Lid member and package

Abstract

To improve light extraction efficiency of a lid member used for a package including a light-emitting element.SOLUTION: A glass-made lid member 4 has a plate-like frame part 7 and a dome-shaped projection part 8 projecting from the frame part 7. The projection part 8 has an inner surface 8a and an outer frame 8b. The projection part 8 comprises a peak part 13 and a base part 11 constituted integrally with the frame part 7. An antireflective film 10a is formed on the inner surface 8a of the projection part 8. The value (Ta1 / Ta3) obtained by dividing a thickness Ta1 of the antireflective film 10a formed at the base part 11 of the projection part 8 by a thickness of the antireflective film 10a formed at the peak part 13 of the projection part 8 is 0.75 to 1.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a closure for a package and to a package having a closure. [Background technology]

[0002] For example, Patent Document 1 discloses a package including a base (substrate) on which a light-emitting element (LED element) is mounted, a dome-shaped lid member (light-transmitting cover) fixed to the base so as to cover the light-emitting element, and an adhesive that bonds the base and the lid member. In this package, the lid member is configured in a dome shape to ensure a space between the lid member and the base to accommodate the light-emitting element. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2011-66169 A Summary of the Invention [Problem to be solved by the invention]

[0004] Research and development is currently being conducted to further improve the performance of packages using the above-mentioned dome-shaped lid members.

[0005] An object of the present invention is to improve the light extraction efficiency of a lid member used in a package including a light emitting element. [Means for solving the problem]

[0006] (1) The present invention is aimed at solving the above-mentioned problems, and is characterized in that it provides a glass lid member for use in a package including a light-emitting element, comprising a plate-shaped frame and a dome-shaped protrusion protruding from the frame, the protrusion having an inner surface and an outer surface, the protrusion comprising a top and a base integrally formed with the frame, an anti-reflection film formed on the inner surface of the protrusion, and a value obtained by dividing a thickness of the anti-reflection film formed on the base by a thickness of the anti-reflection film formed on the top is equal to or greater than 0.75 and less than 1.

[0007] According to this configuration, the light emitted from the light emitting element can be efficiently transmitted by the protrusion by forming an anti-reflection film on the inner surface of the protrusion of the lid member. This makes it possible to increase the light extraction efficiency of the lid member used in the package as much as possible. The smaller the thickness of the anti-reflection film, the lower the anti-reflection effect. Therefore, by dividing the thickness of the anti-reflection film formed on the base of the protrusion by the thickness of the anti-reflection film formed on the top of the protrusion to a value of 0.75 or more and less than 1, the thickness of the anti-reflection film on the base of the protrusion can be made as close as possible to the thickness of the anti-reflection film on the top of the protrusion. Therefore, the lid member does not have a portion in the protrusion where the thickness of the anti-reflection film is extremely thin. This makes it possible to improve the light extraction efficiency of the lid member.

[0008] (2) In the cover member described in (1) above, the thickness of the top of the protrusion may be thinner than the thickness of the base of the protrusion.

[0009] According to this configuration, by making the thickness of the top of the protruding portion of the lid member thinner than the thickness of the base, it is possible to increase the transmittance of the protruding portion. In addition, since the thickness of the base of the protruding portion is thicker than the thickness of the top, it is possible to increase the strength of the base portion more than that of the top portion. Therefore, it is possible to improve the light extraction efficiency of the lid member while ensuring its strength.

[0010] (3) In the cover member described in (1) or (2) above, the frame portion has a first main surface connected to the inner surface of the protrusion and a second main surface connected to the outer surface of the protrusion, and the anti-reflection film may be formed on the first main surface of the frame portion.

[0011] According to this configuration, the anti-reflection film formed on the first main surface of the frame portion has the function of alleviating the stress acting on the joint portion when the frame portion is joined to the base, so that the lid member can be joined to the base of the package without damaging the lid member.

[0012] (4) In the cover member described in (3) above, a metal layer may be formed on the anti-reflection film formed on the first main surface of the frame portion on a side opposite to the first main surface.

[0013] According to this configuration, by using this metal layer when forming a bonding material on the lid member, the bonding material adheres well to the metal layer, and as a result, the lid member and the base of the package can be bonded appropriately.

[0014] (5) In the cover member according to any one of (1) to (4) above, the anti-reflection film may include a hafnium oxide film.

[0015] If the anti-reflective film is a hafnium oxide film, the function of alleviating the stress acting on the joint when bonding the frame to the base can be significantly improved, so that the lid member can be bonded to the package base without being damaged.

[0016] (6) In the cover member according to any one of (1) to (5) above, a second anti-reflection film may be formed on the outer surface of the protruding portion.

[0017] According to this configuration, the light extraction efficiency of the cover member can be further improved.

[0018] (7) In the cover member described above in (6), the thickness of the second anti-reflection coating formed on the top portion may be greater than the thickness of the second anti-reflection coating formed on the base portion.

[0019] (8) In the cover member described in any one of (1) to (7) above, the protrusion may protrude from the frame at a predetermined protrusion angle, and the protrusion angle of the protrusion may be greater than or equal to 10° and less than or equal to 80°.

[0020] When the protrusion and the sputtering device are placed opposite each other and particles are scattered from the sputtering device toward the inner surface of the protrusion to form an anti-reflective film, an anti-reflective film having a designed thickness can be formed on the top of the protrusion. However, if the protrusion angle exceeds 80°, the amount of particles deposited on the base is reduced, making it difficult to form an anti-reflective film having a designed thickness. In contrast, if the protrusion angle is 80° or less, it is possible to efficiently form the components of the anti-reflective film on the base of the protrusion. This allows the anti-reflective film to be formed to a sufficient thickness, thereby increasing the light extraction efficiency of the protrusion. Note that a protrusion angle of less than 10° is inappropriate from the viewpoint of the storage space for packaging the light-emitting element.

[0021] (9) In the cover member described in any one of (1) to (8) above, the protrusion may have an opening formed on the inner surface side, and a ratio L / H of an opening length L of the opening to a protruding height H of the protrusion may be 1.2 or more and 8 or less.

[0022] When the protrusion and the sputtering device are placed opposite each other and particles are scattered from the sputtering device toward the inner surface of the protrusion to form an anti-reflective film, an anti-reflective film having a designed thickness can be formed on the top of the protrusion. However, if the ratio L / H is less than 1.2, the amount of particles deposited on the base is reduced, making it difficult to form an anti-reflective film having a designed thickness. In contrast, if the ratio L / H is 1.2 or more, it becomes possible to efficiently form the components of the anti-reflective film on the base of the protrusion. This allows the anti-reflective film to be formed to a sufficient thickness, thereby increasing the light extraction efficiency of the protrusion. Note that if the ratio L / H exceeds 8, it becomes inappropriate from the viewpoint of the storage space for packaging the light-emitting element.

[0023] (10) In the cover member described in (9) above, the opening may be configured in a rectangular shape.

[0024] (11) In the cover member described in any one of (1) to (10) above, the inner surface may have a first curved surface that is connected to the first main surface of the frame portion and is convex toward the inside of the protrusion, a second curved surface that is convex toward the outside of the protrusion, and an inflection point located between the first curved surface and the second curved surface.

[0025] According to this configuration, the shape of the lid member becomes smooth and can be made resistant to external impacts. In the case of a lid member having this inflection point, since there is a risk of a decrease in the light extraction efficiency at the protruding portion, the light extraction efficiency at the protruding portion can be increased by defining the above-mentioned protruding angle and the ratio L / H of the opening length L of the opening and the protruding height H of the protruding portion.

[0026] (12) The present invention is aimed at solving the above-mentioned problems, and is characterized in that it is a package comprising a light-emitting element, a base for supporting the light-emitting element, and a lid member described in any one of (1) to (11) above.

[0027] According to this configuration, the light emitted from the light emitting element can be efficiently transmitted by the protrusion by forming an anti-reflection film on the inner surface of the protrusion of the lid member. This makes it possible to increase the light extraction efficiency of the package as much as possible. The smaller the thickness of the anti-reflection film, the lower the anti-reflection effect. Therefore, by dividing the thickness of the anti-reflection film formed on the base of the protrusion by the thickness of the anti-reflection film formed on the top of the protrusion to a value of 0.75 or more and less than 1, the thickness of the anti-reflection film on the base of the protrusion can be made as close as possible to the thickness of the anti-reflection film on the top of the protrusion. Therefore, the lid member does not have a portion on the protrusion where the thickness of the anti-reflection film is extremely thin. This makes it possible to improve the light extraction efficiency of the package. Effect of the Invention

[0028] According to the present invention, it is possible to improve the light extraction efficiency in a lid member used in a package including a light emitting element. [Brief description of the drawings]

[0029] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] FIG. [Figure 6] FIG. 4 is a cross-sectional view of a main part of the cover member. [Figure 7] FIG. [Figure 8] 4A to 4C are cross-sectional views showing a preparation step in the method of manufacturing the package. [Figure 9] 4A to 4C are cross-sectional views showing a preparation step in the method of manufacturing the package. [Figure 10] 4A to 4C are cross-sectional views showing a film forming step in the method of manufacturing the package. [Figure 11] 4A to 4C are cross-sectional views showing a bonding step in the method of manufacturing the package. [Figure 12] 4A to 4C are cross-sectional views showing a bonding step in the method of manufacturing the package. [Figure 13] 1 is a cross-sectional view showing a glass substrate for manufacturing a lid member for a package. [Figure 14] FIG. 11 is a cross-sectional view showing another example of the cover member. [Figure 15] FIG. 11 is a cross-sectional view showing another example of the cover member. [Figure 16] FIG. 11 is a plan view showing another example of the cover member. [Figure 17] FIG. 11 is a plan view showing another example of the cover member. [Figure 18] FIG. 11 is a bottom view showing another example of the lid member. [Figure 19] 11A to 11C are cross-sectional views showing another example of a preparation step in the manufacturing method of a package. [Figure 20] FIG. 11 is a cross-sectional view showing another example of a package. [Figure 21] FIG. 11 is a cross-sectional view showing another example of the cover member. [Figure 22] FIG. 11 is a cross-sectional view showing another example of a package. [Figure 23] FIG. [Figure 24] FIG. [Diagram 25] 4A to 4C are cross-sectional views showing a preparation step in the method of manufacturing the package. [Figure 26] 4A to 4C are cross-sectional views showing a preparation step in the method of manufacturing the package. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0030] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Figures 1 to 20 show an embodiment of a lid member and a package according to the present invention.

[0031] As shown in Figures 1 and 2, the package 1 includes a base 2, a light-emitting element 3 supported by the base 2, a lid member 4 covering the base 2 and the light-emitting element 3, and a sealing portion 5 hermetically joining the base 2 and the lid member 4.

[0032] 3 and 4 show the base 2 before the lid member 4 is bonded to it. The base 2 has a first main surface 2a supporting the light-emitting element 3, a second main surface 2b located opposite to the first main surface 2a, and a metal layer 6 formed on the first main surface 2a.

[0033] Examples of materials for the base 2 include ceramics such as aluminum nitride, aluminum oxide, silicon carbide, and silicon nitride, glass ceramics obtained by mixing and sintering these ceramics with glass powder, and alloys such as Fe-Ni-Co alloys, Cu-W alloys, and Kovar (registered trademark).

[0034] 4, the metal layer 6 has a frame shape surrounding the light-emitting element 3. The metal layer 6 is formed in a rectangular shape, but is not limited to this shape. The metal layer 6 may be formed in a circular shape so as to surround the light-emitting element 3, for example.

[0035] The metal layer 6 includes three layers, which are an underlayer, an intermediate layer, and a surface layer, in that order from the first main surface 2a side. Examples of metals used for the underlayer include Cr, Ta, W, Ti, Mo, Ni, Pt, etc. Examples of metals used for the intermediate layer include Ni, Pt, Pd, etc. Examples of metals used for the surface layer include Au, Sn, Ag, Ni, Pt, etc. The metal used for the metal layer 6 may be a single metal or an alloy.

[0036] Examples of a method for forming the metal layer 6 on the first main surface 2a of the substrate 2 include film formation methods such as sputtering, vacuum deposition, ion-assisted or ion-plating vacuum deposition, and CVD.

[0037] The light-emitting element 3 is fixed to the first main surface 2a of the base 2. In this embodiment, the package 1 using an ultraviolet irradiating LED as the light-emitting element 3 is exemplified, but the light-emitting element 3 according to the present invention is not limited to this embodiment, and an infrared LED or a visible light LED can also be used.

[0038] 5 to 7 show the lid member 4 before being bonded to the base body 2. The lid member 4 is manufactured by forming a part of a plate glass. The glass used for the lid member 4 is preferably non-alkali glass, borosilicate glass, aluminosilicate glass, quartz glass, or crystallized glass. Non-alkali glass, borosilicate glass, or aluminosilicate glass can achieve both high transmittance and high workability during molding. Quartz glass can have a remarkably high transmittance in the ultraviolet range while maintaining workability during molding. Crystallized glass can achieve both high transmittance and high breaking strength.

[0039] When the glass is borosilicate glass, aluminosilicate glass, or alkali-free glass, the glass composition preferably contains, in mass %, SiO2: 50-75%, Al2O3: 1-25%, B2O3: 1-30%, Li2O+Na2O+K2O: 0-20%, and MgO+CaO+SrO+BaO: 0-20%. Glass compositions within the above composition ranges are classified as these glass systems.

[0040] In the case of crystallized glass, the glass composition preferably contains, by mass%, SiO2: 60-80%, Al2O3: 3-30%, Li2O+Na2O+K2O: 1-20%, MgO+CaO+SrO+BaO: 5-20%, and is a low-thermal expansion crystallized glass in which β-quartz solid solution or β-spodumene precipitates as crystals from inside the glass. Here, low thermal expansion means that the thermal expansion coefficient is −10×10 in the temperature range of 30 to 300° C. -7 / ℃~20×10 -7 / ℃.

[0041] As shown in Figures 2 and 5, the cover member 4 includes a plate-shaped frame portion 7, a dome-shaped protrusion portion 8 protruding from the frame portion 7, a connecting portion 9 connecting the frame portion 7 and the protrusion portion 8, a first antireflection film 10a and a second antireflection film 10b.

[0042] The frame 7 has, for example, a certain thickness, but is not limited to this embodiment. The thickness of the frame 7 is, for example, 0.2 mm or more and 2 mm or less. The frame 7 has a first main surface 7a and a second main surface 7b located on the opposite side of the first main surface 7a. The surface roughness (arithmetic mean roughness) Ra of the first main surface 7a is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less. The surface roughness Ra of the second main surface 7b is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less.

[0043] The protruding portion 8 is for forming a storage space for the light-emitting element 3 together with the first main surface 2a of the base 2. The protruding portion 8 is formed at the center position of the frame portion 7, but is not limited to this embodiment. The protruding portion 8 has an inner surface 8a configured as a concave curved surface, an outer surface 8b configured as a convex curved surface, and an opening portion 8c formed on the inner surface 8a side. The protruding portion 8 also includes a base portion 11, a middle portion 12, and a top portion 13. The base portion 11 is configured integrally with the connecting portion 9. The middle portion 12 is located between the base portion 11 and the top portion 13.

[0044] The base 11 of the protrusion 8 is defined as follows. As shown in FIG. 2, a normal line (hereinafter referred to as a "first line") L1 is drawn to the top 13, and a straight line (hereinafter referred to as a "second line") L2 is drawn along the second main surface 7b of the frame 7. The portion of the protrusion 8 from the intersection P2 of the first line L1 and the inner surface 8a of the protrusion 8 to the intersection P3 of the second line L2 and the inner surface 8a of the protrusion 8 is divided into four equal parts in a cross-sectional view. That is, straight lines L3 to L5 are drawn from the intersection P1 of the first line L1 and the second line L2 so as to divide the portion of the protrusion 8 from the intersection P2 to the intersection P3 into four equal parts (hereinafter referred to as a third line L3, a fourth line L4, and a fifth line L5).

[0045] The portions divided by the straight lines L3 to L5 are referred to as a first portion, a second portion, a third portion, and a fourth portion, respectively, from the intersection point P2 toward the intersection point P1.

[0046] The base 11 is a boundary between the first portion and the second portion. That is, the base 11 is a portion where the third line L3 intersects with the protruding portion 8. The portion where the third line L3 intersects with the inner surface 8a of the protruding portion 8 is referred to as a first base 11a, and the portion where the third line L3 intersects with the outer surface 8b of the protruding portion 8 is referred to as a second base 11b.

[0047] As shown in FIG. 5, the midway portion 12 is the portion where a straight line (hereinafter referred to as the "sixth line") L6 that makes an angle of 60° with respect to the second line L2 intersects with the protrusion 8 when the sixth line L6 is drawn from the intersection P1 between the first line L1 and the second line L2.

[0048] Hereinafter, the distance from the intersection point P2 between the first line L1 and the inner surface 8a of the protrusion 8 to the intersection point P1 is referred to as the protrusion height of the protrusion 8 and is indicated by the symbol H. The protrusion height H of the protrusion 8 is, for example, 0.5 mm or more and 80 mm or less.

[0049] The outer diameter D of the protrusion 8 is the diameter of a circle formed by the points at the position of the second base portion 11b, and is, for example, 2 mm or more and 150 mm or less. As shown in Fig. 5, the thickness of the protrusion 8 gradually decreases from the base portion 11 toward the apex portion 13. Therefore, the thickness Tmin of the apex portion 13 is smaller than the thickness Tmax of the base portion 11 (the distance between the first base portion 11a and the second base portion 11b).

[0050] The thickness Tmax of the base 11 is, for example, 0.19 mm or more and 1.9 mm or less. The thickness Tmin of the top 13 is, for example, 0.15 mm or more and 1.0 mm or less. The ratio Tmin / Tmax of the thickness Tmax of the base 11 to the thickness Tmin of the top 13 is preferably 0.08 or more and 0.9 or less, more preferably 0.1 or more and 0.8 or less, and even more preferably 0.2 or more and 0.5 or less.

[0051] 5, the protrusion 8 protrudes from the frame 7 at a predetermined protrusion angle θ. The protrusion angle θ is defined as follows.

[0052] On the first line L1, a straight line (hereinafter referred to as a "seventh line") L7 parallel to the second line L2 is drawn from a point P4 located at a height position that is half (H / 2) of the protrusion height H, and the intersection point between this seventh line L7 and the inner surface 8a of the protrusion 8 is designated as P5. A straight line (hereinafter referred to as an "eighth line") L8 passing through the intersection points P3 and P5 is drawn, and the angle (acute angle) between this eighth line L8 and a ninth line L9 drawn along the first main surface 7a of the frame portion 7 is designated as the protrusion angle θ.

[0053] In this embodiment, the protrusion angle θ is preferably 10° or more and 80° or less, more preferably 20° or more and 70° or less, and even more preferably 20° or more and less than 40°.

[0054] The inner surface 8a and the outer surface 8b of the protrusion 8 are configured as a continuous curved surface from the base 11 to the top 13. The surface roughness Ra of the inner surface 8a is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less. The surface roughness Ra of the outer surface 8b is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less.

[0055] The opening 8c of the protrusion 8 is for inserting the light emitting element 3 provided on the base 2 into the inside of the protrusion 8 when the cover member 4 is fixed to the base 2. As shown in Fig. 7, the opening 8c of the protrusion 8 is configured in a circular shape, but is not limited to this shape.

[0056] The opening length L of the opening 8c (the diameter of the opening 8c in this embodiment) is, for example, 1.5 mm or more and 80 mm or less. The ratio L / H of the opening length L of the opening 8c to the protruding height H of the protrusion 8 is preferably 1.2 or more, 1.6 or more, or 2.1 or more, and is preferably 8 or less, 5 or less, or 3 or less.

[0057] 2 and 5, the connecting portion 9 has a curved shape in order to connect the base 11 and the frame portion 7. The connecting portion 9 has a first curved surface 9a that connects the first main surface 7a of the frame portion 7 and the inner surface 8a of the protruding portion 8, and a second curved surface 9b that connects the outer surface 8b of the protruding portion 8 and the second main surface 7b of the frame portion 7.

[0058] The radius of curvature of the first curved surface 9a is larger than the radius of curvature of the second curved surface 9b. The radius of curvature of the first curved surface 9a is preferably 0.5 mm or more, 1 mm or more, and preferably 5 mm or less, 4 mm or less. The radius of curvature of the second curved surface 9b is preferably 0.5 mm or more, 1 mm or more, and preferably 5 mm or less, 4 mm or less. The surface roughness Ra of the first curved surface 9a is preferably 1.0 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less. The surface roughness Ra of the second curved surface 9b is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less.

[0059] The first antireflection film 10a is formed on the inner surface 8a of the protrusion 8 and the first main surface 7a of the frame 7. The first antireflection film 10a has a multilayer film structure including, for example, a silicon oxide film (SiO2) as a first film and a hafnium oxide film (HfO2) as a second film alternately.

[0060] 6, in the first antireflection film 10a, a portion 10a1 (hereinafter referred to as the "antireflection portion") formed on the inner surface 8a of the protrusion 8 is configured so that the thickness gradually decreases from the top 13 to the base 11 of the protrusion 8. That is, in the antireflection portion 10a1, the portion formed on the top 13 has the thickest thickness Ta3, and the portion formed on the base 11 has a thickness Ta1 smaller than the thickness Ta3 of the portion formed on the top 13.

[0061] The thickness Ta1 (see FIG. 6) of the first antireflection film 10a at the base 11 of the protrusion 8 is preferably 0.12 μm or more and 0.64 μm or less. The thickness Ta2 of the first antireflection film 10a at the midpoint 12 of the protrusion 8 is preferably 0.14 μm or more and 0.72 μm or less. The thickness Ta3 of the first antireflection film 10a at the top 13 of the protrusion 8 is preferably 0.15 μm or more and 0.8 μm or less.

[0062] The value (Ta1 / Ta3) obtained by dividing the thickness Ta1 of the first antireflection coating 10a formed on the base 11 of the protrusion 8 by the thickness Ta3 of the first antireflection coating 10a formed on the top 13 of the protrusion 8 is preferably 0.75 or more and less than 1, and more preferably 0.85 or more and 0.95 or less.

[0063] The more the thickness of the first antireflection film 10a deviates from the design value, the lower the antireflection effect becomes. Therefore, by setting the value (Ta1 / Ta3) obtained by dividing the thickness Ta1 of the first antireflection film 10a formed on the base 11 of the protrusion 8 by the thickness Ta3 of the first antireflection films 10a, 10b formed on the top 13 of the protrusion 8 to 0.75 or more and less than 1, the thickness Ta1 of the first antireflection film 10a on the base 11 of the protrusion 8 can be made as close as possible to the thickness Ta3 of the first antireflection film 10a on the top 13 of the protrusion 8. Therefore, the lid member 4 does not have a portion in the protrusion 8 where the thickness of the first antireflection film 10a is extremely thin. This can improve the light extraction efficiency of the lid member 4.

[0064] In the first antireflection film 10a, a portion 10a2 (hereinafter referred to as a "buffer portion") formed on the first main surface 7a of the frame portion 7 has a constant film thickness. The buffer portion 10a2 has a function of preventing reflection of ultraviolet rays, as well as a function of relieving stress acting on the frame portion 7 when the cover member 4 is bonded to the base 2.

[0065] The second antireflection film 10b is formed on the outer surface 8b of the protrusion 8 and the second main surface 7b of the frame 7. The second antireflection film 10b has a multilayer film structure including, for example, a silicon oxide film (SiO2) as a first film and a hafnium oxide film (HfO2) as a second film alternately.

[0066] In the second antireflection film 10b, a portion 10b1 (hereinafter referred to as the "antireflection portion") formed on the outer surface 8b of the protrusion 8 is configured to have a thickness that gradually decreases from the top 13 toward the base 11. That is, in the antireflection portion 10b1, the portion formed on the top 13 has the thickest thickness Tb3, and the portion formed on the base 11 has a thickness Tb1 that is thinner than the thickness Tb3 of the portion formed on the top 13.

[0067] The thickness Tb1 of the second antireflection film 10b at the base 11 of the protrusion 8 is preferably 0.12 μm or more and 0.64 μm or less. The thickness Tb2 of the second antireflection film 10b at the midpoint 12 of the protrusion 8 is preferably 0.14 μm or more and 0.72 μm or less. The thickness Tb3 of the second antireflection film 10b at the top 13 of the protrusion 8 is preferably 0.15 μm or more and 0.8 μm or less.

[0068] The value (Tb1 / Tb3) obtained by dividing the thickness Tb1 of the second antireflection film 10b formed on the base 11 of the protrusion 8 by the thickness Tb3 of the second antireflection film 10b formed on the top 13 of the protrusion 8 is preferably 0.75 or more and less than 1, and more preferably 0.85 or more and 0.95 or less.

[0069] The smaller the thickness of the second antireflection film 10b, the lower the antireflection effect. Therefore, by setting the value (Tb1 / Tb3) obtained by dividing the thickness Tb1 of the second antireflection film 10b formed on the base 11 of the protrusion 8 by the thickness Tb3 of the second antireflection film 10b formed on the top 13 of the protrusion 8 to 0.75 or more and less than 1, the thickness Tb1 of the second antireflection film 19b on the base 11 of the protrusion 8 can be made as close as possible to the thickness Tb3 of the second antireflection film on the top 13 of the protrusion 8. Therefore, the lid member 4 does not have a portion on the protrusion 8 where the thickness of the second antireflection film 10b is extremely thin. This can improve the light extraction efficiency of the lid member 4.

[0070] If the light extraction efficiency is sufficient, there is no need to form the second antireflection film 10b. However, if glass with poor weather resistance, such as borosilicate glass, is used for the lid member, the lid member 4 may deteriorate due to the external environment, resulting in a decrease in the light extraction efficiency. In this case, instead of forming the second antireflection film 10b on the lid member 4, it is also possible to form a SiO2 film or an Al2O3 film as a weather-resistant film. It is also possible to form a SiO2 film or an Al2O3 film as a weather-resistant film by laminating it on the second antireflection film 10b.

[0071] As shown in FIG. 2, FIG. 5 and FIG. 7, the buffer section 10a2 of the first anti-reflection film 10a has a metal layer 14 and a bonding section 15 formed therein. The Young's modulus of the buffer section 10a2 is preferably 250 GPa or less, more preferably 200 GPa or less, even more preferably 150 GPa or less, and particularly preferably 100 GPa or less. By defining the upper limit in this way, the buffering properties of the buffer section 10a2 can be improved, and the effect of alleviating the stress caused by the difference in thermal expansion coefficient between the bonding section 15 and the cover member 4 (frame section 7) can be obtained. The thermal expansion coefficient of the frame section 7 is smaller than that of the bonding section 15. The thermal expansion coefficient of the frame section 7 is also smaller than that of the base 2.

[0072] The thickness of the buffer section 10a2 is preferably 0.1 μm or more, 0.2 μm or more, and preferably 1 μm or less, 0.8 μm or less. By specifying the lower limit in this way, the buffering properties of the buffer section 10a2 can be further improved, and the effect of alleviating the stress caused by the difference in thermal expansion coefficient between the joint section 15 and the cover member 4 (frame section 7) can be obtained. Furthermore, by specifying the upper limit in this way, the manufacturing cost of the buffer section 10a2 can be reduced.

[0073] As shown in Figs. 5 and 7, the metal layer 14 is formed so as to overlap the buffer section 10a2. The metal layer 14 is formed on the surface of the buffer section 10a2 opposite to the surface of the buffer section 10a2 that contacts the first main surface 7a of the frame section 7. As shown in Fig. 7, the metal layer 14 has a rectangular frame shape so as to correspond to the shape of the metal layer 6 of the base body 2. The shape of the metal layer 14 is not limited to this embodiment. The metal layer 14 may have various frame shapes such as a circular shape. The metal layer 14 includes three layers, which are, in order from the buffer section 10a2 side, a base layer, an intermediate layer, and a surface layer.

[0074] Examples of metals used in the underlayer include Cr, Ta, W, Ti, Mo, Ni, and Pt. When Cr is used in the underlayer, the Young's modulus of the underlayer is preferably 279 GPa or less. Examples of metals used in the intermediate layer include Ni, Pt, and Pd. Examples of metals used in the surface layer include Au, Sn, Ag, Ni, and Pt. The metal used in the metal layer 14 may be a single metal or an alloy.

[0075] 5 and 7, the joint 15 is configured in a layered form so as to overlap the metal layer 14. As shown in Fig. 5, the joint 15 contacts a portion of the metal layer 14 opposite to a portion in contact with the buffer section 10a2. As shown in Fig. 7, the joint 15 has a rectangular frame shape so as to correspond to the shapes of the buffer section 10a2 and the metal layer 14. The shape of the joint 15 is not limited to this embodiment, and may be a circle or various other frame shapes.

[0076] The joint 15 is made of a metal-based joint material. As the metal-based joint material, a commercially available solder material or brazing material can be used. As the metal-based joint material, for example, an Au-Sn alloy, a Pb-Sn alloy, an Au-Ge alloy, an Sn-Ni alloy, etc. can be mentioned. In addition, by making the width of the joint 15 narrower than the width of the buffer part 10a2, the influence of stress due to the difference in thermal expansion coefficient between the joint 15 and the cover member 4 can be reduced. In this embodiment, a case where an Au-Sn alloy is used as the metal-based joint material will be described.

[0077] The sealing portion 5 is formed by integrally bonding the metal layer 6 of the base 2 and the metal layer 14 of the lid member 4 at a bonding portion 15 .

[0078] Next, a description will be given of a method for manufacturing the package 1. This method includes a preparation step of preparing the base body 2 and the lid member 4, and a joining step of joining the base body 2 and the lid member 4 together.

[0079] In the preparation step, after the metal layer 6 is formed on the first main surface 2a of the base 2, the light emitting element 3 is mounted on this first main surface 2a.

[0080] In the preparation step, after forming the lid member 4 by forming the protrusions 8 on the plate glass, a first antireflection film 10a is formed on the lid member 4. Then, a metal layer 14 and a bonding portion 15 are formed on the buffer portion 10a2 of the first antireflection film 10a. Note that by forming a second antireflection film 10b on the lid member 4, it is possible to further increase the light extraction efficiency.

[0081] The process for manufacturing the cover member 4 will be described below with reference to Figures 8 to 10. This process includes a molding process and a film forming process.

[0082] 8 shows a forming device used in the forming step. The forming device 16 includes a support table 17 that supports the glass sheet GS, a mask member 18 that is placed over the glass sheet GS supported by the support table 17, and a heating source 19 that thermally deforms a part of the glass sheet GS to form the protruding portion 8 of the cover member 4. The forming device 16 further includes a pressing member 20 that presses the support table 17 and the mask member 18 in a direction to bring them closer to each other, and an external force generating device 21 that applies an external force to a part of the glass sheet GS.

[0083] The support base 17 has a support portion 17a that supports the glass sheet GS, and a space portion 17b that has an opening surrounded by the support portion 17a and allows a part of the glass sheet GS to be thermally deformed. The support portion 17a of the support base 17 has a support surface that supports a main surface of the glass sheet GS. In this embodiment, the opening of the support base 17 has a circular opening edge E1, but may have an opening edge of a polygonal shape such as a triangular shape or a rectangular shape, an elliptical shape, or the like.

[0084] The space 17b of the support base 17 may be formed by a through hole or a recess having an inner bottom. The space 17b of the support base 17 is configured to mold the entire protrusion 8 of the cover member 4 in a non-contact state. Examples of materials that form the support base 17 include metals and ceramics.

[0085] Without being limited to the above configuration, a lower support jig for supporting the glass sheet GS may be provided in the space 17b in order to form the shape of the lid member 4 with high precision. The lower support jig is made of metal or ceramics. As described above, it is preferable to form the entire protrusion 8 of the lid member 4 in a non-contact state, but by improving the quality of the surface of the lower support jig that comes into contact with the glass sheet GS (reducing the surface roughness and surface waviness), the lid member 4 can be formed with high precision even when the lower support jig is used.

[0086] 8, the mask member 18 has a through hole 18a. The through hole 18a of the mask member 18 in this embodiment has a circular inner peripheral edge E2, but may have an inner peripheral edge having a polygonal shape such as a triangular shape or a rectangular shape, an elliptical shape, or the like.

[0087] The support base 17 and the mask member 18 are configured such that at least a part of the inner periphery E2 of the through hole 18a in the mask member 18 is located inside the opening edge E1 of the support base 17. Specifically, the support base 17 and the mask member 18 are configured such that the entire inner periphery E2 of the through hole 18a in the mask member 18 is located inside the opening edge E1 of the support base 17.

[0088] When the opening area of ​​the opening of the support base 17 is taken as 100%, the cross-sectional area of ​​the through hole 18a of the mask member 18 is preferably 95% or less, and more preferably 80% or less. At least a part of the inner periphery E2 of the through hole 18a in the mask member 18 is preferably positioned 1 mm or more inward from the opening edge E1 of the support base 17, and more preferably 3 mm or more inward.

[0089] The mask member 18 is preferably made of a material having a thermal conductivity of 1 [W / (m K)] or less at 600°C. For example, ceramics is a suitable material for the mask member 18. The mask member 18 preferably has a thickness of 1 mm or more. The mask member 18 of this embodiment has an outer shape that covers the entire outer periphery of the plate glass GS.

[0090] The heating source 19 is disposed so as to heat the glass sheet GS from the mask member 18 side. The heating source 19 in this embodiment is a burner that sprays a flame FL toward the glass sheet GS. By using the burner, the glass sheet GS can be softened relatively quickly. The heating method of the heating source 19 may be, for example, resistance heating or laser heating. The heating source 19 may also be configured by combining heating sources of different heating methods.

[0091] The pressing member 20, for example, presses the mask member 18 toward the support base 17. Examples of a pressing mechanism that presses the pressing member 20 include a fluid cylinder and a linear actuator. Note that the pressing member 20 can also be configured to press the support base 17 against the fixed mask member 18.

[0092] As the external force generating device 21, for example, an exhaust device can be used. The exhaust device exhausts gas present in the space 17b of the support stand 17 to create a negative pressure in the space 17b of the support stand 17. As a result, a part of the glass sheet GS is sucked into the space 17b of the support stand 17, thereby accelerating thermal deformation of the part of the glass sheet GS. As the exhaust device, for example, a pump using a Venturi mechanism is suitable.

[0093] The external force generator 21 is not limited to an exhaust device, and may be a high-pressure gas generator that injects high-pressure gas toward a portion of the glass sheet GS from the mask member 18 side. This allows the portion of the glass sheet GS to be pressurized toward the space 17b of the support base 17, thereby promoting thermal deformation of the portion of the glass sheet GS. Also, a pump and a high-pressure gas generator may be used in combination to promote thermal deformation of the portion of the glass sheet GS.

[0094] 8 and 9, in the forming step, first, the mask member 18 is placed on top of the glass sheet GS supported by the support stand 17. In this case, at least a part of the inner peripheral edge E2 of the through hole 18a of the mask member 18 is placed inside the opening edge E1 of the support stand 17. Thereafter, the pressing member 20 presses the support stand 17 and the mask member 18 so that they come into contact with each other. This makes it possible to suppress misalignment of the glass sheet GS sandwiched between the support stand 17 and the mask member 18.

[0095] Next, in the forming step, the glass sheet GS is heated from the mask member 18 side by the heating source 19. As a result, a part of the glass sheet GS is thermally deformed, and the protrusion 8 is formed.

[0096] In the above-mentioned forming process, the opening edge E1 of the support base 17 can be covered with the mask member 18. This allows the connecting portion 9 of the lid member 4 to be formed by thermal deformation of the glass sheet GS along the inner peripheral edge E2 of the through hole 18a of the mask member 18. In other words, the connecting portion 9 of the lid member 4 is formed without contacting the support base 17. By this forming process, the lid member 4 having the frame portion 7, the protruding portion 8, and the connecting portion 9 is formed.

[0097] In addition to the above, the method of forming the protrusion 8 on the lid member 4 (the manufacturing method of the lid member 4) may be a method in which the glass sheet GS is placed on a metal or ceramic mold having a recess, and the glass sheet GS is hot-pressed using a metal or ceramic mold having a protrusion that fits into the recess. The heating temperature in this hot-pressing is preferably equal to or higher than the yield point of the glass sheet GS, and more preferably equal to or higher than the softening point of the glass sheet GS.

[0098] After the forming process is completed, the film forming process is performed. Fig. 10 shows a film forming apparatus used in the film forming process. In this embodiment, a sputtering apparatus such as a magnetron sputtering apparatus is exemplified as the film forming apparatus, but the present invention is not limited to this configuration, and a film forming apparatus that performs other physical vapor deposition methods such as vacuum deposition may be used.

[0099] The film forming apparatus 22 includes a vacuum chamber 23 and targets 24a and 24b for scattering particles that become the film forming materials for the anti-reflection films 10a and 10b.

[0100] The targets 24a and 24b are accommodated inside the vacuum chamber 23. The internal space of the vacuum chamber 23 is set to a predetermined vacuum level by a vacuum pump. An inert gas such as argon gas may be supplied into the vacuum chamber 23.

[0101] The targets 24a, 24b include a first target 24a for forming a first antireflection film 10a on the lid member 4, and a second target 24b for forming a second antireflection film 10b on the lid member 4. In addition to these targets 24a, 24b, a target (not shown) for forming a metal layer 14 is placed in the vacuum chamber 23.

[0102] The first target 24a and the second target 24b include a plurality of targets for forming the first film (SiO 2 ) and the second film (HfO 2 ) of the first antireflection coating 10a and the second antireflection coating 10b.

[0103] 10, in the film formation process, the lid member 4 is accommodated in a vacuum chamber 23. Thereafter, particles scattered from the first target 24a are caused to adhere to the inner surface 8a of the protruding portion 8 of the lid member 4 and the first main surface 7a of the frame portion 7, thereby forming a first antireflection film 10a. Similarly, particles scattered from the second target 24b are caused to adhere to the outer surface 8b of the protruding portion 8 of the lid member 4 and the second main surface 7b of the frame portion 7, thereby forming a second antireflection film 10b.

[0104] The amount of particles adhering to the protruding portion 8 of the lid member 4 is greatest at the position of the top 13 and gradually decreases toward the base 11. The difference in the amount of particles adhering to the protruding portion 8 is due to the influence of the protruding angle θ of the protruding portion 8.

[0105] After the anti-reflection films 10a and 10b are formed on the cover member 4, the metal layer 14 is formed so as to overlap the buffer portion 10a2 of the first anti-reflection film 10a. The metal layer 14 is formed by depositing particles scattered from a target (not shown) for forming the metal layer 14 onto the buffer portion 10a2 using the above-mentioned film-forming apparatus 22. The metal layer 14 is formed into a frame shape by depositing the particles onto the buffer portion 10a2 through a mask member.

[0106] Thereafter, the bonding portion 15 is formed so as to overlap the metal layer 14. The bonding portion 15 is formed by a process (coating process) in which, for example, a paste-like metal-based bonding material is coated so as to overlap the metal layer 14. Specific examples of the coating process include a printing method using a mask (screen printing method), a coating method using a dispenser, and the like.

[0107] The method of forming the joint 15 is not limited to the above, and it may also be formed, for example, by arranging a molded body of a metal-based joint material pre-formed into a predetermined frame shape so that it overlaps the metal layer 14 on the first main surface 7a of the frame 7.

[0108] Once the metallic bonding material for the bonding portion 15 has been applied to the first main surface 7a of the frame portion 7, a heat treatment process is carried out to fix the metallic bonding material to the metal layer 14 of the first main surface 7a. The heat treatment process includes a heating process and a cooling process.

[0109] In the heating step, the lid member 4 is heated using a heating device such as a reflow furnace to melt the metal-based bonding material. The heating step may be performed, for example, in a furnace filled with nitrogen. In the heating step, the lid member 4 is heated to a temperature of 300° C. or higher.

[0110] In the cooling step, the metal-based bonding material melted on the first main surface 7a of the frame 7 is solidified by cooling. The cooling step is preferably performed by slow cooling at a cooling rate of 50° C. / min. In the cooling step, stress is generated in the cover member 4 due to the difference in thermal expansion coefficient between the frame 7 and the bonding portion 15, but the buffer portion 10a2 of the first antireflection film 10a can relieve this stress.

[0111] 11, in the joining step, the lid member 4 manufactured through the preparation step is laid on the base body 2. Specifically, the first main surface 7a of the frame portion 7 of the lid member 4 is placed opposite to the base body 2, and the joining portion 15 is brought into contact with the metal layer 6 formed on the first main surface 2a of the base body 2.

[0112] 12, the pressing member 25 is placed on the frame portion 7 of the cover member 4. The pressing member 25 has a weight 25a and a support member 25b that supports the weight 25a. The weight 25a and the support member 25b are made of, for example, metal or ceramic.

[0113] The support member 25b has a first support portion 25b1 that supports the weight 25a, and a second support portion 25b2 that supports the first support portion 25b1.

[0114] The first support portion 25b1 has a support surface (upper surface) on which the weight 25a is placed. The second support portion 25b2 includes a plurality of rod-shaped members. The second support portion 25b2 protrudes downward from the lower surface of the first support portion 25b1.

[0115] The second support portion 25b2 has a contact portion 25b3 that comes into contact with the frame portion 7 of the cover member 4. The contact portion 25b3 is configured in a pointed shape. The contact portion 25b3 comes into contact with the second main surface 7b of the frame portion 7 via the second antireflection film 10b.

[0116] The pressing member 25 presses the lid member 4 in a state in which the lid member 4 stands on its own as each contact portion 25b3 of the multiple second support portions 25b2 comes into contact with the frame portion 7. By pressing the lid member 4 with the pressing member 25, the joint portion 15 formed on the frame portion 7 of the lid member 4 and the metal layer 6 formed on the first main surface 2a of the base 2 can be brought into close contact with each other.

[0117] Thereafter, the metal layer 6 and the joint 15 are heated in a pressure-welded state (heating step). As a result, the metal-based joint material of the joint 15 is melted. In this heating step, the pointed contact portion 25b3 of the second support portion 25b2 comes into contact with the frame portion 7 of the cover member 4, so that the contact area between the contact portion 25b3 and the frame portion 7 can be made as small as possible. As a result, the heat transfer from the frame portion 7 to the second support portion 25b2 of the pressing member 25 can be kept to a minimum.

[0118] Thereafter, the molten metal-based bonding material is cooled and solidified (cooling step). In the cooling step, stress is generated in the frame 7 due to the difference in thermal expansion coefficient between the base 2 and the frame 7 of the lid member 4. In this case, the buffer portion 10a2 of the first antireflection film 10a deforms so as to relieve this stress. This makes it possible to reduce damage to the frame 7.

[0119] When the cooling step is completed, the sealing portion 5 is formed by integrally joining the metal layer 6 of the base 2 and the metal layer 14 of the lid member 4 at the joint 15. In this manner, the package 1 that maintains airtightness is completed.

[0120] FIG. 13 shows an example of a glass substrate for manufacturing the lid member 4. The glass substrate G includes a frame 7, a plurality of protruding portions 8 protruding from the frame 7, and anti-reflection films 10a, 10b. Each of the protruding portions 8 has the same configuration as the protruding portions 8 of the lid member 4 described above. Each of the protruding portions 8 is formed by thermally deforming a plurality of portions of a large-sized glass sheet GS using the above-mentioned forming device 16. By cutting this glass substrate G along the cutting line CL, a plurality of lid members having the protruding portions 8, the frame 7, and the anti-reflection films 10a, 10b can be efficiently manufactured. Note that a metal layer 14 and a bonding portion 15 may be formed on the first anti-reflection film 10a.

[0121] Fig. 14 shows another example of a lid member. In this example, the lid member 4 includes a frame 7, a plurality of protrusions 8 protruding from the frame 7, anti-reflection films 10a, 10b, a metal layer 14, and a bonding portion 15. Each component of this lid member 4 has the same configuration as the lid member 4 described above (Fig. 5). When a plurality of light-emitting elements 3 are mounted on the base 2, this lid member 4 can individually seal each light-emitting element 3 with the plurality of protrusions 8.

[0122] 15 shows another example of the cover member. In this example, the inner surface 8a of the cover member 4 has a first curved surface 8a1 and a second curved surface 8a2 with different radii of curvature, and a boundary portion 8a3 located between the first curved surface 8a1 and the second curved surface 8a2. The radius of curvature of the first curved surface 8a1 formed on the base 11 side of the protrusion 8 is smaller than the radius of curvature of the second curved surface 8a2 formed on the top 13 side of the protrusion 8.

[0123] The outer surface 8b of the cover member 4 has a first curved surface 8b1 and a second curved surface 8b2 with different radii of curvature, and a boundary portion 8b3 located between the first curved surface 8b1 and the second curved surface 8b2. The radius of curvature of the first curved surface 8b1 formed on the base 11 side of the protrusion 8 is smaller than the radius of curvature of the second curved surface 8b2 formed on the top 13 side of the protrusion 8.

[0124] 16 and 17 are plan views showing other examples of the lid member. In this example, the lid member 4 has a plurality of protrusions 8 arranged in multiple rows and columns, anti-reflection films 10a and 10b (the first anti-reflection film 10a is not shown), a metal layer 14 (not shown), and a bonding portion 15 (not shown). The lid member 4 shown in FIG. 16 has a plurality of protrusions 8 configured in a circular shape in a plan view. On the other hand, the lid member 4 shown in FIG. 17 has a plurality of protrusions 8 configured in a rectangular shape in a plan view. In addition, for the lid member 4 having a plurality of protrusions 8 arranged in multiple rows and columns, a scribe line is made on the smooth surface between adjacent protrusions 8, and the lid member 4 is broken along the scribe line, or diced by a blade dicing method or a laser ablation method, thereby obtaining a plurality of lid members, and a lid member of any shape can be obtained.

[0125] Fig. 18 is a bottom view showing another example of the lid member. In this example, the lid member 4 has a protruding portion 8 configured in a quadrangular shape in a plan view, similar to the example shown in Fig. 17. With this configuration, the opening 8c of the protruding portion 8 is configured in a quadrangular shape (e.g., a square shape). When the opening 8c is configured in a square shape, the opening length L corresponds to the length of one side of the square. When the opening 8c is configured in a rectangular shape, the opening length L corresponds to the length of the long side of the rectangle.

[0126] 19 shows another example of a method for manufacturing a lid member (a preparation step in a method for manufacturing a package). This example shows a step of forming a bonding portion 15 on a glass substrate G on which anti-reflection films 10a, 10b and a metal layer 14 have been formed. Specifically, a case will be described in which the glass substrate G is fixed to a supporting device 26 when forming the bonding portion 15 by a screen printing method.

[0127] The supporting device 26 includes a supporting plate 27 for supporting the glass substrate G, and a suction table 29 for supporting the supporting plate 27 .

[0128] The support plate 27 is configured to be detachable from the suction stand 29. The support plate 27 has openings 28 into which the protruding portions 8 and connecting portions 9 of the glass substrate G can be inserted. By inserting the protruding portions 8 and connecting portions 9 into the openings 28 with the protruding portions 8 of the glass substrate G facing downward, the support plate 27 can support only the frame portion 7 of the glass substrate G without coming into contact with the protruding portions 8 and the connecting portions 9.

[0129] The suction table 29 includes a support portion 30 that supports the support plate 27, and a suction port 31 for fixing the glass substrate G to the support plate 27. The support portion 30 has a support surface 30a that supports the peripheral edge portion of the support plate 27.

[0130] The suction stand 29 has a space 29a between the support plate 27 supported by the support portion 30 and the suction port 31. The suction port 31 is connected to a suction device (exhaust device) such as a pump (not shown).

[0131] The suction table 29 creates a negative pressure in the space 29a by discharging gas present in the space 29a from the suction port 31 while supporting the support plate 27 on which the glass substrate G is placed by the support portion 30. As a result, the glass substrate G is sucked into the space 29a through the opening 28 of the support plate 27, and is fixed to the support plate 27. Thereafter, a paste-like metallic bonding material for the bonding portion 15 is applied by screen printing so as to overlap the metal layer 14 of the glass substrate G.

[0132] By supporting the glass substrate G by the supporting device 26 as described above, it becomes possible to form the bonding portion 15 with high accuracy.

[0133] Fig. 20 shows another example of a package. The package 1 in this example includes a base 2 on which multiple light-emitting elements 3 are mounted, and the lid member 4 shown in Fig. 14. The lid member 4 individually seals each of the light-emitting elements 3 mounted on the base 2 with multiple protrusions 8 and a sealing portion 5.

[0134] According to the package 1 according to the present embodiment described above, by forming anti-reflection films 10a, 10b on the inner surface 8a and outer surface 8b of the protrusion 8 of the lid member 4, the light emitted from the light emitting element 3 can be efficiently transmitted by the protrusion 8. This makes it possible to maximize the light extraction efficiency of the package 1 in which the lid member 4 is used.

[0135] In this cover member 4, the value (Ta1 / Ta3) obtained by dividing the thickness Ta1 of the first antireflection film 10a formed on the base 11 of the protrusion 8 by the thickness Ta3 of the first antireflection film 10a formed on the top 13 of the protrusion 8 is set to be 0.75 or more and less than 1, thereby improving the light extraction efficiency.

[0136] The present invention is not limited to the configuration of the above embodiment, nor is it limited to the above-mentioned effects and advantages. Various modifications of the present invention are possible without departing from the spirit and scope of the present invention.

[0137] In the above embodiment, the lid member 4 and the glass substrate G on which the first antireflection film 10a and the second antireflection film 10b are formed are shown, but the present invention is not limited to this configuration. The lid member 4 and the glass substrate G according to the present invention may have only the first antireflection film 10a.

[0138] In the above embodiment, the cover member 4 has the protruding portion 8 configured such that the thickness of the top 13 is thinner than the thickness of the base 11, but the present invention is not limited to this configuration. The present invention is also applicable to a cover member 4 having a protruding portion 8 whose thickness is constant from the base 11 to the top 13.

[0139] 21 shows another example of the lid member. In this example, the inner surface 8a of the lid member 4 has a first curved surface 8a1 that is convex toward the inside of the protruding portion 8, a second curved surface 8a2 that is convex toward the outside of the protruding portion 8, and an inflection point 8a3 located between the first curved surface 8a1 and the second curved surface 8a2. The first curved surface 8a1 is formed at a position closer to the base 11 of the protruding portion 8 than the second curved surface 8a2. The center of curvature of the first curved surface 8a1 is located on the outside of the protruding portion 8. The second curved surface 8a2 is formed at a position closer to the apex 13 than the first curved surface 8a1. The center of curvature of the second curved surface 8a2 is located on the inside of the protruding portion 8.

[0140] The outer surface 8b of the cover member 4 has a first curved surface 8b1 that is convex toward the inside of the protruding portion 8, a second curved surface 8b2 that is convex toward the outside of the protruding portion 8, and an inflection point 8b3 located between the first curved surface 8b1 and the second curved surface 8b2. The first curved surface 8b1 is formed at a position closer to the base 11 of the protruding portion 8 than the second curved surface 8b2. The center of curvature of the first curved surface 8b1 is located outside the protruding portion 8. The second curved surface 8b2 is formed at a position closer to the apex 13 of the protruding portion 8 than the first curved surface 8b1. The center of curvature of the second curved surface 8b2 is located inside the protruding portion 8. The inflection points 8a3 and 8b3 are provided above (toward the apex 13) the second main surface 7b of the frame portion 7.

[0141] The inflection points 8a3, 8b3 of the inner surface 8a and the outer surface 8b can be formed in the cover member 4 by a molding device and a molding method shown in FIGS.

[0142] When the lid member 4 according to this example has a protruding portion 8 with inflection points 8a3, 8b3 formed therein, by setting the protruding angle θ to be 10° or more and 80° or less, it is possible to increase the light extraction efficiency of the lid member 4. The protruding angle θ is more preferably 20° or more and 70° or less, and even more preferably 20° or more and less than 40°.

[0143] In this example, the protrusion angle θ is defined differently from the embodiment shown in FIG. 5. In this example, the protrusion angle θ is an angle (acute angle) between a tangent L8 at the inflection point 8a3 and the first main surface 7a of the frame portion 7. Specifically, the protrusion angle θ is an angle (acute angle) between a tangent L8 at the inflection point 8a3 and a ninth line L9 drawn along the first main surface 7a of the frame portion 7. In this example, the opening length L and protrusion height H of the opening 8c are the same as those of the embodiment shown in FIG. 5.

[0144] In this example, the antireflection films (10a, 10b) are not necessarily required, but it is preferable to provide the antireflection films (10a, 10b), and the preferred material and thickness of the antireflection films (10a, 10b) are similar to those in the embodiment shown in Fig. 5. In this example, the preferred thickness (thickness of base 11, thickness of top 13) and outer diameter of protrusion 8 are similar to those in the embodiment shown in Fig. 5.

[0145] 22 to 26 show other examples of the package and the lid member. In this example, the shape of the lid member is different from that of the above embodiment. As shown in FIGS. 22 to 24, the top 13 of the lid member 4 in this example is configured in a flat plate shape. By forming the flat top 13 on the lid member 4 in this way, it is possible to form anti-reflection films 10a, 10b of uniform thickness on the inner surface 8a and the outer surface 8b of the lid member 4 related to the top 13. In addition, by forming the flat top 13 on the lid member 4, it is possible to make the distance D1 between the top 13 and the light-emitting element 3 as small as possible. In addition, the light emitted from the light-emitting element 3 is easily incident perpendicularly on the flat top 13. Therefore, the light extraction efficiency of the lid member 4 can be significantly improved.

[0146] Next, a method for manufacturing the package 1 in this example (a method for manufacturing the lid member 4) will be described. In this method, the preparation step in the method for manufacturing the package 1 differs from the example shown in Figs. 8 and 9. As shown in Fig. 25, the molding device 16 includes a support table 17, a mask member 18, a heating source 19, a pressing member 20, an external force generating device 21, and a molding die (lower support jig) 32. The configurations of the support table 17, the mask member 18, the heating source 19, the pressing member 20, and the external force generating device 21 are the same as those shown in Fig. 8.

[0147] The forming die 32 is disposed in the space 17b of the support base 17. The forming die 32 has a forming surface 32a that forms a part of the sheet glass GS that is softened by heating. The forming surface 32a is configured to have a flat surface shape. The surface roughness (arithmetic mean roughness) Ra of the forming surface 32a is, for example, 0.1 nm or more and 10 nm or less.

[0148] 26, in the forming step, a mask member 18 is placed on a glass sheet GS supported by a support stand 17. In this case, at least a part of an inner peripheral edge E2 of a through hole 18a of the mask member 18 is placed inside an opening edge E1 of the support stand 17. Thereafter, a pressing member 20 presses the support stand 17 and the mask member 18 in a direction to bring them closer to each other.

[0149] Next, the plate glass GS is heated from the mask member 18 side by the heating source 19. As a result, a part of the plate glass GS is thermally deformed. At this time, a part of the deformed plate glass GS comes into contact with the forming surface 32a of the forming die 32. As a result, a part of the plate glass GS is formed into a flat plate shape. Through this forming process, a cover member 4 having a frame portion 7, a protruding portion 8 including a flat top portion 13, and a connecting portion 9 is formed.

[0150] The package 1 can be manufactured by carrying out the film forming process and bonding process illustrated in FIGS. EXAMPLES

[0151] Examples of the present invention will be described below, but the present invention is not limited to these examples.

[0152] In order to confirm the effects of the present invention, the inventors conducted a test to measure the light extraction efficiency of a lid member. In this test, lid members (samples No. 1 to No. 8) of examples and comparative examples each having an anti-reflection film on the inner surface of the protrusion were prepared, and the light extraction efficiency of each example was measured. For each sample, a lid member having a shape shown in FIG. 21 was used.

[0153] The light extraction efficiency was calculated by measuring the energy EN1 of the light (wavelength 265 nm) emitted from the light-emitting element without passing through the lid member, and measuring the energy EN2 when the light (wavelength 265 nm) emitted from the light-emitting element was transmitted through the lid member, and then calculating the ratio of these energies (EN2 / EN1).

[0154] The test conditions and measurement results are shown in Table 1. [Table 1]

[0155] In Table 1, the light extraction efficiency (EN2 / EN1) for the comparative example of sample No. 7 is used as the standard, and in the examples, light extraction efficiency that is 1.1 times or more the standard is judged as good (○), and light extraction efficiency that is less than 1.1 times is judged as "X".

[0156] As shown in Table 1, it was found that the light extraction efficiency is improved when the value (Ta1 / Ta3) obtained by dividing the thickness Ta1 of the first antireflection film formed at the base of the protrusion by the thickness Ta3 of the first antireflection film formed at the top of the protrusion is 0.75 or more and less than 1 (samples No. 1 to No. 6). [Explanation of symbols]

[0157] 1 package 2 Base 3 Light emitting element 4 Cover member 7 Frame 7a First main surface of frame 7b Second main surface of frame 8 Protrusion 8a Inner surface of protrusion 8a1 First curved surface of the inner surface of the protrusion 8a2 Second curved surface of the inner surface of the protrusion 8a3 Inflection point of inner surface at protrusion 8b Outer surface of protrusion 8c Opening of protrusion 10a First anti-reflection coating 10b Second anti-reflection coating 11 Base 13 Top 14 Metal layer Ta1 Thickness of the first anti-reflective coating at the base of the protrusion Ta3 Thickness of the first anti-reflective coating at the top of the protrusion Tb1 Thickness of the second anti-reflective coating at the base of the protrusion Tb3 Thickness of the second anti-reflective coating at the top of the protrusion Tmin Thickness at the top of the protrusion Tmax Thickness at base of protrusion θ Protrusion angle

Claims

1. A glass cover member used for a package including a light emitting element, A plate-shaped frame portion and a dome-shaped protrusion portion protruding from the frame portion, the protrusion has an inner surface and an outer surface; The protrusion includes a top portion and a base portion that is integral with the frame portion, an anti-reflection film is formed on the inner surface of the protrusion, a value obtained by dividing the thickness of the anti-reflection film formed on the base by the thickness of the anti-reflection film formed on the top is equal to or greater than 0.75 and less than 1; A cover member characterized by:

2. The thickness of the top of the protrusion is less than the thickness of the base of the protrusion. The cover member according to claim 1 .

3. The frame portion has a first main surface connected to the inner surface of the protrusion and a second main surface connected to the outer surface of the protrusion, The anti-reflection film is formed on the first main surface of the frame portion. The cover member according to claim 1 or 2.

4. a metal layer is formed on the opposite side of the antireflection film formed on the first main surface of the frame portion from the first main surface side; The cover member according to claim 3 .

5. The anti-reflective film includes a hafnium oxide film. The cover member according to claim 1 or 2.

6. A second anti-reflection film is formed on the outer surface of the protrusion. The cover member according to claim 1 or 2.

7. the thickness of the second anti-reflection film formed on the top portion is greater than the thickness of the second anti-reflection film formed on the base portion; The cover member according to claim 6 .

8. the protruding portion protrudes from the frame portion at a predetermined protruding angle, The protruding angle of the protruding portion is equal to or greater than 10° and equal to or less than 80°. The cover member according to claim 1 or 2.

9. The protrusion has an opening formed on the inner surface side, A ratio L / H of an opening length L of the opening to a protruding height H of the protruding portion is 1.2 or more and 8 or less. The cover member according to claim 1 or 2.

10. The opening is configured in a rectangular shape. The cover according to claim 9 .

11. The inner surface has a first curved surface that is connected to the first main surface of the frame portion and is convex toward the inside of the protrusion, a second curved surface that is convex toward the outside of the protrusion, and an inflection point located between the first curved surface and the second curved surface. The cover member according to claim 1 or 2.

12. A light emitting device comprising: a light emitting element; a base supporting the light emitting element; and the cover member according to claim 1 or 2. A package characterized by:

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