Conveying device

Abstract

To provide a conveying device that is configured to suppress both end parts of one side including two corner parts of media from deflecting downward, even when conveying the media having different sizes while adsorbing the media onto a conveying surface.SOLUTION: A conveying device 1 comprises an adsorbing mechanism 4 that adsorbs media 10, and a lifting mechanism 3 that lifts the adsorbing mechanism 4 up and down. The adsorbing mechanism 4 comprises: a first adsorbing unit 5 that comprises a plurality of first adsorbing pads 51 comprising a pad part 52 having flexibility that contacts the media 10, which adsorb the central parts of the media 10, and a first base member 54 fixed with the first adsorbing pads 51; two second adsorbing units 6 that adsorb both end parts respectively of the first sides 10a1 of the media 10; and a position adjusting mechanism 7 that fixes the second adsorbing units 6 to the first base member 54 so that the second adsorbing units can be moved in an X-axis direction and in a Y-axis direction.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a conveying device that adsorbs and conveys a medium disposed on a placement surface by an adsorption pad.

Background Art

[0002] A conveying device that conveys a flexible medium such as a printed circuit board with a conveying arm provided with a plurality of adsorption pads is described in Patent Document 1. In this document, a vacuum pipe is connected to each adsorption pad of the conveying arm. When adsorbing and holding a medium disposed on the placement surface, a vacuum is supplied to the adsorption pad, and the conveying arm is lowered toward the placement surface so that the pad portions of all the adsorption pads contact the medium. As a result, when the medium is adsorbed to each adsorption pad, the conveying device raises the conveying arm, moves the medium to a predetermined location, and stops the supply of vacuum to each adsorption pad.

Prior Art Document

Patent Document

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The conveying device of Patent Document 1 can convey a plurality of types of media with different sizes by adsorbing the central portion of the media with a plurality of adsorption pads. Further, the conveying device of the same document may recognize the position of the media with respect to the adsorption pad by photographing two of the corner portions of the media adsorbed on the adsorption pad with a camera. In this case, since the conveying device recognizes the position of the media with respect to the adsorption pad, it can accurately convey the media to a predetermined position on the placement surface. Here, when the size of the media increases, the outer peripheral side of the media that is not adsorbed by the adsorption pad bends downward. As a result, the corner portions of the media also bend downward, and there is a problem that the corner portions of the media adsorbed on the adsorption pad cannot be accurately photographed by the camera.

[0005] An object of the present invention is to provide a conveying device that suppresses the downward bending of both end portions of one side including two corner portions of a media even when conveying media of different sizes by adsorbing them from a placement surface.

Means for Solving the Problems

[0006] In order to solve the above problems, the present invention provides a conveying device that adsorbs and conveys a rectangular media placed on a placement surface, comprising an adsorption mechanism that adsorbs the media, and a lifting mechanism that raises and lowers the adsorption mechanism. When the three axial directions orthogonal to each other are the X-axis direction, the Y-axis direction, and the Z-axis direction, and the vertical direction is the Z-axis direction, the adsorption mechanism includes a plurality of first adsorption pads that are first adsorption pads having a flexible pad portion that contacts the media and adsorb the central portion of the media, and a first base member to which the first adsorption pads are fixed, a first adsorption unit; two second adsorption units that respectively adsorb both end portions of a first side that is one side of the media; and a position adjustment mechanism that fixes the second adsorption units so as to be movable in the X-axis direction and the Y-axis direction with respect to the first base member.

[0007] According to the present invention, the position adjustment mechanism fixedly holds two second suction units that respectively adsorb both end portions of the first side in the X-axis direction and the Y-axis direction so as to be movable. In this way, since both end portions of the first side are adsorbed by the second suction units, the first side does not bend downward. Thereby, when photographing the corner of the medium adsorbed by the suction mechanism with a camera in this case, the camera can satisfactorily photograph the corner of the medium. Further, compared with a configuration in which the suction mechanism adsorbs all four corners of the medium, the transport device of the present invention adsorbs only both end portions of the first side including the corners required for photographing with the camera by the second suction units, so that the whole becomes compact.

[0008] In the present invention, the second suction unit includes a second suction pad including a flexible pad portion that contacts the medium, a second base member to which the second suction pad is fixed, a movable plate that is supported so as to be movable in the Z-axis direction with respect to the second base member and can contact the medium, and a biasing member that is disposed between the second base member and the movable plate and biases the movable plate downward with respect to the second base member. Before the suction mechanism adsorbs the medium, the tip of the pad portion of the second suction pad is located below the lower surface of the movable plate. When the pad portion of the second suction pad contacts the medium and deforms upward when the lifting mechanism moves the suction mechanism downward to adsorb the medium, it is preferable that the movable plate is displaced upward by the reaction force from the medium after contacting the medium. In this way, since the flatness of the medium is improved by being sandwiched between the movable plate and the placement surface, the pad portion of the second suction pad can stably adsorb the medium. Further, since the movable plate is displaced upward by the reaction force from the medium after contacting the medium, a large force is not easily applied to the medium. Thereby, breakage of the medium is suppressed.

[0009] In the present invention, it is preferable that the pad portion of the second suction pad is a bellow-type pad. In this way, when the pad portion of the second suction pad comes into contact with the medium, the pad portion of the second suction pad is easily deformed, so that the pad portion of the second suction pad can adsorb the medium well.

[0010] In the present invention, it is preferable that a resin attachment made of polyether ether ketone is attached to the tip of the pad portion of the second suction pad. In this way, after the second suction unit stops adsorbing the medium, the pad portion of the second suction pad is easily separated from the medium.

[0011] In the present invention, it is preferable that the second suction unit includes a background plate that overlaps with the end portion of the first side of the medium in the Z-axis direction when the second suction unit adsorbs the medium. In this way, when the corner of the medium is photographed by the camera, the background of the medium becomes clear, so that the camera can photograph the corner of the medium well.

[0012] In the present invention, when the suction mechanism adsorbs the medium, taking the direction perpendicular to the first side as the X-axis direction, the direction parallel to the direction in which the first side extends as the Y-axis direction, and the direction in which the first side is located in the X-axis direction as the X1 direction, the position adjustment mechanism may include a fixed arm connected to the first base member and extending in the X1 direction, a movable arm extending in the Y-axis direction, a first slide mechanism that guides the movable arm to be slidable in the X-axis direction with respect to the fixed arm, a second slide mechanism that guides the second suction unit to be slidable in the Y-axis direction with respect to the movable arm at both ends of the movable arm, a first fixing mechanism that fixes the fixed arm and the movable arm, and a second fixing mechanism that fixes the movable arm and the second suction unit.

[0013] In the present invention, it is preferable that the position adjustment mechanism includes a first scale indicating the position of the movable arm with respect to the fixed arm, and a second scale indicating the position of the second suction unit with respect to the movable arm. In this way, the position adjustment mechanism can accurately adjust and fix the position of the second suction unit.

[0014] In the present invention, the suction mechanism includes a fixed base member, and a support mechanism that suspends and supports the first suction unit and the second suction unit so as to be movable in the Z-axis direction with respect to the fixed base member. The support mechanism includes a first spring member that biases the first base member upward with respect to the fixed base member, and a second spring member that is a spring member that biases the first base member downward with respect to the fixed base member. When the lifting mechanism moves the suction mechanism downward to suck the medium, and the first suction pad receives a reaction force from the medium after contacting the medium, it is preferable that the first base member is displaced upward. In this way, when the first base member is displaced upward, the first suction pad is also displaced upward, so that a large force is less likely to be applied to the medium. Thereby, damage to the medium is suppressed. Further, since the first spring member and the second spring member apply different biasing forces to the first base member in the vertical direction, when the lifting mechanism moves the suction mechanism in the vertical direction, the first suction unit and the second suction unit are less likely to vibrate in the vertical direction with respect to the fixed base. Thereby, even when the lifting mechanism moves the suction mechanism in the vertical direction, the suction mechanism can continue to stably suck the medium.

[0015] In the present invention, the adsorption mechanism includes a contact plate that is fixed to the first base member and can contact the medium. Before the adsorption mechanism adsorbs the medium, the tip of the pad portion of the first adsorption pad is located below the lower surface of the contact plate. When the lifting mechanism moves the adsorption mechanism downward to adsorb the medium, when the pad portion of the first adsorption pad contacts the medium and deforms upward, it is preferable that the contact plate contacts the medium. Here, when the placement surface is soft such as made of rubber, or when an opening is provided in a part of the placement surface, the medium placed on the placement surface is likely to be in a deflected state when the medium is adsorbed, and a large load is applied to the medium, or the flatness of the medium becomes low. When used in such a state, the medium may be cracked due to a large load applied to the medium. Also, in a state where the flatness of the medium is low, it is difficult for the pad portion of the first adsorption pad to stably adsorb the medium. Therefore, in this way, the medium is sandwiched between the contact plate and the placement surface, so that the medium is less likely to deflect and the flatness of the medium is improved. As a result, the medium is less likely to crack when adsorbed, and the pad portion of the first adsorption pad can stably adsorb the medium.

Advantages of the Invention

[0016] According to the present invention, the position adjustment mechanism can fix two second adsorption units that respectively adsorb both end portions of the first side in the X-axis direction and the Y-axis direction so as to be movable according to the size of the medium. Therefore, even when adsorbing and transporting media of different sizes from the transport surface, it is possible to suppress the downward deflection of both end portions of one side including two corner portions of the medium.

Brief Description of the Drawings

[0017]

Figure 1

Figure 2

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Figure 9

Figure 10

Figure 11

Figure 12

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Figure 14

Figure 15

DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, with reference to the drawings, a transport device according to an embodiment of the present invention will be described.

[0019] (Overall Configuration) FIG. 1 is a schematic view of a transport device 1 according to this embodiment. As shown in FIG. 1, the transport device 1 according to this embodiment transports a medium 10 placed on a placement surface 11a of a placement unit 11 to a placement surface 15a of a placement unit 15 in the next process. An alignment camera 12 is arranged on the transport path from the placement unit 11 to the placement unit 15 in the next process.

[0020] The medium 10 is a liquid crystal panel substrate. The liquid crystal panel substrate has a rectangular planar shape. Recently, thin ones are the mainstream in terms of the thickness of the liquid crystal panel substrate, for example, about 0.3 mm. There are a plurality of media 10 with different lengths of the long side 10a and the short side 10b in the medium 10. A two-dimensional code (not shown) is described at one end portion 10c of the first side 10a1 which is one of the four sides of the medium 10. The medium 10 is placed on the placement surface 11a of the placement portion 11, and the inspection of the medium 10 is performed. Specifically, an opening 110 is formed in the placement portion 11, and light is irradiated from below the placement portion 11 toward the medium 10, and the medium 10 is imaged by a camera disposed above the placement portion 11, whereby the lighting inspection of the medium 10 is carried out. Here, the dimensions of the medium 10 are slightly larger than the dimensions of the opening 110, and the entire outer peripheral edge of the medium 10 is in contact with the placement surface 11a. The medium 10 may be an OLED (Organic Light Emitting Diode) substrate or the like.

[0021] The transfer device 1 includes a suction mechanism 4 that sucks the medium 10 placed on the placement surface 11a, a robot arm 2 that moves the suction mechanism 4, and a lifting mechanism 3 provided at the tip of the robot arm 2. The lifting mechanism 3 is composed of an electric cylinder or the like that raises and lowers the suction mechanism 4. The alignment camera 12 photographs two corner portions 10d of the medium 10 from below when the transfer device 1 transfers the medium 10. The transfer device 1 recognizes the position of the medium 10 with respect to the suction mechanism 4 based on each image of the corner portions 10d of the photographed medium 10.

[0022] Here, in the following description, three axial directions orthogonal to each other are defined as the X-axis direction, the Y-axis direction, and the Z-axis direction. Also, when the suction mechanism 4 sucks the medium 10, the direction orthogonal to the first side 10a1 is defined as the X-axis direction, and the direction parallel to the direction in which the first side 10a1 extends is defined as the Y-axis direction. The direction in which the first side 10a1 is located in the X-axis direction is defined as the X1 direction, and the opposite is defined as the X2 direction. The vertical direction is defined as the Z-axis direction. The downward direction in the Z-axis direction is defined as the Z1 direction, and the upward direction is defined as the Z2 direction.

[0023] (Suction mechanism) FIG. 2 is a perspective view of the suction mechanism 4 as viewed from above. FIG. 3 is a perspective view of the suction mechanism 4 as viewed from below. FIG. 4 is a perspective view of the suction mechanism 4 as viewed from below with the contact plate 13 removed. FIG. 5 is a view showing a state in which the suction mechanism has adsorbed a medium. FIG. 6 is a diagram illustrating the positional relationship between the second suction unit 6 and the medium 10 as viewed from below. FIG. 7 is an exploded perspective view of the position adjustment mechanism 7 as viewed from above. FIG. 8 is an exploded perspective view of the position adjustment mechanism 7 as viewed from below. FIG. 9 is a perspective view illustrating the first suction unit 5 and the position adjustment mechanism 7. FIG. 10 is a cross-sectional view taken along line AA in FIG. 9. FIG. 11 is a cross-sectional view taken along line BB in FIG. 2. FIG. 12 is an exploded perspective view of the second suction unit 6. FIG. 13 is a cross-sectional view of the contact plate 13 and the first suction unit 5. 9 is a cross-sectional view showing the relationship with the suction unit 5. Note that Fig. 9 shows a state in which the contact plate 13 has been removed.

[0024] 2 to 5, the suction mechanism 4 includes a first suction unit 5 that suctions a central portion of the medium 10, two second suction units 6 that suction both end portions of the first side 10a1 of the medium 10, a position adjustment mechanism 7 that fixes the second suction unit 6 so as to be movable in the X-axis direction and the Y-axis direction, a fixed base member 8, a support mechanism 9 that suspends and supports the first suction unit 5 and the second suction unit 6 relative to the fixed base member 8 so as to be movable in the Z-axis direction, and a contact plate 13 fixed to the underside of the first suction unit 5.

[0025] As shown in FIGS. 4, 5, 9, and 10, the first adsorption unit 5 includes a plurality of first adsorption pads 51 that adsorb the central portion of the medium 10, and a first base member 54 to which the first adsorption pads 51 are fixed. In this embodiment, as shown in FIG. 4, eight first adsorption pads 51 are provided. As shown in FIG. 13, the first adsorption pad 51 includes a flexible pad portion 52 that contacts the medium 10, and a holder 53 that holds the pad portion 52. The pad portion 52 is made of a resin such as rubber or silicon. The pad portion 52 is a bellow-type pad. A resin attachment 510 made of polyetheretherketone is attached to the tip portion 521 of the pad portion 52. The holder 53 is a cylindrical member and includes an air flow path 530 that communicates with the pad portion 52 inside. The holder 53 has a male screw at its upper end portion. The first adsorption pad 51 is fixed to the first base member 54 by screwing the male screw of the holder 53 into the female screw provided on the lower surface of the first base member 54.

[0026] As shown in FIGS. 5, 7, and 9, the first base member 54 includes a first plate 55 to which the first adsorption pads 51 are fixed, and a second plate 56 fixed to the upper surface of the first plate 55. The first plate 55 is a rectangle that is long in the Y-axis direction. A joint 14 for air suction is provided on the side surface of the first plate 55. The joint 14 communicates with an air flow path 540 formed inside the first plate 55. An air suction mechanism (not shown) is connected to the joint 14. When the air suction mechanism is driven, the pad portion 52 adsorbs the medium 10. The second plate 56 is fixed to the upper surface of the first plate 55 by screws.

[0027] As shown in FIGS. 5, 6, 7, 11, and 12, the second adsorption unit 6 includes a second adsorption pad 61 that adsorbs the end portion 10c of the first side 10a1 of the medium 10, a second base member 64 to which the second adsorption pad 61 is fixed, a movable plate 65 that is supported so as to be movable in the Z-axis direction with respect to the second base member 64 and can contact the medium 10, a biasing member 66 disposed between the second base member 64 and the movable plate 65, and a background plate 67.

[0028] As shown in FIG. 11, the two second suction pads 61 are arranged in the Y-axis direction. The second suction pad 61 includes a flexible pad portion 62 that contacts the medium 10 and a holder 63 that holds the pad portion 62. The pad portion 62 is made of a resin such as rubber or silicon. The pad portion 62 is a bellow-type pad. A resin attachment 610 made of polyether ether ketone is attached to the tip portion 621 of the pad portion 62. The holder 63 is a cylindrical member and includes an air flow path 630 that communicates with the pad portion 62 inside. The holder 63 has a male screw at its upper end portion. By screwing the male screw of the holder 63 into the female screw provided on the second base member 64, the second suction pad 61 is fixed to the second base member 64.

[0029] As shown in FIGS. 7, 11, and 12, the second base member 64 is a rectangular parallelepiped that is long in the Y-axis direction. The second base member 64 includes a first portion 641 to which the second suction pad 61 is fixed and a second portion 642 fixed to the lower surface of the first portion 641. As shown in FIGS. 11 and 12, the first portion 641 includes a recess 643 that houses the upper end portion of the biasing member 66. A joint 16 for air suction is provided on the side surface of the first portion 641. The joint 16 communicates with an air flow path 640 formed inside the first portion 641. An air suction mechanism (not shown) is connected to the joint 16. When the air suction mechanism is driven, the pad portion 62 sucks the medium 10.

[0030] The second portion 642 is fixed to the lower surface of the first portion 641 by screws. The second portion 642 includes an opening 644 that penetrates in the Z-axis direction and a recess 645 that is recessed downward. The opening 644 is a rectangle that is long in the Y-axis direction when viewed from the Z-axis direction. The recess 645 is a rectangle that is long in the Y-axis direction when viewed from the Z-axis direction. The outer diameter dimension of the recess 645 is larger than the outer diameter dimension of the opening 644. The recess 645 includes a bottom surface portion 646 formed so as to surround the opening 644.

[0031] As shown in FIGS. 11 and 12, the movable plate 65 is accommodated in the recess 645. The movable plate 65 includes a main body portion 651 that protrudes downward from the opening 644, and a flange portion 652 that protrudes outward from the upper end portion of the main body portion 651. The flange portion 652 is rectangular when viewed in the Z-axis direction. The outer diameter dimension of the recess 645 is larger than the outer diameter dimension of the flange portion 652. The flange portion 652 is movable in the Z-axis direction inside the recess 645. When the flange portion 652 contacts the bottom surface portion 646, the movable plate 65 is prevented from coming out of the opening 644.

[0032] The movable plate 65 includes two through holes 653 through which the second suction pad 61 passes, and a recess 654 that accommodates the lower end portion of the biasing member 66. Before the second suction unit 6 suctions the medium 10, the tip portion 621 of the pad portion 62 of the second suction pad 61 is located below the lower surface 655 of the movable plate 65. The tip portion 621 of the pad portion 62 of the second suction pad 61 is set at the same height position as the tip portion 521 of the pad portion 52 of the first suction pad 51.

[0033] As shown in FIGS. 11 and 12, the biasing member 66 is a coil spring. The biasing member 66 is compressed between the second base member 64 and the movable plate 65 while being accommodated in the recess 643 and the recess 654, and biases the movable plate 65 downward with respect to the second base member 64.

[0034] As shown in FIGS. 7, 8, and 12, the background plate 67 is a plate-like member. As shown in FIGS. 5 and 6, when the second suction unit 6 suctions the medium 10, the background plate 67 overlaps with the end portion 10c of the first side 10a1 of the medium 10 in the Z-axis direction. The background plate 67 is painted with a color such as white or black.

[0035] The position adjustment mechanism 7 movably fixes the second suction units 6 such that the second suction units 6 are positioned at both end portions of the first side 10a1 of the medium 10 according to the size of the medium 10. As shown in FIGS. 4, 7, and 8, the position adjustment mechanism 7 includes a fixed arm 71 connected to the first base member 54 and extending in the X1 direction, a movable arm 72 extending in the Y-axis direction, a first slide mechanism 73 that guides the movable arm 72 slidably in the X-axis direction with respect to the fixed arm 71, a second slide mechanism 74 that guides the second suction unit 6 slidably in the Y-axis direction with respect to the movable arm 72 at both end portions of the movable arm 72, a first fixing mechanism 75 that fixes the fixed arm 71 and the movable arm 72, and a second fixing mechanism 76 that fixes the movable arm 72 and the second suction unit 6.

[0036] The fixed arm 71 includes a base portion 711 fixed to the first plate 55 with screws, and a straight portion 712 extending in the X1 direction from the base portion 711. The movable arm 72 includes a main body portion 7 21 at the central portion, and support arms 722 extending linearly in the Y-axis direction from the main body portion 721. A first groove portion 723 extending in the X-axis direction is formed on the lower surface of the main body portion 721. The first groove portion 723 fits over the straight portion 712 of the fixed arm 71 from above. Thereby, the movable arm 72 is slidable in the X-axis direction with respect to the fixed arm 71. In this embodiment, the first slide mechanism 73 is constituted by the straight portion 712 and the first groove portion 723.

[0037] A second groove portion 724 extending linearly in the Y-axis direction is formed on the lower surface of the support arm 722. The second groove portion 724 fits over the first portion 641 of the second base member 64 from above. Thereby, the second suction unit 6 is slidable in the Y-axis direction with respect to the movable arm 72. In this embodiment, the second slide mechanism 74 is constituted by the first portion 641 and the second groove portion 724.

[0038] As shown in FIGS. 7 and 8, the first fixing mechanism 75 includes a shaft portion 751 fixed to the straight portion 712, a lever 752 provided at the upper end portion of the shaft portion 751, and a washer 753 disposed between the main body portion 721 and the lever 752. The shaft portion 751 penetrates through a long hole 721a formed in the main body portion 721. The lever 752 includes a male screw that is screwed into a female screw formed at the upper end portion of the shaft portion 751. By screwing the lever 752 onto the shaft portion 751, the fixed arm 71 and the movable arm 72 are fixed.

[0039] As shown in FIGS. 7, 8, and 11, the second fixing mechanism 76 includes a shaft portion 761 fixed to the second suction unit 6, a lever 762 provided at the upper end portion of the shaft portion 761, and a washer 763 disposed between the second suction unit 6 and the lever 762. The shaft portion 761 penetrates through a long hole 722a formed in the support arm 722. The lever 762 is rotatably attached to the upper end portion of the shaft portion 761 via a connecting pin 764. The lever 762 includes a cam portion 762a. When the lever 762 is tilted downward, the cam portion 762a strongly presses the washer 763 downward. Thereby, the movable arm 72 and the second suction unit 6 are fixed.

[0040] As shown in FIGS. 2 and 7, the position adjustment mechanism 7 includes a first scale 77 indicating the position of the movable arm 72 with respect to the fixed arm 71, and a second scale 78 indicating the position of the second suction unit 6 with respect to the movable arm 72. The first scale 77 is disposed on the bottom surface of a groove portion 713 formed on the surface of the straight portion 712 in the Z2 direction. By aligning the edge portion 721b of the main body portion 721 in the X1 direction with the scale formed on the first scale 77, the position of the movable arm 72 with respect to the fixed arm 71 is defined.

[0041] The second scale 78 is disposed on the side surface 722b of the support arm 722 facing the X1 direction. By aligning the pointer 765 provided on the second fixing mechanism 76 with the scale formed on the second scale 78, the position of the second suction unit 6 with respect to the movable arm 72 is defined.

[0042] As shown in FIGS. 7 and 9, the fixed base member 8 is a plate-like portion. The fixed base member 8 is connected to the shaft member 31 of the lifting mechanism 3 via a connecting member 32. The fixed base member 8 includes a mounting member 81 for mounting the first spring member 91 and the second spring member 92 of the support mechanism 9. The mounting members 81 are provided at the ends of the fixed base member 8 in the Y-axis direction, respectively. As shown in FIG. 9, the mounting member 81 includes a support column portion 82 extending upward and a mounting plate 83 attached to the upper end portion of the support column portion 82. The support column portion 82 and the mounting plate 83 are fixed by screws.

[0043] As shown in FIG. 2, two support mechanisms 9 are provided. As shown in FIGS. 9 and 10, the support mechanism 9 includes a first spring member 91 that biases the first base member 54 upward with respect to the fixed base member 8, a second spring member 92 that biases the first base member 54 downward with respect to the fixed base member 8, and a suspension member 93 that suspends the first suction unit 5 so as to be movable in the Z-axis direction with respect to the fixed base member 8. The first spring member 91 is a tension coil spring. As shown in FIG. 9, two first spring members 91 are arranged in the X-axis direction. As shown in FIGS. 9 and 10, the upper end portion of the first spring member 91 is fixed to the mounting plate 83. The lower end portion of the first spring member 91 is fixed to the first plate 55. The first spring member 91 always generates a force that draws the fixed base member 8 and the first base member 54 together.

[0044] The second spring member 92 is a compression coil spring. As shown in FIG. 9, two second spring members 92 are arranged in the X-axis direction. As shown in FIGS. 9 and 10, the second spring member 92 is compressed between the mounting plate 83 and the second plate 56 while being guided by a guide pin 920. The second spring member 92 always generates a force that separates the fixed base member 8 and the first base member 54.

[0045] The second spring member 92 is a compression coil spring. As shown in FIG. 9, two second spring members 92 are arranged in the X-axis direction. As shown in FIGS. 9 and 10, the second spring member 92 is compressed between the mounting plate 83 and the second plate 56 while being guided by a guide pin 920. The second spring member 92 always generates a force that separates the fixed base member 8 and the first base member 54.

[0046] As shown in Fig. 9, two lower suspension members 93 are arranged in the X-axis direction. As shown in Figs. 9 and 10, the lower suspension member 93 includes a shaft member 931 that guides the fixed base member 8 and the first suction unit 5 to be relatively movable in the Z-axis direction, a retaining member 932 fixed to the upper end of the shaft member 931, and a screw 933 that fixes the lower end of the shaft member 931 to the second plate 56.

[0047] After inserting the shaft member 931 fixed to the second plate 56 with the screw 933 into the hole 841 of the guide sleeve 84 provided on the fixed base member 8, the retaining member 932 is fixed to the upper end of the shaft member 931. Thereby, the first suction unit 5 moves in the Z-axis direction within a predetermined movement range with respect to the fixed base member 8.

[0048] Here, the support mechanism 9 has a structure that can cancel part of the weights of the first suction unit 5, the second suction unit 6, and the position adjustment mechanism 7, and suspends the first base member 54. Therefore, the urging forces of the first spring member 91 and the second spring member 92 are adjusted so as to cancel part of the weights of the first suction unit 5, the second suction unit 6, and the position adjustment mechanism 7.

[0049] As shown in Fig. 3, the contact plate 13 is a rectangular plate-shaped member that is long in the Y-axis direction. The contact plate 13 is fixed to the lower surface of the first plate 55 of the first base member 54 by screws. The contact plate 13 can contact the medium 10. The contact plate 13 includes a plurality of through holes 131 into which the first suction pads 51 are inserted. As shown in Fig. 13, before the first suction pads 51 adsorb the medium 10, the tip 521 of the pad portion 52 of the first suction pads 51 is located below the lower surface 132 of the contact plate 13.

[0050] (Operation of the conveying device) The operation of the transfer device 1 will be described. FIG. 14 is a diagram for explaining a state in which the second suction unit 6 sucks the medium 10. FIG. 15 is a diagram for explaining a state in which the first suction unit 5 sucks the medium 10. When the lighting inspection of the medium 10 placed on the placement unit 11 is completed, the transfer device 1 transfers the medium 10 from the placement unit 11 to the placement unit 15 in the next process.

[0051] First, in the preparation stage before operating the transfer device 1, according to the size of the medium 10 to be transferred by the transfer device 1, the position of the second suction unit 6 is adjusted so that the second suction unit 6 overlaps with the end portion 10c of the medium 10 in the Z-axis direction.

[0052] Next, when the lighting inspection of the medium 10 placed on the placement unit 11 is completed, the transfer device 1 transfers the medium 10 from the placement unit 11 to the placement unit 15 in the next process. Specifically, the transfer device 1 moves the suction mechanism 4 above the medium 10 by the robot arm 2. Then, the transfer device 1 moves the suction mechanism 4 downward by the lifting mechanism 3 to bring the first suction pad 51 and the second suction pad 61 into contact with the medium 10 on the placement surface 11a. At this time, as shown in FIG. 14, when the pad portion 62 of the second suction pad 61 contacts the medium 10 and deforms upward, the movable plate 65 is displaced upward by the reaction force from the medium 10 after contacting the medium 10. As a result, the medium 10 is sandwiched between the movable plate 65 and the placement surface 11a, improving the flatness of the medium 10. Therefore, the pad portion 62 of the second suction pad 61 can stably suck the medium 10.

[0053] Also, when the lifting mechanism 3 moves the suction mechanism 4 downward to suck the medium 10, as shown in FIG. 15, when the pad portion 52 of the first suction pad 51 contacts the medium 10 and deforms upward, the contact plate 13 contacts the medium 10. As a result, the medium 10 is sandwiched between the contact plate 13 and the placement surface 11a, so that even when the central portion of the medium 10 is located in the opening 110, the flatness of the medium 10 is improved. As a result, the pad portion 52 of the first suction pad 51 can stably suck the medium 10. At this time, if the lifting mechanism 3 moves the suction mechanism 4 downward too much, the contact plate 13 is displaced upward by the reaction force from the medium 10, so that the first base member 54 is displaced upward, and the first suction unit 5 and the second suction unit 6 are displaced upward. As a result, a large force is less likely to be applied to the medium 10, so that damage to the medium 10 is suppressed.

[0054] When the medium 10 is sucked by the first suction pad 51 and the second suction pad 61, the lifting mechanism 3 raises the suction mechanism 4. The robot arm 2 moves the suction mechanism 4 so that one of the two corner portions 10d of the medium 10 is located above the alignment camera 12. The alignment camera 12 photographs the end portion 10c including one corner portion 10d. Thereafter, the robot arm 2 moves the suction mechanism 4 so that the other corner portion 10d of the two corner portions 10d of the medium 10 is located above the alignment camera 12. The alignment camera 12 photographs the end portion 10c including the other corner portion 10d. Here, since the background plate 67 overlaps the end portion 10c of the medium 10 in the Z-axis direction, the alignment camera 12 can photograph the corner portion 10d of the medium 10 well. At this time, the transfer device 1 may move the suction mechanism 4 so that the end portion 10c on which the two-dimensional code is described is located above an ID reader (not shown), and then recognize the two-dimensional code read by the ID reader. Even in this case, since the background plate 67 overlaps the end portion 10c of the medium 10 in the Z-axis direction, the ID reader can read the two-dimensional code described on the end portion 10c of the medium 10 well.

[0055] The conveying device 1 recognizes the position of the medium 10 with respect to the suction mechanism 4 based on the respective images of the corner portions 10d of the photographed medium 10. The conveying device 1 accurately conveys the medium 10 to a predetermined position on the placement surface 15a in the next process by the robot arm 2 based on the position information of the medium 10 with respect to the suction mechanism 4.

[0056] (Function and effect) According to the conveying device 1 of this embodiment, the position adjusting mechanism 7 fixes two second suction units 6 that respectively suck both end portions of the first side 10a1 so as to be movable in the X-axis direction and the Y-axis direction according to the size of the medium 10. As a result, since both end portions of the first side 10a1 are sucked by the second suction unit 6, the first side 10a1 does not bend downward. As a result, when photographing the corner portion 10d of the medium 10 sucked by the suction mechanism 4 with the alignment camera 12, the alignment camera 12 can photograph the corner portion 10d of the medium 10 well. Further, compared with the configuration in which the suction mechanism 4 sucks all four corners of the medium 10, the conveying device 1 of this embodiment sucks only both end portions of the first side 10a1 including the corner portion 10d required for photographing with the alignment camera 12, so that the entire suction mechanism becomes compact. When photographing with the alignment camera 12, only both end portions of the first side 10a1 including the corner portion 10d are sucked by the second suction unit 6, so that the entire suction mechanism becomes compact.

[0057] The second suction unit 6 includes a second suction pad 61 having a flexible pad portion 62 that contacts the medium 10, a second base member 64 to which the second suction pad 61 is fixed, a movable plate 65 that is supported so as to be movable in the Z-axis direction with respect to the second base member 64 and can contact the medium 10, and a biasing member 66 that is disposed between the second base member 64 and the movable plate 65 and biases the movable plate 65 downward with respect to the second base member 64. Before the suction mechanism 4 suctions the medium 10, the tip portion 621 of the pad portion 62 of the second suction pad 61 is located below the lower surface 655 of the movable plate 65. When the lifting mechanism 3 moves the suction mechanism 4 downward to suction the medium 10, when the pad portion 62 of the second suction pad 61 contacts the medium 10 and deforms upward, the movable plate 65 is displaced upward by the reaction force from the medium 10 after contacting the medium 10. Thereby, since the flatness of the medium 10 is improved by being sandwiched between the movable plate 65 and the mounting surface 11a, the pad portion 62 of the second suction pad 61 can stably suction the medium 10. Also, since the movable plate 65 is displaced upward by the reaction force from the medium 10 after contacting the medium 10, a large force is less likely to be applied to the medium 10. Thereby, damage to the medium 10 is suppressed.

[0058] The pad portion 62 of the second suction pad 61 is a bellow-shaped pad. Thereby, when the pad portion 62 of the second suction pad 61 contacts the medium 10, the pad portion 62 of the second suction pad 61 is easily deformed, so the pad portion 62 of the second suction pad 61 can suction the medium 10 well.

[0059] A resin attachment 610 made of polyetheretherketone is attached to the tip portion 621 of the pad portion 62 of the second suction pad 61. Thereby, after the second suction unit 6 stops suctioning the medium 10, the pad portion 62 of the second suction pad 61 is easily separated from the medium 10.

[0060] When the second suction unit 6 sucks the medium 10, it includes a background plate 67 that overlaps with the end portion 10c of the first side 10a1 of the medium 10 in the Z-axis direction. Thereby, when the corner portion 10d of the medium 10 is photographed by the alignment camera 12, the background of the medium 10 becomes clear, so that the alignment camera 12 can photograph the corner portion 10d of the medium 10 well.

[0061] The position adjustment mechanism 7 includes a fixed arm 71 connected to the first base member 54 and extending in the X1 direction, a movable arm 72 extending in the Y-axis direction, a first slide mechanism 73 that guides the movable arm 72 to be slidable in the X-axis direction with respect to the fixed arm 71, and a second slide mechanism 74 that guides the second suction unit 6 to be slidable in the Y-axis direction with respect to the movable arm 72 at both ends of the movable arm 72, a first fixing mechanism 75 that fixes the fixed arm 71 and the movable arm 72, and a second fixing mechanism 76 that fixes the movable arm 72 and the second suction unit 6. Thereby, the position adjustment mechanism 7 can fix two second suction units 6 that respectively suck both end portions of the first side 10a1 to be movable in the X-axis direction and the Y-axis direction according to the size of the medium 10.

[0062] The position adjustment mechanism 7 includes a first scale 77 that indicates the position of the movable arm 72 with respect to the fixed arm 71 and a second scale 78 that indicates the position of the second suction unit 6 with respect to the movable arm 72. Thereby, the position adjustment mechanism 7 can accurately adjust and fix the position of the second suction unit 6.

[0063] The suction mechanism 4 includes a fixed base member 8 and a support mechanism 9 that suspends and supports the first suction unit 5 and the second suction unit 6 so as to be movable in the Z-axis direction with respect to the fixed base member 8. The support mechanism 9 includes a first spring member 91 that biases the first base member 54 upward with respect to the fixed base member 8, and a second spring member 92 that is a spring member that biases the first base member 54 downward with respect to the fixed base member 8. When the lifting mechanism 3 moves the suction mechanism 4 downward to suction the medium 10, when the pad portion 52 of the first suction pad 51 contacts the medium 10 and deforms upward, the contact plate 13 is displaced upward by the reaction force from the medium 10 after contacting the medium 10, so that the first base member 54 is displaced upward. As a result, since the first base member 54 is displaced upward via the contact plate 13, a large force is less likely to be applied to the medium 10. As a result, damage to the medium 10 is suppressed. Further, since the first spring member 91 and the second spring member 92 apply biasing forces different in the vertical direction to the first base member 54, when the lifting mechanism 3 moves the suction mechanism 4 in the vertical direction, the first suction unit 5 and the second suction unit 6 are less likely to vibrate in the vertical direction with respect to the fixed base member 8. As a result, even when the lifting mechanism 3 moves the suction mechanism 4 in the vertical direction, the suction mechanism 4 can continue to stably suction the medium 10.

[0064] The suction mechanism 4 includes a contact plate 13 that is fixed to the first base member 54 and can contact the medium 10. Before the suction mechanism 4 suctions the medium 10, the tip portion 521 of the pad portion 52 of the first suction pad 51 is located below the lower surface 132 of the contact plate 13. When the lifting mechanism 3 moves the suction mechanism 4 downward to suction the medium 10, when the pad portion 52 of the first suction pad 51 contacts the medium 10 and deforms upward, the contact plate 13 contacts the medium 10. As a result, since the medium 10 is sandwiched between the contact plate 13 and the placement surface 11a, the flatness of the medium 10 is improved. As a result, the pad portion 52 of the first suction pad 51 can stably suction the medium 10.

[0065] (Other embodiments) In the transfer device 1 of the above-described embodiment, the contact plate 13 was fixed to the first base member 54, but the present invention is not limited thereto. In the transfer device 1 of other embodiments, the suction mechanism 4 in a state where the contact plate 13 is removed can be used according to the situation. In this case, when the lifting mechanism 3 moves the suction mechanism 4 downward in order to suck the medium 10, if the first suction pad 51 receives a reaction force from the medium 10 after contacting the medium 10, the first base member 54 is displaced upward. As a result, since the first suction pad 51 is displaced upward, a large force is less likely to be applied to the medium 10.

[0066] In the transfer device 1 of the above-described embodiment, resin attachments 510 and 610 were attached to the tip portions of the pad portions 52 of the first suction pad 51 and the pad portions 62 of the second suction pad 61, respectively. However, in the transfer device 1 of other actual embodiments, the resin attachments 510 and 610 may not be attached.

[0067] In the transfer device 1 of the above-described embodiment, the pad portions 52 of the first suction pad 51 and the pad portions 62 of the second suction pad 61 were bellows-type pads, but the present invention is not limited thereto. For example, they may be flat pads or other shapes.

[0068] Note that the present technology can be configured as follows.

[0069] (1) In a transfer device that sucks and transfers a rectangular medium placed on a placement surface, comprising a suction mechanism for sucking the medium and a lifting mechanism for lifting and lowering the suction mechanism, when three mutually orthogonal axial directions are defined as the X-axis direction, the Y-axis direction, and the Z-axis direction, and the vertical direction is defined as the Z-axis direction, the suction mechanism is a first suction pad including a flexible pad portion that contacts the medium, the first suction pad sucking the central portion of the medium a plurality of first suction pads, and a first suction unit including a first base member to which the first suction pads are fixed. Two second adsorption units that respectively adsorb both end portions of the first side, which is one side of the medium, A position adjustment mechanism that fixes the second adsorption unit to be movable in the X-axis direction and the Y-axis direction with respect to the first base member, A conveying device, characterized by comprising the above.

[0070] (2) The second adsorption unit includes a second adsorption pad having a flexible pad portion that contacts the medium, a second base member to which the second adsorption pad is fixed, a movable plate that is supported so as to be movable in the Z-axis direction with respect to the second base member and can contact the medium, and a biasing member that is disposed between the second base member and the movable plate and biases the movable plate downward with respect to the second base member. Before the adsorption mechanism adsorbs the medium, the tip of the pad portion of the second adsorption pad is located below the lower surface of the movable plate. When the lifting mechanism moves the adsorption mechanism downward to adsorb the medium, when the pad portion of the second adsorption pad contacts the medium and deforms upward, the movable plate is displaced upward by the reaction force from the medium after contacting the medium. The conveying device according to (1), characterized by this.

[0071] (3) The pad portion of the second adsorption pad is a bellows-type pad. The conveying device according to (2), characterized by this.

[0072] (4) A resin attachment made of polyether ether ketone is attached to the tip of the pad portion of the second adsorption pad. The conveying device according to (3), characterized by this.

[0073] (5) When the second adsorption unit adsorbs the medium, it includes a background plate that overlaps the end portion of the first side of the medium in the Z-axis direction. The conveying device according to any one of (1) to (4), characterized by this.

[0074] (6) When the adsorption mechanism adsorbs the medium, taking the direction perpendicular to the first side as the X-axis direction, the direction parallel to the direction in which the first side extends as the Y-axis direction, and the direction in which the first side is located in the X-axis direction as the X1 direction, the position adjustment mechanism includes a fixed arm connected to the first base member and extending in the X1 direction, a movable arm extending in the Y-axis direction, a first slide mechanism for guiding the movable arm to be slidable in the X-axis direction with respect to the fixed arm, a second slide mechanism for guiding the second adsorption unit to be slidable in the Y-axis direction with respect to the movable arm at both ends of the movable arm, a first fixing mechanism for fixing the fixed arm and the movable arm, and a second fixing mechanism for fixing the movable arm and the second adsorption unit, and is characterized in that it is the conveying device according to any one of (1) to (5).

[0075] (7) The position adjustment mechanism includes a first scale indicating the position of the movable arm with respect to the fixed arm and a second scale indicating the position of the second adsorption unit with respect to the movable arm, and is the conveying device according to (6).

[0076] (8) The adsorption mechanism includes a fixed base member and a support mechanism for suspending and supporting the first adsorption unit and the second adsorption unit so as to be movable in the Z-axis direction with respect to the fixed base member, the support mechanism includes a first spring member for biasing the first base member upward with respect to the fixed base member and a second spring member for biasing the first base member downward with respect to the fixed base member, When the lifting mechanism moves the adsorption mechanism downward to adsorb the medium, and when the first adsorption pad receives a reaction force from the medium after contacting the medium, the first base member is displaced upward, and is the conveying device according to any one of (1) to (7).

[0077] (9) The suction mechanism includes a contact plate that is fixed to the first base member and can contact the medium. Before the suction mechanism suctions the medium, the tip of the pad portion of the first suction pad is positioned below the lower surface of the contact plate. When the lifting mechanism moves the suction mechanism downward to suction the medium, when the pad portion of the first suction pad contacts the medium and deforms upward, the contact plate contacts the medium. The conveying device according to (8), characterized in that.

Explanation of reference numerals

[0078] 1... Conveyor device, 2... Robot arm, 3... Lifting mechanism, 4... Suction mechanism, 5... First suction unit, 6... Second suction unit, 7... Position adjustment mechanism, 8... Fixed base member, 9... Support mechanism, 10... Medium, 10a... Long side, 10b... Short side, 10c... End portion, 10d... Corner portion, 10a1... First side, 11... Placement portion, 11a... Placement surface, 12... Alignment camera, 13... Contact plate, 14... Joint 16... Placement portion, 15a... Placement surface, 16... Joint, 31... Shaft member, 32... Connecting member, 51... First suction pad, 52... Pad portion, 53... Holder, 54... First base member, 55... First plate, 56... Second plate, 61... Second suction pad, 62... Pad portion, 63... Holder, 64... Second base member, 65... Movable plate, 66... Biasing member, 67... Background plate, 71... Fixed arm, 72... Movable arm, 73... First slide mechanism, 74... Second slide mechanism, 75... First fixing mechanism, 76... Second fixing mechanism, 77... First scale, 78... Second scale, 81... Mounting member, 82... Support column portion, 83... Mounting plate, 84... Guide sleeve, 91... First spring member, 92... Second spring member, 93... Suspension member, 110... Opening, 131... Through hole, 132... Lower surface, 510... Resin attachment, 521... Tip portion, 530... Air flow path, 540... Air flow path, 610... Resin attachment, 621... Tip portion, 630... Air flow path, 640... Air flow path, 641... First portion, 642... Second portion, 643... Recess, 644... Opening, 645... Recess, 646... Bottom surface portion, 651... Body portion, 652... Flange portion, 653... Through hole, 654... Recess, 655... Lower surface, 711... Base portion, 712... Straight portion, 713... Groove portion, 721... Body portion, 721a... Long hole, 721b... Edge portion, 722... Support arm, 722a... Long hole, 722b... Side surface, 723... First groove portion, 724... Second groove portion, 751... Shaft portion, 752... Lever, 753... Washer, 761... Shaft portion, 762... Lever, 762a... Cam portion, 763... Washer, 764... Connecting pin, 765... Pointer, 841... Hole portion, 920... Guide pin, 931... Shaft member, 932... Anti-drop member, 933... Screw.

Claims

1. In a conveying device that adsorbs and conveys a rectangular medium placed on a placement surface, comprising an adsorption mechanism for adsorbing the medium and a lifting mechanism for lifting and lowering the adsorption mechanism, when the three axial directions orthogonal to each other are the X-axis direction, the Y-axis direction, and the Z-axis direction, and the vertical direction is the Z-axis direction, the adsorption mechanism is a first adsorption pad having a flexible pad portion that contacts the medium, the first adsorption pad adsorbing the central portion of the medium, and a plurality of first adsorption pads, and a first base member to which the first adsorption pad is fixed, two second adsorption units that respectively adsorb both end portions of a first side that is one side of the medium, and a position adjustment mechanism that fixes the second adsorption unit to be movable in the X-axis direction and the Y-axis direction with respect to the first base member, and a conveying device characterized by comprising the above.

2. The second adsorption unit includes a second adsorption pad having a flexible pad portion that contacts the medium, a second base member to which the second adsorption pad is fixed, a movable plate that is supported so as to be movable in the Z-axis direction with respect to the second base member and can contact the medium, and a biasing member that is disposed between the second base member and the movable plate and biases the movable plate downward with respect to the second base member, before the adsorption mechanism adsorbs the medium, the tip of the pad portion of the second adsorption pad is located below the lower surface of the movable plate, when the lifting mechanism moves the adsorption mechanism downward to adsorb the medium, when the pad portion of the second adsorption pad contacts the medium and deforms upward, the movable plate is displaced upward by the reaction force from the medium after contacting the medium. The conveying device according to claim 1, characterized in that.

3. The conveying device according to claim 2, characterized in that the pad portion of the second adsorption pad is a bellows-type pad.

4. The conveying device according to claim 3, characterized in that a resin attachment made of polyether ether ketone is attached to the tip of the pad portion of the second adsorption pad.

5. The conveying device according to any one of claims 1 to 4, characterized in that the second adsorption unit includes a background plate that overlaps the end portion of the first side of the medium in the Z-axis direction when the medium is adsorbed.

6. When the suction mechanism sucks the medium, with the direction perpendicular to the first side as the X-axis direction, the direction parallel to the direction in which the first side extends as the Y-axis direction, and the direction in which the first side is located in the X-axis direction as the X1 direction, The position adjustment mechanism includes a fixed arm connected to the first base member and extending in the X1 direction, a movable arm extending in the Y-axis direction, a first slide mechanism that guides the movable arm to be slidable in the X-axis direction with respect to the fixed arm, a second slide mechanism that guides the second suction unit to be slidable in the Y-axis direction with respect to the movable arm at both ends of the movable arm, a first fixing mechanism that fixes the fixed arm and the movable arm, and a second fixing mechanism that fixes the movable arm and the second suction unit. The transport device according to claim 1, characterized in that it comprises.

7. The position adjustment mechanism includes a first scale indicating the position of the movable arm with respect to the fixed arm and a second scale indicating the position of the second suction unit with respect to the movable arm. The transport device according to claim 6, characterized in that it comprises.

8. The suction mechanism includes a fixed base member and a support mechanism that suspends and supports the first suction unit and the second suction unit so as to be movable in the Z-axis direction with respect to the fixed base member. The support mechanism includes a first spring member that biases the first base member upward with respect to the fixed base member and a second spring member that biases the first base member downward with respect to the fixed base member. When the lifting mechanism moves the suction mechanism downward to suck the medium, and when the first suction pad receives a reaction force from the medium after contacting the medium, the first base member is displaced upward. The transport device according to claim 1, characterized in that.

9. The suction mechanism includes a contact plate fixed to the first base member and capable of contacting the medium. Before the suction mechanism sucks the medium, the tip of the pad portion of the first suction pad is located below the lower surface of the contact plate. When the lifting mechanism moves the suction mechanism downward to suck the medium, and when the pad portion of the first suction pad contacts the medium and deforms upward, the contact plate contacts the medium. The transport device according to claim 8, characterized in that.

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