for each pixel 141. For the 2×2 pixels 141 in the center of the same-color pixel group 131, one on-chip lens 332b is formed for the 2×2 pixels 141.

[0103] <Fifth configuration example of on-chip lens> FIG. 16 is a top view of the pixel array unit 121 showing a second configuration row of on-chip lenses when the number of pixels 141 corresponding to the on-chip lenses varies depending on the position of the pixels 141 in the same-color pixel group 131.

[0104] In the pixel array unit 121 in Fig. 16, the same reference numerals are used for the parts corresponding to those in the pixel array unit 121 in Fig. 15. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array unit 121 in Fig. 15. The pixel array unit 121 in Fig. 16 differs from the pixel array unit 121 in Fig. 15 in that the on-chip lens 332a is replaced by the on-chip lens 352a or 352b, and is otherwise configured in the same manner as the pixel array unit 121 in Fig. 15.

[0105] 16, an on-chip lens 352a is formed for each of the four pixels 141 located at the top left, bottom left, top right, and bottom right among the 12 surrounding pixels 141 in the same-color pixel group 131. One on-chip lens 352b is formed for each of two pixels 141 located at the left center end, right center end, top center end, and bottom center end.

[0106] The number of pixels 141 constituting the same-color pixel group 131 (231-2, 231-3, 251-1 to 251-4, 271-1, 271-4) is not limited to 4 × 4, as long as there are a plurality of pixels in each of the horizontal and vertical directions. For example, the same-color pixel group may be composed of 2 × 2 pixels, 3 × 3 pixels, etc.

[0107] <Fifth Configuration Example of Same-Color Pixel Group> FIG. 17 is a top view of the pixel array section 121 showing a second configuration column of the same-color pixel group when the same-color pixel group is configured of 3×3 pixels 141.

[0108] In the pixel array section 121 in Fig. 17, parts corresponding to those in the pixel array section 121 in Fig. 13 are given the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array section 121. The pixel array section 121 in Fig. 17 differs from the pixel array section 121 in Fig. 13 in that the same-color pixel groups 131-1 to 131-4 are replaced by same-color pixel groups 371-1 to 371-4, and is otherwise configured in the same way as the pixel array section 121 in Fig. 13.

[0109] 17, the 2×2 same-color pixel groups 371-1 to 371-4 have a Bayer array. Specifically, the upper left same-color pixel group 371-1 is configured by pixels R201 to R209, which are nine pixels 141 each having a red color filter 151, arranged in groups of three adjacent to each other in the horizontal and vertical directions.

[0110] The same-color pixel group 371-2 on the upper right is configured by pixels GR201 to GR209, which are nine pixels 141 each having a green color filter 151, arranged in groups of three adjacent to each other in the horizontal and vertical directions. The same-color pixel group 371-3 on the lower left is configured by pixels GB201 to GB209, which are nine pixels 141 each having a green color filter 151, arranged in groups of three adjacent to each other in the horizontal and vertical directions.

[0111] The lower right same-color pixel group 371-4 is configured by nine pixels 141, pixels B201 to B209, each having a blue color filter 151, arranged adjacently in groups of three in the horizontal and vertical directions.

[0112] In the following description, the same-color pixel groups 371-1 to 371-4 will be collectively referred to as the same-color pixel group 371 unless there is a need to particularly distinguish one from the other.

[0113] The number of same-color pixels in the top-left, bottom-left, top-right, and bottom-right pixels 141 in each same-color pixel group 371 is the smallest, being 3. Therefore, the top-left, bottom-left, top-right, and bottom-right pixels 141, e.g., pixels R201, R207, R203, and R209, are high-color filter pixels.

[0114] In contrast, the number of same-color pixels in one central pixel 141 in each same-color pixel group 371 is at most 8. Therefore, one central pixel 141 such as pixel R205 is a low-color filter pixel.

[0115] The number of same-color pixels in each of the pixels 141 at the left center end, the right center end, the upper center end, and the lower center end in each same-color pixel group 371 is 5. Therefore, each of the pixels 141 at the left center end, the right center end, the upper center end, and the lower center end, for example, pixels R204, R206, R202, and R208, are middle color filter pixels.

[0116] As described above, in the pixel array section 121, the transmittance controlled by the height of the color filter 151 of at least some of the pixels 141 is set based on the number of pixels of the same color in the pixels 141. Therefore, it is possible to suppress the difference in light receiving sensitivity between the pixels 141. As a result, it is possible to improve the image quality of the captured image.

[0117] On the other hand, when the aperture of each pixel 141 is corrected by varying the width of the light shielding film 32 to suppress the difference in light receiving sensitivity between the pixels 141, the light shielding by the light shielding film 32 deteriorates the quantum efficiency (QE).

[0118] <2. Second embodiment> <Pixel configuration example> A CMOS image sensor according to a second embodiment of an imaging element to which the present technology is applied has a pixel configuration different from that of the CMOS image sensor 111 in Fig. 4, and is otherwise configured in the same manner as the CMOS image sensor 111. Therefore, only the pixel configuration will be described below.

[0119] FIG. 18 is a top view of a pixel array portion showing an example of a pixel configuration in the second embodiment.

[0120] In addition, in order to simplify the drawing, Figure 18 only shows 2 x 2 groups of same-color pixels that make up the pixel array section, which are arranged in pairs in the horizontal and vertical directions corresponding to low image heights around the optical axis.

[0121] In the pixel array section 421 in Fig. 18, the parts corresponding to those in the pixel array section 121 in Fig. 5 are denoted by the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array section 121. The pixel array section 421 differs from the pixel array section 121 in that the color filter 151 is replaced by a color filter 451, and is otherwise configured in the same manner as the pixel array section 121.

[0122] Specifically, the transmittance of the color filter 451 decreases as the density (thickness) of the material of the color filter 451 increases. Therefore, in the pixel array section 421, the transmittance of the color filter 451 is controlled to a set value according to the density of the color filter 151.

[0123] More specifically, the density of the material of the color filter 451 of the upper left, lower left, upper right, and lower right pixels 141 in each same-color pixel group 131 is set to be higher than the color filters 451 of the other pixels 141 in the same-color pixel group 131 that includes that pixel 141. Note that, hereinafter, pixels having color filters 451 with the highest material density in the same-color pixel group 131 are collectively referred to as high-density color filter pixels.

[0124] The density of the material of the color filter 451 of each of the 2×2 pixels 141 in the center is set to be lower than the color filters 151 of the other pixels 141 in the same-color pixel group 131 that includes that pixel 141. Note that, below, the pixels having the color filter 451 with the lowest material density in the same-color pixel group 131 are also collectively referred to as low-density color filter pixels.

[0125] The density of the material of the color filters 451 of two pixels 141 at the left center edge, right center edge, top center edge, and bottom center edge is lower than that of the color filters 451 of the high-density color filter pixels and higher than that of the color filters 451 of the low-density color filter pixels.

[0126] As described above, in the pixel array section 421, the transmittance controlled by the density of the material of the color filter 451 of at least some of the pixels 141 is set based on the number of pixels of the same color in the pixels 141. Therefore, it is possible to suppress the difference in light receiving sensitivity between the pixels 141. As a result, it is possible to improve the image quality of the captured image.

[0127] It should be noted that a low refractive index wall may be provided instead of the light blocking film 32. The types of density of the color filter 451 are not limited to three types: high, medium, and low.

[0128] <3. Third embodiment> <Example of pixel structure> A CMOS image sensor according to a third embodiment of an imaging element to which the present technology is applied has a pixel structure different from that of the CMOS image sensor 111 in Fig. 4, and is otherwise configured in the same manner as the CMOS image sensor 111. Therefore, only the pixel structure will be described below.

[0129] FIG. 19 is a cross-sectional view parallel to the horizontal direction of a pixel array unit, showing an example of a pixel structure in the third embodiment.

[0130] In Fig. 19, in order to simplify the drawing, only six pixels corresponding to high image heights in the peripheral area of ​​the screen are shown among the pixels constituting the pixel array. Specifically, the top right pixel R304 of the red same-color pixel group, the top four pixels GR301 to GR304 of the green same-color pixel group, and the top left pixel R301 of another red same-color pixel group are shown. In Fig. 19, the left side is the optical axis center side, that is, the side with low image height.

[0131] In the pixels R304, GR301 to GR304, and R301 in Fig. 19, the parts corresponding to the pixel R101 in Fig. 6 are denoted by the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts different from the pixel R101. The pixels R304, GR301 to GR304, and R301 differ from the pixel R101 in that the color filter layer 163 is replaced by a color filter layer 503, and in the position of the on-chip lens 22 in at least one of the horizontal and vertical directions. The rest of the configuration is the same as that of the pixel R101.

[0132] In the color filter layer 503 of each of the pixels R304, GR301 to GR304, and R301, a color filter 511 is formed at a position shifted from the position of the photoelectric conversion unit 61 in at least one of the horizontal and vertical directions.

[0133] The heights of the color filters 511 of the pixels R304, GR301 to GR304, and R301 are set based on the transmittance and the image height.

[0134] Specifically, the number of same-color pixels in the pixels R304, GR301, GR304, and R301 is 3. Therefore, when the height of the color filter 511 is set based only on the transmittance of the color filter 511, the heights of the color filters 511 in the pixels R304, GR301, GR304, and R301 are all set to the height H1.

[0135] However, in the third embodiment, based on the image height as well, the height of the color filter 511 of the pixel corresponding to a higher image height among the pixels in the same-color pixel group corresponding to a high image height and having a predetermined transmittance set thereto is changed to a lower value.

[0136] For example, of the pixels GR301 and GR304 in the same-color green pixel group corresponding to a high image height, the height of the color filter 511 of the pixel GR304 corresponding to the higher image height is changed from height H1 to height H2. Similarly, of the pixels in the same-color red pixel group corresponding to a high image height to which the highest transmittance is set, the height of the color filter 511 of the pixel R304 corresponding to the higher image height is changed from height H1 to height H2. Note that the height of the color filter 511 after the change can be any value as long as it is lower than the height before the change.

[0137] As a result, it is possible to prevent light with a large incident angle that is incident on the pixels GR301 and R301 corresponding to a high image height from being blocked (vignetted) by the different color filters 511 of the pixels R304 and GR304 adjacent to the optical axis side. As a result, it is possible to improve the quantum efficiency (light receiving sensitivity) of the pixels GR301 and R301.

[0138] Although not shown in the drawings, pixels other than pixels R304, GR301, GR304, and R301 are configured similarly to pixels R304, GR301, GR304, and R301. For example, of two pixels at each of the left central end, right central end, upper central end, and lower central end, which are set to the intermediate transmittance of the surrounding pixels in a same-color pixel group corresponding to a high image height, the height of the color filter 511 of the pixel corresponding to the higher image height is changed from height H2 to height H3.

[0139] The positions of the on-chip lenses 22 formed for each of the 2×2 pixels including pixels R304, GR301 and GR302, GR303 and GR304, and R301 are shifted from the position of the photoelectric conversion unit 61 in at least one of the horizontal and vertical directions.

[0140] <Explanation of effect> FIG. 20 is a cross-sectional view parallel to the horizontal direction of the pixel array section 121, showing an example of the structure of a pixel 141 in the pixel array section 121, for explaining the effect of the third embodiment.

[0141] In order to simplify the drawing, Fig. 20 shows only six pixels 141 corresponding to high image heights in the peripheral area of ​​the screen among the pixels constituting the pixel array unit 121. Specifically, the top right pixel R404 of the red same-color pixel group 131, the top four pixels GR401 to GR404 of the green same-color pixel group 131, and the top left pixel R401 of the other red same-color pixel group 131 are shown. In Fig. 20, the left side is the side with low image heights.

[0142] In the pixels R404, GR401 to GR404, and R401 in Fig. 20, the parts corresponding to the pixel R101 in Fig. 6 are given the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts different from the pixel R101. The pixels R404, GR401 to GR404, and R401 are different from the pixel R101 in at least one of the horizontal and vertical positions of the on-chip lens 22 and the color filter 151, but are otherwise configured in the same manner as the pixel R101.

[0143] The positions of the color filters 151 of the pixels R404, GR401 to GR404, and R401 are shifted from the position of the photoelectric conversion unit 61 in at least one of the horizontal and vertical directions.

[0144] The heights of the color filters 151 of the pixels R404, GR401 to GR404, and R401 are set based only on the transmittance of the color filters 151 of the pixels R404, GR401 to GR404, and R401. Therefore, the heights of the color filters 151 of the pixels R404, GR401, GR404, and R401 are all set to the height H1.

[0145] Therefore, light with a large angle of incidence that is incident on the pixels GR401 and R401 corresponding to a high image height is blocked by the different color filters 151 of the adjacent pixels R404 and GR404 on the optical axis side, respectively. As a result, the quantum efficiency of the pixels GR401 and R401 decreases.

[0146] The positions of the on-chip lenses 22 formed for each of the 2×2 pixels including pixels R404, GR401 and GR402, GR403 and GR404, and R401 are shifted from the position of the photoelectric conversion unit 61 in at least one of the horizontal and vertical directions.

[0147] As described above, in the third embodiment, the height of the color filter 511 is set based on not only the transmittance but also the image height. Therefore, it is possible to suppress the difference in light receiving sensitivity between pixels and improve the quantum efficiency of the pixel corresponding to the high image height. As a result, it is possible to improve the image quality of the captured image.

[0148] <4. Fourth embodiment> <Example of pixel array structure> A CMOS image sensor as a fourth embodiment of an imaging element to which the present technology is applied has a different structure of a pixel array section from that of the CMOS image sensor 111 in Fig. 4, and is otherwise configured in the same manner as the CMOS image sensor 111. Therefore, only the structure of the pixel array section will be described below.

[0149] FIG. 21 is a top view of a pixel array unit showing an example of the structure of the pixel array unit in the fourth embodiment.

[0150] In addition, in order to simplify the drawing, Figure 21 only shows 2 x 2 groups of same-color pixels that make up the pixel array section, which are arranged in pairs in the horizontal and vertical directions corresponding to the low image heights around the optical axis.

[0151] In the pixel array section 621 in Fig. 21, the parts corresponding to those in the pixel array section 121 in Fig. 5 are denoted by the same reference numerals. Therefore, the description of those parts will be omitted as appropriate, and the description will focus on the parts that differ from the pixel array section 121. The pixel array section 621 differs from the pixel array section 121 in that low refractive index walls 631 and 632 are provided instead of some of the light-shielding films 32, and is otherwise configured in the same manner as the pixel array section 621.

[0152] The low-refractive-index walls 631 are formed between adjacent pixels 141 at the boundary of the same-color pixel groups 131, so as to penetrate the color filter layer 163 and the oxide film layer 52, instead of the light-shielding film 32, and function as optical waveguides. The low-refractive-index walls 632 are formed between adjacent pixels 141 corresponding to different on-chip lenses 22 at a location other than the boundary of the same-color pixel groups 131, so as to penetrate the color filter layer 163 and the oxide film layer 52, instead of the light-shielding film 32, and function as optical waveguides.

[0153] The horizontal and vertical widths of the low-refractive-index walls 631 are greater than the horizontal and vertical widths of the low-refractive-index walls 632. This makes it possible to make the light sensitivity of the 12 surrounding pixels 141 in the same-color pixel group 131, which have high light sensitivity, lower than the light sensitivity of the 2 × 2 pixels 141 in the center when the transmittance of the color filters 151 of all the pixels 141 is the same.

[0154] As described above, the pixel array section 621 includes the low-refractive-index walls 631 and 632, and therefore it is possible to further reduce the difference in light-receiving sensitivity between the pixels 141. As a result, it is possible to improve the image quality of a captured image.

[0155] The directions in which the same-color pixel groups 131 and the pixels 141 are arranged are not limited to the horizontal and vertical directions, as long as they are two different directions. The transmittance of the color filter 151 may be set to be different for each color. The types of heights of the color filter 151 (511) are not limited to the three types of heights H1 to H3.

[0156] <5. Application examples to imaging devices> The above-mentioned CMOS image sensor 111 and the CMOS image sensors according to the second to fourth embodiments can be applied to various imaging devices, such as digital still cameras, digital video cameras, mobile phones with imaging functions, and other devices with imaging functions.

[0157] FIG. 22 is a block diagram showing an example configuration of an imaging device to which the present technology is applied.

[0158] The imaging device 1001 shown in FIG. 22 includes an optical system 1002, a shutter device 1003, a solid-state imaging device 1004, a control circuit 1005, an output circuit 1006, a monitor 1007, and a memory 1008, and is capable of capturing still and moving images.

[0159] The optical system 1002 is configured to have one or more lenses, and guides light from a subject (incident light) to the solid-state imaging device 1004 , forming an image on the light receiving surface of the solid-state imaging device 1004 .

[0160] The shutter device 1003 is disposed between the optical system 1002 and the solid-state imaging device 1004 , and controls the light irradiation period and light blocking period for the solid-state imaging device 1004 under the control of a control circuit 1005 .

[0161] The solid-state imaging device 1004 is configured by the above-mentioned CMOS image sensor 111 or the CMOS image sensors according to the second to fourth embodiments. The solid-state imaging device 1004 generates a captured image corresponding to light focused on a light receiving surface via the optical system 1002 and the shutter device 1003, and supplies the captured image to an output circuit 1006.

[0162] The control circuit 1005 outputs drive signals that control the transfer operation of the solid-state imaging device 1004 and the shutter operation of the shutter device 1003 , thereby driving the solid-state imaging device 1004 and the shutter device 1003 .

[0163] An output circuit 1006 supplies the captured image output from the solid-state imaging device 1004 to a monitor 1007 for display, or to a memory 1008 for storage.

[0164] In the imaging device 1001 configured as above, the difference in light receiving sensitivity between pixels can be suppressed by applying the CMOS image sensor 111 or the CMOS image sensor according to the second to fourth embodiments as the solid-state imaging device 1004. As a result, the image quality of the captured image can be improved.

[0165] <6. Examples of semiconductor chip usage> FIG. 23 is a diagram showing an example of using the above-mentioned CMOS image sensor 111 or the CMOS image sensors according to the second to fourth embodiments.

[0166] The above-described CMOS image sensor 111 and the CMOS image sensors according to the second to fourth embodiments can be used in various cases for sensing light such as visible light, infrared light, ultraviolet light, and X-rays, for example, as described below.

[0167] ·Digital cameras, mobile devices with camera functions, and other devices that take images for viewing purposes - Devices used for traffic purposes, such as on-board sensors that take pictures of the front, rear, surroundings, and interior of a vehicle for safe driving (such as automatic stopping) and for recognition of the driver's condition, surveillance cameras that monitor moving vehicles and roads, and distance measuring sensors that measure distances between vehicles, etc. A device used in home appliances such as TVs, refrigerators, and air conditioners to capture user gestures and operate the appliances according to those gestures. -Medical and healthcare equipment, such as endoscopes and devices that take blood vessel images using infrared light - Equipment used for security purposes, such as surveillance cameras for crime prevention and cameras for person authentication - Cosmetic devices such as skin measuring devices that take pictures of the skin and microscopes that take pictures of the scalp - Devices used for sports, such as action cameras and wearable cameras for sports use Agricultural equipment such as cameras for monitoring fields and crop conditions

[0168] <7. Application examples for endoscopic surgery systems> The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be applied to an endoscopic surgery system.

[0169] FIG. 24 is a diagram showing an example of a schematic configuration of an endoscopic surgery system to which the technology according to the present disclosure (the present technology) can be applied.

[0170] 24 shows a state in which an operator (doctor) 11131 is performing surgery on a patient 11132 on a patient bed 11133 using an endoscopic surgery system 11000. As shown in the figure, the endoscopic surgery system 11000 is composed of an endoscope 11100, other surgical tools 11110 such as an insufflation tube 11111 and an energy treatment tool 11112, a support arm device 11120 that supports the endoscope 11100, and a cart 11200 on which various devices for endoscopic surgery are mounted.

[0171] The endoscope 11100 is composed of a lens barrel 11101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 11132, and a camera head 11102 connected to the base end of the lens barrel 11101. In the illustrated example, the endoscope 11100 is configured as a so-called rigid scope having a rigid lens barrel 11101, but the endoscope 11100 may be configured as a so-called flexible scope having a flexible lens barrel.

[0172] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 11101, and is irradiated via the objective lens toward an observation target in the body cavity of the patient 11132. The endoscope 11100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0173] An optical system and an image sensor are provided inside the camera head 11102, and reflected light (observation light) from an observation target is collected on the image sensor by the optical system. The observation light is photoelectrically converted by the image sensor to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to an observation image. The image signal is transmitted to a camera control unit (CCU) 11201 as RAW data.

[0174] The CCU 11201 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and performs overall control of the operations of the endoscope 11100 and the display device 11202. Furthermore, the CCU 11201 receives an image signal from the camera head 11102, and performs various types of image processing on the image signal, such as development processing (demosaic processing), for displaying an image based on the image signal.

[0175] Under the control of the CCU 11201, the display device 11202 displays an image based on an image signal that has been subjected to image processing by the CCU 11201.

[0176] The light source device 11203 is composed of a light source such as an LED (Light Emitting Diode), and supplies the endoscope 11100 with irradiation light when photographing an operation site or the like.

[0177] The input device 11204 is an input interface for the endoscopic surgery system 11000. A user can input various information and instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction to change the imaging conditions (type of irradiated light, magnification, focal length, etc.) of the endoscope 11100.

[0178] The treatment tool control device 11205 controls the driving of the energy treatment tool 11112 for cauterizing tissue, incising, sealing blood vessels, etc. The insufflation device 11206 sends gas into the body cavity of the patient 11132 via the insufflation tube 11111 to inflate the body cavity for the purpose of securing the field of view of the endoscope 11100 and securing the working space of the surgeon. The recorder 11207 is a device capable of recording various information related to the surgery. The printer 11208 is a device capable of printing various information related to the surgery in various formats such as text, image, or graph.

[0179] The light source device 11203 that supplies irradiation light to the endoscope 11100 when photographing the surgical site can be composed of a white light source composed of, for example, an LED, a laser light source, or a combination of these. When the white light source is composed of a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, so that the white balance of the captured image can be adjusted in the light source device 11203. In this case, it is also possible to capture images corresponding to each of the RGB colors in a time-division manner by irradiating the observation object with laser light from each of the RGB laser light sources in a time-division manner and controlling the driving of the image sensor of the camera head 11102 in synchronization with the irradiation timing. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0180] The light source device 11203 may be controlled to change the intensity of the light it outputs at predetermined time intervals. The driving of the image sensor of the camera head 11102 may be controlled in synchronization with the timing of the change in the light intensity to obtain images in a time-division manner, and the images may be synthesized to generate an image with a high dynamic range that is free of so-called blackout and whiteout.

[0181] The light source device 11203 may be configured to supply light of a predetermined wavelength band corresponding to the special light observation. In the special light observation, for example, by utilizing the wavelength dependency of light absorption in body tissue, a narrow band light is irradiated compared to the irradiated light (i.e., white light) during normal observation, and a predetermined tissue such as blood vessels on the mucous membrane surface is photographed with high contrast, so-called narrow band imaging is performed. Alternatively, in the special light observation, a fluorescent observation may be performed in which an image is obtained by fluorescence generated by irradiating an excitation light. In the fluorescent observation, it is possible to irradiate an excitation light to a body tissue and observe the fluorescence from the body tissue (autofluorescence observation), or to locally inject a reagent such as indocyanine green (ICG) into the body tissue and irradiate the body tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 11203 may be configured to supply narrow band light and / or excitation light corresponding to such special light observation.

[0182] FIG. 25 is a block diagram showing an example of the functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

[0183] The camera head 11102 has a lens unit 11401, an imaging unit 11402, a drive unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 has a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are connected to each other by a transmission cable 11400 so as to be able to communicate with each other.

[0184] The lens unit 11401 is an optical system provided at the connection portion with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102 and enters the lens unit 11401. The lens unit 11401 is configured by combining a plurality of lenses including a zoom lens and a focus lens.

[0185] The imaging unit 11402 is composed of an imaging element. The imaging element constituting the imaging unit 11402 may be one (so-called single-plate type) or multiple (so-called multi-plate type). When the imaging unit 11402 is composed of a multi-plate type, for example, each imaging element may generate an image signal corresponding to each of RGB, and a color image may be obtained by combining the image signals. Alternatively, the imaging unit 11402 may be configured to have a pair of imaging elements for acquiring image signals for the right eye and the left eye corresponding to 3D (Dimensional) display. By performing 3D display, the surgeon 11131 can more accurately grasp the depth of the biological tissue in the surgical site. Note that when the imaging unit 11402 is composed of a multi-plate type, multiple lens units 11401 may be provided corresponding to each imaging element.

[0186] Furthermore, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101, immediately behind the objective lens.

[0187] The driving unit 11403 is configured by an actuator, and moves the zoom lens and focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. This allows the magnification and focus of the image captured by the imaging unit 11402 to be appropriately adjusted.

[0188] The communication unit 11404 is configured by a communication device for transmitting and receiving various information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 to the CCU 11201 via the transmission cable 11400 as RAW data.

[0189] Furthermore, the communication unit 11404 receives a control signal for controlling the driving of the camera head 11102 from the CCU 11201, and supplies the control signal to the camera head control unit 11405. The control signal includes information on the imaging conditions, such as information specifying the frame rate of the captured image, information specifying the exposure value at the time of capturing the image, and / or information specifying the magnification and focus of the captured image.

[0190] The image capturing conditions such as the frame rate, exposure value, magnification, and focus may be appropriately specified by a user, or may be automatically set by the control unit 11413 of the CCU 11201 based on an acquired image signal. In the latter case, the endoscope 11100 is equipped with a so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function.

[0191] The camera head control unit 11405 controls the driving of the camera head 11102 based on a control signal received from the CCU 11201 via the communication unit 11404.

[0192] The communication unit 11411 is configured with a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

[0193] Furthermore, the communication unit 11411 transmits, to the camera head 11102, a control signal for controlling the driving of the camera head 11102. The image signal and the control signal can be transmitted by electrical communication, optical communication, or the like.

[0194] The image processing unit 11412 performs various types of image processing on the image signal, which is RAW data sent from the camera head 11102 .

[0195] The control unit 11413 performs various controls related to imaging of the surgical site etc. by the endoscope 11100 and display of the captured image obtained by imaging the surgical site etc. For example, the control unit 11413 generates a control signal for controlling the driving of the camera head 11102.

[0196] Further, the control unit 11413 causes the display device 11202 to display the captured image showing the surgical site, etc., based on the image signal that has been image-processed by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition techniques. For example, the control unit 11413 can recognize surgical tools such as forceps, specific living body parts, bleeding, mist when the energy treatment tool 11112 is used, etc., by detecting the shape and color of the edge of an object included in the captured image. When the control unit 11413 causes the display device 11202 to display the captured image, it may use the recognition result to superimpose various types of surgery support information on the image of the surgical site. By superimposing and presenting the surgery support information to the surgeon 11131, the burden on the surgeon 11131 can be reduced and the surgeon 11131 can proceed with the surgery reliably.

[0197] The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electrical signal cable for communication of electrical signals, an optical fiber for optical communication, or a composite cable of these.

[0198] Here, in the illustrated example, communication is performed wired using a transmission cable 11400, but communication between the camera head 11102 and the CCU 11201 may also be performed wirelessly.

[0199] An example of an endoscopic surgery system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to, for example, the imaging unit 11402 and the like among the configurations described above. Specifically, the CMOS image sensor 111 and the CMOS image sensors according to the second to fourth embodiments can be applied to the imaging unit 11402. By applying the technology according to the present disclosure to the imaging unit 11402, a high-quality image of the surgical site can be obtained, allowing the surgeon to reliably check the surgical site.

[0200] Although an endoscopic surgery system has been described here as an example, the technology disclosed herein may also be applied to other systems, such as a microsurgery system.

[0201] <8. Application examples for mobile devices> The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, etc.

[0202] FIG. 26 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology according to the present disclosure can be applied.

[0203] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 26, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated.

[0204] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0205] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0206] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0207] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0208] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.

[0209] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.

[0210] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0211] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0212] The audio / video output unit 12052 transmits at least one output signal of audio and video to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. In the example of Fig. 26, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as the output device. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0213] FIG. 27 is a diagram showing an example of the installation position of the imaging unit 12031.

[0214] In FIG. 27, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as an imaging unit 12031.

[0215] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The images of the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0216] 27 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0217] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0218] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.

[0219] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0220] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.

[0221] An example of a vehicle control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 12031 and the like in the above-described configuration. Specifically, the CMOS image sensor 111 and the CMOS image sensors according to the second to fourth embodiments can be applied to the imaging unit 12031. By applying the technology according to the present disclosure to the imaging unit 12031, a high-quality captured image can be obtained, thereby reducing driver fatigue.

[0222] The present technology can also be applied to an imaging element having pixels for detecting a phase difference.

[0223] The embodiments of the present technology are not limited to the above-described embodiments, and various modifications are possible without departing from the gist of the present technology.

[0224] For example, a form in which all or part of the above-mentioned embodiments are combined can be adopted. Specifically, in the second embodiment, similarly to the third embodiment, the density of the color filter 451 of the pixel 141 may be set based on the image height corresponding to the pixel 141. In the fourth embodiment, the color filter 451 may be provided instead of the color filter 151.

[0225] It should be noted that the effects described in this specification are merely examples and are not limiting, and there may be effects other than those described in this specification.

[0226] The present technology can take the following configurations. (1) a pixel array section configured by arranging a plurality of pixels having color filters of the same color adjacent to each other in a first direction and a second direction in a predetermined array in the first direction and the second direction; Equipped with The transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, the pixels having the same color of the color filter. It was configured as Image sensor. (2) The transmittance is set to be higher as the number of the same color pixels increases. It was configured as The imaging element according to (1) above. (3) The transmittance is controlled by the thickness of the color filter. It was configured as The imaging element according to (1) or (2) above. (4) The thickness of the color filter for the pixel is set based on the image height corresponding to the pixel. It was configured as The imaging element according to (3) above. (5) The transmittance is controlled by the density of the color filters. It was configured as The imaging element according to (1) or (2). (6) The transmittance of the pixel having the color filter of a predetermined color is set based on the number of pixels of the same color. It was configured as The imaging element according to any one of (1) to (5). (7) The color types of the color filters are any one of three colors: red, green, and blue; three colors: red, yellow, and blue; three colors: cyan, magenta, and yellow; and four colors: cyan, magenta, yellow, and white. It was configured as The imaging element according to any one of (1) to (6). (8) On the subject side of the color filter, an on-chip lens is formed for each of the pixels. Further equipped The imaging element according to any one of (1) to (7). (9) The on-chip lens is formed for each of a plurality of the pixels aligned in at least one of the first direction and the second direction. It is configured as follows: The imaging element according to (8) above. (10) a first low refractive index wall formed between adjacent pixels at a boundary between the same-color pixel groups; a second low refractive index wall formed between adjacent pixels at a location other than the boundary between the same-color pixel groups; Further equipped with The width of the first low refractive index wall is greater than the width of the second low refractive index wall. It was configured as The imaging element according to any one of (1) to (9). (11) a pixel array section configured by arranging a plurality of pixels having color filters of the same color adjacent to each other in a first direction and a second direction in a predetermined array in the first direction and the second direction; Equipped with The transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, the pixels being pixels in which the color of the color filter is the same color. It was configured as An imaging element; an optical system that forms an image on the imaging element using light from a subject; An imaging device comprising: [Explanation of symbols]

[0227] 111 CMOS image sensor, 121 pixel array section, 131-1 to 131-4 same-color pixel group, 141 pixel, 142 on-chip lens, 151 color filter, 231-2, 231-3, 251-1 to 251-4, 271-1, 271-4 same-color pixel group, 292, 312, 332a, 332b, 352a, 352b on-chip lenses, 371-1 to 371-4 same-color pixel group, 451, 511 color filter, 631, 632 low-refractive-index wall, 1001 imaging device, 1002 optical system

Claims

1. a pixel array section configured by arranging a plurality of pixels having color filters of the same color adjacent to each other in a first direction and a second direction in a predetermined array in the first direction and the second direction; Equipped with The transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, the pixels being pixels in which the color of the color filter is the same color. It was configured as Image sensor.

2. The transmittance is set to be higher as the number of the same color pixels increases. It was configured as The imaging device according to claim 1 .

3. The transmittance is controlled by the thickness of the color filter. It was configured as The imaging device according to claim 1 .

4. The thickness of the color filter for the pixel is set based on the image height corresponding to the pixel. It was configured as The imaging device according to claim 3 .

5. The transmittance is controlled by the density of the color filters. It was configured as The imaging device according to claim 1 .

6. The transmittance of the pixel having the color filter of a predetermined color is set based on the number of pixels of the same color. It was configured as The imaging device according to claim 1 .

7. The color types of the color filters are any one of three colors: red, green, and blue; three colors: red, yellow, and blue; three colors: cyan, magenta, and yellow; and four colors: cyan, magenta, yellow, and white. It was configured as The imaging device according to claim 1 .

8. On the subject side of the color filter, an on-chip lens is formed for each of the pixels. Further equipped The imaging device according to claim 1 .

9. The on-chip lens is formed for each of a plurality of the pixels aligned in at least one of the first direction and the second direction. It is configured as follows: The imaging device according to claim 8 .

10. a first low refractive index wall formed between adjacent pixels at a boundary between the same-color pixel groups; a second low refractive index wall formed between adjacent pixels at a location other than the boundary between the same-color pixel groups; Further equipped with The width of the first low refractive index wall is greater than the width of the second low refractive index wall. It was configured as The imaging device according to claim 1 .

11. a pixel array section configured by arranging a plurality of pixels having color filters of the same color adjacent to each other in a first direction and a second direction in a predetermined array in the first direction and the second direction; Equipped with The transmittance of the color filter of at least some of the pixels is set based on the number of same-color pixels adjacent to the pixel, the pixels being pixels in which the color of the color filter is the same color. It was configured as An imaging element; an optical system that forms an image on the imaging element using light from a subject; An imaging device comprising:

Images