Tape applicator and tape magazine

Abstract

To provide a tape applicator and a tape magazine capable of automatically switching and replacing a dicing tape.SOLUTION: An applicator 3 comprises a base 31 on which a tape magazine 4 that stores a dicing tape DT wound in a roll state with a portion of the dicing tape DT drawn out is mounted in a replaceable manner, movable guide rollers 32a, 32b that are movable to regulate a drawn-out region R where a portion of the dicing tape DT drawn out to a predetermined track, fixed guide rollers 33a, 33b, and a knife plate 35.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a tape application device for a dicing tape and a tape magazine used in the tape application device. [Background technology]

[0002] In the field of semiconductor manufacturing, there is a process in which semiconductor substrates such as silicon wafers (hereinafter referred to as the "work") are cut into chips. In this process, a dicing tape attached to the work restricts the position of each chip, allowing the chips to be cut efficiently.

[0003] Patent Document 1 describes that an expandable tape E is attached to a wafer W fixed by suction to a table 211 by the pressure of an attachment roller. The reference numerals are those in Patent Document 1. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2013-4584 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the device described in Patent Document 1, when switching tapes according to the type of wafer W or when replacing tapes as the tape wears out, it was necessary to remove the used expand tape E that was wound around the various rollers and set to follow a predetermined track, and then manually set a new expand tape E again so that it follows the predetermined track.

[0006] Therefore, a technical problem arises that must be solved in order to automatically switch or replace the dicing tape, and an object of the present invention is to solve this problem. [Means for solving the problem]

[0007] In order to achieve the above-mentioned object, the tape application device of the present invention is a tape application device that applies dicing tape to a dicing frame and a workpiece, and is equipped with a base on which a tape magazine that stores the dicing tape when a portion of the dicing tape wound in a roll is pulled out can be freely installed, and a regulating unit that is movable so as to regulate the pull-out area from which a portion of the dicing tape is pulled out to a predetermined trajectory.

[0008] According to this configuration, a tape magazine containing dicing tape with a portion of it pulled out is replaced with a tape application device, and the regulating unit regulates the pull-out area of ​​the dicing tape to a predetermined trajectory, thereby enabling the dicing tape to be automatically switched or replaced.

[0009] In order to achieve the above-mentioned object, the tape magazine of the present invention is a tape magazine that can be replaced with a tape application device that applies dicing tape to a dicing frame and a workpiece, and comprises a base that can be freely replaced with the tape application device, a pay-out shaft that is provided on the base and supports the dicing tape wound in a roll, and a take-up shaft that is provided on the base and winds up a separator for the dicing tape, and the dicing tape is supported by the pay-out shaft and the take-up shaft with a portion of it pulled out, and the pull-out area from which a portion of the dicing tape is pulled out can be regulated to a predetermined trajectory by a regulating section of the tape application device.

[0010] According to this configuration, a tape magazine containing dicing tape with a portion of it pulled out is replaced with a tape application device, and the regulating unit regulates the pull-out area of ​​the dicing tape to a predetermined trajectory, thereby enabling the dicing tape to be automatically switched or replaced. Effect of the Invention

[0011] The present invention enables automatic switching or replacement of dicing tapes. [Brief description of the drawings]

[0012] [Figure 1] 1 is a perspective view showing a configuration of a tape application system to which a tape application device according to an embodiment of the present invention is applied; [Diagram 2] FIG. 1 is a schematic diagram showing a configuration of a tape application system. [Diagram 3] FIG. 2 is a perspective view showing a configuration of a tape application device. [Figure 4] FIG. 2 is a perspective view showing a configuration of a tape magazine. [Diagram 5] FIG. 1 is a block diagram showing a main configuration of a tape application system. [Figure 6] Schematic diagram showing the procedure for automatically setting the dicing tape. [Figure 7] Schematic diagram showing a procedure for attaching a dicing tape to a workpiece and a dicing frame. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] An embodiment of the present invention will be described with reference to the drawings. In the following, when the number, numerical value, amount, range, etc. of components are mentioned, the number is not limited to the specific number, and may be more or less than the specific number, unless otherwise specified or when it is clearly limited to a specific number in principle.

[0014] In addition, when referring to the shape or positional relationship of components, etc., this includes things that are substantially similar or approximate to those shapes, etc., unless otherwise specified or considered to be clearly different in principle.

[0015] In addition, in the drawings, characteristic parts may be enlarged or exaggerated to make the features easier to understand, and the dimensional ratios of the components may not be the same as in reality.

[0016] 1 and 2, the tape application system 1 applies a dicing tape DT to a workpiece W and a dicing frame DF. The workpiece W is, for example, a semiconductor substrate such as a silicon wafer, but is not limited thereto. The dicing tape DT is, for example, an ultraviolet curing tape.

[0017] The tape application system 1 includes a transport device 2 and an application device 3 serving as a tape application device.

[0018] The transfer device 2 includes an inner circumference side table 21 that holds the workpiece W, and an outer circumference side table 22 on which the dicing frame DF is placed.

[0019] An adsorbent (not shown) made of a porous material having numerous pores is embedded in the surface of the inner circumferential table 21. The roughness of the pores in the adsorbent is, for example, #400 or #800.

[0020] The inner circumference side table 21 is switchably connected to a vacuum source and a compressed air source, not shown. When the vacuum source is activated, negative pressure is supplied between the workpiece W placed on the inner circumference side table 21 and the upper surface (adsorption surface) of the adsorption body, and the workpiece W is adsorbed and held on the adsorption surface. When the compressed air source is activated, compressed air (release air) is supplied between the workpiece W and the adsorption surface, and the adsorption between the workpiece W and the adsorption surface is released.

[0021] The inner circumference side table 21 and the outer circumference side table 22 are placed on a slider 23 and configured to be slidable in the conveying direction D1.

[0022] As shown in Figure 3, the application device 3 is equipped with a base 31 on which the tape magazine 4 is freely replaceable, movable guide rollers 32a, 32b erected from the side of the base 31 to regulate the trajectory of the dicing tape DT, fixed guide rollers 33a, 33b erected from the side of the base 31 to regulate the trajectory of the dicing tape DT, a pressure roller 34 that moves up and down to apply the tape body B to the workpiece W, and a knife plate 35 that regulates the trajectory of the separator S.

[0023] As shown in Fig. 4, the tape magazine 4 is a modularized device that stores the dicing tape DT wound in a roll with a portion of the dicing tape DT pulled out, and can be transported by a first transport robot 6 and a second transport robot 7 described below. The dicing tapes DT stored in each tape magazine 4 may be the same type or different types. In the following, the range where a portion of the dicing tape DT is pulled out is referred to as the "pulled-out region R."

[0024] The tape magazine 4 includes a payout shaft 41 that supports the roll-shaped dicing tape DT so that it can be paid out, a winding shaft 42 that winds up the separator S of the dicing tape DT and imparts a payout force to the dicing tape DT, and fixed guide rollers 43a to 43b that apply tension to the dicing tape DT and regulate the trajectory of the dicing tape DT so as to pull out a portion of the dicing tape DT.

[0025] The payout spindle 41 is provided with a rotation speed sensor that calculates the remaining amount of dicing tape DT from the rotation speed of the payout spindle 41, or a metal detection sensor that detects the payout spindle 41 when the dicing tape DT becomes low, making it possible to detect when the remaining amount of dicing tape DT is low.

[0026] The payout spindle 41 and the take-up spindle 42 are erected from the side surface of a base 44, and both ends of the fixed guide rollers 43a, 43b are supported by the base 44 and a support plate 45. In addition, an attached portion 46 that can be attached to a first transport robot 6 and a second transport robot 7, which will be described later, is provided at the upper end of the base 44. The base 44 and the base portion 31 are configured to be detachable by a locking mechanism (not shown) or the like.

[0027] Further, a cutout portion 47 is provided in a part of the base 44, specifically, between the payout spindle 41 and the winding spindle 42 and the fixed guide roller 43a when viewed from the side. The cutout portion 47 is set to a size capable of accommodating the movable guide rollers 32a and 32b, the fixed guide rollers 33a and 33b, and the knife plate 35.

[0028] 2, the tape application system 1 includes a stocker 5 that stores a plurality of tape magazines 4, and a first transport robot 6 serving as a transfer device that transfers the tape magazines 4 between the application device 3 and the stocker 5. The first transport robot 6 includes an adsorption section 61 that is capable of adsorbing and holding the adsorbed section 46 of the tape magazine 4. In the following description, when distinguishing between the tape magazine 4 attached to the application device 3 and the tape magazine 4 stored in the stocker 5, the former is given the reference symbol 4A and the latter is given the reference symbol 4B to distinguish them from each other.

[0029] 1 and 2 show a configuration in which a stocker 5 loads multiple tape magazines 4B on pallets 51 shown in FIG. 5, the pallets 51 are configured to be freely movable within the stocker 5, and a first transport robot 6 holds the tape magazine 4B that has been transported to a predetermined removal position 52 in the stocker 5 and transports it to the application device 3.

[0030] The tape application system 1 also includes a second transport robot 7 as a replacement device. The second transport robot 7 includes an adsorption section 71 capable of adsorbing and holding the adsorbed section 46 of the tape magazine 4B in the stocker 5 and the external tape magazine 4. In the following description, when the external tape magazine 4 is to be distinguished from the tape magazine 4B stored in the stocker 5, the external tape magazine is given the symbol 4C to distinguish it.

[0031] FIG. 2 illustrates a configuration in which a stocker 5 carries multiple tape magazines 4B on a pallet 51 that is configured to be freely movable within the stocker 5, and a second transport robot 7 holds and ejects the tape magazine 4B that has been transported to a predetermined replacement position 53 in the stocker 5, and then transports an external tape magazine 4C to the replacement position 53.

[0032] The external tape magazine 4C may be any type, such as one stored in an external rack or transported as necessary by a transport device or the like. The stocker 5 stores the tape magazine 4B containing the dicing tape DT that is used frequently, and the external rack or the like stores the tape magazine 4C containing the dicing tape DT that is used less frequently, thereby reducing the frequency of tape replacement. The external tape magazine 4C may be shared by a plurality of tape application systems 1.

[0033] The operation of the tape application system 1 is controlled via a controller 8 serving as a control device. The controller 8 controls each of the components constituting the tape application system 1. The controller 8 is, for example, a computer, and is composed of a CPU, a memory, and the like. The functions of the controller 8 may be realized by control using software, or may be realized by something that operates using hardware.

[0034] The controller 8 includes an input device 81 and a storage device 82 .

[0035] The input device 81 is a device for inputting processing conditions for the workpiece W and calling up a desired dicing tape DT, and is, for example, a touch panel.

[0036] The storage device 82 stores processing conditions for a plurality of workpieces W and type information of the dicing tape DT corresponding to each processing condition in association with each other. The storage device 82 also stores, for each tape magazine 4, type information of the dicing tape DT contained in the tape magazine 4, as well as position information of the tape magazine 4B within the stocker 5 (such as a number capable of identifying each individual pallet 51), and position information of an external tape magazine 4C stored in an external rack or the like. The position information of the tape magazine 4 is updated every time the tape magazine 4 is replaced or exchanged.

[0037] Next, the operation of the tape application system 1 will be described with reference to the drawings.

[0038] <Work transport> First, the dicing frame DF is transferred onto the outer circumferential table 22 by a transfer hand or the like (not shown).

[0039] Next, the workpiece W is transferred onto the inner circumference side table 21 by a transport hand (not shown) or the like. Thereafter, when negative pressure is supplied between the workpiece W and the suction surface from a compressed air source, the workpiece W is suctioned onto the inner circumference side table 21. The upper surface of the workpiece W and the upper surface of the dicing frame DF are set to be approximately flush with each other.

[0040] <Tape magazine installation> The tape magazine 4A is loaded into the joining device 3 before, after, or in parallel with the workpiece transport.

[0041] Specifically, first, based on the processing conditions of the workpiece W inputted via the input device 81 by an operator or the like, the controller 8 calls up from the storage device 82 type information of the dicing tape DT suitable for the processing conditions of the workpiece W.

[0042] Next, the controller 8 determines whether or not it is necessary to switch the dicing tape DT based on whether or not the type information of the dicing tape DT suitable for the processing conditions of the called workpiece W matches the type information of the dicing tape DT in the tape magazine 4A attached to the base 31. The controller 8 also determines whether or not it is necessary to replace the dicing tape DT based on the remaining amount of dicing tape DT in the tape magazine 4A.

[0043] Next, when the controller 8 determines that the dicing tape DT needs to be switched or replaced, the controller 8 retrieves the position information within the stocker 5 for the tape magazine 4B containing this dicing tape DT from the memory device 82, and controls the operation of the pallet 51 storing the retrieved tape magazine 4B to move to the removal position 52.

[0044] The first transport robot 6 bends and extends its arm to the vicinity of the tape magazine 4B that has been transported to the removal position 52, and the suction portion 61 holds the suction target portion 46 by suction.

[0045] Thereafter, the first transport robot 6 bends and extends the tape magazine 4B to the vicinity of the base 31, and the base 44 is attached to the base 31. At this time, as shown in Fig. 6(a), the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 are disposed in the cutout portion 47. Furthermore, the movable guide roller 32a and the fixed guide roller 33a are disposed on opposite sides to each other with the dicing tape DT in between, and the movable guide roller 32b and the fixed guide roller 33b are disposed on opposite sides to each other with the dicing tape DT in between.

[0046] Next, as shown in Figure 6 (b), the movable guide roller 32a moves closer to the fixed guide roller 33a to unwind the dicing tape DT upward, and the movable guide roller 32a and the fixed guide roller 33a clamp the dicing tape DT to regulate the trajectory of the dicing tape DT within the pull-out area R.

[0047] Similarly, as shown in Figure 6 (c), the movable guide roller 32b moves closer to the fixed guide roller 33b to unroll the dicing tape DT downward, and the movable guide roller 32b and the fixed guide roller 33b clamp the dicing tape DT to regulate the trajectory of the dicing tape DT within the pull-out area R.

[0048] Then, as shown in FIG. 6(d), the knife plate 35 moves closer to the pressure roller 34, unwinds the dicing tape DT downward, and regulates the trajectory of the dicing tape DT in the pull-out region R so that it reaches the vicinity of the pressure roller 34.

[0049] Thereafter, the adhesion between the adsorbing portion 61 and the adsorbed portion 46 is released, and the first transport robot 6 delivers the tape magazine 4B to the joining device 3.

[0050] In this manner, the tape magazine 4 that contains the appropriate type of dicing tape DT according to the input processing conditions for the workpiece W can be delivered to the joining device 3.

[0051] In addition, when removing the tape magazine 4A mounted on the base 31 prior to mounting the tape magazine 4B, first, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b and the knife plate 35 are moved away from the dicing tape DT, and the trajectory of the dicing tape DT is brought into a state in which it is regulated by the pay-out shaft 41, the take-up shaft 42 and the fixed guide roller 43a.

[0052] Next, the first transport robot 6 bends and extends its arm to the vicinity of the tape magazine 4A attached to the joining device 3, and the adsorbing portion 61 adsorbs and holds the adsorbed portion 46. Thereafter, the base 44 is detached from the base portion 31.

[0053] Thereafter, the first transport robot 6 bends and extends the tape magazine 4A to the vicinity of the removal position 52 of the stocker 5, places the tape magazine 4A on the pallet 51, and delivers the tape magazine 4A to the stocker 5.

[0054] In addition, the stocker 5 and the first transport robot 6 may be of any configuration as long as they cooperate to supply the tape magazine 4B containing the dicing tape DT selected according to the type of workpiece W, etc., to the joining device 3.

[0055] For example, a plurality of tape magazines 4B may be arranged at predetermined positions within the stocker 5, and the first transport robot 6 may bend and extend its arm to the vicinity of a desired tape magazine 4B within the stocker 5, hold the tape magazine 4B, and transport it to the application device 3.

[0056] In such a configuration, first, the controller 8 retrieves from the memory device 82 the position information within the stocker 5 for the tape magazine 4B which contains a type of dicing tape DT suitable for the processing conditions of the workpiece W, and sends this position information of the tape magazine 4B to the first transport robot 6. The first transport robot 6 then bends and extends its arm to the vicinity of the tape magazine 4B within the stocker 5, and the suction portion 61 suctions and holds the suction target portion 46.

[0057] Thereafter, the first transport robot 6 bends and extends the tape magazine 4 to the vicinity of the base 31 , and the base 44 is attached to the base 31 .

[0058] In addition, if the type of dicing tape DT suitable for the processing conditions of the workpiece W is not present in the stocker 5, an external tape magazine 4C is brought into the stocker 5 and then the external tape magazine 4C is attached to the application device 3.

[0059] Specifically, the controller 8 retrieves position information of an external tape magazine 4C containing a type of dicing tape DT suitable for the processing conditions of the workpiece W from the memory device 82 and sends it to the second transport robot 7, and the second transport robot 7 adsorbs and holds this external tape magazine 4C and transfers it to the pallet 51 located at the replacement position 53 of the stocker 5.

[0060] Thereafter, the controller 8 controls the operation of the stocker 5 to move the pallet 51 storing the loaded tape magazine 4C to the removal position 52. Then, the first transport robot 6 bends and extends its arm to the vicinity of the tape magazine 4C that has been transported to the removal position 52, and the adsorbing portion 61 adsorbs and holds the adsorbed portion 46.

[0061] Thereafter, the first transport robot 6 bends and extends the tape magazine 4C to the vicinity of the base 31, and the base 44 is attached to the base 31.

[0062] In this way, the capacity of the tape magazine 4 stored in the stocker 5 can be substantially expanded, making it possible to accommodate a variety of types of dicing tape DT. Furthermore, since the external tape magazine 4' can be shared by a plurality of tape application systems 1, the dicing tape DT can be used effectively.

[0063] The stocker 5 and the second transport robot 7 may have any configuration as long as they cooperate to replace the tape magazine 4B inside the stocker 5 with the external tape magazine 4C.

[0064] For example, the stocker 5 may have multiple tape magazines 4C each arranged at a predetermined position, and the second transport robot 7 may move within the stocker 5 to the position of the tape magazine 4B, hold the tape magazine 4B, eject it from the stocker 5, and then transport the external tape magazine 4C into the stocker 5.

[0065] In such a configuration, when an external tape magazine 4C is to be loaded into the stocker 5, the controller 8 first retrieves from the memory device 82 the position information of the external tape magazine 4C containing a type of dicing tape DT suitable for the processing conditions of the workpiece W, and sends it to the second transport robot 7. The second transport robot 7 then adsorbs and holds the external tape magazine 4C and loads it into the specified position within the stocker 5.

[0066] Thereafter, the controller 8 sends position information of the new tape magazine 4B brought in from outside to the first transport robot 6 for the stocker 5, and the first transport robot 6 bends and extends its arm to the vicinity of the tape magazine 4B brought in from outside, and the suction portion 61 suctions and holds the suction target portion 46.

[0067] Thereafter, the first transport robot 6 bends and stretches the tape magazine 4B, which has been carried in from outside, to the vicinity of the base 31, and the base 44 is attached to the base 31.

[0068] <Tape application> Next, the slider 23 is driven to move the inner circumference side table 21 and the outer circumference side table 22 so that one end (attachment start position) of the tape main body B is positioned below the pressure roller 34, as shown in FIG. 7(a).

[0069] Next, the take-up shaft 42 rotates to pay out the dicing tape DT, and the pressure roller 34 presses the tape body B against the dicing frame DF to adhere the tape body B with a predetermined pressure.

[0070] Thereafter, when the inner circumference side table 21 and the outer circumference side table 22 move along the transport direction D1, the tape body B is gradually adhered to the dicing frame DF and the workpiece W, as shown in FIG. 7(b).

[0071] Then, as shown in FIG. 7(c), when the tape body B reaches the other end (attachment end position) of the dicing frame DF, the workpiece W and the dicing frame DF are attached together via the tape body B.

[0072] In this manner, the application device 3 of this embodiment is an application device 3 that applies the dicing tape DT to the dicing frame DF and the workpiece W, and is configured to include a base 31 on which a tape magazine 4 that stores the dicing tape DT with a portion of the dicing tape DT wound in a roll shape pulled out is freely installed, and movable guide rollers 32a, 32b, fixed guide rollers 33a, 33b, and a knife plate 35 that are movable so as to regulate the pull-out area R from which the portion of the dicing tape DT is pulled out to a predetermined trajectory.

[0073] According to this configuration, when the tape magazine 4, which stores the dicing tape DT with a portion of it pulled out, is replaced with the base 31, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b and the knife plate 35 regulate the pull-out area R of the dicing tape DT to a predetermined trajectory, thereby enabling the dicing tape DT to be automatically switched or replaced.

[0074] Furthermore, the tape magazine 4 in this embodiment is a tape magazine 4 that can be replaced with an application device 3 that applies the dicing tape DT to a dicing frame DF and a workpiece W, and is equipped with a base 44 that can be freely replaced with the application device 3, a pay-out shaft 41 that is provided on the base 44 and supports the dicing tape DT wound in a roll, and a take-up shaft 42 that is provided on the base 44 and winds up the separator S of the dicing tape DT, and the dicing tape DT is supported by the pay-out shaft 41 and the take-up shaft 42 in a state in which a portion of the dicing tape DT is pulled out, and a pull-out region R from which a portion of the dicing tape DT is pulled out can be restricted to a predetermined trajectory by the movable guide rollers 32a, 32b, fixed guide rollers 33a, 33b, and knife plate 35 of the application device 3.

[0075] According to this configuration, when the tape magazine 4, which stores the dicing tape DT with a portion of it pulled out, is replaced with the base 31, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b and the knife plate 35 regulate the pull-out area R of the dicing tape DT to a predetermined trajectory, thereby enabling the dicing tape DT to be automatically switched or replaced.

[0076] Furthermore, the present invention can be modified in various ways other than those described above without departing from the spirit of the present invention, and it goes without saying that the present invention extends to such modifications.

[0077] In the above-described embodiment, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 are described as examples of regulating parts that regulate the trajectory of the pull-out region R of the dicing tape DT, but the number and types of regulating parts are not limited to these. [Explanation of symbols]

[0078] 1:Tape application system 2: Transport device 21: Inner circumference table 22: Outer table 23: Slider 3: Application device (tape application device) 31: Base 32a, 32b: Movable guide roller (regulating portion) 33a, 33b: fixed guide roller (regulating portion) 34: Pressure roller 35: Knife plate (regulating part) 4, 4A, 4B, 4C: Tape magazine 41: Feeding shaft 42: Winding shaft 43a, 43b: fixed guide rollers 44: Bass 45: Support plate 46: Adsorbed part 47: Notch 5: Stocker 51: Palette 6: First transport robot (delivery device) 61: Adsorption part 7: Second transport robot (replacement device) 71: Adsorption part 8: Controller (control device) 81: Input device 82: Storage device B: Tape body D1: Transport direction DF: Dicing frame DT: Dicing tape R: Drawer area S: Separator W: Work

Claims

1. A tape application device that applies a dicing tape to a dicing frame and a workpiece, a base on which a tape magazine is installed so as to be freely replaceable and which stores the dicing tape in a state where a portion of the dicing tape wound in a roll shape is pulled out; a restricting portion that is movable so as to restrict a pull-out area into which a portion of the dicing tape is pulled out to a predetermined trajectory; A tape application device comprising:

2. A tape magazine that can be replaced with a tape application device that applies a dicing tape to a dicing frame and a workpiece, A base that can be attached to the tape application device; a feed shaft that is provided on the base and supports the dicing tape wound in a roll; a winding shaft provided on the base and winding up a separator of the dicing tape; Equipped with the dicing tape is supported by the payout spindle and the take-up spindle in a state where a portion of the dicing tape is pulled out, A tape magazine, characterized in that a pull-out area from which a portion of the dicing tape is pulled out can be regulated to a predetermined track by a regulating portion of the tape application device.

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