Vacuum pump

Abstract

To provide a light-weight, robust and economical vacuum pump that can be used flexibly.SOLUTION: A vacuum pump, especially a turbo molecular pump, includes a pump housing. The pump housing includes a housing part 12 for housing a component that exerts a pumping action of the vacuum pump, and a flange part 10 for forming an attaching plane 44. The flange part is provided for connecting the vacuum pump to a recipient, and preferably, the flange part is formed in an integrated manner. The housing part and the flange part are configured as separate components. The housing part includes a support part 16, and the flange part includes a connection part 18 that can be connected to the recipient and an attaching part 14 joined to the support part. The attaching part is configured in a vertical direction at least with respect to the attaching plane without interruption.SELECTED DRAWING: Figure 6A

Description

[Technical field]

[0001] The present invention relates to a vacuum pump, in particular a turbomolecular pump. [Background technology]

[0002] A vacuum pump is used to generate a (high) vacuum in the recipient's vacuum chamber. To do this, the inlet side of the vacuum pump needs to be connected to the recipient's vacuum chamber. Conventional pump housings have an integrally molded flange, which is provided for connecting the vacuum pump to the recipient.

[0003] The realization of a pump unit can be cumbersome and space-consuming, especially if customer-specific requirements have to be met. For example, the pump may need to be as compact and lightweight as possible to allow or at least facilitate the integration of the pump into the customer's structure. It may also happen that the flanges to be connected have different diameters and therefore cannot be directly assembled to one another, while the consumer desires a compact structure.

[0004] Furthermore, the pump, and in particular the pump housing, should preferably be as robust as possible, thereby ensuring a long service life and high safety of the pump, and at the same time, it is desirable for the vacuum pump to be easy to manufacture, easy to maintain and economical. Summary of the Invention [Problem to be solved by the invention]

[0005] SUMMARY OF THE DISCLOSURE It is therefore an object of the present invention to provide a vacuum pump which is flexible in use, compact, lightweight, robust and economical. [Means for solving the problem]

[0006] This problem is solved according to the invention by the features of claim 1.

[0007] In particular, this problem is solved by a vacuum pump, in particular a turbomolecular pump, which comprises a pump housing having a housing part for accommodating the pumping components of the vacuum pump and a flange part forming a mounting plane, the flange part being provided for connecting the vacuum pump to a recipient, the flange part being preferably formed as one piece. The housing part and the flange part of the pump housing of the vacuum pump according to the invention are configured as separate components, in which the housing part has a support part and the flange part has a connection part connectable to the recipient and a mounting part connected to the support part, the mounting part being configured without interruption at least in a direction perpendicular to the mounting plane.

[0008] In other words, the flange portion does not have continuous holes or continuous perforations connecting the respective opposite sides of the flange portion to each other, as viewed in the axial direction of the vacuum pump. In this case, the central pump inlet of the vacuum pump, which is preferably defined by the annular flange portion, is not to be understood as a penetration according to the invention. Moreover, a penetration does not mean a groove or a recess extending into the flange portion and terminating on the inside of the flange portion.

[0009] In particular, the flange portion has an annular, preferably circular, outer and / or inner contour.

[0010] Due to the pump housing being constructed from several parts, in particular from two parts, the flange part can be easily and quickly assembled to the pump housing and removed from it again. This also allows for easy assembly of the pump housing and easy maintenance of the flange part and / or the pumping components of the pump, without the need to disassemble the entire pump housing for this. Furthermore, this allows the flange part to be replaced if necessary and adapted to the dimensions of the recipient connection.

[0011] The support part of the housing part is connected to the mounting part of the flange part, which is configured without interruption at least in the direction perpendicular to the mounting plane, thereby allowing maximum optimization of the construction space and high stability of the pump housing, in particular by means of which the connecting elements, such as screws or welded seams, which connect the flange part to the housing part, can be positioned in such a way that they do not protrude radially beyond the connecting part of the flange part, i.e. the pump is held in a particularly slim manner.

[0012] According to one embodiment, the flange portion and the housing portion may be made of different metals to save weight and / or cost, in particular the housing portion made of aluminum and / or the flange portion made of stainless steel.

[0013] The mounting portion may have a base to which the connecting portion is connected, preferably without interruption, in which case the mounting portion has an extension portion protruding from the base, the extension portion preferably extending perpendicularly to the mounting plane.

[0014] According to a further embodiment, the mounting part may have a recess formed in the base, which at least partially accommodates the support part, making the pump housing particularly robust.

[0015] For easy assembly of the pump housing, according to another embodiment, the mounting part and the support part each have at least one connecting means for centrally connecting the flange part and the housing part, the connecting means being configured complementarily.

[0016] The coupling means may have a conical connecting surface and / or a cylindrical connecting surface.

[0017] The coupling means of the attachment portion may be arranged on the outside of the attachment portion or may face the outside of the attachment portion. Advantageously, the coupling means is arranged on the extension portion.

[0018] Additionally or alternatively to this, the coupling means of the mounting part may be arranged on or face the inside of the mounting part.

[0019] According to one embodiment, the coupling means comprises complementary threaded portions so that the flange portion can be easily screwed onto the housing portion.

[0020] According to another embodiment, the flange part may be attached to the housing part by means of at least one screw, which ensures easy maintenance of the vacuum pump.

[0021] For easy access, at least one screw may extend from the outside to the inside of the housing, and for improved protection against external influences, at least one screw may extend from the inside to the outside of the housing. Advantageously, at least one screw extends in a direction perpendicular to the respective connecting surface and / or at least one screw extends obliquely to the longitudinal axis of the vacuum pump.

[0022] Additionally or alternatively, the flange portion may be attached to the housing portion by at least one weld seam connecting the support portion and the mounting portion to one another inside and / or outside the pump, making the pump housing particularly robust and durable.

[0023] The weld seam may be formed at an end face of the extension portion and / or at an end face of the support portion. Additionally or alternatively, the weld seam may be formed at an opening of the recess in the base or at an opening of the recess in the support portion.

[0024] To improve maintenance and versatility of the pump, the flange part may be attached to the housing part by a bayonet connection, in which case the connection means comprises at least one locking piece and at least one bayonet groove, in particular a plurality of locking pieces and bayonet grooves distributed around the circumference of the housing part and the flange part are provided.

[0025] The procedure for assembling the pump housing is as follows: - pre-processing the flange portion and / or the housing portion, in particular the mounting portion and / or the support portion; joining the flange portion to the housing portion, preferably using a coupling means, so that the flange portion is centrally seated on the housing portion; and b. connecting the flange part and the housing part, thereby forming a pump housing, in particular via a screw connection, a welded connection and / or a bayonet connection, Optionally, the method includes the step of post-machining the assembled pump housing, in particular the connection points.

[0026] The invention will now be described, by way of example only, on the basis of advantageous embodiments with reference to the accompanying drawings, in which: FIG. [Brief description of the drawings]

[0027] [Figure 1] 1 shows a perspective view of a known turbomolecular pump; [Diagram 2] FIG. 2 shows a bottom view of the turbomolecular pump of FIG. [Diagram 3] 3 shows a cross-sectional view of a turbomolecular pump taken along the section line AA shown in FIG. 2. [Figure 4] 3 shows a cross-sectional view of the turbomolecular pump taken along the section line BB shown in FIG. 2. [Diagram 5] 3 shows a cross-sectional view of a turbomolecular pump taken along the section line CC shown in FIG. 2. [Figure 6A] 1 illustrates a cross-sectional view of a portion of a pump housing of a vacuum pump according to various embodiments. [Figure 6B] 1 illustrates a cross-sectional view of a portion of a pump housing of a vacuum pump according to various embodiments. [Figure 7A] 1 illustrates a cross-sectional view of a portion of a pump housing of a vacuum pump according to various embodiments. [Figure 7B] 1 illustrates a cross-sectional view of a portion of a pump housing of a vacuum pump according to various embodiments. [Figure 7C] 1 illustrates a cross-sectional view of a portion of a pump housing of a vacuum pump according to various embodiments. [Figure 8] 1 illustrates a cross-sectional view of a portion of a pump housing of a vacuum pump according to various embodiments. [Figure 9A] FIG. 2 illustrates a side view of a pump housing of a vacuum pump in an unassembled state according to another embodiment. [Figure 9B] FIG. 9B shows a top view of a portion of the pump housing shown in FIG. 9A. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] The turbomolecular pump 111 shown in Fig. 1 has a pump inlet 115 surrounded by an inlet flange 113. To the pump inlet 115, in a manner known per se, a recipient, not shown, may be connected. Gas coming from the recipient can be sucked from the recipient via the pump inlet 115 and pumped through the pump to a pump outlet 117. To the pump outlet 117, an auxiliary vacuum pump, for example a rotary vane pump, may be connected.

[0029] The inlet flange 113 forms the upper end of a housing 119 of the vacuum pump 111 in the orientation of the vacuum pump according to Fig. 1. The housing 119 has a lower part 121, on which an electronics housing 123 is arranged laterally. In the electronics housing 123, electrical and / or electronic components of the vacuum pump 111 are accommodated, for example for operating an electric motor 125 (see also Fig. 3) arranged in the vacuum pump. The electronics housing 123 is provided with a number of connections 127 for accessories. Furthermore, a data interface 129 (for example according to the RS485 standard) and a current supply connection 131 are arranged in the electronics housing 123.

[0030] There are also turbomolecular pumps that do not have this type of attached electronics housing, but are connected to external drive electronics.

[0031] A ventilation inlet 133, in particular in the form of a ventilation valve, is provided in the housing 119 of the turbomolecular pump 111. Via the ventilation inlet 133, the vacuum pump 111 can be vented. In the region of the lower part 121, a sealing gas connection 135 (also called purge gas connection) is also arranged. Via the sealing gas connection 135, a purge gas can be fed into a motor chamber 137 in order to protect the electric motor 125 (see, for example, FIG. 3) against the gas pumped by the pump. In the motor chamber 137, the vacuum pump 111 accommodates the electric motor 125. In the lower part 121, two coolant connections 139 are also arranged. In this case, one coolant connection is provided as an inlet for the coolant and the other coolant connection is provided as an exhaust. A coolant can be introduced into the vacuum pump for cooling purposes. The further turbomolecular vacuum pump present (not shown) is operated exclusively air-cooled.

[0032] The underside 141 of the vacuum pump can be used as a base, so that the vacuum pump 111 can be operated vertically with respect to the underside 141. Moreover, the vacuum pump 111 can be fixed to the recipient via the inlet flange 113 and thus operated in a suspended state, so to speak. Furthermore, the vacuum pump 111 can be configured so that it can be operated even when oriented in a different direction than shown in FIG. 1. Vacuum pump configurations are also feasible in which the underside 141 can be arranged not only downwards, but also sideways or upwards. In this case, in principle, any angle is conceivable.

[0033] In particular, other turbomolecular vacuum pumps (not shown) that are present and are larger than the pump shown cannot be operated in a vertical position.

[0034] Various screws 143 are further arranged on the underside 141 shown in Fig. 2. By means of these screws 143, components of the vacuum pump, not specified in detail here, are fixed to one another. For example, a bearing cover 145 is fixed to the underside 141.

[0035] Fastening holes 147 are furthermore arranged in the underside 141. Via the fastening holes 147, the pump 111 can be fixed, for example, to a mounting surface. This is not possible with other existing turbomolecular vacuum pumps (not shown), in particular those larger than the pump shown.

[0036] 2 to 5 show a coolant line 148. In the coolant line 148 a coolant can be circulated which is introduced and discharged via the coolant connection 139.

[0037] As shown in the cross-sectional views of Figures 3 to 5, the vacuum pump has multiple process gas pumping stages for pumping process gas acting on a pump inlet 115 to a pump exhaust 117.

[0038] A rotor 149 is disposed within the housing 119. The rotor 149 has a rotor shaft 153 that is rotatable about a rotation axis 151.

[0039] The turbomolecular pump 111 has a number of turbomolecular pump stages connected in series to provide a pumping action. The turbomolecular pump stages have a number of radially extending rotor blades 155 fixed to the rotor shaft 153 and a number of stator vanes 157 arranged between the rotor blades 155 and fixed within the housing 119. In this case, each of the rotor blades 155 and the adjacent stator vanes 157 forms one turbomolecular pump stage. The stator vanes 157 are held at a desired axial distance from each other by spacer rings 159.

[0040] The vacuum pump further comprises Holweck pump stages arranged radially inside and outside one another and connected in series to provide a pumping action. There are alternative turbomolecular vacuum pumps (not shown) that do not comprise Holweck pump stages.

[0041] The rotor of the Holweck pump stage comprises a rotor hub 161 arranged on the rotor shaft 153 and two Holweck rotor sleeves 163, 165 with cylindrical flanks fixed to and supported by the rotor hub 161. The Holweck rotor sleeves 163, 165 are oriented coaxially with respect to the axis of rotation 151 and engage one another radially. Two Holweck stator sleeves 167, 169 with cylindrical flanks are further provided. The Holweck stator sleeves 167, 169 are likewise oriented coaxially with respect to the axis of rotation 151 and engage one another radially.

[0042] The pumping surfaces of the Holweck pump stages are formed by the lateral surfaces, i.e. by the radially inner and / or outer surfaces of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and together with this outer surface forms the first Holweck pump stage following the turbomolecular pump. The radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169, forming a radial Holweck gap 173, and together with this outer surface forms the second Holweck pump stage. The radially inner surface of the inner Holweck stator sleeve 169 opposes the radially outer surface of the inner Holweck rotor sleeve 165 while forming a radial Holweck gap 175, and together with this outer surface forms the third Holweck pump stage.

[0043] The lower end of the Holweck rotor sleeve 163 may be provided with a radially extending channel, through which the radially outer Holweck gap 171 is connected to the central Holweck gap 173. The upper end of the inner Holweck stator sleeve 169 may be provided with a further radially extending channel, through which the central Holweck gap 173 is connected to the radially inner Holweck gap 175. In this way, the multiple mutually interlocking Holweck pump stages are connected in series with each other. The lower end of the radially inner Holweck rotor sleeve 165 may be further provided with a connecting channel 179 leading to the exhaust port 117.

[0044] The pumping surfaces of the Holweck stator sleeves 167, 169 each have a number of Holweck grooves extending in the axial direction and spiraling around the rotation axis 151, while the opposing sides of the Holweck rotor sleeves 163, 165 are smoothly formed and pump the gas for the operation of the vacuum pump 111 forward in the Holweck grooves.

[0045] For the rotatable support of the rotor shaft 153, a rolling bearing 181 is provided in the area of ​​the pump outlet 117 and a permanent magnetic bearing 183 is provided in the area of ​​the pump inlet 115.

[0046] In the region of the rolling bearing 181, the rotor shaft 153 is provided with a conical splash nut 185. The splash nut 185 has an outside diameter that increases towards the rolling bearing 181. The splash nut 185 is in sliding contact with at least one scraping member of the working medium reservoir. In other existing turbomolecular vacuum pumps (not shown), instead of a splash nut, a splash screw may be provided. Since various configurations are thereby possible, the term "splash tip" is also used in the above context.

[0047] The working medium reservoir comprises a number of absorbent discs 187 stacked one above the other, which are impregnated with a working medium for the rolling bearings 181, for example a lubricant.

[0048] During operation of the vacuum pump 111, the working medium is transferred by capillary action from the working medium reservoir via the scraping element to the rotating splash nut 185 and is then forced by centrifugal force along the splash nut 185 towards the increasing outer diameter of the splash nut 185 towards the rolling bearing 181, where it fulfills, for example, a lubrication function. The rolling bearing 181 and the working medium reservoir are enclosed in the vacuum pump by a trough-like insert 189 and a bearing cover 145.

[0049] The permanent magnetic bearing 183 has a rotor-side bearing half 191 and a stator-side bearing half 193. Each of these has a ring stack, which consists of several rings 195, 197 of permanent magnets stacked axially one above the other. The ring magnets 195, 197 face each other forming a radial bearing gap 199, with the rotor-side ring magnet 195 arranged radially outward and the stator-side ring magnet 197 arranged radially inward. The magnetic field present in the bearing gap 199 induces a magnetic repulsion between the ring magnets 195, 197. This repulsion provides a radial support for the rotor shaft 153. The rotor-side ring magnet 195 is supported by a support part 201 of the rotor shaft 153. The support part 201 surrounds the ring magnet 195 radially outward. The stator-side ring magnet 197 is supported by a support part 203 on the stator side. The support part 203 extends through the ring magnet 197 and is suspended on radial struts 205 of the housing 119. Parallel to the axis of rotation 151, the ring magnet 195 on the rotor side is fixed by a cover element 207 connected to the support part 203. The ring magnet 197 on the stator side is fixed in one direction parallel to the axis of rotation 151 by a fixing ring 209 connected to the support part 203 and a fixing ring 211 connected to the support part 203. Between the fixing ring 211 and the ring magnet 197, a disc spring 213 may further be provided.

[0050] An emergency or safety bearing 215 is provided in the magnetic bearing. During normal operation of the vacuum pump, the emergency or safety bearing 215 runs free without contact and only engages if the rotor 149 is displaced too far radially relative to the stator, thus forming a radial stop for the rotor 149, so that a collision between the rotor-side and stator-side structures is prevented. The safety bearing 215 is configured as a non-lubricated rolling bearing and forms a radial gap together with the rotor 149 and / or the stator. The gap ensures that the safety bearing 215 is not engaged during normal pump operation. The safety bearing 215 engages during radial displacement, which is dimensioned to be sufficiently large so that the safety bearing 215 is not engaged during normal operation of the vacuum pump and at the same time is sufficiently small so that a collision between the rotor-side and stator-side structures is prevented in all circumstances.

[0051] The vacuum pump 111 has an electric motor 125 which drives a rotor 149 in rotation. The armature of the electric motor 125 is formed by the rotor 149. A rotor shaft 153 of the rotor 149 extends through a motor stator 217. A permanent magnet assembly may be arranged radially outwardly or embedded in the part of the rotor shaft 153 which extends through the motor stator 217. An intermediate chamber 219 is arranged between the motor stator 217 and the part of the rotor 149 which extends through the motor stator 217. The intermediate chamber 219 has a radial motor gap. Through the motor gap, the motor stator 217 and the permanent magnet assembly may magnetically interact to transmit a driving torque.

[0052] The motor stator 217 is fixed in the housing in a motor chamber 137 provided for the electric motor 125. Via a seal gas connection 135, a seal gas (also called purge gas, which can be, for example, air or nitrogen) can reach the motor chamber 137. Via the seal gas, the electric motor 125 can be protected against process gases, for example against corrosive parts of the process gas. The motor chamber 137 can be evacuated via the pump outlet 117, i.e. a vacuum pressure acts in the motor chamber 137, which is realized at least approximately by an auxiliary vacuum pump connected to the pump outlet 117.

[0053] A so-called labyrinth seal 223, known per se, may furthermore be provided between the rotor hub 161 and the wall 221 which defines the motor chamber 137. This in particular achieves better sealing of the motor chamber 217 with respect to the radially outer Holweck pump stages.

[0054] 6A shows a part of the pump housing in the region of the pump inlet of a vacuum pump according to the invention according to one embodiment. In contrast to the previously described conventional construction type of vacuum pump, the pump housing according to the invention has a housing part 12 and a flange part 10 assembled to the housing part 12. That is to say, the housing part 12 and the flange part 10 are formed as separate components.

[0055] The housing part 12 is configured to accommodate the pumping components of the vacuum pump, such as the electric motor 125, the rotor 149 and the rotor shaft 153 (see Figures 1 to 5). The housing part 12 preferably has a cylindrical basic shape defining an axial direction 42 along the longitudinal axis of the vacuum pump. The housing part 12 further comprises a support part 16 for establishing a connection with the flange part 10.

[0056] The flange portion 10, preferably formed annularly, defines a pump inlet (not shown) of the vacuum pump and has a mounting portion 14 with a base 36 and a connecting portion 18 radially outwardly connected to the mounting portion 14. The connecting portion 18 is provided for connecting the pump inlet with a connection of a recipient. The flange portion 10 forms a mounting plane 44, the normal of which extends parallel to the axial direction 42, i.e. the mounting plane 44 lies perpendicular to the axial direction 42.

[0057] The flange portion 10 and the housing portion 12 are preferably manufactured from a durable metal such as stainless steel or aluminum. To reduce the weight of the pump, the housing portion 12 may be manufactured from aluminum. The flange portion 10 may be manufactured from a special steel, which may provide the necessary stability for mounting the pump. To reduce the complexity of the pump, the flange portion 10 and / or the housing portion 12 may furthermore each be constructed in one piece or in one piece.

[0058] The base 36 of the mounting portion 14 is formed without interruption when viewed in the axial direction 42. In other words, the mounting portion 14 does not have axial perforations or the like connecting the opposing sides of the base 36. Furthermore, the base 36 does not have a recess or groove on the pump inlet side.

[0059] The mounting portion 14 of the flange portion 10 has an extension portion 38 that protrudes from the base 36 and extends generally perpendicular to the mounting plane 44, i.e., parallel to the axial direction 42. In the illustrated embodiment, the extension portion 38 has, on its inner side 28, a conical connecting surface 20b and a connecting surface 24b that connects to the connecting surface 20b. The connecting surfaces 20b and 24b of the mounting portion 14 face an outer side 52 of the support portion 16. In the illustrated embodiment, a portion of the inner side 28 of the extension portion 38 forms a portion of the inner side of the pump housing, and a portion of the outer side 52 of the support portion 16 forms a portion of the outer side of the pump housing.

[0060] The support part 16 of the housing part 12 has a conical connecting surface 20a on the outer side of the support part 16 and a cylindrical connecting surface 24a connecting to the connecting surface 20a, i.e. the connecting surfaces 20a and 24a of the support part 16 face the inner side of the mounting part 14. The conical connecting surfaces 20a and 20b have the same inclination with respect to the axial direction 42, whereas the cylindrical connecting surfaces 24a, 24b extend parallel to the axial direction 42.

[0061] The cylindrical connecting surface 24b of the mounting part 14 is connected by an annular surface 46b, which defines the end face of the extension 38 and which extends parallel to the mounting plane 44. Correspondingly, the cylindrical connecting surface 24a of the support part 16, opposite the conical connecting surface 20a, is connected by an annular surface 46a, which also extends parallel to the mounting plane 44. The height of the cylindrical connecting surface 24a of the support part 16 is lower than the height of the cylindrical connecting surface 24b of the mounting part 14, so that in the assembled state of the pump housing, the annular surfaces 46a, 46b form a gap 48, which allows manufacturing tolerances to be compensated for.

[0062] In the illustrated embodiment, the respective connecting surfaces 20a, 20b and 24a, 24b are pressed against one another by a number of threads 22, so that the connection between the flange part 10 and the housing part 12 is tight. The centering of the flange part 10 on the housing part 12 is performed by the stop formed by the cylindrical connecting surfaces 20a, 20b. In other words, the centering is performed via a centering collar formed by the cylindrical and conical connecting surfaces 20a, 20b, 24a, 24b. The threads 22 extend from the inside of the housing to the outside of the housing, in particular in a direction perpendicular to the conical connecting surfaces 20a, 20b, but oblique to the longitudinal axis of the vacuum pump, i.e. oblique to the axial direction 42 or oblique to the mounting plane 44.

[0063] In this case, the threads 22 are preferably arranged in a circumferentially equally distributed manner. For example, 2, 3, 4, 5 or more threads are provided. Furthermore, at least the extension 38 naturally has an internal thread which engages with the respective thread 22. One or more of the threads 22 may be a special thread with de-airing holes. Furthermore, for sealing purposes, additional O-rings may be provided, for example, in the gaps 48 (see also FIG. 6B).

[0064] This configuration of the connection between the flange part 10 and the housing part 12 results in a particularly compact or slim design of the pump housing, since the thread 22 or part of the parts 14, 16 do not extend beyond the connecting part 18. Furthermore, the flange part 10 can be easily and quickly replaced, which makes the pump versatile in use. At the same time, the pump housing has a particularly high stability, especially in the radial direction, in the region of the connection between the flange part 10 and the housing part 12, so that debris or the like cannot escape, for example in the event that a pumping component of the pump is destroyed during operation. This also increases the safety of the pump. Furthermore, the interaction of the complementary surfaces 20a, 20b, 20c, 20d with the gap 48 facilitates a vacuum-tight assembly of the flange part 10.

[0065] The embodiment shown in Figure 6B differs from the embodiment shown in Figure 6A mainly in that the connecting surfaces 20b and 24b of the mounting portion 14 face the inside of the support portion 16. Correspondingly, the connecting surfaces 20a and 24a of the support portion 16 face the outside of the mounting portion 14, and the screws 22 extend from the inside of the housing to the outside of the housing.

[0066] According to an alternative embodiment, not shown, the threads 22 extend perpendicular to the cylindrical connecting faces 24a, 24b, rather than perpendicular to the conical connecting faces 20a, 20b.

[0067] Furthermore, it is possible for some of the screws 22 to extend from the inside of the housing to the outside of the housing and other screws 22 to extend from the outside of the housing to the inside of the housing, for example, half of the screws 22 extending in this manner.

[0068] 7A shows a part of the pump housing in the region of the pump inlet of a vacuum pump according to the invention according to another embodiment. The mounting part 14 of the flange part 10 here has an annular surface 46a to which the extension part 38 connects. The extension part 38 has a cylindrical connecting surface 24a which extends substantially perpendicularly, i.e. in the axial direction 42, from the base 36 of the mounting part 14. The extension part 38 further has a conical connecting surface 24b which connects to the cylindrical connecting surface 24a and defines the end face of the extension part 38.

[0069] The support portion 16 of the housing part 12 has a conical connecting surface 20a to which an annular surface 46b connects. The annular surfaces 46a, 46b extend parallel to the mounting surface 44. The cylindrical connecting surfaces 24a, 24b extend perpendicular to the mounting surface 44, i.e. parallel to the axial direction 42, and have substantially the same height. The conical connecting surfaces 20a, 20b have essentially the same inclination with respect to the axial direction 42.

[0070] The flange part 10 is attached to the housing part 12 by means of a number of weld seams 40a, 40b, where the weld seam 40a on the inside of the pump is formed on the end face of the extension part 38 and the weld seam 40b on the outside of the pump is formed on the end face of the support part 16. The annular surfaces 46a, 46b and the cylindrical and conical connecting surfaces 20a, 20b, 24a, 24b abut against one another vacuum-tight, where again the centering of the flange part 10 on the housing part 12 during assembly is effected by the stops formed by the cylindrical connecting surfaces 20a, 20b.

[0071] In this example, the pump-interior weld seam 40a is located on the radially inner edge of the annular surfaces 46a, 46b, and the pump-exterior weld seam 40b is located on the radially outer edge of the conical connecting surfaces 20a, 20b. Since the conical connecting surface 20a of the support part 16 is slightly larger than the conical connecting surface 20b of the mounting part 14, the outer part of the conical connecting surface 20b of the mounting part 14 can be used to form the pump-exterior weld seam 40b.

[0072] This embodiment also offers the advantage that the diameter of the pump is defined by the diameter of the connecting portion 18. Furthermore, the welded seams 40a, 40b have an additional sealing function, further increasing the robustness of the entire pump housing.

[0073] The embodiment shown in Fig. 7B differs from the embodiment shown in Fig. 7A mainly in that the extension 38 has, instead of a conical connecting surface, an annular second surface 46c, which defines the end surface of the extension 38. Furthermore, the height of the cylindrical connecting surface 24a of the support part 16 is slightly higher than the height of the cylindrical connecting surface 24b of the mounting part 14. Correspondingly, a weld seam 40b on the outside of the pump is formed at the end surface of the extension 38 and at the point where the end surface 46c of the extension 38 abuts against the cylindrical connecting surface 24a of the support part 16. The difference in height of the cylindrical connecting surfaces 24a, 24b allows the accommodation of the weld seam 40b.

[0074] Moreover, the radial positions of the support portion 16 and the mounting portion 14 may be interchanged. In short, the extension portion 38 shown in Figures 7A and 7B may be located inside the pump instead of outside the pump, so that the weld seam 40a formed on the end surface 46a of the support portion 16 is located outside the pump, and the weld seam 40b formed on the end surfaces 20b, 46c of the mounting portion 14 is located inside the pump.

[0075] The embodiment shown in Figure 7C differs from the embodiment shown in Figures 7A and 7B mainly in that the mounting portion 14 has a recess or groove 34 for receiving an end portion of the support portion 16 instead of an extension portion 38. That is, the flange portion 10 is placed over the housing portion 12 and secured thereto by weld seams 40a, 40b.

[0076] In this case, the cylindrical connecting surface 24a preferably interacts with the support part 16 with the side surface of the recess 34, and the annular surface 46a interacts with the support part 16 with the bottom surface of the recess. In particular, the width of the recess 34 essentially corresponds to the width of the end portion of the support part 16, so that the centering of the flange part 10 is automatically achieved by introducing the support part 16 into the recess 34. In this case, the weld seams 40a, 40b, in addition to their fixing function, also serve to compensate for manufacturing tolerances.

[0077] The recess 34 may be formed in an end face of the support portion 16 instead of in the base 36 of the mounting portion 14. Correspondingly, the mounting portion 14 may have a complementary extension portion 38 that fits into the recess 34 of the support portion 16.

[0078] Furthermore, the number and / or location of the weld seams 40a, 40b may be varied as required (this also applies to the previous embodiment). For example, the flange portion 10 may be attached to the housing portion 12 by only one weld seam 40a, 40b formed on the inside or outside of the pump.

[0079] In the embodiment shown in Fig. 8, the mounting portion 14 has an annular surface 46b extending parallel to the mounting plane 44. The annular surface 46b is connected to an extension portion 38 extending from the base 36 generally perpendicular to the mounting surface 44. The extension portion 38 has, on its inside, from the base 36 toward the end face, a cylindrical first connecting surface 24e and a conical surface 50b connected thereto, and the conical surface 50b is connected to the cylindrical second connecting surface 24b. The connecting surfaces 24e and 24b of the mounting portion 14 face the outside of the support portion 16. The base 36 of the mounting portion 14 is formed without interruption when viewed in the axial direction 42.

[0080] Correspondingly, the support part 16 of the housing part 12 has an annular surface 46a which extends parallel to the mounting plane 44 and forms an end face of the support part 16. On the outside, the support part 16 further has a cylindrical first connecting surface 24c and a conical surface 50a which connects thereto and to which the cylindrical second connecting surface 26a connects. That is to say, the connecting surfaces 24c and 24a of the support part 16 face towards the inside of the mounting part 14. The conical surfaces 50a and 50b have the same inclination with respect to the axial direction 42, while the cylindrical connecting surfaces 24a to 24e extend parallel to the axial direction 42.

[0081] The cylindrical mating surfaces 24a, 24b of the support portion 16 and the mounting portion 14 have complementary threads 26a, 26b, respectively, which interlock with one another, i.e., the flange portion 10 is threaded onto the housing portion 12, specifically to an axial position where the annular surface 46b of the mounting portion 14 lies on the end face or annular surface 46a of the support portion 16.

[0082] At this position, the conical surfaces 50a, 50b of the support part 16 and the mounting part 14 form a gap 48 for compensating for manufacturing tolerances, since the cylindrical connecting surface 24c of the support part 16 is larger than the cylindrical connecting surface 24e of the mounting part 14. The cylindrical connecting surfaces 24c and 24e therefore provide an additional clearance fit at this position in the base 36. Optionally, an O-ring for additional sealing may be provided, for example at the interface between the annular surfaces 46a and 46b. This configuration of the connection between the flange part 10 and the housing part 12 is particularly user-friendly.

[0083] Similarly, it is also possible to select the geometric ratios so that the conical surfaces 50a, 50b of the support part 16 are in contact, leaving a gap between the annular surfaces 46a, 46b, in which an O-ring is inserted (optional).

[0084] 9A and 9B, a plurality of locking tabs 30 are formed on the inner side 28 of the extension portion 38 and an equal number of complementary bayonet grooves 32 are formed in the support portion 16. For example, two, three, four or five or more locking tabs 30 and bayonet grooves 32 are provided. The tabs 30 and grooves 32 are preferably equally distributed around the circumference of the housing portion 12 and the flange portion 10.

[0085] That is, the flange part 10 is attached to the housing part 12 by a bayonet connection. During assembly, the flange part 10 is first brought into an axial position in which the locking pieces 30 engage in the bayonet grooves 32 (see arrow in FIG. 9A). Following this, the flange part 10 is rotated until it hits, where the locking pieces 30 are located at one end of the bayonet groove. The flange part 10 then descends continuously into the housing part 12. This configuration of the pump housing is particularly economical and user-friendly.

[0086] Alternatively to this, the locking piece 30 may be formed on the outer surface of the support portion 16 and the bayonet groove 32 may be formed in the extension portion 38 .

[0087] Of course, the screws 22, the threaded elements 26a, 26b, the welded seams 40a, 40b and the bayonet connection may be combined as required. For example, the flange part 10 may be screwed to the housing part 12 according to one of the embodiments described with reference to Figures 6A, 6B and 8 and may additionally be fixed to the housing part 12 by one or more welded seams 40a, 40b. Correspondingly, the bayonet connection may be reinforced by one or more welded seams 40a, 40b. Furthermore, it is also feasible that the flange part 10 is welded to the housing part 12 according to one of the embodiments described with reference to Figures 7A to 7C and additionally fixed by means of the screws 22 and / or to the threaded parts 26a, 26b formed on the cylindrical connecting surfaces 24a, 24b. [Explanation of symbols]

[0088] 10 Flange part 12 Housing part 14 Mounting part 16 Support part 18 Connecting part 20a, 20b Cone connecting surface 22 Threaded elements 24a to 24e Cylinder joint surfaces 26a, 26b Threaded part 28 Inside of extension 30 Lock piece 32 Bayonet groove 34 Recesses / grooves 36 Base of mounting part 38 Extension of mounting part 40a, 40b Welded seam 42 Axial 44 Mounting plane 46a, 46b, 46c Annular faces 48 Gap 50a, 50b Cone surface 52 Outside of support part 111 Turbomolecular pump 113 Intake flange 115 Pump Inlet 117 Pump exhaust port 119 Housing 121 Lower part 123 Electronics Housing 125 Electric Motor 127 Accessory connection 129 Data Interface 131 Current supply connection 133 Ventilation Intake 135 Seal gas connection 137 Motor Room 139 Coolant Connection 141 Bottom surface 143 Screw 145 Bearing cover 147 Fixed hole 148 Coolant Line 149 Rotor 151 Rotation axis 153 rotor shaft 155 Moving blade 157 Stator blade 159 Spacer ring 161 rotor hub 163 Holbeck Rotor Sleeve 165 Holbeck Rotor Sleeve 167 Holbeck Sterling Sleeve 169 Holbeck Sterling Sleeve 171 Holbeck Gap 173 Holbeck Gap 175 Holbeck Gap 179 Connection Channels 181 Rolling bearings 183 Permanent magnet type magnetic bearing 185 Splash Nut 187 Disc 189 Insert 191 Rotor side bearing half 193 Stator side bearing half 195 Ring Magnet 197 Ring Magnet 199 Bearing clearance 201 Support part 203 Support part 205 Radial Struts 207 Cover Elements 209 Support Ring 211 Fixing ring 213 Disc spring 215 Emergency or safety bearings 217 Motor Stator 219 Intermediate Room 221 Wall section 223 Labyrinth Seal

Claims

1. A vacuum pump, in particular a turbomolecular pump, a pump housing having a housing portion (12) for accommodating pumping components of the vacuum pump and a flange portion (10) defining a mounting plane (44), the flange portion (10) being provided for connecting the vacuum pump to a recipient, the flange portion (10) being preferably formed integrally with the pump; The housing portion (12) and the flange portion (10) are configured as separate components, The housing portion (12) has a support portion (16), The flange portion (10) has a connecting portion (18) connectable to the recipient and an attachment portion (14) connected to the support portion (16), the attachment portion (14) being configured without interruption at least in a direction (42) perpendicular to the attachment plane (44). Vacuum pump.

2. 2. A vacuum pump according to claim 1, wherein the flange portion (10) and the housing portion (12) are made of different metals, in particular the housing portion (12) is made of aluminium and / or the flange portion (10) is made of stainless steel.

3. the mounting portion (14) has a base (36) to which the connecting portion (18) is connected, the base (36) being preferably configured without interruption; The mounting portion (14) has an extension portion (38) protruding from the base (36), the extension portion (38) extending generally perpendicular to the mounting plane (44).

3. A vacuum pump according to claim 1 or 2.

4. the mounting portion (14) has a base (36) to which the connecting portion (18) is connected, the base (36) being preferably configured without interruption; The mounting portion (14) has a recess (34) formed in the base (36) that at least partially accommodates the support portion (16). A vacuum pump according to at least one of the preceding claims.

5. 5. A vacuum pump according to claim 1, wherein the mounting portion (14) and the support portion (16) each have at least one connecting means for centrally connecting the flange portion (10) and the housing portion (12), the connecting means being complementarily configured.

6. 6. A vacuum pump as claimed in claim 5, wherein the coupling means comprises conical connecting surfaces (20a, 20b).

7. 7. A vacuum pump according to claim 5 or 6, wherein the coupling means comprises cylindrical connecting surfaces (24a, 24b, 24c, 24d, 24e).

8. 8. A vacuum pump according to claim 5, wherein the coupling means of the mounting portion (14) are arranged on the outside of the mounting portion (14) or face the outside of the mounting portion (14), in particular the coupling means are arranged on the extension portion (38).

9. 9. A vacuum pump according to at least one of claims 5 to 8, wherein the coupling means of the mounting portion (14) are arranged on the inside of the mounting portion (14) or face the inside of the mounting portion (14).

10. 10. A vacuum pump according to at least one of claims 5 to 9, wherein the coupling means comprises complementary threaded portions (26a, 26b).

11. 11. Vacuum pump according to at least one of claims 5 to 10, wherein the flange portion (10) is attached to the housing portion (12) by means of at least one screw (22).

12. At least one of the threads (22) extends from the outside of the housing to the inside of the housing, or at least one of the threads (22) extends from the inside of the housing to the outside of the housing, In particular, at least one said thread (22) extends in a direction perpendicular to the respective connecting surface (24a, 24b, 24c, 24d, 24e) and / or at least one said thread (22) extends obliquely to the longitudinal axis of the vacuum pump.

12. A vacuum pump according to claim 11.

13. 13. A vacuum pump according to at least one of the preceding claims, wherein the flange portion (10) is attached to the housing portion (12) by at least one weld seam (40a, 40b) connecting the support portion (16) and the mounting portion (14) to one another inside and / or outside the pump.

14. the weld seam (40a, 40b) is formed on an end face of the extension portion (38) and / or on an end face of the support portion (16); and / or the weld seam (40a, 40b) is formed in the opening of the recess (34) of the base (36) or in the opening of the recess of the support part (16); 14. A vacuum pump according to claim 13.

15. The flange portion (10) is attached to the housing portion (12) by a bayonet connection, the connection means comprising at least one locking piece (30) and at least one bayonet groove (32); In particular, a plurality of locking pieces (30) and bayonet grooves (32) are provided, which are distributed around the circumference of the housing portion (12) and the flange portion (10). A vacuum pump according to at least one of claims 5 to 14.

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