Mass spectrometry device and sample supply member used for the mass spectrometry device

Abstract

To improve a throughput in a mass spectrometry device without requiring a complex control.SOLUTION: A mass spectrometry device 1 is a mass spectrometry device that executes a mass spectrometry processing by maintaining an inside of a housing 10 in vacuum. The mass spectrometry device comprises: a sample supply port 11 that is provided to the housing 10; and a sample supply member 3 that is inserted into the sample supply port 11. The sample supply member 3 includes: a sample plate holder 4 that supports a sample plate 7 that houses a sample; and a sample plate cover 5 that covers the sample plate 7 supported by the sample plate holder 4. When the sample supply member 3 inserted into the sample supply port 11 is moved toward an inner side and an outer direction of the housing 10, vacuum in the housing 10 is maintained by blocking the sample supply port 11 with the sample plate holder 4 or the sample plate cover 5.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a mass spectrometer that performs an analysis process under a vacuum state, and to a sample supply member used in the mass spectrometer. [Background technology]

[0002] There are mass spectrometers that perform analysis processing in a vacuum-treated housing. Samples to be analyzed that are contained in wells on a sample plate are ionized in a high vacuum and then analyzed. When a sample plate prepared in the atmosphere is introduced into the mass spectrometer, the mass spectrometer needs to be opened to the atmosphere. However, since it is preferable that the detector of the mass spectrometer is managed in a vacuum, the mass spectrometer often has a sample chamber that is open to the atmosphere and an analysis chamber that is not open to the atmosphere.

[0003] The following Patent Document 1 discloses a mass spectrometer having a sample chamber that is open to the atmosphere and an analysis chamber that is not open to the atmosphere. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2023 / 032983 Summary of the Invention [Problem to be solved by the invention]

[0005] Even in mass spectrometers that have a sample chamber that is open to the atmosphere, after a sample plate is supplied to the sample chamber, it is necessary to wait for a recovery time until the inside of the sample chamber is evacuated to a vacuum.Furthermore, after the gate valve that separates the sample chamber from the analysis chamber is opened, it is necessary to wait for a recovery time until the inside of the analysis chamber is ready for analysis.

[0006] Thus, even in a mass spectrometer having a sample chamber that is open to the atmosphere, a vacuum recovery time is required after replacing the sample plate, which reduces the throughput of the analysis process.

[0007] In addition, the operating pressure of vacuum equipment such as turbo molecular pumps is regulated, and in order to prevent damage to these vacuum equipment, it is necessary to control the vacuum pumps, vacuum valves, and other equipment in a specific order, which requires complex control in the above-mentioned mass spectrometer that releases to the atmosphere and restores the vacuum.

[0008] An object of the present invention is to improve the throughput of a mass spectrometer without requiring complex control. [Means for solving the problem]

[0009] A mass spectrometer according to one aspect of the present invention is a mass spectrometer that performs mass analysis by maintaining a vacuum inside a housing, and includes a sample supply port provided in the housing and a sample supply member inserted into the sample supply port, the sample supply member having a first member that supports a sample plate that contains a sample, and a second member that covers the sample plate supported by the first member, and when the sample supply member inserted into the sample supply port moves inward or outward from the housing, the vacuum inside the housing is maintained by blocking the sample supply port with the first member or the second member.

[0010] The present invention is also directed to a sample delivery member for use in a mass spectrometer. Effect of the Invention

[0011] According to the present invention, it is possible to improve the throughput of a mass spectrometer without requiring complex control. [Brief description of the drawings]

[0012] [Figure 1] 1 is an overall view of a mass spectrometer according to an embodiment of the present invention; [Diagram 2] 1 is a perspective view including a partial cross section of a sample supply member inserted into a sample supply port of a housing. FIG. [Diagram 3] FIG. 2 is a perspective view of a sample plate holder according to the embodiment. [Figure 4] FIG. 2 is a side view of the sample plate holder. [Diagram 5] FIG. 2 is a side cross-sectional view of a sample plate holder. [Figure 6] FIG. 2 is a perspective view of a sample plate cover according to the embodiment. [Figure 7] FIG. 2 is a side view of the sample plate cover. [Figure 8] FIG. 2 is a side cross-sectional view of the sample plate cover. [Figure 9] FIG. 2 is a diagram showing a state in which a sample plate is set on a sample plate holder. [Figure 10] FIG. 13 is a diagram showing a state in which a sample plate cover is attached to a sample plate holder. [Figure 11] FIG. 2 is a cross-sectional view of the sample supply member with a sample plate set thereon. [Figure 12] FIG. 13 is a diagram showing a state in which the connection portion of the sample supply member is located in the medium to low vacuum section. [Figure 13] FIG. 2 is a view showing the sample supply member advanced toward the inside of the housing. [Figure 14] FIG. 13 shows the housing with the sample plate holder removed. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Next, configurations of a mass spectrometer and a sample supply member used in a mass spectrometer according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0014] (1) Overall configuration of mass spectrometer 1 is a schematic diagram of a mass spectrometer 1 according to the present embodiment. The mass spectrometer 1 includes a detector 12 in a housing 10. The inside of the housing 10 is made into a high vacuum state by driving a vacuum pump 21. For example, the vacuum pump 21 increases the air pressure inside the housing 10 to 100 bar. -5 The pressure is adjusted to, for example, Pa. The mass spectrometer 1 analyzes a sample to be analyzed by detecting the sample in a detector 12 under high vacuum conditions. A turbomolecular pump, for example, can be used as the vacuum pump 21. In Fig. 1, symbol S1 indicates a high vacuum space within the housing 10, and symbol S2 indicates an atmospheric pressure space outside the housing 10.

[0015] The mass spectrometer 1 of this embodiment includes a sample supplying member 3 for supplying a sample into the mass spectrometer 1. As shown in Fig. 1, the sample supplying member 3 is inserted into a sample supplying port 11 formed in a housing 10. A sample plate 7 that contains a sample is supplied into the housing 10 by the sample supplying member 3.

[0016] The mass spectrometer 1 of this embodiment also includes a roughing pump 22. The roughing pump 22 is a pump for generating a medium vacuum state or a low vacuum state. As will be described later, the roughing pump 22 is used to create a medium vacuum state or a low vacuum state in the gap space within the sample supply member 3. As the roughing pump 22, for example, a rotary pump can be used.

[0017] (2) Overall configuration of sample supply components Next, the overall configuration of the sample supply member 3 will be described with reference to Fig. 2. Fig. 2 is a perspective view including a partial cross section of the sample supply member 3 inserted into the sample supply port 11 of the housing 10. Note that Fig. 2 illustrates a cutaway portion of the housing 10 of the mass spectrometer 1. In Fig. 2, XYZ axes are defined as shown in the figure. In the following description, the XY plane is the horizontal plane, and the Z direction is the vertically upward direction. Similarly, in Figs. 3 to 14, the XYZ axes are defined based on the state in Fig. 2.

[0018] As shown in FIG. 2, the sample supply member 3 is inserted into a sample supply port 11 formed in a housing 10. The sample supply member 3 is configured to include a sample plate holder 4 and a sample plate cover 5. The sample plate holder 4 is an example of a first member according to the present invention. The sample plate cover 5 is an example of a second member according to the present invention. A sample plate 7 in which a sample is accommodated is set in the sample plate holder 4. The sample plate cover 5 is attached so as to cover the upper part of the sample plate holder 4 in which the sample plate 7 is set.

[0019] 2, a vacuum suction path 15 is formed in the housing 10. The lower end of the vacuum suction path 15 is connected to the sample supply port 11. The other end of the vacuum suction path 15 is connected to the roughing pump 22 described above.

[0020] 2, vacuum seals 17, 17 are provided at two locations on the outer periphery of the sample supply port 11. The vacuum seals 17, 17 have an annular shape that fits the outer periphery of the sample supply port 11. The vacuum seals 17, 17 are provided at positions sandwiching the vacuum suction path 15 in the X direction. As a result, the space surrounded by the outer periphery of the sample supply member 3 and the vacuum seals 17, 17 is adjusted to a medium vacuum state or a low vacuum state by the suction force acting via the vacuum suction path 15. The space in which this medium-low vacuum state is maintained is referred to as a medium-low vacuum section 18.

[0021] It is preferable to use a material with a lower coefficient of friction than a general O-ring as the vacuum seal 17. For example, a seal made of PTFE (polytetrafluoroethylene) can be used. By making the vacuum seal 17 from PTFE, the coefficient of friction can be reduced, allowing the sample supply member 3 to move smoothly inside the sample supply port 11.

[0022] (3) Configuration of the sample plate holder Next, the configuration of the sample plate holder 4 will be described with reference to Fig. 3 to Fig. 5. Fig. 3 is a perspective view of the sample plate holder 4 according to the embodiment. Fig. 4 is a side view of the sample plate holder 4. Fig. 5 is a side cross-sectional view of the sample plate holder 4.

[0023] 3 to 5, the sample plate holder 4 includes a cylindrical base 41 and a plate holding portion 43 extending straight in the X direction from one end of the base 41. A disk-shaped flange 42 is formed on the other end of the base 41. As shown in Fig. 5, the base 41, the flange 42 and the plate holding portion 43 are integrally formed. The sample plate holder 4 is made of, for example, a metal material.

[0024] 4 and 5, the upper surface of the plate holding part 43 is formed in a flat shape and constitutes a plate holding surface 44. The sample plate 7 is set on the plate holding surface 44. The lower surface of the plate holding part 43 forms a cylindrical surface 45.

[0025] The base 41, the flange 42, and the cylindrical surface 45 of the plate holding portion 43 are formed in a concentric shape with the X direction as the axis. The radius of the flange 42 is formed to be larger than the radius of the base 41, and the radius of the cylindrical surface 45 of the plate holding portion 43 is formed to be smaller than the radius of the base 41. In addition, as shown in Figures 3 and 4, a tapered portion 47 with a decreasing diameter is formed at the tip of the cylindrical base 41.

[0026] Furthermore, a plate insertion groove 46 is formed at the connection portion between the plate holding part 43 and the base part 41. The plate insertion groove 46 has a planar space that is approximately parallel to the XY plane. When the sample plate 7 is set on the plate holding surface 44, an end of the sample plate 7 is inserted into the plate insertion groove 46. This allows the sample plate 7 to be positioned on the plate holding surface 44 and the sample plate 7 to be held on the plate holding surface 44.

[0027] (4) Configuration of sample plate cover Next, the configuration of the sample plate cover 5 will be described with reference to Fig. 6 to Fig. 8. Fig. 6 is a perspective view of the sample plate cover 5 according to the embodiment. Fig. 7 is a side view of the sample plate cover 5. Fig. 8 is a side cross-sectional view of the sample plate cover 5.

[0028] As shown in Figs. 6 to 8, the sample plate cover 5 includes a cylindrical base 51 and a cover portion 52 extending straight in the X direction from one end of the base 51. As shown in Fig. 6, the cover portion 52 is also cylindrical. The base 51 and the cover portion 52 are formed in a concentric shape with the X direction as the axis. The radius of the base 51 is formed to be larger than the radius of the cover portion 52. The base 41, the flange 42, and the cylindrical surface 45 of the plate holding portion 43 of the sample plate holder 4 described above, and the base 51 and the cover portion 52 of the sample plate cover 5 are formed in a concentric shape. As a result, the sample supplying member 3 has a cylindrical outer shape as a whole.

[0029] 6 and 7, a tapered portion 53 with a reduced diameter is formed at the tip of the cylindrical cover portion 52. When the sample plate cover 5 is attached to the sample plate holder 4, the tapered portion 53 of the sample plate cover 5 and the tapered portion 47 of the sample plate holder 4 face each other and come into contact with each other.

[0030] As shown in Fig. 8, the sample plate cover 5 has an accommodation space 55 formed inside the base part 51 and the cover part 52, into which the sample plate holder 4 is inserted. The accommodation space 55 has a cylindrical part 56 which is a substantially cylindrical space, and an extension part 57 which extends in the X direction from the cylindrical part 56. The plate holding part 43 of the sample plate holder 4 is inserted into the cylindrical part 56 and the extension part 57. As shown in Fig. 8, the base part 51 and the cover part 52 are integrally formed. The sample plate cover 5 is made of, for example, a metal material.

[0031] (5) Method for supplying a sample using a sample supplying member Next, a method of supplying a sample to a mass spectrometer 1 using a sample supplying member 3 will be described with reference to Fig. 9 to Fig. 13. Fig. 9 is a diagram showing a state in which a sample plate 7 is set in a sample plate holder 4. Note that Figs. 9 and 10 show a part of a housing 10 of the mass spectrometer 1 cut away.

[0032] 9, first, with the sample plate cover 5 removed, the sample plate 7 is set in the sample plate holder 4. Samples are accommodated in each well of the sample plate 7. At this time, the sample plate holder 4 is in a state where it protrudes most outward from the housing 10 in the X direction.

[0033] Next, the sample plate cover 5 is attached to the sample plate holder 4. Fig. 10 is a diagram showing the state in which the sample plate cover 5 is attached to the sample plate holder 4. As shown in Fig. 10, by attaching the sample plate cover 5, the sample plate 7 is accommodated in the space surrounded by the sample plate holder 4 and the sample plate cover 5. At this point, the pressure in the space inside the sample supply member 3 in which the sample plate 7 is accommodated is 10°C, which is similar to atmospheric pressure. 5 It is about Pa.

[0034] Fig. 11 is a cross-sectional view of the sample supply member 3 with the sample plate 7 set therein and the sample plate cover 5 attached. Fig. 11 is a cross-sectional view of the sample supply member 3 in the state shown in Fig. 10. As shown in Fig. 11, the flange 42 of the sample plate holder 4 is in contact with the housing 10, and the sample plate holder 4 protrudes most outward in the X direction. At this time, the sample supply port 11 of the housing 10 is sealed by the sample plate holder 4 and the vacuum seal 17. This maintains the space within the housing 10 of the mass spectrometer 1 in a high vacuum state.

[0035] 11, the sample plate 7 is placed in a narrow space surrounded by the sample plate holder 4 and the sample plate cover 5. Specifically, the sample plate 7 is accommodated in a gap space formed when the plate holding part 43 of the sample plate holder 4 is inserted into the accommodation space 55 of the sample plate cover 5.

[0036] 9 to 11, when the setting of the sample plate 7 on the sample supply member 3 is completed, the sample supply member 3 then moves inwardly of the housing 10 in the X direction. That is, the sample supply member 3 moves toward the inside of the mass spectrometer 1. The means for moving the sample supply member 3 is not particularly limited, but for example, the movement of the sample supply member 3 is controlled by a drive unit equipped with a motor or the like.

[0037] 12 is a diagram showing the state in which the connection part 31 of the sample supplying member 3 is located in the medium-low vacuum section 18. The connection part 31 of the sample supplying member 3 is the part where the tip parts of the tapered part 47 of the sample plate holder 4 and the tapered part 53 of the sample plate cover 5 come into contact with each other. The roughing pump 22 is driven at the timing when the sample supplying member 3 moves to the position shown in FIG. 12, and the medium-low vacuum section 18 is put into a medium vacuum state or a low vacuum state by the suction force acting via the vacuum suction path 15. For example, the roughing pump 22 increases the air pressure in the medium-low vacuum section 18 to 10 1 The pressure is adjusted to, for example, 1 Pa. The roughing pump 22 is driven at least while the connection part 31 passes through the vacuum suction path 15, and during that time the medium-low vacuum part 18 is in a medium vacuum state or a low vacuum state.

[0038] In the state shown in FIG. 12, the gap space between the sample plate holder 4 and the sample plate cover 5 is connected to the medium-low vacuum section 18 via the connection section 31. As a result, the gap space between the sample plate holder 4 and the sample plate cover 5 is also in a medium vacuum state or a low vacuum state. In other words, the space in which the sample plate 7 is accommodated is in a medium vacuum state or a low vacuum state. In the state shown in FIG. 12, the sample supply port 11 of the housing 10 is sealed by the sample plate holder 4, the sample plate cover 5, and the vacuum seal 17. As a result, the space within the housing 10 of the mass spectrometer 1 is maintained in a high vacuum state.

[0039] 13 is a diagram showing a state in which the sample supply member 3 has further advanced toward the inside of the housing 10. As shown in FIG. 13, the base 41 of the sample plate holder 4 has moved toward the inside of the housing 10. The connection portion 31 of the sample supply member 3 has also moved toward the inside of the housing 10. At this time, the sample supply port 11 of the housing 10 is sealed by the sample plate cover 5 and the vacuum seal 17. As a result, the space within the housing 10 of the mass spectrometer 1 is maintained in a high vacuum state.

[0040] 12, the space inside the sample supply member 3 connected to the connection part 31 is adjusted to a medium or low vacuum state, so that air at atmospheric pressure does not flow into the housing 10 in the state shown in Fig. 13. In other words, it is possible to prevent the vacuum state of the high vacuum space S1 from being lowered.

[0041] FIG. 14 is a diagram showing a state in which the sample supply member 3 has further advanced toward the inside of the housing 10 and the sample plate holder 4 has been removed from the inside of the housing 10. As shown in FIG. 14, only the sample plate cover 5 is inserted into the sample supply port 11 of the housing 10. The sample plate holder 4 with the sample plate 7 set therein is pulled out from the sample plate cover 5 and moved to a predetermined position for performing an analysis process. In the housing 10, the movement of the sample plate holder 4 is controlled by a drive unit having, for example, a motor. At this time, the sample supply port 11 of the housing 10 is sealed by the sample plate cover 5 and the vacuum seal 17. As a result, the space in the housing 10 of the mass spectrometer 1 is maintained in a high vacuum state. Since the high vacuum state is maintained, the analysis process is immediately started for the sample accommodated in the sample plate 7.

[0042] After the analysis process for the samples contained in the sample plate 7 is completed, the sample plate holder 4 holding the sample plate 7 is again assembled to the sample plate cover 5. That is, the plate holding part 43 holding the sample plate 7 is inserted into the housing space 55 of the sample plate cover 5. Then, the sample supplying member 3 moves in the opposite direction to the above-mentioned direction, that is, toward the outside of the housing 10. The sample supplying member 3 moves in the order shown in Figure 13 → Figure 12 → Figure 11, opposite to the above-mentioned direction. As described above, the movement of the sample supplying member 3 is controlled by a driving part equipped with, for example, a motor or the like.

[0043] As in the above, in the states of Figures 13 and 14, the sample plate cover 5 maintains a high vacuum state in the housing 10, in the state of Figure 12, the sample plate holder 4 maintains a high vacuum state in the housing 10, and in the state of Figure 11, the sample plate holder 4 maintains a high vacuum state in the housing 10. After the state of Figure 11 is reached, the sample plate cover 5 is removed and the sample plate 7 is removed. When a new analysis process is to be performed, a new sample plate 7 is set in the sample plate holder 4.

[0044] As described above, the mass spectrometer of this embodiment includes a sample supply member 3 having a sample plate holder 4 that supports a sample plate 7 that contains a sample, and a sample plate cover 5 that covers the sample plate 7 supported by the sample plate holder 4. When the sample supply member 3 inserted into the sample supply port 11 moves toward the inside or outside of the housing 10, the sample supply port 11 is blocked by the sample plate holder 4 or the sample plate cover 5, thereby maintaining a vacuum state in the housing 10. This allows the sample plate 7 to be replaced while maintaining the inside of the mass spectrometer 1 in a high vacuum state. Since there is no need to provide a sample chamber to be opened to the atmosphere as in the conventional case, the device configuration can be made significantly more compact. There is no need for an expensive high vacuum valve (gate valve) that was provided between an analysis chamber that is not open to the atmosphere and a sample chamber that is open to the atmosphere in the conventional case, and costs can be reduced.

[0045] In a conventional mass spectrometer that has an analysis chamber that is not open to the atmosphere and a sample chamber that is open to the atmosphere, the degree of vacuum in the analysis chamber is reduced by opening a gate valve between the analysis chamber and the sample chamber. Therefore, even when a sample chamber is provided, the analysis chamber requires time to recover from vacuum, which is a factor in reducing the throughput of the analysis process. In the mass spectrometer 1 of the present embodiment, a state close to a high vacuum state is maintained, so that the throughput of the analysis process can be significantly improved.

[0046] Furthermore, in conventional mass spectrometers that have a sample chamber that is open to the atmosphere, it is necessary to operate the vacuum pump and vacuum valve in the correct order to open to the atmosphere and restore the vacuum, which requires complex control. This is to protect vacuum equipment such as turbomolecular pumps, which have a specified operating pressure. In contrast, in the mass spectrometer 1 of the present embodiment, there is no space that is open to the atmosphere, so the control is not complicated.

[0047] In the above embodiment, a tapered portion 47 is formed at the tip of the base 41 of the sample plate holder 4, and a tapered portion 53 is formed at the tip of the cover portion 52 of the sample plate cover 5. As a result, when the sample supply member 3 moves toward the inside of the housing 10, the tapered portion 53 comes into contact with the vacuum seal 17, and when the sample supply member 3 moves from the inside of the housing 10 toward the outside, the tapered portion 47 comes into contact with the vacuum seal 17. This protects the vacuum seal 17 from wear and ensures the durability of the vacuum seal 17.

[0048] (6) Other embodiments 2 and 9, a sample plate 7 having 48 (4×12) wells is held by the sample supplying member 3. This is just one example, and the shape of the sample plate 7 and the number of wells are not specified. For example, a sample plate 7 having 96 (8×12) wells can be used.

[0049] In the above embodiment, the space within the sample supplying member 3 in which the sample plate 7 is housed is a space surrounded by a surface approximately parallel to the surface of the sample plate 7. Here, the distance between the upper surface of the sample plate 7 and the sample plate cover 5 is preferably 1 mm or less, more preferably 0.5 mm or less, and further preferably 0.3 mm or less.

[0050] The sample supply member 3 according to the present embodiment can be used in various mass spectrometers 1 that perform analysis processing in a vacuum state. For example, the mass spectrometer 1 can be an apparatus that uses matrix-assisted laser desorption / ionization mass spectrometry (MALDI-MS).

[0051] In the above embodiment, the pressure in the medium to low vacuum section 18 is increased by 10 1 The pressure in the medium-low vacuum section 18 is not limited to this, and may be adjusted to about 10 Pa. 5 ~10 2 10 Pa, or medium vacuum 2 ~10 -1 The pressure in the medium to low vacuum section 18 may be adjusted to an appropriate value within the range of 10 Pa. 1 ~10 3 It is preferable to adjust the pressure to about Pa.

[0052] (7) Description It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0053] (Section 1) A mass spectrometer according to one aspect of the present invention comprises: A mass spectrometer that performs mass analysis by maintaining a vacuum inside a housing, A sample supply port provided in the housing; A sample supply member that is inserted into the sample supply port; Equipped with The sample supply member includes: a first member for supporting a sample plate for containing a sample; a second member that covers the sample plate supported by the first member; having When the sample supply member inserted into the sample supply port moves inward or outward from the housing, a vacuum is maintained within the housing by blocking the sample supply port with the first member or the second member.

[0054] The objective is to improve the throughput of a mass spectrometer without requiring complex control.

[0055] (Section 2) 2. The mass spectrometer according to claim 1, The first member may be detached from the second member within the housing, so that the sample plate supported by the first member is moved to a predetermined position within the housing and the mass analysis process is performed.

[0056] The first member can be separated within the housing to perform an analytical process.

[0057] (Section 3) 3. The mass spectrometer according to claim 2, When the first member is separated from the second member within the housing, the second member alone may maintain the vacuum within the housing.

[0058] The vacuum state is maintained even when the first member is removed.

[0059] (Section 4) 2. The mass spectrometer according to claim 1, The sample plate supported by the first member may be replaced by removing the second member from the first member outside the housing.

[0060] The sample plate can be replaced by separating the second member outside the housing.

[0061] (Section 5) 5. The mass spectrometer according to claim 4, When the second member is separated from the first member outside the housing, the vacuum within the housing may be maintained by the first member alone.

[0062] The vacuum state is maintained even when the second member is removed.

[0063] (Section 6) 2. The mass spectrometer according to claim 1, Two vacuum seals may be provided at the sample supply port, and a medium-low vacuum section in a medium vacuum state or a low vacuum state may be formed between the two vacuum seals.

[0064] It is possible to create a medium or low vacuum state during the transition from atmospheric pressure to a high vacuum state.

[0065] (Section 7) 7. The mass spectrometer according to claim 6, When the sample supply member inserted into the sample supply port moves toward the inside of the housing and the connection portion between the first member and the second member is positioned in the medium-low vacuum section, the space containing the sample plate surrounded by the first member and the second member may be placed in a medium vacuum state or a low vacuum state via the connection portion.

[0066] The space housing the sample plate can be changed from atmospheric pressure to medium or low vacuum.

[0067] (Section 8) 7. The mass spectrometer according to claim 6, The medium to low vacuum section is 10 1 ~10 3 The pressure may be set to 10 Pa.

[0068] It is possible to create a medium or low vacuum state during the transition from atmospheric pressure to a high vacuum state.

[0069] (Section 9) A sample supplying member according to another aspect of the present invention is used in the mass spectrometer according to any one of the first to eighth aspects. [Explanation of symbols]

[0070] 1:Mass spectrometer 3: Sample supply member 4: Sample plate holder 5: Sample plate cover 7: Sample plate 10: Housing 11: Sample supply port 17: Vacuum seal 18: Medium-low vacuum section 21: Vacuum pump 22: Roughing pump 31: Connection part 43: Plate holder 44: Plate holding surface 52: Cover part 55: Containment space

Claims

1. A mass spectrometer that performs mass analysis by maintaining a vacuum inside a housing, A sample supply port provided in the housing; A sample supply member that is inserted into the sample supply port; Equipped with The sample supply member includes: a first member for supporting a sample plate for containing a sample; a second member that covers the sample plate supported by the first member; having A mass spectrometer wherein when the sample supply member inserted into the sample supply port moves inward or outward from the housing, a vacuum is maintained within the housing by blocking the sample supply port with the first member or the second member.

2. 2. The mass spectrometer of claim 1, wherein the sample plate supported by the first member is moved to a predetermined position within the housing by detaching the first member from the second member within the housing, and the mass analysis process is performed.

3. 3. The mass spectrometer of claim 2, wherein when the first member is separated from the second member within the housing, the vacuum within the housing is maintained solely by the second member.

4. The mass spectrometer according to claim 1 , wherein the sample plate supported by the first member is replaced by detaching the second member from the first member outside the housing.

5. 5. The mass spectrometer according to claim 4, wherein when the second member is separated from the first member outside the housing, the vacuum within the housing is maintained by only the first member.

6. 2. The mass spectrometer according to claim 1, wherein two vacuum seals are provided at the sample supply port, and a medium-low vacuum section in a medium vacuum state or a low vacuum state is formed between the two vacuum seals.

7. 7. The mass spectrometer of claim 6, wherein when the sample supply member inserted into the sample supply port moves toward the inside of the housing and the connection portion between the first member and the second member is positioned in the medium-low vacuum section, the space containing the sample plate surrounded by the first member and the second member is placed in a medium vacuum state or a low vacuum state via the connection portion.

8. The medium to low vacuum section is 10 １ ~10 ３ The mass spectrometer of claim 6 , set to a pressure of 100 Pa.

9. A sample supply member for use in the mass spectrometer according to any one of claims 1 to 8.

Images