Apparatus and method

Abstract

To provide an apparatus that includes active components, such as actuators and sensors, that are placed within a vacuum environment or other non-atmospheric environments in which a robotic manipulator arm may operate, and a method.SOLUTION: A substrate processing apparatus having a vacuum chamber includes a substrate transport apparatus 12 having, inside the vacuum chamber, an arm assembly 25 including links 22, 24 and an end unit 26, and a drive section 18 for moving the arm assembly, a first non-contact communication device located outside the chamber, and a second non-contact communication device located inside the chamber and connected to a robot. The first non-contact communication device transmits a data signal to the second non-contact communication device in a non-contact manner, and the data signal received by the second non-contact communication device is used to control the movement of the drive section.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] FIELD OF THE DISCLOSURE Exemplary and non-limiting embodiments of the present application relate generally to robots, and more particularly to robots for moving substrates.

[0002] Conventional manufacturing techniques for semiconductor integrated circuits and flat panel displays typically involve processing silicon wafers, called substrates, and glass panels in fully automated vacuum cluster tools. A typical cluster tool contains a circular vacuum chamber with load locks and multiple process modules connected in a star-like configuration around the periphery of the chamber. The tool is typically operated by a robotic manipulator (robot) located near the center of the chamber, which cycles substrates from the load locks, through the process modules, and back to the load locks. Another robot may be located in an atmospheric transfer module that serves as an interface between the load locks of the vacuum chamber and standard load ports operated by an external transport system. Abstract

[0003] The following summary is provided by way of example only and is not intended to limit the scope of the claims of this application. An example of the device disclosed herein is chambers and; a robot having a robotic arm and a robotic motor configured to move the robotic arm; a robot drive configured to connect the robot to the chamber and move the robot horizontally within the chamber; a first non-contact communication device located outside the chamber; a second non-contact communication device located inside the chamber and connected to the robot; Equipped with the first contactless communication device is configured to contactlessly transmit a data signal to the second contactless communication device; the robot is configured to use the data signals received by the second non-contact communication device to control movement of the robot motors; The first contactless communication device is configured to contactlessly transmit the data signal from outside the chamber through the chamber to the second contactless communication device inside the chamber.

[0004] Another example of the device disclosed herein is chambers and; Robot motors and; Robot drive and; a robotic arm connected to the robotic motor; a first portion of a communication coupling connected to the robot motor; Equipped with the robot motor is connected to the chamber by the robot drive, the robot drive configured to move the robot motor horizontally within the chamber; the robotic motor configured to move the robotic arm; the first portion of the communication coupling is configured to move horizontally with the robotic motor within the chamber; the first portion of the communication coupling is configured to transmit movement signals to the robotic motor; the first portion of the communication coupling is configured to communicate contactlessly with a second portion of the communication coupling located outside the chamber; the first portion of the communication coupling is configured to communicate contactlessly with the second portion of the communication coupling for different horizontal positions of the first portion of the communication coupling within the chamber; The second portion of the communication coupling is configured to transmit a wireless data signal from outside the chamber, through the chamber, to the first portion of the communication coupling inside the chamber.

[0005] An example of the method disclosed herein includes: connecting a robot to the chamber via a robot drive; connecting a first non-contact communication device outside the chamber to the chamber; connecting a second contactless communication device to the robot; Including, the robot drive configured to move the robot horizontally within the chamber, the robot comprising a robot arm and a robot motor, the robot motor configured to move the robot arm; The first contactless communication device is configured to contactlessly transmit data from outside the chamber through the chamber to the second contactless communication device inside the chamber, and the robot is configured to use the data received by the second contactless communication device to control movement of the robot motors.

[0006] Another example of a method disclosed herein includes disposing a robot in a chamber, the method comprising: the robot is connected to the chamber by a robot drive, the robot drive configured to move the robot horizontally along a linear path within the chamber, the robot comprises a robot arm and a robot motor, the robot motor configured to move the robot arm, a first non-contact communication device is located outside the chamber and a second non-contact communication device is located inside the chamber and connected to the robot, the method comprising: transmitting data contactlessly from outside the chamber to inside the chamber through the chamber from the first contactless communication device outside the chamber to the second contactless communication device; controlling movement of the robot motor at various horizontal positions of the robot along the linear path within the chamber based on the data transmitted from the first non-contact communication device to the second non-contact communication device; Includes. [Brief description of the drawings]

[0007] The foregoing aspects and other features are explained in the following description, which refers to the accompanying drawings, in which:

[0008] [Figure 1] 1 is a schematic diagram of a substrate processing apparatus.

[0009] [Diagram 2] 2 is a top view of a substrate transfer device in the substrate process apparatus shown in FIG.

[0010] [Diagram 3] A schematic diagram shown in FIG. 1 showing the interface between the vacuum-compatible module and the atmospheric module.

[0011] [Figure 4] FIG. 2 is a perspective view of a communication / power flexure.

[0012] [Diagram 5] FIG. 13 is a perspective view of another communication / power supply.

[0013] [Figure 6] FIG. 2 is a perspective view of the cooling system.

[0014] [Figure 7] 3 is a schematic diagram showing parts of the device shown in FIG. 2;

[0015] [Figure 8] 3 is a schematic diagram showing a cooling system for the device shown in FIG. 2.

[0016] [Figure 9]3 is a schematic diagram showing some of the connections of the parts of the device shown in FIG. 2.

[0017] [Figure 10] 3 is a schematic diagram showing hermetic encapsulation of the device shown in FIG. 2.

[0018] [Figure 11] 1. FIG. 4 is a top view similar to FIG. 2, showing another substrate transfer apparatus in the substrate process apparatus shown in FIG.

[0019] [Figure 12] 1. FIG. 4 is a top view similar to FIG. 2, showing yet another substrate transport apparatus in the substrate process apparatus shown in FIG.

[0020] [Figure 13] 1. FIG. 4 is a top view similar to FIG. 2, showing yet another substrate transport apparatus in the substrate process apparatus shown in FIG.

[0021] [Figure 14] 1. FIG. 4 is a top view similar to FIG. 2, of yet another substrate transport apparatus in the substrate processing apparatus shown in FIG.

[0022] [Figure 15] 15 is a schematic top view of the apparatus shown in FIG. 14 in a vacuum chamber.

[0023] [Figure 16A] 1A-1D are top views of different types of end effectors. [Figure 16B] 1A-1D are top views of different types of end effectors.

[0024] [Figure 16C] 16B is a schematic top view of the arm of FIG. 2 with the end effector shown in FIG. 16A in a vacuum chamber.

[0025] [Figure 17] 9 is a schematic cross-sectional view showing the cooling system of FIG. 8 installed in the apparatus shown in FIG. 2.

[0026] [Figure 18] 18 is a schematic cross-sectional view similar to FIG. 17, of another exemplary embodiment.

[0027] [Figure 19] 1 is a schematic top view of an exemplary substrate transport apparatus.

[0028] [Figure 20] 1 is a schematic top view of an exemplary substrate transport apparatus.

[0029] [Figure 21] 21 is a schematic cross-sectional view of the device shown in FIG. 19 taken along line 21-21.

[0030] [Figure 22] 22 is a schematic cross-sectional view of the device shown in FIG. 19 taken along line 22-22.

[0031] [Diagram 23] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 24] 1 is a schematic top view of an exemplary substrate transport apparatus.

[0032] [Diagram 25] 25 is a schematic cross-sectional view of the device shown in FIGS. 23-24.

[0033] [Figure 26] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 27] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 28] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 29] 1 is a schematic top view of an exemplary substrate transport apparatus. [Diagram 30] 1 is a schematic top view of an exemplary substrate transport apparatus. Detailed Description of the Embodiments

[0034] Reference is now made to Figure 1, which shows a simplified top view of an exemplary substrate transport apparatus 10 including a substrate transport device 12. The present invention will be described with reference to the embodiments shown in the accompanying drawings, but it should be understood that the present invention may be embodied in a variety of other embodiments and forms, and any suitable size, shape, material, and type of components may be used.

[0035] The substrate processing apparatus 10 includes a substrate transport apparatus 12 as well as a substrate cassette lift apparatus 16 that connects to a number of substrate processing chambers 14 and a vacuum chamber 15. The transport apparatus 12 is disposed within at least a portion of the chambers 15 and is configured to transport planar substrates, such as semiconductor wafers or flat panel displays, between the chambers 14 and the lift apparatus 16. In alternate embodiments, the transport apparatus 12 may be used in any suitable type of substrate processing apparatus.

[0036] Conventional vacuum environment robotic manipulators usually have a drive unit that houses all the active parts of the robotic manipulator. These active parts are the actuators, sensors, and upper arms mentioned above, and are driven by the drive unit. The arms are usually passive mechanisms and do not have active parts such as actuators and sensors. This is mainly due to the difficulties in outgassing, power distribution, and heat removal in a vacuum environment.

[0037] In conventional vacuum environment robotic manipulators, the arms of the robotic manipulators are passive mechanisms, so the number of independently driven links is limited by the number of motion axes provided by the drive unit, and is also constrained by the complexity of transmitting actuation torque to the independent links of the arms, which limits the arm configurations that are actually used to those mentioned above, and may also limit the range of motion and throughput performance of existing vacuum environment robotic manipulators.

[0038] Additionally, air-environment robotic manipulators often utilize various substrate grippers, while vacuum-compatible robots typically hold the substrate during processing solely through friction between the substrate and the end effector of the robot. The inertial forces acting on the substrate must not exceed the holding force securing the substrate to the end effector to prevent the substrate from slipping off. Therefore, the acceleration of the substrate must be limited accordingly, which in turn limits the throughput of the tool (number of substrates processed per unit time). Thus, grippers such as tip clamping mechanisms or electrostatic holding configurations are required. Such grippers can remove the constraint on acceleration to prevent substrate slippage. It is also desirable to place sensors on the end effectors of the robot to assist with substrate alignment, guide the process, and similar actions.

[0039] This allows advantageous power and signal delivery to the arms and end effectors of vacuum-compatible robots. Traditional configurations such as slip-ring and rolling-contact rotary couplings and service loops are designed for atmospheric use and have been successfully used in atmospheric robotics. However, these configurations are difficult to use under vacuum conditions due to their performance (cold welding) and outgassing issues.

[0040] In summary, because the robot manipulator arm is a passive mechanism, the number of independently driven links is limited by the number of axes of motion provided by the drive unit and the complexity of transmitting actuation torque to the independent links of the arm. Furthermore, the substrate holding and sensor sensing configurations have not been used in vacuum environments in practice. These circumstances limit the range of motion, throughput performance, and repeatability of substrate placement of existing vacuum robot manipulators. It would therefore be advantageous to provide a robotic system with active components, such as actuators and sensors, that are located within a vacuum environment or other non-atmospheric environment in which the robot manipulator arm may operate.

[0041] Reference is now made to FIG. 2. In FIG. 2, a substrate transport apparatus 12 (or vacuum compatible robot system) having improved features over conventional apparatus is shown. The substrate transport apparatus 12 includes a drive section 18 and a frame section 20. The frame section 20 includes a member including at least two links 22, 24 forming an arm assembly 25 and an end effector 26. The drive section 18 has two rotation axes. The arm assembly 25 is connected to the drive section 18. The arm assembly 25 may include a first link 22, a second link 24, and an end effector 26. The first link 22 is directly connected to the first rotation axis of the drive section 18. The second link 24 is connected to the first link 22 via a first rotation joint 28. The end effector 26 is connected to the second link 24 via a second rotation joint 30. The second link 24 is driven via a belt / band. The belt / band may include a first pulley 34 attached to the second rotation axis of the drive section 18. A first belt / band 36 and a second pulley 38 are attached to the second link 24 of the arm assembly 25. The end effector 26 is constrained to be generally radially oriented relative to the drive 18 via another belt / band arrangement, which may include a third pulley 42 rotatably coupled to the first link 22, and a second belt / band 44 and a fourth pulley 46 attached to the end effector 26. In various other exemplary embodiments, the features disclosed herein may be provided by any suitable drive mechanism, actuator, sensor, or other mechanism, including any of the following disclosures, or combinations thereof: U.S. Provisional Application No. 61 / 627,030, filed September 16, 2011, and U.S. Provisional Application No. 61 / 683,297, filed August 15, 2012, which are incorporated herein by reference in their entirety.

[0042] The third pulley 42 is movable in increments relative to the first link 22 of the arm assembly by a first actuator 48. The first actuator 48 can adjust the orientation of the third pulley 42 relative to the first link 22 of the arm assembly within a predetermined range. The first actuator 48 is preferably self-locking so that it does not reverse drive when torque is applied to the third pulley. For example, the first actuator 48 may include an electric motor with a lead screw mechanism or worm arrangement, a piezoelectric actuator, or other suitable actuator arrangement. The first actuator 48 may also include a position measuring device that determines the angular orientation of the third pulley 42 relative to the first link 22 of the arm assembly. The active components of the first actuator, such as the stator of the electric motor, may or may not be fully or partially enclosed within the airtight enclosure 50. Additionally, the active components may or may not be separated from the passive components, such as the rotor of the electric motor, by a separating wall. The first actuator 48 is connected to a cooling subsystem, such as an exemplary cooling subsystem described below.

[0043] The first actuator 48 is controlled by a first controller 52. The first controller 52 may be connected to the first link 22 of the arm assembly. The first controller 52 may be housed in the same airtight container 50 as the first actuator 48, or may be located in a separate airtight container (not shown). The first controller 52 is connected to a cooling subsystem, which may be one of the exemplary cooling subsystems described below. The first controller 52 may process signals output by a position sensing device in the first actuator 48 and output control signals to the first actuator 48, for example for the purpose of energizing windings of an electric motor incorporated in the actuator. The first controller 52 may be powered and in communication with a robot controller 54 via a power distribution and communication subsystem, which is described in more detail below.

[0044] The power distribution and communication subsystem may include an electrical rotary coupling 56, 57, 58 disposed at or associated with each rotary joint of the robotic manipulator 25. The rotary couplings 56, 57, 58 may transfer power from the robot controller 54 to the first control 52 and other active components of the arm assembly 25, such as the gripper 60 and sensor 62 of the end effector 26. Examples of electrical rotary couplings according to one or more embodiments of a vacuum compatible robotic arm system are described below.

[0045] The end effector 26 may include an active substrate gripper 60. The active substrate gripper 60 may utilize, for example, an electrically actuated tip clamping mechanism, an electrostatic holding arrangement, or the like. The gripper may be connected to a power distribution and communication subsystem as well as a cooling subsystem of the robot arm, which is described in more detail below. An arm system according to one or more embodiments may utilize rotary electrical couplings 56-58 that provide power and / or signals to the various rotary joints. The electrical couplings 56-58 may be, for example, of the continuous rotation type or limited rotation type. The gripper may have features described in U.S. Provisional Application No. 61 / 629,838, entitled "Vacuum Compatible Robot Gripper," filed Nov. 29, 2011, which is incorporated herein by reference in its entirety. However, any suitable gripper may be provided in other exemplary embodiments.

[0046] One example of a continuous rotary coupling may be based on the principle of electromagnetic induction. As shown in FIG. 3, an exemplary continuous rotary coupling 56 may have an arrangement of an atmospheric module 64 and a vacuum-compatible module 66, where the two modules may interact across a gap 68. A separation wall 70 may be present in the gap separating the environment in which the atmospheric module 64 resides from the environment in which the vacuum-compatible module 66 resides. The two modules 64, 66 may have one or more rotary transformers. To provide power and / or signals from the atmospheric environment to the vacuum environment, a primary winding of the rotary transformer may be located in the atmospheric module 64 and a corresponding secondary winding may be located in the vacuum-compatible module 66. To transmit signals from the vacuum environment to the atmospheric environment, a primary winding of the rotary transformer may be located in the vacuum-compatible module 66 and a corresponding secondary winding may be located in the atmospheric module 64. Typically, the atmospheric module resides in an atmospheric environment and the vacuum module resides in a vacuum or non-ambient environment. The vacuum-compatible module 66 may include an airtight container 72 that encloses the components of the vacuum-compatible module, such as to prevent outgassing. The vacuum compatible module 66 may be connected to a cooling subsystem of the robot arm, such as the exemplary cooling subsystem described below.

[0047] Another example of a continuous rotation coupling according to one or more embodiments of the present invention may combine electromagnetic induction principles for power supply and a wireless network-based configuration for communication.

[0048] Next, an embodiment of a limited rotational flexure coupling is shown in FIG. 4. In this embodiment, the power and / or communication signals are each carried on one or more conductors 73 (see FIG. 2). A portion of the conductors comprises a helical coil flexure 74. An end 76 of the helical coil flexure 74 may be connected to one part of the robot, preferably via an insulator 78. Another end 80 of the helical coil flexure 74 may be connected to another part of the robot, preferably via an insulator. The two connected parts may be connected through one of the revolute joints. A plurality of helical coil flexures 74 may be arranged substantially concentrically at the revolute joint to provide paths for multiple power sources and / or communication signals. The individual helical coil flexures may be wound in opposite directions so that the restoring forces associated with the individual helical coil flexures are balanced as much as possible regardless of the displacement of the revolute joint. An insulating cylinder 82 may be used between the individual helical coil flexures to eliminate the risk of short circuits between adjacent helical coil flexures. By way of example, two spiral coil flexures are shown in FIG. 4 for clarity of illustration only, and any suitable number of spiral coil flexures may be used, such as one, two or more.

[0049] Another embodiment of the limited rotation flexure coupling of the present invention is shown in FIG. 5. In this embodiment, each of the power and / or communication signals may be carried by a spiral coil flexure 74'. Two spiral coil flexures 74' are shown in FIG. 5. An end 76' of the spiral coil flexure 74' may be connected to one part of the robot, preferably via an insulator. Another end 80' of the spiral coil flexure may be connected to another part of the robot, preferably via an insulator. The two connected parts may be connected via a rotary joint. Multiple spiral coil flexures may be stacked to provide paths for multiple power sources and / or communication signals. The individual spiral coil flexures may be wound in opposite directions so that the spring forces associated with the individual spiral coil flexures are balanced as much as possible regardless of the displacement of the rotary joint. Insulating disks may be used between the individual spiral coil flexures to eliminate the risk of shorting between adjacent spiral coil flexures. Although two spiral coil flexures are shown in FIG. 5, this is for clarity of illustration only and any suitable number of spiral coil flexures may be used.

[0050] The number of helical or spiral coil flexures used in a single rotary coupling may relate to the number of power or communication signals transmitted through the rotary joint. A single signal may be distributed across multiple helical or spiral coil flexures to reduce current density or provide redundancy.

[0051] The purpose of a cooling subsystem that may be used in accordance with a vacuum-compatible robot arm assembly is to remove heat generated by active components incorporated in the robot arm assembly. Heat removal is more difficult in a vacuum than in air due to the lack of convection from the surrounding air. Heat conduction is also limited by the long path from the heat source to the actuators, and thermal radiation is only of limited effectiveness at low temperatures.

[0052] A cooling subsystem for use in a vacuum compatible robotic arm system may include, for example, a heat sink connected to the active components that generate heat, a radiator exposed to the exterior of the robotic arm assembly, and a thermoelectric cooler connected to the heat sink and radiator. FIG. 6 shows an example of a thermoelectric cooler 84. The thermoelectric cooler 84 may be a solid-state active heat pump that consumes electrical energy to move heat from the heat sink side (cold side) 86 to the radiator side (hot side) 88 of the device against a temperature gradient (cold to hot). The primary advantages of a thermoelectric cooler are that it has no moving parts or circulating fluids, and offers flexibility in choosing a small form factor.

[0053] Alternatively, the cooling subsystem may utilize any suitable heat pump and a particular fluid, either liquid or gas, that circulates through a heat sink that connects to the heat-generating active components of the arm assembly and is exhausted from the system or flows into a radiator, which is preferably integrated into the robot drive and may be exposed to the atmosphere. The fluid may be circulated through the joints of the robot system in a vacuum-compatible housing arranged similarly to the flexures shown in Figures 4 and 5.

[0054] Reference is now also made to Figures 7 and 8, in which the substrate transport apparatus 12 is shown in different schematic views. Although the substrate transport apparatus 12 has been described in relation to a vacuum robot, any suitable substrate transport apparatus may be provided having the features as described herein, whether for atmospheric or otherwise. The substrate transport apparatus 12 includes a controller 54, a drive 18, and an arm 25, and is configured to transport a substrate S. The controller 54 may include a processor, memory, power amplifiers, etc. The arm 25 is shown as a SCARA type arm and is driven by the drive 18. Although the substrate transport apparatus 12 has been described in relation to a two-link arm, any suitable number of links may be used. Additionally, any suitable number of arms may be used. Additionally, any suitable combination of rotational and / or linear axes may be provided on any suitable arm.

[0055] In the illustrated embodiment, the arm 25 has three rotational axes 90, 92, 94. Each axis has a respective position detector 96, 98, 100 directly associated therewith. The position detector may be optical, electromagnetic, or any suitable position detector. The position detector 96, 98, 100 may be incremental (relative), absolute, or a combination of both. The position detector 96, 98, 100 may be used in conjunction with another position detector in the drive shaft of the drive 18. The position detector 96, 98, 100 interfaces with the controller 54 to determine the position of the joints 92, 94, 98. This is in contrast to a robot drive that does not have position detectors directly associated with the joints. Alternatively, not all joints may have position detectors. The position detector 96, 98, 100 may interface with the controller 54 using a signal sent through the arm. The signal may be electrical, optical, or otherwise. Alternatively, wireless or other suitable contactless communication may be provided.Here, hysteresis is not a factor in determining the positioning accuracy of substrate transport apparatus 12 which makes direct position measurements of each joint.

[0056] The drive 18 may further include a position sensing device separate from the motor. The controller 54 uses a control algorithm in conjunction with the drive 18 and the position sensing devices 96, 98, 100 to minimize vibrations in the payload S and maximize repeatability of the position of the payload S when picking and placing it. Temperature sensing devices 102, 104, 106 may also be connected to the links 22, 24, 26, respectively, to sense the temperature at one or more locations on each link. The temperature sensing devices 102, 104, 106 may further be connected to the controller 54 to factor in thermal effects such as thermal expansion and thermal deflection when determining the position of the end effector 26. In addition to or alternatively to the temperature sensing devices 102, 104, 106, a vibration sensing device 108 and / or a deflection sensing device 110 may be provided in connection with the controller 54 to monitor vibrations and / or to factor deflection into positioning and smoothing measurements. In alternative exemplary embodiments, any of the devices may be attached to any suitable component. Such devices may or may not be heat sinks. In another embodiment, each device may be connected to one or more controllers, such as controller 52, in one or more links.

[0057] Reference is now also made to FIG. 8, which illustrates the cooling subsystem of the substrate transport apparatus 12 of FIG. 2. The drive 18 is a two-axis drive. The drive 18 includes a vertical drive 120 and a bellows 122, which are connected to the vacuum chamber 15. The drive 18 also includes a rotary drive 126 with a stator connected to a base 128 and the bellows 122. The rotary drive 126 directly rotates the link 22 and may include a gear drive or direct drive motor, a positioning encoder, and a power coupling. The power coupling may be a non-contact rotary power coupling or any suitable power coupling for powering the link 22. Here, the power coupling may be a non-contact inductive transformer, and power and / or communication signals may be provided in a non-contact manner. Alternatively, power and / or data may be transmitted in a contact manner or by other suitable slip rings or couplings. The drive 18 also includes a non-contact optical feedthrough 130 with first and second fiber optic channels 132, 134. The fiber optic channels provide high speed communication to the controller 52 of the link 22. Here, the controller 52 may include optical devices, Ethercat, or other suitable converters. Alternatively, the converters and feedthroughs 130 may be inductive, for example couplers that carry both power and CAN or other high frequency signals or data. These may be used with wires, flexures, or other means.

[0058] A suitable non-contact optical feedthrough may use a fixed grin lens and a fixed mirror. An example of such a feedthrough is provided by Moog Components Group, but for vacuum applications. Alternatively, any suitable coupling or feedthrough may be used. Here, non-contact fiber optic high speed communication is connected to a non-contact rotary power supply controller 52, which is required to drive the arm 25. In addition to the high speed communication coupling, a non-contact inductive power coupling may also be provided. The drive 18 may further include a heat sink 140 or 80 on the air side and a thermoelectric cooler 142 on the vacuum or air side. A heat sink 144 is connected to the base 128. The heat sink 144 may include a series of concentric tubes 145 having high emissivity. Similarly, the heat sink 146 is connected to a thermoelectric cooler 148, which is connected to the link body 22. The heat sink 146 includes a series of concentric tubes 147 having high emissivity, alternating with the tubes 145 of the sink 144. Thus, the coolers 142 , 148 operate to transfer heat from the link body 22 through the radiative cooling connections 144 , 146 and dissipate it using the sink 140 .

[0059] Similarly, any joint may utilize such thermal coupling. Alternatively, any suitable heat pump may be used, such as a phase change heat pump that cools active components and heats any suitable radiator to very high temperatures. Since heat dissipation is proportional to the fourth power of temperature, such a heat pump allows for greater heat transfer efficiency over smaller surface areas. Also, heat may be dissipated to the outside of the arm, as opposed to heat sink cooling or a series of thermal couplings. For example, the mechanisms described above may be used. Alternatively, closed loop cooling circuits may be provided within individual sections of the robot, such as the links of the arm. By way of example, such circuits may be heat pumps similar to those used in computers. Such heat pumps may be fully sealed to be substantially leak-free and out-gassing-free. Alternatively, in other exemplary embodiments, there may be no active cooling or cooling equipment.

[0060] Couplings 144, 146 may be made of coated aluminum, such as aluminum nitride ceramic, or may be made of any suitable material. Module 136 may be a thermal sink or housing for cooler 148, link body 22. Module 136 may contain control and motor drive circuitry, a position coding read head, and inputs and outputs for external devices. Such external devices may be a thermoelectric cooler 148, another read head, a tip grip actuator, or other devices.

[0061] For example, see FIG. 9. The encoder 150 may be directly connected to the wrist joint 30 associated with the end effector 26 and coupled to a read head associated with the module 52. Similarly, the edge detection and edge grip and placement devices 62, 60 may be connected to the end effector 26 and associated with the module 52. In the described embodiment, an encoder may be provided at some or each of the joints, and a motor may be provided at some or each of the joints. A combination of motor, encoder and controller may be provided at some or each of the joints. In alternative embodiments, components such as the module 52 may be exposed or encapsulated. If encapsulated, they may be encapsulated in a hermetically sealed metal enclosure, the link body 22, a partially metal enclosure, or a combination thereof. Power and communication may be provided using cables and fixed feedthroughs, non-contact magnetic slip rings, contact slip rings, through separate bearings, flexures, or other means, or a combination thereof. Heat sinking may be by radiative cooling, convection, or conduction. For example, the coolant may pass through the feedthroughs, or may be stationary or circulating. In another embodiment, one or more of the shafts may have feedthroughs, such as magnetic fluid seals or other suitable seals. In another embodiment, the drive section 18 may have multiple links, concentric or offset, that provide one or more or all of the independently driven shafts. In addition, there may be more or fewer coolers. For example, multiple thermoelectric coolers may not be provided, or additional thermoelectric coolers may be provided. Additionally, a heat pump may be provided to move heat from one part of the arm or drive section to another for dissipation.

[0062] Reference is now also made to FIG. 10. In FIG. 10, an airtight vessel / enclosure 50 is shown. In this embodiment, the airtight enclosure encapsulates the actuator 48 and at least a portion of the control 52 and the sensor 98. In other embodiments, one or more of these components may be included. Each component 48, 52, 98 has a power and / or communication conductor 73A, 73B, 73C, respectively, which connects to the conductor 73 through a seal 75 or the like of the airtight enclosure 50. The bodies 73A, 73B, 73C may be electrical and / or optical. The enclosure 50 protects the interior of the vacuum chamber 15 from gases or contaminants from the components 48, 52, 98, which would otherwise reduce the vacuum in the vacuum enclosure 15. Alternative exemplary embodiments may or may not use an airtight enclosure. Alternative exemplary embodiments may or may not use an airtight enclosure. For example, a portion of the motor or a portion of the sensor may be exposed to the vacuum, the entire motor or sensor may be exposed, or the entire motor or sensor may be sealed within an enclosure, and this configuration is applicable to any type of device that can be enclosed in an airtight enclosure.

[0063] Reference is now also made to FIG. 11, which illustrates another exemplary embodiment of a vacuum compatible robotic arm system, showing a single arm with two links 22, 24 and a pivoting end effector 25. In this example, the robotic system may include a drive section with at least two rotational axes and an arm assembly coupled to the drive section. The arm assembly may include a first link 22, a second link 24, and an end effector 26. The first link is directly connected to a first rotational axis of the drive section 18, the second link 24 is connected to the first link through a first rotary joint, and the end effector is connected to the second link through a second rotary joint. The second link 24 may be driven via a belt / band. The belt / band may include a first pulley 34 attached to a second rotational axis of the drive section 18. The first belt / band 36 and second pulley 38 may be attached to the second link of the arm assembly.

[0064] The end effector 26 may be actuated by a first actuator 48. The first actuator may control the orientation of the end effector 26 relative to the second link 24 of the arm assembly. For example, the first actuator 48 may comprise an electric motor, a piezoelectric actuator, or any other suitable actuator configuration. The first actuator 48 may also comprise a position measurement device that determines the angular orientation of the end effector 26 relative to the second link 24 of the arm assembly. The active components of the first actuator, such as the stator of the electric motor, may be housed in an airtight container 50 and may be separated from the passive components, such as the rotor of the electric motor, by a separation wall. The first actuator may be connected to a cooling subsystem, such as the chiller described above.

[0065] The first actuator 48 may be controlled by a first controller 52. The first controller 52 may be connected to a second link of the arm assembly. The first controller may be housed in the same airtight container 50 as the first actuator, or may be located in a separate airtight container. The first controller 52 may be connected to a cooling subsystem, such as the exemplary cooling subsystem described above. The first controller 52 may process a signal output by the position sensing device 100 in the first actuator 48 and output a control signal to the first actuator 48, for example, to energize a winding of an electric motor incorporated in the actuator. The first controller may be powered via a power distribution and communication subsystem 73 and may be able to communicate with the robot controller 54.

[0066] The power distribution and communication subsystem may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. Rotary couplings 56, 57, 58 may transfer power from the robot controller 54 to the first control 52 and other active components of the arm assembly 25, such as the gripper 60 and sensors 62 of the end effector 26.

[0067] Another exemplary embodiment of a vacuum compatible robot arm system is shown in FIG. 12. In this example, the robot system may include a drive 18 having at least two rotational axes and an arm assembly 1225 coupled to the drive. The arm assembly may include a first link 22, a second link 24, and two end effectors 26A and 26B, which are referred to as the first end effector and the second end effector, respectively. The first link 22 may be directly connected to the first rotational axis of the drive 18, and the second link 24 may be coupled to the first link via a first rotary joint 28. The first and second end effectors 26A and 26B may be coupled to the second link 24 via a second rotary joint 30 and a third rotary joint 31, respectively. The second link 24 may be driven via a belt / band. The belt / band may include a first pulley 34 attached to the second rotary axis of the drive. The first belt / band 36 and the second pulley 38 may be attached to the second link 24 of the arm assembly 1225 .

[0068] The first end effector 26A may be actuated by a first actuator 48A. The first actuator may control the orientation of the first end effector relative to the second link of the arm assembly. Similarly, the second end effector 26B may be actuated by a second actuator 48B. The second actuator may control the orientation of the second end effector 26B relative to the second link 24 of the arm assembly. For example, the first and second actuators 48A, 48B may comprise electric motors, piezoelectric actuators, or other suitable actuator configurations. The first and second actuators 48A, 48B may also comprise position measuring devices that determine the angular orientation of the corresponding end effector relative to the second link of the arm assembly. The active components of the first and second actuators, such as the stator of the electric motor, may be housed in an airtight container 50 and may be separated from the passive components, such as the rotor of the electric motor, by a separating wall. A single airtight container may be used for both actuators 48A, 48B. Alternatively, each actuator may be housed in its own airtight container. The first and second actuators may be connected to a cooling subsystem, such as the exemplary cooling subsystems described above.

[0069] The first and second actuators 48A, 48B may be controlled by a first controller 52. The first controller 52 may be connected to a second link of the arm assembly. The first controller may be housed in the same airtight container 50 as the first and second actuators, or may be located in a separate airtight container. The first controller may be connected to a cooling subsystem, such as the exemplary cooling subsystem described above. The first controller 52 may process signals output by position sensing devices in the first and second actuators and output control signals to the first and second actuators, for example to energize windings of electric motors incorporated in the actuators. The first controller may be powered via a power distribution and communication subsystem and may be capable of communicating with a robot controller.

[0070] The power distribution and communication subsystem may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. The rotary coupling may transmit power from the robot controller to the first controller and other active components of the arm assembly, such as the gripper and sensors of the end effector. Alternatively, two separate controllers may be used, one for the first actuator 48A and one for the second actuator 48B.

[0071] Another embodiment of a vacuum compatible robotic arm system of the present invention is shown in FIG. 13. In this example, the robotic system includes a drive 1318 having at least three axes of rotation and an arm assembly 1325 coupled to the drive. The arm assembly 1325 may include a first link 1322, a second link 1324, a third link 1326, and an end effector 26. The first link 1322 may be directly connected to the first axis of rotation of the drive, the second link 1324 may be connected to the first link via a first revolute joint, and the third link 1326 may be connected to the second link via a second revolute joint. The end effector may be connected to the third link via a third revolute joint. The second link 1324 may be driven via a belt / band. The belt / band may include a first pulley 1334 attached to the second axis of rotation of the drive 1318. The first belt / band 1336 and the second pulley 1338 may be attached to the second link 1324 of the arm assembly. The third link 1326 may be driven from the third axis of rotation of the drive section through a two stage belt / band drive. The first stage of the belt / band drive may include pulleys 1340, 1342 and a belt / band 1344, and the second stage of the belt / band drive may include pulleys 1346, 1348 and a belt / band 1350. Pulley 1340 may be driven directly from the third axis of rotation of the drive section 1318. Pulleys 1338, 1346 may be coupled to each other and pulley 1348 may be attached to the third link 1326 of the arm assembly.

[0072] The end effector 26 may be operated by a first actuator 48. The first actuator may control the orientation of the end effector relative to the third link of the arm assembly. For example, the first actuator may include an electric motor, a piezoelectric actuator, or other suitable actuator configuration. The first actuator may also include a position measurement device 100 that determines the angular orientation of the end effector relative to the third link of the arm assembly. The active components of the first actuator, such as the stator of the electric motor, may be housed in an airtight container 50 and may be separated from the passive components, such as the rotor of the electric motor, by a separation wall. The first actuator 48 may be connected to a cooling subsystem, such as the exemplary cooling subsystems described above.

[0073] The first actuator 48 may be controlled by a first controller 52. The first controller 52 may be connected to the third link of the arm assembly. The first controller may be housed in the same airtight container 50 as the first actuator, or may be located in a separate airtight container. The first controller 52 may be connected to a cooling subsystem, such as the exemplary cooling subsystem described above. The first controller 52 may process a signal output by the position sensing device 100 in the first actuator 48 and output a control signal to the first actuator 48, for example, to energize a winding of an electric motor incorporated in the actuator. The first controller 52 may be powered via a power distribution and communication subsystem 73 and may be able to communicate with a robot controller.

[0074] The power distribution and communications subsystem 73 may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. The rotary coupling may transfer power from the robot controller to the first control and other active components of the arm assembly, such as the gripper and sensors of the end effector.

[0075] In another embodiment of the arm assembly shown in FIG. 13, a third link 1326 of the arm assembly may be actuated by an actuator integrated into the second link 1324. The actuator may control the orientation of the third link 1326 relative to the second link 1324 of the arm assembly. For example, the actuator may comprise an electric motor, a piezoelectric actuator, or other suitable actuator configuration. The actuator may also comprise a position measurement device that determines the angular orientation of the third link relative to the second link of the arm assembly. The active components of the actuator, such as the stator of the electric motor, may be housed in an airtight container and separated from the passive components, such as the rotor of the electric motor, by a separation wall. The actuator may be connected to a cooling subsystem.

[0076] 13, a third link 1326 of the arm assembly may be operated by an actuator associated with the third link 1326. The actuator may control the orientation of the third link 1326 relative to the second link 1324 of the arm assembly.

[0077] Yet another exemplary embodiment of a vacuum-compatible robot arm system is shown in Figures 14 and 15. In this example, the robot system may include a drive 1318 having at least three rotational axes and an arm assembly 1325 coupled to the drive. The arm assembly may include a first link 1322, a second link 1326, a third link 1326, and two end effectors 26A and 26B. The two end effectors 26A and 26B are referred to as the first end effector and the second end effector, respectively. The first link 1322 may be directly connected to a first rotational axis of the drive, the second link 1324 may be connected to the first link via a first rotary joint, and the third link 1326 may be connected to the second link via a second rotary joint. The first and second end effectors 26A and 26B may be connected to the third link via a third and a fourth rotary joint, respectively.

[0078] The first end effector 16A may be actuated by a first actuator 48A. The first actuator may control the orientation of the first end effector relative to the third link of the arm assembly. Similarly, the second end effector 26B may be actuated by a second actuator 48B. The second actuator may control the orientation of the second end effector relative to the third link of the arm assembly. For example, the first and second actuators may comprise electric motors, piezoelectric actuators, or other suitable actuator configurations. The first and second actuators may also comprise position measurement devices that determine the angular orientation of the corresponding end effector relative to the third link of the arm assembly. The active components of the first and second actuators, such as the stator of the electric motor, may be housed in airtight containers and separated from the passive components, such as the rotor of the electric motor, by a separation wall. A single airtight container may be used for both actuators. Alternatively, each actuator may be housed in its own airtight container. The first and second actuators may be connected to a cooling subsystem.

[0079] The first and second actuators 48A, 48B may be controlled by a first controller 52. The first controller 52 may be connected to the third link of the arm assembly. The first controller may be housed in the same airtight container 50 as the first and second actuators, or may be disposed in a separate airtight container. The first controller may be connected to a cooling subsystem as described above. The first controller 52 may process signals output by position sensing devices in the first and second actuators, and output control signals to the first and second actuators, for example, to energize windings of electric motors incorporated in the actuators. The first controller 52 may be powered via a power distribution and communication subsystem 73 and may be able to communicate with a robot controller.

[0080] The power distribution and communication subsystem may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. The rotary coupling may transmit power from the robot controller to a first controller and other active components of the arm assembly, such as the gripper and sensors of the end effector. Alternatively, two separate controllers may be used, one for the first actuator and one for the second actuator.

[0081] As yet another alternative embodiment of the arm assembly of FIG. 14, a third link of the arm assembly may be operated by an actuator associated with the second link. The actuator may control the orientation of the third link relative to the second link of the arm assembly. By way of example, the actuator may comprise an electric motor, a piezoelectric actuator, or any other suitable actuator configuration. The actuator may also comprise a position measurement device that determines the angular orientation of the third link relative to the second link of the arm assembly. The active components of the actuator, such as the stator of the electric motor, may be housed in an airtight container and separated from the passive components, such as the rotor of the electric motor, by a separation wall. The actuator may be connected to a cooling subsystem as previously described.

[0082] As yet another alternative embodiment of the arm assembly of FIG. 14, the third link of the arm assembly may be actuated by an actuator associated with the third link. The actuator may control the orientation of the third link relative to the second link of the arm assembly. For example, the actuator may comprise an electric motor, a piezoelectric actuator, or other suitable actuator configuration. The actuator may also comprise a position measurement device to determine the angular orientation of the third link relative to the second link of the arm assembly. The active components of the actuator, such as the stator of the electric motor, may be housed in an airtight container and separated from the passive components, such as the rotor of the electric motor, by a separation wall. The actuator may be connected to a cooling subsystem, such as the exemplary cooling subsystems described above. FIG. 15 illustrates an assembly 1325 in an apparatus 1510 that includes a process module 14 and a load lock 16.

[0083] As another example embodiment having some of the features, the end effector phasing and motion configurations described above may be used in a dual arm robotic manipulator. The end effector phasing configurations may be used in both arms / end effectors of the dual arm robotic manipulator or in only one arm / end effector of the dual arm robotic manipulator.

[0084] As shown in Figures 16A, 16B and 16C, the exemplary arm assembly described above may use a dual substrate side-by-side end effector. In one embodiment, the dual substrate side-by-side end effector 1626 may include two substantially fixed substrate holders 1628A, 1628B. In another embodiment, the two substrate holders 1628D, 1628E may be configured to be movable such that the relative distance between the two substrate holders and / or the relative orientation of the substrate holders may be actively adjusted. Figure 16C shows a robot arm assembly with an arm 1626 for use in an apparatus including a vacuum chamber 1615, a process module 1614 and a load lock 1616.

[0085] Reference is now also made to FIG. 17, which shows a schematic diagram of the drive 18 and cooling system of FIG. 8 in conjunction with the arm 1225 of FIG. 12. The power coupling may be a non-contact inductive transformer, with power and / or communication signals provided in a non-contact manner. Alternatively, power and / or data may be transmitted in a contact manner or with other suitable slip rings or couplings. The non-contact optical feedthrough 130 includes first and second fiber optic channels 132, 134, which provide high speed communication to a controller 136 of the link 22, where the controller 136 may include an optical device, ethercat, or other suitable converter 138. Alternatively, the converter 138 and feedthrough 130 may be electromagnetically inductive, e.g., a coupler transmitting both power and CAN or other high frequency signals or data. These may be used in conjunction with wires, flexures, or other means. A suitable non-contact optical feedthrough may use a fixed grin lens and a fixed mirror. An example of such a feedthrough is provided by Moog Component Group, and is for vacuum use. Alternatively, any suitable coupling or feedthrough may be used. Here, non-contact fiber optic high speed communication is connected to a non-contact rotary power supply controller 136, which is required to drive the arm. In addition to the high speed communication coupling, a non-contact inductive power coupling may also be provided. The module 136 may include control and motor drive circuitry, a positioning encoded readhead, and inputs and outputs for external devices. Such external devices may be a thermoelectric cooler 148, another readhead, a tip grip actuator, or other devices. For example, the encoders 150, 152 may be directly coupled to the wrist joints associated with the end effectors 26A, 26B and coupled to the readheads associated with the module 136. Similarly, edge detection, edge grip, and edge placement devices 154, 156 may also be connected to the end effectors 26A, 26B and associated with the module 136.

[0086] In the described embodiment, encoders may be provided at some or each of the joints, and motors may be provided at some or each of the joints. A combination of motors, encoders, and controllers may be provided at some or each of the joints. In other embodiments, components such as in the module 136 may be exposed or encapsulated. If encapsulated, they may be encapsulated in a sealed metal enclosure, in the arm body 112, in a partially metal enclosure, or a combination thereof. Power and communication may be provided by means of cables and fixed feedthroughs, non-contact magnetic slip rings, contact slip rings, through individual bearings, flexures, or other means, or a combination thereof. Heat sinking may be by radiative cooling, convection, or conduction. For example, a coolant may pass through the feedthroughs, be stationary, or circulate. In other embodiments, one or more of the axes may have feedthroughs, such as magnetic fluid seals or other suitable seals. In other embodiments, the drive may have multiple arms, concentric or offset, with one or more or all of the independently driven axes. In addition, there may be more or fewer coolers. For example, multiple thermoelectric coolers may not be provided, additional thermoelectric coolers may be provided, and a heat pump may be provided to move and dissipate heat from one portion of the arm or drive portion to another portion.

[0087] Reference is now also made to FIG. 18. In FIG. 18, a schematic diagram of a transport device with rotational and vertical drive is shown, using an optical feedthrough 1812 and a rotary thermal feedthrough as described in relation to FIG. 17. The rotor 1816 has two independently movable arms 1818, 1820, each driven by a rotary drive 1822, 1824. The rotary drives 1822, 1824 in turn have optical couplings 1826, 1828 and thermal couplings 1830, 1832, respectively. In alternative embodiments, more or fewer arms or axes may be driven directly or remotely. In this embodiment, heat is dissipated through a series of joints and a series of thermal couplings, 1830 to 1831 and 1832 to 1831, respectively. In alternative embodiments, more or fewer joints may be used. For example, there may be two or more arms that can move independently on one axis or on some or all of multiple axes, each arm having a main link driven concentrically about a common axis or other suitable configuration.

[0088] Reference is now also made to FIG. 19, which shows a block diagram of an exemplary system 400. The system 400 includes a vacuum chamber 402 and first and second transports 404, 406, where the transport 404 is a combination linear and rotary drive, which may be used in a linear tool arrangement 400 or the like. Reference is now also made to FIG. 20, which shows a system 410. The system 410 includes a vacuum chamber 412 and transports 414, 416, 418, 420. The illustrated embodiment is merely exemplary. Thus, a combination of linear robots as shown, fixed robots, or other robots may be used, with more or fewer axes. For example, multiple fixed robots may be used with one or more transport chambers, each with a single or multi-axis linear shuttle having the characteristics described above.

[0089] Reference is now also made to FIG. 21, which shows a cross-sectional view of the system 400. The chamber 402 includes slots 430, 432 for inserting and removing the substrate. The transport or robot drive includes a drive 434 and an arm 436, which may include the features described above or may be a SCARA type arm driven by the drive 434. Reference is now also made to FIG. 22, which shows a partial cross-sectional view of the system 400. The drive 434 is shown with slides 440, 442 mounted to the floor of the chamber 402. In alternative embodiments, the drive 434 may be connected to an intermediate plate or other portion. The slides 440, 442 may be conventional linear slide structures, or may be magnetic suspension, non-contact slides, active, passive, or other structures. The illustrated embodiment does not require feedthroughs and / or service loops for operation, cooling, power, etc., although alternative embodiments may include one or more feedthroughs and / or service loops. The slides 440, 442 are mounted on a base or heat-conducting plate 444. Here, heat generated by the components of the actuator 434 is dissipated to the base 444. Alternatively, other heat generated by the components may be dissipated to the base 444 or to other components, or may not be dissipated anywhere. In this case, heat generated by the components may be dissipated to the surroundings by radiation or other mechanisms. The base 444 and the components mounted thereon may traverse the slides 440, 442 to selectively access slots in the chamber 402 of the system 400. Power and / or communication may be provided by an electromagnetic induction coupling 446. Here, the electromagnetic induction coupling 446 may include a base coupling 448 that connects to the chamber 402 and a pickup 450 that connects to the plate 444. The base coupling 448 may provide power and / or communication to the pickup 450 over the entire length of the chamber 402 or a portion thereof, regardless of where the actuator 434 selectively traverses. Couplings 446 may be numerous or numerous, and may be arranged in series, parallel or other configurations to operate one or more drives simultaneously or individually.Alternatively, any suitable coupling may be used, such as couplings as previously described, or flexure-based couplings for short distances such as communication. A linear drive module 452 with a fixed plate 454 traverses the base 444. The fixed plate is connected to the chamber 402 and operates one or more drives through the chamber length and a forcer 456 connected to the base 444. Here, the module 452 may be any suitable linear electric drive, such as a brushless linear motor with an active platen with a magnet, a passive platen without a magnet, or the like. The drive module 452 may also include position sensing devices such as inductive, optical, incremental, absolute, or other types or types. Here, the read head may be packaged at or near the forcer 456. The read track may be packaged at or near the platen 454 or the chamber 402. Heat is transferred from a sink 458 attached to the base 444 to a sink 460 attached to the chamber 402. Here, the sinks 460 may be aligned along the length of the chamber 402, with each sink having an interleaved surface that provides a radiative coupling. The drive 434 includes active components that may generate heat, such as motor windings, encoder readheads, brakes, controllers, amplifiers, ethercat® optical elements, rectifiers, power conditioners, or any other suitable heat source active or heat sensitive components. These components may be thermally coupled to or sunk into the base 444. The base 444 may sunk heat via couplings 458, 460, or the like. The components may be fully or partially enclosed in an enclosure or potted in resin. The enclosure, potting, or other suitable structure or coupling allows thermal energy to be transferred to the base 444. For example, the forcer 456 may sunk heat directly into the base 444. The linear motor 456 may include a magnet on a stationary platen. It may also include a magnetless passive platen as described in U.S. Patent No. 7,800,256, which is incorporated herein by reference in its entirety.As a further example, the rotary and vertical power elements of drive 434 may be housed, recessed, or otherwise sunk into base 444 as previously described.

[0090] In this exemplary embodiment, the exemplary arm 436 may be a SCARA type arm with passive components such as bands and pulleys and active components such as encoders and motors. The rotary and vertical portion of the drive 434 includes a vertical actuator 462, such as a lead screw drive, and first and second rotary drives 464, 466. A screw 470 drives a nut 468 of the drive 462 which connects to a shaft 472 of the rotary drive 466. The shafts 472, 472 are operatively connected to the arm 436 and allow vertical, rotational and radial motion. The shafts 472, 472 are operatively connected to shafts 476, 478 of the drives 466, 464 by prismatic joints. The prismatic joints act to resist rotation so that the active components at the bottom of the drive 434 can transmit torque with freedom and vertical motion while remaining fixed relative to the base 444. Here, the drives 462, 464, 466 may include active components such as motor windings 480, read head 482, electronics assembly 484, brake windings 486, or other active components that radiate heat from the base 444 as described above. High speed communication may be provided by connection 446 or one or more optical connections 488, 490 as previously described. Such connections may interface with corresponding connections in chamber 402 along intersecting axes of motion. In alternative embodiments, any suitable combination of modules and components described herein may be used.

[0091] Reference is now also made to FIG. 23, where a drive 600 incorporating some of the described embodiments is shown in a retracted position. Reference is now also made to FIG. 24, where a drive 600 incorporating some of the described embodiments is shown in an extended position. The drive 600 comprises four end effectors 602, 604, 606, 608 that move independently in the radial direction. The end effectors 602, 606 are also linearly mounted to a linear drive 610, and the end effectors 604, 608 are linearly mounted to a linear drive 612. The linear drive 610 is mounted to a rotary drive 614, and the linear drive 612 is mounted to a rotary drive 616. The rotary drives 614, 616 can rotate independently. Here, two processed substrates S may be picked and two unprocessed substrates S' may be placed. For example, a substrate may be placed at two locations simultaneously, separate from other substrates, and error correction may be performed in the air, independently of each other.

[0092] Reference is now also made to FIG. 25, which shows a cross-sectional view of the system 600. Each of the linear drives 610, 612 drives two independent linear drive motors to drive the associated end effectors 602, 606, 604, 608, respectively. The linear drives 610, 612 and the rotary drives 614, 616 may include features as described herein and as disclosed in relation to other aspects of the described embodiments. In this exemplary embodiment, the drive 600 includes four linear motors 620. In this exemplary embodiment, the drive 600 includes four linear position sensors 622, power connections, communication connections, and linear position sensors 622, where transfers 624 are also provided at four locations. Two rotary drives 626 are provided with position encoders and power and communication connections. A communication link 628 is also provided. A heat exchanger 630 is provided with an outer heat exchanger 632.

[0093] Reference is now also made to Figures 26-18, which show various schematic diagrams of a linear platform with three-link arm robots 700, 800. Each arm robot has two end effectors 804 that can move independently. The robot 700 (800) is shown in a vacuum chamber 715 that includes a process chamber 14 and a load lock 16. The lock 16 may be a single load lock or a stack of load locks. Alternatively, one or more load locks may be provided adjacent to the lock 16 or at other locations. In this embodiment, seven process modules 14 are shown. There may be more or fewer process modules. The process modules 14 may process single wafers or multiple wafers, for example, with a stack or batch of wafers in a carousel fashion, or with subordinate or independent process modules in a stack. As shown in this embodiment, the robot 700 may access the modules 14, 16 independently. Here, a set of three opposing modules is shown along the length of the linear platform, with a set of opposing modules at each end of the linear platform. There may be more or less process modules, either across or at opposite ends. Alternatively, one or more platforms may be coupled together, one of which may be a wafer feed platform. Wafers are processed and transported through one or more subsequent platforms, and removed through the feed platform, the end of the intermediate platform, or the like. Dual end effectors are shown at each module to allow for fast swapping, one to pick the substrate to be processed and the other to place the unprocessed substrate. Alternatively, a single end effector, multiple end effectors, or any other suitable end effector may be used. Although only one robot 700 is shown, multiple robots may be used. Thus, more process modules may be accessed, allowing for higher process capabilities depending on the required throughput. Although a three-link robot is shown, any suitable robot, such as those previously described or otherwise, may be used.For example, dual arm robots, robots with any number of links, and robots with a combination of rotary and linear links and joints may be used. Reference is now also made to Figures 29-30, which show various schematic diagrams of a linear platform with a three-link arm robot 802 with a dual end effector 806. The end effectors may be fixed relative to each other or may be independently movable. The robot 802 is shown in a vacuum chamber with a process chamber and load locks in which two substrates are processed each. The locks may be a single load lock supporting two substrates or stacked load locks. Alternatively, one or more load locks may be provided adjacently or at other locations. In this embodiment, seven process modules are shown. There may be more or fewer process modules. The process modules may process more than one wafer, for example, with a carousel of wafers or with a batch of wafers, or with subordinate or independent process modules in a stack. As shown in this embodiment, the robot 802 may access the modules independently. Here, three sets of opposing modules are shown along the length of the linear platform, with one set of opposing modules at each end of the linear platform. There may be more or fewer process modules at either end or at other ends. Alternatively, one or more platforms may be coupled together, one of which may be a wafer feed platform. Wafers may be processed and transported through one or more subsequent platforms, and removed through the feed platform, the end of the intermediate platform, or the like. The dual end effector shown is capable of picking or placing two substrates simultaneously. Additional end effectors may also be used at each module to allow for fast swapping, with one picking a set of processed substrates and the other placing a set of unprocessed substrates. Alternatively, a single end effector, multiple end effectors, or any other suitable end effector may be used. Although only one robot 800 is shown, multiple robots may be used.In this way, more process modules may be accessed, with increased process capacity depending on the required throughput. Although a three-link robot is shown, any suitable robot, such as those described above or otherwise, may be used. For example, dual arm robots, robots with any number of links, and robots with a combination of rotary and linear links and joints may be used.

[0094] In one type of exemplary embodiment, the apparatus 25 may include a frame having at least three sections, a first position sensor 98 or 100, and an airtight enclosure 50. The three sections include an end effector 26 and at least two links 22, 24 forming a moveable arm. The end effector and the links are connected by a moveable joint, the end effector being configured to support a substantially planar substrate. A first position sensor is in the frame adjacent the first joint and configured to sense the relative position of two of the sections. An airtight enclosure is provided on the moveable arm, and the first position sensor is at least partially or completely enclosed within the airtight enclosure.

[0095] The device may also include a drive 18 coupled to the frame and configured to drive the movable arm. The device may also include a vacuum chamber 15, the frame being disposed within the vacuum chamber and the drive penetrating a wall of the vacuum chamber. The device may also include a heat transfer system (see e.g. FIG. 8) in the drive, configured to transfer heat from the movable arm to a location remote from the arm. The device may also include a controller 52 and / or 54 connected to the drive and / or the first position sensor. The first position sensor may be remote from the drive. The first position sensor may include a position detection encoder. The device also includes a second position sensor. The second position sensor may be disposed on the frame adjacent to the second joint and configured to sense the relative positions of two of the parts. The device also includes an electric actuator 48 disposed on the frame. The electric actuator may be at least partially enclosed in an airtight enclosure 50 or completely enclosed in a second airtight enclosure. The first position sensor may be an optical encoder with an optical fiber member 73B extending from the first position sensor through the airtight enclosure 50. The apparatus may also include a controller 52 on the frame connected to the optical encoder, the controller 52 being at least partially enclosed in the airtight enclosure 50 or completely enclosed in a second airtight enclosure, which may be at least partially formed by one of the links 22, 24 of the frame. The apparatus may also include at least one electrical conductor passing through the airtight enclosure.

[0096] The heat transfer system may include a first heat transfer member 146 and a second heat transfer member 144 connected to the first portion 1840 of the actuator. The second heat transfer member 144 is disposed in association with the first heat transfer member to receive heat therefrom. The first heat transfer member 146 is movable relative to the second heat transfer member when the first portion 1840 of the actuator moves.

[0097] The thermal transfer system may include a first set 1830 of thermally conductive members and a second set 1832 of thermally conductive members spaced apart therefrom. The first set 1830 of thermally conductive members includes a first thermally conductive member 1842 that connects to a first portion of the actuator 1844 and a second thermally conductive member 1846. The second thermally conductive member 1846 is disposed in association with the first thermally conductive member 1842 and receives heat therefrom. The first thermally conductive member 1842 is movable relative to the second thermally conductive member when the first portion 1844 of the actuator moves. The second set of thermally conductive members may include a third thermally conductive member 1848 and a fourth thermally conductive member 1852 that connects to a second portion 1850 of the actuator. The fourth thermally conductive member 1852 is disposed in association with the third thermally conductive member and receives heat therefrom. The third thermally conductive member 1848 is movable relative to the fourth thermally conductive member when the second portion 1850 of the actuator moves. The heat transfer system may also include a third set of heat transfer members. The third set of heat transfer members includes a fifth heat transfer member 146 and a sixth heat transfer member 144 that connect to the third portion of the drive 1840. The sixth heat transfer member 144 is disposed in association with the fifth heat transfer member 146 and receives heat therefrom. The fifth heat transfer member 146 is movable relative to the sixth heat transfer member 144 when the third portion of the drive 1840 moves. The second and fourth heat transfer members 1846, 1852 may be supported by the third portion of the drive 1840. The apparatus may be a planar substrate transfer robot configured to move a planar substrate in a vacuum chamber with an end effector.

[0098] In another exemplary embodiment, the apparatus 12 may include an electric device 48 and / or 52 and / or 100, a frame 25, a drive 18, and a heat transfer system. The frame 25 carries the electric device. The frame 25 also has at least three parts including an end effector 26 and at least two links 22, 24 forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substantially planar substrate. The drive is connected to the movable arm and configured to drive the movable arm. The heat transfer system may be provided in the drive (see, e.g., FIG. 8 ) and configured to transfer heat from the movable arm to a location remote from the movable arm.

[0099] In yet another exemplary embodiment, the apparatus 12 may include a frame having at least three sections, a first position sensor 100, and a communication link 73. The three sections include an end effector 26 and at least two links 22, 24 forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substantially planar substrate. A first position sensor is in the frame proximate to the first joint and configured to sense the relative position of two of the sections. The communication link is configured to transmit a signal from the first position sensor to a device remote from the movable arm through the airtight enclosure.

[0100] The term "joint" herein should be considered broadly. For example, the joint may be a revolute joint, a prismatic joint, or any other suitable type of joint. Similarly, the terms "link" and "member" should be considered broadly to include composite members having multiple connected elements. That is, any suitable link or member may be used.

[0101] It should also be understood that the above description is merely illustrative. Numerous variations and modifications may occur to those skilled in the art. For example, features recited in the various dependent claims may be combined with each other in any suitable combination. In addition, features from the various embodiments described above may be selectively combined to form new embodiments. This application is therefore intended to embrace all such variations, modifications and variations that are within the scope of the appended claims.

Claims

1. A chamber; a robot having a robotic arm and a robotic motor configured to move the robotic arm; a robot drive configured to connect the robot to the chamber and move the robot horizontally within the chamber; a first non-contact communication device located outside the chamber; a second contactless communication device located inside the chamber and connected to the robot; Equipped with the first contactless communication device is configured to contactlessly transmit a data signal to the second contactless communication device; the robot is configured to use the data signals received by the second non-contact communication device to control movement of the robot motors; the first contactless communication device is configured to contactlessly transmit the data signal from outside the chamber through the chamber to the second contactless communication device inside the chamber. Device.

2. The apparatus of claim 1 , wherein the robot drive is located within an enclosure on a movable base of the robot drive.

3. The apparatus of claim 2 , wherein the enclosure is located within the chamber.

4. The apparatus of claim 3 , wherein the air pressure inside the chamber is different from the air pressure inside the enclosure.

5. The apparatus of claim 1 , wherein the first contactless communication device is an optical contactless communication device.

6. A chamber; Robot motor; A robot drive; a robotic arm connected to the robotic motor; a first portion of a communication coupling connected to the robot motor; Equipped with the robot motor is connected to the chamber by the robot drive, the robot drive configured to move the robot motor horizontally within the chamber; the robotic motor configured to move the robotic arm; the first portion of the communication coupling is configured to move horizontally with the robotic motor within the chamber; the first portion of the communication coupling is configured to transmit movement signals to the robotic motor; the first portion of the communication coupling is configured to communicate contactlessly with a second portion of the communication coupling located outside the chamber; the first portion of the communication coupling is configured to communicate contactlessly with the second portion of the communication coupling for various horizontal positions of the first portion of the communication coupling within the chamber; the second portion of the communication coupling is configured to transmit a wireless data signal from outside the chamber through the chamber to the first portion of the communication coupling inside the chamber. Device.

7. The apparatus of claim 6 , wherein the robotic motor is located within an enclosure.

8. The apparatus of claim 7 , wherein the enclosure is located within the chamber.

9. 8. The apparatus of claim 7, wherein the robot drive has a base attached to the chamber by a slide, the robot motor being mounted on the base, and the slide providing the robot drive with a horizontal path for moving the robot motor horizontally within the chamber.

10. 9. The apparatus of claim 8, wherein the air pressure inside the chamber is different from the air pressure inside the enclosure.

11. The apparatus of claim 6 , wherein the first part of the communication coupling is a first optical non-contact communication device.

12. 12. The apparatus of claim 11, wherein the second portion of the communication coupling is connected to the chamber, the second portion of the communication coupling being a second optical non-contact communication device configured to communicate with the first optical non-contact communication device.

13. connecting a robot to the chamber via a robot drive; connecting a first contactless communication device outside the chamber to the chamber; connecting a second contactless communication device to the robot; Including, the robot drive configured to move the robot horizontally within the chamber, the robot comprising a robot arm and a robot motor, the robot motor configured to move the robot arm; the first contactless communication device is configured to contactlessly transmit data from outside the chamber through the chamber to the second contactless communication device inside the chamber, and the robot is configured to use the data received by the second contactless communication device to control movement of the robot motors; method.

14. 1. A method comprising: disposing a robot in a chamber; the robot is connected to the chamber by a robot drive configured to move the robot horizontally along a linear path within the chamber, the robot comprises a robot arm and a robot motor configured to move the robot arm, a first non-contact communication device is located outside the chamber and a second non-contact communication device is located inside the chamber and connected to the robot, the method comprising: transmitting data contactlessly through the chamber from outside the chamber to inside the chamber from the first contactless communication device outside the chamber to the second contactless communication device; controlling movement of the robot motor at various horizontal positions of the robot along the linear path within the chamber based on the data transmitted from the first contactless communication device to the second contactless communication device; A method comprising:

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