Sensor, sensor system, and electronic apparatus

Abstract

To provide a sensor, a sensor system, and an electronic apparatus that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes a base body, a fixation part, and a movable part supported on the fixation part. The movable part includes a plurality of annular parts, a plurality of connection parts, and a first structure. The plurality of annular parts is individually provided around the fixation part centered on the fixation part. The plurality of connection parts extends along a radial direction. One of the plurality of connection parts connects two of the plurality of annular parts to each other. A first annular part of the plurality of annular parts is on an outermost side of the plurality of annular parts. The first structure is connected to the first annular part. The first annular part is provided between the fixation part and the first structure. A length in the radial direction of the first structure is longer than a length in the radial direction of the first annular part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE FIELD OF THE DISCLOSURE Embodiments of the invention relate to sensors, sensor systems and electronic devices. [Background technology]

[0002] For example, there is a sensor having a MEMS (Micro Electro Mechanical Systems) structure. In some cases, electronic devices are controlled by the force obtained by the sensor. It is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Chinese Patent No. 104976996 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide sensors, sensor systems and electronic devices that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a base body including a first surface, a fixed portion fixed to the first surface, and a movable portion supported by the fixed portion. A first gap is provided between the first surface and the movable portion. The movable portion includes a plurality of annular portions, a plurality of connecting portions, and a first structure. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface. The plurality of connecting portions extend along a radial direction. The radial direction passes through a first center of the fixed portion in the first plane and is along the first plane. One of the plurality of connecting portions connects two of the plurality of annular portions to each other. The plurality of annular portions includes a first annular portion. The first annular portion is the outermost of the plurality of annular portions. The first structure is connected to the first annular portion. The first annular portion is provided between the fixed portion and the first structure. A first structure length in the radial direction of the first structure is longer than a first annular length in the radial direction of the first annular portion. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 9]9(a) to 9(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 10] 10(a) and 10(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2 and 3 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2 is a cross-sectional view taken along the line A1-A2 in Fig. 1. Fig. 3 is a cross-sectional view taken along the line A3-A4 in Fig. 1. FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. In FIG. 4, a portion of FIG. 1 is shown enlarged. As shown in FIGS. 1 to 3, a sensor 110 according to the embodiment includes a base body 50s, a fixed part 10F, and a movable part 10M.

[0008] The base body 50s includes a first surface 50a. The fixed portion 10F is fixed to the first surface 50a. The movable portion 10M is supported by the fixed portion 10F.

[0009] 2 and 3, a first gap G1 is provided between the first surface 50a and the movable part 10M. For example, an insulating member 55 is provided on the first surface 50a. A fixed part 10F is provided on the insulating member 55. No insulating member 55 is provided between the first surface 50a and the movable part 10M.

[0010] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide.

[0011] The movable portion 10M includes a plurality of annular portions 10, a plurality of connecting portions 20, and a first structure 41. Each of the plurality of annular portions 10 is provided around the fixed portion 10F with the fixed portion 10F as the center on a first plane PL1 along the first surface 50a.

[0012] The direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the XY plane.

[0013] For example, each of the multiple annular portions 10 is concentric about the fixing portion 10F. Each of the multiple annular portions 10 extends along a circular circumferential direction Dc.

[0014] For example, the multiple annular portions 10 include a first annular portion 11. The first annular portion 11 is the outermost of the multiple annular portions 10. The multiple annular portions 10 may include a second annular portion 12, a third annular portion 13, a fourth annular portion 14, a fifth annular portion 15, and a sixth annular portion 16, etc. The number of the multiple annular portions 10 is arbitrary.

[0015] For example, the second annular portion 12 is provided between the first annular portion 11 and the fixed portion 10F. The second annular portion 12 is adjacent to the first annular portion 11. The second annular portion 12 is closest to the first annular portion 11 among the multiple annular portions 10.

[0016] The multiple connection portions 20 extend along a radial direction Dr. The radial direction Dr passes through a first center 10C in the first plane PL1 of the fixing portion 10F and is along the first plane PL1. One of the multiple connection portions 20 connects two of the multiple annular portions 10 to each other.

[0017] For example, the multiple connection portions 20 include a first connection portion 21. The first connection portion 21 is provided between the second annular portion 12 and the first annular portion 11. The first connection portion 21 connects the second annular portion 12 and the first annular portion 11 to each other. The multiple connection portions 20 may include a second connection portion 22, a third connection portion 23, a fourth connection portion 24, a fifth connection portion 25, a sixth connection portion 26, and the like. The number of the multiple connection portions 20 is arbitrary.

[0018] The first structure 41 is connected to the first annular portion 11. The first annular portion 11 is provided between the fixed portion 10F and the first structure 41. The first structure 41 is provided on the outer side of the first annular portion 11.

[0019] 4 illustrates an enlarged view of a portion including the first structure 41. As shown in FIG. 4, the length of the first structure 41 in the radial direction Dr is defined as a first structure length w41. The length of the first annular portion 11 in the radial direction Dr is defined as a first annular portion length w11. The first structure length w41 is longer than the first annular portion length w11. For example, the first structure 41 functions as a weight.

[0020] As shown in FIG. 1, a plurality of fixed electrodes 30 are provided in the sensor 110. The plurality of fixed electrodes 30 are fixed to, for example, the first surface 50a. For example, a signal including an AC component is applied between a part of the plurality of fixed electrodes 30 and the movable part 10M. This causes the movable part 10M to vibrate. When an external force is applied to the vibrating movable part 10M, the vibration state changes. By detecting the change in the vibration state, the applied external force can be detected. The change in the vibration state is detected, for example, as a change in electrostatic capacitance. The change in the vibration state due to the external force is caused, for example, by Coriolis force. The change in the vibration state can be detected, for example, by another part of the plurality of fixed electrodes 30. The signal may be supplied, for example, by the control unit 70. The change in the vibration state may be detected, for example, by the control unit 70.

[0021] In the embodiment, a first structure 41 that functions as a weight is provided. By providing the first structure 41, for example, the vibration of the movable part 10M is stabilized. The vibration that becomes a noise component is suppressed. This makes it possible to suppress noise in the obtained signal. High-precision detection is possible.

[0022] In the embodiment, the first structure 41 is provided outside the first annular portion 11. The width (first structure length w41) of the first structure 41 can be increased. The mass of the first structure 41 can be increased. This suppresses components that become unnecessary noise in the vibration of the movable part 10M. This enables detection with higher accuracy.

[0023] For example, in the first reference example, a weight is provided between the first annular portion 11 and the second annular portion 12. In this case, the width of the weight cannot exceed the distance between the first annular portion 11 and the second annular portion 12. For this reason, in the first reference example, it is difficult to increase the mass of the weight.

[0024] In contrast, in the embodiment, the first structure 41 functioning as a weight is provided outside the first annular portion 11. It is easy to increase the width (first structure length w41) of the first structure 41. The mass of the first structure 41 can be increased. This enables detection with higher accuracy. According to the embodiment, it is possible to provide a sensor with improved characteristics.

[0025] As already described, in the sensor 110, the multiple annular portions 10 may include the second annular portion 12. The second annular portion 12 is provided between the fixed portion 10F and the first annular portion 11. The second annular portion 12 is closest to the first annular portion 11 among the multiple annular portions 10. The distance between the second annular portion 12 and the first annular portion 11 in the radial direction Dr is defined as a first distance d11 (see FIG. 4). The first distance d11 corresponds to, for example, the distance between the multiple annular portions 10. The first distance d11 may substantially correspond to, for example, the pitch of the multiple annular portions 10.

[0026] In the embodiment, for example, the first structure length w41 is longer than the first distance d11. In this manner, the first structure length w41 can be made longer than the pitch in the sensor 110. A large mass can be obtained.

[0027] As shown in FIG. 4, the first structure 41 may include a first structure part 41p and a first structure connecting part 41a. The first structure connecting part 41a is provided between the first annular part 11 and the first structure part 41p. The first structure connecting part 41a connects the first structure part 41p to the first annular part 11. The length of the first structure connecting part 41a in the circumferential direction Dc centered on the fixing part 10F along the first surface 50a is defined as a first connecting length L41a. The length of the first structure part 41p in the circumferential direction Dc is defined as a first structure part length L41p. The first structure connecting part 41a is shorter than the first structure part length L41p.

[0028] The first structure part length L41p is connected to the first annular part 11 by the narrow first structure connecting part 41a. With this structure, a high degree of freedom is obtained in the movement of the first structure part 41p. For example, the uniformity of the vibration characteristics can be improved in the first annular part 11. Noise can be further suppressed. Higher accuracy of detection is possible.

[0029] 1, the movable part 10M may include a plurality of first structures 41. The plurality of first structures 41 are provided around the first annular part 11 on the first plane PL1. The plurality of first structures 41 are arranged along a circumferential direction Dc. The circumferential direction Dc is a direction along the first plane PL1 and along a circumference centered on the fixed part 10F.

[0030] As shown in FIG. 1, a plurality of fixed electrodes 30 are provided in the sensor 110. In this example, the plurality of fixed electrodes 30 include, for example, a first fixed electrode 31, a second fixed electrode 32, a third fixed electrode 33, a fourth fixed electrode 34, a fifth fixed electrode 35, and a sixth fixed electrode 36. The first fixed electrode 31 is provided between the first annular portion 11 and the second annular portion 12. The second fixed electrode 32 is provided between the second annular portion 12 and the third annular portion 13. The third fixed electrode 33 is provided between the third annular portion 13 and the fourth annular portion 14. The fourth fixed electrode 34 is provided between the fourth annular portion 14 and the fifth annular portion 15. The fifth fixed electrode 35 is provided between the fifth annular portion 15 and the sixth annular portion 16. The sixth fixed electrode 36 is provided between the sixth annular portion 16 and the fixed portion 10F.

[0031] In this example, a plurality of first fixed electrodes 31 are provided. The plurality of first fixed electrodes 31 are fixed to the first surface 50a. The plurality of first fixed electrodes 31 are provided between the second annular portion 12 and the first annular portion 11. The plurality of first fixed electrodes 31 are arranged along the circumferential direction Dc. In this example, the number of the plurality of first fixed electrodes 31 (the number of first fixed electrodes) is eight. For example, it is possible to generate vibrations along each of two intersecting directions parallel to the first plane PL1, and then detect the vibrations. Furthermore, more accurate detection is possible by correcting the resonance frequency of the vibrations.

[0032] The number of the multiple first structures 41 (the number of first structures) is greater than the number of the multiple first fixed electrodes 31 (the number of first fixed electrodes). The number of the first structures is preferably, for example, an integer multiple of two or more of the number of the first fixed electrodes. The number of the first structures may be, for example, four times the number of the first fixed electrodes. For example, high symmetry is obtained in the movable part 10M. More stable vibration is obtained. In the embodiment, the number of the first fixed electrodes may be eight or more.

[0033] Thus, the sensor 110 includes a base 50s including a first surface 50a, a fixed portion 10F fixed to the first surface 50a, and a movable portion 10M supported by the fixed portion 10F. A first gap G1 is provided between the first surface 50a and the movable portion 10M. The movable portion 10M includes a plurality of annular portions 10, a plurality of connecting portions 20, and a plurality of first structures 41. Each of the plurality of annular portions 10 is provided around the fixed portion 10F with the fixed portion 10F as the center on a first plane PL1 along the first surface 50a. The plurality of connecting portions 20 extend along a radial direction Dr. The radial direction Dr passes through a first center 10C on the first plane PL1 of the fixed portion 10F and is along the first plane PL1. One of the plurality of connecting portions 20 connects two of the plurality of annular portions 10 to each other. The plurality of annular portions 10 includes a first annular portion 11. The first annular portion 11 is the outermost of the multiple annular portions 10. The multiple first structures 41 are connected to the first annular portion 11. The first annular portion 11 is provided between the fixing portion 10F and the multiple first structures 41.

[0034] In the embodiment, the plurality of first structures 41 and the first annular portion 11 may satisfy at least one of a first condition, a second condition, and a third condition. In the first condition, the sum of the areas of the plurality of first structures 41 in the first plane PL1 (first sum) is larger than the area of ​​the first annular portion 11 in the first plane PL1 (first annular portion area). In the second condition, the sum of the volumes of the plurality of first structures 41 (second sum) is larger than the volume of the first annular portion 11 (first annular portion volume). In the third condition, the sum of the masses of the plurality of first structures 41 (third sum) is larger than the mass of the first annular portion 11 (first annular portion mass).

[0035] The plurality of first structures 41 that satisfy such conditions function as weights. Such a plurality of first structures 41 are provided on the outside of the first annular portion 11. The mass of the plurality of first structures 41 can be increased. Noise is suppressed, and highly accurate detection is possible.

[0036] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 6 is a schematic plan view illustrating a part of the sensor according to the first embodiment. 5 and 6, in a sensor 111 according to the embodiment, a first structure 41 is connected to a first annular portion 11 by a plurality of structure connecting portions. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0037] 6, the first structure 41 includes a first structure part 41p, a first structure connecting part 41a, and a second structure connecting part 41b. The first structure connecting part 41a is provided between the first annular part 11 and the first structure part 41p, and connects the first structure part 41p to the first annular part 11. The second structure connecting part 41b is provided between the first annular part 11 and the first structure part 41p, and connects the first structure part 41p to the first annular part 11. The direction from the first structure connecting part 41a to the second structure connecting part 41b is along the circumferential direction Dc.

[0038] The first connection length L41a of the first structure connection portion 41a in the circumferential direction Dc is shorter than the first structure part length L41p of the first structure part 41p in the circumferential direction Dc. The second connection length L41b of the second structure connection portion 41b in the circumferential direction Dc is shorter than the first structure part length L41p.

[0039] A second gap G2 is provided between the first structure connection portion 41a and the second structure connection portion 41b. For example, by providing a plurality of structure connection portions, stable mechanical strength can be obtained. By providing the second gap G2 between the plurality of structure connection portions, processing via the second gap G2 becomes easier. High accuracy can be obtained in the movement of the movable portion 10M. Higher accuracy detection becomes possible.

[0040] As shown in FIGS. 5 and 6, the sensor 111 may further include a first fixed electrode 31. The first fixed electrode 31 is fixed to the first surface 50a (see FIG. 3). The multiple annular portions 10 may include a second annular portion 12. The second annular portion 12 is provided between the fixed portion 10F and the first annular portion 11. The second annular portion 12 is the closest to the first annular portion 11 among the multiple annular portions 10. The first fixed electrode 31 is provided between the second annular portion 12 and the first annular portion 11. The sensor 111 may include a control unit 70 (see FIGS. 2 and 3). The control unit 70 is capable of applying an electrical signal between the fixed portion 10F and the first fixed electrode 31.

[0041] 6, the multiple connection portions 20 include a first connection portion 21. The first connection portion 21 is provided between the second annular portion 12 and the first annular portion 11. The first connection portion 21 connects the second annular portion 12 and the first annular portion 11 to each other. The first connection portion 21 extends along the radial direction Dr.

[0042] 6, the movable portion 10M may further include a second structure 42. The second structure 42 is provided between the second annular portion 12 and the first annular portion 11. The second structure 42 is connected to the first connection portion 21. The direction from the first fixed electrode 31 to the second structure 42 is along the circumferential direction Dc.

[0043] The second structure 42 functions as, for example, a weight. Noise is further suppressed. Higher accuracy of detection is possible.

[0044] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. 7 illustrates a fixed part 10F and a movable part 10M. In the sensor 120 according to the embodiment, at least one of the multiple fixed electrodes 30 includes multiple partial electrodes. The configuration of the sensor 120 other than this may be similar to the configuration of the sensor 110, etc.

[0045] In this example, at least one of the multiple fixed electrodes 30 is a second fixed electrode 32. The second fixed electrode 32 includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. The first partial electrode 30a and the second partial electrode 30b are aligned in the circumferential direction Dc. In this example, two second partial electrodes 30b are provided. The first partial electrode 30a is provided between the two partial electrodes in the circumferential direction Dc. Different signals may be supplied to the multiple partial electrodes. Signals obtained from the multiple partial electrodes may be processed to perform detection.

[0046] As shown in FIG. 7, the movable part 10M may further include a first radiating structure 28p. The first radiating structure 28p is connected to one of the plurality of annular parts 10. In this example, the first radiating structure 28p is connected to the fourth annular part 14. The first radiating structure 28p extends from one of the plurality of annular parts 10 along a first radial direction Dr1. The first radiating structure 28p is separated from another one of the plurality of annular parts 10 in the first radial direction Dr1. In this example, the first radiating structure 28p is separated from the fifth annular part 15 in the first radial direction Dr1. The other one of the plurality of annular parts 10 is adjacent to the one of the plurality of annular parts 10 among the plurality of annular parts 10. The other one of the plurality of annular parts 10 is closest to the one of the plurality of annular parts 10 among the plurality of annular parts 10.

[0047] The movable part 10M may further include a second radiating structure 28q. The second radiating structure 28q is connected to the one of the plurality of annular parts 10. The second radiating structure 28q is connected to the fifth annular part 15. The second radiating structure 28q extends from the other one of the plurality of annular parts 10 toward the one of the plurality of annular parts 10 along a first radial direction Dr1. The second radiating structure 28q extends from the fifth annular part 15 toward the fourth annular part 14 along the first radial direction Dr1. The second radiating structure 28q is separated from the first radiating structure 28p in the first radial direction Dr1.

[0048] By providing such a radiating structure, the distribution of the mass can be made uniform throughout the entire structure without connecting adjacent annular portions, making it easier to obtain higher characteristics.

[0049] 7, in this example, the direction in which the second connection portion 22 extends (first radial direction Dr1) is aligned with the direction in which the third connection portion 23 extends. For example, a detection signal with high intensity can be easily obtained.

[0050] As shown in FIG. 7, the sensor 120 may include a connection member 48. The connection member 48 is fixed to the first surface 50a. A fixed portion 10F is provided around the connection member 48. An electrical connection may be made through the connection member 48. In this example, the connection member 48 includes a first connection member 48a and a second connection member 48b. The connection member 48 (e.g., the first connection member 48a and the second connection member 48b, etc.) may be electrically insulated from the fixed portion 10F and the movable portion 10M. At least a part of the connection member 48 (e.g., the first connection member 48a and the second connection member 48b, etc.) may be electrically connected to the fixed portion 10F or the movable portion 10M by wiring for electrical connection or the like.

[0051] Second embodiment The second embodiment relates to an electronic device. FIG. 8 is a schematic view illustrating an electronic device according to the second embodiment. 8, an electronic device 310 according to an embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a driving device 185. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 can be controlled with high accuracy.

[0052] 8, a sensor system 210 according to an embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.

[0053] 9(a) to 9(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 9(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 9(b), the electronic device 310 may be at least a part of a machine robot installed in a manufacturing plant or the like. As shown in FIG. 9(c), the electronic device 310 may be at least a part of an automatic guided vehicle in a factory or the like. As shown in FIG. 9(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 9(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 9(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 9(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 9(h), the electronic device 310 may be at least a part of a car. The electronic device 310 may include, for example, at least one of a robot and a moving object.

[0054] 10(a) and 10(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Fig. 10(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example of Fig. 10(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit a signal obtained from the sensor 110, for example, by at least one of a wireless and a wired method. The sensor 430 is provided, for example, on a slope surface 410 of a road 400 or the like. The sensor 430 can monitor, for example, the state of a facility (for example, infrastructure) or the like. The sensor 430 may be, for example, a state monitoring device.

[0055] For example, the sensor 430 detects a change in the condition of the slope surface 410 of the road 400 with high accuracy. The change in the condition of the slope surface 410 includes, for example, at least one of a change in the inclination angle and a change in the vibration state. A signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.

[0056] As shown in FIG. 10(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided on a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, due to deterioration or the like, the angle of at least one of the main girder 450 and the pier 440 may change. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0057] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connection portions, and a first structure, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion on the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions includes a first annular portion, the first annular portion is an outermost of the plurality of annular portions, the first structure is connected to the first annular portion, the first annular portion is provided between the fixed portion and the first structure, A sensor, wherein a first structure length in the radial direction of the first structure is longer than a first annular portion length in the radial direction of the first annular portion.

[0058] (Technical proposal 2) the plurality of annular portions includes a second annular portion, The second annular portion is provided between the fixed portion and the first annular portion, the second annular portion is the closest to the first annular portion among the plurality of annular portions; The sensor described in Technical Proposal 1, wherein the first structure length is longer than a first distance in the radial direction between the second annular portion and the first annular portion.

[0059] (Technical proposal 3) the first structure includes a first structure part and a first structure connection part, the first structural component connection portion is provided between the first annular portion and the first structural component, and connects the first structural component to the first annular portion; A sensor as described in Technical Proposal 1 or 2, wherein a first connection length of the first structure connection portion in a circumferential direction along the first surface and centered on the fixed portion is shorter than a first structure part length of the first structure part in the circumferential direction.

[0060] (Technical proposal 4) The first structure further includes a second structure connection portion, the second structural component connection portion is provided between the first annular portion and the first structural component and connects the first structural component to the first annular portion; a direction from the first structure connection portion to the second structure connection portion is along the circumferential direction, A sensor as described in Technical Proposal 3, wherein the second connection length of the second structure connection portion in the circumferential direction is shorter than the first structure component length.

[0061] (Technical proposal 5) Further comprising a first fixed electrode fixed to the first surface, The sensor described in Technical Proposal 2, wherein the first fixed electrode is provided between the second annular portion and the first annular portion.

[0062] (Technical proposal 6) The sensor described in Technical Solution 5 further includes a control unit capable of applying an electrical signal between the fixed portion and the first fixed electrode.

[0063] (Technical proposal 7) the movable portion includes a plurality of the first structures, the plurality of first structures are disposed around the first annular portion in the first plane; A sensor described in Technical Proposal 2, wherein the multiple first structures are arranged along the first plane in a circumferential direction centered on the fixed portion.

[0064] (Technical proposal 8) Further comprising a plurality of first fixed electrodes fixed to the first surface; the plurality of first fixed electrodes are provided between the second annular portion and the first annular portion, The plurality of first fixed electrodes are arranged along the circumferential direction, The sensor described in Technical Solution 7, wherein the number of first structures among the plurality of first structures is greater than the number of first fixed electrodes among the plurality of first fixed electrodes.

[0065] (Technical proposal 9) The sensor described in Technical Solution 8, wherein the number of the first fixed electrodes is 8 or more.

[0066] (Technical proposal 10) The sensor described in Technical Proposal 9, wherein the number of the first structures is an integer multiple of the number of the first fixed electrodes, the integer multiple being equal to or greater than two.

[0067] (Technical proposal 11) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connection portions, and a plurality of first structures, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion on the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions includes a first annular portion, the first annular portion is an outermost of the plurality of annular portions, the plurality of first structures are connected to the first annular portion; the first annular portion is provided between the fixing portion and the plurality of first structures, the plurality of first structures and the first annular portion satisfy at least one of a first condition, a second condition, and a third condition, In the first condition, a first sum of areas of the first structures in the first plane is larger than a first annular portion area of ​​the first annular portion in the first plane, In the second condition, a second sum of the volumes of the first structures is greater than a first annular portion volume of the first annular portion, A sensor in which, under the third condition, a third sum of the masses of the plurality of first structures is greater than a first annular portion mass of the first annular portion.

[0068] (Technical proposal 12) the first structure includes a first structure part and a first structure connection part, the first structural component connection portion is provided between the first annular portion and the first structural component, and connects the first structural component to the first annular portion; A sensor as described in Technical Proposal 11, wherein a first connection length of the first structure connection portion in a circumferential direction along the first plane and centered on the fixed portion is shorter than a first structure part length of the first structure part in the circumferential direction.

[0069] (Technical proposal 13) The first structure further includes a second structure connection portion, the second structural component connection portion is provided between the first annular portion and the first structural component and connects the first structural component to the first annular portion; a direction from the first structure connection portion to the second structure connection portion is along the circumferential direction, A sensor as described in Technical Proposal 12, wherein the second connection length of the second structure connection portion in the circumferential direction is shorter than the first structure component length.

[0070] (Technical proposal 14) Further comprising a first fixed electrode fixed to the first surface, the plurality of annular portions includes a second annular portion, The second annular portion is provided between the fixed portion and the first annular portion, the second annular portion is the closest to the first annular portion among the plurality of annular portions; The sensor described in Technical Proposal 12 or 13, wherein the first fixed electrode is provided between the second annular portion and the first annular portion.

[0071] (Technical proposal 15) The sensor described in Technical Proposal 14 further comprises a control unit capable of applying an electrical signal between the fixed portion and the first fixed electrode.

[0072] (Technical proposal 16) the plurality of connection portions include a first connection portion, the first connection portion is provided between the second annular portion and the first annular portion, the first connection portion connects the second annular portion and the first annular portion to each other, The movable portion further includes a second structure, the second structure is provided between the second annular portion and the first annular portion, the second structure is connected to the first connection portion, The sensor described in Technical Proposal 14 or 15, wherein the direction from the first fixed electrode to the second structure is along the circumferential direction.

[0073] (Technical proposal 17) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connection portions, and a first structure, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion on the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions includes a first annular portion, the first structure is connected to the first annular portion, a first structure length in the radial direction of the first structure is longer than a first annular portion length in the radial direction of the first annular portion, the first structure includes a first structure part, a first structure connection portion, and a second structure connection portion; the first structural component connection portion is provided between the first annular portion and the first structural component, and connects the first structural component to the first annular portion; the second structural component connection portion is provided between the first annular portion and the first structural component and connects the first structural component to the first annular portion; A sensor in which the direction from the first structure connection portion to the second structure connection portion is along the first plane and along a circumferential direction centered on the fixed portion.

[0074] (Technical proposal 18) a first connection length of the first structure connection portion in the circumferential direction is shorter than a first structure part length of the first structure part in the circumferential direction, The sensor described in Technical Proposal 17, wherein the second connection length of the second structure connection portion in the circumferential direction is shorter than the first structure component length.

[0075] (Technical proposal 19) A sensor according to Technical Proposal 1; a detection target member to which the sensor is fixed; A sensor system comprising:

[0076] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 18; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

[0077] According to the embodiments, it is possible to provide a sensor, a sensor system, and an electronic device that can improve characteristics.

[0078] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0079] The above describes the embodiment of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the member, substrate, sensor unit, housing, sensor element, base, fixed unit, movable unit, and control unit, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in the same way and obtain the same effect by appropriately selecting them from the known range.

[0080] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0081] In addition, all sensors, sensor systems, and electronic devices that can be implemented by a person skilled in the art by appropriate design modifications based on the sensors, sensor systems, and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0082] In addition, within the scope of the concept of the present invention, a person skilled in the art may think of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0083] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0084] 10: annular portion, 10C: first center, 10F: fixed portion, 10M: movable portion, 11-16: first to sixth annular portions, 20: connection portion, 21-26: first to sixth connection portions, 28p, 28q: first and second radiation structures, 30: fixed electrode, 30a, 30b: first and second partial electrodes, 31-36: first to sixth fixed electrodes, 41, 42: first and second structures, 41a, 41b: first and second structure connection portions, 41p: first structure part, 50a: first surface, 50s: base, 55: insulating member, 70: control portion, 81: detection target member, 110-111, 120: sensor, 170: circuit control portion, 180: circuit, 185: driving device, 210: sensor system, 310: electronic device, 400: road, 410: slope surface, 420: transmitter / receiver, 430: sensor, 440: pier, 450: main girder, 460: bridge, 470: river, Dc: circumferential direction, Dr: radial direction, Dr1: first radial direction, G1, G2: first and second gaps, L41a, L41b: first and second connection lengths, L41p: first structural part length, PL1: first plane, S1: signal, w11: first annular length, w41: first structural length

Claims

1. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connection portions, and a first structure, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion in the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions includes a first annular portion, the first annular portion is an outermost of the plurality of annular portions, the first structure is connected to the first annular portion; The first annular portion is provided between the fixed portion and the first structure, A sensor, wherein a first structure length of the first structure in the radial direction is longer than a first annular portion length of the first annular portion in the radial direction.

2. the plurality of annular portions includes a second annular portion, The second annular portion is provided between the fixed portion and the first annular portion, the second annular portion is the closest to the first annular portion among the plurality of annular portions; The sensor of claim 1 , wherein the first structure length is greater than a first distance in the radial direction between the second annular portion and the first annular portion.

3. The first structure includes a first structure part and a first structure connection part, the first structural component connection portion is provided between the first annular portion and the first structural component, and connects the first structural component to the first annular portion; 3. The sensor according to claim 1, wherein a first connection length of the first structure connection portion in a circumferential direction along the first surface and centered on the fixing portion is shorter than a first structure part length of the first structure part in the circumferential direction.

4. The first structure further includes a second structure connection portion, the second structural component connection portion is provided between the first annular portion and the first structural component and connects the first structural component to the first annular portion; a direction from the first structure connection portion to the second structure connection portion is along the circumferential direction, The sensor according to claim 3 , wherein a second connection length of the second structure connection portion in the circumferential direction is shorter than a length of the first structure part.

5. a first fixed electrode fixed to the first surface; The sensor according to claim 2 , wherein the first fixed electrode is provided between the second annular portion and the first annular portion.

6. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connection portions, and a plurality of first structures, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion in the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions includes a first annular portion, the first annular portion is an outermost of the plurality of annular portions, the plurality of first structures are connected to the first annular portion; the first annular portion is provided between the fixing portion and the plurality of first structures, the plurality of first structures and the first annular portion satisfy at least one of a first condition, a second condition, and a third condition, In the first condition, a first sum of areas of the first structures in the first plane is larger than a first annular portion area in the first plane of the first annular portion, In the second condition, a second sum of the volumes of the first structures is greater than a first annular portion volume of the first annular portion, A sensor in which, in the third condition, a third sum of the masses of each of the plurality of first structures is greater than a first annular portion mass of the first annular portion.

7. The first structure includes a first structure part and a first structure connection part, the first structural component connection portion is provided between the first annular portion and the first structural component, and connects the first structural component to the first annular portion; The sensor according to claim 6, wherein a first connection length of the first structure connection portion in a circumferential direction along the first plane and centered on the fixing portion is shorter than a first structure part length of the first structure part in the circumferential direction.

8. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connection portions, and a first structure, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion in the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions includes a first annular portion, the first structure is connected to the first annular portion; A first structure length in the radial direction of the first structure is longer than a first annular portion length in the radial direction of the first annular portion, the first structure includes a first structure part, a first structure connection portion, and a second structure connection portion; the first structural component connection portion is provided between the first annular portion and the first structural component, and connects the first structural component to the first annular portion; the second structural component connection portion is provided between the first annular portion and the first structural component and connects the first structural component to the first annular portion; A sensor in which the direction from the first structure connection portion to the second structure connection portion is along the first plane and along a circumferential direction centered on the fixed portion.

9. A sensor according to claim 1; a detection target member to which the sensor is fixed; A sensor system comprising:

10. A sensor according to claim 1; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

Images