Heat treatment device

Abstract

To provide a heat treatment device capable of improving detection accuracy of a temperature of workpiece.SOLUTION: A heat treatment device includes: a chamber which stores workpiece therein, and can maintain an atmosphere having pressure reduced below the atmospheric pressure; an exhaust part for exhausting the inside of the chamber; a heater provided in the inside of the chamber; and a detection part which is provided in the inside of the chamber, and detects the temperature of the workpiece. The detection part has a first part which has a linear shape, is brought into close contact with the surface of the workpiece, and extends along the surface of the workpiece, and a second part which is connected to the first part, and extends in a direction crossing the first part, and a temperature measuring point is provided on the tip side of the first part.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] An embodiment of the present invention relates to a heat treatment apparatus. [Background technology]

[0002] 2. Description of the Related Art There are heat treatment devices that heat a workpiece to form a film or the like on the surface of the workpiece or to treat the surface of the workpiece. For example, a heat treatment device has been proposed that includes a chamber in which a workpiece is stored, multiple heaters provided inside the chamber, a detection unit provided inside the chamber facing the workpiece for detecting the temperature of the workpiece, and a controller provided outside the chamber for controlling the multiple heaters based on the detection value detected by the detection unit. If a detection unit for detecting the temperature of the workpiece is provided, the temperature of the workpiece can be kept within a predetermined range.

[0003] However, it was found that simply providing a detection unit reduces the accuracy of detecting the temperature of the workpiece. If the accuracy of detecting the temperature of the workpiece is reduced, there is a risk that the quality of the film formed on the surface of the workpiece or the treated portion will decrease. Therefore, there has been a demand for the development of a technology that can improve the accuracy of detecting the temperature of a workpiece. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-184229 A Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide a heat treatment apparatus capable of improving the accuracy of detecting the temperature of a workpiece. [Means for solving the problem]

[0006] The heat treatment apparatus according to the embodiment includes a chamber in which a workpiece is stored and capable of maintaining an atmosphere reduced in pressure below atmospheric pressure, an exhaust unit that exhausts the inside of the chamber, a heater provided inside the chamber, and a detection unit that is provided inside the chamber and detects the temperature of the workpiece. The detection unit has a linear shape, a first portion that is close to a surface of the workpiece and extends along the surface of the workpiece, and a second portion that is connected to the first portion and extends in a direction intersecting with the first portion, and a temperature measuring point is provided on the tip side of the first portion. Effect of the Invention

[0007] According to an embodiment of the present invention, a heat treatment device capable of improving the detection accuracy of the temperature of a workpiece is provided. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic front view illustrating a heat treatment apparatus according to an embodiment of the present invention; [Diagram 2] 2 is a schematic cross-sectional view of the heat treatment device in FIG. 1 taken along line AA. [Diagram 3] FIG. 2 is a schematic perspective view of a chamber and a cassette rack. [Figure 4] FIG. 2 is a schematic perspective view for illustrating a cassette. [Diagram 5] 13 is a schematic side view illustrating a detection unit provided inside the cassette. FIG. [Figure 6] 6 is a schematic diagram of the detection unit in FIG. 5 as viewed from the direction of line BB. [Figure 7] 13A to 13C are schematic side views illustrating a detection unit according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate. In the following, as an example, a heat treatment apparatus for heating a workpiece in an atmosphere reduced in pressure below atmospheric pressure to form an organic film on the surface of the workpiece will be described. However, the present invention is not limited to this. For example, the present invention can also be applied to a heat treatment apparatus for heating a workpiece to form an inorganic film or the like on the surface of the workpiece or to treat the surface of the workpiece.

[0010] In addition, the work before heating may have, for example, a substrate and a solution applied to the surface of the substrate, or may be only a substrate. In the following, as an example, a case where the work before heating has a substrate and a solution applied to the surface of the substrate will be described.

[0011] The workpiece 100 before being heat-treated by the heat treatment device 1 according to this embodiment has a substrate and a solution applied to the surface of the substrate. The substrate is, for example, a glass substrate or a semiconductor wafer. However, the substrate is not limited to the exemplified ones. The solution contains, for example, an organic material and a solvent. The organic material is not particularly limited as long as it can be dissolved by the solvent. The solution can be, for example, a varnish containing polyamic acid. However, the solution is not limited to the exemplified ones. The solution may also be a liquid that has been provisionally baked to be in a semi-hardened state (non-flowing state).

[0012] FIG. 1 is a schematic front view illustrating a heat treatment device 1 according to the present embodiment. In FIG. 1, in order to avoid complexity, only one detection unit 40 and one cassette 50 are illustrated. FIG. 2 is a schematic cross-sectional view of the heat treatment apparatus 1 in FIG. 1 taken along the line AA. In FIG. 2, the detection unit 40 and the cassette 50 are omitted in order to avoid complication. FIG. 3 is a schematic perspective view of the chamber 10 and the cassette rack 60. As shown in FIG. In each figure, the X-direction, the Y-direction, and the Z-direction represent three directions that are mutually orthogonal. For example, the X-direction and the Y-direction are parallel to the surface of the workpiece 100 (for example, horizontal directions). For example, the Z-direction is perpendicular to the surface of the workpiece 100 (for example, vertical directions).

[0013] As shown in FIGS. 1 and 2, the heat treatment apparatus 1 includes, for example, a chamber 10, an exhaust unit 20, a heating unit 30, a detection unit 40, a cassette 50, a cassette rack 60, and a controller 70.

[0014] As shown in Figs. 1 to 3, the chamber 10 has a box shape. The chamber 10 has an airtight structure capable of maintaining an atmosphere at a reduced pressure lower than atmospheric pressure. There are no particular limitations on the external shape of the chamber 10. The external shape of the chamber 10 may be, for example, a rectangular parallelepiped or a cylinder. The chamber 10 is formed from a metal such as stainless steel.

[0015] For example, openings are provided at both ends of the chamber 10 in the Y direction. A flange 11 is provided at one end of the chamber 10 in the Y direction. A seal material 12 such as an O-ring is provided on the flange 11. An opening / closing door 13 is provided on the side of the chamber 10 where the flange 11 is provided. When the opening / closing door 13 is closed, the opening of the chamber 10 is closed airtightly by the seal material 12. When the opening / closing door 13 is opened, the workpiece 100 can be carried in or out of the cassette 50 through the opening of the chamber 10. That is, the workpiece 100 is stored inside the chamber 10.

[0016] For example, a flange 14 is provided at the other end of the chamber 10 in the Y direction. A seal material 12 is provided on the flange 14. A lid 15 is provided on the side of the chamber 10 where the flange 14 is provided. For example, the lid 15 is detachably provided on the flange 14 using a fastening member such as a screw. When the lid 15 is attached, the opening of the chamber 10 is closed by the seal material 12 so as to be airtight. If the detachable lid 15 is provided, maintenance of the heat treatment device 1 from the side where the flange 14 is provided is easy. In this case, when the lid 15 is opened for maintenance, a cassette 50 having a processing space for heating the workpiece 100 is carried into the chamber 10 through the opening of the chamber 10. Alternatively, the cassette 50 is carried out to the outside of the chamber 10 through the opening of the chamber 10.

[0017] In addition, a cooling device (not shown) may be provided on the outer wall of the chamber 10. The cooling device may be, for example, a water jacket. If a cooling device is provided, the temperature of the outer wall of the chamber 10 can be prevented from becoming higher than a predetermined temperature.

[0018] The exhaust unit 20 evacuates the inside of the chamber 10 . 1, the exhaust unit 20 has a first exhaust unit 21 and a second exhaust unit 22. The first exhaust unit 21 and the second exhaust unit 22 are connected to an exhaust port 16 provided on the bottom surface of the chamber 10.

[0019] The first exhaust unit 21 includes an exhaust pump 21a and a pressure control unit 21b. The exhaust pump 21a may be an exhaust pump that performs rough exhaust from atmospheric pressure to a predetermined pressure. Therefore, the exhaust pump 21a has a larger exhaust volume than the exhaust pump 22a described later. The exhaust pump 21a may be, for example, a dry vacuum pump.

[0020] The pressure control unit 21b is provided between the exhaust port 16 and the exhaust pump 21a. The pressure control unit 21b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) that detects the internal pressure of the chamber 10. The pressure control unit 21b can be, for example, an APC (Auto Pressure Controller).

[0021] The second exhaust unit 22 includes an exhaust pump 22a and a pressure control unit 22b. The exhaust pump 22a exhausts the air to a lower predetermined pressure after the rough exhaust by the exhaust pump 21a. The exhaust pump 22a has an exhaust capacity capable of exhausting the air to a molecular flow region of a high vacuum. For example, the exhaust pump 22a can be a turbo molecular pump (TMP) or the like.

[0022] The pressure control unit 22b is provided between the exhaust port 16 and the exhaust pump 22a. The pressure control unit 22b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) that detects the internal pressure of the chamber 10. The pressure control unit 22b can be, for example, an APC.

[0023] If the pressure in the internal space of the chamber 10 is reduced, the amount of heat released to the outside of the chamber 10 can be reduced. This improves the heating efficiency and heat storage efficiency, and allows the power applied to the heater 33, which will be described later, to be reduced. If the power applied to the heater 33 can be reduced, the load on the heater 33 can be prevented from increasing. This allows the life of the heater 33 to be extended.

[0024] The heating unit 30 includes, for example, a first heating unit 31 and a second heating unit 32. The first heating unit 31 and the second heating unit 32 are provided inside the chamber 10. The first heating unit 31 is provided above the cassette 50. The second heating unit 32 is provided below the cassette 50. The second heating unit 32 faces the first heating unit 31.

[0025] As described below, the workpiece 100 is supported inside the cassette 50. Therefore, the first heating unit 31 heats the front surface (upper surface) of the workpiece 100 supported inside the cassette 50. The second heating unit 32 heats the back surface (lower surface) of the workpiece 100 supported inside the cassette 50.

[0026] 1, when a plurality of cassettes 50 are arranged in the Z direction (vertical direction) inside the chamber 10, the second heating section 32 provided below the upper cassette 50 can serve as the first heating section 31 provided above the lower cassette 50. In other words, the first heating section 31 and the second heating section 32 provided between the cassettes 50 can be used as one unit. For convenience, when focusing on one cassette 50, the upper side as viewed from the cassette 50 is designated as the first heating section 31 and the lower side as the second heating section 32, but heating sections (heaters 33) are provided on the top and bottom of all cassettes 50.

[0027] In this case, the back surface of the workpiece 100 supported inside the upper cassette 50 is heated by the shared first heating unit 31 or second heating unit 32. The front surface of the workpiece 100 supported inside the lower cassette 50 is heated by the shared first heating unit 31 or second heating unit 32. In this way, it is possible to reduce the number of first heating sections 31 or second heating sections 32. This makes it possible to reduce power consumption, reduce manufacturing costs, and save space.

[0028] The first heating section 31 and the second heating section 32 each include, for example, a heater 33, a support section 34, and a holder section 35. At least one heater 33 is provided. For example, one support section 34 is provided for one heater 33 or one support section 34 is provided for multiple heaters 33. For example, one holder 35 is provided for one heater 33 or one support section 35 is provided for multiple heaters 33.

[0029] Each of the first heating section 31 and the second heating section 32 illustrated in FIG. 1 and FIG. 2 has a plurality of heaters 33. The plurality of heaters 33 extend in the X direction and are arranged in the Y direction, for example. The plurality of heaters 33 may extend in the Y direction and be arranged in the X direction. That is, the plurality of heaters 33 are arranged in a direction intersecting the central axis of the heaters 33. The plurality of heaters 33 may be arranged at equal intervals, or the intervals may be changed according to the in-plane distribution of the temperature of the workpiece 100. In addition, the specifications, number, intervals, etc. of the heaters 33 provided in the second heating section 32 may be the same as or different from the specifications, number, intervals, etc. of the heaters 33 provided in the first heating section 31. The specifications, number, intervals, etc. of the heaters 33 can be appropriately changed according to the composition of the solution to be heated (heating temperature of the solution), the size of the workpiece 100, etc. The specifications, number, intervals, etc. of the heaters 33 can be appropriately determined by performing simulations, experiments, etc.

[0030] The heater 33 may be a rod-shaped heater extending in one direction. There is no particular limitation on the heater 33 as long as it is a rod-shaped heater. The heater 33 may be, for example, a sheath heater, a ceramic heater, a cartridge heater, or the like. The heater 33 may have, for example, a quartz cover. In this specification, the term "rod-shaped heater" includes heaters covered with a quartz cover. There is no limitation on the external shape of the "rod-shaped heater", and it can be, for example, a cylindrical shape or a prismatic shape.

[0031] In addition, the heater 33 is not limited to the above-mentioned one as long as it can heat the workpiece 100 in an atmosphere reduced in pressure below atmospheric pressure. In other words, the heater 33 may be any heater that has a rod shape and utilizes thermal energy by radiation.

[0032] The detection unit 40 is provided inside the chamber 10 and detects the temperature of the workpiece 100. The detection unit 40 can be, for example, a thermocouple. When the detection unit 40 is a thermocouple, the detection unit 40 can be, for example, a sheathed thermocouple. The sheathed thermocouple has, for example, two types of thermocouple wires, a cylindrical metallic sheath (protective tube) in which the two types of thermocouple wires are housed, and an insulator that fills the inside of the sheath and provides insulation between the two types of thermocouple wires and the sheath.

[0033] The type of thermocouple (thermocouple wire) can be appropriately selected according to the heating temperature of the workpiece 100. The thermocouple can be, for example, a K thermocouple or an N thermocouple. In this case, if the detection unit 40 is a K thermocouple, the relationship between the temperature and the electromotive force is approximately linear, so that the temperature of the workpiece 100 can be detected with high accuracy. The thermocouple may be a grounded type in which a pair of thermocouple wires and a sheath are electrically connected, or a non-grounded type in which a pair of thermocouple wires and a sheath are insulated. If the thermocouple is a grounded type, the responsiveness can be improved. If the thermocouple is a non-grounded type, the noise resistance and durability can be improved. In this embodiment, a non-grounded thermocouple is used as the detection unit 40. Note that, in the non-grounded thermocouple, the joint (temperature measurement point) is not located at the sheath position, so it is difficult to accurately grasp the position of the joint. As will be described later, this embodiment is particularly effective when such a non-grounded thermocouple is used.

[0034] As shown in FIG. 4, the detection unit 40 can be provided inside a cassette 50 . As shown in FIG. 1, the output side of the detection unit 40 is electrically connected to the controller 70. In this case, the wiring portion drawn out to the outside of the cassette 50 can be electrically connected to the wiring portion electrically connected to the controller 70 via the connector 41. In this way, when the cassette 50 is carried out from inside the cassette rack 60, the wiring portion on the detection unit 40 side and the wiring portion on the controller 70 side can be separated by the connector 41. When the cassette 50 is carried into the cassette rack 60, the wiring portion on the detection unit 40 side and the wiring portion on the controller 70 side can be electrically connected by the connector 41. The wiring portion may be a wire constituting a thermocouple or a so-called compensation conductor. The arrangement and shape of the detector 40 provided inside the cassette 50 will be described in detail later.

[0035] 1, the cassette 50 is detachably mounted on a pair of receiving members 62 of a cassette rack 60 provided inside the chamber 10. In this case, the cassette 50 is detachably mounted between the first heating unit 31 and the second heating unit 32. It is also possible to omit the cassette 50. In the case where the cassette 50 is omitted, the detection unit 40, a workpiece support unit 56 (described later), and the like are provided inside the chamber 10 (cassette rack 60).

[0036] However, when the workpiece 100 is heated, the solution applied to the surface of the substrate may evaporate or sublime. Therefore, maintenance such as cleaning must be performed periodically or as necessary. If the cassette 50 is provided, the cassette 50 can be taken out of the chamber 10 (cassette rack 60) and maintenance such as cleaning can be performed on the cassette 50 outside the chamber 10. Then, the cassette 50 that has been subjected to maintenance can be carried into the chamber 10 (cassette rack 60). Therefore, if the cassette 50 is provided, the time and labor required for maintenance can be significantly reduced compared to when maintenance such as cleaning is performed directly inside the chamber 10 (cassette rack 60).

[0037] FIG. 4 is a schematic perspective view for illustrating the cassette 50. As shown in FIG. The cassette 50 is provided inside the chamber 10, and the workpiece 100 is stored inside the cassette 50. 4, the cassette 50 has a box shape and has a processing space therein for supporting the workpiece 100. There is no particular limitation on the external shape of the cassette 50. The external shape of the cassette 50 may be, for example, a rectangular parallelepiped.

[0038] The cassette 50 has, for example, a cassette frame 51, an upper heat equalizer plate 52, a lower heat equalizer plate 53, a side heat equalizer plate 54, a side heat equalizer plate 55, a work support portion 56, a cassette support portion 57, and a heater 33a.

[0039] The cassette frame 51 defines a processing space for heating the workpiece 100. The cassette frame 51 is, for example, a framework structure using elongated plate material or shaped steel. Alternatively, the cassette frame 51 may be a frame formed by sheet metal processing or the like. Heat equalizing plates (upper heat equalizing plate 52, lower heat equalizing plate 53, side heat equalizing plate 54, side heat equalizing plate 55) are provided on the outer surface of the cassette frame 51. There are no particular limitations on the external shape of the cassette frame 51. The external shape of the cassette frame 51 is, for example, a rectangular parallelepiped.

[0040] The upper heat equalizer plate 52 has a plate shape and is provided on the upper part of the cassette frame 51. The upper heat equalizer plate 52 can be provided on the upper part of the cassette frame 51 in a detachable manner. At least one upper heat equalizer plate 52 can be provided. The cassette 50 illustrated in FIG. 4 is provided with seven upper heat equalizer plates 52. The planar shape of the upper heat equalizer plate 52 can be, for example, a rectangle. The number and planar shape of the upper heat equalizer plates 52 can be changed as appropriate depending on the size and shape of the upper part of the cassette frame 51.

[0041] The lower heat equalizing plate 53 has a plate shape and is provided at the bottom of the cassette frame 51. Like the upper heat equalizing plate 52, the lower heat equalizing plate 53 can be detachably provided at the bottom of the cassette frame 51. The lower heat equalizing plate 53 faces the upper heat equalizing plate 52. At least one lower heat equalizing plate 53 can be provided. The number and planar shape of the lower heat equalizing plates 53 can be the same as the number and planar shape of the upper heat equalizing plate 52, or can be different.

[0042] The side heat equalizing plate 54 has a plate shape. A pair of side heat equalizing plates 54 can be provided. One side heat equalizing plate 54 is provided, for example, on one side of the cassette frame 51 that faces each other.

[0043] The workpiece 100 is carried into the cassette 50 through an opening provided in the side of the cassette frame 51. Alternatively, the workpiece 100 is carried out from the cassette 50 through an opening provided in the side of the cassette frame 51. Therefore, the side of the cassette frame 51 opposite to the side where the side heat equalizing plate 54 is provided is open.

[0044] The opening of the cassette frame 51 is opened and closed by the other side heat equalizer 54. For example, the side heat equalizer 54 can be provided on the opening and closing door 13 of the chamber 10 described above, so that when the opening and closing door 13 is closed, the opening of the cassette frame 51 is closed by the side heat equalizer 54. Also, an openable and closable side heat equalizer 54 can be provided on the side of the cassette frame 51, so that the opening of the cassette frame 51 is closed by the openable and closable side heat equalizer 54.

[0045] The side heat equalizing plates 55 are plate-shaped and a pair are provided inside the cassette frame 51. The pair of side heat equalizing plates 55 face each other and extend between the pair of side heat equalizing plates 54. One of the pair of side heat equalizing plates 55 is provided near one side of the cassette frame 51. The other of the pair of side heat equalizing plates 55 is provided near the other side of the cassette frame 51.

[0046] The space surrounded by the upper heat equalizer plate 52, the lower heat equalizer plate 53, the side heat equalizer plate 54, and the side heat equalizer plate 55 becomes a processing space for heating the workpiece 100. The processing space inside the cassette 50 and the internal space of the chamber 10 are connected via, for example, a gap between the heat equalizer plates (a gap between the beams of the cassette frame 51 present between the heat equalizer plates and the heat equalizer plates). Therefore, when the pressure in the internal space of the chamber 10 is reduced, the pressure in the internal space of the cassette 50 is also reduced.

[0047] As described above, the multiple rod-shaped heaters 33 are arranged at a predetermined interval. When the heaters 33 are rod-shaped, heat is radiated radially from the central axis of the heaters 33. Therefore, the shorter the distance between the central axis of the heater 33 and the heated part of the workpiece 100, the higher the temperature of the heated part. In other words, when the workpiece 100 is directly heated using the multiple rod-shaped heaters 33, temperature variations occur within the surface of the heated workpiece 100.

[0048] The quality of the formed organic film may be degraded if the temperature varies across the surface of the workpiece 100. For example, bubbles may be generated or the composition of the organic film may change in the areas where the temperature is high.

[0049] If the upper heat equalizing plate 52 and the lower heat equalizing plate 53 are provided, the heat radiated from the multiple heaters 33 is incident on the upper heat equalizing plate 52 and the lower heat equalizing plate 53. The heat incident on the upper heat equalizing plate 52 and the lower heat equalizing plate 53 is radiated towards the workpiece 100 while propagating inside them in the planar direction. Therefore, it is possible to suppress the occurrence of temperature variations within the surface of the workpiece 100. As a result, it is possible to improve the quality of the formed organic film.

[0050] The upper heat equalizer plate 52, the lower heat equalizer plate 53, and the side heat equalizer plates 54, 55 can be formed from a metal such as aluminum, copper, or stainless steel.

[0051] A plurality of workpiece support parts 56 are provided inside the cassette 50. The plurality of workpiece support parts 56 support the back surface of the workpiece 100 in a processing space in which the workpiece 100 is heated. The plurality of workpiece support parts 56 support the workpiece 100 so that the workpiece 100 faces the upper heat equalizing plate 52 and the lower heat equalizing plate 53.

[0052] The work support portion 56 may be a rod-shaped body. The work support portion 56 may be made of, for example, stainless steel. The number, arrangement, intervals, etc. of the work support portions 56 may be appropriately changed depending on the size, rigidity (deflection), etc. of the work 100.

[0053] The cassette support parts 57 are provided on the side surface of the cassette frame 51 that intersects with the side surface on which the side heat equalizing plate 54 is provided. There are provided a pair of cassette support parts 57. The cassette support parts 57 protrude outward from the side surface of the cassette frame 51 and extend in a direction perpendicular to the side surface on which the side heat equalizing plate 54 is provided.

[0054] The cassette support parts 57 are provided on each of a pair of opposing side surfaces of the cassette 50. The cassette support parts 57 are supported by a receiving member 62 of a cassette rack 60, which will be described later. That is, the cassette 50 is detachably provided inside the chamber 10 (cassette rack 60) by the cassette support parts 57 and the receiving member 62. If the cassette 50 is detachably provided inside the chamber 10, maintenance of the cassette 50 can be facilitated.

[0055] A pair of heaters 33a can be provided inside the cassette frame 51. Each of the pair of heaters 33a can be provided in the space between the side heat equalizing plates 55 and the side of the cassette frame 51. That is, the heater 33a can be provided outside the area where the workpiece 100 is supported. The pair of heaters 33a face each other and extend between the pair of side heat equalizing plates 54. The heater 33a can be the same as the heater 33 provided inside the chamber 10 described above. However, the diameter dimension and length of the heater 33a can be appropriately changed depending on the size of the cassette frame 51.

[0056] When the heater 33a is provided inside the cassette 50 (cassette frame 51), at least one of a support portion 34 and a holder portion 35 for supporting the heater 33a can be provided, similarly to the heater 33 described above.

[0057] The heater 33a can be electrically connected to the controller 70 via a connector or the like. In this way, when the cassette 50 is removed from the inside of the cassette rack 60, the wiring portion on the heater 33a side and the wiring portion on the controller 70 side can be separated by the connector. When the cassette 50 is carried into the cassette rack 60, the wiring portion on the heater 33a side and the wiring portion on the controller 70 side can be electrically connected by the connector.

[0058] The pair of heaters 33a may be omitted. However, heat in the peripheral region of the workpiece 100 is more likely to escape to the outside than heat in the central region of the workpiece 100. Therefore, if the pair of heaters 33a is provided, the peripheral region of the workpiece 100 can be heated, and the difference in temperature between the peripheral region of the workpiece 100 and the central region of the workpiece 100 can be prevented from becoming large. In other words, the occurrence of temperature variation within the surface of the heated workpiece 100 can be prevented.

[0059] The cassette 50 may also be provided with a cooling section for cooling the processed workpiece 100. The cooling section may be provided with, for example, a nozzle for supplying a cooling gas to at least one of the front and back surfaces of the workpiece 100.

[0060] 1 to 3, the cassette rack 60 is provided inside the chamber 10. The cassette rack 60 holds the heater 33 and the cassette 50 at predetermined positions inside the chamber 10.

[0061] The cassette rack 60 includes a frame 61 , a receiving member 62 , and a reflecting plate 63 . The frame 61 is, for example, a framework structure formed by using elongated members. There is no particular limitation on the external shape of the frame 61. The external shape of the frame 61 can be, for example, a rectangular parallelepiped or a cylinder.

[0062] At least a pair of receiving members 62 are provided inside the frame 61. The pair of receiving members 62 support the cassette support portion 57 of the cassette 50 inside the chamber 10. In the Z direction, the pair of receiving members 62 are provided between the first heating unit 31 and the second heating unit 32. One cassette 50 is placed on the pair of receiving members 62. Therefore, a pair of receiving members 62 is provided for each cassette 50. For example, if 14 cassettes 50 can be stored inside the frame 61, 14 pairs of receiving members 62 are provided inside the frame 61.

[0063] The pair of receiving members 62 are provided, for example, on inner walls of the frame 61 facing each other in the X direction. The pair of receiving members 62 extend in the Y direction. When a plurality of pairs of receiving members 62 are provided, the pairs of receiving members 62 can be provided side by side in the Z direction.

[0064] The reflector 63 reflects the heat incident from the heater 33 side to the cassette 50 side. If the reflector 63 is provided, it is possible to improve the heat storage in the internal space (processing space) of the cassette 50. The reflector 63 has a plate shape and is provided on the outer surface of the frame 61. To avoid complexity, the reflector 63 is not depicted in Figs. 1 and 2. Also, Fig. 3 depicts only the reflector 63 attached to the side of the frame 61 to which the receiving member 62 is attached.

[0065] The controller 70 is provided outside the chamber 10. The controller 70 includes, for example, a calculation unit such as a CPU (Central Processing Unit) and a storage unit such as a memory. The controller 70 is, for example, a computer. The controller 70 controls the operation of each element provided in the heat treatment device 1 based on, for example, a control program stored in the storage unit.

[0066] For example, based on the detection value (temperature of the workpiece 100) detected by the detection unit 40, the controller 70 performs feedback control of the value of the power applied to the heaters 33, 33a, ON / OFF of the application of power, and the like.

[0067] As described above, heat in the peripheral region of the workpiece 100 is more likely to escape to the outside than heat in the central region of the workpiece 100. Therefore, the region in which the heaters 33 are provided can be divided into multiple regions, and the controller 70 can control the heaters 33 for each of the multiple regions. For example, the controller 70 can separately control the heater 33 provided in the peripheral region of the workpiece 100 and the heater 33 provided in the central region of the workpiece 100. In this way, the temperature variation within the surface of the workpiece 100 can be further reduced.

[0068] Next, the arrangement, shape, etc. of the detection unit 40 provided inside the cassette 50 will be further described. FIG. 5 is a schematic side view illustrating the detection unit 40 provided inside the cassette 50. As shown in FIG. FIG. 6 is a schematic diagram of the detection unit 40 in FIG. 5 as viewed from the direction of line BB. In FIG. 6, the lower heat equalizing plate 53 and the workpiece 100 are omitted in order to avoid complication.

[0069] As shown in FIG. 5 and FIG. 6, for example, the detection unit 40 can be provided on a plate 56a on which the work support unit 56 is provided. The plate 56a can be fixed to the cassette frame 51 by using a fastening member such as a screw. The plate 56a can be formed by using a metal such as stainless steel. The plate 56a has, for example, a plate body 56a1 which is a portion extending in the direction in which the heater 33 extends (X direction), and a plurality of extensions 56a2 which extend in a direction intersecting the direction in which the heater 33 extends (Y direction). The plurality of extensions 56a2 are spaced apart from each other. The work support unit 56 or the detection unit 40 can be provided on each of the plurality of extensions 56a2.

[0070] The plate 56a is provided for the following reason. That is, the work support parts 56 need to be arranged in a row at intervals that can prevent the relatively thin work 100 from being warped. However, if the cassette frame 51 is configured to match the intervals, the number of beams of the cassette frame 51 will be more than necessary. Since the cassette frame 51 needs a certain degree of rigidity, the cross-sectional area of ​​the beams is relatively large, and the effect of blocking heat from the heater 33 is large. Therefore, if there are many beams, the heat of the heater 33 will be blocked in many areas, and uniform heating of the work 100 may be hindered. Therefore, the number of beams of the cassette frame 51 is kept to a minimum, and the installation area of ​​the work support parts 56 is secured by the plate 56a, which has a smaller cross-sectional area than the beams of the cassette frame 51.

[0071] 6 illustrates two extensions 56a2 on which the work support parts 56 are provided and one extension 56a2 on which the detection part 40 is provided, but the number and arrangement of the extensions 56a2 can be changed as appropriate. That is, a single plate 56a may be provided with a plurality of detection parts 40. Also, a plate on which only the work support parts 56 are provided and a plate on which the detection part 40 is provided may be provided separately. Also, a single cassette 50 may be provided with a plurality of detection parts 40.

[0072] As described above, there are cases where the cassette 50 is omitted. When the cassette 50 is omitted, the plate 56a may be attached to a rail or the like provided inside the chamber 10, for example. In other words, the plate 56a may be provided inside the chamber 10.

[0073] 5, the detection unit 40 has a linear shape with a bent tip. For example, the tip of the detection unit 40 is provided with a first portion 40a extending along the surface of the workpiece 100 and a second portion 40b connected to the first portion 40a and extending in a direction intersecting the first portion 40a (Z direction). In this case, the first portion 40a may be parallel to the surface of the workpiece 100 or may be inclined with respect to the surface of the workpiece 100.

[0074] Here, a thermocouple is an element that detects temperature by connecting two types of thermocouple wires at both ends and using the thermoelectromotive force generated due to the temperature difference between the two ends. In this case, one of the joints of the two types of thermocouple wires is located near the tip of the thermocouple sheath.

[0075] Therefore, if the detection unit 40 has the first portion 40a extending along the surface of the workpiece 100, the radiant heat from the workpiece 100 can easily enter the joint portion of the thermocouple wires and a wide area in the vicinity thereof. In this case, the amount of incident radiant heat can be significantly increased compared to, for example, a case in which the first portion 40a of the detection unit 40 extends in a direction perpendicular to the surface of the workpiece 100. As a result, the detection accuracy of the temperature of the workpiece 100 can be improved.

[0076] It is difficult to accurately grasp the joints of the thermocouple wires, and there are individual differences in their positions. In this regard, when the first part 40a of the detection unit 40 is provided so as to extend parallel to the surface of the workpiece 100, the temperature of the workpiece 100 can be accurately measured regardless of where the joints are located on the first part 40a, as compared to when the detection unit 40 is provided at an angle. In addition, the heat treatment device 1 has a cassette rack 60 provided with a plurality of cassettes 50, and a plurality of detection units 40 are provided in each of the cassettes 50. As described above, the detection unit 40 has individual differences in the positions of the joints of the thermocouple wires, so in order to detect the temperature of the workpiece 100 under the same conditions in all of the detection units 40 provided, it is desirable that the first part 40a is provided so as to extend parallel to the surface of the workpiece 100.

[0077] Furthermore, when the workpiece 100 is heated, the workpiece 100 may bend. If the first portion 40a of the detection unit 40 extends in a direction perpendicular to the surface of the workpiece 100, the workpiece 100 may bend and the tip of the first portion 40a of the detection unit 40 may come into contact with the surface of the workpiece 100, which may cause damage to the surface of the workpiece 100. In this case, if the first portion 40a of the detection unit 40 extends along the surface of the workpiece 100, even if the first portion 40a of the detection unit 40 comes into contact with the surface of the workpiece 100, the contact will be a line contact rather than a point contact, so that damage to the surface of the workpiece 100 can be suppressed. In addition, since the first portion 40a of the detection unit 40 extends along the surface of the workpiece 100, even if the first portion 40a of the detection unit 40 comes into contact with the surface of the workpiece 100, the tip of the first portion 40a is easily bent in the vertical direction by contacting the workpiece 100, so that damage to the surface of the workpiece 100 can be suppressed.

[0078] Furthermore, if the plate 56a is between the workpiece 100 and the heater 33, the radiant heat from the heater 33 is blocked by the plate 56a. Therefore, it is presumed that the temperature of the area of ​​the workpiece 100 overlapping with the plate 56a when viewed from the Z direction is lower than the temperature of the area of ​​the workpiece 100 not overlapping with the plate 56a. Therefore, if at least the tip side of the first part 40a of the detection unit 40 overlaps with the plate 56a when viewed from the Z direction, there is a risk that the accurate temperature of the workpiece 100 cannot be detected.

[0079] Therefore, in the detection unit 40 according to this embodiment, as shown in Fig. 6, at least the tip side of the first portion 40a of the detection unit 40 does not overlap with the plate 56a when viewed from the Z direction. However, if the distance L1 (mm) from the tip of the first portion 40a of the detection unit 40 becomes too long, the rigidity of the first portion 40a may become too small. Therefore, it is preferable that the distance L1 (mm) is, for example, 100 mm or less.

[0080] In addition, the radiant heat from the heater 33 is blocked by the beams of the cassette frame 51. Therefore, when viewed from the Z direction, it is preferable that at least the tip side of the first portion 40a of the detection unit 40 does not overlap with the beams provided on the cassette frame 51. In this way, the temperature of the workpiece 100 can be detected accurately.

[0081] As shown in FIG. 6, when viewed from the Z direction, at least the tip side of the first portion 40a of the detection unit 40 may overlap the heater 33, or may not overlap the heater 33. As shown in FIG. 5, a lower heat equalizing plate 53 is provided between the heater 33 and the first portion 40a of the detection unit 40. As described above, the heat radiated from the heater 33 and incident on the lower heat equalizing plate 53 is radiated toward the first portion 40a of the detection unit 40 and the workpiece 100 while propagating inside the lower heat equalizing plate 53 in the planar direction. Therefore, the positional relationship between the first portion 40a of the detection unit 40 and the heater 33 when viewed from the Z direction can be set arbitrarily. However, when viewed from the Z direction, the temperature of the area of ​​the surface of the workpiece 100 that overlaps with the heater 33 fluctuates less than the temperature of the area of ​​the surface of the workpiece 100 that does not overlap with the heater 33. Therefore, when viewed from the Z direction, if at least the tip side of the first portion 40a overlaps with the heater 33, it is possible to suppress fluctuations in the detection value.

[0082] 5, the detection unit 40 can be attached to the plate 56a via a holder 42. The holder 42 can have, for example, a hole penetrating in the Z direction. The holder 42 can hold the second part 40b of the detection unit 40 extending in the Z direction inserted into the hole. In this way, the attitude of the detection unit 40, and therefore the position of the first part 40a of the detection unit 40, can be stabilized. Therefore, the detection accuracy of the temperature of the workpiece 100 can be further improved.

[0083] However, as shown in FIG. 5, if the distance L2 (mm) between the end of the holder 42 on the workpiece 100 side and the first part 40a of the detection part 40, i.e., the dimension of the part of the second part 40b of the detection part 40 exposed from the holder 42, becomes too short, the heat radiated from the holder 42 is likely to be incident on the first part 40a of the detection part 40. As a result, there is a risk that the accurate temperature of the workpiece 100 cannot be detected. Therefore, it is preferable that the distance L2 (mm) is, for example, 100 mm or less. Also, if the distance L2 is too long, the posture of the first part 40a becomes unstable and it becomes easy to bend. For this reason, it is preferable that "distance L1 (mm) ≧ distance L2 (mm)". In this way, the detection accuracy of the temperature of the workpiece 100 can be further improved.

[0084] FIG. 7 is a schematic side view illustrating a detection unit 40 according to another embodiment. 5 is provided on the back side of the workpiece 100. In contrast, the first portion 40a of the detection unit 40 illustrated in FIG.

[0085] In this case, the detection unit 40 can be provided on the plate 560. The plate 560 can be the same as the plate 56a described above. However, the plate 560 does not have the work support unit 56. The plate 560 can be provided, for example, on a beam or the upper heat equalizing plate 52 provided on the cassette frame 51. The plate 560 can also be provided on a beam or a bracket provided outside the cassette 50. When the plate 560 is provided outside the cassette 50, a hole penetrating the upper heat equalizing plate 52 in the thickness direction is provided, and the first part 40a of the detection unit 40 is provided inside the cassette 50 through the hole in the upper heat equalizing plate 52.

[0086] In this way, the temperature of the surface of the workpiece 100 to be heat-treated (the upper surface on which the solution is applied) can be detected, making it easier to improve the quality of the film formed on the surface of the workpiece 100 and the treated areas.

[0087] The first portion 40a of the detection unit 40 can also be provided on the front side and the back side of the workpiece 100. That is, the first portion 40a of the detection unit 40 can be provided on at least one of the front side and the back side of the workpiece 100.

[0088] Although the embodiments have been described above, the present invention is not limited to these descriptions. Any modifications to the above-described embodiments made by those skilled in the art are also encompassed within the scope of the present invention as long as they incorporate the features of the present invention. For example, the shape, size, arrangement, and the like of each element included in the heat treatment device 1 are not limited to those exemplified, and can be changed as appropriate.

[0089] Furthermore, the elements of each of the above-described embodiments can be combined to the greatest extent possible, and combinations of these are also included within the scope of the present invention as long as they include the features of the present invention. [Explanation of symbols]

[0090] 1 Heat treatment device, 10 Chamber, 20 Exhaust section, 30 Heating section, 33 Heater, 40 Detection section, 40a First section, 40b Second section, 42 Holder, 56a Plate, 56a1 Plate body, 50 Cassette, 51 Cassette frame, 60 Cassette rack, 70 Controller, 100 Workpiece, 560 Plate

Claims

1. A chamber in which a workpiece is housed and capable of maintaining an atmosphere at a reduced pressure below atmospheric pressure; an exhaust unit that exhausts the inside of the chamber; a heater provided inside the chamber; A detection unit provided inside the chamber and detecting a temperature of the workpiece; Equipped with The detection unit has a linear shape, a first portion that is close to the surface of the workpiece and extends along the surface of the workpiece, and a second portion that is connected to the first portion and extends in a direction intersecting the first portion, and a temperature measuring point is provided at the tip side of the first portion.

2. The apparatus further includes a plate provided inside the chamber and on which the detection unit is provided, The heat treatment apparatus according to claim 1 , wherein at least a tip side of the first portion does not overlap with the plate when viewed from a direction perpendicular to a surface of the workpiece.

3. The apparatus further includes a cassette provided inside the chamber and configured to store the workpiece therein; The cassette includes a cassette frame which is a framework or a frame body, and a heat equalizing plate provided on an outer surface of the cassette frame, the first portion is provided inside the cassette frame, 3 . The heat treatment apparatus according to claim 1 , wherein at least a tip side of the first portion does not overlap with a beam provided on the cassette frame when viewed from a direction perpendicular to a surface of the workpiece.

4. 3 . The heat treatment apparatus according to claim 1 , wherein at least a tip side of the first portion overlaps with the heater when viewed from a direction perpendicular to a surface of the workpiece.

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