Substrate transfer device including multi-layer efem

Abstract

To provide a substrate transfer device including an EFEM capable of moving a multi-layer.SOLUTION: The substrate transfer device according to the invention of the present application includes: a first moving plate; a second moving plate located below the first moving plate; and an EFEM connected to the first moving plate and the second moving plate to provide the substrate to one of the first moving plate and the second moving plate through a first robot, the EFEM having a first rail, a first mobile body moving on the first rail, a second rail arranged on a surface of the first moving body, and the first robot for transferring the substrate by moving on the second rail.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a substrate transfer apparatus, and more particularly to a substrate transfer apparatus including a multi-layer Equipment Front End Module (EFEM). [Background technology]

[0002] It is very important to reduce the area of ​​equipment used in semiconductor or display processes. For example, by reducing the area occupied by a substrate transfer device, more equipment can be installed and operated in a factory, thereby improving productivity and production capacity. In addition, by optimizing the use of space in a factory through the reduction in area, the space utilization efficiency increases, which is advantageous for cost reduction, and by shortening the movement path, the movement time during the production process can be reduced, thereby optimizing the production line. To achieve this, a technology is needed to increase the throughput per unit area of ​​equipment used in semiconductor processes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Korean Patent Publication No. 10-2007-0099185 Summary of the Invention [Problem to be solved by the invention]

[0004] One object of the present invention is to provide a substrate transfer apparatus including an EFEM capable of multi-layer movement. [Means for solving the problem]

[0005] According to one embodiment, the substrate transfer device may include a first moving plate, a second moving plate located below the first moving plate, a first rail, a first moving body that moves on the first rail, and a first robot connected to the first moving body to transport a substrate, and may include an EFEM connected to the first moving plate and the second moving plate to provide a substrate to the first moving plate or the second moving plate through the first robot.

[0006] Here, the EFEM may include a second rail disposed on one surface of the first moving body, and the first robot may be configured to move on the second rail.

[0007] Here, the first rail and the second rail are disposed perpendicular to each other, the first moving body can move left and right on the first rail, and the first robot can move up and down on the second rail.

[0008] Here, the EFEM includes a third rail, a second moving body that moves on the third rail, a fourth rail disposed on one side of the second moving body, and a second robot that moves on the fourth rail to transport a substrate, the third rail and the fourth rail being disposed perpendicular to each other, the second moving body being able to move left and right on the third rail, and the second robot being able to move up and down on the fourth rail.

[0009] Here, when viewed from above, the first rail and the third rail do not need to overlap each other.

[0010] Here, the first robot moves along a first path on the first rail, and the second robot moves along a second path on the third rail, and the first path and the second path may not overlap each other when viewed from above.

[0011] Here, the first robot may transfer the substrate to the second robot using a rotatable first robot arm.

[0012] Here, the system further includes a shuttle configured to move on the first moving plate or the second moving plate and to receive a substrate, and the first robot can transport the substrate to the shuttle.

[0013] Here, the height from the ground to the first rail may be higher than the height from the ground to the third rail.

[0014] Here, the EFEM may include a first auxiliary rail arranged parallel to the first rail to improve stability and capable of moving the first moving body.

[0015] Here, the EFEM may include a fifth rail arranged on the other surface of the first movable body so that the first robot moves on the one surface of the first movable body and the second robot moves on the other surface opposite to the one surface.

[0016] Here, the first rail and the second rail may be connected so that the first robot can move on the first rail.

[0017] Here, the first moving body may include a first sub-body and a second sub-body, and the second sub-body may be connected to the first robot and configured to be retractable into the first sub-body to adjust the position of the first robot.

[0018] Here, the EFEM includes a third rail, a second moving body that moves on the third rail, and a second robot connected to the second moving body to transport a substrate, and the first rail and the third rail may be at least partially overlapped when viewed from above. Effect of the Invention

[0019] According to one embodiment of the present invention, a substrate transfer apparatus can be provided that includes an EFEM capable of multi-layer movement. [Brief description of the drawings]

[0020] [Figure 1] 1 is a diagram illustrating a substrate transfer apparatus according to an embodiment; [Diagram 2] FIG. 1 is a cross-sectional view for explaining an EFEM according to one embodiment. [Diagram 3] FIG. 11 is a cross-sectional view illustrating an EFEM according to another embodiment. [Figure 4] FIG. 4 is a diagram for explaining the EFEM of FIG. 3. [Diagram 5] 13 is a diagram for explaining an EFEM according to another embodiment. [Figure 6] 13 is a diagram for explaining an EFEM according to another embodiment. [Figure 7] FIG. 7 is a diagram for explaining the EFEM of FIG. 5 or FIG. 6. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] The embodiments described in this specification are intended to clearly explain the concept of the present invention to those having ordinary skill in the art to which the present invention pertains, and therefore the present invention is not limited to the embodiments described in this specification, and the scope of the present invention should be construed as including modifications or variations that do not deviate from the concept of the present invention.

[0022] The terms used in this specification are currently widely used and general terms that are possible in consideration of the functions of the present invention, but these may change depending on the intentions of those skilled in the art to which the present invention belongs, precedents, the emergence of new technology, etc. However, when a specific term is defined and used with an arbitrary meaning, the meaning of the term is described separately. Therefore, the terms used in this specification should be defined based on the substantial meaning of the term and the overall content of this specification, rather than simply the name of the term.

[0023] The drawings attached to this specification are intended to easily explain the present invention, and the shapes illustrated in the drawings are exaggerated as necessary to facilitate understanding of the present invention, and therefore the present invention is not limited by the drawings.

[0024] In this specification, if it is determined that a detailed description of a known structure or function related to the present invention may make the gist of the present invention unclear, the detailed description will be omitted as necessary.

[0025] FIG. 1 is a view illustrating a substrate transfer apparatus according to an embodiment.

[0026] 1, a substrate transfer apparatus according to an embodiment may include a first moving plate 100, a second moving plate 101, a load lock chamber 150, and an EFEM 200. Additionally, the substrate transfer apparatus may include multiple processing chambers, multiple arms, multiple shuttles, and rails for the shuttles.

[0027] A second moving plate 101 may be disposed under the first moving plate 100. The first moving plate 100 and the second moving plate 101 may be disposed at an upper and lower part, so that the substrate transfer device may have a multi-layer structure.

[0028] In the multi-layered substrate transfer apparatus, the substrate can be transferred on a first moving plate 100 or a second moving plate 101. The substrate can be moved to an upper layer or a lower layer through the EFEM 200. Therefore, in the multi-layered substrate transfer apparatus, when a processing chamber adjacent to one moving plate fails, the substrate can be transferred to a processing chamber adjacent to another moving plate.

[0029] A load lock chamber 150 may be connected to the first moving plate 100 and the second moving plate 101. The load lock chamber 150 is a module that moves a substrate while switching between atmospheric and vacuum pressures between the moving plates and the EFEM. The load lock chamber 150 may be a chamber for maintaining a vacuum or atmospheric condition of a substrate transferred to the EFEM 200 by the first moving plate 100 or the second moving plate 101 or vice versa.

[0030] For example, when a substrate is moved to a moving plate in the EFEM, the load lock chamber 150 can obtain a substrate in an atmospheric state from the EFEM, adjust the pressure to ATM to plate the substrate, then adjust the pressure to a vacuum state again, and then open the gate of the moving plate to transfer the substrate to the moving plate. Similarly, when a substrate is moved to the EFEM from the moving plate, the load lock chamber 150 can obtain a substrate in a vacuum state from the moving plate, adjust the pressure to atmospheric state, and then open the gate of the EFEM to transfer the substrate to the EFEM.

[0031] The Equipment Front End Module (EFEM) may be equipment that performs pre-processing tasks such as transferring a substrate. The EFEM 200 may include components such as a robot arm, an aligner for setting the direction of the substrate, a side storage for removing fumes, a load port where a FOUP (Front Open Unified Pod) is seated, a sensor for detecting the substrate position, a vacuum pump, and modules for additional functions.

[0032] The present invention relates to a substrate transfer device capable of moving one of a first moving plate 100 and a second moving plate 101 to the other using a robot included in an EFEM. Conventionally, additional hardware devices such as escalators or elevators are required in an EFEM to move a substrate. However, these are vulnerable to vibrations caused by the elevator itself moving, and there are problems related to the possibility of particle generation due to pressure changes caused by vibrations and movements. In addition, it takes a lot of effort and cost to design these.

[0033] The present invention is characterized by an EFEM including a robot that transports a substrate on a fixed rail to compensate for the vulnerability to vibration and the possibility of particle generation, even though it is simple. A substrate transfer device including an EFEM capable of layer movement will be described in detail below with reference to Figures 2 to 6.

[0034] FIG. 2 is a cross-sectional view for explaining the EFEM according to one embodiment.

[0035] 2, the EFEM according to an embodiment may include a first rail 211, a first moving body 241, a second rail 221 disposed on the first moving body, a first auxiliary rail 231, and a first robot 10. Although Fig. 2 illustrates a structure similar to an I-shape in which the first rail 211 and the first auxiliary rail 231 are disposed horizontally to the ground and the second rail 221 is disposed vertically to the ground, the structure is not limited thereto, and an H-shape structure is also possible. For example, the first rail 211 and the first auxiliary rail 231 may be disposed vertically to the ground and the second rail 221 may be disposed horizontally to the ground.

[0036] The first rail 211 and the first auxiliary rail 231 may be rails whose positions are fixed inside the EFEM. Also, the second rail 221 may be a rail whose position is fixed on the first moving body 241. However, the position of the second rail 221 may be variable inside the EFEM according to the movement of the first moving body 241.

[0037] The first rail 211 may be configured to allow the first moving body 241 to move. The first moving body 241 may change the left / right position of the first robot 10 by moving on the first rail 211. Although not shown in FIG. 2, the first robot 10 may move not only on the second rail 221 on the first moving body 241 but also on the first rail 211. In this case, the first rail 211 and the second rail 221 may be connected to each other so that the first robot 10 can move on the first rail 211.

[0038] The first moving body 241 may be disposed and connected perpendicularly to the first rail 211. The first moving body 241 may move on the first rail 211 to provide left and right movement of the first robot 10. The first moving body 241 may have various shapes such as a cylinder, a polygonal pillar, etc. The first moving body 241 may include a second rail 221 disposed on one surface.

[0039] Depending on the vertical length of the first moving body 241, air resistance during movement, etc., problems such as strength and stability may occur when the first moving body 241 moves on the first rail 211. Therefore, the EFEM can improve the stability of the first moving body 241 during movement by utilizing the first auxiliary rail 231.

[0040] Specifically, the first auxiliary rail 231 may be connected to one region of the first moving body 241. Although FIG. 2 illustrates that the first auxiliary rail 231 is connected to the center of the first moving body 241, the present invention is not limited thereto, and the connection point of the first auxiliary rail 231 may be various. The first moving body 241 may move left and right along the rail using not only the first rail 211 but also the first auxiliary rail 231. Therefore, even if the length of the first moving body 241 is long or the moving speed is fast, the stability and strength of the movement of the first moving body 241 inside the EFEM may be improved by using two rails. Although FIG. 2 illustrates an example in which one auxiliary rail is used, the present invention is not limited thereto, and the number of auxiliary rails may be multiple as necessary.

[0041] The second rail 221 may be disposed on one surface of the first moving body 241. The second rail 221 may be configured to enable the first robot 10 to move. For example, the first robot 10 may move on the second rail 221 using wheels. However, without being limited thereto, the second rail 221 may be embodied in various forms such as a sliding rail, a fixed rail, etc.

[0042] The first moving body 241 may include other rails in addition to the second rail 221. Specifically, the second rail 221 may be disposed on one side of the first moving body 241, and another rail (not shown) may be disposed on the other side opposite to the first side. Thus, the first robot 10 may move using the second rail 221 on one side of the first moving body 241, and another robot may move using another rail (e.g., a fifth rail) on the other side. That is, the first moving body 241 may include two or more rails to provide movement for two or more robots.

[0043] The first robot 10 may include a robot arm capable of gripping a substrate. The first robot 10 may move on the second rail 221 to transport the substrate. In addition, the first robot 10 may move on the first rail 211 or the first auxiliary rail 231, depending on the circumstances.

[0044] Specifically, the first moving body 241 moves left and right on the first rail 211, and the first robot 10 can grasp and transport a substrate on the same layer as the first moving plate 100. In addition, the first robot 10 moves up and down on the second rail 221, and can provide a layer change for the substrate so that the substrate can be moved from one of the first moving plate 100 and the second moving plate 101 onto the other one.

[0045] 2 illustrates the second rail 221 disposed perpendicular to the first rail 211 and the first auxiliary rail 231, but is not limited thereto, and the angle formed between the second rail 221 and the first rail 211 or the first auxiliary rail 231 may vary. For example, one end of the second rail 221 may be connected to the left end of the first rail 211, and the other end of the second rail 221 may be connected to the right end of the first auxiliary rail 231. Therefore, the EFEM may include rails in a Z-structure or an inverted Z-structure.

[0046] FIG. 3 is a cross-sectional view for explaining an EFEM according to another embodiment.

[0047] 3, the EFEM according to another embodiment may include a first rail 211, a first moving body 241, a second rail 221 disposed on the first moving body 241, a first auxiliary rail 231, a first robot 10, a third rail 212, a second moving body 242, a fourth rail 222 disposed on the second moving body 242, a second auxiliary rail 232, and a second robot 20. The EFEM in FIG. 3 is an example using two moving bodies and a robot.

[0048] The EFEM may include a plurality of robots to move and transport a substrate. The plurality of robots may transport a substrate independently, or may transport a substrate in a manner in which a substrate held by one robot is transferred to another robot. The plurality of robots may move independently of each other. Specifically, the first robot 10 may move left and right via the first rail 211 and the first moving body 241, and may move up and down via the second rail 221. The second robot 20 may move left and right via the third rail 212 and the second moving body 242, and may move up and down via the fourth rail 222. In addition, the first robot 10 and the second robot 20 may be able to move to various positions by changing position, rotating, etc., as well as left and right and up and down, using a plurality of rails, moving bodies, rotating movements, robot arms, etc.

[0049] The third rail 212 and the second auxiliary rail 232 may be rails whose positions are fixed inside the EFEM. Also, the fourth rail 222 may be a rail whose position is fixed on the second moving body 242. However, the position of the fourth rail 222 may be variable inside the EFEM according to the movement of the second moving body 242.

[0050] The third rail 212 may be configured to allow the second moving body 242 to move. The second moving body 242 may change the left / right position of the second robot 20 by moving on the third rail 212. Although not shown in FIG. 3, the second robot 20 may move not only on the fourth rail 222 on the second moving body 242 but also on the third rail 212. In this case, the third rail 212 and the fourth rail 222 may be connected to each other so that the second robot 20 can move on the third rail 212.

[0051] The second moving body 242 may be disposed and connected vertically to the third rail 212. The second moving body 242 may move on the third rail 212 to provide left and right movement of the second robot 20. The second moving body 242 may have various shapes such as a cylinder, a polygonal column, etc. The second moving body 242 may include a fourth rail 222 disposed on one surface.

[0052] Depending on the vertical length of the second moving body 242, air resistance during movement, etc., problems such as strength and stability may occur when the second moving body 242 moves on the third rail 212. Therefore, the EFEM can improve the stability of the second moving body 242 during movement by using the second auxiliary rail 232.

[0053] Specifically, the second auxiliary rail 232 may be connected to one area of ​​the second moving body 242. FIG. 3 illustrates that the second auxiliary rail 232 is connected to the center of the second moving body 242, but the present invention is not limited thereto, and the connection point of the second auxiliary rail 232 may be various. The second moving body 242 may move left and right along the rail using not only the third rail 212 but also the second auxiliary rail 232. Therefore, even if the length of the second moving body 242 is long or the moving speed is fast, the stability and strength of the movement of the second moving body 242 inside the EFEM can be improved by using two rails. FIG. 3 illustrates an example in which one auxiliary rail is used, but the present invention is not limited thereto, and the number of auxiliary rails may be multiple as necessary. In addition, the first auxiliary rail 231 and the second auxiliary rail 232 may be integrated and expressed as one auxiliary rail as necessary.

[0054] The first auxiliary rail 231 and the second auxiliary rail 232 may be disposed at a position where they are not obstructed when the first robot 10 and the second robot 20 transport substrates to the load lock chamber. For example, the first auxiliary rail 231 and the second auxiliary rail 232 may be disposed to be connected to a surface of the first movable body 241 and the second movable body 242 that is not close to the load lock chamber.

[0055] The fourth rail 222 may be disposed on one surface of the second moving body 242. The fourth rail 222 may be configured to enable the second robot 20 to move. For example, the second robot 20 may move on the fourth rail 222 using wheels. However, without being limited thereto, the fourth rail 222 may be embodied in various forms such as a sliding rail, a fixed rail, etc.

[0056] The second moving body 242 may include other rails in addition to the fourth rail 222. Specifically, the fourth rail 222 may be disposed on one side of the second moving body 242, and another rail (not shown) may be disposed on the other side opposite to the first side. Therefore, the second robot 20 may move using the fourth rail 222 on one side of the second moving body 242, and another robot may move using another rail on the other side. That is, the second moving body 242 may include two or more rails to provide movement for two or more robots.

[0057] The first moving body 241 and the second moving body 242 may be spaced apart to prevent collision when the first robot 10 and the second robot 20 move left and right. Therefore, the first rail 211 and the third rail 212 may be spaced apart to allow the first moving body 241 and the second moving body 242 to be spaced apart. For example, when viewed from above, the first rail 211 and the third rail 212 may be spaced apart by a certain distance.

[0058] Alternatively, in order to prevent a collision between the first robot 10 and the second robot 20, the first moving body 241 and the second moving body 242 may be configured to have a structure other than the first rail 211 and the third rail 212. For example, when viewed from above, the first rail 211 and the third rail 212 may be arranged to overlap, and the first moving body 241 may be arranged on the left side of the first rail 211 and the third rail 212, and the second moving body 242 may be arranged on the right side of the first rail 211 and the third rail 212. However, this is not limited thereto, and various rail and moving body arrangement structures may be applied to prevent a collision between the first robot 10 and the second robot 20.

[0059] Through the movement of the first moving body 241 on the first rail 211 and / or the first auxiliary rail 231 and the movement of the first robot 10 on the second rail 221, the first robot 10 can transport a substrate positioned on the upper layer or transport a substrate to the upper layer. Also, through the movement of the second moving body 242 on the third rail 212 and / or the second auxiliary rail 232 and the movement of the second robot 20 on the fourth rail 222, the second robot 20 can transport a substrate positioned on the upper layer or transport a substrate to the upper layer.

[0060] The first robot 10 may transfer a substrate to or be transferred to the second robot 20. In this case, the first robot 10 may transfer a substrate to or be transferred to the second robot 20 on the second rail 221 using the first robot arm, but is not limited thereto, and may transfer a substrate to or be transferred to the second robot 20 on the first rail 211.

[0061] The second robot 20 may deliver a substrate to or be delivered to the first robot 10. In this case, the second robot 20 may deliver a substrate to or be delivered to the first robot 10 using the second robot arm on the fourth rail 222, but is not limited thereto, and may deliver a substrate to or be delivered to the first robot 10 on the third rail 212.

[0062] The first robot 10 or the second robot 20 can transport the substrate to the shuttle. The shuttle is a device configured to accommodate a substrate and can include a space capable of accommodating the substrate therein. Specifically, the shuttle can move into a load lock chamber 150 connected to the EFEM 200 to deliver or be delivered a substrate. The first robot 10 or the second robot 20 can deliver a substrate to the shuttle in the load lock chamber 150 or retrieve a substrate from the shuttle. Thus, the shuttle can move again to the first moving plate 100 or the second moving plate 101.

[0063] The first rail 211 may be located above the third rail 212. Specifically, the height from the ground to the first rail 211 may be higher than the height from the ground to the third rail 212. For example, the first rail 211 may be disposed on the ceiling of the EFEM, and the third rail 212 may be disposed on the floor of the EFEM, but is not limited to this. The heights of the first rail 211 and the third rail 212 may be set to be different to improve the efficiency of movement between the moving bodies and to reduce the size occupied by the rails and the moving bodies inside the EFEM.

[0064] 3 illustrates that the first rail 211 to which the first moving body 241 is connected and the third rail 212 to which the second moving body 242 is connected are disposed at the upper and lower parts, respectively, inside the EFEM. However, the first rail 211 and the third rail 212 are not limited thereto and may have various arrangement shapes.

[0065] For example, the first rail 211 may be disposed on the top of the EFEM, and the third rail 212 may be disposed on the left or right side of the EFEM. Thus, the second moving body 242 may move up and down on the third rail 212, and the second robot 20 may move left and right on the second moving body 242. In this case, when viewed from above, the first rail 211 and the third rail 212 may overlap in at least one area.

[0066] Also, for example, the first rail 211 can be disposed on the left or right side of the EFEM, and the third rail 212 can be disposed below the EFEM. Therefore, the first moving body 241 can move up and down on the first rail 211, and the first robot 10 can move left and right on the first moving body 241. In this case, when viewed from above, the first rail 211 and the third rail 212 may overlap in at least one area.

[0067] Also, for example, the first rail 211 can be disposed on the left side of the EFEM, and the third rail 212 can be disposed on the right side of the EFEM. Therefore, the first moving body 241 can move up and down on the first rail 211, and the first robot 10 can move left and right on the first moving body 241. Also, the second moving body 242 can move up and down on the third rail 212, and the second robot 20 can move left and right on the second moving body 242. In this case, the first rail 211 and the third rail 212 do not have to overlap at least in one area when viewed from above.

[0068] The various arrangements of the first rail 211 and the third rail 212 described above can be applied not only to the embodiment of FIG. 3 but also to the embodiments of FIGS.

[0069] Fig. 4 is a diagram for explaining the EFEM of Fig. 3. Specifically, Fig. 4 is a diagram showing the shape of the substrate transfer device or EFEM of Fig. 3 projected from above.

[0070] 4, the EFEM may include rails configured to allow only the first robot 10 and the second robot 20 to move independently without interfering with each other. For example, the EFEM may include a first rail 211 configured to allow only the first robot 10 to move and a third rail 212 configured to allow only the second robot 20 to move.

[0071] In this case, the first rail 211 and the third rail 212 may be disposed spaced apart from each other by a certain distance d when viewed from above. Specifically, the first rail 211 and the third rail 212 are rails parallel to each other and spaced apart from each other by a certain distance d in a direction perpendicular to the axis of the rail. Since the rails are spaced apart from each other, the first robot 10 or the second robot 20 can move freely without colliding with each other when they move.

[0072] 4, other arrangements may be applied so that the paths of the first robot 10 and the second robot 20 do not overlap. Specifically, when viewed from above, the first robot 10 may move along a first path along a first axis a1, and the second robot 20 may move along a second path along a second axis a2. Therefore, the first rail 211 and the third rail 212 may be arranged so that the first path and the second path do not overlap each other.

[0073] For example, the first rail 211 and the third rail 212 are arranged so as to overlap each other when viewed from above. JPEG2025024654000002.jpg13168, the first and second paths may not overlap. Therefore, the first rail 211 and the third rail 212 may be arranged to be spaced apart when viewed from above, but are not limited thereto, and the first rail 211 and the third rail 212 may overlap each other or be arranged such that the movement paths of the first robot 10 and the second robot 20 do not overlap each other (have no more than one contact point).

[0074] FIG. 5 is a diagram for explaining an EFEM according to another embodiment.

[0075] 5, an EFEM according to another embodiment may include a first rail 211, a first moving body 251, a first robot 10, a third rail 212, a second moving body 242, a fourth rail 222 disposed on the second moving body 242, and a second robot 20. The EFEM in FIG. 5 differs from the EFEM in FIG. 3 in the shape of the first moving body 251.

[0076] Specifically, the first moving body 251 in Fig. 5 does not include a rail, unlike the second moving body 242. The first moving body 251 can change the left and right position of the first robot 10 by moving on the first rail 211. However, unlike the embodiment in Fig. 3, the first moving body 251 can be configured in a form that can be extended up and down in order to change the up and down position of the first robot 10.

[0077] The first moving body 251 may include a plurality of sub-bodies. Specifically, the first moving body 251 may include a first sub-body 261, a second sub-body 262, a third sub-body 263, and a fourth sub-body 264. Although FIG. 5 illustrates that the first moving body 251 includes four sub-bodies, the number of sub-bodies is not limited thereto and may vary depending on the size of the EFEM.

[0078] The first sub-body 261 is located on the upper part of the first moving body 251 and can move left and right on the first rail 211 along the first rail 211. The first sub-body 261 is connected to the second sub-body 262 to the fourth sub-body 264 and can accommodate them. Specifically, the second sub-body 262 to the fourth sub-body 264 can be retracted into the first sub-body 261. Also, the second sub-body 262 to the fourth sub-body 264 can be retracted to the outside of the first sub-body 261 by control.

[0079] The first to fourth sub-bodies 261 to 264 may all have different sizes. Specifically, the fourth sub-body 264 may have a smaller size than the third sub-body 263 since it is retracted into the third sub-body 263. Also, the third sub-body 263 may have a smaller size than the second sub-body 262 since it is retracted into the second sub-body 262. Also, the second sub-body 262 may have a smaller size than the first sub-body 261 since it is retracted into the first sub-body 261.

[0080] The fourth sub-body 264 may be connected to the first robot 10 as an end sub-body of the first moving body 251. The height of the first robot 10 may be adjusted by retracting or extending the second to fourth sub-body 262 to 264.

[0081] The first to fourth sub-body 261 to 264 are connected to each other, and the overall length can be extended. For example, in the basic state (where the second to fourth sub-body 262 to 264 are all retracted into the first sub-body 261), the fourth sub-body 264 can be retracted from the third sub-body 263 to reduce the height of the first robot 10 by about the first length.

[0082] Also, for example, in order to lower the height of the first robot 10 in the basic state by a second length greater than the first length, the fourth sub-body 264 can be extended from the third sub-body 263, and the third sub-body 263 can be extended from the second sub-body 262. In this manner, in order to adjust the height of the first robot 10, the second sub-body 262 to the fourth sub-body 264 can be sequentially retracted or extended.

[0083] Unlike the first moving body 251, the second moving body 242 may be configured in the same form as the EFEM of Fig. 3. In the EFEM of Fig. 5, the vertical length of the first moving body 251 or the height of the first robot 10 from the ground can be adjusted, so the first rail 211 and the third rail 212 may appear to overlap when viewed from above. That is, the EFEM of Fig. 3 includes the first rail 211 and the third rail 212 that are spaced apart as in Fig. 4 when viewed from above, but the EFEM of Fig. 5 includes the first rail 211 and the third rail 212 that at least partially overlap when viewed from above. This will be described in detail with reference to Fig. 7.

[0084] FIG. 6 is a diagram for explaining an EFEM according to another embodiment.

[0085] 6, an EFEM according to another embodiment may include a first rail 211, a first moving body 251, a first robot 10, a third rail 212, a second moving body 252, and a second robot 20. In the EFEM of FIG. 6, the shape of the second moving body 252 may be the same as the shape of the first moving body 251 of FIG.

[0086] Specifically, the first moving body 251 and the second moving body 252 in Fig. 6 may include a plurality of sub-bodies. The first moving body 251 and the second moving body 252 may include a plurality of sub-bodies that may be extended vertically, and may adjust the height of the first robot 10 and the second robot 20. A detailed description of the first moving body 251 will be omitted as it overlaps with the description of Fig. 5.

[0087] The second moving body 252 may include a plurality of sub-bodies. Specifically, the second moving body 252 may include a fifth sub-body 266, a sixth sub-body 267, a seventh sub-body 268, and an eighth sub-body 269. Although FIG. 6 illustrates the second moving body 252 including four sub-bodies, the number of sub-bodies is not limited thereto and may vary depending on the size of the EFEM.

[0088] The fifth sub-body 266 is located under the second moving body 252 and can move left and right on the third rail 212 along the third rail 212. The fifth sub-body 266 is connected to the sixth sub-body 267 to the eighth sub-body 269 and can accommodate them. Specifically, the sixth sub-body 267 to the eighth sub-body 269 can be retracted into the fifth sub-body 266. Also, the sixth sub-body 267 to the eighth sub-body 269 can be extended out of the fifth sub-body 266 by control. The sub-bodies of the second moving body 252 may be retracted or extended in an opposite direction to the sub-bodies of the first moving body 251.

[0089] The fifth to eighth sub-bodies 266 to 269 may all have different sizes. Specifically, the eighth sub-body 269 may have a smaller size than the seventh sub-body 268 since it is retracted into the seventh sub-body 268. Also, the seventh sub-body 268 may have a smaller size than the sixth sub-body 267 since it is retracted into the sixth sub-body 267. Also, the sixth sub-body 267 may have a smaller size than the fifth sub-body 266 since it is retracted into the fifth sub-body 266.

[0090] The eighth sub-body 269 may be connected to the second robot 20 as an end sub-body of the second moving body 252. The height of the second robot 20 may be adjusted by retracting or extending the sixth to eighth sub-body 267 to 269.

[0091] The fifth sub-body 266 to the eighth sub-body 269 are connected to each other, and the overall length can be extended. For example, in the basic state (where the sixth sub-body 267 to the eighth sub-body 269 are all retracted into the fifth sub-body 266), in order to increase the height of the second robot 20 by about a third length, the eighth sub-body 269 can be retracted from the seventh sub-body 268.

[0092] Also, for example, in order to increase the height of the second robot 20 from the basic state by about a fourth length greater than the third length, the eighth sub-body 269 can be extended from the seventh sub-body 268, and the seventh sub-body 268 can be extended from the sixth sub-body 267. In this manner, in order to adjust the height of the second robot 20, the sixth to eighth sub-body 267 to 269 can be sequentially retracted or extended.

[0093] In the EFEM of Fig. 6, the vertical length of the first moving body 251 and the second moving body 252 or the height of the first robot 10 and the second robot 20 from the ground can be adjusted, so the first rail 211 and the third rail 212 may appear to overlap when viewed from above. That is, the EFEM of Fig. 3 includes the first rail 211 and the third rail 212 that are spaced apart as in Fig. 4 when viewed from above, but the EFEM of Fig. 6 includes the first rail 211 and the third rail 212 that at least partially overlap when viewed from above. This will be described in detail with reference to Fig. 7.

[0094] Fig. 7 is a diagram for explaining the EFEM of Fig. 5 or Fig. 6. Specifically, Fig. 7 is a diagram showing the shape of the substrate transfer device or the EFEM of Fig. 5 or Fig. 6 projected from above.

[0095] 7, the EFEM may include rails configured to allow only the first robot 10 and the second robot 20 to move independently without interfering with each other. For example, the EFEM may include a first rail 211 configured to allow only the first robot 10 to move and a third rail 212 configured to allow only the second robot 20 to move.

[0096] In this case, the first rail 211 and the third rail 212 may be at least partially overlapped when viewed from above. For efficient use of area, the first rail 211 and the third rail 212 may be preferably completely overlapped when viewed from above. Therefore, by at least partially overlapping the first rail 211 and the third rail 212, the area occupied by the EFEM can be reduced. In order to at least partially overlap the first rail 211 and the third rail 212, the rail arrangement and moving body configuration shown in FIG. 5 or FIG. 6 may be applied.

[0097] 5, since the height of the first moving body 251 can be adjusted, even if the first moving body 251 and the second moving body 242 move left and right, the first moving body 251 can avoid colliding with the second moving body 242 by adjusting the height. Therefore, the first robot 10 and the second robot 20 can move independently without colliding with each other or interfering with each other.

[0098] 6, the height of the first moving body 251 and the second moving body 252 can be adjusted, so that the first moving body 251 and the second moving body 252 can move left and right without colliding with each other by adjusting the height. Therefore, the first robot 10 and the second robot 20 can move independently without colliding with each other or interfering with each other.

[0099] 5 or 6, no collision occurs between the first moving body 251 and the second moving body 242 or 252 and no collision occurs between the first robot 10 and the second robot 20, so the first rail 211 and the third rail 212 do not need to be spaced apart from each other when viewed from above, and can be arranged to at least partially overlap. Therefore, since the first rail 211 and the third rail 212 at least partially overlap, the area occupied by the first rail 211 and the third rail 212 inside the EFEM can be reduced, and the size of the EFEM can be reduced.

[0100] Specifically, when viewed from above in Fig. 4, the first rail 211 and the third rail 212 are spaced apart by a distance d, so that the length of one side of the EFEM is a first length l1. However, when viewed from above in Fig. 7, the first rail 211 and the third rail 212 at least partially overlap, so that the length of one side of the EFEM can be a second length l2 that is smaller than the first length l1. Therefore, as the size of the EFEM is reduced, the overall size of the substrate transfer device can be reduced.

[0101] The method according to the embodiment may be embodied in the form of program instructions that can be executed by various computer means and recorded on a computer readable medium. The computer readable recording medium may include program instructions, data files, data structures, and the like, alone or in combination. The program instructions recorded on the computer readable recording medium may be specially designed and configured for the embodiment, or may be known and available to those skilled in the art of computer software. Examples of computer readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes, optical media such as CD-ROMs and DVDs, magneto-optical media such as floptical disks, and hardware devices specially configured to store and execute program instructions, such as ROMs, RAMs, flash memories, and the like. Examples of program instructions include not only machine language codes such as those produced by a compiler, but also high-level language codes that can be executed by a computer using an interpreter, and the like. The hardware devices may be configured to operate as one or more software modules to perform operations of the embodiment, or vice versa.

[0102] Although the embodiments have been described above with reference to limited embodiments and drawings, those skilled in the art may make various modifications and variations from the above description. For example, the described techniques may be performed in a different order than described, and / or the components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different manner than described, or may be replaced or substituted by other components or equivalents, and still achieve suitable results.

[0103] Accordingly, other implementations, embodiments, and equivalents of the claims are intended to be within the scope of the following claims. [Explanation of symbols]

[0104] 100 First moving plate 101 Second moving plate 150 Load Lock Chamber 200 EFEM

Claims

1. A first moving plate; a second moving plate located below the first moving plate; a first rail, a first moving body that moves on the first rail, and a first robot connected to the first moving body to transport a substrate, and an EFEM connected to the first moving plate and the second moving plate to provide a substrate to the first moving plate or the second moving plate through the first robot.

2. The EFEM includes a second rail disposed on one surface of the first moving body, The substrate transfer apparatus of claim 1 , wherein the first robot is configured to move on the second rail.

3. the first rail and the second rail are disposed perpendicular to each other, The substrate transfer device of claim 2 , wherein the first moving body moves left and right on the first rail, and the first robot moves up and down on the second rail.

4. the EFEM includes a third rail, a second moving body that moves on the third rail, a fourth rail disposed on one surface of the second moving body, and a second robot that moves on the fourth rail to transport a substrate; the third rail and the fourth rail are disposed perpendicular to each other, The substrate transfer device of claim 2 , wherein the second moving body moves left and right on the third rail, and the second robot moves up and down on the fourth rail.

5. The substrate transfer apparatus of claim 4 , wherein the first rail and the third rail do not overlap each other when viewed from above.

6. the first robot moves along a first path on the first rail; the second robot moves along a second path on the third rail; The substrate transfer apparatus of claim 4 , wherein the first path and the second path do not overlap each other when viewed from above.

7. The substrate transfer apparatus of claim 4 , wherein the first robot transfers the substrate to the second robot using a rotatable first robot arm.

8. a shuttle configured to move on the first moving plate or the second moving plate and to receive a substrate; The substrate transfer apparatus of claim 1 , wherein the first robot transports a substrate to the shuttle.

9. The substrate transfer apparatus of claim 4 , wherein a height from the ground to the first rail is higher than a height from the ground to the third rail.

10. The substrate transfer apparatus of claim 1 , wherein the EFEM includes a first auxiliary rail arranged parallel to the first rail for improving stability, and capable of moving the first movable body.

11. 3. The substrate transfer device of claim 2, wherein the EFEM includes a fifth rail disposed on the other surface of the first movable body such that the first robot moves on the one surface of the first movable body and the second robot moves on the other surface opposite to the one surface.

12. The substrate transfer apparatus of claim 2 , wherein the first rail and the second rail are connected so that the first robot can move on the first rail.

13. The first moving body includes a first sub-body and a second sub-body, 2. The substrate transfer apparatus of claim 1, wherein the second sub-body is coupled to the first robot and configured to be retractable into the first sub-body to adjust a position of the first robot.

14. the EFEM includes a third rail, a second moving body that moves on the third rail, and a second robot that is connected to the second moving body and transports a substrate; The substrate transfer apparatus of claim 13 , wherein the first rail and the third rail are at least partially overlapped when viewed from above.

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