Moving route generation method of robot and moving route generation device of robot

Abstract

To provide a moving route generation method of a robot in which an operability and a visibility of a user can be improved when configuring a prescribed condition at the time of generating a moving route of the robot in an arrangement area.SOLUTION: A moving route generation method of a substrate transfer robot 10 reflects, when one of two-dimensional data IDa and three-dimensional data IDb is changed based on a user operation, the change that is either the two-dimensional data IDa or the three-dimensional data IDb to the other and displays at least one of a two-dimensional virtual image VIa including the substrate transfer robot 10 and an arrangement area 20 and a three-dimensional virtual image VIb including the substrate transfer robot and the arrangement area on a display part 220.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present disclosure relates to a robot movement path generating method and a robot movement path generating device. [Background technology]

[0002] Conventionally, a robot trajectory generation method is known that derives a robot's motion path based on a predetermined condition. For example, Patent Document 1 discloses a robot trajectory generation method that derives a robot's motion path so that the robot arm does not interfere with other robot arms or obstacles. In the robot trajectory generation method of Patent Document 1, when setting the predetermined conditions for deriving the robot trajectory, the robot arm and obstacles are virtually displayed in three dimensions on a display. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-193975 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the robot trajectory generation method described in the above Patent Document 1, as described above, when setting the predetermined conditions for generating the robot trajectory, the robot arm and obstacles are virtually displayed in three dimensions on the display, but the robot arm and obstacles are not virtually displayed in two dimensions. Therefore, the robot trajectory generation method described in the above Patent Document 1 is not suitable for cases where the user's operability and visibility are improved if the placement area in which the robot arm and the robot are placed are virtually displayed not only in three dimensions but also in two dimensions when setting the predetermined conditions for deriving the movement path. For this reason, there is a demand for a robot movement path generation method and a robot movement path generation device that can improve the user's operability and visibility when setting the predetermined conditions for deriving the movement path in the placement area of ​​the robot.

[0005] This disclosure has been made to solve the problems described above, and one objective of this disclosure is to provide a robot movement path generation method and a placement area robot movement path generation device that can improve user operability and visibility when setting specified conditions for deriving a movement path in the robot placement area. [Means for solving the problem]

[0006] In order to achieve the above object, a method for generating a robot movement path according to a first aspect of this disclosure includes simulating and deriving a movement path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions; and when one of the two-dimensional data and the three-dimensional data of integrated data that integrates robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, which are used to derive the movement path, is changed based on a user's operation, displaying at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data, and a three-dimensional virtual image that corresponds to the three-dimensional data, on a display unit, while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0007] In the robot movement path generation method according to the first aspect of the disclosure, as described above, when one of the two-dimensional data and the three-dimensional data of the integrated data obtained by integrating the robot CAD data, which is the computer-aided design data of the robot, and the placement area CAD data, which is the computer-aided design data of the placement area, used for deriving the movement path of the robot in the placement area where the robot and the workpiece are placed, is changed based on the user's operation, at least one of a two-dimensional virtual image corresponding to the two-dimensional data including the robot and the placement area and a three-dimensional virtual image corresponding to the three-dimensional data is displayed on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data. As a result, when the user changes either the two-dimensional data or the three-dimensional data, at least one of the two-dimensional virtual image and the three-dimensional virtual image based on the changed data can be displayed on the display unit at a desired timing. As a result, it is possible to improve the operability and visibility of the user when setting a predetermined condition for deriving the movement path in the placement area of ​​the robot.

[0008] In addition, in order to achieve the above-mentioned object, a robot movement path generation device according to a second aspect of this disclosure includes a display unit, and a control unit that simulates and derives a movement path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions, and when one of the two-dimensional data and the three-dimensional data of integrated data that integrates robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, which are used to derive the movement path, is changed based on a user's operation, and displays at least one of a two-dimensional virtual image including the robot and the placement area and corresponding to the two-dimensional data, and a three-dimensional virtual image corresponding to the three-dimensional data, on the display unit, while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0009] The robot motion path generating device according to the second aspect of the disclosure includes a control unit that, when one of two-dimensional data and three-dimensional data of integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used for deriving a motion path of the robot in a placement area where the robot and the workpiece are placed, is changed based on a user's operation, displays at least one of a two-dimensional virtual image including the robot and the placement area and corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data while reflecting the change in the other of the two-dimensional data and the three-dimensional data on the display unit. As a result, similar to the robot motion path generating method according to the first aspect, even if the user changes either the two-dimensional data or the three-dimensional data, at least one of a two-dimensional virtual image and a three-dimensional virtual image based on the changed data can be displayed on the display unit at a desired timing. As a result, similar to the robot motion path generating method according to the first aspect, a robot motion path generating device that can improve the user's operability and visibility when setting a predetermined condition when deriving a motion path in a placement area of ​​the robot can be provided. Effect of the Invention

[0010] According to the present disclosure, as described above, it is possible to provide a robot movement path generation method and a robot movement path generation device that are capable of improving user operability and visibility when setting specified conditions for deriving a movement path in a robot placement area. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a plan view illustrating a substrate transport system according to an embodiment of the present disclosure. [Diagram 2] 1 is a block diagram showing a configuration of a motion path generating device for a substrate transport robot according to an embodiment of the present disclosure. [Diagram 3]FIG. 13 is a flow diagram illustrating a motion path generation flow for a substrate transport robot according to an embodiment of the present disclosure. [Figure 4] 11 is a diagram showing a virtual image displayed on a display unit according to an embodiment of the present disclosure. FIG. [Diagram 5] 13 is a diagram showing a state in which the size of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure is displayed on a display unit. FIG. [Figure 6] 11A and 11B are diagrams for explaining placement of a virtual obstacle based on a minimum threshold value of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, specific embodiments of the present disclosure will be described with reference to the drawings.

[0013] [Motion path generation device for substrate transport robot] 1 and 2, a motion path generating device 200 for a substrate transport robot 10 according to an embodiment of the present disclosure will be described. The motion path generating device 200 for the substrate transport robot 10 is a device that generates a motion path OP for the substrate transport robot 10 in the substrate transport system 100. The substrate transport robot 10 is an example of a robot.

[0014] (Substrate transport system) 1, the substrate transfer system 100 includes a substrate transfer robot 10 and a placement area 20. A substrate W is an example of a workpiece.

[0015] The substrate transport robot 10 includes a hand 11 that holds the substrate W, a horizontal articulated robot arm 12 to which the hand 11 is attached and to which a plurality of links 12a are connected to one another, and a base 13 that supports the robot arm 12. The hand 11 holds the substrate W when the substrate W is transported by the substrate transport robot 10. The hand 11 is attached to the tip of the robot arm 12. The substrate W is, for example, a silicon wafer having a disk shape. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively.

[0016] The placement area 20 includes a substrate transfer chamber 21 and a substrate placement portion 22 .

[0017] The substrate transfer robot 10 is disposed in the substrate transfer chamber 21. The substrate transfer chamber 21 is a space in which the substrate W is transferred by the substrate transfer robot 10. The interior of the substrate transfer chamber 21 is maintained at atmospheric pressure.

[0018] The substrate placement part 22 is connected to the substrate transfer chamber 21. The substrate W is placed on the substrate placement part 22. The substrate placement part 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an aligner 22c.

[0019] Each of the multiple load ports 22a includes a front opening unify pod (FOUP), which is a container capable of accommodating multiple substrates W.

[0020] Each of the plurality of load locks 22b is connected to the substrate transfer chamber 21 at a position different from each of the plurality of load ports 22a. Each of the plurality of load locks 22b is connected to the substrate transfer chamber VC maintained in a vacuum atmosphere.

[0021] The substrate transfer chamber VC is connected to a substrate processing chamber in which processes such as resist coating and etching are performed on the substrate W at a position different from each of the multiple load locks 22b. In other words, the substrate transfer system 100 is an EFEM (Equipment Front End Module) that transfers the substrate W between each FOUP of the multiple load ports 22a and the substrate transfer chamber VC connected to the substrate processing chamber.

[0022] The aligner 22c is a device for performing alignment of the substrate W and correcting eccentricity.

[0023] (Configuration of the motion path generation device for the substrate transport robot) 2, the movement path generating device 200 for the substrate transport robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The movement path generating device 200 for the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet.

[0024] The input unit 210 accepts an input operation from a user. When the input unit 210 accepts an input operation from a user, the input unit 210 outputs an input signal corresponding to the input operation to the control unit 240. For example, the input unit 210 is a keyboard or a mouse. The input unit 210 is used when setting or changing a predetermined condition for deriving an operation path OP in the arrangement area 20 of the substrate transport robot 10.

[0025] The display unit 220 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, and a derived movement path OP of the substrate transport robot 10 in the placement area 20. The display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0026] The storage unit 230 is a computer-readable storage medium that stores various programs and various data. The storage unit 230 stores a motion path generation program MP for the control unit 240 to execute a motion path generation method for the substrate transport robot 10. The storage unit 230 is formed, for example, by a magnetic disk such as a hard disk, an optical disk such as a CD-ROM or DVD, or a semiconductor memory.

[0027] The control unit 240 performs a simulation based on predetermined conditions to derive an operation path OP of the substrate transport robot 10 in the arrangement area 20. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit) and semiconductor memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory).

[0028] The control unit 240 reads CAD data CD used to derive the operation path OP. The CAD data CD includes transport robot CAD data CD1 which is computer-aided design data for the substrate transport robot 10, placement area CAD data CD2 which is computer-aided design data for the placement area 20, and substrate CAD data CD3 which is computer-aided design data for the substrate W. The transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be read by the control unit 240 can be arbitrarily selected by the user. The transport robot CAD data CD1 is an example of robot CAD data.

[0029] The control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W based on the integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3.

[0030] [Method for generating motion path for substrate transport robot] A method for generating a movement path for the substrate transport robot 10 according to an embodiment of the present disclosure will be described with reference to FIGS.

[0031] 3, in step S1, the control unit 240 reads the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3 used to derive the operation path OP. The placement area CAD data CD2 includes an obstacle 30 shown in FIG. 4 that becomes an obstacle when the substrate transport robot 10 operates. In FIG. 4, a columnar object placed in the substrate transport chamber 21 is shown as an example of the obstacle 30.

[0032] 3, in step S2, the control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, based on an integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. Note that the control unit 240 also causes the display unit 220 to display the virtual image VI in steps S3, S4, and S5, which will be described later.

[0033] As shown in Fig. 4, the control unit 240 causes at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb to be displayed on the display unit 220. Fig. 4 shows an example in which the control unit 240 causes both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb to be displayed on the display unit 220. The control unit 240 switches between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220, based on an input operation by the user on the input unit 210.

[0034] When one of the three-dimensional data IDb in the integrated data ID is changed based on the user's operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. For example, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. That is, when the user performs an input operation on the input unit 210 to change the two-dimensional data IDa or the three-dimensional data IDb in step S3 described later while both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in a linked manner.

[0035] 3, in step S3, the control unit 240 sets a predetermined condition for deriving the movement path OP in response to a user's input operation on the input unit 210 for setting a predetermined condition for deriving the movement path OP. The predetermined condition includes the start point and end point of the movement path OP, the upper limit values ​​of the speed and acceleration of the hand 11, the upper limit values ​​of the speed and acceleration of the robot arm 12, whether the hand 11 holds the substrate W, a minimum threshold Ga of the gap G described later, the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, the position of the components of the placement area 20, and the like. That is, the control unit 240 changes at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in the integrated data ID based on the user's operation. Furthermore, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. The change in the size and position of the components of the substrate transport robot 10 in the integrated data ID includes the change in the length and position of at least one of the link 12a and the hand 11 as the components of the substrate transport robot 10 in the integrated data ID. The change in the size and position of the components of the placement area 20 in the integrated data ID includes at least one of the change in the position, addition, and deletion of the substrate placement unit 22 as the components of the placement area 20, and at least one of the change in the position and size of the obstacle 30 as the components of the placement area 20.

[0036] As shown in Fig. 3, in step S4, the control unit 240 simulates and derives an operation path OP in the placement area 20 of the substrate transport robot 10 based on predetermined conditions. As shown in Fig. 5, the control unit 240 derives a plurality of operation paths OP. In Fig. 5, for simplification, only two operation paths OP are shown. Note that, as shown in Fig. 6, the control unit 240 simulates and derives the operation path OP in a state in which the outline of the placement area 20 is shifted by the minimum threshold value Ga of the set gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0037] As shown in FIG. 3, in step S5, the control unit 240 causes the display unit 220 to display the derived operation path OP. As shown in FIG. 5, the control unit 240 causes the display unit 220 to display the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, together with the derived operation path OP. Specifically, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID. That is, the size of the smallest gap G on each of the multiple derived operation paths OP is simultaneously displayed on the display unit 220. In addition, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID in a manner according to the size of the gap G. For example, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in a color according to the size of the gap G.

[0038] After step S4 or step S5, if the user performs an input operation on the input unit 210 to change the predetermined conditions when deriving the operation path OP, the process returns to step S3. If the user does not perform an input operation on the input unit 210 to change the predetermined conditions when deriving the operation path OP after step S5, the generation of the operation path for the substrate transport robot 10 ends.

[0039] [Effects of the embodiment] In this embodiment, the following effects can be obtained.

[0040] (Effect of the method for generating the motion path of the substrate transport robot) In this embodiment, when one of the two-dimensional data IDa and three-dimensional data IDb of the integrated data ID, which is an integration of the transport robot CAD data CD1, which is computer-aided design data of the substrate transport robot 10, and the placement area CAD data CD2, which is computer-aided design data of the placement area 20, used to derive the operating path OP of the substrate transport robot 10 in the placement area 20 where the substrate transport robot 10 and the substrate W are placed, is changed based on the user's operation, at least one of a two-dimensional virtual image VIa including the substrate transport robot 10 and the placement area 20 and corresponding to the two-dimensional data IDa and a three-dimensional virtual image VIb corresponding to the three-dimensional data IDb is displayed on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. As a result, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed, the change is reflected in the other of the two-dimensional data IDa and the three-dimensional data IDb, so that even when the user changes either the two-dimensional data IDa or the three-dimensional data IDb, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed at a desired timing on the display unit 220. As a result, it is possible to improve the operability and visibility for the user when setting predetermined conditions for deriving the operation path OP in the arrangement area 20 of the substrate transport robot 10.

[0041] In this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation. This allows the display unit 220 to display both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data so that they can be viewed at the same time, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb. This allows the user to consider the change in the virtual image VI when either the two-dimensional data IDa or the three-dimensional data IDb is changed from multiple angles.

[0042] In the present embodiment, the operation path generating method for the substrate transport robot 10 includes switching between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220. This allows the user to select a desired state from among the state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, the state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and the state in which the three-dimensional virtual image VIb is displayed on the display unit 220.

[0043] In addition, in this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation. This means that even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb with respect to at least any of the size of the components of the substrate transport robot 10, the positions of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, or the positions of the components of the placement area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at the desired timing.

[0044] In this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in one of the two-dimensional data IDa and the three-dimensional data IDb based on a user's operation. As a result, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing.

[0045] In this embodiment, the placement area 20 includes a substrate placement portion 22 on which the substrate W is placed. Displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the change, addition, and deletion of the position of the substrate placement portion 22 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is performed based on a user's operation. As a result, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding the position of the substrate placement portion 22 as a component of the placement area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing.

[0046] In this embodiment, the placement area 20 includes an obstacle 30 that becomes an obstacle when the substrate transport robot 10 operates. Displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the position and size of the obstacle 30 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation. As a result, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding at least one of the position and size of the obstacle 30 as a component of the placement area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing.

[0047] (Effects of the motion path generation device for substrate transport robots) In this embodiment, the control unit 240 is provided which, when one of the two-dimensional data IDa and three-dimensional data IDb of the integrated data ID which integrates the transport robot CAD data CD1, which is computer-aided design data of the substrate transport robot 10, and the placement area CAD data CD2, which is computer-aided design data of the placement area 20, used to derive the operating path OP of the substrate transport robot 10 in the placement area 20 where the substrate transport robot 10 and the substrate W are placed, is changed based on user operation, and causes the display unit 220 to display at least one of a two-dimensional virtual image VIa which includes the substrate transport robot 10 and the placement area 20 and corresponds to the two-dimensional data IDa, and a three-dimensional virtual image VIb which corresponds to the three-dimensional data IDb, while reflecting this in the other of the two-dimensional data IDa and the three-dimensional data IDb. As a result, similarly to the above-mentioned method for generating a motion path for the substrate transport robot 10, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb when setting a predetermined condition for deriving the motion path OP in the placement area 20 of the substrate transport robot 10, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at a desired timing. As a result, similarly to the above-mentioned method for generating a motion path for the substrate transport robot 10, a motion path generating device 200 for the substrate transport robot 10 can be provided that can improve the user's operability and visibility when setting a predetermined condition for deriving the motion path OP in the placement area 20 of the substrate transport robot 10.

[0048] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the embodiments described above, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0049] For example, in the above embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting a change in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the position and size of the obstacle 30 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the position and size of the obstacle 30 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user operation.

[0050] In addition, in the above embodiment, an example was shown in which displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of a change in position, addition, and deletion of the substrate mounting portion 22 as a component of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is performed based on a user operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of a change in position, addition, and deletion of the substrate mounting portion 22 as a component part of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is performed based on a user operation.

[0051] In addition, in the above embodiment, an example was shown in which displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on a user's operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the length and position of at least one of the link 12a and the hand 11 as components of the substrate transport robot 10 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation.

[0052] In addition, in the above embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes an example in which, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting this in the other of the two-dimensional data IDa and the three-dimensional data IDb, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting in the other of the two-dimensional data IDa and the three-dimensional data IDb when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on user operation.

[0053] In the above embodiment, the operation path generating method for the substrate transport robot 10 includes switching between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, the operation path generating method for the substrate transport robot 10 does not need to include switching between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220.

[0054] In the above embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes displaying both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, but the present disclosure is not limited to this. In the present disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 does not necessarily include displaying both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation.

[0055] In the above embodiment, an example has been shown in which displaying the virtual image VI on the display unit 220 includes displaying the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on an integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, but the present disclosure is not limited to this. In the present disclosure, displaying the virtual image VI on the display unit 220 may also include displaying the virtual image VI including the substrate transport robot 10 and the placement area 20 but not the substrate W on the display unit 220 based on an integrated data ID that integrates the loaded transport robot CAD data CD1 and the placement area CAD data CD2 but does not integrate the substrate CAD data CD3.

[0056] In the above embodiment, an example has been shown in which the movement path generating method for the substrate transport robot 10 includes reading in the substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the movement path OP, but the present disclosure is not limited to this. In the present disclosure, the movement path generating method for the substrate transport robot 10 does not have to include reading in the substrate CAD data CD3, which is computer-aided design data for the substrate W, used to derive the movement path OP.

[0057] In the above embodiment, an example has been shown in which the workpiece is the substrate W, the end effector is the hand 11, and the robot arm 12 is a horizontally articulated robot arm, but the present disclosure is not limited to this. In the present disclosure, the workpiece may be something other than the substrate W, the end effector may be something other than the hand 11, and the robot arm 12 may be something other than a horizontally articulated robot arm.

[0058] In the above embodiment, an example has been shown in which the placement area 20 includes the substrate transport chamber 21 to which the substrate W is transported, and the substrate mounting portion 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted, but the present disclosure is not limited to this. The placement area 20 may include the substrate transport chamber 21 to which the substrate W is transported, but may not include the substrate mounting portion 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted.

[0059] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general purpose processors, special purpose processors, integrated circuits, Application Specific Integrated Circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Processors are considered processing circuits or circuits because they include transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0060] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0061] (Item 1) deriving, by simulating based on predetermined conditions, an operation path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; a display unit displaying at least one of a two-dimensional virtual image including the robot and the placement area and corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, the two-dimensional virtual image including the robot and the placement area and corresponding to the three-dimensional data, when one of the two-dimensional data and the three-dimensional data of integrated data, which is obtained by integrating robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, and which is used to derive the movement path, is changed based on a user's operation.

[0062] (Item 2) 2. The robot movement path generation method according to item 1, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when one of the two-dimensional data and the three-dimensional data is changed based on a user operation, displaying both the two-dimensional virtual image and the three-dimensional virtual image side by side on the display unit while reflecting a change in the other of the two-dimensional data and the three-dimensional data.

[0063] (Item 3) 3. The robot movement path generation method according to claim 1, further comprising switching between a state in which the two-dimensional virtual image and the three-dimensional virtual image are both displayed side by side on the display unit, a state in which the two-dimensional virtual image is displayed on the display unit, and a state in which the three-dimensional virtual image is displayed on the display unit.

[0064] (Item 4) The robot movement path generation method according to any one of items 1 to 3, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of the size of the robot's components, the position of the robot's components, the posture of the robot, the size of the components of the placement area, and the position of the components of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on a user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0065] (Item 5) 5. The robot movement path generation method according to item 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when a length and a position of at least one of the link and the end effector as the component parts in one of the two-dimensional data and the three-dimensional data is changed based on an operation of the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

[0066] (Item 6) The placement area includes a work placement portion on which the work is placed, 5. The robot motion path generation method according to item 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of a change in position of, an addition to, and a deletion of the workpiece placement portion as a component part of the placement area in one of the two-dimensional data and the three-dimensional data is performed based on the user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0067] (Item 7) the placement area includes an obstacle that impedes the operation of the robot; 5. The robot movement path generation method according to item 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of a size and a position of the obstacle as a component part of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on the user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

[0068] (Item 8) The workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot arm, 8. The robot motion path generation method according to any one of claims 1 to 7, wherein the placement area includes a substrate transport chamber to which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

[0069] (Item 9) A display unit; a control unit that simulates and derives a movement path of a robot, the robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions, and when one of two-dimensional data and three-dimensional data of integrated data that integrates robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, used to derive the movement path, is changed based on a user's operation, causes at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data to be displayed on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data. [Explanation of symbols]

[0070] 10 Substrate transport robot (robot) 11 Hand (end effector) 12 Robot Arm 12a Link 20 Placement area 21 Substrate transfer chamber 22 Substrate placement section (work placement section) 30 Obstacles 200 Substrate transport robot motion path generation device (robot motion path generation device) 220 Display section 240 Control Unit CD1 Transport robot CAD data (robot CAD data) CD2 Placement area CAD data Identity Integration Data IDa 2D data IDb 3D data OP Operation Path VIa (2D) Virtual Image VIb (3D) Virtual Image W substrate (work)

Claims

1. deriving, by simulating based on predetermined conditions, an operation path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; a display unit displaying at least one of a two-dimensional virtual image including the robot and the placement area and corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, the two-dimensional virtual image including the robot and the placement area and corresponding to the three-dimensional data, when one of the two-dimensional data and the three-dimensional data of integrated data, which is obtained by integrating robot CAD data, which is computer-aided design data of the robot, and placement area CAD data, which is computer-aided design data of the placement area, and which is used to derive the movement path, is changed based on a user's operation, while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

2. 2. The robot movement path generation method according to claim 1, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when one of the two-dimensional data and the three-dimensional data is changed based on a user's operation, displaying both the two-dimensional virtual image and the three-dimensional virtual image side by side on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

3. 2. The robot movement path generation method according to claim 1, further comprising switching between a state in which both the two-dimensional virtual image and the three-dimensional virtual image are displayed side by side on the display unit, a state in which the two-dimensional virtual image is displayed on the display unit, and a state in which the three-dimensional virtual image is displayed on the display unit.

4. 2. The robot movement path generation method according to claim 1, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of the size of the robot's components, the position of the robot's components, the posture of the robot, the size of the components of the placement area, and the position of the components of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on a user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

5. 5. The robot movement path generation method according to claim 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of a length and a position of at least one of the link and the end effector as the components of the robot in one of the two-dimensional data and the three-dimensional data is changed based on the operation of the user, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

6. The placement area includes a work placement portion on which the work is placed, 5. The robot movement path generation method according to claim 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of a change in position of, an addition to, and a deletion of the workpiece placement portion as a component part of the placement area in one of the two-dimensional data and the three-dimensional data is performed based on the user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

7. the placement area includes an obstacle that impedes the operation of the robot; 5. The robot movement path generation method according to claim 4, wherein displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes, when at least one of a position and a size of the obstacle as a component part of the placement area in one of the two-dimensional data and the three-dimensional data is changed based on the user's operation, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit while reflecting this in the other of the two-dimensional data and the three-dimensional data.

8. The workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot arm, The robot motion path generating method according to claim 1 , wherein the placement area includes a substrate transfer chamber into which the substrate is transferred, and a substrate placement part connected to the substrate transfer chamber and on which the substrate is placed.

9. A display unit; a control unit that simulates and derives an operation path of a robot, the robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions, and when one of two-dimensional data and three-dimensional data of integrated data that integrates robot CAD data that is computer-aided design data of the robot and placement area CAD data that is computer-aided design data of the placement area, which are used to derive the operation path, is changed based on a user's operation, causes at least one of a two-dimensional virtual image that includes the robot and the placement area and corresponds to the two-dimensional data and a three-dimensional virtual image that corresponds to the three-dimensional data to be displayed on the display unit while reflecting the change in the other of the two-dimensional data and the three-dimensional data.

Images