Jet flow evaporative cooling system

Abstract

To provide a jet flow evaporative cooling system with stable cooling efficiency.SOLUTION: A jet flow evaporative cooling system is a cooling system that cools a heat generation part with a jet flow, and includes: a heat transfer part integrally formed with a cooling part configured to receive the jet flow and an arrangement part on which the heat generation part is arranged; an opening part configured to jet liquid supplied from a liquid supply part to the cooling part; a drain part configured to drain the liquid; and a chamber configured to accommodate the opening part, the drain part, and the cooling part and configured to not accommodate the arrangement part therein. The chamber is maintained under a reduced pressure environment, and the opening part is configured to jet the liquid to the cooling part. At least a part of the cooling part is inclined, so that the liquid is drained from the drain part via the cooling part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a jet evaporative cooling system that cools a heat-generating part by a jet. [Background technology]

[0002] With the recent trend toward higher integration of devices and more advanced industrial equipment, the heat generation density of various devices tends to increase. Therefore, in order to cool these various devices, it has become an issue to efficiently remove a higher heat flux (amount of heat passing through a surface per unit area per unit time) through a cooling part, which is a part of a heat transfer part that is in thermal contact with these devices. Cooling methods of cooling devices with the above-mentioned functions include sensible heat cooling, which cools by the temperature difference between a refrigerant such as gas or liquid and the cooling part with which the refrigerant is in contact, and evaporative cooling, which cools the cooling part by latent heat (heat of vaporization) required when the refrigerant boils and evaporates.

[0003] The main types of evaporative cooling include boiling cooling, in which the cooling part is immersed in a refrigerant and cooled by boiling, and a type in which the refrigerant is jetted onto the cooling part from an opening such as a nozzle and evaporated to cool (herein referred to as jet evaporative cooling).Patent Document 1 discloses that in order to cool a semiconductor device provided on a circuit board, a cooling liquid is jetted from a nozzle installed above the circuit board. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Special table 2003-509874 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in cooling methods that use a jet, the cooling efficiency can sometimes be reduced due to the following reasons: the cooling liquid that has not been vaporized by the heat source remains on the cooling surface, obstructing the jet, or the jetted cooling liquid falls due to gravity and reaches the nozzle opening, obstructing the jet. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, the jet evaporative cooling system of the present invention is a cooling system that cools a heat-generating part by a jet, and is characterized in that it has a heat transfer part that integrally has a cooling part that receives the jet and an arrangement part in which the heat-generating part is arranged, an opening that jets liquid supplied from a liquid supply part onto the cooling part, an exhaust part that exhausts the liquid, and a chamber that is configured to house the opening, exhaust part, and cooling part but not to house the arrangement part inside, and that keeps the chamber in a reduced pressure environment, the opening jets liquid onto the cooling part, at least a portion of the cooling part is inclined, and the liquid is exhausted from the exhaust part via the cooling part. Effect of the Invention

[0007] According to the present invention, it is possible to provide a jet evaporative cooling system with stable cooling efficiency. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic diagram of a jet evaporative cooling system according to a first embodiment. [Diagram 2] 5A to 5C are diagrams illustrating modified examples of the inclined portion of the jet evaporative cooling system in the first embodiment. [Diagram 3] FIG. 5 is a schematic diagram of a jet evaporative cooling system according to a second embodiment. [Figure 4] FIG. 11 is a diagram showing a modified example of the inclined portion of the jet evaporative cooling system in the second embodiment. [Diagram 5] FIG. 11 is a diagram showing a modification of the cooling section in the first or second embodiment. [Figure 6] FIG. 11 is a schematic diagram of a jet evaporative cooling system according to a third embodiment. [Figure 7] FIG. 13 is a schematic diagram of a jet evaporative cooling system according to a fourth embodiment. [Figure 8] FIG. 13 is a schematic diagram showing a modification of the partition portion of the jet evaporative cooling system in the fourth embodiment. [Figure 9] FIG. 13 is a schematic diagram of a jet evaporative cooling system according to a fifth embodiment. [Figure 10] FIG. 13 is a schematic diagram showing a modification of the partition portion of the jet evaporative cooling system in the fifth embodiment. [Figure 11] FIG. 13 is a schematic diagram of a jet evaporative cooling system according to a sixth embodiment. [Figure 12] FIG. 13 is a schematic diagram of a jet evaporative cooling system according to a seventh embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, preferred embodiments of the jet evaporative cooling system disclosed in this specification will be described with reference to the drawings. The same or equivalent components, members, and processes shown in each drawing will be given the same reference numerals, and duplicated descriptions will be omitted as appropriate. In addition, the configurations in each embodiment may be implemented in appropriate combination.

[0010] <First embodiment> 1 is a diagram showing the configuration of a jet evaporative cooling system 100 around a heat generating part in a first embodiment of the present invention. The jet evaporative cooling system 100 in this embodiment cools the heat generating part 101 by jetting liquid supplied from a liquid supply part 110 to a cooling part 104 in which the heat generating part 101 is arranged.

[0011] The jet evaporative cooling system 100 in this embodiment has a cooling section 104 that receives the jet, an arrangement section 103 in which a heat generating section is arranged, an integral heat transfer section 102, and an opening 111 that jets liquid supplied from a liquid supply section 110 to the cooling section 104. The jet evaporative cooling system 100 also has a chamber 121 that is configured to house a discharge section 122 that discharges the liquid, the opening 111, and the cooling section 104, but not to house the arrangement section 103 inside. The jet evaporative cooling system 100 is configured to keep the chamber 121 in a reduced pressure environment, and the opening 111 jets the refrigerant 113 to the cooling section 104, and a part of the cooling section 104 is inclined so that the liquid is discharged from the discharge section 122 via the cooling section 104. Here, the cooling section 104 is configured to be inclined with respect to the plane constituting the placement section 103, and with this configuration, by installing the jet evaporative cooling system 100 with respect to the heat generating section 101, efficient discharge of liquid via the cooling section 104 is possible.

[0012] Each component of the jet evaporative cooling system 100 will be described below.

[0013] Heat generating section 101 is in thermal contact with arrangement section 103 which is a part of heat transfer section 102, and heat generated in heat generating section 101 is transferred to cooling section 104 which is a part of heat transfer section 102 via heat transfer section 102. Note that heat transfer section 102, arrangement section 103, and cooling section 104 do not necessarily need to be configured as an integrated component, and each may be configured from different members. Each member may be configured as an integrated component of separate members by performing interface treatment to reduce thermal resistance.

[0014] The heat transfer section 102 is made of a material with high thermal conductivity, such as copper, aluminum, or an alloy thereof, and has an appropriate thickness in order to quickly transfer the heat generated in the heat generating section 101 to the cooling section 104 .

[0015] Moreover, the placement unit 103 is in appropriate contact with the heat generating unit 101, for example, by contacting with thermal grease, so as to reduce the temperature difference (thermal resistance) between the heat generating unit 101 and the heat transfer unit 102. With this configuration, by cooling the cooling unit 104, the heat generated in the heat generating unit 101 can be removed, and the heat generating unit 101 can be cooled quickly.

[0016] The jet evaporative cooling system 100 has a jet unit 115 composed of a supply part 110 that supplies a refrigerant and an opening 111 that jets the refrigerant to the cooling part 104, and a chamber 121 that contains the cooling part 104 and an exhaust part 122 that exhausts the refrigerant and forms a space 120. The chamber 121 can be applied to cooling a multi-purpose heat source by contacting the target heat generating part 101 with the heat transfer part 102. The shape of the opening 111 can be appropriately determined by the user so that cooling performance according to the purpose can be obtained.

[0017] In FIG. 1, three openings 111 are provided, but this is not limiting, and the number and layout of the openings may be appropriately set by the user, such as providing a single opening or providing openings in two directions.

[0018] Further, although an example has been described in which supply unit 110 supplies refrigerant to each of a plurality of openings 111, this is not limiting, and supply unit 110 may be individually installed for each opening.

[0019] In this jet evaporative cooling system 100, heat generating part 101 is disposed outside space 120, so there is no need to consider the effects of the refrigerant's properties (electrical insulation properties, chemical properties, etc.) on heat generating part 101. Therefore, the refrigerant may be appropriately selected according to the target performance of this jet evaporative cooling system 100. Various refrigerants can be used for evaporative cooling, such as water, ethanol, and fluorine-based inert liquids. When the target performance is to remove heat from a high heat flux, it is preferable to use a refrigerant whose main component is water, from the viewpoints of the extremely large heat of vaporization that greatly affects the cooling capacity, and also of superiority in terms of safety, cost, etc.

[0020] Space 120 inside chamber 121 is a reduced pressure environment in which the degree of vacuum has been adjusted in advance by means of exhausting air from exhaust port 123. In other words, jet evaporative cooling system 100 may further have a pressure reduction section that reduces the pressure from chamber 121 via exhaust section 123. The degree of vacuum may be adjusted so that the boiling point of the refrigerant is a temperature that matches the user's intention. For example, when water is used as the refrigerant and the boiling point is to be set to about 33° C., the degree of vacuum in space 120 may be adjusted to 5 kPa.

[0021] In jet evaporative cooling system 100, refrigerant 113 passes through supply unit 110 and is jetted from opening 111 to cooling unit 104. When the temperature of cooling unit 104 becomes higher than the boiling point of the refrigerant due to heat generation from heat generating unit 101, the refrigerant evaporates into steam, and the heat of vaporization cools cooling unit 104. By exhausting the refrigerant vapor generated in cooling unit 104 from exhaust port 123, it is possible to maintain the vacuum degree of space 120, but this is not limited to the above.

[0022] In addition, the discharge section 122 is appropriately installed so that the liquid of the refrigerant 113 jetted to the cooling section 104 that is not vaporized is discharged to the outside of the chamber 121. In the cooling system 100 of the present embodiment 1, as shown in FIG. 1, the chamber 121 is arranged so that the arrangement section 103 is vertically below the opening 111, and the cooling section 104 is inclined with respect to the vertical direction. Furthermore, at least a part of the discharge section 122 is installed vertically below the cooling section 104 so that the refrigerant that is not vaporized is quickly discharged via the inclination of the cooling section 104. By having the above-mentioned configuration, the jet evaporative cooling system 100 in this embodiment can avoid the liquid that is not vaporized staying in the cooling section 104 and obstructing the jet from the opening 111, thereby enabling cooling with stable cooling efficiency.

[0023] (Variation 1) FIG. 2 is a diagram showing an example in which the inclined portion of the cooling section 104 constituting the jet evaporative cooling system 100 is different from that shown in FIG. 1. In the first embodiment, the jet evaporative cooling system 100 has been described as an example in which the cooling section 104 is inclined toward the discharge section 122, but the inclination of the cooling section 104 is not limited to the above example. For example, as shown in FIG. 2(A), the cooling section 104 may be horizontal in the direction of the drainage channel 122 and inclined in a direction different from that shown in FIG. 1, as shown in FIG. 2(B), which is a cross-sectional view of AA′ in FIG. 2(A). Also, as shown in FIG. 2(C), the cooling section 104 may be inclined in a plurality of directions, or as shown in FIG. 2(D), the jet collision section 114 where the jet from the opening 111 collides with the cooling section 104 may be inclined. With this configuration, it is also possible to suppress the retention of the refrigerant that has not been vaporized in the jet collision section 114, and jet evaporative cooling with stable cooling efficiency is possible.

[0024] According to the first embodiment and the first modification, the liquid refrigerant that is not vaporized in the cooling section 104 moves quickly from above the cooling section 104 due to the inclination formed in the cooling section 104, and is discharged from the discharge section 122. This makes it difficult for the momentum of the jet of water ejected from the opening 111 to the cooling section 104 to be hindered, and makes it possible to stably control the temperature of the cooling section 104.

[0025] <Second embodiment> A jet evaporative cooling system 200 in a second embodiment of the present invention will be described with reference to Fig. 3. Fig. 3 is a schematic diagram of the jet evaporative cooling system 200 in the second embodiment. In the first embodiment, the cooling unit 104 was installed so as to be vertically below the opening 111. On the other hand, in the jet evaporative cooling system 200 in the second embodiment, the chamber 121 is installed so that the cooling unit 104 is vertically above the opening 111.

[0026] Furthermore, cooling section 104 constituting jet evaporative cooling system 200 in the second embodiment is inclined with respect to the vertical direction, and has vertical lower portion 104c which is its lowest portion.

[0027] 1 of the second embodiment, except that the opening 113 is disposed at a position different from that vertically below the vertically lower portion 104c of the cooling portion 104 and the discharge portion 122 is disposed vertically below the opening 111. In other words, the opening 111 is disposed at a position different from that of the vertically lower portion 104c of the cooling portion 104, which is located at the lowest position.

[0028] Of the refrigerant 113 sprayed from the opening 111 into the cooling section 104, non-vaporized refrigerant 116 that is not vaporized does not immediately fall vertically downward due to the influence of surface tension, but moves to the vertical lower portion 104c due to the inclination of the cooling section 104 and then falls.

[0029] 3 shows an example of the inclination of the cooling unit 104 in the second embodiment, but the present invention is not limited thereto and may be configured with multiple inclinations or multiple openings 111, for example, as shown in FIG. 4. The jet vaporization cooling system 200 in this embodiment is provided with the above-mentioned configuration, thereby making it possible to provide a jet vaporization system with stable cooling efficiency. Specifically, even if non-vaporized refrigerant 116, which is a liquid that has not been vaporized by the heat generating unit 101, falls due to gravity, it is possible to avoid obstruction of the jet of refrigerant 113 from the opening 111.

[0030] (Variation 2) A modified example of the cooling section 104 constituting the heat transfer section 102 in the first or second embodiment of the present invention will be described with reference to Fig. 5. Fig. 5(A) is a cross-sectional view showing the configuration around the heat transfer section 102.

[0031] FIG. 5(A) shows an example in which a cooling section 104 constituting the heat transfer section 102 in the first or second embodiment is further provided with a groove section consisting of an upper groove section 104a and a lower groove section 104b, and the upper groove section 104a and the lower groove section 104b are inclined in the extension direction of the groove section.

[0032] The shape of the grooves is not limited to that shown in Fig. 5(A) and may be, for example, a shape as shown in Fig. 5(B) or may be combined with the configuration of the cooling part 104 shown in Fig. 1 or 2. The shape, width, depth, pitch, etc. of the grooves may also be set appropriately.

[0033] The configuration of variant 2 makes it possible to increase the contact area between the cooling section 104 and the jetted liquid, and therefore the evaporation area becomes larger, thereby making it possible to further improve the cooling efficiency while maintaining the effects of the first or second embodiment.

[0034] <Third embodiment> A jet evaporative cooling system 300 according to the third embodiment of the present invention will be described with reference to Fig. 6. Fig. 6 is a diagram showing an example of the overall configuration of the jet evaporative cooling system 300.

[0035] FIG. 7 shows an example of a functional configuration similar to that of the cooling system 100 around the heat generating part in FIG. 1 in the first embodiment, but is not limited to this and may be the configuration described in the first embodiment, the second embodiment, or variants 1 and 2.

[0036] 6, the refrigerant is maintained at a pressure equal to or higher than atmospheric pressure before passing through refrigerant supply valve 117. When refrigerant supply valve 117 is opened, the refrigerant is supplied from refrigerant delivery part 139 to supply part 110, which supplies liquid, due to the pressure difference with space 120 inside chamber 121.

[0037] The coolant vapor generated by evaporation on the cooling surface 104 is exhausted by the pressure reducing pump 135 via the exhaust section 123 installed in the chamber 121 and the exhaust path 130 .

[0038] The decompression pump 135 may be, for example, a gear pump, a water seal pump, a water ejector, or the like, but is not limited to these and may be appropriately selected according to the user's purpose and environment.

[0039] In addition, the refrigerant that does not vaporize on the cooling surface 104 is also recovered by the pressure reducing pump 135 via the discharge section 122 and the drainage path 131, but this is not limited to this and the refrigerant may be discharged separately using a pump not shown in the figure.

[0040] Even if the amount of heat generated by the heat generating part 101 changes, it is possible to stably control the temperature of the cooling part 104 by controlling the flow rate of the refrigerant, but to simplify the explanation, detailed components such as the control system, thermometer, vacuum gauge, vacuum valve, etc. are omitted.

[0041] The entire jet evaporative cooling system 300 is not limited to this, but may be appropriately set according to the user's purpose, environment, and the like.

[0042] According to this embodiment, while cooling section 104 is cooled by jet evaporative cooling, space 120 is maintained in a reduced pressure state, thereby suppressing an increase in the boiling point of the refrigerant. Therefore, the temperature of cooling section 104 can be stably controlled, and jet evaporative cooling system 300 with stable cooling efficiency can be provided.

[0043] <Fourth embodiment> The jet evaporative cooling system 400 according to this embodiment will be described below with reference to Fig. 7. The fourth to sixth embodiments described later may be appropriately combined with the configurations described in the first to third embodiments described above.

[0044] The jet evaporative cooling system 400 in this embodiment is a cooling system that cools the heat generating part 101 by a jet. The jet evaporative cooling system 400 also has a heat transfer part 102 arranged near the heat generating part 101, and a jet unit 115 including an opening 111 and a partition part 112 that jets liquid supplied from a liquid supply part 110 to the heat transfer part 102. The jet evaporative cooling system 400 further has a chamber 121 that contains a part of the heat transfer part 102 and the jet unit 115. The jet unit 115 has a partition part 112 arranged near the opening 111 so as to surround the opening 111, and keeps the chamber 121 in a reduced pressure environment. Furthermore, the opening part 111 housed in the chamber is configured to jet liquid to a second part (cooling part 104) of the heat transfer part 102 that is different from a first part (arrangement part 103) where the heat generating part 101 is arranged.

[0045] 7 is a diagram showing the configuration of a jet evaporative cooling system 400 in the fourth embodiment. Each component of the jet evaporative cooling system 400 will be described below.

[0046] The heat generating portion 101 is in thermal contact with an arrangement portion 103 which is a part of a heat conducting portion 102 , and the heat generated in the heat generating portion 101 is transferred via the heat conducting portion 102 to a cooling portion 104 which is also a part of the heat conducting portion 102 .

[0047] The heat transfer section 102 is made of a material with high thermal conductivity, such as copper, aluminum, or an alloy thereof, and has an appropriate thickness in order to quickly transfer the heat generated in the heat generating section 101 to the cooling section 104 .

[0048] Moreover, the placement unit 103 is in appropriate contact with the heat generating unit 101, for example, by contacting with thermal grease, so as to reduce the temperature difference (thermal resistance) between the heat generating unit 101 and the heat transfer unit 102. With this configuration, by cooling the cooling unit 104, the heat generated in the heat generating unit 101 can be removed, and the heat generating unit 101 can be cooled quickly.

[0049] The jet evaporative cooling system 400 in this embodiment has a supply section 110 that supplies a refrigerant, and a jet unit 115 that is composed of an opening 111 that jets a refrigerant 113 to a cooling section 104, and a partition section 112. The system further has a chamber 121 that contains the jet unit 115, the cooling section 104, and a discharge section 122 that discharges the refrigerant, and forms a space 120. The shape and effect of partition section 112, which is one of the features of this embodiment, will be described later with reference to FIG. 8.

[0050] The shape of the opening 111 may be appropriately determined by the user so that cooling performance suited to the purpose is obtained.

[0051] In FIG. 7, three openings 111 are provided, but this is not limiting, and the number and layout of the openings may be appropriately set by the user, such as providing a single opening or providing openings in two directions.

[0052] Further, although an example has been described in which the supply unit 110 supplies the refrigerant to each of the multiple openings 111, this is not limitative, and the supply unit 110 may be individually installed for each opening 111, for example.

[0053] In the jet evaporative cooling system 400 in this embodiment, the heat generating part 101 is disposed outside the space 120. Therefore, there is no need to consider the influence of the characteristics of the refrigerant (electrical insulation characteristics, chemical characteristics, etc.) on the heat generating part 101, and the refrigerant may be appropriately selected according to the target performance of the jet evaporative cooling system 400. For example, when the target performance is to remove heat from a high heat flux, it is preferable to use a refrigerant containing water as the main component, from the viewpoints of the heat of vaporization, which greatly affects the cooling capacity, being very large, and being excellent in terms of safety, cost, etc. The space 120 inside the chamber 121 is a reduced pressure environment in which the degree of vacuum has been adjusted in advance by means of exhausting from the exhaust part 123, etc. Note that the degree of vacuum may be adjusted so that the boiling point of the refrigerant is a temperature according to the user's intention. For example, when water is used as the refrigerant and the boiling point is to be set to about 33°C, the degree of vacuum in the space 120 may be adjusted to 5 kPa. The jet evaporative cooling system 400 jets the refrigerant 113 through the supply 110 and into the cooling section 104 through the opening 111 .

[0054] When the temperature of cooling portion 104 becomes higher than the boiling point of the refrigerant due to heat generated by heat generating portion 101, the refrigerant evaporates into steam, and cooling portion 104 is cooled by the heat of vaporization.

[0055] By exhausting the refrigerant vapor generated in the cooling section 104 from the exhaust section 123, it is possible to maintain the vacuum degree in the space 120, but this is not limiting.

[0056] Further, exhaust section 122 is appropriately installed so that the refrigerant 113 jetted to cooling section 104 that has not been vaporized is exhausted to the outside of chamber 121 .

[0057] Here, the shape and effect of the partition portion 112 will be described with reference to Fig. 8. Fig. 8 is an enlarged view of the vicinity of the opening 111 in the jet unit 115. Fig. 8(a) is a diagram showing an example of the shape of the partition portion 112, and Fig. 8(b) and Fig. 8(c) are diagrams showing examples of other pattern shapes of the partition portion 112.

[0058] 8(a) shows how water vapor vaporized from liquid in cooling section 104 comes into contact with the outer periphery of jet unit 115 and condenses to form condensation (non-vaporized refrigerant) 116. By providing partition 112 to surround opening 111 as in the embodiment of the present invention, it is possible to prevent non-vaporized refrigerant 116 from entering opening 111 and obstructing the jet of refrigerant 113, and to suppress a momentary decrease in cooling efficiency.

[0059] FIG. 8(b) shows how the outside of the jet unit 115 and the partition 112 are integrated. As shown in the figure, by providing a step in the height direction with respect to the opening 111 and setting the opening of the partition 112 low, it is possible to prevent the intrusion of non-vaporized refrigerant 116 into the opening 111. Also, by processing the shape of the partition 112 and integrating it with the outside of the jet unit 115, it is expected that the manufacturing cost of the partition 112 can be reduced and space can be saved. Note that the area of ​​the partition in FIG. 8(b) is preferably small enough to prevent condensation of water vapor from remaining therein.

[0060] Fig. 8(c) shows another pattern in which the inner periphery of the partition 112 is tapered. The shape of the partition 112 is not limited to the shape shown in Fig. 8, and may be any shape that has a step in the height direction relative to the opening 111, and may be appropriately set by the user. The partition 112 does not need to be annular, but may surround the nozzle opening with a small gap that prevents condensation 116 from entering.

[0061] By configuring the jet evaporative cooling system 400 in this embodiment in this manner, it is possible to prevent condensed liquid from reaching the opening 111 that constitutes the jet unit 115, and to provide a jet evaporative cooling system 400 with stable cooling efficiency.

[0062] <Fifth embodiment> Fig. 9 is a diagram showing the configuration of the jet evaporative cooling system 500 in the fifth embodiment. As described with reference to Fig. 7 in the fourth embodiment, the opening 111 is configured to jet the refrigerant 113 vertically downward with respect to the cooling unit 104. On the other hand, in this embodiment, as shown in Fig. 9, the jet evaporative cooling system 500 in the fourth embodiment is turned upside down, a chamber 121 is provided with respect to the heat generating unit 101, and the opening 111 is configured to jet the refrigerant 113 vertically upward with respect to the cooling unit 104. Other device configurations and systems are similar to those in the fourth embodiment, and therefore description thereof will be omitted.

[0063] 10 is a diagram showing the relationship between the jet collision range 114 and the opening range of the partition 112. In FIG. 10, non-vaporized refrigerant 116, which is liquid that has not been vaporized among the liquid jetted to the cooling section 104, is pushed out of the jet collision range 114 where the liquid jets to the cooling section 104 by the jet of refrigerant 113 from the opening 111. Then, the non-vaporized refrigerant 116 accumulates and gradually falls to the cooling unit 115 by gravity. By making the opening range 112a of the partition 112 narrower than the jet collision range 114 as shown in FIG. 10, it is possible to prevent the non-vaporized refrigerant 116 from falling and directly entering the opening 111 and obstructing the jet of the refrigerant 113. In other words, the opening range of the opening 111 is wider than the opening range 112a of the partition. Here, the opening range 112a of the partition 112 means the opening range at the tip of the partition 112 that is stepped in the height direction relative to the opening 111. By being configured in this manner, the jet evaporative cooling system 500 in this embodiment can provide the jet evaporative cooling system 500 with stable cooling efficiency. Specifically, it is possible to prevent the jet of the refrigerant 113 from being obstructed by the liquid that has not been vaporized falling due to gravity and reaching the opening 111.

[0064] Sixth embodiment Fig. 11 is a diagram showing an example of the overall configuration of a jet evaporative cooling system 600 according to the sixth embodiment of the present invention. Note that, although Fig. 11 shows the cooling system 400 described in the fourth embodiment, the present invention is not limited to this, and may have the configuration described in the fifth embodiment, or may be appropriately combined with the configurations of the first to fourth embodiments.

[0065] 11, the refrigerant is maintained at a pressure equal to or higher than atmospheric pressure before passing through refrigerant supply valve 117. When refrigerant supply valve 117 is opened, the refrigerant is supplied from refrigerant delivery part 139 to supply part 110, which supplies liquid, due to the pressure difference with space 120 inside chamber 121.

[0066] The coolant vapor generated by evaporation on the cooling surface 104 is exhausted by the pressure reducing pump 135 via the exhaust section 123 installed in the chamber 121 and the exhaust path 130 .

[0067] The decompression pump 135 may be, for example, a gear pump, a water seal pump, a water ejector, etc., but is not limited thereto and may be appropriately selected according to the user's purpose and environment. Note that, although the configuration is such that the refrigerant that has not vaporized on the cooling surface 104 is also recovered by the decompression pump 135 via the discharge part 122 and the drainage path 131, the configuration is not limited thereto and may be separately drained by a pump (not shown), etc.

[0068] In addition, even if the amount of heat generated by the heat generating part 101 changes, it is possible to stably control the temperature of the cooling part 104 by controlling the flow rate of the refrigerant, etc. However, to simplify the explanation, detailed components such as the control system, thermometer, vacuum gauge, vacuum valve, etc. are omitted.

[0069] The entire jet evaporative cooling system is not limited to this, but may be appropriately set according to the user's purpose, environment, etc.

[0070] According to this embodiment, the space 120 can be maintained at a reduced pressure while the cooling section 104 is cooled by jet evaporative cooling, and an increase in the boiling point of the refrigerant can be suppressed, making it possible to stably control the temperature of the cooling section 104.

[0071] Seventh embodiment 12 is a schematic diagram showing a jet evaporative cooling system in the seventh embodiment. This embodiment is an embodiment in which a part of the configurations of the first to third embodiments is combined with a part of the configurations of the fourth to sixth embodiments. Specifically, this embodiment is an embodiment in which the inclination of the cooling section 104 in the first to third embodiments is combined with the partition section 112 in the vicinity of the opening 111 as described in at least one of the fourth to sixth embodiments. Note that the combination in this embodiment is merely an example, and the jet evaporative cooling system may be realized by appropriately combining the configurations of other embodiments.

[0072] 1, except that jet evaporative cooling system 700 in this embodiment is provided with partition 112 surrounding opening 111. According to this embodiment, in addition to the effects of embodiment 1, even if the refrigerant condensed inside chamber 121 moves to the vicinity of opening 111 due to gravity or the like, partition 112 makes it difficult for the refrigerant to reach opening 111. As a result, the jet of refrigerant 113 from opening 111 is less likely to be obstructed, and the temperature of cooling section 104 can be controlled more stably. [Explanation of symbols]

[0073] 101 Heat generating part 102 Heat transfer section 103 Placement section 104 Cooling section 110 Supply section 111 Opening 113 Liquid (refrigerant) 115 Jet Unit 120 Space 121 Chamber 122 Discharge section 123 Exhaust section

Claims

1. A cooling system that cools a heat generating part by a jet flow, a heat transfer section integrally including a cooling section that receives the jet flow and an arrangement section in which the heat generating section is arranged; an opening for jetting liquid supplied from a liquid supply unit onto the cooling unit; A discharge section that discharges the liquid, the opening, the discharge section, and the cooling section; a chamber configured to receive the above-mentioned, but not to receive the placement portion therein; having The chamber is kept under a reduced pressure environment, The opening allows the liquid to be jetted onto the cooling portion, At least a portion of the cooling portion is inclined, The liquid is discharged from the discharge section via the cooling section.

1. A jet evaporative cooling system comprising:

2. The chamber is installed such that the cooling portion is vertically below the opening, At least a portion of the exhaust section is disposed vertically below the cooling section.

2. The effusion evaporative cooling system of claim 1.

3. The chamber is installed such that the cooling portion is vertically above the opening, The discharge portion is disposed vertically below the opening portion, The opening is disposed vertically below the cooling portion, and The cooling section is provided with a vertical lower portion located at the lowermost position. It is located at a different position from vertically downward.

2. The effusion evaporative cooling system of claim 1.

4. A jet unit including the supply unit, the opening, and a partition unit, The jet unit is arranged to surround the opening. The partition is disposed near the opening.

4. The jet evaporative cooling system according to claim 1, wherein the jet evaporative cooling system comprises a first cooling means and a second cooling means.

5. 5. The jet evaporative cooling system according to claim 4, wherein an opening range of the opening is wider than an opening range of the partition.

6. The cooling portion has a groove portion consisting of an upper groove portion and a lower groove portion, The upper groove portion and the lower groove portion are at least partially inclined in the extension direction of the groove portion.

4. The jet evaporative cooling system according to claim 1, wherein the jet evaporative cooling system comprises a first heat exchanger and a second heat exchanger.

7. The liquid is characterized in that it is mainly composed of water.

4. The jet evaporative cooling system according to claim 1.

8. a refrigerant delivery section that delivers the liquid to the supply section; In the chamber, the gas obtained by vaporizing the liquid is A pressure reducing section that exhausts exhaust from the chamber via an exhaust section; Further having 4. The jet evaporative cooling system according to claim 1, wherein the jet evaporative cooling system comprises a first cooling means and a second cooling means.

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