Infrared bolometer using semiconducting carbon nanotubes and method of manufacturing the same

JP2025093435APending Publication Date: 2025-06-24NEC CORP
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Patent Information

Application Number
JP2023209069
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-12-12
Publication Date
2025-06-24

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Abstract

To reduce the resistance value of an infrared bolometer using a semiconductor type carbon nanotube.SOLUTION: An infrared bolometer has: a source electrode and a drain electrode provided apart from each other; a carbon nanotube film serving as a light detection unit that is present between the two electrodes and at least partially overlaps and is in electrical contact with the two electrodes; and a gate electrode provided above or below the carbon nanotube film via an insulating film.SELECTED DRAWING: Figure 1A
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    JP2018148138A