Substrate processing apparatus

Abstract

To provide a substrate processing apparatus capable of confirming whether a replacement member is the replacement member that should be installed on an installation base immediately before the replacement member is installed on the installation base.SOLUTION: A printer as a substrate processing apparatus which includes a lower receiving body 26 being a replacement member, and an installation base 25 on which the lower receiving body 26 is detachably installed. The printer includes a bottom-side identifier 26Q that is provided on the bottom of the lower receiving body 26 and records individual identification information of the lower receiving body 26, and a printing unit camera 16 that images the bottom-side identifier 26Q from below the lower receiving body 26 positioned above the installation base 25 for installation on the installation base 25. The printer also includes a determination unit. The determination unit performs individual identification of the lower receiving body 26 from the bottom-side identifier 26Q imaged by the printing unit camera 16, and determines appropriateness of installation of the lower receiving body 26 on the installation base 25.SELECTED DRAWING: Figure 23

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus for performing a predetermined process on a substrate.

Background Art

[0002] Conventionally, as a substrate processing apparatus for performing a predetermined process on a substrate, for example, a printing apparatus that prints a paste such as solder on a substrate through a mask is known (see Patent Document 1 below). In the printing apparatus described in Patent Document 1, a substrate is supported from below by a substrate support portion (lower receiver), and the substrate support portion is detachably attached to a support table (installation table) that supports it. When attaching and detaching (exchanging) the substrate support portion with respect to the support table, the substrate support portion is attached to a jig having a frame body substantially the same shape as the mask and positioned above the support table, and the support table is raised so as to approach the jig to receive the substrate support portion from the jig.

[0003] In the printing apparatus of Patent Document 1, a plurality of types of lower receivers corresponding to the types of substrates are prepared and stored in a storage unit. When the type of substrate to be produced is changed, after the previously installed lower receiver is removed from the installation table, the lower receiver corresponding to the substrate after the model change is taken out from the storage unit together with the jig.

[0004] In the printing apparatus of Patent Document 1, a barcode is attached to the lower receiver as an individual identifier, and it is possible to confirm whether the correct lower receiver is stored in the storage unit.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, in a conventional substrate processing apparatus, it has not been checked whether the receiving member to be installed on the installation table (that is, the receiving member immediately before being installed on the installation table) is appropriate. For this reason, there is a case where a receiving member that should not be installed on the installation table is erroneously installed on the installation table, and improvement has been required.

[0007] Therefore, an object of the present invention is to provide a substrate processing apparatus capable of checking whether an exchange member is an exchange member to be installed on an installation table immediately before the exchange member is installed on the installation table.

Means for Solving the Problems

[0008] The substrate processing apparatus of the present invention includes an exchange member and an installation table on which the exchange member is detachably installed, and is a substrate processing apparatus that performs a predetermined process on a substrate by installing the exchange member on the installation table, and is provided on the lower surface of the exchange member, and a lower surface side identifier in which the individual identification information of the exchange member is recorded, imaging means for imaging the lower surface side identifier from below the exchange member positioned above the installation table for installation on the installation table, and individual identification of the exchange member from the lower surface side identifier imaged by the imaging means, and determination means for determining whether it is appropriate to install the exchange member on the installation table.

Effects of the Invention

[0009] According to the present invention, it is possible to check whether an exchange member is an exchange member to be installed on an installation table immediately before the exchange member is installed on the installation table.

Brief Description of the Drawings

[0010]

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Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a printing apparatus 1 as a substrate processing apparatus according to an embodiment of the present invention. The printing apparatus 1 includes a printing unit 2 and a storage unit 3 provided adjacent to the printing unit 2, and performs a printing operation as a predetermined process of loading a substrate KB, printing a paste Pst such as solder on an electrode pattern (not shown) provided on the upper surface of the substrate KB, and unloading it to the outside. In the present embodiment, for convenience of explanation, the direction in which the substrate KB is conveyed (loaded and unloaded) (the left-right direction as viewed from the operator OP) is defined as the X direction. Also, the direction orthogonal to the X direction in the horizontal plane (the front-back direction as viewed from the operator OP) is defined as the Y direction, and the vertical direction is defined as the Z direction. Further, among the Y direction, the side facing from the printing unit 2 to the storage unit 3 is referred to as the rear side (inner side), and the side facing from the storage unit 3 to the printing unit 2 is referred to as the front side (front side).

[0012] In FIGS. 1 and 2, the printing unit 2 includes a substrate holding unit 12 on a base 11. A substrate holding unit moving mechanism 13 is interposed between the substrate holding unit 12 and the base 11. Above the substrate holding unit 12, a pair of guide rails 14 as a mask support part extend horizontally, and a mask 15 is supported in a horizontal posture on the pair of guide rails 14. A printing unit camera 16 as imaging means is movably provided in the XY plane direction between the substrate holding unit 12 and the mask 15. Above the mask 15, a printing head 17 is provided.

[0013] In FIG. 2, the substrate holding unit 12 includes a lifting base 21, a pair of conveyors 22, a lifter 23, an installation base 24, an installation table 25, a lower receiver 26, and a pair of clamps 27. The substrate holding unit moving mechanism 13 is composed of, for example, an XYZ table mechanism. The substrate holding unit moving mechanism 13 moves the entire substrate holding unit 12 in the XY plane and in the Z direction, and rotates the entire substrate holding unit 12 around an axis (Z axis) extending in the Z direction.

[0014] In FIG. 2, the elevating base 21 is composed of a plate-shaped member and is supported in a horizontal posture by the substrate holding part moving mechanism 13. The pair of conveyors 22 is composed of a fixed-side conveyor 22 fixed to the elevating base 21 and a movable-side conveyor 22 arranged behind (the back side) the fixed-side conveyor 22, and conveys the substrate KB by running synchronously in the X direction.

[0015] The movable-side conveyor 22 is movable with respect to the fixed-side conveyor 22 (and thus with respect to the installation table base 24). By moving the movable-side conveyor 22 closer to or away from the fixed-side conveyor 22, the interval between the pair of conveyors 22 can be adjusted according to the size in the width direction (Y direction) of the substrate KB.

[0016] In FIG. 2, the lifter 23 is provided on the elevating base 21. The installation table base 24 is composed of a flat plate-shaped member that extends along the XY plane as a whole. The lifter 23 moves the installation table base 24 in the Z direction with respect to the elevating base 21.

[0017] In FIGS. 2 and 3, the installation table 25 is provided on the installation table base 24. The installation table 25 (the fixed-side installation table 25a and the movable-side installation table 25b) is located below between the pair of conveyors 22.

[0018] In FIGS. 2 and 3, the installation table 25 is composed of a fixed-side installation table 25a arranged on the front side and a movable-side installation table 25b arranged on the back side. The fixed-side installation table 25a and the movable-side installation table 25b are each composed of a block-shaped member, and their upper surfaces are at the same height. On the upper surface of the fixed-side installation table 25a, a vacuum suction port 25K and a vacuum suction path opening 25H are formed side by side in the Y direction.

[0019] The fixed-side installation table 25a is fixed on the installation table base 24. The movable-side installation table 25b is movable in the Y direction on the installation table base 24. The movable-side installation table 25b is integrally movable in the Y direction with the movable-side conveyor 22. Therefore, when the movable-side conveyor 22 moves in the Y direction, the movable-side installation table 25b also moves in the Y direction accordingly.

[0020] The lower receiver 26 is detachably installed on the installation base 25. The lower receiver 26 is generally composed of a flat plate-like member, and its upper surface is formed flat. When the lower receiver 26 is installed on the installation base 25, it supports (receives from below) the substrate KB from below (Fig. 4(a) → Fig. 4(b)).

[0021] The installation base 25 adsorbs the lower surface of the lower receiver 26 at the vacuum suction port 25K provided on the upper surface. For this reason, in the lower receiver 26, the front-side region of its lower surface is adsorbed and held through the vacuum suction port 25K of the fixed-side installation base 25a, and the rear-side region of the lower surface of the lower receiver 26 is supported in a placed state by the movable-side installation base 25b.

[0022] An opening 26H of a vacuum suction path formed inside is formed on the lower surface of the lower receiver 26 (Figs. 5(a) and 5(b)). A vacuum chuck hole 26C connected to the vacuum suction path is formed on the upper surface of the lower receiver 26 (Figs. 3 and 5(a)). When the lower receiver 26 is installed on the installation base 25, the vacuum suction path opening 25H of the installation base 25 is connected to the opening 26H of the lower receiver 26. For this reason, the lower receiver 26 can adsorb and hold the substrate KB received on its upper surface by the vacuum suction force generated through the vacuum chuck hole 26C.

[0023] As shown in Fig. 5(a), a recess 26Z (a through hole when the component BH is tall) for avoiding interference with the component BH mounted on the lower surface of the received substrate KB is provided on the upper surface of the lower receiver 26. Since the arrangement of the components BH mounted on the substrate KB varies depending on each substrate KB, the arrangement of the recesses 26Z provided on the upper surface of the lower receiver 26 also varies according to the type of the substrate KB.

[0024] The plurality of vacuum chuck holes 26C each open at a position avoiding the plurality of recesses 26Z provided on the upper surface of the lower receiver 26. Therefore, the arrangement of the vacuum chuck holes 26C and the recesses 26Z in the region of the upper surface of the lower receiver 26 that receives the substrate KB (the region inside the substrate KB in the state where the substrate KB is received) will be different for each substrate KB. For this reason, in the present embodiment, different types of lower receivers 26 are prepared according to the type of the substrate KB, and they are interchangeable with respect to the installation table 25. That is, in the present embodiment, the lower receiver 26 is an exchange member in the printing apparatus 1.

[0025] The lower receiver 26 is selected to be large in size corresponding to the size in the width direction (here, the size in the Y direction) of the substrate KB to be produced, and is installed on the installation table 25. The interval between the fixed-side installation table 25a and the movable-side installation table 25b is adjusted according to the size of the substrate KB. In the present embodiment, as described above, the movable-side installation table 25b moves in the Y direction integrally with the movable-side conveyor 22. For this reason, when the interval between the fixed-side conveyor 22 and the movable-side conveyor 22 is adjusted, the interval between the fixed-side installation table 25a and the movable-side installation table 25b is also automatically adjusted.

[0026] In FIG. 3, a plurality of protruding members 26T protruding outward in the X direction are attached to each of the two sides (opposite to the X direction) extending along the Y direction on the upper surface of the lower receiver 26. In the present embodiment, two protruding members 26T are attached to each of the two outer edges extending in the Y direction on the upper surface of the lower receiver 26, but the number is merely an example.

[0027] In FIGS. 5(a) and 5(b), an upper surface side identifier 26P and a lower surface side identifier 26Q as lower receiver identifiers (exchange member identifiers) in which the individual identification information of the lower receiver 26 is recorded are attached to the upper surface and the lower surface of the lower receiver 26, respectively. Specifically, the upper surface side identifier 26P is provided on the upper surface of the substrate KB (FIGS. 3, 4(a), 4(b), and 5(a), 5(b)), and the lower surface side identifier 26Q is provided on the lower surface of the substrate KB (FIGS. 5(a), 5(b)).

[0028] The upper surface identifier 26P needs to be provided on the flat surface of the upper surface of the lower receiver 26. However, as described above, in the area on the upper surface of the lower receiver 26 where the substrate KB is received (the area inside the substrate KB when the substrate KB is received), a large number of depressions (vacuum chuck holes 26C and recesses 26Z) with different arrangements are formed for each type of substrate KB. Therefore, if an attempt is made to provide the upper surface identifier 26P while avoiding the depressions in such an area, when reading the individual identification information from the upper surface identifier 26P, it becomes necessary to change the reading position (imaging position) for each type of substrate KB. For this reason, in the present embodiment, as shown in FIGS. 4(a) and 4(b), the upper surface identifier 26P is provided in an area that is not hidden by the substrate KB when the lower receiver 26 holds the substrate KB on its upper surface, that is, on the upper surface of the lower receiver 26 and in the area that becomes the outside of the substrate KB when the lower receiver 26 receives the substrate KB.

[0029] Similarly, the lower surface identifier 26Q also needs to be provided on the flat surface of the lower surface of the lower receiver 26. For this reason, the lower surface identifier 26Q is provided in an area that always forms a flat area on the lower surface of the lower receiver 26 and faces the vacuum suction port 25K of the fixed-side installation base 25a (the area KR surrounded by the dashed line in FIGS. 5(a) and 5(b)). The upper surface identifier 26P and the lower surface identifier 26Q only need to have the same content (individual identification information), and do not necessarily have to be the same.

[0030] In FIG. 2, the pair of clamps 27 are arranged facing each other in the Y direction above the pair of conveyors 22. The pair of clamps 27 clamp both side surfaces of the substrate KB corresponding to the Y direction supported (received) by the lower receiver 26 from the Y direction to hold the substrate KB.

[0031] In this way, the substrate holding unit 12 is configured to support (receive) the substrate KB carried in by the pair of conveyors 22 by the lower receiver 26 and clamp and hold it by the pair of clamps 27.

[0032] The substrate holding part 12 further includes, as shown in FIGS. 3 and 6(a) and (b), a plurality (four) of lifting cylinders 31 and a pair of support release mechanisms 32 on the installation table base 24.

[0033] In FIGS. 3 and 6(a) and (b), two of the four lifting cylinders 31 are arranged at both ends in the X direction of the fixed-side installation table 25a (positions sandwiching the fixed-side installation table 25a in the X direction), and the other two are arranged at both ends in the X direction of the movable-side installation table 25b (positions sandwiching the movable-side installation table 25b in the X direction). These four lifting cylinders 31 are provided separately from the fixed-side installation table 25a and the movable-side installation table 25b. Each of the four lifting cylinders 31 can move the piston rod 31R in the vertical direction. The two lifting cylinders 31 arranged at positions sandwiching the movable-side installation table 25b in the X direction move in the Y direction integrally with the movable-side installation table 25b.

[0034] The four lifting cylinders 31 operate synchronously and move the piston rods 31R of the four lifting cylinders 31 in the same amount in the same direction in the vertical direction. Therefore, the upper ends of the four piston rods 31R of the four lifting cylinders 31 are always located at the same height.

[0035] In FIGS. 3 and 6(a) and (b), the pair of support release mechanisms 32 are arranged at both ends in the X direction of the fixed-side installation table 25a (positions sandwiching the fixed-side installation table 25a in the X direction). Each support release mechanism 32 includes an operation cylinder 33, a rack 34, a pinion 35, and an operation rod 36.

[0036] The two operation cylinders 33 are respectively arranged with their piston rods (operation cylinder rods 33R) facing outward in the X direction. A rack guide 34G extending in the X direction is provided below the operation cylinder rod 33R. The rack 34 is provided movably in the X direction on the rack guide 34G and is connected to the end of the operation cylinder rod 33R.

[0037] The two operating cylinders 33 operate synchronously, moving the operating cylinder rods 33R by the same amount in opposite directions to each other. Therefore, when the two operating cylinders 33 operate, the two racks 34 arranged at positions sandwiching the fixed-side mounting base 25a in the X direction approach and separate from the fixed-side mounting base 25a simultaneously.

[0038] In FIGS. 3 and 6(a) and (b), the two pinions 35 are arranged at positions sandwiching the fixed-side mounting base 25a in the X direction, and are respectively located above the racks 34. The two pinions 35 are each rotatably supported by a rotation support shaft 35J (FIG. 3) extending along the Y direction. Both ends of each of the two rotation support shafts 35J are fixed relative to the mounting base 24.

[0039] In FIGS. 3 and 6(a) and (b), the teeth formed on the outer periphery of each pinion 35 mesh with the teeth formed on the upper surface of the rack 34 located below that pinion 35. Therefore, when the two operating cylinders 33 operate and the two racks 34 move in the X direction (approach and separate), the two pinions 35 rotate in opposite directions around their respective rotation support shafts 35J.

[0040] The base end (lower end) portions of the two operating rods 36 are each connected to a pinion. Therefore, when the two operating cylinders 33 operate as described above and the two pinions 35 rotate in opposite directions, accordingly, the two operating rods 36 swing between a position where they are laid down in the facing direction (the operating rod 36 shown by the dashed-dotted line in FIG. 6(a)) and a position where they stand up in a substantially vertical posture (the operating rod 36 shown by the solid line in FIG. 6(a)). Hereinafter, the position where the two operating rods 36 are laid down in the facing direction is referred to as the "laid-down position", and the position where the two operating rods 36 both stand up in a vertical posture is referred to as the "upright position".

[0041] In FIG. 7, a pair of guide rails 14 each extend in the Y direction and are arranged to face each other in the X direction. The mask 15 is composed of a rectangular plate-like member. The four sides of the mask 15 are supported by a rectangular mask frame 15W. A pattern opening 15K corresponding to the electrode pattern of the substrate KB is formed in the central portion of the mask 15.

[0042] In FIG. 7, the two guide rails 14 are each formed in an L-angle shape. The two guide rails 14 support, from below, two side portions that extend in the Y direction and face each other in the X direction among the four side portions of the mask frame 15W. The mask 15 can be moved in the Y direction on the guide rails 14. During the printing operation, the mask 15 is positioned (installed) at a mask installation position MI set on the guide rails 14 (FIG. 7). The mask installation position MI corresponds to a position above the substrate holding portion 12.

[0043] In FIG. 2, the printing unit camera 16 includes a downward imaging unit 16a that images downward and an upward imaging unit 16b that images upward. The printing unit camera 16 is moved in the horizontal plane direction by a printing unit camera movement mechanism (not shown), the substrate KB held by the substrate holding portion 12 (specifically, a mark provided on the substrate KB) is imaged by the downward imaging unit 16a, and the mask 15 positioned at the mask installation position MI (specifically, a mark provided on the mask) is imaged by the upward imaging unit 16b.

[0044] In FIG. 2, the printing head 17 includes two squeegees 17S arranged to face each other in the Y direction. Each squeegee 17S is composed of a "spatula"-shaped member that extends in the X direction. The printing head 17 is moved in the Y direction by a printing head movement mechanism 17K (FIGS. 1 and 2) composed of a ball screw mechanism or the like. The two squeegees 17S are individually raised and lowered by two squeegee lifting portions 17M provided on the printing head 17.

[0045] In FIG. 1, the storage unit 3 includes a magazine 41 and a magazine elevator 42. The magazine 41 is formed of a box-shaped member and has openings on both the front side and the back side. In the magazine 41, slots 41S are provided as a plurality of storage areas arranged in the Z direction.

[0046] In the slots 41S in the lower half region of the magazine 41, a plurality of types of masks 15 corresponding to the types of substrates KB to be produced are stored. In the slots 41S in the upper half region of the magazine 41, a plurality of types of lower receivers 26 are stored in a state of being attached to a jig 50 (FIGS. 8(a) and (b)) having substantially the same outer shape as the outer shape of the mask 15.

[0047] Here, the jig 50 will be described. As shown in FIGS. 8(a) and (b), the jig 50 includes a frame body 51, auxiliary bars 52, two moving guides 53, and two support members 54. The frame body 51 has a rectangular shape and is substantially the same shape as the mask frame 15W.

[0048] Similar to the case of the mask 15, two sides of the frame body 51 extending along the Y direction (that is, facing the X direction) are supported by the guide rails 14. Therefore, the jig 50 can slide in the Y direction on the pair of guide rails 14 in the same manner as the mask 15. The auxiliary bar 52 extends in the X direction in the internal space of the frame body 51, and both ends thereof are fixed to two sides of the frame body 51 facing each other in the Y direction.

[0049] In FIGS. 8(a) and (b), the two moving guides 53 each extend in the Y direction. One end (rear end) of each moving guide 53 is supported by the frame body 51, and the other end (front end) is supported by the auxiliary bar 52. The two moving guides 53 can each move in the X direction while maintaining the posture of extending in the Y direction.

[0050] In FIGS. 8(a) and 8(b), the two support members 54 each extend in the Y direction. The two support members 54 are respectively provided on the opposing surfaces of the two movement guides 53. On each of the opposing surfaces of the two support members 54 facing each other, protruding piece portions 54T protruding in the direction facing each other are formed.

[0051] In FIGS. 8(a) and 8(b), the two movement guides 53 are each biased inward of the frame body 51 by a plurality of biasing springs 55 provided between the frame body 51. For this reason, the two support members 54 can move between a close position where they are close to each other (FIG. 9(a)) and a separated position where they move away from each other from the close position. FIGS. 9(a) and 9(b) are both cross-sectional views taken along the arrow V-V in FIG. 8(a).

[0052] Thus, in this embodiment, the jig 50 has a configuration including the frame body 51 and a pair of support members 54 provided on the frame body 51 and capable of approaching and separating from each other.

[0053] In a state where the two support members 54 are located at the close position (FIG. 9(a)), the interval between the two protruding piece portions 54T is larger than the dimension of the lower receiver 26 in the X direction and smaller than the interval between the outer ends of the two protruding members 26T facing each other in the X direction. For this reason, in a state where the two support members 54 are located at the close position, by placing the plurality of protruding members 26T provided on the lower receiver 26 on the protruding piece portions 54T of the two support members 54 from above (FIG. 8(a) → FIG. 8(b)), the lower receiver 26 can be attached to the jig 50. In a state where the lower receiver 26 is attached to the jig 50 in this way, the lower receiver 26 can be moved by moving the jig 50.

[0054] In FIG. 1, the magazine elevator 42 has a lifting table 42B having a shape that spreads along a horizontal plane. The magazine 41 is placed on the lifting table 42B, and when the magazine elevator 42 moves the lifting table 42B in the vertical direction, the magazine 41 moves up and down with respect to the printing unit 2.

[0055] In FIG. 1, a change mechanism 60 for performing a switching (changing) operation of the mask 15 or the jig 50 positioned at the mask installation position MI is provided between the printing unit 2 and the storage unit 3. The change mechanism 60 is composed of a loading and unloading mechanism unit 61 positioned on the storage unit 3 side and a moving mechanism unit 62 positioned on the printing unit 2 side.

[0056] The loading and unloading mechanism unit 61 performs an operation of loading and unloading the mask 15 or the jig 50 in the storage unit 3 (magazine 41) from and to the printing unit 2. The moving mechanism unit 62 moves the mask 15 or the jig 50 taken out from the storage unit 3 by a rod part 62R that can protrude and retract downward on the guide rail 14 and carries it into the printing unit 2 (specifically, moves it to the mask installation position MI), and performs an unloading operation of moving the mask 15 or the jig 50 positioned at the mask installation position MI on the guide rail 14 and moving it to the storage unit 3 side. The moving mechanism unit 62 does not have a self-propelled mechanism and moves in the Y direction together with the printing head 17 while being connected to the printing head 17.

[0057] FIG. 10 shows the control system of the printing apparatus 1. A control device 70, which is a control unit of the printing apparatus 1, controls the loading, holding, and unloading operations of the substrate KB by the substrate holding unit 12, the movement in the XY plane and the lifting and lowering operations of the substrate holding unit 12 by the substrate holding unit moving mechanism 13, the imaging operations of the printing camera 16 (the lower imaging unit 16a and the upper imaging unit 16b), the lifting and lowering operations of the squeegee 17S by the squeegee lifting and lowering unit 17M, and the movement operations of the printing head 17 by the printing head moving mechanism 17K. Further, the control device 70 controls the adsorption and holding operations of the lower receiver 26 and the substrate KB through the installation table 25, the operations of the four lifting cylinders 31 that are lifting means, and the operations of the two operation cylinders 33 that constitute the support release mechanism 32. The control device 70 also controls the lifting and lowering operations of the magazine 41 by the magazine lift 42 and the change operations of the mask 15 or the jig 50 by the change mechanism 60.

[0058] In FIG. 10, the control device 70 includes a storage unit 71. The storage unit 71 includes a program storage unit 72 that stores a work program in which the procedure of the printing operation for printing the paste Pst on the substrate KB is recorded, and a data storage unit 73 that stores various types of data.

[0059] In FIG. 7, on the front surface ZM of the mask 15, a mask identifier KS1 for identifying the mask 15 is provided. Also, as shown in FIGS. 8(a) and 8(b), on the front surface ZM of the jig 50, a jig identifier KS2 for identifying the jig 50 is provided. The mask identifier KS1 and the jig identifier KS2 each consist of, for example, a QR code (registered trademark).

[0060] As described above, a plurality of types of lower receivers 26 corresponding to a plurality of types of substrates KB are prepared, and each of the various lower receivers 26 is attached to a dedicated jig 50. Therefore, when the lower receiver 26 is removed from the jig 50 and then reattached to the jig 50, the lower receiver 26 is always attached to the dedicated jig 50. Accordingly, a one-to-one relationship is maintained between the lower receiver 26 and the jig 50 to which the lower receiver 26 is attached.

[0061] Next, the flow of the printing operation for printing the paste Pst on the substrate KB, which is executed by the printing apparatus 1 having such a configuration, will be described based on the flowchart of FIG. 11. When performing the printing operation, as a preliminary preparation, the operator OP attaches each of the plurality of types of lower receivers 26 used in the printing operation to dedicated jigs 50. Then, a storage operation is performed in which the lower receiver 26 attached with the jig 50 is stored in the slot 41S of the magazine 41.

[0062] When the operator OP attaches the lower receiver 26 to the jig 50, for example, the first information reader 81 composed of a handy type information reader is made to read the individual identification information of the lower receiver 26 (referred to as "lower receiver information") and the individual identification information of the jig 50 to which the lower receiver 26 is attached (referred to as "jig information"). Specifically, the first information reader 81 is made to recognize the lower receiver identifier (upper surface side identifier 26P or lower surface side identifier 26Q) provided on the upper surface of the lower receiver 26, and the lower receiver information recorded in the lower receiver identifier is read, and the jig identifier KS2 provided on the jig 50 is made to be recognized by the first information reader 81, and the jig information recorded in the jig identifier KS2 is read (FIG. 12). The lower receiver information and the jig information read by the first information reader 81 are transmitted to the control device 70.

[0063] When the control device 70 receives the jig information and the lower receiver information transmitted from the first information reader 81, it acquires information on the correspondence relationship (referred to as "first correspondence information J1") in which the lower receiver information and the jig information are made to correspond one-to-one for each of the plurality of lower receivers 26 (first correspondence information acquisition step. Step ST1 shown in FIG. 11). Specifically, the control device 70 acquires the first correspondence information J1 for each of the plurality of lower receivers 26 based on the individual identification information (lower receiver information) of the lower receiver 26 read from the lower receiver identifier (upper surface side identifier 26P or lower surface side identifier 26Q) by the first information reader 81 and the individual identification information (jig information) of the jig 50 read from the jig identifier KS2 by the first information reader 81.

[0064] Thus, in the present embodiment, the control device 70 is the first correspondence information acquisition means for acquiring the first correspondence information J1, which is information on the correspondence relationship between the lower receiver 26 and the jig 50 to which the lower receiver 26 is attached, for each of the plurality of lower receivers 26. When the control device 70 acquires the first correspondence information J1, it stores the data of the first correspondence information J1 in the storage unit 71 (specifically, the data storage unit 73) (FIGS. 10 and 12).

[0065] In FIG. 1, a second information reader 82 is provided in front of the storage unit 3. The second information reader 82 has an imaging field of view directed rearward. When the control device 70 detects that the above-described storage operation by the operator OP has been completed, while raising and lowering the magazine 41 by the magazine elevator 42, the second information reader 82 is caused to read the individual identification information of the mask 15 (referred to as "mask information") recorded on the mask 15 stored in each slot 41S and the individual identification information of the jig 50 (the jig information described above) recorded on the jig 50 (FIG. 13).

[0066] When the second information reader 82 reads the mask information or the jig information, it transmits the read mask information or jig information to the control device 70 (FIG. 13). At this time, the second information reader 82 also transmits information on the position of the slot 41S in which the mask 15 or the jig 50 is stored (referred to as "position inside the storage unit") to the control device 70.

[0067] When the control device 70 receives the mask information or the jig information and the information on the position inside the storage unit (position inside the storage unit information) of the mask 15 or the jig 50 from the second information reader 82, it obtains information on the correspondence relationship (the "second correspondence information J2") in which the mask information or the jig information and the position inside the storage unit information of the corresponding mask 15 or jig 50 are made to correspond one-to-one for each of the plurality of jigs 50 (second correspondence information acquisition step. Step ST2). Specifically, the control device 70 obtains the second correspondence information J2 based on the individual identification information (jig information) of the jig 50 read from the jig identifier KS2 and the information on the position inside the storage unit of the jig 50.

[0068] Thus, in the present embodiment, the control device 70 serves as second correspondence information acquisition means for obtaining the second correspondence information J2, which is information on the correspondence relationship between the jig 50 and the position inside the storage unit information of the jig 50, for each of the plurality of jigs 50. When the control device 70 obtains the second correspondence information J2, it stores the data of the second correspondence information J2 in the storage unit 71 (specifically, the data storage unit 73) (FIGS. 10 and 13).

[0069] When the control device 70 has acquired the first correspondence information J1 and the second correspondence information J2 as described above, based on the first correspondence information J1 and the second correspondence information J2, it pairs the individual identification information (lower receiver information) of the lower receiver 26, which is an exchange member, with the information on the position within the storage section of the jig 50 to which the lower receiver 26 is attached on a one-to-one basis. The resulting correspondence relationship information (referred to as "third correspondence information J3"; Fig. 14) is acquired for each of the plurality of lower receivers 26 (third correspondence information acquisition step; step ST3).

[0070] Thus, in this embodiment, the control device 70 serves as third correspondence information acquisition means for acquiring, for each of the plurality of lower receivers 26, third correspondence information J3, which is information on the relationship between the lower receiver 26 and the position within the storage section of the jig 50 to which the lower receiver 26 is attached, based on the acquired first correspondence information J1 and second correspondence information J2. When the control device 70 has acquired the third correspondence information J3, it stores the data of the third correspondence information J3 in the storage section 71 (specifically, the data storage section 73) (Fig. 10).

[0071] When the printing device 1 executes a printing operation for printing the paste Pst on the substrate KB, first, it executes a lower receiver installation operation of taking out a lower receiver 26 of a type corresponding to the type of the substrate KB to be produced from the storage section 3 and installing it on the installation table 25. In the lower receiver installation operation, the control device 70 first detects, by means of the storage section position detection section 74 (Fig. 10), the position within the storage section in which the lower receiver 26 to be installed on the installation table 25 is stored, based on the third correspondence information J3 stored in the storage section 71 (first storage section position detection step; step ST4).

[0072] When the control device 70 has detected the position within the storage section of the lower receiver 26 to be installed, it operates the magazine elevator 42 to raise and lower the magazine 41. Then, it positions the jig 50 located at the detected position within the storage section (slot 41S) at the height of the guide rail 14.

[0073] When the jig 50 is positioned at the height of the guide rail 14, the control device 70 carries the jig 50 into the printing unit 2 by the change mechanism 60 (Fig. 15(a) → Fig. 15(b)), and positions the jig 50 at the mask installation position MI above the installation table 25 (pre-installation jig position step. Step ST5). As a result, the jig 50 to which the lower receiver 26 is attached is in a state of being positioned above the installation table 25 together with the lower receiver 26 (Fig. 15(b), Fig. 16).

[0074] When the lower receiver 26 is positioned above the installation table 25, the control device 70 advances the printing unit camera 16 to the lower region of the jig 50. Then, the lower surface side identifier 26Q of the lower receiver 26 attached to the jig 50 is imaged by the printing unit camera 16 as an imaging means (specifically, the upper imaging unit 16b) (Fig. 17(a)).

[0075] When the control device 70 causes the printing unit camera 16 to image the lower surface side identifier 26Q, based on the imaging result, it reads the lower receiver information recorded in the lower surface side identifier 26Q. Then, it compares the read lower receiver information with the work program stored in the program storage unit 72 to determine whether the lower receiver 26 attached to the jig 50 is appropriate (the correct type specified in the work program) (pre-installation lower receiver confirmation step. Step ST6).

[0076] Thus, in the present embodiment, the determination unit 75 of the control device 70 performs individual identification of the lower receiver 26 provided with the lower surface side identifier 26Q from the lower surface side identifier 26Q imaged by the printing unit camera 16 as an imaging means, and serves as a determination means for determining the propriety of installing the lower receiver 26 on the installation table 25.

[0077] When the control device 70 determines that the lower receiver 26 attached to the jig 50 is not appropriate, it issues an alarm to the operator OP by an alarm means (not shown). On the other hand, when the determination result shows that the lower receiver 26 attached to the jig 50 is appropriate, the control device 70 operates the substrate holding part moving mechanism 13 to raise the elevating base 21, and operates the lifter 23 to raise the installation table base 24, bringing the installation table 25 closer to the jig 50 from below (Fig. 17(a) → Fig. 17(b)).

[0078] When the installation table 25 has risen to a predetermined height close to the jig 50, the control device 70 stops the rise of the installation table 25 and then operates the four elevating cylinders 31. Then, the upper ends of the piston rods 31R of the four elevating cylinders 31 are brought into contact with the four corners of the lower receiver 26. As a result, the lower receiver 26 supported by the jig 50 positioned above the installation table 25 is supported from below by the four elevating cylinders 31 (Fig. 18(a). Pre-release support process. Step ST7).

[0079] When the lower receiver 26 is supported by the four elevating cylinders 31, the control device 70 further moves the piston rods 31R of the four elevating cylinders 31 upward to push up the lower receiver 26. As a result, the plurality of protruding members 26T are separated upward from the protruding piece parts 54T of the two support members 54 (Fig. 18(b)). Note that this process of pushing up the lower receiver 26 is not necessarily required.

[0080] When the control device 70 operates the four elevating cylinders 31 to support (or further push up) the lower receiver 26, it then operates the two operation cylinders 33 to move the two racks 34 away from each other. When the two racks 34 move away from each other, the two pinions 35 rotate about the rotation support shafts 35J respectively, and the pair of operation rods 36 move from the lying position to the upright position respectively (Fig. 18(b) → Fig. 19(a)).

[0081] When a pair of operation rods 36 each move from the fallen position to the upright position, the pair of support members 54 are pushed by the pair of operation rods 36 and move in a direction away from each other (arrow A shown in Fig. 19(a)), and the support of the lower receiver 26 by the pair of support members 54 is released (support release step. Step ST8). As a result, the lower receiver 26 is supported only by the four elevating cylinders 31.

[0082] When the support of the lower receiver 26 by the pair of support members 54 is released, the control device 70 operates the four elevating cylinders 31 to move the piston rod 31R downward. As a result, the lower receiver 26 descends while maintaining a horizontal posture and contacts the upper surface of the installation table 25 (fixed-side installation table 25a and movable-side installation table 25b) (Fig. 19(a) → Fig. 19(b), Fig. 20(a) → Fig. 20(b)). When the lower surface of the lower receiver 26 abuts against the upper surface of the installation table 25, the control device 70 generates a vacuum adsorption force at the vacuum adsorption port 25K on the upper surface of the fixed-side installation table 25a. As a result, the front region of the lower receiver 26 is adsorbed and held on the upper surface of the fixed-side installation table 25a, and the lower receiver 26 is installed on the installation table 25 (installation step. Step ST9).

[0083] As described above, the pair of support release mechanisms 32 provided in the printing apparatus 1 according to the present embodiment are support release means for releasing the support of the lower receiver 26 by the pair of support members 54 by moving the pair of support members 54 in a direction away from each other in a state where the jig 50 supporting the lower receiver 26 is installed above the installation table 25. Further, the plurality (four) of elevating cylinders 31 support the lower receiver 26 from below before the support by the pair of support members 54 is released by the pair of support release mechanisms 32 which are support release means, and after the support by the pair of support members 54 is released by the pair of support release mechanisms 32, they are elevating means for lowering the lower receiver 26 and holding it on the installation table 25.

[0084] In this manner, the printing apparatus 1 in this embodiment is provided with a jig 50 that is installed above the installation table 25 in a state in which both ends of the lower support 26 (more specifically, the multiple protruding members 26T provided at both ends) are supported from below by a pair of support members 54 that are close to each other before the lower support 26 is installed on the installation table 25, and further includes a pair of support release mechanisms 32 as support release means that releases the support of the lower support 26 by the pair of support members 54 by moving the pair of support members 54 in a direction away from each other while the jig 50 supporting the lower support 26 is positioned above the installation table 25, and a plurality (four) of lifting cylinders 31 as lifting means that support the lower support 26 from below before the support by the pair of support members 54 is released by the pair of support release mechanisms 32, and lowers the lower support 26 to install it on the installation table 25 after the support by the pair of support members 54 is released by the pair of support release mechanisms 32.

[0085] When the lower support body 26 is set by the setting table 25, the control device 70 actuates the two operating cylinders 33 to move the two racks 34 in a direction approaching each other. When the two racks 34 move in a direction approaching each other, the two pinions 35 rotate about the pivot shafts 35J, and the pair of operating rods 36 move from the raised position to the lowered position. As a result, the pair of support members 54 move in a direction approaching each other by the biasing force of the biasing springs 55 (arrow B shown in FIG. 21(a)), and return to their original positions (positions before movement) (FIG. 21(a)).

[0086] When the pair of support members 54 have returned to their original positions, the control device 70 actuates the lifter 23 to lower the installation table base 24, and actuates the substrate-holding-part moving mechanism 13 to lower the substrate holding part 12 (arrow C shown in FIG. 21(b)). As a result, when the substrate holding part 12 returns to its original height position (FIGS. 21(b) and 22), the lower support installation work for holding the lower support 26 on the installation table 25 is completed.

[0087] When the lower receiver installation work is completed as described above, the control device 70 advances the printing unit camera 16 to the lower region of the jig 50, and causes the printing unit camera 16 (the lower imaging unit 16a in the study) to image the upper surface identifier 26P provided on the upper surface of the lower receiver 26 installed on the installation table 25 (FIG. 23).

[0088] When the control device 70 causes the printing unit camera 16 to image the upper surface identifier 26P of the lower receiver 26, the determination unit 75 (FIG. 10) recognizes the upper surface identifier 26P imaged by the printing unit camera 16 and acquires the individual identification information of the lower receiver 26 recorded in the upper surface identifier 26P. Then, by comparing the acquired individual identification information of the lower receiver 26 with the work program, it is determined whether the lower receiver 26 is properly installed on the installation table 25 (whether it is of the correct type specified in the work program) (post-installation determination step. Step ST10).

[0089] Thus, in the present embodiment, the determination unit 75 as the determination means identifies the individual of the lower receiver 26 provided with the upper surface identifier 26P from the upper surface identifier 26P imaged by the printing unit camera 16, which is the imaging means, and determines whether the lower receiver 26 is properly installed on the installation table 25.

[0090] If, as a result of the above determination by the determination unit 75, the lower receiver 26 installed on the installation table 25 is inappropriate (not of the correct type specified in the work program), the control device 70 issues an alarm to the operator OP by the aforementioned alarm means (not shown). On the other hand, if, as a result of the determination, the lower receiver 26 installed on the installation table 25 is appropriate (is of the correct type specified in the work program), the change mechanism 60 is operated to carry out the jig 50 from the mask installation position MI and return it to the magazine 41 in the storage unit 3 (post-installation jig return step. Step ST11).

[0091] Thus, in this embodiment, the change mechanism 60 is configured to return the jig 50 to the storage unit 3 after the lower receiver 26 is removed from the jig 50 taken out from the storage unit 3 and the jig 50 is placed on the installation table 25.

[0092] When the control device 70 returns the jig 50 after removing the lower receiver 26 to the magazine 41, it positions the mask 15 corresponding to the type of the substrate KB to be produced hereafter at the mask installation position MI. For this, first, the storage unit internal position detection unit 74 described above detects the storage unit internal position of the mask 15 to be positioned at the mask installation position MI based on the first correspondence information J1 stored in the storage unit 71 (mask storage unit internal position detection step. Step ST12).

[0093] When the control device 70 detects the storage unit internal position of the mask 15 to be positioned at the mask installation position MI, it operates the magazine elevator 42 to raise and lower the magazine 41. Then, it positions the mask 15 located at the detected storage unit internal position (that is, the mask 15 to be placed on the installation table 25) at the height of the guide rail 14.

[0094] When the mask 15 located at the detected storage unit internal position reaches the height of the guide rail 14, the control device 70 transports the mask 15 into the printing unit 2 by the change mechanism 60 (FIG. 24(a) → FIG. 24(b)) and positions it at the mask installation position MI (mask position step. Step ST13). As a result, the mask 15 is in a state of being located above the installation table 25 (FIG. 24(b)).

[0095] When the mask 15 is positioned at the mask installation position MI, paste Pst is supplied onto the mask 15. This supply of the paste Pst is performed manually by the operator OP or automatically by a paste supply device (not shown).

[0096] When the paste Pst is supplied onto the mask 15, the control device 70 executes a printing process (step ST14). In the printing process, the control device 70 first operates the conveyor 22 of the substrate holding unit 12 to carry in the substrate KB. After carrying in the substrate KB, the lifter 23 is operated to raise the installation table base 24 (Fig. 4(a) → Fig. 4(b)). As a result, the lower receiving body 26 rises together with the installation table 25, and the substrate KB is received from below by the lower receiving body 26 (Fig. 25). When the substrate KB is received from below, an adsorption force is generated in the vacuum chuck holes 26C of the lower receiving body 26 to adsorb and hold the substrate KB on the lower receiving body 26.

[0097] After the substrate KB is adsorbed and held on the lower receiving body 26, the control device 70 operates the lifter 23 to raise the installation table base 24 (arrow D shown in Fig. 26). Then, after clamping the substrate KB with the clamp 27 (arrow E shown in Fig. 26), the installation table base 24 is further raised so that the upper surface of the substrate KB is at the same height as the upper surface of the clamp 27. As a result, the substrate KB is held in the substrate holding unit 12.

[0098] When the substrate KB is held in the substrate holding unit 12, the control device 70 advances the printing unit camera 16 to the area between the substrate KB and the mask 15. Then, an alignment mark (not shown) provided on the substrate KB is imaged by the lower imaging unit 16a below the printing unit camera 16, and a positioning mark (not shown) provided on the mask 15 is imaged by the upper imaging unit 16b (Fig. 27). The control device 70 grasps the positional relationship between the substrate KB and the mask 15 from the two relative positions for positioning obtained by these imaging operations.

[0099] When the control device 70 grasps the positional relationship between the substrate KB and the mask 15, it operates the substrate holding part moving mechanism 13 to move the substrate holding part 12 within the XY plane so that the electrode pattern of the substrate KB and the pattern opening 15K of the mask 15 coincide in plan view. Then, when the electrode pattern of the substrate KB and the pattern opening 15K of the mask 15 coincide in plan view, the substrate holding part 12 is raised (arrow F shown in FIG. 28), the substrate KB is brought into contact with the mask 15 from below (FIG. 28), and the electrode pattern of the substrate KB and the pattern opening 15K of the mask 15 are aligned.

[0100] When the substrate KB comes into contact with the mask 15, the control device 70 operates the squeegee elevating part 17M to lower one of the two squeegees 17S. Then, when the lower end of the lowered squeegee 17S abuts on the upper surface of the mask 15, the printing head 17 is moved in the Y direction (arrow G shown in FIG. 2), and the paste Pst on the mask 15 is scraped by the squeegee 17S. As a result, the paste Pst is filled into the pattern opening 15K, and the paste Pst is applied to the electrode pattern on the substrate KB.

[0101] When the paste Pst is applied to the electrode pattern on the substrate KB, the control device 70 operates the substrate holding part moving mechanism 13 to lower the substrate holding part 12 and performs an operation of separating the substrate KB downward from the mask 15 (so-called plate separation). When the plate separation is completed, the control device 70 operates the conveyor 22 to carry out the substrate KB to the outside (substrate carrying out). Thereby, the printing for each substrate KB is completed.

[0102] When the above printing process is repeatedly executed and a model change for changing the type of the produced substrate KB is to be performed, the control device 70 first returns the used mask 15 to the magazine 41 in a procedure opposite to that when the mask 15 is positioned at the mask installation position MI (mask returning process. Step ST15). Then, after removing the lower receiver 26 (used lower receiver 26) installed on the installation table 25, a lower receiver replacement operation for installing the lower receiver 26 corresponding to the next model on the installation table 25 is executed.

[0103] When performing the lower receptor exchange operation, the control device 70 advances the printing unit camera 16 to the lower region of the jig 50. Then, the upper surface side identifier 26P of the lower receptor 26 installed on the installation table 25 is imaged by the lower imaging unit 16a, and the individual identification information (lower receptor information) of the lower receptor 26 is read (Fig. 23).

[0104] After the control device 70 reads the individual identification information of the lower receptor 26, based on the read individual identification information and the third correspondence information J3 (Fig. 14) obtained in step ST3, it detects the position inside the storage part of the jig 50 corresponding to the lower receptor 26 installed on the installation table 25 (the lower receptor 26 that is about to be removed and is a used lower receptor 26) (the second storage part internal position detection step. Step ST16). Specifically, the control device 70 detects the position inside the storage part of the jig 50 returned to the storage part 3 in step ST11 above (the jig 50 dedicated to the lower receptor 26 that is about to be removed) based on the third correspondence information J3. After the control device 70 detects the position inside the storage part of the jig 50 corresponding to the lower receptor 26 that is about to be removed, it operates the magazine elevator 42 to raise and lower the magazine 41. Then, the jig 50 located at the detected position inside the storage part is positioned at the height of the guide rail 14.

[0105] Thus, in this embodiment, when the lower receptor 26 installed on the installation table 25 is removed from the installation table 25 and returned to the storage part 3, the second storage part internal position detection step of detecting the position inside the storage part of the jig 50 returned to the storage part 3 by the change mechanism 60 in step ST11 based on the third correspondence information J3 is executed.

[0106] When the jig 50 is positioned at the height of the guide rail 14, the control device 70 causes the change mechanism 60 to carry the jig 50 into the printing unit 2 (arrow H shown in Fig. 29). Then, the jig 50 is positioned at the mask installation position MI (used jig position before removal process. Step ST17). As a result, the jig 50 corresponding to the lower receiving body 26 to be removed from the installation table 25 is in a state of being positioned above the installation table 25. In the state where the jig 50 is positioned at the mask installation position MI, the lower receiving body 26 to be removed is positioned below the jig 50 (Fig. 29).

[0107] When the control device 70 positions the jig 50 at the mask installation position MI, it removes the used lower receiving body 26 to be removed from the installation table 25 and attaches it to the jig 50 (lower receiving body removal and attachment process. Step ST18). The procedure for removing the used lower receiving body 26 from the installation table 25 and attaching it to the jig 50 is the reverse of the procedure for removing the lower receiving body 26 from the jig 50 and installing it on the installation table 25 described above.

[0108] When the control device 70 attaches the used lower receiving body 26 to the jig 50, it returns the jig 50 with the used lower receiving body 26 attached to the storage unit 3 in the same procedure as when the jig 50 after the lower receiving body 26 is installed on the installation table 25 is returned to the storage unit 3 (jig return process after removal. Step ST19). After returning the lower receiving body 26 to the storage unit 3 in this way, the control device 70 determines whether to perform a model change and continue the printing operation (judgment process. Step ST20). If a model change is performed and the printing operation is to be continued, it returns to the first storage unit internal position detection process in Step ST4 to prepare for attaching the lower receiving body 26 corresponding to the next model to the installation table 25. If a model change is not performed, the printing operation is terminated.

[0109] Thus, in this embodiment, the operation of replacing the lower receiver 26, which is an exchange member, with respect to the installation base 25 (member replacement method) includes a pre-installation jig positioning step (step ST5) of positioning a jig 50 that supports both ends of the lower receiver 26 by a pair of support members 54 above the installation base 25, a pre-release support step (step ST7) of supporting the lower receiver 26 supported by the jig 50 positioned above the installation base 25 from below by a plurality of lifting cylinders 31, a support release step (step ST8) of moving the pair of support members 54 in a direction away from each other while the lower receiver 26 is supported by the plurality of lifting cylinders 31 to release the support of the lower receiver 26 by the pair of support members 54, and an installation step (step ST9) of lowering the lower receiver 26 by the plurality of lifting cylinders 31 and installing it on the installation base 25.

[0110] Thus, in the printing apparatus 1 (member replacement method) according to this embodiment, when removing the lower receiver 26 from the jig 50 positioned above the installation base 25 and installing it on the installation base 25, first, the lower receiver 26 is supported from below by a plurality of lifting cylinders 31, and then, the pair of support release mechanisms 32 move the pair of support members 54 in a direction away from each other to release the support of the lower receiver 26. After the support is released, the lower receiver 26 is lowered to the installation base 25 by the lifting cylinders 31. Therefore, when removing the lower receiver 26 from the jig 50 and installing it on the installation base 25, the lower receiver 26 only moves in a simple vertical direction with respect to the jig 50.

[0111] Therefore, in the printing apparatus 1 (member replacement method) according to this embodiment, unlike the conventional method, when attaching and detaching the lower receiver 26 to and from the jig 50, there is no need for a complicated movement such as lifting the lower receiver 26 with respect to the jig 50 and then moving the lower receiver 26 horizontally with respect to the jig 50 and then lowering it. Thus, according to the printing apparatus 1 (member replacement method) in this embodiment, the attachment and detachment time of the lower receiver 26 with respect to the jig 50 can be shortened.

[0112] In the printing apparatus 1 according to the present embodiment, the mask 15 is moved above the installation table 25 along a pair of guide rails 14 extending in the horizontal direction, and the jig 50 has a shape that can move along the guide rails 14. Therefore, the jig 50 can be moved on the guide rails 14 that move the mask 15 and moved above the installation table 25, and is easily adaptable to the printing apparatus 1 having the mask automatic exchange function with the change mechanism 60 as in the present embodiment.

[0113] In the present embodiment, a first correspondence information acquisition step (step ST1) of acquiring first correspondence information J1, which is information on the correspondence relationship between the lower receiver 26, which is a replacement member, and the jig 50 to which the lower receiver 26 is attached, which is part of the printing operation performed by the printing apparatus 1, for each of the plurality of lower receivers 26; a second correspondence information acquisition step (step ST2) of acquiring second correspondence information J2, which is information on the correspondence relationship between the jig 50 and the position within the storage unit 3 of the storage area (slot 41S) in which the jig 50 is stored, for each of the plurality of jigs 50; a third correspondence information acquisition step (step ST3) of acquiring third correspondence information J3, which is information on the correspondence relationship between the lower receiver 26, which is a replacement member, and the position within the storage unit of the jig 50 to which the lower receiver 26 is attached, for each of the plurality of lower receivers 26 based on the first correspondence information J1 and the second correspondence information J2; and a first storage unit position detection step (step ST4) of detecting the position within the storage unit of the lower receiver 26 based on the third correspondence information J3 acquired in the third correspondence information acquisition step when taking out the lower receiver 26 to be installed on the installation table 25 from the storage unit 3 and installing it on the installation table 25 constitute the member management method in the printing apparatus 1 according to the present embodiment.

[0114] The lower receiver 26 attached to the jig 50 is difficult to read individual identification information from its exchange member identifier (lower receiver identifier, upper surface side identifier 26P, lower surface side identifier 26Q), which is its identifier, when it is stored in the storage unit 3. However, in the present embodiment, since the individual identification information (lower receiver information) of the lower receiver 26 is managed in association with the individual identification information (jig information) of the jig 50, even in a situation where it is difficult to read information from the individual identifier of the lower receiver 26 because the lower receiver 26 is attached to the jig 50, by reading information from the individual identifier (jig identifier KS2) of the jig 50, the individual identification information of the lower receiver 26 can be easily obtained. Furthermore, in the present embodiment, since the individual identification information of the jig 50 and the information on the position within the storage unit are managed in association with each other, even when the lower receiver 26 is stored in the storage unit 3 while attached to the jig 50, the position of the lower receiver 26 can be easily detected from the information on the position within the storage unit. Thus, according to the present embodiment, the management of the lower receiver 26 in a state attached to the jig 50 can be easily performed.

[0115] Also, in the printing apparatus 1 according to the present embodiment, from below the lower receiver 26 located above the installation base 25 in order to be installed on the installation base 25, the lower surface side identifier 26Q provided on the lower surface of the lower receiver 26 is imaged by the printing unit camera 16 which is an imaging means, the individual identification of the lower receiver 26 is performed from the lower surface side identifier 26Q obtained by the imaging, and whether or not the lower receiver 26 should be installed on the installation base 25 is determined. Therefore, according to the printing apparatus 1 in the present embodiment, immediately before the lower receiver 26 is installed on the installation base 25, it can be confirmed whether the lower receiver 26 is the one that should be installed on the installation base 25, and mistakes such as attaching a lower receiver 26 that should not be installed on the installation base 25 to the installation base 25 can be prevented in advance.

[0116] Furthermore, an upper surface side identifier 26P for identifying the lower receiver 26 is also provided on the upper surface of the lower receiver 26, and the lower receiver 26 can be individually identified by imaging the upper surface side identifier 26P. Therefore, in the printing apparatus 1 according to the present embodiment, it is also possible to determine whether or not the lower receiver 26 installed on the installation table 25 is properly installed on the installation table 25.

[0117] As described above, in the printing apparatus 1 according to the present embodiment, from below the lower receiver 26 positioned above the installation table 25 for being installed on the installation table 25, the lower surface side identifier 26Q provided on the lower surface of the lower receiver 26 is imaged by the printing unit camera 16 which is an imaging means, the lower receiver 26 is individually identified from the lower surface side identifier 26Q obtained by the imaging, and whether or not the lower receiver 26 is properly installed on the installation table 25 is determined. Therefore, according to the printing apparatus 1 in the present embodiment, immediately before the lower receiver 26 is installed on the installation table 25, it is possible to confirm whether or not the lower receiver 26 is the one to be installed on the installation table 25, and it is possible to prevent in advance the mistake of attaching a lower receiver 26 that should not be installed on the installation table 25 to the installation table 25.

[0118] Although the embodiments of the present invention have been described so far, the present invention is not limited to those described above, and various modifications and the like are possible. For example, the configurations such as the support release means and the lifting means shown in the above embodiments are examples, and other configurations may be provided as long as they function to perform the required operations. The jig 50 also has a pair of support members 54 that can be brought close to and separated from each other, and as long as it is positioned above the installation table 25 in a state where both ends of the replacement member before being installed on the installation table 25 are supported from below by the pair of support members 54, it may have other configurations.

[0119] Also, in the above-described embodiment, the replacement member has been described as the receiving member 26 that supports the substrate KB. However, the replacement member is not limited to the receiving member 26, and may be a member such as a cleaning unit that cleans the lower surface of the mask 15 or a paste supply pod that supplies the paste Pst.

[0120] Also, in the above-described embodiment, the substrate processing apparatus to which the present invention is applied has been described as the printing apparatus 1 that performs a printing operation of printing the paste Pst on the substrate KB via the mask 15. However, the substrate processing apparatus to which the present invention is applied may be any apparatus that includes a replacement member and an installation table on which the replacement member is detachably installed, and that performs a predetermined process on the substrate by installing the replacement member on the installation table, and is not limited to the printing apparatus 1.

Industrial Applicability

[0121] Provided is a substrate processing apparatus capable of confirming whether a replacement member is a replacement member to be installed on an installation table immediately before the replacement member is installed on the installation table.

Explanation of Signs

[0122] 1 Printing apparatus (substrate processing apparatus) 2 Printing unit 3 Storage unit 15 Mask 16 Printing unit camera (imaging means) 25 Installation table 25K Vacuum suction port 26 Receiving member (replacement member) 26P Upper surface side identifier 26Q Lower surface side identifier 31 Lifting cylinder 32 Support release mechanism 41 Magazine 41S Slot 42 Magazine elevator 51 Frame 54 Support member 55 Biasing spring 60 Change mechanism 70 Control device 71 Storage unit 74 Storage location detector within the storage section 75 Judgment unit (judgment means) 81 First information reader 82 Second information reader J1 First corresponding information J2 Second corresponding information J3 Third corresponding information KS1 Mask identifier KS2 Fixture identifier KB Substrate

Claims

1. A substrate processing apparatus comprising an exchange member and an installation table on which the exchange member is detachably installed, and performing a predetermined process on a substrate by installing the exchange member on the installation table, a lower surface side identifier provided on the lower surface of the exchange member and recording individual identification information of the exchange member, imaging means for imaging the lower surface side identifier from below the exchange member positioned above the installation table for being installed on the installation table, judgment means for performing individual identification of the exchange member from the lower surface side identifier imaged by the imaging means and judging whether the exchange member is properly installed on the installation table, A substrate processing apparatus comprising the above.

2. The installation table is configured to suck the lower surface of the exchange member at a vacuum suction port provided on the upper surface, and the lower surface side identifier is provided in a region of the lower surface of the exchange member facing the vacuum suction port. The substrate processing apparatus according to Claim 1.

3. An upper surface side identifier recording individual identification information of the exchange member is provided on the upper surface of the exchange member. The imaging means images the upper surface side identifier from above the exchange member in a state where the exchange member is installed on the installation table, and the judgment means performs individual identification of the exchange member from the upper surface side identifier imaged by the imaging means and judges whether the exchange member is properly installed on the installation table. The substrate processing apparatus according to Claim 1.

4. The exchange member is composed of a receiving body for receiving the substrate from below, a mask with which the upper surface of the substrate supported by the receiving body comes into contact, a squeegee for printing paste on the substrate through the mask by scraping the paste on the mask when the upper surface of the substrate comes into contact with the mask, and a jig to which the receiving body is attached before being installed on the installation table. The substrate processing apparatus according to any one of Claims 1 to 3.

5. The upper surface side identifier is provided in a region on the upper surface of the receiving body that is outside the substrate in a state where the receiving body receives the substrate from below. The substrate processing apparatus according to Claim 4, which cites Claim 3.

Images