Inspection device

Abstract

To improve cleanability of a heat exhaust part and secure heat radiation performance needed for an inspection device in the inspection device 1 having a heat exchanger 10 in which a heat absorption part 11 and a heat exhaust part 12, which are disposed inside and outside a housing 2, are connected by a heat conduction pipe 15.SOLUTION: Intervals between heat exhaust fins 14a are set larger than intervals of heat absorption fins 13 to clean a heat exhaust part 12a easily. Further, in order to prevent reduction of a heat transfer amount of the heat exhaust part, as a heat radiation performance improvement structure, the surface area of the heat exhaust fin is set smaller than the surface area of the heat absorption fin 13. Furthermore, the thickness of the heat exhaust fin 14a is set larger than the thickness of the heat absorption fin 13. The structure can realize heat radiation performance needed for a heat exchanger of an inspection device.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an inspection device that has a heat exchanger in which a heat absorption section and a heat exhaust section are arranged inside and outside a housing and connected by a heat conduction pipe, and in particular, the spacing between the heat exhaust fins of the heat exhaust section is greater than the spacing between the heat absorption fins of the heat absorption section, making it easy to clean, and the inspection device is equipped with a heat dissipation performance improvement structure that improves the decrease in the heat transfer rate of the heat exhaust section caused by the large spacing between the heat exhaust fins of the heat exhaust section, so that the heat transfer rate of the heat exhaust section is not lower than that of the heat absorption section, and the inspection device can achieve the heat dissipation performance of the heat exchanger required for the inspection device. [Background technology]

[0002] The following Patent Document 1 discloses an invention of an X-ray inspection device that dissipates heat in the housing to the outside of the housing by a heat exchanger provided in the housing without using an expensive air conditioner. The inside of the first housing 3 of this X-ray inspection device 1 is divided into a plurality of cooling sections C1 to C4 by partitions 16 based on the use limit temperature, etc., and each of the sections C2, C3, and C4 houses heat sources 17 to 20 having their own use limit temperature. Since the air flow path B is set in the cooling section so that the heat sources 19 and 20 with low use limit temperatures are arranged upstream of the heat sources 17 and 18 with high use limit temperatures, the cooling efficiency is good, and the heat absorption section 15a of the heat exchanger 15 is in the first housing 3, and the heat dissipation section is in the second housing communicated with the outside air, and the heat dissipation section does not protrude from the housing as a whole, so that the cleaning is easy. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-109488 A Summary of the Invention [Problem to be solved by the invention]

[0004] According to the X-ray inspection device described in the above Patent Document 1, the heat in the housing can be dissipated to the outside using a heat exchanger without using an air conditioner that consumes electricity, and therefore the demand for power saving can be met. However, since both the heat absorbing part and the heat dissipating part that constitute the heat exchanger are housed in the housing, outside air must be taken into the housing in order to dissipate heat to the outside of the housing. If the environment in which the X-ray inspection device is installed is clean, there is no problem, but when the X-ray inspection device is used in a dusty environment in a factory or a similar environment, there is a problem that the mechanism and equipment in the housing become dirty with dust while the air taken into the X-ray inspection device is circulated inside the housing.

[0005] In order to solve these problems, the inventors of the present application came up with the idea of ​​adopting a heat exchanger in an X-ray inspection device that uses a heat exchanger instead of an air conditioner, in which the heat absorption part is placed inside the housing and the heat exhaust part is placed outside the housing, and the heat absorption part and the heat exhaust part are connected by a heat conduction pipe that passes through the housing, in order to prevent air containing dust from being introduced into the housing.

[0006] However, if the heat exhaust section is provided outside the housing, when the X-ray inspection equipment is used in the dusty environment of a factory as described above or in a similar environment, it is necessary to supply air containing dust to the heat exhaust section. This means that dust and other particles tend to get stuck between the heat exhaust fins, making the heat exhaust section difficult to clean.

[0007] The present invention has been made to solve the problems in the conventional technology described above, and aims to provide an inspection device having a heat exchanger in which heat absorption and exhaust parts are arranged inside and outside a housing and connected by a heat transfer tube, the heat exhaust part of which is easy to clean and which has the heat dissipation performance required for a heat exchanger to be installed in an inspection device. [Means for solving the problem]

[0008] The inspection device 1 according to claim 1 comprises: An inspection device 1 including a housing 2 having heat sources 4 and 5 therein, and heat exchangers 10a, 10b, and 10c that radiate heat emitted from the heat sources 4 and 5 to the outside of the housing 2, The heat exchangers 10a, 10b, and 10c are a heat absorbing section 11 arranged inside the housing 2 and including a plurality of heat absorbing fins 13 arranged at a first interval; a heat exhaust section 12a, 12b, 12c that is configured with a plurality of heat exhaust fins 14a, 14b, 14c that are arranged at a second interval that is larger than the first interval and that is arranged outside the housing 2; The heat transfer fins 12a, 12b, and 12c are connected to each other by a plurality of independent heat transfer pipes 15 passing through the housing 2 and thermally connecting the heat absorption fins 13 and the heat exhaust fins 12a, 12b, and 12c. The heat dissipation sections 12a, 12b, and 12c are characterized by being provided with a heat dissipation performance improving structure that improves the deterioration of heat dissipation performance caused by the heat transfer amount of the heat dissipation sections 12a, 12b, and 12c being lower than the heat transfer amount of the heat absorption section 11.

[0009] The inspection device 1 according to claim 2 is the inspection device 1 according to claim 1, The heat dissipation performance improving structure is characterized in that the thickness of the heat exhaust fins 14b is set to be greater than the thickness of the heat absorption fins 13.

[0010] The inspection device 1 according to claim 3 is the inspection device 1 according to claim 1, The heat dissipation performance improving structure is characterized in that the magnitude of the blowing force of the heat exhaust cooling fan 20a which supplies air to the heat exhaust fins 14a is set to be greater than the magnitude of the blowing force of the heat absorption cooling fans 17, 18 which supply air to the heat absorption fins 13.

[0011] The inspection device 1 according to claim 4 is the inspection device 1 according to claim 1, The heat dissipation performance improving structure is characterized in that the surface area of ​​the heat exhaust fins 14c is set to be equal to or greater than the surface area of ​​the heat absorption fins 13.

[0012] The inspection device 1 according to claim 5 is the inspection device 1 according to claims 1 to 4, The number of the heat exhaust fins 14a, 14b, and 14c is less than the number of the heat absorption fins 13, A feature of this structure is that the height of the heat dissipation sections 12a, 12b, 12c in a direction perpendicular to the surfaces of the heat absorption fins 13 and the heat dissipation fins 14a, 14b, 14c is smaller than the height of the heat absorption section 11 in the direction perpendicular to the surfaces of the heat absorption fins 13 and the heat dissipation fins 14a, 14b, 14c.

[0013] The inspection device 1 according to claim 6 is the inspection device 1 according to claim 5, The inspection device 1 is an X-ray inspection device (1) that irradiates an inspection object W transported by a transport means 3 with X-rays and inspects the inspection object W based on an X-ray image obtained from the X-rays transmitted through the inspection object W. Effect of the Invention

[0014] According to the inspection device described in claim 1, among the various conditions that determine the amount of heat transport, the fin spacing is larger for the heat exhaust fins than for the heat absorption fins, so the amount of heat transfer in the heat exhaust section should be lower than that of the heat absorption section, but since the heat exhaust section of the heat exchanger of this inspection device is provided with a heat dissipation performance improvement structure, there is no significant difference in the amount of heat transfer between the heat exhaust section and the heat absorption section, and the heat inside the housing that is transferred to the heat absorption section inside the housing can be reliably dissipated to the outside world from the heat exhaust section outside the housing. Therefore, since the spacing between the multiple heat exhaust fins is wider than the spacing between the heat absorption fins, high cleanability is achieved that allows foreign matter such as dust that has accumulated between the heat exhaust fins to be easily removed, while the heat exchange capacity required for the inspection device is reliably achieved.

[0015] According to the inspection device of claim 2, the thickness of the heat exhaust fins is set to be greater than the thickness of the heat absorption fins, so that the heat dissipation performance required for the heat exchanger of the inspection device can be realized.

[0016] According to the inspection device described in claim 3, the airflow force of the heat exhaust cooling fan is set to be larger than that of the heat absorbing cooling fan, thereby realizing the heat dissipation performance required for the heat exchanger of the inspection device.

[0017] According to the inspection device of claim 4, the surface area of ​​the heat exhaust fins is set larger than the surface area of ​​the heat absorption fins, so that the heat dissipation performance required for the heat exchanger of the inspection device can be realized.

[0018] According to the inspection device described in claim 5, the number of heat exhaust fins is smaller than the number of heat absorption fins, so that the height of the heat exhaust section is smaller than the height of the heat absorption section, and the second spacing of the heat exhaust section is larger than the first spacing of the heat absorption section. This makes it possible to reduce the overall height of the inspection device while ensuring high cleanability of the heat exhaust section.

[0019] According to the inspection device described in claim 6, in an X-ray inspection device in which it is particularly necessary to effectively release the large amount of heat generated by the X-ray generating device to the outside, the effects of claims 1 to 5 can be obtained, providing great practical advantages. [Brief description of the drawings]

[0020] [Figure 1] 1 is a partial see-through perspective view of an X-ray inspection apparatus according to a first embodiment, as viewed obliquely from behind. [Diagram 2] 1 is a partially cutaway side view of an X-ray inspection apparatus according to a first embodiment. [Diagram 3] FIG. 1 is a partially cutaway plan view of an X-ray inspection apparatus according to a first embodiment. [Figure 4] 4 is an enlarged plan view of the cut-out portion of FIG. 3, showing the heat exchanger with the case of the heat absorbing part in the housing removed. FIG. [Diagram 5] 5 is a plan view showing a heat exchanger of an X-ray inspection apparatus according to a second embodiment, viewed from the same perspective as in FIG. 4 of the first embodiment. FIG. [Figure 6] 13 is a plan view showing a heat exchanger of an X-ray inspection apparatus according to a third embodiment, viewed from the same perspective as in FIG. 4 of the first embodiment. [Figure 7] 5 is a plan view showing a heat exchanger of an X-ray inspection apparatus invented by the present inventor just before arriving at the present invention, viewed from the same perspective as FIG. 4 of the first embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] An X-ray inspection apparatus according to a first embodiment will be described with reference to FIGS. 1 to 4. FIG. The X-ray inspection device 1 shown in Figs. 1 to 3 has a housing 2 with an X-ray shielding structure. The housing 2 is composed of a relatively large upper housing 2a, a relatively small lower housing 2b, and an intermediate housing 2c that connects the upper housing 2a and the lower housing 2b, and the part surrounded by the upper housing 2a, the intermediate housing 2c, and the lower housing 2b is an inspection space S for the object to be inspected. In the inspection space S, a transport means 3 for transporting the object to be inspected W is provided so as to penetrate the inspection space S along the horizontal direction. An X-ray generator 4, which is a heat source that irradiates X-rays downward, is provided inside the upper housing 2a. An X-ray detector 5, which is a heat source that detects X-rays that have passed through the object to be inspected W, is provided inside the lower housing 2b.

[0022] 2, while the inspection object W is being transported by the transport means 3 within the inspection space S, an X-ray generator 4 irradiates the inspection object W with X-rays, and an X-ray detector 5 detects the X-rays that have passed through the inspection object W. Based on an X-ray image obtained from the output signal of the X-ray detector 5, it is possible to inspect the inspection object W for the presence or absence of foreign matter, etc.

[0023] 1 to 3 show an outline of the structure of the X-ray inspection device 1, and the X-ray generator 4, the X-ray detector 5, and the transport means 3 are shown in a schematic manner. Also, devices in the housing 2 other than a heat exchanger described later, support legs supporting the housing 2, and structures such as an X-ray shielding structure for the inspection space S are not shown. The devices in the housing 2 that are not shown include heat sources.

[0024] As shown in Figures 1 to 3, a heat exchanger 10a, which is a device that guides heat released from a heat source inside the housing 2 to the outside of the housing 2, is provided on the upper back surface of the housing 2 of the X-ray inspection apparatus 1. As shown in FIG. 4, this heat exchanger 10a includes a heat absorption section 11 inside the housing 2 and a heat exhaust section 12a outside the housing 2. The heat absorption section 11 is composed of a plurality of rectangular heat absorption fins 13 (38 fins as an example) arranged parallel to the vertical direction at a predetermined interval. The heat exhaust section 12a is composed of a plurality of rectangular heat exhaust fins 14a (20 fins as an example) arranged parallel to the vertical direction at a predetermined interval. The heat absorption fins 13 and the heat exhaust fins 14a have the same shape and the same surface area. The heat absorption fins 13 and the heat exhaust fins 14a are collectively referred to as fins.

[0025] The fin spacing mentioned above means the length of the gap between the two opposing surfaces of adjacent fins. The spacing between the heat exhaust fins 14a (referred to as the second spacing) is set wider than the spacing between the heat absorption fins 13 (referred to as the first spacing). The second spacing is set larger than the first spacing to improve cleaning performance, and as an example, it can be set to 4 to 5 mm so that an air nozzle can be inserted when air is used for cleaning, and about 8 mm so that a water nozzle can be inserted when water is used for cleaning.

[0026] The multiple heat absorption fins 13 and heat dissipation fins 14a described above are connected to multiple independent heat transfer pipes 15 (for example, four pairs of two for a total of eight) that penetrate the housing 2, and are thermally coupled to each other.

[0027] As shown in Figs. 1 to 4, both the heat absorbing part 11 and the heat discharging part 12a are covered by a box-shaped case. The heat absorbing case 16 covering the heat absorbing part 11 is open only on both the left and right sides, and a first heat absorbing cooling fan 17 for suction is attached to one opening, and a second heat absorbing cooling fan 18 for exhaust is attached to the other opening. As shown by arrow A1 in Fig. 1, warm air in the housing 2 is forcibly taken into the heat absorbing case 16 by the first heat absorbing cooling fan 17, passes through the heat absorbing fins 13, and is forcibly discharged by the second heat absorbing cooling fan 18 into the housing 2 outside the heat absorbing case 16. The heat discharging case 19 covering the heat discharging part 12a is open only on the top and bottom, and a heat discharging cooling fan 20 for suction is attached to the opening on the bottom. 1, the air outside the housing 2, which is lower in temperature than the air inside the housing 2, is forcibly taken into the heat exhaust case 19 from the upper opening by the heat exhaust cooling fan 20, passes through the heat exhaust fins 14a, and is then forcibly sucked out of the heat exhaust case 19 by the heat exhaust cooling fan 20. Therefore, the heat generated by the X-ray generator 4 and the like inside the housing 2 is transferred from the air inside the housing 2 to the heat absorption fins 13, conducted from the heat conduction tube 15 to the heat exhaust fins 14a, and further transferred from the heat exhaust fins 14a to the air outside the housing 2 and dissipated into the atmosphere.

[0028] As described above with reference to Figures 1 to 4, the fin spacing (second spacing) of the heat exhaust fins 14a is greater than the fin spacing (first spacing) of the heat absorption fins 13, so the heat exhaust section 12a outside the housing 2 is easy to clean and dust and other foreign matter can be easily removed by spraying water or air between the fins.

[0029] Also, the second interval of the heat exhaust fins 14a is larger than the first interval of the heat absorption fins 13, but the number of the heat exhaust fins 14a is smaller than the number of the heat absorption fins 13, so the dimension in the direction perpendicular to the fin surface (the longitudinal direction of the heat transfer tube 15) (referred to as the "height") of the heat exhaust section 12a is smaller than that of the heat absorption section 11. That is, the number and interval of the heat exhaust fins 14a are appropriately set so that the heat exhaust section 12a can be easily cleaned and the heat exhaust section 12a has a smaller height than the heat absorption section 11.

[0030] According to this heat exchanger 10a, among the conditions that determine the amount of heat transfer, the fin spacing of the heat exhaust fins 14a is larger than that of the heat absorption fins 13, and the number of fins of the heat exhaust fins 14a is smaller than that of the heat absorption fins 13. Therefore, the amount of heat transfer of the heat exhaust section 12a should be lower than that of the heat absorption section 11. However, this is not the case because the heat exhaust section 12a of this heat exchanger 10a is provided with a heat dissipation performance improving structure as described below. That is, the heat exhaust cooling fan 20a (see Figs. 1 and 2) provided in the heat exhaust section 12a of the first embodiment is selected to have a large blowing force. The heat exhaust cooling fan 20a only needs to have a blowing force that can supply the required amount of air at the required speed to the heat exhaust section 12a so that the heat transfer amount of the heat exhaust section 12a does not fall below that of the heat absorption section 11. This allows for good heat transport from the heat absorbing portion 11 to the heat dissipating portion 12a, and as a result, the heat dissipation performance of the heat exchanger 10a can be at a level required for the X-ray inspection apparatus 1.

[0031] As a heat dissipation improving structure, the radiation performance can be improved by using a material for the heat dissipation fins 14a that has a higher thermal conductivity than the heat absorption fins 13. For example, if the heat absorption fins 13 are made of aluminum, the heat dissipation performance of the heat exchanger can be improved by using silver or copper for the heat dissipation fins 14a, which have a higher thermal conductivity than aluminum, and the airflow force of the heat dissipation cooling fan can be reduced compared to when the heat absorption fins 13 and the heat dissipation fins 14 are made of the same material. Therefore, it is possible to replace the heat dissipation cooling fan 20a, which has a large airflow force, with the heat dissipation cooling fan 20, which has a smaller airflow force, without using the heat dissipation cooling fan 20a.

[0032] A heat exchanger 10b mounted on an X-ray inspection apparatus 1 according to a second embodiment will be described with reference to Fig. 5. Note that, for parts common to the first embodiment, the description of the first embodiment will be used as appropriate to avoid repetition, and the description will focus on the characteristic parts of the second embodiment that differ from the first embodiment.

[0033] As shown in Fig. 5, the configuration of the heat absorbing section 11 of the heat exchanger 10b is the same as that of the first embodiment. In the configuration of the heat exhausting section 12b, the surface area of ​​the heat exhausting fins 14b is almost the same as that of the heat exhausting fins 14a of the first embodiment, and therefore is also the same as that of the heat absorbing fins 13. However, the thickness of the heat exhausting fins 14b is thicker than that of the heat exhausting fins 14a of the first embodiment. In addition, the spacing (second spacing) of the heat exhausting fins 14b is larger than the spacing (first spacing) of the heat absorbing fins 13, and the number of the heat exhausting fins 14b are the same as those of the first embodiment, but the second spacing of the second embodiment is smaller than the second spacing of the first embodiment.

[0034] As described above, the heat exhaust section 12b of the heat exchanger 10b of the second embodiment is thicker than that of the first embodiment, but the number of heat exhaust fins 14b is the same and the second interval is small, so that the height of the heat exhaust section 12b is approximately the same as that of the first embodiment, and the protrusion from the rear surface of the housing 2 is approximately the same, resulting in a compact outer shape. However, if the heat exhaust cooling fan 20a with a large airflow capacity of the first embodiment is replaced with a heat exhaust cooling fan 20 with a smaller airflow capacity, the amount of heat transfer of the heat exhaust section 12b should be reduced. However, this does not happen because the heat exhaust section 12b of the heat exchanger 10b is provided with a heat dissipation performance improving structure as described below. That is, as shown in FIG. 5, the thickness of the heat exhaust fins 14b in the second embodiment is set to be greater than the thickness of the heat absorption fins 13, and the heat exhaust fins 14b can store more heat than the heat absorption fins 13. Therefore, even if the second spacing of the heat exhaust fins 14b is greater than the spacing (first spacing) of the heat absorption fins 13, the amount of heat transferred from the heat exhaust section 12b is not significantly less than the amount of heat transferred from the heat absorption section 11, and therefore heat is transported well from the heat absorption section 11 to the heat exhaust section 12b. As a result, the heat dissipation performance of the heat exchanger 10b can achieve the required level.

[0035] A heat exchanger 10c mounted on an X-ray inspection apparatus 1 according to a third embodiment will be described with reference to Fig. 6. Note that, for parts common to the first embodiment, the description of the first embodiment will be appropriately cited to avoid repetition, and the description will focus on the characteristic parts of the third embodiment that differ from the first embodiment.

[0036] As shown in FIG. 6, the configuration of the heat absorbing section 11 of the heat exchanger 10c is the same as that of the first and second embodiments. In the configuration of the heat exhausting section 12c, the surface area of ​​the heat exhausting fins 14c is larger than that of the heat exhausting fins 14a of the first embodiment and the heat exhausting fins 14b of the second embodiment, and is larger than that of the heat absorbing fins 13. The thickness of the heat exhausting fins 14c is thinner than that of the heat exhausting fins 14b of the second embodiment, and is the same as that of the heat exhausting fins 14a of the first embodiment, and therefore is the same as that of the heat absorbing fins 13. In addition, the interval (second interval) of the heat exhausting fins 14c is larger than that of the heat absorbing fins 13 (first interval), larger than that of the second embodiment, and the same as that of the first embodiment. Furthermore, the number of heat exhausting fins 14c is 20, the same as that of the heat exhausting fins 14a of the first embodiment.

[0037] As described above, the heat exhaust section 12c of the heat exchanger 10c of the third embodiment has the same second interval, the same number of heat exhaust fins 14c, and the same thickness as the first embodiment, and the heat exhaust section 12c has the same height and width as the first embodiment, resulting in a compact external shape as an apparatus. However, if the heat exhaust cooling fan 20a with a large airflow force of the first embodiment is replaced with a heat exhaust cooling fan 20 with a smaller airflow force, the amount of heat transfer of the heat exhaust section 12c should be reduced. However, this does not happen because the area of ​​the heat exhaust fins is set larger in the heat exhaust section 12c of the heat exchanger 10c as a heat dissipation performance improving structure as already described. Due to the heat dissipation performance improvement structure in which the area of ​​the heat dissipation fins is set larger, the amount of heat transferred from the heat dissipation section 12c is not significantly lower than the amount of heat transferred from the heat absorption section 11, and heat is conducted smoothly from the heat absorption section 11 to the heat dissipation section 12c. As a result, the heat dissipation performance of the heat exchanger 10c can be brought to the level required for the X-ray inspection device 1.

[0038] Finally, with reference to FIG. 7, a heat exchanger 10 of an inspection device invented by the inventor of the present application in the process of research and development of the present invention, which aims to solve the above-mentioned "problem to be solved by the invention," will be described.

[0039] In this heat exchanger 10, the configuration of the heat absorbing part 13 is almost the same as that of the first to third embodiments, the thickness of the heat exhaust fins 14 is almost the same as that of the first and third embodiments, the number of the heat exhaust fins 14 is the same as that of the first to third embodiments, and the surface area is almost the same as that of the first embodiment, but since the interval between the heat exhaust fins 14 is wider than that of each embodiment, the heat exhaust part 12 is easier to clean than that of each embodiment, but the heat transfer amount of the heat exhaust part 12 is smaller than that of the heat absorbing part 11, and the heat dissipation performance as the heat exchanger 10 installed in the inspection device is insufficient. In addition, the height of the heat exhaust part 12 is larger than that of the heat absorbing part 11, and the protruding part from the outer surface of the housing 2 becomes large, resulting in problems with the appearance as an inspection device and positioning when installed.

[0040] In this way, in the structural example shown in FIG. 7, the spacing between the heat exhaust fins 14 is widened to achieve high cleanability, but the structure does not include a configuration for compensating for the low heat transfer rate of the heat exhaust section 12 resulting from spacing the heat exhaust fins 14 too wide and ensuring the heat dissipation performance of the heat exchanger 10, i.e., a heat dissipation performance improving structure which is a feature of each embodiment.

[0041] As a result of intensive research to further solve the problems of the structural example shown in Fig. 7, the inventors of the present application realized the need for a heat dissipation performance improvement structure that ensures the heat dissipation performance of the heat exchanger 10, and succeeded in realizing this in various specific forms as shown in each embodiment. As a result, an inspection device was realized that not only has excellent cleanability of the heat exhaust part, but also fully ensures the heat dissipation performance as a heat exchanger to be installed in the inspection device. In addition, since the heat exhaust part of the heat exchanger does not protrude significantly from the outer surface of the housing, an inspection device with a good appearance and an outer shape that is convenient for positioning and handling during installation was realized. [Explanation of symbols]

[0042] 1. X-ray inspection equipment 4…X-ray generator, which is the heat source 5…X-ray detector, which is the heat source 10a,10b,10c…Heat exchanger 11...Heat absorption section 12a, 12b, 12c...Heat exhaust section 13...Heat absorption fin 15…Heat transfer tube 17…First heat absorbing cooling fan 18…Second heat absorbing cooling fan 20, 20a…Heat exhaust cooling fan

Claims

1. An inspection device (1) comprising a housing (2) having a heat source therein, and a heat exchanger (10a, 10b, 10c) that dissipates heat emitted from the heat source to the outside of the housing, The heat exchanger includes: a heat absorbing portion (11) arranged inside the housing and configured with a plurality of heat absorbing fins (13) arranged at a first interval; a heat exhaust section (12a, 12b, 12c) configured with a plurality of heat exhaust fins (14a, 14b, 14c) arranged at a second interval larger than the first interval and arranged outside the housing; The heat transfer tube (15) is made up of a plurality of independent heat transfer tubes (15) that penetrate the housing and thermally connect the heat absorption fins and the heat exhaust fins, An inspection device (1), characterized in that the heat dissipation performance improving structure is provided in the heat dissipation section to improve the deterioration of heat dissipation performance caused by the heat transfer amount of the heat dissipation section being lower than the heat transfer amount of the heat absorption section.

2. 2. The inspection device (1) according to claim 1, characterized in that, as the heat dissipation performance improving structure, the thickness of the heat exhaust fins (14b) is set to be greater than the thickness of the heat absorption fins (13).

3. The inspection device (1) according to claim 1, characterized in that, as the heat dissipation performance improvement structure, the magnitude of the blowing force of the heat exhaust cooling fan (20a) that supplies air to the heat exhaust fins (14a) is set to be greater than the magnitude of the blowing force of the heat absorption cooling fans (17, 18) that supply air to the heat absorption fins (13).

4. 2. The inspection device (1) according to claim 1, characterized in that, as the heat dissipation performance improving structure, the surface area of ​​the heat exhaust fin (14c) is set to be equal to or greater than the surface area of ​​the heat absorption fin (13).

5. The number of the heat exhaust fins (14a, 14b, 14c) is smaller than the number of the heat absorption fins (13), An inspection device (1) as described in any one of claims 1 to 4, characterized in that the height of the heat dissipation portion (12a, 12b, 12c) in a direction perpendicular to the surfaces of the heat absorption fins and the heat dissipation fins is smaller than the height of the heat absorption portion (11) in the direction perpendicular to the surfaces of the heat absorption fins and the heat dissipation fins.

6. The inspection apparatus according to claim 5, wherein the inspection apparatus (1) is an X-ray inspection apparatus that irradiates an inspection object (W) transported by a transport means (3) with X-rays and inspects the inspection object based on an X-ray image obtained from the X-rays that have passed through the inspection object.

Images